A sputtering coating device

Abstract

The present invention relates to the field of coating technology, and specifically relates to a sputtering coating device, which includes a box body, a fixed rod fixedly connected to one side wall of the box body, a target holder, a target, a substrate holder and a substrate. The target is fixedly installed on one side of the target holder, the substrate holder is arranged in the box body at the end far from the target, and the substrate is fixedly installed on one side of the substrate holder. Two symmetrically arranged sliding grooves are formed on the side wall of the box body. Both ends of the substrate holder are fixedly installed with rollers, and the rollers slide inside the sliding grooves. By setting mechanisms such as a first piston and a first telescopic rod, before the coating starts, the substrate holder is in the balanced position in the middle of the sliding groove. By observing the scale pointed by the pointer and filling or releasing argon gas into the space between the first piston and the box body according to the characteristics of the coating material to adjust the position of the first piston, the position of the substrate is adjusted, and the uniformity during the coating of the substrate is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of coating technology, and specifically to a sputtering coating device. Background Art

[0002] Sputtering generally refers to magnetron sputtering. This process requires a vacuum degree of about 1×10 -3 Torr, that is, an inert gas argon is filled in a vacuum state of 1.3×10 - 3 Pa, and a high-voltage direct current is applied between a plastic substrate (anode) and a metal target (cathode). Due to the electrons generated by glow discharge exciting the inert gas, plasma is generated. The plasma bombards the atoms of the metal target and deposits them on the plastic substrate.

[0003] An existing patent (Publication No.: CN109402584A), a magnetron sputtering vacuum coating device with adjustable sputtering distance, includes: a vacuum chamber, internally provided with a substrate holder and a transfer mechanism for transferring the substrate holder. The bottom of the substrate holder has a grinding rod; a lifting mechanism for lifting the substrate holder, including a lift slider that can be vertically lifted and a lift slide base that cooperates with the lift slider. The lift slider has a support portion that cooperates with the end of the grinding rod; and a translation mechanism that drives the lift mechanism and the substrate holder to move in a direction perpendicular to the travel direction of the transfer mechanism after lifting the substrate holder.

[0004] The above patent sets a translation mechanism that drives the lift mechanism and the substrate holder to move in a direction perpendicular to the travel direction of the transfer mechanism after lifting the substrate holder on the basis of restricting the distance between the substrate and the target in the traditional sputtering technology, so as to adjust the distance between the substrate and the target, so that a uniform film layer can be formed on the substrate during coating. However, the above patent still has drawbacks. During the translation of the substrate holder, the substrate holder needs to be lifted before it can be translated again, and the mechanical components required for the lift mechanism and the translation mechanism are too complex, and the practicability of the design cannot be fully reflected.

[0005] Therefore, a sputtering coating device is proposed. Summary of the Invention

[0006] The purpose of the present invention is to provide a sputtering coating device to solve the problem of restricting the distance between the substrate and the target in the traditional sputtering technology proposed in the above background art.

[0007] To achieve the above purpose, the present invention provides the following technical solutions:

[0008] A sputtering coating device, comprising a box body, a fixed rod fixedly connected to one side wall of the box body, a target holder, a target, a substrate holder and a substrate. One end of the fixed rod is fixedly connected to the middle of the target holder, the target is fixedly installed on one side of the target holder, the substrate holder is arranged in the box body at the end far from the target, and the substrate is fixedly installed on one side of the substrate holder. Two symmetrically arranged sliding grooves are opened on the side wall of the box body. Both ends of the substrate holder are fixedly installed with rollers, and the rollers slide inside the sliding grooves. A first telescopic rod is fixedly installed in the middle of the substrate holder. One end of the first telescopic rod is fixedly installed with a first piston. A first spring is sleeved on the first telescopic rod, and both ends of the first spring are respectively fixedly connected to the substrate holder and the first piston. Two symmetrically arranged second springs are fixedly installed on one side of the first piston. One end of the two second springs is fixedly installed inside the box body. A first inner cavity is opened on one side of the box body. A transparent scale plate is fixedly installed inside the first inner cavity. A pointer is fixedly installed on the first piston, and the tip of the pointer points to the scale of the transparent scale plate;

[0009] A collection box is fixedly installed on one side of the box body. A secondary utilization mechanism for recycling and reusing the argon gas inside the box body is arranged inside the collection box. A first groove is opened on the side wall of the box body, and a second groove is opened on the top wall of the box body. Control mechanisms for preventing the argon gas in the box body from flowing back are arranged inside the first groove and the second groove. A water pump is arranged outside the box body. A cooling mechanism for cooling the target is arranged inside the box body and the target. A control switch for controlling the start and stop of the water pump is arranged on the fixed rod. A driving mechanism for moving the substrate is arranged inside the box body and the collection box. A ventilation pipe is fixedly installed inside the side wall of the box body. An exhaust mechanism for connecting the ventilation pipe and controlling the air outlet is arranged inside the side wall of the box body.

