Terminal monitoring method, device and system based on excimer laser

Abstract

The present invention relates to the field of lasers, and specifically to a terminal monitoring method, device and system based on excimer lasers. The method, device and system detect the working state of the main controller in real time through a backup controller, monitor the working state of each sensor in real time, and collect the working information of each sensor; when the backup controller detects a fault diagnosis signal sent by the main controller, the backup controller obtains the control authority of the main controller, and the main controller stops working; the backup controller is connected to the host computer for communication, and the acquired working state and working information are sent to the host computer in real time; the host computer determines whether the working state and working information of each sensor reach the limit working condition; if the limit working condition is not reached, the host computer issues an early warning prompt and starts equipment protection, which is convenient for management personnel to maintain in time. The terminal monitoring method, device and system based on excimer lasers of the present invention have high reliability and low maintenance cost.

Description

Technical Field

[0001] The present invention relates to the field of lasers, and in particular to a terminal monitoring method, device and system based on excimer lasers. Background Art

[0002] Excimer laser is a pulsed gas laser for deep ultraviolet characteristic applications. It has the characteristics of high repetition rate, high energy, short wavelength, narrow line width, etc. It is an excellent laser light source for microelectronic lithography systems.

[0003] The traditional discharge-pumped excimer laser parameter acquisition and monitoring terminal system does not have a dual redundant controller, and cannot monitor the working status of each flow acquisition circuit and proportional valve control circuit, nor can it monitor the working status of the two controllers mutually.

[0004] With the development of laser technology, lasers are required to run continuously without pause, which requires that each module and terminal system must have the ability to continue to operate normally. Even the most reliable terminal system can hardly ensure zero-fault continuous operation.

[0005] In addition, because the single-chip microcomputer is small and flexible, and can be easily expanded into a powerful control system, some acquisition control terminals are currently based on single-chip microcomputers. However, due to electromagnetic interference and other reasons, even if a single-chip microcomputer designed according to the requirements of the industrial measurement and control environment is used, it is difficult to ensure that the control system can operate reliably for a long time, thus affecting the reliable operation of the entire system. With the development of excimer lasers, it is inevitable to reduce the maintenance cost of each module. Summary of the invention

[0006] The embodiments of the present invention provide a terminal monitoring method, device and system based on an excimer laser, so as to at least solve the technical problem of low operating reliability of a conventional excimer laser monitoring system.

[0007] According to an embodiment of the present invention, a terminal monitoring method based on an excimer laser is provided, comprising the following steps:

[0008] The main controller controls the operation of the excimer laser;

[0009] The standby controller detects the working status of the main controller in real time, monitors the working status of each sensor in real time, and collects the working information of each sensor;

[0010] When the standby controller detects a fault diagnosis signal from the main controller, the standby controller obtains the control authority of the main controller, and the main controller stops working and disconnects the communication with the host computer;

[0011] Communication connection between the standby controller and the host computer;

[0012] The standby controller sends the acquired working status and working information of each sensor to the host computer in real time;

[0013] The host computer determines the working status of each sensor and whether the working information reaches the limit working condition;

[0014] If the working status and working information of each sensor do not reach the limit working conditions, the host computer will issue a prompt that the working is normal;

[0015] If the working status and working information of each sensor reach the extreme working conditions, the host computer will issue an early warning and initiate equipment protection measures.

[0016] Furthermore, the method further comprises:

[0017] When the standby controller detects that the main controller is operating normally, the standby controller sends the acquired working status and working information of each sensor to the main controller in real time;

[0018] The main controller maintains a communication connection with the host computer, and sends the received working status and working information of each sensor to the host computer in real time.

[0019] Furthermore, the standby controller also monitors the working status of the power supply circuit so that the standby controller issues an early warning prompt when the power supply circuit fails.

[0020] Furthermore, the step of the standby controller detecting the working state of the main controller in real time includes: the standby controller detecting the working state of the main controller in real time via the CAN bus.

[0021] According to another embodiment of the present invention, there is provided a terminal monitoring device based on an excimer laser, comprising:

[0022] System main control module, used for main controller to control the operation of excimer laser;

[0023] The information monitoring module is used for the standby controller to detect the working status of the main controller in real time, as well as to monitor the working status of each sensor in real time and collect the working information of each sensor;

[0024] The authority acquisition module is used for obtaining the control authority of the main controller when the standby controller detects the fault diagnosis signal sent by the main controller, and the main controller stops working and disconnects the communication with the host computer;

[0025] Communication connection module, used for communication connection between the standby controller and the host computer;

[0026] The information sending module is used for the standby controller to send the acquired working status and working information of each sensor to the host computer in real time;

[0027] The condition judgment module is used by the host computer to judge the working status of each sensor and whether the working information reaches the limit working condition;

[0028] The status prompt module is used to prompt the host computer to issue a normal working prompt if the working status and working information of each sensor do not reach the limit working conditions;

[0029] The early warning prompt module is used to issue an early warning prompt and start equipment protection measures if the working status and working information of each sensor reach the extreme working conditions.

