Positioning device and diffusion furnace

Abstract

The present application discloses a positioning device and a diffusion furnace. The adjustment mechanism includes a fixed bracket, an angle adjustment device, an angle sensor, a calculation module, and a control device. The fixed bracket is rotatably connected to the base via the angle adjustment device. One end of the carbon silicon paddle is horizontally connected to the fixed bracket. The control device is disposed on the base and connected to the angle adjustment device. The angle sensor and the calculation module are both disposed on the fixed bracket, the angle sensor is connected to the calculation module, and the calculation module is connected to the control device. The angle sensor is used to record the angle of the carbon silicon paddle when the quartz boat is empty and the angle of the carbon silicon paddle after the quartz boat is loaded with silicon wafers. The calculation module is used to calculate the difference in the angle of the carbon silicon paddle when the quartz boat is empty and after the quartz boat is loaded with silicon wafers, and transmit the signal to the control device. The control device controls the angle adjustment device to raise the fixed bracket to a preset angle, where the preset angle is equal to the angle difference. The present application can correct the position error of the carbon silicon paddle before and after loading.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a positioning device and a diffusion furnace. Background Art

[0002] Before the diffusion furnace is operated, the position of the carbon-silicon paddle is usually adjusted to ensure that the carbon-silicon paddle does not collide with the furnace tube during movement and cause silicon wafers to break. However, the position that has been adjusted when the carbon-silicon paddle is in the no-load state will often drop after loading because the front end of the carbon-silicon paddle bears the force of supporting the wafer. This leads to a position error between the position adjusted before the carbon-silicon paddle is in the no-load state and the position after loading, increasing the chance of the carbon-silicon paddle colliding with the furnace tube.

[0003] How to correct the position error of the carbon silicon paddle before and after loading has become an urgent problem to be solved in this field. Summary of the Invention

[0004] The purpose of this application is to provide a positioning device and a diffusion furnace that can correct the position error before and after the carbon silicon paddle is loaded.

[0005] The present application discloses a positioning device for transporting a quartz boat, the positioning device comprising a carbon silicon paddle, an adjustment mechanism and a base, the adjustment mechanism being mounted on the base; one end of the carbon silicon paddle being connected to the adjustment mechanism, the quartz boat being mounted on the carbon silicon paddle; the adjustment mechanism comprising a fixed bracket, an angle adjustment device, an angle sensor, a computing module, and a control device; the fixed bracket being rotatably connected to the base via the angle adjustment device, one end of the carbon silicon paddle being horizontally connected to the fixed bracket, the control device being arranged on the base and being connected to the angle adjustment device; The angle sensor and the calculation module are both arranged on the fixed bracket, the angle sensor is connected to the calculation module, and the calculation module is connected to the control device; wherein, the angle sensor is used to record the angle of the carbon-silicon paddle when the quartz boat is empty and the angle of the carbon-silicon paddle after the quartz boat is loaded with silicon wafers; the calculation module is used to calculate the angle difference of the carbon-silicon paddle when the quartz boat is empty and after the silicon wafers are loaded, and transmit the signal to the control device; the control device controls the angle adjustment device to lift the fixed bracket to a preset angle, and the preset angle is equal to the angle difference.

[0006] Optionally, the angle adjustment device includes an adjustment plate, the control device includes a servo motor, the adjustment plate is arranged between the fixed bracket and the base, and is fixedly connected to the fixed bracket, one end of the adjustment plate is connected to the base via a rotating shaft; the servo motor is connected to the rotating shaft, and the servo motor drives the rotating shaft to lift the adjustment plate to the preset angle.

[0007] Optionally, the control device includes a cylinder, and the angle adjustment device includes a pneumatic telescopic column, one end of the pneumatic telescopic column is connected to the cylinder, and the other end is connected to the fixed bracket, and the cylinder drives the pneumatic telescopic column to move, lifting the fixed bracket to the preset angle.

[0008] Optionally, the fixing bracket includes a plurality of fixing screws and a bracket, the plurality of fixing screws are arranged on the bracket, and the plurality of fixing screws are pressed against the end of the carbon silicon paddle to fix the carbon silicon paddle on the bracket.

[0009] Optionally, a protective sleeve is provided on one end of the carbon silicon paddle close to the fixing bracket, and the plurality of fixing screws are tightly pressed against the protective sleeve.

