Control Method for Detection Process and Control System for Detection Process

Abstract

The present application provides a control method for a detection process and a control system for the detection process. The control method for the detection process includes: hierarchically dividing the detection items in the detection process; naming the hierarchies according to preset rules and storing the naming results of the hierarchies in a database; receiving an operation console instruction; judging the instruction category to obtain a judgment result; verifying the operation console instruction according to the judgment result and the naming results of the hierarchies in the database to obtain a verification result; and executing one of an operation console instruction, an error reporting instruction, or a prompt instruction according to the verification result. Through hierarchically dividing the detection items in the detection process, naming the hierarchies according to preset rules, and storing the naming results of the hierarchies in the database, the above technical solution combines the detection item names with calculation methods, which is convenient for identification. The accuracy of data is improved, thereby improving the efficiency and accuracy of the control of the manufacturing process.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and in particular to a control method for a detection process and a control system for a detection process. Background Art

[0002] In the semiconductor field, there are strict specific requirements for the process, so it is necessary to detect whether the process meets the standards. During the process of detecting the process, the detection results of each step may affect the detection results of the next step, and even affect the detection results of other detection items. If it involves cross-station projects, for any modification of a detection item, the corresponding modification of the cross-station calculated detection process is required. Otherwise, the results of the manufacturing process cannot be effectively monitored and correctly analyzed, which will have an adverse impact on judging the qualification and stability of the product.

[0003] However, since current engineers need to add or delete detection items through manual judgment and there is no systematic detection mechanism, it is easy to cause confusion in the calculation levels and incorrect calculation results. Moreover, since there is no connection between the detection item names and the calculation methods, engineers cannot quickly determine the detection content based on the detection item names. Even because engineers do not have a quick and simple way to confirm whether the modified detection item is associated with the cross-station calculation project, if the detection item is modified by mistake, the cross-station calculation project cannot be calculated normally.

[0004] Therefore, how to improve the efficiency and accuracy of the control of the manufacturing process is a technical problem to be solved. Summary of the Invention

[0005] The technical problem to be solved by this application is to provide a control method for a detection process and a control system for a detection process, which can improve the efficiency and accuracy of the control of the manufacturing process.

[0006] To solve the above problems, this application provides a control method for a detection process. The control method for the detection process includes: hierarchically dividing the detection items in the detection process; naming the above hierarchical results according to preset rules and storing the hierarchical naming results in a database; receiving an operation table instruction; judging the instruction category to obtain a judgment result; verifying the operation table instruction according to the judgment result and the hierarchical naming results in the database to obtain a verification result; and executing one of an operation table instruction, an error reporting instruction, or a prompt instruction according to the verification result.

[0007] In some embodiments, the hierarchical division of the detection items in the detection process is performed in the following manner: defining the detection items received from the machine end as the first-level detection items; and defining the detection items that need to perform operations based on the received value results of the first-level detection items as the second-level detection items.

[0008] In some embodiments, after naming the levels according to preset rules, the naming results are stored in the database, and the first level is named according to the project name, and the levels other than the first level are named according to the expression with the calculation method attached after the project name.

[0009] In some embodiments, the instruction categories include: adding a new detection item and deleting a detection item; obtaining a judgment result refers to judging whether the instruction obtained by the operation console is to add a new detection item or to delete a detection item.

[0010] In some embodiments, the operation console instruction is verified according to the above judgment results and the hierarchical naming results in the database, including verifying the hierarchy, hierarchical relationship, and calculation method of the operation console instruction whose instruction category is a new detection item.

[0011] In some embodiments, the operation console instruction is verified according to the above judgment result and the hierarchical naming result in the database, including cross-site verification of the operation console instruction whose instruction category is to delete the detection item.

[0012] In some embodiments, executing an operating console instruction, an error reporting program, or a prompting program based on the verification results includes: executing the operating console instruction if the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item is correct; executing the prompting program if there is at least one error in the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item.

[0013] In some embodiments, executing an operating console instruction, an error reporting program, or a prompting program based on the verification results also includes: executing the operating console instruction if the cross-site verification result of the operating console instruction whose instruction category is to delete the detection project is that there is no related cross-site project; executing the error reporting program if the cross-site verification result of the operating console instruction whose instruction category is to delete the detection project is that there is a related cross-site project.

