A centrifuge layer expander for a frame combining and glue tearing machine
By designing the centrifugal layer expansion container of the frame-combining glue tearing machine, the wafer positioning is used to position the disk and slider structure, and the problem of low wafer positioning and resist drying efficiency in the prior art is solved, and the production efficiency of silicon wafers is improved.
Patent Information
- Application Number
- CN202111561110.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-15
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2041-12-15
AI Technical Summary
The existing centrifugal layer expansion containers are inconvenient to position the wafer during use, and are inconvenient to quickly and evenly dry the resist, resulting in a reduced production efficiency of silicon wafers.
A centrifugal layer expansion container of a frame-combined glue tearing machine is designed, and wafer positioning is adopted for disk and slider structures, uniform coating of resist is achieved through rotating centrifugal force, and the resist layer is quickly dried by fan and electric heating rod.
It realizes convenient positioning of wafers and fast and uniform drying of resists, improving the production efficiency of silicon wafers.
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Figure CN114284143B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of centrifugal layer expansion containers, and particularly to a centrifugal layer expansion container for a frame bonding and glue tearing machine. Background Art
[0002] A frame bonding and glue tearing machine ionizes oxygen or other reaction gases by using microwave plasma to form chemically active free radicals, which then react with the photoresist to generate volatile substances that are evacuated from the cavity by a vacuum pump, thereby achieving the functions of photoresist etching and removal. A wafer refers to a silicon wafer used for fabricating silicon semiconductor integrated circuits. Since its shape is circular, it is called a wafer; various circuit element structures can be fabricated on the silicon wafer to form an integrated circuit product with specific electrical functions. A wafer manufacturing factory melts this polysilicon, then seeds a seed crystal in the melt, and then slowly pulls it out to form a cylindrical single crystal silicon ingot. Since the silicon ingot is gradually formed from a seed crystal with a determined crystal plane orientation in the molten silicon raw material. The silicon ingot is then cut into segments, ground, sliced, chamfered, polished, laser engraved, and packaged to become the basic raw material of an integrated circuit factory - a silicon wafer, which is the "wafer". A centrifugal layer expansion container is a device used for coating a resist on the surface of a wafer.
[0003] In the prior art, during the use of a centrifugal layer expansion container, it is not convenient to position the wafer and not convenient to quickly and evenly dry the resist, which leads to a reduction in the production efficiency of silicon wafers. For this reason, we propose a centrifugal layer expansion container for a frame bonding and glue tearing machine to solve the above problems. Summary of the Invention
[0004] The purpose of the present invention is to solve the drawbacks in the prior art that during the use of a centrifugal layer expansion container, it is not convenient to position the wafer and not convenient to quickly and evenly dry the resist, which leads to a reduction in the production efficiency of silicon wafers, and to propose a centrifugal layer expansion container for a frame bonding and glue tearing machine.
[0005] To achieve the above purpose, the present invention adopts the following technical solutions:
[0006] A centrifugal layer expansion container for a combined frame glue tearing machine, comprising a housing. A cover plate is hinged to the outside of the housing. A drying box is fixedly installed at the top of the housing by welding. A support is fixedly installed on the bottom inner wall of the housing by welding. A rotating groove is formed in the top of the support. A connecting plate is rotatably installed in the rotating groove. A disc is fixedly installed at the top of the connecting plate by welding. Two symmetrical first sliding grooves are formed in the disc. First sliders are slidably installed in both of the two first sliding grooves. A positioning mechanism is arranged on the two first sliders. A first empty groove is formed in the disc. A second empty groove is formed in the support. An installation hole is formed in the bottom inner wall of the drying box. A corrugated pipe is fixedly installed in the installation hole. One end of the corrugated pipe is fixedly communicated with an air outlet. An air inlet is formed in the top of the drying box. A dust-proof plate is fixedly installed in the air inlet by bolts. A third empty groove and a fourth empty groove are formed in the housing. A motor is fixedly installed on the bottom inner wall of the second empty groove by welding. A third through hole is formed in the bottom inner wall of the rotating groove. The third through hole communicates with the second empty groove. A worm is rotatably installed in the third through hole. The two ends of the worm are respectively fixedly connected with the output shaft of the motor and the bottom of the connecting plate by welding. When the motor is turned on, the worm can drive the connecting plate to rotate.
