Inner wall measurement system and measurement method based on deep sagittal height workpiece

Abstract

The present invention relates to a method for measuring the full shape of the inner wall of a deep-sagittal workpiece, and specifically to a scheme and system for measuring the full shape of the inner wall of a deep-sagittal workpiece using dual sensors to measure different areas of the inner wall respectively and then perform surface splicing, comprising: a horizontal base, on which an XY positioning platform is provided, the XY positioning platform includes an X-direction motion platform that moves in the X direction and a Y-direction motion platform that moves in the Y direction; a turntable, arranged on the XY positioning platform, for rotating around the Z direction; a workpiece seat, arranged on the turntable, for placing the deep-sagittal workpiece; a vertical base, on which a Z-direction motion platform that moves in the Z direction is provided; a lateral gauge, arranged on the Z-direction motion platform, for measuring the inner wall side wall of the deep-sagittal workpiece; and an axial gauge, arranged on the Z-direction motion platform, for measuring the inner wall bottom wall of the deep-sagittal workpiece. This patent combines the lateral gauge and the axial gauge to measure the inner wall shape of the deep-sagittal workpiece, and the measurement structure and measurement method are not affected by optical fiber, and the measurement purpose can be achieved for deep-sagittal workpieces of various sizes.

Description

Technical Field

[0001] The present invention relates to a method for measuring the full shape of the inner wall of a workpiece with a deep vector height, and in particular to a scheme and system for measuring the full shape of the inner wall of a workpiece with a deep vector height, which uses dual sensors to measure different areas of the inner wall respectively and then perform surface splicing. Background Art

[0002] Deep-sagittal workpieces are widely used in precision equipment in the fields of aerospace, nuclear physics, etc. Due to their unique geometric shape and specific functions, they play a role that is difficult to replace by other individual or assembled parts. At the same time, due to their critical position, during the assembly process of these ultra-precision equipment, their geometric and contour errors will lead to greater assembly errors, thereby reducing the accuracy and reliability of the equipment. Therefore, as our performance requirements for these ultra-precision equipment become more and more stringent, our requirements for deep-sagittal workpieces are also getting higher and higher, especially for the geometric dimensional accuracy of their inner walls and the quality of their internal contours.

[0003] At present, these deep-sagittal workpieces are mainly processed by high-precision machine tools, such as fast tool servo (FTS). During the processing, due to the complex control process and processing technology and strict environmental requirements, the processing process is easily affected by abnormal factors such as environment and materials, which in turn leads to defects in deep-sagittal workpieces and reduces the processing quality of deep-sagittal workpieces. Therefore, in order to ensure the geometric dimensional accuracy and contour quality and consistency of deep-sagittal workpieces, and further improve the quality of workpieces through secondary processing, it is necessary to accurately evaluate the inner wall geometric dimensions and inner wall contour quality of deep-sagittal workpieces.

[0004] However, the current measurement methods are mainly aimed at measuring the outer wall of deep-sagittal workpieces. Existing measurement solutions, such as three-dimensional coordinate measuring machines, cannot measure the bottom of the inner wall due to their large probes and low measurement efficiency. Optical measurement methods have optical path interference or large measurement angles, which cannot meet the requirements of full-scale measurement of the inner wall. Therefore, a detection solution that can measure the full-scale inner wall of deep-sagittal workpieces is needed. Summary of the invention

[0005] The purpose of the present invention is to provide a comprehensive measurement scheme and system for the inner wall of a workpiece with deep vector height, which uses dual sensors to measure different areas of the inner wall separately and then performs surface splicing to meet the demand that existing measurement methods cannot achieve complete measurement of the inner wall of the workpiece with deep vector height.

[0006] The object of the present invention is achieved in that:

[0007] The inner wall measurement system based on deep sagittal workpiece includes:

[0008] A horizontal base, on which an XY positioning platform is provided, the XY positioning platform comprising an X-direction motion platform moving in the X direction and a Y-direction motion platform moving in the Y direction;

[0009] A turntable, which is arranged on the XY positioning platform and is used for rotating about the Z direction;

[0010] A workpiece seat, arranged on the turntable, for placing a deep sagittal height workpiece;

[0011] A vertical base, on which a Z-direction motion platform for movement in the Z direction is provided;

[0012] A side gauge, arranged on the Z-direction motion platform, for measuring the inner wall and side wall of a deep sagittal height workpiece; and

[0013] An axial gauge is arranged on the Z-direction motion platform and is used for measuring the inner wall and bottom wall of a deep-sagittal-height workpiece.

[0014] Furthermore, it also includes a first component space posture adjustment device, which is arranged between the turntable and the workpiece seat and is used to drive the workpiece seat to rotate around the X direction and / or around the Y direction.

[0015] Furthermore, the first component spatial posture adjustment device includes two first angular platforms which rotate around the X direction and around the Y direction respectively.

[0016] Furthermore, it also includes two second spatial attitude adjustment devices, which are arranged on the Z-direction motion platform; the lateral gauge and the axial gauge are respectively arranged on the corresponding second spatial attitude adjustment devices; the second spatial attitude adjustment device is used to drive the lateral gauge and the axial gauge to rotate around the X-direction and / or the Z-direction.

[0017] Furthermore, the second component spatial posture adjustment device includes two second angular platforms which rotate around the X direction and around the Z direction respectively.

[0018] Furthermore, the lateral gauge and the axial gauge both include a measuring rod and a measuring ball arranged on the end of the measuring rod.

[0019] The inner wall measurement method based on a deep-sagittal workpiece is used in the inner wall measurement system based on a deep-sagittal workpiece, and includes:

[0020] Step (1) Correcting the lateral gauge and the axial gauge to a vertical state;

[0021] Step (2) correcting the workpiece seat so that the deep sagittal height workpiece is in a horizontal state;

[0022] Step (3) measures the surface shape of the inner wall side wall of the deep-sagittal workpiece by moving the lateral gauge along the generatrix of the deep-sagittal workpiece against the inner wall side wall of the deep-sagittal workpiece; measures the surface shape of the inner wall bottom wall of the deep-sagittal workpiece by moving the axial gauge along the generatrix base of the deep-sagittal workpiece on the inner wall bottom wall of the deep-sagittal workpiece;

[0023] Step (4) splices the surface shape of the inner wall side wall and the surface shape of the inner wall bottom wall to obtain a complete deep-sagittal workpiece surface shape.

