Cutting device

Abstract

This invention provides a cutting device capable of automatically changing plates. A cutting device for cutting a workpiece using a cutting tool includes: a chuck table for holding a plate with grooves formed by the cutting tool; a cutting unit having a spindle and a mounting flange fixed to the front end of the spindle for mounting the cutting tool; and a changing device for changing the cutting tool mounted on the mounting flange and stored in a tool storage section, and for changing the plate placed on the chuck table and stored in the plate storage section. The changing device has a holding section for attracting and holding the cutting tool and the plate, the holding section having: a tool attraction pad that contacts the cutting tool or a base for fixing the cutting tool to attract and hold the cutting tool; and a plate support section that protrudes outward from the front end of the tool attraction pad to support the plate.

Description

Technical Field

[0001] This invention relates to a cutting device that uses a cutting tool to cut a workpiece. Background Technology

[0002] By dicing a wafer containing multiple integrated circuits (ICs) and large-scale integrated circuits (LSIs), multiple device chips, each containing a device, are manufactured. Furthermore, after mounting the multiple device chips onto a predetermined substrate, a packaging substrate is obtained by covering the mounted device chips with a sealing material made of resin (molding resin). By dicing this packaging substrate, packaged devices containing multiple packaged device chips are manufactured. These device chips or packaged devices are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] A cutting device is used when slicing the aforementioned wafers, packaging substrates, and other workpieces. The cutting device includes a chuck stage for holding the workpiece and a cutting unit for performing cutting operations on the workpiece. The cutting unit has a spindle and a mounting flange fixed to the front end of the spindle, on which an annular cutting tool for cutting the workpiece is mounted.

[0004] The cutting tool is fixed to the mounting flange by a nut. Furthermore, when the spindle is rotated with the cutting tool mounted on the mounting flange, the cutting tool rotates as well. The rotating cutting tool cuts into the workpiece held by the chuck table, thus cutting and separating the workpiece.

[0005] Cutting tools wear down due to the machining of the workpiece and therefore need to be replaced periodically. When replacing a cutting tool, first, loosen and remove the nut securing the tool, and remove the used tool from the mounting flange. Then, install the replacement cutting tool (the unused tool) onto the mounting flange and secure it with the nut.

[0006] When changing cutting tools manually, it is not only time-consuming, but the cutting tool and nut may also fall out accidentally during the operation. Therefore, attempts have been made to automate the changing of cutting tools. Patent Document 1 discloses a cutting device equipped with a tool changing device that automatically changes the cutting tools mounted on the cutting unit (spindle unit).

[0007] The aforementioned tool changing device includes: a cutting tool loading and unloading mechanism for loading and unloading cutting tools; and a nut loading and unloading mechanism for loading and unloading nuts used to fix the cutting tools to the cutting unit. Furthermore, the cutting tool loading and unloading mechanism includes: a first holding part (first cutting tool holding member) for holding used cutting tools; and a second holding part (second cutting tool holding member) for holding replacement cutting tools.

[0008] Patent Document 1: Japanese Patent Application Publication No. 2007-98536

[0009] In cutting equipment, in addition to the cutting tool, a plate is used for the maintenance and inspection of the cutting tool. For example, when machining a workpiece with the cutting tool, the tip of the cutting tool is intentionally worn to correct its shape and ensure its sharpness. This dressing is performed by having the cutting tool cut into the dressing plate. Furthermore, sometimes a groove is formed on the inspection plate by having the cutting tool cut into it, and the shape and size of the groove are measured to confirm the shape of the tip of the cutting tool and the position of its lower end (depth of cut).

[0010] The aforementioned dressing plates or inspection plates are consumables that are cut by cutting tools and need to be replaced periodically. However, although the cutting tool replacement is automated as described above, the plate replacement is done manually. Therefore, plate replacement is time-consuming.

[0011] Furthermore, assuming automatic plate changing, in addition to the tool changing device, a separate plate changing device needs to be constructed and mounted on the cutting device. Therefore, ample space is required within the cutting device to accommodate both the tool changing device and the plate changing device. As a result, the size of the cutting device increases, and the layout of its components becomes more limited. Summary of the Invention

[0012] The present invention was made in view of this problem, and its object is to provide a cutting device capable of automatically changing plates.

[0013] According to one aspect of the present invention, a cutting apparatus is provided for cutting a workpiece using a cutting tool, wherein the cutting apparatus comprises: a chuck table for holding a plate having a groove formed by the cutting tool; a cutting unit having a spindle and a mounting flange fixed to the front end of the spindle and for mounting the cutting tool; and a replacement device for replacing the cutting tool mounted on the mounting flange and the cutting tool stored in a tool storage portion, and replacing the plate placed on the chuck table and the plate stored in the plate storage portion, the replacement device having a holding portion for attracting and holding the cutting tool and the plate, the holding portion comprising: a tool attraction pad that contacts the cutting tool or a base for fixing the cutting tool to attract and hold the cutting tool; and a plate support portion that protrudes outward from the front end of the tool attraction pad to support the plate, the plate being attracted and held by the holding portion being supported by the plate support portion in a state of not contacting the tool attraction pad.

[0014] Furthermore, preferably, the retaining part has a suction path connected to a suction source or a gas supply path connected to a gas supply source, the suction path or the gas supply path communicating with the side of the retaining part opposite to the cutting tool or the plate. Also preferably, the changing device has two retaining parts: one retaining part retains the cutting tool mounted on the mounting flange or the plate placed on the chuck table, and the other retaining part retains the cutting tool stored in the tool storage part or the plate stored in the plate storage part.

[0015] Furthermore, preferably, the cutting tool has an annular holding portion and a cutting edge formed on the outer periphery of the holding portion, and the retaining portion applies negative pressure to the holding portion to attract and retain it. Also preferably, the base has a first surface, a second surface supporting the cutting tool, and a through hole extending from the first surface to the second surface. The retaining portion applies negative pressure to the first surface to attract and retain the base, and applies negative pressure to the second surface through the through hole to attract and retain the cutting tool.

[0016] One aspect of the cutting apparatus of the present invention includes a changing device capable of changing both the cutting tool and the plate. This allows for automatic changing of both the cutting tool and the plate, simplifying the plate changing operation. Furthermore, the changing device includes a holding section capable of holding both the cutting tool and the plate. This eliminates the need for separate mechanisms for holding the cutting tool and the plate, thus reducing the need for increasing the size of the cutting apparatus. Attached Figure Description

[0017] Figure 1 This is a perspective view showing the cutting device.

[0018] Figure 2This is an exploded perspective view showing a cutting unit equipped with a hub-type cutting tool.

[0019] Figure 3 This is an exploded perspective view showing a cutting unit with a washer-type cutting tool mounted on it.

[0020] Figure 4 This is a perspective view showing the replacement unit.

[0021] Figure 5 This is a perspective view showing the replacement unit with the replacement device configured at the replacement position.

[0022] Figure 6 This is a perspective view showing the replacement device.

[0023] Figure 7 (A) is a side view showing the replacement device. Figure 7 (B) is a front view showing the replacement device.

[0024] Figure 8 (A) is a front view showing the retaining part. Figure 8 (B) is a cross-sectional view showing the retaining part.

[0025] Figure 9 (A) is a cross-sectional view showing the retaining part that holds a hub-type cutting tool. Figure 9 (B) is a cross-sectional view showing the retaining part that holds a washer-type cutting tool.

[0026] Figure 10 (A) is a perspective view showing the storage unit. Figure 10 (B) is a perspective view showing the tool storage area.

[0027] Figure 11 (A) is a schematic diagram showing the changing device in the step of changing the cutting tool holding. Figure 11 (B) is a schematic diagram showing the replacement device during the nut removal process. Figure 11 (C) is a schematic diagram showing the replacement device in the first retreat step. Figure 11 (D) is a schematic diagram showing the replacement device in the tool holding step after use.

[0028] Figure 12 (A) is a schematic diagram showing the replacement device in the second retreat step. Figure 12 (B) is a schematic diagram showing the replacement device in the cutting tool installation process. Figure 12 (C) is a schematic diagram showing the replacement device in the third retreat step. Figure 12 (D) is a schematic diagram showing the replacement device in the nut installation step.

[0029] Figure 13 (A) is a perspective view showing the holding part for holding a large plate. Figure 13 (B) is a cross-sectional view showing the holding part that holds the large plate.

[0030] Figure 14 (A) is a perspective view showing the holding part for holding a small plate. Figure 14 (B) is a cross-sectional view showing the holding part that holds the small plate.

[0031] Figure 15 (A) is a schematic diagram showing the replacement device in the replacement plate holding step. Figure 15 (B) is a schematic diagram showing the replacement device in the plate retention step after use. Figure 15 (C) is a schematic diagram showing the replacement device during the retreat step. Figure 15 (D) is a schematic diagram showing the replacement device in the loading step.

[0032] Figure 16 This is a perspective view showing a cutting device equipped with a storage unit.

[0033] Figure 17 This is a perspective view showing a storage unit with a rotating mounting section.

[0034] Label Explanation

[0035] 11: Workpiece; 13: Belt (Scribble Belt); 15: Frame; 17: Frame Unit (Workpiece Unit); 19, 19A, 19B: Plate (Dressing Plate); 21: Plate (Inspection Plate); 2: Cutting Device; 4: Base; 4a, 4b: Opening; 6: Lift; 6a: Lifting Platform; 8: Container; 10: Box; 10a: Guide Rail; 12: Cleaning Unit; 14: Rotary Table; 16: Guide Rail; 18: Table Cover; 20: Dustproof and Dripproof Cover; 22: Chuck Table (Holding Table); 24: Fixture; 26: Chuck Table (Sub-Table); 28: Machining Chamber (Cover); 28a: Entrance / Exit (Opening); 30: Cutting Unit; 32: Housing; 34: Spindle; 34a: Threaded Hole; 3 6: Cutting tool; 36a: Opening; 38: Holding part (base); 38a: Front (first side); 38b: Back (second side); 40: Cutting edge; 42: Mounting flange; 42a: Through hole; 44: Flange part; 44a: Front; 44b: Protrusion; 44c: Support surface; 46: Boss part (support shaft); 46a: Threaded part; 48: Nut; 48a: Opening; 48b: Through hole; 50: Screw; 52: Cutting tool; 52a: Opening; 54: Mounting flange; 56: Fixed mounting base; 56a: Through hole; 56b: Receiving part; 58: Flange part; 58a: Front; 58b: Protrusion; 58c: Support surface; 60: Boss part (support shaft); 60a: First boss part (first... 1. Support shaft; 60b: Second boss (second support shaft); 60c: Third boss (third support shaft); 60d: Threaded part; 62: Base (pressing flange); 62a: Front (first side); 62b: Back (second side); 62c: Opening; 62d: Through hole; 64: Nut; 64a: Opening; 64b: Through hole; 66: Washer; 68: Screw; 70: Imaging unit; 72: First conveying unit; 72a: Holding unit; 72b: Holding mechanism; 74: Second conveying unit; 74a: Holding unit; 76: Replacement unit; 78: Cover; 80: Hinge; 82: Control unit (control section); 82a: Processing section; 82b: Storage section; 84: Moving unit (moving mechanism) ; 86: Lifting mechanism; 88: Base plate; 90: Multi-joint arm; 92A: First support member; 92B: Second support member; 94A: First rotating mechanism; 94B: Second rotating mechanism; 94C: Third rotating mechanism; 96A: First arm; 96B: Second arm; 100: Replacement device (replacement mechanism); 102: Loading and unloading unit; 104: Rotating mechanism; 106: Rotating part (shaft); 106a: Rotation axis; 110: Frame; 112a, 112b: Supporting components; 114a, 114b: Connecting components; 120: Nut rotating part (nut loading and unloading unit); 122: Nut holding part; 124: Rotating part (shaft); 124a: Rotation axis; 126: Housing; 128: Rotation drive source;130: Rotating component; 130a: Front side; 132: Retaining pin; 134: Holding component; 134a: Claw portion; 136: Cover; 136a: Opening; 136b: First pin receiving portion; 136c: Second pin receiving portion; 138: Pin; 140: Ring-shaped component; 142a, 142b: Elastomer (elastic component); 150A: Retaining portion (first retaining portion); 150B: Retaining portion (second retaining portion); 1 50a: front; 152: frame; 152a: front (1st side); 152b: back (2nd side); 152c: 1st groove (1st recess); 152d: 2nd groove (2nd recess); 152e : 3rd groove (3rd recess); 152f: suction path; 152g: 4th groove (4th recess); 152h: plate support portion (plate support surface); 152i: convex portion (protrusion); 152j: plate support portion (plate support 152k: Gas supply path; 154: Tool suction pad; 154a: Base; 154b: Lip (front end); 154c: Through hole; 156: Flow path; 158: Valve; 160: Suction source; 162: Pressure measuring device (pressure sensor); 164: Flow path; 166: Valve; 168: Gas supply source; 200: Storage unit; 202: Mounting part (mounting stage); 202a: Mounting surface; 20 4. 204A, 204B: Tool storage section; 206: Base storage section (pressing flange storage section); 208: Plate storage section (trimming plate storage section); 210: Plate storage section (inspection plate storage section); 212: Identification mark; 250: Storage unit; 252: Mounting section; 252a: Mounting surface; 254: Tool storage section; 256: Pressing flange storage section; 258: Rotating part (shaft); 260: Reading unit. Detailed Implementation

[0036] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, an example of the structure of the cutting device of this embodiment will be described. Figure 1 This is a perspective view showing the cutting device 2. Additionally, in Figure 1 In this diagram, the X-axis (machining feed direction, first horizontal direction, forward / backward direction) and Y-axis (indexing feed direction, second horizontal direction, left / right direction) are perpendicular to each other. Additionally, the Z-axis (vertical direction, up / down direction, height direction) is perpendicular to both the X-axis and Y-axis.

