Touch substrate, manufacturing method thereof, and display panel
By designing touch electrodes and pressure electrodes arranged on the same layer in the display device and transmitting electrical signals using the piezoelectric material layer, the problem of large thickness of the touch panel in the prior art is solved, and the effect of reducing the thickness of the display device is achieved, while ensuring good display effect.
Patent Information
- Application Number
- CN202111553045.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-17
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2041-12-17
AI Technical Summary
The existing display device with touch control function has a large thickness due to the large thickness of the touch panel integrated with a pressure sensor, resulting in an increase in the overall display device thickness.
A touch substrate is designed, including a substrate, a touch electrode and a pressure electrode arranged in the same layer and the same material, and a piezoelectric material layer electrically connected to the pressure electrode. With this structure, the pressure electrode can serve as a virtual electrode of the touch electrode, realizing the transmission of electrical signals and detection of pressing pressure degrees.
This technical solution effectively reduces the thickness of the touch substrate, thereby reducing the overall thickness of the display device integrated with the touch substrate, and ensuring good display effect.
Smart Images

Figure CN114201077B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of display technology, and in particular to a touch control substrate and a manufacturing method thereof, and a display panel. Background Art
[0002] With the development of display technology, more and more display devices have a touch function, and users can interact with the display devices by touch.
[0003] At present, a display device with a touch function may include: a display panel, and a touch panel located on the light-emitting side of the display panel. In order to enrich the interaction between the user and the display device, a pressure sensor is integrated in the touch panel, so that the touch panel can not only locate the user's pressing position, but also detect the user's pressing force. In this way, the user can interact with the display device not only by touching it, but also by applying different pressing forces to the display device.
[0004] However, the thickness of the touch panel integrated with the pressure sensor is usually large, which results in a large thickness of the display device integrated with the touch panel. Summary of the invention
[0005] The embodiment of the present application provides a touch control substrate and a manufacturing method thereof, and a display panel, which can solve the problem of large thickness of the display device in the prior art. The technical solution is as follows:
[0006] In one aspect, a touch control substrate is provided, comprising:
[0007] A substrate; a plurality of touch electrodes and a plurality of pressure electrodes located on the substrate, the plurality of touch electrodes being arranged in the same layer and made of the same material as at least some of the plurality of pressure electrodes, the orthographic projection of the touch electrodes on the substrate not overlapping the orthographic projection of the pressure electrodes on the substrate; and a piezoelectric material layer electrically connected to the plurality of pressure electrodes, the piezoelectric material layer being configured to generate a charge change after being subjected to a pressing force to form an electrical signal that can be transmitted through the pressure electrodes.
[0008] Optionally, the plurality of pressure electrodes are arranged in the same layer as the touch electrodes and are made of the same material;
[0009] The piezoelectric material layer is located on a side of the plurality of pressure electrodes away from the substrate.
[0010] Optionally, the plurality of pressure electrodes are arranged in a plurality of rows and a plurality of columns, and the touch control substrate further comprises: a first connection line electrically connected to a row of the pressure electrodes, and a second connection line electrically connected to a column of the pressure electrodes;
[0011] Wherein, at least part of the first connecting lines and at least part of the second connecting lines are arranged in different layers.
[0012] Optionally, the plurality of pressure electrodes correspond one-to-one to the plurality of touch electrodes, the touch electrodes are ring electrodes, and the pressure electrodes are located in an area surrounded by the corresponding touch electrodes;
[0013] One of the first connecting wire and the second connecting wire includes: a jumper wire and a connecting wire body connected to each other, the jumper wire and the touch electrode are arranged in a different layer, and the jumper wire is connected to the pressure electrode, the connecting wire body and the touch electrode are arranged in the same layer and made of the same material, and the jumper wire is arranged in the same layer and made of the same material as the other one of the first connecting wire and the second connecting wire.
[0014] Optionally, the multiple pressure electrodes include: multiple first pressure electrodes and multiple second pressure electrodes, the multiple first pressure electrodes are arranged in the same layer and made of the same material as the multiple touch electrodes, the multiple second pressure electrodes are arranged in different layers from the multiple touch electrodes, the multiple first pressure electrodes correspond to the multiple second pressure electrodes one by one, and the orthographic projection of the first pressure electrode on the substrate overlaps with the orthographic projection of the second pressure electrode on the substrate;
[0015] The piezoelectric material layer is located between the plurality of first pressure electrodes and the plurality of second pressure electrodes.
[0016] Optionally, the multiple first pressure electrode arrays are arranged in multiple rows, the multiple second pressure electrode arrays are arranged in multiple rows, and the touch substrate also includes: a third connecting line electrically connected to a row of the first pressure electrodes, and a fourth connecting line electrically connected to a row of the second pressure electrodes; wherein the second pressure electrodes and the fourth connecting line are arranged in the same layer and made of the same material.
[0017] Optionally, the multiple first pressure electrodes correspond one-to-one to the multiple touch electrodes, the touch electrodes are annular electrodes, the first pressure electrodes are located in the area surrounded by the corresponding touch electrodes, and the third connecting line is arranged in the same layer as the second pressure electrode and is made of the same material.
[0018] Optionally, the touch control substrate further includes: an insulating layer which is arranged on the same layer as the piezoelectric material layer but is made of a different material.
[0019] Optionally, the piezoelectric material layer includes: a plurality of piezoelectric portions corresponding to the plurality of pressure electrodes, and an orthographic projection of one of the piezoelectric portions on the substrate overlaps with an orthographic projection of at least one corresponding pressure electrode on the substrate.
[0020] Optionally, the piezoelectric material layer is made of a transparent piezoelectric material, and the piezoelectric portion is a block-shaped piezoelectric portion; or, the piezoelectric material layer is made of a non-transparent piezoelectric material, and the piezoelectric portion is a grid-shaped piezoelectric portion.
[0021] Optionally, the plurality of touch electrodes and the plurality of pressure electrodes are both made of metal materials, and the touch electrodes and the pressure electrodes are both grid-shaped electrodes.
[0022] In another aspect, a method for manufacturing a touch control substrate is provided, the method comprising:
[0023] forming a plurality of touch electrodes and a plurality of pressure electrodes on a substrate, wherein the plurality of touch electrodes and at least part of the plurality of pressure electrodes are provided in the same layer and made of the same material, and the orthographic projection of the touch electrodes on the substrate does not overlap with the orthographic projection of the pressure electrodes on the substrate;
[0024] A piezoelectric material layer electrically connected to the plurality of pressure electrodes is formed on the substrate, and the piezoelectric material layer is configured to generate a charge change after being subjected to a pressing force to form an electrical signal that can be transmitted through the pressure electrodes.
[0025] In yet another aspect, a display panel is provided, comprising: a display substrate, and a touch substrate located at a light emitting side of the display substrate, wherein the touch substrate is any of the touch substrates described above.
[0026] Optionally, the display substrate includes: a backplane, a light-emitting device located on the backplane, and an encapsulation layer located on a side of the light-emitting device away from the backplane; wherein the encapsulation layer is a substrate in the touch substrate.
[0027] Optionally, when the touch electrodes and the pressure electrodes are both grid-shaped electrodes, the orthographic projection of the light-emitting device on the back plate is located within a grid hole in the orthographic projection of the grid-shaped electrode on the back plate.