[0007] Preferably, a first through hole is formed in the outside of the disc. The first through hole communicates with the first empty groove. A first rotating shaft is rotatably installed in the first through hole. A hand wheel is fixedly installed at one end of the first rotating shaft by welding. A first bevel gear is fixedly installed at the other end of the first rotating shaft by welding. Second through holes are formed in both inner walls of the two sides of the first empty groove. The two second through holes respectively communicate with the two first sliding grooves. Threaded holes are formed in both of the two first sliders. The same bidirectional lead screw is threadedly installed in the two threaded holes. A second bevel gear is fixedly sleeved on the outside of the bidirectional lead screw by welding. The second bevel gear meshes with the first bevel gear.
[0008] Preferably, the positioning mechanism comprises two fixing blocks. The outsides of the two fixing blocks are respectively fixedly connected with the tops of the two first sliders by welding. Second sliding grooves are formed in one sides of the two fixing blocks. Second sliders are slidably installed in both of the two second sliding grooves. Arc-shaped clamping plates are fixedly connected to the outsides of the two second sliders by welding. Compression springs are fixedly connected to one sides of the two second sliders by welding. One ends of the two compression springs are respectively fixedly connected with one inner walls of the two second sliding grooves by welding.
[0009] Preferably, fixing rods are fixedly installed on both inner walls of the drying box by welding. The same blower is fixedly connected to one ends of the two fixing rods by welding. A plurality of electric heating rods are fixedly installed in the drying box.
[0010] Preferably, third rotating shafts are fixedly connected to both sides of the air outlet. A fifth through hole is formed in one inner wall of the third empty groove. The outside of the third rotating shaft is slidably connected with the inner wall of the fifth through hole. A gear is fixedly installed at one end of the third rotating shaft by welding. The gear meshes with a rack.
[0011] Preferably, a third sliding groove is formed in the inner wall of the top of the fourth empty groove. The third sliding groove communicates with the third empty groove. A rack is slidably installed in the third sliding groove. A rectangular rod is slidably installed in the fourth empty groove. The top of the rectangular rod is fixedly connected to one end of the rack by welding. A waist-shaped groove is formed on the outer side of the rectangular rod. The outer side of the connecting column is slidably connected to the inner wall of the waist-shaped groove.
[0012] Preferably, a fourth through hole is formed in one inner wall of the second empty groove. The fourth through hole communicates with the fourth empty groove. A second rotating shaft is rotatably installed in the fourth through hole. One end of the second rotating shaft is fixedly installed with a worm gear by welding. The worm gear meshes with a worm. The other end of the second rotating shaft is fixedly installed with a turntable by welding. One side of the turntable is fixedly connected to the connecting column by welding.
[0013] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0014] 1. In this solution, when the handwheel is rotated, the handwheel drives the first rotating shaft to rotate. The first rotating shaft drives the first bevel gear to rotate. The first bevel gear drives the second bevel gear to rotate. The bidirectional lead screw drives the two first sliders to approach each other. The two fixed blocks respectively drive the two second sliders and the two arc-shaped clamping plates to approach each other. Thus, the two arc-shaped clamping plates can clamp and position the wafer.
[0015] 2. In this solution, when the motor is started, the motor drives the worm to rotate. The worm drives the connecting plate to rotate. The connecting plate drives the disc to rotate. The disc drives the wafer to rotate. Thus, the resist on the surface of the wafer can be evenly coated by the centrifugal force generated by the rotation.