[0037] The cutting device 2 has a base 4, which supports or houses the structural elements constituting the cutting device 2. A lift 6 with a lifting platform 6a is provided at the front corner of the base 4. The lift 6 has a lifting mechanism (not shown) that allows the lifting platform 6a to move up and down along the Z-axis.

[0038] A container 8 and a box 10 are placed on the lifting platform 6a of the elevator 6. The container 8 contains various tools (parts, consumables, etc.) used in the cutting device 2, and the box 10 contains multiple workpieces 11 that are the objects of cutting by the cutting device 2. Figure 1 An example is shown where a container 8 is placed on a lifting platform 6a and a box 10 is placed on the container 8. Further details regarding the utensils stored in the container 8 will be described later.

[0039] The box 10 has a pair of opposing sides. In addition, a plurality of guide rails 10a are fixed on each side of the box 10, arranged at predetermined intervals along the height direction of the box 10. The frame unit (workpiece unit) 17 containing the workpiece 11 is supported by the pair of guide rails 10a fixed to the two sides of the box 10 and arranged at the same height.

[0040] The workpiece 11 is, for example, a disk-shaped wafer made of semiconductor materials such as silicon. The workpiece 11 is divided into multiple regions by multiple predetermined dicing lines (spacers) arranged in a grid pattern, and devices such as ICs and LSIs are formed on the front (top) side of each region. By cutting along the predetermined dicing lines, the workpiece 11 is divided to manufacture multiple device chips, each having a device.

[0041] However, there are no restrictions on the material, shape, structure, or size of the workpiece 11. For example, the workpiece 11 can also be a wafer made of semiconductors other than silicon (GaAs, InP, GaN, SiC, etc.), glass, ceramics, resin, metal, etc. Furthermore, there are no restrictions on the type, number, shape, structure, size, or arrangement of devices formed on the workpiece 11, and it is also possible to have no devices formed on the workpiece 11. In addition, the workpiece 11 can also be a CSP (Chip Size Package) substrate, a QFN (Quad Flat Non-leaded package) substrate, or other packaging substrates.

[0042] A circular strip (dicing strip) 13 with a diameter larger than that of the workpiece 11 is adhered to the back (lower surface) side of the workpiece 11. The strip 13 can be a sheet material having a circular film-like substrate and an adhesive layer (paste layer) disposed on the substrate. For example, the substrate may be composed of resins such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer may be composed of epoxy, acrylic, or rubber-based adhesives. Alternatively, the adhesive layer may be a UV-curable resin that cures upon exposure to ultraviolet light.

[0043] The outer periphery of the band 13 is attached to an annular frame 15 made of metal or the like and having a circular opening in the center. Furthermore, the diameter of the opening of the frame 15 is larger than the diameter of the workpiece 11, and the workpiece 11 is disposed inside the opening of the frame 15.

[0044] When the tape 13 is attached to the workpiece 11 and the frame 15, the workpiece 11 is supported by the frame 15 via the tape 13. Thus, a frame unit 17 is formed, comprising the workpiece 11, the tape 13, and the frame 15. Furthermore, one or more frame units 17 are housed in the box 10.

[0045] An opening 4a is provided on the upper surface side of the base 4 in the region adjacent to the elevator 6 in the X-axis direction. A cleaning unit 12 for cleaning the workpiece 11 is disposed inside the opening 4a. The cleaning unit 12 includes: a rotating worktable 14 that holds the workpiece 11; and a nozzle (not shown) disposed above the rotating worktable 14 that provides a cleaning fluid such as pure water.

[0046] The rotary table 14 is connected to a rotary drive source (not shown) such as an electric motor, which rotates the rotary table 14 about a rotation axis that is approximately parallel to the Z-axis. While the workpiece 11 is held by the rotary table 14, cleaning fluid is supplied to the workpiece 11 from a nozzle while the rotary table 14 is rotated, thereby cleaning the workpiece 11. Alternatively, a gas-liquid mixture of liquid (such as pure water) and air can be used as the cleaning fluid.

[0047] A pair of guide rails 16 are provided above the cleaning unit 12 along the X-axis to hold the frame unit 17. A moving mechanism (not shown) is connected to the pair of guide rails 16 to move the pair of guide rails 16 in a manner that allows them to approach and separate from each other along the Y-axis. By using the pair of guide rails 16 to clamp the frame unit 17, the position of the frame unit 17 in the Y-axis direction is adjusted.

[0048] A rectangular opening 4b is provided on the upper surface of the base 4, adjacent to the guide rail 16 along the Y-axis. The opening 4b is formed with its length direction along the X-axis. A flat worktable cover 18 is provided inside the opening 4b. In addition, corrugated dustproof and dripproof covers 20 that can extend and retract along the X-axis are provided on both sides of the worktable cover 18 in the X-axis direction.

[0049] A chuck table (holding table) 22 is provided on the worktable cover 18 to hold the workpiece 11 and the like. The upper surface of the chuck table 22 forms a flat holding surface for holding the workpiece 11 and the like. In addition, a plurality of clamps 24 are provided around the chuck table 22 to hold and fix the frame 15 and the like.

[0050] For example, the chuck stage 22 has a cylindrical frame (not shown) made of a metal such as stainless steel. Furthermore, a circular recess is formed on the upper surface of the central portion of the frame, and a disc-shaped porous component made of a porous material such as porous ceramic is embedded in this recess. The holding surface of the chuck stage 22 is connected to a suction source (not shown) such as an injector via the porous component, a flow path (not shown) provided inside the chuck stage 22, a valve (not shown), etc.

[0051] For example, the frame unit 17 is arranged on the chuck table 22 with the front side of the workpiece 11 exposed upwards and the back side (band 13 side) of the workpiece 11 facing the holding surface of the chuck table 22. Additionally, the frame 15 is secured by multiple clamps 24. In this state, when negative pressure from the suction source is applied to the holding surface of the chuck table 22, the workpiece 11 is attracted and held by the chuck table 22 through the band 13.

[0052] Additionally, a pair of chuck worktables (sub-worktables) 26 are provided on the worktable cover 18 adjacent to the chuck worktable 22. The pair of chuck worktables 26 are arranged separately from each other in the Y-axis direction on the rear side of the chuck table 22.

[0053] The upper surface of the chuck table 26 forms a flat holding surface for holding plate-shaped components used for setting, inspection, and evaluation in cutting processes. For example, the holding surface of the chuck table 26 is rectangular and is connected to a suction source (not shown) such as an injector via a flow path (not shown) or a valve (not shown) provided inside the chuck table 26. The plates 19 and 21 (see reference 1) described later are held together by this chuck table 26. Figure 10 (A) etc. are maintained.

[0054] A moving unit (not shown) and a rotary drive source (not shown) are provided below the worktable cover 18. The moving unit is composed of a ball screw type moving mechanism or the like, which moves the chuck worktable 22 and chuck worktable 26 together with the worktable cover 18 along the X-axis. In addition, the rotary drive source is composed of an electric motor or the like, which rotates the chuck worktable 22 about a rotation axis that is approximately parallel to the Z-axis.

[0055] The area in front of opening 4b (adjacent to opening 4a) corresponds to the transport area for loading and unloading the workpiece 11. The area behind opening 4b corresponds to the processing area for machining the workpiece 11. By moving the chuck table 22 and chuck table 26 along the X-axis using the moving unit, the chuck table 22 and chuck table 26 can be positioned in either the transport area or the processing area.

[0056] A machining chamber (cover) 28 is provided above the machining area, forming a space for cutting the workpiece 11. Figure 1 In the diagram, the outline of the machining chamber 28 is represented by a double-dotted line. The machining chamber 28 is formed into a cuboid shape, for example, from metal, and is arranged to cover the machining area. Furthermore, a replacement device 100 (described later) is provided on the side of the machining chamber 28 on the transport area side. Figure 6 28a, the entrance (opening) through which the passage (etc.) is located.

[0057] A pair of cutting units 30 are provided inside the machining chamber 28 for cutting the workpiece 11. The cutting units 30 rotate an annular cutting tool and cut into the workpiece 11, thereby cutting the workpiece 11. For example, a hub-type cutting tool 36 (see reference) is mounted on the cutting unit 30. Figure 2 ).

[0058] Figure 2 This is an exploded perspective view of a cutting unit 30 equipped with a hub-type cutting tool 36. The cutting unit 30 has a cylindrical housing 32, in which a cylindrical spindle 34 arranged along the Y-axis is housed.

[0059] The front end (one end) of the spindle 34 protrudes outside the housing 32, and a threaded hole 34a is formed at the front end of the spindle 34. Furthermore, a rotary drive source, such as an electric motor, is connected to the base end (the other end) of the spindle 34. An annular cutting tool 36 is mounted at the front end of the spindle 34. The cutting tool 36 mounted at the front end of the spindle 34 rotates by the power transmitted from the rotary drive source via the spindle 34.

[0060] The cutting tool 36 is integrally formed by a ring-shaped holding part (base) 38 made of metal or the like and a ring-shaped cutting edge 40 formed along the outer periphery of the holding part 38. A circular opening 36a is provided in the center of the cutting tool 36, penetrating the cutting tool 36 (holding part 38) in the thickness direction.

[0061] The gripping portion 38 has a generally parallel front (first surface) 38a and a back (second surface) 38b. The front surface 38a of the gripping portion 38 forms an annular retaining surface that is held during the loading and unloading of the cutting tool 36. Furthermore, a cutting edge 40 is formed on the outer periphery of the back surface 38b side of the gripping portion 38. For example, the cutting edge 40 is made of an electroformed abrasive, which is formed by fixing abrasive grains made of diamond or the like using a bonding material such as a nickel plating layer.

[0062] A mounting flange 42 is fixed to the front end of the spindle 34 for mounting the cutting tool 36. The mounting flange 42 has: a disc-shaped flange portion 44 that supports the cutting tool 36; and a cylindrical boss portion (support shaft) 46 that protrudes from the center of the front surface 44a of the flange portion 44. In addition, a through hole 42a is provided on the mounting flange 42, penetrating the center of the flange portion 44 and the center of the boss portion 46.

[0063] An annular protrusion 44b protruding from the front face 44a is provided on the outer periphery of the flange portion 44. The front end face of the protrusion 44b is formed to be substantially parallel to the front face 44a, forming an annular support surface 44c that supports the cutting tool 36.

[0064] A threaded portion 46a is formed on the outer peripheral surface of the front end of the boss portion 46, for fastening a ring-shaped nut 48. A circular opening 48a extending through the nut 48 in the thickness direction is formed in the center of the nut 48. The opening 48a has a diameter approximately the same as that of the boss portion 46, and a threaded groove corresponding to the threaded portion 46a of the boss portion 46 is provided in the opening 48a. In addition, a plurality of through holes 48b extending through the nut 48 in the thickness direction are formed at approximately equal intervals along the circumference of the nut 48.

[0065] The screw 50 is inserted into the threaded hole 34a of the spindle 34 through the through hole 42a of the mounting flange 42, and the screw 50 is screwed into the threaded hole 34a for tightening, thereby fixing the mounting flange 42 to the front end of the spindle 34. Then, when the boss portion 46 is inserted into the opening 36a of the cutting tool 36, the cutting tool 36 is mounted on the mounting flange 42. In this state, when the nut 48 is tightened into the threaded portion 46a of the boss portion 46, the cutting tool 36 is clamped and fixed to the mounting flange 42 by the support surface 44c of the flange portion 44 and the nut 48.

[0066] On the other hand, a washer-type cutting tool 52 can also be installed in the cutting unit 30 (see reference). Figure 3 ). Figure 3 This is an exploded perspective view of a cutting unit 30 with a washer-type cutting tool 52 mounted on it.

[0067] The cutting tool 52 is composed of annular cutting edges formed by fixing abrasive grains using bonding materials such as metal binders, resin binders, and ceramic binders. Furthermore, a circular opening 52a extending through the cutting tool 52 along its thickness direction is provided at the center of the cutting tool 52.

[0068] A mounting flange 54 is mounted on the front end of the spindle 34 for mounting the cutting tool 52. The mounting flange 54 has: a fixed mounting base 56, which is fixed to the front end of the spindle 34; and a base (pressing flange) 62, which fixes the cutting tool 52 mounted on the fixed mounting base 56.

[0069] The mounting base 56 has: a disc-shaped flange portion 58 that supports the cutting tool 52; and a cylindrical boss portion (support shaft) 60 that protrudes from the center of the front surface 58a of the flange portion 58. Furthermore, the mounting base 56 is provided with a through hole 56a that penetrates the center of the flange portion 58 and the center of the boss portion 60, and an annular receiving portion 56b that supports the washer 66 (described later) is provided inside the through hole 56a.

[0070] An annular protrusion 58b protruding from the front face 58a is provided on the outer periphery of the flange portion 58. The front end face of the protrusion 58b is formed to be substantially parallel to the front face 58a, forming an annular support surface 58c that supports the cutting tool 52.

[0071] The boss portion 60 includes: an annular first boss portion (first support shaft) 60a, which protrudes from the front face 58a of the flange portion 58; an annular second boss portion (second support shaft) 60b, which protrudes from the front end of the first boss portion 60a; and an annular third boss portion (third support shaft) 60c, which protrudes from the front end of the second boss portion 60b. The diameter of the second boss portion 60b is smaller than the diameter of the first boss portion 60a, and the diameter of the third boss portion 60c is smaller than the diameter of the second boss portion 60b. Furthermore, the first boss portion 60a, the second boss portion 60b, and the third boss portion 60c are arranged in a concentric circle.

