A method and system for determining a position bias

Abstract

The application provides a method and system for determining position deviation, wherein the method comprises the following steps: obtaining first photoelectric data and second photoelectric data corresponding to a conveyed object; bringing the first photoelectric data into a corresponding first mathematical model to obtain an actual horizontal coordinate value, and bringing the second photoelectric data into a corresponding second mathematical model to obtain an actual vertical coordinate value; subtracting a standard horizontal coordinate value from the actual horizontal coordinate value to obtain a horizontal coordinate deviation, and subtracting a standard vertical coordinate value from the actual vertical coordinate value to obtain a vertical coordinate deviation; and taking the horizontal coordinate deviation and the vertical coordinate deviation as the position deviation of the conveyed object. The first photoelectric data and the second photoelectric data are respectively brought into the corresponding first mathematical model and the second mathematical model to determine the actual horizontal coordinate value and the actual vertical coordinate value of the conveying mechanism, and then the horizontal coordinate deviation and the vertical coordinate deviation are determined, so that the technical problem that the position deviation of the conveyed object cannot be determined is solved, and the technical effect of improving the conveying accuracy is achieved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method and system for determining positional deviation. Background Technology

[0002] Wafers are key semiconductor components in the integrated circuit industry. During wafer manufacturing, wafers are transferred from an input carrier to multiple processing chambers, where they are manufactured. The manufactured wafers are then transferred to an output carrier or a target carrier.

[0003] As wafer manufacturing processes become increasingly complex and the process flow lengthens, wafers may experience positional deviations during transfer between multiple processing chambers. This can lead to inaccurate placement of the wafers when they are delivered to the output or target carrier. Significant deviations could result in the wafer not being accurately delivered to the carrier, or even damage or collision. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide at least one method and system for determining position deviation. By inputting the first photoelectric data and the second photoelectric data into the corresponding first mathematical model and the second mathematical model respectively, the actual horizontal coordinate value and the actual vertical coordinate value of the transmission mechanism are determined, and then the horizontal coordinate deviation and the vertical coordinate deviation are determined. This solves the technical problem of being unable to determine the position deviation of the transmitted object and achieves the technical effect of improving the transmission accuracy.

[0005] This application mainly includes the following aspects:

[0006] In a first aspect, embodiments of this application provide a method for determining positional deviation. The method includes: acquiring first photoelectric data and second photoelectric data corresponding to the object being transported; inputting the first photoelectric data into a corresponding first mathematical model to obtain an actual abscissa value, and inputting the second photoelectric data into a corresponding second mathematical model to obtain an actual ordinate value; subtracting the actual abscissa value from a standard abscissa value to obtain an abscissa deviation, and subtracting the actual ordinate value from a standard ordinate value to obtain a ordinate deviation; and using the abscissa deviation and ordinate deviation as the positional deviation of the object being transported.

[0007] Optionally, the method for determining the first mathematical model is as follows: fix the y-axis position of the conveying mechanism, control the conveying mechanism to move along the x-axis, and obtain the first mathematical model with the horizontal coordinate of the conveying mechanism as the independent variable and the first standard photoelectric data as the dependent variable through data fitting; the method for determining the second mathematical model is as follows: fix the x-axis position of the conveying mechanism, control the conveying mechanism to move along the y-axis, and obtain the second mathematical model with the vertical coordinate of the conveying mechanism as the independent variable and the second standard photoelectric data as the dependent variable through data fitting.

[0008] Optionally, the standard horizontal coordinate value is determined by: acquiring the first target photoelectric data corresponding to the object being transported, and substituting the first target photoelectric data into the corresponding first mathematical model to obtain the standard horizontal coordinate value; the standard vertical coordinate value is determined by: acquiring the second target photoelectric data corresponding to the object being transported, and substituting the second target photoelectric data into the corresponding second mathematical model to obtain the standard vertical coordinate value.

