Display screen cathode etching device and method

Abstract

The present invention discloses a cathode etching device and method for display screens, and belongs to the technical field of cathode etching for display screens. It includes a cathode etcher, a vacuum pump, a laser processing mechanism, a lifting unit and a translation driving component; the cathode etcher is provided with a feed port and a working window, and the interior thereof is a cathode etching chamber; a support is provided in the cathode etching chamber, and the support is used to support the display screen; the vacuum pump is connected to the cathode etcher, and is used to evacuate the cathode etching chamber; the laser processing mechanism is arranged corresponding to the working window, and is used to emit laser to etch the display screen; the lifting unit is arranged below the support and is connected thereto; the translation driving component is connected to the support by transmission, and the translation driving component is used to drive the support to drive the display screen to translate between the feed port and the working window. The present invention can safely transport and efficiently process the display screen, thereby effectively improving the light transmittance of the display screen and the image quality of the camera.

Description

Technical Field

[0001] The present invention belongs to the technical field of cathode etching of display screens in the display industry, and more specifically, relates to a cathode etching device and method for a display screen. Background Art

[0002] Display screens are now mainly divided into LCD screens and OLED screens. LCD screens were developed earlier and have more mature technology. Their advantage is low cost. OLED flexible screens are a new display technology. Compared with existing LCD displays, their most important feature is that they can not only display on a flat surface, but also bend and deform to achieve curved display. Compared with LCD displays, their production process is greatly simplified, their energy consumption is lower, and their lifespan is longer. They will be the mainstream direction of future display technology development.

[0003] Benefiting from the gradual maturity of display technology, electronic devices equipped with new technology displays have been widely promoted; at the same time, user demand has been further improved. In order to meet the growing needs of users and increase the competitiveness of their products, major manufacturers have successively launched products with more and more novel functions, such as curved screen mobile phones, full-screen mobile phones, folding screen mobile phones, etc. Among them, full-screen mobile phones are more popular with users. The most widely used full-screen technology now is to avoid the front camera and earpiece by cutting the screen body, which is what we often call "water drop screen" and "bangs screen". Obviously, this is a compromise adopted due to the immaturity of technology. This full-screen has a notch similar to "raindrops" or "bangs" on the top of the mobile phone, which affects the aesthetics of the mobile phone and sometimes even affects the viewing of content. In order to solve this problem, there are two improvement ideas in the existing technology: 1. Change the position of components such as the front camera and the earpiece; 2. Increase the transparency of the display screen to achieve under-screen camera. Due to the immature screen processing technology before, the light transmittance of the processed screen is insufficient, which affects the image quality of the camera, so the pop-up camera is much more popular than the under-screen camera. However, pop-up cameras are generally driven by a screw motor. The addition of a set of mechanisms increases the increment, increases power consumption, and occupies a part of the space. In addition, the pop-up camera is not beautiful, and the camera hole may accumulate dust. The reliability of the mechanical structure is not very sufficient. Therefore, under-screen cameras are the development direction of full-screen mobile phones and other display devices in the future. With the recent maturity of the screen processing technology, under-screen camera technology will be the general trend of full-screen development in the future. Evaporation cathode etching is the production process to solve the problem of screen transmittance.

[0004] Therefore, there is an urgent need to design a cathode etching device or method that can effectively improve the processing accuracy and yield rate of display screens. Summary of the invention

[0005] 1. Problem to be solved

[0006] In view of the problem that the display screen processing technology in the prior art is not mature enough, resulting in insufficient light transmittance of the screen after processing and low camera image quality, the present invention provides a display screen cathode etching device and method thereof; by reasonably arranging structures such as a cathode etcher, a vacuum pump, a laser processing mechanism, a lifting unit and a translation drive component and the connection relationship therebetween, a display screen etching device is provided, which can effectively solve the problem of insufficient light transmittance of the screen after processing and low camera image quality.

[0007] 2. Technical solution

[0008] In order to solve the above problems, the technical solution adopted by the present invention is as follows:

[0009] A cathode etching device for a display screen of the present invention comprises a cathode etcher, a vacuum pump, a laser processing mechanism, a lifting unit and a translation driving component; the cathode etcher is provided with a feed port and a working window, and the interior thereof is a cathode etching chamber; a support is provided in the cathode etching chamber, and the support is used to support the display screen; the vacuum pump is connected to the cathode etcher, and is used to evacuate the cathode etching chamber; the laser processing mechanism is arranged corresponding to the working window, and is used to emit laser and etch the display screen through the working window; the lifting unit is arranged below the support and is connected thereto, and the lifting unit is used to drive the support to drive the display screen to lift and lower; the translation driving component is connected to the support in a transmission manner, and is used to drive the support to drive the display screen to translate between the feed port and the working window.

