Coating device and coating method

Abstract

A coating device (100) comprises: a coating needle (24) for coating a coating material on a target, the viscosity of the coating material changing due to shearing; a driving unit (90) for raising and lowering the coating needle (24); and a control device (80) for moving the coating needle by controlling the driving unit (90) so that the coating material is sheared at a shearing speed corresponding to the type of the coating material, a target coating amount or a target coating diameter.

Description

Technical Field

[0001] The present disclosure relates to a coating device and a coating method, and in particular to a coating device and a coating method for coating a coating material (liquid material) on a target through a coating needle. Background Art

[0002] In recent years, printed electronics technology, which forms microcircuits such as RFID (Radio Frequency Identifier) ​​tags by printing (coating) methods, has been rapidly developed. Although inkjet methods, dispenser methods, etc. are common methods for forming microcircuit patterns or electrode patterns, the method using a coating needle has attracted attention because it can finely coat materials with a wide range of viscosities.

[0003] Japanese Patent Laid-Open No. 2007-268353 (Patent Document 1) discloses a method for finely coating liquid material using a coating unit. This coating unit is intended to repair the defects of micro-patterns and can finely coat a coating material of a wide range of viscosities. In the coating operation, a coating needle protrudes from a through hole formed at the bottom of a coating material container that holds the coating material. The coating material adhered to the coating needle tip contacts the target, thereby coating the material to the target.

[0004] Japanese Patent Laid-Open No. H04-035857 (Patent Document 2) discloses a method for coating a non-Newtonian fluid using a coating needle method. Specifically, Patent Document 2 discloses that when a constant amount of adhesive is coated due to a change in the viscosity of the adhesive (non-Newtonian fluid), the depth to which the coating needle sinks will change. Patent Document 2 discloses changing the time for the coating needle to immerse in the adhesive, the time for the coating needle to transfer the material to the target, or the diameter of the coating needle to increase or decrease the amount of coating. Japanese Patent Laid-Open No. H04-035857 (Patent Document 2) also discloses measuring the initial viscosity of the adhesive and the change in viscosity over time so that these measurements are reflected in the depth of the coating needle immersed in the adhesive, the time of transfer, and the time of immersion.

[0005] Recently, it is known that microarrays that finely arrange physiologically active substances such as proteins and DNA can quickly perform various inspections and tests with a small amount of samples. It is also known that cells during cell culture are different in protein expression, which depends on, for example, the local contact between the cell and the surrounding cells and the shape of the cell aggregation. Therefore, research on the difference in protein expression depending on the shape of cell aggregation has been actively carried out. Specifically, a cell adhesion protein is patterned into various shapes on the bottom surface of the culture container. Research on the formation technology of cell organization is also in progress. Specifically, a gel agent that disperses cells is patterned.

[0006] For example, the so-called inkjet method and the so-called applicator method are generally known methods for patterning proteins and gelling agents. However, the method using a coating needle has also received attention because the coating needle method can finely coat materials with a wide range of viscosities. For example, Japanese Patent Laid-Open No. 2007-268353 (Patent Document 1) and Japanese Patent Laid-Open No. 2017-094286 (Patent Document 3) disclose a technique for finely coating a coating liquid using a coating needle. The main purpose of the technology disclosed in these documents is to repair the defects of micro-patterns.

[0007] In particular, for a microarray forming a protein spot array, it is necessary to adjust the humidity of the environment in which the array is formed according to the characteristics of the solution in which the protein is dissolved. For example, Japanese Patent Laid-Open No. 2007-132912 (Patent Document 4) discloses a protein microarray, which adjusts the humidity of the environment in which the array is formed to more than 30% and less than 65%. Japanese Patent Laid-Open No. 2007-132912 (Patent Document 4) and Japanese Patent Laid-Open No. 2004-317189 (Patent Document 5) disclose an arrayer having a plurality of coating needles.

[0008] Reference List

[0009] Patent Literature

[0010] Patent Document 1: Japanese Patent Laid-Open No. 2007-268353

[0011] Patent document 2: Japanese Patent Laid-Open No. H04-035857

[0012] Patent Document 3: Japanese Patent Laid-Open No. 2017-094286

[0013] Patent Document 4: Japanese Patent Laid-Open No. 2007-132912

[0014] Patent Document 5: Japanese Patent Laid-Open No. 2004-317189 Summary of the invention

[0015] Technical issues

[0016] Although Japanese Patent Laid-Open No. H04-035857 (Patent Document 2) discloses the amount of regulating the coating needle for coating non-Newtonian fluid, the step of wiping the coating needle for adjustment is included, which leads to an increase in working time. In addition, the time for immersion and the time for transfer are controlled, which may further increase the time for coating. Therefore, the surface of the adhesive can be dried. In addition, due to the change in the diameter of the coating needle, it is necessary to change the setting.

[0017] Microarray can use the coating device with single coating pin.This is based on the purpose of reducing the variation of coating amount relative to the coating device using multiple coating pins, using the coating device of multiple coating pins as disclosed in Japanese Patent Laid-Open No. 2007-132912 (patent documentation 5) and No. 2004-317189 (patent documentation 6).However, in this case, the amount of liquid of each coating operation is less than the amount of liquid of the coating device using multiple coating pins disclosed in Japanese Patent Laid-Open No. 2004-317189 (patent documentation 6).The smaller the amount of coating liquid, the faster the water evaporation speed in the coating liquid.This just requires the humidity control with higher precision, higher humidification capacity and better response.In the case that the device has the humidity adjustment range of more than 30% and less than 65% disclosed in Japanese Patent Laid-Open No. 2007-132912 (patent documentation 5), the coating liquid is unfavorably fast-drying.

[0018] Particularly, when the water-soluble two-liquid mixture gel is applied, its state (such as gel hardness determined by concentration) can change considerably. In order to suppress the change of this state, it is necessary to prevent the evaporation of water in the liquid applied for the first time as much as possible. In view of this, it is necessary to make the humidity around the coating unit as high as possible. Not only for the two-liquid mixture gel, but also for the gel that is only applied once, it is necessary to reduce the diameter change of the coating liquid of the gel as much as possible.

[0019] Therefore, an object of the present disclosure is to provide a coating apparatus and a coating method which can prevent the time required for coating a non-Newtonian fluid from increasing.

[0020] Another object of the present disclosure is to provide a coating device capable of maintaining high humidity around a coating unit.

[0021] Technical means used to solve technical problems

[0022] According to the present disclosure, a coating device includes: a coating needle that coats a coating material on a target, the coating needle having a viscosity that changes due to shear; a driving unit that moves the coating needle up and down; and a controller that controls the driving unit to move the coating needle so that shear is applied to the coating material at a shear speed that depends on the type of the coating material and on a target coating amount or a target coating diameter.

[0023] Preferably, the coating device comprises a container for holding the coating material, and has a through hole in the bottom of the container facing the target, allowing the coating needle to protrude from the through hole. The controller controls the drive unit to move the coating needle so that shear is applied to the coating material at a shearing speed when the coating needle passes through the through hole.

[0024] Preferably, the controller determines the moving speed of the coating needle in the vertical downward direction based on the type of coating material and based on the target coating amount or target coating diameter, and controls the coating needle so that the coating needle passes through the through hole at the determined moving speed.

[0025] Preferably, based on the type of coating material, based on the target coating amount or target coating diameter, and based on the distance between the coating needle and the outer wall of the through hole when the coating needle protrudes through the through hole, the controller determines the moving speed of the coating needle in the vertical downward direction, and controls the coating needle so that the coating needle passes through the through hole at the determined moving speed.

[0026] Preferably, the controller has a table defining the moving speed in relation to the type of coating material, the target coating amount or the target coating diameter, and the distance, and determines the moving speed by referring to the table.

[0027] Preferably, the coating material is any one of a pseudoplastic fluid, a dilatant fluid and a Bingham fluid.

[0028] Preferably, for the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of coating material is a pseudoplastic fluid, the table defines the moving speed to decrease as the target coating amount increases.

[0029] Preferably, for the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of coating material is a dilatant fluid, the table defines the moving speed to increase as the target coating amount increases.

[0030] Preferably, for the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of coating material is Bingham fluid, the table limits the moving speed to when the target coating amount is less than or equal to a predetermined value, the moving speed decreases as the target coating amount increases, and when the target coating amount is greater than the predetermined value, the moving speed is constant regardless of the target coating amount.

[0031] Preferably, for the same type of coating material and for the same target coating amount, the table defines the moving speed to decrease as the distance between the coating needle and the outer wall of the through hole increases.

[0032] Preferably, the coating material is a cell-containing solution.

[0033] Preferably, for the case where the distance between the coating needle and the outer wall of the through hole is the same, the table defines the moving speed to decrease as the target coating amount increases.

[0034] According to the present disclosure, a coating device includes a coating unit, a cover, a humidity controller, and an air channel. The coating unit includes a coating needle and a driving unit, and supplies a coating material to a target material to be processed mounted on a workbench. When viewed in a first direction, the cover is unfolded above the coating unit. A humidity controller is provided, which is capable of controlling the humidity in a space formed by the cover and the workbench. The air channel allows gas with controlled humidity to be supplied from the humidity controller into the space through an inlet formed in the cover. The cover includes a wall, and the wall surrounds the coating device in a second direction orthogonal to the first direction and in a third direction orthogonal to the first direction and the second direction. The coating device is capable of adjusting the humidity in the space to 80% or higher.

[0035] Preferably, the coating device further comprises a humidity sensor which measures the humidity in the space and sends the measurement result of the humidity to the humidity controller.

[0036] Preferably, the inlet is located at a position opposite to the workbench relative to the coating unit in the first direction.

[0037] Preferably, an exhaust port is formed in the cover, the exhaust port allowing gas in the space to be exhausted to the outside of the space.The coating unit is located away from a line connecting the inflow port and the exhaust port in the second direction.

[0038] Preferably, the wall of the cover includes a pair of walls located at respective ends in the third direction, the inlet port is formed in one of the pair of walls, and the exhaust port is formed in the other of the pair of walls.

[0039] Preferably, the inlet and the exhaust port are formed to occupy the same position in the second direction.

[0040] Preferably, in the first direction, the inlet and the exhaust port are formed opposite to each other with respect to an end portion of the coating unit, the end portion being opposite to the worktable.

