Interface devices, circuit board units, semiconductor test equipment

Abstract

The present invention relates to an interface device, a circuit board unit, and a semiconductor testing device for semiconductor testing. The interface device includes: a base, a rotator, and a connector. The rotator includes a fixed part and a rotating part. The fixed part is assembled on the base, and the rotating part is rotatably assembled on the fixed part. The rotating part can rotate at multiple angles relative to the fixed part within a predetermined rotation angle range. The connector is assembled on the rotating part, and the connector can rotate at multiple angles relative to the base within a predetermined rotation angle range through the rotating part. The connector is configured to connect an external device with an interface end. The above-mentioned interface device has a multi-angle rotation effect after the connector is rotatably assembled on the base by the rotator. If there is a positional deviation between the connector and the interface end, the connector can also correct the deviation with the interface end by rotating during the docking process under the rotation capacity provided by the rotator, thereby correcting the docking position.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an interface device, a circuit board unit, and semiconductor testing equipment. Background Art

[0002] A semiconductor tester usually has multiple groups of circuit board units and an external device with an interface end. For example, an interface test board is used as the external device. The external device is installed on the semiconductor tester and aligned with the multiple groups of relatively independent circuit board units in the semiconductor tester. When the electrical signals between the multiple groups of circuit board units and the external device are transmitted through connectors, the test of the device under test on the external device can be realized.

[0003] In the prior art, external devices and multiple sets of circuit board units are often aligned through mechanical hard connections, which places high demands on the manufacturing tolerance of structural parts, the guiding accuracy in semiconductor test machines, and assembly. As the number of circuit board units increases and the signal density of the connector itself increases, alignment deviations are likely to occur, and connections are unreliable, which cannot meet existing development needs. Summary of the invention

[0004] Based on this, it is necessary to provide an interface device, a circuit board unit, and a semiconductor testing device to address the problem of alignment deviation between an external device and a circuit board unit.

[0005] The present invention provides an interface device for semiconductor testing, the interface device comprising:

[0006] Pedestal;

[0007] A rotator, the rotator comprising a fixed part and a rotating part, the fixed part is elastically mounted on the base, the rotating part is rotatably mounted on the fixed part, and the rotating part can rotate relative to the fixed part at multiple angles within a predetermined rotation angle range;

[0008] A connector is assembled on the rotating part, the connector can be rotated at multiple angles relative to the base within a predetermined rotation angle range through the rotating part, and the connector is configured to be used for connecting an external device with an interface end.

[0009] In one embodiment, the connector is a spring pin connector or a spring sheet connector.

[0010] In one embodiment, a straight line trajectory along which the fixing portion elastically approaches or moves away from the base constitutes an elastic movement reference line, and the fixing portion can at least elastically move relative to the base along the elastic movement reference line.

[0011] In one embodiment, the interface device comprises:

[0012] At least one spring, one end of the spring is connected to the base, the other end of the spring is connected to the fixed part, the central axis of the spring is parallel to the elastic movement reference line, and the fixed part can move linearly along the elastic movement reference line or tilt away from the elastic movement reference line through the spring.

[0013] In one embodiment, the number of the spring is one, and the central axis of the spring coincides with the elastic movement reference line;

[0014] Alternatively, there are multiple springs, all of which are connected to the fixing portion, and multiple connection positions where the multiple springs are connected to the fixing portion can be connected to form a circle, and the vertical distances between the central axes of the multiple springs and the elastic movement reference line are all equal.

[0015] In one embodiment, the rotator is a bearing, which includes an outer ring that can constitute the fixed part, and an inner ring that can constitute the rotating part. Balls are arranged between the inner ring and the outer ring, and the inner ring rotates relative to the outer ring through the balls.

[0016] In one embodiment, the bearing is a ball bearing, and the connector can rotate relative to the base at multiple angles through the ball bearing.

[0017] In one of the embodiments, the thickness of the inner ring is greater than the thickness of the outer ring, and the portion of the inner ring protruding from the outer ring is configured to be used for assembling a connector.

[0018] In one embodiment, the rotator further comprises:

[0019] A limiting structure, wherein the limiting structure is configured to limit the rotation angle range of the inner ring relative to the outer ring.

[0020] In one embodiment, the limiting structure is a limiting protrusion provided on the inner ring, and the limiting protrusion is configured to form a limiting fit with at least one portion on the outer ring to limit the rotation angle range;

[0021] Alternatively, the limiting structure is an elastic limiting member connected between the connector and the outer ring, and the elastic limiting member is configured to limit the rotation angle range.

