Chip automatic unloading and conveying device

Abstract

The application discloses a kind of chip automatic unloading conveying device, including chip carrier transfer conveying device and containing box transfer conveying device, chip carrier transfer conveying device includes adsorption support frame, carrier table, carrier containing box and workbench, carrier table and carrier containing box are placed respectively in the bonding station and adsorption station on workbench, carrier table is equipped with open slot, and the loading end of open slot is provided with assembly opening for facilitating carrier extraction;Carrier containing box is equipped with a plurality of carrier containing slots for inserting carrier, the device can automatically clamp full un-bonding carrier containing box to adsorption station, the carrier is taken out from carrier containing box one by one by machine, and after bonding is completed, it is placed back in carrier containing box, and then full bonding carrier containing box is clamped to conveying belt and conveyed to next process, to reduce labor, improve production efficiency.

Description

Technical Field

[0001] This invention relates to an automatic chip feeding and conveying device, which is applicable to the production of semiconductor chips. Background Technology

[0002] Broadly speaking, chips are actually packaged chips formed after encapsulation. The chip body is placed on a carrier stage and then bonded. Bonding is a technology that combines two homogeneous or heterogeneous semiconductor materials with clean surfaces and atomically flat surfaces after surface cleaning and activation treatment, and directly combines them under certain conditions. The chips are bonded together by van der Waals forces, molecular forces, or even atomic forces. Chip bonding requires batch production. Therefore, in the preparation process for bonding, the chips are placed in the corresponding carriers, and then the carriers are placed on the carrier stage that can be bonded. After bonding, the carriers are manually moved to the carrier receiving box. Finally, the full carrier receiving box is removed from the workstation by the worker and replaced with an empty carrier receiving box. The carrier receiving box includes a box body with an opening on one side and a baffle that is slidably installed. The top of the box body is equipped with a box body handle. The box body is equipped with several slots for placing carriers. Currently, there is no automated device that can replace manual labor for loading carriers for bonding, placing carriers into the carrier receiving box after bonding, and transporting the carrier receiving box. Summary of the Invention

[0003] The technical problem to be solved by the present invention is: an automatic chip feeding and conveying device, which can automatically clamp a carrier container full of unbonded carriers to the adsorption station, and take the carriers out one by one from the carrier container and send them to the bonding station. After bonding is completed, the carriers are put back into the carrier container, and then the carrier container full of bonded carriers is clamped onto the conveyor belt and conveyed to the next process, thereby reducing labor and improving production efficiency.

[0004] To solve the above-mentioned technical problems, the technical solution of the present invention is: an automatic chip feeding and conveying device, comprising a chip carrier transfer and conveying device and a receiving box transfer and conveying device. The chip carrier transfer and conveying device includes an adsorption support frame, a carrier platform, a carrier receiving box, and a worktable. The carrier platform and the carrier receiving box are respectively placed on the bonding station and adsorption station of the worktable. The carrier platform is provided with an opening slot, and the feeding end of the opening slot is provided with an assembly port for easy carrier extraction. The carrier receiving box is provided with a plurality of carrier receiving slots for inserting carriers. The adsorption support frame is fixed with... An X-guide rail extending in the horizontal X direction is fixedly installed. An X-slider is slidably installed on the X-guide rail in the X direction. The X-slider is driven by an X-power device to reciprocate between a bonding station and an adsorption station. A Z-guide rail extending in the vertical Z direction is fixedly installed on the X-slider. A Z-slider driven by a Z-power device is slidably installed on the Z-guide rail. A first Y-guide rail extending in the horizontal Y direction is fixedly installed on the Z-slider. A first Y-slider driven by a first Y-power device is slidably installed on the first Y-guide rail. The first Y-slider is equipped with a suction device for a moving carrier.

[0005] The container transfer and conveying device includes a frame, on which a feeding device is installed to convey the container containers one by one along the X-axis to the loading station. A clamping and moving device is provided above the feeding device. The adsorption station on the worktable corresponds to the loading station on the feeding device. The clamping and moving device includes a second Y-guide rail fixedly installed on a clamping support frame extending along the horizontal Y-axis. A second Y-slider is slidably installed on the second Y-guide rail along the horizontal Y-axis. The second Y-slider is driven by a second Y-power device to reciprocate between the adsorption station and the loading station. A rotating seat is rotatably installed on the second Y-slider about the vertical Z-axis. A deflection power device is installed on the second Y-slider to drive the rotating seat to reciprocate. A container clamping mechanism for clamping the container handle on the container container and a baffle clamping mechanism for clamping the baffle on the container container are slidably installed on the rotating seat along the vertical Z-axis.

[0006] As a preferred embodiment, the adsorption support frame is fixedly connected to the worktable. The X slider includes a first X slider and a second X slider. The X guide rail includes a first X guide rail and a second X guide rail. The first X guide rail is located on the upper part of the adsorption support frame, and the second X guide rail is located on the lower part of the adsorption support frame. The first X slider is slidably mounted on the first X guide rail, and the second X slider is slidably mounted on the second X guide rail. A synchronizing rod is provided between the first X slider and the second X slider. The X power device is mounted on the first X guide rail and driven by the first X slider, or mounted on the second guide rail and driven by the second X slider. The Z guide rail is installed between the first X slider and the second X slider.

[0007] As a preferred embodiment, the suction device includes a suction cup, a connecting frame, and a guide rod. The guide rod is fixed to the first Y-slider, the connecting frame is disposed at one end of the guide rod, and the suction cup is multiple and disposed on the connecting frame, with each suction cup corresponding to a blank area on the upper surface of the carrier.

[0008] As a preferred embodiment, the feeding device includes a first driving pulley and a first driven pulley rotatably mounted on the frame, a circulating conveyor belt is installed between the first driving pulley and the first driven pulley, the first driving pulley is connected to the feeding power device, and a plurality of sets of spaced-apart container clamps for clamping the container containers are fixed on the circulating conveyor belt.

