A crystal filling system and a crystal filling method

Abstract

The present application provides a liquid crystal filling system and a liquid crystal filling method. The liquid crystal filling system includes a control unit; a vacuum pump assembly connected to the filling chamber and signal-connected to the control unit, configured to extract air in the filling chamber under the control of the control unit and make the filling chamber form a vacuum state with a set vacuum degree; a liquid crystal carrier mechanism, at least partially located in the filling chamber; the liquid crystal carrier mechanism located in the filling chamber includes a first part fixed relative to the filling chamber and a second part movable relative to the filling chamber, one of the first part and the second part is used for carrying the liquid crystal to be filled, and the other of the two is used for carrying the liquid crystal cell to be filled; the liquid crystal carrier mechanism is signal-connected to the control unit and is configured to move the second part under the control of the control unit to move the liquid crystal to be filled and the liquid crystal cell to be filled away from or close to each other; a backfill gas micro-flow input valve group connected to the filling chamber and signal-connected to the control unit, configured to input backfill gas into the filling chamber under the control of the control unit.

Description

Technical Field

[0001] This application belongs to the technical field of liquid crystal manufacturing, and more specifically, relates to a liquid crystal filling system and a liquid crystal filling method. Background Art

[0002] As a human-computer interaction interface of intelligent devices, liquid crystal displays are widely used in intelligent devices in various fields. The display principle of a liquid crystal display is as follows: by applying a certain voltage to the upper and lower electrodes of the liquid crystal display, the molecular chains of the liquid crystal molecules between the upper and lower electrodes are twisted, enabling light to pass through or be blocked inside the liquid crystal cell, thereby realizing the display function. Based on this, the response speed of the liquid crystal to the driving voltage is an important indicator for evaluating its optoelectronic performance, and generally, the faster the response speed, the better.

[0003] In the prior art, the liquid crystal cell formed by the upper and lower electrodes and the frame adhesive is reduced from 6 - 8 μm to 3 - 4 μm, thereby reducing the twisting time of the liquid crystal molecular chains and achieving the purpose of improving the liquid crystal response speed. However, this technical means for improving the liquid crystal response speed has an adverse impact on other aspects of liquid crystal filling manufacturing, specifically manifested in the following aspects:

[0004] Firstly, it is difficult to achieve the required vacuum degree and the filling time is long in the above prior art. On the premise of using the same vacuum pump filling machine, taking two different cell thicknesses with the same surface area and the same circuit pattern as an example, such as a cell thickness of 6 μm and 3 μm, the time consumed to evacuate to the same vacuum degree is several times longer for the latter than the former. The reason is that the inner cavity of the liquid crystal cell composed of the upper and lower conductive indium tin oxide substrates, the plastic liner, and the epoxy frame adhesive is uneven. When the particle size of the plastic liner that determines the cell thickness becomes smaller, it instead increases the difficulty of discharging the gas in the cavity, resulting in a longer evacuation time to meet the process requirements.

[0005] The liquid crystal filling process can be understood as the reverse process of evacuation. After the cavity of the liquid crystal cell is evacuated to the required vacuum degree, the liquid crystal on the filling tray comes into full contact with the injection port of the liquid crystal cell, and then nitrogen is filled into the filling chamber. At this time, there is a certain pressure difference between the inside of the cavity of the liquid crystal cell and the filling chamber, and the liquid crystal on the filling tray is sucked into the cavity of the liquid crystal cell until the cavity is filled. When the cell thickness of the liquid crystal cell becomes smaller, the cavity gap of the liquid crystal cell becomes smaller. Coupled with the uneven inner cavity of the liquid crystal cell, the liquid crystal filling time also becomes longer accordingly. Therefore, if the evacuation time and the liquid crystal filling time are not extended, problems such as insufficient or poor liquid crystal filling will occur.

[0006] Second, the above-mentioned existing technology is prone to poor liquid crystal flushing. To solve the problem of low production efficiency caused by the reduction of the cell gap of the liquid crystal cell, the relevant countermeasure is to increase the vacuum degree of the liquid crystal filling chamber from about 3 Pa in the conventional case to less than or equal to 1 Pa. However, with the increase of the vacuum degree, the pressure difference between the cavity of the liquid crystal cell and the filling chamber increases accordingly, thus exacerbating the impact force when the filled liquid crystal is instantaneously sucked into the cavity. There is a layer of grooves with highly consistent directionality on the inner wall of the liquid crystal cell cavity. The layer wall with grooves having a pretilt angle for orientation is a polyimide layer, and the consistency of the groove direction is the key factor for the ordered arrangement of liquid crystal molecules on the polyimide layer. During the liquid crystal filling process, the impact of the liquid crystal flow on the polyimide layer or the indirect impact caused by the displacement of the plastic balls by the liquid crystal flow will damage the pretilt angle for orientation of the polyimide layer or cause the plastic balls to aggregate, ultimately weakening its orientation ability and forming the phenomenon of poor flushing at the injection port. Summary of the Invention

[0007] The purpose of the embodiment of the present application is to provide a liquid crystal filling system and a liquid crystal filling method, which can achieve good liquid crystal filling of a liquid crystal cell with a bottom cell gap without changing the power of the vacuum pump unit and increasing the vacuum degree of the filling chamber.

[0008] To achieve the above purpose, the technical solution adopted in the present application is: to provide a liquid crystal filling system, which includes:

[0009] A filling chamber;

[0010] A control unit;

[0011] A vacuum pump assembly, connected to the filling chamber and signal-connected to the control unit, for pumping out the air in the filling chamber under the control of the control unit and making the filling chamber form a vacuum state with a set vacuum degree;

[0012] A liquid crystal carrying mechanism, at least partially located in the filling chamber; the liquid crystal carrying mechanism located in the filling chamber includes a first part fixed relative to the filling chamber and a second part movable relative to the filling chamber. One of the first part and the second part is used for carrying the liquid crystal to be filled, and the other of the two is used for carrying the liquid crystal cell to be filled; the liquid crystal carrying mechanism is signal-connected to the control unit and is used for moving the second part under the control of the control unit to make the liquid crystal to be filled and the liquid crystal cell to be filled move away from or close to each other.

[0013] A recharging gas micro-flow input valve group, connected to the filling chamber and signal-connected to the control unit, for inputting recharging gas into the filling chamber under the control of the control unit.

[0014] In one embodiment, the vacuum pump assembly includes a vacuum pump group and a vacuum valve, the vacuum valve is connected to the perfusion chamber, and the vacuum pump group is connected to the vacuum valve; the vacuum pump group includes at least one vacuum pump connected in series;

[0015] The vacuum pump group and the vacuum valve signals are connected to the control unit, and the control unit is used to control the opening and closing of the vacuum valve and the vacuum pump group in real time.

[0016] In one embodiment, the backfill gas micro-flow input valve group includes a digitally controlled pressure proportional valve, a digitally controlled flow meter and a solenoid valve connected in sequence, the solenoid valve is connected to the perfusion chamber, and the digitally controlled pressure proportional valve is used to connect to the backfill gas reservoir or the backfill gas generator;

[0017] The digital controlled pressure proportional valve, digital controlled flow meter and solenoid valve are all connected to the control unit by signals.

