Automatic test equipment for testing one or more devices under test and method of operating the automatic test equipment

Abstract

An automatic test equipment for testing one or more DUTs includes a test head and a DUT interface. The DUT interface includes a plurality of spring loaded pin blocks, such as groups or fields of spring loaded pins. For example, the DUT interface is configured to establish an electronic signal path between the test head and a DUT board or load board that supports the DUT or provides a connection to the DUT. The automatic test equipment is configured to allow a distance between at least two of the spring loaded pin blocks to vary.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to automatic test equipment for testing one or more devices under test (DUTs). Additional embodiments relate to methods of operating automatic test equipment for testing one or more devices under test (DUTs). Specifically, embodiments of the present disclosure relate to flexible DUT interfaces or adaptable DUT interfaces. Background Art

[0002] Semiconductor test systems are used for testing of devices such as semiconductor devices or other electronic devices. For example, one or more devices to be tested may be arranged on a wafer. In order to perform the test, the device under test (DUT) needs to be connected to a test device such as an electronic instrument. In order to quickly and effectively test multiple DUTs, the DUTs are usually placed on a DUT board, which provides connectors to the DUTs, which are arranged to match the specific arrangement of the connectors of the DUTs. Then, the DUT board can be connected to a test head through a DUT interface. The test head usually provides a connection to the test equipment. Therefore, the DUT board, the DUT interface, and the test head provide a connection between the DUT and the test equipment. As described above, the contacts of the DUT board for contacting the various contact pads of the DUT can be arranged to match a specific DUT. In contrast, the DUT board is usually arranged according to a fixed layout to connect the contacts of the DUT to the relative contacts of the DUT interface so that multiple DUT boards for various DUTs can be used with the same DUT interface. In other words, the DUT interface of a semiconductor test system usually has a certain fixed size, and the connection between the test system and the DUT board (or load board) is located at a specific position.

[0003] There are various solutions for connecting a test head to a DUT board. Document SG193487A1 shows a docking device for connecting a semiconductor probe to a semiconductor processor, the docking device having a probe site and a processor site connection device and a displacement device, which allows translation and guided displacement of the probe side connection device toward or away from each other relative to the processor side connection device.

[0004] Document CN101002363A shows a wafer test assembly comprising a plurality of probe head substrates arranged like patches, one side of which is attached to a connector and the other side supports probes.

[0005] Document US 6377062B1 proposes a floating interface assembly that provides a signal path between an integrated circuit test head and contact pads on a probe card or load board that accesses an integrated circuit to be tested. Spring-loaded pins or other contactors for contacting the contact pads are mounted on the interface assembly and linked to the test head via a flexible conductor.

[0006] Document JP 2017096949A shows a probe system, which includes a configurable universal probe rod having multiple probe blocks, the multiple probe blocks including multiple probe pins, the multiple probe pins are positioned to electrically engage with multiple unit contact pads of multiple panels of a device under test at the same time to transmit multiple electrical test signals; and an alignment system, which is configured to align the multiple probe pins with multiple self-contact pads of multiple panels of the device under test.

[0007] In addition, document WO0073905A2 shows a massively parallel interface for electronic circuits. Document US9921266B1 shows a general universal device interface for automatic test equipment for semiconductor testing. Document WO2008070466A2 proposes sharing resources in a system for testing semiconductor devices. Document KR200427961Y1 shows a manipulator in a device for detecting a panel. Document JP2013137286A shows an electronic component testing device.

[0008] Nevertheless, there is still a need for a concept for testing a DUT which provides an improved compromise between time efficiency and cost efficiency for testing different DUTs. Summary of the invention

[0009] According to an embodiment of the present invention, an automatic test device for testing one or more DUTs is provided, the automatic test device comprising a test head and a DUT interface. The DUT interface comprises a plurality of spring-loaded pin blocks, such as a group or field of spring-loaded pins. For example, the DUT interface is configured to establish an electronic signal path between the test head and a DUT board or a load board that supports the DUT or provides a connection to the DUT. The automatic test device is configured to allow the distance between at least two spring-loaded pin blocks to change.

[0010] For example, the test head is configured to send or receive electrical signals to or from the spring-loaded pins of the DUT interface, or to establish an electrical signal path between the spring-loaded pins of the DUT interface and a test instrument (e.g., a source of electrical signals or a measurement device of electrical signals). For example, the spring-loaded pins of the DUT interface can be configured to contact contact pads or connectors of the DUT board.