[0009] Optionally, after using the horizontal and vertical coordinate deviations as the positional deviations of the conveyed object, the method further includes: determining the lateral deviation direction corresponding to the horizontal coordinate deviation, and controlling the conveying mechanism to move the absolute value of the horizontal coordinate deviation in the opposite direction of the lateral deviation direction to correct the horizontal coordinate deviation; determining the longitudinal deviation direction corresponding to the vertical coordinate deviation, and controlling the conveying mechanism to move the absolute value of the vertical coordinate deviation in the opposite direction of the longitudinal deviation direction to correct the vertical coordinate deviation.

[0010] Secondly, embodiments of this application also provide a system for determining positional deviation. The system includes: a conveying mechanism, a conveyed object, a first photoelectric sensor, a second photoelectric sensor, and a processor; the first photoelectric sensor and the second photoelectric sensor are installed in an operating chamber corresponding to the conveying mechanism; the conveying mechanism is used to drive the conveyed object to move; the first photoelectric sensor is used to acquire first photoelectric data corresponding to the conveyed object; the second photoelectric sensor is used to acquire second photoelectric data corresponding to the conveyed object; and the processor is used to execute any one of the methods for determining positional deviation (1-4).

[0011] Optionally, the first photoelectric sensor is further used to acquire first standard photoelectric data corresponding to the object being transmitted; the second photoelectric sensor is further used to acquire second standard photoelectric data corresponding to the object being transmitted.

[0012] Optionally, the first photoelectric sensor and the second photoelectric sensor are installed in the corresponding operating chamber of the conveying mechanism, including: the transmitting end and the receiving end of the first photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the conveying mechanism; the transmitting end and the receiving end of the second photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the conveying mechanism.

[0013] Optionally, the system also includes: an encoder; the encoder is installed on the conveying mechanism, and the encoder is used to obtain the horizontal and vertical coordinates of the conveying mechanism.

[0014] Thirdly, embodiments of this application also provide an apparatus for determining positional deviation, the apparatus comprising: a first acquisition module, configured to acquire first photoelectric data and second photoelectric data corresponding to the object being transported; a second acquisition module, configured to input the first photoelectric data into a corresponding first mathematical model to obtain an actual abscissa value, and input the second photoelectric data into a corresponding second mathematical model to obtain an actual ordinate value; a first determination module, configured to subtract the actual abscissa value from a standard abscissa value to obtain an abscissa deviation, and subtract the actual ordinate value from a standard ordinate value to obtain a ordinate deviation; and a second determination module, configured to use the abscissa deviation and the ordinate deviation as the positional deviation of the object being transported.

[0015] Fourthly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the step of determining the position deviation in the first aspect or any possible implementation of the first aspect.

[0016] This application provides a method and system for determining positional deviation. The method involves acquiring first and second photoelectric data corresponding to the object being transported; inputting the first photoelectric data into a corresponding first mathematical model to obtain the actual abscissa value; inputting the second photoelectric data into a corresponding second mathematical model to obtain the actual ordinate value; subtracting the actual abscissa value from the standard abscissa value to obtain the abscissa deviation; and subtracting the actual ordinate value from the standard ordinate value to obtain the ordinate deviation; using the abscissa deviation and ordinate deviation as the positional deviation of the object being transported. This application, by inputting the first and second photoelectric data into the corresponding first and second mathematical models respectively, determines the actual abscissa and ordinate values ​​of the transport mechanism, thereby determining the abscissa deviation and ordinate deviation. This solves the technical problem of being unable to determine the positional deviation of the object being transported, achieving the technical effect of improving transport accuracy.

[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A flowchart of a method for determining positional deviation provided by an embodiment of this application is shown.

[0020] Figure 2 A flowchart is shown for another method for determining positional deviation provided by an embodiment of this application.

[0021] Figure 3 A functional block diagram of a system for determining positional deviation provided in an embodiment of this application is shown.

[0022] Figure 4 A schematic diagram of the preset route of the conveying mechanism provided in the embodiments of this application is shown.

