Particle classification devices and systems

Abstract

The embodiment of the present application provides a particle classification device and system, which belongs to the field of optical metasurface technology. The device includes an optical driver and a screening channel; the optical driver includes a light source and an optical system; an optical window is provided on one side of the screening channel; a particle outlet is provided on the other side of the screening channel; wherein the optical window is opposite to the optical system, and the light generated by the light source is modulated by the optical system to form corresponding focal points at the particle outlets, so that the target particles in the screening channel perform a quasi-projectile motion under the drive of light force and then enter the particle outlet; and the length of the optical window is less than or equal to the length of the screening channel. The device and system improve the classification efficiency by forming a light trap at the particle outlet and using light force to drive the target particles to perform a quasi-projectile motion.

Description

Technical Field

[0001] The present application relates to the technical field of optical metasurfaces, and specifically, to a particle classification device and system. Background Art

[0002] Cell biology research places very high demands on cell purity. Isolating and purifying target cells has always been an important method in cell biology.

[0003] In existing technology, cell screening is typically performed using flow cytometry. Flow cytometry works by encapsulating each cell with a sheath fluid, allowing it to flow down the flow path one by one. Target cells are identified based on their scattering characteristics (size, properties, and composition). An electric charge is then applied to the identified cells, and the charged cells are separated by an electric field.

[0004] The flow cytometers in the prior art can only identify cells one by one, and the classification efficiency is low. Therefore, there is an urgent need for a device with higher classification efficiency. Summary of the Invention

[0005] In order to solve the technical problem of low classification efficiency of flow cytometers in the prior art, the embodiments of the present application provide a particle classification device and system.

[0006] In one aspect, an embodiment of the present application provides a particle classification device, the device comprising an optical driver and a screening channel;

[0007] The optical driver includes a light source and an optical system;

[0008] An optical window is provided on one side of the screening channel; a particle outlet is provided on the other side of the screening channel;

[0009] In which, the optical window is opposite to the optical system, and the light generated by the light source is modulated by the optical system to form corresponding focal points at the particle outlet, so that the target particles enter the particle outlet after performing a quasi-projectile motion in the screening channel driven by the light force; and the length of the optical window is less than or equal to the length of the screening channel 20.

[0010] Optionally, the optical system comprises at least one metasurface; or a combination of an optical fiber array and a microlens array.

[0011] Optionally, the number of the particle outlets is greater than or equal to 2.

[0012] Optionally, different particle outlets correspond to focal points of different sizes.

[0013] Optionally, different particle outlets have different focal points corresponding to their respective intensities.

[0014] Optionally, the device further comprises a light force regulator;

[0015] The optical force modulator is disposed between the metasurface and the optical window;

[0016] The optical force regulator adjusts the transmittance to control the intensity of the light field in the screening channel.

[0017] Optionally, the optical force adjuster includes an optical attenuator or a polarizer.

[0018] Optionally, the at least one metasurface at least satisfies:

[0019]

[0020] in, is the phase distribution that needs to be modulated in the metasurface, r is the distance from any point on the metasurface to the center, f is the distance from the focal plane of the metasurface to the metasurface, x i is the distance from the off-axis focus of the metasurface to the optical axis on the focal plane, α xi is the angle between the off-axis chief ray and the optical axis.

[0021] Optionally, the metasurface includes a substrate and a microstructure layer disposed on the substrate;

[0022] Wherein, the microstructure layer comprises periodically arranged superstructure units; the shape of the superstructure units is a densely packed pattern; and,

[0023] The micro-nano structure is arranged in the super-structure unit.

[0024] Optionally, each of the superstructure units includes multiple groups of subunits;

[0025] The shapes of the multiple groups of subunits are all densely packed graphics;

[0026] The same type of micro-nano structures are respectively arranged in each group of the sub-units, and the micro-nano structures arranged in two adjacent sub-units are different.

[0027] Optionally, the micro-nano structures of the same type have different sizes;

[0028] The dimensions include diameter or height.

[0029] Optionally, a period of the superstructure unit is greater than or equal to 200 nm and less than or equal to 1500 nm.

[0030] Optionally, the height of the micro-nano structure is greater than or equal to 300 nm and less than or equal to 5 μm.

[0031] Optionally, the radius of the micro-nano structure is greater than or equal to 50 nm and less than or equal to 450 nm.

