Probe card pin repair and shaping device

Abstract

The present invention discloses a probe card pin repair and shaping device, comprising a workbench, a mirror base, a Mylar calibration base, a probe card holder, a pneumatic fixture, a microscope, a refraction compensation mechanism, a Mylar sheet carrier, an optical axis, and a calibration mechanism. The mirror base and Mylar calibration base are provided on the outside of the workbench, and a pair of probe card holders are symmetrically arranged on both sides of the workbench surface. The probe card holders are integrated with a pneumatic fixture. A microscope mounted on the mirror base is arranged vertically downward between the probe card holders, and a refraction compensation mechanism is externally mounted on the microscope lens. Through the above-mentioned method, the present invention provides a probe card pin repair and shaping device. By continuously comparing and observing the contact point position with the pin, the device can quickly identify misplaced pins and calibrate and repair them. After shaping, the probe card can quickly return to normal use, and the device has the characteristics of easy operation and high success rate.

Description

Technical Field

[0001] The present invention relates to the field of probe card processing devices, and in particular to a probe card pin repairing and shaping device. Background Art

[0002] Probe cards have numerous pins, which can bend and deform under stress during use. Misaligned pins can no longer align with chip contacts, resulting in no electrical signal measurement. Probe card pins are approximately 20 to 30 μm in size, making repair and shaping these misaligned pins difficult and unsuccessful, leading to a high rate of probe card scrapping. Summary of the Invention

[0003] The main technical problem solved by the present invention is to provide a probe card pin repair and shaping device, which stably loads Mylar sheets at the probe card pin positions, establishes a benchmark contact reference point position on the microscope optical path, and can quickly find the malpositioned pins and calibrate and repair them by continuously comparing and observing the contact point positions with the pins. The probe card can be quickly restored to normal use after shaping, and has the characteristics of easy operation and high success rate.

[0004] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a probe card pin repair and shaping device, including a workbench, a mirror base, a Mylar calibration base, a probe card bracket, a pneumatic clamp, a microscope, a refraction compensation mechanism, a Mylar sheet carrier, an optical axis, and a calibration mechanism. A mirror base and a Mylar calibration base are provided on the outside of the workbench, a pair of probe card brackets are symmetrically arranged on both sides of the workbench table, the probe card brackets are integrated with a pneumatic clamp, a microscope arranged on the mirror base is arranged vertically downward between the probe card brackets, a refraction compensation mechanism is externally mounted on the microscope lens, a Mylar sheet carrier is horizontally arranged directly below the refraction compensation mechanism, the Mylar sheet carrier is provided on the outer peripheral surface of one end of the horizontally arranged optical axis, and the optical axis is movably mounted on the Mylar calibration base through the calibration mechanism.

[0005] In a preferred embodiment of the present invention, the microscope base is composed of a bracket and a three-axis slide. The three-axis slide is installed on the top of the bracket, and the microscope is installed on the three-axis slide.

[0006] In a preferred embodiment of the present invention, the refraction compensation mechanism is composed of a hanging plate, a loading cylinder, and a compensation slide. The hanging plate is arranged at the microscope lens. The bottom surface of the hanging plate is provided with a compensation slide driven by the loading cylinder. The compensation slide is provided with a refraction compensation glass plate slot. The refraction compensation glass plate slot is matched with the optical path of the microscope.

[0007] In a preferred embodiment of the present invention, the pneumatic clamp consists of a probe card pressure plate and a lifting cylinder, the lifting cylinder is vertically embedded in the probe card bracket, and the probe card pressure plate is horizontally arranged directly above the probe card bracket and connected to the lifting cylinder.

[0008] In a preferred embodiment of the present invention, the calibration mechanism is composed of a three-axis fine-tuning platform, an adapter plate, a bearing, a dial wheel, a synchronous cam, and a detection switch.

[0009] A three-axis fine-tuning platform is provided on the Mylar calibration seat, and the three-axis fine-tuning platform is connected to an adapter plate. A bearing is provided on the adapter plate, and the bearing is sleeved with an optical axis. A dial wheel and a synchronization cam are coaxially provided at the other end of the optical axis. A detection switch matching the synchronization cam is provided on the adapter plate, and the detection switch is electrically connected to the refraction compensation mechanism through an electromagnetic valve.