[0028] The beneficial effects brought by the technical solution provided by the embodiment of the present application include at least:
[0029] A touch control substrate includes: a substrate, a touch control electrode, a pressure electrode and a piezoelectric material layer. Since there is no connection between the touch control electrode and the pressure electrode, and the touch control electrode and the pressure electrode are arranged in the same layer, the pressure electrode can be used as a virtual electrode of the touch control electrode, that is, the pressure electrode and the virtual electrode are reused. In this way, by arranging the pressure electrode and the touch control electrode in the same layer, the thickness of the touch control substrate can be reduced while ensuring that the display effect of the display device integrated with the touch control substrate is good, thereby reducing the thickness of the display device. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0031] Figure 1 It is a structural schematic diagram of a touch panel provided by the related technology;
[0032] Figure 2 is a schematic diagram of a film layer structure of a touch control substrate provided in an embodiment of the present application;
[0033] Figure 3 is a schematic diagram of a piezoelectric material layer provided in an embodiment of the present application;
[0034] Figure 4 is a partial top view of a touch control substrate provided in an embodiment of the present application;
[0035] Figure 5 is a schematic diagram of a film layer structure of another touch control substrate provided in an embodiment of the present application;
[0036] Figure 6 yes Figure 5 The schematic diagram of the touch substrate sensing the pressing force is shown;
[0037] Figure 7 is a top view of a plurality of pressure electrodes in a touch control substrate provided in an embodiment of the present application;
[0038] Figure 8 is a partial top view of another touch control substrate provided in an embodiment of the present application;
[0039] Fig. 9 is a schematic diagram of a film layer structure of another touch control substrate provided in an embodiment of the present application;
[0040] Fig.10 yes Fig. 9 The schematic diagram of the touch substrate sensing the pressing force is shown;
[0041] Fig.11 is a partial top view of a third conductive layer provided in an embodiment of the present application;
[0042] Fig.12 is a partial top view of a fourth conductive layer provided in an embodiment of the present application;
[0043] Fig.13 is a partial top view of a film layer located between a third conductive layer and a fourth conductive layer provided in an embodiment of the present application;
[0044] Fig.14 This is an embodiment of the present application. Fig.11 , Fig.12 and Fig.13 A partial top view of the film layer stack is shown;
[0045] Fig.15 is a partial top view of another film layer located between the third conductive layer and the fourth conductive layer provided in an embodiment of the present application;
[0046] Fig.16 The display panel provided in the embodiment of the present application integrates the above Fig. 9 A schematic structural diagram of a touch control substrate shown;
[0047] Fig.17 The display panel provided in the embodiment of the present application integrates the above Figure 5 The structural schematic diagram of the touch substrate is shown. DETAILED DESCRIPTION
[0048] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.
[0049] At present, a display device with a touch function may include: a display panel, and a touch panel located on the light-emitting side of the display panel. In order to enrich the interaction between the user and the display device, a pressure sensor is usually integrated in the touch panel so that the touch panel also has the function of detecting different degrees of pressing force applied by the user to the display device.
[0050] In related art, please refer to Figure 1 , Figure 1 The touch panel 00 may include: a substrate 01 , a touch electrode layer 02 and a pressure sensor 03 on the substrate 01 , and an insulating layer 04 between the touch electrode layer 02 and the pressure sensor 03 .
[0051] The pressure sensor 03 may include: a first pressure electrode 031 and a second pressure electrode 032 that are arranged opposite to each other, and a piezoelectric material layer 033 located between the first pressure electrode 031 and the second pressure electrode 032 .
[0052] When the piezoelectric material layer 033 in the pressure sensor 03 is subjected to pressure, a charge change occurs, thereby forming an electrical signal that can be transmitted through the first pressure electrode 031 and the second pressure electrode 032. The touch panel can determine the magnitude of the pressure applied to the piezoelectric material layer 033 by detecting the electrical signal transmitted by the first pressure electrode 031 and the second pressure electrode 032.
[0053] However, the thickness of the touch panel 00 integrated with the pressure sensor 03 is usually large, which in turn leads to a large thickness of the display device integrated with the touch panel 00 .
[0054] Please refer to Figure 2 , Figure 2 Schematic diagram of a film structure of a touch substrate provided in an embodiment of the present application. The touch substrate 000 may include: a substrate 100, a touch electrode 200, a pressure electrode 300 and a piezoelectric material layer 400.
[0055] The substrate 100 may be a glass substrate or an encapsulation layer in a display substrate. For example, when the touch substrate 000 is connected to the display substrate by bonding, the substrate 100 of the touch substrate 000 may be a glass substrate; when the touch substrate 000 is integrated with the display substrate, the substrate 100 of the touch substrate 000 may be an encapsulation layer in the display substrate.
[0056] The multiple touch electrodes 200 and the multiple pressure electrodes 300 in the touch substrate 000 are located on the substrate 100, and at least part of the multiple touch electrodes 200 and the multiple pressure electrodes 300 are arranged in the same layer and made of the same material, and the orthographic projection of the touch electrode 200 on the substrate 100 does not overlap with the orthographic projection of the pressure electrode 300 on the substrate 100. In this way, the touch electrode 200 and the pressure electrode 300 are insulated from each other, that is, there is no connection between the two, which ensures that the touch electrode 200 and the pressure electrode 300 can work normally.
[0057] The piezoelectric material layer 400 is electrically connected to the plurality of pressure electrodes 300 , and the piezoelectric material layer 400 is configured to generate a charge change after receiving a pressing force, so as to form an electrical signal that can be transmitted through the pressure electrodes 300 .
[0058] For examples, please refer to Figure 3 , Figure 3 : is a schematic diagram of a piezoelectric material layer provided in an embodiment of the present application. When the piezoelectric material layer 400 is not subjected to a pressing force F, no charge is generated on the surface of the piezoelectric material layer 400. In this way, the pressure electrode 300 has no electrical signal output. When the piezoelectric material layer 400 is subjected to a pressing force F, in the area where the piezoelectric material layer 400 is pressed, a positive charge is generated on the side close to the pressing force F, and a negative charge is generated on the side away from the pressing force F. In this way, the pressure electrode 300 can transmit an electrical signal.
[0059] The magnitude of the pressing force on the piezoelectric material layer 400 is positively correlated with the amount of charge generated by the piezoelectric material layer 400. Thus, after the touch substrate 000 is pressed, the piezoelectric material layer 400 in the pressed area of the touch substrate 000 generates a corresponding charge change, and the touch substrate 000 determines the magnitude of the pressing force on the touch substrate 000 by detecting the electrical signal transmitted by the pressure electrode 300.
[0060] In this case, when the touch substrate 000 is integrated into the display device, the user's pressing position can be located through the touch electrode 200 in the touch substrate 000, so that the user can interact with the display device by touching; the user's pressing force can be detected through the pressure electrode 300 and the piezoelectric material layer 400 in the touch substrate 000, so that the user can interact with the display device by pressing.
[0061] In the examples of this application, please refer to Figure 4 , Figure 4 It is a partial top view of a touch substrate provided in an embodiment of the present application. A plurality of virtual electrodes 500 arranged in the same layer as the plurality of touch electrodes 200 are usually distributed in the touch substrate 000, and the plurality of touch electrodes 200 and the plurality of virtual electrodes 500 are evenly distributed on the substrate 100, and there is no connection relationship between the touch electrodes 200 and the virtual electrodes 500. The plurality of virtual electrodes 500 can balance the visual effect, and the plurality of virtual electrodes 500 can also reduce the probability of generating moiré due to optical interference, thereby ensuring that the overall uniformity of the touch substrate 000 is good, and effectively improving the display effect of the display device integrated with the touch substrate 000.
