Diluted medicine supply device

Abstract

The diluent supply device (1) includes: a diluent preparation unit (2) for preparing diluent (W1); a storage tank (3) for the prepared diluent; a diluent adjustment and supply mechanism (4) for supplying the diluent (W1) stored in the storage tank (3) as cleaning water (W2) to multiple sheet cleaning machines (5A, 5B, 5C); and a return mechanism that is connected to the sheet cleaning machines (5A, 5B, 5C) respectively and returns the residual water of the sheet cleaning machines to the storage tank (3). With such a diluent supply device, the solute concentration of the diluent can be adjusted with high precision, and the discharge of residual water can be suppressed, making it suitable for cleaning wafers and the like.

Description

Technical Field

[0001] This invention relates to a dilute solution supply device, which can stably and efficiently supply a dilute solution containing solutes such as alkali, oxidant, and gas that are effective in cleaning and rinsing processes for semiconductor wafers, etc., at extremely low concentrations. Background Technology

[0002] In semiconductor manufacturing processes, particularly in the cleaning of silicon wafers, water (hereinafter sometimes referred to as a diluent) is used, which is prepared by dissolving a solute effective for pH or redox potential in ultrapure water at a very low concentration. This diluent uses ultrapure water as its base material, and to impart liquid properties such as pH or redox potential suitable for various processes such as cleaning or rinsing, acids or bases, oxidizing agents or reducing agents are sometimes added. In such cases, to avoid excessive impact on the silicon wafer, it is desirable that the amount added is the minimum necessary. Here, in pH adjustment, a method of adding (injecting) trace amounts of HCl or NH4OH is commonly used. Additionally, CO2 or N2 gas is dissolved in ultrapure water to adjust pH or maintain inactivity. Furthermore, H2 gas is also dissolved when it is desired to impart reducing properties.

[0003] Methods for adding such drug solutions, such as using pumps like plunger pumps or pressurizing and squeezing out drug solutions filled into a sealed container using inactive gases like N2, have been put into practical use.

[0004] In this scenario, if the ultrapure water flow rate is constant, the desired solute concentration can be easily achieved through chemical dosing. However, in reality, in cleaning machines using diluted solutions, especially single-sheet cleaning machines with multiple cleaning chambers, the flow rate of the diluted solution fluctuates irregularly because the supply and stoppage of water to the wafers are controlled by the opening and closing of multiple valves. To address this fluctuation, various methods, such as proportional control or PID control based on signals from a concentration monitor, are used to control the amount of chemical solution added relative to the ultrapure water flow rate, ensuring that the solute concentration of the diluted solution remains within the desired range. Summary of the Invention

[0005] The problem that the invention aims to solve

[0006] As mentioned above, the flow rate in a single-sheet cleaning machine varies irregularly, but it is not possible to achieve injection control that can adequately track these irregular flow rate variations. As a result, there is a problem that the liquid quality of the cleaning water and rinsing water poured onto the wafer has to be controlled within a wide range that deviates from the ideal value.

[0007] Therefore, prioritizing the stabilization of the diluent concentration and, under certain conditions, producing an excess of diluent and continuously supplying it, results in a large discharge of excess diluent. In recent single-sheet washer machines with multiple cleaning chambers, the difference between the maximum and minimum instantaneous diluent flow rates has increased. However, when continuously supplying more diluent than the maximum flow rate, a considerable amount of excess water (excess diluent) is discharged. This presents problems regarding the burden on drainage equipment, the excessive discharge of diluent, and the excessive waste of ultrapure water as a basic material.

[0008] Regarding the direct reuse of residual water (residual diluted drug solution), especially residual water after passing through a heating device, it is not suitable from the perspective of strict concentration control because oxidizing agents such as H2O2 or O3 tend to decompose due to their own natural decomposition and reactions with other drug solutions, causing concentration fluctuations. Similarly, in residual water containing dissolved gases such as H2 gas and CO2 gas, there is a problem that the concentration of dissolved gases decreases during the process of returning it to the storage tank through gas-permeable pipes or tanks.

[0009] The present invention was made in view of the above-mentioned problems, and its object is to provide a diluent supply device suitable for cleaning wafers and the like, which can adjust the solute concentration of the diluent solution with high precision and suppress the discharge of residual water.