[0010] In a preferred embodiment of the present invention, a deep groove ball bearing is provided under the workbench, and a two-axis translation slide is connected under the deep groove ball bearing. The two-axis translation slide is provided with an x-axial micrometer, a y-axial micrometer and an angle adjustment micrometer. The edge of the two-axis translation slide is equipped with a reverse external reset spring for each x-axial micrometer, y-axial micrometer and angle adjustment micrometer.

[0011] In a preferred embodiment of the present invention, the bearing consists of a double-headed shaft seat with a concentric structure and four angular contact bearings. The double-headed shaft seat with a concentric structure is installed on an adapter plate, and the angular contact bearings are coaxially fixed in pairs at both ends of the double-headed shaft seat with a concentric structure.

[0012] In a preferred embodiment of the present invention, a slot is formed on the workbench, and a limiting bolt is provided in the slot, and the probe card bracket is fixed in the slot by the limiting bolt.

[0013] In a preferred embodiment of the present invention, a pair of limit bars are provided at the outer ends of the double-headed shaft seat of the concentric structure, a rocker bar cooperating with the limit bars is provided on the optical axis, and the rocker bar swings limitedly between the limit bars along with the dial wheel.

[0014] In a preferred embodiment of the present invention, a pair of ball-end control rods are provided on the three-axis slide, and the ball-end control rods are symmetrically arranged on both sides of the microscope.

[0015] The beneficial effects of the present invention are as follows: the present invention provides a probe card pin repair and shaping device, which stably loads a Mylar sheet at the probe card pin position, establishes a reference contact point on the microscope optical path, and can quickly find the malpositioned pin and calibrate and repair it by continuously comparing and observing the contact point position with the pin. The probe card can be quickly restored to normal use after shaping, and has the characteristics of easy operation and high success rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive work, among which:

[0017] Figure 1 This is a structural diagram of a preferred embodiment of a probe card pin repair and shaping device of the present invention;

[0018] Figure 2 This is a structural diagram of a refraction compensation mechanism of a preferred embodiment of a probe card pin repair and shaping device of the present invention;

[0019] Figure 3 This is a structural diagram of a compensation slide of a preferred embodiment of a probe card pin repair and shaping device of the present invention;

[0020] Figure 4 This is a bearing structure diagram of a preferred embodiment of a probe card pin repair and shaping device of the present invention. DETAILED DESCRIPTION

[0021] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] like Figure 1-4 As shown, the embodiment of the present invention includes:

[0023] A probe card pin repair and shaping device comprises a workbench 1, a mirror base 2, a Mylar calibration base 3, a probe card bracket 4, a pneumatic clamp 5, a microscope 6, a refraction compensation mechanism 7, a Mylar sheet carrier 8, an optical axis 9, and a calibration mechanism 10. The mirror base 2 and the Mylar calibration base 3 are matched with each other on the outside of the workbench 1. A pair of probe card brackets 4 are symmetrically arranged on both sides of the workbench 1. The probe card brackets 4 are integrated with the pneumatic clamp 5. A microscope 6 arranged on the mirror base 2 is arranged vertically downward between the probe card brackets 4. A refraction compensation mechanism 7 is externally mounted on the lens of the microscope 6. A Mylar sheet carrier 8 is horizontally arranged directly below the refraction compensation mechanism 7. The Mylar sheet carrier 8 is arranged on the outer peripheral surface of one end of the horizontally arranged optical axis 9. The optical axis 9 is movably mounted on the Mylar calibration base 3 through the calibration mechanism 10.

[0024] The lens base 2 is composed of a bracket 21 and a three-axis slide 22 . The three-axis slide 22 is installed on the top of the bracket 21 , and the microscope 6 is installed on the three-axis slide 22 .

[0025] Furthermore, the refraction compensation mechanism 7 is composed of a hanging plate 71, a loading cylinder 72, and a compensation slide 73. The hanging plate 71 is arranged at the lens of the microscope 6. The bottom surface of the hanging plate 71 is provided with a compensation slide 73 driven by the loading cylinder 72. The compensation slide 73 is provided with a refraction compensation glass sheet slot 731, and the refraction compensation glass sheet slot 731 is matched on the optical path of the microscope 6.

[0026] Furthermore, the pneumatic clamp 5 consists of a probe card pressing plate 51 and a lifting cylinder 52 . The lifting cylinder 52 is vertically embedded in the probe card bracket 4 . The probe card pressing plate 51 is horizontally arranged directly above the probe card bracket 4 and connected to the lifting cylinder 52 .

