Semiconductor process equipment and pressure regulating device thereof

Abstract

The present invention discloses a semiconductor process equipment and a pressure regulating device thereof. The disclosed pressure regulating device includes a housing, a pressure regulating valve core assembly, and a driving mechanism, wherein: the housing has an inner cavity and a gas channel that are connected, the gas channel is provided with an air inlet and an exhaust port, and the air inlet is used to communicate with the exhaust pipe of the semiconductor process equipment; the driving mechanism is provided in the inner cavity, and the pressure regulating valve core assembly is provided at the connection between the inner cavity and the gas channel; the driving mechanism is connected to the pressure regulating valve core assembly, and the driving mechanism is used to drive the pressure regulating valve core assembly to move so that the pressure regulating valve core assembly adjusts the ventilation opening of the gas channel. The above solution can solve the problem of pressure regulating failure of the pressure regulating device caused by failure of the seal at the connection between the pressure regulating valve core assembly and the housing.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a semiconductor process equipment and a pressure regulating device thereof. Background Art

[0002] Semiconductors are precision devices that require specific processing environments, such as negative pressure. Semiconductors are typically processed within the process chamber of semiconductor equipment, and pressure regulation is often required to control the chamber pressure.

[0003] In the related art, the pressure regulating device includes a pressure regulating device body and a pressure regulating valve core. The pressure regulating device body is provided with an air inlet and an exhaust port, and the pressure regulating device body has a gas channel connecting the air inlet and the exhaust port. The pressure regulating valve core is used to adjust the ventilation opening of the gas channel to control the pressure of the air inlet. The regulating end of the pressure regulating valve core extends out of the pressure regulating device body, and the regulating end is manually adjusted to achieve pressure regulation at the air inlet. A seal is required between the pressure regulating valve core and the pressure regulating device body, and the pressure regulating valve core forms a dynamic seal with the pressure regulating device body when moving. Due to process errors, the seal between the pressure regulating valve core and the pressure regulating device body may be loose, and long-term dynamic sealing may cause the seal to fail, making the pressure regulating device ineffective. Summary of the Invention

[0004] The invention discloses a semiconductor process equipment and a pressure regulating device thereof, which are used to solve the problem of pressure regulating failure of the pressure regulating device caused by sealing failure at the connection between a pressure regulating valve core component and a housing.

[0005] In order to solve the above-mentioned technical problems, the present invention is achieved as follows:

[0006] In a first aspect, the present application discloses a pressure regulating device for semiconductor process equipment, comprising a housing, a pressure regulating valve core assembly, and a drive mechanism, wherein:

[0007] The shell has an inner cavity and a gas channel that are connected to each other, and the gas channel has an air inlet and an exhaust port, and the air inlet is used to communicate with the exhaust pipe of the semiconductor process equipment; the driving mechanism is arranged in the inner cavity, and the pressure regulating valve core assembly is arranged at the connection between the inner cavity and the gas channel; the driving mechanism is connected to the pressure regulating valve core assembly, and the driving mechanism is used to drive the pressure regulating valve core assembly to move so that the pressure regulating valve core assembly adjusts the ventilation opening of the gas channel.

[0008] In a second aspect, the present application further discloses a semiconductor process equipment, comprising a process chamber and the pressure regulating device described in the first aspect, wherein the process chamber comprises an exhaust pipe, the exhaust pipe is connected to the air inlet, and the exhaust port is connected to the factory service end.

[0009] The technical solution adopted by the present invention can achieve the following technical effects:

[0010] The pressure regulating device disclosed in the embodiment of the present application includes a shell, a pressure regulating valve core assembly and a driving mechanism. The shell has an inner cavity and a gas channel that are connected to each other. The gas channel is provided with an air inlet and an exhaust port, so that the air inlet and the exhaust port are connected through the gas channel, thereby making it possible to achieve pressure regulation on the air inlet side by controlling the ventilation opening of the gas channel; by arranging the driving mechanism in the inner cavity, the pressure regulating valve core assembly is arranged at the connection between the inner cavity and the gas channel, and the driving mechanism is connected to the pressure regulating valve core assembly, so that the driving mechanism can drive the pressure regulating valve core assembly to move so that the pressure regulating valve core assembly adjusts the ventilation opening of the gas channel.