[0022] In one embodiment, the interface device further comprises:

[0023] A flexible conductive component, one end of which is electrically connected to the connector, the other end of which passes through the bearing from the inside of the inner ring or bypasses the bearing from the outside of the outer ring, and the other end of which is configured to be connected to a circuit board.

[0024] The present invention also provides an interface device for semiconductor testing, the interface device comprising:

[0025] Pedestal;

[0026] A rotator, the rotator comprising a fixed part and a rotating part, the fixed part is mounted on the base, the rotating part is rotatably mounted on the fixed part, and the rotating part can rotate relative to the fixed part at multiple angles within a predetermined rotation angle range;

[0027] The connector is a spring pin connector or a spring sheet connector, the connector is assembled on the rotating part, the connector can be rotated at multiple angles relative to the base within a predetermined rotation angle range through the rotating part, and the connector is configured to be used to connect an external device with an interface end.

[0028] The present invention also provides a circuit board unit, comprising:

[0029] The interface device, the base is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board through a circuit board fixing frame, the head end of the connector is configured to be connected to an external device having an interface end, and the tail end of the connector is configured to be electrically connected to the circuit board.

[0030] The present invention also provides a semiconductor testing device, comprising the circuit board unit.

[0031] In the above-mentioned interface device, after the connector is assembled on the base through the rotator, the connector can be rotated at multiple angles relative to the base. When the connector is docked with an external device having an interface end, if there is a positional deviation between the connector and the interface end, the connector can also correct the deviation with the interface end by rotating during the docking process under the rotation capacity provided by the rotator, thereby correcting the docking position and achieving accurate alignment with the interface end. It is more convenient and reliable, and can reduce the processing accuracy of structural parts and the assembly requirements of the test machine. It has the characteristic of self-centering, allowing the circuit board unit to be blindly inserted, thereby meeting the effective connection between the circuit board unit and the external device. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of the structure of an interface device provided by an embodiment of the present invention;

[0033] Figure 2A schematic diagram of an interface device provided by an embodiment of the present invention and an external device in an ideal non-connected state;

[0034] Figure 3 for Figure 2 A cross-sectional view of the interface device and the external device in an ideal un-docking state;

[0035] Figure 4 A schematic diagram of an interface device provided by another embodiment of the present invention and an external device in an ideal non-connected state;

[0036] Figure 5 for Figure 4 A cross-sectional view of the interface device and the external device in an ideal un-docking state;

[0037] Figure 6 for Figure 4 A cross-sectional view of the interface device and the external device in an ideal docking state;

[0038] Figure 7 A cross-sectional view of an interface device provided by an embodiment of the present invention and an external device in a non-ideal state without docking;

[0039] Figure 8 for Figure 7 A cross-sectional view of the interface device and the external device in a non-ideal docking state;

[0040] Fig. 9 A schematic diagram of the routing of a flexible conductive component provided by an embodiment of the present invention;

[0041] Fig.10 A schematic diagram of routing of a flexible conductive component provided by another embodiment of the present invention;

[0042] Fig.11 A schematic diagram of the assembly of a limiting structure provided by an embodiment of the present invention;

[0043] Fig.12 A cross-sectional view of an assembly of a limiting structure provided by an embodiment of the present invention;

[0044] Fig.13 A schematic diagram of an assembly structure of an interface device provided by another embodiment of the present invention;

[0045] Fig.14 A schematic diagram of another assembly structure of an interface device provided in another embodiment of the present invention.

[0046] Figure Number:

[0047] 001, interface device; 002, circuit board; 003, external device;

[0048] 100, base; 200, rotator; 300, connector; 400, spring; 500, limit structure; 600, flexible conductive component;

[0049] 210, fixed part; 220, rotating part;

[0050] 310, positioning member; 320, spring-supported contact;

[0051] 410. Elastic movement baseline. DETAILED DESCRIPTION

[0052] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0053] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0054] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0055] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0057] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0058] See also Figure 1 , Figure 2 As shown, an embodiment of the present invention provides an interface device 001 for semiconductor testing, wherein the interface device 001 comprises: a base 100, a rotator 200, and a connector 300, wherein the rotator 200 comprises a fixed portion 210 and a rotating portion 220, wherein the fixed portion 210 is elastically mounted on the base 100, wherein the rotating portion 220 is rotationally mounted on the fixed portion 210, and wherein the rotating portion 220 can rotate at multiple angles relative to the fixed portion 210 within a predetermined rotation angle range, wherein the connector 300 is mounted on the rotating portion 220, and wherein the connector 300 can rotate at multiple angles relative to the base 100 within a predetermined rotation angle range through the rotating portion 220, and wherein the connector 300 is configured to be used for connecting an external device 003 having an interface end.