[0010] Optionally, the adjustment mechanism further includes a transverse adjustment member, one end of which is fixedly connected to the base, and the other end is connected to the fixed bracket; the transverse adjustment member is parallel to the base and is used to adjust the horizontal position of the fixed bracket.

[0011] Optionally, the adjustment structure further includes a longitudinal adjustment member, one end of which is connected to the base and the other end is connected to the fixed bracket; the longitudinal adjustment member is perpendicular to the base and is used to adjust the vertical position of the fixed bracket.

[0012] The present application also discloses a diffusion furnace, comprising a furnace tube. The diffusion furnace further comprises the aforementioned positioning device, wherein the positioning device is connected to the furnace tube.

[0013] Optionally, the diffusion furnace also includes a scale for detecting the position of the carbon silicon paddle; the scale includes a transmitting component and a receiving component, the transmitting component is arranged on the side of the carbon silicon paddle close to the adjustment mechanism, and the receiving component is arranged on the furnace tube corresponding to the position of the transmitting component.

[0014] Optionally, the ruler is a laser ruler, the emitting component and the receiving component are both arched, the outer edges of the emitting component and the receiving component are both arc-shaped, and the inner edges of the emitting component and the receiving component are both square; wherein, the emitting component is provided with a power supply, a charging interface, a horizontal scale reference, a horizontal bubble mark and a cross laser head, the power supply is electrically connected to the charging interface, the horizontal scale reference is connected to the horizontal bubble mark, and the cross laser head is electrically connected to the power supply.

[0015] The present application first uses an angle sensor to record the angle of the carbon-silicon paddle in an unloaded state, and takes the angle of the carbon-silicon paddle in the unloaded state as the initial angle. Then, after the silicon wafer is loaded on the quartz boat, the angle of the carbon-silicon paddle after the silicon wafer is installed is recorded by the angle sensor. The calculation module calculates the angle difference through the two recorded angles, outputs a signal to the control device through the calculation module, and then drives the angle adjustment device through the control device to lift the fixed bracket according to the angle difference, thereby realizing the compensation adjustment of the angle of the carbon-silicon paddle when it is unloaded and after loading, correcting the position error of the carbon-silicon paddle before and after loading, and effectively avoiding collision of the carbon-silicon paddle or the quartz boat during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The included drawings are used to provide a further understanding of the embodiments of the present application, which constitute a part of the specification, are used to illustrate the implementation methods of the present application, and together with the text description, explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without inventive work. In the drawings:

[0017] Figure 1 A schematic diagram of an embodiment of a positioning device of the present application;

[0018] Figure 2 A schematic diagram of a first embodiment of the adjustment mechanism of the present application;

[0019] Figure 3 A schematic diagram of a second embodiment of the regulating mechanism of the present application;

[0020] Figure 4 This is a schematic diagram of an embodiment of a diffusion furnace of the present application.

[0021] Among them, 10, diffusion furnace; 100, positioning device; 200, furnace tube; 300, ruler; 310, transmitting component; 320, receiving component; 400, quartz boat; 110, carbon silicon paddle; 111, protective cover; 120, adjustment mechanism; 121, fixed bracket; 122, fixing screw; 123, bracket body; 124, angle adjustment device; 125, adjustment plate; 126, pneumatic telescopic column; 127, angle sensor; 128, computing module; 129, control device; 130, servo motor; 131, rotating shaft; 132, cylinder; 133, horizontal adjustment member; 134, longitudinal adjustment member; 140, base. DETAILED DESCRIPTION

[0022] It should be understood that the terms used herein, the specific structures and functional details disclosed are only for describing specific embodiments and are representative. However, the present application can be implemented in many alternative forms and should not be construed as being limited to the embodiments described herein.

[0023] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate relative importance or implicitly specify the quantity of the technical features indicated. Therefore, unless otherwise specified, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features; "plurality" means two or more. The term "comprising" and any variations thereof are intended to be non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components, and / or combinations thereof may be present or added.

[0024] In addition, terms indicating orientation or positional relationships such as “center,” “lateral,” “up,” “down,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inside,” and “outside” are described based on the orientation or relative positional relationships shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present application, and do not indicate that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present application.

[0025] Furthermore, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

[0026] The present application is described in detail below with reference to the accompanying drawings and optional embodiments.

