Exhaust gas treatment device

Abstract

The invention discloses an exhaust gas treatment device, which comprises at least one choke pot, a tank body side wall of the choke pot is connected to an air inlet pipe port, a heater assembly and a cooling assembly are arranged at the lower part of the tank body of the choke pot, the heater assembly extends a heating wire inside the tank body, a plurality of choke strips are arranged on the heating wire, a cooling pipeline is extended to the inside of the tank body by the cooling assembly, a plurality of choke strips are arranged on the cooling pipeline, a multi-layer choke plate is arranged at the upper part of the tank body of the choke pot, including a bottom choke plate, a top choke plate and an intermediate choke plate arranged at intervals, a ventilation area with staggered distribution is provided on the intermediate choke plate, an air flow rises in a circuitous manner between the multi-layer choke plates, and a plurality of choke strips are arranged on the lower surface of each choke plate. The invention captures most of the reactant dust particles inside the exhaust gas treatment device, greatly reduces the dust content in the exhaust gas entering the vacuum pump, and effectively prolongs the normal use time and service life of the vacuum pump.

Description

Technical Field

[0001] The invention relates to the field of photovoltaic cell manufacturing equipment, in particular to a tail gas treatment device. Background Art

[0002] Solar photovoltaic cells are a new type of battery that directly converts sunlight into electrical energy. Currently, silicon photovoltaic cells based on silicon are commonly used, including single-crystal silicon, polycrystalline silicon and amorphous silicon photovoltaic cells. At present, the more mature passivation film materials include aluminum oxide, silicon oxide, silicon oxynitride, silicon nitride, etc. These coating deposition processes often generate tail gas, and the tail gas usually needs to be filtered and purified before being discharged into the external exhaust pipe. Taking ALD as an example, ALD atomic layer deposition equipment is a special process equipment for coating the surface of silicon wafers. Its working principle is: by alternately passing the gas phase precursor pulse into the reactor, chemically adsorbing and reacting on the deposition substrate to form a deposited film. Since the process gas TMA introduced is extremely flammable and explosive, it will react violently when it encounters air, so the tail gas needs to be treated before it is discharged into the tail exhaust pipe, and the residual TMA in the tail gas is reacted before it is discharged into the external exhaust pipe. The exhaust gas treatment device currently used in the ALD atomic layer deposition equipment is divided into two layers of treatment tanks, the upper and lower layers. Saturated water vapor is introduced into the lower treatment tank to react with the residual TMA in the exhaust gas to consume the TMA in the exhaust gas. The Al2O3 generated during the reaction passes through the filtering device in the upper treatment tank to capture the generated Al2O3 particles, and finally discharged into the exhaust pipe through a vacuum pump.

[0003] The existing exhaust gas treatment device only has a heater but no cooling water component. The Al2O3 generated by the reaction is difficult to be completely captured by the filtering device. Excessive Al2O3 dust particles in the exhaust gas enter the vacuum pump, causing the vacuum pump to frequently get stuck, reducing the service life of the vacuum pump, thereby affecting the overall stability and production capacity of the equipment, and there are problems such as poor filtering and purification effects. Summary of the invention

[0004] In view of the problems in the above-mentioned existing exhaust gas treatment devices of the sedimentation equipment, such as the exhaust gas products being difficult to be captured by the filtering device, the poor filtering effect, and the easy clogging of the vacuum pump, the applicant provides an exhaust gas treatment device with a rational structure, which can first heat the exhaust gas and the reaction gas to allow them to react fully, and then the generated reactant dust particles condense on the baffle plate with a lower temperature when passing through the cooling water assembly and the baffle plate, thereby capturing most of the reactant dust particles inside the exhaust treatment device, significantly improving the filtering and purification effect.

[0005] The technical solution adopted by the present invention is as follows:

[0006] An exhaust gas treatment device comprises at least one choke pot, a side wall of the choke pot is connected to an air inlet, a heater assembly and a cooling assembly are arranged at the lower part of the choke pot, a heating wire is extended from the heater assembly inside the choke pot, a plurality of choke strips are arranged on the heating wire, a cooling pipe is extended from the cooling assembly to the inside of the choke pot, a plurality of choke strips are arranged on the cooling pipe, a multi-layer choke plate is arranged at the upper part of the choke pot, the choke plate comprises a bottom choke plate, a top choke plate and a middle choke plate arranged at intervals, a staggered ventilation area is opened on the middle choke plate, the airflow flows upward in a circuitous manner between the multi-layer choke plates, and a plurality of choke strips are arranged on the lower surface of each choke plate.