[0059] The interface device 001 can be arranged between an external device and a circuit board unit of ATE (Automatic Test Equipment) for accurate alignment of the two. The external device has an interface end, for example, it may include an interface test board or other similar test board devices. In addition, the interface device 001 can also be used in scenarios where a circuit board unit is aligned with other devices, or in the alignment of two devices that require floating connections. The connector 300 can be mated or electrically connected to an external device 003 having an interface end, for example, the connector 300 has a male terminal and the interface end of the external device 003 has a female terminal, or the connector 300 has a female terminal and the interface end of the external device 003 has a male terminal. Compare Figures 2 to 10 As shown, the base 100 can be a circuit board fixing frame, in which case the base 100 can be used to directly install the circuit board 002, or the base 100 is configured to be connected to a circuit board fixing frame, and the circuit board 002 is installed using the circuit board fixing frame instead of directly installing the circuit board 002.

[0060] The external device 003 includes a device with an interface end, such as an external device, and the connector 300 can be used to dock with the interface end. The connector 300 may include a connector circuit board and a high-density connector. The high-density connector is electrically connected to the connector circuit board in a stacked manner. The high-density connector may have a large number of embedded reeds or spring pins to form a structure that docks with the interface end on the external device 003. The reeds or spring pins are elastic, so they can form a flexible pairing, and when the interface device 001 docks with the interface end, flexible displacement can be generated. The electrical signal is transmitted from the circuit board 002 to the connector 300, and finally transmitted to the external device 003 after the connector 300 is aligned with the interface end of the external device 003, completing the test of the external device 003. The connector 300 may also be other forms of electrical connectors, optical communication connectors, fluid connectors, etc., which are not limited here.

[0061] The structural shape of the high-density connector and the connector circuit board can be determined as needed, such as a square plate or a circular plate, etc. A positioning member 310 can be set on the connector 300, for example, a positioning pin is used as the positioning member 310, and the positioning member 310 is a component for positioning and cooperating with the external device 003. It can be connected to the high-density connector, or simultaneously connected to the high-density connector and the connector circuit board. A cone top can be set at the end of the positioning member 310 away from the connector 300, and the cone surface of the cone top can realize the initial self-alignment when the external device and the interface device 001 are aligned and connected.

[0062] The interface device 001 uses a rotator 200, which has a rotation function within a certain rotation angle range. According to the requirements, the rotation function of the rotator 200 is not limited to that it can realize fixed-axis rotation around the X-axis, around the Y-axis or around the Z-axis, or multi-angle rotation deviating from the X-axis, Y-axis or Z-axis direction. After the connector 300 is assembled on the base 100 by the rotator 200, the connector 300 at least has the effect of fixed-axis rotation relative to the base 100, or can also have the effect of multi-angle rotation. The more flexible the rotation function of the rotator 200 is, the more flexible the rotation effect of the connector 300 can be. Therefore, when there are various positional deviations between the connector 300 and the interface end, the connector 300 can form a corresponding self-correction effect to achieve accurate alignment.

[0063] In addition to utilizing the rotator 200 to obtain a rotation effect to produce a self-correcting effect, the connector 300 can also achieve multi-angle movement through the effect of elastic assembly. Figure 1 As shown, for example, the connector 300 is a spring sheet connector or a spring pin connector 300, the spring pin connector 300 includes a plurality of spring-supported contacts 320 and a carrier for supporting the spring-supported contacts 320, the plurality of spring-supported contacts 320 are used to align with the interface end on the external device 003, the plurality of spring-supported contacts 320 have an elastic and retractable movement effect, so when aligning with the interface end of the external device 003, they can be elastically offset according to the deviation between the two, correct the docking position, and achieve accurate alignment with the interface end.

[0064] In addition, when the connector 300 is another type of connector 300, continue to refer to Figure 1 and Fig.10 As shown, similar elastic deflection can also be achieved by elastically assembling the fixing portion 210 on the base 100 to achieve a self-correcting effect, and the elastic assembly can also allow the connector 300 to automatically return to the initial position in a free state. The straight line trajectory of the fixing portion 210 elastically approaching or moving away from the base 100 constitutes an elastic movement reference line 410, the direction of which can be expressed as the Z-axis direction, and the fixing portion 210 can at least elastically move relative to the base 100 along the elastic movement reference line 410.