[0027] Figure 1 This is a schematic diagram of an embodiment of the positioning device of the present application. Figure 2 This is a schematic diagram of the first embodiment of the regulating mechanism of the present application, as shown in FIG. Figure 1 and Figure 2As shown, the present application discloses a positioning device 100 for transporting a quartz boat 400, the positioning device 100 includes a carbon silicon paddle 110, an adjustment mechanism 120 and a base 140, the adjustment mechanism 120 is mounted on the base 140; one end of the carbon silicon paddle 110 is connected to the adjustment mechanism 120, and the quartz boat 400 is mounted on the carbon silicon paddle 110; the adjustment mechanism 120 includes a fixed bracket 121, an angle adjustment device 124, an angle sensor 127, a computing module 128, and a control device 129; the fixed bracket 121 is rotatably connected to the base 140 through the angle adjustment device 124, one end of the carbon silicon paddle 110 is horizontally connected to the fixed bracket 121, and the control device 129 is arranged on the base 140 , and is connected to the angle adjustment device 124; the angle sensor 127 and the calculation module 128 are both arranged on the fixed bracket 121, the angle sensor 127 is connected to the calculation module 128, and the calculation module 128 is connected to the control device 129; wherein, the angle sensor 127 is used to record the angle of the carbon-silicon paddle 110 when the quartz boat 400 is unloaded, and the angle of the carbon-silicon paddle 110 after the quartz boat 400 is loaded with silicon wafers; the calculation module 128 is used to calculate the angle difference of the carbon-silicon paddle 110 when the quartz boat 400 is unloaded and after loading silicon wafers, and transmit the signal to the control device 129; the control device 129 controls the angle adjustment device 124 to lift the fixed bracket 121 to a preset angle, and the preset angle is equal to the angle difference.

[0028] The present application first uses the angle sensor 127 to record the angle of the carbon silicon paddle 110 in the no-load state, and takes the angle of the carbon silicon paddle 110 in the no-load state as the initial angle. Then, after the silicon wafer is loaded on the quartz boat 400, the angle of the carbon silicon paddle 110 after the silicon wafer is installed is recorded by the angle sensor 127. The calculation module 128 calculates the angle difference through the two recorded angles, and outputs a signal to the control device 129 through the calculation module 128. The control device 129 then drives the angle adjustment device 124 to lift the fixed bracket 121 according to the angle difference, thereby realizing the compensation adjustment of the angle of the carbon silicon paddle 110 when it is no-loaded and after loading, correcting the position error of the carbon silicon paddle before and after loading, and effectively avoiding collision of the carbon silicon paddle 110 or the quartz boat 400 during operation.

[0029] Specifically, such as Figure 2 As shown, the angle adjustment device 124 includes an adjustment plate 125, and the control device 129 includes a servo motor 130. The adjustment plate 125 is arranged between the fixed bracket 121 and the base 140, and is fixedly connected to the fixed bracket 121. One end of the adjustment plate 125 is connected to the base 140 through a rotating shaft 131; the servo motor 130 is connected to the rotating shaft 131, and the servo motor 130 drives the rotating shaft 131 to lift the adjustment plate 125 to a preset angle.

[0030] During actual operation, the angle sensor 127 first records the angle of the carbon silicon paddle 110 in the empty state of the quartz boat 400 and the angle of the carbon silicon paddle 110 in the state of the quartz boat 400 loaded with silicon wafers. Then, the calculation module 128 calculates the angle difference of the carbon silicon paddle 110 in the two states before and after, and then transmits the signal to the servo motor 130. The servo motor 130 provides a certain torque to the rotating shaft 131 according to the signal, so that the rotating shaft 131 drives the adjustment plate 125 to lift. Since the adjustment plate 125 and the fixed bracket 121 are fixed, the adjustment plate 125 is fixed to the fixed bracket 121. The carbon silicon paddle 110 is fixed together, so the fixed bracket 121 is also lifted to a preset angle; in this way, when heating, after the quartz boat 400 is reloaded with silicon wafers, the position of the carbon silicon paddle 110 changes due to the pressure, and the changed position of the carbon silicon paddle 110 is just restored to the preset initial position, so that the carbon silicon paddle 110 moves at the preset position during the transportation of the quartz boat 400, and will not collide with the furnace tube 200, thereby avoiding damage to the silicon wafers in the quartz boat 400 and extending the service life of the carbon silicon paddle 110.