[0010] By setting mechanisms such as the first piston, the first telescopic rod, and the second spring, before the coating starts, the inside of the box body is evacuated by a vacuum device to reduce the oxidation reaction during coating, and then argon gas is filled as the reaction gas. At this time, the substrate holder is in the balanced position in the middle of the sliding groove. By observing the scale pointed by the pointer and according to the characteristics of the coating material, argon gas is filled into or released from the space between the first piston and the box body to adjust the position of the first piston, so as to adjust the position of the substrate and achieve the uniformity during substrate coating.

[0011] Preferably, the secondary utilization mechanism includes a vacuum pump fixedly installed at the bottom end of the box body. A guide pipe is fixedly installed at the bottom end of the collection box. The air outlet pipe of the vacuum pump is connected to the guide pipe through a hose. A partition board is fixedly installed inside the collection box. A first ventilation port is opened on the partition board, and an A molecular sieve is arranged between the partition board and the first ventilation port. A second ventilation port is opened on the side wall of the collection box, and the second ventilation port is communicated with the first groove.

[0012] By setting up mechanisms such as a collection box, 4A molecular sieve, and a first ventilation port, at the end of film coating, the air in the box is released to balance the pressure inside and outside the box. After film coating starts again, the mixed gas inside the box is pumped into the collection box by a vacuum pump. The oxygen in the mixed gas is adsorbed by the 4A molecular sieve, leaving argon. The argon enters the box through the first ventilation port, the second ventilation port, and the first groove under the vacuum state inside the box, realizing the secondary utilization of argon and saving resources.

[0013] Preferably, the control mechanism includes a fixing plate fixedly installed inside the first groove. One side of the fixing plate is fixedly installed with a second telescopic rod, and the width of the connection between the second telescopic rod and the fixing plate is the same. One end of the second telescopic rod is fixedly installed with a first trapezoidal piston. A third spring is sleeved on the second telescopic rod, and both ends of the third spring are respectively fixedly connected to the fixing plate and the first trapezoidal piston.

[0014] By setting up mechanisms such as a fixing plate, a second telescopic rod, and a third spring, when the argon in the collection box enters the box, under the vacuum state inside the box, the first trapezoidal piston moves, thereby pushing the second telescopic rod and the third spring to contract. The first trapezoidal piston is separated from the second ventilation port, so that the argon in the collection box can enter the box. However, the argon inside the box cannot flow into the collection box, achieving the effect that the argon cannot flow back during the secondary utilization.

[0015] Preferably, the cooling mechanism includes a serpentine groove opened inside the target. A three-way joint is provided inside the box, and both ends of the serpentine groove are respectively connected to a water pump and the three-way joint through water pipes.

[0016] By setting up mechanisms such as a serpentine groove, a three-way joint, and a water pump, during the film coating process, as time increases, the target will generate high heat, which will affect the film coating effect at high temperatures, making it impossible to form a uniform film layer on the substrate. The cooling water is pumped into the target by the water pump and then flows out through the three-way joint. The design of the serpentine groove increases the contact area between the cooling water and the target to accelerate heat dissipation, realizing the cooling of the target.

[0017] Preferably, the control switch includes a conductive block fixedly installed on a fixed rod. A conductive slider is provided at the upper end of the conductive block, and a memory spring is fixedly connected to one side of the conductive slider.

[0018] By setting up mechanisms such as conductive blocks, conductive sliders, and memory springs, when the target material generates high temperature, as time goes by, the target material transfers the temperature to the target holder and the fixing rod. The memory spring elongates under the influence of temperature, thereby pushing the conductive slider to move. When the conductive slider contacts the conductive block, the water pump is turned on and operates at this time. When the temperature of the fixing rod decreases, the memory spring contracts, and the conductive block separates from the conductive slider. At this time, the water pump stops working, realizing the control of the start and stop of the water pump.