[0018] In one embodiment, the crystal filling system further comprises a vacuum sensor, which is disposed inside the filling chamber and is used to obtain the current vacuum degree inside the filling chamber in real time;

[0019] The vacuum sensor signal is connected to the control unit, and the control unit is used to control the vacuum pump assembly according to the current vacuum degree obtained by the vacuum sensor.

[0020] In one embodiment, the liquid crystal bearing mechanism further includes a lifting part, and the lifting part includes a driving part, a transmission part and an execution part which are sequentially connected in transmission; wherein,

[0021] The driving part and the transmission part are located outside the perfusion chamber, one end of the actuator transmission-connected to the transmission part is located outside the perfusion chamber, and one end of the actuator away from the transmission part is located inside the perfusion chamber and transmission-connected to the second part.

[0022] In one embodiment, the perfusion system further comprises a support frame, wherein the support frame has a support platform, and the perfusion chamber is supported above the support platform;

[0023] The driving part and the transmission part are located below the supporting platform, and the execution part passes through the bottom wall of the perfusion chamber and is sealed and connected to the bottom wall.

[0024] In one embodiment, the vacuum pump group includes a direct-connected pump and a Roots pump connected in series, and the direct-connected pump is connected to the vacuum valve; and both the direct-connected pump and the Roots pump are connected to the control unit by signal.

[0025] The beneficial effects of the crystal filling system provided by the present application are:

[0026] Compared with the prior art, the crystal perfusion system provided by the present application does not change the power of the vacuum pump group and does not increase the vacuum degree value inside the perfusion chamber. Under the control of the control unit, it can extract the air inside the perfusion chamber in the way of triggering oscillation according to the set established program and form a vacuum state with a set vacuum degree inside the perfusion chamber. The fluctuation of the vacuum degree can trigger a relaxation oscillation effect on the liquid crystal cell to be perfused. This relaxation oscillation effect is beneficial to the discharge of air from the inner cavity, thereby shortening the air extraction time and improving the production efficiency. And under the control of the control unit, the backfill gas micro-flow input valve group is controlled to input backfill gas into the perfusion chamber in the way of increasing flow rate from small to large. Since the backfill gas micro-flow input valve group is used to realize the numerical control management of the flow rate change rate, the suction speed of the liquid crystal to be perfused is slow and controllable, thereby avoiding the impact on the polyimide layer in the liquid crystal cell to be perfused or the displacement and aggregation of plastic balls caused by the liquid crystal flow during the suction process of the liquid crystal to be perfused, and solving the problem of poor flushing at the injection port.

[0027] Another object of the present application is also to provide a crystal perfusion method for the crystal perfusion system as described above. The method includes:

[0028] The vacuum pump assembly is controlled to start by the control unit. The vacuum pump assembly evacuates the inside of the perfusion chamber for a set time under the control of the control unit to form a vacuum state with a set vacuum degree inside the perfusion chamber.

[0029] The liquid crystal carrying mechanism is controlled to start by the control unit. The liquid crystal carrying mechanism moves the second part thereof to align with the first part thereof under the control of the control unit so that the liquid crystal to be perfused and the injection port of the liquid crystal cell to be perfused are in full contact.

[0030] The backfill gas micro-flow input valve group is controlled to start by the control unit. The backfill gas micro-flow input valve group inputs backfill gas into the inside of the perfusion chamber under the control of the control unit so that a pressure difference is formed between the inner cavity of the liquid crystal cell to be perfused and the inside of the perfusion chamber, and then the liquid crystal to be perfused is adsorbed into the inner cavity of the liquid crystal cell to be perfused.

[0031] The liquid crystal carrying mechanism is controlled to start by the control unit. The liquid crystal carrying mechanism moves the second part away from the first part under the control of the control unit to separate the liquid crystal to be perfused and the injection port of the liquid crystal cell to be perfused.

[0032] In one embodiment, the method further includes:

[0033] The current vacuum degree value inside the perfusion chamber is obtained in real time through a vacuum sensor.

[0034] The control unit detects the current vacuum degree value acquired by the vacuum sensor in real time, and controls the opening or closing of the vacuum valve in the vacuum pump assembly according to the current vacuum degree value, so that the current vacuum degree value inside the perfusion chamber increases with the opening of the vacuum valve or decreases with the closing of the vacuum valve.

[0035] In one embodiment, the control unit at least includes a digital control vacuum gauge signal-connected to the vacuum sensor and a PLC controller signal-connected to the digital control vacuum gauge; the method further includes:

[0036] The digital control vacuum gauge detects the current vacuum degree value acquired by the vacuum sensor in real time and sends the current vacuum degree value to the PLC controller;

[0037] The PLC controller receives the current vacuum degree value and controls the opening or closing of the vacuum valve according to the current vacuum degree value, so that the current vacuum degree value inside the perfusion chamber increases with the opening of the vacuum valve or decreases with the closing of the vacuum valve.

[0038] In one embodiment, the PLC controller at least includes a receiving unit, a judging unit and a control unit; the method further includes:

[0039] The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge and sends the current vacuum degree value to the judging unit;

[0040] The judging unit receives the current vacuum degree value and judges whether the current vacuum degree value reaches a first preset trigger oscillation vacuum degree value, obtains a judgment result and sends the judgment result to the control unit;

[0041] If the judgment result is that the current vacuum degree rises to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve to close according to the judgment result and keeps the vacuum valve in the closed state within a set time, so that the current vacuum degree value inside the perfusion chamber drops to a second preset trigger oscillation vacuum degree value; wherein, the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value;

[0042] If the judgment result is that the current vacuum degree value does not rise to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve to remain in the open state according to the judgment result.

[0043] In one embodiment, if the judgment result is that the current vacuum degree rises to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve to close according to this judgment result and keeps the vacuum valve in the closed state within a set time, so that the current vacuum degree value inside the perfusion chamber drops to the second preset trigger oscillation vacuum degree value; after the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value, it further includes:

[0044] The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge and sends the current vacuum degree value to the judgment unit;

[0045] The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value drops to the second preset trigger oscillation vacuum degree value, obtains a judgment result and sends the judgment result to the control unit;

[0046] If the judgment result is that the current vacuum degree value drops to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve to open according to this judgment result and keeps the vacuum valve in the open state within a set time, so that the current vacuum degree value inside the perfusion chamber rises to the first preset trigger oscillation vacuum degree value, and repeats the steps as described in claim 7;

[0047] If the judgment result is that the current vacuum degree value does not drop to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve to remain in the closed state according to this judgment result.