[0011] At the same time, the driving mechanism is arranged in the inner cavity, and the pressure regulating valve core assembly is arranged at the connection point between the inner cavity and the gas channel, so that the driving mechanism can drive the movement of the pressure regulating valve core assembly to be carried out in the inner cavity and the connection point between the inner cavity and the gas channel respectively, so that the driving mechanism and the pressure regulating valve core assembly can be kept away from the external environment, thereby realizing the static sealing of the pressure regulating valve core assembly and the shell to ensure the reliability of the seal, thereby avoiding the problem in the prior art that the connection point between the driving mechanism or the pressure regulating valve core assembly and the shell needs to be sealed when at least part of the driving mechanism or the pressure regulating valve core assembly extends out of the shell, thereby effectively avoiding the problem that when the ventilation opening of the gas channel is adjusted, the driving mechanism or the pressure regulating valve core assembly and the shell form a dynamic seal at the sealing point due to relative movement, resulting in loose sealing or sealing failure, and finally avoiding the failure of the seal at the connection point between the driving mechanism or the pressure regulating valve core assembly and the shell to destroy the air pressure environment in the gas channel, thereby effectively avoiding the problem of failure of the pressure regulating device to regulate pressure, thereby effectively improving the stability and precision of the pressure regulating device in regulating pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 A schematic diagram of a pressure regulating device disclosed in an embodiment of the present invention in a first state from a first viewing angle;

[0013] Figure 2 A schematic diagram of the pressure regulating device disclosed in an embodiment of the present invention in a first state from a second perspective;

[0014] Figure 3 A schematic diagram of the pressure regulating device disclosed in an embodiment of the present invention in a second state from a first perspective;

[0015] Figure 4 A schematic diagram of the pressure regulating device disclosed in an embodiment of the present invention in a second state from a second viewing angle;

[0016] Figure 5 This is a schematic structural diagram of a pressure regulating valve core assembly disclosed in an embodiment of the present invention;

[0017] Figure 6 This is a schematic structural diagram of the semiconductor process equipment disclosed in an embodiment of the present invention.

[0018] Description of reference numerals:

[0019] 100-shell, 110-inner cavity, 111-gas channel, 111a-inlet section, 111b-exhaust section, 120-inlet port, 130-exhaust port, 140-guide slide, 150-end cover, 160-box,

[0020] 200-pressure regulating valve core assembly, 210-valve core body, 220-threaded section, 230-limiting block, 240-limiting protrusion,

[0021] 300-driving mechanism, 310-threaded sleeve, 320-driving motor, 321-cable, 330-gear set, 331-first gear, 332-second gear,

[0022] 400-exhaust pipe,

[0023] 500-pressure detection device,

[0024] 600-process chamber,

[0025] 700-pressure regulating device,

[0026] 800-vacuum system,

[0027] 910-Differential pressure gauge, 920-Vacuum gauge. DETAILED DESCRIPTION

[0028] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] The technical solutions disclosed in various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] Please refer to Figures 1 to 6The embodiment of the present invention discloses a pressure regulating device 700 for semiconductor process equipment. The disclosed pressure regulating device 700 is used to regulate the pressure in a process chamber 600 of the semiconductor process equipment.

[0031] The disclosed pressure regulating device 700 includes a housing 100 , a pressure regulating valve core assembly 200 and a driving mechanism 300 .

[0032] Housing 100 serves as the foundation for mounting the various components of pressure regulator 700. Housing 100 comprises an internal cavity 110 and a gas channel 111, which are interconnected. Gas channel 111 is provided with an inlet 120 and an outlet 130. Inlet 120 is connected to exhaust duct 400 of semiconductor processing equipment. Exhaust 130 can be connected to a facility's service end. The remainder of housing 100 is sealed from the external environment.