[0041] Preferably, the coating device further comprises a pair of fans placed on the cover, the fans being opposite to each other in at least one of the second direction and the third direction.

[0042] Preferably, the pair of fans are positioned away from the inlet toward the workbench in the first direction.

[0043] Preferably, the paired fans each include a surrounding portion and four legs, the surrounding portion being attached to the cover by means of the four legs. The four legs extend from a main surface of the surrounding portion in a direction intersecting the main surface.

[0044] Preferably, the coating device further comprises a partition located between the coating unit and the inlet.

[0045] Preferably, the coating material is a cell-containing fluid containing a gelling agent.

[0046] According to the present disclosure, a coating method of a coating device is provided. The coating device includes: a coating needle, which applies a coating material whose viscosity has changed due to shearing to a target; and a container, which holds the coating material and has a through hole in the bottom of the container facing the target, allowing the coating needle to protrude from the through hole. The coating method includes: determining the moving speed of the coating needle in a vertical downward direction based on the type of the coating material, based on the target coating amount or target coating diameter, and based on the distance between the coating needle and the outer wall of the through hole when the coating needle protrudes through the through hole; and controlling the coating needle so that the coating needle passes through the through hole at the determined moving speed.

[0047] Effects of the Invention

[0048] According to the present disclosure, it is possible to prevent the time required for coating a non-Newtonian fluid from increasing. According to the present disclosure, it is possible to provide a coating device capable of maintaining high humidity around a coating unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 is a schematic diagram of a coating device according to an embodiment.

[0050] Figure 2 It is shown Figure 1 Schematic diagram of a coating unit of a coating device shown in FIG.

[0051] Figure 3 It is used for Figure 2 A schematic diagram for explaining a cam member of a coating unit is shown.

[0052] Figure 4 It is used for Figure 2 The schematic diagram shown is for explaining the operation of the coating needle of the coating unit.

[0053] Figure 5 It is used for Figure 2 A diagram illustrating the operation of the coating needle of the coating unit is shown.

[0054] Figure 6 An overview of the relationship between shear force and shear viscosity for various fluids is shown.

[0055] Figure 7 The results of measuring shear viscosity in relation to shear rate in the case where the coating material is a polymer aqueous solution are shown.

[0056] Figure 8 The graph shows the measurement results of the thickness of the droplet adhering to the tip of the coating needle in relation to the moving speed of the coating needle when the coating material is a polymer aqueous solution.

[0057] Fig. 9 (a) shows the coating material (polymer aqueous solution) when the coating needle moves at a high speed, Fig. 9 (b) shows the coating material (polymer aqueous solution) when the coating needle moves at approximately medium speed, Fig. 9 (c) shows the coating material (polymer aqueous solution) when the coating needle moves at a low speed.

[0058] Fig.10 An example speed table according to Embodiment 1 is shown.

[0059] Fig.11 1 is a flowchart showing a driving control procedure of the coating needle according to the first embodiment.

[0060] Fig.12 The state in which the coating needle protrudes from the through hole is shown.

[0061] Fig.13 An example speed table according to Embodiment 2 is shown.

[0062] Fig.14 1 is a flowchart showing a driving control procedure of the coating needle according to the second embodiment.

[0063] Fig.15 An example speed table according to Variation 1 is shown.

[0064] Fig.16 An example speed table according to Variation 2 is shown.

[0065] Fig.17 The measurement results of the coating diameter in relation to the coating speed are shown when the coating material is a cell-containing solution (a hyaluronic acid solution containing cells).

[0066] Fig.18 is a schematic diagram showing a configuration of a region around a coating unit and including a humidity controller according to the present embodiment.

[0067] Fig.19 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover according to the first example of the present embodiment, viewed from the direction A indicated by the arrow.

[0068] Fig. 20 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover according to the first example of the present embodiment, viewed from the direction B indicated by the arrow.

[0069] Fig.21 It is shown Figures 18 to 20 Schematic diagram of the structure of the fan.

[0070] Fig. 22It is shown by Fig.18 Schematic diagram of the cover and the interior of the cover according to the second embodiment of the present embodiment, viewed from the direction A indicated by the arrow.

[0071] Fig.23 It is shown by Fig.18 Schematic diagram of the cover and the interior of the cover according to the second embodiment of the present embodiment, viewed from the direction B indicated by the arrow.

[0072] Fig.24 It is shown by Fig.18 Schematic diagram of the cover and the interior of the cover according to the third example of the present embodiment, viewed from the direction B indicated by the arrow.

[0073] Fig.25 is a graph showing the measurement results of changes in humidity in the cover according to Example 1 over time.

[0074] Fig.26 is a graph showing the measurement results of the coating diameter under various humidity conditions according to Example 2. DETAILED DESCRIPTION

[0075] The following will describe various embodiments of the present invention based on the accompanying drawings. In the following drawings, the same or corresponding parts are represented by the same reference numerals, and their descriptions are not repeated herein. For the convenience of description, the X direction, the Y direction and the Z direction are used.

[0076] [Implementation Method 1]

[0077] Overall structure of coating device

[0078] Figure 1 Schematic diagram of a coating device according to an embodiment. Figure 1 The coating device includes: a processing chamber; a Y-axis table 2, an X-axis table 1, a Z-axis table 3, a coating unit 4, an observation optical system 6, and a CCD camera 7 connected to the observation optical system 6 arranged inside the processing chamber; and a controller 80. The controller 80 includes a monitor 9, a control computer 10, and an operation panel 8.

[0079] In the processing chamber, the Y-axis table 2 is placed above the bottom plate of the processing chamber. The Y-axis table 2 is configured to be movable in the Y-axis direction. Specifically, a guide unit is placed on the lower surface of the Y-axis table 2. The guide unit is slidably connected to a guide rail placed on the bottom plate of the processing chamber. A ball screw is connected to the lower surface of the Y-axis table 2. The Y-axis table 2 is configured to be movable along the guide rail (in the Y-axis direction) by a ball screw operated by a driving member such as a motor. The upper surface of the Y-axis table 2 forms a mounting surface, on which a substrate 5 as a material to be processed is mounted.

[0080] The X-axis worktable 1 is placed above the Y-axis worktable 2. The X-axis worktable 1 is configured on a structure placed above the Y-axis worktable 2 and extending across the Y-axis worktable 2 in the X-axis direction. The X-axis worktable 1 is provided with a moving body, the Z-axis worktable 3 is connected to the moving body, and the moving body can move along the X-axis. The moving body is configured to be movable in the X-axis direction by means of a ball screw, for example. The X-axis worktable 1 is fixed to the bottom plate of the processing chamber by the aforementioned structure, and the aforementioned structure is interposed between the X-axis worktable 1 and the bottom plate of the processing chamber. Therefore, the Y-axis worktable 2 described above is configured to be movable in the Y-axis direction relative to the X-axis worktable 1.

[0081] As described above, a Z-axis table 3 is placed on a movable body connected to the X-axis table 1. An observation optical system 6 and a coating unit 4 are connected to the Z-axis table 3. The observation optical system 6 is configured to observe the coating position of a substrate 5 coated with a material. The CCD camera 7 converts the observed image into an electrical signal. The Z-axis table 3 holds the observation optical system 6 and the coating unit 4 so that they can move along the Z axis.

[0082] A control computer 10 and an operation panel 8 for controlling the Y-axis table 2, the X-axis table 1, the Z-axis table 3, the observation optical system 6 and the coating unit 4, and a monitor 9 associated with the control computer 10 are placed outside the processing chamber. The monitor 9 displays the image data converted by the CCD camera 7 and the data output from the control computer 10. The operation panel 8 is used to input instructions to the control computer 10. The control computer 10 includes a CPU (central processing unit) and a memory. The CPU executes a program stored in the memory to enable various types of control to be performed.

[0083] Configuration of coating unit 4

[0084] Reference Figure 2 and Figure 3 The coating unit 4 is described in more detail. Figure 2 It is shown Figure 1 Schematic diagram of coating unit 4 of the coating device shown. Figure 3 It is shown Figure 2 Schematic diagram of the cam member of the coating unit 4 shown. Figure 1 The coating unit 4 of the Z-axis table 3 shown includes a servo motor 41, a cam 43, a bearing 44, a cam connecting plate 45, a movable part 46, a coating needle holder 20, a coating needle 24 held by the coating needle holder 20, a coating material container 21, and a driving unit 90. The driving unit 90 includes the servo motor 41, the cam 43, the bearing 44, the cam connecting plate 45, and the movable part 46.

[0085] The servo motor 41 is placed so that the rotation axis of the servo motor 41 is along Figure 1 The cam 43 is connected to the rotating shaft of the servo motor 41. The cam 43 is configured to be rotatable around the rotating shaft of the servo motor 41.

[0086] The cam 43 includes a central portion connected to the rotating shaft of the servo motor 41 and a flange portion connected to one end of the central portion. Figure 3 As shown in (A), the upper surface of the flange portion (the surface facing the servo motor 41) is a cam surface 61. The cam surface 61 is formed in a circular ring shape along the outer periphery of the center portion, and is formed in an inclined shape so that the distance from the bottom surface of the flange portion to the cam surface 61 changes. Specifically, as Figure 3 As shown in (B), the cam surface 61 includes: an upper flat area 62, which is at the greatest distance from the bottom surface of the flange portion; a lower flat area 63, which is located at a distance from the upper flat area 62 and has the smallest distance from the bottom surface of the flange portion to the lower flat area 63; and an inclined portion, which connects the upper flat area 62 and the lower flat area 63. Figure 3 (B) is a development view of the cam portion having the cam surface 61 arranged in an annular shape to surround the central portion, as viewed from the side.

[0087] The bearing 44 is configured to contact the cam surface 61 of the cam 43. Figure 2 Observing the cam 43 shown in (A), the bearing 44 is arranged in a specific direction (on the right side of the servo motor 41). When the rotating shaft of the servo motor 41 rotates to rotate the cam 43, the bearing 44 remains in contact with the cam surface 61. The cam connecting plate 45 is connected to the bearing 44. The cam connecting plate 45 has one end connected to the bearing 44 and the other end located on the opposite side, and the one end and the other end are fixed to the movable part 46. The coating needle holder fixing part 47 and the coating needle holder accommodating part 48 are connected to the movable part 46. The coating needle holder 20 is accommodated in the coating needle holder accommodating part 48.

