Robotic arm with dual transmission mechanism

Abstract

The present application relates to a mechanical arm with double transmission mechanism, mainly using the concept of simplifying the complex and precise transmission mechanism, so that the previous one needs to be divided into two transmission mechanisms, and the gear ratio of the gear box of each transmission mechanism is different, so that one transmission mechanism can be mainly used for fast driving the mechanical arm body to move vertically, and the other transmission mechanism is mainly used for accurate adjustment, so that the mechanical arm can be accurately moved to the default position. Due to the simplification of the transmission mechanism, the volume of each gear box can be reduced, thereby greatly reducing the overall volume of the mechanical arm.

Description

[0001] Technical Field: This invention relates to a robotic arm, and more particularly to a robotic arm with a dual transmission mechanism. Background technology:

[0002] Please refer to Taiwan Patent Certificate No. 529058, "Robotic Arm and Method for Moving Wafers from a First Position to a Second Position," which discloses a wafer processing system that minimizes floor space by utilizing vertically mounted modules such as reactors, loading locks, and cooling stations. This is further reduced by using a loading station that uses rotational motion to move wafer carriers into the loading locks. The wafer processing system includes a robotic arm with extension, rotation, and vertical movement to pick up vertically mounted modules. The robotic arm is internally cooled and has a heat-resistant end effector, enabling compatibility with high-temperature semiconductor processing.

[0003] While the patent has the aforementioned advantages, it still has shortcomings. This is because the patent primarily uses a Z-axis (vertical motion) motor that is mechanically coupled to a ball screw via a belt to rotate the ball screw, thus driving the robotic arm to move vertically. This requires the Z-axis motor to not only rapidly move the robotic arm vertically but also to have precise positioning so that the robotic arm can accurately reach its default height position. Consequently, the Z-axis motor needs to be paired with multiple components (such as a gearbox) to achieve the desired effect, resulting in high manufacturing costs and a large overall size. Summary of the Invention:

[0004] In view of the shortcomings described in the background art, the inventors of this invention provide a solution, the solution relating to a robotic arm with a dual-drive mechanism, comprising:

[0005] First transmission mechanism:

[0006] The first transmission mechanism has a first gearbox inside, and the output end of the first transmission mechanism is connected to a first carrier. The first transmission mechanism can drive the first carrier to move vertically.

[0007] Second transmission mechanism:

[0008] The second transmission mechanism is located on the first carrier member. The second transmission mechanism has a second gearbox inside it, and the output end of the second transmission mechanism is connected to a second carrier member. The second transmission mechanism can drive the second carrier member to move vertically. The gear ratio of the first gearbox is different from the gear ratio of the second gearbox.

[0009] One robotic arm body:

[0010] The robotic arm body is mounted on the second support member.

[0011] One control unit:

[0012] The control unit is connected to the first transmission mechanism, the second transmission mechanism, and the robotic arm body respectively, so as to control the operation of the first transmission mechanism, the second transmission mechanism, and the robotic arm body respectively.

[0013] The robotic arm with dual transmission mechanisms includes a first transmission mechanism comprising a vertically arranged first slide rail and a first drive unit; a first support member being an N-shaped plate comprising a first horizontal plate, a second horizontal plate, and a vertical plate, wherein two opposite edges of the vertical plate are respectively connected to an edge of the first horizontal plate and an edge of the second horizontal plate; the first drive unit is connected to the first horizontal plate to allow the first support member to move along the first slide rail, and the second horizontal plate and the vertical plate are located on one side of the first slide rail; the second transmission mechanism includes a vertically arranged second slide rail and a second drive unit, wherein the second slide rail is disposed on one of the second horizontal plate or the vertical plate, the second support member is disposed on the second slide rail, and the second drive unit is connected to the second support member to drive the second support member to move along the second slide rail.

[0014] The robotic arm with dual transmission mechanisms includes a height detection unit on the robotic arm body. The control unit is connected to the height detection unit. The control unit determines whether the default height is met based on the detection result of the height detection unit. If the default height is not met, the control unit controls the first transmission mechanism and the second transmission mechanism to operate until the default height is met, and records the control parameters to obtain control data.

[0015] The robotic arm with dual transmission mechanisms issues a first warning message when a default time has elapsed and the control unit determines that the detection results of the height detection unit cannot meet the default height value.

[0016] The robotic arm with dual transmission mechanisms includes a control unit that can be connected to an earthquake notification system. When the earthquake notification system issues an earthquake notification, the control unit controls the first transmission mechanism, the second transmission mechanism, and the robotic arm body to stop operating.

