Conveyor system

Abstract

The present invention provides a technology capable of efficiently transferring multiple objects between a storage container for storing multiple objects and a processing device for batch processing the multiple objects. A conveying system (1) for transferring multiple objects between a storage container (9) for storing multiple objects and a processing device (2) for batch processing multiple objects held on a tray (8), comprising: a mounting portion (31) on which the storage container (9) is mounted; a loading platform (41) on which the multiple objects are mounted; a tray support portion (51) supporting the tray (8); a first conveying device (44) for transferring multiple objects between the storage container (9) mounted on the mounting portion (31) and the loading platform (41); and a second conveying device (53) for transferring multiple objects between the loading platform (41) and a tray (8) supported by the tray support portion (51).

Description

Technical Field

[0001] The present invention relates to a conveying system for conveying objects between a storage container for containing objects (usually wafers or wafers held in a frame by tape, film, etc.) and a processing device for processing the objects. Background Art

[0002] As is well known, a typical semiconductor manufacturing process includes wafer processing (pre-processing) for forming a circuit on a wafer and packaging processing (post-processing) for cutting the wafer into chips, forming external terminals thereon and sealing them with resin. In addition, in recent years, there is a situation where a wiring layer or a component is formed between the pre-processing and the post-processing.

[0003] The wafers that have been pre-processed are very thin and difficult to handle on their own. Therefore, usually, in order to facilitate the handling of such wafers, such as Fig. 27 As shown, the wafer that has undergone pre-processing is bonded to a tape 92 (or adhesive film) attached to a frame 93 having a frame shape slightly larger than the wafer 91 (basically a ring in the example of the drawing) before being sent for post-processing (hereinafter, the wafer 91 held on the frame 93 by the tape 92 or the like will also be referred to as a "framed wafer 90"). By adopting this form, the wafer 91 can be held by the frame 93. This makes it easy to handle the thin wafer 91 that is difficult to handle alone. In addition, by adopting this form, it is possible to prevent the chips from flying when the wafer 91 is discretely cut into chips in post-processing.

[0004] In a typical semiconductor manufacturing plant, a plurality of wafers or a plurality of wafers with frames (hereinafter referred to as "wafers") are transported or stored by being stored in a closed storage container (carrier) called a FOUP (front-opening wafer box), a box, etc. In many cases, a processing device for processing wafers, etc. includes: a mounting portion on which a storage container is mounted, which serves as an interface between the processing device and the storage container; and a conveying device for conveying wafers, etc. between the storage container mounted on the mounting portion and the processing device. The conveying device takes out unprocessed wafers, etc. from the storage container mounted on the mounting portion and loads the unprocessed wafers, etc. into the main body of the processing device. The conveying device unloads processed wafers, etc. from the main body and stores the processed wafers in the storage container mounted on the mounting portion.

[0005]

Prior art documents

[0006] Patent Documents

[0007] Patent Document 1: Japanese Patent Application No. 2017-069488

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 2012-222288

[0009] Processing equipment used in semiconductor manufacturing processes is basically divided into equipment that processes wafers one by one (so-called single wafer type) and equipment that processes multiple wafers at a time (so-called batch type). As an example of the latter, a processing equipment is known in which multiple wafers are arranged on a tray in a flat form and are processed together.

[0010] In a batch type processing apparatus using a tray in this manner, a transfer process is required in which unprocessed wafers stored in a storage container are set on the tray at an interface portion and processed wafers held on the tray are stored in the storage container.

[0011] In order not to reduce the operating rate of the processing equipment, it is necessary to sufficiently shorten the cycle time of the transfer process at the interface portion. For this purpose, it is necessary to perform the transfer operation efficiently.

[0012] In order to solve the above problems, the present invention provides some embodiments of a technology that can efficiently transfer objects between a storage container that stores the objects and a processing device that processes the objects together. Summary of the invention

[0013] The present invention takes the following measures to achieve the above-mentioned purpose.

[0014] According to one embodiment of the present invention, there is provided a conveying system for conveying a plurality of objects between a storage container configured to store the plurality of objects and a processing device configured to perform batch processing on the plurality of objects held on a pallet, comprising:

[0015] a mounting portion on which the storage container is mounted;

[0016] a stage, on which a plurality of objects are mounted;

[0017] a tray support portion configured to support the tray;

[0018] a first conveying device configured to convey a plurality of objects between a storage container mounted on the mounting portion and a stage; and

[0019] The second conveying device is configured to convey a plurality of objects between the stage and the tray supported by the tray supporting portion.

[0020] In the above configuration, each object is, for example, a wafer. The wafer as the object may be, for example, the wafer itself or may be held by a frame through tape, a film, or the like.

[0021] According to this configuration, two conveying devices (a first conveying device and a second conveying device) convey objects between a storage container and a pallet while cooperating with each other through a stage. Therefore, for example, while one conveying device performs an operation of conveying an unprocessed object toward a pallet (a supply conveying operation), the other conveying device can perform an operation of conveying a processed object toward a storage container (a return conveying operation). That is, the supply conveying operation and the return conveying operation can be performed simultaneously, and objects can be efficiently conveyed between a storage container for storing objects and a processing device for batch processing of objects.

[0022] Preferably, in the conveying system, the second conveying device is configured to convey n objects (where n is an integer greater than or equal to 2) at a time, and the tray is configured to hold n×m objects (where m is an integer greater than or equal to 1).

[0023] According to this configuration, the second conveying device conveys a plurality of objects at a time. Therefore, the second conveying device can efficiently convey objects between the loading platform and the pallet. In particular, an integral multiple of the number of objects that can be conveyed at a time by the second conveying device is the total number of objects held on the pallet. Therefore, the conveying efficiency of the second conveying device can be particularly improved.

[0024] Preferably, in the conveying system, the worktable includes: a movable worktable part, which is configured to be movable between a delivery position reachable by a second conveying device and a retracted position deviated from the delivery position; and a fixed worktable part, which is fixedly arranged at the delivery position and at a height position vertically deviated from the movable worktable part.

[0025] According to this configuration, the number of objects that can be mounted on the stage can be sufficiently ensured. Therefore, the transport efficiency of both the first transport device and the second transport device can be improved.

[0026] Preferably, the conveying system further comprises: a turning device configured to turn over the plurality of objects, wherein the first conveying device is configured to convey the plurality of objects between the storage container mounted on the mounting portion, the loading platform and the turning device.

