Thermometer measuring device, mechanical system, thermometer measuring method, and recording medium

Abstract

The present invention provides a temperature measurement device, a mechanical system, a temperature measurement method, and a recording medium that can timely monitor the surface temperature of the inner side of a structure having a multi-layer structure. The temperature measurement device includes: an ultrasonic sensor mounted on the back side of a structure having a multi-layer structure; an acquisition unit that acquires, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; an extraction unit that extracts a region including the reflected wave reflected from the inner side surface of the structure from the reflected wave signal; and a determination unit that determines the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region.

Description

Technical Field

[0001] The present disclosure relates to a thermometer measuring device, a mechanical system, a thermometer measuring method, and a recording medium. Background Art

[0002] In Patent Document 1, a temperature measurement method is disclosed that uses ultrasonic waves capable of measuring the temperature distribution in a medium by propagating ultrasonic waves in the medium.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Patent No. 4843790 Gazette

[0006] Patent Document 2: Japanese Unexamined Patent Application Publication No. 2003 - 42857 Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] In general bearings of rotating machinery, during the process where operating conditions become severe due to high rotational speed / high surface pressure, the application of multi-layer structured bearings formed by laminating a composite material with high load resistance / wear resistance on the surface on the inner side of the bearing is developing.

[0009] Generally, the temperature of a bearing is measured / monitored by thermocouples and resistance temperature detectors provided in the base material (backmetal) at a position several millimeters deep from the surface on the inner side of the bearing (the surface of the composite material). However, in the case of a multi-layer structured bearing, the thermal conductivity of the composite material on the surface on the inner side of the bearing is low. Therefore, in the above method, even when a temperature change occurs on the surface on the inner side of the bearing due to an abnormality, the sensitivity to this temperature change is very low. That is, in the above method, it is impossible to monitor the surface temperature of a bearing with a multi-layer structure in a timely manner.

[0010] An object of the present disclosure is to provide a thermometer measuring device, a mechanical system, a thermometer measuring method, and a recording medium that can monitor the surface temperature on the inner side of a structure with a multi-layer structure in a timely manner.

[0011] Technical Solution

[0012] According to an aspect of the present disclosure, a temperature measurement device includes: an ultrasonic sensor mounted on the back side of a structure having a multilayer structure; an acquisition unit that acquires, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; an extraction unit that extracts a region including a reflected wave reflected from the inner side surface of the structure from the reflected wave signal; and a determination unit that determines the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region.

[0013] According to an aspect of the present disclosure, a temperature measurement method uses an ultrasonic sensor mounted on the back side of a structure having a multilayer structure, and the temperature measurement method includes: a step of acquiring, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; a step of extracting a region including a reflected wave reflected from the inner side surface of the structure from the reflected wave signal; and a step of determining the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region.

[0014] According to an aspect of the present disclosure, a program causes a computer of a temperature measurement device including an ultrasonic sensor mounted on the back side of a structure having a multilayer structure to execute: a step of acquiring, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; a step of extracting a region including a reflected wave reflected from the inner side surface of the structure from the reflected wave signal; and a step of determining the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region.

[0015] Advantages of the Invention

[0016] According to each of the above aspects, it is possible to monitor the surface temperature of a bearing having a multilayer structure in a timely manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a diagram showing the overall configuration of a mechanical system according to at least one embodiment of the present disclosure.

[0018] Figure 2 is a diagram showing a method of setting an ultrasonic sensor according to at least one embodiment of the present disclosure.

[0019] Figure 3 is a diagram showing the functional configuration of a temperature measurement device according to at least one embodiment of the present disclosure.

[0020] Figure 4 is a diagram showing an example of an interface thermometer according to at least one embodiment of the present disclosure.

[0021] Figure 5 is a diagram showing the processing flow of a temperature measurement device according to at least one embodiment of the present disclosure.

[0022] Figure 6 It is an explanatory diagram of the processing of the thermometer measuring device according to at least one embodiment of the present disclosure.