[0010] Preferably, the lifting unit includes a first lifting component, a first lifting component, a second lifting component and a second lifting component; the first lifting component is connected with the first lifting component and the second lifting component, and is used to drive the first lifting component and the second lifting component to lift and lower; the first lifting component is arranged corresponding to the supporting component, and the first lifting component can drive the supporting component and the display screen on the supporting component to lift and lower under the driving action of the first lifting component; the second lifting component is connected with the second lifting component, and the second lifting component is arranged corresponding to the display screen, and the second lifting component is used to drive the second lifting component to lift the display screen relative to the supporting component.

[0011] Preferably, the support member is a support plate, which is provided with a first through hole; the second lifting member is arranged corresponding to the first through hole, and its size is smaller than the first through hole; the second lifting member can pass through the first through hole under the driving action of the second lifting component to lift the display screen on the support member.

[0012] Preferably, the support plate is further provided with a second through hole and an adsorption component; the second through hole is provided below the display screen; and the adsorption component is used to adsorb the display screen onto the support plate.

[0013] Preferably, the lifting unit also includes a first guide rod and a second guide rod; the first lifting component is connected to the first lifting component through the first guide rod, the first guide rod is vertically arranged and has the same driving direction as the first lifting component; the second lifting component is connected to the second guide rod and the second lifting component through the second guide rod, the second guide rod is vertically arranged and has the same driving direction as the second lifting component.

[0014] Preferably, the lifting unit also includes a first bellows and a second bellows; a through hole is provided on the bottom plate of the cathode etcher, and the first guide rod and the second guide rod are both inserted into the through hole of the bottom plate; the first bellows is sleeved on the outside of the first guide rod outside the cathode etcher, and the bottom end of the first bellows is connected to the first lifting component, and the top end thereof is connected to the bottom plate; the second bellows is sleeved on the outside of the second guide rod outside the cathode etcher, and the bottom end of the second bellows is connected to the second lifting component, and the top end thereof is connected to the bottom plate.

[0015] Preferably, the support member is further provided with a fixing component; the fixing component is arranged corresponding to the edge of the display screen, and is used to fix the display screen on the support member.

[0016] Preferably, the fixing component includes a driving cylinder, a rotating connecting member, a rotating shaft and a pressing member; the driving cylinder and the supporting member are relatively fixedly arranged, the piston rod of the driving cylinder is connected to the rotating shaft through the rotating connecting member, and the driving cylinder is used to drive the rotating shaft to rotate; the pressing member is arranged on the rotating shaft and corresponds to the edge of the display screen, the pressing member and the first through hole are staggered, and the pressing member can press the supporting member under the action of rotation.

[0017] Preferably, a driving wheel is provided on the translation driving component; a driven rack is provided on the support member; the driving wheel and the driven rack are cooperatively connected, and the translation driving component drives the driven rack to translate through the driving wheel, thereby driving the display screen on the support member to translate.

[0018] Preferably, the display screen includes a plurality of etching units; the laser processing mechanism includes a plurality of laser units, and the laser units are arranged above the working window and corresponding to the working window; the laser units can emit lasers and etch the etching units through the working window; the laser units include a laser head and a precision calibration camera, and the laser head is arranged on the side of the precision calibration camera and connected to the precision calibration camera; the precision calibration camera is used to photograph the position of the etching unit on the display screen below the working window, so as to determine the horizontal distance of the laser head relative to the etching unit.

[0019] A display screen cathode etching method of the present invention is based on a display screen cathode etching device described in the present invention. A robot is used to place the display screen to be etched from a feed port into the cathode etching chamber, and then a vacuum pump is used to evacuate the cathode etching chamber. After the display screen is transported to the bottom of a working window, a laser processing mechanism is used to emit a laser to etch it. After the etching is completed, the display screen exits the cathode etching chamber.

[0020] Preferably, the specific steps are:

[0021] (1) Open the feed port on the cathode etcher, use the manipulator to send the support from the feed port to the specified depth of the cathode etching chamber, raise the lifting unit and lower the manipulator, place the support on the lifting unit and then lower it to the initial position for standby, and the manipulator exits the cathode etcher and closes the feed port;

[0022] (2) Open the feed port on the cathode etcher, use the robot to place the display screen from the feed port onto the support, and then use the translation drive component and the lifting unit to move the display screen to the bottom of the working window, adjust the relative position of the laser processing mechanism and the display screen, and start laser etching after calibration;

[0023] (3) After etching is completed, the second lifting component lifts the display screen a certain distance relative to the support component, opens the feed port on the cathode etcher, and the robot takes out the display screen and closes the feed port.

