An inserter air curtain

Abstract

This invention provides an air curtain for a chip inserter, used to clean inserts transported by a conveyor belt. It includes: a first blowing mechanism with its air outlet direction facing the conveyor belt; and a second blowing mechanism opposite to the first blowing mechanism, the second blowing mechanism having multiple oscillating members that disperse air from the first blowing mechanism toward the inserts. According to this invention, the air curtain continuously changes its angle of attack by oscillating the members, thereby dispersing air from the first blowing mechanism toward the inserts to cover the entire surface, achieving rapid and thorough drying.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer fabrication equipment technology, specifically to an air curtain for a wafer insertion machine. Background Technology

[0002] Currently, ultra-large silicon wafer processing has become a future trend in photovoltaic development. After slicing, silicon wafers need to be cleaned, cooled, and inserted into baskets. However, with existing methods, a large amount of liquid remains between the silicon wafer and the basket wall due to capillary action. As the size of the silicon wafer increases, the thickness decreases, and the number of wafers cleaned in the basket increases, basket jamming easily occurs during insertion, leading to the phenomenon of wet wafers sticking together.

[0003] In existing technologies, to remove liquid from silicon wafers, a blowing fan or air curtain is typically installed on the conveyor belt before the wafers are transported to the basket to dry them. However, because the relative position of the blowing fan and the silicon wafer is fixed in this device, the blowing area of ​​the blowing fan cannot completely cover the entire surface of the silicon wafer during the blowing process, thus failing to achieve complete drying. Summary of the Invention

[0004] In view of this, the present invention provides an air curtain for a wafer insertion machine to solve the problem of incomplete drying of silicon wafers.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] An inserter air curtain according to an embodiment of the present invention is configured relative to a conveyor belt to clean inserts transported by the conveyor belt. The inserter air curtain includes:

[0007] The first purging mechanism has its air outlet direction facing the conveyor belt;

[0008] A second purging mechanism is disposed opposite to the first purging mechanism. The second purging mechanism has multiple swinging members that can swing, and the swinging members disperse the air from the first purging mechanism toward the insert.

[0009] Furthermore, the inserter's air curtain also includes:

[0010] The frame body includes a base and a crossbeam mounted on the base, wherein the base is arranged along the direction of the conveyor belt, and the first purging mechanism is arranged on the crossbeam.

[0011] Furthermore, the second purging mechanism also includes:

[0012] A drive unit is disposed at one end of the base;

[0013] A connecting rod, one end of which is connected to the drive unit and the other end of which is connected to the swing member, the connecting rod being driven by the drive unit to reciprocate in the horizontal direction and drive the swing member to swing.

[0014] Furthermore, the driving unit includes:

[0015] Electric motor;

[0016] A rotating disk, which is mounted on the drive end of the motor so as to drive the rotating disk to rotate by the motor;

[0017] A rocker arm is oscillating, with one end connected to the rotating disk and the other end connected to the connecting rod.

[0018] Furthermore, the inserter's air curtain also includes:

[0019] A sealing end cap is provided, the sealing end cap has a cavity, the driving part is disposed in the cavity, and the sealing end cap has a through hole on the side near the connecting rod, the connecting rod passes through the through hole and connects to the other end of the swing arm.

[0020] Furthermore, the connecting rod includes two rods, which are arranged parallel to each other and located on both sides of the conveyor belt. The swing member is formed in an inverted U-shape, and the swing arms on both sides of the swing member are respectively connected to the connecting rods on both sides.

[0021] Furthermore,

[0022] The connecting rod is provided with a plurality of first mounting holes spaced apart along its length, and the two sides of the swing arm of the swing member are respectively provided with first connecting shafts, which are inserted into the first mounting holes.

[0023] Furthermore, the base includes two parallel frame legs, which are respectively disposed on both sides of the conveyor belt. The frame legs are provided with second mounting holes spaced apart along the length direction. The open end of the swing member is provided with a second connecting shaft, which is pivotally inserted into the second mounting hole.

[0024] Furthermore, the swing element is provided with multiple perforated holes spaced apart.

[0025] Furthermore, it also includes a third purging mechanism, which, together with the first purging mechanism, is respectively disposed on the upper and lower sides of the conveyor belt.