[0031] Since silicon wafers are heated products, in order to ensure product quality and save costs, when adjusting the angle of the carbon silicon paddle 110, a counterweight can be used instead of the silicon wafer to simulate the state of the quartz boat 400 after loading. The specific operation is as follows:

[0032] First, use the ruler 300 to adjust the position of the carbon silicon paddle 110 when the carbon silicon paddle 110 is in the no-load state, and then use the angle sensor 127 to record the angle of the carbon silicon paddle 110 in the no-load state, and take the angle of the carbon silicon paddle 110 in the no-load state as the initial angle. Then, according to the weight of the silicon wafers to be loaded, use a counterweight of the same weight to install the counterweight on the carbon silicon paddle 110. At this time, the angle of the carbon silicon paddle 110 after the counterweight is installed is recorded by the angle sensor 127. The angle difference is calculated through the two recorded angles. The counterweight is then removed from the carbon silicon paddle 110, and the output signal is given to the servo motor 130 for adjusting the pitch angle of the carbon silicon paddle 110 through the calculation. The servo motor 130 lifts the carbon silicon paddle 110 according to the angle difference, thereby realizing the compensation adjustment of the angle of the carbon silicon paddle 110 when it is no-load and after loading.

[0033] In addition, after each heating, the carbon silicon paddle 110 needs to be removed and maintained so that the carbon silicon paddle 110 can be put into normal use next time. Before preparing for the next use, the end of the carbon silicon paddle 110 needs to be re-fixed to the fixing bracket 121. The position of the carbon silicon paddle 110 re-fixed to the fixing bracket 121 may not be on the same horizontal line as the fixing bracket 121. In order to reduce the error in the angle adjustment of the carbon silicon paddle 110, the position of the carbon silicon paddle 110 relative to the fixing bracket 121 needs to be adjusted as follows:

[0034] Further, such as Figure 2 As shown, adjustment mechanism 120 also includes a transverse adjustment member 133, one end of which is fixedly connected to base 140 and the other end is connected to fixed bracket 121. Transverse adjustment member 133 is parallel to base 140 and is used to adjust the horizontal position of fixed bracket 121. If the position of carbon silicon paddle 110 deviates in the X-axis direction, transverse adjustment member 133 can be adjusted to correct the position of carbon silicon paddle 110 in the X-axis direction.

[0035] The adjustment structure also includes a longitudinal adjustment member 134, one end of which is connected to the base 140 and the other end to the fixed bracket 121. The longitudinal adjustment member 134 is perpendicular to the base 140 and is used to adjust the vertical position of the fixed bracket 121. If the position of the carbon silicon paddle 110 deviates in the Y-axis direction, the longitudinal adjustment member 134 can be adjusted to correct the position of the carbon silicon paddle 110 in the Y-axis direction.

[0036] The position of the carbon silicon paddle 110 relative to the fixed bracket 121 can be corrected in both the horizontal and vertical directions, which is convenient and quick, avoiding large deviations in the subsequent position adjustment of the carbon silicon paddle 110 and further reducing the risk of the carbon silicon paddle 110 colliding with the furnace tube 200.

[0037] In addition, the fixing bracket 121 includes multiple fixing screws 122 and a bracket body 123. The multiple fixing screws 122 are arranged on the bracket body 123, and the multiple fixing screws 122 abut against the end of the carbon silicon paddle 110 to fix the carbon silicon paddle 110 on the bracket body 123.

[0038] In this embodiment, the fixed bracket 121 is secured and fixed to the carbon silicon paddle 110 using multiple fixing screws 122. Multiple screw holes for mounting the fixing screws 122 are provided on the bracket body 123. The fixing screws 122 pass through the fixing screw holes and are secured to the bracket body 123. To install the carbon silicon paddle 110 on the fixed bracket 121, simply insert the end of the carbon silicon paddle 110 into the fixed bracket 121 and rotate the fixing screws 122 from one side of the fixed bracket 121. As the fixing screws 122 rotate, they abut the end of the carbon silicon paddle 110, forcing the carbon silicon paddle 110 against the other side of the bracket body 123 and securing it to the bracket body 123. To remove the carbon silicon paddle 110 from the bracket body 123, simply remove the fixing screws 122. This makes installation and removal of the carbon silicon paddle 110 simple and convenient.