[0072] A base 62 for fixing the cutting tool 52 is mounted on the mounting base 56. The base 62 is a ring-shaped component made of metal or the like, having a front side (first side) 62a and a back side (second side) 62b that are substantially parallel to each other. The front side 62a of the base 62 serves as the ring-shaped holding surface that is held during the mounting and dismounting of the base 62. The back side 62b of the base 62 serves as the ring-shaped support surface that supports the cutting tool 52.

[0073] A circular opening 62c is provided in the center of the base 62, extending from the front side 62a to the back side 62b of the base 62. In addition, a plurality of through holes 62d are formed at approximately equal intervals along the circumference of the base 62 in the area between the outer periphery of the base 62 and the opening 62c, extending from the front side 62a to the back side 62b of the base 62.

[0074] A threaded portion 60d is formed on the outer peripheral surface of the front end of the boss portion 60 of the mounting base 56, which is used to fasten the annular nut 64. A circular opening 64a is formed in the center of the nut 64, extending through the nut 64 in the thickness direction. The opening 64a has a diameter approximately the same as that of the third boss portion 60c, and a threaded groove corresponding to the threaded portion 60d of the boss portion 60 is provided in the opening 64a. In addition, a plurality of through holes 64b extending through the nut 64 in the thickness direction are formed at approximately equal intervals along the circumference of the nut 64.

[0075] The mounting base 56 is mounted on the spindle 34 by screws 68. Specifically, firstly, a washer 66 is placed on the receiving portion 56b of the mounting base 56. In this state, the screw 68 is inserted into the threaded hole 34a of the spindle 34 through the washer 66 and the through hole 56a of the mounting base 56, so that the screw 68 engages with the threaded hole 34a for tightening. Thus, the mounting base 56 is fixed to the front end of the spindle 34.

[0076] Furthermore, when the boss portion 60 is sequentially inserted into the opening 52a of the cutting tool 52 and the opening 62c of the base 62, the cutting tool 52 and the base 62 are mounted on the fixed mounting base 56. Additionally, an annular protrusion (not shown) protruding from the back surface 62b of the base 62 is provided. This protrusion is formed such that its outer peripheral surface follows the contour of the opening 52a of the cutting tool 52, and its inner wall (inner peripheral surface) follows the contour of the outer peripheral surface of the first boss portion 60a.

[0077] The protrusion of the base 62 is inserted into the inside of the opening 52a of the cutting tool 52. This aligns the base 62 with the cutting tool 52. In addition, the first protrusion 60a is inserted into the inside of the inner wall of the protrusion of the base 62, and the second protrusion 60b is inserted into the opening 62c of the base 62.

[0078] In this state, when the nut 64 is tightened onto the threaded portion 60d formed on the third boss portion 60c, the cutting tool 52 and the base 62 are fixed to the mounting base 56. Thus, the cutting tool 52 is clamped by the support surface 58c of the flange portion 58 and the back surface 62b of the base 62 and fixed to the mounting flange 54.

[0079] As described above, the cutting tool 36 or the cutting tool 52 are respectively mounted on Figure 1 A pair of cutting units 30 are shown. Additionally, the cutting tools 36 or 52 mounted on the pair of cutting units 30 are configured to face each other.

[0080] Each of the pair of cutting units 30 is equipped with an imaging unit 70 for photographing the workpiece 11 held by the chuck table 22. For example, the imaging unit 70 may be a visible light camera with an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera with an imaging element that receives infrared light and converts it into an electrical signal. Based on the images obtained by the imaging unit 70, the workpiece 11 is aligned with the cutting unit 30.

[0081] Furthermore, a first conveying unit 72 for conveying the workpiece 11 is provided above the base 4. The first conveying unit 72 is connected to a moving mechanism (not shown) that moves the first conveying unit 72 along the X-axis and Y-axis directions. In addition, the first conveying unit 72 has a cylinder, and the cylinder has a rod that moves up and down along the Z-axis direction.

[0082] A holding unit 72a is fixed to the lower end of the cylinder rod to hold the frame 15 of the frame unit 17. For example, the holding unit 72a has a plurality of suction pads that attract and hold the upper surface of the frame 15 of the frame unit 17. In addition, a gripping mechanism 72b is provided at the end of the holding unit 72a on the lifting 6 side to grip the end of the frame 15 of the frame unit 17.

[0083] A second conveying unit 74 for conveying the workpiece 11 is disposed above the holding unit 72a of the first conveying unit 72. The second conveying unit 74 is connected to a moving mechanism (not shown) that moves the second conveying unit 74 along the Y-axis. In addition, the second conveying unit 74 has a cylinder, and the cylinder has a rod that moves up and down along the Z-axis.

[0084] A holding unit 74a is fixed to the lower end of the cylinder rod to hold the frame 15 of the frame unit 17. The structure of the holding unit 74a is the same as that of the holding unit 72a of the first conveying unit 72.

[0085] Additionally, a replacement unit 76 is provided on the side of the chuck table 22. This replacement unit 76 replaces the cutting tools 36, 52, etc., mounted on the cutting unit 30. Details of the structure of the replacement unit 76 will be described later.

[0086] A plate-shaped cover 78 is provided on the edge of the replacement unit 76 side of the base 4. One end of the cover 78 is connected to the base 4 via a hinge 80, and the cover 78 can rotate about the hinge 80.

[0087] When the workpiece 11 is machined by the cutting unit 30, such as Figure 1As shown by the solid line, cover 78 is in an upright position (open state) along the Z-axis direction. On the other hand, when changing cutting tools 36, 52, etc., by the changing unit 76, as... Figure 1 As shown by the double-dotted line, cover 78 is in a horizontal position (closed state) along the X-axis and Y-axis directions.

[0088] Each structural element constituting the cutting device 2 (elevator 6, cleaning unit 12, guide rail 16, chuck table 22, clamp 24, chuck table 26, cutting unit 30, imaging unit 70, first conveying unit 72, second conveying unit 74, changing unit 76, etc.) is connected to the control unit (control unit) 82. The control unit 82 generates control signals for controlling the operation of each structural element of the cutting device 2, thereby controlling the operation of the cutting device 2.

[0089] For example, the control unit 82 is configured as a computer, comprising: a processing unit 82a, which performs various processing (calculations, etc.) required for the operation of the cutting device 2; and a storage unit 82b, which stores various information (data, programs, etc.) for the processing of the processing unit 82a. The processing unit 82a is configured to include a processor such as a CPU (Central Processing Unit). Furthermore, the storage unit 82b is configured to include various memories constituting main storage devices, auxiliary storage devices, etc.

[0090] The workpiece 11 is cut using the cutting device 2 described above. When processing the workpiece 11, firstly, the frame unit 17 containing the workpiece 11 is placed in the box 10. Then, the box 10 is placed on the lifting platform 6a of the elevator 6.

[0091] The frame unit 17, housed in the box 10, is removed from the box 10 by the first conveying unit 72. Specifically, the first conveying unit 72 moves along the X-axis in a manner that separates it from the box 10, while the end of the frame 15 is held by the holding mechanism 72b. As a result, the frame unit 17 is pulled out of the box 10 and positioned on a pair of guide rails 16. Then, the frame unit 17 is clamped by the pair of guide rails 16 for alignment.

[0092] Next, the first transfer unit 72 holds the upper surface side of the frame 15 using the holding unit 72a, and transfers the frame unit 17 to the chuck table 22 disposed in the transfer area. Furthermore, the chuck table 22 moves from the transfer area to the processing area while holding the back side (band 13 side) of the workpiece 11. Thus, the workpiece 11 is disposed inside the processing chamber 28.

[0093] Then, after aligning the workpiece 11 with the cutting unit 30 based on the image obtained by the imaging unit 70, the cutting unit 30 cuts the workpiece 11. For example, the workpiece 11 is cut along a predetermined dividing line and divided into multiple device chips.

[0094] When the cutting process is completed, the chuck table 22 moves to the transfer area. Then, the second transfer unit 74 uses the holding unit 74a to hold the upper surface side of the frame 15, and moves the frame unit 17 from the chuck table 22 to the cleaning unit 12. Then, the workpiece 11 is cleaned by the cleaning unit 12.

[0095] When the workpiece 11 is cleaned, the first conveying unit 72 holds the frame 15 using the holding unit 72a and moves the frame unit 17 onto a pair of guide rails 16. Then, the frame unit 17 is clamped by the pair of guide rails 16 for alignment. Then, the first conveying unit 72 moves toward the box 10 while the frame 15 is held by the holding mechanism 72b, storing the frame unit 17 in the box 10.

[0096] The storage unit 82b of the control unit 82 stores a program describing a series of operations of the cutting device 2. Furthermore, when the operator instructs the cutting device 2 to process the workpiece 11, the processing unit 82a reads the program from the storage unit 82b and executes it, sequentially generating control signals for controlling the operation of each structural element of the cutting device 2.

[0097] Here, the cutting tools 36 and 52 installed in the cutting unit 30 gradually wear down due to cutting the workpiece 11, and therefore need to be replaced periodically. In the cutting device 2, the cutting tools 36 and 52 are automatically replaced by the replacement unit 76.

[0098] Figure 4 This is a perspective view showing the replacement unit 76. The replacement unit 76 includes: a replacement device (replacement mechanism) 100 for replacing cutting tools 36, 52; and a moving unit (moving mechanism) 84 for moving the replacement device 100. The moving unit 84 includes: a lifting mechanism 86 for moving the replacement device 100 along the Z-axis direction; and a multi-joint arm 90 connected to the lifting mechanism 86 for moving the replacement device 100 along a plane (horizontal plane) parallel to the X-axis and Y-axis directions.

[0099] The lifting mechanism 86 has a columnar base plate 88 arranged along the Z-axis direction, allowing the articulated arm 90 to move along the base plate 88 in the Z-axis direction. For example, the lifting mechanism 86 includes: an electric motor (not shown) disposed at the lower part of the base plate 88, with a drive pulley fixed to its shaft; and a driven pulley (not shown) disposed at the upper part of the base plate 88. A toothed annular belt (not shown) is mounted on the drive pulley and the driven pulley, and a first metal support member 92A is fixed to the toothed annular belt.

[0100] When the motor of the lifting mechanism 86 is rotated in the first direction, the first support member 92A rises; when the motor of the lifting mechanism 86 is rotated in the second direction, opposite to the first direction, the first support member 92A falls. Thus, the first support member 92A rises and falls along the Z-axis.

[0101] However, the structure of the lifting mechanism 86 is not limited as long as it enables the lifting of the first support member 92A. For example, the lifting mechanism 86 can also be a ball screw type lifting mechanism. The ball screw type lifting mechanism has a pair of guide rails (not shown) arranged along the Z-axis direction. In addition, a flat movable plate (not shown) is mounted on the pair of guide rails in a state that allows it to slide along the guide rails.

[0102] A first support member 92A is fixed to the front (first side) of the movable plate. Additionally, a nut portion (not shown) is provided on the back (second side) of the movable plate. This nut portion engages with a ball screw arranged substantially parallel to a pair of guide rails. A pulse motor (not shown) is connected to one end of the ball screw; when the pulse motor is rotated, the first support member 92A moves up and down along the Z-axis.

[0103] A first rotating mechanism 94A, having a rotary drive source such as an electric motor, is fixed to the first support member 92A. This rotary drive source is configured such that its rotation axis is substantially parallel to the Z-axis direction. One end of a first arm 96A is mounted on the first rotating mechanism 94A in a direction parallel to both the X-axis and Y-axis directions.

[0104] A second rotating mechanism 94B is mounted at the other end of the first arm 96A. The second rotating mechanism 94B has a rotation drive source such as an electric motor whose rotation axis is arranged substantially parallel to the Z-axis direction. One end of the second arm 96B is mounted on the second rotating mechanism 94B in a direction parallel to the X-axis and Y-axis directions.

[0105] A third rotating mechanism 94C is mounted at the other end of the second arm 96B. The third rotating mechanism 94C has a rotation drive source such as an electric motor whose rotation axis is arranged approximately parallel to the Z-axis direction. A metal second support member 92B is mounted on the third rotating mechanism 94C. Furthermore, a replacement device 100 for changing cutting tools 36, 52, etc., is mounted on the second support member 92B.

[0106] The replacement device 100 is positioned adjacent to the substrate 88 (retracted position). Furthermore, when replacing cutting tools 36, 52, etc., the moving unit 84 is driven, and the replacement device 100 is positioned above the base 4 (replacement position). Figure 5 This is a perspective view showing the replacement unit 76 of the replacement device 100 disposed at the replacement position.

[0107] The replacement device 100 is raised and lowered along the Z-axis via the lifting mechanism 86, and moves along a plane (horizontal plane) parallel to the X and Y axes via the articulated arm 90. That is, the replacement device 100 can be positioned at any location via the lifting mechanism 86 and the articulated arm 90.

[0108] Next, an example of the structure of the replacement device 100 will be described. Figure 6 This is a perspective view showing the replacement device 100. Additionally, Figure 7 (A) is a side view showing the replacement device 100. Figure 7 (B) is a front view showing the replacement device 100. Additionally, in Figure 7 In (B), the diagrams of connecting parts 114a and 114b, which will be described later, are omitted. The following will primarily refer to... Figure 6 The structure of the replacement device 100 will be described.