[0017] The robotic arm with dual transmission mechanisms includes a control unit that is connected to a level. When the control unit receives the earthquake notification after a preset time, it determines whether the first transmission mechanism, the second transmission mechanism, and the robotic arm itself should be restarted based on the level's detection results.

[0018] The mechanical arm with double transmission mechanism, wherein the control unit is connected with a sound analysis unit, the sound analysis unit is used to analyze the sound generated by the first transmission mechanism, the second transmission mechanism and the mechanical arm body when operating, and when it is judged that the sound belongs to noise, the control unit sends a second warning message.

[0019] The mechanical arm with double transmission mechanism, wherein the control unit is connected with a temperature detection unit, and when the temperature detected by the temperature detection unit is higher than a temperature default value, the control unit controls the first transmission mechanism, the second transmission mechanism and the mechanical arm body to stop operating.

[0020] The mechanical arm with double transmission mechanism, wherein the object to be received is provided with an RFID, the mechanical arm body is provided with an RFID reading unit and a receiving part, the RFID reading unit is connected with the control unit to read the RFID to obtain an identification data, and when the identification data meets the default data, the control unit drives the receiving part to receive the object to be received and makes the identification data into a conveying data.

[0021] The mechanical arm with double transmission mechanism, wherein the control unit is connected with a vibration analysis unit, the vibration analysis unit is used to analyze the vibration generated by the first transmission mechanism, the second transmission mechanism and the mechanical arm body when operating, and when it is judged that the vibration belongs to an abnormality, the control unit sends a third warning message.

[0022] The main feature of the present application is to simplify the control components (such as gearbox) of a transmission mechanism, simplify the first transmission mechanism and the second transmission mechanism, and use the different gear ratios of the first gearbox and the second gearbox to make one of the transmission mechanisms focus on quickly raising the mechanical arm to the vicinity of the preset height, and then use the other transmission mechanism to fine-tune, so that the mechanical arm can be accurately raised to the preset height. In this way, the transmission mechanism of the present application does not need to pass through complex and precise control components (such as gearbox) to achieve the effect of accurate positioning, and at the same time, due to the simplification of the control components, the overall volume of the control components is reduced, thereby greatly reducing the volume of the whole mechanical arm. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the three-dimensional appearance of the present application Figure 1

[0024] Figure 2 is the three-dimensional appearance of the present applicationFigure 2

[0025] Figure 3 is a side view schematic diagram of the present invention

[0026] Figure 4 is a first transmission mechanism actuation schematic diagram of the present invention

[0027] Figure 5 is a second transmission mechanism actuation schematic diagram of the present invention

[0028] Figure 6 is a component linkage schematic diagram of the present invention

[0029] Reference signs:

[0030] 1 first transmission mechanism

[0031] 11 first slide rail

[0032] 12 first drive unit

[0033] 2 first carrier

[0034] 21 first cross plate

[0035] 22 second cross plate

[0036] 23 longitudinal plate

[0037] 23A longitudinal plate

[0038] 23B longitudinal plate

[0039] 3 second transmission mechanism

[0040] 31 second slide rail

[0041] 32 second drive unit

[0042] 4 second carrier

[0043] 5 robot arm body

[0044] 51 RFID reading unit

[0045] 6 control unit

[0046] 7 height detection unit

[0047] 8 level gauge

[0048] 9 sound analysis unit

[0049] 9A vibration analysis unit

[0050] 0 temperature detection unit

[0051] A earthquake reporting system

[0052] B object to be held DETAILED DESCRIPTION

[0053] Referring to Figure 1 The present application relates to a mechanical arm with double transmission mechanisms, comprising:

[0054] A first transmission mechanism 1:

[0055] Referring to Figure 1 In cooperation with Figure 2 As shown, the first transmission mechanism 1 is internally provided with a first gearbox, and the output end of the first transmission mechanism 1 is connected with a first carrier 2, and the first transmission mechanism 1 can drive the first carrier 2 to move vertically. Any second transmission mechanism 3 that can be connected with the first transmission mechanism 1 so that the first transmission mechanism 1 drives the second transmission mechanism 3 to move vertically is the first carrier 2 described in the specification, and the specification Figure 1 As shown, the first carrier 2 is preferably an N-shaped plate, comprising a first horizontal plate 21, a second horizontal plate 22, and a vertical plate 23, the opposite edges of the vertical plate 23 are respectively connected with an edge of the first horizontal plate 21 and an edge of the second horizontal plate 22; and the first transmission mechanism 1 comprises a first slide rail 11 arranged vertically, and a first driving unit 12, the first driving unit 12 is connected with the first horizontal plate 21 to drive the first carrier 2 to move along the first slide rail 11, and the second horizontal plate 22 and the vertical plate 23 are located at one side of the first slide rail 11. In this way, as shown in the figure, when the second transmission mechanism 3 is placed on the vertical plate 23 or the second horizontal plate 22, the second transmission mechanism 3 must be located at the left side or the right side of the first transmission mechanism 1, and through this close and side-by-side arrangement, the overall volume can be effectively reduced. In addition, it is worth mentioning that in the figure, in the implementation of the first carrier 2, the first horizontal plate 21 is preferably provided with the vertical plate 23 at one edge, and the opposite edge is provided with a vertical plate 23A, similarly, the second horizontal plate 22 is also provided with the vertical plate 23 at one edge, and the opposite edge is provided with a vertical plate 23B, so that the first carrier 2 is converted from N-shaped to a structure combined with U-shaped and M-shaped, so that the overall structure is more stable.

[0056] A second transmission mechanism 3:

[0057] Referring to Figure 1 In cooperation with Figure 2As shown, the second transmission mechanism 3 is arranged on the first carrier 2, and a second gearbox is arranged inside the second transmission mechanism 3, and a second carrier 4 is connected to the output end of the second transmission mechanism 3, and the second transmission mechanism 3 can drive the second carrier 4 to move vertically. The gear ratio of the first gearbox is different from that of the second gearbox. In addition, the specific embodiment of the second transmission mechanism 3 is that the second transmission mechanism 3 includes a second slide rail 31 arranged vertically and a second drive unit 32. The second slide rail 31 is arranged on one of the second horizontal plate 22 or the vertical plate 23, and the second carrier 4 is arranged on the second slide rail 31. The second drive unit 32 is connected to the second carrier 4 to drive the second carrier 4 to move along the second slide rail 31. In this way, the second slide rail 31 can effectively fix the moving direction of the second carrier 4 and also has the effect of providing stable movement. In addition, it is worth mentioning that any drive unit 12, 32 that can drive the first carrier 2 or the second carrier 4 to move vertically is referred to as the drive unit 12, 32 in this specification. For example, the drive unit 12, 32 is preferably a motor, and the output end is driven by a screw rod to drive the first carrier 2 or the second carrier 4 to move.

[0058] A robot arm body 5:

[0059] Please refer to Figure 3 As shown, the robot arm body 5 is arranged on the second carrier 4, and the robot arm body 5 is used to support a to-be-supported object B.

[0060] A control unit 6:

[0061] Please refer to Figure 6 As shown, the control unit 6 is connected to the first transmission mechanism 1, the second transmission mechanism 3, and the robot arm body 5 to control the first transmission mechanism 1, the second transmission mechanism 3, and the robot arm body 5, respectively.

[0062] When the present application is actuated, the gear ratios of the gearboxes used by the first transmission mechanism 1 and the second transmission mechanism 3 are different. Therefore, one of the transmission mechanisms can be used to move at high speed to quickly drive the robot arm body 5 to move to the vicinity of the default height position, and then the other transmission mechanism can be used for fine adjustment to accurately control the robot arm body 5 to move to the default height position. The control process can be simultaneous control of the first transmission mechanism 1 and the second transmission mechanism 3, or the first transmission mechanism 1 can be controlled first and then the second transmission mechanism 3 can be used for fine adjustment. For example, as shown in the drawings of the present specification, the first transmission mechanism 1 is preferably used to drive the first carrier 2 to move to the vicinity of the default height position, and then the second transmission mechanism 3 is used to fine adjust the second carrier 4 to move to the default height position. Figure 4The first transmission mechanism 1 is controlled to act first, and then the second transmission mechanism 3 is controlled to fine-tune, as shown. Figure 5 The present application simplifies a transmission mechanism from needing to have a precise and complex control component (such as a gearbox) into two transmission mechanisms 1, 3, which are cooperated with each other to quickly and accurately drive the mechanical arm body 5 to a positioning point. Therefore, the volume of the transmission mechanism is greatly reduced, and the volume of the entire mechanical arm is also reduced. In addition, it is worth mentioning that, in addition to driving the mechanical arm body 5 by the first transmission mechanism 1 and the second transmission mechanism 3 respectively, only one of the first transmission mechanism 1 or the second transmission mechanism 3 can be used to drive the mechanical arm body 5 to move vertically up and down.