[0009] As a preferred embodiment, four parallel and spaced support bars are fixed on the frame. The support bars support the bottom surface of the carrier container box. The upper surface of the circulating conveyor belt is located below the support bars. Each container box clamp includes four limiting protrusions. The four limiting protrusions are fixed to the outer side of the circulating conveyor belt by a connecting structure. The four limiting protrusions together form a limiting area for the carrier container box. The gap between the connecting structure and the support bars corresponds to the position of the limiting protrusions moving above the support platform.

[0010] As a preferred embodiment, the container holding mechanism includes a first telescopic power device fixedly mounted on a rotating base, and the power end of the first telescopic power device is equipped with a first pneumatic clamp for holding the handle of the container on the carrier container; the baffle holding mechanism includes a second telescopic power device fixedly mounted on a rotating base, and the power end of the second telescopic power device is equipped with a second pneumatic clamp for holding the handle of the baffle.

[0011] As a preferred embodiment, the first pneumatic clamp includes a first dual-axis cylinder fixed to the power end of the first telescopic power device. A pair of handle grippers are fixed on the piston rod of the first dual-axis cylinder. When the handle grippers are clamped, a box handle slot is formed to facilitate the clamping of the box handle on the carrier receiving box.

[0012] As a preferred embodiment, the second pneumatic clamp includes a second dual-axis cylinder fixed to the power end of the second telescopic power device and a pair of baffle jaws fixed to the piston rod of the second dual-axis cylinder. The handle on the baffle is arched, and the lower ends of the pair of baffle jaws are provided with mutually cooperating clamping plates. The opposite sides of the clamping plates are provided with mutually cooperating arc-shaped protrusions and arc-shaped limiting strips. The arc-shaped limiting strips are located above the arc-shaped protrusions. When the baffle jaws clamp, the arc-shaped protrusions are located inside the holes of the handles, and the opposite sides of the clamping plates are in contact with the sides of the handles. The arc-shaped limiting strips are positioned and engaged with the upper end of the handles.

[0013] As a preferred embodiment, there are two worktables located on both sides of the feeding device, and each worktable is equipped with an adsorption station with a positioning frame for easy positioning.

[0014] As a preferred embodiment, the carrier platform is provided with a strip hole in the X or Y direction, and the worktable is provided with a corresponding mounting strip hole in the Y or X direction. The carrier platform is fixed to the worktable by bolts constrained in the strip hole and the mounting strip hole.

[0015] After adopting the above technical solution, the effect of the present invention is as follows: The automatic chip feeding and conveying device includes a chip carrier transfer and conveying device and a container transfer and conveying device. The chip carrier transfer and conveying device includes an adsorption support frame, a carrier platform, a carrier container, and a worktable. The carrier platform and the carrier container are respectively placed on the bonding station and adsorption station of the worktable. The carrier platform is provided with an opening slot, and the feeding end of the opening slot is provided with an assembly port for easy carrier extraction. The carrier container is provided with several carrier receiving slots for inserting carriers. The adsorption support frame is fixed with... An X-guide rail extending in the horizontal X direction is fixedly installed. An X-slider is slidably installed on the X-guide rail in the X direction. The X-slider is driven by an X-power device to reciprocate between a bonding station and an adsorption station. A Z-guide rail extending in the vertical Z direction is fixedly installed on the X-slider. A Z-slider driven by a Z-power device is slidably installed on the Z-guide rail. A first Y-guide rail extending in the horizontal Y direction is fixedly installed on the Z-slider. A first Y-slider driven by a first Y-power device is slidably installed on the first Y-guide rail. The first Y-slider is equipped with a suction device for a moving carrier.

[0016] The container transfer and conveying device includes a frame, on which a feeding device is mounted to convey the container containers one by one along the X-axis to the loading station. A clamping and moving device is located above the feeding device, and the adsorption station on the worktable corresponds to the loading station on the feeding device. The clamping and moving device includes a second Y-guide rail fixedly mounted on a clamping support frame extending along the horizontal Y-axis. A second Y-slider is slidably mounted on the second Y-guide rail along the horizontal Y-axis. The second Y-slider is driven by a second Y-power device to reciprocate between the adsorption station and the loading station. A rotating seat is rotatably mounted on the second Y-slider about the vertical Z-axis, and a [missing information] is mounted on the second Y-slider. A deflection power device drives the rotary seat to reciprocate. The rotary seat has a container clamping mechanism for clamping the handle of the container body and a baffle clamping mechanism for clamping the baffle on the container body, slidably mounted along the vertical Z-axis. First, the chips to be bonded are manually placed into the carrier, then the carrier is placed into the container until it is full. The container is then placed on a feeding device for one-by-one transport. When it reaches the loading station, the feeding device stops moving. A second Y-power device drives a second Y-slider to move along the Y-guide rail to the loading station. The deflection power device aligns the container clamping mechanism and the baffle clamping mechanism with the handle and baffle of the container body, clamps them, and then moves them towards the adsorption station. The movement begins with the deflection power device first deflecting the clamped carrier container to the desired orientation. Then, the container clamping mechanism and the baffle clamping mechanism place the carrier container on the adsorption station. Next, the baffle clamping mechanism lifts the baffle. At this point, the chip carrier transfer and conveying device begins operation. First, the X power device drives the X slider to slide to the adsorption station. Then, the Z power device drives the Z slider to adjust its height, causing the first Y power device to drive the first Y slider, which in turn moves the suction device into the gap of the carrier container slot. The Z slider then slowly descends, bringing the suction device into contact with the carrier surface, allowing the suction device to adsorb the carrier. Next, the Y slider slowly retracts, and the X slider begins to move towards the bonding station. Once it reaches the bonding station... After the bonding station, the height is adjusted by the Z slider, and the Y slider drives the suction device to put the carrier from the assembly port of the carrier table into the opening slot. The Y slider drives the suction device to retract, and the bonding device starts to work. After the bonding is completed, the suction device extends, picks up the bonded carrier, and pulls it out from the assembly port. The X slider returns to the suction station, and the suction device drives the carrier back to the corresponding carrier receiving slot. The above operation is repeated until the carrier in the carrier receiving box is bonded. The clamping device lowers the baffle and clamps the carrier receiving box on the worktable to the loading station. The feeding device starts to transport the bonded carrier receiving box to the next process, and the unbonded carrier receiving box is transported to the loading station to continue the above operation.This device can transport carrier containers filled with unbonded carriers, complete the bonding of the carriers by machine, and transport them to the next process. A deflection power device drives a rotary table to rotate, thereby changing the placement angle of the carrier containers so that the openings face a designated position. This effectively reduces labor, minimizes problems that may arise from manual operation, automates chip bonding, and improves production efficiency.