[0007] As a further improvement of the above technical solution:

[0008] The heater assembly is provided with a heater at the corresponding position of the air inlet port on the side of the tank body. The heater extends a two-dimensionally distributed heating wire from the side wall into the interior of the tank body, forming a horizontal and vertical two-dimensionally distributed network. The starting end and the end of the heating wire are both connected to the heater.

[0009] The two-dimensionally distributed heating wires include: the heating wires are arranged in N rows when viewed from above, N is an even number greater than or equal to 2, the starting end of the uppermost layer of the heating wires in the first row is connected to the heater, each row of heating wires is bent into a serpentine pipeline in the vertical direction, the tail end of the lowermost layer of the heating wires in the first row is turned in a U-shape in the horizontal direction to the heating wires in the second row, and the heating wires in the second row are bent upward to form a serpentine pipeline; when N is equal to 2, one end of the uppermost layer of the heating wires in the second row is connected to the heater to form a complete single-line loop; when N is greater than 2, one end of the uppermost layer of the heating wires in the second row is turned in a U-shape to the heating wires in the third row, and the heating wires in the third row repeat the serpentine bending, and so on, the terminal end of the uppermost layer of the heating wires in the Nth row is connected to the heater to form a complete single-line loop.

[0010] The cooling component is provided with a water inlet and a water outlet on the side wall of the tank body opposite to the heater component. The water inlet of the cooling component extends a cooling pipe into the interior of the tank body. The cooling pipe forms a single-line circulation in the tank body and is connected with the water outlet. The cooling pipe uses a serpentine pipe to extend vertical and horizontal regions in space. The vertical region is located on the opposite side of the spatial two-dimensional distributed heating wire, and the horizontal region is located above the spatial two-dimensional distributed heating wire.

[0011] The choke strips on the heating wire are plate-shaped and are horizontally arranged in rows on the heating wire. The choke strips in each row are equidistantly arranged and tilted.

[0012] The baffle strips arranged on the lower surface of each baffle plate are plate-shaped, and the baffle strips are arranged equidistantly and tilted, and the baffle strips on the baffle plates of adjacent layers are tilted in opposite directions.

[0013] The ventilation area on the top spoiler is located in the center, and the airflow passes through the center of the top spoiler into the filter tank above.

[0014] A support column is vertically fixed on the outer edge of the bottom spoiler plate, and the middle spoiler plate and the top spoiler plate are fixed above the bottom spoiler plate through the support column to form a multi-layer bracket structure.

[0015] It also includes a filter tank, the bottom of the filter tank is fixedly connected to the top of the choke tank and the tank bodies are interconnected, and a filter assembly is arranged inside the filter tank.

[0016] The filter assembly is composed of several layers of cylindrical filter screens that are concentrically and spaced apart. The innermost filter screen is located on the periphery of the ventilation area in the center of the top spoiler plate, forming an airflow channel that runs through the top and bottom, and a solid spoiler disk is provided on the top to close it, so that the gas in the spoiler tank passes through the innermost filter screen and flows upward through the gaps between the multiple layers of filter screens.

[0017] The beneficial effects of the present invention are as follows:

[0018] The choke pot used in the present invention is provided with a heater assembly and a cooling assembly, a plurality of choke strips are provided on the heating wire, a plurality of choke strips are provided on the cooling pipe, and a plurality of choke strips are provided on the lower surface of each choke plate, and the choke strips are inclined in opposite directions. The tail gas is first heated by the heater to a temperature suitable for the reaction of the tail gas and the reaction gas, and then fully reacts to generate reactant dust particles, and then condenses on the choke plate with a lower temperature when passing through the cooling water assembly and the choke plate, thereby capturing most of the reactant dust particles inside the tail gas treatment device, greatly reducing the dust content in the tail gas entering the vacuum pump, and effectively extending the normal use time and service life of the vacuum pump. The present invention adds a cooling water assembly, so that the reactant dust particles with a higher temperature condense on the choke plate with a lower temperature, and the cooling water assembly uses a serpentine pipe to extend the vertical area and the horizontal area in space, cleverly using the spatial position to fully cool the reacted dust particles, with excellent effect.