[0048] In one embodiment, the PLC controller at least includes a receiving unit, a judgment unit and a control unit; the method further includes:

[0049] The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge and sends the current vacuum degree value to the judgment unit;

[0050] The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value reaches the preset perfusion vacuum degree value, obtains a judgment result and sends the judgment result to the control unit;

[0051] If the judgment result is that the current vacuum degree rises to the preset perfusion vacuum degree value, the control unit sends an execution instruction to the lifting part of the liquid crystal carrying mechanism according to this judgment result, to control the driving part to drive the second part therein to move a set distance relative to the first part, so that the liquid crystal to be perfused and the injection port of the liquid crystal to be perfused are in full contact;

[0052] If the judgment result is that the current vacuum degree has not risen to the preset perfusion vacuum degree value, the control unit controls the vacuum valve to remain in the open state according to this judgment result.

[0053] In one embodiment, the method further includes:

[0054] After the lifting part drives the second part therein to move a set distance relative to the first part, the lifting part sends a feedback signal to the control unit, and the control unit controls the vacuum valve to close according to the feedback signal.

[0055] In one embodiment, after the lifting part drives the second part therein to move a set distance relative to the first part, the lifting part sends a feedback signal to the control unit, and the control unit opens the backfill gas micro-flow input valve group according to the feedback signal and controls the input flow rate of the backfill gas micro-flow input valve group to gradually input the backfill gas from small to large.

[0056] In one embodiment, after the control unit opens the backfill gas micro-flow input valve group according to the feedback signal and controls the input flow rate of the backfill gas micro-flow input valve group to gradually input the backfill gas from small to large, the method further includes:

[0057] The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge and sends the current vacuum degree value to the judgment unit;

[0058] The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value has dropped to the atmospheric pressure value, obtains a judgment result and sends the judgment result to the control unit;

[0059] If the judgment result is that the current vacuum degree has dropped to the atmospheric pressure value and the set liquid crystal injection time has been reached, the control unit sends an execution instruction to the lifting part of the liquid crystal carrying mechanism according to this judgment result to control the driving part to drive the second part therein to move a set distance relative to the first part, so that the liquid crystal to be perfused and the injection port of the liquid crystal to be perfused are away from each other, and controls the backfill gas micro-flow input valve group to close according to this judgment result;

[0060] If the judgment result is that the current vacuum degree has not dropped to the atmospheric pressure value, the control unit controls the backfill gas micro-flow input valve group to remain in the open state according to this judgment result.

[0061] The beneficial effect of the liquid crystal perfusion method provided by this application lies in:

[0062] Compared with the prior art, the crystal perfusion method provided by the present application does not change the power of the vacuum pump group and does not increase the vacuum degree value inside the perfusion chamber. Under the control of the control unit, the air inside the perfusion chamber can be extracted in a way that triggers oscillations according to a set established program, and a vacuum state with a set vacuum degree can be formed inside the perfusion chamber. The fluctuation of the vacuum degree can cause a relaxation oscillation effect in the liquid crystal cell to be perfused, and this relaxation oscillation effect is beneficial to the discharge of air inside the inner cavity body, thereby shortening the air extraction time and improving production efficiency. And under the control of the control unit, the backfill gas micro-flow input valve group is controlled to input backfill gas into the perfusion chamber in a flow rate manner from small to large according to a set established program. Since the backfill gas micro-flow input valve group is used to realize the numerical control management of the flow rate change rate, the speed at which the liquid crystal to be perfused is inhaled is slow and controllable, thereby avoiding impacts on the polyimide layer inside the liquid crystal cell to be perfused or adverse effects such as the displacement and aggregation of plastic balls caused by the liquid crystal flow during the inhalation process of the liquid crystal to be perfused, and solving the problem of poor flushing at the injection port. Description of the Drawings

[0063] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0064] Figure 1 Schematic diagram of the crystal perfusion system provided by the embodiment of the present application;

[0065] Figure 2 The first flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0066] Figure 3 The second flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0067] Figure 4 The third flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0068] Figure 5 The fourth flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0069] Figure 6 The fifth flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0070] Figure 7 The sixth flowchart of the crystal perfusion method provided by the embodiment of the present application;

[0071] Figure 8 The seventh flowchart of the crystal perfusion method provided by the embodiment of the present application.

[0072] Among them, the reference numerals in the figures are as follows:

[0073] 10, perfusion chamber; 20, control unit; 30, vacuum pump assembly; 40, liquid crystal carrier mechanism; 50, recharging gas micro-flow input valve group; 60, vacuum sensor; 70, support frame;

[0074] 201, digital control vacuum gauge; 202, PLC controller; 203, human-machine interface;

[0075] 301, vacuum pump group; 302, vacuum valve; 301a, direct-connected pump; 301b, Roots pump;

[0076] 401, first part; 402, second part; 403, lifting part; 403a, driving part; 403b, transmission part; 403c, execution part;

[0077] 501, digital control pressure proportional valve; 502, digital control flowmeter; 503, solenoid valve. Detailed implementation manners

[0078] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application clearer, the following further details this application in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not used to limit this application.

[0079] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0080] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

[0081] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of this application, "a plurality" means two or more, unless otherwise specifically defined.

[0082] The perfusion system and perfusion method provided by the embodiments of the present application will now be described.

[0083] Referring Figure 1 As shown, the perfusion system provided by the embodiments of the present application includes a perfusion chamber 10, a control unit 20, a vacuum pump assembly 30, a liquid crystal carrier mechanism 40, and a backfill gas microflow input valve.

[0084] Among them, the perfusion chamber 10 has a perfusion chamber with a certain volume for accommodating the liquid crystal to be perfused and the liquid crystal cell to be perfused.

[0085] Among them, the vacuum pump assembly 30 is connected to the perfusion chamber 10 and signal-connected to the control unit 20, and is used to extract the air in the perfusion chamber 10 under the control of the control unit 20 and make the perfusion chamber 10 form a vacuum state with a set vacuum degree.

[0086] Among them, at least a part of the liquid crystal carrier mechanism 40 is located in the perfusion chamber 10; the liquid crystal carrier mechanism 40 located in the perfusion chamber 10 includes a first part 401 fixed relative to the perfusion chamber 10 and a second part 402 movable relative to the perfusion chamber 10. One of the first part 401 and the second part 402 is used to carry the liquid crystal to be perfused, and the other is used to carry the liquid crystal cell to be perfused; the liquid crystal carrier mechanism 40 is signal-connected to the control unit 20 and is used to move the second part 402 under the control of the control unit 20 to move the liquid crystal to be perfused and the liquid crystal cell to be perfused away from or close to each other;

[0087] Among them, the backfill gas microflow input valve group 50 is connected to the perfusion chamber 10 and signal-connected to the control unit 20, and is used to input backfill gas into the perfusion chamber 10 under the control of the control unit 20.