[0017] Furthermore, since the adsorption support frame is fixedly connected to the worktable, the X slider includes a first X slider and a second X slider, and the X guide rail includes a first X guide rail and a second X guide rail. The first X guide rail is located on the upper part of the adsorption support frame, and the second X guide rail is located on the lower part of the adsorption support frame. The first X slider is slidably mounted on the first X guide rail, and the second X slider is slidably mounted on the second X guide rail. A synchronization rod is provided between the first X slider and the second X slider. The X power device is installed on the first X guide rail and is connected to the first X slider in a transmission connection, or installed on the second guide rail and is connected to the second X slider in a transmission connection. The Z guide rail is installed between the first X slider and the second X slider. The first X slider and the second X slider are placed on the adsorption support frame, and the synchronization rod maintains the synchronicity of the first X slider and the second X slider during the sliding process, making the connection of the Z guide rail more stable during the movement along the X direction.

[0018] Furthermore, the suction device includes a suction cup, a connecting frame, and a guide rod. The guide rod is fixed on the first Y-slider, the connecting frame is located at one end of the guide rod, and there are multiple suction cups located on the connecting frame. Each suction cup corresponds to a blank area on the upper surface of the carrier. The connecting frame connects multiple suction cups, fixing the position of the suction cups and facilitating adhesion by fixing them to the guide rod.

[0019] Furthermore, the feeding device includes a first driving pulley and a first driven pulley rotatably mounted on the frame. A circulating conveyor belt is installed between the first driving pulley and the first driven pulley. The first driving pulley is connected to the feeding power device. Several sets of container clamps for clamping the container boxes are fixed on the circulating conveyor belt at intervals. Taking advantage of the good continuity and high efficiency of the circulating conveyor belt, the container clamps can circulate and transport the container boxes.

[0020] Furthermore, since four parallel and spaced support bars are fixed on the frame, the support bars support the bottom surface of the carrier container box, and the upper surface of the circulating conveyor belt is below the support bars, each container box clamp includes four limiting protrusions. The four limiting protrusions are fixed to the outer side of the circulating conveyor belt through a connecting structure. The four limiting protrusions together form a limiting area for the placement of the carrier container box. The gap between the connecting structure and the support bars corresponds to the position of the limiting protrusions, allowing them to move above the support platform. In this way, the support bars support the carrier container box, and the limiting protrusions limit the position of the carrier container box and transport it, making the feeding device stable and accurate. The limiting protrusions are also convenient and quick to place the carrier container box.

[0021] Furthermore, since the first pneumatic clamp includes a first dual-axis cylinder fixed on the power end of the first telescopic power device, and a pair of handle grippers are fixed on the piston rod of the first dual-axis cylinder, the handle grippers of the box body handle form a box body handle slot after clamping, which facilitates the clamping of the box body handle on the carrier container box. This effectively prevents the carrier container box from shaking during clamping and ensures a firm grip.

[0022] Furthermore, the second pneumatic clamp includes a second dual-axis cylinder fixed to the power end of the second telescopic power device and a pair of baffle jaws fixed to the piston rod of the second dual-axis cylinder. The handle on the baffle is arched, and the lower end of the pair of baffle jaws is provided with mutually cooperating clamping plates. The opposite sides of the clamping plates are provided with mutually cooperating arc-shaped protrusions and arc-shaped limiting strips. The arc-shaped limiting strips are located above the arc-shaped protrusions. When the baffle jaws are clamping, the arc-shaped protrusions are located inside the holes of the handles, and the opposite sides of the clamping plates are in contact with the sides of the handles. The arc-shaped limiting strips are positioned and cooperate with the upper end of the handles. The arc-shaped protrusions can cooperate with the handle holes to prevent the baffle from shaking when clamping, ensuring the accuracy of the drop. The arc-shaped limiting strips can fix the position of the baffles when they are inserted into the carrier housing and provide an appropriate downward pressure so that the baffles can be accurately inserted into the carrier housing.

[0023] Furthermore, since there are two workbenches located on either side of the feeding device, each workbench is equipped with an adsorption station. The adsorption station is equipped with a positioning frame for easy positioning. Having two workbenches can effectively increase work efficiency, and the positioning frame ensures accurate placement each time the carrier container is placed.

[0024] Furthermore, since the carrier platform is provided with strip-shaped holes in the X or Y direction, and the worktable is provided with corresponding mounting strip holes in the Y or X direction, the carrier platform is fixed to the worktable by bolts constrained in the strip-shaped holes and mounting strip holes, so that the position of the carrier platform can be adjusted in the X or Y direction, greatly improving flexibility. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] Figure 1 This is a perspective view of an embodiment of the present invention;

[0027] Figure 2 This is a front view of an embodiment of the present invention;

[0028] Figure 3 This is a left view of an embodiment of the present invention.