[0016] 3. In this solution, when the blower and the multiple electric heating rods are started, the wind pressure generated by the blower can discharge the heat generated by the multiple electric heating rods through the corrugated pipe and the air outlet. Thus, the discharged heat can quickly dry the coated resist layer.
[0017] The present invention can facilitate the positioning of the wafer during use and facilitate the rapid and uniform drying of the resist, thereby improving the production efficiency of silicon wafers. The structure is simple and the use is convenient. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 is a schematic three-dimensional structure diagram of a centrifuge layer expander of a frame tearing machine according to the present invention;
[0019] Figure 2 is a schematic front view structure diagram of a centrifuge layer expander of a frame tearing machine according to the present invention;
[0020] Figure 3 is a schematic cross-sectional view of a disc of a centrifuge layer expander of a frame tearing machine according to the present invention;
[0021] Figure 4 A centrifuge layer expander for a frame - combining glue - tearing machine proposed by the present invention Figure 2 The enlarged structural schematic diagram of part A in it;
[0022] Figure 5 A centrifuge layer expander for a frame - combining glue - tearing machine proposed by the present invention Figure 2 The enlarged structural schematic diagram of part B in it;
[0023] Figure 6 A centrifuge layer expander for a frame - combining glue - tearing machine proposed by the present invention Figure 2 The enlarged structural schematic diagram of part C in it.
[0024] In the figure: 1. Shell; 2. Cover plate; 3. Drying box; 4. Support; 5. Connecting plate; 6. Disc; 7. First chute; 8. First slider; 9. Fixed block; 10. Second slider; 11. Arc - shaped clamping plate; 12. Compression spring; 13. Bi - directional lead screw; 14. First rotating shaft; 15. Handwheel; 16. First bevel gear; 17. Second bevel gear; 18. Second empty slot; 19. Motor; 20. Worm; 21. Second rotating shaft; 22. Worm gear; 23. Turntable; 24. Connecting column; 25. Rectangular rod; 26. Rack; 27. Third empty slot; 28. Third rotating shaft; 29. Gear; 30. Air outlet; 31. Bellows; 32. Fixed rod; 33. Electric heating rod; 34. Fan; 35. Dust - proof plate; 36. Guide block. Specific embodiments
[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.
[0026] Embodiment 1
[0027] Refer to Figures 1-6, a centrifugal layer expander of a frame - combining glue - tearing machine, comprising a housing 1. A cover plate 2 is hinged to the outside of the housing 1. A drying box 3 is fixedly installed at the top of the housing 1 by welding. A support 4 is fixedly installed at the bottom inner wall of the housing 1 by welding. A rotating groove is formed at the top of the support 4. A connecting plate 5 is rotatably installed in the rotating groove. A disc 6 is fixedly installed at the top of the connecting plate 5 by welding. Two symmetric first sliding grooves 7 are formed in the disc 6. First sliders 8 are slidably installed in both of the two first sliding grooves 7. A positioning mechanism is arranged on the two first sliders 8. A first empty groove is formed in the disc 6. A second empty groove 18 is formed in the support 4. An installation hole is formed in the bottom inner wall of the drying box 3. A corrugated pipe 31 is fixedly installed in the installation hole. One end of the corrugated pipe 31 is fixedly communicated with an air outlet 30. An air inlet is formed at the top of the drying box 3. A dust - proof plate 35 is fixedly installed in the air inlet by bolts. A third empty groove 27 and a fourth empty groove are formed in the housing 1. A motor 19 is fixedly installed at the bottom inner wall of the second empty groove 18 by welding. A third through - hole is formed in the bottom inner wall of the rotating groove. The third through - hole communicates with the second empty groove 18. A worm 20 is rotatably installed in the third through - hole. The two ends of the worm 20 are respectively fixedly connected with the output shaft of the motor 19 and the bottom of the connecting plate 5 by welding. When the motor 19 is started, the worm 20 can drive the connecting plate 5 to rotate.
