A heater bottom electromagnetic shielding structure and heater

Abstract

The present invention belongs to the field of semiconductor equipment technology, and specifically provides an electromagnetic shielding structure at the bottom of a heater and a heater including the shielding structure. The bottom of the heater is an interface end for an outlet, and the power supply cable of the heating module of the heater is outlet from here. After the heater is powered on and heated, the current passing through the power supply cable will generate certain electromagnetic waves, which will cause signal interference to the precision electrical control system. Therefore, shielding at the bottom of the heater can effectively reduce the electromagnetic wave interference generated by the heater power supply and cable.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment, and specifically provides an electromagnetic shielding structure at the bottom of a heater and a heater comprising the shielding structure. Background Art

[0002] Semiconductor process equipment needs to have an accurate and efficient electrical control system. The more sophisticated the electrical control system, the more susceptible the electronic devices are to interference from various electromagnetic radiation. Especially during the wafer production deposition process, it is even more necessary to reduce electromagnetic interference to ensure that the precise electrical control system of semiconductor process equipment can operate accurately and efficiently. Summary of the invention

[0003] In order to solve one of the above problems, the present invention provides an electromagnetic shielding structure at the bottom of the heater, which is arranged at the bottom of the heater 1, and the heater 1 has a disk surface and a disk handle fixed on its back, and a plurality of heating cable jacks are arranged on the bottom of the disk handle; a corrugated tube 2 is sleeved on the outer periphery of the disk handle, and a mounting block is arranged at the bottom of the disk handle, the lower part of the mounting block is cylindrical, the outer wall surface is provided with an external thread, and the upper end surface is provided with a recessed groove, the bottom of the recessed groove is provided with a through hole, the through hole penetrates to the bottom of the mounting block, and the bottom of the disk handle is stuck in the recessed groove at the through hole; the mounting block 3 is fixedly connected to the corrugated tube 2 by a flange; in addition, a base 6 is provided next to the heater 1, and a connecting handle 5 is provided on the mounting block 3, and the handle 5 is fixedly connected to the base 6; the cable connector is inserted into the heating cable jack at the through hole from below, and is characterized in that: the shielding structure 4 is designed as a circular cover-like structure, the inner side wall is provided with an internal thread that cooperates with the bottom of the mounting block 3, and the bottom of the shielding structure 4 is provided with a harness through hole for the cable harness to enter and exit.

[0004] Furthermore, the shielding structure 4 is made of aluminum alloy.

[0005] Furthermore, the heater is placed in a vacuum chamber.

[0006] Furthermore, the thickness of the shielding structure 4 is 5 mm.

[0007] Furthermore, the shielding structure 4 is arranged in an atmospheric environment.

[0008] Furthermore, the wiring harness through hole and the shielding structure 4 are provided with a limiting bent piece 8 .

[0009] According to another aspect of the present invention, a heater is provided. The heater 1 comprises the above-mentioned shielding structure 4.

[0010] The advantages of the present invention are: the bottom of the heater is an interface end for the outlet, and the power supply cable of the heating module of the heater is outlet from here. After the heater is powered on and heated, after the power supply cable passes the current, a certain electromagnetic wave will be generated at the connection at the bottom of the heater, causing signal interference to the precision electrical control system. The bottom shielding cover of the heater described in this patent has a simple structure, is time-saving and labor-saving to disassemble and maintain, and has a low processing cost. It can effectively improve labor efficiency and has certain economic value. The most important thing is that it can effectively reduce the electromagnetic wave interference generated at the bottom of the heater when it is powered on. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the location of the shielding structure and the heater;

[0012] Figure 2 It is a schematic diagram of the three-dimensional structure of the shielding structure;

[0013] Figure 3 A cross-sectional view of an implementation structure of a shielding structure;

[0014] Figure 4 A cross-sectional view of another embodiment of the shielding structure;

[0015] Figure 5 A cross-sectional view of another embodiment of the shielding structure; DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0017] refer to Figure 1-3The present invention provides an electromagnetic shielding structure 4 at the bottom of a heater 1, which is made of aluminum alloy. The shielding structure 4 is arranged at the bottom of the heater 1. The heater 1 has a disk surface and a disk handle fixed at the center of the bottom thereof, and a plurality of heating cable jacks are arranged on the bottom of the disk handle; a corrugated tube 2 is sleeved on the outer periphery of the disk handle, and a mounting block 3 is arranged at the bottom of the disk handle. The mounting block 3 is cylindrical below and has an outer thread on the outer periphery, and a recessed groove is arranged on the upper end surface. A through hole is arranged at the center of the recessed groove, which penetrates to the bottom of the mounting block 3, and the bottom of the disk handle is stuck at the recessed groove at the through hole; the mounting block is fixedly connected to the corrugated tube 2 through a flange; in addition, a base 6 is arranged next to the heater 1, and a connecting handle 5 is arranged on the mounting block 3, and the handle 5 is fixedly connected to the base 6; a cable connector 7 is inserted into the heating cable jack at the through hole from the bottom, and the shielding structure 4 is designed as a circular cover structure, and the inner side wall is provided with an inner thread that cooperates with the bottom of the mounting block 3, and the bottom of the shielding structure 4 is provided with a harness through hole for the cable harness to enter and exit. The shielded circular cover structure is shown in the figure, which is connected to the mounting block 3 through threads, covers the connector at the root of the heater 1 cable, and the heater 1 cable is connected through the small hole in the bottom plate of the shielding structure 4. Most of the interference electromagnetic waves at the bottom connector of the heater can be blocked inside the shielding ring, effectively reducing electromagnetic wave interference.