[0014] The present application also provides a control system for a detection process. The control system for the detection process includes: a hierarchical division unit, which divides the detection items in the detection process into hierarchical divisions; a database storage unit, which names the hierarchical divisions according to preset rules and stores the hierarchical naming results in a database; an instruction receiving unit, which receives an operation console instruction; a judgment unit, which judges the instruction category and obtains a judgment result; a verification unit, which verifies the operation console instruction according to the judgment result and the hierarchical naming result in the database and obtains a verification result; an execution unit, which executes one of the operation console instructions, error reporting instructions or prompt instructions according to the verification result.

[0015] In some embodiments, the hierarchical division of the inspection items in the inspection process is performed in the following manner: the inspection items received from the machine end are defined as first-level inspection items; and the inspection items that need to be calculated based on the received value results of the first-level inspection items are defined as second-level inspection items.

[0016] In some embodiments, after naming the levels according to preset rules, the naming results are stored in the database, and the first level is named according to the project name, and the levels other than the first level are named according to the expression with the calculation method attached after the project name.

[0017] In some embodiments, the instruction categories include: adding a new detection item and deleting a detection item; obtaining a judgment result refers to judging whether the instruction obtained by the operation console is to add a new detection item or to delete a detection item.

[0018] In some embodiments, the operation console instruction is verified according to the above judgment results and the hierarchical naming results in the database, including verifying the hierarchy, hierarchical relationship, and calculation method of the operation console instruction whose instruction category is a new detection item.

[0019] In some embodiments, the operation console instruction is verified according to the above judgment result and the hierarchical naming result in the database, including cross-site verification of the operation console instruction whose instruction category is to delete the detection item.

[0020] In some embodiments, executing an operating console instruction, an error reporting program, or a prompting program based on the verification results includes: executing the operating console instruction if the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item is correct; executing the prompting program if there is at least one error in the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item.

[0021] In some embodiments, executing an operating console instruction, an error reporting program, or a prompting program based on the verification results also includes: executing the operating console instruction if the cross-site verification result of the operating console instruction whose instruction category is to delete the detection project is that there is no related cross-site project; executing the error reporting program if the cross-site verification result of the operating console instruction whose instruction category is to delete the detection project is that there is a related cross-site project.

[0022] The above technical solution divides the inspection items in the inspection process into levels, names the levels according to preset rules, and stores the above level naming results in the database, combining the inspection item names with the calculation methods for easy identification, thereby improving the accuracy of the data and further improving the efficiency and accuracy of process control.

[0023] It should be understood that the above general description and the following detailed description are merely exemplary and explanatory, and do not limit the present disclosure. Brief Description of the Drawings

[0024] Figure 1 It is a schematic diagram of a control method for a detection process in an embodiment of the present application.

[0025] Figure 2 It is a schematic diagram of a control method for a newly added detection item in an embodiment of the present application.

[0026] Figure 3 It is a schematic diagram of a control method for deleting a detection item in an embodiment of the present application.

[0027] Figure 4 It is a schematic diagram of a control system for a detection process in an embodiment of the present application. Detailed Embodiment

[0028] The following will make a detailed description of the specific embodiments of the control method for the detection process and the control system for the detection process provided by the present application with reference to the drawings.

[0029] Figure 1 It is a schematic diagram of a control method for a detection process in an embodiment of the present application. The control method for the detection process includes: Step S101, hierarchically dividing the detection items in the detection process; Step S102, naming the hierarchies according to a preset rule and storing the naming results of the above hierarchies in a database; Step S103, receiving an operation console instruction; Step S104, judging the instruction category to obtain a judgment result; Step S105, verifying the operation console instruction according to the judgment result and the naming results of the hierarchies in the database to obtain a verification result; Step S106, executing one of an operation console instruction, an error reporting instruction, or a prompt instruction according to the verification result.

[0030] Please refer to Figure 1 , Step S101, hierarchically dividing the detection items in the detection process. The hierarchically dividing the detection items in the detection process is carried out in the following manner: Defining the detection items received from the machine platform end as the first-level detection items; Defining the detection items that need to perform operations based on the received value results of the first-level detection items as the second-level detection items. For example, defining the detection item A received from the machine platform end as the first-level detection item, and defining the detection item B that needs to perform operations based on the received value result of the first-level detection item A as the second-level detection item. And so on, defining the detection items that perform operations based on the received value results of the second-level detection items as the third-level detection items.