[0032] Optionally, the device further comprises a computer;

[0033] The computer is connected to the light force regulator and is used to control the light force regulator.

[0034] On the other hand, an embodiment of the present application further provides a particle classification system, the particle classification system comprising a particle classification device and a particle collection device as provided in any of the above embodiments;

[0035] The particle collecting device is connected to the particle outlet.

[0036] The particle classification device and system provided in the present application utilizes a light-driven device to form a focal point at the particle exit of a screening channel. This optical force propels particles through the screening channel in a quasi-projectile motion before they enter the particle exit. This device eliminates the need to identify and classify each cell individually, significantly improving classification efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The accompanying drawings are included to provide a further understanding of the present application and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate embodiments of the present application and together with the description below serve to explain the principles of the present application.

[0038] Figure 1 An optional structural diagram of a particle classification device provided in an embodiment of the present application is shown;

[0039] Figure 2 Schematic diagram of an optional structure of the metasurface provided in an embodiment of the present application is shown;

[0040] Figure 3 An optional arrangement of superstructure units provided in an embodiment of the present application is shown;

[0041] Figure 4 It shows another optional arrangement of the superstructure units provided in the embodiment of the present application;

[0042] Figure 5 It shows another optional arrangement of the superstructure units provided in the embodiment of the present application;

[0043] Figure 6 An optional schematic diagram of the micro-nano structure provided in an embodiment of the present application is shown;

[0044] Figure 7 Another optional schematic diagram of the micro-nano structure provided in the embodiment of the present application is shown;

[0045] Figure 8 An optional arrangement of subunits of a superstructure unit provided in an embodiment of the present application is shown;

[0046] Figure 9 The optical force distribution of particles of three sizes provided in the embodiments of the present application at the focus is shown;

[0047] Figure 10 The acceleration distributions of particles of three sizes at the focus provided in the examples of the present application are shown.

[0048] The accompanying drawings in the figure respectively show:

[0049] 10-light driver; 20-screening channel; 30-light force regulator; 40-particle collecting device; 101-light source; 102-optical system; 201-optical window; 202-particle outlet. DETAILED DESCRIPTION

[0050] The following description is merely illustrative in nature and is not intended to limit the present application, its applications, or uses. It should be understood that corresponding reference numerals in the accompanying drawings always indicate the same or corresponding components and features. The present teachings are suitable for incorporation into many different types of optical devices. For illustrative purposes, the metasurfaces provided herein are shown as monolithic planar metasurfaces. However, the present teachings are also applicable to combinations of other angles.

[0051] Example embodiments are provided so that the present application is fully disclosed and fully conveys the scope to those skilled in the art. Many specific details are set forth, such as examples of specific components, devices, and methods, to provide a comprehensive understanding of the embodiments of the present application. It will be apparent to those skilled in the art that it is not necessary to adopt specific details, and example embodiments may be implemented in many different forms, and none of these should be construed as limiting the scope of the present application. In some example embodiments, known methods, known device structures, and known technologies are not described in detail.

[0052] When an element or layer is referred to as being "on," "engaged to," "connected to," or "coupled to" another element or layer, the element or layer can be directly on, directly engaged to, connected to, or coupled to the other element or layer, or there can be intervening elements or layers. In contrast, when an element is referred to as being "directly on," "directly engaged to," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. Other words used to describe the relationship between elements should be interpreted in a like manner (e.g., "between" versus "directly between," "adjacent to" versus "directly adjacent to," etc.). As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0053] Although the terms first, second, third etc. can be used herein to describe different elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer and / or part from another region, layer and / or part. Terms such as "first", "second" and other numerical terms do not mean order or sequence when used in this article, unless clearly indicated by context. Thus, the first element, component, region, layer or part discussed below can be referred to as the second element, component, region, layer or part, without departing from the teachings of exemplary embodiments.

[0054] The present application provides a particle classification device, such as Figure 1 As shown, the particle classification device includes an optical driver 10 and a screening channel 20. The optical driver 10 includes a light source 101 and an optical system 102. An optical window 201 is provided on one side of the screening channel 20, and a particle outlet 202 is provided on the other side. The optical window 201 is opposite the optical system 102. The light generated by the light source 101 is modulated by the optical system 102 and forms corresponding focal points at the particle outlet 202. This causes the target particles to undergo a quasi-projectile motion in the screening channel 20 under the force of light and then enter the particle outlet 202.