[0011] The automatic test equipment relies on the following concept: the DUT interface has a plurality of spring-loaded pin blocks with variable distances, and the DUT interface provides high flexibility in arranging the spring-loaded pin blocks, thereby enhancing the flexibility of the layout or design of the DUT board that the DUT interface will contact. The spring-loaded pin provides a means for contacting the DUT board or another circuit board particularly quickly, while the electrical contact between the spring-loaded pin and the contact pad or connector can still be very good. For example, compared with a plug / socket connection, the position of the spring-loaded pin relative to the center of the contact pad to be contacted by the spring-loaded pin can have a relatively large tolerance without including the connection. For example, the DUT board can have a DUT board plane, on which the contacts to be contacted by the DUT interface are arranged. The use of spring-loaded pins can provide a large allowable tolerance for the lateral alignment of the spring-loaded pins or spring-loaded pin blocks relative to the DUT board plane and the vertical or vertical position. For example, the lateral tolerance can be defined by the lateral size of the contact pad of the DUT board, while the longitudinal tolerance can be defined by the compressibility of the spring-loaded pins.

[0012] By changing the distance between the two spring-loaded pin blocks of the DUT interface, the position of the two spring-loaded pin blocks (i.e., the layout of the DUT interface) can be adapted to the layout or position of the contact pads or connectors of the DUT board. Therefore, a variety of different DUT boards, such as DUT boards with different sizes or contact pad spacings, can be used with automatic test equipment. Therefore, the automatic test equipment reduces the constraints on the design of the DUT board, thereby allowing a flexible design of the DUT board without paying too much or even unaffordable efforts to adapt or replace the automatic test equipment. Making the connections between the test system and the DUT board far apart from each other will result in an increase in space for multiple DUTs (multi-location settings) and a large amount of space for supporting electronic components (e.g., relays, bypass capacitors, etc.). On the other hand, bringing the connectors closer together makes the required DUT board smaller, cheaper, and the routing to the DUT is also shorter, thereby enhancing signal performance.

[0013] An automatic test equipment that allows to change the distance between at least two spring loaded pin blocks helps to adjust the layout of the DUT interface according to the layout of the DUT board, thereby providing a fast adaptation of the automated equipment to various DUT boards without changing the test head or the DUT interface. Therefore, the expansion for different test heads or DUT interfaces can be saved and time-saving operation of the automatic test equipment can be permitted. Since the spring loaded pins can provide a tolerance for the positioning of the spring loaded pins relative to the contact pads, the use of spring loaded pins in combination with the change of the position of the spring loaded pin blocks is very beneficial. For example, the requirements for the accuracy of the movement of the spring loaded pin blocks can be reduced by using spring loaded pins compared to using a plug / socket connection.

[0014] According to aspects of the invention, connector fields or blocks of spring loaded pins may be moved out or pushed together to support different requirements, such as lower cost, smaller DUT boards with less component space, or larger DUT boards with more component space.

[0015] According to an embodiment, an automatic test equipment includes two sets of spring loaded pin blocks, and the automatic test equipment is configured to allow a distance between a first set of spring loaded pin blocks and a second set of spring loaded pin blocks to vary.

[0016] In case there are two sets of spring loaded pin blocks, the variable distance between them allows for the flexibility of designing a set of spring loaded pin blocks that can move together. The common movement of the spring loaded pin blocks within a set ensures fast and precise movement of the spring loaded pin blocks.

[0017] According to an embodiment, the first group of spring-loaded pin blocks is a first row of spring-loaded pin blocks, and the second group of spring-loaded pin blocks is a second row of spring-loaded pin blocks. The first row of spring-loaded pin blocks is parallel to the second row of spring-loaded pin blocks, for example, within a tolerance of ±1 degree ±2 degrees or ±5 degrees. In addition, the automatic test equipment is configured to allow the distance between the first row of spring-loaded pin blocks and the second row of spring-loaded pin blocks to vary.

[0018] For example, the distance between the first and second rows of spring-loaded pin blocks may be measured perpendicular to a direction parallel to the rows of spring-loaded pins. The distance between the two rows of spring-loaded pin blocks may be varied so that the overlap between a first area covered by the first and second rows of spring-loaded pins before the distance variation and a second area covered by the first and second rows of spring-loaded pins after the distance variation is particularly small. In other words, the variation of the distance may be particularly effective.