[0019] Preferably, the driving mechanism includes a steam-water separation membrane fixedly installed inside the three-way joint. A heat preservation pipe is fixedly installed on the side wall of the box body, and both ends of the heat preservation pipe are respectively communicated with the three-way joint and the collection box through conduits. A second piston is slidably installed inside the collection box. An air outlet pipe is fixedly installed on one side of the collection box, and the second groove is communicated with the air outlet pipe. An air inlet pipe is fixedly installed on the side wall of the box body. The air outlet pipe and the air inlet pipe are connected through a hose.

[0020] By setting up mechanisms such as a steam-water separation membrane, a heat preservation pipe, and a second piston, the cooling water becomes hot water after absorbing the temperature of the target material. When flowing through the three-way joint, it passes through the steam-water separation membrane, and the water vapor enters the heat preservation pipe for heat preservation. When adjusting the position of the substrate at the beginning of film coating, the control valve on the heat preservation pipe is opened, and the water vapor enters the collection box to increase the pressure inside the collection box, thereby pushing the second piston to move. The box body and the collection box are in a nearly balanced state at the second air vent, so that argon mainly enters the interior of the box body through the second groove, realizing the adjustment of the position of the substrate.

[0021] Preferably, the exhaust mechanism includes a first exhaust port opened at the upper end of the ventilation pipe. A third groove is opened on the top wall of the box body. A second trapezoidal piston is slidably installed inside the third groove. One end of the second trapezoidal piston is fixedly installed with a pressing block. A second exhaust port is opened on the second trapezoidal piston. A second inner cavity is opened inside the second trapezoidal piston. One end of the ventilation pipe penetrates through the inside of the second trapezoidal piston and extends into the second exhaust port. A fixing block is fixedly installed on the ventilation pipe, and the fixing block is arranged inside the second inner cavity. A fourth spring is sleeved on the ventilation pipe, and both ends of the fourth spring are respectively fixedly connected to the inner wall of the second inner cavity and the fixing block.

[0022] By setting up mechanisms such as a first exhaust port, a second trapezoidal piston, and a ventilation pipe, when the distance between the substrate and the target material is too close, manually press the second trapezoidal piston to move inside the third groove. The ventilation pipe slides inside the second trapezoidal piston, and the first exhaust port on the ventilation pipe is communicated with the second exhaust port. The argon gas between the box body and the first piston is discharged outward through the third groove. Stop pressing when observing that the pointer is at an appropriate position. Under the elastic force of the fourth spring, the second trapezoidal piston bounces up and seals the third groove, realizing the discharge of the argon gas inside the box body and the first piston, and achieving the adjustment of the position of the substrate.

[0023] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0024] 1. By setting up mechanisms such as the first piston, the first telescopic rod, and the second spring, before the film coating starts, the inside of the box body is evacuated by a vacuum pumping device to reduce the oxidation reaction during film coating. Then, argon gas is filled as the reaction gas. At this time, the substrate holder is at the equilibrium position in the middle of the sliding groove. By observing the scale indicated by the pointer and according to the characteristics of the film coating material, argon gas is filled into or released from the space between the first piston and the box body to adjust the position of the first piston, thereby realizing the adjustment of the substrate position and achieving the uniformity during substrate film coating.

[0025] 2. By setting up mechanisms such as the collection box, 4A molecular sieve, and the first ventilation port, at the end of film coating, the box body is vented to balance the pressure inside and outside the box body. After film coating starts again, the mixed gas inside the box body is pumped into the collection box by a vacuum pump. The oxygen in the mixed gas is adsorbed by the 4A molecular sieve, leaving argon gas. The argon gas enters the box body through the first ventilation port, the second ventilation port, and the first groove under the vacuum state inside the box body, realizing the secondary utilization of argon gas and saving resources.

[0026] 3. By setting up mechanisms such as the conductive block, the conductive slider, and the memory spring, when the target material generates high temperature, as time goes by, the target material transfers the temperature to the target holder and the fixed rod. The memory spring elongates under the influence of temperature, thereby pushing the conductive slider to move. When the conductive slider contacts the conductive block, the water pump is turned on and starts to work at this time. When the temperature of the fixed rod decreases, the memory spring contracts, and the conductive block and the conductive slider are separated. At this time, the water pump stops working, realizing the control of the start and stop of the water pump.