[0088] For the perfusion system provided by the present application, without changing the power of the vacuum pump group 301 and without increasing the vacuum degree value inside the perfusion chamber 10, under the control of the control unit 20, the air in the perfusion chamber 10 can be extracted in a way that triggers oscillations according to a set established program, and a vacuum state with a set vacuum degree can be formed in the perfusion chamber 10. The fluctuation of the vacuum degree can cause a relaxation oscillation effect on the liquid crystal cell to be perfused, and this relaxation oscillation effect is beneficial to the discharge of air in the inner cavity, thereby shortening the air extraction time and improving production efficiency. And under the control of the control unit 20, the backfill gas microflow input valve group 50 is controlled to input backfill gas into the perfusion chamber 10 in a flow rate manner from small to large according to a set established program. Since the backfill gas microflow input valve group 50 is used to realize the digital control of the flow rate change rate, the speed at which the liquid crystal to be perfused is inhaled is slow and controllable, thereby avoiding impacts on the polyimide layer in the liquid crystal cell to be perfused during the inhalation process of the liquid crystal to be perfused or adverse effects such as the displacement and aggregation of plastic balls caused by the liquid crystal flow, and solving the problem of poor flushing at the injection port.

[0089] In one embodiment, the vacuum pump assembly 30 includes a vacuum pump group 301 and a vacuum valve 302, the vacuum valve 302 is connected to the perfusion chamber 10, and the vacuum pump group 301 is connected to the vacuum valve 302; the vacuum pump group 301 includes at least one vacuum pump connected in series; the vacuum pump group 301 and the vacuum valve 302 are connected to the control unit 20 by signal, and the control unit 20 is used to control the opening and closing of the vacuum valve 302 and the vacuum pump group 301 in real time.

[0090] Preferably, the vacuum pump group 301 includes a direct-connected pump 301 a and a Roots pump 301 b connected in series, wherein the direct-connected pump 301 a is connected to the vacuum valve 302 ; and both the direct-connected pump 301 a and the Roots pump 301 b are connected to the control unit 20 by signals.

[0091] When the perfusion system requires a working pressure of 1000 Pa or less, the direct-connected pump 301a can meet the use requirements. When the perfusion system requires a working pressure of more than 1000 Pa, the direct-connected pump 301a and the roots pump 301b can work together to meet the use requirements.

[0092] In one embodiment, the backfill gas micro-flow input valve group 50 includes a digitally controlled pressure proportional valve 501, a digitally controlled flow meter 502 and a solenoid valve 503 connected in sequence, the solenoid valve 503 is connected to the perfusion chamber 10, and the digitally controlled pressure proportional valve 501 is used to connect to the backfill gas reservoir or the backfill gas generator; the digitally controlled pressure proportional valve 501, the digitally controlled flow meter 502 and the solenoid valve 503 are all connected to the control unit 20 by signal.

[0093] In one embodiment, the crystal filling system also includes a vacuum sensor 60, which is placed inside the filling chamber 10 and is used to obtain the current vacuum degree inside the filling chamber 10 in real time; the vacuum sensor 60 signal is connected to the control unit 20, and the control unit 20 is used to control the vacuum pump assembly 30 according to the current vacuum degree obtained by the vacuum sensor 60.

[0094] In one embodiment, the liquid crystal carrier mechanism 40 also includes a lifting part 403, and the lifting part 403 includes a driving part 403a, a transmission part 403b and an execution part 403c which are sequentially connected in transmission; wherein the driving part 403a and the transmission part 403b are located outside the perfusion chamber 10, one end of the execution part 403c which is transmission-connected to the transmission part 403b is located outside the perfusion chamber 10, and one end of the execution part 403c which is away from the transmission part 403b is located inside the perfusion chamber 10 and transmission-connected to the second part 402.

[0095] In the embodiment of the present application, the first part 401 can be a liquid crystal bracket fixedly connected to the inner wall of the perfusion chamber 10, on which the liquid crystal box to be perfused can be supported, and the second part 402 can be a liquid crystal tray transmission-connected to the execution part 403c, on which the liquid crystal to be perfused can be supported.

[0096] In the embodiment of the present application, the driving part 403a is preferably a driving motor, and the transmission part 403b is preferably two bevel gears meshing with each other. One of the bevel gears is drivingly connected to the driving shaft of the driving motor, and the other bevel gear is drivingly connected to a transmission lead screw. The transmission lead screw is drivingly connected to the execution part 403c. The rotation of the driving motor is converted into the linear lifting motion of the execution part 403c through the meshing of the bevel gears and the transmission lead screw.

[0097] In one embodiment, the crystal filling system further includes a support frame 70. The support frame 70 has a support platform, and the filling chamber 10 is supported above the support platform. The driving part 403a and the transmission part 403b are located below the support platform, and the execution part 403c passes through the bottom wall of the filling chamber 10 and is sealingly connected to the bottom wall. Moreover, the above-mentioned vacuum pump group 301 is located on one side of the support frame 70, and the control part 20 is arranged on the other side of the support frame 70 opposite to the vacuum pump group 301.

[0098] In this embodiment, the vacuum pump group 301 is installed on one side of the filling chamber 10 and is connected to the filling chamber 10 through a vacuum pipeline and a vacuum valve 302 for controlling the opening and closing of the pipeline on the pipeline.

[0099] In the embodiment of the present application, the control part 20 includes a digital control vacuum gauge 201 signal-connected to the vacuum sensor 60, a PLC controller 202 signal-connected to the digital control vacuum gauge 201, a human-machine interface 203 and other electronic control components. Among them, the vacuum sensor 60 is used to detect the current vacuum degree value obtained by the above-mentioned vacuum sensor 60 in real time. Among them, the PLC controller 202 at least includes a receiving unit, a judging unit and a control unit. The functions of each unit are different in different steps of the corresponding method of the filling system. Taking the following crystal filling method as an example.

[0100] The liquid crystal filling system provided by the embodiment of the present application places the liquid crystal cell to be filled on the first part 401 inside the filling chamber 10, and the injection port of the liquid crystal cell to be filled is aligned with the injection medium adsorbed with an appropriate amount of liquid crystal on the second part 402, that is, the liquid crystal to be filled. Close the closing door of the filling chamber 10, start the vacuum pump group 301, obtain the dynamic vacuum degree value through the vacuum sensor 60 in the filling chamber 10, and the PLC controller 202 controls each electrical component to complete the vacuum pipeline opening and closing, the lifting of the second part 402 and other evacuation processes of the liquid crystal filling process according to the obtained vacuum degree value, vacuum time and other relevant information. Parameters such as the vacuum degree value, vacuum time, and the opening and closing times of the vacuum valve 302 in the vacuum pipeline during the evacuation process can be programmed according to the process requirements of the product, and have a single-stage or multi-stage vacuum degree climbing management function to avoid the displacement and aggregation of the supporting plastic balls in the liquid crystal cell caused by rapid air extraction. In addition, during the evacuation process, the vacuum valve 302 in the pipeline connecting the vacuum pump group 301 and the filling chamber 10 can generate opening and closing actions under the control of the PLC controller 202, causing the vacuum degree value of the filling chamber 10 to fluctuate, and the fluctuation of the vacuum degree value further triggers a relaxation oscillation effect in the liquid crystal cell. This relaxation oscillation effect is beneficial to the discharge of air in the liquid crystal cell, shortens the air extraction time, and improves production efficiency.