[0062] In the present application, since there is no connection between the touch electrode 200 and the pressure electrode 300, and the touch electrode 200 and the pressure electrode 300 are arranged in the same layer, the pressure electrode 300 can be used as the virtual electrode 500 of the touch electrode 200, that is, the pressure electrode 300 and the virtual electrode 500 are reused. In this way, the thickness of the touch substrate 000 can be ensured to be small.
[0063] In summary, the embodiment of the present application provides a touch substrate, including: a substrate, a touch electrode, a pressure electrode and a piezoelectric material layer. Since there is no connection between the touch electrode and the pressure electrode, and the touch electrode and the pressure electrode are arranged in the same layer. Therefore, the pressure electrode can be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are reused. In this way, by arranging the pressure electrode and the touch electrode in the same layer, the thickness of the touch substrate can be reduced while ensuring that the display effect of the display device integrated with the touch substrate is good, and then the thickness of the display device can be reduced.
[0064] In the embodiments of the present application, Figure 4 As shown, each touch electrode 200 in the touch substrate 000 is a ring electrode, the pressure electrode 300 can be located in the area surrounded by the ring electrode, and the pressure electrode 300 is in a block shape as a whole.
[0065] In the present application, the multiple touch electrodes 200 and the multiple pressure electrodes 300 in the touch substrate 000 are made of metal materials, and the touch electrodes 200 and the pressure electrodes 300 are both grid-shaped electrodes. That is, the touch electrodes 200 are grid-shaped ring electrodes, and the pressure electrodes 300 are grid-shaped block electrodes.
[0066] For example, when the touch substrate 000 is integrated into the display device, the orthographic projection of the light emitting device in the display device on the substrate 100 is located in the grid holes in the orthographic projection of the grid-shaped electrode on the substrate 100. In this way, the light emitted by the light emitting device can pass through the grid holes in the grid-shaped electrode and then be emitted, so that the touch electrode 200 and the pressure electrode 300 made of metal material will not affect the normal display of the display device.
[0067] In other possible implementations, the multiple touch electrodes 200 and the multiple pressure electrodes 300 in the touch substrate 000 are all made of transparent conductive materials. In this case, the touch electrodes 200 are transparent ring electrodes, and the pressure electrodes 300 are transparent block electrodes.
[0068] In the embodiments of the present application, Figure 4 As shown, the multiple touch electrodes 200 in the touch substrate 000 include: multiple touch driving electrodes 201 and multiple touch sensing electrodes 202. The multiple touch driving electrodes 201 are arranged in multiple rows, and every two adjacent touch driving electrodes 201 in each row of touch driving electrodes 201 can be connected through a touch driving signal line Tx; the multiple touch sensing electrodes 202 are arranged in multiple columns, and every two adjacent touch sensing electrodes 202 in each column of touch sensing electrodes 202 can be connected through a touch sensing signal line Rx. In addition, the touch driving signal line Tx and the touch sensing signal line Rx are arranged in different layers, so that it can be ensured that the touch driving signal line Tx and the touch sensing signal line Rx will not be short-circuited.
[0069] In the present application, there are multiple possible implementations of the distribution of the pressure electrodes 300 in the touch substrate 000 . The present application embodiment is schematically described with the following two possible implementations.
[0070] For the first optional implementation, please refer to Figure 5 , Figure 51 is a schematic diagram of the film layer structure of another touch substrate provided in an embodiment of the present application. The multiple pressure electrodes 300 are arranged in the same layer as the touch electrodes 200 and are made of the same material. That is, all the pressure electrodes 300 and all the touch electrodes 200 are formed by a single patterning process. The piezoelectric material layer 400 can be located on a side of the multiple pressure electrodes 300 away from the substrate 100, and the piezoelectric material layer 400 is electrically connected to each of the pressure electrodes 300.
[0071] For examples, please refer to Figure 6 , Figure 6 yes Figure 5 The schematic diagram of the touch substrate sensing the pressing force is shown. The pressure electrode 300 in the touch substrate 000 can be electrically connected to the pressure sensing chip 001. After the piezoelectric material layer 400 in the touch substrate 000 is subjected to the pressing force, the piezoelectric material layer 400 can generate a charge change, and the touch substrate 000 transmits an electrical signal through the pressure electrode 300 electrically connected to the piezoelectric material layer 400, and the electrical signal can be transmitted to the pressure sensing chip 001 through the pressure electrode 300. In this process, since the piezoelectric material layer 400 is subjected to the pressure, the charges generated on both sides of the piezoelectric material layer 400 are the same in size and opposite in charge properties. Therefore, the pressure sensing chip 001 only needs to collect the electrical signal generated on one side of the piezoelectric material layer 400 through the pressure electrode 300, and then perform differential processing with the ground signal terminal GND, so as to obtain the size of the voltage difference △V1 on both sides of the piezoelectric material layer 400. In this way, the pressure sensing chip 001 determines the size of the pressing force at the pressing location according to the size of the voltage difference △V1.
[0072] In the examples of this application, please refer to Figure 7 , Figure 7 It is a top view of a plurality of pressure electrodes in a touch control substrate provided in an embodiment of the present application. A plurality of pressure electrodes 300 are arranged in a plurality of rows and a plurality of columns. The touch control substrate 000 also includes: a first connection line L1 electrically connected to a row of pressure electrodes 300, and a second connection line L2 electrically connected to a column of pressure electrodes 300. Among them, at least part of the first connection line L1 is arranged in a different layer from at least part of the second connection line L2. For example, the first connection line L1 has a portion intersecting with the second connection line L2, and the intersecting portion of the first connection line L1 needs to be arranged in a different layer from the second connection line L2. In this way, the phenomenon of short circuit between the first connection line L1 and the second connection line L2 at the intersection can be effectively avoided.
[0073] In the present application, the touch control substrate 000 may further include: a plurality of binding electrodes 600, a portion of the plurality of binding electrodes 600 may be electrically connected to the plurality of first connection lines L1 in a one-to-one correspondence, and another portion of the binding electrodes 600 may be electrically connected to the plurality of second connection lines L2 in a one-to-one correspondence. In this way, after the flexible circuit board with the pressure sensing chip 001 is connected to the plurality of binding electrodes 600, the electrical connection between the pressure sensing chip 001 and the pressure electrode 300 can be achieved.
[0074] In this case, after the touch substrate 000 is integrated into the display device, when the user uses a finger to interact with the display device, on the one hand, the touch electrode 200 in the touch substrate 000 can detect the capacitance change of the area touched by the user and the display device, and locate the position of the area touched by the user and the display device through the touch drive signal line Tx and the touch sensing signal line Rx arranged in the touch substrate 000; on the other hand, the pressure electrode 300 in the touch substrate 000 can detect the pressing force of the area contacted by the user and the display device, and locate the position of the area pressed by the user on the display device through the first connection line L1 and the second connection line L2 arranged in the touch substrate 000. It should be noted that the user can also use other conventional objects (for example, a screen-specific writing pen, an object that can produce a capacitance change threshold exceeding the display device, etc.) to interact with the display device.
[0075] In one scenario, when a user interacts with a display device through an unconventional object (e.g., chopsticks, objects whose capacitance change cannot exceed the capacitance change threshold of the display device, etc.), the touch electrode 200 in the touch substrate 000 detects that the capacitance change of the unconventional object in the contact area with the touch substrate 000 is extremely small, so that the touch substrate 000 cannot locate the position of the contact area between the unconventional object and the touch substrate 000 based on the capacitance change. At this time, the pressure electrode 300 in the touch substrate 000 can detect the pressing force of the unconventional object in the contact area with the touch substrate 000, and locate the position of the contact area between the unconventional object and the touch substrate 000 through the first connection line L1 and the second connection line L2 arranged in the touch substrate 000. In this way, the touch substrate 000 can use the pressure electrode 300 to determine the position of the contact area between the unconventional object and the touch substrate 000, combined with the capacitance change of the contact area between the unconventional object and the touch substrate 000 detected by the touch electrode 200, to achieve multi-scenario applications.