[0019] According to an embodiment, the DUT interface comprises at least one set of spring loaded pin blocks including at least one field of spring loaded pin blocks.

[0020] According to an embodiment, the spring loaded pin block is coupled to the test head via a flexible cable (eg, a pogo cable).

[0021] For example, the spring-loaded pins can be connected to the test head separately by separate flexible cables. Due to the flexible coupling between the spring-loaded pins and the test head, the spring-loaded pin blocks can be easily moved without having to reconnect the spring-loaded pins to the test head after changing the distance between the spring-loaded pin blocks.

[0022] According to an embodiment, a linear guide is used to guide at least one spring loaded pin block to allow linear displacement of the spring loaded pin block (i.e. each or at least one spring loaded pin block), for example, to guide linear displacement. A linear guide is a simple structure that allows precise movement of a spring loaded pin block.

[0023] According to an embodiment, the first spring-loaded pin block is guided using a first linear guide, and the second spring-loaded pin block is guided using a second linear guide, so that the distance between the first spring-loaded pin block and the second spring-loaded pin block can be changed by shifting the first spring-loaded pin block and the second spring-loaded pin block in opposite directions along the respective linear guides. For example, the first spring-loaded pin block and the second spring-loaded pin block can be shifted in opposite directions by equal distances.

[0024] Moving the first spring-loaded pin block and the second spring-loaded pin block in opposite directions can ensure that when the first spring-loaded pin block and the second spring-loaded pin block are displaced, the geometric centers of the entities of the first spring-loaded pin block and the second block can remain close to or in the same position. Therefore, after changing the distance between the first and second spring-loaded pin blocks and the DUT board, the alignment of the DUT interface with the DUT board can be simplified.

[0025] According to an embodiment, at least one spring-loaded foot block is guided using a hinge. The hinge can convert a rotation into a translation. The rotation can be realized mechanically simply and cost-effectively and can be performed particularly quickly and precisely.

[0026] According to an embodiment, at least one spring loaded pin block is guided using a parallelogram linkage. The parallelogram linkage may provide the advantages of using a hinge and may further ensure parallel alignment of the plane on which the tips of the spring loaded pins are arranged relative to the plane of the DUT board.

[0027] According to an embodiment, the base part of the parallelogram linkage is mechanically connected (e.g., attached) to the test head and a movable carrier part of the parallelogram linkage, the movable carrier part carrying at least one spring-loaded pin block and guided parallel to the base part, e.g., within a tolerance of no more than + / -1 degree, or no more than + / -2 degrees, or no more than + / -5 degrees. For example, the movable carrier part may be guided using at least two parallel links between the movable carrier part and the base part.

[0028] According to an embodiment, the movable carrier part of the parallelogram linkage is movable to assume two different positions in which the distance between the base part of the parallelogram linkage and the movable carrier part of the parallelogram linkage is equal.

[0029] Since the parallelogram linkage is movable to two different positions, the two different positions can be defined by mechanical stops and can therefore be particularly precise. In addition, the vertical position of the at least one spring-loaded pin block (which refers to the direction perpendicular to the DUT board plane) can be equal for the two different positions of the parallelogram linkage. Therefore, the arrangement can allow, for example, to manually change the position of the at least one spring-loaded pin block accurately and quickly. Therefore, the configuration can provide a particularly cheap and precise implementation of an automatic test device.

[0030] According to an embodiment, the automatic test equipment comprises at least a first parallelogram linkage and a second parallelogram linkage. The first parallelogram linkage carries a first spring-loaded pin block, and the second parallelogram linkage carries a second spring-loaded pin block. The parallelogram linkage is adapted to, for example, be arranged and / or aligned so that, when viewed in a top view perpendicular to the plane of the DUT board, different spring-loaded pin blocks are allowed to move in opposite directions, for example, so that the projections of the motion vectors of the two different spring-loaded pin blocks onto the plane of the DUT board have opposite directions. This embodiment combines the advantages of the parallelogram linkage and the advantages of shifting two spring-loaded pin blocks in opposite directions along a linear guide.