[0033] The drive mechanism 300 is disposed within the inner cavity 110, and the pressure regulating valve core assembly 200 is disposed at the connection between the inner cavity 110 and the gas passage 111. The drive mechanism 300 is connected to the pressure regulating valve core assembly 200 and is configured to drive the pressure regulating valve core assembly 200 to adjust the ventilation opening of the gas passage 111. The drive mechanism 300 and the pressure regulating valve core assembly 200 respectively move within the inner cavity 110 and at the connection between the inner cavity 110 and the gas passage 111, thereby isolating the drive mechanism 300 and the pressure regulating valve core assembly 200 from the external environment.

[0034] Specifically, the gas channel 111 is provided with an air inlet 120 and an exhaust port 130, and the air inlet 120 and the exhaust port 130 are connected through the gas channel 111. The pressure regulating valve core assembly 200 is driven by the driving mechanism 300 to move closer to or away from the exhaust port 130, and the ventilation opening of the gas channel 111 is controlled by controlling the distance between the pressure regulating valve core assembly 200 and the exhaust port 130. The pressure regulating valve core assembly 200 can also be a baffle structure, which controls the ventilation opening of the gas channel 111 by controlling the cross-sectional area of ​​the gas channel 111 blocked by the baffle. The specific structure of the pressure regulating valve core assembly 200 and the method of adjusting the ventilation opening of the gas channel 111 are not limited here.

[0035] The driving mechanism 300 may be a linear motor, a pneumatic telescopic component, a hydraulic telescopic component, or a shape memory alloy, etc. The specific structure of the driving mechanism 300 is not limited here.

[0036] In the specific implementation process, the pressure regulating device 700 includes a shell 100, a pressure regulating valve core assembly 200 and a driving mechanism 300. The shell 100 has an inner cavity 110 and a gas channel 111 that are connected. The gas channel 111 is provided with an air inlet 120 and an exhaust port 130. The air inlet 120 is used to communicate with the exhaust pipe 400 of the semiconductor process equipment. The driving mechanism 300 is arranged in the inner cavity 110, and the pressure regulating valve core assembly 200 is arranged at the connection between the inner cavity 110 and the gas channel 111. The driving mechanism 300 is connected to the pressure regulating valve core assembly 200. The driving mechanism 300 is used to drive the pressure regulating valve core assembly 200 to move so that the pressure regulating valve core assembly 200 adjusts the ventilation opening of the gas channel 111, so that the ventilation opening of the gas channel 111 used for communication between the air inlet 120 and the exhaust port 130 changes, thereby realizing pressure regulation on the air inlet 120 side.

[0037] The pressure regulating device 700 disclosed in the embodiment of the present application includes a shell 100, a pressure regulating valve core assembly 200 and a driving mechanism 300. The shell 100 has an inner cavity 110 and a gas channel 111 that are connected to each other. The gas channel 111 is provided with an air inlet 120 and an exhaust port 130, so that the air inlet 120 and the exhaust port 130 are connected through the gas channel 111, thereby making it possible to achieve pressure regulation on the air inlet 120 side by controlling the ventilation opening of the gas channel 111; by arranging the driving mechanism 300 in the inner cavity 110, the pressure regulating valve core assembly 200 is arranged at the connection between the inner cavity 110 and the gas channel 111, the driving mechanism 300 is connected to the pressure regulating valve core assembly 200, so that the driving mechanism 300 can drive the pressure regulating valve core assembly 200 to move so that the pressure regulating valve core assembly 200 adjusts the ventilation opening of the gas channel 111.