[0026] The above-described technical solution of the present invention has at least one of the following beneficial effects:

[0027] According to the embodiment of the present invention, the air curtain of the inserter accelerates the air circulation around the insert by the swinging of the swinging member, thereby accelerating the evaporation of liquid on the insert and improving the drying rate. On the other hand, the swinging of the swinging member can continuously change different wind angles, thereby dispersing the air from the first blowing mechanism toward the insert, so as to cover the entire surface of the insert and achieve the purpose of rapid and thorough drying. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of the air curtain of the inserter according to an embodiment of the present invention;

[0029] Figure 2 This is a partial structural diagram of the inserter air curtain including a second purging mechanism according to an embodiment of the present invention;

[0030] Figure 3 for Figure 2 A magnified view of A in the middle.

[0031] Figure label:

[0032] 100. Conveyor belt; 200. Insertion piece; 300. First purging mechanism; 400. Second purging mechanism; 410. Swinging component; 411. First connecting shaft; 412. Second connecting shaft; 413. Hollow hole; 420. Drive unit; 421. Motor; 422. Rotary disk; 423. Swinging arm; 430. Connecting rod; 500. Frame body; 510. Base; 511. Frame foot; 520. Crossbeam; 600. Sealed end cap. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0034] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "connected" or "linked" and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship also changes accordingly.

[0035] The air curtain of the inserter according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0036] According to an embodiment of the present invention, an air curtain for a wafer inserter is configured relative to the conveyor belt 100 to clean the wafers 200 to be inserted transported by the conveyor belt 100, such as... Figures 1 to 3 As shown, the inserter air curtain includes a first blowing mechanism 300 and a second blowing mechanism 400.

[0037] Specifically, the conveyor belt 100 is used to transport the wafer to be inserted 200, which is, for example, a silicon wafer that has been cleaned and is about to be placed into a basket. The silicon wafer is conveyed into the basket by the conveyor belt 100.

[0038] The air outlet direction of the first purging mechanism 300 is towards the conveyor belt 100, so as to dry the insert 200. That is to say, when the insert 200 is transported on the conveyor belt 100, the first purging mechanism 300 can dry the surface liquid of the insert 200 by blowing air on the insert 200.

[0039] The second purging mechanism 400 is disposed opposite to the first purging mechanism 300. The second purging mechanism 400 has multiple swingable members 410, which disperse the air from the first purging mechanism 300 towards the insert 200. In other words, the inserting machine air curtain of the present invention is respectively provided with the first purging mechanism 300 and the second purging mechanism 400 relative to the conveyor belt 100. When the first purging mechanism 300 is activated to supply air, after the second purging mechanism 400 is activated, the air from the first purging mechanism 300 is dispersed and blown towards the insert 200 being transported on the conveyor belt 100 by the swing of the swing members 410 of the second purging mechanism 400. This allows the surface of the insert 200 to obtain different angles of attack, and thus the purging area of ​​the inserting machine air curtain can completely cover the surface of the insert 200, ultimately achieving the effect of quickly and thoroughly drying the insert 200. Furthermore, the oscillation of the oscillating component 410 accelerates the airflow around the insert 200, thereby accelerating the evaporation of liquid on the insert 200 and improving the drying rate.

[0040] Furthermore, the inserter air curtain of this embodiment may also include a frame body 500. The frame body 500 includes a base 510 and a crossbeam 520 mounted on the base 510. The base 510 is arranged along the direction of the conveyor belt 100, and the first purging mechanism 300 is mounted on the crossbeam 520. That is, the base 510 is arranged along the direction of the conveyor belt 100 to support the crossbeam 520 and the first purging mechanism 300 mounted on the crossbeam 520. This ensures that the first purging mechanism 300 is more stable during operation.

[0041] As one way to realize the swing of the swing member 410 on the second purging mechanism 400, the second purging mechanism 400 may, in addition to the swing member 410, also include a drive unit 420 and a connecting rod 430. The drive unit 420 is disposed at one end of the base 510 (corresponding to...). Figure 1 The end furthest from the observer shown), one end of link 430 (corresponding to...) Figure 2 The right end shown is connected to the drive unit 420, and the other end (corresponding to) Figure 2 The left end (shown) is connected to the swing member 410, and the connecting rod 430 is driven by the drive unit 420 to reciprocate in the horizontal direction and drive the swing member 410 to swing. That is, the drive unit 420 drives the connecting rod 430 to reciprocate, thereby driving multiple swing members 410 to swing together. This structure enables multiple swing members 410 to maintain synchronous movement, has a simple structure, and is conducive to distributing the air more evenly to the surface of the insert 200.