[0031] According to an embodiment, the automatic test device comprises one or more actuators, such as motors or cylinders, which are adapted to achieve a change in the distance between at least two spring-loaded pin blocks. The actuators may allow a particularly precise change in the distance between at least two spring-loaded pin blocks, and may further allow an automatic change in the distance. Thus, the automatic test device may be implemented in an automatic test system.

[0032] According to another embodiment of the present invention, a method for operating an automatic test equipment for testing one or more devices under test is provided, the automatic test equipment comprising a test head and a DUT interface, wherein the DUT interface comprises a plurality of spring-loaded pin blocks, the method comprising changing a distance between at least two spring-loaded pin blocks of the DUT interface.

[0033] It should be noted that these methods are based on the same considerations as the corresponding automatic test equipment. In addition, these methods can be supplemented by any features, functions and details described herein with respect to the automatic test equipment, whether individually or in combination. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Hereinafter, embodiments according to the present application will be described with reference to the accompanying drawings.

[0035] Figure 1 An automatic test equipment according to an embodiment is shown.

[0036] Figure 2An arrangement of automatic test equipment and a DUT board according to an embodiment is shown.

[0037] Figure 3a , Figure 3b An automatic test equipment with a linear guide according to an embodiment is shown.

[0038] Figure 4 , Figure 5 An automatic test equipment having a parallelogram linkage according to an embodiment is shown.

[0039] Figure 6 An automatic test equipment having an actuator according to an embodiment is shown.

[0040] Figure 7 An arrangement of a set of spring loaded pin blocks of a DUT interface according to an embodiment is shown.

[0041] Figure 8 Two layouts of DUT interfaces according to embodiments are shown.

[0042] Fig. 9 A flow chart of a method for operating automatic test equipment according to an embodiment is shown. DETAILED DESCRIPTION

[0043] In the following description, the embodiments will be discussed in detail, but it should be understood that the embodiments provide many applicable concepts that can be embodied in various applications involving device testing and DUT interfaces. The specific embodiments discussed are only to illustrate a specific way to implement and use this concept, and do not limit the scope of the embodiments. In the following description of the embodiments, the same or similar elements or elements with the same function are provided with the same reference numerals or are identified by the same name, and the repeated description of the elements with the same reference numerals or the same name is usually omitted. Therefore, the description provided for the elements with the same or similar reference numerals or the same name is interchangeable or can be applied to each other in different embodiments. In the following description, multiple details are set forth to provide a more thorough explanation of the embodiments of the present disclosure. However, it will be clear to those skilled in the art that other embodiments can be practiced without these specific details. In other examples, known structures and devices are shown in the form of block diagrams rather than in detail to avoid blurring the examples described herein. In addition, unless otherwise explicitly stated, the features of the different embodiments described herein can be combined with each other.

[0044] Figure 1A schematic diagram of an automatic test equipment 10 for testing one or more DUTs according to an embodiment is shown. The automatic test equipment 10 includes a test head 18 and a DUT interface 11. The DUT interface 11 includes a plurality of blocks 12 of spring loaded pins 14. The automatic test equipment 10 is configured to allow the distance between at least two spring loaded pin blocks 12 to vary.

[0045] For example, the DUT interface 11 includes a plurality of spring-loaded pins 14. The spring-loaded pins 14 may include conductive tips, and the tips of the spring-loaded pins 14 are arranged on a main plane 15 of the DUT interface 11. The tips of the spring-loaded pins 14 can move relative to the body of the spring-loaded pins 14 in a direction perpendicular to the main plane 15. For example, the spring-loaded pins 14 can be compressed in a direction perpendicular to the main plane. The spring-loaded pins 14 of the DUT interface 11 are grouped in at least two spring-loaded pin blocks 12. The bodies of the spring-loaded pins 14 of the spring-loaded pin blocks 12 can be mechanically attached to each other by insulating materials, while the tips of the respective spring-loaded pins 14 of the spring-loaded pin blocks 12 can be individually moved in a direction perpendicular to the main plane. If the DUT interface 11 is pushed against the DUT board, the spring-loaded pins 14 can be compressed. Since each spring-loaded pin 14 can be compressed individually, the spring-loaded pin 14 can provide good electrical contact with the contact pads on the DUT board even if the surface of the DUT interface against which the DUT board is pushed is not flat, or even if the major plane of the DUT interface is not completely parallel to the surface of the DUT board against which the DUT board is pushed.