[0027] According to this configuration, the objects stored in the storage container can be turned over and then mounted on the pallet. When the objects are turned over and then mounted on the pallet during the conveying process, it is difficult to shorten the cycle time during the conveying process, which may become a bottleneck and may reduce the operating rate of the processing equipment. However, in this configuration, the objects are conveyed between the storage container and the pallet while the two conveying devices (the first conveying device and the second conveying device) cooperate with each other through the stage. This enables the objects to be conveyed efficiently. Therefore, the cycle time during the conveying process can be substantially shortened even when the objects are turned over.

[0028] Preferably, the conveying system further comprises: a stocker configured to temporarily store the plurality of objects, wherein the first conveying device is configured to convey the plurality of objects between the storage container mounted on the mounting portion, the stage, and the stocker.

[0029] According to this configuration, the first conveying device temporarily stores the objects stored in the storage container or the objects mounted on the stage in the stocker as the case may be. This enables efficient conveyance of the objects.

[0030] Preferably, the conveying system further comprises: a tray conveying device configured to receive a tray holding processed objects from the processing equipment and to deliver a tray holding unprocessed objects to the processing equipment.

[0031] According to this configuration, the processing equipment does not need to have a mechanism for delivering the tray to the conveying system. Therefore, the conveying system can be applied to various processing equipment.

[0032] According to the present invention, objects can be efficiently transferred between a storage container storing the objects and a processing device performing batch processing on the objects. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a perspective view schematically showing the configuration of a conveying system according to one embodiment.

[0034] Figure 2 It is a plan view schematically showing the configuration of the conveying system.

[0035] Figure 3 is a diagram for explaining a first aspect of a series of operations performed in the transmission system.

[0036] Figure 4 It is a view for explaining a second aspect in a series of operations performed in the transmission system.

[0037] Figure 5 It is a view for explaining a second aspect in a series of operations performed in the transmission system.

[0038] Figure 6 It is a view for explaining a second aspect in a series of operations performed in the transmission system.

[0039] Figure 7 It is a view for explaining a second aspect in a series of operations performed in the transmission system.

[0040] Figure 8 It is a view for explaining a third aspect in a series of operations performed in the transmission system.

[0041] Fig. 9It is a view for explaining a third aspect in a series of operations performed in the transmission system.

[0042] Fig.10 It is a view for explaining a third aspect in a series of operations performed in the transmission system.

[0043] Fig.11 It is a view for explaining a third aspect in a series of operations performed in the transmission system.

[0044] Fig.12 It is a view for explaining a fourth aspect in a series of operations performed in the transmission system.

[0045] Fig.13 It is a view for explaining a fourth aspect in a series of operations performed in the transmission system.

[0046] Fig.14 It is a view for explaining a fourth aspect in a series of operations performed in the transmission system.

[0047] Fig.15 It is a view for explaining a fourth aspect in a series of operations performed in the transmission system.

[0048] Fig.16 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0049] Fig.17 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0050] Fig.18 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0051] Fig.19 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0052] Fig. 20 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0053] Fig.21 It is a view for explaining a fifth aspect in a series of operations performed in the transmission system.

[0054] Fig. 22 It is a view for explaining a sixth aspect in a series of operations performed in the transmission system.

[0055] Fig.23 It is a view for explaining a sixth aspect in a series of operations performed in the transmission system.

[0056] Fig.24 It is a view for explaining a sixth aspect in a series of operations performed in the transmission system.

[0057] Fig.25 It is a view for explaining a sixth aspect in a series of operations performed in the transmission system.

[0058] Fig.26 It is a view for explaining a sixth aspect in a series of operations performed in the transmission system.

[0059] Fig. 27 This is a view for explaining a wafer with a frame. DETAILED DESCRIPTION

[0060] Embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0061] <1. Overall structure>

[0062] The main reference Figure 1 and Figure 2 The overall configuration of a conveying system according to one embodiment is described. Figure 1 1 is a perspective view schematically showing the configuration of a conveying system 1 according to one embodiment. Figure 2 1 is a plan view schematically showing the configuration of the conveying system 1 .

[0063] The conveying system 1 is used in connection with the processing equipment 2 and is configured to convey the objects 90 between a storage container 9 for storing a plurality of objects 90 and the processing equipment 2 for batch processing of the plurality of objects 90. In the current embodiment, the objects 90 are wafers 91 held by a frame 93 through an adhesive tape 92, i.e., framed wafers 90 (see Fig. 27 ). In addition, the storage container 9 is a closed container for conveying and storing the framed wafer 90. The storage container 9 includes a main body 901 for storing a plurality of framed wafers 90 in a horizontal posture in a plurality of stages and a cover 902 for closing an opening provided on a side wall of the main body 901.

[0064] Before describing the conveying system 1 in detail, the processing equipment 2 connected to the conveying system 1 will be described.

[0065] The processing device 2 includes a processing section 21 that performs a predetermined process on a plurality of framed wafers 90 arranged in a planar form on a tray 8 (see FIG. Figure 3). The tray 8 used here has a substantially square shape in a plan view and can support nine framed wafers 90 arranged side by side in 3 columns × 3 rows. Although not shown, the bottom surface of the tray 8 (mounting surface for the framed wafers 90) has openings arranged in 3 columns × 3 rows. At least a portion of the wafer 91 of each framed wafer 90 overlaps with each opening. The framed wafer 90 is mounted on the tray 8 so that the surface (circuit forming surface) of the wafer 91 faces downward and points to each opening. In the processing section 21, a predetermined process is performed on the surface of the wafer 91 from the lower side of the tray 8 via each opening.

[0066] The load lock 22 as a vacuum standby room is connected to the processing section 21, and the conveying system 1 is connected to the processing section 21 via the load lock 22. A door 221 is provided at a portion of the load lock 22 connected to the conveying system 1 (or the processing section 21). By closing the door 221, the internal space of the load lock 22 is hermetically sealed. In addition, the load lock 22 is provided with a tray support pin group 222 for supporting the tray 8 in a horizontal posture. In the following, for the sake of convenience of explanation, the side where the conveying system 1 is connected to the load lock 22 is referred to as the "front side". In addition, the horizontal direction orthogonal to the front-rear direction is referred to as the "left-right direction".

[0067] Next, the conveying system 1 will be described in detail.

