Electrostatic driving device and electrostatic thin film robot

Abstract

The present application discloses an electrostatic drive device and an electrostatic thin film robot. The moving part stator of the electrostatic drive device includes a first power supply bus and a first insulating layer. The moving part rotor includes a second power supply bus and a second insulating layer. The traction part is connected to the moving part rotor and is an anisotropic friction structure. The moving part stator and the moving part rotor are arranged in a constraint shell. The constraint shell is fixedly connected to the moving part stator. The power supply module is respectively connected to the first power supply bus and the second power supply bus and provides an alternating voltage. The moving part stator and the moving part rotor generate relative movement under the alternating voltage. The moving part rotor is used to drive the traction part to move. By continuously providing an alternating voltage to the electrostatic drive device through the power supply module, the electrostatic drive device can continuously move under the action of the traction part, realizing large-stroke movement.

Description

Technical Field

[0001] This application relates to the field of mechatronics technology, and in particular to an electrostatic drive device and an electrostatic thin film robot. Background Art

[0002] In recent years, with the increasing demand for automation in all walks of life, a global upsurge in the development of robots has emerged, and various robot products with diverse functions have been developed. In the process of robot automation, the image of traditional robots, like "iron warriors", is not only difficult to be accepted by people, but also traditional robots are dangerous to use due to their large overall rigidity. Therefore, researchers need to use complex algorithms to safely control traditional robots, which greatly increases the R & D cost of robots.

[0003] Under such circumstances, the concept of flexible robots began to be proposed. Flexible robots utilize emerging flexible materials and innovative driving methods to obtain better environmental adaptability, safety, and the possibility of human-machine interaction. Among them, electrostatic thin film robots have shown more excellent performance in the field of flexible robots due to their simple structure and easy operation. Currently, the research on electrostatic thin film robots is still in its infancy. Summary of the Invention

[0004] This application aims to solve at least one of the technical problems existing in the prior art. For this purpose, this application proposes an electrostatic drive device that can achieve large-stroke movement.

[0005] An electrostatic drive device according to an embodiment of the first aspect of this application includes: a moving part stator, a moving part mover, a traction part, a constraint shell, and an energy supply module. The moving part stator includes a first power supply bus and a first insulating layer. The moving part mover includes a second power supply bus and a second insulating layer. The traction part is connected to the moving part mover, and the traction part is an anisotropic friction structure. The moving part stator and the moving part mover are arranged in the constraint shell, and the constraint shell is fixedly connected to the moving part stator. The energy supply module is respectively connected to the first power supply bus and the second power supply bus, and provides an alternating voltage to the first power supply bus and the second power supply bus. The moving part stator and the moving part mover generate relative movement under the alternating voltage, and the moving part mover is used to drive the traction part to move.

[0006] The electrostatic drive device according to the embodiment of this application has at least the following beneficial effects: By continuously providing an alternating voltage to the electrostatic drive device through the energy supply module, the robot can continuously move under the action of the traction part, realizing large-stroke movement.

[0007] According to some embodiments of the present application, it further includes: a boost module, the boost module is connected to the power supply module, and the boost module is used to adjust the magnitude of the alternating voltage.

[0008] According to some embodiments of the present application, both the stator of the moving part and the mover of the moving part are arranged as single-layer or multi-layer plate-like structures, and the stator of the moving part and the mover of the moving part are arranged crosswise.

[0009] According to some embodiments of the present application, the anisotropic friction structure is an iron pin with anisotropic friction in each direction or an electrostatic adsorption pole piece capable of generating controllable frictional force.

[0010] According to some embodiments of the present application, it further includes: a lubricating layer, and the lubricating layer is arranged on the contact surface between the stator of the moving part and the mover of the moving part.

[0011] According to some embodiments of the present application, the lubricating layer includes micron-sized glass microspheres.

[0012] According to some embodiments of the present application, the first power supply bus is arranged in the first insulating layer, and the second power supply bus is arranged in the second insulating layer.

[0013] According to some embodiments of the present application, both the first power supply bus and the second power supply bus include three groups of driving lines, and the alternating voltage is three-phase alternating current.

[0014] According to some embodiments of the present application, the materials of both the first insulating layer and the second insulating layer are polyimide.

[0015] According to an electrostatic thin-film robot in the second aspect embodiment of the present application, it includes an electrostatic driving device described in the first aspect embodiment of the above, and the electrostatic thin-film robot moves under the combined action of the mover of the moving part, the stator of the moving part, and the traction part.