[0027] 4. By setting up mechanisms such as the steam-water separation membrane, the heat preservation pipe, and the second piston, after the cooling water absorbs the temperature of the target material and becomes hot water, when it flows through the three-way joint, it passes through the steam-water separation membrane, and the water vapor enters the heat preservation pipe for heat preservation. When adjusting the position of the substrate at the start of film coating, the control valve on the heat preservation pipe is opened, and the water vapor enters the collection box to increase the pressure inside the collection box, thereby pushing the second piston to move. The box body and the collection box are in a nearly balanced state at the second ventilation port, so that argon gas mainly enters the inside of the box body through the second groove, realizing the adjustment of the substrate position. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is the overall structural schematic diagram of the present invention;

[0029] Figure 2 is the rear view of the present invention;

[0030] Figure 3 is the side view of the present invention;

[0031] Figure 4Rear cross-sectional view of the present invention;

[0032] Figure 5 Top cross-sectional view of the present invention;

[0033] Figure 6 Rear cross-sectional view at the target of the present invention;

[0034] Figure 7 For the present invention Figure 5 Enlarged view of the structure at position A;

[0035] Figure 8 For the present invention Figure 5 Enlarged view of the structure at position B;

[0036] Figure 9 For the present invention Figure 5 Enlarged view of the structure at position C.

[0037] In the figure: 1, box body; 2, fixed rod; 3, target support; 4, target; 5, substrate support; 6, substrate; 7, chute; 8, roller; 9, first telescopic rod; 10, first piston; 11, first spring; 12, second spring; 13, first inner cavity; 14, transparent scale plate; 15, pointer; 16, collection box; 17, vacuum pump; 18, air duct; 19, partition; 20, first air vent; 21, 4A molecular sieve; 22, second air vent; 23, first groove; 24, fixing plate; 25, second telescopic rod; 26, first trapezoidal piston; 27, third spring; 28, water pump; 29, snake-shaped groove; 30, three-way joint; 31, conductive block; 32, conductive slider; 33, memory spring; 34, steam-water separation membrane; 35, heat preservation pipe; 36, second piston; 37, second groove; 38, air outlet pipe; 39, air inlet pipe; 40, ventilation pipe; 41, first exhaust port; 42, third groove; 43, second trapezoidal piston; 44, pressing block; 45, second exhaust port; 46, second inner cavity; 47, fixing block; 48, fourth spring. Detailed implementation manners

[0038] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0039] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0040] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present invention, the meaning of "a plurality" is two or more unless otherwise specifically defined. In addition, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] Please refer to Figures 1 to 9 , the present invention provides a sputtering coating device, and the technical solution is as follows:

[0042] A sputtering coating device includes a box body 1, a fixed rod 2 fixedly connected to a side wall of the box body 1, a target holder 3, a target 4, a substrate holder 5, and a substrate 6. One end of the fixed rod 2 is fixedly connected to the middle of the target holder 3. The target 4 is fixedly installed on one side of the target holder 3. The substrate holder 5 is disposed inside the box body 1 at a position away from the target 4. The substrate 6 is fixedly installed on one side of the substrate holder 5. Two symmetrically arranged chutes 7 are formed on the side wall of the box body 1. Both ends of the substrate holder 5 are fixedly installed with rollers 8, and the rollers 8 slide inside the chutes 7. A first telescopic rod 9 is fixedly installed in the middle of the substrate holder 5. One end of the first telescopic rod 9 is fixedly installed with a first piston 10. A first spring 11 is sleeved on the first telescopic rod 9, and both ends of the first spring 11 are respectively fixedly connected to the substrate holder 5 and the first piston 10. Two symmetrically arranged second springs 12 are fixedly installed on one side of the first piston 10. One end of the two second springs 12 is fixedly installed inside the box body 1. A first inner cavity 13 is formed inside one side of the box body 1. A transparent scale plate 14 is fixedly installed inside the first inner cavity 13. A pointer 15 is fixedly installed on the first piston 10, and the tip of the pointer 15 points to the scale of the transparent scale plate 14.

[0043] By setting up mechanisms such as the first piston 10, the first telescopic rod 9, and the second spring 12, before the film coating starts, the inside of the box body 1 is evacuated by a vacuum device to reduce the oxidation reaction during film coating. Then, argon gas is filled as the reaction gas. At this time, the substrate holder 5 is at the equilibrium position in the middle of the sliding groove 7. By observing the scale indicated by the pointer 15 and according to the characteristics of the film coating material, argon gas is filled into or released from the space between the first piston 10 and the box body 1 to adjust the position of the first piston 10, so as to adjust the position of the substrate 6 and achieve the uniformity during the film coating of the substrate 6.