[0023] Figure 5 A functional block diagram of an apparatus for determining positional deviation provided in an embodiment of this application is shown. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the drawings in this application are for illustrative and descriptive purposes only and are not intended to limit the scope of protection of this application. Furthermore, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate operations implemented according to some embodiments of this application. It should be understood that the operations in the flowcharts may not be implemented in sequence, and steps without logical contextual relationships may be reversed or implemented simultaneously. In addition, those skilled in the art, guided by the content of this application, may add one or more other operations to the flowcharts, or remove one or more operations from the flowcharts.

[0025] Furthermore, the described embodiments are merely some, not all, of the embodiments of this application. The components of the embodiments of this application described and illustrated herein can typically be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0026] In the existing wafer manufacturing process, the wafer is transferred between multiple processing chambers. During the transfer, the wafer's position may be deviated. Consequently, when the manufactured wafer is transferred to the output carrier or target carrier, the output position of the wafer may also be deviated, making it impossible to accurately place the manufactured wafer into the output carrier or target carrier. This may result in the risk of damaging or colliding with the wafer.

[0027] Based on this, the embodiments of this application provide a method and system for determining positional deviation. By inputting the first photoelectric data and the second photoelectric data into the corresponding first mathematical model and the second mathematical model, respectively, the actual horizontal coordinate value and the actual vertical coordinate value of the conveying mechanism are determined, thereby determining the horizontal coordinate deviation and the vertical coordinate deviation. This solves the technical problem of being unable to determine the positional deviation of the conveyed object and achieves the technical effect of improving the accuracy of conveying. Specifically, as follows:

[0028] Please see Figure 1 and Figure 3 , Figure 1 This is a flowchart illustrating a method for determining positional deviation provided in an embodiment of this application. Figure 3 This is a functional block diagram of a system for determining positional deviation provided in an embodiment of this application. Figure 1 As shown in the embodiments of this application, the method for determining positional deviation includes the following steps:

[0029] S101. Obtain the first photoelectric data and the second photoelectric data corresponding to the object being transmitted.

[0030] like Figure 3 As shown, the system 20 for determining positional deviation includes: a conveying mechanism 206, a conveyed object 205, a first photoelectric sensor, a second photoelectric sensor, and a processor (not shown in the figure); the first and second photoelectric sensors are installed in the operating chamber 207 corresponding to the conveying mechanism 206. The first photoelectric sensor is used to acquire first photoelectric data corresponding to the conveyed object; the second photoelectric sensor is used to acquire second photoelectric data corresponding to the conveyed object. The conveying mechanism 206 is used to drive the conveyed object 205 to move. The processor is used to execute the method for determining positional deviation. The installation range length d of the first and second photoelectric sensors needs to be greater than the diameter of the conveyed object 205 (in this embodiment, the case where the photoelectric sensor is most blocked is taken as the reference photoelectric data, so the uniqueness of the case where the photoelectric sensor is most blocked must be ensured, therefore the installation range length d of the first and second photoelectric sensors needs to be greater than the diameter of the conveyed object 205).

[0031] The first photoelectric sensor includes a transmitter and a receiver. 201 can correspond to the transmitter of the first photoelectric sensor, and 202 can correspond to the receiver of the first photoelectric sensor, or 201 can correspond to the receiver of the first photoelectric sensor, and 202 can correspond to the transmitter of the first photoelectric sensor. The second photoelectric sensor includes a transmitter and a receiver. 203 can correspond to the transmitter of the first photoelectric sensor, and 204 can correspond to the receiver of the first photoelectric sensor, or 203 can correspond to the receiver of the first photoelectric sensor, and 204 can correspond to the transmitter of the first photoelectric sensor.

[0032] In other words, the first photoelectric sensor and the second photoelectric sensor are installed in the corresponding operating chamber of the conveying mechanism, including: the transmitting end and the receiving end of the first photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the conveying mechanism; the transmitting end and the receiving end of the first photoelectric sensor; the transmitting end and the receiving end of the second photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the conveying mechanism.