[0068] The transfer system 1 includes a plurality of load ports 11 , a first transfer section 12 , a second transfer section 13 , and a controller 14 that controls these sections 11 , 12 , 13 .

[0069] The loading port 11 is connected to the front side of the first conveying section 12. That is, one or more (five in the example of the drawing) openings T1 are formed in the front wall portion of the housing (first housing) 121 of the first conveying section 12, and the loading port 11 is airtightly attached to close the corresponding openings T1.

[0070] The first conveying section 12 is disposed adjacent to the front side of the second conveying section 13. An opening T2 is formed in the rear wall portion of the first housing 121. An opening T3 is formed in the front wall portion of the housing (second housing) 131 of the second conveying section 13 at a position corresponding to the opening T2. That is, the internal spaces of the two housings 121 and 131 are connected to each other through the openings T2 and T3. In addition, an opening T4 is formed in the rear wall portion of the second housing 131. The opening T4 is hermetically closed by the door 221 of the load lock section 22.

[0071] In the following, reference will be made to Figure 1 and Figure 2 The configurations of the respective parts 11 to 14 included in the conveying system 1 are described more specifically.

[0072] (Loading port 11)

[0073] The loading port 11 is a device for communicating the internal space of the storage container 9 with the internal space of the first housing 121 without exposing the framed wafer 90 stored in the storage container 9 to the external atmosphere. The loading port 11 is provided with a mounting portion 31 on which the storage container 9 is mounted. If necessary, the mounting portion 31 may be provided with a guide pin for guiding the storage container 9 to a predetermined position, a fixing pin for fixing the storage container 9 to a predetermined position, a gas supply nozzle for supplying a predetermined gas to the internal space of the storage container 9, an exhaust nozzle for exhausting the gas in the internal space of the storage container 9, a drive mechanism for sliding the mounting portion 31 forward and backward, and the like (all of which are not shown).

[0074] like Figure 1 As shown, the mounting portion 31 is provided on the front surface of a panel 32 as a flat plate-shaped member. The panel 32 is slightly larger than the opening T1 formed in the first housing 121. The loading port 11 is connected to the first housing 121 by attaching the panel 32 to hermetically close the opening T1.

[0075] The panel 32 is formed with an opening 321 through which the framed wafer 90 passes. A door portion 33 capable of hermetically closing the opening 321 and a door portion drive mechanism (not shown) for moving the door portion 33 between a closed position and an open position are provided on the rear side of the panel 32. In addition, the door portion 33 is provided with a lid holding mechanism that removes the lid 902 of the storage container 9 mounted on the mounting portion 31 from the main body portion 901 (releases the latch) and connects the lid 902 to the door portion 33 as a whole (docking).

[0076] The operation of the loading port 11 is as follows. When the storage container 9 containing the unprocessed framed wafer 90 is placed on the mounting portion 31 by an external robot such as AMHS, PGV, etc., the mounting portion 31 slides backward so that the lid 902 and the door portion 33 of the storage container 9 mounted thereon are sufficiently close to each other. Then, the lid holding mechanism provided on the door portion 33 removes the lid 902 of the storage container 9 from the main body 901 and connects the lid 902 to the door portion 33 as one body. Subsequently, the door portion driving mechanism moves the door portion 33 together with the lid 902 formed as one body with the door portion 33 from the closed position where the opening 321 is hermetically closed to the open position where the opening 321 is fully opened. Therefore, the internal space of the main body 901 is communicated with the internal space of the first shell 121 through the opening 321. It goes without saying that by performing the opposite operation, the main body 901 of the storage container 9 is closed by the lid 902, and the opening 321 is closed by the door portion 33, that is, the storage container 9 is separated from the first shell 121.

[0077] (First Conveying Unit 12)

[0078] The first conveying section 12 is constructed to include, inside the first housing 121, a stage 41 on which a plurality of framed wafers 90 are placed, a stocker 42 for temporarily storing the framed wafers 90, a flipping device 43 for flipping the framed wafers 90, a conveying device (first conveying device) 44 for conveying the framed wafers 90 between these parts 41, 42 and 43, etc. In addition, a fan filter unit (FFU) (not shown) is provided inside the first housing 121, so that a clean gas downflow is formed in the internal space of the first housing 121.

[0079] The stage 41 includes a fixedly mounted stage portion (fixed stage portion) 411 , a movably mounted stage portion (movable stage portion) 412 , and a stage driving mechanism 413 for moving the movable stage portion 412 .

[0080] The fixed stage portion 411 is a long flat plate-shaped member and is constructed so that three framed wafers 90 can be placed in a row side by side along the longitudinal direction on its upper surface. Support pins 4111 for supporting each framed wafer 90 placed on the upper surface of the fixed stage portion 411 are arranged on the upper surface. The fixed stage portion 411 is fixedly arranged at a position P1 facing the opening T2 near the rear wall portion of the first shell 121 so that its longitudinal direction extends in the left-right direction. The position P1 facing the opening T2 is a position accessible to the second conveying device 53 described later, and is also referred to as the "delivery position P1" hereinafter.

[0081] Like the fixed stage portion 411, the movable stage portion 412 is a long flat plate-shaped member and is constructed so that three framed wafers 90 can be placed in a row side by side in the longitudinal direction on its upper surface. Support pins 4121 for supporting each framed wafer 90 placed on the upper surface of the movable stage portion 412 are provided on the upper surface. The movable stage portion 412 is provided near the rear wall portion of the first shell 121 so that its longitudinal direction extends in the left-right direction. Figure 2 , the movable stage portion 412 is disposed at a position (hereinafter also referred to as a "retracted position") P2 that is offset from the opening T2 (i.e., a position that is offset from the delivery position P1 and does not overlap therewith when viewed from above). The movable stage portion 412 is configured to be movable between the retracted position P2 and a position facing the opening T2 (i.e., the delivery position P1) by moving in the left-right direction (i.e., the extension direction) under the driving action of the stage driving mechanism 413 described below (see FIG. 4 ). Fig. 9). However, the movable stage portion 412 is disposed at a height position vertically offset from the fixed stage portion 411. Specifically, the movable stage portion 412 is disposed at a position offset to the upper side of the fixed stage portion 411. Therefore, the stage portions 411 and 412 can be disposed together at the delivery position P1 without interfering with each other.