[0019] The middle baffle of the present invention is provided with staggered ventilation areas, and the baffle strips arranged on the lower surface of each baffle are plate-shaped, and the baffle strips are arranged equidistantly and tilted. The baffle strips on the baffles of adjacent layers are tilted in opposite directions. The airflow rises in a circuitous way between the multiple layers of baffles, which increases the path length of the exhaust gas, increases the probability of gas being captured and deposited by the baffles, can condense more dust particles, and improves the filtering effect. The heater assembly of the present invention uses heating wires with two-dimensional spatial distribution to form a horizontal and vertical two-dimensional spatial distribution network to improve the heating effect. The present invention uses a filter assembly provided inside the filter tank, and the gas is filtered and purified through multiple layers of filter nets to further improve the filtering effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a stereogram of the present invention.

[0021] Figure 2 It is a cross-sectional view of the present invention.

[0022] Figure 3 It is the internal structure diagram of the choke pot of the present invention.

[0023] Figure 4 It is the internal structure diagram of the choke pot of the present invention.

[0024] In the figure: 1. choke tank; 2. filter tank; 3. air inlet; 4. heater assembly; 5. cooling assembly; 6. heater; 7. heating wire; 8. choke strip; 9. water inlet; 10. water outlet; 11. cooling pipe; 12. bottom baffle; 13. top baffle; 14. middle baffle; 15. support column; 16. ventilation area; 17. filter assembly; 18. filter screen; 19. exhaust pipe. DETAILED DESCRIPTION

[0025] The specific implementation of the present invention will be described below in conjunction with the accompanying drawings.

[0026] like Figures 1 to 4 As shown, the exhaust gas treatment device of the present invention comprises a choke tank 1 at the bottom and a filter tank 2 at the top. The main body of the choke tank 1 is a tank body with a cavity inside, and an air inlet port 3 is connected to the side wall of the tank body. A heater assembly 4 and a cooling assembly 5 are provided at the lower part of the tank body of the choke tank 1. The heater assembly 4 is provided with a heater 6 at the corresponding position of the air inlet port 3 on the side of the tank body. The heater 6 extends a heating wire 7 with a two-dimensional spatial distribution from the side wall to the inside of the tank body, forming a two-dimensional spatial distribution network in the horizontal and vertical directions. The starting end and the final end of the heating wire 7 are both connected to the heater 6, and the heater 6 supplies energy to heat the heating wire 7. The heating wire 7 in the tank body is arranged in N rows from a top view, and N is an even number greater than or equal to 2. The starting end of the uppermost layer of the heating wire 7 in the first row is connected to the heater 6, and each row of heating wires 7 is bent into a serpentine pipeline in the vertical direction. The tail end of the lowermost layer of the heating wire 7 in the first row is U-shaped in the horizontal direction to the heating wire 7 in the second row, and the heating wire 7 in the second row is bent upward into a serpentine pipeline. When N is equal to 2, one end of the uppermost layer of the second row of heating wires 7 is connected to the heater 6 to form a complete single-line loop. When N is greater than 2, one end of the uppermost layer of the second row of heating wires 7 is U-shaped and turns to the third row of heating wires 7. The third row of heating wires 7 repeats the above structure, and so on. The uppermost terminal of the Nth row of heating wires 7 is connected to the heater 6 to form a complete single-line loop. A plurality of plate-shaped choke strips 8 are arranged on the heating wires 7. The choke strips 8 are horizontally arranged in rows on the heating wires 7, and each row of choke strips 8 is arranged equidistantly and tilted.

[0027] The cooling assembly 5 is provided with a water inlet 9 and a water outlet 10 on the side wall opposite to the heater assembly 4 of the tank body. The water inlet 9 and the water outlet 10 are connected to the cooling device outside the tank body. The water inlet 9 of the cooling assembly 5 extends a cooling pipe 11 into the tank body. The cooling pipe 11 forms a single-line circulation in the tank body and is connected to the water outlet 10. The cooling pipe 11 is extended to a vertical area and a horizontal area in space using a serpentine pipe. The vertical area is located on the opposite side of the spatial two-dimensional distribution heating wire 7, and the horizontal area is located above the spatial two-dimensional distribution heating wire 7. A plurality of plate-shaped flow-blocking strips 8 are provided on the cooling pipe 11 in the vertical area. The flow-blocking strips 8 are vertically arranged in rows on the cooling pipe 11, and each row of flow-blocking strips 8 is arranged equidistantly and tilted.