[0029] Figure 4 This is a perspective view of the feeding device according to an embodiment of the present invention;

[0030] Figure 5 This is a top view of a single-sided chip carrier transfer and conveying device;

[0031] Figure 6 This is a schematic diagram showing the vehicle's storage box baffle when it is open;

[0032] Figure 7 This is a partial view of the first and second pneumatic clamps;

[0033] In the attached diagram: 1. Adsorption support frame; 2. Workbench A; 3. Workbench B; 4. First AX slider; 5. Second AX slider; 6. First AX guide rail; 7. Second AX guide rail; 8. AX servo motor; 9. AX lead screw and nut mechanism; 10. AZ guide rail; 11. AZ servo motor; 12. AZ lead screw and nut mechanism; 13. AZ slider; 14. First AY guide rail; 15. First AY slider; 16. A linear module; 17. First BX slider; 18. Second BX slider; 19. First BX guide rail; 20. Second BX guide rail; 21. BX servo motor; 22. BX lead screw and nut mechanism; 23. 24. BZ guide rail; 25. BZ servo motor; 26. BZ lead screw and nut mechanism; 27. BZ slider; 28. First BY guide rail; 29. ​​First BY slider; 30. B linear module; 31. Carrier platform; 32. Opening slot; 33. Assembly port; 34. Carrier housing box; 35. Carrier housing slot; 36. Box handle; 37. Baffle; 38. Handle; 39. Bonding station; 40. Adsorption station; 41. A synchronous rod; 42. B synchronous rod; 43. A suction cup; 44. B suction cup; 45. A connecting frame; 46. B connecting frame; 47. A guide rod; 48. B guide rod; 49. Positioning frame; 40. Y positioning plate; 40. X positioning plate; 41. Strip hole; 42. Mounting strip hole;

[0034] 47. Frame; 48. Clamping support frame; 49. Loading station; 50. First driving pulley; 51. First driven pulley; 52. Circulating conveyor belt; 53. Brushless motor; 54. Receiving box clamp; 541. Limiting protrusion; 55. Y servo motor; 56. Y screw and nut mechanism; 57. Second Y guide rail; 58. Second Y slider; 59. First connecting plate; 60. Rotary cylinder; 61. Rotary seat; 62. Second connecting plate; 63. First single-axis cylinder; 64. Second single-axis cylinder; 65. First double-axis cylinder; 66. Handle gripper; 67. Second double-axis cylinder; 68. Baffle gripper; 681. Arc-shaped protrusion; 682. Arc-shaped limiting strip; 69. Support strip. Detailed Implementation

[0035] The present invention will be further described in detail below through specific embodiments.

[0036] like Figures 1 to 7 As shown, an automatic chip feeding and conveying device includes a chip carrier transfer and conveying device and a receiving box transfer and conveying device. The chip carrier transfer and conveying device includes an adsorption support frame 1, a carrier platform 30, a carrier receiving box 31, and a worktable. The carrier platform 30 and the carrier receiving box 31 are respectively placed on the bonding station 34 and the adsorption station 35 on the worktable. The carrier platform 30 is provided with an opening slot 301, and the loading end of the opening slot 301 is provided with an assembly port 302 for easy carrier removal. The carrier receiving box 31 is provided with a plurality of carrier receiving slots 311 for inserting carriers. An X-guide rail extending in the horizontal X direction is fixedly installed on the support frame 1. An X-slider is slidably installed on the X-guide rail in the X direction. The X-slider is driven by an X-power device to reciprocate between the bonding station 34 and the adsorption station 35. A Z-guide rail extending in the vertical Z direction is fixedly installed on the X-slider. A Z-slider driven by a Z-power device is slidably installed on the Z-guide rail. A first Y-guide rail extending in the horizontal Y direction is fixedly installed on the Z-slider. A first Y-slider driven by a first Y-power device is slidably installed on the first Y-guide rail. The first Y-slider is equipped with a suction device for a moving carrier.

[0037] The container transfer and conveying device includes a frame 47, on which a feeding device is installed to convey the container boxes 31 one by one along the X-axis to the loading station 49. A clamping and moving device is provided above the feeding device, and the adsorption station 35 on the workbench corresponds to the loading station 49 on the feeding device. The clamping and moving device includes a second Y-guide rail 57 extending along the horizontal Y-direction and fixedly installed on the clamping support frame 48. A second Y-guide rail is slidably installed on the second Y-guide rail 57 along the horizontal Y-direction. The second Y-slider 58 is driven by the second Y-power device to reciprocate between the adsorption station 35 and the loading station 49; a rotating seat 61 is rotatably mounted on the second Y-slider 58 about the vertical Z-axis; a deflection power device is mounted on the second Y-slider to drive the rotating seat 61 to reciprocate; a container clamping mechanism for clamping the container handle 32 on the carrier container 31 and a baffle clamping mechanism for clamping the baffle 33 on the carrier container 31 are slidably mounted on the rotating seat 61 along the vertical Z-axis.

[0038] In this embodiment, there are two sets of chip carrier transfer and conveying devices. The frame 47 is placed along the X direction. The worktable includes worktable A 2 and worktable B 3, which are located on both sides of the feeding device. Each worktable is provided with an adsorption station 35. The openings of the carrier receiving boxes 31 on the two adsorption stations 35 are both open outwards. Therefore, the adsorption support frame 1 is an adsorption support frame A and an adsorption support frame B. The adsorption support frame 1 is fixedly connected to the worktable. Worktable A 2 includes a first AX slider 4 and a second AX slider 5. The first AX slider 4 and the second AX slider 5 are slidably mounted along the X direction on a first AX guide rail 6 and a second AX guide rail 7, respectively. The first AX guide rail 6 is located on the upper part of the adsorption support frame A, and the second AX guide rail 7 is located on the lower part of the adsorption support frame A. A synchronization rod 36 is provided between the first AX slider 4 and the second AX slider 5. The first AX slider 4 and the second AX slider 5 are driven by an AX power device. The first AX slider 4 is connected to the first AX guide rail 6 via a transmission connection, or the second AX slider 5 is connected to the second AX guide rail 7 via a transmission connection. An AZ guide rail 10 is fixedly installed between the first AX slider 4 and the second AX slider 5. Compared with a single AX guide rail, the use of the first AX guide rail 6 and the second AX guide rail 7 can distribute the pressure borne by a single AX guide rail to the two AX guide rails, greatly improving the safety of the device. At the same time, the A synchronizing rod 36 maintains the synchronicity of the first AX slider 4 and the second AX slider 5 during the sliding process, making the connection between the first AX slider 4 and the second AX slider 5 more stable during the movement along the X direction. Therefore, the first AX slider 4 or the second AX slider 5 is driven by the AX power device, and then the second AX slider 5 or the first AX slider 4 moves together through the A synchronizing rod 36. In this way, the AZ guide rail 10 is fixedly installed between the first AX slider 4 and the second AX slider 5 so that it moves simultaneously with the first AX slider 4 and the second AX slider 5 along the X direction.