[0023] Figure 7 It is an explanatory diagram of the processing of the thermometer measuring device according to at least one embodiment of the present disclosure.

[0024] Figure 8 It is a diagram showing a method of setting an ultrasonic sensor according to at least one embodiment of the present disclosure.

[0025] Figure 9 It is a diagram showing a method of setting an ultrasonic sensor according to at least one embodiment of the present disclosure.

[0026] Figure 10 It is a diagram showing a method of setting an ultrasonic sensor according to at least one embodiment of the present disclosure.

[0027] Figure 11 It is a diagram showing a part of the configuration of a mechanical system according to at least one embodiment of the present disclosure.

[0028] Explanation of reference numerals

[0029] 1 Thermometer measuring device

[0030] 1A Computer

[0031] 10 CPU

[0032] 100 Acquisition unit

[0033] 101 Extraction unit

[0034] 102 Determination unit

[0035] 103 Contact determination unit

[0036] 11 Memory

[0037] 12 Output device

[0038] 13 Input device

[0039] 14 Connection interface

[0040] 15 Memory

[0041] 2 Rotary machine (machine)

[0042] 3 Internal combustion engine (machine)

[0043] 9 Mechanical system

[0044] B Bearing (structure)

[0045] L cylinder liner

[0046] R rotor

[0047] BM back-up metal

[0048] C composite material

[0049] O oil layer

[0050] S1 ultrasonic sensor

[0051] S2 thermocouple (reference temperature sensor)

[0052] T interface thermometer Detailed implementation manners

[0053] <The first implementation manner>

[0054] Hereinafter, with reference to Figures 1 to 6 the thermometer measuring device of the first implementation manner and the mechanical system having the thermometer measuring device will be described.

[0055] (Configuration of the mechanical system)

[0056] Figure 1 is a diagram showing the overall configuration of the mechanical system of the first implementation manner.

[0057] As Figure 1 shown, the mechanical system 9 includes a thermometer measuring device 1 and a rotating machine 2.

[0058] The rotating machine 2 is, for example, a turbine or the like. Figure 1 The figure shows the appearance of the bearing B, the rotor R, and the oil layer O of the rotating machine 2 as viewed along the rotation axis direction. As Figure 1 shown, the bearing B, which is a structural body of the rotating machine 2, has a multi-layer structure of a back-up metal BM on the back side and a composite material C on the inner side. The composite material C is provided for the purpose of improving the load resistance / wear resistance of the bearing B, and is, for example, a material such as PEEK (polyetheretherketone). The thickness of the composite material C is, for example, about 3 mm.

[0059] The thermometer measuring device 1 always monitors the temperature of the surface on the inner side of the bearing during the operation of the rotating machine 2. Based on the configuration described below, the thermometer measuring device 1 can timely monitor the temperature of the surface on the inner side of the bearing of the rotating machine 2 (hereinafter, also referred to as "inner side surface H"). Thereby, the mechanical system 9 realizes early abnormality detection and emergency stop in the rotating machine 2.

[0060] As Figure 1As shown, the thermometer measuring device 1 includes: a computer 1A, an ultrasonic sensor S1, and a thermocouple S2 that functions as a reference temperature sensor (described later). The ultrasonic sensor S1 and the thermocouple S2 are provided on the back surface side of the bearing B.

[0061] The ultrasonic sensor S1 emits ultrasonic waves toward the inner side of the bearing B at a fixed period and observes the reflected waves. In the following description, the ultrasonic waves output from the ultrasonic sensor S1 are also referred to as incident waves W0. In addition, the reflected wave generated at the interface between the back-up metal BM and the composite material C is also referred to as the first reflected wave W1. In addition, the reflected wave generated at the interface between the composite material C and the oil layer O (that is, the inner surface side of the bearing B) is also referred to as the second reflected wave W2.

[0062] (Setting of ultrasonic sensor)

[0063] Figure 2 It is a diagram showing the setting method of the ultrasonic sensor according to the first embodiment.