[0030] Furthermore, the device also includes:

[0031] The information transmission module is used for sending the acquired working status and working information of each sensor to the main controller in real time when the standby controller detects that the main controller is operating normally;

[0032] The data transmission module is used to maintain the communication connection between the main controller and the host computer, and send the working status and working information of each sensor received to the host computer in real time.

[0033] According to another embodiment of the present invention, there is provided a terminal monitoring system based on an excimer laser, comprising:

[0034] The main controller, the backup controller, the host computer and the sensor, the backup controller monitors the working status of the main controller in real time through the first CAN bus, the main controller and the backup controller transmit information to the host computer through the second CAN bus respectively, the backup controller is connected to the sensor through the data line, and performs information collection and status monitoring.

[0035] Furthermore, the sensor comprises:

[0036] Temperature sensor, water flow sensor, gas flow sensor and water flow proportional valve. The temperature sensor is used to collect and transmit temperature, the water flow sensor is used to collect and transmit water flow, the gas flow sensor is used to collect and transmit gas flow, and the water flow proportional valve is used to control the water flow.

[0037] Furthermore, the system also includes: a power supply circuit monitoring module, which is used to monitor the power supply information of the system.

[0038] Furthermore, the power supply information monitored by the power supply circuit monitoring module is sent to the host computer via the second CAN bus.

[0039] The terminal monitoring method, device and system based on excimer laser in the embodiment of the present invention detects the working state of the main controller in real time by using a backup controller, monitors the working state of each sensor in real time, and collects the working information of each sensor; when the backup controller detects the fault diagnosis signal sent by the main controller, the backup controller obtains the control authority of the main controller, the main controller stops working and cuts off the communication with the host computer, so that the fault self-check of the terminal monitoring system based on excimer laser is realized, and the self-monitoring ability is strong; then, the communication between the backup controller and the host computer is connected, and the acquired working state and working information are sent to the host computer in real time; then, the host computer judges whether the working state and working information of each sensor reach the limit working condition; when the working state and working information of each sensor do not reach the limit working condition, the host computer issues an early warning prompt and starts the equipment protection measures, which can avoid the adverse effects of some sudden accidents on the laser, facilitate the management personnel to maintain in time, and improve the reliability of the system. The terminal monitoring method, device and system based on excimer laser of the present invention have high reliability and low maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0041] Figure 1 It is a flow chart of the terminal monitoring method based on excimer laser of the present invention;

[0042] Figure 2 A preferred flow chart of the terminal monitoring method based on excimer laser of the present invention;

[0043] Figure 3 It is a principle block diagram of the terminal monitoring method based on excimer laser of the present invention;

[0044] Figure 4 It is a module diagram of the terminal monitoring device based on excimer laser of the present invention;

[0045] Figure 5 A preferred module diagram of the terminal monitoring device based on the excimer laser of the present invention;

[0046] Figure 6 The communication principle block diagram of the terminal monitoring system based on the excimer laser of the present invention;

[0047] Figure 7 The figure is a schematic diagram of the circuit principle of the terminal monitoring system based on the excimer laser of the present invention. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0049] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0050] Example 1

[0051] According to an embodiment of the present invention, a terminal monitoring method based on excimer laser is provided. Figure 1-3 , including the following steps:

[0052] At this time, the communication between the standby controller and the host computer is connected, while the communication between the main controller and the host computer is cut off; at this time, the information and working information of each sensor collected by the standby controller are uploaded to the host computer via the CAN bus;

[0053] S1: The main controller controls the operation of the excimer laser.

[0054] S2: The standby controller detects the working status of the main controller in real time, monitors the working status of each sensor in real time, and collects the working information of each sensor.

[0055] In this embodiment, since the reliability of the terminal monitoring system based on the excimer laser mainly depends on the central module controller, and the redundant control of the dual controllers is an effective means to meet the continuous working requirements and improve the system reliability, this embodiment improves the reliability of the system by designing a dual redundant controller.

[0056] Among them, redundant control is to add a spare key component in the terminal equipment, and the spare key component is a spare controller.

[0057] Among them, this embodiment adopts a dual redundant controller design, which mainly includes hardware redundant design and software redundant design. The hardware redundant design means that there are two controller chips on the terminal device, and the two controllers are running at the same time. One is the main controller, which is in the main control mode, and the other is the backup controller, which is in the backup mode.

[0058] Specifically, the present embodiment detects the working status of the main controller in real time through the backup controller, so that when the main controller fails, the terminal monitoring system can start the backup controller as quickly as possible, thereby maintaining the normal operation of various devices in the terminal monitoring system.