[0101] After meeting the evacuation conditions for filling liquid crystal, the second part 402 rises to the liquid crystal filling position under the drive of the lifting part 403, so that the injection port of the liquid crystal cell and the medium adsorbed with an appropriate amount of liquid crystal on the second part 402 are in full contact. Under the control of the PLC controller 202, the vacuum valve 302 of the pipeline is closed. Immediately afterwards, under the control of the PLC controller 202, the backfill gas micro-flow input valve group 50 starts to fill the filling chamber 10 with nitrogen at an extremely small flow rate. At this time, the liquid crystal attached to the medium will be slowly sucked into the liquid crystal cell until the entire inner cavity of the liquid crystal cell is filled, completing the liquid crystal filling process. The nitrogen filling flow rate and filling time parameters can be programmed according to the process requirements of the product. Since the backfill gas micro-flow input valve group 50 is used to realize the numerical control management of the flow rate change rate when filling nitrogen, the speed at which the liquid crystal is sucked in is slow and controllable, which can avoid the impact on the polyimide layer in the liquid crystal cell during the liquid crystal suction process or the displacement and aggregation of plastic balls caused by the liquid crystal flow, and solve the problem of poor flushing at the injection port.

[0102] Refer to Figures 2 - 8 As shown, another object of the embodiment of the present application is also to provide a liquid crystal filling method for the liquid crystal filling system as described above. The method includes:

[0103] Ⅰ. Preparation before operation:

[0104] a. Confirm the positions of the injection port of the liquid crystal cell and the injection medium (liquid crystal to be filled)

[0105] Place the liquid crystal cell on the first part 401 inside the filling chamber 10. In manual mode, click the corresponding screen of the human-machine interface 203 in the control unit 20, so that the second part 402 rises to the critical position for liquid crystal filling under the drive of the lifting part 403. Use an external mobile CCD (mobile camera) to obtain an image between the injection port of the liquid crystal cell and the injection medium, and confirm the effective pre-alignment of the two.

[0106] b. Confirm the amount of liquid crystal to be filled

[0107] Before liquid crystal filling, it is necessary to confirm the amount of liquid crystal adsorbed by the injection medium on the second part 402. Take the usage ratio of 6 ml (liquid crystal) / 1 m2 (product surface area) as an example.

[0108] c. Set the process parameters for liquid crystal filling

[0109] Click the corresponding window of the human-machine interface 203 in the control unit 20, and fill in and save the process parameters such as the vacuum degree value, vacuum time, triggering oscillation function vacuum degree, oscillation times, nitrogen filling flow rate, nitrogen filling time, filling holding time, etc. of the liquid crystal cell to be filled, and complete the setting of the injection process conditions.

[0110] Ⅱ. Liquid crystal injection operation

[0111] Confirm that the liquid crystal injection working mode in the human-machine interface 203 of the control unit 20 is in the automatic state. Place the liquid crystal cell to be filled on the first part 401 inside the filling chamber 10, close the closing door of the filling chamber 10, and start the liquid crystal injection button. The liquid crystal injection program is activated, and the PLC controller 202 issues an instruction to start the vacuum pump group 301. Immediately afterwards, the vacuum valve 302 between the vacuum pump group 301 and the filling chamber 10 is also started by the instruction issued by the PLC controller 202, and the equipment enters the vacuum pumping process.

[0112] The specific step flow is as follows:

[0113] 101. Control the start of the vacuum pump assembly 30 through the control unit 20. The vacuum pump assembly 30 evacuates the inside of the filling chamber 10 for a set time under the control of the control unit 20 to form a vacuum state with a set vacuum degree inside the filling chamber 10;

[0114] 102. Control the start of the liquid crystal carrier mechanism 40 through the control unit 20. The liquid crystal carrier mechanism 40 moves the second part 402 therein to align with the first part 401 therein under the control of the control unit 20, so that the liquid crystal to be filled and the injection port of the liquid crystal cell to be filled are in full contact;

[0115] 103. The control unit 20 controls the start of the backfill gas microflow input valve group 50. The backfill gas microflow input valve group 50 inputs backfill gas into the interior of the filling chamber 10 under the control of the control unit 20, so as to form a pressure difference between the inner cavity of the liquid crystal cell to be filled and the interior of the filling chamber 10, and then adsorb the liquid crystal to be filled into the inner cavity of the liquid crystal cell to be filled.

[0116] 104. The control unit 20 controls the start of the liquid crystal carrier mechanism 40. The liquid crystal carrier mechanism 40 moves the second part 402 away from the first part 401 under the control of the control unit 20 to separate the liquid crystal to be filled and the injection port of the liquid crystal cell to be filled.

[0117] In one embodiment, the method step 101 further includes:

[0118] 1011. The current vacuum degree value inside the filling chamber 10 is obtained in real time through the vacuum sensor 60;

[0119] 1012. The control unit 20 detects in real time the current vacuum degree value obtained by the vacuum sensor 60, and controls the opening or closing of the vacuum valve 302 in the vacuum pump assembly 30 according to the current vacuum degree value, so that the current vacuum degree value inside the filling chamber 10 increases with the opening of the vacuum valve 302 or decreases with the closing of the vacuum valve 302.

[0120] In one embodiment, the control unit 20 at least includes a digital control vacuum gauge 201 signal-connected to the vacuum sensor 60 and a PLC controller 202 signal-connected to the digital control vacuum gauge 201; the method step 1012 further includes:

[0121] 1012a. The digital control vacuum gauge 201 detects in real time the current vacuum degree value obtained by the vacuum sensor 60 and sends the current vacuum degree value to the PLC controller 202;

[0122] 1012b. The PLC controller 202 receives the current vacuum degree value and controls the opening or closing of the vacuum valve 302 according to the current vacuum degree value, so that the current vacuum degree value inside the filling chamber 10 increases with the opening of the vacuum valve 302 or decreases with the closing of the vacuum valve 302.

[0123] In one embodiment, the PLC controller 202 at least includes a receiving unit, a judging unit and a control unit; the method further includes:

[0124] 1012b-1. The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge 201 and sends the current vacuum degree value to the judging unit;

[0125] 1012b-2. The judging unit receives the current vacuum degree value and judges whether the current vacuum degree value reaches the first preset trigger oscillation vacuum degree value, obtains a judgment result and sends the judgment result to the control unit;

[0126] 1012b-3'. If the judgment result is that the current vacuum degree has increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve 302 to close according to this judgment result and keeps the vacuum valve 302 in the closed state within the set time, so that the current vacuum degree value inside the perfusion chamber 10 drops to the second preset trigger oscillation vacuum degree value; wherein, the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value;

[0127] 1012b-3". If the judgment result is that the current vacuum degree value has not increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve 302 to continue to be in the open state according to this judgment result.