[0038] At the same time, the driving mechanism 300 is arranged in the inner cavity 110, and the pressure regulating valve core assembly 200 is arranged at the connection point between the inner cavity 110 and the gas channel 111, so that the movement of the driving mechanism 300 and the pressure regulating valve core assembly 200 can be carried out in the inner cavity 110 and the connection point between the inner cavity 110 and the gas channel 111 respectively, so that the driving mechanism 300 and the pressure regulating valve core assembly 200 are not in contact with the external environment, thereby realizing the static sealing of the pressure regulating valve core assembly 200 and the housing 100 to ensure the reliability of the seal, thereby avoiding the need to seal the driving mechanism 300 or the pressure regulating valve core assembly 200 when at least part of the driving mechanism 300 or the pressure regulating valve core assembly 200 extends outside the housing 100 in the prior art. Or the problem of sealing the connection between the pressure regulating valve core assembly 200 and the shell 100, thereby effectively avoiding the problem of loose sealing or sealing failure due to the formation of dynamic sealing at the sealing point due to relative movement between the driving mechanism 300 or the pressure regulating valve core assembly 200 and the shell 100 when adjusting the ventilation opening of the gas channel 111. Ultimately, it can avoid the failure of the seal at the connection between the driving mechanism 300 or the pressure regulating valve core assembly 200 and the shell 100 to destroy the air pressure environment in the gas channel 111, thereby effectively avoiding the problem of failure of the pressure regulating device 700 to regulate the pressure, and thereby effectively improving the stability and precision of the pressure regulating device 700 in regulating the pressure.

[0039] In an optional embodiment, a guide slide 140 may be provided in the housing 100. The guide slide 140 may be provided at the connection between the inner cavity 110 and the gas channel 111. At least a portion of the pressure regulating valve core assembly 200 may be located within the guide slide 140. The driving mechanism 300 may drive the pressure regulating valve core assembly 200 to move, so that the pressure regulating valve core assembly 200 may move along the extension direction of the guide slide 140.

[0040] By setting the guide slide 140, at least part of the pressure regulating valve core assembly 200 is located in the guide slide 140, so that when the driving mechanism 300 drives the pressure regulating valve core assembly 200 to move, the pressure regulating valve core assembly 200 moves along the extension direction of the guide slide 140 under the guiding action of the guide slide 140, so that the pressure regulating valve core assembly 200 moves along a specific track, thereby making the movement of the pressure regulating valve core assembly 200 more precise, and thus effectively improving the adjustment accuracy of the pressure regulating valve core assembly 200 when adjusting the ventilation opening of the gas channel 111.

[0041] In an optional embodiment, the gas channel 111 may include an air intake section 111a and an exhaust section 111b. The air intake port 120 may be provided at the starting end of the air intake section 111a, and the exhaust port 130 may be provided at the end of the exhaust section 111b. The pressure regulating valve core assembly 200 may include a valve core body 210, and the valve core body 210 may be a conical body, and the valve core body 210 may include a large end and a small end. The driving mechanism 300 may drive the pressure regulating valve core assembly 200 to move, so as to control the depth to which the small end of the valve core body 210 extends into the exhaust section 111b, so as to control the ventilation opening of the exhaust section 111b. The large end may be adapted to the opening shape of the exhaust section 111b, and when the small end extends into the exhaust section 111b from the opening and the large end moves to the opening, the large end may be adapted to the opening to seal the opening.

[0042] By configuring the gas channel 111 as an air inlet section 111a and an air outlet section 111b, with the air inlet 120 located at the starting end of the air inlet section 111a and the air outlet 130 located at the end of the air outlet section 111b, and configuring the valve core body 210 of the pressure regulating valve core assembly 200 as a cone, the ventilation opening of the air outlet section 111b can be controlled by controlling the depth to which the small end of the valve core body 210 extends into the air outlet section 111b. As the small end of the cone extends into the air outlet section 111b, the structural characteristics of the cone itself allow for more precise adjustment of the ventilation opening of the air outlet section 111b. Furthermore, the air outlet section 111b can also prevent the valve core body 210 from deviating from its trajectory during movement, thereby ensuring more stable movement of the valve core body 210.