[0024] Furthermore, the lateral gauge and the axial gauge have measuring balls, which are pressed against the inner wall of the deep sagittal height workpiece by the measuring balls; during step (3), there is a measuring ball trajectory, and there is a point coordinate P on the measuring ball trajectory Ai (x0,y Ai , z Ai ), the point has a slope k relative to the coordinate system Ai and the corresponding inclination angle θ Ai ; According to the slope k Ai and the corresponding inclination angle θ Ai The measurement ball is calculated at θ Ai The radius under the angle; according to the one-to-one mapping relationship, the corresponding point coordinates P can be obtained Ai (x0,y Ai , z Ai ) of the inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′); by calculating the coordinates of multiple points P Ai (x0,y Ai , z Ai ) The corresponding inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′), to obtain the continuous surface shape of the inner wall and side wall;

[0025] During step (3), there is a measuring ball trajectory, and there is a point coordinate P on the measuring ball trajectory. Bi (x0,y Bi , z Bi ), the point has a slope k relative to the coordinate system Bi and the corresponding inclination angle θ Bi ; According to the slope k Bi and the corresponding inclination angle θ Bi The measurement ball is calculated at θ Bi The radius under the angle; according to the one-to-one mapping relationship, the corresponding point coordinates P can be obtained Bi (x0,y Bi , z Bi ) of the inner wall point coordinates P Bi ′(x0′,y Bi ′,z Bi ′); by calculating the coordinates of multiple points P Bi (x0,y Bi , z BBi ) The corresponding inner wall point coordinates P Bi′(x0′,y Bi ′,z Bi ′), to obtain the continuous surface shape of the inner wall and side wall.

[0026] Furthermore, the step (1) includes correcting the spatial inclination of the lateral or axial meter based on a standard sphere, which includes the steps of:

[0027] Step (1.1) Setting a standard ball on a workpiece seat;

[0028] Step (1.2) finding a first reference plane; the first reference plane is a center plane on a standard sphere, and the first reference plane is parallel to a plane in a three-dimensional coordinate system;

[0029] Step (1.3) drives the lateral gauge or axial gauge to abut against the outer contour of the first reference surface and move linearly along the outer contour of the first reference surface; records a first position at which the measured value is the smallest during the movement of the lateral gauge or axial gauge, and a second position at a certain distance from the first position, and records the minimum measured value and the measured value respectively;

[0030] Step (1.4) Calculate the spatial inclination angle α between the lateral gauge or axial gauge and the first reference axis based on the minimum measured value and the measured value A ; The first reference axis is arranged perpendicular to the first reference plane;

[0031] Step (1.5) is based on the spatial inclination angle α A The numerically driven second component spatial posture adjustment device corrects the angular difference between the lateral gauge or the axial gauge and the first reference axis.

[0032] Furthermore, the calculation method in step (1.4) includes:

[0033] During the lateral or axial movement, there is a first position measurement edge Z A0 O A0 , Second position measurement side Z An O An , right triangle O A Q A O An With right triangle O An T A P A , the spatial inclination angle α A ∠P A O An T A ; Wherein, the first position measurement side Z A0 O A0 The value of S A0 , the second position measurement side Z An O An The value of S An;

[0034] In the right triangle O A Q A O An Middle, click O A is the center of the standard sphere, point O An The second position Z An The center of the measuring ball of the upper lateral gauge or axial gauge, point Q A Point O A Extend the side horizontally to point O An The intersection of the vertically extended edges;

[0035] In the right triangle O An T A P A Middle, click P A The first position Z An The vertical extension edge of the measuring ball center of the upper lateral gauge or axial gauge and the second position measuring edge Z An O An The intersection point, point T A Point O An On the side A O A0 The vertical point on

[0036] Calculate ∠P according to formulas (1)-(5) A O An T A ; Wherein, R is the radius of the standard sphere, r A To measure the sphere radius.

[0037] <![CDATA[O An P A =S An -S A0 ]]> (1) <![CDATA[O A O An =R+r A O A O An =R+r A ]]> (2) <![CDATA[O A Q A =O A O A0 -Q A O A0 =O A O A0 -O An T A =R+r A -(S An -S A0 )×cosα A ]]> (3) <![CDATA[Q A O An =T A O A0 =P A O A0 -P A T A =Z An -Z A0 -(S An -S A0 )×sinα A ]]> (4) <![CDATA[|O A O An | 2 =|O A Q A | 2 +|Q A O An | 2 ]]> (5)

[0038] Furthermore, the step (1) further comprises measuring the roundness of the ball in the lateral gauge or axial gauge based on a standard ball, which comprises the steps

[0039] Step (1.6) sets a standard ball on the workpiece seat;

[0040] Step (1.7) finding a second reference plane; the second reference plane is a center plane on a standard sphere, and the second reference plane is parallel to a plane in the three-dimensional coordinate system;

[0041] Step (1.8) drives the lateral gauge or the axial gauge to abut against the outer contour of the second reference surface and move linearly along the outer contour of the second reference surface; records a first position at which the measurement value is the smallest during the movement of the lateral gauge or the axial gauge, and a plurality of second positions at a certain distance from the first position, and respectively records the minimum measurement value and the measurement value;

[0042] Step (1.9) Calculate the radius r of the measuring sphere at different positions based on the minimum measured value and several measured values Ai, and integrate the radius r of the measuring sphere Ai Get the roundness of the measuring ball.

[0043] Furthermore, it is characterized in that the calculation method in step (1.9) includes:

[0044] There is a right triangle O during the lateral or axial meter movement A Q Ai O Ai , at the point right triangle O A Q Ai O Ai , click O A The center of the measuring sphere, point O Ai The second position Z Ai The center of the measuring sphere passes through point O A There exists a straight line O A Z A0 , the Q Ai Point O Ai On the straight line O A Z A0 The vertical point on;.

[0045] Calculate the radius r of the measuring sphere according to formulas (6)-(10): Ai ; wherein the θ Ai ∠O Ai O A Q Ai .