[0065] The fixing portion 210 can be elastically assembled on the base 100 in a variety of ways, such as indirect elastic assembly using an elastic member, or elastic assembly using a plurality of components with elastic effects. When elastic assembly using an elastic member, the elastic member can be a spring 400, a steel wire rope, or other elastically deformable structures. For example, the interface device 001 further includes at least one spring 400, which has the characteristic of axial expansion and contraction, and can also be offset in other directions deviating from the axial direction. One end of the spring 400 is connected to the base 100, and the The other end of the spring 400 is connected to the fixing part 210, and the central axis of the spring 400 is parallel to the elastic motion reference line 410. The fixing part 210 can move linearly along the elastic motion reference line 410 through the spring 400, that is, move along the Z-axis direction, or deviate from the elastic motion reference line 410 to tilt, that is, it can perform multi-angle movement in the X-axis direction or the Y-axis direction. Therefore, through the multi-angle elastic change effect of the spring 400, the rotator 200 together with the connector 300 can elastically move at multiple angles relative to the base 100. The central axis of the spring 400 represents the central axis of the cylindrical surface formed by the curved surface where the helix of the spring 400 is located.

[0066] There is no limit to the number of springs 400, and it can be one or more. For example, the number of the springs 400 is one, and the central axis of the spring 400 coincides with the elastic movement reference line 410. At this time, the axial expansion and contraction of the spring 400 can allow the connector 300 to move closer to or farther from the base 100. Alternatively, the number of the springs 400 is multiple, and the multiple springs 400 are all connected to the fixing portion 210, and the multiple connection positions where the multiple springs 400 are connected to the fixing portion 210 can be connected to form a circle. The central axes of the multiple springs 400 are at the same vertical distance from the elastic movement reference line 410. At this time, the uniform distribution of the multiple springs 400 can provide different elastic forces at different positions of the rotator 200 and the connector 300, so that the connector 300 can achieve multi-angle movement according to the cooperation between the different expansion and contraction states of the multiple springs 400.

[0067] The fixed part 210 and the rotating part 220 of the rotating device 200 can be composed of any parts that can rotate relative to each other. Figure 1As shown, for example, the rotator 200 is a bearing, and the bearing includes an outer ring that can constitute the fixed part 210, and an inner ring that can constitute the rotating part 220, so the inner ring and the outer ring can directly constitute the rotating part 220 and the fixed part 210 that rotate relative to each other, and the bearing technology is mature and easy to purchase. A ball is arranged between the inner ring and the outer ring, and the inner ring rotates relative to the outer ring through the ball, thereby realizing the rotation of the rotating part 220 relative to the fixed part 210. In addition, the outer ring of the bearing can be used as the rotating part 220, and the inner ring of the bearing can be used as the fixed part 210. Those skilled in the art can set it according to needs, and it is not limited here.

[0068] The bearing of the rotator 200 can be any type of bearing, preferably a ball bearing, which can be a self-aligning roller bearing or a self-aligning ball bearing, or other types of bearings that can satisfy the angular motion of the axis. In addition, the ball bearing can also be a self-correcting bearing. Since the ball bearing can satisfy the angular motion of the axis, the connector 300 can rotate relative to the base 100 at multiple angles through the ball bearing, and is not limited to fixed-axis rotation.

[0069] The connector 300 is assembled with the bearing to be specifically connected to the inner ring and rotate synchronously with the rotation of the inner ring relative to the outer ring. The connector 300 and the inner ring can be directly connected or indirectly connected using components. In order to facilitate the connection between the connector 300 and the inner ring, the thickness of the inner ring is greater than the thickness of the outer ring, and the portion of the inner ring protruding from the outer ring is configured to be used for assembling the connector 300. Because the connector 300 is connected to the inner ring, but the outer ring is on the outside of the inner ring, the connector 300 will interfere with the outer ring to a certain extent when rotating with the inner ring. Therefore, the thickness difference between the inner ring and the outer ring also determines the rotation angle range of the connector 300. The larger the thickness difference, the smaller the rotation restriction of the connector 300.

[0070] Although the multi-angle movement of the connector 300 can flexibly match the docking situation, the self-correcting effect of the connector 300 also needs to be reasonably restricted. Therefore, the rotator 200 also includes a limiting structure 500, and the limiting structure 500 is configured to limit the rotation angle range of the inner ring relative to the outer ring, so that the connector 300 can move with the inner ring within a controllable range without deviating excessively from the working position.