[0033] Acquiring first and second photoelectric data corresponding to the transported object includes: the transport mechanism carrying the transported object moves according to a preset route (whether the relative position of the transported object and the transport mechanism shifts during this process is unknown); the maximum or minimum value of the first photoelectric sensor is determined as the first photoelectric data; and the maximum or minimum value of the second photoelectric sensor is determined as the second photoelectric data. Here, the first photoelectric data refers to the output data of the first photoelectric sensor when the transported object covers the first photoelectric sensor to the maximum extent; and the second photoelectric data refers to the output data of the second photoelectric sensor when the transported object covers the second photoelectric sensor to the maximum extent.

[0034] Among them, the output data of the photoelectric sensor corresponding to the most obscured condition is the maximum or minimum value; that is, if the output data of the first photoelectric sensor and the second photoelectric sensor corresponding to the most obscured condition is the maximum value, then the first photoelectric data is the maximum value among all the output data of the first photoelectric sensor, and the second photoelectric data is the maximum value among all the output data of the second photoelectric sensor.

[0035] S102. Substitute the first photoelectric data into the corresponding first mathematical model to obtain the actual horizontal coordinate value, and substitute the second photoelectric data into the corresponding second mathematical model to obtain the actual vertical coordinate value.

[0036] The method for determining the first mathematical model is as follows: The y-axis position of the conveying mechanism is fixed, and the conveying mechanism is controlled to move along the x-axis (i.e., the y-axis position of the conveying mechanism is fixed, only the x-axis of the conveying mechanism moves). A first mathematical model is obtained through data fitting, with the horizontal coordinate of the conveying mechanism as the independent variable and the first standard photoelectric data as the dependent variable. Here, the first standard photoelectric data refers to the output data of the first photoelectric sensor corresponding to the horizontal coordinate of the conveying mechanism. While the y-axis position of the conveying mechanism is fixed, and the conveying mechanism is controlled to move along the x-axis, the object being conveyed is ensured to transition from complete unobstructedness to partial obstruction and then back to complete unobstructedness of the first photoelectric sensor.

[0037] The second mathematical model is determined as follows: The x-axis position of the conveying mechanism is fixed, and the conveying mechanism is moved along the y-axis (i.e., the x-axis position of the conveying mechanism is fixed, only the y-axis of the conveying mechanism moves). A second mathematical model is obtained through data fitting, with the ordinate of the conveying mechanism as the independent variable and the second standard photoelectric data as the dependent variable. Here, the second standard photoelectric data refers to the output data of the second photoelectric sensor corresponding to the ordinate of the conveying mechanism. While the x-axis position of the conveying mechanism is fixed, and the conveying mechanism is moved along the y-axis, the conveyed object is ensured to transition from completely unobstructed to completely obstructed and then back to completely unobstructed from the second photoelectric sensor.

[0038] Therefore, the first photoelectric sensor is also used to acquire the first standard photoelectric data corresponding to the object being transmitted; the second photoelectric sensor is also used to acquire the second standard photoelectric data corresponding to the object being transmitted.

[0039] The system 20 for determining positional deviation also includes an encoder (not shown in the figure). The encoder is installed on the conveying mechanism and is used to acquire the horizontal and vertical coordinates of the conveying mechanism. Since the preset route of the conveying mechanism is fixed in actual applications, the horizontal and vertical coordinates obtained by the encoder remain unchanged. Therefore, when the positional deviation of the conveyed object occurs, the positional deviation of the conveyed object cannot be determined by the encoder.

[0040] When determining the first and second mathematical models, it is necessary to ensure that the relative position between the object to be transported and the transport mechanism is set to a preset relative position before the transport mechanism moves (i.e., the object to be transported does not have a positional deviation).

[0041] The installation positions of the first and second photoelectric sensors are related to the preset route of the conveying mechanism, allowing the conveyed object to obstruct either sensor during transport. Furthermore, the extent of obstruction by the conveyed object changes during transport. If the preset route of the conveying mechanism changes, preventing the conveyed object from obstructing either sensor, or if the obstruction extent remains unchanged, a new mathematical model needs to be established.