[0046]

[0047]

[0048] Furthermore, the step (2) includes correcting the spatial inclination angle of the workpiece seat based on the corrected lateral gauge or axial gauge, which includes:

[0049] Step (2.1) placing a deep sagittal height workpiece on a workpiece holder;

[0050] Step (2.2) drives the axial gauge to move in the X direction at the height z1′ in the deep sagittal workpiece, finds the point P1′ with the largest measurement value, and records its coordinate value (x1′, y1′, z1′); drives the axial gauge to move in the X direction at the height z2′ in the deep sagittal workpiece, finds the point P2′ with the largest measurement value, and records its coordinate value (x2′, y2′, z2′);

[0051] Drive the axial meter to move in the Y direction at the height z3′ in the deep sagittal height workpiece, find the point P3′ with the largest measurement value, and record its coordinate value (x3′, y3′, z3′); drive the axial meter to move in the Y direction at the height z2′ in the deep sagittal height workpiece, find the point P4′ with the largest measurement value, and record its coordinate value (x4′, y4′, z4′).

[0052] Step (2.3) Calculate the inclination angle θ of the workpiece seat around the X direction according to formulas (11) and (12): α and the inclination angle θ about the Y direction b ;

[0053]

[0054] Furthermore, the step (4) includes: determining the overlapping area between the inner wall side wall shape and the inner wall bottom wall shape according to the coordinate relationship between the two surface shapes, to the coordinate change matrix of the two measured surface shapes; and then performing coordinate change on the entire measured surface shape to obtain the complete surface shape of the inner wall of the deep vector height workpiece.

[0055] Compared with the prior art, the present invention has the following outstanding and beneficial technical effects:

[0056] This patent combines the lateral gauge and the axial gauge to measure the inner wall shape of the deep-sag workpiece. The measurement structure and measurement method are not affected by the optical fiber, and can achieve the measurement purpose for deep-sag workpieces of various sizes. In addition, this patent drives the six-degree-of-freedom motion platform to perform the previous step correction of the workpiece seat, lateral gauge and axial gauge, effectively increasing the accuracy of deep-sag workpiece detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] Figure 1 It is a structural diagram of the inner wall measurement system.

[0058] FIG. 2( a ) is a schematic diagram of the correction of the lateral meter space inclination angle.

[0059] FIG. 2( b ) is a schematic diagram of the correction of the axial meter spatial inclination angle.

[0060] FIG. 3( a ) is a schematic diagram of measuring the roundness of a ball measured by a side gauge.

[0061] FIG3( b ) is a schematic diagram of measuring the roundness of a measuring ball in an axial gauge.

[0062] Figure 4 It is a schematic diagram of the measurement results of the ball roundness.

[0063] FIG. 5( a ) is a top schematic diagram of the side gauge performing spatial inclination correction of the workpiece seat.

[0064] FIG5( b ) is a three-dimensional schematic diagram of the side gauge performing spatial inclination correction of the workpiece seat.

[0065] Figure 6 It is a schematic diagram of the inner wall inspection process of a deep sagittal workpiece.

[0066] FIG. 7( a ) is a schematic diagram of a side gauge detecting the inner wall surface of a workpiece with a deep sagittal height.

[0067] FIG7( b ) is a schematic diagram of an axial gauge detecting the inner wall surface of a workpiece with a deep sagittal height.

[0068] The meaning of the symbols in the figure:

[0069] 101. Vertical base; 102. Z-axis motion platform; 103. Horizontal base; 104. Y-axis motion platform; 105. X-axis motion platform; 106. Turntable; 107. First component space posture adjustment device; 108. Workpiece seat; 109. Deep vector height workpiece; 110. Second component space posture adjustment device; 111. Lateral gauge; 112. Axial gauge; 201. Standard ball; 202. Measuring ball. DETAILED DESCRIPTION

[0070] The present invention will be further described below in conjunction with specific embodiments:

[0071] An embodiment of the present invention relates to a comprehensive inner wall shape measurement scheme and system for a workpiece with deep vector height that uses dual sensors to measure different areas of the inner wall separately and then perform surface shape splicing. The scheme is suitable for fields such as information electronics, aerospace, new energy, and biomedicine where ultra-precision processing and measurement products are key components.

[0072] The inner wall measurement system based on the deep sagittal height workpiece in this embodiment includes:

[0073] A workpiece seat 108 is used to place a deep-sagittal-height workpiece 109;

[0074] The side gauge 111 is used to measure the inner wall and side wall of the deep sagittal height workpiece 109

[0075] An axial gauge 112 is used to measure the inner and bottom walls of the deep sagittal height workpiece 109;

[0076] The six-degree-of-freedom motion platform is equipped with the workpiece base 108 , the lateral gauge 111 and the axial gauge 112 , and is used to drive the workpiece base 108 to perform six-degree-of-freedom motion relative to the lateral gauge 111 or the axial gauge 112 .

[0077] The six-degree-of-freedom motion platform in this patent includes a horizontal base 103 and a vertical base 101. The horizontal base 103 is used to install a workpiece base 108, and the vertical base 101 is used to install a lateral gauge 111 and an axial gauge 112.

[0078] Specific as Figure 1 As shown, the horizontal base 103 includes a horizontal bottom plate, on which are arranged, from bottom to top, an X-axis motion platform 105, a Y-axis motion platform 104, a turntable 106, a first component space posture adjustment device 107 and the workpiece seat 108. Specifically, the X-axis motion platform 105 is an X-axis slide rail device, and the Y-axis motion platform 104 is a Y-axis slide rail device, and the turntable 106 is arranged above the Y-shaped slide rail device, which is respectively used to drive the workpiece seat 108 to move in the X direction, in the Y direction, and to rotate around the Z direction; the first component space posture adjustment device 107 can be two first corner platforms stacked together, on which the workpiece seat 108 is arranged, and the two first corner platforms are respectively used to drive the workpiece seat 108 to rotate around the X direction and the Y direction.

[0079] The vertical base 101 is placed on one side of the horizontal base 103, and includes a vertical base plate vertically arranged with the horizontal base plate. The vertical base plate is provided with a Z-direction motion platform 102 and two second component space attitude adjustment devices 110. The two second component space attitude adjustment devices 110 are respectively equipped with the lateral gauge 111 and the axial gauge 112. The Z-direction motion platform 102 is specifically a Z-direction slide rail device. Since the two second component space attitude adjustment devices 110 are installed above the Z-direction slide rail device, when the Z-direction slide rail device is working, it will simultaneously drive the lateral gauge 111 and the axial gauge 112 to rise and fall. By changing the height position of the lateral gauge 111 and the axial gauge 112, the relative position between the workpiece seat 108 and the lateral gauge 111 or the axial gauge 112 is relatively changed, thereby realizing the Z-direction adjustment of the workpiece seat 108. The second component space attitude adjustment device 110 is provided with two, and the two second component space attitude adjustment devices 110 are used to drive the lateral gauge 111 and the axial gauge 112 to rotate around the Z direction and the X direction respectively, and the workpiece is rotated relative to the lateral gauge 111 or the axial gauge 112 by rotating around the Z direction; the second component space attitude adjustment device 110 specifically includes two second angle tables that rotate around the X direction and around the Z direction respectively. Combined with the above-mentioned vertical base 101, horizontal base 103 and the components on the vertical base 101 and the horizontal base 103, the six degrees of freedom adjustment of the workpiece seat 108 is realized.