[0024] 3. Beneficial effects

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] (1) A cathode etching device for a display screen of the present invention comprises a cathode etcher, a vacuum pump, a laser processing mechanism, a lifting unit and a translation driving component; the cathode etcher is provided with a feed port and a working window, and the interior thereof is a cathode etching chamber; a support is provided in the cathode etching chamber, and the support is used to support the display screen; the vacuum pump is connected to the cathode etcher, and is used to evacuate the cathode etching chamber; the laser processing mechanism is arranged corresponding to the working window, and is used to emit laser and etch the display screen through the working window; the lifting unit is arranged below the support and is connected to the support, and the lifting unit is used to drive the support to drive the display screen to lift and lower; the translation driving component is connected to the support in a transmission manner, and the translation driving component is used to drive the support to drive the display screen to translate between the feed port and the working window; through the above arrangement, the cathode etching device for a display screen provided by the present invention can safely transport and efficiently process the display screen, thereby effectively improving the light transmittance of the display screen body and the image quality of the camera.

[0027] (2) A cathode etching method for a display screen of the present invention is based on a cathode etching device for a display screen of the present invention. A robot is used to place the display screen to be etched from a feed port into the cathode etching chamber. A vacuum pump is used to evacuate the cathode etching chamber. The display screen is transported to the bottom of a working window and then etched by a laser processing mechanism. After etching, the display screen exits the cathode etching chamber. The etching method of the present invention is simple and convenient, and can effectively improve the etching efficiency of the display screen. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a front view of a display screen cathode etching device of the present invention;

[0029] Figure 2 It is a three-dimensional diagram of a cathode etching device for a display screen of the present invention;

[0030] Figure 3 It is a schematic diagram of the laser unit bracket and the laser unit of the present invention;

[0031] Figure 4 is a schematic diagram of a laser unit of the present invention;

[0032] Figure 5 It is a schematic diagram of the cathode etcher of the present invention;

[0033] Figure 6 It is a schematic diagram of the lifting unit of the present invention;

[0034] Figure 7 It is a schematic diagram of the support member, the lifting unit and the cathode etching chamber of the present invention;

[0035] Figure 8 It is a schematic diagram of the support member and the lifting unit of the present invention;

[0036] Fig. 9 It is a schematic diagram of a rotation correction unit of the present invention;

[0037] Fig.10 A bottom view of the laser unit bracket of the present invention;

[0038] Fig.11 It is a schematic diagram of the positioning mechanism of the present invention.

[0039] In the figure:

[0040] 100. Laser unit bracket;

[0041] 200, laser unit; 210, laser head; 211, first laser translation component; 212, laser head translation component; 213, and second laser translation component; 220, precision calibration camera; 221, first camera translation component; 222, second camera translation component; 223, precision calibration camera light source;

[0042] 300, cathode etcher; 301, bottom plate; 302, feed port; 303, maintenance window; 304, working window; 305, slide rail; 310, positioning mechanism; 311, positioning camera; 312, positioning camera adjustment seat; 320, translation driving component; 321, driving wheel; 330, cathode etching chamber; 340, supporting member; 341, first through hole; 342, second through hole; 343, driven rack; 350, fixing member; 351, driving cylinder; 352, rotating connecting member; 353, rotating shaft; 354, pressing member;

[0043] 400, lifting unit; 410, first lifting component; 411, first bellows; 412, first guide rod; 413, first lifting component; 420, second lifting component; 421, second bellows; 422, second guide rod; 423, second lifting plate; 424, second lifting component;

[0044] 500, base; 510, support column;

[0045] 600, dry pump; 610, connecting pipe; 620, molecular pump;

[0046] 700, rotation correction unit; 701, first connecting plate; 710, first bearing; 711, first driving mechanism; 720, second bearing; 721, second driving mechanism; 730, third bearing; 731, third driving mechanism; 740, fourth bearing. DETAILED DESCRIPTION

[0047] The following detailed description of exemplary embodiments of the present invention refers to the accompanying drawings, which form a part of the description, in which exemplary embodiments of the present invention are shown as examples, wherein the features of the present invention are identified by reference numerals. The following more detailed description of the embodiments of the present invention is not intended to limit the scope of the claimed invention, but is merely for illustration and does not limit the description of the features and characteristics of the present invention, in order to propose the best way to perform the present invention, and is sufficient to enable those skilled in the art to implement the present invention. However, it should be understood that various modifications and variations may be made without departing from the scope of the present invention as defined by the appended claims. The detailed description and the accompanying drawings should be considered only as illustrative, not restrictive, and if there are any such modifications and variations, they will all fall within the scope of the present invention described herein. In addition, the background technology is intended to illustrate the current status and significance of the research and development of the present technology, and is not intended to limit the present invention or the application field of the present application and the present invention.

[0048] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which the present invention belongs; the terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention; the term "and / or" used herein includes any and all combinations of one or more related listed items.