[0088] The coating needle holder 20 includes a coating needle 24. The coating needle 24 is configured to protrude from the lower surface of the coating needle holder 20 (from the lower side opposite to the side where the servo motor 41 is located). A coating material container 21 is configured below the coating needle holder 20. The coating needle 24 is held in a manner inserted into the coating material container 21.

[0089] A fixing pin 52 is provided on the movable portion 46. Another fixing pin 51 is provided on the stand that holds the servo motor 41. A spring 50 is placed to connect the fixing pin 51 to the fixing pin 52. A tensile force toward the coating material container 21 is applied to the movable portion 46 by the spring 50. The tensile force applied by the spring 50 also acts on the bearing 44 through the movable portion 46 and the cam coupling plate 45. The tensile force applied by the spring 50 keeps the bearing 44 pressed against the cam surface 61 of the cam 43.

[0090] The movable part 46, the coating needle holder fixing part 47 and the coating needle holder accommodating part 48 are connected to the linear guide part 49 placed on the stand. The linear guide part 49 is configured to extend in the Z-axis direction. Therefore, the movable part 46, the coating needle holder fixing part 47 and the coating needle holder accommodating part 48 are configured to be movable in the Z-axis direction.

[0091] Operation of coating unit

[0092] The operation of the coating unit 4 will now be described. In the coating unit 4, the servo motor 41 is driven to rotate the rotation shaft of the servo motor 41, thereby rotating the cam 43. As a result, the height of the cam surface 61 of the cam 43 in the Z-axis direction changes. Therefore, as the drive shaft of the servo motor 41 rotates, the bearing 44 in the Z-axis direction is Figure 2 The position of the cam surface 61 on the right side of the cam 43 in (A) also changes. As the position of the bearing 44 in the Z-axis direction changes, the movable part 46, the coating needle holder fixing part 47 and the coating needle holder accommodating part 48 move in the Z-axis direction. As a result, the coating needle holder 20 held by the coating needle holder accommodating part 48 also moves in the Z-axis direction. As a result, the position of the coating needle 24 placed on the coating needle holder 20 in the Z-axis direction can be changed.

[0093] Specifically, refer to Figure 3 and Figure 4 , when the bearing 44 is in contact with the upper flat area 62 of the cam surface 61 of the cam 43, as shown in Figure 4 As shown in (A), the coating needle 24 is located at its upper end position (the position closest to the servo motor 41). At this time, the tip of the coating needle 24 is immersed in the coating material 70 accommodated in the coating material container 21. The coating material container 21 has a through hole 72 in its bottom facing the substrate 5 as a target to be coated with the material, allowing the coating needle 24 to protrude from the through hole.

[0094] Next, when the cam 43 is rotated by rotating the rotating shaft of the servo motor 41 and the bearing 44 is located at a position where the lower end flat area 63 of the cam surface 61 contacts the bearing 44, as shown in FIG. Figure 4 As shown in (B), the coating needle 24 is in a state where it passes through the through hole 72 formed at the bottom of the coating material container 21 and protrudes downward from the bottom surface of the coating material container 21. At this time, a portion of the coating material 70 adheres to the surface of the coating needle 24 protruding from the bottom surface of the coating material container 21. Figure 1 ) moves the coating unit 4 toward the substrate 5, thereby bringing the tip of the coating needle 24 into contact with the surface of the substrate 5. Therefore, the coating material 70 can be applied to the surface of the substrate 5. It should be noted that the Z-axis table 3 may be moved first, and then the servo motor 41 may be driven, or the Z-axis table 3 and the servo motor 41 may be operated almost simultaneously.

[0095] The coating unit 4 can convert the rotational motion of the servo motor 41 into the motion (up and down motion) of the coating needle 24 in the Z-axis direction. By the coating unit 4 configured as above, the coating needle 24 can be moved in the Z-axis direction quickly and accurately.

[0096] In order to further improve the accuracy in the step of applying the coating material 70 by the coating needle 24, the operation speed of the coating needle 24 is controlled in the following manner.

[0097] Specifically, if Figure 5 As shown in FIG. 1 , the moving speed of the coating needle 24 changes according to the position of the coating needle 24. Figure 5 In the figure, the horizontal axis represents the position of the tip of the coating needle 24, and the vertical axis represents the moving speed of the coating needle.

[0098] like Figure 4 As shown in (A), when the coating needle 24 is at the upper end position ( Figure 5 When the coating needle 24 reaches the position P1 in the middle, the servo motor 41 is driven to rotate the cam 43 and to make the bearing 44 contact with the area other than the upper flat area 62 of the cam surface 61. Therefore, the coating needle 24 moves toward the substrate 5. Figure 5 Before the position P2 on the horizontal axis, the moving speed of the coating needle 24 is increased. Specifically, the rotation speed of the servo motor 41 can be increased to increase the moving speed of the coating needle 24.

[0099] After reaching the predetermined moving speed V2 (after reaching the position P2), the coating needle 24 moves while maintaining the predetermined speed V2. This can be achieved by keeping the rotation speed of the servo motor 41 constant. Then, when the coating needle 24 reaches Figure 5 When the coating needle 24 reaches the position P3 in the middle, the moving speed of the coating needle 24 is reduced. Specifically, the rotation speed of the servo motor 41 is gradually reduced. Therefore, the moving speed of the coating needle 24 is sufficiently reduced until it reaches the predetermined position P4, which is the position before the bearing 44 reaches the lower end flat area 63 (see Figure 3 ).

[0100] Then, until Figure 5 The coating needle 24 reaches the position P4 in Figure 4 The coating needle 24 moves at a predetermined low moving speed V1 to the lower end position (position P5) shown in (B). In this case, the rotation speed of the servo motor 41 is also maintained at a predetermined speed. When the control is performed in the above manner, the moving speed of the coating needle 24 is sufficiently low when the coating needle 24 contacts the substrate 5. Therefore, the impact on the substrate 5 when the coating needle 24 contacts the substrate 5 can be reduced, and the reduction in position accuracy caused by the above-mentioned impact when the coating needle 24 applies the coating material 70 to the surface of the substrate 5 can be prevented.

[0101] Liquids that can be used as coating materials are roughly divided into Newtonian fluids and non-Newtonian fluids. Non-Newtonian fluids can be divided into any one of pseudoplastic fluids, Bingham fluids and dilatant fluids. Newtonian fluids include, for example, water and silicone oil. Pseudoplastic fluids include, for example, ketchup, polymer liquids and paints. Bingham fluids include, for example, toothpaste and butter. Dilatant fluids include, for example, water mixed with starch dissolved in water and wet sand on the beach.

[0102] Figure 6 An overview of the relationship between shear force and shear viscosity of various fluids is shown. The horizontal axis represents the shear force applied to the fluid, and the vertical axis represents the shear viscosity of the fluid. Fluids of the same type differ from each other in the specific magnitude of their shear viscosity. Figure 6 Typical fluid shear viscosities are shown for each type of fluid.

[0103] like Figure 6 As shown, Newtonian fluids have their shear viscosity which remains constant even when the shear force changes. The shear viscosity of pseudoplastic fluids decreases as the shear force increases. Bingham fluids do not show fluidity until the shear force reaches a certain viscosity value or higher. The shear viscosity of dilatant fluids increases as the shear force increases.

[0104] The inventors of the present application used a polymer aqueous solution as a typical example of a pseudoplastic fluid to observe changes in shear viscosity caused by changes in shear rate.

[0105] The conditions for the measurement were set in the following manner. The polymer was dissolved in water to prepare solutions of 0, 0.5, 1, 1.2, 1.5 and 2 (w / v%). The temperature was maintained at 25 degrees, and the shear viscosity change of each prepared solution when the shear rate was changed was measured. The measurement was repeated three times to determine the average value of the corresponding measured values.

[0106] Figure 7The figure shows the measurement results of shear viscosity for shear rate when the coating material is a polymer aqueous solution. Figure 7 As shown, the shear viscosity of the coating material (polymer aqueous solution) decreases as the shear rate increases. In addition, the higher the concentration of the polymer solution, the higher the shear viscosity of the solution.

[0107] Furthermore, the inventors of the present application conducted the following coating test.

[0108] The conditions for measurement are set in the following manner. The polymer is dissolved in water to prepare solutions of 0, 0.5, 1, 1.2 and 1.5 (w / v%). The prepared solutions are each poured into a coating material container, the coating needle 24 is moved at different moving speeds to protrude from the container, and the thickness of the droplet adhering to the tip of the coating needle 24 is measured. This thickness can be used to indirectly represent the amount of adhered liquid. The measurement is repeated three times to determine the average value of the corresponding measurement value.

[0109] Figure 8 The figure shows the measurement results of the thickness of the droplet adhering to the tip of the coating needle 24 in relation to the moving speed of the coating needle 24 when the coating material is a polymer aqueous solution. Figure 5 The moving speed V2 corresponds to the moving speed V2 in , which is the speed of the coating needle 24 moving downward in the vertical direction when the tip of the coating needle 24 protrudes from the through hole 72.

[0110] like Figure 8 As shown, when the coating material is a polymer aqueous solution, as the moving speed of the coating needle 24 increases, the number of droplets adhering to the tip of the coating needle 24 decreases.

[0111] The moving speed of the coating needle 24 is considered to be proportional to the shear rate of the coating material. Figure 7 and Figure 8 From the results, it can be expected that as the moving speed of the coating material and the shear speed of the coating material increase, the shear viscosity of the coating material decreases, and the decrease in the shear viscosity of the coating material causes the speed at which the coating material is lifted from the tip of the coating needle 24 to increase, resulting in a decrease in the coating amount.

[0112] Fig. 9 (a) shows the coating material 70 (polymer aqueous solution) when the coating needle 24 moves at a high speed. Fig. 9 (b) shows the coating material 70 (polymer aqueous solution) when the coating needle 24 moves at a substantially medium speed. Fig. 9(c) shows the coating material 70 (polymer aqueous solution) when the coating needle 24 moves at a low speed. As shown in these figures, it can be seen that when the coating material is a polymer aqueous solution, the amount of the coating material decreases as the moving speed of the coating needle 24 increases.

[0113] Therefore, the inventors of the present application have found that the moving speed of the coating needle 24 can be changed according to the type of coating material 70 and the target coating amount, thereby coating the target amount of the material.