[0109] The changing device 100 includes cutting tools 36 and 52 and nuts 48 and 64 (see reference). Figure 2 and Figure 3 The loading and unloading unit 102 is used for loading and unloading. In addition, a rotating mechanism 104 is connected to the loading and unloading unit 102 to rotate the loading and unloading unit 102.

[0110] The rotating mechanism 104 includes: a rotating part (shaft) 106 connected to the loading / unloading unit 102; and a rotation drive source (not shown) such as an electric motor, which causes the rotating part 106 to rotate (rotate) about a straight line passing through the interior of the rotating part 106 as a rotation axis 106a. The rotation drive source causes the rotating part 106 to rotate about the rotation axis 106a in two directions (a first direction and a second direction opposite to the first direction). When the rotating part 106 rotates, the loading / unloading unit 102 connected to the rotating part 106 rotates about the rotation axis 106a in conjunction with the rotating part 106.

[0111] The loading and unloading unit 102 has a frame 110 connected to the rotating part 106 of the rotating mechanism 104. The frame 110 has a pair of plate-shaped support members 112a and 112b made of metal or the like and arranged substantially parallel to each other.

[0112] Rectangular connecting members 114a and 114b are provided between the support members 112a and 112b. Connecting member 114a is fixed to one end (rotating part 106 side) of the support members 112a and 112b, and connecting member 114b is fixed to the other end (opposite to the rotating part 106) of the support members 112a and 112b. That is, the support members 112a and 112b are connected to each other via connecting members 114a and 114b.

[0113] A nut rotating part (nut loading and unloading unit) 120 is mounted on the frame 110. This nut rotating part 120 is used to mount nuts 48 and 64 (see reference) for mounting cutting tools 36 and 52 to the cutting unit 30. Figure 2 and Figure 3 The nut rotating part 120 has a nut holding part 122 that holds the nuts 48 and 64, and a columnar rotating part (shaft) 124 connected to the nut holding part 122 (see reference). Figure 7 (B)

[0114] The rotating part 124 is housed within a cylindrical housing 126. One end (front end) of the rotating part 124 protrudes from the housing 126, and a nut retainer 122 is connected to this end. The other end (base end) of the rotating part 124 is connected to a rotary drive source 128, such as an electric motor, which causes the rotating part 124 to rotate (spin) about a straight line passing through its interior as its axis of rotation 124a.

[0115] The rotary drive source 128 causes the rotating part 124 to rotate about the rotation axis 124a in two directions (a first direction and a second direction opposite to the first direction). When the rotating part 124 rotates, the nut holding part 122 connected to the rotating part 124 rotates about the rotation axis 124a in conjunction with the rotating part 124.

[0116] Furthermore, an opening (not shown) extending through the support member 112a in the thickness direction is provided at the center of the support member 112a, and an opening (not shown) extending through the support member 112b in the thickness direction is provided at the center of the support member 112b. Moreover, one end of the rotating part 124, which protrudes from the housing 126, is inserted into the opening of the support member 112a and protrudes from the support member 112a toward the outside of the frame 110. The other end of the rotating part 124, together with the end of the housing 126, is inserted into the opening of the support member 112b and protrudes from the support member 112b toward the outside of the frame 110.

[0117] One end of the rotating part 124 is connected to the nut retaining part 122 on the outside of the frame 110. The other end of the rotating part 124 is connected to the rotation drive source 128 on the outside of the frame 110. Thus, the frame 110 is held by the nut retaining part 122 and the rotation drive source 128, and the nut rotating part 120 is mounted on the frame 110. Furthermore, the nut rotating part 120 is arranged such that the rotation axis (corresponding to the rotation axis 124a) of the nut retaining part 122 is perpendicular to the rotation axis 106a of the rotating part 106.

[0118] The nut retaining part 122 has a cylindrical rotating member 130 fixed to one end of the rotating part 124. The rotating member 130 is subjected to force by a spring or the like toward the side opposite to the support member 112a. When an external force is applied, the rotating member 130 moves toward the support member 112a.

[0119] Furthermore, the rotating member 130 has a front surface 130a located on the side opposite to the support member 112a. Moreover, a plurality of protrusions (in...) extending from the front surface 130a are provided on the rotating member 130 at approximately equal intervals along the circumference of the front surface 130a. Figure 6 (4 in total) Maintain sales of 132.

[0120] The through hole 48b of retaining pin 132 and nut 48 (refer to) Figure 2 ) or the through hole 64b of nut 64 (refer to Figure 3 Correspondingly formed, they can be inserted into the through holes 48b and 64b. In addition, the number, size, and arrangement of the retaining pins 132 are appropriately set according to the through holes 48b and 64b.

[0121] Around the rotating component 130, a plurality of gripping devices for holding nuts 48 and 64 are arranged at approximately equal intervals along the circumference of the rotating component 130. Figure 6 There are four gripping components 134. Each gripping component 134 is formed in the shape of a column, and the base end (one end side) of the gripping component 134 is fixed to the outer peripheral surface of the rotating component 130.

[0122] The front end (other end side) of the gripping member 134 protrudes from the front face 130a of the rotating member 130, and a claw portion 134a curved toward the center side of the rotating member 130 is formed at the front end. In addition, the gripping member 134 is subjected to a force in the radial direction outward by a spring or the like, and when an external force is applied, the claw portion 134a moves toward the radial direction inward of the rotating member 130.

[0123] Furthermore, a hollow cylindrical cover 136 is provided around the rotating member 130. The cover 136 is configured to rotate independently of the rotating member 130 about the rotation axis 124a, and is arranged to surround the base end side of the rotating member 130 and the plurality of holding members 134. When the front surface 130a of the rotating member 130 is pressed toward the inside of the cover 136 (the support member 112a side), the spring or the like that applying force to the rotating member 130 contracts, and the rotating member 130 and the plurality of holding members 134 are pressed into the inside of the cover 136.

[0124] When the rotating member 130 is pressed into the inside of the cover 136, the front ends (claw 134a sides) of the plurality of gripping members 134 contact the inner wall of the cover 136 and are pressed, causing springs or the like that exert force on the gripping members 134 to contract. As a result, the front ends of the plurality of gripping members 134 move inward toward the radial direction of the rotating member 130. Then, the plurality of gripping members 134 are arranged in a state where their length direction is along the inner wall of the cover 136 (closed state). At this time, the claws 134a of the gripping members 134 are, for example, positioned inward toward the radial direction of the rotating member 130 than the outer periphery of the rotating member 130.

[0125] On the other hand, when the pressure on the rotating member 130 is released, the rotating member 130 moves outward toward the cover 136, and the state in which the front end of the gripping member 134 is pressed by the inner wall of the cover 136 is released. As a result, the front ends of the plurality of gripping members 134 move outward toward the radial direction of the rotating member 130. Then, the front ends of the plurality of gripping members 134 are positioned in an open state (outward in the radial direction of the rotating member 130 compared to the closed state). At this time, the claw portion 134a of the gripping member 134 is, for example, positioned outward in the radial direction of the rotating member 130 compared to the outer periphery of the rotating member 130.

[0126] Furthermore, a plurality of (e.g., four) pins 138 protruding from the outer peripheral surface of the rotating component 130 are provided on the outer peripheral surface of the rotating component 130. In addition, a plurality of (e.g., four) openings 136a are provided on the cover 136, extending from the outer peripheral surface to the inner peripheral surface (inner wall) through the cover 136. Moreover, the front ends of the pins 138 are respectively inserted into the openings 136a.

[0127] The end of the opening 136a located on the side opposite to the support member 112a is formed in a stepped shape, including a first pin receiving portion 136b and a second pin receiving portion 136c. The second pin receiving portion 136c is disposed at a position (support member 112a side) that is farther away from the front side 130a of the rotating member 130 than the first pin receiving portion 136b.

[0128] In its initial state, the nut retaining part 122 is in contact with the first pin receiving part 136b. Furthermore, when the rotating part 130 is pressed into the inside of the cover 136, the pin 138 separates from the first pin receiving part 136b. When the rotating part 124 is rotated in the first direction in this state, the pin 138 moves from the first pin receiving part 136b side to the second pin receiving part 136c side.

[0129] Then, when the pressure on the rotating member 130 is released, the pin 138 contacts the second pin receiving portion 136c and becomes supported by the second pin receiving portion 136c. As a result, the rotating member 130 is kept pressed into the inside of the cover 136, and the plurality of holding members 134 remain in the closed state.

[0130] On the other hand, when the rotating member 130, which is pressed into the inside of the cover 136, is pressed further into the inside of the cover 136, the pin 138 separates from the second pin receiving portion 136c. When the rotating member 124 is rotated in the second direction opposite to the first direction in this state, the pin 138 moves from the second pin receiving portion 136c side to the first pin receiving portion 136b side.

[0131] Then, when the pressing of the rotating member 130 is released, the pin 138 contacts the first pin receiving portion 136b and becomes supported by the first pin receiving portion 136b. As a result, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of holding members 134 are in the open state.

[0132] The aforementioned nut rotating part 120 holds and rotates the nuts 48 and 64. Specifically, firstly, the front surface 130a of the rotating part 130 contacts the nuts 48 and 64, so that the retaining pin 132 is inserted into the through hole 48b of the nut 48 (see reference). Figure 2 ) or the through hole 64b of nut 64 (refer to Figure 3 When the rotating component 130 is pressed into the inside of the cover 136 in this state, the multiple gripping components 134 are closed, and the claws 134a contact the outer peripheral surfaces of the nuts 48 and 64 to grip the nuts 48 and 64.

[0133] With nuts 48 and 64 held by multiple holding members 134, when the rotary drive source 128 rotates the rotating part 124 (see reference) Figure 7When (B) rotates, the rotating component 130 connected to the rotating part 124 rotates, thereby causing the nuts 48 and 64 held by the holding component 134 to also rotate.

[0134] By using the nut rotating part 120 to hold and rotate the nuts 48 and 64, the nuts 48 and 64 can be automatically removed and tightened when changing the cutting tools 36 and 52 installed on the cutting unit 30.

[0135] For example, the nut 48 (see reference) is mounted on the mounting flange 42 of the cutting unit 30. Figure 2 When removing it, firstly, it is removed via the lifting mechanism 86 and the multi-joint arm 90 (see reference). Figure 4 and Figure 5 The changing device 100 is moved via the inlet / outlet 28a of the processing chamber 28 (see reference). Figure 1 The replacement device 100 is placed inside the processing chamber 28. Then, the loading and unloading unit 102 is rotated by the rotating mechanism 104, so that the nut holding part 122 is opposed to the mounting flange 42.

[0136] Then, the nut retaining portion 122 is moved toward the mounting flange 42. As a result, the front side 130a of the rotating member 130 is pressed onto the nut 48 mounted on the mounting flange 42. At this time, the plurality of retaining pins 132 of the rotating member 130 are inserted into the through holes 48b of the nut 48.

[0137] Then, the rotating component 130 is pressed by the nut 48, and the rotating component 130 is pressed into the inside of the cover 136, and the plurality of holding components 134 are in the closed state. As a result, the nut 48 is held by the claws 134a of the plurality of holding components 134.

[0138] Next, the rotating part 124 (see reference) is driven by the rotation drive source 128. Figure 7 The rotating component 130 rotates about the rotation axis 124a in the first direction (the direction of loosening the nut 48). As a result, the nut 48, which is held by the multiple holding components 134, is loosened by the rotation and removed from the boss portion 46 of the mounting flange 42. In addition, when the rotating component 130 rotates in the first direction while being pressed into the inside of the cover 136, the pin 138 moves from the first pin receiving portion 136b side to the second pin receiving portion 136c side.

[0139] Then, the nut retaining portion 122 is moved away from the mounting flange 42. At this time, the pin 138 is supported by the second pin receiving portion 136c, thereby keeping the rotating member 130 pressed into the inside of the cover 136. Thus, the multiple holding members 134 are kept holding the nut 48 (closed state).

[0140] On the other hand, when the nut 48 is installed on the mounting flange 42 of the cutting unit 30, firstly, the nut holding part 122, which holds the nut 48, is positioned opposite the mounting flange 42, and the nut holding part 122 is moved toward the mounting flange 42. As a result, the nut 48 held by the nut holding part 122 is positioned at the front end of the boss portion 46 of the mounting flange 42, and the rotating member 130 is pressed into the inside of the cover 136.

[0141] Next, the rotating part 124 (see reference) is driven by the rotation drive source 128. Figure 7 The rotating component 130 rotates about the rotation axis 124a in a second direction opposite to the first direction (the direction of the fastening nut 48). As a result, the nut 48 rotates and is fastened to the threaded portion 46a of the boss portion 46 formed on the mounting flange 42, thereby being mounted on the mounting flange 42. Furthermore, when the rotating component 130 rotates in the second direction while being pressed into the inside of the cover 136, the pin 138 moves from the second pin receiving portion 136c side to the first pin receiving portion 136b side.

[0142] Then, the nut retaining portion 122 is moved away from the mounting flange 42. At this time, the pin 138 is supported by the first pin receiving portion 136b. Then, the rotating member 130 is pushed out from the inside of the cover 136, and the gripping of the nut 48 by the plurality of holding members 134 is released.

[0143] Furthermore, the method for maintaining the multiple gripping components 134 in a closed or open state is not limited to the method described above. For example, instead of providing the pin 138 on the rotating component 130, an actuator that moves the cover 136 along the height direction of the cover 136 may be provided on the loading / unloading unit 102. For example, the actuator may be composed of a cylinder or the like and fixed to the support component 112a. By moving the cover 136 with this actuator, the closed and open states of the multiple gripping components 134 can be freely switched.