[0064] As Figure 2 shown, in the present embodiment, the ultrasonic sensor S1 is fixedly provided on the back surface side of the bearing B by an adhesive and a molding agent.

[0065] (Functional configuration of thermometer measuring device)

[0066] Figure 3 It is a diagram showing the functional configuration of the thermometer measuring device according to the first embodiment.

[0067] As Figure 3 shown, the computer 1A of the thermometer measuring device 1 includes: a CPU (central processing unit) 10, a memory 11, an output device 12, an input device 13, connection interfaces 14a, 14b, and a storage 15.

[0068] The CPU 10 is a processor that manages all the processes of the thermometer measuring device 1 and has various functions by operating according to a pre-prepared program. The specific processes of the CPU 10 will be described later.

[0069] The memory 11 is a so-called main storage device that expands commands and data required for the operation of the CPU 10.

[0070] The output device 12 is an output device such as a display monitor (liquid crystal display, organic EL display), a speaker, etc.

[0071] The input device 13 is an input device such as a mouse, a keyboard, a touch sensor, etc.

[0072] The connection interfaces 14a and 14b are respectively the connection interfaces for the ultrasonic sensor S1 and the thermocouple S2 installed in the bearing B of the rotating machine 2. It should be noted that the connection interface 14a has: a pulse control unit for ultrasonic incidence to the ultrasonic sensor S1; and an A / D conversion unit for taking in the reflected wave for the ultrasonic sensor S1.

[0073] The memory 15 is a so-called auxiliary storage device, such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive), etc. being preferable. In the present embodiment, the memory 15 stores a pre-prepared interface temperature table T (described later).

[0074] Next, the functions of the CPU 10 will be described.

[0075] As Figure 3 shown, the CPU 10 has functions as an acquisition unit 100, an extraction unit 101, a determination unit 102, and a contact determination unit 103.

[0076] The acquisition unit 100 acquires the reflected wave signal of the ultrasonic wave (incident wave W0) incident on the inner side of the bearing B via the ultrasonic sensor S1. Here, the reflected wave signal refers to the timing information of the signal intensity of the reflected wave (the first reflected wave W1 and the second reflected wave W2) of the incident wave W0.

[0077] The extraction unit 101 extracts the time domain including the reflected wave (that is, the second reflected wave W2) reflected on the inner side surface H of the bearing B from the reflected wave signal acquired by the acquisition unit 100.

[0078] The determination unit 102 determines the temperature of the inner side surface H of the bearing B (hereinafter, also referred to as "inner side surface temperature") based on the reflected wave signal (the signal representing the intensity of the second reflected wave W2) in the time domain extracted by the extraction unit 101.

[0079] The contact determination unit 103 acquires an ultrasonic wave signal belonging to a pre-determined frequency band and different from the incident wave W0 output by the ultrasonic sensor S1 itself via the ultrasonic sensor S1. Then, the contact determination unit 103 performs the contact determination between the rotor R and the bearing B based on this ultrasonic wave signal.

[0080] (Interface temperature table)

[0081] Figure 4 is a diagram showing an example of the interface temperature table of the first embodiment.

[0082] As Figure 4As shown, the interface thermometer T is an information table that can uniquely determine the internal side surface temperature of the bearing B based on the combination of the "amplitude" of the second reflected wave W2 and the "reference temperature" obtained from the thermocouple S2. Such an interface thermometer T is prepared in advance based on the results of simulation tests implemented separately, etc.

[0083] It is known that generally for the reflectivity of ultrasonic waves at a certain interface, the higher the interface temperature, the greater the reflectivity. That is, the higher the interface temperature (the internal side surface temperature of the bearing B), the greater the amplitude of the second reflected wave W2. Therefore, it can be considered that if the temperature measurement device 1 refers to the amplitude of the second reflected wave W2, the internal side surface temperature of the bearing B can be uniquely determined. However, the intensity of the reflected wave depends not only on the interface temperature but also to a large extent on the temperature of the material through which the ultrasonic wave propagates. That is, the incident wave W0 and the second reflected wave W2 propagate while gradually attenuating inside the backing metal BM, and the degree of this attenuation increases / decreases depending on the temperature of the backing metal BM.