[0082] The stage driving mechanism 413 is a mechanism for moving the movable stage portion 412 and includes a stage support portion 4131 for supporting the stage, a pair of guide rails 4132 and 4132 placed on the bottom surface of the first housing 121 and extending in the left-right direction, and a linear motion mechanism (not shown) that allows the stage support portion 4131 to move along the pair of guide rails 4132 and 4132. For example, the linear motion mechanism may be constructed to include a ball screw mechanism and a motor that provides a driving force to the ball screw mechanism (this also applies hereinafter). The movable stage portion 412 is supported by the stage support portion 4131 in a cantilever manner at one end thereof and moves between the delivery position P1 and the retracted position P2 as the stage support portion 4131 moves along the pair of guide rails 4132 and 4132.

[0083] The stocker 42 is a storage portion (so-called buffer portion) for temporarily storing a plurality of wafers with frames 90 and is provided near the delivery position P1. Specifically, for example, the stocker 42 is a box-shaped container with an open front side and is configured to store twelve or thirteen wafers with frames 90 in a horizontal posture in a plurality of stages.

[0084] The flipping device 43 is a device for flipping the framed wafer 90 and is arranged on the opposite side of the stocker 42 with the stage 41 located in the middle. The term "flipping" used herein refers to the conversion of a posture in which the surface (circuit forming surface) of the wafer 91 of the framed wafer 90 faces upward and a posture in which the surface of the wafer 91 faces downward. Specifically, the flipping device 43 is constructed to include, for example, a clamping member 431 that holds the frame 93 of the framed wafer 90 by clamping in the horizontal direction and a driving component 432 that rotates the clamping member 431 around a horizontal axis. In this construction, while the clamping member 431 holds the framed wafer 90 in a horizontal posture, the framed wafer 90 flips as the driving component 432 rotates the clamping member 431 180 degrees around the horizontal axis.

[0085] The first conveying device 44 is a device for conveying the wafer with a frame 90 and includes a main body portion 441, a guide rail 442 provided on the front wall portion of the first housing 121 and extending in the left-right direction, and a linear motion mechanism (not shown) that allows the main body portion 441 to move along the guide rail 442. As the main body portion 441 moves along the guide rail 442, the main body portion 441 moves in the left-right direction.

[0086] Two arms 443 and 443 are provided on the main body part 441. Each arm 443 is provided at a base end portion so as to be rotatable around an axis perpendicular to the main body part 441 and is configured to rotate by rotating around the base end portion. In addition, each arm 443 is formed to rotate horizontally by connecting a plurality of link elements and is configured to be telescopic.

[0087] A gripper 444 is provided at the end of each arm 443. The gripper 444 is arranged at the base end to be rotatable around an axis perpendicular to the arm 443. In the current embodiment, the gripper 444 is configured to hold the frame 93 of the framed wafer 90 in a substantially horizontal posture by mechanically clamping the frame 93 of the framed wafer 90. However, the clamping method of the gripper 444 is not limited thereto and may be a vacuum adsorption method or the like.

[0088] By adopting this structure, the first conveying device 44 can convey the framed wafer 90 between the storage container 9 installed on the mounting portion 31 of the loading port 11, the stage 41 (specifically, the fixed stage part 411 and the movable stage part 412), the stocker 42 and the flipping device 43.

[0089] (Second Conveying Unit 13)

[0090] The second conveying section 13 is configured to include a tray support section 51 for supporting the tray 8, a tray support section driving mechanism 52 for moving the tray support section 51 within the second housing 131, a conveying device (second conveying device) 53 for conveying the framed wafer 90 between the stage 41 of the first conveying section 12 and the tray 8 supported by the tray support section 51, etc. In addition, a fan filter unit or the like (not shown) is provided inside the second housing 131, so that a clean gas downflow is formed in the internal space of the second housing 131.

[0091] The tray support portion 51 is a member that supports the tray 8 in a horizontal posture. Specifically, the tray support portion 51 is a member formed by combining three long flat plate members into a U shape and includes a vertical flat plate member 511 arranged to extend in the left-right direction and a pair of horizontal flat plate members 512 and 512 connected to both ends of the vertical flat plate member 511 and arranged to extend in the front-rear direction. By setting the upper surfaces of the three flat plate members 511, 512 and 512 to be substantially flush with each other, a support surface for supporting the tray 8 is formed. Positioning members 513 for positioning the four corners of the tray 8 supported thereon are provided on the support surface.

[0092] The tray support portion 51 is configured to be movable between a position Q1 facing the opening T3 and a position Q2 in the load lock portion 22 by moving in the front-rear direction under the driving action of the tray support portion driving mechanism 52 described later (see FIG. Figure 5 ). In this regard, the position Q1 facing the opening T3 is a position accessible to the second conveying device 53 described later. The position Q1 is hereinafter also referred to as the "delivery position Q1". On the other hand, the position Q2 in the load lock portion 22 is a position where the pallet supporting pin group 222 provided in the load lock portion 22 is provided between a pair of horizontal plate members 512 and 512. Hereinafter, the position Q2 is also referred to as the "pin group position Q2".

[0093] The tray support driving mechanism 52 is a mechanism for moving the tray support 51 and includes a movable base 521 that supports the tray support 51. A pair of guide rails 522 and 522 extending in the left-right direction are placed on the upper surface of the movable base 521 (see FIG. Figure 5 The tray support portion 51 can slide along the pair of guide rails 522 and 522. In addition, a linear motion mechanism (not shown) for moving the tray support portion 51 along the pair of guide rails 522 and 522 is provided between the pair of guide rails 522 and 522 and the tray support portion 51.

[0094] In addition, a pair of guide rails 523 and 523 extending in the left-right direction are placed on the bottom plate surface of the second housing 131 (see FIG. Figure 5 The movable base 521 can slide along the pair of guide rails 523 and 523. In addition, a linear motion mechanism (not shown) for moving the movable base 521 along the pair of guide rails 523 and 523 is provided between the pair of guide rails 523 and 523 and the movable base 521.

[0095] In this configuration, the movable base 521 is disposed in the second housing 131, and the tray support 51 is disposed at a position where the tray support 51 overlaps with the movable base 521, thereby causing the tray support 51 to be disposed at the delivery position Q1. From this state, the tray support 51 moves backward along the pair of guide rails 522 and 522 (refer to Figure 4 ), and the movable base 521 moves backward along a pair of guide rails 523 and 523, thereby setting the tray support portion 51 at the pin group position Q2 (see Figure 5 ).