[0059] Furthermore, since the main control does not have the function of monitoring the status of the sensors and collecting the working information of each of the sensors, the present embodiment can monitor the status of the sensors through the backup controller and collect the working information of each sensor. Among them, since the terminal based on the excimer laser is a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly includes the collection of temperature, water flow, and gas flow to ensure the real-time monitoring function of each water path, gas path flow and cavity temperature, and the control of the proportional valve to realize the closed-loop regulation function of the temperature to ensure a relatively stable temperature environment in the cavity. Therefore, the present embodiment realizes the collection and transmission of information on temperature, water flow, and gas flow through various sensors.

[0060] Specifically, the present implementation uses a backup controller to monitor the working status and communication status of the main controller in real time. When the backup controller detects a fault diagnosis signal from the main controller, the backup controller will obtain master control, that is, obtain the control authority of the main controller, and can actively take over the work of the main controller to generate system output, thereby preventing the entire terminal system from being out of control. This can improve the reliability of the terminal monitoring system to a certain extent, thereby improving the reliability of the entire laser. The present implementation adopts a dual redundant controller design to achieve that when the backup controller detects a fault in the main controller, the main controller is immediately replaced. This not only saves maintenance time, but also saves maintenance costs.

[0061] S3: When the standby controller detects a fault diagnosis signal from the main controller, the standby controller obtains the control authority of the main controller, and the main controller stops working and disconnects the communication with the host computer.

[0062] In this embodiment, the control authority of the main controller means that when the main controller operates normally, the main controller in the master control mode has the I / O control authority.

[0063] Specifically, since the dual redundant controller design adopted in this embodiment is mainly aimed at some unexpected hardware failures that may occur when the system is working, such as a spike pulse in the circuit causing one of the controllers to restart or the program to run away, which is not conducive to the operation of the terminal monitoring system based on the excimer laser, the main controller will send a fault diagnosis signal in this case, that is, when the backup controller detects the fault diagnosis signal sent by the main controller, the control authority of the main controller can be obtained through the backup controller, and the main controller can be stopped, and the communication between the main controller and the host computer can be cut off. That is, this embodiment adopts a dual redundant controller design to control the corresponding switching circuit according to the fault situation to cut off the control loop of the main controller, and start the backup controller to realize the acquisition control function. In actual applications, the design adopted in this embodiment is relatively simple and the cost is relatively low, which can meet engineering applications with certain reliability requirements.

[0064] S4: Communication connection between the standby controller and the host computer.

[0065] Specifically, according to step S3, it can be known that the main controller fails. In order to ensure the continuous operation of the excimer laser, this implementation connects the communication between the backup controller and the host computer, and cuts off the communication between the main controller and the host computer to ensure the normal operation of the equipment, and facilitates the subsequent backup controller to upload the collected working status and working information of each sensor to the host computer in a timely manner.

[0066] S5: The standby controller sends the acquired working status and working information of each sensor to the host computer in real time.

[0067] Specifically, according to steps S1 to S4, it can be known that this embodiment realizes the system fault self-diagnosis function by adopting a dual redundant controller design. Furthermore, after the standby controller collects and monitors the working status of each sensor in step S2, and collects the working information of each sensor, such as the water flow collection circuit, the gas flow collection circuit, and the signal, the standby controller can send the collected information to the host computer, so as to use the host computer to monitor the operating status of each sensor, the main controller and the standby controller in real time, so as to ensure the reliability of the operation of the terminal monitoring system.

[0068] S6: The host computer determines whether the working status of each sensor and the working information have reached the limit working conditions.

[0069] In this embodiment, the host computer communicates with the main controller and the backup controller through the CAN bus (Controller Area Network) to monitor the operating status of each sensor, the main controller and the backup controller to ensure the reliability of the terminal monitoring system.

[0070] Specifically, the host computer transmits some configuration information, flow alarm thresholds, and P, I, and D parameter setting values ​​to the main controller and the backup controller through the CAN bus, which can be used to determine the working status of each sensor and whether the working information reaches the limit working conditions, so as to avoid dangerous working conditions and the adverse effects of some sudden accidents on the laser, thereby improving the reliability of the terminal monitoring system to a certain extent.

[0071] Furthermore, the upper computer determines whether the working status of each sensor and the working information have reached the limit working conditions by detecting whether the working status of each sensor belongs to the preset limit working condition and whether the working information exceeds the preset warning threshold. The preset limit working condition and the preset warning threshold are set according to actual application needs, and are used to detect the working status of each sensor, reduce the occurrence of dangerous conditions, and reduce failure losses. The preset limit working condition and the preset warning threshold can specifically be some configuration information, flow alarm threshold, and P, I, D parameter setting values ​​​​set according to actual environmental needs.

[0072] Specifically, this embodiment detects whether the working status of each sensor belongs to the preset extreme working condition, such as setting the working status level to determine whether it belongs to the preset extreme working condition; and then determines whether the working information exceeds the preset warning threshold, such as comparing the specific data value in the working information with the preset warning threshold. The judgment can also be made in other ways, which are not specifically limited here.