[0084] For example, assume that at a certain moment t, contact abnormality occurs between the bearing B and the rotor R, resulting in an increase in the internal side surface temperature of the bearing B. At the moment (moment t) when the abnormality occurs, the inside of the backing metal BM becomes the standard temperature (the temperature during normal operation), but as time passes, the high-temperature region gradually expands from the part where the abnormality occurs toward the back side of the backing metal BM. Thus, as time passes, the proportion of the high-temperature region in the backing metal BM through which the incident wave W0 and the second reflected wave W2 propagate increases, and therefore, the degree of attenuation during propagation increases. As a result, the amplitude of the second reflected wave W2 actually observed by the ultrasonic sensor S1 gradually becomes smaller than the amplitude ideally corresponding to the internal side surface temperature over time since the occurrence of the abnormality.

[0085] Therefore, the temperature measurement device 1 of the present embodiment takes into account the degree of attenuation during the temperature rise inside the backing metal BM, and therefore corrects the observed value of the internal side surface temperature based on the reference temperature measured by the thermocouple S2.

[0086] In this way, the temperature measurement device 1 further includes: a thermocouple S2 (reference temperature sensor), which is installed on the back side of the bearing B in the same way as the ultrasonic sensor S1. Then, the determination unit 102 obtains the temperature (reference temperature) of the back side surface of the bearing B based on the thermocouple S2, and determines the internal side surface temperature of the bearing B based on both the reflected wave signal and the temperature of the back side surface. It should be noted that the reference temperature may also be measured not based on the thermocouple S2, for example, by measuring the temperature distribution through other methods such as measuring the propagation time of ultrasonic waves.

[0087] (Processing flow of the temperature measurement device)

[0088] Figure 5 This is a diagram showing the processing flow of the temperature measurement device of the first embodiment. In addition, Figure 6 This is an explanatory diagram of the processing of the temperature measurement device of the first embodiment. Hereinafter, with reference to Figure 5 and Figure 6 the processing flow of the temperature measurement device 1 will be described in detail. It should be noted that Figure 5 the processing flow shown is repeatedly executed at a fixed cycle during the operation of the rotating machine 2.

[0089] First, the acquisition unit 100 of the temperature measurement device 1 acquires a reflected wave signal via the ultrasonic sensor S1 (step S1). As described above, this reflected wave signal is the time-series information of the intensity of the reflected wave of the incident wave W0 output by the ultrasonic sensor S1 itself. The incident wave W0 is output as ultrasonic waves having a frequency of, for example, several MHz.

[0090] Here, Figure 6 an example of the reflected wave signal acquired by the acquisition unit 100 is shown. As Figure 6 shown, after the output of the incident wave W0, the ultrasonic sensor S1 first observes the first reflected wave W1 reflected at the interface between the backing metal BM and the composite material C, and then observes the second reflected wave W2 reflected at the interface between the composite material C and the oil layer O. In addition, there is a time difference between the observation of the first reflected wave W1 and the observation of the second reflected wave W2 due to the path difference of the thickness of the composite material C. It should be noted that the incident wave W0 is generated not only at the interface between the backing metal BM and the composite material C and at the interface between the composite material C and the oil layer O, but also at the interface between the oil layer O and the rotor R (this is also referred to as the third reflected wave). However, generally, the oil layer O is several tens of μm and is very thin, so this third reflected wave cannot be separated from the second reflected wave W2 and is processed as an integrated reflected wave W2.

[0091] Return Figure 5 , next, the extraction unit 101 of the temperature measurement device 1 extracts the time domain including the amplitude of the second reflected wave from the reflected wave signal acquired in step S01 (step S02). Here, as Figure 6 shown, for example, the extraction unit 101 extracts the region where the amplitude of only the second reflected wave W2 is the time domain from time t1 to t2. The time domain from time t1 to t2 is determined in advance, for example, based on past observation results.