[0076] Optional, please refer to Figure 8 , Figure 8000 is a partial top view of another touch control substrate provided by an embodiment of the present application. The plurality of pressure electrodes 300 correspond one-to-one to the plurality of touch control electrodes 200, so that the distribution density of the pressure electrodes 300 on the touch control substrate 000 is the same as the distribution density of the touch control electrodes 200 on the touch control substrate 000. In this way, the touch control substrate 000 can determine the magnitude of the pressing force received at each position on the touch control substrate 000.
[0077] It should be noted that, since the width of the contact area between the user's finger and the touch substrate 000 is generally large, the pressure electrodes 300 do not need to be arranged at the same density as the touch electrodes 200. In this way, the pressure electrodes 300 may not correspond one-to-one with the touch electrodes 200. Thus, in other possible implementations, a part of the multiple pressure electrodes 300 may correspond one-to-one with the multiple virtual electrodes 500, and this application does not limit this.
[0078] exist Figure 8 In the touch substrate shown, the touch sensing signal line Rx is arranged in a different layer from the touch electrode 200, and the touch driving signal line Tx is arranged in the same layer and made of the same material as the touch electrode 200. In this case, the second connection line L2 is arranged in the same layer as the touch sensing signal line Rx, and at least part of the first connection line L1 can be arranged in the same layer as the touch driving signal line Tx. In addition, the second connection line L2 is arranged in parallel with the touch sensing signal line Rx so that the second connection line L2 and the touch sensing signal line Rx will not cross short circuit; at least part of the first connection line L1 can be arranged in parallel with the touch driving signal line Tx so that at least part of the first connection line L1 can not cross short circuit with the touch driving signal line Tx.
[0079] In the present application, since the touch electrode 200 is a ring electrode, the pressure electrode 300 is located in the area surrounded by the corresponding touch electrode 200. Therefore, in order to avoid the phenomenon of short circuit between the first connection line L1 and the touch electrode 200 in the process of connecting a row of pressure electrodes 300 through the first connection line L1, the first connection line L1 may include: a jumper line L11 and a connection line body L12 that are connected to each other. Among them, the jumper line L11 and the touch electrode 200 are arranged in a different layer, and the jumper line L11 is connected to the pressure electrode 300; the connection line body L12 and the touch electrode 200 are arranged in the same layer and are made of the same material. In this way, the first connection line L1 can avoid the short circuit phenomenon caused by the intersection of the first connection line L1 and the touch electrode 200 through the jumper line L11. In this case, Figure 5 yes Figure 8 Cross-sectional view at AA'.
[0080] It should be noted that the above embodiment is schematically illustrated by taking the example that the first connection line L1 includes: interconnected jumper lines L11 and a connection line body L12. In other possible implementations, when the touch sensing signal line Rx is arranged in the same layer and the same material as the touch electrode 200, and the touch drive signal line Tx is arranged in a different layer from the touch electrode 200, the first connection line L1 can be arranged in the same layer as the touch drive signal line Tx, and the second connection line L2 can include: interconnected jumper lines and a connection line body. Here, the wiring method of the second connection line L2 can refer to the corresponding content in the above embodiment, and the embodiment of the present application will not be repeated here.
[0081] In the embodiment of the present application, when the piezoelectric material layer 400 is located on the side of the plurality of pressure electrodes 300 away from the substrate 100, there are multiple ways to prepare the piezoelectric material layer 400. The embodiment of the present application is schematically described with only the following three optional implementation schemes.
[0082] For the convenience of the following description, the embodiment of the present application first explains the principle of polarization treatment of piezoelectric materials. The piezoelectric film formed by the untreated piezoelectric material through spraying, printing or spin coating is generally a piezoelectric film mainly in the α crystal form, which has weak piezoelectricity, resulting in the piezoelectric film being unable to be used as the piezoelectric material layer 400. In this way, it is necessary to polarize the piezoelectric film mainly in the α crystal form, so that the piezoelectric film is transformed from the α crystal form with weak piezoelectricity to the β crystal form with strong piezoelectricity, so that the piezoelectric film can be used as the piezoelectric material layer 400.
[0083] A first optional implementation scheme is to form a piezoelectric material layer 400 having the same pattern as the pressure electrode 300 on the pressure electrode 300 through a single patterning process, and polarize the piezoelectric material layer 400 to obtain a piezoelectric material layer 400 having piezoelectric properties.
[0084] The second optional implementation scheme is to coat the entire surface of the piezoelectric material on the plane where the pressure electrode 300 is located, and then set a protection area on the entire surface of the piezoelectric material, and the protection area protects the touch electrode 200, the multiple touch drive signal lines Tx, and the multiple touch sensing signal lines Rx. In this way, after the piezoelectric material coated on the entire surface of the plane where the pressure electrode 300 is located is polarized, a piezoelectric material layer 400 with the same pattern as the pressure electrode 300 and piezoelectric properties can be obtained.
[0085] A third optional implementation scheme is to coat the entire surface of the piezoelectric material on the plane where the pressure electrode 300 is located, polarize the entire surface of the piezoelectric material, and then remove the piezoelectric material in the area where the touch electrode 200, multiple touch drive signal lines Tx and multiple touch sensing signal lines Rx are located through an etching process to obtain a piezoelectric material layer 400 with the same pattern as the pressure electrode 300 and piezoelectric properties.
[0086] The above three optional implementation schemes can all obtain the piezoelectric material layer 400 with piezoelectric properties. In other possible implementation schemes, the piezoelectric material layer 400 can also be directly formed using a piezoelectric material with piezoelectric properties, which is not limited in the present application.
[0087] In this application, if Figure 5 As shown, the touch control substrate 000 may include: a first conductive layer P1 , an insulating layer 700 , and a second conductive layer P2 stacked on a substrate 100 .
[0088] The first conductive layer P1 may include: the jumper line L11 in the above embodiment, the touch sensing signal line Rx, and the second connection line L2.
[0089] The second conductive layer P2 may include: the touch electrodes 200 , the pressure electrodes 300 , the connecting line bodies L12 , and the touch driving signal lines Tx in the above-mentioned embodiments.
[0090] The insulating layer 700 in the touch substrate 000 insulates two mutually intersecting signal lines (e.g., the touch driving signal line Tx and the touch sensing signal line Rx), ensuring that the two mutually intersecting signal lines will not be short-circuited. In addition, the insulating layer 700 has a via hole, through which the touch electrode 200 can be electrically connected to the touch sensing signal line Rx, and the pressure electrode 300 can also be electrically connected to the jumper line L11 through the via hole.
[0091] For the second optional implementation, please refer to Fig. 9 , Fig. 9It is a schematic diagram of the membrane layer structure of another touch substrate provided in an embodiment of the present application. When the multiple touch electrodes 200 are arranged in the same layer and made of the same material as some of the multiple pressure electrodes 300, the multiple pressure electrodes 300 may include: multiple first pressure electrodes 301 and multiple second pressure electrodes 302, the multiple first pressure electrodes 301 are arranged in the same layer and made of the same material as the multiple touch electrodes 200, and the multiple second pressure electrodes 302 are arranged in different layers from the multiple touch electrodes 200. That is, all the first pressure electrodes 301 and all the touch electrodes 200 are formed by a single patterning process. The multiple first pressure electrodes 301 and the multiple second pressure electrodes 302 correspond one to one, and the orthographic projection of the first pressure electrode 301 on the substrate 100 overlaps with the orthographic projection of the second pressure electrode 302 on the substrate 100. The piezoelectric material layer 400 in the touch substrate 000 is located between the plurality of first pressure electrodes 301 and the plurality of second pressure electrodes 302 , and the piezoelectric material layer 400 is electrically connected to each of the first pressure electrodes 301 and each of the second pressure electrodes 302 .