[0043] In an optional embodiment, the pressure regulating valve core assembly 200 may further include a limiting protrusion 240, which may be provided on the large end of the valve core body 210. When the large end moves to the opening of the exhaust section 111b, the limiting protrusion 240 comes into limiting contact with the housing 100 to limit the further movement of the pressure regulating valve core assembly 200, thereby preventing it from excessively extending into the exhaust section 111b. The limiting protrusion 240 may be provided around the outer circumference of the large end so that the limiting protrusion 240 blocks the exhaust section 111b when it comes into limiting contact with the housing 100, thereby maintaining the pressure in the gas channel 111 and the gas inlet 120 consistent.

[0044] By setting a limiting protrusion 240 at the large end of the valve core body 210, when the large end moves to the opening of the exhaust section 111b, the limiting protrusion 240 can come into limiting contact with the shell 100 to limit the large end of the valve core body 210 from continuing to extend into the exhaust section 111b, thereby preventing the large end from continuing to extend into the exhaust section 111b and failing to play a role in adjusting the ventilation opening of the exhaust section 111b. At the same time, the limiting protrusion 240 also limits the moving range of the valve core body 210, thereby making the adjustment range of the valve core body 210 more stable.

[0045] Furthermore, the pressure regulating valve core assembly 200 may further include a threaded segment 220 and a stopper 230. The stopper 230 may be fixedly connected to the valve core body 210 via the threaded segment 220, and both the stopper 230 and the threaded segment 220 are located within the guide slide 140. The guide slide 140 may limit the stopper 230 from rotating along the central axis of the guide slide 140, thereby limiting the pressure regulating valve core assembly 200 from rotating along the central axis of the guide slide 140. The driving mechanism 300 may include a threaded sleeve 310. The threaded sleeve 310 may be sleeved on the threaded segment 220 and threadedly engaged with the threaded segment 220. The threaded sleeve 310 and the threaded segment 220 may threadably engage to drive the pressure regulating valve core assembly 200 to move along the extension direction of the guide slide 140.

[0046] The threaded section 220 and the limit block 230 are provided through the pressure regulating valve core assembly 200, and the limit block 230 can be fixedly connected to the valve core body 210 through the threaded section 220, and the limit block 230 and the threaded section 220 are both located in the guide slide 140, so that the guide slide 140 can limit the limit block 230 from rotating along the central axis of the guide slide 140, thereby limiting the rotation direction of the pressure regulating valve core assembly 200 along the central axis of the guide slide 140; by providing a threaded sleeve 310, the threaded sleeve 310 is sleeved on the threaded section 220 and threadedly matched with the threaded section 220, so that through the threaded matching of the threaded sleeve 310 and the threaded section 220, and under the limiting action of the limit block 230 and the guide slide 140, the pressure regulating valve core assembly 200 is only It can move along the extension direction of the guide slide 140, thereby effectively improving the accuracy of the pressure regulating valve core assembly 200 during movement; at the same time, under the action of the limiting rotation of the limit block 230 and the guide slide 140, and the threaded cooperation between the threaded sleeve 310 and the threaded section 220, the rotation of the threaded sleeve 310 is converted into the movement of the pressure regulating valve core assembly 200 along the extension direction of the guide slide 140. This transmission method only requires the rotation of the threaded sleeve 310 to be realized, thereby making the operation mode of the driving mechanism 300 relatively simple; since the threaded cooperation is a relatively precise cooperation, the threaded cooperation between the threaded sleeve 310 and the threaded section 220 drives the movement of the pressure regulating valve core assembly 200 more accurately, thereby making the pressure regulation more accurate.

[0047] Specifically, the limit block 230 can be detachably connected to the threaded segment 220 by screws. Since the limit block 230 and the guide slide 140 have the function of limiting rotation, when the threaded segment 220 needs to rotate into the guide slide 140, the limit block 230 is first removed, and after the threaded segment 220 is installed in place, the limit block 230 is then installed on the threaded segment 220 by screws.