[0055] Optionally, the optical system 102 includes at least one metasurface; or the optical system 102 includes a combination of an optical fiber array and a microlens array.

[0056] Specifically, particles in the light field are subject to the gradient force and scattering force of light. The embodiments of the present application utilize the different forces exerted on different particles in the light field to achieve the purpose of particle classification. The light beam emitted by the light source 101 in the optical driver 10 is modulated by the optical system 102 and then emitted from the optical window 201 to form a focus at the particle exit. Therefore, the light beam emitted by the optical driver 10 is focused at the particle exit 202 and forms a light trap. Optionally, the length of the optical window 201 is less than or equal to the length of the screening channel 20.

[0057] Furthermore, when a fluid containing target particles flows in the screening channel 20, the light trap generates a strong gradient light field in a direction perpendicular to the fluid flow, thereby exerting an optical force on the particles in that direction. Therefore, the particles in the light field undergo a quasi-projectile motion due to the optical force. Due to the different sizes, materials, and shapes of particles, the optical forces experienced by different particles are also different, and are not proportional to the particle size, resulting in different accelerations perpendicular to the direction of fluid flow. The same is true for cells: cells of different sizes, materials, and shapes experience different optical forces in the same light field, resulting in different accelerations.

[0058] As can be seen above, by designing the light field based on the properties of the target particles (size, material, shape, etc.), particles with the same properties as the target particles are subjected to the greatest optical force among the particles to be classified. Consequently, when a fluid containing the target particles flows through screening channel 20, particles with the same properties as the target particles undergo a quasi-projectile motion under the action of the optical force and are preferentially captured by the light trap, allowing them to enter particle outlet 202. Meanwhile, particles with different properties than the target particles escape from the light trap under the influence of the fluid.

[0059] It should be noted that the particle classification device provided in the embodiments of the present application can classify particles that are transparent to light within the operating wavelength band. Furthermore, the particle size ranges from tens of nanometers to tens of microns, encompassing the scale of biological cells, organelles, and biomacromolecules. Optionally, the light emitted by light source 101 can be broadband or monochromatic; it can be any of ultraviolet, visible, and infrared light. When light source 101 is an infrared light source, care must be taken to avoid damage to cells caused by thermal effects in the infrared band.

[0060] Furthermore, when it is necessary to screen out two or more types of particles, at least two particle outlets 202 can be provided. Different particles are subjected to different optical forces in the light field, and their accelerations during projectile-like motion are different. Optionally, the metasurface 102 is designed so that the incident light beam forms corresponding focal points at different particle outlets 202. The different focal points are designed to be linearly distributed in the direction of the fluid, from large to small, according to the magnitude of the acceleration applied to the different particles. In this case, the particle with the largest acceleration is diverted, and the remaining particles continue to flow until they are diverted under the action of the corresponding focal point. In other words, along the direction of particle flow in the screening channel 20, the particle outlets 202 are sorted according to the particle acceleration: the particle with the largest acceleration is diverted from the first particle outlet, the particle with the second largest acceleration is diverted from the second particle outlet, and so on. Preferably, the number of focal points is designed according to the type to be screened, so that each focal point is responsible for capturing one type of particle. Optionally, the size of the focal points is different, that is, the size of the light spot at different focal points is different. Optionally, the light intensity at different focal points is different.

[0061] Since particle acceleration is affected by the optical force, and the magnitude of the optical force is positively correlated with the intensity of the light field, a light force modulator can be placed before the focal point to artificially adjust the intensity of the light field by controlling the transmittance, thereby adjusting the optical force and acceleration exerted by the light trap at the focal point on the particle.

[0062] More advantageously, if Figure 1As shown, the particle classification device provided in the embodiment of the present application also includes a light force regulator 30, which is arranged between the optical window 201 and the metasurface 102. The light force regulator 30 controls the intensity of the light field in the screening channel 20 by adjusting the transmittance. On this basis, it is possible to flexibly adjust the light field classification standard according to the type of particle in real time to achieve the classification of any particle type. Optionally, the light force regulator 30 includes an optical attenuator or a polarizer, etc. Preferably, when the number of particle outlets 202 is greater than or equal to two, each particle outlet 202 corresponds to a light force regulator 30. That is to say, preferably, the intensity of each focus can be adjusted independently.