[0042] Figure 4 A schematic diagram of the preset route of the conveying mechanism provided in an embodiment of this application is shown. Figure 4 As shown, for example, if the preset route of the transmission mechanism is from (x1, (y1, (y2, y3)), a +y b ) / 2) walk to (x2, (y a +y b) / 2), 201 is the transmitter of the first photoelectric sensor and its installation position is (x a y b (z1), 202 is the receiver of the first sensor and its installation position is (x a y b ,-z1),203 is the transmitter of the second photoelectric sensor and its installation position is (x a y a (z1), 204 is the receiver of the second sensor and its installation position is (x a y a ,-z1).

[0043] In a preferred embodiment, if the relative position between the object being transported and the transport mechanism is a preset relative position, then the center of the object being transported and the connection point between the object and the transport mechanism coincide. In this case, the y-axis of the transport mechanism is controlled to move to the y-axis. a and y b At the midpoint, the x-axis of the conveying mechanism is controlled to move from point x1 to point x2, acquiring the output data of the first photoelectric sensor (i.e., the first standard photoelectric data). A first mathematical model is obtained through data fitting, using the x-axis coordinate value of the conveying mechanism (i.e., the horizontal coordinate value) as the independent variable and the corresponding first standard photoelectric data as the dependent variable. The x-axis of the conveying mechanism is then controlled to move to x... a The y-axis of the transmission mechanism is controlled to move from point y1 to point y2, and the output data of the second photoelectric sensor (i.e., the second standard photoelectric data) is acquired. A second mathematical model is obtained by data fitting, with the y-axis coordinate value of the transmission mechanism (i.e., the vertical coordinate value) as the independent variable and the corresponding second standard photoelectric data as the dependent variable.

[0044] In practical applications, the process of transporting the finished wafers to the wafer cassette after wafer processing and manufacturing is used. During this process, the preset route of the conveying mechanism is generally constant, and the preset route basically only moves the x-axis or y-axis of the conveying mechanism.

[0045] The first photoelectric data is input into the corresponding first mathematical model to obtain the actual horizontal coordinate value, and the second photoelectric data is input into the corresponding second mathematical model to obtain the actual vertical coordinate value.

[0046] S103. The difference between the actual x-coordinate value and the standard x-coordinate value is used to obtain the x-coordinate deviation, and the difference between the actual y-coordinate value and the standard y-coordinate value is used to obtain the y-coordinate deviation.

[0047] After determining the first mathematical model and the second mathematical model, it is also necessary to control the transmission mechanism to carry the transmitted object along the preset route, provided that the relative position between the transmitted object and the transmission mechanism is a preset relative position (i.e., the transmitted object does not have a positional deviation), so as to obtain the first target photoelectric data and the second target photoelectric data corresponding to the transmitted object.

[0048] The first target photoelectric data refers to the output data of the first photoelectric sensor when the object being transported blocks the first photoelectric sensor the most, given that the relative position between the object being transported and the transport mechanism is a preset relative position (i.e., the maximum or minimum value of the output data of the first photoelectric sensor); the second target photoelectric data refers to the output data of the second photoelectric sensor when the object being transported blocks the second photoelectric sensor the most, given that the relative position between the object being transported and the transport mechanism is a preset relative position (i.e., the maximum or minimum value of the output data of the first photoelectric sensor).

[0049] The standard abscissa value is determined as follows: First target photoelectric data corresponding to the object being transported is acquired, and this data is then input into the corresponding first mathematical model to obtain the standard abscissa value. In other words, when the object being transported does not experience any positional deviation, the abscissa value corresponding to the point where the first photoelectric sensor is most obstructed, as determined by the first mathematical model, is defined as the standard abscissa value.