[0049] It should be noted that when an element is referred to as being "located on" another element, it may be directly on the other element or there may also be a central element; when an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time; the terms "top", "bottom", "X-axis", "Y-axis", "Z-axis" and similar expressions used in this article are for illustrative purposes only; the "X-axis", "Y-axis" and "Z-axis" in the present invention are axial directions that are perpendicular to each other in three-dimensional space. They are named in this way to facilitate the explanation of the connection relationship and movement method between components, and do not mean that the XYZ axes must converge at one point. The "X-axis" and "Y-axis" are not limited to two linear axes on the horizontal plane. The names of the XYZ axes can be interchangeable as long as the XYZ axes are perpendicular to each other in three-dimensional space.

[0050] The present invention is further described below in conjunction with specific embodiments.

[0051] Example

[0052] This embodiment provides a display screen cathode etching device, such as Figure 1 and Figure 2 As shown, it includes a cathode etcher 300 , a vacuum pump, a laser processing mechanism, a lifting unit 400 , a rotation correction unit 700 and a translation driving component 320 .

[0053] like Figure 2 and Figure 5 As shown, the cathode etcher 300 is provided with a feed port 302, a maintenance window 303 and a working window 304, and the cathode etcher 300 has a cathode etching chamber 330 inside. The cathode etcher 300 is fixed to the base 500 through a support column 510; a support member 340 is provided in the cathode etching chamber 330. The support member 340 in this embodiment is a support plate, and the support member 340 is used to support the display screen. Positioning mechanisms 330 are also provided at positions corresponding to the four corners of the support member 340 on the cathode etcher 300, as shown in FIG. Fig.11As shown, the positioning mechanism 330 includes a positioning camera 311 and a positioning camera adjustment seat 312. The positioning camera adjustment seat 312 is connected to the positioning camera 311 and is used to adjust the relative position of the positioning camera 311 and the support 340, so as to capture the four corners of the display screen on the support 340 to achieve positioning; the vacuum pump includes a dry pump 600 and a molecular pump 620. The dry pump 600 is connected to the cathode etcher 300 through a connecting pipe 610 and is used to evacuate the cathode etching chamber 330; the laser processing mechanism is arranged corresponding to the working window 304, and is used to emit laser and etch the display screen through the working window 304. The display screen in this embodiment is regarded as a substrate, which includes a plurality of etching units; as shown Figure 8 As shown, the lifting unit 400 is arranged below the support member 340 and connected thereto, and the lifting unit 400 is used to drive the support member 340 to drive the display screen to lift and lower; the translation drive component 320 and the support member 340 are transmission-connected, and the translation drive component 320 is used to drive the support member 340 to drive the display screen to translate between the feed port 302 and the working window 304.

[0054] like Figure 6 to Figure 8 As shown, in the lifting unit 400, it includes a first lifting component 410, a first bellows 411, a first guide rod 412 and a first lifting member 413, a second lifting component 420, a second bellows 421, a second guide rod 422, a second lifting plate 423 and a second lifting member 424; in this embodiment, a plurality of second lifting members 424 are arranged along the edge of the second lifting plate 423 and are arranged corresponding to the edge of the display screen.

[0055] In the components of the above-mentioned lifting unit 400, the first lifting component 410 is connected with the first lifting component 413 and the second lifting component 420, and is used to drive the first lifting component 413 and the second lifting component 420 to lift and lower; the first lifting component 413 is arranged corresponding to the support member 340, and the first lifting component 413 can drive the support member 340 and the display screen on the support member 340 to lift and lower under the driving action of the first lifting component 410; the second lifting component 420 is connected with the second lifting component 424 through the second lifting plate 423, and the second lifting component 424 is arranged corresponding to the display screen, and the second lifting component 420 is used to drive the second lifting component 424 to lift the display screen relative to the support member 340. The support member 340 is a support plate, and a first through hole 341 is provided on the support plate; Figure 7 and Figure 8As shown, the second lifting member 424 is arranged corresponding to the first through hole 341, and its size is smaller than the first through hole 341; the second lifting member 424 can pass through the first through hole 341 under the driving action of the second lifting member 420 to lift the display screen on the support member 340. In this embodiment, a plurality of first through holes 341 are arranged along the edge of the support plate, and the number of the second lifting members 424 corresponds to the number of the first through holes 341, so when the second lifting member 424 rises, it will lift the edge of the display screen by contacting it, and will not touch the etched area. After the display screen is lifted relative to the support member 340, it is convenient for the manipulator to pick it up and put it down at the same time, which not only avoids the problem that the manipulator touches the etched area on the display screen and affects the transmittance of the display screen, but also allows the display screen to be stably picked up and put down to avoid it from touching the support member 340 and being damaged during the picking and placing process, thereby effectively improving the transmittance of the display screen and the image quality of the camera; in addition, the lifting action of the first lifting component 410 can simultaneously lift the support member 340 and the display screen, and the lifting action of the second lifting component 420 can further lift the display screen alone, so they can be used together to achieve the effect of finely adjusting the height of the display screen. The support plate is also provided with a second through hole 342 and an adsorption component. The second through hole 342 is provided below the display screen to facilitate the picking and placing of the manipulator and the etching of the laser processing mechanism. The adsorption component is used to stably adsorb the display screen on the support plate to fix the display screen.