[0044] As an implementation manner of the present invention, referring to Figure 1 、 4 、5, a collection box 16 is fixedly installed on one side of the box body 1. The inside of the collection box 16 is provided with a secondary utilization mechanism for recycling the argon gas inside the box body 1. The secondary utilization mechanism includes a vacuum pump 17 fixedly installed at the bottom end of the box body 1. A gas guide pipe 18 is fixedly installed at the bottom end of the collection box 16. The exhaust pipe of the vacuum pump 17 is connected to the gas guide pipe 18 through a hose. A partition plate 19 is fixedly installed inside the collection box 16. A first ventilation port 20 is opened on the partition plate 19, and 4A molecular sieve 21 is provided between the partition plate 19 and the first ventilation port 20. A second ventilation port 22 is opened on the side wall of the collection box 16, and the second ventilation port 22 communicates with the first groove 23.

[0045] By setting up mechanisms such as the collection box 16, the 4A molecular sieve 21, and the first ventilation port 20, when the film coating ends, the box body 1 is vented to balance the pressure inside and outside the box body 1. After the film coating starts again, the mixed gas inside the box body 1 is pumped into the collection box 16 by the vacuum pump 17. The oxygen in the mixed gas is adsorbed by the 4A molecular sieve 21, and the argon gas remains. The argon gas enters the box body 1 through the first ventilation port 20, the second ventilation port 22, and the first groove 23 under the vacuum state inside the box body 1, realizing the secondary utilization of the argon gas and saving resources.

[0046] As an implementation manner of the present invention, referring to Figure 5 、 7 、8, a first groove 23 is opened on the side wall of the box body 1, and a second groove 37 is opened on the top wall of the box body 1. Control mechanisms for preventing the argon gas inside the box body 1 from flowing back are provided inside both the first groove 23 and the second groove 37. The control mechanism includes a fixing plate 24 fixedly installed inside the first groove 23. A second telescopic rod 25 is fixedly installed on one side of the fixing plate 24. The width of the connection part between the second telescopic rod 25 and the fixing plate 24 is the same. A first trapezoidal piston 26 is fixedly installed at one end of the second telescopic rod 25. A third spring 27 is sleeved on the second telescopic rod 25, and both ends of the third spring 27 are fixedly connected to the fixing plate 24 and the first trapezoidal piston 26 respectively.

[0047] By setting up mechanisms such as the fixed plate 24, the second telescopic rod 25, and the third spring 27, when the argon gas in the collection box 16 enters the box body 1, under the vacuum state inside the box body 1, the first trapezoidal piston 26 moves, thereby pushing the second telescopic rod 25 and the third spring 27 to contract. The first trapezoidal piston 26 is in a separated state from the second air vent 22, so that the argon gas in the collection box 16 can enter the box body 1. However, the argon gas inside the box body 1 cannot flow into the collection box 16, achieving the effect that the argon gas cannot flow back during reuse.

[0048] As an implementation manner of the present invention, referring to Figure 1 、 2 Figs. 3 and 5, a water pump 28 is provided on the outer side of the box body 1, and a cooling mechanism for cooling the target 4 is provided inside the box body 1 and the target 4. The cooling mechanism includes a serpentine groove 29 opened inside the target 4. A three-way joint 30 is provided inside the box body 1, and both ends of the serpentine groove 29 are respectively communicated with the water pump 28 and the three-way joint 30 through water pipes.

[0049] By setting up mechanisms such as the serpentine groove 29, the three-way joint 30, and the water pump 28, during the film coating process, as time increases, the target 4 will generate high heat, which will affect the film coating effect at high temperatures, making it impossible to form a uniform film layer on the substrate 6. The water pump 28 is used to pump cooling water into the target 4 and then flow out through the three-way joint 30. The design of the serpentine groove 29 increases the contact area between the cooling water and the target 4 to accelerate heat dissipation, realizing the cooling of the target 4.

[0050] As an implementation manner of the present invention, referring to Figure 5 , a control switch for controlling the start and stop of the water pump 28 is provided on the fixed rod 2. The control switch includes a conductive block 31 fixedly installed on the fixed rod 2. A conductive slider 32 is provided at the upper end of the conductive block 31, and a memory spring 33 is fixedly connected to one side of the conductive slider 32.