[0114] To achieve this, the control computer 10 controls the drive unit 90 to move the coating needle 24 so that shear is applied to the coating material 70 at a shear speed according to the type of coating material and the coating target amount. Specifically, the control computer 10 controls the drive unit 90 to move the coating needle 24 so that when the coating needle 24 passes through the through hole 72, shear is applied to the coating material at a shear speed according to the type of coating material and the coating target amount.

[0115] More specifically, the control computer 10 stores a speed table.

[0116] Fig.10 An example of a speed table according to Embodiment 1 is shown. Fig.10 As shown, the speed table defines the moving speed vk associated with the type ai of the coating material and the target coating amount bj.

[0117] When the type of coating material is a pseudoplastic fluid, the speedometer defines the moving speed so that the moving speed decreases as the target coating amount increases. When the type of coating material is a dilatant fluid, the speedometer defines the moving speed so that the moving speed decreases as the target coating amount increases. When the type of coating material is a Bingham fluid, the speedometer defines the moving speed so that if the target coating amount is a predetermined value or less, the moving speed decreases as the target coating amount increases, and defines that if the target coating amount is greater than a predetermined value, the moving speed is constant regardless of the target coating amount.

[0118] The control computer 10 refers to Fig.10 The speed table in determines the moving speed of the coating needle 24 in the vertical downward direction.

[0119] Fig.11 1 is a flowchart showing a driving control procedure of the coating needle 24 according to the first embodiment.

[0120] Reference Fig.11 In step S101, the control computer 10 obtains information about the coating material and the target coating amount. The information can be obtained by user input or automatically obtained by the control computer 10 through communication.

[0121] In step S102, the control computer 10 refers to Fig.10 The speed table shown is used to determine the moving speed of the coating needle 24 in the vertical downward direction, which is related to the coating material and the target coating amount.

[0122] In step S103 , the control computer 10 controls the movement of the coating needle 24 so that the coating needle 24 passes through the through hole 72 at a determined movement speed, thereby coating the coating material 70 onto the substrate 5 .

[0123] As can be seen from the above, the fine coating of conventional non-Newtonian fluids involves a problem that a lot of time is required to coat the fluid when adjusting the coating amount. In contrast, according to the present embodiment, the moving speed of the coating needle in the vertical downward direction is controlled according to the target coating amount and the type of coating material, so that the coating amount can be adjusted substantially in the time equivalent to that of ordinary coating work.

[0124] [Implementation Method 2]

[0125] Fig.12 The state in which the coating needle 24 protrudes from the through hole 72 is shown.

[0126] When the tip of the coating needle 24 protrudes from the through hole 72, there is a gap between the coating needle 24 and the outer wall of the through hole 72. Fig.12 As shown tapering in the advancing direction, the distance d of the gap varies depending on the position on the tip. Fig.12 The distance d1 at a location on the tip is shown.

[0127] The greater the distance between the coating needle 24 and the outer wall of the through hole 72, the smaller the shear force and thus the lower the shear viscosity. Therefore, it is expected that the shear viscosity of the coating material decreases as the distance increases, and it is expected that the reduction in the shear viscosity of the coating material accelerates the speed at which the coating material is lifted upward from the tip of the coating needle 24, resulting in a reduction in the coating amount.

[0128] According to the present embodiment, the control computer 10 controls the drive unit 90 to move the coating needle 24 so that shearing is applied to the coating material 70 at a shearing speed according to the type of coating material, the target coating amount, and the distance between the coating needle 24 and the outer wall of the through hole 72. For example, the minimum value, maximum value, or average value of the distance at the corresponding position on the tip can be used as the distance between the coating needle 24 and the outer wall of the through hole 72. Specifically, the control computer 10 controls the drive unit 90 to move the coating needle 24 so that when the coating needle 24 passes through the through hole 72, the coating material is sheared at a shearing speed according to the type of coating material, the coating target amount, and the distance between the coating needle 24 and the outer wall of the through hole 72.

[0129] Fig.13An example of a speed table according to Embodiment 2 is shown. Fig.13 As shown, the speed table defines the moving speed vk in relation to the type ai of the coating material, the target coating amount bj, and the distance cl between the coating needle and the outer wall of the through hole.

[0130] The speed table defines the moving speed such that, for the same type of coating material and the same target coating amount, the moving speed decreases as the distance between the coating needle and the outer wall of the through hole becomes larger.

[0131] The speedometer defines the moving speed such that when the distance between the coating needle and the outer wall of the through hole is the same and the coating material type is a pseudoplastic fluid, the moving speed decreases as the target coating amount increases. The speedometer defines the moving speed such that when the distance between the coating needle and the outer wall of the through hole is the same and the coating material type is a dilatant fluid, the moving speed increases as the target coating amount increases. When the distance between the coating needle and the outer wall of the through hole is the same and the coating material type is a Bingham fluid, the speedometer defines the moving speed such that when the target coating amount is less than or equal to a predetermined value, the moving speed decreases as the target coating amount increases, and when the target coating amount is greater than a predetermined value, the moving speed is constant regardless of the target coating amount.

[0132] The control computer 10 refers to Fig.13 The speed table in determines the moving speed of the coating needle 24 in the vertical downward direction.

[0133] Fig.14 1 is a flowchart showing a driving control procedure of the coating needle 24 according to the second embodiment.

[0134] Reference Fig.14 In step S201, the control computer 10 obtains information about the coating material, the distance between the coating needle 24 and the outer wall of the through hole 72, and the target coating amount. The information can be obtained by user input or automatically obtained by the control computer 10 through communication.

[0135] In step S202, the control computer 10 refers to Fig.13 The speed table shown is used to determine the moving speed of the coating needle 24 in the vertical downward direction, which is related to the coating material and the target coating amount.

[0136] In step S203 , the control computer 10 controls the movement of the coating needle 24 so that the coating needle 24 passes through the through hole 72 at a determined movement speed, thereby coating the coating material 70 onto the substrate 5 .

[0137] According to this embodiment, the moving speed of the coating needle in the vertical downward direction is controlled according to the target coating amount, the distance between the coating needle and the outer wall of the through hole, and the type of coating material, so that the coating amount can be adjusted substantially within the time equivalent to ordinary coating work.

[0138] Variations of Embodiments 1 and 2

[0139] The present disclosure is not limited to the above-described embodiments but includes the following modifications, for example.

[0140] (1) Coating diameter

[0141] The coating amount is expressed by the following items: coating diameter representing the size of the coating film; and coating film thickness. When the thickness of the coating film can be regarded as constant, the coating diameter and the coating amount are proportional to each other, so the coating diameter can be used instead of the coating amount.

[0142] Fig.15 An example of a speed table according to Modification 1 is shown. Fig.15 As shown, the speed table defines the moving speed vk associated with the type ai of the coating material and the target coating diameter ej.

[0143] Fig.16 An example of a speed table according to variation 2 is shown. Fig.16 As shown, the speed table defines the moving speed vk in relation to the type ai of the coating material, the target coating diameter ej, and the distance cl between the coating needle and the outer wall of the through hole.

[0144] (2) Storage of moving speed

[0145] The controller may store the determined movement speed value to thereby vary the coating speed during operation.

[0146] [Implementation method 3]

[0147] The coating device according to this embodiment uses a solution containing cells (hereinafter referred to as "cell-containing solution") as a coating material. The cell-containing solution is also a non-Newtonian fluid, similar to the Bingham fluid, pseudoplastic fluid and dilatant fluid described in Embodiments 1 and 2.

[0148] The inventors of the present application used a cell-containing solution (a hyaluronic acid solution containing cells) as a coating material to examine changes in the coating amount with respect to changes in the coating speed.

[0149] Fig.17 The measurement results of the coating diameter in relation to the coating speed are shown when the coating material is a cell-containing solution (a hyaluronic acid solution containing cells).

[0150] like Fig.17As shown, when the coating material is a cell-containing solution (a hyaluronic acid solution containing cells), the coating diameter, i.e., the coating amount, decreases as the coating speed increases. Therefore, under the condition that the cell concentration in the cell-containing solution is constant, the coating device according to this embodiment can be used to change the number of coated cells by changing the coating speed.

[0151] The above description of Embodiment 1 Fig.10 The speed table may include a cell-containing solution as a coating material. Fig.10 The speed table in can define the moving speed as follows: when the type of the coating material is a cell-containing solution, the moving speed decreases as the target coating amount increases.

[0152] The above description of Embodiment 2 Fig.13 The speed table may include a cell-containing solution as a coating material. Fig.13 The speed table in can define the moving speed as follows: when the distance between the coating needle and the outer wall of the through hole is the same, when the type of the coating material is a cell-containing solution, the moving speed decreases as the target coating amount increases.

[0153] [Implementation Method 4]

[0154] The features of the present embodiment are first generally described, which will be repeated herein. Fig.18 According to the present disclosure, a coating device 100 includes a coating unit 4, a cover 101, a humidity controller 103, and a gas channel 105. The coating unit 4 applies a liquid material (coating material) to a substrate 5, which is a target material to be processed mounted on a Y-axis table 2. The cover 101 is unfolded above the coating unit 4 as viewed in the Z direction as a first direction. The humidity controller 103 is capable of controlling the humidity in a space 102 formed by the cover 101 and the Y-axis table 2. The gas channel 105 allows a gas such as air with controlled humidity to be supplied from the humidity controller 103 to the space 102 through an inlet 107 formed in the cover 101. The cover 101 includes a wall. The wall surrounds the coating unit 4 in the Y direction and the X direction, the Y direction being a second direction orthogonal to the Z direction as a first direction, and the X direction being a third direction orthogonal to the Z direction and the Y direction. The coating device 100 is capable of adjusting the humidity in the space 102 to 80% or more.

[0155] Operation of coating equipment

[0156] Now describe Figure 1 The operation of the coating apparatus is shown.