[0039] Furthermore, the AZ guide rail 10 is fixedly mounted on the A synchronization rod 36, making the device structure compact and allowing the AZ guide rail 10 to move simultaneously with the A synchronization rod 36. The AZ slider 13, slidably mounted on the AZ guide rail 10, is driven by the AZ power device and can reciprocate along the Z direction. A first AY guide rail 14 is fixedly mounted on the AZ slider 13, and a first AY slider 15 is slidably mounted on the first AY guide rail 14. The first AY slider 15 is driven by the first AY power device to reciprocate along the Y direction. Furthermore, the AZ power device includes an AZ servo motor 11 and an AZ screw-nut mechanism 12. The AZ servo motor 11 is fixed to one end of the AZ guide rail 10, and the AZ screw of the AZ screw-nut mechanism 12 is connected to the AZ servo motor 11. The output shaft of the AZ servo motor 11 is connected, and the nut of the AZ lead screw and nut mechanism 12 is fixedly connected to the AZ slider 13. The AX power device is the same as the AZ power device, including the AX servo motor 8 and the AX lead screw and nut mechanism 9. The AZ servo motor 11 and the AX servo motor 8 can operate smoothly when driving the first AX slider 4, the second AX slider 5 and the AZ slider 13, and have strong overload capacity, improving safety. In addition, the cooperation with the AX lead screw and nut mechanism 9 and the AZ lead screw and nut mechanism 12 can make the movement more precise. The first AY power device adopts the A linear module 16, which can effectively reduce the size of the device and make the movement more convenient. Of course, the first AY power device can also be the same as the above-mentioned AX power device and AZ power device.

[0040] Similarly, a B adsorption support frame is fixedly installed on the B workbench 3. A first BX guide rail 19 and a second BX guide rail 20 are fixedly installed on the B adsorption support frame. A first BX slider 17 and a second BX slider 18 are slidably installed on the first BX guide rail 19 and the second BX guide rail 20, respectively, and are driven to slide back and forth by the BX power mechanism. A B synchronization rod 37 is fixedly installed on the first BX slider 17 and the second BX slider 18. A BZ guide rail 23 is fixedly installed on the B synchronization rod 37. A BZ slider 2 is slidably installed on the BZ guide rail 23. 6. The BZ power mechanism drives the BZ slider 26 to slide back and forth on the BZ guide rail 23. The BX power mechanism is the same as the BZ power mechanism. The BX power mechanism includes a BX servo motor 21 and a BX lead screw and nut mechanism 22. The BZ power mechanism includes a BZ servo motor 24 and a BZ lead screw and nut mechanism 25. A first BY guide rail 27 is fixedly installed on the BZ slider 26. The first BY power mechanism drives the first BY slider 28 to slide back and forth on the first BY guide rail 27. The first BY power mechanism adopts a B linear module 29.

[0041] As shown in Figure 4, both the first AY slider 15 and the first BY slider 28 are equipped with suction devices, including an A suction device and a B suction device. The A suction device includes an A suction cup 38, an A connecting frame 40, and an A guide rod 42. The A guide rod 42 is fixed to the first AY slider 15, and the A connecting frame 40 is disposed at one end of the A guide rod 42. There are multiple A suction cups 38, which are disposed on the A connecting frame 40, and each A suction cup 38 corresponds to a blank area on the upper surface of the carrier. The B suction device is the same as the A suction device and will not be described in detail.

[0042] Furthermore, the first AY guide rail 14 and the second BY guide rail are equipped with two Y sliders, and two guide rods are respectively fixedly installed on the two Y sliders on both sides, such as... Figure 4 As shown, the opening slot 301 of the carrier platform 30 and the carrier receiving slot 311 of the carrier receiving box 31 have a certain X-direction depth. Therefore, when only one Y slider drives a single guide rod to move, it may not be firmly fixed, which will prevent the carrier from unloading quickly. In addition, when the suction cup is adsorbed, an appropriate downward pressure is required. Using two Y sliders can reduce the lever arm and greatly reduce the pressure borne by a single Y slider. Therefore, the above problems can be well improved by using two Y sliders.

[0043] In this embodiment, taking the B suction device as an example, the plurality of B suction cups 39 are located at the four vertices of a rectangle. The B suction cups are connected by a B connecting frame 41, which is connected to a B guide rod 43. There are four B suction cups 39, and the carrier is rectangular with several chip placement slots arranged at intervals in the middle. The blank area is around the surface of the carrier, so that the B suction cups 39 can suck the carrier through the blank area. Of course, there can be a plurality of B suction cups 39 and they can be arranged in any shape, as long as the carrier can maintain balance and not shake during the movement when it is being suctioned. For example, three B suction cups 39 can be used to form a triangle, which can suck the carrier by sucking the three points of the blank area.

[0044] As shown in Figure 2, the second Y-slider 58 is slidably mounted on the second Y-guide rail 57 and driven by the second Y-power device. The second Y-power device includes a Y-servo motor 55 and a Y-screw nut mechanism 56. The Y-servo motor 55 is fixed to one end of the second Y-guide rail 57. The screw of the Y-screw nut mechanism 56 is connected to the output shaft of the Y-servo motor 55. The nut of the Y-screw nut mechanism 56 is fixedly connected to the second Y-slider 58. The deflection power device includes a rotary cylinder 60. The rotary cylinder 60 is connected to the side of the second Y-slider 58 through a first connecting plate 59. The rotary cylinder 60 drives the rotating seat 61 to reciprocate and deflect at any angle. The receiving box clamping mechanism and the baffle clamping mechanism are fixedly mounted on the rotating seat 61 through the second connecting plate 62 and rotate synchronously with the rotating seat 61.