[0080] The lateral gauge 111 in this patent reads by abutting against the inner wall of the deep-sagittal workpiece 109, and the end thereof is provided with a rod that contacts the inner wall of the deep-sagittal workpiece 109. The rod will swing or extend as the shape of the inner wall of the deep-sagittal workpiece 109 changes. The lateral gauge 111 will record the readings after the rod swings or extends in different situations, thereby reflecting the shape of the inner wall of the deep-sagittal workpiece 109. Similarly, the axial gauge 112 in this patent reads by abutting against the inner bottom wall of the deep-sagittal workpiece 109, and the end thereof is provided with a rod that contacts the inner bottom wall of the deep-sagittal workpiece 109. The rod will extend or extend as the shape of the surface of the abutted object changes. The lateral gauge 111 will record the readings after the rod extends or extends in different situations, thereby reflecting the shape of the inner bottom wall of the deep-sagittal workpiece 109. In addition, a measuring ball 202 is provided at the end of the abutment rod, and the measuring ball 202 is used to ensure that the lateral gauge 111 is in smooth contact with the inner wall of the deep arrow height workpiece 109; accordingly, the setting of the measuring ball 202 will invert the readings of the lateral gauge 111 and the axial gauge 112 from the center of the measuring ball 202 to the other end of the abutment rod.

[0081] Before measuring the deep-sagittal workpiece 109 in this patent, in order to ensure the accuracy of the measurement, the six-degree-of-freedom motion platform needs to be calibrated so that the workpiece seat 108, the lateral gauge 111 and the axial gauge 112 are in a vertical and horizontal state. After all the corrections are completed, the inner wall of the deep-sagittal workpiece 109109 is measured. The method includes measuring the surface shape of the inner wall side wall of the deep-sagittal workpiece 109 by moving the lateral gauge 111 along the generatrix of the deep-sagittal workpiece 109 against the inner wall side wall of the deep-sagittal workpiece 109; measuring the surface shape of the inner wall bottom wall of the deep-sagittal workpiece 109 by moving the axial gauge 112 along the generatrix base of the deep-sagittal workpiece 109 on the inner wall bottom wall of the deep-sagittal workpiece 109; splicing the surface shape of the inner wall side wall and the surface shape of the inner wall bottom wall to obtain the complete surface shape of the deep-sagittal workpiece 109. The splicing method can use a point cloud splicing algorithm to splice two measured surface shapes.

[0082] Therefore, this patent also includes a correction method based on the measurement of the inner wall of the deep sagittal height workpiece 109, which includes:

[0083] Step (1) Correcting the lateral gauge 111 and the axial gauge 112 to a vertical state;

[0084] Step (2) corrects the workpiece seat 108 so that the deep-sagittal-height workpiece 109 is in a horizontal state.

[0085] Wherein, the step (1) includes correcting the spatial inclination angle of the lateral gauge 111 or the axial gauge 112 based on the standard sphere 201, which includes:

[0086] Step (1.1) Setting a standard ball 201 on the workpiece seat 108;

[0087] Step (1.2) finding a first reference plane; the first reference plane is a center plane on the standard sphere 201, and the first reference plane is parallel to a plane in the three-dimensional coordinate system;

[0088] Step (1.3) drives the lateral gauge 111 or the axial gauge 112 to abut against the outer contour of the first reference surface and move linearly along the outer contour of the first reference surface; records the first position Z at which the measured value is the smallest during the movement of the lateral gauge 111 or the axial gauge 112 A0 , and the distance from the first position Z A0 The second position Z at a certain distance An , and record the minimum measured value S A0 With the measured value S An ;

[0089] Step (1.4) is based on the minimum measured value S A0 With the measured value S An Calculate the spatial inclination angle α between the lateral gauge 111 or the axial gauge 112 and the first reference axis A ; The first reference axis is arranged perpendicular to the first reference plane;

[0090] Step (1.5) is based on the spatial inclination angle α A The second component spatial posture adjustment device 110 is numerically driven to correct the angular difference between the lateral gauge 111 or the axial gauge 112 and the first reference axis.

[0091] As shown in FIG. 2( a ), taking the calibration of the lateral gauge 111 as an example, after the standard ball 201 is set on the workpiece seat 108, the plane corresponding to the movement direction of the measuring gauge is the YZ plane. At this time, the first reference plane is the center plane of the standard ball 201 parallel to the YZ plane. By making the lateral gauge 111 abut against the right side and move in the Z direction, the first position Z with the smallest measurement value during the movement is found. A0 And record its minimum value S A0 Then the lateral gauge 111 continues to move in the Z direction until the measured value of the lateral gauge 111 approaches the maximum value of its range and then stops, and records the second position Z An and the corresponding measured value S An ; Set the position where the lateral gauge 111 measured value is close to its range maximum value to the second position Z An The benefit of this is that it increases the measurement range and helps improve the stability of the readings.

[0092] When the minimum measured value S is obtained A0 With the measured value S An and the corresponding first position Z A0 With the second position Z An After that, the spatial inclination angle α between the lateral meter 111 and the X-axis can be calculated by the Pythagorean theorem. AAs shown in FIG. 2( a ), during the movement of the lateral gauge 111 or the axial gauge 112 , there is a first position measurement edge Z A0 O A0 , Second position measurement side Z An O An , right triangle O A Q A O An With right triangle O An T A P A , at this time the spatial inclination angle α A ∠P A O An T A ; Wherein, the first position measurement side Z A0 O A0 The value of S A0 , the second position measurement side Z An O An The value of is S An ;

[0093] In the right triangle O A Q A O An Middle, click O A The center of the standard ball 201, point O An The second position Z An The center of a certain center plane of the measuring ball 202 of the upper lateral gauge 111 or the axial gauge 112, point Q A Point O A Extend the side horizontally to point O An The intersection of the vertically extended edges;

[0094] In the right triangle O An T A P A Middle, click P A The first position Z An The vertical extension edge of the measuring ball 202 of the upper lateral gauge 111 or the axial gauge 112 is parallel to the second position measuring edge Z An O An The intersection point, point T A Point O An On the side A O A0 The vertical point on

[0095] Then, according to formulas (1)-(5), ∠P is calculated by solving the system of equations: A O An T A ; Wherein, R is the radius of the standard sphere 201, r A To measure the radius of the ball 202, all are known quantities.