[0092] Return Figure 5 , next, the determination unit 102 of the temperature measurement device 1 measures the amplitude of the reflected wave signal extracted by the extraction unit 101, and also acquires a reference temperature via the thermocouple S2. Then, the determination unit 102 refers to the interface temperature table T( Figure 4) Determine the interface temperature (the internal side surface temperature of the bearing B) corresponding to the amplitude of the second reflected wave W2 and the reference temperature and output it (step S03).

[0093] Next, the contact determination unit 103 of the thermometer measuring device 1 performs contact determination between the bearing B and the rotor R (step S04). When the bearing B and the rotor R are in contact, ultrasonic waves in a frequency band determined by the mechanical structural characteristics (for example, on the order of several hundred kHz) are generated. The frequency band generated due to contact does not overlap with the frequency band of the ultrasonic waves output by the ultrasonic sensor S1. Therefore, the contact determination unit 103 monitors whether there are ultrasonic waves belonging to the frequency band of several hundred kHz via the ultrasonic sensor S1. Then, when ultrasonic waves in the several hundred kHz band exceeding the determination threshold of the contact determination unit 103 are observed, it is determined that the bearing B and the rotor R are in contact and the result is output.

[0094] (Function and effect)

[0095] As described above, the thermometer measuring device 1 of the first embodiment includes: an ultrasonic sensor S1 mounted on the back side of the bearing B having a multi-layer structure; an acquisition unit 100 that acquires a reflected wave signal of ultrasonic waves incident on the inner side of the bearing B via the ultrasonic sensor S1; an extraction unit 101 that extracts a region including the reflected wave (the second reflected wave W2) reflected on the inner side surface H of the bearing B from the reflected wave signals acquired by the acquisition unit 100; and a determination unit 102 that determines the inner side surface temperature of the bearing B based on the reflected wave signals in the region extracted by the extraction unit 101.

[0096] By setting it like this, it is possible to accurately estimate the inner side surface temperature of the bearing B having a multi-layer structure with the amplitude of the reflected wave of ultrasonic waves. Therefore, according to the thermometer measuring device 1 of the first embodiment, it is possible to timely monitor the surface temperature of the inner side of the bearing having a multi-layer structure.

[0097] In addition, the thermometer measuring device 1 of the first embodiment further includes: a reference temperature sensor (thermocouple S2) mounted on the back side of the bearing B. Then, the determination unit 102 acquires the temperature of the back side surface of the bearing B (reference temperature) based on the thermocouple S2, and determines the inner side surface temperature of the bearing B based on both the intensity of the reflected wave signal (the amplitude of the second reflected wave W2) and the temperature of the back side surface.

[0098] By setting it like this, it is possible to determine the inner side surface temperature while comprehensively considering the influence of the attenuation of ultrasonic waves generated inside the bearing B (backing metal BM).

[0099] In addition, the thermometer measurement device 1 of the first embodiment further includes a contact determination unit 103 that acquires an ultrasonic signal belonging to a predetermined frequency band (several hundred kHz band) via the ultrasonic sensor S1, and determines the contact between the rotor R and the bearing B based on the ultrasonic signal.

[0100] By setting it like this, it is possible to simultaneously perform both abnormal sensing of temperature and abnormal sensing of contact determination. Therefore, a mechanical system with higher safety can be provided.

[0101] (Modification of the First Embodiment)

[0102] Hereinafter, a modification of the first embodiment will be described.

[0103] In the first embodiment, it has been described that the determination unit 102 refers to the interface temperature table T and determines the internal side surface temperature based on the combination of the amplitude of the second reflected wave and the reference temperature. However, in other embodiments, it is not limited to this.

[0104] For example, the determination unit 102 of the modification of the first embodiment may use a model function f that takes the amplitude of the second reflected wave and the reference temperature as explanatory variables (X1, X2) and the internal side surface temperature as the target variable (Y), calculate Y = f(X1, X2), and determine the internal side surface temperature. In addition, in this case, the parameters of the model function f may also be set as parameters learned and identified by machine learning.