[0039] Further, such as Figure 1As shown, a protective sleeve 111 is provided on one end of the carbon silicon paddle 110 close to the fixing bracket 121, and a plurality of fixing screws 122 are pressed against the protective sleeve 111. Since the plurality of fixing screws 122 are directly pressed against the carbon silicon paddle 110 to fix the carbon silicon paddle 110 on the bracket body 123, the fixing screws 122 need to exert sufficient pressure on the carbon silicon paddle 110. In order to prevent the fixing screws 122 from squeezing the carbon silicon paddle 110 and causing damage to the carbon silicon paddle 110, a protective sleeve 111 is provided on the end of the carbon silicon paddle 110 fixed to the fixing bracket 121, so that the fixing screws 122 directly contact the protective sleeve 111 instead of directly contacting the carbon silicon paddle 110. The protective sleeve 111 has a certain buffering effect, which can alleviate the squeezing force of the fixing screws 122, while also allowing the fixing screws 122 to well fix the carbon silicon paddle 110 on the bracket body 123.

[0040] Figure 3 This is a schematic diagram of the second embodiment of the regulating mechanism of the present application, as shown in FIG. Figure 3 As shown, Figure 3 The embodiment shown is based on Figure 2 The improvement is that the control device 129 includes a cylinder 132, and the angle adjustment device 124 includes a pneumatic telescopic column 126. One end of the pneumatic telescopic column 126 is connected to the cylinder 132, and the other end is connected to the fixed bracket 121. The cylinder 132 drives the pneumatic telescopic column 126 to move and lifts the fixed bracket 121 to a preset angle.

[0041] Different from the previous embodiment, in this embodiment, the control device 129 is a cylinder 132, and the angle adjustment device 124 is a pneumatic telescopic column 126 that cooperates with the cylinder 132. The pneumatic telescopic column 126 is extended and retracted by the control of the cylinder 132, and the extension and retraction of the pneumatic telescopic column 126 drives the fixed bracket 121 to adjust the angle. During actual operation, the angle sensor 127 first records the angle of the carbon silicon paddle 110 when the quartz boat 400 is unloaded and the angle of the carbon silicon paddle 110 when the quartz boat 400 is loaded with silicon wafers. Then, the calculation module 128 calculates the angle difference of the carbon silicon paddle 110 in the two states, and then transmits the signal to the cylinder 132. The cylinder 132 provides a certain amount of air pressure to the pneumatic telescopic column 126 according to the signal, so that the pneumatic telescopic column 126 drives the fixed bracket 121 to lift a preset angle. In this way, when heating, after the quartz boat 400 is reloaded with silicon wafers, the position of the carbon silicon paddle 110 changes due to the pressure, and the changed position of the carbon silicon paddle 110 just returns to the preset initial position, so that the carbon silicon paddle 110 moves in the preset position during the transportation of the quartz boat 400, and will not collide with the furnace tube 200, thereby avoiding damage to the silicon wafers in the quartz boat 400 and extending the service life of the carbon silicon paddle 110.

[0042] Figure 4 This is a schematic diagram of an embodiment of the diffusion furnace of the present application, as shown in FIG. Figure 4 As shown, the present application further discloses a diffusion furnace 10 , including a furnace tube 200 . The diffusion furnace 10 also includes the above-mentioned positioning device 100 , which is connected to the furnace tube 200 .

[0043] The diffusion furnace 10 is a specialized device used in semiconductor diffusion (doping) processes. Its principle is to use the thermal motion of molecules in a high-temperature environment to allow impurity elements such as phosphorus (P), aluminum (Al), gallium (Ga), and boron (B) to enter the interior of a pure silicon wafer, forming a PN junction. The diffusion process takes place within the furnace tube 200 of the diffusion furnace 10. Before diffusion begins, the silicon wafer to be diffused must be placed in a quartz boat 400 and positioned within the furnace tube 200 using a positioning device 100. The specific process is as follows: first, the silicon wafer is placed in the quartz boat 400. The quartz boat 400 is then placed on the positioning device 100. The positioning device 100 then guides the quartz boat 400 into the furnace tube 200 and positions it steadily, allowing diffusion to proceed. After the diffusion process is complete, the quartz boat 400 is removed using the positioning device 100.