[0096] <![CDATA[O An P A =S An -S A0 ]]> (1) <![CDATA[O A O An =R+r A ]]> (2) <![CDATA[O A Q A =O A O A0 -Q A O A0 =O A O A0 -O An T A =R+r A -(S An -S A0 )×cosα A ]]> (3) <![CDATA[Q A D An =T A O A0 =P A O A0 -P A T A =Z An -Z A0 -(S An -S A0 )×sinα A ]]> (4) <![CDATA[|O A O An | 2 =|O A Q A | 2 +|Q A O An | 2 ]]> (5)

[0097] In order to obtain the spatial inclination angle α A After that, the spatial inclination angle α is eliminated by adjusting the second spatial attitude adjustment device on the lateral meter 111 A Finally, the lever of the lateral gauge 111 is parallel to the X-axis on the YZ plane of the standard ball 201, refer to the state of the lateral gauge 111 in FIG. 3. Eliminate the spatial inclination angle α A Afterwards, the readings of the lateral gauge 111 can be made consistent, thereby improving accuracy.

[0098] The lateral gauge 111 uses the YZ plane as the first reference plane to adjust the spatial inclination angle α between the lateral gauge 111 and the X axis. A After that, the spatial inclination angle α between the lateral gauge 111 and the Z axis should be adjusted with XY as the first reference plane. A This is because the side gauge 111 performs measurements in a vertical motion during actual operation. Therefore, when calibrating the side gauge 111, it is only necessary to adjust the spatial inclination angle α between the side gauge 111 and the X-axis and the Z-axis. A The adjustment method based on the XY plane is the same as that based on the YZ plane, and this patent will not be repeated.

[0099] As shown in FIG. 2( b ), when the axial gauge 112 is corrected, the YZ plane of the standard ball 201 is also used as the first reference plane. By moving the axial gauge 112 in the Y direction above the standard ball 201, the first position Y where the measured value is the smallest during the movement is found. B0 And record its minimum value S B0 Then the axial gauge 112 continues to move in the Y direction until the axial gauge 112 measurement value approaches the maximum value of its range and stops, and records the second position Y Bn and the corresponding measured value S Bn ;

[0100] Combined with FIG. 2( b ), the spatial inclination angle α between the axial gauge 112 and the X-axis is calculated according to formulas (6)-(9): B In addition, the axial gauge 112 uses the YZ plane as the first reference plane to adjust the spatial inclination angle α B After that, the spatial inclination angle α between the axial gauge 112 and the Y axis should be adjusted with the XZ plane as the first reference plane. B This is because the axial gauge 112 moves horizontally during actual operation to measure the deep sagittal height of the workpiece. Therefore, when the axial gauge 112 is calibrated, it is only necessary to adjust the spatial inclination angle α between the axial gauge 112 and the X-axis and the Y-axis. A The method of adjusting the XZ plane is the same as that of adjusting the YZ plane, and this patent will not elaborate on this.

[0101] <![CDATA[O B O Bn =R+r B ]]> (6) <![CDATA[O B Q B =O B O B0 -Q B O B0 =O B O B0 -O Bn T B =R+r B -(S Bn -S B0 )×cosα B ]]> (7) <![CDATA[Q B O Bn =T B O B0 =P B O B0 -P B T B =Y Bn -Y B0 -(S Bn -S B0 )×sinα B ]]> (8) <![CDATA[|O B O Bn | 2 =|O B Q B | 2 +|Q B O Bn | 2 ]]> (9)

[0102] In this embodiment, the spatial inclination angle of the lateral meter 111 and the axial meter 112 can be converged to a smaller threshold, such as 0.1 degrees, through repeated calculations. At this time, the spatial inclination angle of the lateral meter 111 and the axial meter 112 is adjusted.

[0103] Furthermore, the step (1) further includes measuring the roundness of the measuring ball 202 in the lateral gauge 111 or the axial gauge 112 based on the standard ball 201, which includes the steps of:

[0104] (1.6) A standard ball 201 is set on the workpiece seat 108;

[0105] (1.7) Finding a second reference plane; the second reference plane is a center plane on the standard sphere 201, and the second reference plane is parallel to a plane in the three-dimensional coordinate system;

[0106] (1.8) driving the lateral gauge 111 or the axial gauge 112 to abut against the outer contour of the second reference surface and move linearly along the outer contour of the second reference surface; recording the first position Z at which the measured value is the smallest during the movement of the lateral gauge 111 or the axial gauge 112 A0 , and a number of distances from the first position Z A0 A second position Z at a certain distance Ai , and record the minimum measured value S A0 With the measured value S Ai ;

[0107] (1.9) According to the minimum measured value S A0 With some measured values ​​S Ai Calculate the radius r of the measuring ball 202 at different positions Ai , and integrate the radius r of the measuring sphere 202 Ai The roundness of the measuring ball 202 is obtained.

[0108] As shown in FIG3(a), taking the lateral gauge 111 as an example, the plane corresponding to the movement direction of the lateral gauge 111 is the YZ plane. At this time, the midline plane on the standard ball 201 parallel to the YZ plane is the second reference plane. By making the lateral gauge 111 abut against the right side and move in the Z direction, the first position Z with the smallest measurement value during the movement is found. A0 And record its minimum value S A0 Then the lateral gauge 111 continues to move in the Z direction until the measured value of the lateral gauge 111 approaches the maximum value of its range and then stops, and records the second position Z Ai , and the corresponding measured value S Ai .