[0144] An annular member 140, made of metal or the like, is provided between the support members 112a and 112b. The annular member 140 surrounds the housing 126 (rotating part 124) without contacting the housing 126 and is arranged substantially parallel to the support members 112a and 112b.

[0145] The annular member 140 is connected to the support member 112a via a plurality of elastic bodies (elastic members) 142a, and to the support member 112b via a plurality of elastic bodies (elastic members) 142b. That is, the annular member 140 is suspended by the elastic bodies 142a and 142b and held in a state where it does not contact the support members 112a and 112b (see reference). Figure 7 (B)

[0146] For example, the elastic bodies 142a and 142b are made of stretchable components such as springs and rubber. When an external force is applied to the annular component 140, the annular component 140 can move or rotate in any direction through the stretching and contraction of the elastic bodies 142a and 142b.

[0147] A holding portion 150A (first holding portion) and a holding portion 150B (second holding portion) for holding cutting tools 36 and 52 are connected to the outer peripheral surface of the annular component 140. The holding portions 150A and 150B are disc-shaped components made of resin, metal, etc., and hold the cutting tools 36 and 52 on the circular front side 150a facing the side opposite to the annular component 140. The holding portions 150A and 150B are arranged such that the front side 150a of the holding portion 150A and the front side 150a of the holding portion 150B face the outside of the frame 110 and are opposite to each other across the frame 110.

[0148] The retaining portions 150A and 150B are respectively arranged to be 90° apart from the nut retaining portion 122 in the circumferential direction (rotation direction) of the rotating portion 106 of the rotating mechanism 104. Furthermore, the front faces 150a of the nut retaining portion 122, the retaining portion 150A, and the retaining portion 150B are arranged to face the side opposite to the rotation axis 106a, separated from each other around the rotation axis 106a of the rotating portion 106.

[0149] Next, structural examples of retaining parts 150A and 150B will be described. Figure 8 (A) is a front view showing the retaining part 150A. Figure 8 (B) is a cross-sectional view showing the retaining part 150A. The structure and function of the retaining part 150A will be described below, but the structure and function of the retaining part 150B are the same as those of the retaining part 150A.

[0150] The retaining part 150A has a disc-shaped frame 152 made of resin, metal, or the like. The frame 152 has a front (first surface) 152a and a back (second surface) 152b that are substantially parallel to each other. The front surface 152a side of the frame 152 corresponds to the front surface 150a side of the retaining part 150A. Furthermore, a circular first groove (first recess) 152c is provided at the center of the front surface 152a side of the frame 152. Additionally, the diameter of the first groove 152c is larger than that of the front surface 38a of the holding part 38 of the cutting tool 36 (see reference). Figure 9 The diameter of (A) and the front face 62a of the base 62 (refer to) Figure 9 The diameter of (B) is large.

[0151] Furthermore, a circular second groove (second recess) 152d is provided at the center of the bottom of the first groove 152c. Moreover, as... Figure 8As shown in (B), a ring-shaped third groove (third recess) 152e is formed at the bottom of the second groove 152d along the outer periphery of the second groove 152d with a specified width.

[0152] An annular tool suction pad 154 is embedded in the third groove 152e. The tool suction pad 154 is an elastic component made of an elastic material (rubber, resin, etc.) capable of elastic deformation. The tool suction pad 154 includes a base 154a embedded in the inner side of the third groove 152e and a pair of lips (front ends) 154b protruding from the base 154a. One lip 154b is provided along the side wall of the third groove 152e located radially outward of the frame 152. The other lip 154b is provided along the side wall of the third groove 152e located radially inward of the frame 152.

[0153] A pair of lips 154b are inclined relative to the front face 152a of the frame 152 in such a way that they are more separated from each other the further away from the base 154a. That is, the pair of lips 154b are respectively arranged from the inside to the outside of the third groove 152e in the width direction of the third groove 152e.

[0154] A plurality of through holes 154c are provided in the region where the base 154a overlaps with the space between the pair of lips 154b. For example, as Figure 8 As shown in (A), six through holes 154c are formed at approximately equal intervals along the circumference of the tool suction pad 154 at the base 154a. One end of the through hole 154c opens on the front side 152a of the frame 152, and the other end of the through hole 154c is connected to an annular suction path 152f provided at the bottom of the third groove 152e.

[0155] One end of the suction path 152f opens at the bottom of the third groove 152e and communicates with the front 150a side of the holding part 150A (the front 152a side of the frame 152) through the through hole 154c of the tool suction pad 154. Furthermore, the other end of the suction path 152f is connected to one end of the flow path 156, which is composed of a pipe, conduit, or the like.

[0156] The other end of flow path 156 is connected to suction source 160 via valve 158. For example, valve 158 is a solenoid valve whose opening and closing are controlled by electricity, and suction source 160 is an injector. When valve 158 is opened, the negative pressure (attraction force) of suction source 160 acts on suction path 152f.

[0157] Additionally, a pressure sensor 162 is connected in the region between the suction path 152f and the valve 158 in the flow path 156 to measure the pressure of the flow path 156. For example, the pressure sensor 162 measures the negative pressure inside the flow path 156 based on gauge pressure (the difference between absolute pressure and atmospheric pressure). The pressure value of the flow path 156 measured by the pressure sensor 162 is output to the control unit 82 (see reference). Figure 1 ), and store it in the storage unit 82b.

[0158] Alternatively, two O-rings with different diameters arranged concentrically can be used as the tool suction pad 154. In this case, one O-ring is disposed along the side wall of the third groove 152e located radially outward of the frame 152, and the other O-ring is disposed along the side wall of the third groove 152e located radially inward of the frame 152. Furthermore, the area between the two O-rings is connected to the suction path 152f.

[0159] The cutting tool is held by the aforementioned holding part 150A. Specifically, when changing the cutting tool, the cutting tool (used cutting tool) installed in the cutting unit 30 and the unused cutting tool (replacement cutting tool) are held by the holding part 150A. In addition, the holding part 150A can hold either hub-type cutting tools or washer-type cutting tools.

[0160] Figure 9 (A) is a cross-sectional view showing the holding part 150A for holding the hub-type cutting tool 36. When holding the cutting tool 36 using the holding part 150A, firstly, the valve 158 is opened, so that the negative pressure of the suction source 160 acts on the suction path 152f. Then, with the front side 150a of the holding part 150A facing the cutting tool 36, the holding part 150A is brought close to the gripping part 38 of the cutting tool 36.

[0161] When the front surface 38a of the gripping part 38 is inserted into the first groove 152c and contacts the front end of the pair of lips 154b, the space between the pair of lips 154b is sealed and depressurized by the negative pressure of the suction source 160. As a result, the negative pressure acts on the front surface 38a of the gripping part 38, and the cutting tool 36 is attracted and held by the holding part 150A in contact with the tool suction pad 154 (contact attraction).

[0162] Figure 9 (B) is a cross-sectional view showing the holding portion 150A for holding the washer-type cutting tool 52. When the cutting tool 52 is held by the holding portion 150A, the holding portion 150A attracts the front side 62a of the base 62 and attracts the cutting tool 52 through the through hole 62d provided in the base 62.

[0163] Specifically, first, valve 158 is opened, so that the negative pressure of suction source 160 acts on suction path 152f. Then, with the front side 150a of holding part 150A facing the base 62 and cutting tool 52, holding part 150A is brought close to base 62.

[0164] When the front surface 62a of the base 62 is inserted into the first groove 152c and contacts the front ends of the pair of lips 154b, the space between the pair of lips 154b is sealed and depressurized by the negative pressure of the suction source 160. As a result, the negative pressure acts on the front surface 62a of the base 62, and the base 62 is attracted and held by the holding part 150A in the state of contact with the tool suction pad 154 (contact attraction).

[0165] Furthermore, the base 62 is provided with a plurality of through holes 62d, each opening in an area corresponding to the tool attraction pad 154 on the front side 62a and in an area contacting the cutting tool 52 on the back side 62b. Moreover, the negative pressure from the attraction source 160 also acts on the back side 62b of the base 62 via the plurality of through holes 62d. Thus, the cutting tool 52, supported by the back side 62b of the base 62, is attracted and held by the holding portion 150A via the base 62.

[0166] Alternatively, the retaining unit 150A can also retain only the base 62. Specifically, as follows: Figure 9 As shown in (B), the base 62, which is not in contact with the cutting tool 52, is attracted by the holding part 150A. At this time, although the negative pressure of the attraction source 160 leaks slightly through the through hole 62d of the base 62, the base 62 can be held by appropriately setting the diameter of the through hole 62d and the attraction force of the attraction source 160. For example, the diameter of the through hole 62d is set to about 1 mm.

[0167] Next, the holding part 150A, which is holding the base 62, is moved so that the front side 150a of the holding part 150A faces the cutting tool 52 stored in a designated location. Then, by bringing the holding part 150A close to the cutting tool 52, when the cutting tool 52 comes into contact with the back side 62b of the base 62, the cutting tool 52 is attracted and held by the holding part 150A via the base 62.

[0168] As described above, the cutting tools 36 and 52 are held by the holding part 150A. In addition, by measuring the pressure of the flow path 156 using the pressure measuring device 162, it can be determined whether the desired object is properly held by the holding part 150A.

[0169] For example, when the cutting tool 36 is held using the holding part 150A (see reference) Figure 9(A)), the suction path 152f is sealed. Therefore, the pressure P of the flow path 156 in the state where the holding part 150A holds the cutting tool 36 is reduced. a1 The pressure P in the flow path 156 when the holding part 150A is not in contact with the cutting tool 36 a2 (>P a1 The pressures are different. Therefore, by comparing the pressure measured by the pressure gauge 162 with the preset threshold P, the difference can be determined. tha (P a1 <P tha <P a2 It can determine whether the cutting tool 36 is held by the holding part 150A.

[0170] In addition, when the cutting tool 52 is held using the holding part 150A (see reference 150A), Figure 9 (B)), the pressure P of the flow path 156 in the state where the holding part 150A attracts and holds the cutting tool 52 and the base 62. b1 The pressure P of the flow path 156 in the state where the holding part 150A only attracts and holds the base 62 is maintained. b2 (> Pressure P) b1 The pressure P of the flow path 156 when the holding part 150A does not hold the cutting tool 52 and the base 62. b3 (>P b2 )different.

[0171] Therefore, by comparing the pressure measured by the pressure measuring device 162 with the preset threshold P, thb1 (P b1 <P thb1 <P b2 ) and threshold P thb2 (P b2 <P thb2 <P b3 It can determine whether the cutting tool 52 and the base 62 are held by the holding part 150A.

[0172] In control unit 82 (reference) Figure 1 The threshold (P) is pre-stored in the storage section 82b. tha P thb1 P thb2 The aforementioned discrimination can be implemented, for example, by having the processing unit 82a perform a process that compares the pressure measured by the pressure measuring device 162 with a threshold. In this case, a program describing the process of comparing the measured pressure with the threshold is stored in the storage unit 82b. Then, the processing unit 82a accesses the storage unit 82b, reads and executes the program, thereby performing a comparison of the measured pressure with the threshold.

[0173] As described above, the cutting tools 36 and 52 are held using the holding part 150A. Furthermore, the sequence of holding the cutting tools 36 and 52 using the holding part 150B is the same as that of the holding part 150A.

[0174] Additionally, on the front side 152a of the frame 152, a cylindrical fourth groove (fourth recess) 152g is provided in the area near the inner side of the suction path 152f. Furthermore, the diameter of the fourth groove 152g is set to be larger than that of the boss portion 46 of the mounting flange 42 (see reference). Figure 2 The diameter of the mounting flange 54 and the third boss portion 60c (refer to) Figure 3 The diameter of the retaining parts 150A and 150B is large. Therefore, when the retaining parts 150A and 150B are brought close to the cutting unit 30, the front ends of the bosses 46 and 60 are inserted into the fourth groove 152g, thus avoiding contact between the retaining parts 150A and 150B and the bosses 46 and 60.

[0175] Here, as Figure 6 and Figure 7 As shown in (B), the holding portions 150A and 150B are connected to the rotating portion 106 of the rotating mechanism 104 via elastic bodies 142a and 142b. Thus, the holding portions 150A and 150B are maintained in a state where the front side 150a can tilt. That is, when an external force is applied to the holding portions 150A and 150B, the front side 150a can tilt freely in any direction.

[0176] Therefore, when the cutting tool 36 and the base 62 contact the front 150a side of the holding portions 150A and 150B, the holding portions 150A and 150B are inclined such that their front 150a is parallel to the front 38a of the cutting tool 36 and the front 62a of the base 62. As a result, the front 150a side of the holding portions 150A and 150B makes proper contact with the cutting tool 36 and the base 62, and the cutting tool 36 and the base 62 are reliably attracted and held.

[0177] The cutting tools 36 and 52 are replaced using the replacement device 100 described above. The replacement of the cutting tools 36 and 52 is performed by removing the used cutting tools 36 and 52 from the cutting unit 30 and then installing replacement cutting tools 36 and 52 into the cutting unit 30. The replacement cutting tools 36 and 52 are pre-stored in the cutting device 2.

[0178] Figure 10 (A) is a perspective view showing a storage unit 200 for storing and replacing cutting tools 36, 52, etc. The storage unit 200 has a mounting section (mounting platform) 202 for holding the cutting tools 36, 52, etc. For example, the mounting section 202 is formed to support the workpiece 11 (see reference 15). Figure 1The plate-shaped component of the same shape, the upper surface of the mounting part 202 forms a flat mounting surface 202a for mounting cutting tools 36, 52, etc.