[0045] As shown in Figure 3, the feeding device includes a first driving pulley 50 and a first driven pulley 51 rotatably mounted on the frame 47. A circulating conveyor belt 52 is installed between the first driving pulley 50 and the first driven pulley 51. The first driving pulley 50 is connected to the feeding power device. Several sets of spaced-apart container clamps 54 for clamping the container container 31 are fixed on the circulating conveyor belt 52. The feeding power device includes a brushless motor 53, which makes the circulating conveyor belt 52 highly controllable and has good motion stability during the conveying process. The brushless motor 53 has a long service life and low cost, which greatly improves production efficiency and maximizes benefits. Of course, the feeding power device can also be a stepper motor or other power devices.

[0046] In this embodiment, four parallel and spaced support bars 69 are fixed on the frame 47. The support bars 69 support the bottom surface of the carrier container 31. The upper surface of the circulating conveyor belt 52 is located below the support bars 69. Each container clamp 54 includes four limiting protrusions 541. The four limiting protrusions 541 are fixed to the outer side of the circulating conveyor belt 52 by a connecting structure. The four limiting protrusions 541 together form a limiting area for the carrier container 31. The gap between the connecting structure and the support bars 69 corresponds to the position of the limiting protrusions 541 running above the support platform. The connecting structure allows the circulating conveyor belt 52 to drive the limiting protrusions 541. Furthermore, using the support bars 69 instead of the circulating conveyor belt 52 to support the carrier container 31 can improve the service life of the circulating conveyor belt 52 and make the conveying process more stable. The connecting structure adopts screw connection or other devices that can connect the two ends.

[0047] As shown in Figures 1 and 2, the container holding mechanism includes a first telescopic power device fixedly installed on the rotating base 61, and the power end of the first telescopic power device is equipped with a first pneumatic clamp for holding the handle 32 of the container 31; the baffle holding mechanism includes a second telescopic power device fixedly installed on the rotating base 61, and the power end of the second telescopic power device is equipped with a second pneumatic clamp for holding the handle 331 of the baffle 33.

[0048] In this embodiment, the first telescopic power device includes a first single-axis cylinder 63, which is fixedly mounted on the center of the rotating seat 61 via a second connection. This ensures that the center of the carrier housing 31 is coaxial with the rotating cylinder 60 during rotation, and the carrier housing 31 does not need to rise excessively during movement, only exceeding the height of the limiting protrusion 541. Therefore, the stroke of the first single-axis cylinder 63 does not need to be too large. The second telescopic power device includes a second single-axis cylinder 64, such as... Figure 2 and Figure 4As shown, when placing a carrier, the baffle 33 needs to be raised to not obstruct the placement of the carrier in the carrier housing 31. Therefore, the stroke of the second single-axis cylinder 64 is the maximum height of the carrier housing 31. Thus, the second single-axis cylinder 64 is connected to the rotating seat 61 through the connecting plate and is higher than the first single-axis cylinder 63. The distance between the first pneumatic clamp and the second pneumatic clamp is the same as the distance between the box handle 32 and the handle 331. In this way, the box handle 32 and the handle 331 of the corresponding carrier housing 31 are clamped by the first pneumatic clamp and the second pneumatic clamp. The Y servo motor 55 drives the Y screw nut mechanism 56 to drive the second Y slider 58 to move towards the adsorption station 35. The rotary cylinder 60 can adjust the opening direction of the carrier housing 31 to meet the requirements of the opening direction of the worktable.

[0049] like Figure 6 As shown, the first pneumatic clamp includes a first dual-axis cylinder 65 fixed on the power end of the first telescopic power device. A pair of handle grippers 66 are fixed on the piston rod of the first dual-axis cylinder 65. After the handle grippers 66 clamp the box handle 32, they form a box handle 32 slot for easy gripping of the box handle 32 on the carrier container box 31. In this way, the dual-axis cylinder drives the handle grippers 66 to retract, so that the slot of the handle grippers 66 contacts the box handle 32, thus firmly clamping the carrier container box 31. When lifted, it will not start, ensuring the accuracy when placing the carrier container box 31.

[0050] The second pneumatic clamp includes a second dual-axis cylinder 67 fixed to the power end of the second telescopic power device and a pair of baffle jaws 68 fixed to the piston rod of the second dual-axis cylinder 67. The handle 331 on the baffle 33 is arched. The lower ends of the pair of baffle jaws 68 are provided with mutually cooperating clamping plates. The opposite sides of the clamping plates are provided with mutually cooperating arc-shaped protrusions 681 and arc-shaped limiting strips 682. The arc-shaped limiting strips 682 are located above the arc-shaped protrusions 681. When the baffle jaws 68 clamp, the arc-shaped protrusions 681 are located in the holes of the handles 331. The inner side of the clamping plate contacts the side of the handle 331. The arc-shaped limiting strip 682 is positioned and engaged with the upper end of the handle 331. The arc-shaped protrusion 681 on the clamping plate has the same radius as the inner hole of the handle 331. After clamping, the side of the clamping plate contacts the side of the handle 331, so that the baffle 33 will not shake after being clamped and will move smoothly with the carrier housing 31. When the baffle 33 is inserted into the carrier housing 31, the arc-shaped limiting strip 682 can restrict the baffle 33 from shaking up and down along the axis, so that the baffle 33 can be smoothly inserted into the carrier housing 31.