[0046] The distance 16 between at least two spring loaded pin blocks 12 may vary and may be measured parallel to the main plane 15 of the DUT interface.

[0047] The spring loaded pins 14 of the DUT interface 11 may be connected, for example, individually to a test head 18. The test head 18 may provide individual connections of a plurality of spring loaded pins to electronic instruments.

[0048] The automatic test equipment 10 may optionally be supplemented by any of the features, functions and details described herein with respect to other embodiments, whether alone or in combination.

[0049] Figure 2 A schematic diagram of an automatic test equipment 20 according to an embodiment is shown. The automatic test equipment 20 may correspond to the automatic test equipment 10. The automatic test equipment 10 includes a test head 28 and a DUT interface 21, which may correspond to the test head 18 and the DUT interface 11, respectively. Figure 2 Also shown is an exemplary DUT board 29 to be contacted by the automatic test equipment 20 .

[0050] The automatic test equipment 20 comprises two sets 23, 27 of spring loaded pin blocks, e.g. Figure 1 The automatic test equipment 20 is configured to allow the distance 26 between the first set 23 of spring loaded pin blocks and the second set 27 of spring loaded pin blocks to vary. For example, the spring loaded pin blocks can be attached to each other to form the sets 23, 27 of spring loaded pin blocks.

[0051] Figure 7 A schematic diagram of a DUT interface 81 is shown in a view along a direction perpendicular to the main plane 15 of the DUT interface 81. The DUT interface 81 may correspond to the DUT interfaces 11, 21. For example, Figure 2 A cross section of a DUT interface 21, 81 may be shown. The DUT interface 81 includes a plurality of spring loaded pin blocks arranged in a field 82 of spring loaded pin blocks. The field 82 of the DUT interface 81 is grouped into eight subgroups 84. The subgroups 84 are arranged to form a first group 83 and a second group 87 of spring loaded pin blocks, which may correspond to the groups 23, 27 of spring loaded pin blocks, respectively. The distance 86 between the groups 82, 83 of spring loaded pin blocks may vary. For example, the distance 86 may correspond to Figure 2 The distance is 26.

[0052] Thus, the first group 83 of spring loaded pin blocks may be a first row of spring loaded pin blocks and the second group 87 of spring loaded pin blocks may be a second row of spring loaded pin blocks. The first row of spring loaded pin blocks may be parallel to the second row of spring loaded pin blocks. The automated test equipment may be configured to allow the distance 86 between the first row of spring loaded pin blocks and the second row of spring loaded pin blocks to vary.

[0053] For example, the distance 86 of the DUT interface 81 can be adapted so that the DUT interface matches the V93000 tester. For example, the DUT interface 81 can have 8 groups. For example, each group consists of 2 fields, and each field has 9 spring-loaded pin blocks.

[0054] According to an embodiment, the spring loaded pin block is coupled to the test head 28 via a flexible cable 25. For example, the spring loaded pins 14 of the spring loaded pin block can be coupled to the test head 18, 28 by a flexible cable. This feature is independent of the grouping of the spring loaded pin blocks 12 into groups 23, 27 of spring loaded pin blocks 12.

[0055] According to an embodiment, the spring loaded pin block may be optionally moved to more than one position for greater flexibility.

[0056] Figure 3a and Figure 3bA schematic diagram of an automatic test device 30 according to an embodiment is shown. The automatic test device 30 may correspond to the automatic test devices 10, 20. The automatic test device 30 includes a test head 28, and also includes a first spring-loaded pin block 32 and a second spring-loaded pin block 33. The spring-loaded pin blocks 32, 33 include spring-loaded pins 24, which may correspond to the spring-loaded pins 14. The automatic test device 30 includes linear guides 37, 38. The linear guides 37, 38 provide a means for displacing or moving the spring-loaded pin blocks 32, 33 parallel to a major plane of the DUT interface 31 (which may be parallel to a major surface 25 of the DUT interface 31). The major surface 25 may correspond to about Figure 1 The main surface 15 is introduced.