[0071] Continue reading Figure 5 and Figure 8As shown, the limiting structure 500 is a limiting protrusion arranged on the inner ring, and the limiting protrusion is configured to form a limiting fit with at least one portion on the outer ring to limit the rotation angle range. When the limiting protrusion forms a limiting fit such as abutment with a predetermined position on the outer ring, the inner ring will stop rotating due to the limitation, that is, it cannot continue to rotate beyond the rotation angle range. Of course, the limiting structure 500 can also be a limiting protrusion arranged on the outer ring, and the limiting protrusion is configured to form a limiting fit with at least one portion on the inner ring.

[0072] Or continue reading Fig.11 and Fig.12 As shown, the limiting structure 500 is an elastic limiting member connected between the connector 300 and the outer ring, and the elastic limiting member is configured to limit the rotation angle range. The elastic limiting member can form an elastic pulling force between the connector 300 and the outer ring, so that the elastic limiting member is deformed under the force. Within the deformation range of the elastic limiting member, the connector 300 and the inner ring can rotate relative to the outer ring, but if the deformation range of the elastic limiting member is exceeded, the inner ring will stop rotating due to limitation, that is, it cannot continue to rotate beyond the rotation angle range.

[0073] Continue reading Fig. 9 and Fig.10 As shown, the interface device 001 further includes a flexible conductive component 600, one end of which is electrically connected to the connector 300, and the other end of the flexible conductive component 600 passes through the bearing from the inside of the inner ring or bypasses the bearing from the outside of the outer ring. The other end of the flexible conductive component 600 is configured to be connected to the circuit board 002. When the other end of the flexible conductive component 600 passes through the bearing from the inside of the inner ring, the flexible conductive component 600 can be connected to the central area of ​​the connector 300 to match its assembly structure passing through the inside of the bearing. When the other end of the flexible conductive component 600 bypasses the bearing from the outside of the outer ring, since the flexible conductive component 600 needs to pass through the outside of the bearing, the area of ​​the connector 300 can be set to be larger than the area covered by the outer ring part to match the assembly structure of the flexible conductive component 600 bypassing the outside of the bearing, so that the passage of the flexible conductive component 600 will not interfere with the structure of the bearing.

[0074] The flexible conductive component 600 can be a conductive structure of any form. In order to meet the requirements of stable electrical conduction, the conductive component can be a conductive cable, which is electrically connected to the connector 300 through the cable connector 300, or the conductive component can be a flexible printed circuit board, which is electrically connected to the connector 300.

[0075] See also Fig.13and Fig.14 As shown, an embodiment of the present invention further provides an interface device 001 for semiconductor testing, the interface device 001 comprises: a base 100, a rotator 200, and a connector 300, the rotator 200 comprises a fixed portion 210 and a rotating portion 220, the fixed portion 210 is mounted on the base 100, the connector 300 is a spring pin connector or a spring sheet connector, the rotating portion 220 is rotatably mounted on the fixed portion 210, and the rotating portion 220 can rotate at multiple angles relative to the fixed portion 210 within a predetermined rotation angle range, the connector 300 is mounted on the rotating portion 220, and the connector 300 can rotate at multiple angles relative to the base 100 within a predetermined rotation angle range through the rotating portion 220, and the connector 300 is configured to be connected to an external device 003 having an interface end. Since the relevant technical contents of the interface device have been described in detail in the previous text, they will not be repeated here, and any relevant technical contents can refer to the previous records.

[0076] The present invention also provides a circuit board unit, including a circuit board fixing frame, the interface device 001, the base 100 is configured to be used for directly installing a circuit board or indirectly installing a circuit board 002 through a circuit board fixing frame, the number of circuit boards 002 that can be installed on the circuit board fixing frame can be one or more, the head end of the connector 300 is configured to be connected to an external device 003 having an interface end, and the tail end of the connector 300 is configured to be electrically connected to the circuit board 002. When the circuit board unit is used to dock with the external device 003, multiple circuit boards 002 can be stacked and installed in the circuit board fixing frame, each of the circuit boards 002 is electrically connected to at least one of the interface devices 001, and multiple interface devices 001 are electrically connected to multiple interface ends of the external device 003 at the same time. At this time, a structure for synchronous mass testing can be realized, effectively improving the test efficiency.

[0077] The present invention further provides a semiconductor testing device, including the circuit board unit. Since the specific structure, functional principle and technical effect of the interface device 001 and the circuit board unit have been described in detail above, they will not be repeated here.