[0128] In one embodiment, if the judgment result is that the current vacuum degree has increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve 302 to close according to this judgment result and keeps the vacuum valve 302 in the closed state within the set time, so that the current vacuum degree value inside the perfusion chamber 10 drops to the second preset trigger oscillation vacuum degree value; wherein, after the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value, it further includes:

[0129] 1012b-4. The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge 201 and sends the current vacuum degree value to the judgment unit;

[0130] 1012b-5. The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value has dropped to the second preset trigger oscillation vacuum degree value, obtains the judgment result and sends the judgment result to the control unit;

[0131] 1012b-6'. If the judgment result is that the current vacuum degree value has dropped to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve 302 to open according to this judgment result and keeps the vacuum valve 302 in the open state within the set time, so that the current vacuum degree value inside the perfusion chamber 10 increases to the first preset trigger oscillation vacuum degree value, and repeats the steps of claim 7;

[0132] 1012b-6". If the judgment result is that the current vacuum degree value has not dropped to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve 302 to continue to be in the closed state according to this judgment result.

[0133] In one embodiment, the PLC controller 202 at least includes a receiving unit, a judgment unit and a control unit; the method 102 further includes:

[0134] 1021. The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge 201 and sends the current vacuum degree value to the judgment unit;

[0135] 1022. The judgment unit receives the current vacuum value and judges whether the current vacuum value reaches the preset perfusion vacuum value, obtains a judgment result and sends the judgment result to the control unit;

[0136] 1023′. If the judgment result is that the current vacuum rises to the preset perfusion vacuum value, the control unit sends an execution instruction to the lifting part 403 of the liquid crystal carrying mechanism 40 according to this judgment result, so as to control the driving part 403a to drive the second part 402 therein to move a set distance relative to the first part 401, so that the liquid crystal to be perfused and the injection port of the liquid crystal to be perfused are in full contact;

[0137] 1023". If the judgment result is that the current vacuum does not rise to the preset perfusion vacuum value, the control unit controls the vacuum valve 302 to remain in the open state according to this judgment result.

[0138] In one embodiment, after the method step 1023′, the following is further included:

[0139] 1024. After the lifting part 403 drives the second part 402 therein to move a set distance relative to the first part 401, the lifting part 403 sends a feedback signal to the control unit, and the control unit closes the vacuum valve 302 according to the feedback signal.

[0140] In one embodiment, after the method step 1023′, the following is further included:

[0141] 1031. After the lifting part 403 drives the second part 402 therein to move a set distance relative to the first part 401, the lifting part 403 sends a feedback signal to the control unit, and the control unit opens the backfill gas micro-flow input valve group 50 according to the feedback signal and controls the input flow of the backfill gas micro-flow input valve group 50 to gradually input the backfill gas from small to large.

[0142] In one embodiment, after the method that the control unit opens the backfill gas micro-flow input valve group 50 according to the feedback signal and controls the input flow of the backfill gas micro-flow input valve group 50 to gradually input the backfill gas from small to large, the following is further included:

[0143] 1032. The receiving unit receives the current vacuum value detected by the digital control vacuum gauge 201 and sends the current vacuum value to the judgment unit;

[0144] 1033. The judgment unit receives the current vacuum value and judges whether the current vacuum value drops to the atmospheric pressure value, obtains a judgment result and sends the judgment result to the control unit;

[0145] 1034'. If the judgment result is that the current vacuum degree drops to the atmospheric pressure value, the control unit issues an execution instruction to the lifting part 403 of the liquid crystal carrying mechanism 40 according to this judgment result, so as to control the driving part 403a to drive the second part 402 therein to move a set distance relative to the first part 401, so that the liquid crystal to be filled and the injection port of the liquid crystal to be filled are away from each other, and closes the backfill gas micro-flow input valve group 50 according to this judgment result;

[0146] 1034". If the judgment result is that the current vacuum degree does not drop to the atmospheric pressure value, the control unit controls the backfill gas micro-flow input valve group 50 to remain in the open state according to this judgment result.

[0147] In the crystal filling method provided by the present application, during the vacuum pumping process, when the vacuum degree value reaches the set first preset trigger oscillation vacuum degree value (about 100 Pa), under the control of the PLC controller 202, the vacuum valve 302 (1201) between the vacuum pump group 301 and the filling chamber 10 will open and close repeatedly according to the set number of oscillations. When the vacuum valve 302 is closed, the vacuum degree value in the filling chamber 10 becomes lower to 2-3 Pa due to the sudden loss of the pumping attraction of the vacuum pump group 301. The liquid crystal cell to be filled in the filling chamber 10 also has its vacuum degree value changing from high to low, resulting in the inner cavity gap of the liquid crystal cell changing from large to small (note: when the air pressure outside the liquid crystal cell increases, the inner cavity gap becomes smaller). When the digital control vacuum gauge 201 in the control unit 20 detects that the vacuum degree value in the filling chamber 10 drops to the second preset trigger oscillation vacuum degree value (for example, about 5 Pa), the PLC controller 202 will issue an instruction to reopen the vacuum valve 302 to restore the vacuum pumping function. At this time, the inner cavity gap of the liquid crystal cell changes from small to large (note: when the air pressure outside the liquid crystal cell decreases, the inner cavity gap becomes larger). In this way, under the control of the PLC controller 202, the system reciprocates the above actions according to the set number of oscillations (depending on the product process requirements) to complete the vacuum oscillation.

[0148] As is well known, the inner cavity of the liquid crystal cell is covered with uneven ITO (indium tin oxide) electrodes. Therefore, the change in the inner cavity gap of the liquid crystal cell is conducive to the small amount of air remaining inside to overflow or redistribute from between the ITO electrodes and finally be discharged outside the cavity. After completing the oscillatory vacuum pumping process, continue to pump vacuum under the instruction of the PLC controller 202 until the filling vacuum degree required for liquid crystal filling (about 1-2 Pa) is satisfied.

[0149] After completing the above-mentioned oscillating vacuum pumping procedure, the filling chamber 10 reaches the required filling vacuum degree. The vacuum degree signal is acquired by the digital control vacuum gauge 201 in the control unit 20 and transmitted to the control unit of the PLC controller 202. The PLC controller 202 simultaneously sends an execution instruction (rise instruction) to the lifting part 403, and the second part 402 carrying an appropriate amount of liquid crystal to be filled rises to the liquid crystal filling position. At this time, the injection port of the liquid crystal cell is in full contact with the injection medium; immediately afterwards, the PLC controller 202 issues an instruction to close the vacuum valve 302, and then the PLC controller 202 issues an instruction to open the backfill gas micro-flow input valve group 50, and fills the filling chamber 10 with nitrogen at an extremely low flow rate of 30-50 ml / min under the control of the control unit. At this time, since the air pressure in the inner cavity of the liquid crystal cell is less than the air pressure in the filling chamber 10, a siphon effect is formed with the liquid crystal attached to the medium, and the liquid crystal is slowly sucked into the liquid crystal cell until the entire inner cavity of the liquid crystal cell is filled. The flow rate control of the backfill gas micro-flow input valve group 50 can be edited according to the requirements of the liquid crystal injection process and stored in the PLC controller 202, realizing continuous controllability of the nitrogen flow rate from small to large at different stages during the liquid crystal injection process, and avoiding the situation that the plastic balls supporting the liquid crystal cell are displaced or aggregated due to the too fast instantaneous liquid crystal suction speed in the initial stage of liquid crystal filling, resulting in damage to the polyimide layer (PI layer) in the cavity.