[0063] The presence of the optical force regulator 30 makes the particle classification device programmable. Optionally, the particle classification device provided in the embodiment of the present application further includes a computer 40. The computer 40 is connected to the optical force regulator 30 to control the optical force regulator 30.

[0064] Next, the metasurface according to the embodiments of the present application is described in more detail.

[0065] Metasurfaces are a specific application of metasurfaces. A metasurface is a subwavelength, artificial nanostructured film that modulates incident light based on its metasurface superstructure units. These units contain all-dielectric or plasmonic nanoantennas, which can directly control properties of light, such as phase, amplitude, and polarization.

[0066] The metasurface provided in the embodiments of the present application at least satisfies:

[0067]

[0068] in, is the phase distribution that needs to be modulated in the metasurface, r is the distance from any point on the metasurface to the center, f is the distance from the focal plane of the metasurface to the metasurface, and x i is the distance from the off-axis focus of the metasurface to the optical axis on the focal plane, α xi is the angle between the off-axis principal ray and the optical axis. When the particle classification device provided in the embodiment of the present application performs classification through multiple focal points, the optical system 102 corresponds to multiple metasurfaces, then is the phase distribution that needs to be modulated in the metasurface, r is the distance from any point on the ith metasurface to the center, f is the distance from the focal plane of the ith metasurface to the metasurface, x i is the distance from the off-axis focus of the ith metasurface to the optical axis on the focal plane, α xi is the angle between the off-axis principal ray and the optical axis. Due to the design flexibility of metasurfaces, in some cases, multiple metasurfaces can be integrated into the same metasurface. When multiple metasurfaces are integrated into the same metasurface, each metasurface still satisfies the above formula (1).

[0069] Figure 2 A schematic structural diagram of a metasurface according to an embodiment of the present application is shown. Figure 3 、 Figure 4 and Figure 5 A plan view of a microstructure layer of a metasurface according to an embodiment of the present application is shown.

[0070] like Figure 2 As shown, according to an embodiment of the present application, a metasurface includes a substrate and a microstructure layer disposed on the substrate, wherein the microstructure layer includes periodically arranged metastructure units. Micro-nanostructures are disposed in the metastructure units.

[0071] like Figure 3 As shown, according to the embodiment of the present application, the superstructure units can be arranged into a regular hexagonal array. Figure 4 As shown, according to the embodiment of the present application, the superstructure units can be arranged into a square array. Figure 5 As shown, according to the embodiments of the present application, the superstructure units can also be arranged in a fan shape. Those skilled in the art will recognize that the superstructure units included in the microstructure layer can also include other forms of array arrangements, all of which are within the scope of the present application. The period of the superstructure units is related to the wavelength of the incident light. Optionally, the period of the superstructure units is greater than or equal to 200nm and less than or equal to 1500nm. It should be understood that the periods of the superstructure units in the microstructure layer can be all the same or partially the same.

[0072] According to an embodiment of the present application, each superstructure unit may optionally be provided with a micro-nanostructure at its center and / or vertex. According to an embodiment of the present application, the micro-nanostructure is an all-dielectric structural unit. According to an embodiment of the present application, the micro-nanostructure has high transmittance in its operating wavelength range. According to an embodiment of the present application, the micro-nanostructure may be formed from at least one of the following materials: titanium oxide, silicon oxide, silicon nitride, gallium nitride, gallium phosphide, aluminum oxide, hydrogenated amorphous silicon, or the like. For example, when the target wavelength is visible light, the material of the micro-nanostructure may include one or more of silicon nitride, titanium oxide, gallium nitride, gallium phosphide, and hydrogenated amorphous silicon; when the target wavelength is near-infrared light, the material of the micro-nanostructure may include one or more of silicon nitride, titanium oxide, gallium nitride, gallium phosphide, hydrogenated amorphous silicon, amorphous silicon, and crystalline silicon; when the target wavelength is far-infrared light, the material of the micro-nanostructure may include one or more of crystalline silicon, crystalline germanium, zinc sulfide, and zinc selenide; and when the target wavelength is ultraviolet light, the material of the micro-nanostructure may include hafnium oxide. It should be noted that the materials of the substrate and the micro-nano structure may be the same or different.