[0027] Furthermore, the calibration mechanism 10 is composed of a three-axis fine-tuning platform 101, an adapter plate 102, a bearing 103, a dial wheel 104, a synchronous cam 105, and a detection switch 106.

[0028] A three-axis fine-tuning platform 101 is provided on the Mylar calibration seat 3, and the three-axis fine-tuning platform 101 is connected to the adapter plate 102. A bearing 103 is provided on the adapter plate 102, and the bearing 103 is sleeved on the optical axis 9. A dial wheel 104 and a synchronization cam 105 are coaxially provided at the other end of the optical axis 9. A detection switch 106 matching the synchronization cam 105 is provided on the adapter plate 102, and the detection switch 106 is electrically connected to the refraction compensation mechanism 7 through an electromagnetic valve.

[0029] Furthermore, a deep groove ball bearing 91 is provided under the workbench 1, and a two-axis translation slide 92 is connected to the deep groove ball bearing 91. The two-axis translation slide 92 is provided with an x-axial micrometer 93, a y-axial micrometer 94 and an angle adjustment micrometer 95. The edge of the two-axis translation slide 92 is equipped with a reverse external reset spring 96 for each x-axial micrometer 93, y-axial micrometer 94 and angle adjustment micrometer 95.

[0030] Furthermore, the bearing 103 is composed of a concentric double-headed shaft seat 1031 and four angular contact bearings 1032. The concentric double-headed shaft seat 1031 is installed on the adapter plate 102, and the angular contact bearings 1032 are coaxially fixed in pairs at both ends of the concentric double-headed shaft seat 1031.

[0031] Furthermore, a slot 1001 is provided on the workbench 1 , and a limiting bolt is provided in the slot 1001 . The probe card bracket 4 is fixed in the slot 1001 by the limiting bolt.

[0032] Furthermore, a pair of limit bars 10310 are provided at the outer ends of the double-headed shaft seat 1031 of the concentric structure, and a rocker bar 10311 cooperating with the limit bars 10310 is provided on the optical axis 9. The rocker bar 10311 swings limitedly between the limit bars 10310 along with the dial wheel 104.

[0033] Furthermore, a pair of ball-end control rods 221 are provided on the three-axis slide 22 , and the ball-end control rods 221 are symmetrically arranged on both sides of the microscope 6 .

[0034] The method of using the device is to manually place the probe card with the pin misalignment problem on the probe card holder 4, roughly adjust the position of the probe card PCB surface to make it horizontal, and then control the pneumatic clamp 5 through the solenoid valve switch 201 to press the probe card PCB onto the probe card holder 4;

[0035] Next, find the corresponding Mylar sheet according to the probe card to be repaired. The Mylar sheet has the original contact points and is placed tightly on the Mylar sheet carrier 8. The contact points must be ensured to be all within the optical path of the imaging range of the microscope 6.

[0036] After the Mylar sheet is installed, the dial 104 is rotated clockwise to flip the Mylar sheet carrier 8 down to a horizontal position. The Mylar sheet is then manually aligned with the aid of the calibration mechanism 10 and the two-axis translation slide 92. The x, y, and z axes and the deflection angles are adjusted until the probe card PCB and the Mylar sheet are absolutely level, the probe card pins correspond one-to-one with the contact points marked on the Mylar sheet in the vertical optical path of the microscope 6, and the vertical distance between the Mylar sheet and the probe card pins is as close as possible.

[0037] At this point, according to the standard contact points provided by the Mylar sheet, the malpositioned pins observed in the eyepiece of the microscope 6 are found and plastic repair is performed. During the repair, the Mylar sheet needs to be removed by turning the dial 104. After a certain degree of repair, the Mylar sheet needs to be added again by turning the dial 104. Repeat the comparison until the repair is completed.

[0038] During the alignment process of the Mylar sheet, the Mylar sheet material has a certain refractive effect on light. When the Mylar sheet is removed for repair, the synchronous cam 105 can just contact the detection switch 106. The electrical signal of the detection switch 106 can control the on-off of the solenoid valve to make the loading cylinder 72 push the compensation slide 73 loaded with the glass sheet into the optical path of the microscope 6. In this way, the refractive effect caused by the removal of the Mylar sheet is compensated, the original optical path is restored, and the image of the microscope 6 remains clear.