[0179] Multiple tool storage sections 204 for storing cutting tools are provided on the mounting surface 202a of the mounting section 202. For example, multiple tool storage sections 204 (tool storage section 204A) for storing hub-type cutting tools 36 and multiple tool storage sections 204 (tool storage section 204B) for storing washer-type cutting tools 52 are respectively disposed on the mounting surface 202a.

[0180] Figure 10 (B) is a perspective view showing the tool storage section 204. For example, the tool storage section 204 is composed of a plastic housing (tool shell) that houses the cutting tools 36 and 52, and is fixed to the mounting surface 202a of the mounting section 202. Figure 10 In (B), as an example, a tool storage section 204A (tool housing) is shown, which has a circular bottom surface and an annular sidewall that protrudes from the outer periphery of the bottom surface in a direction perpendicular to the bottom surface.

[0181] A columnar protrusion 204a protruding from the bottom surface is provided in the center of the tool storage section 204A. When the cutting tool 36 is stored in the tool storage section 204A, the cutting tool 36 is arranged in the tool storage section 204A such that the protrusion 204a is inserted into the opening 36a of the cutting tool 36. Similarly, when the cutting tool 52 is stored in the tool storage section 204B, the cutting tool 52 is arranged in the tool storage section 204B such that the protrusion 204a is inserted into the opening 52a of the cutting tool 52.

[0182] Additionally, a base storage section (press flange storage section) 206 for storing the base 62 is provided on the mounting surface 202a of the mounting section 202. The base storage section 206 is constructed in the same manner as the tool storage section 204, and the base 62 is housed in the base storage section 206.

[0183] In addition, the mounting section 202 may also store tools other than those for replacing the cutting tools 36 and 52. For example, a plate storage section (dressing plate storage section) 208 and a plate storage section (inspection plate storage section) 210 are provided on the mounting surface 202a of the mounting section 202. The plate storage section 208 stores a plate-shaped plate (dressing plate) 19 for dressing the cutting tools 36 and 52, and the plate storage section 210 stores a plate-shaped plate (inspection plate) 21 for inspecting the cutting tools 36 and 52.

[0184] When machining the workpiece 11 using cutting tools 36 and 52, the cutting tools 36 and 52 are intentionally worn at their tips to correct their shape or ensure their sharpness. This dressing is performed by having the cutting tools 36 and 52 cut into the plate 19 and form grooves in it. For example, the plate 19 is formed by fixing abrasive grains composed of green corundum (GC) or white corundum (WA) using a bonding material such as a resin binder or a ceramic binder.

[0185] During dressing, the mating material of the cutting tools 36 and 52 comes into contact with the plate 19 and wears. The shape of the cutting tools 36 and 52 is dressed to be concentric with the spindle 34 (rounding), and the abrasive grains are moderately exposed from the mating material (sharpening). By using the dressed cutting tools 36 and 52, the machining accuracy of the workpiece 11 is improved.

[0186] Furthermore, when machining the workpiece 11 using cutting tools 36 and 52, sometimes the cutting tools 36 and 52 are inserted into the plate 21 to check their shape or correct their position. For example, the cutting tools 36 and 52 are inserted into the plate 21, and the groove formed on the plate 21 is observed to check whether the front ends of the cutting tools 36 and 52 have the desired shape. In addition, based on the length of the groove formed on the plate 21, the position (depth of cut) of the lower end of the cutting tools 36 and 52 is calculated, and the height position of the cutting tools 36 and 52 is adjusted.

[0187] For example, a plate-shaped component (silicon plate) made of silicon can be used as plate 21. However, there are no restrictions on the material of plate 21 as long as it can be cut by cutting tools 36 and 52. Examples of materials for plate 21 are the same as those for workpiece 11.

[0188] The cutting tools 36 and 52 cut the plates 19 and 21 using a pair of chucks on the worktable 26 (see reference). Figure 1 This is performed while plates 19 and 21 are in their current state. At this time, plate 19 or plate 21, to be cut by cutting tools 36 or 52 mounted on one cutting unit 30, is held on one chuck table 26, and plate 19 or plate 21, to be cut by cutting tools 36 or 52 mounted on another cutting unit 30, is held on another chuck table 26. That is, a pair of chuck tables 26 are correspondingly arranged with a pair of cutting units 30.

[0189] However, the cutting tools 36 and 52 can also cut plates 19 and 21 via the chuck table 22 (see reference). Figure 1This is performed while plates 19 and 21 are held in place. In this case, for example, plates 19 and 21 are supported by the frame 15 via the belt 13, just like the workpiece 11. Moreover, plates 19 and 21 are attracted and held by the chuck table 22 via the belt 13.

[0190] Alternatively, identification marks containing information related to the various utensils stored on the mounting section 202 can be affixed. For example, in Figure 10 The cutting tool 36 shown in (B) has an identification mark 212 attached to it. Examples of identification marks 212 include barcodes and QR codes. Alternatively, the identification mark 212 can be printed directly on the cutting tool 36 or a sticker with the identification mark 212 can be affixed to the cutting tool 36.

[0191] For example, the identification marks attached to cutting tools 36 and 52 include information such as the type of cutting tools 36 and 52 (hub type or washer type), outer diameter, inner diameter, thickness, abrasive material and grit size, bonding material material, and serial number. Additionally, the identification marks attached to plate 19 include information such as the size and shape of plate 19, abrasive material and grit size, bonding material material, and serial number. Furthermore, the identification marks attached to plate 21 include information such as the size, shape, material, and serial number of plate 21.

[0192] The identification marks attached to the cutting tools 36, 52, etc., are read by the reading unit of the cutting device 2. The reading unit is appropriately selected according to the type of identification mark. For example, a camera, barcode reader, etc. can be used.

[0193] For example, the imaging unit 70 (see reference) is arranged adjacent to the cutting unit 30. Figure 1 It also functions as a reading unit, with the identification mark being read by the imaging unit 70. However, the reading unit can also be separated from the imaging unit 70 and independently installed within the cutting device 2.

[0194] The information read by the reading unit is input to the control unit 82 (see reference). Figure 1 The information is stored in the storage unit 82b. Then, when the control unit 82 performs operations such as changing the cutting tools 36 and 52, it determines the object held by the replacement unit 76 by referring to the information stored in the storage unit 82b.

[0195] The aforementioned storage unit 200 is housed in the container 8 (see reference 2) provided in the cutting device 2. Figure 1 Furthermore, the storage unit 200 is pulled out from the container 8 by the first conveying unit 72 and conveyed to, for example, the lid 78 in a closed state.

[0196] Additionally, a door (not shown) that can be opened and closed is provided on the side of the cleaning unit 12 of container 8. When the storage unit 200 is removed from container 8, the elevator 6 rises and falls so that the height position of container 8 is consistent with the height position of a pair of guide rails 16.

[0197] Furthermore, the shape of the mounting portion 202 of the storage unit 200 corresponds to the shape of the frame 15 that supports the workpiece 11. Therefore, by performing the same operation as when the frame unit 17 is moved onto the chuck table 22, the storage unit 200 can be moved onto the closed cover 78.

[0198] Furthermore, the storage unit 200 is not limited to being placed on the cover 78. For example, the storage unit 200 may also be placed on a pair of guide rails 16. Alternatively, the cover 78 may be omitted and the storage unit 200 may be placed on the chuck table 22.

[0199] Next, a specific example of the method for replacing the cutting tools 36 and 52 mounted on the cutting unit 30 of the cutting device 2 will be described. Additionally, as an example below, the cutting tool 36 mounted on the mounting flange 42 (see reference) will be described. Figure 2 The replacement method will be explained.

[0200] First, a replacement cutting tool 36 is placed on the mounting surface 202a of the mounting portion 202 of the storage unit 200 (preparation step). Specifically, replacement cutting tools 36 (unused cutting tools 36) are stored in multiple tool storage portions 204A fixed to the mounting surface 202a of the mounting portion 202. The storage unit 200, supplemented with replacement cutting tools 36, is housed in the container 8 (see reference). Figure 1 )middle.

[0201] Then, the storage unit 200 is pulled out of the container 8 by the first conveying unit 72 and conveyed to the closed cover 78. Thus, the replacement cutting tool 36 is held by the cover 78. Alternatively, as described above, the storage unit 200 can also be configured on a pair of guide rails 16 or on a chuck table 22.

[0202] Next, the replacement cutting tool 36 placed on the mounting surface 202a of the mounting section 202 is held by the holding part 150B of the replacement device 100 (replacement cutting tool holding step). Figure 11 (A) is a schematic diagram showing the replacement device 100 in the step of holding the replacement cutting tool.

[0203] In the tool changing and holding process, firstly, the lifting mechanism 86 and the multi-joint arm 90 (see reference) are used. Figure 4 and Figure 5The replacement device 100 is moved and positioned on the mounting portion 202 held by the cover 78, etc. Additionally, the rotation mechanism 104 (see reference) Figure 6 (etc.) rotate the frame 110 so that the holding part 150B is opposite to the mounting surface 202a of the mounting part 202.

[0204] Next, the replacement device 100 is lowered so that the holding part 150B comes into contact with the replacement cutting tool 36 stored in the tool storage part 204A. Then, the replacement cutting tool 36 is held in place by the holding part 150B.

[0205] Then, the changing device 100 is raised, and the holding part 150B is moved away from the mounting surface 202a of the mounting part 202. As a result, the cutting tool 36 for changing is lifted by the holding part 150B.

[0206] Next, remove the nut 48 from the mounting flange 42 of the cutting unit 30 (nut removal step). Figure 11 (B) is a schematic diagram showing the replacement device 100 during the nut removal step.

[0207] In the nut removal process, firstly, the lifting mechanism 86 and the multi-joint arm 90 (see reference) are used. Figure 4 and Figure 5 The changing device 100 is moved, and the changing device 100 is positioned in the processing chamber 28 (see reference). Figure 1 Inside. In addition, the nut holding part 122 of the replacement device 100 is positioned opposite the mounting flange 42 in the state where the cutting tool 36 and the nut 48 are installed.

[0208] Then, the nut 48 mounted on the mounting flange 42 is held and rotated by the nut retainer 122. Specifically, this is achieved by multiple holding members 134 (see reference 122). Figure 6 While holding the nut 48, the rotating component 130 (see reference) is driven by the rotation drive source 128. Figure 6 The nut 48 is rotated in the first direction (the direction in which the nut 48 loosens) by rotating the nut 48. As a result, the nut 48 loosens and is removed from the mounting flange 42.

[0209] Next, the nut retainer 122 is separated from the mounting flange 42 (first retraction step). Figure 11 (C) is a schematic diagram showing the replacement device 100 in the first retreat step.

[0210] In the first retreat step, via the multi-joint arm 90 (refer to...) Figure 4 and Figure 5The replacement device 100 is moved toward the side opposite to the mounting flange 42. As a result, the nut holding part 122 moves away from the mounting flange 42 while holding the nut 48.

[0211] Next, the cutting tool 36 mounted on the mounting flange 42 of the cutting unit 30 is held by the holding part 150A of the replacement device 100 (cutting tool holding step after use). Figure 11 (D) is a schematic diagram showing the replacement device 100 in the step of holding the cutting tool after use.

[0212] In the tool holding step after use, firstly, the rotating part 106 of the rotating mechanism 104 (see reference) is rotated. Figure 6 (etc.) are rotated so that the front side 150a side of the retaining part 150A (refer to) Figure 8 The (A) etc.) are positioned opposite the mounting flange 42. Then, the changing device 100 is moved toward the mounting flange 42 side, so that the holding part 150A contacts the used cutting tool 36 mounted on the mounting flange 42. Then, the used cutting tool 36 is attracted and held by the holding part 150A.

[0213] Next, the retaining part 150A is separated from the mounting flange 42 (second retraction step). Figure 12 (A) is a schematic diagram showing the replacement device 100 in the second retreat step.

[0214] In the second retreat step, via the multi-joint arm 90 (refer to...) Figure 4 and Figure 5 The replacement device 100 is moved toward the side opposite to the mounting flange 42. As a result, the holding part 150A moves away from the mounting flange 42 while holding the used cutting tool 36, thereby removing the used cutting tool 36 from the mounting flange 42.

[0215] Next, the replacement cutting tool 36 held in the holding part 150B of the replacement device 100 is installed on the mounting flange 42 (cutting tool installation step). Figure 12 (B) is a schematic diagram showing the replacement device 100 in the cutting tool installation step.

[0216] In the cutting tool installation step, firstly, the rotating part 106 of the rotating mechanism 104 (see reference) is rotated... Figure 6 (etc.) rotate, so that the front side 150a (refer to) of the holding part 150B that holds the replaceable cutting tool 36 is rotated. Figure 8 The (A) side is opposite to the mounting flange 42.

[0217] Then, the replacement device 100 is moved toward the mounting flange 42 side, so that the boss portion 46 of the mounting flange 42 (see reference) Figure 2 Insert into the opening 36a of the replacement cutting tool 36 (refer to...) Figure 2 The replaceable cutting tool 36 is configured in a manner that allows for easy replacement. In this state, when the retaining part 150B releases its attraction and retention of the replaceable cutting tool 36, the replaceable cutting tool 36 is mounted on the mounting flange 42.

[0218] Next, the retaining part 150B is separated from the mounting flange 42 (third retraction step). Figure 12 (C) is a schematic diagram showing the replacement device 100 in the third retreat step.

[0219] In the third retreat step, via the multi-joint arm 90 (refer to...) Figure 4 and Figure 5 The replacement device 100 is moved to the side opposite to the mounting flange 42. As a result, the holding part 150B moves away from the mounting flange 42 and moves away from the replacement cutting tool 36 mounted on the mounting flange 42.