[0031] Step S102: After naming the said level according to a preset rule, store the naming result of the said level in a database. The operation of naming the level according to a preset rule and then storing the naming result in a database means naming the first level according to the project name, and naming levels other than the first level according to an expression that attaches a calculation method after the project name. For example, if the first level of the project to be measured, Project A, is named Detection Project A, then the second level is named Detection Project A_Calculation Method, and the third level is named Detection Project A_Calculation Method_Calculation Method. The calculation methods include, but are not limited to, calculating the average value, maximum and minimum values, addition and subtraction, etc. According to the above technical solution, by associating the detection project name with the calculation method, the user can quickly determine the detection content based on the detection project name, improving the efficiency of process control.

[0032] In some other embodiments, the levels can also be divided according to the calculation type. For example, if the detection project level with the defined calculation type of RAW is defined as the first level, then when the calculation expression of Detection Project A is

RAW ITEM

A ITEM

AITEM

Number of pieces

Number of points

[0033] Step S103: Receive an operation console instruction. The operation console instruction refers to the instruction input by the user on the console before preparing to perform a detection project.

[0034] Step S104: Judge the instruction category to obtain a judgment result. The instruction categories include: adding a detection project and deleting a detection project; the operation of obtaining a judgment result means judging whether the instruction obtained by the operation console is an instruction to add a detection project or an instruction to delete a detection project. Subsequently, the operation console instruction will be verified according to the instruction category.

[0035] Step S105: Verify the operation console instruction according to the above judgment result and the level naming result in the database to obtain a verification result. The verification of the operation console instruction according to the above judgment result and the level naming result in the database includes verifying the level, level relationship, and calculation method of the operation console instruction with the instruction category of adding a detection project. The verification of the operation console instruction according to the above judgment result and the level naming result in the database also includes cross-station verification of the operation console instruction with the instruction category of deleting a detection project.

[0036] Figure 2It is a schematic diagram of the control method for newly added detection items in an embodiment of the present application. The control method for newly added detection items includes: Step S201, determining that the detection item is a newly added detection item; Step S202, verifying whether each content is correct; Step S203, if the above-mentioned contents are verified to be correct, submitting successfully; Step S204, if the above-mentioned contents are verified to be incorrect, feedbacking the detailed content for the user to modify. The verification contents for the console command with the instruction category of newly added detection items include, but are not limited to, the verification of levels, level relationships, and calculation methods. When the verification results of the above verification contents are all correct, the command is submitted successfully; when the verification results of the above verification contents are incorrect, an error message is prompted and the detailed content is feedbacked for modification until the verification result is correct and the console command is submitted successfully.

[0037] An example of the verification for levels is as follows. When the second level includes detection items with expressions [RAW b1], [RAW b2], and [RAWb3], and the console command for the newly added detection item category is [b5 c], obviously there is no second level to rely on, so it can be determined that the console command is incorrect.

[0038] An example of the verification for level relationships is as follows. In the database, the first level with the expression [RAWITEM] includes detection item A, and the second level detection item is [A ITEM]. It is necessary to add a third level detection item C. When the console command is [RAW C], since the third level detection item C needs to perform operations based on the received value result of the second level detection item B, it is verified that the console command is incorrect.

[0039] An example of the verification for calculation methods is as follows. Define SUB as subtraction and store it in the database. When it is necessary to add the received value results of two detection items and the command on the console is SUB, it is determined that the command on the console is incorrect. The calculation methods include, but are not limited to, calculating the average value, maximum and minimum values, and addition and subtraction, etc.

[0040] In some other embodiments, SUB can be defined as a special calculation expression. For example: When detection item A is at the first level, the expression of the second level detection item B1 calculated based on the received value result of the first level detection item A is [A B1], and the expression of the second level detection item B2 calculated based on the received value result of the first level detection item A is [A B2]. Define the command SUB as the received value result of the latter detection item minus the received value result of the former detection item and store it in the database. When the second level detection item B1 is the former detection item of the second level detection item B2, when the calculation method is SUB and the input command is [A B1] - [A B2], the calculation order is incorrect, and it can be verified that the console command is incorrect.

[0041] Figure 3 It is a schematic diagram of the control method for deleting detection items in an embodiment of the present application. The control method for deleting detection items includes: Step S301, it is determined that the operation console instruction is a detection item to be deleted; Step S302, it is determined whether the detection item is associated with cross-station calculation; Step S303, if there is no association, it is successfully submitted; Step S304, if it is associated with cross-station calculation, detailed affected content is fed back for the user to modify. When cross-station calculation needs to use the data of detection item A in the process station, deleting detection item A in the detection station will affect the calculation of other stations. Therefore, an error message needs to be reported, and it is necessary to check whether there is content to modify the cross-station calculation, and provide the associated path site for confirmation; when there is no associated site for cross-station calculation or it is successfully submitted after modification to the operation console instruction.