[0157] In passing Figure 1In the case where the coating device shown draws a circuit pattern, first prepare the substrate 5 to which the material is to be coated (step (S10)). After the substrate 5 is mounted on the Y-axis table 2 of the above-mentioned coating device, the area of ​​the substrate 5 to which the circuit pattern is to be drawn is moved to a position directly below the observation optical system 6 by operating the X-axis table 1 and the Y-axis table 2. The drawing starting position where the drawing will start is observed and confirmed by the observation optical system 6 to determine the drawing starting position. Using the determined drawing starting position as a reference, the Z-axis table 3 operates relative to the reference, thereby lowering the coating unit 4 to a position above the substrate 5, that is, a position where the tip of the coating needle 24 contacts the substrate 5 when the coating needle 24 protrudes. In this state, the servo motor 41 is operated to make the coating needle 24 protrude, and accordingly, the coating needle 24 and its surface with the liquid material (coating material) adhered thereto contact the surface of the substrate 5. Specifically, the X-axis table 1 and the Y-axis table 2 are used to move the substrate 5 from the drawing starting position so that the position of the circuit pattern to be drawn is located directly below the coating unit 4. When this movement is completed, the Z-axis table 3 is used to lower the coating unit 4 (to move the coating unit 4 toward the substrate 5), and the servo motor 41 of the coating unit 4 is driven to make the coating needle 24 protrude. Therefore, the liquid material (coating material) is applied to the substrate 5 by the coating needle 24. After that, the Z-axis table 3 is used to lift the coating unit 4. In the case of continuous coating of liquid material, the coating unit 4 is lowered by the Z-axis table 3, and thereafter the drawing position of the substrate 5 is moved using the X-axis table 1 and the Y-axis table 2, so that the drawing position is continuously positioned directly below the coating unit 4. After this movement is completed, the servo motor 41 of the coating unit 4 is driven to make the coating needle 24 protrude, thereby applying the liquid material. Such operation is repeated continuously to draw a circuit pattern on the surface of the substrate 5 (step (S20)). At this time, it is preferred that control is performed so that the moving speed of the coating needle 24 is reduced in advance before the coating needle 24 contacts the substrate 5.

[0158] Structure of the area around the coating unit

[0159] Now refer to Figures 18 to 24 The configuration of the area around the coating unit 4 in the coating apparatus 100 is described. Fig.18 : is a schematic diagram showing the configuration of a region located around a coating unit and including a humidity controller according to the present embodiment. Fig.19 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover in the first example of this embodiment, viewed from the direction A indicated by the arrow. Fig. 20 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover in the first example of this embodiment, viewed from the direction B indicated by the arrow. Fig.21 It is shown Figures 18 to 20First, refer to the schematic diagram of the fan structure. Figures 18 to 21 A first example of the present embodiment is described.

[0160] Reference Fig.18 The coating device 100 includes the components described below in the area around the coating unit 4. The coating device 100 mainly includes a cover 101, a humidity controller 103, and a gas passage 105.

[0161] As seen in the Z direction, ie, the first direction, the cover 101 is deployed above the coating unit 4 . Fig.18 The cover 101 of the coating device 100 is Fig.18 The cover 101 covers the coating unit 4 from above in the Z direction. The cover 101 includes a wall extending above the coating unit 4. The wall of the cover 101 surrounds the coating unit 4 in the Y direction and the X direction, the Y direction being a second direction orthogonal to the Z direction, and the X direction being a third direction orthogonal to the Z direction and the Y direction. Specifically, the wall of the cover 101 placed above the coating unit 4 is arranged to sandwich the coating unit 4 in the X direction and the Y direction, as seen in a plan view. Although the cover 101 is not necessarily limited to a transparent member, for ease of description, Fig.18 The components arranged inside the cover 101 are shown by solid lines.

[0162] For example, the cover 101 is placed on the upper surface of the Y-axis table 2 and extends thereover. At this time, the space 102 is formed inside the cover 101 so as to be surrounded by the cover 101 and the wall of the Y-axis table 2.

[0163] The humidity controller 103 is a device capable of controlling the humidity of the space 102. Specifically, for example, to increase the humidity in the space 102, the humidity controller 103 supplies high humidity gas to the space 102. Therefore, the humidity in the space 102 in the coating device 100 can be adjusted to 80% or more.

[0164] In order to adjust the humidity in the space 102 to 80% or more, the humidity controller 103 can supply humidified air with a humidity of 90% or more. The humidity in the space 102 can be increased to 80% or more in a short time using humidified air of 90% or more, and the increased humidity can be maintained. The humidity controller 103 can use, for example, a method of generating water droplets with a particle size of 5 μm or less by ultrasonic waves and blowing the gas containing the water droplets to the outside as a method of adjusting the humidity of the gas to be supplied, such as air, to 90% or more. Preferably, the humidity controller 103 includes an ultrasonic oscillation generator, a micro-water droplet generator using ultrasonic oscillation, and a blower for blowing the gas containing micro-water droplets into the cover 101.

[0165] The gas passage 105 allows the gas whose humidity is controlled by the humidity controller 103 to be supplied from the humidity controller 103 to the space 102 through the inlet 107 formed in the cover 101. A humidity sensor 113 is provided in the space 102. The humidity sensor 113 is placed, for example, at the upper portion of the coating unit 4 in the cover 101 in the Z direction. The humidity sensor 113 measures the humidity in the space 102 and sends the result of the measurement to the humidity controller 103. Based on the difference between the measurement result and the humidity set by the humidity controller 103, the humidity controller 103 adjusts the humidity and flow rate of the gas such as air supplied to the space 102. In this way, the humidity of the space 102 located around the coating unit 4 and surrounded by the cover 101 can be maintained at the set humidity.

[0166] The humidity sensor 113 may be placed at other locations other than the above-mentioned locations. For example, the location and number of the humidity sensor 113 may be changed to any location and any number. In this way, the response of the humidity controller 103 to the humidity measurement value of the humidity sensor 113 and the uniformity of the humidity in the space 102 may be improved.

[0167] For ease of description, Fig.19 and Fig. 20 Internal components that can be seen from the outside are also shown regardless of the material of the cover 101. Fig.18 , Fig.19 and Fig. 20 The inlet 107 in the wall of the cover 101 is located on the opposite side of the Y-axis table 2 relative to the coating unit 4 in the Z direction, that is, above the coating unit 4. The inlet 107 may have a shape such as Fig. 20 The shape of a circle as shown, or a polygonal shape such as a rectangle.

[0168] In addition, an exhaust port 109 is formed in the wall of the cover 101. The exhaust port 109 allows the gas in the space 102 to be released to the outside of the space 102. Fig. 20 As shown in FIG. 1 , in the Y direction, the coating unit 4 is away from the line LI connecting the inlet 107 and the exhaust port 109. Specifically, in Fig. 20 In the embodiment, the inlet 107 and the exhaust port 109 are both located in the right region in the Y direction relative to the center of the cover 101. On the contrary, the coating unit 4 is both located in the left region in the Y direction relative to the center of the cover 101. Therefore, Fig. 20 The line LI indicated by a dotted line in FIG. 4 does not extend through the coating unit 4 .

[0169] like Figures 18 to 20As shown, the cover 101 is composed of a wall having a box shape (rectangular shape) as seen in a plan view, for example. Specifically, the box-shaped wall of the cover 101 has a top wall 101I, a pair of walls 101A and 101B facing each other, and a pair of walls 101E and 101F facing each other in the Z direction, that is, a total of five walls. For example, the pair of walls 101A and 101B are orthogonal to the top wall 101I. The pair of walls 101A and 101B are located at the respective ends of the cover 101 in the X direction. Figures 18 to 20 In the embodiment, the wall 101A is located at the positive end of the cover 101 in the X direction, and the wall 101B is located at the negative end of the cover 101 in the X direction. For example, the paired walls 101E and 101F are orthogonal to the top wall 101I. The paired walls 101E and 101F are located at the corresponding ends of the cover 101 in the Y direction. Figures 18 to 20 , the wall 101E is located at the positive end of the cover 101 in the Y direction, and the wall 101F is located at the negative end of the cover 101 in the Y direction.

[0170] Figures 18 to 20 The cover 101 has the shape of a rectangular parallelogram as described above, and only the bottom of the cover 101 in the Z direction is an opening rather than a wall. Such a cover 101 can be placed in a manner that its lowest part in the Z direction faces or contacts the Y-axis table 2, thereby covering the coating unit 4. However, the cover 101 is not limited to such a rectangular parallelogram. For example, the cover 101 may not have the five independent walls described above. The cover 101 may, for example, have a dome shape with an arc-shaped wall across the X direction and an arc-shaped wall across the Y direction connected together at the top, as long as the cover 101 satisfies the condition that the cover surrounds the coating unit 4 in the X direction and the Y direction. In addition, any part of the cover 101 may be a curved surface. In addition, the cover 101 may extend above the Y-axis table 2, and the Y-axis table 2 may be placed in the space 102.

[0171] The inlet 107 is formed in one of the paired walls 101A, 101B, for example, the wall 101B. The exhaust port 109 is formed in one of the paired walls 101A, 101B, for example, the wall 101A. Conversely, the inlet 107 may be formed in the wall 101A, and the exhaust port 109 may be formed in the wall 101B. Each of the inlet 107 and the exhaust port 109 is formed in either of the walls 101A, 101B, for example, both walls 101A, 101B intersect the X direction (extend along the YZ plane).

[0172] The inlet 107 is formed in one wall of the pair of walls facing each other, and the exhaust port 109 is formed in the other wall of the pair of walls facing each other, the other wall being different from the wall in which the inlet 107 is formed. The pair of walls facing each other is not limited to the like. Figures 18 to 20The pair of walls of the box-shaped cover 101 shown, instead, include pairs of portions facing each other that constitute a single curved surface forming, for example, a dome.

[0173] Figures 18 to 20 The dimension of the cover 101 in the X direction is greater than its dimension in the Y direction. Specifically, the distance from the wall 101A to the wall 101B is greater than the distance from the wall 101E to the wall 101F. Preferably, the inlet 107 and the exhaust port 109 are thus respectively formed on one pair of wall surfaces of the paired corresponding walls (or the paired portions of the walls facing each other) with a larger interval than the interval of the other pair of walls.

[0174] like Fig. 20 As shown, the inlet 107 and the exhaust port 109 are formed to occupy the same position in the Y direction. Specifically, the inlet 107 and the exhaust port 109 are formed so that the corresponding positions (Y coordinates) in the Y direction at least partially overlap each other when viewed from a plan view in the X direction. When the inlet 107 seen in a plan view is the same as the exhaust port 109 in size and shape, the inlet 107 and the exhaust port 109 may be formed so that the corresponding positions in the Y direction substantially completely overlap each other.