[0051] By setting up mechanisms such as the conductive block 31, the conductive slider 32, and the memory spring 33, when the target 4 generates high temperature, as time increases, the target 4 transfers the temperature to the target support 3 and the fixed rod 2. The memory spring 33 elongates under the influence of the temperature, thereby pushing the conductive slider 32 to move. When the conductive slider 32 contacts the conductive block 31, the water pump 28 is turned on and operates at this time. When the temperature of the fixed rod 2 decreases, the memory spring 33 contracts, and the conductive block 31 is separated from the conductive slider 32. At this time, the water pump 28 stops working, realizing the control of the start and stop of the water pump 28.

[0052] As an implementation manner of the present invention, referring to Figure 1 、 3, 5, 7, a drive mechanism for moving the substrate 6 is provided inside the box body 1 and the collection box 16. The drive mechanism includes a steam-water separation membrane 34 fixedly installed inside the three-way joint 30. A heat preservation pipe 35 is fixedly installed on the side wall of the box body 1, and both ends of the heat preservation pipe 35 are respectively communicated with the three-way joint 30 and the collection box 16 through conduits. A second piston 36 is slidably installed inside the collection box 16. An air outlet pipe 38 is fixedly installed on one side of the collection box 16, and the second groove 37 is communicated with the air outlet pipe 38. An air inlet pipe 39 is fixedly installed on the side wall of the box body 1, and the air outlet pipe 38 and the air inlet pipe 39 are connected by a hose.

[0053] By providing mechanisms such as the steam-water separation membrane 34, the heat preservation pipe 35, and the second piston 36, the cooling water becomes hot water after absorbing the temperature of the target 4. When flowing through the three-way joint 30, it passes through the steam-water separation membrane 34, and the water vapor enters the heat preservation pipe 35 for heat preservation. When adjusting the position of the substrate 6 at the beginning of film coating, the control valve on the heat preservation pipe 35 is opened, and the water vapor enters the collection box 16 to increase the pressure inside the collection box 16, thereby pushing the second piston 36 to move. The box body 1 and the collection box 16 are in a nearly balanced state at the second air vent 22, so that argon mainly enters the inside of the box body 1 through the second groove 37 to realize the adjustment of the position of the substrate 6.

[0054] As an implementation manner of the present invention, referring to Figure 5 , 9 , a ventilation pipe 40 is fixedly installed inside the side wall of the box body 1. An exhaust mechanism for communicating the ventilation pipe 40 and controlling air outlet is provided inside the side wall of the box body 1. The exhaust mechanism includes a first exhaust port 41 opened at the upper end of the ventilation pipe 40. A third groove 42 is opened on the top wall of the box body 1. A second trapezoidal piston 43 is slidably installed inside the third groove 42. One end of the second trapezoidal piston 43 is fixedly installed with a pressing block 44. A second exhaust port 45 is opened on the second trapezoidal piston 43. A second inner cavity 46 is opened inside the second trapezoidal piston 43. One end of the ventilation pipe 40 penetrates through the inside of the second trapezoidal piston 43 and extends into the second exhaust port 45. A fixing block 47 is fixedly installed on the ventilation pipe 40, and the fixing block 47 is arranged inside the second inner cavity 46. A fourth spring 48 is sleeved on the ventilation pipe 40, and both ends of the fourth spring 48 are respectively fixedly connected to the inner wall of the second inner cavity 46 and the fixing block 47.

[0055] By setting up mechanisms such as the first exhaust port 41, the second trapezoidal piston 43, and the ventilation pipe 40, when the distance between the substrate 6 and the target 4 is too close, manually press the second trapezoidal piston 43 to move inside the third groove 42. The ventilation pipe 40 slides within the second trapezoidal piston 43, and the first exhaust port 41 on the ventilation pipe 40 communicates with the second exhaust port 45. The argon gas between the box body 1 and the first piston 10 is discharged outward through the third groove 42. Stop pressing when observing that the pointer 15 is at an appropriate position. Under the elastic force of the fourth spring 48, the second trapezoidal piston 43 bounces up and seals the third groove 42, realizing the discharge of the argon gas in the box body 1 and the first piston 10, and achieving the adjustment of the position of the substrate 6.