[0042] Step S106, execute one of the operation console instruction, error reporting instruction or prompt instruction according to the verification result. The execution of the operation console instruction, error reporting program or prompt program according to the verification result includes: if the verification of the level, level relationship and calculation method of the operation console instruction with the instruction category of adding a detection item is all correct, execute the operation console instruction; if there is at least one error in the verification of the level, level relationship and calculation method of the operation console instruction with the instruction category of adding a detection item, execute the prompt program.

[0043] The above technical solution divides the detection items in the detection process into levels, names the levels according to preset rules, stores the above level naming results in the database, combines the detection item names with the calculation methods for easy identification. Then, after determining whether the operation console instruction is to add a detection item or delete a detection item, the operation console instruction is verified according to the above judgment result and the level naming result in the database. For the deletion of detection items, if it is associated with cross-station calculation, a prompt is given to reduce the risk of accidental deletion by the user; for adding a detection item, it is avoided that incorrect calculation or incorrect results cannot be obtained due to level errors. Then, execute one of the operation console instruction, error reporting instruction or prompt instruction according to the verification result, help the user quickly locate the problematic data, improve the accuracy of the data, and thus improve the efficiency and accuracy of the process control.

[0044] Figure 4It is a schematic diagram of the control system of the detection process in one embodiment of the present application. The control system of the detection process includes: a hierarchical division unit U1, which divides the detection items in the detection process into hierarchical divisions; a database storage unit U2, which names the hierarchical divisions according to preset rules and stores the hierarchical naming results in the database; an instruction receiving unit U3, which receives the operation console instruction; a judgment unit U4, which judges the instruction category and obtains a judgment result; a verification unit U5, which verifies the operation console instruction according to the above judgment result and the hierarchical naming result in the database and obtains a verification result; an execution unit U6, which executes one of the operation console instruction, error reporting instruction or prompt instruction according to the verification result.

[0045] The hierarchical division unit U1 performs hierarchical division on the detection items in the detection process. The hierarchical division of the detection items in the detection process is performed in the following manner: the detection items received from the machine end are defined as first-level detection items; the detection items that need to be calculated based on the value collection results of the first-level detection items are defined as second-level detection items. For example, the detection item A received from the machine end is defined as a first-level detection item, and the detection item B that needs to be calculated based on the value collection results of the first-level detection item A is defined as a second-level detection item. Similarly, the detection items that are calculated based on the value collection results of the second-level detection items are defined as third-level detection items.

[0046] The database storage unit U2 names the levels according to the preset rules and stores the naming results of the levels in the database. The naming of the levels according to the preset rules and storing the naming results in the database is to name the first level according to the project name, and to name the levels except the first level according to the expression with the calculation method attached after the project name. For example, the first level of the test project A is named as detection project A, then the second level is named as detection project A_calculation method, and the third level is named as detection project A_calculation method_calculation method. The calculation method includes but is not limited to averaging, maximum and minimum values, and addition and subtraction. The above technical solution, by linking the name of the detection project with the calculation method, the user can quickly determine the detection content according to the name of the detection project, thereby improving the efficiency of process technology control.

[0047] In some other embodiments, the levels can also be divided according to the calculation type. For example, if the detection item level with the calculation type of RAW is defined as the first level, then when the calculation expression of detection item A is

RAW ITEM

A ITEM

AITEM

Number of pieces

Number of points

[0048] The instruction receiving unit U3 receives the console instructions. The console instructions refer to the instructions input by the user on the console before preparing for the detection items.

[0049] The judgment unit U4 judges the instruction category and obtains a judgment result. The instruction categories include: adding a detection item and deleting a detection item; obtaining a judgment result means judging whether the instruction obtained by the console is an instruction to add a detection item or an instruction to delete a detection item. Subsequently, the console instructions will be verified according to the instruction category.

[0050] The verification unit U5 verifies the console instructions according to the judgment result of the judgment unit U4 and the level naming result in the database, and obtains a verification result. Verifying the console instructions according to the above judgment result and the level naming result in the database includes verifying the level, level relationship, and calculation method of the console instructions with the instruction category of adding a detection item. Verifying the console instructions according to the above judgment result and the level naming result in the database also includes: cross-site verification of the console instructions with the instruction category of deleting a detection item. If the result is no associated cross-site item, the console instructions are executed; if the cross-site verification result of the console instructions with the instruction category of deleting a detection item is an associated cross-site item, an error reporting program is executed.