[0175] like Figures 18 to 20 As shown, the inlet 107 and the exhaust port 109 are formed opposite to each other on the opposite side of the Y-axis table 2, that is, relative to the upper end of the coating unit 4 (the upper end 4a of the coating unit 4). Specifically, for example, the inlet 107 is formed upward at the upper end 4a of the coating unit 4, and the exhaust port 109 is formed downward at the upper end 4a of the coating unit 4.

[0176] The corresponding walls 101A, 101B of the cover 101 facing each other in the X direction are equipped with a pair of fans 111. The inner wall surface 101C of the wall 101A is equipped with the fan 111A, and the inner wall surface 101D of the wall 101B is equipped with the fan 111B. Preferably, the fans 111A and the fans 111B are respectively formed on the wall surfaces of the pair of corresponding walls (or the paired parts of the walls facing each other) with a larger interval than the interval of the other paired walls. Figures 18 to 20 , the fans 111A and 111B are respectively attached to the wall 101A and the wall 101B which are separated from each other further than the wall 101E and the wall 101F. The paired fans 111A and 111B are placed toward the Y-axis table 2 relative to the inlet 107 in the Z direction, that is, placed downward at the inlet 107 in the Z direction. Preferably, the paired fans 111A and 111B are placed opposite to the Y-axis table 2 relative to the exhaust port 109 in the Z direction, that is, placed upward at the exhaust port 109.

[0177] The fans 111, that is, the paired fans 111A and 111B each have the following structure. Fig.21 , the fan 111 includes a rotating blade 111C, a surrounding portion 111D and four legs 111E. The rotating blade 111C is a portion having a paddle that is actually rotated by driving the fan 111. Therefore, it is preferred that the outer edge of the rotating blade 111C is at least partially arc-shaped. As seen in the plan view, the surrounding portion 111D surrounds the rotating blade 111C from the outside. Although the outer edge of the surrounding portion 111D has a square shape, for example, the shape is not limited to this. In the surrounding portion 111D, a hollow portion is formed so that the rotating blade 111C can be received in the center of the hollow portion. The surrounding portion 111D is attached to, for example, the inner wall surfaces 101C, 101D of the cover 101 through the legs 111E. Although the number of the legs 111E is preferably four, the number is not limited to this, and can be any number. The four legs 111E are, for example, arranged from the rectangular main surface of the surrounding portion 111D (in a direction orthogonal to the main surface) in a direction intersecting the main surface. Fig.21 Extending downward).

[0178] It is assumed that the leg 111E extends over a length L, and the arc of the outer edge of the rotating blade 111C has a diameter D. The length L of the leg 111E corresponds to the distance from the inner wall surface 101C to which the leg is attached to the rotating blade 111C or the surrounding portion 111D. L is preferably 40% or more of the length of D, and more preferably 50% or more. In this way, the advantageous effects described later in this document can be fully obtained from the fan 111. In addition, condensation in the area between the surrounding portion 111D of the fan 111 and the walls 101A, 101B, 101E, 101F to which the fan 111 is attached, which is caused by the humidified air staying in the area (generated) can be suppressed.

[0179] Refer again Figures 18 to 20 , it is preferred that the coating device 100 further includes a partition 117 located between the coating unit 4 and the inlet 107. The partition 117 is, for example, a flat plate member having a rectangular shape. The partition 117 is preferably placed between the coating unit 4 and the inlet 107 along the Y direction so that the main surface of the flat plate member (having a relatively large surface area) faces the coating unit 4 and the inlet 107 along the Y direction.

[0180] The partition 117 may be a part of a partition member 119, which includes the support 115 as a part of the partition member 119. Specifically, the flat plate member forming the support 115 may be bent at about 90° relative to the support 115 to form the partition 117. In this case, the support 115 and the partition 117 are integrated into the partition member 119. In the partition member 119, the support 115 and the partition 117 may be, for example, separate flat plate members that are connected together to form the partition member 119. For example, the support 115 is a part that forms a base for mounting the partition member 119 on the Y-axis table 2.

[0181] For example, the partition 117 (including the partition member 119 of the partition 117) may be a member separated from the cover 101, and the support 115 may be mounted on the Y-axis table 2. The substrate 5, which is the target material to be processed, may be directly mounted on the Y-axis table 2. This is the case when the support 115 is so small that the support 115 cannot extend to the area where the substrate 5 is mounted. However, the substrate 5 may be mounted on the support 115. This is the case when the support 115 is so large that the support 115 overlaps with the area where the substrate 5 is mounted. Such an example is Figures 18 to 20 Alternatively, the partition 117 (including the partition member 119 of the partition 117 ) may be integrated with the cover 101 .

[0182] Fig. 22 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover in the second example of this embodiment, viewed from the direction A indicated by the arrow. Fig.23 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover in the second embodiment of the present embodiment, viewed from the direction B indicated by the arrow. Fig. 22 and Fig.23 , the second embodiment of this embodiment is Figures 18 to 20 The first embodiment of the present embodiment in the embodiment is basically similar in terms of the configuration of the cover 101 and the like in the area around the coating unit 4. Therefore, the same components are denoted by the same reference numerals, and as long as they have, for example, the same structure and function, they are not described repeatedly herein. Fig. 22 and Fig.23 The components shown in FIG. 1 are similar to those of the coating device 100 in the first example of the present embodiment, and therefore, description thereof will not be repeated herein. This also applies to the description of the examples after the present embodiment.

[0183] like Fig. 22 and Fig.23As shown in the second embodiment of FIG. 1 , the inlet 107 and the exhaust port 109 can be respectively formed on a pair of corresponding walls (or a pair of mutually facing walls) with a larger interval than the interval of the other pair of walls. Specifically, the inlet 107 and the exhaust port 109 can be formed, for example, in the walls 101E and 101F intersecting the Y direction (extending along the ZX plane). Fig.23 As shown, the inlet 107 may be formed in the wall 101F and the outlet 109 may be formed in the wall 101E, or vice versa. Fig. 22 In the second embodiment shown in FIG. 1 , the coating unit 4 is away from the line LI connecting the inlet 107 and the exhaust port 109 in the X direction. Fig. 22 In the second embodiment shown, the inlet 107 and the exhaust port 109 are formed to occupy the same position in the X direction.

[0184] In addition, if Fig. 22 and Fig.23 In the second embodiment shown in , the fans 111A and 111B can be attached to the wall 101E and the wall 101F respectively, the distance between the wall 101E and the wall 101F being smaller than the distance between the wall 101A and the wall 101B. Therefore, the paired fans 111A, 111B can be mounted on the respective inner wall surfaces 101G, 101H of the walls 101E, 101F of the cover 101, for example, the inner wall surfaces 101G, 101H facing each other in the Y direction.

[0185] Fig.24 It is shown by Fig.18 Schematic diagram of the structure of the cover and the interior of the cover in the third example of this embodiment, viewed from the direction B indicated by the arrow. Fig.24 As shown in the third example of the present embodiment, both the inlet 107 and the exhaust port 109 are placed in the area to the left of the center of the cover 101 in the Y direction. In contrast, the coating unit 4 is placed in the area to the right of the center of the cover 101 in the Y direction. Therefore, Fig.24 The line LI indicated by the dotted line in FIG. 4 does not extend through the coating unit 4. Therefore, Fig.24 yes Fig. 20 A laterally inverted version relative to the Y direction. This configuration can also be used. Fig. 22 In the second embodiment, the positions of the inlet 107 and the exhaust port 109 and the position of the coating unit 4 may be laterally inverted with respect to the X direction (which is not shown).

[0186] Functions and beneficial effects

[0187] The functions and advantageous effects of the present embodiment will now be described.

[0188] The coating device 100 according to the present disclosure includes a coating unit 4, a cover 101, a humidity controller 103 and a gas channel 105. The coating unit 4 applies a liquid material (coating material) to a substrate 5, which is a target material to be processed mounted on a Y-axis table 2. The cover 101 is unfolded above the coating unit 4 along the Z direction as a first direction. The humidity controller 103 is capable of controlling the humidity in a space 102 formed by the cover 101 and the Y-axis table 2. The gas channel 105 allows a gas such as air with controlled humidity to be supplied to the space 102 from the humidity controller 103 through an inlet 107 formed in the cover 101. The cover 101 includes a wall. The wall surrounds the coating unit 4 in the Y direction and the X direction, the Y direction being a second direction orthogonal to the Z direction as a first direction, and the X direction being a third direction orthogonal to the Z direction and the Y direction. The humidity in the space 102 can be adjusted to 80% or higher.

[0189] In this way, it is possible to suppress the rapid evaporation of moisture in the coating pattern, which may occur when a micro pattern is coated with a single coating needle 24 in the space 102, wherein the adjustable range of humidity is, for example, a low range of more than 30% and less than 65%. Therefore, when a coating liquid with a high moisture content, such as a double liquid mixed gel, is also coated with a single coating needle 24, a more micro pattern can be formed with high precision. Because a humidity controller 103 capable of adjusting the humidity to 80% or more is used, a gas such as air with extremely high humidity, such as 90% or more humidity, can be generated, so that high humidity in the space 102 can be achieved in a short time. In other words, within a higher humidity range, the humidity inside the cover 101 can be controlled with good response.

[0190] If the humidity in the space 102 around the coating unit 4 changes, even if other conditions remain unchanged, the diameter of the coating liquid material (coating material) on the microarray or the like will change. As the humidity decreases, more water evaporates from the coating liquid material (coating material), and therefore, an unexpected decrease in the diameter of the coating liquid material (coating material) may occur. Therefore, it is important to use the coating device 100 in the present embodiment to control the humidity in the space 102 with high precision.

[0191] The coating device 100 including the coating unit 4 according to the present embodiment is capable of coating not only liquid materials (coating materials) for industrial use, but also liquid materials (coating materials) provided as cell-containing liquids including a gelling agent containing cells, for example. In this case, the liquid material (coating material) in the coating material container 21 is a cell-containing liquid, and therefore, the liquid material (coating material) contains many living cells. In this case, if the humidity of the space 102 inside the cover 101 is very low, and the coated liquid material (coating material) is easy to dry and evaporate, then the cells contained in the material can no longer survive. However, according to the present embodiment, the humidity in the space 102 formed by the cover 101 and the Y-axis worktable 2 can be adjusted to 80% or higher, so that the death of cells in the cell-containing liquid due to drying in the space 102 can be prevented.