[0018] As an improvement to the solution, the thickness of the shielding structure 4 is 5 mm. Through daily operation experiments, this size is the minimum thickness to ensure mechanical strength and save production costs.

[0019] The process environment of the shielding structure is that the heating plate is placed in a vacuum chamber, wherein the bellows seals the connection between the plate handle and the chamber. The base and the mounting block bellows are placed in an atmospheric environment.

[0020] refer to Figure 4 In order to effectively block electromagnetic waves, the present invention provides another optimized implementation of the shielding structure, that is, at the wire harness through hole, a limiting bend 8 is provided inside the shielding structure, and the depth of the shielding structure conforms to the setting of the limiting bend, and the limiting bend has a stepped bending portion, which can effectively block electromagnetic waves by limiting the wire harness. In the original shielding structure, although the wire harness through hole at the bottom is set as small as possible while satisfying the requirement for the wire harness to pass through, because the through hole is directly opposite to the bottom of the heating plate handle, it is inevitable that electromagnetic waves will be emitted through the through hole, so setting the cover limiting bend 8 can effectively block electromagnetic waves.

[0021] refer to Figure 5In order to effectively block electromagnetic waves, the present invention provides another optimized implementation of the shielding structure, that is, a cap-shaped structural member is placed over the wire harness through hole, and a plurality of wire harness through holes are arranged around the structural member. On the structural member, a free-falling baffle structure is hingedly provided at the corresponding position of each wire harness through hole. When no cable passes through, the baffle structure freely falls to block the wire harness through hole. The structural design can increase the diameter of the wire harness through hole to adapt to heaters with different numbers of cables. The wire harness through holes of the structural member are passed through according to the number of cables, and the idle wire harness through holes are blocked by the baffle to minimize electromagnetic waves.

[0022] According to another aspect of the present invention, a heater 1 is provided, and the heater 1 comprises any of the above-mentioned shielding structures 4.

[0023] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An electromagnetic shielding structure at the bottom of a heater, arranged at the bottom of a heater (1), the heater (1) having a disk surface and a disk handle fixed at the back thereof, a plurality of heating cable jacks being arranged on the bottom surface of the disk handle; a corrugated tube (2) being sleeved on the outer periphery of the disk handle, a mounting block being arranged at the bottom of the disk handle, the mounting block being cylindrical at the bottom, having an external thread on the outer wall surface, and having a recessed groove on the upper end surface, the bottom of the recessed groove being provided with a through hole, the through hole penetrating to the bottom of the mounting block, the bottom of the disk handle being clamped at the recessed groove at the through hole; the mounting block (3) being fixedly connected to the corrugated tube (2) via a flange; in addition, a base (6) being arranged next to the heater (1), the mounting block (3) being provided with a connecting handle (5), the handle (5) being fixedly connected to the base (6); the cable connector being inserted into the heating cable jack at the through hole from below, characterized in that: The shielding structure (4) is designed as a circular cover-shaped structure, the inner side wall is provided with an internal thread that is matched and connected with the bottom of the mounting block (3), and the bottom of the shielding structure (4) is provided with a harness through hole for the cable harness to enter and exit; The wiring harness through hole and the shielding structure (4) are provided with a limiting bend (8), or the wiring harness through hole is covered with a cap-shaped structural member, the side wall of the structural member is provided with a plurality of wiring harness through holes, and a free-falling baffle structure is hingedly provided at the corresponding position of each wiring harness through hole.

2. The electromagnetic shielding structure of the heater bottom according to claim 1, characterized in that: The shielding structure (4) is made of aluminum alloy.

3. The electromagnetic shielding structure of the heater bottom according to claim 1, characterized in that: The heater is placed in the vacuum chamber.

4. The electromagnetic shielding structure of the heater bottom according to claim 1, characterized in that: The thickness of the shielding structure (4) is 5 mm.

5. The electromagnetic shielding structure of the heater bottom according to claim 1, characterized in that: The shielding structure (4) is arranged in an atmospheric environment.

6. A heater, characterized in that: The heater (1) comprises the shielding structure (4) described in any one of claims 1 to 5 above.

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