[0028] A bottom baffle plate 12 and a top baffle plate 13 are arranged at the upper part of the tank body of the baffle tank 1, and a horizontal H-layer intermediate baffle plate 14 is arranged between the bottom baffle plate 12 and the top baffle plate 13, where H is greater than or equal to 1. Four support columns 15 are vertically fixed on the outer edge of the bottom baffle plate 12, and the H-layer intermediate baffle plate 14 and the top baffle plate 13 are fixed on the top of the bottom baffle plate 12 through the four support columns 15, forming a multi-layer bracket structure. The bottom baffle plate 12 is fixed on the pipe in the horizontal area of ​​the cooling pipe 11, and a vent is provided in the part of the bottom baffle plate 12 corresponding to the vertical area of ​​the cooling pipe 11, and the vent connects the bottom baffle plate 12 up and down. A plurality of plate-shaped baffle strips 8 are arranged on the lower surface of the bottom baffle plate 12, and the baffle strips 8 are arranged equidistantly and tilted, and the tilting direction is toward the heating wire 7 assembly, forming a reverse blockage for the airflow. The middle baffle plate 14 is provided with a ventilation area 16, which can be composed of a plurality of vents. The ventilation areas 16 of the middle baffle plates 14 of the H layer are staggered in sequence, so that the airflow flows upward in a circuitous manner between the baffle plates. In the middle baffle plates 14 of the H layer, a plurality of plate-shaped baffle strips 8 are arranged on the lower surface of each baffle plate, and the plurality of baffle strips 8 are arranged equidistantly and tilted. The baffle strips 8 on each baffle plate have the same tilt angle, and the tilt direction faces the airflow direction of the next layer, thereby forming a reverse blockage for the airflow. The ventilation area 16 on the top baffle plate 13 is located in the central position, and the airflow enters the filter tank 2 above through the vent holes in the center of the top baffle plate 13.

[0029] The bottom of the tank body of the filter tank 2 is fixedly connected to the top of the tank body of the choke tank 1 and the tank bodies are interconnected. A filter assembly 17 is provided inside the filter tank 2. The filter assembly 17 is composed of several layers of cylindrical filter screens 18, which are concentric and spaced apart. The innermost filter screen 18 is located at the periphery of the ventilation area 16 in the center of the top baffle plate 13, and is arranged opposite to the ventilation area 16 in the center of the top baffle plate 13, forming a unique air flow channel that passes through from top to bottom, and a solid baffle disk is provided on the top of the filter screen 18 to close it, so that the gas in the choke tank 1 must pass through the innermost filter screen 18 before being discharged. After passing through the innermost filter screen 18, the gas can pass through the outer multi-layer filter screens 18, or directly flow upward through the gaps between the filter screens 18, and finally enter the vacuum pump through the exhaust pipe 19 at the top of the filter tank 2 for subsequent treatment.

[0030] The following takes the tail gas treatment of ALD equipment as an example and describes the embodiments of the present invention in conjunction with the accompanying drawings:

[0031] When the present invention is implemented, the exhaust gas discharged through the deposition process enters the exhaust gas treatment device through the air inlet port 3 on the choke tank 1. The heater 6 located at the corresponding position of the air inlet port 3 heats the exhaust gas to a temperature suitable for the reaction, and reacts with the saturated water vapor introduced to generate Al2O3 dust particles. When passing through the cooling water assembly and the baffle, the Al2O3 dust particles with higher temperature condense on the baffle with lower temperature; and the baffle strips 8 on the baffle change the gas flow direction of the exhaust gas many times, increasing the path length of the exhaust gas flow, and being able to condense more dust particles. Finally, through the upper filter tank 2, most of the Al2O3 dust particles are captured in the exhaust gas treatment device, preventing dust from entering the vacuum pump and reducing the probability of blockage failure.

[0032] The above description is an explanation of the present invention, not a limitation of the present invention. The present invention may be modified in any form without violating the spirit of the present invention.

Claims

1. A tail gas treatment device, characterized in that: The invention comprises at least one baffle pot (1), wherein a side wall of the baffle pot (1) is connected to an air inlet (3), a heater assembly (4) and a cooling assembly (5) are arranged at the lower part of the baffle pot (1), a heating wire (7) extending from the heater assembly (4) inside the pot, a plurality of baffle strips (8) being arranged on the heating wire (7), a cooling pipe (11) extending from the cooling assembly (5) into the pot, a plurality of baffle strips (8) being arranged on the cooling pipe (11), a plurality of baffle plates being arranged at the upper part of the pot, comprising a bottom baffle plate (12), a top baffle plate (13) and an intermediate baffle plate (14) arranged at intervals, a staggered ventilation area (16) being provided on the intermediate baffle plate (14), an airflow meanderingly ascending between the multi-layer baffle plates, and a plurality of baffle strips (8) being arranged on the lower surface of each baffle plate.