[0192] In the present embodiment, when the liquid material (coating material) is a cell-containing liquid containing a gelling agent, the cells that can be used to be contained in the liquid material (coating material) are not particularly limited. As these cells, for example, any of various native cells such as fibroblasts, endothelial cells, epidermal cells, smooth muscle cells, cardiomyocytes, gastrointestinal cells, neurons, hepatocytes, kidney cells and pancreatic cells can be used; differentiated cells from iPS cells; and various cancer cells. Unmodified cells can be used as these cells. Alternatively, cells modified with any one of proteins, sugar chains and nucleic acids can also be used as these cells. Specifically, as modified cells, cells coated with generally known coating agents such as fibrin, gelatin, laminin or elastin can be used. Cells coated with a generally known coating method using fibrin, gelatin, laminin, elastin or the like can be used as modified cells.

[0193] The liquid containing cells can include extracellular matrix components, such as fibrin, gelatin, collagen, laminin, elastin or matrigel. The liquid containing cells can also include cell growth factors, such as fibroblast growth factor or platelet-derived growth factor. The liquid containing cells can also include a kind of additive, such as vascular endothelial cells, lymphatic endothelial cells and various stem cells. These are included in the liquid containing cells, to provide an environment in which the encapsulated cells can stably adhere and grow. The liquid containing cells can also include fibrinogen, alginic acid, thermal expansion polymer or the like as a gelling agent.

[0194] In the coating device 100, the coating unit 4 includes a substrate 5 as a material to be processed that can be supplied by coating the liquid material (coating material) onto the substrate 5. The coating method using the coating needle 24 has a significantly smaller diameter than the inkjet method or the dispenser method. A significantly smaller amount of coating liquid is easier to dry. Therefore, the coating device 100 including the humidity controller 103 according to the present embodiment is particularly effective for a device based on the coating method using the coating needle 24.

[0195] In the coating device 100, the inlet 107 is located upward from the Y-axis table 2, that is, opposite to the Y-axis table 2 in the Z direction relative to the coating unit 4. Therefore, the humidified gas from the inlet 107 travels downward in the space 102, so that the gas can be appropriately supplied to a desired position, such as a coating position of the coating unit 4.

[0196] In coating apparatus 100, exhaust port 109 allowing gas in space 102 to be exhausted to the outside of space 102 is formed in cover 101. In the Y direction as the second direction, coating unit 4 is away from line LI connecting inlet 107 and exhaust port 109, for example.

[0197] Although humidification in the space 102 is important, in some cases, it may not be preferred to blow a large amount of humidified gas directly to the coating unit 4. This is because the moisture in the gas may enter the liquid material (coating material), so that the solvent concentration in the coating liquid material (coating material) may change. This is also because the moisture in the gas may adhere to the surface of the coating needle 24, so that condensation may occur on the coating needle 24 or the coating needle 24 may rust. In view of this, the above-mentioned structure is used so that the coating unit 4 is not located in the area between the inlet 107 and the exhaust port 109. Therefore, it can be avoided that the coating unit 4 is exposed to a large amount of humidified gas due to being positioned in the flow channel through which a large amount of humidified gas flows from the inlet 107. Therefore, for example, problems such as changes in the solvent concentration in the liquid material (coating material) and condensation and rusting of the coating needle 24 can be avoided.

[0198] In the coating device 100, the cover 101 has a wall, specifically, a pair of walls 101A, 101B are arranged at the corresponding two ends in the X direction as the third direction. The inlet 107 is formed in one of the paired walls 101A, 101B, for example, in the wall 101B. The exhaust port 109 is formed in the other of the paired walls 101A, 101B, for example, in the wall 101A. Therefore, when the coating unit 4 is located at the center of the space 102 in the X direction, for example, the distance (in the X direction) from the coating unit 4 to the inlet 107 / exhaust port 109 can be further increased. Therefore, it can be avoided that the coating unit 4 is exposed to a large amount of humidified gas because the coating unit 4 is positioned in the flow channel through which a large amount of humidified gas flows from the inlet 107. Therefore, for example, problems such as changes in solvent concentration in the liquid material (coating material) and condensation and rust of the coating needle 24 can be avoided.

[0199] In the coating device 100, the inlet 107 and the exhaust port 109 are formed to occupy the same position in the Y direction as the second direction. Therefore, it is highly likely that the coating unit 4 is away from the line connecting the inlet 107 and the exhaust port 109 in the second direction. Therefore, it is possible to avoid the coating unit 4 being exposed to a large amount of humidified gas due to the coating unit 4 being positioned in the flow channel through which a large amount of humidified gas flows from the inlet 107. Therefore, for example, problems such as changes in solvent concentration in the liquid material (coating material) and condensation and rusting of the coating needle 24 can be avoided.

[0200] In the coating device 100, the inlet 107 and the exhaust port 109 are formed opposite to each other in the Z direction, i.e., the first direction, relative to the side opposite to the Y-axis worktable 2, i.e., relative to the upper end of the coating unit 4, i.e., the upper end 4a. Therefore, the inlet 107 is located above the upper end 4a of the coating unit 4, and the exhaust port 109 is located below the upper end 4a of the coating unit 4, so that gas can be supplied to the entire space 102. Therefore, the humidity difference between the regions in the cover 101 can be suppressed, and the humidity of the entire space 102 in the cover 101 can be made substantially uniform. Therefore, the humidity control accuracy around the coating unit 4 can be further improved. As a result, the liquid material (coating material) can be coated with further improved accuracy.

[0201] The coating device 100 further includes a pair of fans 111 mounted on the cover 101, and the pair of fans are installed so that the fans face each other in at least one of the Y direction as the second direction and the X direction as the third direction. Therefore, the humidified gas supplied to the space 102 is blown toward the center of the cover 101 while being stirred by the fans 111A and 111B. Therefore, it is possible to avoid the coating unit 4 being exposed to a large amount of humidified gas due to the coating unit 4 being positioned in the flow channel through which a large amount of humidified gas flows from the inlet 107. Therefore, for example, problems such as changes in solvent concentration in the liquid material (coating material) and condensation and rusting of the coating needle 24 can be avoided. In addition, the humidity difference between the regions in the cover 101 can be suppressed, and the humidity of the entire space 102 inside the cover 101 can be made substantially uniform.

[0202] In addition, the humidity controller 103 of the coating device 100 may include an ultrasonic oscillation generator, and a micro-droplet generator that uses ultrasonic oscillation to generate micro-droplets, for example, with a particle size of 5 μm or less. In this case, the micro-droplets adhere to the coating unit 4 before evaporation, which may cause rust or the like. The structure with the fan 111 as described above can be used to control the humidity inside the cover 101 within a higher humidity range, and has a good response. This is because the humidified gas is stirred by the fan 111, so that the humidified gas is rapidly diffused. As a result, the processability can be improved.

[0203] In the coating device 100, the paired fans 111 are located in the direction toward the Y-axis table 2, that is, below the inlet 107 in the Z direction as the first direction. The humidified gas supplied from the inlet 107 to the space 102 flows downward, and then its flow is controlled by the fans 111, for example, Fig.18 The gas flowing downward can be controlled so that only an appropriate amount of gas, not excessive gas, flows to the coating unit 4. Therefore, appropriate humidity can be supplied to the coating unit 4, and malfunctions caused by excessive humidity supply can be suppressed.

[0204] In the coating device 100, the paired blowers 111 each include a surrounding portion 111D and four legs 111E, and the surrounding portion 111D is attached to the cover 101 using the four legs 111E. The four legs 111E extend from the main surface of the surrounding portion 111D in a direction intersecting the main surface. Such a structure makes it easier for the supplied humidified gas to flow into the gap between the main surface of the surrounding portion 111D of the blower 111 and the inner wall surface of the cover 101 to which the blower is attached. In this way, it is possible to suppress malfunctions such as condensation in a portion of the entire area caused by the humidified air staying in the portion.

[0205] The coating device 100 further includes a partition 117 located between the coating unit 4 and the inlet 107. The partition 117 blocks part of the humidified gas flowing from the inlet 107 to the coating unit 4. Therefore, it is possible to avoid the coating unit 4 being exposed to a large amount of humidified gas due to the coating unit 4 being positioned in a flow channel through which a large amount of humidified gas flows from the inlet 107. Therefore, for example, problems such as changes in solvent concentration in the liquid material (coating material) and condensation and rusting of the coating needle 24 can be avoided.

[0206] The coating device 100 in each example of the present embodiment as described above may further include a dehumidification mechanism. Therefore, an excessive increase in humidity in the space 102 and a malfunction caused thereby, such as condensation on the coating unit 4, can be suppressed.

[0207] The coating device 100 in each embodiment as described above may be configured to control the amount of air blown by the blower 111 mounted on the inner wall surfaces 101C, 101D, 101G, 101H of the cover 101 based on the output value of the humidity measured by the humidity sensor 113 .

[0208] Further, in each of the above-described embodiments, the gas supplied into the cover 101 of the coating device 100 may be a gas whose temperature is adjusted in addition to its humidity. In this case, in addition to the humidity sensor 113, a temperature sensor is preferably placed in the space 102.

[0209] Example 1

[0210] The humidity of the space 102 within the cover 101 of the coating apparatus 100 was increased from 45% to 60%, and thereafter increased to 80% by the humidity controller 103, and the change in the humidity of the space 102 was checked. Fig.25 : is a graph showing the measurement results of the change in humidity in the cover 101 with time according to the first embodiment. Fig.25 The horizontal axis in represents the time that has elapsed since the start of the humidification process in the cover 101 . Fig.25 The vertical axis in represents the measurement result of the humidity in the cover 101. Fig.25 , it takes about four minutes to increase the humidity of the space 102 from 45% to 60%. It takes about four minutes to increase the humidity of the space 102 from 60% to 80%. Therefore, the coating device 100 can increase the humidity of the space 102 in a significantly short time. In other words, the work efficiency can be improved by using the coating device 100.