[0105] Figure 7 It is an explanatory diagram of the processing of the thermometer measurement device of another modification of the first embodiment.

[0106] Next, refer to Figure 7 Another modification of the first embodiment will be described.

[0107] It is known that as the temperature inside the back pad metal BM changes, the propagation speed of ultrasonic waves also changes. Therefore, as the temperature of the back pad metal BM changes, the arrival time of the second reflected wave W2 relative to the output time of the incident wave W0 also changes. Therefore, the extraction unit 101 of this modification may also change the time domain (times t1 to t2) for extracting the second reflected wave W2 according to the reference temperature acquired by the thermocouple S2. In addition, the degree of change in the time domain with respect to the reference temperature is preferably one of the parameters identified by machine learning.

[0108] <Second Embodiment>

[0109] Hereinafter, refer to Figure 8 The mechanical system of the second embodiment will be described.

[0110] Figure 8 It is a diagram showing a method of setting the ultrasonic sensor of the second embodiment.

[0111] As Figure 8 shown, the bearing B of the rotary machine 2 of the second embodiment has a recess K provided from the back surface side toward the inside. Then, the ultrasonic sensor S1 of the thermometer measuring device 1 is installed in the recess K. It should be noted that, although not shown in the figure, the thermocouple S2 is also installed in the recess K in the same manner as the ultrasonic sensor S1.

[0112] By setting it like this, the distance that the incident wave W0 and the second reflected wave W2 propagate through the backing metal BM is physically shortened. Thus, the degree of attenuation of the incident wave W0 and the second reflected wave W2 during propagation through the backing metal BM is reduced. Therefore, the signal intensity of the second reflected wave W2 observed by the ultrasonic sensor S1 can be increased. Therefore, the change in the amplitude of the second reflected wave W2 corresponding to the change in the internal side surface temperature can be clearly captured, and thus the detection accuracy of the internal side surface temperature can be improved.

[0113] (Modification of the Second Embodiment)

[0114] Figure 9 , Figure 10 are diagrams showing the setting method of the ultrasonic sensor in the modification of the second embodiment.

[0115] In the mechanical system 9 of the modification of the second embodiment, for example, as Figure 9 , Figure 10 shown, it may also be a scheme of being installed inside the recess K via the fitting jig J.

[0116] Specifically, it is the following scheme: a threaded groove is provided on the inner surface of the recess K, and the fitting jig J itself is installed in the recess K as a fixing screw.

[0117] Thereby, the burden of the replacement operation of the ultrasonic sensor S1 can be reduced.

[0118] In addition, in each of the above embodiments and modifications, it has been described that the thermometer measuring device 1 has the thermocouple S2 (reference temperature sensor), and in other embodiments, the thermocouple S2 may not be provided. That is, the thermometer measuring device 1 of other embodiments may also measure the internal side surface temperature of the bearing B only based on the signal intensity (amplitude) of the second reflected wave W2 of the ultrasonic sensor S1. In this case, for example, the thermometer measuring device 1 may also cumulatively measure the time-dependent behavior in which the high-temperature region gradually expands inside the backing metal BM as heat is generated and the second reflected wave W2 decays at all times, that is, cumulatively measure the amplitude change from the initial temperature, thereby determining the internal side surface temperature.

[0119] <Third Embodiment>

[0120] Next, refer toFigure 11 A description is given of the mechanical system of the third embodiment.

[0121] (Configuration of the mechanical system)

[0122] Figure 11 FIG. is a diagram showing the configuration of the mechanical system according to at least one embodiment of the present disclosure. As Figure 11 shown, the mechanical system 9 of the present embodiment is a system including an internal combustion engine 3 as an engine. The temperature measurement device 1 sets the multi-layer structure of the cylinder liner L and the oil layer O, which are structures of the internal combustion engine 3, as the temperature measurement object (in the present embodiment, the group of the cylinder liner L and the oil layer O corresponds to the "structure having a multi-layer structure"). The temperature measurement device 1 sets the temperature of the surface (inner surface H) of the piston ring PR of the piston P disposed inside the oil layer O and the cylinder liner L as the measurement object.