[0109] At this time, there is a right triangle O in the process of the lateral meter 111 or the axial meter 112 moving. A QAi O Ai , at the point right triangle O A Q Ai O Ai , click O A Point O is the center of a certain center surface of the measuring ball 202. Ai The second position Z Ai The center of the measuring ball 202 passes through point O A There exists a straight line O A Z A0 , the Q Ai Point O Ai On the straight line O A Z A0 The vertical point on

[0110] Calculate the radius r of the measuring sphere 202 according to formulas (10)-(14): Ai ; wherein the θ Ai ∠O Ai O A Q Ai , R is the radius of the standard sphere 201, r Ai The radius of the contact point of the ball 202 measured by the lateral gauge 111, θ Ai To measure the angle of the contact point of the ball 202 relative to the initial point, the equation can be solved to find that the lateral gauge 111 is at an angle θ Ai The radius r Ai , by integrating multiple second positions Z Ai , to obtain a complete and continuous roundness profile of the measuring ball 202.

[0111]

[0112] Since the side gauge 111 in this patent is provided with a measuring ball 202, when the side gauge 111 detects the deep sagittal workpiece 109, the contour detected by it is the trajectory of the center of the measuring ball 202, rather than the contour of the deep sagittal workpiece 109; therefore, it is necessary to detect the roundness contour of the measuring ball 202 so as to map the inner wall contour of the deep sagittal workpiece 109 according to the roundness contour of the measuring ball 202 when the side gauge 111 detects the deep sagittal workpiece 109. Figure 4 As shown, under normal circumstances, the introductory gauge 111 only uses a measuring surface of about 120 degrees during the measurement process. Therefore, when detecting the roundness profile of the measuring ball 202, it is only necessary to determine the surface profile of the measuring ball 202 of about 120 degrees to meet the working needs.

[0113] As shown in FIG3(b), similarly to the lateral gauge 111, when detecting the roundness profile of the axial gauge 112, the plane corresponding to the movement direction of the axial gauge 112 is also the YZ plane. By moving the axial gauge 112 in the Y direction, the first position Y with the smallest measured value during the movement is found. B0 And record its minimum value S B0 Then the axial gauge 112 continues to move in the Y direction until the axial gauge 112 measurement value approaches the maximum value of its range and stops, and records the second position Y Bi , and the corresponding measured value S Bi As shown in FIG. 3( b ), during the calibration process of the axial gauge 112 , there is a right triangle O B Q Bi O Bi In the example, the roundness profile of the ball 202 measured by the axial gauge 112 is obtained by formulas (15)-(19).

[0114]

[0115]

[0116] Furthermore, the step (2) includes correcting the spatial inclination angle of the workpiece holder 108 based on the corrected lateral gauge 111 or axial gauge 112, which includes:

[0117] Step (2.1) placing a deep-sagittal-height workpiece 109 on the workpiece seat 108, wherein the deep-sagittal-height workpiece 109 is directly placed in the workpiece seat 108;

[0118] Step (2.2) drives the axial gauge 112 to move in the X direction at the height z1′ in the deep sagittal workpiece 109, finds the point P1′ with the largest measurement value, and records its coordinate value (x1′, y1′, z1′); drives the axial gauge 112 to move in the X direction at the height z2′ in the deep sagittal workpiece 109, finds the point P2′ with the largest measurement value, and records its coordinate value (x2′, y2′, z2′);

[0119] The axial gauge 112 is driven to move in the Y direction at the height z3 in the deep sagittal workpiece 109, to find the point P3′ with the largest measured value, and to record its coordinate value (x3′, y3′, z3′); the axial gauge 112 is driven to move in the Y direction at the height z2′ in the deep sagittal workpiece 109, to find the point P4′ with the largest measured value, and to record its coordinate value (x4′, y4′, z4′)

[0120] Step (2.3) Calculate the inclination angle θ of the workpiece seat 108 around the X direction according to formulas (20) and (21): α and the inclination angle θ around the X direction b ;

[0121]

[0122]

[0123] As shown in FIG. 5 , taking the axial gauge 112 as an example, points P1′ and P2′ correspond to two points on the X-axis generatrix of the deep sagittal height workpiece 109. The inclination angle θ can be obtained by taking the inverse trigonometric function according to the point coordinates. α The reading is based on the inclination angle θ α The value is used to adjust the first component spatial posture adjustment device 107 to achieve elimination. Similarly, the axial gauge 112 is moved in the Y direction to find the inclination angle θ of the workpiece seat 108 around the Y direction. b This correction method can make the inclination angle θ α and the inclination angle θ b Converge to a smaller threshold, such as 0.05 degrees.

[0124] After all corrections are completed, the inner wall measurement of the deep sagittal workpiece 109 is performed.

[0125] Specific as Figure 6 As shown, the measuring direction of the lateral gauge 111 is from the edge to the center, and the distance from the measuring end point to the axis of the deep sagittal workpiece 109 is d A The measuring direction of the axial gauge 112 is from the center to the edge of the deep sagittal workpiece 109, and the distance from the measuring end point to the axis of the deep sagittal workpiece 109 is d B , and, in general, d B >d A .

[0126] As shown in FIG. 7 , in the process of measuring the inner wall and the side wall by the lateral gauge 111 , there is a track of the measuring ball 202 , and there is a point coordinate P on the track of the measuring ball Ai (x0,y Ai , z Ai ), the point has a slope k relative to the coordinate system Ai and the corresponding inclination angle θ Ai ; According to the slope k Ai and the corresponding inclination angle θ Ai The measurement ball is calculated at θ Ai The radius under the angle; According to the one-to-one mapping relationship, combined with formulas (22)-(24), the corresponding point coordinates P can be obtained Ai (x0,y Ai , z Ai ) of the inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′); by calculating the coordinates of multiple points P Ai (x0,y Ai , z Ai) The corresponding inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′), to obtain the generatrix trajectory of the continuous inner wall and side wall.

[0127] <![CDATA[y Ai ′=y Ai -r Ai cos(θ Ai )]]> (22) <![CDATA[z Ai ′=z Ai -r Ai sin(θ Ai )]]> (23) <![CDATA[θ Ai =arctan(k Ai )]]> (24)

[0128] Similarly, in the process of measuring the inner wall and the bottom wall by the axial gauge 112, there is a measuring ball track, and there is a point coordinate P on the measuring ball track. Bi (x0,y Bi , z Bi ), the point has a slope k relative to the coordinate system Bi and the corresponding inclination angle θ Bi ; According to the slope k Bi and the corresponding inclination angle θ Bi The measurement ball is calculated at θ Bi The radius under the angle; according to the one-to-one mapping relationship, the corresponding point coordinates P can be obtained Bi (x0,y Bi , z Bi ) of the inner wall point coordinates P Bi ′(x0′,y Bi ′,z Bi ′); by calculating the coordinates of multiple points P Bi (x0,y Bi , z BBi ) The corresponding inner wall point coordinates P Bi ′(x0′,y Bi ′,z Bi ′), to obtain the generatrix trajectory of the continuous inner wall and bottom wall.