[0056] like Fig. 9 As shown, the rotation correction unit 700 in this embodiment is a UVW adjustment module, which connects the base plate 301 of the cathode etcher 300 with the support member 340, and is used to rotate and / or translate the support member 340; the rotation correction unit 700 includes a first connecting plate 701, and the first connecting plate 701 is provided with a first bearing 710, a second bearing 720, a third bearing 730 and a fourth bearing 740, and the bearings are all connected to the base plate 301 of the cathode etcher 300; the first bearing 710 is connected to the first connecting plate 701 through a first driving mechanism 711, the second bearing 710 is connected to the first connecting plate 701 through a second driving mechanism 721, and the third bearing 730 is connected to the first connecting plate 701 through a third driving mechanism 731; the driving direction of the first driving mechanism 711 is the Y-axis direction, and the driving directions of the second driving mechanism 721 and the third driving mechanism 731 are both the X-axis direction. The relative rotation or relative translation between the cathode etcher 300 and the support member 340 can be achieved through the movement of two X-axes and one Y-axis, so as to fine-tune the relative position between the support member 340 and the laser processing mechanism to achieve the purpose of calibration.

[0057] In addition, if Figure 6 and Figure 8As shown, the first lifting component 410 is connected by a first guide rod 412 and a first lifting member 413, the first guide rod 412 is vertically arranged and has the same driving direction as the first lifting component 410; the second lifting component 420 is connected by a second guide rod 422 and a second lifting member 424, the second guide rod 422 is vertically arranged and has the same driving direction as the second lifting component 420. A through hole is provided on the bottom plate 301 of the cathode etcher 300, and the first guide rod 412 and the second guide rod 422 are both inserted into the through hole of the bottom plate 301; the first bellows 411 is sleeved on the outside of the first guide rod 412 outside the cathode etcher 300, the bottom end of the first bellows 411 is connected to the first lifting component 410, and the top end thereof is connected to the bottom plate 301; the second bellows 421 is sleeved on the outside of the second guide rod 422 outside the cathode etcher 300, the bottom end of the second bellows 421 is connected to the second lifting component 420, and the top end thereof is connected to the bottom plate 301. Since the etching of the display screen in the cathode etching chamber 330 requires a vacuum environment, a bellows is provided on the outside of the guide rod outside the cathode etcher 300, and a vacuum environment is provided between the bellows and the guide rod. This can provide a vacuum environment between the lifting unit 400 and the cathode etcher 300, thereby ensuring that the etching process of the display screen is carried out stably. In addition, the bellows can also provide a displacement space for the rotation and / or translation of the support member 340 and the lifting unit 400 by the rotation correction unit 700.

[0058] In addition, Figure 7 and Figure 8 As shown, a fixing component 350 is also provided on the support member 340; the fixing component 350 is arranged corresponding to the edge of the display screen, and is used to fix the display screen on the support member 340; the fixing component 350 includes a driving cylinder 351, a rotating connecting member 352, a rotating shaft 353 and a pressing member 354; the driving cylinder 351 is relatively fixedly arranged with respect to the support member 340, and the piston rod of the driving cylinder 351 is connected to the rotating shaft 353 through the rotating connecting member 352, and the driving cylinder 351 is used to drive the rotating shaft 353 to rotate; the pressing member 354 is arranged on the rotating shaft 353 and corresponds to the edge of the display screen, and the pressing member 354 is staggered with the first through hole 341, and the pressing member 354 can press the support member 340 under the action of rotation.

[0059] In addition to the lifting function of the lifting unit 400 on the display screen or the support member 340, and the fine adjustment function of the rotation correction unit 700 on the support member 340 and the display screen, the translation drive component 320 also provides a translation function for the display screen between the feed port 302 and the working window 304. Figure 7 and Figure 8As shown, the translation driving component 320 is provided with a driving wheel 321; the support member 340 is provided with a driven rack 343; the driving wheel 321 and the driven rack 343 are cooperatively connected, and the translation driving component 320 drives the driven rack 343 to translate through the driving wheel 321, thereby driving the display screen on the support member 340 to translate. The cathode etcher 300 is provided with a slide rail 305, and the support member 340 is slidably arranged on the slide rail 305.