[0092] For examples, please refer to Fig.10 , Fig.10 yes Fig. 9 The schematic diagram of the touch substrate sensing the pressing force is shown. The first pressure electrode 301 and the second pressure electrode 302 in the touch substrate 000 are both electrically connected to the pressure sensing chip 002. After the piezoelectric material layer 400 in the touch substrate 000 is subjected to the pressing force, the piezoelectric material layer 400 can produce a charge change, the first pressure electrode 301 transmits the electrical signal of the piezoelectric material layer 400 close to the first pressure electrode 301, and transmits the electrical signal to the pressure sensing chip 002, and the second pressure electrode 302 transmits the electrical signal of the piezoelectric material layer 400 close to the second pressure electrode 302, and transmits the electrical signal to the pressure sensing chip 002. In this process, the pressure sensing chip 002 can obtain the size of the voltage difference △V2 on both sides of the piezoelectric material layer 400 based on the electrical signals on both sides of the piezoelectric material layer 400. Afterwards, the pressure sensing chip 002 can determine the size of the pressing force at the pressing location based on the corresponding relationship between the size of the voltage difference △V2 and the pressing force.
[0093] In this case, after the touch substrate 000 is integrated into the display device, when the user interacts with the display device using a finger, the touch electrode 200 in the touch substrate 000 can detect the capacitance change of the touch area between the user and the display device, and locate the position of the touch area between the user and the display device through the touch drive signal line Tx and the touch sensing signal line Rx arranged in the touch substrate 000; the touch substrate 000 detects the voltage difference △V on the pressure electrode 300 of the touch area between the user and the display device based on the position information of the touch area between the user and the display device, and further can detect the pressing force of the contact area between the user and the display device.
[0094] In the embodiment of the present application, a plurality of first pressure electrodes 301 are arranged in a plurality of rows, a plurality of second pressure electrodes 302 are arranged in a plurality of rows, and the touch control substrate 000 may further include: a third connection line L3 electrically connected to a row of first pressure electrodes 301, and a fourth connection line L4 electrically connected to a row of second pressure electrodes 302. The second pressure electrodes 302 and the fourth connection line L4 are disposed in the same layer and are made of the same material.
[0095] Assume that the conductive layer where the plurality of second pressure electrodes 302 are located is the third conductive layer P3. Fig.11 , Fig.11 : is a partial top view of a third conductive layer provided in an embodiment of the present application. The third conductive layer P3 may include: a second pressure electrode 302 and a fourth connection line L4. When the touch sensing signal line Rx in the touch substrate 000 is arranged in a different layer from the touch electrode 200, the touch sensing signal line Rx may be arranged in the same layer as the second pressure electrode 302 and made of the same material. That is, the third conductive layer P3 may also include: a touch sensing signal line Rx. In this case, the fourth connection line L4 and the touch sensing signal line Rx cannot cross to ensure that there is no short circuit between the second pressure electrode 302 and the touch electrode 200.
[0096] Assume again that the conductive layer where the plurality of first pressure electrodes 301 are located is the fourth conductive layer P4. Fig.12 , Fig.12 1 is a partial top view of a fourth conductive layer provided in an embodiment of the present application. The fourth conductive layer P4 may include: a first pressure electrode 301 and a touch electrode 200. When the touch drive signal line Tx in the touch substrate 000 is arranged in the same layer as the touch electrode 200, the fourth conductive layer P4 may also include: a touch drive signal line Tx.
[0097] In the embodiment of the present application, the plurality of first pressure electrodes 301 may correspond to the plurality of touch electrodes 200 one by one. In this case, the number of the plurality of first pressure electrodes 301, the plurality of touch electrodes 200 and the plurality of second pressure electrodes 302 are the same. Thus, when the touch electrode 200 is a ring electrode, a first pressure electrode 301 is distributed in the area surrounded by each touch electrode 200, and the orthographic projection of the first pressure electrode 301 on the substrate 100 may overlap with the orthographic projection of the corresponding second pressure electrode 302 on the substrate 100.
[0098] In other possible implementations, since the width of the contact area between the user's finger and the touch substrate 000 is generally large, the number of the first pressure electrodes 301 may be less than the number of the touch electrodes 200. In this case, when the touch electrodes 200 are ring electrodes, the plurality of first pressure electrodes 301 may be distributed in the area surrounded by a portion of the touch electrodes 200, and the virtual electrodes 500 need to be distributed in the area surrounded by another portion of the touch electrodes 200.
[0099] In the present application, since the touch electrode 200 is a ring electrode, the first pressure electrode 301 is located in the area surrounded by the corresponding touch electrode 200. Therefore, in order to avoid the phenomenon that the third connection line L3 and the touch electrode 200 are short-circuited in the process of connecting a row of first pressure electrodes 301 through the third connection line L3, the third connection line L3 needs to be arranged in a different layer from the touch electrode 200. For example, the third connection line L3 can be arranged in the same layer as the second pressure electrode 302 and the material is the same. That is, the third conductive layer P3 can also include: a third connection line L3.
[0100] In order to ensure the electrical connection between the third connection line L3 and the first pressure electrode 301, a switching electrode block L3a needs to be provided at the connection of the third connection line L3. The overlapping area between the switching electrode block L3a and the first pressure electrode 301 is large, so that the electrical connection between the two is better, so that the electrical connection between the third connection line L3 and the first pressure electrode 301 is also better.
[0101] In the embodiment of the present application, the touch control substrate 000 may further include: an insulating layer 700 disposed in the same layer as the piezoelectric material layer 400 and made of a different material. In this case, the piezoelectric material layer 400 and the insulating layer 700 are both located between the third conductive layer P3 and the fourth conductive layer P4. The insulating layer 700 can prevent a short circuit between two intersecting electrodes in the third conductive layer P3 and the fourth conductive layer P4.
[0102] For examples, please refer to Fig.13 , Fig.13 This is a partial top view of a film layer located between the third conductive layer and the fourth conductive layer provided in an embodiment of the present application. In the film layer located between the third conductive layer P3 and the fourth conductive layer P4, the portion between the first pressure electrode 301 and the second pressure electrode 302 is the piezoelectric material layer 400, and the remaining portion is the insulating layer 700.
[0103] In the examples of this application, please refer to Fig.14 , Fig.14 This is an embodiment of the present application. Fig.11 , Fig.12 and Fig.13In order to ensure that the first pressure electrode 301 is electrically connected to the third connection line L3, a via V needs to be provided in the insulating layer 700. In this way, the first pressure electrode 301 can be electrically connected to the switching electrode block through the via V, so that the first pressure electrode 301 can be electrically connected to the third connection line L3.