[0010] Technical solutions to the problem

[0011] To achieve the above objectives, the present invention provides a dilute drug solution supply device, comprising: a dilute drug solution manufacturing unit, which adds a predetermined amount of drug solution at a flow rate relative to ultrapure water to manufacture a dilute drug solution of a predetermined concentration; a storage tank for storing the manufactured dilute drug solution; a dilute drug solution supply mechanism for supplying the dilute drug solution to a point of use; and a return mechanism comprising a return pipe for returning the remaining dilute drug solution at the point of use to the storage tank and a concentration detection mechanism for the drug solution components disposed in the middle of the return pipe (Invention 1).

[0012] According to the invention (Invention 1), a predetermined amount of drug solution can be added relative to ultrapure water to produce a diluted drug solution of a predetermined concentration, which is then temporarily stored in a storage tank and supplied from the storage tank to the point of use. Furthermore, any remaining diluted drug solution is returned to the storage tank after the concentration of the drug solution components is detected. By properly managing the concentration of the diluted drug solution in the storage tank, the remaining diluted drug solution can be reused.

[0013] In the above invention (Invention 1), it is preferable that the dilute medicine supply mechanism includes a gas dissolving mechanism (Invention 2) for dissolving a specified gaseous component in the dilute medicine supplied from the storage tank.

[0014] According to the invention (Invention 2), it is possible to make a medicinal liquid that dissolves gas in a dilute medicinal liquid.

[0015] In the above inventions (Inventions 1 and 2), it is preferable that the dilute medicine manufacturing unit is equipped with a plunger pump for adding the medicine (Invention 3).

[0016] According to the invention (Invention 3), by controlling the flow rate of a plunger pump relative to ultrapure water, the amount of a small amount of drug solution added can be stably supplied to the storage tank with a dilute drug solution of a specified concentration.

[0017] In the above inventions (Inventions 1 and 2), it is preferred that the dilute medicine manufacturing unit includes a medicine adding device (Invention 4) comprising a sealed tank for storing the medicine and an inactive gas supply mechanism for supplying inactive gas to the sealed tank.

[0018] According to the invention (Invention 4), relative to the flow rate of ultrapure water, an inactive gas is expelled from the liquid to supply a specified amount of liquid, thereby enabling a stable supply of a dilute liquid of a specified concentration to the storage tank.

[0019] In the above inventions (Inventions 1 to 4), it is preferable to provide a liquid level sensor in the storage tank to detect the water level of the storage tank, and based on the water level information of the storage tank from the liquid level sensor, the production and cessation of the dilute medicine in the dilute medicine production section can be controlled (Invention 5).

[0020] According to the invention (Invention 5), when the water level in the storage tank is lower than a certain level, the diluent manufacturing unit is activated, thereby enabling efficient production of diluent and eliminating the generation of residual water.

[0021] In the above inventions (Inventions 1 to 5), it is preferable that the storage tank has a discharge mechanism (Invention 6).

[0022] According to the invention (Invention 6), the diluted drug solution is discharged without being stored in the storage tank until the diluted drug solution stabilizes at the specified concentration. This allows the diluted drug solution of the specified concentration to be stored in the storage tank, thus enabling high-precision control of the concentration of the diluted drug solution supplied to the point of use.

[0023] In the above inventions (Inventions 5 and 6), it is preferable that the diluted medicine supply device can adjust the amount of diluted medicine produced in the diluted medicine manufacturing section (Invention 7).

[0024] According to the invention (Invention 7), the amount of diluted medicine produced can be adjusted according to the water level in the storage tank, thereby enabling efficient control of the water level in the storage tank.

[0025] In the above inventions (Inventions 1 to 7), it is preferable that two or more storage tanks are arranged side by side (Invention 8).

[0026] According to the invention (Invention 8), by using a storage tank for supplying diluted medicine to the point of use and a storage tank for storing diluted medicine, the concentration of the diluted medicine supplied to the point of use can be controlled with high precision.

[0027] In the above inventions (Inventions 2-8), it is preferable to have a gas removal mechanism (Invention 9) in the front section of the gas dissolution mechanism for removing dissolved gases from the dilute drug solution.

[0028] According to the invention (Invention 9), the gas supplied from the gas dissolution mechanism can be dissolved in the dilute drug solution with high precision and efficiency.

[0029] Invention Effects

[0030] According to the present invention, the diluted drug supply device can return the remaining diluted drug solution to the storage tank after detecting the concentration of the drug components in the solution after it has been supplied to the point of use. Therefore, by properly managing the concentration of the diluted drug solution in the storage tank, the remaining diluted drug solution can be reused. As a result, the amount of ultrapure water used as raw water can be reduced. Attached Figure Description

[0031] Figure 1 This is a flowchart illustrating the dilute medicine supply device according to the first embodiment of the present invention.