[0078] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. An interface device for semiconductor testing, characterized in that: The interface device comprises: Pedestal; A rotator, the rotator comprising a fixed part and a rotating part, the fixed part being elastically mounted on the base, the rotating part being rotatably mounted on the fixed part, and the rotating part being capable of rotating at multiple angles relative to the fixed part within a predetermined rotation angle range; the rotator is a bearing, the bearing comprising an outer ring constituting the fixed part, and an inner ring constituting the rotating part, a ball bearing being arranged between the inner ring and the outer ring, and the inner ring rotating relative to the outer ring through the ball bearing; A connector, wherein the connector is assembled on the rotating part, and the connector can be rotated at multiple angles relative to the base within a predetermined rotation angle range through the rotating part. The connector is configured to be used for connecting an external device having an interface end, and the connector includes a plurality of spring-supported contacts. When there is a positional deviation between the connector and the interface end, the deviation is corrected to achieve accurate alignment with the interface end.

2. The interface device according to claim 1, characterized in that: The connector is a spring pin connector or a spring sheet connector.

3. The interface device according to claim 1, characterized in that: The straight line track along which the fixing part elastically approaches or moves away from the base constitutes an elastic movement reference line, and the fixing part can at least elastically move relative to the base along the elastic movement reference line.

4. The interface device according to claim 3, characterized in that: The interface device comprises: At least one spring, one end of the spring is connected to the base, the other end of the spring is connected to the fixed part, the central axis of the spring is parallel to the elastic movement reference line, and the fixed part can move linearly along the elastic movement reference line or tilt away from the elastic movement reference line through the spring.

5. The interface device according to claim 4, characterized in that: The number of the spring is one, and the central axis of the spring coincides with the elastic movement reference line; Alternatively, there are multiple springs, all of which are connected to the fixing portion, and multiple connection positions where the multiple springs are connected to the fixing portion can be connected to form a circle, and the vertical distances between the central axes of the multiple springs and the elastic movement reference line are all equal.

6. The interface device according to claim 1, characterized in that: The bearing is a ball bearing, and the connector can rotate relative to the base at multiple angles through the ball bearing.

7. The interface device according to claim 1, characterized in that: The thickness of the inner ring is greater than that of the outer ring, and a portion of the inner ring protruding from the outer ring is configured to be used for assembling a connector.

8. The interface device according to claim 1, characterized in that: The rotator also includes: A limiting structure, wherein the limiting structure is configured to limit the rotation angle range of the inner ring relative to the outer ring.

9. The interface device according to claim 8, characterized in that: The limiting structure is a limiting protrusion arranged on the inner ring, and the limiting protrusion is configured to form a limiting match with at least one part on the outer ring to limit the rotation angle range; Alternatively, the limiting structure is an elastic limiting member connected between the connector and the outer ring, and the elastic limiting member is configured to limit the rotation angle range.

10. The interface device according to claim 1, characterized in that: The interface device also includes: A flexible conductive component, one end of which is electrically connected to the connector, the other end of which passes through the bearing from the inside of the inner ring or bypasses the bearing from the outside of the outer ring, and the other end of which is configured to be connected to a circuit board.

11. An interface device for semiconductor testing, characterized in that: The interface device comprises: Pedestal; A rotator, the rotator comprising a fixed part and a rotating part, the fixed part is mounted on the base, the rotating part is rotatably mounted on the fixed part, and the rotating part can rotate relative to the fixed part at multiple angles within a predetermined rotation angle range; the rotator is a bearing, the bearing comprising an outer ring constituting the fixed part, and an inner ring constituting the rotating part, a ball is arranged between the inner ring and the outer ring, and the inner ring rotates relative to the outer ring through the ball; A connector, wherein the connector is a spring pin connector or a spring sheet connector, the connector is assembled on the rotating part, the connector can be rotated at multiple angles relative to the base within a predetermined rotation angle range through the rotating part, the connector is configured to be used to connect an external device with an interface end, the connector includes a plurality of spring-supported contacts, when there is a positional deviation between the connector and the interface end, the deviation is corrected to achieve accurate alignment with the interface end.

12. A circuit board unit, characterized in that: include: According to the interface device as described in any one of claims 1-11, the base is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board through a circuit board fixing frame, the head end of the connector is configured to be connected to an external device having an interface end, and the tail end of the connector is configured to be electrically connected to the circuit board.

13. A semiconductor testing device, characterized in that: Comprising the circuit board unit as claimed in claim 12.

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