[0048] In an optional embodiment, the drive mechanism 300 may include a drive motor 320 and a gear set 330. The drive motor 320 may be connected to the housing 100. The drive motor 320 may be connected to the gear set 330. The outer periphery of the threaded sleeve 310 may have external teeth that cooperate with the gear set 330. The threaded sleeve 310 may be connected to the gear set 330 via the external teeth. The drive motor 320 drives the gear set 330 to rotate, so that the gear set 330 drives the threaded sleeve 310 to rotate. The threaded sleeve 310 is threadedly engaged with the threaded segment 220 to drive the pressure regulating valve core assembly 200 to move along the extension direction of the guide slide 140.

[0049] By setting a drive motor 320 and a gear set 330, and setting external teeth on the outer periphery of the threaded sleeve 310, the drive motor 320 is connected to the gear set 330, and the gear set 330 is connected to the external teeth of the threaded sleeve 310, so that the drive motor 320 drives the gear set 330 to rotate, and the gear set 330 can be rotated by engaging with the external teeth of the threaded sleeve 310, thereby realizing the threaded cooperation between the threaded sleeve 310 and the threaded section 220 to drive the pressure regulating valve core assembly 200 to move along the extension direction of the guide slide 140. The interior of the threaded sleeve 310 is set as a threaded structure that is threadedly matched with the threaded segment 220, and the outer periphery of the threaded sleeve 310 is provided with an external tooth structure, so that the threaded sleeve 310 can not only realize the function of rotation, but also has a driving mode that converts the rotational motion of the threaded sleeve 310 into the threaded matching of the threaded sleeve 310 and the threaded segment 220, thereby making the structure of the drive mechanism 300 more compact; since gear transmission is a precise transmission mode, the transmission of the gear set 330 and the transmission between the gear set 330 and the threaded sleeve 310 are also more stable.

[0050] In an optional embodiment, the gear set 330 may include a first gear 331 and a second gear 332. The first rotating shaft of the first gear 331 may be connected to the drive motor 320, the second gear 332 may mesh with the first gear 331, and the second rotating shaft of the second gear 332 may be rotatably connected to the housing 100. The threaded sleeve 310 may mesh with the second gear 332 via external teeth. By configuring the gear set 330 as the first gear 331 and the second gear 332, the middle second gear 332 can effectively buffer a portion of the transmission instability caused by unstable rotation of the drive motor 320, thereby making the movement of the pressure regulating valve core assembly 200 driven by the drive mechanism 300 more stable.

[0051] In an optional embodiment, the drive motor 320 may include a cable 321. The cable 321 may extend through the housing 100 and out of the housing 100. The cable 321 and the housing 100 may be sealed at the connection by a sealing ring. By sealing the connection between the cable 321 of the drive motor 320 and the housing 100 with a sealing ring, the inner cavity 110 and the gas passage 111 are prevented from communicating with the external environment at the connection between the cable 321 and the housing 100, thereby effectively ensuring the stability of the pressure in the inner cavity 110 and the gas passage 111. Since there is no relative movement at the connection between the cable 321 and the housing 100, the stability of the pressure in the inner cavity 110 and the gas passage 111 can be further improved.

[0052] Of course, in a specific implementation process, the drive motor 320 may also be a wirelessly controlled motor, and the drive motor 320 may be wirelessly charged or equipped with a rechargeable battery.

[0053] In an optional embodiment, the housing 100 may include an end cap 150, a housing 160, and a sealing ring. The end cap 150 and the housing 160 are detachably connected to enclose the inner cavity 110 and the gas channel 111, and the sealing ring is sealed at the connection between the end cap 150 and the housing 160. By arranging the end cap 150 and the housing 160 to be detachably connected, when inspecting and repairing the components in the inner cavity 110 and the gas channel 111, the end cap 150 can be removed for inspection and repair, thereby effectively improving the efficiency of maintenance. By arranging a sealing ring between the end cap 150 and the housing 160, the sealing between the end cap 150 and the housing 160 is improved, thereby effectively improving the environmental stability in the inner cavity 110 and the gas channel 111.