[0056] Working principle: Before the coating starts, the inside of the box body 1 is evacuated by a vacuum pumping device to reduce the oxidation reaction during coating. Then, argon gas is filled as the reaction gas. At this time, the substrate holder 5 is at the equilibrium position in the middle of the sliding groove 7. By observing the scale indicated by the pointer 15 and according to the characteristics of the coating material, argon gas is filled into or released from the space between the first piston 10 and the box body 1 to adjust the position of the first piston 10. When the coating ends, the box body 1 is vented to balance the pressure inside and outside the box body 1. After the coating starts again, the mixed gas inside the box body 1 is pumped into the collection box 16 by the vacuum pump 17. The oxygen in the mixed gas is adsorbed by the 4A molecular sieve 21, leaving argon gas. The argon gas enters the box body 1 through the first vent 20, the second vent 22, and the first groove 23 under the vacuum state inside the box body 1. When the argon gas in the collection box 16 enters the box body 1, the first trapezoidal piston 26 moves under the vacuum state inside the box body 1, thereby pushing the second telescopic rod 25 and the third spring 27 to contract. The first trapezoidal piston 26 is separated from the second vent 22, and the argon gas in the collection box 16 can thus enter the box body 1. During the coating process, as time increases, the target 4 generates high heat, which will affect the coating effect at high temperatures, making it impossible to form a uniform film layer on the substrate 6. The cooling water is pumped into the target 4 by the water pump 28 and then flows out through the three-way joint 30. The design of the serpentine groove 29 increases the contact area between the cooling water and the target 4 to accelerate heat dissipation. When the target 4 generates high temperature, as time increases, the target 4 transfers the temperature to the target holder 3 and the fixing rod 2. The memory spring 33 elongates under the influence of temperature, thereby pushing the conductive slider 32 to move. When the conductive slider 32 contacts the conductive block 31, the water pump 28 is turned on and starts working at this time. When the temperature of the fixing rod 2 decreases, the memory spring 33 contracts, and the conductive block 31 is separated from the conductive slider 32. At this time, the water pump 28 stops working. After the cooling water absorbs the temperature of the target 4, it becomes hot water. When flowing through the three-way joint 30, it passes through the steam-water separation membrane 34, and the water vapor enters the heat preservation pipe 35 for heat preservation. When adjusting the position of the substrate 6 at the start of the coating, the control valve on the heat preservation pipe 35 is opened, and the water vapor enters the collection box 16 to increase the pressure inside the collection box 16, thereby pushing the second piston 36 to move. The box body 1 and the collection box 16 are in a nearly balanced state at the second vent 22, so that the argon gas mainly enters the inside of the box body 1 through the second groove 37. When the distance between the substrate 6 and the target 4 is too close, the second trapezoidal piston 43 is manually pressed to move into the third groove 42. The ventilation pipe 40 slides inside the second trapezoidal piston 43, and the first exhaust port 41 on the ventilation pipe 40 is communicated with the second exhaust port 45. The argon gas between the box body 1 and the first piston 10 is discharged outward through the third groove 42. When the pointer 15 is observed to be in an appropriate position, the pressing stops. Under the elastic force of the fourth spring 48, the second trapezoidal piston 43 pops up and seals the third groove 42, achieving the adjustment of the position of the substrate 6.