2. The exhaust gas treatment device according to claim 1, characterized in that: The heater assembly (4) is provided with a heater (6) at a position corresponding to the air inlet (3) on the side of the tank body. The heater (6) extends a heating wire (7) distributed in two dimensions in space from the side wall into the interior of the tank body, forming a two-dimensional spatial distribution network in the transverse and longitudinal directions. The starting end and the final end of the heating wire (7) are both connected to the heater (6).

3. The exhaust gas treatment device according to claim 2, characterized in that: The two-dimensionally distributed heating wires (7) in space include: the heating wires (7) are arranged in N rows when viewed from above, N being an even number greater than or equal to 2, the starting end of the top layer of the heating wires (7) in the first row being connected to the heater (6), each row of heating wires (7) being bent in the vertical direction into a serpentine pipeline, the tail end of the bottom layer of the first row of heating wires (7) being turned in a U-shape in the horizontal direction to the heating wires (7) in the second row, and the heating wires (7) in the second row being bent upwards into a serpentine pipeline; when N is equal to 2, one end of the top layer of the heating wires (7) in the second row being connected to the heater (6) to form a complete single-line loop; when N is greater than 2, one end of the top layer of the heating wires (7) in the second row being turned in a U-shape to the heating wires (7) in the third row, the heating wires (7) in the third row being bent in a serpentine shape repeatedly, and so on, the terminal end of the top layer of the heating wires (7) in the Nth row being connected to the heater (6) to form a complete single-line loop.

4. The exhaust gas treatment device according to claim 2, characterized in that: The cooling component (5) is provided with a water inlet pipe opening (9) and a water outlet pipe opening (10) on the side wall of the tank body opposite to the heater component (4). The water inlet pipe opening (9) of the cooling component (5) extends a cooling pipe (11) into the tank body. The cooling pipe (11) forms a single-line circulation in the tank body and is connected to the water outlet pipe opening (10). The cooling pipe (11) is spatially extended into a vertical region and a horizontal region using a serpentine pipe. The vertical region is located on the opposite side of the spatially two-dimensionally distributed heating wire (7), and the horizontal region is located above the spatially two-dimensionally distributed heating wire (7).

5. The exhaust gas treatment device according to claim 1, characterized in that: The flow-blocking strips (8) on the heating wire (7) are plate-shaped, and the flow-blocking strips (8) are horizontally arranged in rows on the heating wire (7), with each row of flow-blocking strips (8) being arranged at equal intervals and tilted.

6. The exhaust gas treatment device according to claim 1, characterized in that: The baffle strips (8) arranged on the lower surface of each baffle plate are plate-shaped, the baffle strips (8) are arranged equidistantly and tilted, and the baffle strips (8) on the baffle plates of adjacent layers are tilted in opposite directions.

7. The exhaust gas treatment device according to claim 1, characterized in that: The ventilation area (16) on the top baffle plate (13) is located at a central position, and the airflow passes through the center of the top baffle plate (13) and enters the filter tank (2) above.

8. The tail gas treatment device according to claim 1, characterized in that: A support column (15) is vertically fixed on the outer edge of the bottom spoiler plate (12), and the middle spoiler plate (14) and the top spoiler plate (13) are fixed above the bottom spoiler plate (12) via the support column (15), thereby forming a multi-layer support structure.

9. The exhaust gas treatment device according to claim 1, characterized in that: It also comprises a filter tank (2), the tank body bottom of the filter tank (2) being fixedly connected to the tank body top of the flow blocking tank (1), and the tank bodies being interconnected, and a filter assembly (17) being provided inside the filter tank (2).

10. The exhaust gas treatment device according to claim 9, characterized in that: The filter assembly (17) is composed of a plurality of layers of cylindrical filter screens (18) which are arranged concentrically and at intervals. The innermost filter screen (18) is located at the periphery of the ventilation area (16) in the center of the top baffle plate (13), forming an air flow passage that passes through from top to bottom, and a solid baffle plate is provided at the top to close it, so that the gas in the baffle pot (1) passes through the innermost filter screen (18) and flows out upward through the gaps between the multiple layers of filter screens (18).

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