[0051] Figure 2 It is a schematic diagram of the control method for adding a detection item in an embodiment of the present application. The control method for adding a detection item includes: step S201, judging that the detection item is a newly added detection item; step S202, verifying whether each content is correct; step S203, if the above contents are verified to be correct, submitting successfully; step S204, if the above contents are verified to be incorrect, feedback the detailed content for the user to modify. The verification contents of the console instructions with the instruction category of adding a detection item include, but are not limited to, verification of the level, level relationship, and calculation method. When the verification results of the above verification contents are all correct, the instruction is submitted successfully; when an error occurs in the verification results of the above verification contents, an error message is prompted and the detailed content is feedback for modification until the verification result is correct and then the console instructions are submitted successfully.

[0052] An example of the verification for levels is as follows. When the second level includes inspection items with expressions [RAW b1], [RAW b2], and [RAW b3], and the console instruction for the operation table with the category of new inspection item is [b5c], obviously there is no second level to rely on. Therefore, it can be determined that the console instruction is incorrect.

[0053] An example of the verification for the hierarchical relationship is as follows. In the database, the first level with the expression [RAW ITEM] includes inspection item A, the second level inspection item is [A ITEM], and it is necessary to add a third level inspection item C. When the console instruction is [RAW C], since the third level inspection item C needs to perform calculations based on the received value result of the second level inspection item B, it is verified that the console instruction is incorrect.

[0054] An example of the verification for the calculation method is as follows. SUB is defined as subtraction and stored in the database. When it is necessary to add the received value results of two inspection items and the instruction on the console is SUB, it is determined that the console instruction is incorrect. The calculation methods include, but are not limited to, calculating the average value, maximum and minimum values, and addition and subtraction, etc.

[0055] In some other embodiments, SUB can be defined as a special calculation expression. For example: when inspection item A is at the first level, the expression of the second level inspection item B1 calculated based on the received value result of the first level inspection item A is [A B1], and the expression of the second level inspection item B2 calculated based on the received value result of the first level inspection item A is [A B2]. Define the instruction SUB as the received value result of the latter inspection item minus the received value result of the former inspection item and store it in the database. When the second level inspection item B1 is the former inspection item of the second level inspection item B2, when the calculation method is SUB and the input instruction is [A B1] - [A B2], the calculation order is incorrect, and it can be verified that the console instruction is incorrect.

[0056] Figure 3 It is a schematic diagram of the control method for deleting inspection items in an embodiment of the present application. The control method for deleting inspection items includes: Step S301, it is determined that the console instruction is to delete an inspection item; Step S302, it is determined whether the inspection item is associated with cross-station calculation; Step S303, if there is no association, it is successfully submitted; Step S304, if it is associated with cross-station calculation, detailed affected content is fed back for the user to modify. When cross-station calculation needs to use the data of inspection item A in the process station, deleting inspection item A in the inspection station will affect the calculations of other stations. Therefore, an error message needs to be reported, and it is necessary to check whether there is content to modify the cross-station calculation, and provide associated path stations for confirmation; when there is no associated station for cross-station calculation or after modification, the console instruction is successfully submitted.

[0057] The execution unit U6 executes one of an operation console instruction, an error reporting instruction, or a prompting instruction according to the verification result of the verification unit U5. The execution of the operation console instruction, error reporting program, or prompting program according to the verification result includes: executing the operation console instruction if the verification of the level, level relationship, and calculation method of the operation console instruction with the instruction category of adding a detection item is all correct; executing the prompting program if there is at least one error in the verification of the level, level relationship, and calculation method of the operation console instruction with the instruction category of adding a detection item.

[0058] The above technical solution divides the detection items in the detection process through the level division unit U1, names the levels according to preset rules, stores the above level naming results in the database storage unit U2, combines the detection item names with the calculation methods for easy identification. Then, the judgment unit U4 judges whether the operation console instruction received by the instruction receiving unit U3 is an instruction to add a detection item or an instruction to delete a detection item. After that, the verification unit U5 verifies the operation console instruction according to the above judgment result and the level naming result in the database. If the deletion of a detection item is associated with cross-site calculation, a prompt is given to reduce the risk of accidental deletion by the user; for adding a detection item, it is avoided that abnormal calculation or incorrect results cannot be obtained due to level errors. Then, the execution unit U6 executes one of an operation console instruction, an error reporting instruction, or a prompting instruction according to the verification result of the verification unit U5, helps the user quickly locate the problematic data, improves the accuracy of the data, and further improves the efficiency and accuracy of the process control.