[0104] In the embodiment of the present application, in the above two optional implementations, Figure 5 and Fig. 9 As shown, the piezoelectric material layer 400 may further include: a plurality of piezoelectric portions 401 corresponding to the plurality of pressure electrodes 300, and an orthographic projection of one piezoelectric portion 401 on the substrate 100 and an orthographic projection of at least one corresponding pressure electrode 300 on the substrate 100 have an overlapping region. For example, for the first optional implementation manner described above, one pressure electrode 300 may correspond to one piezoelectric portion 401, in which case, an orthographic projection of each pressure electrode 300 on the substrate 100 and an orthographic projection of the corresponding piezoelectric portion 401 on the substrate have an overlapping region. For the second optional implementation manner described above, a plurality of pressure electrodes 300 (for example, mutually corresponding first pressure electrodes 301 and second pressure electrodes 302) may correspond to one piezoelectric portion 401, in which case, an orthographic projection of the first pressure electrode 301 on the substrate 100 and an orthographic projection of the corresponding piezoelectric portion 401 on the substrate have an overlapping region; an orthographic projection of the second pressure electrode 302 on the substrate 100 and an orthographic projection of the corresponding piezoelectric portion 401 on the substrate also have an overlapping region. In other possible implementations, multiple piezoelectric parts 401 may also correspond to one pressure electrode 300 .
[0105] In the present application, there are many shapes of the piezoelectric portion 401 , and the embodiments of the present application are schematically illustrated using only the following two situations.
[0106] The first case, such as Fig.13 As shown, when the piezoelectric material layer 400 is made of a transparent piezoelectric material, the piezoelectric portion 401 is a block-shaped piezoelectric portion 401. Here, the transparent piezoelectric material layer 400 can be composed of transparent piezoelectric materials such as polyvinylidene difluoride (English: polyvinylidene difluoride, abbreviated as: PVDF or PVF2) and its copolymer polyvinylidene fluoride-co-trifluoroethylene (English: poly(vinylidene-difluoride-trifluoroethylene), abbreviated as: P(VDF-TrFE)).
[0107] For the second case, please refer to Fig.15 , Fig.15It is a partial top view of another film layer located between the third conductive layer and the fourth conductive layer provided in an embodiment of the present application. When the piezoelectric material layer 400 is made of a non-transparent piezoelectric material, the piezoelectric portion 401 can be a grid-shaped piezoelectric portion 401. Here, the non-transparent piezoelectric material layer 400 can be composed of one or more of zinc oxide (English: Zincoxide, abbreviated as: ZnO), lead zirconate titanate (English: lead zirconate titanate, abbreviated as: PZT), barium titanate (English: Barium titanate), lithium niobate (English: Lithium niobate), or the piezoelectric material layer 400 can be composed of other non-transparent piezoelectric materials. This application is not limited to this. It should be noted that when the touch substrate 000 is integrated in the display device, the light emitted by the light-emitting device in the display device can pass through the grid holes in the grid-shaped piezoelectric portion 401 and then emit, so that the piezoelectric portion 401 made of non-transparent piezoelectric material does not affect the normal display of the display device.
[0108] In the present application, the touch substrate 000 may further include: a covering layer 800 for protecting the structure on the touch substrate 000. For example, when the touch substrate 000 is integrated in a display device, the covering layer 800 may be composed of transparent glass, so that the covering layer 800 does not affect the display effect of the display device. It should be noted that, for the first possible implementation, since the piezoelectric material layer 400 is located on the side of the second conductive layer P2 away from the substrate 100, the thickness of the piezoelectric material layer 400 cannot exceed the thickness of the covering layer 800 to ensure that the covering layer 800 has a better protective effect on the touch substrate 000.
[0109] In summary, the embodiment of the present application provides a touch substrate, including: a substrate, a touch electrode, a pressure electrode and a piezoelectric material layer. Since there is no connection between the touch electrode and the pressure electrode, and the touch electrode and the pressure electrode are arranged in the same layer. Therefore, the pressure electrode can be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are reused. In this way, by arranging the pressure electrode and the touch electrode in the same layer, the thickness of the touch substrate can be reduced while ensuring that the display effect of the display device integrated with the touch substrate is good, and then the thickness of the display device can be reduced.
[0110] The embodiment of the present application further provides a method for manufacturing a touch control substrate, and the method for manufacturing a touch control substrate may include:
[0111] Step S1, forming a plurality of touch electrodes and a plurality of pressure electrodes on a substrate, wherein the plurality of touch electrodes and at least part of the plurality of pressure electrodes are arranged in the same layer and made of the same material, and the orthographic projection of the touch electrodes on the substrate does not overlap with the orthographic projection of the pressure electrodes on the substrate.
[0112] Step S2: forming a piezoelectric material layer electrically connected to a plurality of pressure electrodes on a substrate, wherein the piezoelectric material layer is configured to generate a charge change after being subjected to a pressing force, so as to form an electrical signal that can be transmitted through the pressure electrodes.
[0113] In summary, the embodiment of the present application provides a method for manufacturing a touch substrate, including: forming a touch electrode, a pressure electrode and a piezoelectric material layer on a substrate. Since there is no connection between the touch electrode and the pressure electrode, and the touch electrode and the pressure electrode are arranged in the same layer. Therefore, the pressure electrode can be used as a virtual electrode of the touch electrode, that is, the pressure electrode and the virtual electrode are reused. In this way, by arranging the pressure electrode and the touch electrode in the same layer, the thickness of the touch substrate can be reduced while ensuring that the display effect of the display device integrated with the touch substrate is good, thereby reducing the thickness of the display device.
[0114] With respect to the above two optional implementations, the manufacturing method of the touch control substrate may include the following two executable manufacturing methods.
[0115] A first executable manufacturing method, the manufacturing method is used to manufacture the first implementable manner Figure 5 The touch control substrate shown. The manufacturing method of the touch control substrate may include:
[0116] Step A1: forming a first conductive layer on a substrate.
[0117] For example, a first conductive film can be formed on the substrate by any of a plurality of methods such as deposition, coating and sputtering. The first conductive layer can be obtained by performing a patterning process on the first conductive film. The first conductive layer may include: the jumper wire, the touch sensing signal wire and the second connecting wire in the above embodiment. Optionally, the material of the first conductive layer may include: metal materials such as metal aluminum, metal silver, metal molybdenum or alloys.
[0118] Step B1, sequentially forming an insulating layer with via holes on the first conductive layer.
[0119] An insulating film is formed on the first conductive layer by any of a plurality of methods such as deposition, coating and sputtering. The insulating layer film is subjected to a patterning process to obtain an insulating layer with vias. The vias in the insulating layer may include: vias for electrically connecting the touch electrodes and the touch sensing signal lines in the above-mentioned embodiment, and vias for electrically connecting the pressure electrodes and the jumper wires. Optionally, the material of the insulating layer may include: inorganic materials such as silicon nitride, silicon oxide or silicon oxynitride.
[0120] Step C1, forming a second conductive layer on the insulating layer.
[0121] A second conductive film is formed on the insulating layer by any of a plurality of methods such as deposition, coating and sputtering. A second conductive layer can be obtained by performing a patterning process on the second conductive film. The second conductive layer may include: the touch electrodes, pressure electrodes, connecting wire bodies and touch driving signal wires in the above-mentioned embodiments. Optionally, the material of the second conductive layer may include: metal materials such as metal aluminum, metal silver, metal molybdenum or alloys.
[0122] Step D1, forming a piezoelectric material layer and a covering layer in sequence on the second conductive layer.
[0123] First, a piezoelectric film is formed on the second conductive layer by any of a variety of methods such as spraying, printing or spin coating. The piezoelectric film is subjected to a patterning process to obtain an untreated piezoelectric material layer. The untreated piezoelectric material layer is then subjected to a polarization process to obtain a piezoelectric material layer. Optionally, the material of the piezoelectric material layer may include: PVDF, P (VDF-TrFE), PZT and other transparent piezoelectric materials or non-transparent piezoelectric materials.
[0124] Then, a covering layer is formed on the piezoelectric material layer by any of a variety of methods such as deposition, coating and sputtering. Optionally, the material of the covering layer may include: transparent glass and other transparent materials.