[0028] In this embodiment, a first through - hole is formed on the outside of the disc 6. The first through - hole communicates with the first empty groove. A first rotating shaft 14 is rotatably installed in the first through - hole. A handwheel 15 is fixedly installed at one end of the first rotating shaft 14 by welding. A first bevel gear 16 is fixedly installed at the other end of the first rotating shaft 14 by welding. Second through - holes are formed on both inner walls of the first empty groove. The two second through - holes respectively communicate with the two first sliding grooves 7. Threaded holes are formed in both of the two first sliders 8. The same bidirectional lead screw 13 is threadedly installed in the two threaded holes. A second bevel gear 17 is fixedly sleeved on the outside of the bidirectional lead screw 13 by welding. The second bevel gear 17 meshes with the first bevel gear 16. When the first rotating shaft 14 rotates, the first bevel gear 16 can drive the second bevel gear 17 to rotate.
[0029] In this embodiment, the positioning mechanism includes two fixing blocks 9. The outsides of the two fixing blocks 9 are respectively fixedly connected with the tops of the two first sliders 8 by welding. Second sliding grooves are formed on one side of both of the two fixing blocks 9. Second sliders 10 are slidably installed in both of the two second sliding grooves. Arc - shaped clamping plates 11 are fixedly connected to the outsides of the two second sliders 10 by welding. Compression springs 12 are fixedly connected to one side of both of the two second sliders 10 by welding. One ends of the two compression springs 12 are respectively fixedly connected with one side inner walls of the two second sliding grooves by welding. When the two arc - shaped clamping plates 11 clamp the wafer, the two compression springs 12 can respectively apply forces to the two second sliders 10 and the two arc - shaped clamping plates 11.
[0030] In this embodiment, fixed rods 32 are fixedly installed on both inner walls of the drying box 3 by welding. One ends of the two fixed rods 32 are fixedly connected by welding to the same blower 34. A plurality of electric heating rods 33 are fixedly installed in the drying box 3. When the blower 34 and the plurality of electric heating rods 33 are turned on, the wind pressure generated by the blower 34 can discharge the heat generated by the plurality of electric heating rods 33.
[0031] In this embodiment, third rotating shafts 28 are fixedly connected to both sides of the air outlet 30 by welding. A fifth through hole is formed in one inner wall of the third empty slot 27. The outer side of the third rotating shaft 28 is slidably connected to the inner wall of the fifth through hole. One end of the third rotating shaft 28 is fixedly installed with a gear 29 by welding. The gear 29 meshes with the rack 26. When the rack 26 moves vertically, the rack 26 can drive the gear 29 to rotate.
[0032] In this embodiment, a third sliding slot is formed in the top inner wall of the fourth empty slot. The third sliding slot communicates with the third empty slot 27. A rack 26 is slidably installed in the third sliding slot. A rectangular rod 25 is slidably installed in the fourth empty slot. The top of the rectangular rod 25 is fixedly connected to one end of the rack 26 by welding. A waist-shaped slot is formed on the outer side of the rectangular rod 25. Through the setting that the outer side of the connecting column 24 is slidably connected to the inner wall of the waist-shaped slot, when the connecting column 24 makes a circular motion, the connecting column 24 can drive the rectangular rod 25 to move vertically in a reciprocating manner.
[0033] In this embodiment, a fourth through hole is formed in one inner wall of the second empty slot 18. The fourth through hole communicates with the fourth empty slot. A second rotating shaft 21 is rotatably installed in the fourth through hole. One end of the second rotating shaft 21 is fixedly installed with a worm gear 22 by welding. The worm gear 22 meshes with a worm 20. The other end of the second rotating shaft 21 is fixedly installed with a turntable 23 by welding. One side of the turntable 23 is fixedly connected to the connecting column 24 by welding. When the worm 20 rotates, the worm gear 22 can drive the second rotating shaft 21 to rotate.