[0129] <![CDATA[y Bi ′=y Bi -r Bi cos(θ Bi )]]> (25) <![CDATA[z Bi ′=z Bi -r Bi sin(θ Bi )]]> (26) <![CDATA[θ Bi =arctan(k Bi )]]> (27)

[0130] After obtaining the generatrix trajectory of the continuous inner wall side wall and the generatrix trajectory of the continuous inner wall bottom wall, the rotating workpiece seat 108 continues to measure to obtain the surface shape of the continuous inner wall side wall and the surface shape of the inner wall bottom wall, and splicing is performed according to the surface shape of the inner wall side wall and the surface shape of the inner wall bottom wall.

[0131] In the process of splicing the surface shape of the inner wall side wall and the surface shape of the inner wall bottom wall, due to d B >d A Therefore, there must be an overlapping area between the inner wall side wall and the inner wall bottom wall. Specifically, the overlapping area between the two surface shapes is determined according to the measured surface shape coordinate axis, and then the overlapping area is spliced ​​by point cloud matching, that is, after the coordinates of the two surface shapes are changed according to the change matrix, after the overlapping area is overlapped, the coordinates of the entire surface shape of the deep vector height workpiece 109 are changed to obtain the complete surface shape of the inner wall of the deep vector height workpiece 109.

[0132] This patent combines the lateral gauge 111 and the axial gauge 112 to measure the inner wall shape of the deep-sagittal workpiece 109. The measurement structure and measurement method are not affected by the optical fiber, and can achieve the measurement purpose for deep-sagittal workpieces 109 of various sizes. In addition, this patent drives the six-degree-of-freedom motion platform to perform the previous step correction of the workpiece seat 108, the lateral gauge 111 and the axial gauge 112, effectively increasing the accuracy of the detection of the deep-sagittal workpiece 109.

[0133] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for measuring the inner wall of a workpiece based on deep sagittal height, characterized in that: include: Step (1) Correcting the lateral gauge and the axial gauge to a vertical state; Step (2) correcting the workpiece seat so that the deep sagittal height workpiece is in a horizontal state; Step (3) measures the surface shape of the inner wall side wall of the deep-sagittal workpiece by moving the lateral gauge along the generatrix of the deep-sagittal workpiece against the inner wall side wall of the deep-sagittal workpiece; measures the surface shape of the inner wall bottom wall of the deep-sagittal workpiece by moving the axial gauge along the generatrix base of the deep-sagittal workpiece on the inner wall bottom wall of the deep-sagittal workpiece; Step (4) splicing the surface shape of the inner wall side wall and the surface shape of the inner wall bottom wall to obtain a complete deep sagittal height workpiece surface shape; The lateral gauge and the axial gauge have measuring balls, which are pressed against the inner wall of the deep sagittal height workpiece by the measuring balls; during step (3), there is a measuring ball trajectory, and there is a point coordinate P on the measuring ball trajectory Ai (x0,y Ai ,z Ai ), the point has a slope k relative to the coordinate system Ai and the corresponding inclination angle θ Ai ; According to the slope k Ai and the corresponding inclination angle θ Ai The measurement ball is calculated at θ Ai The radius under the angle; according to the one-to-one mapping relationship, the corresponding point coordinates P can be obtained Ai (x0,y Ai ,z Ai ) of the inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′); by calculating the coordinates of multiple points P Ai (x0,y Ai ,z Ai ) The corresponding inner wall point coordinates P Ai ′(x0′,y Ai ′,z Ai ′), to obtain the generatrix trajectory of the continuous inner wall and side wall; In step (3), there is a measuring ball trajectory, and there is a point coordinate P on the measuring ball trajectory. Bi (x0,y Bi ,z Bi ), the point has a slope k relative to the coordinate system Bi and the corresponding inclination angle θ Bi ; According to the slope k Bi and the corresponding inclination angle θ Bi The measurement ball is calculated at θ Bi The radius under the angle; according to the one-to-one mapping relationship, the corresponding point coordinates P can be obtained Bi (x0,y Bi ,z Bi ) of the inner wall point coordinates P Bi ′(x0′,y Bi ′,z Bi ′); by calculating the coordinates of multiple points P Bi (x0,y Bi ,z Bi ) The corresponding inner wall point coordinates P Bi ′(x0′,y Bi ′,z Bi ′), to obtain the generatrix trajectory of the continuous inner wall and bottom wall; After obtaining the generatrix trajectory of the continuous inner wall side wall and the generatrix trajectory of the continuous inner wall bottom wall, the workpiece holder is rotated to continue measuring to obtain the surface shape of the continuous inner wall side wall and the surface shape of the inner wall bottom wall.

2. The inner wall measurement method based on deep sagittal height workpiece according to claim 1 is characterized in that: The method comprises: the step (1) comprises correcting the spatial inclination of the lateral meter or the axial meter based on a standard sphere, which comprises the steps of: Step (1.1) Setting a standard ball on a workpiece seat; Step (1.2) finding a first reference plane; the first reference plane is a center plane on a standard sphere, and the first reference plane is parallel to a plane in a three-dimensional coordinate system; Step (1.3) drives the lateral gauge or axial gauge to abut against the outer contour of the first reference surface and move linearly along the outer contour of the first reference surface; records a first position at which the measured value is the smallest during the movement of the lateral gauge or axial gauge, and a second position at a certain distance from the first position, and records the minimum measured value and the measured value respectively; Step (1.4) Calculate the spatial inclination angle α between the lateral gauge or axial gauge and the first reference axis based on the minimum measured value and the measured value A ; The first reference axis is arranged perpendicular to the first reference plane; Step (1.5) is based on the spatial inclination angle α A The numerically driven second component spatial posture adjustment device corrects the angular difference between the lateral gauge or the axial gauge and the first reference axis.