[0032] Figure 2 This is a flowchart illustrating an example of the dilute drug preparation section of the dilute drug supply device according to the first embodiment.

[0033] Figure 3 This is a flowchart illustrating an example of the storage tank of the dilute medicine supply device according to the first embodiment.

[0034] Figure 4 This is a flowchart illustrating the dilute medicine supply device according to the second embodiment of the present invention.

[0035] Figure 5 This is a flowchart illustrating other examples of a diluted medicine preparation unit. Detailed Implementation

[0036] <First Implementation>

[0037] [Diluted drug supply device]

[0038] Figure 1 This refers to a diluted medicine supply device according to the first embodiment of the present invention. Figure 1In the process, the diluted medicine supply device 1 includes: a diluted medicine preparation unit 2 for preparing diluted medicine W1; a storage tank 3 for the prepared diluted medicine; a diluted medicine adjustment and supply mechanism 4 for supplying the diluted medicine W1 stored in the storage tank 3 as cleaning water W2 to multiple single-sheet cleaning machines 5A, 5B, and 5C, which are used as points of application; and a return mechanism connected to the single-sheet cleaning machines 5A, 5B, and 5C respectively, for returning the remaining water of the single-sheet cleaning machines to the storage tank 3.

[0039] (Diluted drug preparation section)

[0040] The diluted drug solution preparation unit 2 includes: a diluted drug solution preparation flow path 21 that connects the supply source 22 of ultrapure water (DIW) W to the storage tank 3; a first drug solution supply mechanism 23 and a second drug solution supply mechanism 24 disposed in the middle of the diluted drug solution preparation flow path 21. Furthermore, in this embodiment, as... Figure 2 As shown, the first drug supply mechanism 23 consists of a first drug tank 23A and a plunger pump 23B for adding drug solution, and the second drug supply mechanism 24 consists of a second drug tank 24A and a plunger pump 24B for adding drug solution. It should be noted that a flow measurement mechanism, such as a flow meter (not shown), is installed on the dilute drug solution modulation flow path 21.

[0041] (Storage tank)

[0042] To avoid compromising the purity of the diluted drug solution W1, the storage tank 3 is made of a high-purity material with negligible leaching from its inner wall. The storage tank 3 is connected to an N2 gas supply mechanism 31 for filling the storage tank 3 with N2 gas (an inactive gas) and a return mechanism 32 for discharging the diluted drug solution from the storage tank 3. In this embodiment, as... Figure 3 As shown, a level sensor 33 for detecting the water level is provided in the storage tank 3. In addition, in this embodiment, the return mechanism 32 includes a return flow path 34 with an opening and closing mechanism (not shown) and a removal device 35 such as an ion exchange resin column provided on the return flow path 34. The return flow path 34 is connected to the dilute drug solution preparation unit 2 downstream of the removal device 35.

[0043] (Diluted medicine supply and regulation organization)

[0044] The diluted drug solution regulating and supply mechanism 4 includes: a diluted drug solution supply flow path 41 connecting the storage tank 3 to single-sheet cleaning machines 5A, 5B, and 5C; a booster pump 42 serving as a delivery pump, located midway through the diluted drug solution supply flow path 41; a gas dissolving membrane 43; and a gas removal membrane 44 located upstream of the gas dissolving membrane 43. A dissolved gas source 45 and a mass flow controller (MFC) 46 serving as a flow control mechanism are connected to the gas dissolving membrane 43. It should be noted that in this embodiment, the diluted drug solution supply mechanism is given a gas dissolving function, thus becoming the diluted drug solution regulating and supply mechanism 4.

[0045] (Returning agency)

[0046] In this embodiment, the cleaning machines 5A, 5B, and 5C are respectively connected to the return flow path 51, which serves as a return mechanism for returning to the storage tank 2. The return flow path 51 is equipped with a gas removal membrane 52 and an online monitor 53 for measuring and displaying the concentration of the first and / or second chemical solutions.

[0047] (Control device)

[0048] In the above configuration, the first liquid supply mechanism 23, the second liquid supply mechanism 24, the flow meter of the dilute liquid modulation flow path 21, the liquid level sensor 33, the opening and closing mechanism of the return flow path 34, and the online monitor 53 for detecting the concentration of the first and second liquids are connected to a control device such as a personal computer (not shown). Based on the flow rate of the dilute liquid modulation flow path 21, the liquid level sensor 33, and the measurement value of the online monitor 53, the opening and closing of the return flow path 34 and the adjustment of the supply amount of the first liquid supply mechanism 23 and the second liquid supply mechanism 24 are controlled.