[0096] As the tray support 51 supporting the tray 8 moves between the delivery position Q1 and the pin group position Q2, the tray 8 is transported between the conveying system 1 and the processing equipment 2. That is, the tray support 51 and the tray support drive mechanism 52 constitute a tray transport device that transports the tray 8 between the conveying system 1 and the processing equipment 2.

[0097] The second conveying device 53 is a device for conveying the wafer with a frame 90 and includes a pair of guide rail groups 531 and 531 placed on the bottom plate surface of the second housing 131 and extending in the left-right direction, a movable block 532 provided in each guide rail group 531, and a linear motion mechanism (not shown) that allows the movable block 532 to move along the guide rail group 531. Each movable block 532 is provided with a pair of extendable lifting columns (not shown), and a frame portion 533 having a gantry shape in a plan view that bridges between the upper ends of the pair of lifting columns is provided. In addition, three adsorption portions 534, 534, and 534 provided on the left and right sides are supported on the left and right extension portions of the frame portion 533.

[0098] Each suction portion 534 is configured to hold the wafer with a frame 90 in a substantially horizontal posture by holding a portion of the frame 93 of the wafer with a frame 90 in a vacuum suction manner.

[0099] The second conveyor 53 can convey three wafers with frames 90 at a time between the stage 41 and the tray 8 supported by the tray support 51. For example, when the wafers with frames 90 held in the tray 8 supported by the tray support 51 are conveyed onto the stage 41, the second conveyor 53 performs the following operations.

[0100] First, each movable block 532 is moved along the guide rail group 531 so that the three suction parts 534, 534, and 534 provided on the frame part 533 can be moved to a position (tray approach position) where the three suction parts 534, 534, and 534 overlap with the framed wafer 90 on the tray 8 supported by the tray support part 51 provided at the delivery position Q1 when viewed from above (see Figure 8 ). Then, the lifting column is retracted so that each suction portion 534 can move downward to a position close enough to each wafer with a frame 90. In this state, the suction force of each suction portion 534 is applied. Then, the frame 93 is suctioned by the suction portion 534, and the wafer with a frame 90 is held by the suction portion 534. In the current embodiment, it is assumed that the suction states of the three suction portions 534, 534, and 534 are switched synchronously, thereby holding the three wafers with a frame 90 held in the tray 8 at the same time.

[0101] Then, the lifting column is extended so that each suction portion 534 can move upward together with the framed wafer 90. Thereafter, each movable block 532 is moved along the guide rail group 531 so that each suction portion 534 can be set at a position (stage approach position) where each suction portion 534 overlaps with the fixed stage portion 411 (or the movable stage portion 412) set at the delivery position P1 when viewed from above (see Figure 8 ). Then, the lifting column is retracted so that the wafer with a frame 90 held by each suction portion 534 can be moved downward to a position close enough to the fixed stage portion 411. Thereafter, the suction force of each suction portion 534 is stopped. In addition, in this case, the suction states of the three suction portions 534, 534, and 534 are switched synchronously, thereby releasing the three wafers with a frame 90 at the same time and delivering them to the support pins 4111 provided in the fixed stage portion 411.

[0102] By performing the above operation, the three wafers with frames 90 held in the tray 8 are collectively transferred to the stage 41. Furthermore, by performing the reverse operation to the above, the three wafers with frames 90 placed on the stage 41 are collectively transferred to the tray 8.

[0103] (Controller 14)

[0104] The controller 14 controls the operation of each component included in the conveying system 1. The configuration of the controller 14 as hardware is the same as that of a general computer. That is, the controller 14 includes a CPU that executes various arithmetic processes, a ROM that is a read-only memory that stores basic programs, a RAM that is a read-write memory that stores various information, a magnetic disk that stores control software, data, etc., etc. As the CPU of the controller 14 executes a predetermined processing program, a predetermined conveying operation is performed in the conveying system 1.

[0105] <2. Operation of the Conveying System 1>

[0106] The conveying system 1 performs a predetermined conveying operation of placing unprocessed wafers with frames 90 stored in the storage container 9 side by side on the tray 8 and storing the processed wafers with frames 90 held on the tray 8 in the storage container 9. Figures 3 to 26 An example of a conveying operation performed in the conveying system 1 is described. A series of operations described below are performed under the control of the controller 14.

[0107] In the following, a series of operations performed by the transmission system 1 are described by dividing them into six aspects. However, this is only for the convenience of easy understanding of the description. That is, in actual operation, each aspect does not have to be performed separately in time. For example, it is possible to allow the last part of one aspect and the first part of the next aspect to be performed in parallel.

[0108] (First aspect)

[0109] First, the storage container 9 containing a plurality of unprocessed framed wafers 90 is mounted on the mounting portion 31 of the loading port 11. Then, the loading port 11 performs a predetermined operation so that the internal space of the main body portion 901 of the storage container 9 communicates with the internal space of the first housing 121 through the opening 321 ( Figure 3 ).

[0110] On the other hand, in the processing apparatus 2, the tray 8 holding nine processed framed wafers 90 is moved from the processing section 21 to the load lock section 22 and supported by the tray support pin group 222 provided in the load lock section 22. Then, the door 221 closing the opening T4 is opened so that the internal space of the load lock section 22 and the internal space of the second housing 131 communicate with each other ( Figure 3 ).

[0111] (Second aspect)

[0112] When the inner space of the storage container 9 mounted on the mounting portion 31 is communicated with the inner space of the first housing 121, the first conveying device 44 takes out the unprocessed wafer with frame 90 stored in the storage container 9 and delivers the unprocessed wafer with frame 90 to the flipping device 43 ( Figure 4 After the flipping device 43 flips the framed wafer 90, the first conveying device 44 receives the flipped framed wafer 90 and conveys it to the movable stage portion 412 disposed at the retracted position P2 ( Figure 5 and Figure 6 ). This operation is repeated to mount three unprocessed framed wafers 90 on the movable stage portion 412 ( Figure 7 ).