[0073] The micro-nanostructures in the superstructure units of the metasurface can be in the form of nano-fins. Figure 6The cross section of the micro-nanostructure shown in is a rectangle, while Figure 7 The cross-section of the micro-nanostructure shown in the figure is elliptical, but the present application is not limited to this. The micro-nanostructure can also adopt other forms of structures, and all these variations are covered by the scope of the present application. The size of the micro-nanostructure is related to the incident wavelength. Optionally, the height of the micro-nanostructure is greater than or equal to 300nm and less than or equal to 5μm. Optionally, the diameter of the micro-nanostructure is greater than or equal to 50nm and less than or equal to 450nm. The dimension perpendicular to the height axis refers to the dimension of the cross-section obtained by cutting the micro-nanostructure in a direction perpendicular to the height axis. For example, for a nanofin, its cross-section perpendicular to the height axis is a rectangle, then the dimension perpendicular to the height axis refers to the length and width of the rectangle. That is, the length and width of the cross-section of the nanofin are between 50nm and 450nm. For another example, for a nano-elliptical column, its cross-section perpendicular to the height axis is an ellipse, then the dimension perpendicular to the height axis refers to the length of the major axis and minor axis of the ellipse. The micro-nanostructure provided in the embodiment of the present application can also be a polarization-insensitive structure, such as a nano-cylinder, a square column, etc. The polarization-insensitive structure imposes a propagation phase on the incident light.

[0074] According to the embodiments of the present application, air or other materials that are transparent or translucent in the operating band can be filled between each micro-nanostructure. According to the embodiments of the present application, the absolute value of the difference between the refractive index of the filled material and the refractive index of the micro-nanostructure should be greater than or equal to 0.5.

[0075] In the embodiment of the present application, multiple metasurfaces are integrated into one metasurface. Subunits can be designed in the metastructure unit to achieve different functions through the hybrid arrangement of micro-nanostructures. Figure 8 Each of the superstructure units includes multiple groups of subunits; the shapes of the multiple groups of subunits are all densely packed figures; each group of subunits is respectively provided with the same type of micro-nanostructure, and the micro-nanostructures provided in two adjacent subunits are different. Figure 8 It shows that a metasurface can achieve different functions through the staggered arrangement of micro-nanostructures.

[0076] On the other hand, an embodiment of the present application further provides a particle classification system, which includes the particle classification device provided in any of the above embodiments and a particle collection device 50. The particle collection device 50 is correspondingly connected to the particle outlet 202 and is used to collect particles according to type.

[0077] For example, the present invention provides a particle classification device, such as Figure 1As shown. The device includes an optical driver 10 and a screening channel 20. The optical driver 10 includes a light source 101 and an optical system 102. An optical window 201 is provided on one side of the screening channel 20, and three particle outlets 202 are provided on the other side. The optical window 201 is opposite the optical system 102. The light generated by the light source 101 is modulated by the optical system 102 and forms corresponding focal points at the three particle outlets 202. This causes the target particles in the screening channel 20 to undergo quasi-projectile motion with different accelerations under the drive of light force and then be distributed into the three particle outlets 202.

[0078] The optical system 102 is a metasurface. The metasurface is designed by integrating three metasurfaces with different functions, and three groups of micro-nanostructures with different functions are arranged on the same substrate in an interlaced manner. The phase distribution of the three metasurfaces satisfies formula (1). i The square superstructure units with a period of 1500nm are used in the metasurface, where each superstructure unit consists of 9 subunits with a period of 500nm. Figure 8 The metasurface operates at a wavelength of 1550 nm, has a micro-nano height of 800 nm, and a radius ranging from 50 to 450 nm. The metasurface has a designed focal length of 800 μm and a metasurface diameter of 500 μm.

[0079] According to the embodiment of the present application, a group of nanoparticles with diameters of 1 μm, 2.5 μm and 5 μm are given for classification. By controlling the optical force regulator 30 to adjust the light flux at the exit of each particle, the optical force distribution in the y direction of each particle in the light field is as follows: Figure 9 As shown, its y-direction acceleration is Figure 10 As shown. The fluid containing the above particles enters the screening channel 20 with an initial velocity v0. Under the action of the optical force at each focus, particles of different diameters receive different accelerations. Figure 9 and Figure 10 Because the optical force is proportional to the square of the particle's volume, larger particles experience greater acceleration and fall into the optical trap first. Particles of different sizes fall into different optical traps. By controlling the optical force regulator 30 to switch the optical trap on and off at a certain frequency, particles captured by the optical trap flow along the diversion channel into the corresponding cell collection chamber.