[0057] The spring loaded pins 24 of the spring loaded pin blocks 32 , 33 are connected to the test head 28 via a flexible pogo cable 25 . Figure 3a and 3b Two different positions of the spring loaded pin blocks 32, 33 are shown. For example, Figure 3a shows the configuration of the spring loaded pin block at the internal position, and Figure 3a The distance 26 between the spring loaded pin blocks 32, 33 shown in FIG. 2 can be used for smaller DUT boards with limited board space, but thus it can be used in space-limited applications. For larger DUT boards that provide increased board space, such as Figure 3b As shown, the distance 26 between the spring loaded pin blocks 32, 33 may be increased, which may represent a configuration of the spring loaded pin blocks at an outer position.

[0058] Therefore, the at least one spring loaded pin block 32 may be guided using linear guides 37 , 38 to allow the spring loaded pin block 32 to be linearly displaced.

[0059] In other words, one implementation concept (aspect of the present invention) is to increase the space by using a linear guide.

[0060] For example, the first spring loaded pin block 32 is guided using the first linear guide 37, and the second spring loaded pin block 33 is guided using the second linear guide 38. The first spring loaded pin block 32 and the second spring loaded pin block 33 may be guided so that the distance between the first spring loaded pin block 32 and the second spring loaded pin block 33 may be changed by shifting the first spring loaded pin block 32 and the second spring loaded pin block 33 in opposite directions along the respective linear guides 37, 38.

[0061] According to an embodiment, the first spring loaded pin block 32 and the second spring loaded pin block 33 may be displaced in opposite directions by equal distances.

[0062] Figure 4 and Figure 5 A schematic diagram of an automatic test device 40 according to another embodiment is shown. The automatic test device 40 may correspond to the automatic test devices 10, 20. The automatic test device 40 includes a test head 28 and a DUT interface 41, which may correspond to the DUT interface 11, 21. The DUT interface 41 includes spring-loaded pin blocks 32, 33. A hinge may be used to guide at least one spring-loaded pin block. For example, a parallelogram linkage may be used to guide at least one spring-loaded pin block, for example, Figure 4 and Figure 5 Shown are parallelogram links 47, 48. In other words, another implementation concept (aspect of the present invention) is to increase space by using hinges.

[0063] According to an embodiment, a base part 45 of a parallelogram linkage 47 , 48 is mechanically connected to the test head 28 and a movable carrier part 46 of the parallelogram linkage 47 , 48 is guided parallel to the base part, the movable carrier part 46 carrying at least one spring-loaded pin block 32 , 33 .

[0064] For example, the movable carrier portion 46 can be moved relative to the base portion 45. The parallelogram linkages 47, 48 can guide the movement of the movable carrier portion 46 relative to the base portion 45 so that the angular alignment or rotation of the movable carrier portion 46 relative to the base portion 45 can be maintained during the movement, for example, the movable carrier portion 46 and the base portion 45 can remain parallel. For example, the base portion 45 and the movable carrier portion 46 of the parallelogram linkage 47 can be connected by at least two parallel links 49.

[0065] Figure 4 A first position of the parallelogram links 47 , 48 is shown, wherein the distance 26 between the spring loaded foot blocks 32 , 33 has a first value that is less than a second value. Figure 5 A second position of the parallelogram links 47, 48 is shown, wherein the distance 26 between the spring loaded pin blocks 32, 33 has a second value. Figure 1 The value of the distance 43 between the main plane 15 of the DUT interface 11 in the second position of the parallelogram links 47, 48 may be equal to the value of the distance 43 in the first position of the parallelogram links 47, 48. In other words, Figure 4 and Figure 5 The configuration of the spring loaded pin block in the inner position and the outer position can be represented separately.

[0066] Thus, the movable carrier portion 46 of the parallelogram linkage 47 is movable to assume two different positions in which the distance 43 between the base portion 45 of the parallelogram linkage 47 and the movable carrier portion 46 of the parallelogram linkage 47 is equal.

[0067] According to an embodiment, the automatic test equipment 40 includes at least a first parallelogram link 47 and a second parallelogram link 48. The first parallelogram link 47 carries the first spring-loaded pin block 32, and the second parallelogram link 48 carries the second spring-loaded pin block 33. The parallelogram links 47, 48 are adapted to allow different spring-loaded pin blocks (e.g., spring-loaded pin blocks 32, 33) to move in opposite directions when viewed in a top view perpendicular to the DUT board plane. For example, the DUT board plane can be parallel to the main plane 44 of the DUT interface 41, for example, within a tolerance of + / -5 degrees.