[0057] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art will appreciate that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sputtering coating device, comprising a box body (1), a fixing rod (2) fixedly connected to one side wall of the box body (1), a target holder (3), a target (4), a substrate holder (5) and a substrate (6). One end of the fixing rod (2) is fixedly connected to the middle of the target holder (3), the target (4) is fixedly installed on one side of the target holder (3), the substrate holder (5) is arranged in the box body (1) at the end far from the target (4), and the substrate (6) is fixedly installed on one side of the substrate holder (5), characterized in that: On the side wall of the box body (1), two symmetrically arranged sliding grooves (7) are provided. At both ends of the substrate support (5), rollers (8) are fixedly installed, and the rollers (8) slide inside the sliding grooves (7). In the middle of the substrate support (5), a first telescopic rod (9) is fixedly installed. One end of the first telescopic rod (9) is fixedly installed with a first piston (10). A first spring (11) is sleeved on the first telescopic rod (9), and both ends of the first spring (11) are respectively fixedly connected to the substrate support (5) and the first piston (10). On one side of the first piston (10), two symmetrically arranged second springs (12) are fixedly installed. One ends of the two second springs (12) are fixedly installed on the inner part of the box body (1). Inside one side of the box body (1), a first inner cavity (13) is provided. Inside the first inner cavity (13), a transparent scale plate (14) is fixedly installed. On the first piston (10), a pointer (15) is fixedly installed, and the tip of the pointer (15) points to the scale of the transparent scale plate (14); On one side of the box body (1), a collection box (16) is fixedly installed. Inside the collection box (16), there is a secondary utilization mechanism for recycling and reusing the argon gas inside the box body (1). On the side wall of the box body (1), a first groove (23) is provided. On the top wall of the box body (1), a second groove (37) is provided. Inside both the first groove (23) and the second groove (37), there is a control mechanism for preventing the argon gas inside the box body (1) from flowing back. Outside the box body (1), a water pump (28) is provided. Inside the box body (1) and the target (4), there is a cooling mechanism for reducing the temperature of the target (4). On the fixed rod (2), there is a control switch for controlling the start and stop of the water pump (28). Inside the box body (1) and the collection box (16), there is a driving mechanism for moving the substrate (6). Inside the side wall of the box body (1), a ventilation pipe (40) is fixedly installed. Inside the side wall of the box body (1), there is an exhaust mechanism for communicating the ventilation pipe (40) and controlling the air outlet; The secondary utilization mechanism includes a vacuum pump (17) fixedly installed at the bottom end of the box body (1). At the bottom end of the collection box (16), an air guide pipe (18) is fixedly installed. The exhaust pipe of the vacuum pump (17) is connected to the air guide pipe (18) through a hose. Inside the collection box (16), a partition plate (19) is fixedly installed. A first ventilation opening (20) is provided on the partition plate (19), and 4A molecular sieve (21) is provided between the partition plate (19) and the first ventilation opening (20). A second ventilation opening (22) is provided on the side wall of the collection box (16), and the second ventilation opening (22) communicates with the first groove (23); The control mechanism includes a fixing plate (24) fixedly installed inside the first groove (23). One side of the fixing plate (24) is fixedly installed with a second telescopic rod (25), and the width of the connection between the second telescopic rod (25) and the fixing plate (24) is the same. One end of the second telescopic rod (25) is fixedly installed with a first trapezoidal piston (26). A third spring (27) is sleeved on the second telescopic rod (25), and both ends of the third spring (27) are fixedly connected to the fixing plate (24) and the first trapezoidal piston (26) respectively; The cooling mechanism includes a serpentine groove (29) opened inside the target (4). A three-way joint (30) is provided inside the box body (1), and both ends of the serpentine groove (29) are communicated with a water pump (28) and the three-way joint (30) respectively through water pipes; The driving mechanism includes a steam-water separation membrane (34) fixedly installed inside the three-way joint (30). A heat preservation pipe (35) is fixedly installed on the side wall of the box body (1), and both ends of the heat preservation pipe (35) are communicated with the three-way joint (30) and the collection box (16) respectively through conduits. A second piston (36) is slidably installed inside the collection box (16). An air outlet pipe (38) is fixedly installed on one side of the collection box (16), and the second groove (37) is communicated with the air outlet pipe (38). An air inlet pipe (39) is fixedly installed on the side wall of the box body (1). The air outlet pipe (38) and the air inlet pipe (39) are connected by a hose; The exhaust mechanism includes a first exhaust port (41) opened at the upper end of the ventilation pipe (40). A third groove (42) is opened on the top wall of the box body (1). A second trapezoidal piston (43) is slidably installed inside the third groove (42). One end of the second trapezoidal piston (43) is fixedly installed with a pressing block (44). A second exhaust port (45) is opened on the second trapezoidal piston (43). A second inner cavity (46) is opened inside the second trapezoidal piston (43). One end of the ventilation pipe (40) penetrates through the inside of the second trapezoidal piston (43) and extends into the second exhaust port (45). A fixing block (47) is fixedly installed on the ventilation pipe (40), and the fixing block (47) is arranged inside the second inner cavity (46). A fourth spring (48) is sleeved on the ventilation pipe (40), and both ends of the fourth spring (48) are fixedly connected to the inner wall of the second inner cavity (46) and the fixing block (47) respectively.

2. The sputtering coating device according to claim 1, wherein: The control switch includes a conductive block (31) fixedly installed on the fixed rod (2). A conductive slider (32) is arranged above the conductive block (31). One side of the conductive slider (32) is fixedly connected with a memory spring (33).

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