[0054] The present application also discloses a semiconductor process equipment, which includes a process chamber 600 and the pressure regulating device 700 disclosed in the above embodiment. The process chamber 600 includes an exhaust pipe 400, which is connected to the air inlet 120, and the exhaust port 130 is connected to the factory service end. Specifically, the exhaust pipe 400 can be welded to the air inlet 120, or it can be connected by bolts and then sealed by a sealing ring. The factory service end can be connected to the exhaust port 130 through a pipe, which can also be welded to the exhaust port 130, or it can be connected by bolts and sealed by a sealing ring.

[0055] The exhaust port 130 is connected to the air inlet 120 through the exhaust pipe 400 and is connected to the general factory service end, so that the pressure in the process chamber 600 can be adjusted through the pressure regulating device 700.

[0056] In an optional embodiment, the disclosed semiconductor process equipment may further include a pressure detection device 500 , which may be used to detect the actual pressure in the exhaust pipe 400 ; the pressure detection device 500 is typically a pressure gauge.

[0057] According to the correspondence between the pressure of the exhaust pipe 400 and the ventilation opening of the gas channel 111, the driving mechanism 300 drives the pressure regulating valve core assembly 200 to move so that the actual ventilation opening of the gas channel 111 is switched to the target ventilation opening, and the target ventilation opening corresponds to the target pressure.

[0058] By providing the pressure detection device 500, it is possible to determine whether the pressure in the process chamber 600 has reached the target pressure by detecting the pressure in the exhaust pipe 400. Furthermore, the pressure in the exhaust pipe 400 can be controlled to reach the target pressure by controlling the ventilation opening of the gas channel 111. It should be noted that the corresponding relationship described herein is preset and can usually be established through experimentation.

[0059] In an optional embodiment, the semiconductor process equipment may further include a vacuum system 800 , a differential pressure gauge 910 , and a vacuum gauge 920 . By providing the vacuum system 800 , the differential pressure gauge 910 , and the vacuum gauge 920 , the pressure in the process chamber 600 may be further detected and controlled.

[0060] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0061] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are protected by the present invention.

Claims

1. A pressure regulating device (700) for semiconductor process equipment, characterized in that: It comprises a housing (100), a pressure regulating valve core assembly (200) and a driving mechanism (300), wherein: The shell (100) has an inner cavity (110) and a gas channel (111) which are connected to each other. The gas channel (111) is provided with an air inlet (120) and an air outlet (130). The air inlet (120) is used to communicate with the exhaust pipe (400) of the semiconductor process equipment, and the air outlet (130) is connected to the factory service end. The other parts of the shell (100) are isolated from the external environment. The driving mechanism (300) is provided in the inner cavity (110), and the pressure regulating valve core assembly (200) is provided at the connection between the inner cavity (110) and the gas channel (111). The driving mechanism (300) is connected to the pressure regulating valve core assembly (200), and the driving mechanism (300) is used to drive the pressure regulating valve core assembly (200) to move, so that the pressure regulating valve core assembly (200) adjusts the ventilation opening of the gas channel (111).

2. The pressure regulating device (700) according to claim 1, characterized in that A guide slideway (140) is provided in the housing (100), the guide slideway (140) being provided at a connection point between the inner cavity (110) and the gas channel (111), and at least a portion of the pressure regulating valve core assembly (200) is located in the guide slideway (140); The driving mechanism (300) drives the pressure regulating valve core assembly (200) to move, so that the pressure regulating valve core assembly (200) moves along the extension direction of the guide slideway (140).