[0150] After the liquid crystal filling procedure is completed, the digital control vacuum gauge 201 in the control unit 20 detects that the vacuum degree value of the filling chamber 10 is in the atmospheric pressure state and transmits the information to the control unit of the PLC controller 202. Then the PLC controller 202 sends a descent instruction to the lifting part 403, and the second part 402 carrying an appropriate amount of liquid crystal descends to the standby position. At this time, the liquid crystal cell is in a separated state from the injection medium; then the PLC controller 202 sends an instruction to the acoustic and optical prompt unit therein, and the acoustic and optical prompt is triggered. The operator can open the door of the filling chamber 10 to take out the filled liquid crystal cell, and the whole process of the liquid crystal injection operation ends.

[0151] The crystal pouring method provided by the present application does not change the power of the vacuum pump group 301 and does not increase the vacuum degree value inside the pouring chamber 10. Under the control of the control unit 20, the air inside the pouring chamber 10 can be extracted in a way that triggers oscillation according to a set established program, and a vacuum state with a set vacuum degree is formed inside the pouring chamber 10. The fluctuation of the vacuum degree can trigger a relaxation oscillation effect on the liquid crystal cell to be poured. This relaxation oscillation effect is beneficial to the discharge of air from the inner cavity, thereby shortening the air extraction time and improving production efficiency. And under the control of the control unit 20, the backfill gas micro-flow input valve group 50 is controlled to input backfill gas into the pouring chamber 10 in a flow rate manner from small to large according to a set established program. Since the backfill gas micro-flow input valve group 50 is used to realize the numerical control management of the flow rate change rate, the speed at which the liquid crystal to be poured is inhaled is slow and controllable, thereby avoiding impacts on the polyimide layer inside the liquid crystal cell to be poured or adverse effects such as the displacement and aggregation of plastic balls caused by the liquid crystal flow during the inhalation of the liquid crystal to be poured, and solving the problem of poor flushing at the injection port.

[0152] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A crystal pouring system, characterized in that, Comprising: A perfusion chamber (10); A control unit (20); A vacuum pump assembly (30), connected to the perfusion chamber (10) and signal-connected to the control unit (20), for evacuating the air inside the perfusion chamber (10) under the control of the control unit (20) and creating a vacuum state with a set vacuum degree inside the perfusion chamber (10); A liquid crystal carrier mechanism (40), at least partially located inside the perfusion chamber (10); the liquid crystal carrier mechanism (40) located inside the perfusion chamber (10) includes a first part (401) fixed relative to the perfusion chamber (10) and a second part (402) movable relative to the perfusion chamber (10), one of the first part (401) and the second part (402) is used to carry the liquid crystal to be perfused, and the other of the two is used to carry the liquid crystal cell to be perfused; the liquid crystal carrier mechanism (40) is signal-connected to the control unit (20), for moving the second part (402) under the control of the control unit (20) to move the liquid crystal to be perfused and the liquid crystal cell to be perfused away from or close to each other; A backfill gas micro-flow input valve group (50), connected to the perfusion chamber (10) and signal-connected to the control unit (20), for inputting backfill gas into the perfusion chamber (10) under the control of the control unit (20); The backfill gas micro-flow input valve group (50) includes a numerically controlled pressure proportional valve (501), a numerically controlled flow meter (502) and a solenoid valve (503) connected in sequence, the solenoid valve (503) is connected to the perfusion chamber (10), and the numerically controlled pressure proportional valve (501) is used to connect to a backfill gas storage or a backfill gas generator; The numerically controlled pressure proportional valve (501), the numerically controlled flow meter (502) and the solenoid valve (503) are all signal-connected to the control unit (20); wherein, the input flow of the backfill gas micro-flow input valve group (50) gradually inputs backfill gas from small to large.

2. The liquid crystal perfusion system according to claim 1, wherein: The vacuum pump assembly (30) includes a vacuum pump group (301) and a vacuum valve (302), the vacuum valve (302) is connected to the perfusion chamber (10), and the vacuum pump group (301) is connected to the vacuum valve (302); the vacuum pump group (301) includes at least one series-connected vacuum pump; The vacuum pump group (301) and the vacuum valve (302) are signal-connected to the control unit (20), and the control unit (20) is used to control the opening and closing of the vacuum valve (302) and the vacuum pump group (301) in real time.

3. The liquid crystal perfusion system according to claim 1, wherein: The liquid crystal perfusion system further includes a vacuum sensor (60), the vacuum sensor (60) is placed inside the perfusion chamber (10) for obtaining the current vacuum degree inside the perfusion chamber (10) in real time. The vacuum sensor (60) is signal-connected to the control unit (20), and the control unit (20) is used to control the vacuum pump assembly (30) according to the current vacuum degree acquired by the vacuum sensor (60).

4. The wafer filling system according to claim 1, wherein: The liquid crystal bearing mechanism (40) further comprises a lifting part (403), wherein the lifting part (403) comprises a driving part (403a), a transmission part (403b) and an execution part (403c) which are sequentially connected in transmission; wherein: The driving part (403a) and the transmission part (403b) are located outside the perfusion chamber (10); one end of the actuator (403c) that is transmission-connected to the transmission part (403b) is located outside the perfusion chamber (10); and one end of the actuator (403c) that is away from the transmission part (403b) is located inside the perfusion chamber (10) and transmission-connected to the second part (402).

5. The crystal filling system according to claim 4, wherein: The crystal filling system further comprises a support frame (70), wherein the support frame (70) has a support platform, and the filling chamber (10) is supported above the support platform; The driving part (403a) and the transmission part (403b) are located below the support platform, and the execution part (403c) passes through the bottom wall of the perfusion chamber (10) and is sealed to the bottom wall.

6. The wafer filling system according to claim 2, wherein: The vacuum pump group (301) comprises a direct-connected pump (301a) and a Roots pump (301b) connected in series, wherein the direct-connected pump (301a) is connected to the vacuum valve (302); and both the direct-connected pump (301a) and the Roots pump (301b) are signal-connected to the control unit (20).