[0042] Furthermore, the drive unit 420 may include, for example, a motor 421 and a rotating disk 422, with the rotating disk 422 mounted on the drive end of the motor 421 so that the motor 421 drives the rotating disk 422 to rotate. One end of the swing arm 423 (corresponding to...) Figure 2 The right end shown is connected to the rotating disk 422, and the other end (corresponding to) Figure 2 The left end (shown) is connected to the connecting rod 430. That is, after the motor 421 on the drive unit 420 starts, the drive end of the motor 421 drives the rotating disk 422 mounted on it to rotate. The rotating disk 422 is connected to the swing arm 423. While the swing arm 423 swings, it drives the connecting rod 430 connected to it to reciprocate in the horizontal direction. The swing member 410 is connected to the body of the connecting rod 430, thereby driving the swing member 410 to swing. This structure is simple and easy to control; the reciprocating motion of the connecting rod 430 can be easily achieved by swinging the swing arm 423.

[0043] Based on the above structure, as a preferred embodiment, the inserter air curtain of this invention may further include a sealing end cap 600. The sealing end cap 600 has a cavity, and the drive unit 420 is disposed within the cavity. The sealing end cap 600 has a through hole on the side near the connecting rod 430, through which the connecting rod 430 passes to connect to the other end of the swing arm 423 (corresponding to...). Figure 2 (As shown on the left end). The sealing end cap 600 prevents the drive unit 420 from being exposed to the external environment, protects the drive unit 420, extends the service life of the drive unit 420, and limits the vibration of the connecting rod 430 in the height direction through the through hole, making the reciprocating motion of the connecting rod 430 smoother.

[0044] Based on the above structure, as another preferred embodiment, the connecting rods 430 of the inserter air curtain may include, for example, two rods 430, which are arranged parallel to each other and located on both sides of the conveyor belt 100 (corresponding to...). Figure 1 As shown at the left and right ends, the swing member 410 is formed in an inverted U-shape, and the two arms of the swing member 410 are respectively connected to the connecting rods 430 on both sides. That is to say, as Figure 1 As shown, the two arms on the inverted U-shaped structure of the swing member 410 are respectively connected to two connecting rods 430 on both sides. The two connecting rods 430 synchronously drive the swing member 410 to swing, so that the air from the first purging mechanism 300 is dispersed and blown towards the insert piece 200. This structure is simple and can better ensure the stable operation of the swing member 410.

[0045] As a concrete example, such as Figure 3As shown, the connecting rod 430 has multiple first mounting holes spaced apart along its length. The two sides of the swing arm of the swing member 410 are each provided with a first connecting shaft 411, which passes through the first mounting holes. Alternatively, the arrangement can be reversed, meaning that first mounting holes are provided on the two sides of the swing arm of the swing member 410, and first mounting shafts are provided on the connecting rod 430. This structure is simple, easy to install / disassemble, and has low maintenance costs.

[0046] Furthermore, the base 510 may also include two parallel frame legs 511, which are respectively positioned on both sides of the conveyor belt 100. Second mounting holes are spaced apart along the length of each frame leg 511. A second connecting shaft 412 is provided at the open end of each swing member 410, and the second connecting shaft 412 is pivotally inserted into the second mounting hole. That is, the two swing arms of the swing member 410 are connected to the connecting rod 430 via the first connecting shaft 411, allowing the swing member 410 to swing under the drive of the connecting rod 430. The open end of the swing member 410 is pivotally connected to the frame legs 511 of the base 510 via the second connecting shaft 412, thus supporting and mounting the swing member 410. In addition, connecting the other end of the connecting rod 430 to the frame legs 511 via the swing member 410 makes the reciprocating motion of the connecting rod 430 more stable.