[0123] The ultrasonic sensor S1 of the mechanical system 9 is provided on the back side of the cylinder liner L. The ultrasonic sensor S1 outputs an incident wave W0 toward the inside of the cylinder liner L and observes the first reflected wave W1 and the second reflected wave W2, respectively. In the present embodiment, as Figure 11 shown, the first reflected wave W1 is the reflected wave at the interface between the cylinder liner L and the oil layer O. In addition, the second reflected wave W2 is the reflected wave at the interface between the oil layer O and the piston ring PR. The temperature measurement device 1 of the present embodiment can measure the surface temperature of the piston ring PR in a timely manner based on the observation result of the amplitude of the second reflected wave W2.

[0124] In the above embodiment, the processes of various processes of the temperature measurement device 1 are stored in a computer-readable recording medium in the form of a program, and the above various processes are performed by reading and executing the program by a computer. In addition, the computer-readable recording medium refers to a magnetic disk, an optical disk, a CD-ROM, a DVD-ROM, a semiconductor memory, and the like. In addition, the computer program may be transmitted to the computer through a communication line, and the computer that has received the transmission may execute the program.

[0125] The above program may also be used to implement a part of the above functions. Moreover, it may be a so-called differential file (differential program) that can implement the above functions in combination with a program already recorded in the computer system.

[0126] As described above, several embodiments of the present disclosure have been described, but all of these embodiments are shown as examples and do not attempt to limit the scope of the invention. These embodiments can also be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and similarly, are included in the invention described in the claims and the scope equivalent thereto.

Claims

1. A thermometer measuring device, comprising: An ultrasonic sensor, which is installed on the back side of a structure having a multi-layer structure; An acquisition unit, which acquires, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; An extraction unit, which extracts a region including the reflected wave reflected on the inner side surface of the structure from the reflected wave signal; A determination unit, which determines the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region; And A reference thermometer measuring unit of the structure, The determination unit acquires the reference temperature and determines the temperature of the inner side surface of the structure based on both the reflected wave signal in the extracted region and the reference temperature.

2. The thermometer measuring device according to claim 1, wherein The determination unit uses a model function identified by machine learning and determines the temperature of the inner side surface of the structure based on both the reflected wave signal in the extracted region and the reference temperature.

3. The thermometer measuring device according to claim 1 or 2, further comprising: A contact determination unit, which acquires a signal belonging to a pre-determined frequency band via the ultrasonic sensor and performs contact determination in the structure based on the signal.

4. A mechanical system, comprising: The thermometer measuring device according to any one of claims 1 to 3; and A machine having the structure, The structure has a recess provided from the back side surface toward the inner side, The ultrasonic sensor is installed in the recess.

5. A thermometer measuring method, using an ultrasonic sensor installed on the back side of a structure having a multi-layer structure, the thermometer measuring method includes: A step of acquiring, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; A step of extracting a region including the reflected wave reflected on the inner side surface of the structure from the reflected wave signal; A step of determining the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region; And A step of measuring the reference temperature of the structure, In the step of determining the temperature of the inner side surface of the structure, the temperature of the inner side surface of the structure is determined based on both the reflected wave signal in the extracted region and the reference temperature.

6. A non-transitory computer-readable recording medium, recording a program, the program causes a computer of a thermometer measuring device having an ultrasonic sensor installed on the back side of a structure having a multi-layer structure to execute: A step of acquiring, via the ultrasonic sensor, a reflected wave signal of ultrasonic waves incident on the inner side of the structure; A step of extracting a region including the reflected wave reflected on the inner side surface of the structure from the reflected wave signal; A step of determining the temperature of the inner side surface of the structure based on the reflected wave signal in the extracted region; And A step of measuring the reference temperature of the structure, In the step of determining the temperature of the inner side surface of the structure, the temperature of the inner side surface of the structure is determined based on both the reflected wave signal in the extracted region and the reference temperature.

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