[0044] In order to avoid collision between the carbon silicon paddle 110 of the positioning device 100 and the furnace tube 200 during operation, and to avoid repeated position adjustment of the carbon silicon paddle 110 in an unloaded state, the present application further provides a scale 300 on the carbon silicon paddle 110, as follows:

[0045] like Figure 4 As shown, the diffusion furnace 10 also includes a scale 300 for detecting the position of the carbon-silicon paddle 110. The scale 300 includes a transmitter 310 and a receiver 320. The transmitter 310 is disposed on a side of the carbon-silicon paddle 110 near the adjustment mechanism 120, and the receiver 320 is disposed on the furnace tube 200 corresponding to the position of the transmitter 310. The transmitter 310 emits a marking signal, which is then received by the receiver 320. This forms a marking line for adjusting the position of the carbon-silicon paddle 110. The carbon-silicon paddle 110 can be adjusted based on the marking line as a reference, thus preventing position deviation of the carbon-silicon paddle 110.

[0046] Furthermore, the ruler 300 is a laser ruler, and the emitting component 310 and the receiving component 320 are both arched, and the outer edges of the emitting component 310 and the receiving component 320 are both arc-shaped, and the inner edges of the emitting component 310 and the receiving component 320 are both square; wherein, the emitting component 310 is provided with a power supply, a charging interface, a horizontal scale reference, a horizontal bubble mark and a cross laser head, the power supply is electrically connected to the charging interface, the horizontal scale reference and the horizontal bubble mark are connected, and the cross laser head is electrically connected to the power supply.

[0047] During actual operation, the transmitting component 310 of the scale 300 is first placed on the side of the carbon silicon paddle 110 close to the push-pull boat. Then, the receiving component 320 is installed on the furnace tube 200 corresponding to the position of the transmitting component 310. This allows the signal emitted by the transmitting component 310 to be received by the receiving component 320 to form a marking line. The front and rear scale lines of the transmitting component 310 and the level bubble at the top are used to align the transmitting component 310 and adjust the angle of the transmitting component 310 relative to the carbon silicon paddle 110 so that the transmitting component 310 remains horizontal relative to the carbon silicon slurry. Then, referring to the vertical laser line emitted by the cross laser head of the transmitting component 310, the angle of the transmitting component 310 relative to the forward direction of the carbon silicon paddle 110 is adjusted to keep the transmitting component 310 vertical relative to the forward direction of the carbon silicon paddle 110.

[0048] The above operation can make the crosshairs emitted by the cross laser head on the transmitting component 310 parallel to the carbon silicon paddle 110 and located at the center of the carbon silicon paddle 110. In this way, the extension direction of the laser marking emitted by the transmitting component 310 replaces the direction of advance of the carbon silicon paddle 110; that is, the laser marking is aligned with respect to the furnace tube 200, and the carbon silicon paddle 110 will also enter the furnace tube 200 according to the corresponding trajectory. By making the laser emitted by the transmitting component 310 parallel to the carbon silicon paddle 110 and located at the center of the carbon silicon paddle 110, the length of the carbon silicon paddle 110 can be extended, simulating the angle and position of the carbon silicon paddle 110 when it extends into the furnace tube 200, reducing the error of visual calibration by the human eye and the repeated movement of the carbon silicon paddle 110, and improving the accuracy and efficiency of calibration.

[0049] Furthermore, the pitch angle of the transmitting component 310 relative to the carbon silicon paddle 110 can be adjusted based on actual conditions to ensure that the vertical laser marking line coincides with the centerline of the end of the furnace tube 200 and that the distance from the center of the cursor to both sides of the furnace tube 200 is equal. Based on these two points, the position of the carbon silicon paddle 110 is continuously adjusted to meet the desired requirements. Ultimately, a straight line is formed between the four points, completing the position adjustment.

[0050] It should be noted that the inventive concept of this application can form a large number of embodiments, but the length of the application document is limited and it is impossible to list them one by one. Therefore, under the premise of no conflict, the various embodiments or technical features described above can be arbitrarily combined to form new embodiments. After the various embodiments or technical features are combined, the original technical effects will be enhanced.