[0060] For the laser processing mechanism, Figure 3 and Fig.10 As shown, it includes a plurality of laser units 200 and a laser unit support 100. The laser unit support 100 is a gantry in this embodiment, which is fixedly arranged relative to the cathode etcher 300. The laser unit 200 is arranged on the laser unit support 100 and connected to the laser unit support 100 through a first laser translation component 211 and a second laser translation component 213. The translation direction of the first laser translation component 211 is the X-axis direction, and the translation direction of the second laser translation component 213 is the Y-axis direction. In this embodiment, the first laser translation component 211 is a laser unit X-axis module, and the second laser translation component 213 is a laser unit Y-axis module. The laser unit 200 is arranged above the working window 304 and is arranged corresponding to the working window 304. The laser unit 200 can emit laser and etch the etching unit through the working window 304.

[0061] More specifically, if Figure 4As shown, the laser unit 200 includes a laser head 210 and a precision calibration camera 220. The laser head 210 is arranged on the side of the precision calibration camera 220 and connected to the precision calibration camera 220. The precision calibration camera 220 is used to photograph the etching unit position on the display screen below the working window 304, so as to determine the horizontal distance of the laser head 210 relative to the etching unit. The precision calibration camera 220 is connected to the laser head 210 through a first camera translation component 221 and a second camera translation component 222. The translation direction of the first camera translation component 221 is the Z-axis direction, and the translation direction of the second camera translation component 222 is the Y-axis direction. In this embodiment, the first camera translation component 221 is a precision calibration camera Z-axis module, and the second camera translation component 222 is a precision calibration camera Y-axis module. The precision calibration camera 220 includes a precision calibration camera light source 223, which is used to emit light to the etching unit on the display screen; the positioning mechanism 310 and the precision calibration camera 220 can both accurately adjust the relative position of the product and the laser head 210, thereby improving the processing accuracy and yield rate of the product. The laser unit 200 also includes a laser head translation component 212; the laser head 210 is connected to the first laser translation component 211 through the laser head translation component 212, and the translation direction of the laser head translation component 212 is the Z-axis direction. The laser head translation component 212 in this embodiment is a laser head Z-axis module. In this embodiment, six working windows 304 and six laser units 200 are provided; the laser units 200 are divided into two rows and staggered on the laser unit bracket 100, and are arranged one by one corresponding to the six working windows 304. Six workstations work simultaneously, which greatly improves the processing efficiency. Moreover, after the etching of the six etching units on the display screen is completed, the subsequent etching units on the display screen can continue to be etched under the driving action of the aforementioned translation driving component 320, thereby completing the etching of the entire display screen and improving the cathode etching efficiency.

[0062] This embodiment also provides a display cathode etching method, based on the display cathode etching device described above, using a robot to place the display to be etched from the feed port 302 into the cathode etching chamber 330, and then using a vacuum pump to evacuate the cathode etching chamber 330, and then transport the display to the bottom of the working window 304 and use a laser processing mechanism to emit laser to etch it, and after the etching is completed, the display exits the cathode etching chamber 330. Figures 1 to 11 , the specific steps are:

[0063] (1) The support member 340 enters the cathode etching chamber 330;

[0064] Open the feed port 302 on the cathode etcher 300, use the robot to send the support member 340 from the feed port 302 to the specified depth of the cathode etching chamber 330, raise the lifting unit 400 and lower the height of the robot, and exit the cathode etching chamber 330 after the robot and the support member 340 are separated by a certain distance. Place the support member 340 on the lifting unit 400 and then lower it to the initial position to wait. The robot exits the cathode etcher 300 and closes the feed port 302.

[0065] (2) The display screen enters the cathode etching chamber 330 for etching;

[0066] After step (1) is completed, first adjust the support member 340, the fixing member 350 and the lifting unit 400 to the material receiving state, and then open the feed port 302 on the cathode etcher 300; use the robot to send the display screen from the feed port 302 to the specified depth in the cathode etching chamber 330, and the first lifting member 410 in the lifting unit 400 rises and receives the display screen. At this time, the second lifting member 420 needs to be used to lift the second lifting member 424 to a certain distance from the first lifting member 413 to reserve a certain space for the robot to descend; After the display screen is placed on the support 340, the robot arm continues to descend to a certain height and then exits the cathode etching chamber 330, and the vacuum valve of the feed port 302 is closed; the dry pump 600 is started to reduce the pressure in the cathode etching chamber 330 to a certain value, and then the molecular pump 620 is started to reduce the air pressure in the cathode etching chamber 330 to the bottom pressure; after the air pressure conditions for process processing are reached, the second lifting component 420 descends in height, places the display screen on the support 340, and uses the fixing component 350 and the adsorption component on the support 340 to fix the display screen.