[0220] Next, the nut 48 held by the nut retainer 122 is installed onto the mounting flange 42 (nut installation step). Figure 12 (D) is a schematic diagram showing the replacement device 100 in the nut installation step.

[0221] In the nut installation step, firstly, by rotating the rotating part 106 of the rotating mechanism 104 (refer to...) Figure 6 The nut holder 122, which holds the nut 48, is rotated so that it faces the mounting flange 42. Additionally, the replacement device 100 is moved toward the mounting flange 42, positioning the nut 48 against the boss portion 46 of the mounting flange 42 (see reference). Figure 2 The front end of ).

[0222] Then, the rotating component 130 (see reference) is driven by the rotation drive source 128. Figure 6 (etc.) rotate, thereby causing multiple gripping parts 134 (refer to) Figure 6 The nut 48, held by the flange 42, is rotated in the second direction (the direction in which the nut 48 is tightened). As a result, the nut 48 is tightened onto the boss portion 46 of the mounting flange 42 (see reference). Figure 2 The cutting tool 36 is mounted on the mounting flange 42. Thus, the cutting tool 36 is clamped and fixed to the front end of the spindle 34 by the mounting flange 42 and the nut 48.

[0223] Through the above process, the cutting tool 36 mounted on the mounting flange 42 is replaced. Furthermore, the used cutting tool 36 held in the holding part 150A is placed in the tool storage part 204A of the storage unit 200.

[0224] Furthermore, in the above-described process, the approach and separation of the mounting flange 42 from the replacement device 100 can also be achieved by moving the cutting unit 30 (mounting flange 42). For example, in the first retraction step, the second retraction step, and the third retraction step, the replacement device 100 and the mounting flange 42 can be separated by moving the cutting unit 30 away from the replacement device 100 along the Y-axis direction.

[0225] Furthermore, the replacement of the cutting tool 36 mounted on the mounting flange 42 has been described above, but the cutting tool 52 mounted on the mounting flange 54 (see reference) Figure 3 The replacement of the cutting tool 52 is also carried out through the same steps. However, when replacing the cutting tool 52, as described above, the base 62 and the cutting tool 52 are held together by the holding parts 150A and 150B (see reference). Figure 9 (B) That is, instead of replacing the cutting tool 36 mentioned above, the cutting tool 52 and the base 62 are replaced.

[0226] Furthermore, when changing the cutting tool 52, in the cutting tool holding step, after holding the base 62 with the holding part 150B, the cutting tool 36 is held with the holding part 150B. Specifically, firstly, the holding part 150B is connected to the base holding part 206 (see reference 150B). Figure 10 The base 62 in (A) is positioned opposite each other, and the base 62 is held by the holding part 150B.

[0227] Next, the holding part 150B, which holds the base 62 in its current state, and the tool storage part 204B (see reference) are then connected. Figure 10 The cutting tool 52 for replacement in (A) is positioned opposite to the base 62, and is held by the holding part 150B. At this time, the cutting tool 52 is held by the through hole 62d formed in the base 62 (see reference). Figure 9 The negative pressure of the suction source 160 acting on the cutting tool 52 is maintained by (B)).

[0228] As described above, the replacement device 100 can replace the used cutting tools 36 and 52 installed in the cutting unit 30 and stored in the tool storage section 204 (see reference). Figure 10 The cutting tools 36 and 52 are used for changing the cutting tools (A). As a result, the changing operation of the cutting tools 36 and 52 can be automated.

[0229] Furthermore, in addition to changing the cutting tools 36 and 52, the changing device 100 can also perform the changing of tools placed on the chuck table 22 or chuck table 26 (see reference). Figure 1 Used boards 19 and 21 are stored in board storage sections 208 and 210 (see reference). Figure 10Replacement of plates 19 and 21 for replacing (A). The operation of retaining parts 150A and 150B when replacing plates 19 and 21 will be explained below.

[0230] Plate 19 is cut by cutting tools 36 and 52 while held by chuck table 22 or chuck table 26. This allows for the dressing of cutting tools 36 and 52. Similarly, plate 21 is cut by cutting tools 36 and 52 while held by chuck table 22 or chuck table 26. Then, based on the grooves formed in plate 21, the cutting tools 36 and 52 are inspected.

[0231] When using plate 19 to dress cutting tools 36 and 52, grooves are formed on plate 19. Then, after grooves have been formed across the entire plate 19, the used plate 19 is replaced with a replacement plate 19 (unused plate 19). Similarly, the used plate 21 used for inspecting cutting tools 36 and 52 is also replaced with a replacement plate 21 (unused plate 21) at a predetermined time.

[0232] Here, the holding parts 150A and 150B of the replacement device 100 can hold not only the cutting tools 36 and 52, but also plate-shaped components such as plates 19 and 21. Moreover, plates 19 and 21 are replaced by the replacement device 100.

[0233] Figure 13 (A) is a perspective view showing the holding part 150A that holds the plate 19A. Figure 13 (B) is a cross-sectional view showing the retaining portion 150A that holds the plate 19A. The plate 19A is a large plate 19 having a shape and size capable of covering the entire front surface 150a (front surface 152a of the frame 152) of the retaining portion 150A. For example, the plate 19A is formed in a rectangular shape, and the length and width of the plate 19A are greater than the diameter of the frame 152. In addition, in Figure 13 In (A), for ease of explanation, only the outline of plate 19A is represented by a double-dotted line.

[0234] The region outside the radial direction of the first groove 152c in the front surface 152a of the frame 152 constitutes a plate support portion (plate support surface) 150h that supports the plate 19A. The plate support portion 152h is an annular flat surface that is approximately parallel to the radial direction of the frame 152. When the plate 19A is held by the holding portion 150A, the plate 19A contacts the plate support portion 152h and is supported by the plate support portion 152h.

[0235] In addition, such as Figure 13As shown in (B), the plate support portion 152h protrudes outward from the front end of the tool suction pad 154 (the front end of the pair of lips 154b) towards the outside of the retaining portion 150A. Specifically, the plate support portion 152h protrudes in the thickness direction of the frame 152 ( Figure 13 The plate support portion 152h is positioned on the left-right direction of the tool suction pad 154, closer to the front side 150a of the holding portion 150A than the front end of the tool suction pad 154. Furthermore, the plate support portion 152h is positioned on the outer side of the tool suction pad 154 in the radial direction.

[0236] When holding plate 19A using holding part 150A, holding part 150A is arranged such that the entire plate support part 152h contacts plate 19A. As a result, the first groove 152c is covered and blocked by plate 19A. Consequently, the interior of frame 152 (first groove 152c, second groove 152d, third groove 152e, suction path 152f, fourth groove 152g) is sealed. At this time, plate 19A does not contact tool suction pad 154 (see reference). Figure 13 (B)

[0237] In this state, when valve 158 is opened and the negative pressure of suction source 160 is applied to suction path 152f, the interior of frame 152 is depressurized, and plate 19A is attracted and held by holding part 150A. Then, plate 19A is supported by plate support part 152h without contacting tool suction pad 154 (non-contact suction).

[0238] Furthermore, the plate that can be held by the holding part 150A is not limited to the plate 19A described above. Figure 14 (A) is a perspective view showing the holding part 150A that holds the plate 19B. Figure 14 (B) is a cross-sectional view showing the holding part 150A that holds the plate 19B.

[0239] Plate 19B is a small plate 19 having a shape and size capable of covering only a portion of the front surface 150a (front surface 152a of frame 152) of the retaining part 150A. For example, plate 19B is formed in a rectangular shape, the length of plate 19B is greater than or equal to the diameter of frame 152, and the width of plate 19B is less than the diameter of the first groove 152c of frame 152. Furthermore, in Figure 14 In (A), for ease of explanation, the outline of plate 19B is represented by a double-dotted line.

[0240] When the plate 19B is held by the retaining part 150A, a plurality of protrusions 152i are provided on the front side 152a of the frame 152. The plurality of protrusions 152i are formed to protrude from the front side 152a of the frame 152 and are arranged at approximately equal intervals along the circumference of the frame 152. Furthermore, the front end face of the protrusions 152i is formed approximately parallel to the front side 152a of the frame 152, constituting a plate support (plate support surface) 152j for holding the plate 19B. Additionally, in Figure 14 (A) shows an example in which four protrusions 152i are provided in the frame 152, but there is no limit to the number of protrusions 152i.

[0241] When the retaining part 150A holds the plate 19B, the retaining part 150A is arranged such that the plate support part 152j of the plurality of protrusions 152i contacts the plate 19B. At this time, since the plate 19B does not contact the front surface 152a of the frame 152, the first groove 152c is not blocked by the plate 19B. Therefore, the interior of the frame 152 (first groove 152c, second groove 152d, third groove 152e, suction path 152f, fourth groove 152g) is not sealed.

[0242] Furthermore, the holding section 150A utilizes the Bernoulli effect to hold the plate 19B. Specifically, the holding section 150A is provided with a gas supply passage 152k for supplying gas such as air. For example, the gas supply passage 152k is formed such that one end is open inside the fourth groove 152g. Moreover, the other end of the gas supply passage 152k is connected to one end of a flow path 164 composed of a pipe, conduit, or the like.

[0243] The other end of flow path 164 is connected to gas supply source 168 via valve 166. For example, valve 166 is a solenoid valve that is electrically controlled for opening and closing. Gas supply source 168 supplies gas, such as air, to flow path 164 at a predetermined flow rate. When valve 166 is opened, gas is supplied from gas supply source 168 to gas supply path 152k via flow path 164, and gas is injected from gas supply path 152k into the inside of fourth groove 152g.

[0244] Furthermore, the gas supply path 152k is formed to be inclined radially relative to the inner wall of the fourth groove 152g. Therefore, the gas ejected from the gas supply path 152k flows in a swirling manner while colliding with the inner wall of the fourth groove 152g. This creates a swirling flow inside the frame 152. Moreover, the gas diffuses radially along the frame 152 while flowing spirally toward the front side 152a, and is ejected outward from the gap between the front side 152a of the frame 152 and the plate 19B.

[0245] The pressure at the center of the frame 152 is reduced by the swirling flow generated inside the frame 152 according to Bernoulli's theorem. As a result, the center of plate 19B is drawn closer to the interior of the frame 152, and plate 19B is held by the holding portion 150A. At this time, plate 19B is supported by multiple plate supports 152j without contacting the tool suction pad 154 (non-contact suction). Furthermore, rotation of plate 19B caused by the collision of the swirling flow with plate 19B is prevented by friction acting between plate 19B and the plate supports 152j.

[0246] As described above, by providing gas supply passages 152k, small plates 19 that cannot cover the entire front surface 150a of the holding portion 150A can be held. Furthermore, there is no limitation on the number of gas supply passages 152k provided in the frame 152. For example, multiple gas supply passages 152k that open approximately equally spaced along the circumferential direction of the inner wall of the fourth groove 152g may be provided in the frame 152.

[0247] Furthermore, the above description addresses the cases involving retaining plates 19A and 19B via retaining section 150A, but retaining section 150B (refer to...) Figure 6 Similarly, the holding parts 150A and 150B can also hold plates 21 of various sizes (see reference). Figure 10 (A) is maintained in the same manner as plates 19A and 19B.

[0248] Here, the plates 19 and 21 after use are mostly covered with chips (cutting chips) generated during cutting by the cutting tools 36 and 52. Therefore, assuming that the plates 19 and 21 are in contact with the tool suction pad 154, the cutting chips adhere to the tool suction pad 154, which can easily cause contamination and deterioration of the tool suction pad 154.

[0249] Furthermore, grooves are formed on the used plates 19 and 21 by the cutting tools 36 and 52, resulting in unevenness on the front surface of plates 19 and 21. Additionally, plate 19 contains abrasive grains, and fine unevenness is formed on the front surface of plate 19 by the abrasive grains exposed from the bonding material. Therefore, assuming that plates 19 and 21 are in contact with the tool suction pad 154, the unevenness of plates 19 and 21 can easily cause wear and damage to the tool suction pad 154.

[0250] However, when using retaining parts 150A and 150B, when retaining plates 19 and 21, plates 19 and 21 are supported by plate support parts 152h and 152j and do not contact the tool suction pad 154 (see reference). Figure 13 (B) and Figure 14(B) This prevents contamination and damage to the tool suction pad 154, and the tool suction pad 154 is maintained in a state that can properly hold the cutting tools 36 and 52.

[0251] Additionally, a gas supply path 152k (see reference) is provided. Figure 14 (A) and Figure 14 (B)) The retaining parts 150A and 150B are relative to plate 19A (refer to) Figure 13 (A) and Figure 13 In the case of (B) being held, the holding of plate 19A is also assisted by injecting gas from gas supply path 152k.

[0252] Specifically, with the plate 19A held by the holding parts 150A and 150B in the desired position, the valve 158 is closed to release the suction of the tool suction pad 154 on the plate 19A, and the valve 166 is opened to inject gas from the gas supply passage 152k toward the plate 19A. As a result, the plate 19A is pressed away from the holding parts 150A and 150B, and the plate 19A easily moves away from the tool suction pad 154.

[0253] Next, a specific example of a plate replacement method using the replacement device 100 will be described. Hereinafter, as an example, the case of replacing the plate 19 placed on the chuck worktable 26 will be described.

[0254] First, in storage unit 200 (refer to...) Figure 10 (A)) The replacement plate 19 is placed on the mounting surface 202a of the mounting section 202 (preparation step). Specifically, the replacement plate 19 (unused plate 19) is stored in the plate storage section 208 fixed to the mounting surface 202a of the mounting section 202. The storage unit 200, which is supplemented with the replacement plate 19, is stored in the container 8 (see reference). Figure 1 ).