[0113] In parallel with the above operation, the tray support driving mechanism 52 moves the tray support 51 from the delivery position Q1 to the pin group position Q2 ( Figure 4 and Figure 5 ). The pallet support pin group 222 provided in the load lock portion 22 is capable of protruding and retracting. As the pallet support pin group 222 enters the retracted state while the pallet support portion 51 is set at the pin group position Q2, the pallet 8 is transferred from the pallet support pin group 222 to the pallet support portion 51. Thereafter, the pallet support portion drive mechanism 52 moves the pallet support portion 51 from the pin group position Q2 to the delivery position Q1 ( Figure 6 and Figure 7 ). Thus, the tray 8 is moved out of the load lock 22 and into the second housing 131. After the tray 8 is moved out, the door 221 of the load lock 22 is closed.

[0114] In this way, we get Figure 7That is, the movable stage portion 412 is filled with three unprocessed wafers with frames 90 , and the tray 8 is set in the second housing 131 .

[0115] (Third aspect)

[0116] The first conveyor 44 then takes out the fourth wafer with a frame 90 stored in the storage container 9, delivers the fourth wafer with a frame 90 to the flipping device 43, and receives the flipped fourth wafer with a frame 90 from the flipping device 43. Since the movable stage portion 412 is already filled with three wafers with a frame 90, the fourth wafer with a frame 90 cannot be mounted on the movable stage portion 412. Therefore, the first conveyor 44 flips the fourth wafer with a frame and subsequent wafers with a frame 90 and stores them in the stocker 42 ( Figure 8 The first conveyor 44 repeats this operation until the stocker 42 stores six unprocessed wafers with frames 90 ( Figures 8 to 11 ).

[0117] In parallel with the above operation, the second conveyor 53 conveys the three front-row wafers 90 of the nine processed wafers 90 with frames held in the tray 8 to the fixed stage portion 411 ( Figure 8 Thereafter, the stage driving mechanism 413 moves the movable stage portion 412 from the retracted position P2 to the delivery position P1 ( Fig. 9 After the movable stage portion 412 is set at the delivery position P1, the second conveyor 53 conveys the three unprocessed framed wafers 90 mounted on the movable stage portion 412 to an empty position (the front row) on the tray 8 ( Fig.10 ).

[0118] In this way, we get Fig.11 That is, the tray 8 holds three unprocessed wafers with frames 90 and six processed wafers with frames 90. In addition, the movable stage portion 412 is empty, and the fixed stage portion 411 is filled with three processed wafers with frames 90. In addition, six unprocessed wafers with frames 90 are stored in the stocker 42.

[0119] (Fourth aspect)

[0120] After the three processed wafers with frames 90 are mounted on the fixed stage part 411, the first conveyor 44 sequentially conveys the processed wafers with frames 90 mounted on the fixed stage part 411 to the stocker 42 and sequentially conveys the unprocessed wafers with frames 90 stored in the stocker 42 to the vacant positions on the fixed stage part 411. This operation is repeated to mount three unprocessed wafers with frames 90 ( Figure 12 to Figure 14 ).

[0121] In parallel with the above operation, the second conveyor 53 conveys the three framed wafers 90 located in the front row among the six processed framed wafers 90 held on the tray 8 to the movable stage portion 412 ( Fig.12 Thereafter, the stage driving mechanism 413 moves the movable stage portion 412 from the delivery position P1 to the retracted position P2 ( Fig.13 After the movable stage portion 412 is set at the retracted position P2, the second conveyor 53 conveys the three unprocessed framed wafers 90 mounted on the fixed stage portion 411 to the empty position (middle row) on the tray 8 ( Fig.14 ).

[0122] In this way, we get Fig.15 That is, the tray 8 holds six unprocessed wafers with frames 90 and three processed wafers with frames 90. In addition, the movable stage portion 412 is filled with three processed wafers with frames 90, and the fixed stage portion 411 is empty. In addition, the stocker 42 stores three processed wafers with frames 90 and three unprocessed wafers with frames 90.

[0123] (Fifth Aspect)

[0124] After the processed wafers with frames 90 are mounted on the movable stage portion 412, the first conveyor 44 sequentially conveys the processed wafers with frames 90 mounted on the movable stage portion 412 to the stocker 42 and sequentially conveys the unprocessed wafers with frames 90 stored in the stocker 42 to empty positions on the movable stage portion 412. This operation is repeated to mount three unprocessed wafers with frames 90 ( Figures 16 to 18 After the three unprocessed wafers with frames 90 are mounted on the movable stage portion 412, the first conveying device 44 then takes out the processed wafers with frames 90 stored in the stocker 42, delivers the processed wafers with frames 90 to the flipping device 43, receives the flipped wafers with frames 90, and transfers the flipped wafers with frames 90 to the storage container 9 mounted on the mounting portion 31 ( Figures 19 to 21 ).

[0125] In parallel with the above operation, the second conveyor 53 conveys the remaining three processed framed wafers 90 held on the tray 8 to the fixed stage portion 411 ( Fig.16 ). Thereafter, when three unprocessed framed wafers 90 are mounted on the movable stage portion 412 ( Fig.18 ), the stage driving mechanism 413 moves the movable stage portion 412 from the retracted position P2 to the delivery position P1 ( Fig.19After the movable stage portion 412 is set at the delivery position P1, the second conveyor 53 conveys the three unprocessed framed wafers 90 mounted on the movable stage portion 412 to an empty position (rear row) on the tray 8 ( Fig. 20 ).

[0126] In this way, we get Fig.21 That is, nine unprocessed wafers with frames 90 remain on the tray 8. In addition, the movable stage portion 412 is empty, and the fixed stage portion 411 is filled with three processed wafers with frames 90. In addition, only zero to six processed wafers with frames 90 remain in the stocker 42.

[0127] (Sixth Aspect)

[0128] The first conveyor 44 repeats the operation of conveying the processed wafers with frames 90 from the stocker 42 to the storage container 9 until the processed wafers with frames 90 are used up. That is, the first conveyor 44 repeats the operation of taking out the processed wafers with frames 90 stored in the stocker 42, delivering the processed wafers with frames 90 to the flipping device 43, receiving the flipped wafers with frames 90, and conveying the flipped wafers with frames 90 to the storage container 9 mounted on the mounting portion 31 ( Fig. 22 Then, when the processed wafer with a frame 90 disappears from the stocker 42, the first conveying device 44 subsequently holds the processed wafer with a frame 90 mounted on the fixed stage portion 411, delivers the processed wafer with a frame 90 to the flipping device 43, receives the flipped wafer with a frame 90 from the flipping device 43, and conveys the flipped wafer with a frame 90 to the storage container 9 mounted on the mounting portion 31. By repeating this operation, all three processed wafers with a frame 90 mounted on the fixed stage portion 411 are stored in the storage container 9 ( Figure 23 to Figure 25 ).