[0059] The above are only the preferred embodiments of the present application. It should be noted that for those of ordinary skill in the art of this technology, without departing from the principle of the present invention, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A method for controlling a detection process, It is characterized in that include: The detection items in the detection process are divided into levels, including: defining the detection items received from the machine end as first-level detection items; defining the detection items that need to be calculated based on the received value results of the first-level detection items as second-level detection items; The first level is named according to the project name, and the levels other than the first level are named according to the expression with the calculation method attached after the project name, and the naming results of the above levels are stored in the database; Receive console instructions, the instruction categories include: adding new inspection items and deleting inspection items; Determine whether the instruction category is to add a new test item or to delete a test item, and obtain a determination result; Verify the operation console instruction according to the above judgment result and the hierarchical naming result in the database to obtain a verification result, including performing cross-site verification on the operation console instruction whose instruction category is to delete the detection item; Execute one of the console commands, error commands or prompt commands based on the verification result.

2. The control method of the detection process according to claim 1, It is characterized in that The operation console instruction is verified according to the above judgment result and the hierarchical naming result in the database, including verifying the hierarchy, hierarchical relationship, and calculation method of the operation console instruction whose instruction category is the newly added detection item.

3. The control method of the detection process according to claim 2, It is characterized in that The executing of one of the operating console instructions, error instructions or prompt instructions according to the verification result includes: executing the operating console instruction if the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item is correct; executing the prompt instruction if there is at least one error in the verification of the hierarchy, hierarchical relationship, and calculation method of the operating console instruction whose instruction category is a new detection item.

4. The method for controlling the detection process according to claim 1, It is characterized in that The method of executing one of the operation console instructions, error instructions or prompt instructions according to the verification result also includes: if the cross-site verification result of the operation console instruction whose instruction category is to delete the detection project is that there is no related cross-site project, the operation console instruction is executed; if the cross-site verification result of the operation console instruction whose instruction category is to delete the detection project is that there is a related cross-site project, the error reporting instruction is executed.

5. A control system for the detection process, It is characterized in that include: A hierarchical division unit divides the various inspection items in the inspection process into hierarchical divisions, including: defining the inspection items received from the machine end as first-level inspection items; defining the inspection items that need to be calculated based on the received value results of the first-level inspection items as second-level inspection items; The database storage unit names the first level according to the project name, names the levels other than the first level according to the expression with the calculation method attached after the project name, and stores the naming results of the levels in the database; An instruction receiving unit receives an instruction from an operation console, wherein the instruction categories include: adding a new inspection item and deleting an inspection item; A judgment unit that judges whether the instruction category is a new detection item or a deletion detection item, and obtains a judgment result; A verification unit that verifies the operation console instruction according to the above judgment result and the hierarchical naming result in the database, and obtains a verification result, including cross-station verification of the operation console instruction with the instruction category of deletion detection item; An execution unit that executes one of the operation console instruction, error reporting instruction, or prompt instruction according to the verification result.

6. The control system for the detection process according to claim 5, characterized in that verifying the operation console instruction according to the above judgment result and the hierarchical naming result in the database, including verifying the hierarchy, hierarchical relationship, and calculation method of the operation console instruction with the instruction category of new detection item.

7. The control system for the detection process according to claim 6, characterized in that executing one of the operation console instruction, error reporting instruction, or prompt instruction according to the verification result includes: if the verification of the hierarchy, hierarchical relationship, and calculation method of the operation console instruction with the instruction category of new detection item is all correct, execute the operation console instruction; if there is at least one error in the verification of the hierarchy, hierarchical relationship, and calculation method of the operation console instruction with the instruction category of new detection item, execute the prompt instruction.

8. The control system for the detection process according to claim 5, characterized in that executing one of the operation console instruction, error reporting instruction, or prompt instruction according to the verification result further includes: if the cross-station verification result of the operation console instruction with the instruction category of deletion detection item is no associated cross-station item, execute the operation console instruction; if the cross-station verification result of the operation console instruction with the instruction category of deletion detection item is an associated cross-station item, execute the error reporting instruction.

Images