[0049] [Methods for supplying diluted medicine]

[0050] Next, the method for supplying diluted medicine using the above-described diluted medicine supply device will be explained.

[0051] (Diluted drug solution preparation process)

[0052] In the dilute drug solution preparation unit 2, ultrapure water (DIW) W is supplied from the supply source 22, and a first drug solution and a second drug solution are supplied from the first drug solution supply mechanism 23 and the second drug solution supply mechanism 24, respectively. At this time, the addition amount of the first drug solution and the second drug solution is adjusted by the control device based on the flow control plunger pump 23B and plunger pump 24B of the dilute drug solution preparation flow path 21, so that the first drug solution and the second drug solution are at a specified concentration.

[0053] In this embodiment, the ultrapure water W used as the raw water is preferably ultrapure water with the following characteristics: resistivity: 18.1 MΩ·cm or higher; microparticles: particle size 50 nm or higher and 1000 particles / L or less; viable bacteria: 1 particle / L or less; TOC (Total Organic Carbon): 1 μg / L or less; total silicon: 0.1 μg / L or less; metals: 1 ng / L or less; ions: 10 ng / L or less; hydrogen peroxide: 30 μg / L or less; and water temperature: 25 ± 2 °C.

[0054] As one of the first and second solutions, a pH adjuster is preferred. There are no particular limitations on the pH adjuster; acidic solutions such as hydrochloric acid, nitric acid, sulfuric acid, and acetic acid can be used to adjust the pH to less than 7. Alternatively, alkaline solutions such as ammonia, sodium hydroxide, potassium hydroxide, or TMAH can be used to adjust the pH to 7 or higher.

[0055] Furthermore, as another component of the second or first solution, a redox potential modifier is preferred. Hydrogen peroxide water, etc., can be used as this redox potential modifier to increase the redox potential. Alternatively, solutions of oxalic acid, hydrogen sulfide, potassium iodide, etc., can be used to decrease the redox potential.

[0056] These first or second solutions can be added together, or only one of them can be added. If only one is added, the second solution supply mechanism 24 may not be needed. Thus, based on the flow rate of ultrapure water W, the amount of either or both of the first and second solutions added is controlled by the control device to achieve a specified concentration, thereby preparing the desired diluted solution W1.

[0057] (Storage process)

[0058] The diluted drug solution W1 prepared in this way is directly supplied to the storage tank 3. At this time, N2 gas at a constant pressure is continuously supplied from the N2 gas supply mechanism 31, and the upper space of the storage tank 3 is filled with N2 gas. In this way, changes in pH or redox potential caused by the increase of dissolved gas in the diluted drug solution W1 in the storage tank 3 can be suppressed.

[0059] In this embodiment, such as Figure 3 As shown, since a liquid level sensor 33 is installed in the storage tank 3, the output of the liquid level sensor 33 is used to control the diluent preparation unit 2 so that the production of diluent W1 can begin when the water level in the storage tank 3 is lower than a certain level, thereby enabling efficient production of diluent W1. Even when the water level in the storage tank 3 is above a certain level and the production unit is stopped, a very small flow rate of ultrapure water W is continuously introduced into the diluent preparation unit 2, keeping the system of the diluent preparation unit 2 clean. The ultrapure water introduced at this time can be discharged or returned to the ultrapure water W supply source 22.

[0060] Here, after the diluent solution W1 is initially produced in the diluent solution preparation unit 2, there is a situation where the solute concentration of the diluent solution W1 is unstable and not within the prescribed concentration range. Therefore, by pre-investigating the time or processing volume required for the concentration of the prepared diluent solution W1 to stabilize, the diluent solution W1 is discharged from the return mechanism 32 without being stored in the storage tank 3 before reaching that time or processing volume, thus enabling high-precision management of the solute concentration of the supplied diluent solution W1 stored in the storage tank 3. The discharge volume at this time is drainage, but it is very small as a percentage of the total water volume. It should be noted that, regarding the discharge of this diluent solution W1, if... Figure 3 As shown, the first and / or second drug solution components can be removed by a removal device 35, such as an ion exchange resin column, installed in the return flow path 34, and then returned to the dilute drug solution preparation section 2, thereby reducing the drainage volume. It should be noted that a sensor for measuring the concentration of the first and / or second drug solution can be installed in the storage tank 3 to discharge the solution until the solute concentration of the dilute drug solution W1 is within a specified range.