[0067] Four groups of positioning cameras 311 are used to capture the four corners of the display screen. The background program calculates the position deviation of the display screen through the four groups of pictures and transmits the motion command to the UVW adjustment module. The UVW adjustment module corrects the deviation of the display screen. After the alignment is completed, the translation drive component 320 moves the support component 340 carrying the display screen to the working position; the precision calibration camera 220 in the six laser units 200 on the gantry is driven by the precision calibration camera Y-axis module and the precision calibration camera Z-axis module to accurately calibrate the six etching units at the corresponding positions on the display screen respectively. The background program determines the position of the laser head 210 relative to the etching unit through the image obtained by the precision calibration camera 220; then the laser unit X-axis module and the translation drive unit are used to calibrate the etching unit. The components 320 and the Y-axis module of the laser unit adjust the XY coordinates of the six groups of laser heads 210 to the initial working position, and the Z-axis module of the laser head adjusts the working height of the laser head 210 relative to the etching unit on the display screen. After the adjustment is completed, the laser is turned on to etch the six etching units corresponding to the laser head 210. After the etching of these six etching units is completed, the translation driving component 320 drives the support component 340 carrying the display screen to continue to move forward, and the subsequent six unprocessed etching units are moved to the bottom of the working window 304, and then the precision calibration camera 220 continues to calibrate them, the XY axis of the laser head 210 adjusts the relative position with the etching unit, and the Z-axis module of the laser head adjusts the working height. After the adjustment is completed, the laser is turned on to continue etching. Then the above steps are repeated until all the etching units on the entire display screen are completely etched.

[0068] (3) After the display screen is etched, exit the cathode etching chamber 330;

[0069] After all the etching units on the display screen have completed etching, the translation drive component 320 drives the support member 340 carrying the display screen to return to the loading position, the drive cylinder 351 drives the clamping member 354 to loosen, and at the same time, the adsorption component on the support member 340 stops adsorbing the display screen; the second lifting component 420 rises to lift the display screen a certain distance from the top surface of the support member 340, the vacuum valve of the feed port 302 of the cathode etching chamber 330 is opened, and the manipulator extends into the cathode etching chamber 330 under the display screen, the first lifting component 410 descends and places the display screen on the manipulator, the manipulator carries the display screen out of the cathode etching chamber 330, the vacuum valve of the feed port 302 of the cathode etching chamber 330 is closed, and the manipulator sends the processed display screen to the downstream process.

[0070] More specifically, although exemplary embodiments of the present invention have been described herein, the present invention is not limited to these embodiments, but includes any and all embodiments that are recognizable by those skilled in the art based on the foregoing detailed description, such as combinations between the various embodiments, adaptive changes and / or replacements. The limitations in the claims may be interpreted broadly based on the language used in the claims and are not limited to the examples described in the foregoing detailed description or during the implementation of the application, which examples should be considered non-exclusive. Any steps listed in any method or process claim may be performed in any order and are not limited to the order presented in the claim. Therefore, the scope of the present invention should be determined solely by the attached claims and their legal equivalents, rather than by the description and examples given above.

Claims

1. A display cathode etching device, characterized in that: It comprises a cathode etcher (300), a vacuum pump, a laser processing mechanism, a lifting unit (400) and a translation driving component (320); The cathode etching machine (300) is provided with a feed port (302) and a working window (304), and the interior thereof is a cathode etching chamber (330); a support member (340) is provided in the cathode etching chamber (330), and the support member (340) is used to support a display screen; The vacuum pump is connected to the cathode etcher (300) and is used to evacuate the cathode etching chamber (330); The laser processing mechanism is arranged corresponding to the working window (304) and is used to emit laser light and etch the display screen through the working window (304); The lifting unit (400) is arranged below the support member (340) and connected thereto, and the lifting unit (400) is used to drive the support member (340) to drive the display screen to move up and down; The translation driving component (320) is transmission-connected to the support member (340), and the translation driving component (320) is used to drive the support member (340) to drive the display screen to translate between the feed port (302) and the working window (304); The lifting unit (400) comprises a first lifting component (410), a first lifting component (413), a second lifting component (420) and a second lifting component (424); The first lifting component (410) is connected to the first lifting component (413) and the second lifting component (420) and is used to drive the first lifting component (413) and the second lifting component (420) to move up and down; the first lifting component (413) and the support component (340) are arranged correspondingly, and the first lifting component (413) can drive the support component (340) and the display screen on the support component (340) to move up and down under the driving action of the first lifting component (410); The second lifting component (420) is connected to the second lifting component (424), the second lifting component (424) is arranged corresponding to the display screen, and the second lifting component (420) is used to drive the second lifting component (424) to lift the display screen relative to the support component (340); The support member (340) is a support plate, and a first through hole (341) is provided on the support plate; the second lifting member (424) is arranged corresponding to the first through hole (341), and its size is smaller than the first through hole (341); the second lifting member (424) can pass through the first through hole (341) and lift up the display screen on the support member (340) under the driving action of the second lifting member (420); The lifting unit (400) further comprises a first guide rod (412) and a second guide rod (422); the first lifting component (410) is connected to the first lifting component (413) via the first guide rod (412), the first guide rod (412) being vertically arranged and having the same driving direction as the first lifting component (410); the second lifting component (420) is connected to the second lifting component (424) via the second guide rod (422), the second guide rod (422) being vertically arranged and having the same driving direction as the second lifting component (420).