[0050] The standard ordinate value is determined as follows: Second target photoelectric data corresponding to the transmitted object is acquired, and this data is then input into the corresponding second mathematical model to obtain the standard ordinate value. In other words, when the transmitted object does not experience any positional deviation, the ordinate value corresponding to the point where the second photoelectric sensor is most obstructed, as determined by the second mathematical model, is identified as the standard ordinate value.

[0051] In other words, the standard horizontal and vertical coordinate values ​​are obtained under the condition that the relative position between the object being transported and the transport mechanism is a preset relative position.

[0052] In a preferred embodiment, the preset route of the conveying mechanism is from (x1, (y1) to (y2) to (y3) to (y4) to (y5) to (y6) to (y7) to (y8) to (y9) to (y1 ... a +y b ) / 2) walk to (x2, (y a +y b(2) When the center of the object being transported coincides with the connection position between the object being transported and the transport mechanism, the transport mechanism carries the object being transported and moves along a preset route. During the movement, the maximum or minimum value of the output data of the first photoelectric sensor is obtained and determined as the first target photoelectric data. The maximum or minimum value of the output data of the second photoelectric sensor is obtained and determined as the second target photoelectric data. The first target photoelectric data is substituted into the corresponding first mathematical model to obtain the standard abscissa value. The second target photoelectric data is substituted into the corresponding second mathematical model to obtain the standard abscissa value.

[0053] The difference between the actual x-coordinate value and the standard x-coordinate value is used to obtain the x-coordinate deviation, and the difference between the actual y-coordinate value and the standard y-coordinate value is used to obtain the y-coordinate deviation.

[0054] S104. Use the horizontal and vertical coordinate deviations as the positional deviations of the object being transported.

[0055] Please see Figure 2 , Figure 2 A flowchart of another method for determining positional deviation provided in an embodiment of this application is shown below. Figure 2 As shown, after using the horizontal and vertical coordinate deviations as the positional deviations of the transported object, the method further includes:

[0056] S201. Determine the lateral deviation direction corresponding to the lateral coordinate deviation, and control the conveying mechanism to move the absolute value of the lateral coordinate deviation in the opposite direction to correct the lateral coordinate deviation.

[0057] In other words, if the difference between the actual x-coordinate value and the standard x-coordinate value results in a x-coordinate deviation greater than zero, it indicates that the object being transported has deviated in the x-axis direction of the transport mechanism. In this case, the x-axis of the transport mechanism needs to be moved by the x-coordinate deviation distance in the opposite direction of the x-axis movement. If the difference between the actual x-coordinate value and the standard x-coordinate value results in a x-coordinate deviation less than zero, it indicates that the object being transported has deviated in the opposite direction of the x-axis direction of the transport mechanism. In this case, the x-axis of the transport mechanism needs to be moved by the absolute value of the x-coordinate deviation distance in the x-axis direction.

[0058] S202. Determine the longitudinal deviation direction corresponding to the longitudinal deviation, and control the conveying mechanism to move the absolute value of the longitudinal deviation in the opposite direction to correct the longitudinal deviation.

[0059] In other words, if the difference between the actual ordinate value and the standard ordinate value results in a ordinate deviation greater than zero, it indicates that the object being transported has deviated in the direction of movement along the y-axis of the transport mechanism. In this case, the y-axis of the transport mechanism needs to be moved in the opposite direction of movement along the y-axis by the ordinate deviation distance. If the difference between the actual ordinate value and the standard ordinate value results in a ordinate deviation less than zero, it indicates that the object being transported has deviated in the opposite direction of movement along the y-axis of the transport mechanism. In this case, the y-axis of the transport mechanism needs to be moved in the opposite direction of movement along the y-axis by the absolute value of the ordinate deviation distance.

[0060] Based on the same application concept, this application also provides an apparatus for determining position deviation, which corresponds to the method for determining position deviation provided in the above embodiments. Since the principle of the apparatus in this application is similar to the method for determining position deviation in the above embodiments of this application, the implementation of the apparatus can refer to the implementation of the method, and the repeated parts will not be described again.