[0073] S7: If the working status and working information of each sensor do not reach the limit working conditions, the host computer will issue a prompt indicating that the working is normal.

[0074] Specifically, the fact that the working status and working information of each sensor have not reached the limit working conditions can be understood as the backup controller and each sensor in the terminal monitoring system are in normal working condition, no faults occur, and the excimer laser is operating normally. Therefore, this embodiment can issue a normal working prompt through the host computer to inform the management personnel that the equipment is operating normally, and can continue to monitor the backup controller and each sensor, and continue to obtain the working status and working information of each sensor to avoid dangerous working conditions.

[0075] S8: If the working status and working information of each sensor reaches the extreme working conditions, the host computer will issue an early warning and start equipment protection measures.

[0076] Specifically, when the working status and working information of each sensor reach the extreme working conditions, it can be understood that the backup controller and each sensor in the terminal monitoring system are in abnormal working conditions. For example, when dangerous working conditions occur, sound and light alarms are issued in time. When extreme working conditions occur, equipment protection measures are activated, such as interlocking protection equipment, to avoid equipment failure, thereby avoiding the adverse effects of some sudden accidents on the laser, which can improve the reliability of the terminal monitoring system to a certain extent.

[0077] The terminal monitoring method based on excimer laser in the embodiment of the present invention uses a backup controller to detect the working state of the main controller in real time, monitor the working state of each sensor in real time, and collect the working information of each sensor; when the backup controller detects the fault diagnosis signal sent by the main controller, the backup controller obtains the control authority of the main controller, the main controller stops working and cuts off the communication with the host computer, which can realize the fault self-check of the terminal monitoring system based on excimer laser, and has strong self-monitoring ability; then, the communication between the backup controller and the host computer is connected, and the acquired working state and working information are sent to the host computer in real time; then, the host computer judges whether the working state and working information of each sensor reach the limit working condition; when the working state and working information of each sensor do not reach the limit working condition, the host computer issues an early warning prompt and starts the equipment protection measures, which can avoid the adverse effects of some sudden accidents on the laser, facilitate the management personnel to maintain in time, and improve the reliability of the system. The terminal monitoring method based on excimer laser of the present invention has high reliability and low maintenance cost.

[0078] As a preferred technical solution, see Figure 2 , the method further comprises:

[0079] S9: When the standby controller detects that the main controller is operating normally, the standby controller sends the acquired working status and working information of each sensor to the main controller in real time;

[0080] S10: The main controller maintains a communication connection with the host computer, and sends the received working status and working information of each sensor to the host computer in real time.

[0081] Specifically, when the main controller is operating normally, that is, the main controller in the master control mode has I / O control rights and can generate system outputs, while the communication between the standby controller and the host computer is prohibited. The main controller can obtain the working status of each sensor monitored by the standby controller in real time according to the control authority, and collect the working information of each sensor, such as collecting the temperature, water flow, and gas flow data in the terminal cavity of the single-cavity structure based on the excimer laser; then, the main controller sends the obtained working status and working information of each sensor to the host computer in real time, that is, maintains the communication connection between the main controller and each sensor and the host computer, and specifically can transmit information through the CAN bus to ensure the reliability of the terminal monitoring system.

[0082] As a preferred technical solution, the backup controller also monitors the working status of the power supply circuit. When a power supply circuit failure occurs, the backup controller can promptly issue an early warning prompt so that the management personnel can perform maintenance in time to ensure the normal operation of the equipment.

[0083] As a preferred technical solution, the step of the backup controller detecting the working state of the main controller in real time includes: the backup controller detecting the working state of the main controller in real time via the CAN bus.

[0084] Specifically, the CAN bus is an ISO internationally standardized serial communication protocol. In practical applications, various electronic control systems are developed for the requirements of safety, comfort, convenience, low pollution and low cost. The CAN bus has high performance and reliability and can realize real-time and reliable data communication between various sensors, main controllers, backup controllers and host computers. Therefore, in this embodiment, the backup controller can detect the working status of the main controller in real time through the CAN bus. Even the main controller and the backup controller can use the CAN bus to monitor each other's working status in real time to ensure the reliability of the operation of the terminal monitoring system.

[0085] Example 2

[0086] According to another embodiment of the present invention, a terminal monitoring device based on an excimer laser is provided. Figure 4 ,include:

[0087] System main control module 401, used as main controller to control the operation of excimer laser;

[0088] The information monitoring module 402 is used for the standby controller to detect the working status of the main controller in real time, and to monitor the working status of each sensor in real time, and to collect the working information of each sensor;

[0089] In this embodiment, since the reliability of the terminal monitoring system based on the excimer laser mainly depends on the central module controller, and the redundant control of the dual controllers is an effective means to meet the continuous working requirements and improve the system reliability, this embodiment improves the reliability of the system by designing a dual redundant controller.