3. The inner wall measurement method based on deep sagittal height workpiece according to claim 2 is characterized in that: The calculation method in step (1.4) includes: During the lateral or axial movement, there is a first position measurement edge Z A0 O A0 , Second position measurement side Z An O An , right triangle O A Q A O An With right triangle O An T A P A , the spatial inclination angle α A ∠P A O An T A ; Wherein, the first position measurement side Z A0 O A0 The value of S A0 , the second position measures side Z An O An The value of S An ; In the right triangle O A Q A O An Middle, click O A is the center of the standard sphere, point O An The second position Z An The center of the measuring ball of the upper lateral gauge or axial gauge, point Q A Point O A Extend the side horizontally to point O An The intersection of the vertically extended edges; In the right triangle O An T A P A Middle, click P A The first position Z An The vertical extension edge of the measuring ball center of the upper lateral gauge or axial gauge and the second position measuring edge Z An O An The intersection point, point T A Point O An On the side A O A0 The vertical point on (1)O An P A =S An -S A0 (2)O A O An =R+r A O A O An =R+r A (3)O A Q A =O A O A0 -Q A O A0 =O A O A0 -O An T A =R+r A -(S An -S A0 )×cosα A (4)Q A O An =T A O A0 =P A O A0 -P A T A =Z An -Z A0 -(S An -S A0 )×sinα A (5)|O A O An | 2 =|O A Q A | 2 +|Q A O An | 2 Calculate ∠P according to formulas (1)-(5) A O An T A ; Wherein, R is the radius of the standard sphere, r A To measure the sphere radius.

4. The inner wall measurement method based on deep sagittal height workpiece according to claim 1 is characterized in that: The step (1) further comprises measuring the roundness of the ball in the lateral gauge or axial gauge based on a standard ball, which comprises the steps of Step (1.6) sets a standard ball on the workpiece seat; Step (1.7) finding a second reference plane; the second reference plane is a center plane on a standard sphere, and the second reference plane is parallel to a plane in the three-dimensional coordinate system; Step (1.8) drives the lateral gauge or the axial gauge to abut against the outer contour of the second reference surface and move linearly along the outer contour of the second reference surface; records a first position at which the measurement value is the smallest during the movement of the lateral gauge or the axial gauge, and a plurality of second positions at a certain distance from the first position, and respectively records the minimum measurement value and the measurement value; Step (1.9) Calculate the radius r of the measuring sphere at different positions based on the minimum measured value and several measured values Ai , and integrate the radius r of the measuring sphere Ai Get the roundness of the measuring ball.

5. The inner wall measurement method based on deep sagittal height workpiece according to claim 4 is characterized in that: The calculation method in step (1.9) includes: There is a right triangle O during the lateral or axial meter movement A Q Ai O Ai , at the point right triangle O A Q Ai O Ai , click O A The center of the measuring sphere, point O Ai The second position Z Ai The center of the measuring sphere passes through point O A There exists a straight line O A Z A0 , the Q Ai Point O Ai On the straight line O A Z A0 The vertical point on (6)O A O Ai =R+r Ai (7)O A Q Ai =O A O A0 -Q Ai O A0 =O A O A0 -(S Ai -S A0 )=R+r A0 -S Ai +S A0 (8)Q Ai ABOUT Ai =Z Ai -WITH A0 (9)|O A O Ai | 2 =|O A Q Ai | 2 +|Q Ai O Ai | 2 Calculate the radius r of the measuring sphere according to formulas (6)-(10): Ai ; wherein the θ Ai ∠O Ai O A Q Ai .

6. The inner wall measurement method based on deep sagittal height workpiece according to claim 1 is characterized in that: The step (2) includes correcting the spatial inclination angle of the workpiece seat based on the corrected lateral gauge or axial gauge, which includes: Step (2.1) placing a deep sagittal height workpiece on a workpiece holder; Step (2.2) drives the axial gauge to move in the X direction at the height z1′ in the deep sagittal workpiece, finds the point P1′ with the largest measurement value, and records its coordinate value (x1′, y1′, z1′); drives the axial gauge to move in the X direction at the height z2′ in the deep sagittal workpiece, finds the point P2′ with the largest measurement value, and records its coordinate value (x2′, y2′, z2′); Drive the axial gauge to move in the Y direction at the height z3′ in the deep sagittal workpiece, find the point P3′ with the largest measurement value, and record its coordinate value (x3′, y3′, z3′); drive the axial gauge to move in the Y direction at the height z2′ in the deep sagittal workpiece, find the point P4′ with the largest measurement value, and record its coordinate value (x4', y4', z4'); Step (2.3) Calculate the inclination angle θ of the workpiece seat around the X direction according to formulas (11) and (12): α and the inclination angle θ about the Y direction b .

7. The inner wall measurement method based on deep sagittal height workpiece according to claim 1 is characterized in that: The step (4) includes: determining the overlapping area between the inner wall side wall shape and the inner wall bottom wall shape according to the coordinate relationship between the two surface shapes, and obtaining a coordinate change matrix of the two measured surface shapes; and then performing coordinate change on the entire measured surface shape to obtain the complete surface shape of the inner wall of the deep vector height workpiece.

8. An inner wall measurement system based on a deep sagittal height workpiece adopts an inner wall measurement method as described in any one of claims 1 to 7, characterized in that: include: A horizontal base, on which an XY positioning platform is provided, the XY positioning platform comprising an X-direction motion platform moving in the X direction and a Y-direction motion platform moving in the Y direction; A turntable, which is arranged on the XY positioning platform and is used for rotating about the Z direction; A workpiece seat, arranged on the turntable, for placing a deep sagittal height workpiece; A vertical base, on which a Z-direction motion platform for movement in the Z direction is provided; A side gauge, arranged on the Z-direction motion platform, for measuring the inner side wall of a workpiece with a deep sagittal height; as well as An axial gauge is arranged on the Z-direction motion platform and is used for measuring the inner wall and bottom wall of a deep-sagittal-height workpiece.

9. The inner wall measurement system based on deep sagittal height workpiece according to claim 8, characterized in that: It also includes a first component space posture adjustment device, which is arranged between the turntable and the workpiece seat and is used to drive the workpiece seat to rotate around the X direction and / or around the Y direction; It also includes two second spatial attitude adjustment devices, which are arranged on the Z-direction motion platform; the lateral gauge and the axial gauge are respectively arranged on the corresponding second spatial attitude adjustment devices; the second spatial attitude adjustment device is used to drive the lateral gauge and the axial gauge to rotate around the X-direction and / or the Z-direction.

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