[0063] Please refer to Figure 6 Next, other embodiments of the present application will be introduced. First, the mechanical arm body 5 is preferably provided with a height detection unit 7, and the control unit 6 is informationally connected to the height detection unit 7. The control unit 6 determines whether the height default value is met according to the detection result of the height detection unit 7. When it is not met, the first transmission mechanism 1 and the second transmission mechanism 2 are respectively controlled to act until the height default value is met, and a control data is recorded by controlling parameters, wherein the control data can be the working time of the first transmission mechanism 1 and the second transmission mechanism 3, the moving speed of the first bearing 1 or the second bearing 3, etc. Any parameter that can be used for learning by the machine in the future to quickly move the mechanical arm body 5 to a positioning point is the control data referred to in the present specification. In addition, when the control unit 6 repeatedly operates the first transmission mechanism 1 and the second transmission mechanism 3 for a preset time, and finds that the detection result of the height detection unit 7 cannot meet the height default value, it means that the machine may have a condition. At this time, the control unit 6 will output a first warning message. The first warning message can be presented by a buzzer, or can be presented by a flashing light, or can be transmitted to a remote central control center to prompt the management personnel of the central control center to go to inspect or repair.

[0064] Please continue to refer to Figure 6When the application is applied to a wafer factory, in order to avoid the wafer from falling to the ground due to the earthquake, the application can further be implemented as follows: when an earthquake notification system A sends out an earthquake notification after detecting an earthquake, the control unit 6 remotely connects to the earthquake notification system A, and when the control unit 6 receives the earthquake notification, the control unit 6 controls the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 5 to stop operating, so as to avoid the disaster from expanding. In addition, before controlling the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 6 to stop operating, the control unit 6 preferably first judges whether the mechanical arm body 5 is holding a wafer, and if so, the control unit 6 first controls the mechanical arm body 5 to place the wafer on the hand to a safe position, and then controls the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 5 to stop operating. In addition, basically the duration of the earthquake is relatively short, in order not to affect the entire work progress, the application further has a level meter 8 arranged to detect whether the ground or the mechanical arm body 5 shakes, so when the control unit 6 receives the earthquake notification for a preset time, if the level meter 8 stops shaking, the control unit 6 controls the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 5 to operate again, so that the application has the intelligent function of resuming work.

[0065] Next, the protection measures of the application are introduced, which are used to assist in diagnosing whether the mechanical arm fails or needs to be repaired in advance. First, the application preferably has a sound analysis unit 9. Since the machine parts will emit a relatively high degree of abnormal sound before being damaged, which can also be called noise, the sound analysis unit 9 mainly analyzes the sound emitted by the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 5 when operating, and when it is judged that the sound belongs to noise, the control unit 6 sends out a second warning message. In addition, it is worth mentioning that the noise referred to here is not the noise in the general sense of human hearing, but other sounds in addition to the sound emitted by the mechanical arm when operating, such as friction sound and impact sound. In addition, when the temperature of the machine itself abnormally rises, it is also a warning before the parts are damaged or damaged, so the application further has a temperature detection unit 10, and when the temperature detected by the temperature detection unit 10 is higher than a temperature default value, the control unit 6 controls the first transmission mechanism 1, the second transmission mechanism 3, and the mechanical arm body 5 to stop operating.

[0066] In addition, in addition to the above-mentioned use of sound to assist in determining whether the robot arm needs maintenance, the application can also use the frequency and size of the vibration as an auxiliary judgment basis. Therefore, the control unit 6 is preferably connected to a vibration analysis unit 9A. The vibration analysis unit 9A is used to analyze the vibration generated by the first transmission mechanism 1, the second transmission mechanism 3, and the robot arm body 5 when it is actuated. When it is determined that the vibration is abnormal, the control unit 6 sends a third warning message. Whether the vibration is abnormal can be determined by the frequency of the vibration, the size of the vibration, etc. Any judgment basis and judgment parameter that can be used to determine whether the vibration is abnormal is within the scope of the present application.

[0067] In the implementation of the present application, the object B preferably has an RFID. The RFID can store information related to the object B, such as quantity, item name, serial number, etc. The robot arm body 5 is provided with an RFID reading unit 51 and a receiving member. Therefore, when the robot arm body 5 receives the object B, the RFID reading unit 51 reads the RFID to obtain an identification data. Then, the control unit 6 determines whether the identification data meets the default data. If it does, the control unit 6 drives the receiving member to receive the object B, and generates a delivery data from the identification data. The delivery data can record not only the quantity, item name, serial number, etc., but also other related data such as delivery time. In addition, to prevent the object B from falling during the receiving process, the surface of the receiving member is preferably provided with a slip stop unit.