[0016] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following further describes the present application in conjunction with the drawings and embodiments, where:

[0018] Figure 1 is a schematic diagram of an electrostatic driving device according to an embodiment of the present application;

[0019] Figure 2 is a side view of an electrostatic driving device according to an embodiment of the present application;

[0020] Figure 3 is Figure 2Schematic diagram of the moving process of the electrostatic drive device in the embodiment;

[0021] Figure 4 Schematic diagram of the stator of the moving part and the mover of the moving part in another embodiment of the present application;

[0022] Figure 5 Schematic diagram of the connection of the power supply line of the electrostatic drive device in the embodiment of the present application;

[0023] Figure 6 Schematic diagram of the power supply bus of the electrostatic drive device in the embodiment of the present application.

[0024] Reference numerals:

[0025] Stator 110 of the moving part, mover 120 of the moving part, traction part 130, constraint shell 140;

[0026] Energy supply module 150, boost module 160, first power supply bus 111;

[0027] First insulating layer 112, second power supply bus 121, second insulating layer 122. Detailed implementation manners

[0028] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation to the present application.

[0029] In the description of the present application, it should be understood that the orientation descriptions such as up, down, front, back, left, right, etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0030] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If the first and second are described only for the purpose of distinguishing technical features, they should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0031] In the description of the present application, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present application in combination with the specific content of the technical solution.

[0032] Some embodiments, referring to Figure 1 and Figure 2 , the present application provides an electrostatic driving device, including: a moving part stator 110, a moving part rotor 120, a traction part 130, a constraint shell 140, and an energy supply module 150. The moving part stator 110 includes a first power supply bus 111 and a first insulating layer 112. The moving part rotor 120 includes a second power supply bus 121 and a second insulating layer 122. The traction part 130 is connected to the moving part rotor 120, and the traction part 130 is an anisotropic friction structure. The moving part stator 110 and the moving part rotor 120 are arranged in the constraint shell 140. The constraint shell 140 is fixedly connected to the moving part stator 110. The energy supply module 150 is respectively connected to the first power supply bus 111 and the second power supply bus 121, and provides an alternating voltage to the first power supply bus 111 and the second power supply bus 121. The moving part stator 110 and the moving part rotor 120 generate relative movement under the alternating voltage, and the moving part rotor 120 is used to drive the traction part 130 to move.

[0033] Schematic embodiments, Figure 1 both the moving part stator 110 and the moving part rotor 120 in are arranged as single-layer plate-like structures. The first insulating layer 112 is used to fix the first power supply bus 111, and the second insulating layer 122 is used to fix the second power supply bus 121. The first power supply bus 111 and the second power supply bus 121 are both arranged as a multi-phase alternating distribution structure uniformly distributed in a straight line direction. The energy supply module 150 is respectively connected to (not shown in the figure) the first power supply bus 111 and the second power supply bus 121, and is used to generate an electrostatic field between the electrodes of the first power supply bus 111 and the second power supply bus 121. Since the first power supply bus 111 and the second power supply bus 121 are in contact and insulated from each other, when the electrostatic charges on the corresponding electrodes have opposite polarities, an electrostatic force of mutual attraction will be generated. Under the action of the electrostatic adsorption force, relative movement will occur between the moving part stator 110 and the moving part rotor 120. By designing parameters such as the frequency and amplitude of the alternating voltage, the relative moving speed between the plates can be changed.

[0034] Through the constraint shell 140, the relative movement between the plates is constrained to a straight line direction, and a traction part 130 with an anisotropic friction structure is fixedly connected to the moving part rotor 120. As a specific example, the anisotropic friction structure in the embodiments of the present application is anisotropic friction iron pin feet. Figure 2 both the moving part stator 110 and the moving part rotor 120 in are provided with anisotropic friction iron pin feet, and the number thereof can be arbitrarily set according to needs. It can be understood that only setting the anisotropic friction structure on the moving part stator 110 can also make the electrostatic driving device move. In some other embodiments, the anisotropic friction structure can also be a hook-shaped barbed structure.

[0035] Since the frictional force of the anisotropic friction structure is different in different moving directions, the electrostatic driving device can continuously move in one direction under the drive of the traction part 130 to achieve a large-stroke movement. The shape and structure of the traction part 130 can be arbitrarily selected according to the design requirements. In some other embodiments, an anisotropic friction structure can also be provided on the constraint shell 140 to increase the frictional force between the electrostatic driving device and the external environment; the anisotropic friction structure can also be a controllable structure that can be controlled to change, so as to realize the controllability of the magnitude and direction of the frictional force.