3. The pressure regulating device (700) according to claim 2, characterized in that The gas channel (111) comprises an air intake section (111a) and an air exhaust section (111b), the air intake port (120) is provided at the starting end of the air intake section (111a), and the air exhaust port (130) is provided at the end of the air exhaust section (111b); The pressure regulating valve core assembly (200) comprises a valve core body (210), the valve core body (210) is a conical body, and the valve core body (210) comprises a large end and a small end; The driving mechanism (300) drives the pressure regulating valve core assembly (200) to move, so as to control the depth of the small end of the valve core body (210) extending into the exhaust section (111b), so as to control the ventilation opening of the exhaust section (111b).

4. The pressure regulating device (700) according to claim 3, characterized in that The pressure regulating valve core assembly (200) further includes a threaded section (220) and a limit block (230), wherein the limit block (230) is fixedly connected to the valve core body (210) via the threaded section (220), and both the limit block (230) and the threaded section (220) are located in the guide slide (140), and the guide slide (140) can limit the limit block (230) from rotating along the central axis of the guide slide (140), thereby limiting the pressure regulating valve core assembly (200) from rotating along the central axis of the guide slide (140); The driving mechanism (300) comprises a threaded sleeve (310), the threaded sleeve (310) being sleeved on the threaded section (220) and threadably engaged with the threaded section (220), and the threaded engagement of the threaded sleeve (310) and the threaded section (220) can drive the pressure regulating valve core assembly (200) to move along the extension direction of the guide slideway (140).

5. The pressure regulating device (700) according to claim 4, characterized in that The driving mechanism (300) comprises a driving motor (320) and a gear set (330); the driving motor (320) is connected to the housing (100); the driving motor (320) is connected to the gear set (330); the outer periphery of the threaded sleeve (310) has external teeth that match the gear set (330); the threaded sleeve (310) is connected to the gear set (330) via the external teeth; The drive motor (320) drives the gear set (330) to rotate, so that the gear set (330) drives the threaded sleeve (310) to rotate. The threaded sleeve (310) and the threaded section (220) are threadedly engaged to drive the pressure regulating valve core assembly (200) to move along the extension direction of the guide slideway (140).

6. The pressure regulating device (700) according to claim 5, characterized in that The gear set (330) includes a first gear (331) and a second gear (332), wherein a first rotating shaft of the first gear (331) is connected to the drive motor (320), the second gear (332) is meshed with the first gear (331), and a second rotating shaft of the second gear (332) is rotationally connected to the housing (100), and the threaded sleeve (310) is meshed with the second gear (332) via the external teeth.

7. The pressure regulating device (700) according to claim 5, characterized in that The driving motor (320) includes a cable (321), the cable (321) passes through the housing (100) and extends outside the housing (100), and the cable (321) and the housing (100) are sealed at a connection point by a sealing ring.

8. The pressure regulating device (700) according to claim 1, characterized in that The housing (100) comprises an end cover (150), a box body (160) and a sealing ring. The end cover (150) and the box body (160) are detachably connected to enclose the inner cavity (110) and the gas channel (111). The sealing ring is sealed at the connection between the end cover (150) and the box body (160).

9. A semiconductor process equipment, characterized in that: The invention comprises a process chamber (600) and a pressure regulating device (700) according to any one of claims 1 to 8, wherein the process chamber (600) comprises an exhaust pipe (400), the exhaust pipe (400) is connected to the air inlet (120), and the exhaust port (130) is connected to the factory service end.

10. The semiconductor process equipment according to claim 9, wherein: The semiconductor process equipment further comprises a pressure detection device (500), wherein the pressure detection device (500) is used to detect the actual pressure in the exhaust pipe (400); According to the corresponding relationship between the pressure of the exhaust pipe (400) and the ventilation opening of the gas channel (111), the driving mechanism (300) drives the pressure regulating valve core assembly (200) to move, so that the actual ventilation opening of the gas channel (111) is switched to a target ventilation opening, and the target ventilation opening corresponds to the target pressure.

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