[0090] Among them, redundant control is to add a spare key component in the terminal equipment, and the spare key component is a spare controller.

[0091] Among them, this embodiment adopts a dual redundant controller design, which mainly includes hardware redundant design and software redundant design. The hardware redundant design means that there are two controller chips on the terminal device, and the two controllers are running at the same time. One is the main controller, which is in the main control mode, and the other is the backup controller, which is in the backup mode.

[0092] Specifically, the present embodiment detects the working status of the main controller in real time through the backup controller, so that when the main controller fails, the terminal monitoring system can start the backup controller as quickly as possible, thereby maintaining the normal operation of various devices in the terminal monitoring system.

[0093] Furthermore, since the main control does not have the function of monitoring the status of the sensors and collecting the working information of each of the sensors, the present embodiment can monitor the status of the sensors through the backup controller and collect the working information of each sensor. Among them, since the terminal based on the excimer laser is a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly includes the collection of temperature, water flow, and gas flow to ensure the real-time monitoring function of each water path, gas path flow and cavity temperature, and the control of the proportional valve to realize the closed-loop regulation function of the temperature to ensure a relatively stable temperature environment in the cavity. Therefore, the present embodiment realizes the collection and transmission of information on temperature, water flow, and gas flow through various sensors.

[0094] Specifically, the present implementation uses a backup controller to monitor the working status and communication status of the main controller in real time. When the backup controller detects a fault diagnosis signal from the main controller, the backup controller will obtain master control, that is, obtain the control authority of the main controller, and can actively take over the work of the main controller to generate system output, thereby preventing the entire terminal system from being out of control. This can improve the reliability of the terminal monitoring system to a certain extent, thereby improving the reliability of the entire laser. The present implementation adopts a dual redundant controller design to achieve that when the backup controller detects a fault in the main controller, the main controller is immediately replaced. This not only saves maintenance time, but also saves maintenance costs.

[0095] The authority acquisition module 403 is used for obtaining the control authority of the main controller when the standby controller detects the fault diagnosis signal sent by the main controller, and the main controller stops working and disconnects the communication with the host computer;

[0096] In this embodiment, the control authority of the main controller means that when the main controller operates normally, the main controller in the master control mode has the I / O control authority.

[0097] Specifically, since the dual redundant controller design adopted in this embodiment is mainly aimed at some unexpected hardware failures that may occur when the system is working, such as a spike pulse in the circuit causing one of the controllers to restart or the program to run away, which is not conducive to the operation of the terminal monitoring system based on the excimer laser, the main controller will send a fault diagnosis signal in this case, that is, when the backup controller detects the fault diagnosis signal sent by the main controller, the control authority of the main controller can be obtained through the backup controller, and the main controller can be stopped, and the communication between the main controller and the host computer can be cut off. That is, this embodiment adopts a dual redundant controller design to control the corresponding switching circuit according to the fault situation to cut off the control loop of the main controller, and start the backup controller to realize the acquisition control function. In actual applications, the design adopted in this embodiment is relatively simple and the cost is relatively low, which can meet engineering applications with certain reliability requirements.

[0098] Communication connection module 404, used for communication connection between the standby controller and the host computer;

[0099] Specifically, according to the authority acquisition module 403, it can be known that the main controller has a fault. In order to ensure the continuous operation of the excimer laser, this implementation connects the communication between the backup controller and the host computer, and cuts off the communication between the main controller and the host computer to ensure the normal operation of the equipment, and facilitates the subsequent backup controller to upload the collected working status and working information of each sensor to the host computer in a timely manner.

[0100] The information sending module 405 is used for the standby controller to send the acquired working status and working information of each sensor to the host computer in real time;

[0101] Specifically, according to the system main control module 401 to the communication connection module 404, it can be known that the present embodiment realizes the system fault self-diagnosis function by adopting a dual redundant controller design. Furthermore, the backup controller collects and monitors the working status of each sensor in the information monitoring module 402, and collects the working information of each sensor, such as the water flow collection circuit, the gas flow collection circuit, and the signal. After that, the backup controller can send the collected information to the host computer, so as to use the host computer to monitor the operating status of each sensor, the main controller and the backup controller in real time, so as to ensure the reliability of the operation of the terminal monitoring system.

[0102] Condition judgment module 406, used by the host computer to judge whether the working status of each sensor and the working information have reached the limit working condition;

[0103] In this embodiment, the host computer communicates with the main controller and the backup controller through the CAN bus (Controller Area Network) to monitor the operating status of each sensor, the main controller and the backup controller to ensure the reliability of the terminal monitoring system.

[0104] Specifically, the host computer transmits some configuration information, flow alarm thresholds, and P, I, and D parameter setting values ​​to the main controller and the backup controller through the CAN bus, which can be used to determine the working status of each sensor and whether the working information reaches the limit working conditions, so as to avoid dangerous working conditions and the adverse effects of some sudden accidents on the laser, thereby improving the reliability of the terminal monitoring system to a certain extent.