[0211] Example 2

[0212] When the humidity of the space 102 in the coating device 100 is changed, the coating diameter of the pattern of the liquid material (coating material) coated from the coating needle 24 as seen in the plan view is measured. The diameter of the circular cross section of the tip of the coating needle 24 used is 0.8mm, and the material is coated once. The standby time of the coating needle 24 in the coating material container 21 is 1020ms, and the standby time is not set after the coating needle 24 descends. The liquid material (coating material) coated is a hyaluronic acid solution of 2.5mg / mL. The height (thickness) of each coating liquid material (coating material) is constant. Under the same humidity conditions, five identical tests were carried out, and the measurement results of each test are plotted in the figure below.

[0213] Fig.26 : is a graph showing the measurement results of the coating diameter according to Example 2 under various humidity environments. Fig.26 The horizontal axis in represents the humidity of the space 102 . Fig.26 The vertical axis in represents the result of measuring the coating diameter of the coated liquid material (coating material) under various humidity conditions. The test was carried out under four different humidity environments, wherein the humidity was 20%, 40%, 60% and 80% respectively. Fig.26 , the coating diameter tends to increase with increasing humidity. A change in humidity from 20% to 80% results in an increase in coating diameter of about 40 μm. At the same time, the difference in coating diameter between coating patterns under the same humidity conditions is small. At any humidity, the difference in coating diameter is 10 μm or less. As humidity increases, the time required for the coating liquid to dry tends to become longer, which is not shown in the figure.

[0214] As can be seen from the above, a liquid material (coating material) having a high moisture content such as a gelling agent can be coated with a constant coating diameter without change while controlling the humidity by the coating device 100 having the humidity controller 103, without changing the coating conditions during the coating. When the humidity changes, the coating diameter will change considerably even if other conditions are the same, and therefore, it is important to control the humidity by the humidity controller 103.

[0215] Reference Fig.26, the coating diameter increases with the increase of humidity. This is because the amount of the liquid material (coating material) adhering to the tip of the coating needle 24 has changed. Specifically, under low humidity conditions, a large amount of water contained in the liquid material (coating material) is evaporated, so the coating diameter is reduced. Under high humidity conditions, the evaporation of water contained in the liquid material (coating material) is suppressed, so the coating diameter increases. In addition, if the coating liquid contains a large amount of water, the evaporation of water causes the increase of the concentration and viscosity of the coating liquid, thereby causing a significant change in the coating diameter depending on the coating conditions. Such a change has a significant impact, such as the change of the pattern. In view of this, the humidity controller 103 is used to control the humidity so that the pattern with the desired coating diameter can be stably coated using the humidity controller 103 to control the humidity.

[0216] When the liquid material (coating material) is a cell-containing liquid containing a gelling agent, and Fig.26 When the humidity in the space 102 is 80%, not only the coating diameter can be increased, but also the survival state of the cells contained in the liquid material (coating material) can be maintained.

[0217] Features described in connection with the respective embodiments included in the embodiments described above may be applied in appropriate combination within the range without contradiction.

[0218] It is necessary to interpret that the embodiments disclosed herein are in all aspects in the form of examples rather than limitations. The scope of the present disclosure is not defined by the above description, but by the scope of the claims, which includes all modifications and changes made within the meaning and scope equivalent to the claims.

[0219] Reference numerals list

[0220] 1X-axis worktable; 2Y-axis worktable; 3Z-axis worktable; 4Coating unit; 5Substrate; 6Observation optical system; 7CCD camera; 8Operation panel; 9Monitor; 10Control computer; 20Coating needle holder; 21Coating material container; 24Coating needle; 41Servomotor; 43Cam; 44Bearing; 45Cam connecting plate; 46Moving part; 47Coating needle holder fixing part; 48Coating needle holder accommodating part; 49Linear guide part; 50Spring; 51, 52Fixing pins; 61Cam surface; 62Upper flat area; 63Lower flat area ; 70 coating material; 72 through hole; 80 controller; 90 driving unit; 100 coating device; 101 cover; 101A, 101B, 101E, 101F wall; 101C, 101D, 101G, 101H inner wall surface; 102 space; 103 humidity controller; 105 gas channel; 107 inlet; 109 exhaust port; 111, 111A, 111B fan; 111C rotating blade; 111D surrounding part; 111E leg; 113 humidity sensor; 115 support; 117 partition; 119 partition member.

Claims

1. A coating device, comprising: a coating needle that applies a coating material onto a target, the coating material having a viscosity that changes due to shearing, a driving unit that moves the coating needle upward and downward; as well as a controller that controls the drive unit to move the coating needle so that shear is applied to the coating material at a shear speed that depends on the type of the coating material and on a target coating amount or a target coating diameter, The coating device also includes: a coating unit, the coating unit including the coating needle and the driving unit, and supplying the coating material to a target material to be processed mounted on a workbench; a cover, the cover being deployed above the coating unit when viewed in a first direction; a humidity controller capable of controlling the humidity in a space formed by the cover and the workbench; an air passage that allows gas having controlled humidity to be supplied from the humidity controller into the space through an inlet formed in the cover; and A separator, the separator is located between the coating unit and the inlet, wherein The cover includes a wall, and the wall surrounds the coating device in a second direction orthogonal to the first direction and in a third direction orthogonal to the first direction and the second direction, The coating device is capable of adjusting the humidity in the space to 80% or more.

2. The coating device according to claim 1, characterized in that: Further comprising a container, the container holding the coating material and having a through hole in the bottom of the container facing the target, allowing the coating needle to protrude from the through hole, wherein, The controller controls the driving unit to move the coating needle so that shear is applied to the coating material at the shear speed when the coating needle passes through the through hole.

3. The coating device according to claim 2, characterized in that: The controller determines a moving speed of the coating needle in a vertical downward direction based on the type of the coating material and based on the target coating amount or the target coating diameter, and controls the coating needle so that the coating needle passes through the through hole at the determined moving speed.

4. The coating device according to claim 2, characterized in that: Based on the type of the coating material, based on the target coating amount or the target coating diameter and based on the distance between the coating needle and the outer wall of the through hole when the coating needle protrudes through the through hole, the controller determines the moving speed of the coating needle in the vertical downward direction and controls the coating needle so that the coating needle passes through the through hole at the determined moving speed.

5. The coating device according to claim 4, characterized in that: The controller has a table defining the moving speed in relation to the type of the coating material, the target coating amount or the target coating diameter, and the distance, and determines the moving speed by referring to the table.

6. The coating device according to claim 5, characterized in that: The coating material is any one of a pseudoplastic fluid, a dilatant fluid and a Bingham fluid.

7. The coating device according to claim 6, characterized in that: For the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of the coating material is the pseudoplastic fluid, the table defines the moving speed to decrease as the target coating amount increases.

8. The coating device according to claim 6, characterized in that: For the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of the coating material is the dilatant fluid, the table defines the moving speed to increase as the target coating amount increases.

9. The coating device according to claim 6, characterized in that: For the case where the distance between the coating needle and the outer wall of the through hole is the same and the type of the coating material is the Bingham fluid, the table defines the moving speed as follows: when the target coating amount is less than or equal to a predetermined value, the moving speed decreases as the target coating amount increases, and when the target coating amount is greater than the predetermined value, the moving speed is constant regardless of the target coating amount.

10. The coating device according to claim 6, characterized in that: For the same type of the coating material and for the same target coating amount, the table defines the moving speed to decrease as the distance between the coating needle and the outer wall of the through hole increases.

11. The coating device according to claim 5, characterized in that: The coating material is a cell-containing solution.

12. The coating device according to claim 11, characterized in that: For the case where the distance between the coating needle and the outer wall of the through hole is the same, the table defines the moving speed to decrease as the target coating amount increases.

13. The coating device according to claim 1, characterized in that: Also included is a humidity sensor that measures the humidity in the space and sends the humidity measurement result to the humidity controller.

14. The coating device according to claim 1 or 13, characterized in that: The inlet is located at a position opposite to the workbench with respect to the coating unit in the first direction.

15. The coating device according to claim 1 or 13, characterized in that: an exhaust port is formed in the cover, the exhaust port allowing gas in the space to be exhausted to the outside of the space, and The coating unit is positioned away from a line connecting the inlet and the exhaust port in the second direction.

16. The coating device according to claim 15, characterized in that: The wall of the cover includes a pair of walls located at respective ends in the third direction, The inlet is formed in one of the paired walls, The exhaust port is formed in the other of the paired walls.

17. The coating device according to claim 15, characterized in that: The inlet and the exhaust port are formed to occupy the same position in the second direction.

18. The coating device according to claim 16 or 17, characterized in that: In the first direction, the inlet and the exhaust port are formed opposite to each other with respect to an end portion of the coating unit, the end portion being located opposite to the stage.

19. The coating device according to claim 1, characterized in that: Also included is a pair of fans placed on the cover, the fans being opposite to each other in at least one of the second direction and the third direction.

20. The coating device according to claim 19, characterized in that The paired fans are positioned away from the inlet toward the workbench in the first direction.

21. The coating device according to claim 19 or 20, characterized in that: The fans in a pair each include a surrounding portion and four legs, the surrounding portion being attached to the cover by means of the four legs, and The four legs extend from a main surface of the surrounding portion in a direction intersecting the main surface.

22. The coating device according to claim 1, characterized in that: The coating material is a cell-containing liquid containing a gelling agent.

23. A coating method of a coating device, the coating device comprising: a coating needle, which applies a coating material whose viscosity has changed due to shearing to a target; and a container, which holds the coating material and has a through hole in its bottom facing the target, allowing the coating needle to protrude from the through hole, the coating device also includes: a coating unit, which includes the coating needle and a driving unit, and supplies the coating material to a target material to be processed mounted on a workbench; a cover, which is unfolded above the coating unit when viewed in a first direction; a humidity controller, which is capable of controlling the humidity in a space formed by the cover and the workbench; an air channel, which allows gas with controlled humidity to be supplied from the humidity controller into the space through an inlet formed in the cover; and a partition, which is located between the coating unit and the inlet, wherein the cover includes a wall, and the wall surrounds the coating device in a second direction orthogonal to the first direction and in a third direction orthogonal to the first direction and the second direction, the coating device is capable of adjusting the humidity in the space to 80% or more, The coating method comprises: determining a moving speed of the coating needle in a vertical downward direction based on the type of the coating material, based on a target coating amount or a target coating diameter, and based on a distance between the coating needle and an outer wall of the through hole when the coating needle protrudes through the through hole; and The coating needle is controlled so that the coating needle passes through the through hole at the determined moving speed.

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