[0051] In this embodiment, the adsorption station 35 is provided with a positioning frame 44 for convenient positioning. The carrier container 31 is placed in the positioning frame 44. The positioning frame 44 includes a Y positioning plate 441 and two X positioning plates 442. The distance between the two X positioning plates 442 is the same as the width of the carrier container 31. The Y positioning plate 441 defines the position of the carrier container 31 in the Y direction, thus completing the positioning and greatly improving the accuracy of changing the carrier container 31 during production.

[0052] like Figure 1 and Figure 4 As shown, the carrier platform 30 is provided with a strip hole 45 in the X or Y direction, and the worktable is provided with a corresponding mounting strip hole 46 in the Y or X direction. The carrier platform 30 is fixed to the worktable by bolts constrained in the strip hole 45 and the mounting strip hole 46. The carrier platform 30 can be moved arbitrarily in the X or Y direction by the cooperation of the strip hole 45 and the mounting strip hole 46, so that the carrier can adapt to a variety of different occasions.

[0053] The working principle of the invention is as follows: First, the receiving box clamp 54 on the feeding device places several carrier receiving boxes 31 filled with unbonded carriers. Then, a carrier receiving box 31 filled with unbonded carriers is also placed on workbench A 2. The baffle 33 is manually removed. Then, the feeding device starts conveying, and at the same time, the carrier receiving box 31 on workbench A 2 begins the bonding operation. The AX servo motor 8 drives the AX screw nut mechanism 9 to drive the first AX slider 4 to slide towards the adsorption station 35. It is connected to the second AX slider 5 through the A synchronization rod 36, so that they move synchronously. Then, the AZ guide rail 10 installed on the A synchronization rod 36 also moves to the adsorption station 35. Then, the AZ servo motor 11 drives the AZ screw nut mechanism to drive the AZ slider 13 to rise. The AZ slider 13 makes the A suction device align with the gap of any carrier receiving slot 311. Then, the first AY slider 15 drives the A guide rod. 42. Move the suction cup to a position above the adsorption area of ​​the carrier. Then, the AZ slider 13 descends. Once the A suction cup 38 is in contact with the blank area of ​​the carrier, it descends further to ensure that the A suction cup 38 is firmly adsorbed. Then, the first AY slider 15 retracts to pull out the carrier. Next, the first AX slider 4 drives the second AX slider 5 to move towards the bonding station 34. After reaching the bonding station 34, adjust the height of the AZ slider 13 so that the adsorbed carrier is aligned with the assembly port 302 of the carrier table 30. The first AY slider 15 extends to send the carrier into the opening slot 301 of the carrier table 30. The AZ slider 13 rises to detach the A suction cup 38 from the carrier surface. Then, the first AY slider 15 retracts. After the carrier is bonded, the first AY slider 15 extends again to pick up the carrier. After retracting, it slides back to the adsorption station 35 and is placed back into the corresponding carrier receiving slot 311 until all carriers in the carrier receiving box 31 are bonded.

[0054] At this time, the feeding device transports the unbonded carrier receiving box 31 to the loading station 49. The Y servo mechanism drives the Y screw nut mechanism 56 to slide onto the loading device. Then, the rotary motor causes the first single-axis cylinder 63 and the second single-axis cylinder 64 to align along the Y direction, with the handle gripper 66 and the baffle gripper 68 corresponding one-to-one with the upper part of the box handle 32 and the baffle 33. Then, the first single-axis cylinder 63 and the second single-axis cylinder 64 drive the handle gripper 66 and the baffle gripper 68 to descend to the position. The first double-axis cylinder 65 drives the handle gripper 66 to clamp, and the second double-axis cylinder 67 drives the baffle gripper 68 to clamp. At this time, the first single-axis cylinder 63 and the second single-axis cylinder 64 rise and move towards the adsorption station 35 of the B worktable 3. When the second Y slider 58 moves to the adsorption station 35 of the B worktable 3, the rotary cylinder 60 drives the rotating seat 61 to drive the first single-axis cylinder 63 and the second single-axis cylinder 64. Cylinder 64 rotates 90° clockwise. Then, the first single-axis cylinder 63 and the second single-axis cylinder 64 drive the handle gripper 66 and the baffle gripper 68 to descend. After the bottom of the carrier housing 31 falls into the worktable positioning frame 44, the handle gripper 66 is released and rises. The baffle gripper 68 holds the baffle 33 and rises. The second Y slider 58 drives the baffle gripper 68 to move the baffle 33 to the adsorption station 35 of worktable A. At this time, the rotary cylinder 60 drives the rotary... The rotary table 61 rotates 180° counterclockwise. Then, the handle gripper 66 and the baffle gripper 68 descend. The baffle 33 held by the baffle gripper 68 falls into the carrier container 31. Then, the handle gripper 66 and the baffle gripper 68 simultaneously lift the carrier container 31 and the baffle 33 and move them to the loading station 49. After the bonded carrier container 31 is placed in the loading station 49, the feeding device conveys the bonded carrier container 31 to the next process.

[0055] Another carrier container 31 containing an unbonded carrier is conveyed to the loading station 49. Then, in the reverse order of the above operation, the carrier container 31 on the loading station 49 is clamped, the rotary cylinder 60 is rotated 90° counterclockwise, and then moved to the adsorption station 35 of workbench A 2. At the same time, the carrier in the carrier container 31 on workbench B 3 begins to bond. The carrier bonding device on workbench B 3 operates in the same way as on workbench A 2. Then, the baffle 33 of the carrier container 31 on workbench A 2 is pulled out and rotated 180° clockwise by the rotary cylinder 60 and falls into the carrier container 31 on workbench B 3. Then it is clamped and moved to the loading station 49 to be conveyed to the next process. The above steps are repeated to complete the transfer of the carrier container 31.

[0056] The above-described embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Any modifications and alterations made to the technical solutions of the present invention without departing from the spirit of the present invention shall fall within the protection scope defined by the claims of the present invention.