[0105] Furthermore, the upper computer determines whether the working status of each sensor and the working information have reached the limit working conditions by detecting whether the working status of each sensor belongs to the preset limit working condition and whether the working information exceeds the preset warning threshold. The preset limit working condition and the preset warning threshold are set according to actual application needs, and are used to detect the working status of each sensor, reduce the occurrence of dangerous conditions, and reduce failure losses. The preset limit working condition and the preset warning threshold can specifically be some configuration information, flow alarm threshold, and P, I, D parameter setting values ​​​​set according to actual environmental needs.

[0106] Specifically, this embodiment detects whether the working status of each sensor belongs to the preset extreme working condition, such as setting the working status level to determine whether it belongs to the preset extreme working condition; and then determines whether the working information exceeds the preset warning threshold, such as comparing the specific data value in the working information with the preset warning threshold. The judgment can also be made in other ways, which are not specifically limited here.

[0107] The status prompt module 407 is used for the host computer to issue a normal working prompt if the working status and working information of each sensor do not reach the limit working condition;

[0108] Specifically, the fact that the working status and working information of each sensor have not reached the limit working conditions can be understood as the backup controller and each sensor in the terminal monitoring system are in normal working condition, no faults occur, and the excimer laser is operating normally. Therefore, this embodiment can issue a normal working prompt through the host computer to inform the management personnel that the equipment is operating normally, and can continue to monitor the backup controller and each sensor, and continue to obtain the working status and working information of each sensor to avoid dangerous working conditions.

[0109] The early warning module 408 is used to issue an early warning to the host computer and initiate equipment protection measures if the working status and working information of each sensor reach the limit working conditions.

[0110] Specifically, when the working status and working information of each sensor reach the extreme working conditions, it can be understood that the backup controller and each sensor in the terminal monitoring system are in abnormal working conditions. For example, when dangerous working conditions occur, sound and light alarms are issued in time. When extreme working conditions occur, equipment protection measures are activated, such as interlocking protection equipment, to avoid equipment failure, thereby avoiding the adverse effects of some sudden accidents on the laser, which can improve the reliability of the terminal monitoring system to a certain extent.

[0111] The terminal monitoring device based on excimer laser in the embodiment of the present invention uses a backup controller to detect the working state of the main controller in real time, monitor the working state of each sensor in real time, and collect the working information of each sensor; when the backup controller detects the fault diagnosis signal sent by the main controller, the backup controller obtains the control authority of the main controller, the main controller stops working and cuts off the communication with the host computer, which can realize the fault self-check of the terminal monitoring system based on excimer laser, and has strong self-monitoring ability; then, the communication between the backup controller and the host computer is connected, and the acquired working state and working information are sent to the host computer in real time; then, the host computer judges whether the working state and working information of each sensor reach the limit working condition; when the working state and working information of each sensor do not reach the limit working condition, the host computer issues an early warning prompt and starts the equipment protection measures, which can avoid the adverse effects of some sudden accidents on the laser, facilitate the management personnel to maintain in time, and improve the reliability of the system. The terminal monitoring device based on excimer laser of the present invention has high reliability and low maintenance cost.

[0112] As a preferred technical solution, see Figure 5 , the device further comprises:

[0113] The information transmission module 501 is used for sending the acquired working status and working information of each sensor to the main controller in real time when the standby controller detects that the main controller is operating normally;

[0114] The data transmission module 502 is used to maintain a communication connection between the main controller and the host computer, and to send the received working status and working information of each sensor to the host computer in real time.

[0115] Specifically, when the main controller is operating normally, that is, the main controller in the master control mode has I / O control rights and can generate system outputs, while the communication between the standby controller and the host computer is prohibited. The main controller can obtain the working status of each sensor monitored by the standby controller in real time according to the control authority, and collect the working information of each sensor, such as collecting the temperature, water flow, and gas flow data in the terminal cavity of the single-cavity structure based on the excimer laser; then, the main controller sends the obtained working status and working information of each sensor to the host computer in real time, that is, maintains the communication connection between the main controller and each sensor and the host computer, and specifically can transmit information through the CAN bus to ensure the reliability of the terminal monitoring system.

[0116] As a preferred technical solution, the backup controller also monitors the working status of the power supply circuit. When a power supply circuit failure occurs, the backup controller can promptly issue an early warning prompt so that the management personnel can perform maintenance in time to ensure the normal operation of the equipment.

[0117] As a preferred technical solution, the step of the backup controller detecting the working state of the main controller in real time includes: the backup controller detecting the working state of the main controller in real time via the CAN bus.