[0034] Working principle: When in use, the wafer can be placed on the top of the disc 6, and then the handwheel 15 is rotated. The handwheel 15 drives the first rotating shaft 14 to rotate. The first rotating shaft 14 drives the first bevel gear 16 to rotate. The first bevel gear 16 drives the second bevel gear 17 to rotate. The second bevel gear 17 drives the bidirectional lead screw 13 to rotate. The bidirectional lead screw 13 drives two first sliders 8 to approach each other. The two first sliders 8 respectively drive two fixing blocks 9 to approach each other. The two fixing blocks 9 respectively drive two second sliders 10 and two arc-shaped clamping plates 11 to approach each other. Thus, the two arc-shaped clamping plates 11 can clamp and position the wafer. Then, the resist is applied to the surface of the wafer. The motor 19 and the blower 34 are turned on. The motor 19 drives the worm 20 to rotate. The worm 20 drives the connecting plate 5 to rotate. The connecting plate 5 drives the disc 6 to rotate. The disc 6 drives the wafer to rotate. Thus, the resist on the surface of the wafer can be evenly coated by the rotational centrifugal force. At the same time, the blower 34 generates wind pressure. Turning on multiple electric heating rods 33 can generate heat. The wind pressure generated by the blower 34 can discharge the heat generated by the multiple electric heating rods 33 through the corrugated pipe 31 and the air outlet 30. Thus, the discharged heat can quickly dry the applied resist. At the same time, the worm 20 drives the worm wheel 22 to rotate. The worm wheel 22 drives the second rotating shaft 21 to rotate. The second rotating shaft 21 drives the turntable 23 to rotate. The turntable 23 drives the connecting column 24 to perform a circular motion. Through the setting that the outer side of the connecting column 24 is slidably connected to the inner wall of the waist-shaped groove, the connecting column 24 can drive the rectangular rod 25 to move vertically in a reciprocating manner. The rectangular rod 25 drives the toothed rod 26 to move vertically in a reciprocating manner. The toothed rod 26 drives the gear 29 to reciprocate and rotate forward and backward. The gear 29 drives the third rotating shaft 28 and the air outlet 30 to reciprocate and rotate forward and backward. Thus, the air outlet 30 can evenly discharge the heat, thereby evenly and quickly drying the applied resist layer and improving the production efficiency of the silicon wafer.
[0035] Embodiment 2
[0036] The difference from the first embodiment is as follows: A cover plate 2 is hinged to the outer side of the housing 1. A drying box 3 is fixedly installed at the top of the housing 1 by welding. A support 4 is fixedly installed at the bottom inner wall of the housing 1 by welding. A rotating groove is formed at the top of the support 4. A connecting plate 5 is rotatably installed in the rotating groove. A disc 6 is fixedly installed at the top of the connecting plate 5 by welding. An annular groove is formed in the inner wall of the rotating groove. Two guiding blocks 36 are slidably installed in the annular groove. The outer sides of the two guiding blocks 36 are fixedly connected to the outer side of the connecting plate 5. Two symmetric first sliding grooves 7 are formed in the disc 6. First sliders 8 are slidably installed in the two first sliding grooves 7. A positioning mechanism is arranged on the two first sliders 8. A first empty groove is formed in the disc 6. A second empty groove 18 is formed in the support 4. An installation hole is formed in the bottom inner wall of the drying box 3. A corrugated pipe 31 is fixedly installed in the installation hole. One end of the corrugated pipe 31 is fixedly communicated with an air outlet 30. An air inlet is formed in the top of the drying box 3. A dust-proof plate 35 is fixedly installed in the air inlet by bolts. A third empty groove 27 and a fourth empty groove are formed in the housing 1. A motor 19 is fixedly installed at the bottom inner wall of the second empty groove 18 by welding. A third through hole is formed in the bottom inner wall of the rotating groove. The third through hole communicates with the second empty groove 18. A worm 20 is rotatably installed in the third through hole. The two ends of the worm 20 are fixedly connected to the output shaft of the motor 19 and the bottom of the connecting plate 5 by welding respectively. When the motor 19 is turned on, the worm 20 can drive the connecting plate 5 to rotate.