[0068] In summary, the present application meets the requirements of the Patent Law, and therefore a patent application is filed in accordance with the law. The above description only illustrates the preferred embodiments of the present application, and the scope of the present application is still based on the claims.

Claims

1. A robot arm having dual transmissions, characterized in that, The application relates to a mechanical arm device, which comprises the following parts: a first transmission mechanism, which is internally provided with a first gearbox, and the output end of the first transmission mechanism is connected with a first bearing part, and the first transmission mechanism can drive the first bearing part to vertically move; wherein the first transmission mechanism comprises a first slide rail arranged vertically, and a first driving unit; the first bearing part is an N-shaped plate, which comprises a first horizontal plate, a second horizontal plate, and a vertical plate, the opposite edges of the vertical plate are respectively connected with an edge of the first horizontal plate and an edge of the second horizontal plate; the first driving unit is connected with the first horizontal plate, so that the first bearing part can move along the first slide rail, and the second horizontal plate and the vertical plate are located on one side of the first slide rail; a second transmission mechanism, which is arranged on the first bearing part, and the second transmission mechanism is internally provided with a second gearbox, and the output end of the second transmission mechanism is connected with a second bearing part, and the second transmission mechanism can drive the second bearing part to vertically move; the gear ratio of the first gearbox is different from that of the second gearbox; wherein the second transmission mechanism comprises a second slide rail arranged vertically, and a second driving unit, the second slide rail is arranged on one of the second horizontal plate and the vertical plate, the second bearing part is arranged on the second slide rail, and the second driving unit is connected with the second bearing part, so that the second bearing part can move along the second slide rail; a mechanical arm body, which is arranged on the second bearing part; wherein the mechanical arm body is provided with a height detection unit; a control unit, which is respectively connected with the first transmission mechanism, the second transmission mechanism, and the mechanical arm body, so as to control the first transmission mechanism, the second transmission mechanism, and the mechanical arm body to act; wherein the control unit is connected with the height detection unit, and according to the detection result of the height detection unit, the control unit judges whether the height default value is met, and when the height default value is not met, the control unit controls the first transmission mechanism and the second transmission mechanism to act until the height default value is met, and records the control parameters to obtain a control data.

2. The robot arm having dual transmission mechanisms according to claim 1, wherein, When a default time is exceeded and the control unit judges that the detection result of the height detection unit cannot meet the height default value, a first warning message is sent.

3. The robot arm with dual transmission mechanism according to claim 2, wherein, The control unit can be connected with a seismic reporting system, when the seismic reporting system sends a seismic notification, the control unit controls the first transmission mechanism, the second transmission mechanism, and the mechanical arm body to stop acting.

4. The robot arm having dual transmission mechanisms according to claim 3, wherein, The control unit is connected with a level, and according to the detection result of the level, the control unit judges whether the first transmission mechanism, the second transmission mechanism, and the mechanical arm body are restarted after a preset time when the control unit receives the seismic notification.

5. The robot arm having dual transmission mechanisms according to claim 4, wherein, The control unit is connected with a sound analysis unit, and the sound analysis unit is used to analyze the sound generated by the first transmission mechanism, the second transmission mechanism, and the mechanical arm body when the first transmission mechanism, the second transmission mechanism, and the mechanical arm body act, and when it is judged that the sound belongs to noise, a second warning message is sent by the control unit.

6. The robot arm having dual transmission mechanism as claimed in claim 5 wherein, The control unit is connected to a temperature detection unit. When the temperature detected by the temperature detection unit is higher than a default temperature, the control unit controls the first transmission mechanism, the second transmission mechanism, and the robot arm body to stop operation.

7. The robot arm having dual transmission mechanisms according to claim 6, wherein, The object to be received is provided with an RFID. The robot arm body is provided with an RFID reading unit and a receiving member. The RFID reading unit is connected to the control unit to read the RFID to obtain an identification data. When the identification data meets a default data, the control unit drives the receiving member to receive the object to be received, and generates the identification data into a delivery data.

8. The robot arm having dual transmission mechanisms according to claim 7, wherein, The control unit is connected to a vibration analysis unit. The vibration analysis unit is used to analyze the vibration generated by the first transmission mechanism, the second transmission mechanism, and the robot arm body during operation. When it is determined that the vibration is abnormal, the control unit sends a third warning message.

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