[0118] Specifically, the CAN bus is an ISO internationally standardized serial communication protocol. In practical applications, various electronic control systems are developed for the requirements of safety, comfort, convenience, low pollution and low cost. The CAN bus has high performance and reliability and can realize real-time and reliable data communication between various sensors, main controllers, backup controllers and host computers. Therefore, in this embodiment, the backup controller can detect the working status of the main controller in real time through the CAN bus. Even the main controller and the backup controller can use the CAN bus to monitor each other's working status in real time to ensure the reliability of the operation of the terminal monitoring system.

[0119] Example 3

[0120] According to another embodiment of the present invention, a terminal monitoring system based on an excimer laser is provided. Figure 6 ,include:

[0121] The main controller, the backup controller, the host computer and the sensor, the backup controller monitors the working status of the main controller in real time through the first CAN bus, the main controller and the backup controller transmit information with the host computer through the second CAN bus respectively, the backup controller is connected to the sensor through the data line, and performs information collection and status monitoring.

[0122] In this embodiment, the standby controller uses the first CAN bus to monitor the working status of the main controller in real time. The main controller communicates with the host computer through the second CAN bus. The host computer transmits some configuration information, flow alarm threshold, P, I, and D parameter setting values ​​to the controller through the second CAN. The controller sets feedback information, host computer query information, and collected flow values, temperature values, and proportional valve opening values ​​back to the host computer through the second CAN bus, thereby realizing information transmission between the host computer and the main controller and the standby controller.

[0123] The terminal monitoring system based on the excimer laser in the embodiment of the present invention is designed with a dual redundant controller, using one main and one backup controller. The backup controller monitors the working status of the main controller and is also responsible for monitoring the working status of the temperature acquisition circuit, the flow acquisition circuit, the proportional valve control circuit and a series of power supply circuits. When an abnormality is found, an early warning prompt is issued in time so that the management personnel can perform maintenance in time and start equipment protection measures, such as interlocking protection equipment, which can avoid the adverse effects of some sudden accidents on the laser, facilitate the management personnel to maintain in time, improve the reliability of the system, and reduce maintenance costs.

[0124] As a preferred technical solution, the sensor includes:

[0125] Temperature sensor, water flow sensor, gas flow sensor and water flow proportional valve. The temperature sensor is used to collect and transmit temperature, the water flow sensor is used to collect and transmit water flow, the gas flow sensor is used to collect and transmit gas flow, and the water flow proportional valve is used to control the water flow.

[0126] It should be noted that, since the excimer laser device is a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly includes the collection of temperature, water flow, and gas flow to ensure the real-time monitoring function of each water path, gas path flow and cavity temperature, and the control of the proportional valve to achieve the closed-loop regulation function of the temperature to ensure a relatively stable temperature environment in the cavity, this embodiment uses a temperature sensor, a water flow sensor, a gas flow sensor, and a water flow proportional valve to realize the information collection and transmission of temperature, water flow, and gas flow. Further, as Figure 7As shown, this embodiment realizes information collection and monitoring through a temperature acquisition circuit corresponding to the temperature sensor, a water flow acquisition circuit corresponding to the water flow sensor, a gas flow acquisition circuit corresponding to the gas flow sensor, and a proportional valve control circuit corresponding to the water flow proportional valve, so as to ensure the reliability of the terminal monitoring system.

[0127] As a preferred technical solution, the system also includes: a power supply circuit monitoring module, which is used to monitor the power supply information of the system to avoid power outages, insufficient power supply or other failures of the monitoring system and ensure the reliability of the operation of the monitoring system.

[0128] As a preferred technical solution, the power supply information monitored by the power supply circuit monitoring module is sent to the host computer through the second CAN bus to ensure the stability of information transmission.

[0129] Compared with the existing liver segmentation system, the terminal monitoring method, device and system based on excimer laser of the present invention have the following advantages:

[0130] 1. This embodiment adopts a dual redundant controller design, which can realize fault self-detection of the terminal monitoring system based on the excimer laser, and has strong self-monitoring capability;

[0131] 2. High reliability, that is, when the main controller fails, this embodiment switches to the backup controller to control the operation of the excimer laser and various devices, thereby extending the continuous working time of the excimer laser;

[0132] 3. Low maintenance cost, that is, by adding a spare controller, the working time of the excimer laser can be extended, thereby reducing the maintenance frequency and maintenance cost;

[0133] 4. Increase monitoring of the power supply circuit to ensure the stability of equipment operation.

[0134] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0135] In the above embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0136] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the system embodiments described above are only schematic. For example, the division of units can be a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of units or modules, which can be electrical or other forms.

[0137] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed over multiple units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0138] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0139] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the methods of each embodiment of the present invention. The aforementioned storage medium includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other media that can store program codes.