[0061] (Diluted medicine solution adjustment and supply process)

[0062] Next, the diluted drug solution W1 stored in the storage tank 3 is delivered by a booster pump 42, which serves as a liquid delivery mechanism, located at the rear end of the storage tank 3. In this embodiment, after the dissolved gas in the diluted drug solution W1 is removed by the gas dissolving membrane 43, the gas supplied from the dissolved gas source 45 is dissolved in the gas removal membrane 44 and regulated as cleaning water W2. Preferably, the flow rate of the gas supplied from the dissolved gas source 45 is controlled by a mass flow controller (MFC) 46 to ensure that the cleaning water W2 has a predetermined dissolved gas concentration. Various gases are selected as the dissolved gas depending on the cleaning purpose, such as hydrogen, ozone, CO2, etc. The cleaning water W2 obtained by thus regulating the diluted drug solution W1 is supplied to cleaning machines 5A, 5B, and 5C.

[0063] (Return process)

[0064] Furthermore, the unused remaining cleaning water W2 in cleaning machines 5A, 5B, and 5C is returned to the storage tank 3 via the return flow path 51. While it is not problematic to directly return this remaining cleaning water W2 to the storage tank 3, due to the self-decomposition of the oxidant or its reaction with the chemical solution, the online monitor 53 can be used to confirm whether the concentration of the first and / or second chemical solution is below a specified value. Based on this measured value, the control device appropriately controls the concentration of the chemical solution added from the first chemical solution supply mechanism 23 and / or the second chemical solution supply mechanism 24 in the dilution chemical solution preparation unit 2.

[0065] By supplying the diluted chemical solution W1 (cleaning water W2) in this way, even if multiple single-sheet cleaning machines 5A, 5B, and 5C are multi-chamber single-sheet cleaning machines with many valves opening and closing irregularly, it is possible to achieve a high-precision and stable supply of the liquid quality that is extremely important in the cleaning and rinsing process, and to significantly reduce the flow of the remaining cleaning water W2 (diluted chemical solution W1), thus preventing the waste of ultrapure water W.

[0066] <Second Implementation>

[0067] Next, based on Figure 4 The diluent supply device according to the second embodiment of the present invention will be described. The diluent supply device of this embodiment has basically the same structure as that of the first embodiment described above, therefore, the same reference numerals are used for the same components and detailed descriptions are omitted.

[0068] exist Figure 4 In the process, the diluted medicine supply device is configured such that two storage tanks 3A and 3B are arranged in parallel, and the branch pipe 21A of the diluted medicine modulation flow path 21 with the on / off valve 21B is connected to the storage tank 3B. Furthermore, the branch pipe 51A of the return flow path 51 is connected to the storage tank 3B. In addition, switching valves 41A and 41B are respectively provided on the diluted medicine supply flow path 41.

[0069] As in this embodiment, two or more storage tanks are arranged side by side. One storage tank (e.g., storage tank 3A) stores the diluted drug solution W1 from the diluted drug solution preparation flow path 21. After storing the diluted drug solution W1, the on / off valve 21B is opened to supply the diluted drug solution W1 to the storage tank 3B. Then, the switching valve 41A is opened and the switching valve 41B is closed, sequentially supplying cleaning water W2 from the storage tank 3A to the single-sheet cleaning machines 5A, 5B, and 5C. During this period, the diluted drug solution W1 is stored in the storage tank 3B while it is in standby mode. Next, the valves can be switched in the opposite direction to supply the diluted drug solution W1 from the storage tank 3B and store it in the storage tank 3A.

[0070] By arranging multiple storage tanks for storing diluted drug solution W1 in parallel, and by switching between the storage tank for storing diluted drug solution W1 and the storage tank for supplying diluted drug solution W1, it is possible to simultaneously stabilize the concentration and supply of diluted drug solution W1.

[0071] The above description of the diluted medicine supply device of the present invention is based on the above embodiments. However, the present invention is not limited to the above embodiments and can be implemented in various modifications. For example, the first medicine supply mechanism 23 and the second medicine supply mechanism 24 are not limited to... Figure 2 The mechanism shown can be as follows Figure 5As shown, the first drug solution tank 23A and the second drug solution tank 24A are sealed tanks. N2 gas, which is an inactive gas, is supplied to the first drug solution tank 23A and the second drug solution tank 24A from the N2 gas supply source 25 through the supply pipe 26. The first drug solution and the second drug solution are pressurized and dissolved to have the desired solute concentration.