[0039] In summary, the present invention provides a probe card pin repair and shaping device, which stably loads Mylar sheets at the probe card pin positions, establishes a reference contact point position on the optical path of microscope 6, and can quickly find out the malpositioned pins and calibrate and repair them by continuously comparing and observing the contact point positions with the pins. The probe card can be quickly restored to normal use after shaping, and has the characteristics of easy operation and high success rate.

[0040] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A probe card pin repair and shaping device, characterized in that: The apparatus comprises a workbench, a mirror base, a Mylar calibration base, a probe card holder, a pneumatic fixture, a microscope, a refraction compensation mechanism, a Mylar sheet carrier, an optical axis, and a calibration mechanism. The mirror base and the Mylar calibration base are provided on the outside of the workbench. A pair of probe card holders are symmetrically arranged on both sides of the workbench surface. The probe card holders are integrated with a pneumatic fixture. A microscope arranged on the mirror base is vertically arranged downward between the probe card holders. A refraction compensation mechanism is externally mounted on the microscope lens. A Mylar sheet carrier is horizontally arranged directly below the refraction compensation mechanism. The Mylar sheet carrier is provided on the outer peripheral surface of one end of the horizontally arranged optical axis. The optical axis is movably mounted on the Mylar calibration base through the calibration mechanism. The refraction compensation mechanism consists of a hanging plate, a loading cylinder, and a compensation slide. The hanging plate is arranged at the microscope lens. The bottom surface of the hanging plate is provided with a compensation slide driven by the loading cylinder. The compensation slide is provided with a refraction compensation glass plate slot. The refraction compensation glass plate slot matches the optical path of the microscope. The calibration mechanism consists of a three-axis fine-tuning platform, an adapter plate, a bearing, a dial wheel, a synchronous cam, and a detection switch; A three-axis fine-tuning platform is provided on the Mylar calibration seat, and the three-axis fine-tuning platform is connected to an adapter plate. A bearing is provided on the adapter plate, and the bearing is sleeved with an optical axis. A dial wheel and a synchronization cam are coaxially provided at the other end of the optical axis. A detection switch matching the synchronization cam is provided on the adapter plate, and the detection switch is electrically connected to the refraction compensation mechanism through an electromagnetic valve.

2. The probe card pin repair and shaping device according to claim 1, wherein: The microscope base is composed of a bracket and a three-axis slide. The top of the bracket is equipped with a three-axis slide, and the microscope is installed on the three-axis slide.

3. The probe card pin repair and shaping device according to claim 1, characterized in that: The pneumatic fixture consists of a probe card pressing plate and a lifting cylinder. The lifting cylinder is vertically embedded in the probe card bracket. The probe card pressing plate is horizontally arranged just above the probe card bracket and connected to the lifting cylinder.

4. The probe card pin repair and shaping device according to claim 1, wherein: A deep groove ball bearing is provided under the workbench, and a two-axis translation slide is connected to the deep groove ball bearing. The two-axis translation slide is provided with an x-axial micrometer screw, a y-axial micrometer screw and an angle adjustment micrometer screw. The edge of the two-axis translation slide is equipped with a reverse external reset spring for each x-axial micrometer screw, y-axial micrometer screw and angle adjustment micrometer screw.

5. The probe card pin repair and shaping device according to claim 1, wherein: The bearing consists of a double-headed shaft seat with a concentric structure and four angular contact bearings. The double-headed shaft seat with a concentric structure is installed on an adapter plate, and the angular contact bearings are coaxially fixed in pairs at both ends of the double-headed shaft seat with a concentric structure.

6. The probe card pin repair and shaping device according to claim 1, wherein: A slot is formed on the workbench. A limiting bolt is provided in the slot. The probe card bracket is fixed in the slot by the limiting bolt.

7. The probe card pin repair and shaping device according to claim 5, characterized in that: A pair of limit bars are provided at the outer ends of the double-headed shaft seat of the concentric structure, and a rocker matched with the limit bars is provided on the optical axis. The rocker swings limitedly between the limit bars along with the thumbwheel.

8. The probe card pin repair and shaping device according to claim 2, wherein: The three-axis slide is provided with a pair of ball head control rods, and the ball head control rods are symmetrically arranged on both sides of the microscope.

Images