Claims

1. A chip automatic unloading and conveying device, characterized in that: The chip carrier transfer conveying device and the containing box transfer conveying device, the chip carrier transfer conveying device includes the suction support frame, the carrier table, the carrier containing box and the workbench, the carrier table and the carrier containing box are placed in the bonding station and the suction station on the workbench respectively; The carrier table is provided with an open slot, and the loading end of the open slot is provided with an assembly opening facilitating carrier extraction; the carrier containing box is provided with a plurality of carrier containing slots for inserting the carrier, the suction support frame is fixedly installed with an X guide rail extending along the horizontal X direction, the X guide rail is slidably installed with an X sliding block along the X direction, the X sliding block is driven by an X power device to reciprocate between the bonding station and the suction station; the X sliding block is fixedly installed with a Z guide rail extending along the vertical Z direction, the Z guide rail is slidably installed with a Z sliding block driven by a Z power device, the Z sliding block is fixedly installed with a first Y guide rail extending along the horizontal Y direction, the first Y guide rail is slidably installed with a first Y sliding block driven by a first Y power device, and the first Y sliding block is provided with a suction device for moving the carrier; The containing box transfer conveying device includes a rack, the rack is installed with a feeding device for conveying the carrier containing box to the loading station along the X axis direction one by one, the feeding device is provided above with a clamping moving device, the suction station on the workbench corresponds to the loading station on the feeding device; the clamping moving device includes a second Y guide rail fixedly installed on the clamping support frame and extending along the horizontal Y direction, the second Y guide rail is slidably installed with a second Y sliding block along the horizontal Y direction, the second Y sliding block is driven by a second Y power device to reciprocate between the suction station and the loading station; the second Y sliding block is rotatably installed with a rotating seat around the vertical Z axis, the second Y sliding block is installed with a deflection power device for driving the rotating seat to reciprocate and deflect, the rotating seat is slidably installed with a containing box clamping mechanism for clamping the box handle on the carrier containing box and a baffle clamping mechanism for clamping the baffle on the carrier containing box along the vertical Z axis; the suction support frame is fixedly connected to the workbench, the X sliding block includes a first X sliding block and a second X sliding block, the X guide rail includes a first X guide rail and a second X guide rail, the first X guide rail is located on the upper part of the suction support frame, the second X guide rail is located on the lower part of the suction support frame, the first X sliding block is slidably installed on the first X guide rail, the second X sliding block is slidably installed on the second X guide rail, a synchronous rod is arranged between the first X sliding block and the second X sliding block, the X power device is transmissionally connected with the first X sliding block and installed on the first X guide rail or transmissionally connected between the second X sliding block and installed on the second guide rail, and the Z guide rail is installed between the first X sliding block and the second X sliding block; the suction device includes a suction disc, a connecting frame and a guide rod, the guide rod is fixed to the first Y sliding block, the connecting frame is arranged at one end of the guide rod, and the number of the suction discs is plural and arranged on the connecting frame, each suction disc corresponds to the blank area on the upper surface of the carrier.

2. The chip automatic unloading and conveying device according to claim 1, characterized in that: The feeding device comprises a first driving pulley and a first driven pulley rotatably installed on the frame, a circulating conveying belt is installed between the first driving pulley and the first driven pulley, the first driving pulley is in transmission connection with a feeding power device, and a plurality of sets of interval arranged accommodating box clamps for clamping the accommodating box of the carrier are fixed on the circulating conveying belt.

3. The chip automatic dispensing conveyor device according to claim 2, wherein: Four parallel and interval arranged supporting strips are fixed on the frame, the supporting strips support the bottom surface of the accommodating box of the carrier, the upper belt surface of the circulating conveying belt is below the supporting strips, each accommodating box clamp comprises four limiting protrusions, the four limiting protrusions are fixed on the outer side surface of the circulating conveying belt through a connecting structure, the four limiting protrusions jointly form a placing area for limiting the carrier accommodating box, and the gap position between the connecting structure and the supporting strips corresponds to make the limiting protrusions run above the supporting table.

4. The chip automatic unloading and conveying device according to claim 3, characterized in that: The accommodating box clamping mechanism comprises a first telescopic power device fixedly installed on the rotating seat, a power end of the first telescopic power device is provided with a first pneumatic clamp for clamping the box handle on the carrier accommodating box, the baffle clamping mechanism comprises a second telescopic power device fixedly installed on the rotating seat, and a power end of the second telescopic power device is provided with a second pneumatic clamp for clamping the handle of the baffle.

5. The chip automatic pick-and-place conveyor device of claim 4, wherein: The first pneumatic clamp comprises a first double-shaft air cylinder fixed on the power end of the first telescopic power device, a pair of handle clamping jaws are fixed on the piston rod of the first double-shaft air cylinder, and the handle clamping jaws form a box handle clamping groove after clamping, which facilitates clamping the box handle on the carrier accommodating box.

6. The chip automatic pick-and-place conveyor device of claim 5, wherein: The second pneumatic clamp comprises a second double-shaft air cylinder fixed on the power end of the second telescopic power device and a pair of baffle clamping jaws fixed on the piston rod of the second double-shaft air cylinder, the handle of the baffle is in the shape of an arch bridge, the lower ends of the pair of baffle clamping jaws are provided with clamping plates matched with each other, the opposite sides of the clamping plates are provided with arc-shaped protrusions and arc-shaped limiting strips matched with each other, the arc-shaped limiting strips are above the arc-shaped protrusions, when the baffle clamping jaws are clamped, the arc-shaped protrusions are in the hole of the handle and the opposite sides of the clamping plates are in contact with the side surface of the handle, and the arc-shaped limiting strips are in positioning cooperation with the upper end of the handle.

7. The chip automatic pick-and-place conveyor device of claim 6, wherein: The workbench is provided with an X direction or Y direction strip-shaped hole, the workbench is provided with a Y direction or X direction mounting strip hole in correspondence, and the carrier table is fixed on the workbench through bolts constrained in the strip-shaped hole and the mounting strip hole.

8. The chip automatic pick-and-place conveyor device of claim 7, wherein: ​

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