7. A crystal filling method, characterized in that, The method comprises: The vacuum pump assembly (30) is started by the control unit (20), and the vacuum pump assembly (30) evacuates the interior of the perfusion chamber (10) for a set time under the control of the control unit (20), so that the interior of the perfusion chamber (10) forms a vacuum state with a set vacuum degree; The control unit (20) controls the liquid crystal bearing mechanism (40) to start, and the liquid crystal bearing mechanism (40) moves the second part (402) thereof to align with the first part (401) thereof under the control of the control unit (20), so that the liquid crystal to be poured and the injection port of the liquid crystal box to be poured are in full contact; The control unit (20) controls the start-up of the refilling gas micro-flow input valve group (50), and the refilling gas micro-flow input valve group (50) inputs refilling gas into the interior of the perfusion chamber (10) under the control of the control unit (20), so that a pressure difference is formed between the inner cavity of the liquid crystal box to be perfused and the interior of the perfusion chamber (10), thereby causing the liquid crystal to be perfused to be adsorbed into the inner cavity of the liquid crystal box to be perfused; The liquid crystal carrying mechanism (40) is controlled to start by the control unit (20). Under the control of the control unit (20), the second part (402) of the liquid crystal carrying mechanism (40) is moved away from the first part (401) to separate the liquid crystal to be filled and the injection port of the liquid crystal cell to be filled. Among them, the recharge gas micro-flow input valve group (50) includes a numerically controlled pressure proportional valve (501), a numerically controlled flowmeter (502), and a solenoid valve (503) connected in sequence. The solenoid valve (503) is connected to the filling chamber (10), and the numerically controlled pressure proportional valve (501) is used to connect to a recharge gas storage or a recharge gas generator. The numerically controlled pressure proportional valve (501), the numerically controlled flowmeter (502), and the solenoid valve (503) are all signal-connected to the control unit (20); among them, the input flow of the recharge gas micro-flow input valve group (50) gradually inputs the recharge gas from small to large.

8. The crystal pouring method according to claim 7, wherein: The method further includes: The current vacuum degree value inside the filling chamber (10) is obtained in real time through the vacuum sensor (60). The control unit (20) detects in real time the current vacuum degree value obtained by the vacuum sensor (60), and controls the vacuum valve (302) in the vacuum pump assembly (30) to open or close according to the current vacuum degree value, so that the current vacuum degree value inside the filling chamber (10) increases as the vacuum valve (302) opens or decreases as the vacuum valve (302) closes.

9. The liquid crystal filling method according to claim 8, characterized in that: The control unit (20) at least includes a numerically controlled vacuum gauge (201) signal-connected to the vacuum sensor (60) and a PLC controller (202) signal-connected to the numerically controlled vacuum gauge (201); the method further includes: The numerically controlled vacuum gauge (201) detects in real time the current vacuum degree value obtained by the vacuum sensor (60) and sends the current vacuum degree value to the PLC controller (202). The PLC controller (202) receives the current vacuum degree value and controls the vacuum valve (302) to open or close according to the current vacuum degree value, so that the current vacuum degree value inside the filling chamber (10) increases as the vacuum valve (302) opens or decreases as the vacuum valve (302) closes.

10. The liquid crystal filling method according to claim 9, characterized in that: The PLC controller (202) at least includes a receiving unit, a judging unit, and a control unit; the method further includes: The receiving unit receives the current vacuum degree value detected by the numerically controlled vacuum gauge (201) and sends the current vacuum degree value to the judging unit. The judging unit receives the current vacuum degree value and judges whether the current vacuum degree value reaches a first preset trigger oscillation vacuum degree value, obtains a judgment result and sends the judgment result to the control unit. If the judgment result is that the current vacuum degree has increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve (302) to close according to this judgment result and keeps the vacuum valve (302) in the closed state within a set time, so that the current vacuum degree value inside the perfusion chamber (10) drops to the second preset trigger oscillation vacuum degree value; wherein, the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value; If the judgment result is that the current vacuum degree value has not increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve (302) to remain in the open state according to this judgment result.

11. The crystal filling method according to claim 10, characterized in that: After the "if the judgment result is that the current vacuum degree has increased to the first preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve (302) to close according to this judgment result and keeps the vacuum valve (302) in the closed state within a set time, so that the current vacuum degree value inside the perfusion chamber (10) drops to the second preset trigger oscillation vacuum degree value; wherein, the first preset trigger oscillation vacuum degree value is greater than the second preset trigger oscillation vacuum degree value", it further includes: The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge (201) and sends the current vacuum degree value to the judgment unit; The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value has dropped to the second preset trigger oscillation vacuum degree value, obtains a judgment result and sends the judgment result to the control unit; If the judgment result is that the current vacuum degree value has dropped to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve (302) to open according to this judgment result and keeps the vacuum valve (302) in the open state within a set time, so that the current vacuum degree value inside the perfusion chamber (10) increases to the first preset trigger oscillation vacuum degree value, and repeats the steps as described in claim 7; If the judgment result is that the current vacuum degree value has not dropped to the second preset trigger oscillation vacuum degree value, the control unit controls the vacuum valve (302) to remain in the closed state according to this judgment result.

12. The crystal perfusion method according to claim 9, characterized in that: The PLC controller (202) at least includes a receiving unit, a judgment unit and a control unit; the method further includes: The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge (201) and sends the current vacuum degree value to the judgment unit; The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value has reached the preset perfusion vacuum degree value, obtains a judgment result and sends the judgment result to the control unit; If the judgment result is that the current vacuum degree has risen to the preset perfusion vacuum degree value, the control unit issues an execution instruction to the lifting part (403) of the liquid crystal carrying mechanism (40) according to this judgment result, so as to control the driving part (403a) to drive the second part (402) therein to move a set distance relative to the first part (401), so that the liquid crystal to be perfused and the injection port of the liquid crystal to be perfused are in full contact; If the judgment result is that the current vacuum degree has not risen to the preset perfusion vacuum degree value, the control unit controls the vacuum valve (302) to remain in the open state according to this judgment result.

13. The crystal filling method according to claim 12, characterized in that, The method further includes: After the lifting part (403) drives the second part (402) therein to move a set distance relative to the first part (401), the lifting part (403) sends a feedback signal to the control unit, and the control unit controls the vacuum valve (302) to close according to the feedback signal.

14. The liquid crystal filling method according to claim 12, wherein: After the lifting part (403) drives the second part (402) therein to move a set distance relative to the first part (401), the lifting part (403) sends a feedback signal to the control unit, and the control unit opens the backfill gas micro-flow input valve group (50) according to the feedback signal and controls the input flow rate of the backfill gas micro-flow input valve group (50) to gradually input the backfill gas from small to large.

15. The crystal filling method according to claim 14, wherein After the method that the control unit opens the backfill gas micro-flow input valve group (50) according to the feedback signal and controls the input flow rate of the backfill gas micro-flow input valve group (50) to gradually input the backfill gas from small to large, it further includes: The receiving unit receives the current vacuum degree value detected by the digital control vacuum gauge (201) and sends the current vacuum degree value to the judgment unit; The judgment unit receives the current vacuum degree value and judges whether the current vacuum degree value has dropped to the atmospheric pressure value, obtains a judgment result and sends the judgment result to the control unit; If the judgment result is that the current vacuum degree has dropped to the atmospheric pressure value and after reaching the set liquid crystal injection time, the control unit issues an execution instruction to the lifting part (403) of the liquid crystal carrying mechanism (40) according to this judgment result, so as to control the driving part (403a) to drive the second part (402) therein to move a set distance relative to the first part (401), so that the liquid crystal to be perfused and the injection port of the liquid crystal to be perfused are away from each other, and controls the backfill gas micro-flow input valve group (50) to close according to this judgment result; If the judgment result is that the current vacuum degree has not dropped to the atmospheric pressure value, the control unit controls the backfill gas micro-flow input valve group (50) to remain in the open state according to this judgment result.

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