[0125] Through the above steps A1 to D1, we can get Figure 5 A touch substrate is shown.
[0126] A second executable manufacturing method is used to manufacture the second implementable manner Fig. 9 The touch control substrate shown. The manufacturing method of the touch control substrate may include:
[0127] Step A2: forming a third conductive layer on the substrate.
[0128] For example, a third conductive film can be formed on the substrate by any of a plurality of methods such as deposition, coating and sputtering. The third conductive layer can be obtained by performing a patterning process on the third conductive film. The third conductive layer may include: the second pressure electrode, the fourth connecting line, the touch sensing signal line, the transfer electrode block and the third connecting line in the above embodiment. Optionally, the material of the third conductive layer may include: metal materials such as metal aluminum, metal silver, metal molybdenum or alloys.
[0129] Step B2: forming an insulating layer and a piezoelectric material layer in sequence on the third conductive layer, which are arranged on the same layer but made of different materials.
[0130] First, an insulating layer film is formed on the third conductive layer by any of a variety of methods such as deposition, coating and sputtering. The insulating layer film is subjected to a patterning process to obtain an insulating layer, and the insulating layer has vias and a receiving area. The shape of the receiving area of the insulating layer may be the same as the shape of the piezoelectric material layer. The vias of the insulating layer may include: the vias for electrically connecting the first pressure electrode and the transfer electrode block in the above-mentioned embodiment, and the vias for the contact control electrode and the touch sensing signal line. Optionally, the material of the insulating layer may include: inorganic materials such as silicon nitride, silicon oxide or silicon oxynitride.
[0131] Then, a piezoelectric film is formed on the insulating layer by any of a variety of methods such as spraying, printing or spin coating. A piezoelectric material layer with a patterned shape in the accommodation area of the insulating layer can be formed by performing a composition process on the piezoelectric film, and the piezoelectric material layer in the accommodation area can be polarized to obtain a piezoelectric material layer that is arranged in the same layer as the insulating layer but has a different material. Optionally, the material of the piezoelectric material layer may include: PVDF, P (VDF-TrFE), PZT and other transparent piezoelectric materials or non-transparent piezoelectric materials.
[0132] Step C2: forming a fourth conductive layer on the piezoelectric material layer.
[0133] A fourth conductive film is formed on the piezoelectric material layer by any of a plurality of methods such as deposition, coating and sputtering. A fourth conductive layer can be obtained by performing a patterning process on the fourth conductive film. The fourth conductive layer may include: the touch electrode, the first pressure electrode and the touch drive signal line in the above embodiment. Optionally, the material of the fourth conductive layer may include: metal materials such as metal aluminum, metal silver, metal molybdenum or alloys.
[0134] Step D2: forming a covering layer on the fourth conductive layer.
[0135] A covering layer is formed on the fourth conductive layer by any of a plurality of methods such as deposition, coating and sputtering. Optionally, the material of the covering layer may include: other transparent materials such as transparent glass.
[0136] Through the above steps A2 to D2, we can get Fig. 9 A touch substrate is shown.
[0137] It should be noted that the one-time patterning process in the above embodiment refers to: photoresist coating, exposure, development, etching and photoresist stripping.
[0138] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific principles of the display panel described above can refer to the corresponding contents in the aforementioned embodiment of the structure of the display panel, and will not be repeated here.
[0139] The embodiment of the present application further provides a display panel. The display panel 0000 may include: a display substrate 111, and a touch substrate 000 located on the light-emitting side of the display substrate 111. The touch substrate 000 may be the above-mentioned Figure 2 , Figure 5 and Fig. 9 Any one of the touch control substrates 000.
[0140] In the examples of this application, please refer to Fig.16 and Fig.17 , Fig.16 The display panel provided in the embodiment of the present application integrates the above Fig. 9 The structural schematic diagram of the touch substrate shown in FIG. Fig.17 The display panel provided in the embodiment of the present application integrates the above Figure 5 The display substrate 111 in the display panel 0000 may include: a backplane 101 , a light emitting device 102 located on the backplane 101 , and an encapsulation layer 103 located on a side of the light emitting device 102 away from the backplane 101 .
[0141] Among them, the backplane 101 may include a substrate 1011, and a driving thin film transistor 1012 arranged in an array on the substrate 1011. The driving thin film transistor 1012 in the backplane 101 has a gate 1012a, a first electrode 1012b, a second electrode 1012c and an active layer 1012d. In addition, the first electrode 1012b and the second electrode 1012c are both overlapped with the active layer 1012d, and the active layer 1012d is insulated from the gate 1012a. It should be noted that the first electrode 1012b in the driving thin film transistor 1012 can be one of the source and the drain, and the second electrode 1012c can be the other of the source and the drain. It should also be noted that the embodiment of the present application is schematically illustrated by taking the thin film transistor 1012 as a bottom-gate thin film transistor as an example. In other optional implementations, the thin film transistor 1012 can also be a top-gate thin film transistor, which is not limited in the embodiment of the present application.
[0142] In the present application, the light emitting device 102 in the display substrate 111 is a plurality of light emitting devices 102 arranged in an array, and the display substrate 111 can realize a display function through the light emission of the plurality of light emitting devices 102. The light emitting device 102 may include: a stacked anode layer 1021, a light emitting layer 1022, and a cathode layer 1023. A stacked anode layer 1021, a light emitting layer 1022, and a cathode layer 1023 may constitute a light emitting device 102, and the light emitting device 102 may be an organic light emitting display (Organic Light Emitting Display; OELD for short).
[0143] For example, the light emitting device 102 may further include: a pixel defining layer 1024 located between any two light emitting devices 102, the pixel defining layer 1024 is used to define a plurality of pixel regions in the display substrate 111, wherein a light emitting device 102 may be distributed in each pixel region. The light emitting device 102 may be electrically connected to the second electrode 1012c in the driving thin film transistor 1012 through the anode layer 1021. In this way, when the display substrate 111 drives the light emitting device 102 to emit light through the driving thin film transistor 1012, the light emitting device 102 may emit visible light toward the side away from the substrate 1011.
[0144] It should be noted that the orthographic projections of the touch electrode 200 and the pressure electrode 300 on the substrate 1011 are located within the orthographic projection of the pixel defining layer 1024 on the substrate 1011. In this way, the touch electrode 200 and the pressure electrode 300 will not affect the light emitted by the light emitting device 102.
[0145] In the embodiment of the present application, the encapsulation layer 103 is the substrate 100 in the touch substrate 000. For example, the encapsulation layer 103 in the display substrate 111 can provide protection for the light-emitting device 102 to extend the service life of the light-emitting device 102. In the embodiment of the present application, when the touch substrate 000 is formed on the display substrate 111, the encapsulation layer 103 in the display substrate 111 can be the substrate 100 in the touch substrate 000. In this way, the thickness of the display panel 0000 can be further reduced.
[0146] In the present application, when the touch electrode 200 and the pressure electrode 300 are both mesh-shaped electrodes, the orthographic projection of the light-emitting device 102 on the back plate 101 is located in the mesh holes in the orthographic projection of the mesh-shaped electrode on the back plate 101. In this way, when the touch substrate 000 is located on the display substrate 111, the light emitted by the light-emitting device 102 in the display substrate 111 can pass through the touch electrode 200 and the pressure electrode 300 in the touch substrate 000, and the light emitted by the light-emitting device 102 can be emitted from the mesh holes in the touch electrode 200 and the pressure electrode 300, so that the touch substrate 000 will not affect the display effect of the display substrate 111.