[0255] Then, the storage unit 200 is pulled out of the container 8 by the first transfer unit 72 and transferred to the closed cover 78. A replacement plate 19 is thus prepared on the cover 78. Alternatively, the storage unit 200 can also be mounted on a pair of guide rails 16 or on a chuck table 22.

[0256] Next, the replacement plate 19 placed on the mounting surface 202a of the mounting section 202 is held by the holding part 150B of the replacement device 100 (replacement plate holding step). Figure 15 (A) is a schematic diagram showing the replacement device 100 in the replacement plate holding step.

[0257] In the plate replacement procedure, firstly, the lifting mechanism 86 and the multi-joint arm 90 (see reference) are used. Figure 4 and Figure 5 The replacement device 100 is moved and positioned on the mounting portion 202 held by the cover 78, etc. Additionally, the rotation mechanism 104 (see reference) Figure 6 (etc.) rotate the frame 110 so that the holding part 150B is opposite to the mounting surface 202a of the mounting part 202.

[0258] Next, the replacement device 100 is lowered so that the holding part 150B comes into contact with the replacement plate 19 disposed on the mounting surface 202a of the mounting part 202. Then, the replacement plate 19 is attracted and held by the holding part 150B.

[0259] Furthermore, when the replacement plate 19 can cover the entire plate support portion 152h of the holding portion 150B, the replacement plate 19 is held by the attractive force of the attraction source 160 (see reference). Figure 13 (A) and Figure 13 (B)). On the other hand, if the replacement plate 19 cannot cover the entire plate support portion 152h of the holding portion 150B, gas is supplied from the gas supply source 168 to the gas supply path 152k, and the replacement plate 19 is held by the Bernoulli effect (see reference). Figure 14 (A) and Figure 14 (B)

[0260] Then, the replacement device 100 is raised, and the holding part 150B is moved away from the mounting surface 202a of the mounting part 202. As a result, the replacement plate 19 is lifted by the holding part 150B.

[0261] Next, the used plate 19 held on the chuck table 26 is held by the holding part 150A of the replacement device 100 (used plate holding step). Figure 15 (B) is a schematic diagram showing the replacement device 100 in the plate retention step after use.

[0262] After using the plate holding procedure, firstly, the lifting mechanism 86 and the multi-joint arm 90 (see reference) Figure 4 and Figure 5 The replacement device 100 is moved and positioned on the chuck worktable 26 on which the used plate 19 is located. Additionally, by rotating the rotating part 106 of the rotating mechanism 104 (see reference...) Figure 6 (etc.) rotate to make the holding part 150A face the chuck worktable 26.

[0263] Then, the changing device 100 is moved toward the chuck table 26, so that the holding part 150A contacts the used plate 19 held by the chuck table 26. Then, the used plate 19 is attracted and held by the holding part 150A.

[0264] Furthermore, if the used plate 19 can cover the entire plate support portion 152h of the holding portion 150A, the used plate 19 is held by the attractive force of the attraction source 160 (see reference). Figure 13 (A) and Figure 13 (B)). On the other hand, if the used plate 19 cannot cover the entire plate support portion 152h of the holding portion 150A, gas is supplied from the gas supply source 168 to the gas supply path 152k, and the used plate 19 is held by the Bernoulli effect (see reference). Figure 14 (A) and Figure 14 (B)

[0265] Next, the retaining part 150A is separated from the chuck table 26 (retraction step). Figure 15 (C) is a schematic diagram showing the replacement device 100 during the retreat step.

[0266] During the retreating step, via the lifting mechanism 86 (see reference) Figure 4 and Figure 5 The changing device 100 is raised and moved toward the side opposite to the chuck table 26. As a result, the holding part 150A moves away from the chuck table 26 while holding the used plate 19, and the used plate 19 is lifted.

[0267] Next, the replacement plate 19 held by the holding part 150B of the replacement device 100 is placed on the chuck worktable 26 (placement step). Figure 15 (D) is a schematic diagram showing the replacement device 100 in the loading step.

[0268] In the loading step, firstly, the rotating part 106 of the rotating mechanism 104 (see reference) is rotated... Figure 6 The device is rotated so that the holding part 150B holding the replacement plate 19 is aligned with the chuck table 26. Then, the replacement device 100 is moved toward the chuck table 26 to position the replacement plate 19 on the chuck table 26. Afterward, when the holding part 150B releases its attraction to the replacement plate 19, the replacement plate 19 is placed on the chuck table 26.

[0269] The plate 19 configured on the chuck worktable 26 is replaced using the above steps. Furthermore, the used plate 19 held in the holding section 150A is placed in the plate storage section 208 of the storage unit 200. While the replacement of plate 19 has been described above, the replacement of plate 21 can also be performed using the same steps if plate 21 is mounted on the chuck worktable 26.

[0270] Furthermore, as described above, the storage unit 200 (see reference) of the mounting section 202 for various tools (cutting tools 36, 52, base 62, plates 19, 21, etc.) used in the cutting device 2 is also described. Figure 10 (A) is stored in container 8 (see reference). Figure 1 It was then moved to Cover 78 (see reference). Figure 1 Examples such as those provided have been given. However, the storage method for cutting tools such as 36 and 52 is not limited to this.

[0271] Figure 16 This is a perspective view showing the cutting device 2 equipped with a storage unit 250. Figure 16 The cutting device 2 shown has a storage unit 250 instead of a container 8 (see reference). Figure 1 The storage unit 250 is located near the replacement unit 76 and stores various tools used in the cutting device 2. For example, the storage unit 250 is located in an area adjacent to the opening 4b of the base 4.

[0272] Storage unit 250 stores the cutting tools 36, 52, base 62, and plates 19, 21 used in cutting device 2 (see reference). Figure 10 (A) and other utensils. Specifically, the storage unit 250 has a rotating mounting section (mount) 252 for holding various utensils.

[0273] Figure 17 This is a perspective view showing a storage unit 250 having a rotating mounting section 252. For example, the mounting section 252 is a plate-shaped component formed in the shape of a disc, and the upper surface of the mounting section 252 forms a flat mounting surface 252a for mounting various utensils.

[0274] Cutting tools and the like are mounted on the mounting surface 252a of the mounting section 252. Figure 17 As an example, a case is shown in which a cutting tool 52 and a base 62 are mounted on the mounting surface 252a of the mounting portion 252.

[0275] Multiple tool storage sections 254 for storing cutting tools 52 and pressing flange storage sections 256 of storage base 62 are fixed on the mounting surface 252a of the mounting section 252. Furthermore, the structures of the tool storage sections 254 and the pressing flange storage sections 256 are respectively... Figure 10 The tool storage section 204 and the base storage section 206 shown in (A) are the same. The tool storage section 254 and the pressing flange storage section 256 are arranged at approximately equal intervals along the circumference of the mounting section 252.

[0276] A rotating part (shaft) 258 is connected to the lower surface of the central part of the mounting part 252. It rotates by power transmitted from a rotary drive source (not shown) such as an electric motor. When the rotating part 258 is rotated by the rotary drive source, the mounting part 252 rotates about a rotation axis that is approximately parallel to the Z-axis.

[0277] A reading unit 260 is provided on the lower side of the mounting portion 252. This reading unit 260 reads identification marks attached to the cutting tool 52, etc. For example, the cutting tool 52 has an identification mark containing information related to the cutting tool 52 attached to it (see reference). Figure 10 (B) Identification mark 212). Moreover, the cutting tool 52 is stored in the tool storage section 254 with the surface with the identification mark facing the mounting surface 252a.

[0278] The reading unit 260, for example, is composed of a visible light camera or an infrared camera, and reads the identification mark attached to the cutting tool 52 across the mounting part 252 and the tool storage part 254. Therefore, the materials of the mounting part 252 and the tool storage part 254 are selected according to the type of reading unit 260.

[0279] For example, if the reading unit 260 is a visible light camera, the entirety or a portion of the mounting section 252 and the tool storage section 254 may be constructed using components that allow visible light to pass through. Specifically, the mounting section 252 may be constructed using a substrate made of a transparent material such as plastic or glass (e.g., quartz glass, borosilicate glass). Furthermore, the tool storage section 254 may be constructed using a housing made of a transparent material such as plastic.

[0280] However, the materials of the mounting section 252 and the tool storage section 254 can be appropriately changed depending on the type of reading unit 260. For example, if the reading unit 260 is an infrared camera, the mounting section 252 and the tool storage section 254 can be made of components that allow infrared light to pass through.

[0281] The reading unit 260 is positioned directly below a tool storage section 254. The reading unit 260 then reads the identification mark attached to the cutting tool 52 stored in the tool storage section 254 positioned directly above the reading unit 260.

[0282] Furthermore, by rotating the mounting section 252, the tool storage section 254, positioned directly above the reading unit 260, can be changed. This allows the reading of identification marks attached to any cutting tool 52 mounted on the mounting section 252. The information from the identification marks read by the reading unit 260 is output to the control unit 82 (see reference). Figure 16 ).

[0283] Alternatively, the reading unit 260 may be disposed on the upper side of the mounting section 252. In this case, the cutting tool 52 is stored in the tool storage section 254 with its identification mark attached facing upwards.

[0284] For example, when changing the cutting tool 52, the replacement cutting tool 52 and the base 62 are prepared in the storage unit 250. Then, the replacement unit 76 uses the replacement device 100 to hold the replacement cutting tool 52 and the base 62 stored in the storage unit 250 (see reference). Figure 9 (B)

[0285] At this time, the control unit 82 controls the replacement unit 76 based on the information contained in the identification mark attached to the cutting tool 52, so that the specified cutting tool 52 is held in the replacement device 100. Thus, the desired cutting tool 52 can be selected as the replacement cutting tool 52. Then, the used cutting tool 52 and base 62 mounted on the cutting unit 30 are replaced with the replacement cutting tool 52 and base 62 (see reference). Figure 11 (A) Figure 12 (D)).

[0286] Alternatively, it can be fixed on the mounting surface 252a of the mounting portion 252. Figure 10 The plate storage sections 208 and 210 are shown in (A). In this case, replacement plates 19 and 21 are also stored in the storage unit 250. Moreover, the replacement unit 76 can hold the replacement plates 19 and 21 stored in the storage unit 250 and replace them with the used plates 19 and 21 placed on the chuck worktable 26 (see reference). Figure 15 (A) Figure 15 (D)).

[0287] As described above, the cutting apparatus 2 of this embodiment includes a replacement device 100 capable of replacing the cutting tools 36, 52 and the plates 19, 21. This allows for automatic replacement of not only the cutting tools 36, 52, but also the plates 19, 21, simplifying the plate replacement process. Furthermore, the replacement device 100 includes holding portions 150A and 150B for holding the cutting tools 36, 52 and the plates 19, 21. This eliminates the need for separate mechanisms for holding the cutting tools 36, 52 and the plates 19, 21, thus preventing an increase in the size of the cutting apparatus 2.

[0288] Furthermore, the retaining portions 150A and 150B of the aforementioned replacement device 100 can hold the plates 19 and 21 without them coming into contact with the tool suction pad 154. This prevents contamination and damage to the tool suction pad 154.

[0289] Furthermore, the structure and method of the above embodiments can be appropriately modified to be implemented without departing from the purpose of the present invention.

Claims

1. A cutting device that uses a cutting tool to cut a workpiece, characterized in that, The cutting device has the following features: A chuck table that holds a plate with a groove formed by the cutting tool. A cutting unit having a spindle and a mounting flange fixed to the front end of the spindle and for mounting the cutting tool; and The replacement device replaces the cutting tool mounted on the mounting flange and the cutting tool stored in the tool storage section, and also replaces the plate placed on the chuck table and the plate stored in the plate storage section. The replacement device has a retaining part that attracts and holds the cutting tool and the plate. The retaining part has: A frame having a plurality of protrusions on its front side in the thickness direction, the plurality of protrusions being formed to protrude from the front of the frame and arranged at approximately equal intervals along the circumference of the frame, the front end faces of the plurality of protrusions being formed approximately parallel to the front of the frame. A tool attraction pad that contacts the cutting tool or a base for fixing the cutting tool to attract and retain the cutting tool; as well as The plate support portion, which is formed by the front end faces of the plurality of protrusions, protrudes towards the front side of the retaining portion from the front end of the tool suction pad to support the plate. The plate, held by the holding part, is supported by the plate support part without contacting the tool suction pad.

2. The cutting device according to claim 1, characterized in that, The retaining part has a suction path connected to a suction source or a gas supply path connected to a gas supply source. The suction path or the gas supply path is connected to the side of the retaining part opposite to the cutting tool or the plate.

3. The cutting device according to claim 1 or 2, characterized in that, The replacement device has two of these retaining parts. The retaining part holds the cutting tool mounted on the mounting flange or the plate placed on the chuck table. Another holding part holds the cutting tool stored in the tool holding part or the plate stored in the plate holding part.

4. The cutting device according to claim 1 or 2, characterized in that, The cutting tool has an annular gripping portion and a cutting edge formed on the outer periphery of the gripping portion. The retaining part applies negative pressure to the holding part to attract and retain it.

5. The cutting device according to claim 1 or 2, characterized in that, The base has a first surface, a second surface that supports the cutting tool, and a through hole extending from the first surface to the second surface. The retaining part applies negative pressure to the first surface to attract and retain the base, and applies negative pressure to the second surface through the through hole to attract and retain the cutting tool.

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