[0047] Furthermore, the oscillating member 410 (for example, at the connection between the two side arms of the oscillating member 410) is provided with a plurality of perforated holes 413 spaced apart. By providing these perforated holes 413, during the oscillation of the oscillating member 410, part of the air from the first blowing mechanism 300 passes through the perforated holes 413 and blows directly onto the insert 200, while the other part is dispersed. This not only reduces the oscillation damping of the oscillating member 410, but also obtains more different angles of attack, which can further accelerate the air circulation around the insert 200 and improve the drying efficiency.

[0048] In addition, there can be multiple first blowing mechanisms 300, arranged along the transport direction of the conveyor belt 100. That is, multiple first blowing mechanisms 300 are arranged at intervals along the transport direction of the conveyor belt 100, so that the insert can be continuously dried by the air from the first blowing mechanism 300 during the entire transport process, thereby improving the drying efficiency.

[0049] Furthermore, as a preferred embodiment, the air curtain of the inserter may also include a third blowing mechanism (not shown). That is, the third blowing mechanism and the first blowing mechanism 300 are respectively positioned on the upper and lower sides of the conveyor belt 100, with the air outlet of the third blowing mechanism facing upwards toward the conveyor belt 100, thereby simultaneously drying both sides of the insert 200. This not only improves drying efficiency, but also, by rationally setting the air outlet direction of the third blowing mechanism, effectively sweeps away water droplets blown off the insert 200, preventing localized water accumulation on the insert 200.

[0050] Similarly, there can be multiple third purging mechanisms.

[0051] Furthermore, the first purging mechanism 300 and the third purging mechanism can be, for example, purging fans. Moreover, the air outlets of the first purging mechanism 300 and the third purging mechanism can be provided with air outlets having multiple air outlets. Furthermore, these air outlets can be rotatably disposed at the air outlets to more comprehensively cover the surface of the insert 200.

[0052] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. An air curtain for a laminating machine, configured relative to a conveyor belt to clean laminating parts transported by the conveyor belt, characterized in that, include: The first purging mechanism has its air outlet direction facing the conveyor belt; A second purging mechanism is disposed opposite to the first purging mechanism. The second purging mechanism has multiple swinging members that can swing, and the swinging members disperse the air from the first purging mechanism toward the insert to be inserted. The frame body includes a base and a crossbeam mounted on the base. The base is arranged along the direction of the conveyor belt, and the first purging mechanism is arranged on the crossbeam. The second purging mechanism also includes: A drive unit is disposed at one end of the base; A connecting rod, one end of which is connected to the drive unit and the other end of which is connected to the swing member, the connecting rod being driven by the drive unit to reciprocate in the horizontal direction and drive the swing member to swing; The drive unit includes: a motor; a rotating disk, which is mounted on the drive end of the motor to drive the rotating disk to rotate; and a swinging rocker arm, one end of which is connected to the rotating disk and the other end of which is connected to the connecting rod. The rotating disk drives the swinging rocker arm to swing, and the swinging rocker arm drives the connecting rod to reciprocate in the horizontal direction.

2. The inserter air curtain according to claim 1, characterized in that, Also includes: A sealing end cap is provided, the sealing end cap has a cavity, the driving part is disposed in the cavity, and the sealing end cap has a through hole on the side near the connecting rod, the connecting rod passes through the through hole and connects to the other end of the swing arm.

3. The inserter air curtain according to claim 1, characterized in that, The connecting rod includes two rods, which are arranged parallel to each other and located on both sides of the conveyor belt. The swing member is formed in an inverted U-shape, and the swing arms on both sides of the swing member are respectively connected to the connecting rods on both sides.

4. The inserter air curtain according to claim 3, characterized in that: The connecting rod is provided with a plurality of first mounting holes spaced apart along its length, and the two sides of the swing arm of the swing member are respectively provided with first connecting shafts, which are inserted into the first mounting holes.

5. The inserter air curtain according to claim 4, characterized in that, The base includes two parallel frame legs, which are respectively set on both sides of the conveyor belt. The frame legs are provided with second mounting holes spaced apart along the length direction. The open end of the swing member is provided with a second connecting shaft, which is pivotally inserted into the second mounting hole.

6. The inserter air curtain according to claim 3, characterized in that, The swing component has multiple perforated holes spaced apart.

7. The inserter air curtain according to claim 1, characterized in that, It also includes a third purging mechanism, which, together with the first purging mechanism, is respectively used to be installed on the upper and lower sides of the conveyor belt.

Images