[0147] It should be noted that when the piezoelectric material layer 400 in the touch substrate 000 is composed of a transparent piezoelectric material, the thickness of the piezoelectric material layer 400 should not be too large to ensure that the transmittance of the piezoelectric material layer 400 is high, so that the piezoelectric material layer 400 does not affect the display effect of the display substrate 111. For example, the thickness of the piezoelectric material layer 400 is generally 2 um.
[0148] In an embodiment of the present application, the above-mentioned display panel 0000 can be integrated into different display devices, which can be display devices such as smart phones, smart watches, smart computers, etc. that can interact with users, and the present application does not limit this.
[0149] It should be noted that in the accompanying drawings, the sizes of layers and regions may be exaggerated for clarity of illustration. It is also understood that when an element or layer is referred to as being "on" another element or layer, it may be directly on the other element, or there may be an intermediate layer. In addition, it is understood that when an element or layer is referred to as being "under" another element or layer, it may be directly under the other element, or there may be more than one intermediate layer or element. In addition, it is also understood that when a layer or element is referred to as being "between" two layers or two elements, it may be the only layer between the two layers or two elements, or there may also be more than one intermediate layer or element. Similar reference numerals throughout the text indicate similar elements.
[0150] In the present application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. The term "plurality" refers to two or more than two, unless otherwise clearly defined.
[0151] The above description is only an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A touch substrate, characterized in that: include: substrate; A plurality of touch electrodes and a plurality of pressure electrodes are located on the substrate, wherein the plurality of touch electrodes and at least part of the plurality of pressure electrodes are arranged in the same layer and made of the same material, and the orthographic projection of the touch electrodes on the substrate does not overlap with the orthographic projection of the pressure electrodes on the substrate; a piezoelectric material layer electrically connected to the plurality of pressure electrodes, the piezoelectric material layer being configured to generate a charge change after being subjected to a pressing force to form an electrical signal that can be transmitted through the pressure electrodes; and, a plurality of virtual electrodes disposed in the same layer as the plurality of touch electrodes, wherein the plurality of touch electrodes and the plurality of virtual electrodes are evenly distributed on the substrate; Wherein, at least part of the pressure electrodes and at least part of the virtual electrodes are reused.
2. The touch substrate according to claim 1, characterized in that: The plurality of pressure electrodes are arranged in the same layer as the touch electrodes and are made of the same material; The piezoelectric material layer is located on a side of the plurality of pressure electrodes away from the substrate.
3. The touch substrate according to claim 2, characterized in that: The plurality of pressure electrodes are arranged in a plurality of rows and a plurality of columns, and the touch control substrate further comprises: a first connection line electrically connected to a row of the pressure electrodes, and a second connection line electrically connected to a column of the pressure electrodes; Wherein, at least part of the first connecting lines and at least part of the second connecting lines are arranged in different layers.
4. The touch substrate according to claim 3, wherein: The plurality of pressure electrodes correspond to the plurality of touch electrodes one by one, the touch electrodes are ring electrodes, and the pressure electrodes are located in the area surrounded by the corresponding touch electrodes; One of the first connecting wire and the second connecting wire includes: a jumper wire and a connecting wire body connected to each other, the jumper wire and the touch electrode are arranged in a different layer, and the jumper wire is connected to the pressure electrode, the connecting wire body and the touch electrode are arranged in the same layer and made of the same material, and the jumper wire is arranged in the same layer and made of the same material as the other one of the first connecting wire and the second connecting wire.
5. The touch substrate according to claim 1, characterized in that: The plurality of pressure electrodes include: a plurality of first pressure electrodes and a plurality of second pressure electrodes, the plurality of first pressure electrodes and the plurality of touch electrodes are arranged in the same layer and made of the same material, the plurality of second pressure electrodes and the plurality of touch electrodes are arranged in different layers, the plurality of first pressure electrodes and the plurality of second pressure electrodes correspond to each other one by one, and the orthographic projection of the first pressure electrode on the substrate overlaps with the orthographic projection of the second pressure electrode on the substrate; The piezoelectric material layer is located between the plurality of first pressure electrodes and the plurality of second pressure electrodes.
6. The touch substrate according to claim 5, characterized in that: The plurality of first pressure electrode arrays are arranged in a plurality of rows, the plurality of second pressure electrode arrays are arranged in a plurality of rows, and the touch control substrate further comprises: a third connection line electrically connected to a row of the first pressure electrodes, and a fourth connection line electrically connected to a row of the second pressure electrodes; Wherein, the second pressure electrode and the fourth connecting line are arranged in the same layer and made of the same material.
7. The touch substrate according to claim 6, characterized in that: The multiple first pressure electrodes correspond one-to-one to the multiple touch electrodes, the touch electrodes are ring electrodes, the first pressure electrodes are located in the area surrounded by the corresponding touch electrodes, and the third connecting wires are arranged in the same layer and made of the same material as the second pressure electrodes.
8. The touch control substrate according to any one of claims 5 to 7, characterized in that: The touch control substrate further includes: an insulating layer which is arranged on the same layer as the piezoelectric material layer but is made of a different material.
9. The touch control substrate according to any one of claims 1 to 7, characterized in that: The piezoelectric material layer includes: a plurality of piezoelectric portions corresponding to the plurality of pressure electrodes, and an orthographic projection of one of the piezoelectric portions on the substrate overlaps with an orthographic projection of at least one corresponding pressure electrode on the substrate.
10. The touch control substrate according to claim 9, characterized in that: The piezoelectric material layer is made of a transparent piezoelectric material, and the piezoelectric portion is a block-shaped piezoelectric portion; Alternatively, the piezoelectric material layer is made of a non-transparent piezoelectric material, and the piezoelectric portion is a grid-shaped piezoelectric portion.
11. The touch control substrate according to any one of claims 1 to 7, characterized in that: The plurality of touch electrodes and the plurality of pressure electrodes are both made of metal materials, and the touch electrodes and the pressure electrodes are both grid-shaped electrodes.
12. A method for manufacturing a touch control substrate, characterized in that: The method comprises: A plurality of touch electrodes, a plurality of pressure electrodes and a plurality of virtual electrodes are formed on a substrate, wherein the plurality of touch electrodes and at least part of the plurality of pressure electrodes are arranged in the same layer and are made of the same material, the orthographic projection of the touch electrode on the substrate does not overlap with the orthographic projection of the pressure electrode on the substrate, the plurality of virtual electrodes are arranged in the same layer as the plurality of touch electrodes, and the plurality of touch electrodes and the plurality of virtual electrodes are uniformly distributed on the substrate; wherein at least part of the pressure electrodes and at least part of the virtual electrodes are reused; A piezoelectric material layer electrically connected to the plurality of pressure electrodes is formed on the substrate, and the piezoelectric material layer is configured to generate a charge change after being subjected to a pressing force to form an electrical signal that can be transmitted through the pressure electrodes.
13. A display panel, characterized in that: include: A display substrate, and a touch substrate located on the light-emitting side of the display substrate, wherein the touch substrate is the touch substrate according to any one of claims 1 to 11.
14. The display panel according to claim 13, characterized in that: The display substrate comprises: a backplane, a light emitting device located on the backplane, and a packaging layer located on a side of the light emitting device away from the backplane; wherein the packaging layer is a substrate in the touch control substrate.
15. The display panel according to claim 14, characterized in that: When both the touch electrodes and the pressure electrodes are grid-shaped electrodes, the orthographic projection of the light-emitting device on the back plate is located within the grid holes in the orthographic projection of the grid-shaped electrodes on the back plate.
Citation Information
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