[0129] In parallel with the above operation, the tray support driving mechanism 52 moves the tray support 51 from the delivery position Q1 to the pin group position Q2 ( Fig. 22 and Fig.23 ). When the tray support part 51 is set at the pin group position Q2, the tray support pin group 222 is changed to a protruding state, so that the tray 8 can be transferred from the tray support part 51 to the tray support pin 222. Thereafter, the tray support part driving mechanism 52 moves the tray support part 51 from the pin group position Q2 to the delivery position Q1 ( Fig.24 and Fig.25 ). Thus, the tray 8 is moved from the second housing 131 into the load lock portion 22 .

[0130] Thereafter, under the control of the processing device 2, the tray 8 is moved from the load lock section 22 into the processing section 21, and a predetermined process is performed collectively on the nine framed wafers 90 held on the tray 8 ( Fig.26 ).exist Fig.26 In the state shown, the nine unprocessed framed wafers 90 stored in the storage container 9 in the above-mentioned "first aspect" are held on the tray 8 and processed by the processing equipment 2, and the nine processed framed wafers 90 held on the tray in the "first aspect" are stored in the storage container 9.

[0131] In the transfer system 1 , by repeating the above-described series of operations, the unprocessed wafers with frames 90 stored in the storage container 9 are sequentially transferred to the tray 8 , and the processed wafers with frames 90 held on the tray 8 are sequentially stored in the storage container 9 .

[0132] However, the above series of transfer operations is only an example, and the series of transfer operations performed by the transfer system 1 can be arbitrarily set according to the processing method, the number of wafers with frames 90 held on the tray 8, the number of wafers with frames 90 stored in the storage container 9, etc.

[0133] <3. Effect>

[0134] The conveying system 1 according to the above-described embodiment conveys a plurality of framed wafers 90 as objects between a storage container 9 for storing framed wafers 90 and a processing device 2 for batch processing the framed wafers 90 held on a tray 8. The conveying system 1 includes a mounting portion 31 on which the storage container 9 is mounted, a stage 41 on which the framed wafers 90 are mounted, a tray supporting portion 51 configured to support the tray 8, a first conveying device 44 configured to convey the framed wafers 90 between the storage container 9 mounted on the mounting portion 31 and the stage 41, and a second conveying device 53 configured to convey the framed wafers 90 between the stage 41 and the tray 8 supported by the tray supporting portion 51.

[0135] According to this configuration, two conveying devices (the first conveying device 44 and the second conveying device 53) convey the wafers with frames 90 between the storage container 9 and the tray 8 while cooperating with each other through the stage 41. Therefore, for example, while one conveying device performs an operation of conveying an unprocessed wafer with frame 90 toward the tray 8 (supply conveying operation), the other conveying device can perform an operation of conveying a processed wafer with frame 90 toward the storage container 9 (return conveying operation). That is, the supply conveying operation and the return conveying operation can be performed simultaneously, and the wafers with frames 90 can be efficiently conveyed between the storage container 9 for storing the wafers with frames 90 and the processing equipment 2 for batch processing the wafers with frames 90.

[0136] Furthermore, in the conveying system 1 according to the above-described embodiment, the second conveying device 53 is configured to convey three wafers with frames 90 at a time, and the tray 8 is configured to hold 3×3 wafers with frames 90 .

[0137] According to this configuration, the second conveyor 53 conveys a plurality of framed wafers 90 at a time. Therefore, the second conveyor 53 can efficiently convey the framed wafers 90 between the stage 41 and the tray 8. In particular, an integral multiple of the number of framed wafers 90 that can be conveyed at a time by the second conveyor 53 is the total number of framed wafers 90 held on the tray 8. Therefore, the conveying efficiency of the second conveyor 53 can be particularly improved.

[0138] In addition, in the conveying system 1 according to the above-mentioned embodiment, the stage 41 includes a movable stage portion 412 which is configured to be movable between a delivery position P1 reachable by the second conveying device 53 and a retracted position P2 deviated from the delivery position P1, and a fixed stage portion 411 which is fixedly arranged at the delivery position P1 and at a height position vertically deviated from the movable stage portion 412.

[0139] According to this configuration, the number of wafers with frames 90 that can be mounted on the stage 41 can be sufficiently ensured. Therefore, the transfer efficiency of both the first conveyor 44 and the second conveyor 53 can be improved. In particular, in the above-described embodiment, the maximum number of wafers with frames 90 that can be mounted on the stage parts 411 and 412 matches the number of wafers with frames 90 that can be transferred at one time by the second conveyor 53. This can particularly improve the transfer efficiency.

[0140] The conveying system 1 according to the above embodiment further includes a reversing device 43 configured to reverse the wafer with frame 90 . The first conveying device 44 is configured to convey the wafer with frame 90 between the storage container 9 mounted on the mounting portion 31 , the stage 41 , and the reversing device 43 .

[0141] According to this configuration, the framed wafer 90 stored in the storage container 9 can be turned over and then mounted on the tray 8. When the framed wafer 90 is turned over and then mounted on the tray 8 during the transfer process, it is difficult to shorten the cycle time during the transfer process, which may become a bottleneck and may reduce the operation rate of the processing equipment 2. However, in this configuration, the framed wafer 90 is transferred between the storage container 9 and the tray 8 while the two conveying devices (the first conveying device 44 and the second conveying device 53) cooperate with each other through the stage 41. This enables efficient transfer of the framed wafer 90. Therefore, the cycle time during the transfer process can be sufficiently shortened even when the framed wafer 90 is turned over.

[0142] The conveying system 1 according to the above embodiment further includes a stocker 42 for temporarily storing the wafer with frame 90. The first conveying device 44 is configured to convey the wafer with frame 90 between the storage container 9 mounted on the mounting portion 31, the stage 41, and the stocker 42.

[0143] According to this configuration, the first conveying device 44 temporarily stores the wafer with frame 90 stored in the storage container 9 or the wafer with frame 90 mounted on the stage 41 in the stocker 42 as the case may be. This enables efficient conveyance of the wafer with frame 90.