[0051] The above content is a further detailed description of the present application in conjunction with specific optional implementation methods, and the specific implementation of the present application cannot be considered to be limited to these descriptions. For ordinary technicians in the technical field to which the present application belongs, several simple deductions or substitutions can be made without departing from the concept of the present application, and all of them should be considered to fall within the scope of protection of the present application.

Claims

1. A positioning device for transporting a quartz boat, the positioning device comprising a carbon silicon paddle, an adjustment mechanism, and a base, the adjustment mechanism being mounted on the base; one end of the carbon silicon paddle being connected to the adjustment mechanism, and the quartz boat being mounted on the carbon silicon paddle; It is characterized by: The adjustment mechanism includes a fixed bracket, an angle adjustment device, an angle sensor, a calculation module, and a control device; the fixed bracket is rotatably connected to the base through the angle adjustment device, one end of the carbon silicon paddle is horizontally connected to the fixed bracket, and the control device is arranged on the base and connected to the angle adjustment device; The angle sensor and the calculation module are both arranged on the fixing bracket, the angle sensor is connected to the calculation module, and the calculation module is connected to the control device; The angle sensor is used to record the angle of the carbon-silicon paddle when the quartz boat is empty and the angle of the carbon-silicon paddle after the quartz boat is loaded with silicon wafers; the calculation module is used to calculate the angle difference between the carbon-silicon paddle when the quartz boat is empty and after the silicon wafers are loaded, and transmit the signal to the control device; the control device controls the angle adjustment device to raise the fixed bracket to a preset angle, and the preset angle is equal to the angle difference; The angle adjustment device includes an adjustment plate, and the control device includes a servo motor. The adjustment plate is disposed between the fixed bracket and the base and is fixedly connected to the fixed bracket. One end of the adjustment plate is connected to the base via a rotating shaft. The servo motor is connected to the rotating shaft, and the servo motor drives the rotating shaft to lift the adjustment plate to the preset angle. Alternatively, the control device includes a cylinder, and the angle adjustment device includes a pneumatic telescopic column, one end of the pneumatic telescopic column is connected to the cylinder, and the other end is connected to the fixed bracket, and the cylinder drives the pneumatic telescopic column to move, lifting the fixed bracket to the preset angle.

2. The positioning device according to claim 1, characterized in that The fixing bracket includes a plurality of fixing screws and a bracket. The plurality of fixing screws are arranged on the bracket, and the plurality of fixing screws abut against the end of the carbon silicon paddle to fix the carbon silicon paddle on the bracket.

3. The positioning device according to claim 2, characterized in that A protective sleeve is provided on one end of the carbon silicon paddle close to the fixing bracket, and a plurality of fixing screws are pressed tightly against the protective sleeve.

4. The positioning device according to claim 1, characterized in that The adjustment mechanism also includes a transverse adjustment member, one end of which is fixedly connected to the base, and the other end is connected to the fixed bracket; the transverse adjustment member is parallel to the base and is used to adjust the horizontal position of the fixed bracket.

5. The positioning device according to claim 4, characterized in that The adjustment structure further includes a longitudinal adjustment member, one end of which is connected to the base and the other end is connected to the fixed bracket; the longitudinal adjustment member is perpendicular to the base and is used to adjust the vertical position of the fixed bracket.

6. A diffusion furnace comprising a furnace tube, characterized in that: The diffusion furnace further comprises a positioning device according to any one of claims 1 to 5, wherein the positioning device is connected to the furnace tube.

7. The diffusion furnace according to claim 6, characterized in that The diffusion furnace also includes a scale for detecting the position of the carbon silicon paddle; the scale includes a transmitting component and a receiving component, the transmitting component is arranged on the side of the carbon silicon paddle close to the adjustment mechanism, and the receiving component is arranged on the furnace tube corresponding to the position of the transmitting component.

8. The diffusion furnace according to claim 7, characterized in that The ruler is a laser ruler, the emitting component and the receiving component are both arched, and the outer edges of the emitting component and the receiving component are both arc-shaped, and the inner edges of the emitting component and the receiving component are both square; wherein, the emitting component is provided with a power supply, a charging interface, a horizontal scale reference, a horizontal bubble mark and a cross laser head, the power supply is electrically connected to the charging interface, the horizontal scale reference is connected to the horizontal bubble mark, and the cross laser head is electrically connected to the power supply.

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