[0072] In this embodiment, the diluent supply mechanism 4 dissolves the desired gaseous components in the diluent W1 through the gas dissolving membrane 43 to produce cleaning water W2. However, both the gas dissolving membrane 43 and the gas removal membrane 44 are not necessarily required. The diluent supply mechanism can directly supply the diluent W1 as cleaning water W2, or only the gas removal membrane 44 can be provided. Furthermore, the application point is not limited to a single-sheet washing machine and can be applied to devices using various diluents. Additionally, the application point of this invention preferably consists of multiple devices using diluents, but it can also be a single device using diluents.

[0073] Explanation of reference numerals in the attached figures

[0074] 1. Diluted medicine supply device

[0075] 2. Diluted drug solution preparation section

[0076] 21. Flow path for preparing diluted drug solution

[0077] 21A branch pipe

[0078] 21B On / off valve

[0079] 22 Ultrapure Water Supply Source

[0080] 23 First Pharmaceutical Supply Organization

[0081] 23A First Medicine Liquid Tank

[0082] 23B plunger pump

[0083] 24 Second Medicine Supply Organization

[0084] 24A Second Medicine Liquid Tank

[0085] 24B plunger pump

[0086] 25 N2 gas (inactive gas) supply source

[0087] 26 Supply Management

[0088] 3, 3A, 3B storage tanks

[0089] 31. N2 gas supply mechanism (inactive gas supply mechanism)

[0090] 32 Returning Agency

[0091] 33 Liquid Level Sensor

[0092] 34 Return flow path

[0093] 35 Removal device

[0094] 4. Diluted medicine supply and regulation mechanism

[0095] 41. Diluted drug solution supply flow path

[0096] 41A, 41B switching valves

[0097] 42. Booster pump (liquid delivery pump)

[0098] 43 Gas Dissolution Membrane

[0099] 44 Gas Removal Membrane

[0100] 45 Dissolved gas source

[0101] 46. ​​Mass flow controller (flow control mechanism)

[0102] 5A, 5B, 5C Single-sheet washing machines (point of use)

[0103] 51 Return flow path

[0104] 52 Gas Removal Membrane

[0105] 53 Online monitoring device (concentration sensor)

[0106] W Ultrapure Water

[0107] W1 diluted medicine

[0108] W2 cleaning water

Claims

1. A dilute medicine supply device, wherein, have: The diluted drug solution manufacturing unit has an ultrapure water supply source, at least one drug solution tank configured to store the drug solution, and at least one drug solution pump. It adds a predetermined amount of the drug solution by means of a flow rate relative to the ultrapure water to manufacture a diluted drug solution of a predetermined concentration. Storage tank for storing the manufactured diluted medicinal solution; The dilute drug solution generation flow path is configured to be connected to the ultrapure water supply source, the at least one drug solution pump, and the storage tank; A diluted medicine supply mechanism, comprising a delivery pump and a supply flow path, supplies the diluted medicine to the point of use; and The return mechanism includes a return piping for returning the remaining diluted medicine solution at the point of use to the storage tank, and a concentration detection mechanism for the medicine solution located midway along the return piping. The storage tank is provided with a discharge flow path configured to communicate with the dilute medicine manufacturing unit.

2. The diluted medicine supply device as described in claim 1, wherein, The diluted drug supply mechanism includes a gas dissolving mechanism that dissolves a specified gaseous component in the diluted drug supplied from the storage tank.

3. The diluted medicine supply device as described in claim 1 or 2, wherein, The at least one drug pump is a plunger pump that adds the drug solution.

4. The diluted medicine supply device as described in claim 1 or 2, wherein, The at least one liquid container is a sealed container for storing the liquid medicine, and the dilute liquid medicine manufacturing unit also has an inactive gas supply source for supplying inactive gas to the sealed container.

5. The diluted medicine supply device as described in claim 1 or 2, wherein, A liquid level sensor is installed in the storage tank to detect the water level in the storage tank. Based on the water level information of the storage tank from the liquid level sensor, the production and stopping of the diluted medicine in the diluted medicine production unit can be controlled.

6. The diluted medicine supply device as described in claim 5, wherein, The diluted medicine supply device can adjust the amount of diluted medicine produced in the diluted medicine manufacturing section.

7. The diluted medicine supply device as described in claim 1 or 2, wherein, There are two or more storage tanks arranged side by side.

8. The diluted medicine supply device as described in claim 2, wherein, The gas dissolution mechanism is equipped with a gas removal mechanism at the front end to remove dissolved gases from the dilute drug solution.

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