[0144] In the conveying system 1 according to the above-described embodiment, the pallet conveying device that conveys the pallet 8 between the conveying system 1 and the processing device 2 is composed of a pallet supporting portion 51 and a pallet supporting portion driving mechanism 52. The pallet conveying device is configured to receive the pallet 8 holding the processed wafers with frames 90 from the processing device 2 and to deliver the pallet 8 holding the unprocessed wafers with frames 90 to the processing device 2.

[0145] According to this configuration, the processing apparatus 2 does not need to have a mechanism for delivering the tray 8 to the conveying system 1. Therefore, the conveying system 1 can be applied to various processing apparatuses 2.

[0146] <4. Variants>

[0147] In the above-described embodiment, each stage portion 411 or 412 included in the stage 41 can mount a maximum of three framed wafers 90, but the maximum number of framed wafers 90 that can be mounted on each stage portion 411 or 412 is not necessarily three. As described above, in order to improve the transfer efficiency, it is preferable that the maximum number of framed wafers 90 that can be mounted on the stage portion 411 or 412 matches the number of framed wafers 90 that the second transfer device 53 can transfer at one time.

[0148] In the above-described embodiment, the stage 41 includes a movable stage portion 412 and a fixed stage portion 411. However, the movable stage portion 412 does not necessarily have to be provided. Instead, a plurality of movable stage portions 412 may be provided. In this case, the fixed stage portion 411 and the plurality of movable stage portions 412 are all provided at height positions that are vertically deviated from each other, so that all of the stage portions 411 and 412 can be provided at the delivery position P1 without interfering with each other.

[0149] In the above-described embodiment, the second conveyor 53 is configured to convey three framed wafers 90 at a time. However, the second conveyor 53 may be configured to convey the framed wafers 90 one by one or may be configured to convey two or four or more framed wafers 90 at a time. As described above, in order to improve the conveying efficiency of the second conveyor 53, it is preferred that an integral multiple of the number of framed wafers 90 that can be conveyed at a time by the second conveyor 53 is equal to the total number of framed wafers 90 held on the tray 8.

[0150] The conveying system 1 according to the above embodiment is provided with the flipping device 43. However, the flipping device 43 is not an essential element and can be omitted. For example, the flipping device 43 can be omitted in the case where the processing equipment 2 is configured to process the framed wafer 90 in the posture stored in the storage container 9.

[0151] The transfer system 1 according to the above embodiment is provided with the stocker 42. However, the stocker 42 is not an essential element and can be omitted. For example, the stocker 42 can be omitted when the stage 41 can mount a sufficient number of wafers with frames 90.

[0152] The conveying system 1 according to the above-described embodiment is provided with five load ports 11. However, the number of the load ports 11 is not limited to five.

[0153] In the conveying system 1 according to the above embodiment, the first conveying device 44 includes two sets of arms 443 and grippers 444 connected to the arms 443. However, the first conveying device 44 includes one set or three or more sets of arms 443 and grippers 444 connected to the arms 443.

[0154] In the conveying system 1 according to the above-described embodiment, the tray support driving mechanism 52 is not an essential element and can be omitted. For example, the tray support driving mechanism 52 can be omitted in the case where the processing equipment is provided with a mechanism for delivering the tray to the conveying system.

[0155] In the above-described embodiment, the object conveyed by the conveying system 1 is a wafer 91 held by a ring frame 93 via an adhesive tape 92. However, the frame 93 is not limited to a ring shape, and may be a polygonal frame shape, etc. In addition, the object does not have to be a framed wafer 90, and may be a wafer not held by a frame. Alternatively, the object may not be a wafer.

[0156] Various modifications may be made to other configurations without departing from the scope of the present invention.

[0157] Industrial applications of the present invention

[0158] The present invention can be used as a conveying system for conveying objects (usually wafers, or wafers held in a frame by tape, film, etc.) between a storage container for accommodating the objects and a processing device for processing the objects.

[0159] Description of Reference Numerals

[0160] 1: Conveyor system; 11: Load port; 31: Mounting unit; 12: First conveyor; 41: Stage; 411: Fixed stage portion; 412: Movable stage portion; 413: Stage drive mechanism; 42: Stocker; 43: Turning device; 44: First conveyor; 13: Second conveyor; 51: Tray support; 52: Tray support drive mechanism; 53: Second conveyor; 14: Controller; 2: Processing equipment; 21: Processing unit; 22: Load lock unit; 8: Tray; 9: Storage container; 90: Object (wafer with frame)

Claims

1. A conveying system for conveying a plurality of objects between a storage container configured to store the plurality of objects and a processing device configured to perform batch processing on the plurality of objects, the plurality of objects being held on a tray in an arrangement of n rows by m columns, wherein n is an integer greater than or equal to 2, and wherein m is an integer greater than or equal to 1, the conveying system comprising: a mounting portion on which the storage container is mounted; a stage on which the plurality of objects are mounted; a tray support portion configured to support the tray; a first conveying device configured to convey the plurality of objects between the storage container mounted on the mounting portion and the stage; as well as a second conveying device configured to convey the plurality of objects between the stage and the tray supported by the tray supporting portion, wherein the stage includes a movable stage portion, which is configured to be movable between a delivery position that can be reached by the first conveying device and the second conveying device and a retracted position that is offset from the delivery position in the column direction, the first conveying device can reach the retracted position and the second conveying device cannot reach the retracted position, and The second conveying device is configured to hold n objects arranged in a column direction at the delivery position and to convey the n objects one at a time in a row direction between the stage and the tray.

2. The conveying system according to claim 1, wherein: The stage further comprises: A fixed stage portion is fixedly disposed at the delivery position and at a height position vertically offset from the movable stage portion.

3. The conveying system according to claim 1 or 2, further comprising: a turning device configured to turn the plurality of objects over, The first conveying device is configured to convey the plurality of objects between the storage container mounted on the mounting portion, the loading platform, and the turning device.

4. The conveying system according to claim 1 or 2, further comprising: a hopper configured to temporarily store the plurality of objects, The first conveying device is configured to convey the plurality of objects between the storage container mounted on the mounting portion, the stage and the stocker.

5. The conveying system according to claim 1 or 2, further comprising: A tray transfer device is configured to receive the tray holding processed objects from the processing equipment and deliver a tray holding unprocessed objects to the processing equipment.

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