[0036] In the embodiment of the present application, the energy supply module 150 is a micro-integrated portable device. In some other embodiments, it can also be an external independent large device.

[0037] The electrostatic driving device of the present application has the advantages of simple structure, small volume, small heat generation, high precision, and easy driving and control.

[0038] Refer to Figure 3 , which is a schematic diagram of the movement process of an electrostatic driving device according to an embodiment of the present application. An anisotropic friction structure is provided on both the moving part stator 110 and the moving part mover 120 of the electrostatic driving device in the figure, where a is the initial movement state. The energy supply module 150 inputs an alternating voltage to the moving part stator 110 and the moving part mover 120. Since there is a phase difference between the alternating voltages applied to the moving part stator 110 and the moving part mover 120, opposite-polarity charges are carried on the electrodes corresponding to the first power supply bus 111 and the second power supply bus 121, thereby generating an electrostatic force. Under the action of the electrostatic force, the moving part stator 110 and the moving part mover 120 move away from each other. Since an anisotropic friction structure is fixedly connected to the moving part mover 120 and the moving part stator 110, the moving part mover 120 is more likely to move to the right, thus forming Figure 3 the movement state of b in Figure 3 . Then, by changing the phase of the alternating voltage, the moving part stator 110 and the moving part mover 120 move closer to each other. At this time, due to the anisotropic friction structure of the traction part, the moving part mover is not easy to move to the left, and the moving part stator 110 drives the entire electrostatic driving device to move to the right, forming

[0039] the movement state of c in

[0039] . By reciprocally switching the phase of the driving alternating voltage in this way, the electrostatic driving device can complete a one-way linear movement.In some embodiments, the electrostatic drive device further includes a boost module 160, which is connected to the energy supply module 150 and is used to adjust the magnitude of the alternating voltage. The magnitude of the electrostatic force between the moving element 120 and the moving element stator 110 is related to the amplitude of the alternating voltage. By adding the boost module 160 to increase the amplitude of the alternating voltage, the driving force of the electrostatic drive device can be increased, thereby increasing the load capacity of the electrostatic drive device.

[0040] In some embodiments, the moving part stator 110 and the moving part mover 120 are both configured as a single-layer or multi-layer plate structure, and the moving part stator 110 and the moving part mover 120 are arranged crosswise with each other. Figure 4 The moving part stator 110 is configured as a four-layer plate structure, and the moving part mover 120 is configured as a three-layer plate structure. Different pole plates are arranged in an interlaced manner. This structural design can increase the magnitude of the electrostatic force between the moving part stator 110 and the moving part mover 120. In some other embodiments, the moving part stator 110 and the moving part mover 120 can be configured as other shapes and structures. For example, the moving part stator 110 is configured as a hollow cylindrical structure, and the moving part mover 120 is also configured as a cylindrical structure with a smaller radius, which can also cause relative movement between the pole plates.

[0041] In some embodiments, the anisotropic friction structure is an iron pin with anisotropic friction or an electrostatic adsorption electrode that can generate controllable friction. By providing a controllable electrostatic adsorption electrode, when friction is required, a voltage is applied to the electrode to generate electrostatic adsorption force, thereby generating friction between the robot and the adsorption surface. When friction is no longer required, the applied voltage is removed. The provision of a controllable electrostatic adsorption electrode can also achieve the effect of anisotropic friction, and the friction force of this anisotropic friction structure is controllable, making it easier for the robot to move.

[0042] In some embodiments, the electrostatic drive device of the present application further includes a lubricating layer provided on the contact surface between the moving part stator 110 and the moving part mover 120. The lubricating layer can reduce the friction between the moving part mover 120 and the moving part stator 110.

[0043] In some embodiments, the lubricating layer includes micron-sized glass microspheres. For example, the lubricating layer may consist solely of uniform micron-sized glass microspheres, or solely of a lubricating structure or material such as an insulating lubricating fluid. In other embodiments, a lubricating fluid may be added to the glass microspheres to achieve even better lubrication.

[0044] In some embodiments, the first power supply bus 111 is disposed in the first insulating layer 112, and the second power supply bus 121 is disposed in the second insulating layer 122. The first insulating layer 112 wraps the first power supply bus 111, and the second insulating layer 122 wraps the second power supply bus 121. This arrangement can protect the drive circuit and prevent it from being exposed to the environment, thereby extending the service life of the drive circuit while isolating the drive circuit. In some other embodiments, when there are only two layers of drive circuits, an insulating layer can also be provided only on the contact surface between the drive circuits.