[0140] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A terminal monitoring method based on excimer laser, characterized in that: The following steps are involved: A main controller controls the operation of the excimer laser; The standby controller detects the working status of the main controller in real time, monitors the working status of each sensor in real time, and collects the working information of each sensor; When the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller obtains the control authority of the main controller, and the main controller stops working and disconnects the communication with the host computer; The standby controller is communicatively connected to the host computer; The standby controller sends the acquired working status and working information of each sensor to the host computer in real time; The host computer determines whether the working state and working information of each sensor have reached the limit working condition; If the working status and working information of each of the sensors do not reach the limit working conditions, the host computer issues a prompt indicating that the working is normal; If the working status and working information of each of the sensors reach the limit working conditions, the host computer issues an early warning and initiates equipment protection measures; The standby controller monitors the working status of each sensor in real time, and collects the working information of each sensor: specifically, through the temperature acquisition circuit corresponding to the temperature sensor, the water flow acquisition circuit corresponding to the water flow sensor, the gas flow acquisition circuit corresponding to the gas flow sensor, and the proportional valve control circuit corresponding to the water flow proportional valve, to realize the information collection and monitoring of temperature, water flow, and gas flow, as well as the control of the proportional valve.

2. The terminal monitoring method based on excimer laser according to claim 1, characterized in that: After the step of the standby controller detecting the working state of the main controller in real time, the method further comprises: When the standby controller detects that the main controller is operating normally, the standby controller sends the acquired working status and working information of each sensor to the main controller in real time; The main controller maintains a communication connection with the host computer, and sends the received working status and working information of each sensor to the host computer in real time.

3. The terminal monitoring method based on excimer laser according to claim 1, characterized in that: The standby controller also monitors the working status of the power supply circuit so that the standby controller issues an early warning prompt when the power supply circuit fails.

4. The terminal monitoring method based on excimer laser according to claim 1, characterized in that: The step of the standby controller detecting the working state of the main controller in real time comprises: The standby controller detects the working status of the main controller in real time through the CAN bus.

5. A terminal monitoring device based on excimer laser, characterized in that: include: A system main control module, used as a main controller to control the operation of the excimer laser; An information monitoring module is used for the standby controller to detect the working status of the main controller in real time, and to monitor the working status of each sensor in real time, and to collect the working information of each sensor; The authority acquisition module is used for obtaining the control authority of the main controller when the standby controller detects a fault diagnosis signal sent by the main controller, and the main controller stops working and disconnects the communication with the host computer; A communication connection module, used for communication connection between the standby controller and the host computer; An information sending module, used for the standby controller to send the acquired working status and working information of each sensor to the host computer in real time; A condition judgment module, used by the host computer to judge whether the working status and working information of each sensor have reached the limit working condition; A status prompt module, used for the host computer to issue a normal working prompt if the working status and working information of each sensor do not reach the limit working condition; An early warning prompt module, which is used for the host computer to issue an early warning prompt and start equipment protection measures if the working status and working information of each of the sensors reach the limit working conditions; The standby controller monitors the working status of each sensor in real time, and collects the working information of each sensor: specifically, through the temperature acquisition circuit corresponding to the temperature sensor, the water flow acquisition circuit corresponding to the water flow sensor, the gas flow acquisition circuit corresponding to the gas flow sensor, and the proportional valve control circuit corresponding to the water flow proportional valve, to realize the information collection and monitoring of temperature, water flow, and gas flow, as well as the control of the proportional valve.

6. The terminal monitoring device based on excimer laser according to claim 5, characterized in that: The device also includes: An information transmission module, configured to cause the standby controller to send the acquired working status and working information of each sensor to the main controller in real time when the standby controller detects that the main controller is operating normally; The data transmission module is used to maintain a communication connection between the main controller and the host computer, and to send the received working status and working information of each sensor to the host computer in real time.

7. A terminal monitoring system based on excimer laser, characterized in that: The terminal monitoring method based on excimer laser as claimed in any one of claims 1 to 4 is adopted; the terminal monitoring system comprises: A main controller, a backup controller, a host computer and a sensor, wherein the backup controller monitors the working status of the main controller in real time via a first CAN bus, the main controller and the backup controller transmit information to the host computer via a second CAN bus respectively, and the backup controller is connected to the sensor via a data line to collect information and monitor the status.

8. The terminal monitoring system based on excimer laser according to claim 7, characterized in that: The sensor comprises: A temperature sensor, a water flow sensor, a gas flow sensor and a water flow proportional valve, wherein the temperature sensor is used to collect and transmit temperature, the water flow sensor is used to collect and transmit water flow, the gas flow sensor is used to collect and transmit gas flow, and the water flow proportional valve is used to control the size of the water flow.

9. The terminal monitoring system based on excimer laser according to claim 7, characterized in that: The system further comprises: a power supply circuit monitoring module, and the power supply circuit monitoring module is used to monitor the power supply information of the system.

10. The terminal monitoring system based on excimer laser according to claim 9, characterized in that: The power supply information monitored by the power supply circuit monitoring module is sent to the host computer via the second CAN bus.

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