[0068] According to an embodiment, the automatic test equipment 10, 20, 30, 40 comprises one or more actuators 67 adapted to effect a change in the distance between at least two blocks of the spring-loaded pin. In other words, according to aspects of the invention, the change between positions can be accomplished, for example, manually or via an actuator. The actuator can, for example, be pneumatic (e.g., a cylinder) or electric (e.g., a motor).

[0069] For example, Figure 6 A schematic diagram of an automatic test device 60 according to an embodiment is shown. The automatic test device 60 may correspond to the automatic test devices 10, 20, 30. The automatic test device 60 includes a test head 28 and a DUT interface 61, and the DUT interface 61 includes spring-loaded pin blocks 32, 33. The DUT interface 61 may correspond to the DUT interfaces 11, 21. The DUT interface 61 includes an actuator 67, which is used to change the distance 26 between the spring-loaded pin blocks 32, 33. For example, each spring-loaded pin block 32, 33 can be moved or displaced by a separate actuator 67. According to another example, one actuator 67 is used to displace or move at least two spring-loaded pin blocks 32, 33 so that the movement of at least two spring-loaded pin blocks 32, 33 can be opposite, but at an equal movement rate. For example, the spring-loaded pin blocks 32, 33 can be guided by linear guides (e.g., linear guides 37, 38).

[0070] Figure 8Two examples of layouts of DUT interfaces 90, 91 are shown in a top view in a direction perpendicular to the main plane of the DUT interface. The DUT interfaces 90, 91 include spring-loaded pin blocks 92, which are grouped into a first group 93 and a second group 97 of spring-loaded pin blocks. The two shown examples of the DUT interface layout differ in the value of the distance 96 between the first group 93 and the second group 97 of spring-loaded pin blocks. For example, the automatic test equipment 10, 20, 30, 40, 60 can allow switching between the DUT interface layout 90 and the DUT interface layout 91 by adapting the distance 96.

[0071] Fig. 9 A flow chart is shown of a method 1000 of operating an automatic test equipment 10, 20, 30, 40, 60 for testing one or more DUTs according to an embodiment, the automatic test equipment including a test head 18, 28 and a DUT interface 11, 21, 31, 41, 61. The method 1000 includes changing 1010 a distance 16, 26, 86, 96 between at least two spring loaded pin blocks 12, 32, 33, 92 of the DUT interface 11, 21, 31, 41.

[0072] Further embodiments are defined by the following aspects, which may be combined with or supplement any of the details, features and functions disclosed herein. These aspects may be used alone or in combination.

[0073] According to an embodiment of the present invention, a DUT interface having a resizable device (or a device for changing size) is provided.

[0074] According to an embodiment, the variable-size device consists of or comprises a linear guide.

[0075] According to an embodiment, the variable-size device consists of or comprises a hinge type or a hinge.

[0076] According to an embodiment, a variable size device is used to change the position of the spring loaded pin block.

[0077] According to an embodiment, the position may be changed from an internal position to an external position.

[0078] According to an embodiment, the position may be changed manually.

[0079] According to an embodiment, the position may be changed by an actuator.

[0080] According to an embodiment, the actuator is constituted by a cylinder or an electric motor.

[0081] According to an embodiment, the DUT interface has a flexible cable (eg, a pogo cable) for signal transmission and a spring loaded pin block.

[0082] Although some aspects have been described as features in the context of an apparatus, it is clear that this description may also be seen as a description of corresponding features of a method. Although some aspects have been described as features in the context of a method, it is clear that this description may also be seen as a description of corresponding features related to the functionality of the apparatus.

[0083] Some or all method steps can be performed by (or using) hardware devices, such as microprocessors, programmable computers, or electronic circuits. In some embodiments, one or more of the most important method steps can be performed by such devices.

[0084] In the foregoing detailed description, it can be seen that in order to streamline the present disclosure, various features are combined together in examples. This disclosed method should not be interpreted as reflecting the following intention: the examples claimed for protection require more features than the features explicitly recited in each claim. Instead, as reflected in the attached claims, the subject matter may lie in less than all the features of a single disclosed example. Therefore, the attached claims are thus incorporated into the specific implementation, where each claim can exist independently as a separate example. Although each claim can be independently used as a separate example, it should be noted that although the dependent claims can refer to a specific combination with one or more other claims in the claims, other examples can also include a combination of the dependent rights with the subject matter of each other dependent claim or a combination of each feature with other dependent or independent claims. Unless the statement is not intended to make a specific combination, such a combination is proposed herein. In addition, it is intended to include the features of the claim in any other independent claim, even if the claim is not directly subordinate to the independent claim.