[0045] In some embodiments, both the first power supply bus 111 and the second power supply bus 121 include three groups of drive lines, and the alternating voltage is three-phase alternating current. Referring to Figure 5 , which is a schematic diagram of the connection between the energy supply module 150 and the drive circuit. The connection can be made by etching the circuit or directly connecting the leads. The energy supply module 150 inputs a three-phase alternating voltage to the drive circuit, and by changing the phase of the alternating voltage in different drive lines, the electrostatic drive device can be made to move. Referring to Figure 6 , which is a layout diagram of the three groups of drive lines in an embodiment. The dashed lines in the figure are only for differentiating different drive lines. Through a multi-phase alternating distribution structure, the electrostatic drive device can be driven to move. In some other embodiments, the electrostatic drive device can also be driven by connecting to polyphase alternating currents such as two-phase or four-phase.

[0046] In some embodiments, the materials of both the first insulating layer 112 and the second insulating layer 122 are polyimide. Polyimide is an organic polymer material. Through this material design, the moving part stator 110 and the moving part rotor 120 can move in a flexible manner, making it suitable for use under complex environmental conditions. In some other embodiments, a hard insulating material can also be used as the insulating layer to improve the structural strength of the electrostatic drive device.

[0047] In some embodiments, the present application also proposes an electrostatic thin film robot, which includes the electrostatic drive device in the above embodiments. The electrostatic thin film robot moves under the combined action of the moving part rotor 120, the moving part stator 110, and the traction part 130. The electrostatic thin film robot of the present application uses the electrostatic drive device as the power source, and by attaching other functional modules to the electrostatic drive device, the effect of an electrostatic thin film robot with different functions can be achieved. For example, a micro manipulator, a cutting tool, a camera, etc. can be set on the electrostatic drive device, enabling the electrostatic thin film robot to complete various tasks.

[0048] In the description of the present application, the descriptions with reference to terms such as "some embodiments", "schematic embodiments", "examples", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0049] The embodiments of the present application have been described in detail above in conjunction with the accompanying drawings. However, the present application is not limited to the above embodiments, and various changes can be made without departing from the gist of the present application within the scope of knowledge possessed by those of ordinary skill in the art. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. An electrostatic drive device, characterized in that, Comprising: A moving part stator, which includes a first power supply bus and a first insulating layer, and an anisotropic friction structure is provided on the moving part stator; A moving part rotor, which includes a second power supply bus and a second insulating layer; wherein, both the moving part stator and the moving part rotor are arranged as plate-like structures; A traction part, which is connected to the moving part rotor, and the traction part is the anisotropic friction structure; A constraint shell, the moving part stator and the moving part rotor are arranged in the constraint shell, and the constraint shell is fixedly connected to the moving part stator; wherein, the anisotropic friction structure is provided on the constraint shell to increase the friction force between the electrostatic drive device and the external environment, and the anisotropic friction structure is a controllable structure that can be changed by control; A lubricating layer, which is arranged on the contact surface between the moving part stator and the moving part rotor, and the lubricating layer includes micron-sized glass microspheres; An energy supply module, which is respectively connected to the first power supply bus and the second power supply bus, and provides an alternating voltage to the first power supply bus and the second power supply bus. The moving part stator and the moving part rotor generate relative movement under the alternating voltage, and the moving part rotor is used to drive the traction part to move; wherein, the energy supply module is a micro-integrated portable device.

2. The electrostatic drive device according to claim 1, wherein Further comprising: A boosting module, which is connected to the energy supply module, and the boosting module is used to adjust the magnitude of the alternating voltage.

3. The electrostatic driving device according to claim 1, characterized in that Both the moving part stator and the moving part rotor are arranged as single-layer or multi-layer plate-like structures, and the moving part stator and the moving part rotor are arranged crosswise.

4. An electrostatic driving device according to claim 1, wherein, The anisotropic friction structure is an iron pin with anisotropic friction in each direction or an electrostatic adsorption pole piece that can generate controllable friction force.

5. An electrostatic driving device according to claim 1, characterized in that, The first power supply bus is arranged in the first insulating layer, and the second power supply bus is arranged in the second insulating layer.

6. The electrostatic driving device according to claim 1, wherein, Both the first power supply bus and the second power supply bus include three groups of drive lines, and the alternating voltage is three-phase alternating current.

7. An electrostatic driving device according to claim 1, characterized in that The materials of the first insulating layer and the second insulating layer are both polyimide.

8. An electrostatic film robot, characterized in that, Comprising the electrostatic drive device according to any one of claims 1-7, and the electrostatic film robot moves under the combined action of the moving part rotor, the moving part stator and the traction part.

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