2. A display screen cathode etching device according to claim 1, characterized in that: The support plate is also provided with a second through hole (342) and an adsorption component; the second through hole (342) is provided below the display screen; and the adsorption component is used to adsorb the display screen onto the support plate.

3. A display screen cathode etching device according to claim 1, characterized in that: The lifting unit (400) further comprises a first bellows (411) and a second bellows (421); a through hole is provided on the bottom plate (301) of the cathode etcher (300), and the first guide rod (412) and the second guide rod (422) are both inserted into the through hole of the bottom plate (301); the first bellows (411) is sleeved on the outside of the first guide rod (412) outside the cathode etcher (300), the bottom end of the first bellows (411) is connected to the first lifting component (410), and the top end thereof is connected to the bottom plate (301); the second bellows (421) is sleeved on the outside of the second guide rod (422) outside the cathode etcher (300), the bottom end of the second bellows (421) is connected to the second lifting component (420), and the top end thereof is connected to the bottom plate (301).

4. A display screen cathode etching device according to claim 1, characterized in that: The support member (340) is also provided with a fixing member (350); the fixing member (350) is arranged corresponding to the edge of the display screen and is used to fix the display screen on the support member (340).

5. A display screen cathode etching device according to claim 4, characterized in that: The fixing component (350) comprises a driving cylinder (351), a rotating connecting member (352), a rotating shaft (353) and a pressing member (354); the driving cylinder (351) and the supporting member (340) are fixedly arranged relative to each other, the piston rod of the driving cylinder (351) is connected to the rotating shaft (353) via the rotating connecting member (352), and the driving cylinder (351) is used to drive the rotating shaft (353) to rotate; the pressing member (354) is arranged on the rotating shaft (353) and corresponds to the edge of the display screen, the pressing member (354) and the first through hole (341) are arranged in an alternating manner, and the pressing member (354) can press the supporting member (340) under the action of rotation.

6. A display screen cathode etching device according to any one of claims 1 to 5, characterized in that: The translation drive component (320) is provided with a driving wheel (321); the support component (340) is provided with a driven rack (343); the driving wheel (321) and the driven rack (343) are cooperatively connected, and the translation drive component (320) drives the driven rack (343) to translate via the driving wheel (321), thereby driving the display screen on the support component (340) to translate.

7. A display screen cathode etching device according to any one of claims 1 to 5, characterized in that: The display screen comprises a plurality of etching units; the laser processing mechanism comprises a plurality of laser units (200), the laser units (200) being arranged above a working window (304) and corresponding to the working window (304); the laser units (200) can emit laser light and etch the etching units through the working window (304); the laser units (200) comprise a laser head (210) and a precision calibration camera (220), the laser head (210) being arranged on the side of the precision calibration camera (220) and connected to the precision calibration camera (220); the precision calibration camera (220) is used to photograph the position of the etching units on the display screen below the working window (304), thereby determining the horizontal distance of the laser head (210) relative to the etching units.

8. A display cathode etching method, characterized in that: A display screen cathode etching device according to any one of claims 1 to 7, wherein a display screen to be etched is placed into the cathode etching chamber (330) from a feed port (302) by a robot, and then the cathode etching chamber (330) is evacuated by a vacuum pump, and the display screen is transported to below a working window (304) and then etched by a laser processing mechanism after emitting a laser, and after the etching is completed, the display screen exits the cathode etching chamber (330).

9. A display screen cathode etching method according to claim 8, characterized in that: The specific steps are: (1) opening a feed port (302) on a cathode etcher (300), using a robot to deliver a support member (340) from the feed port (302) to a specified depth of a cathode etching chamber (330), raising a lifting unit (400) and lowering the height of the robot, placing the support member (340) on the lifting unit (400) and then lowering the robot to an initial position for standby, and then withdrawing the robot from the cathode etcher (300) and closing the feed port (302); (2) opening the feed port (302) on the cathode etcher (300), placing the display screen from the feed port (302) onto the support (340) using a robot, and then sending the display screen to the bottom of the working window (304) using the translation drive component (320) and the lifting unit (400), adjusting the relative position between the laser processing mechanism and the display screen, and starting laser etching after calibration; (3) After etching is completed, the second lifting component (420) lifts the display screen a certain distance relative to the support component (340), opens the feed port (302) on the cathode etcher (300), and the robot takes out the display screen and closes the feed port (302).

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