[0037] Working principle: When in use, the wafer can be placed on the top of the disc 6, and then the handwheel 15 is rotated. The handwheel 15 drives the first rotating shaft 14 to rotate. The first rotating shaft 14 drives the first bevel gear 16 to rotate. The first bevel gear 16 drives the second bevel gear 17 to rotate. The second bevel gear 17 drives the bidirectional lead screw 13 to rotate. The bidirectional lead screw 13 drives two first sliders 8 to approach each other. The two first sliders 8 respectively drive two fixing blocks 9 to approach each other. The two fixing blocks 9 respectively drive two second sliders 10 and two arc-shaped clamping plates 11 to approach each other. Thus, the two arc-shaped clamping plates 11 can clamp and position the wafer. Then, the resist is applied to the surface of the wafer. The motor 19 and the blower 34 are turned on. The motor 19 drives the worm 20 to rotate. The worm 20 drives the connecting plate 5 to rotate. The two guide blocks 36 can play a role in stabilizing the rotation of the connecting plate 5. The connecting plate 5 drives the disc 6 to rotate. The disc 6 drives the wafer to rotate. Thus, the resist on the surface of the wafer can be evenly coated by the rotational centrifugal force. At the same time, the blower 34 generates air pressure. Turning on multiple electric heating rods 33 can generate heat. The air pressure generated by the blower 34 can discharge the heat generated by the multiple electric heating rods 33 through the corrugated pipe 31 and the air outlet 30. Thus, the discharged heat can quickly dry the coated resist. At the same time, the worm 20 drives the worm wheel 22 to rotate. The worm wheel 22 drives the second rotating shaft 21 to rotate. The second rotating shaft 21 drives the turntable 23 to rotate. The turntable 23 drives the connecting column 24 to move in a circular motion. Through the setting that the outer side of the connecting column 24 is slidably connected to the inner wall of the waist-shaped groove, the connecting column 24 can drive the rectangular rod 25 to move vertically in a reciprocating manner. The rectangular rod 25 drives the toothed rod 26 to move vertically in a reciprocating manner. The toothed rod 26 drives the gear 29 to rotate forward and backward reciprocally. The gear 29 drives the third rotating shaft 28 and the air outlet 30 to rotate forward and backward reciprocally. Thus, the air outlet 30 can evenly discharge the heat, so that the coated resist layer can be evenly and quickly dried, improving the production efficiency of the silicon wafer.
[0038] The rest is the same as that in the first embodiment.
[0039] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.
Claims
1. A centrifuge layer expander for a frame combining glue tearing machine, comprising a housing (1), characterized in that, A cover plate (2) is hinged to the outer side of the housing (1). A drying box (3) is fixedly installed at the top of the housing (1). A support (4) is fixedly installed on the bottom inner wall of the housing (1). A rotating groove is formed at the top of the support (4). A connecting plate (5) is rotatably installed in the rotating groove. A disc (6) is fixedly installed at the top of the connecting plate (5). Two symmetrical first sliding grooves (7) are formed in the disc (6). First sliders (8) are slidably installed in the two first sliding grooves (7). A positioning mechanism is arranged on the two first sliders (8). A first empty groove is formed in the disc (6). A second empty groove (18) is formed in the support (4). An installation hole is formed in the bottom inner wall of the drying box (3). A corrugated pipe (31) is fixedly installed in the installation hole. One end of the corrugated pipe (31) is fixedly communicated with an air outlet (30). An air inlet is formed in the top of the drying box (3). A dust-proof plate (35) is fixedly installed in the air inlet. A third empty groove (27) and a fourth empty groove are formed in the housing (1); The positioning mechanism includes two fixing blocks (9). The outer sides of the two fixing blocks (9) are respectively fixedly connected to the tops of the two first sliders (8). Second sliding grooves are formed on one side of the two fixing blocks (9). Second sliders (10) are slidably installed in the two second sliding grooves. Arc-shaped clamping plates (11) are fixedly connected to the outer sides of the two second sliders (10). Compression springs (12) are fixedly connected to one side of the two second sliders (10). One ends of the two compression springs (12) are respectively fixedly connected to the inner walls of one sides of the two second sliding grooves. Fixed rods (32) are fixedly installed on the inner walls of the two sides of the drying box (3). A same fan (34) is fixedly connected to one ends of the two fixed rods (32). A plurality of electric heating rods (33) are fixedly installed in the drying box (3). The disc (6) drives the wafer to rotate. At the same time, the fan (34) generates wind pressure. A plurality of electric heating rods (33) are turned on to generate heat. The wind pressure generated by the fan (34) discharges the heat generated by the plurality of electric heating rods (33) through the corrugated pipe (31) and the air outlet (30). The air outlet (30) reciprocates forward and backward. Furthermore, the air outlet (30) discharges the heat evenly.