[0085] The embodiments described above are only used to illustrate the principles of the present disclosure. It should be understood that modifications and variations of the arrangements and details described herein will be apparent to those skilled in the art. Therefore, it is intended to be limited only by the scope of the pending patent claims, and not by the specific details presented by the description and explanation of the embodiments herein.

Claims

1. An automatic test device for testing one or more devices under test, comprising: DUT interface; and a test head configured to establish an electrical signal path between the device under test interface and a test instrument, The device under test interface comprises a plurality of spring-loaded pin blocks having spring-loaded pins, wherein the spring-loaded pin blocks are configured to electrically contact the device under test board, each spring-loaded pin block comprising at least two rows of spring-loaded pins arranged along a first direction, The automatic test equipment is configured to allow a distance between at least two spring-loaded pin blocks along the first direction to vary.

2. The automatic test equipment according to claim 1, in, The automatic test equipment includes two sets of spring-loaded pin blocks, The automatic test equipment is configured to allow a distance between the first set of spring loaded pin blocks and the second set of spring loaded pin blocks to vary.

3. The automatic test equipment according to claim 2, in, The first group of spring loaded pin blocks is a first row of spring loaded pin blocks, wherein the second group of spring loaded pin blocks is a second row of spring loaded pin blocks, wherein the first row of spring loaded pin blocks is parallel to the second row of spring loaded pin blocks, and Wherein, the automatic test equipment is configured to allow a distance between the first row of spring loaded pin blocks and the second row of spring loaded pin blocks to vary.

4. Automatic testing equipment according to one of claims 1 to 3, in, The spring loaded pin block is coupled to the test head via a flexible cable.

5. Automatic testing equipment according to one of claims 1 to 3, in, The at least one spring loaded pin block is guided using a linear guide to allow linear displacement of the at least one spring loaded pin block.

6. Automatic test equipment according to one of claims 1 to 3, in, A first linear guide is used to guide the first spring loaded pin block, and wherein a second linear guide is used to guide the second spring loaded pin block, Such that the distance between the first spring loaded pin block and the second spring loaded pin block can be changed by shifting the first spring loaded pin block and the second spring loaded pin block in opposite directions along respective linear guide rails.

7. Automatic testing equipment according to one of claims 1 to 3, in, A hinge is used to guide at least one spring loaded foot block.

8. Automatic testing equipment according to one of claims 1 to 3, in, A parallelogram linkage is used to guide at least one spring loaded pin block.

9. The automatic testing equipment according to claim 8, in, The base portion of the parallelogram linkage is mechanically connected to the test head, and Therein, a movable carrier part of the parallelogram linkage is guided parallel to the base part, the movable carrier part carrying at least one spring-loaded pin block.

10. The automatic testing equipment according to claim 9, in, The movable carrier portion of the parallelogram linkage is movable to assume two different positions in which the distance between the base portion of the parallelogram linkage and the movable carrier portion of the parallelogram linkage is equal.

11. Automatic testing equipment according to one of claims 1 to 3, in, The automatic testing device comprises at least a first parallelogram linkage and a second parallelogram linkage, wherein the first parallelogram linkage carries a first spring loaded pin block, and wherein the second parallelogram linkage carries a second spring loaded pin block, and Wherein, the parallelogram linkage is adapted to allow different spring-loaded pin blocks to move in opposite directions when viewed in a top view perpendicular to the plane of the device under test board.

12. Automatic testing equipment according to one of claims 1 to 3, in, The automatic testing equipment includes one or more actuators adapted to effect a change in a distance between at least two spring loaded pin blocks.

13. A method of operating an automatic test equipment for testing one or more DUTs, the automatic test equipment comprising a test head and a DUT interface, wherein: The test head is configured to establish an electrical signal path between the device under test interface and a test instrument, the device under test interface includes a plurality of spring-loaded pin blocks, the plurality of spring-loaded pin blocks are configured to electrically contact a device under test board, and each spring-loaded pin block includes at least two rows of spring-loaded pins placed along a first direction, the method comprising: The distance between at least two spring-loaded pin blocks of the device under test interface along the first direction is changed.

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