[0080] In summary, the particle classification device and system provided in the embodiments of the present application form a focus at the particle exit of the screening channel through an optical drive device, and use optical force to drive the particles to perform a quasi-projectile motion in the screening channel and then enter the particle exit. This device does not need to identify each cell and then classify them one by one, greatly improving the classification efficiency. The device uses optical force to classify particles without applying sheath fluid and charge, and therefore has the advantages of simple structure, small size, high efficiency, strong contactless controllability, and low cost.

[0081] In addition, the embodiment of the present application can also be provided with multiple particle outlets to classify and screen multiple particles. In particular, the present application can classify three or more types of particles, which is impossible for traditional flow cytometers.

[0082] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art who can easily conceive of changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A particle classification device, characterized in that: The device includes an optical driver (10) and a screening channel (20); The optical driver (10) comprises a light source (101) and an optical system (102); the optical system (102) comprises at least one metasurface; and the metasurface at least satisfies: ； in, is the phase distribution that needs to be modulated in the metasurface, r is the distance from any point on the metasurface to the center, f is the distance from the focal plane of the metasurface to the metasurface, x i is the distance from the off-axis focus of the metasurface to the optical axis in the focal plane, is the angle between the off-axis chief ray and the optical axis; An optical window (201) is provided on one side of the screening channel (20); a particle outlet (202) is provided on the other side of the screening channel (20); the optical window (201) is opposite to the optical system (102); the light generated by the light source (101) is modulated by the optical system (102) and forms corresponding focal points at the particle outlet (202), so that the target particles in the screening channel (20) perform a quasi-projectile motion under the drive of light force and then enter the particle outlet (202); The length corresponding to the farthest span of the focus along the moving direction of the particle is greater than the length of the optical system along the moving direction of the particle.

2. The device according to claim 1, wherein The optical system (102) also includes a combination of an optical fiber array and a microlens array.

3. The device according to claim 1, wherein The number of the particle outlets (202) is greater than or equal to 2.

4. The device according to claim 3, characterized in that Different outlets in the particle outlet (202) correspond to focal points of different sizes.

5. The device according to claim 3, wherein Different outlets in the particle outlet (202) correspond to different focal points with different intensities.

6. The device according to claim 1, wherein The device also includes a light force regulator (30); The optical force regulator (30) is arranged between the metasurface and the optical window (201); The light force regulator (30) regulates transmittance to control the intensity of the light field in the screening channel (20).

7. The device according to claim 6, characterized in that The optical force regulator (30) comprises an optical attenuator or a polarizer.

8. The device according to claim 1, wherein The metasurface includes a substrate and a microstructure layer disposed on the substrate; Wherein, the microstructure layer comprises periodically arranged superstructure units; the shape of the superstructure units is a densely packed pattern; and, The superstructure unit is provided with a micro-nano structure.

9. The device according to claim 8, wherein Each of the superstructure units includes a plurality of groups of subunits; The shapes of the multiple groups of subunits are all densely packed graphics; The same type of micro-nano structures are respectively arranged in each group of the sub-units, and the micro-nano structures arranged in two adjacent sub-units are different.

10. The device according to claim 9, wherein The micro-nano structures of the same type have different sizes; The dimensions include diameter or height.

11. The device according to claim 8, wherein The period of the superstructure unit is greater than or equal to 200 nm and less than or equal to 1500 nm.

12. The device according to claim 8, wherein The height of the micro-nano structure is greater than or equal to 300 nm and less than or equal to 5 μm.

13. The device according to claim 8, wherein The radius of the micro-nano structure is greater than or equal to 50 nm and less than or equal to 450 nm.

14. The device according to claim 7, wherein The apparatus further comprises a computer (40); The computer (40) is connected to the light force regulator (30) and is used to control the light force regulator (30).

15. A particle classification system, characterized in that The particle classification system comprises a particle classification device and a particle collecting device (50) as claimed in any one of claims 1 to 14; The particle collecting device (50) is connected to the particle outlet (202).

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