2. The centrifuge layer expander for a frame combining glue tearing machine according to claim 1, characterized in that, A first through hole is formed in the outer side of the disc (6). The first through hole communicates with the first empty groove. A first rotating shaft (14) is rotatably installed in the first through hole. A handwheel (15) is fixedly installed at one end of the first rotating shaft (14). A first bevel gear (16) is fixedly installed at the other end of the first rotating shaft (14). Second through holes are formed in the inner walls of the two sides of the first empty groove. The two second through holes respectively communicate with the two first sliding grooves (7). Threaded holes are formed in the two first sliders (8). A same bidirectional lead screw (13) is threadedly installed in the two threaded holes. A second bevel gear (17) is fixedly sleeved on the outer side of the bidirectional lead screw (13). The second bevel gear (17) meshes with the first bevel gear (16).
3. The centrifuge layer expander for a frame combining glue tearing machine according to claim 1, characterized in that, The inner wall of the bottom of the second empty slot (18) is fixedly installed with a motor (19). A third through hole is opened on the inner wall of the bottom of the rotating slot. The third through hole communicates with the second empty slot (18). A worm (20) is rotatably installed in the third through hole. The two ends of the worm (20) are respectively fixedly connected with the output shaft of the motor (19) and the bottom of the connecting plate (5).
4. The centrifuge layer expander for a frame combining glue tearing machine according to claim 1, characterized in that, A fourth through hole is opened on the inner wall of one side of the second empty slot (18). The fourth through hole communicates with the fourth empty slot. A second rotating shaft (21) is rotatably installed in the fourth through hole. One end of the second rotating shaft (21) is fixedly installed with a worm wheel (22). The worm wheel (22) meshes with the worm (20). The other end of the second rotating shaft (21) is fixedly installed with a turntable (23). One side of the turntable (23) is fixedly connected with a connecting column (24).
5. The centrifuge layer expander for a frame combining glue tearing machine according to claim 1, characterized in that, A third sliding slot is opened on the inner wall of the top of the fourth empty slot. The third sliding slot communicates with the third empty slot (27). A toothed rod (26) is slidably installed in the third sliding slot. A rectangular rod (25) is slidably installed in the fourth empty slot. The top of the rectangular rod (25) is fixedly connected with one end of the toothed rod (26). A waist-shaped slot is opened on the outer side of the rectangular rod (25). The outer side of the connecting column (24) is slidably connected with the inner wall of the waist-shaped slot.
6. The centrifuge layer expander for a frame combining glue tearing machine according to claim 1, characterized in that, Both sides of the air outlet (30) are fixedly connected with a third rotating shaft (28). A fifth through hole is opened on the inner wall of one side of the third empty slot (27). The outer side of the third rotating shaft (28) is slidably connected with the inner wall of the fifth through hole. One end of the third rotating shaft (28) is fixedly installed with a gear (29). The gear (29) meshes with the toothed rod (26).
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