[0061] Figure 5 This application provides a functional block diagram of a device for determining position deviation. The device 10 for determining position deviation includes: a first acquisition module 101, a second acquisition module 102, a first determination module 103, and a second determination module 104. The first acquisition module 101 is used to acquire first photoelectric data and second photoelectric data corresponding to the object being transported. The second acquisition module 102 is used to input the first photoelectric data into a corresponding first mathematical model to obtain the actual horizontal coordinate value, and input the second photoelectric data into a corresponding second mathematical model to obtain the actual vertical coordinate value. The first determination module 103 is used to subtract the actual horizontal coordinate value from the standard horizontal coordinate value to obtain the horizontal coordinate deviation, and subtract the actual vertical coordinate value from the standard vertical coordinate value to obtain the vertical coordinate deviation. The second determination module 104 is used to use the horizontal coordinate deviation and the vertical coordinate deviation as the position deviation of the object being transported.

[0062] Based on the same concept, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when run by a processor, executes the steps of the method for determining position deviation provided in the above embodiments.

[0063] Specifically, the storage medium can be a general-purpose storage medium, such as a portable disk or hard disk. When the computer program on the storage medium is run, it can execute the above-mentioned method for determining the position deviation. By inputting the first photoelectric data and the second photoelectric data into the corresponding first mathematical model and the second mathematical model, respectively, the actual horizontal coordinate value and the actual vertical coordinate value of the transmission mechanism are determined, and then the horizontal coordinate deviation and the vertical coordinate deviation are determined. This solves the technical problem of not being able to determine the position deviation of the transmitted object and achieves the technical effect of improving the transmission accuracy.

[0064] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems and devices described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of units is only a logical functional division; in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Another point is that the displayed or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces; the indirect coupling or communication connection of devices or units may be electrical, mechanical, or other forms.

[0065] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0066] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0067] If a function is implemented as a software functional unit and sold or used as an independent product, it can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0068] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for determining positional deviation, characterized in that, The method includes: During the process of the conveying mechanism carrying the conveyed object moving along a preset route, first photoelectric data and second photoelectric data corresponding to the conveyed object are acquired. The preset route includes moving only the x-axis or y-axis of the conveying mechanism. The first photoelectric data refers to the output data of the first photoelectric sensor when the conveyed object covers the first photoelectric sensor the most. The second photoelectric data refers to the output data of the second photoelectric sensor when the conveyed object covers the second photoelectric sensor the most. The photoelectric data collected by the first photoelectric sensor and the second photoelectric sensor correspond to the degree of obstruction. The installation range length of the first photoelectric sensor and the second photoelectric sensor and the diameter of the conveyed object are used to limit the uniqueness of the situation where the photoelectric sensor is most obstructed. The first photoelectric data is substituted into the corresponding first mathematical model to obtain the actual horizontal coordinate value, and the second photoelectric data is substituted into the corresponding second mathematical model to obtain the actual vertical coordinate value. The difference between the actual x-coordinate value and the standard x-coordinate value is used to obtain the x-coordinate deviation, and the difference between the actual y-coordinate value and the standard y-coordinate value is used to obtain the y-coordinate deviation. The horizontal coordinate deviation and the vertical coordinate deviation are used as the positional deviation of the transported object; The method for determining the first mathematical model is as follows: fix the y-axis position of the transmission mechanism, control the transmission mechanism to move along the x-axis, and obtain the first mathematical model with the horizontal coordinate of the transmission mechanism as the independent variable and the first standard photoelectric data as the dependent variable through data fitting. The method for determining the second mathematical model is as follows: fix the x-axis position of the transmission mechanism, control the transmission mechanism to move along the y-axis, and obtain the second mathematical model with the ordinate of the transmission mechanism as the independent variable and the second standard photoelectric data as the dependent variable through data fitting.

2. The method according to claim 1, characterized in that, The method for determining the standard horizontal coordinate value is as follows: acquire the first target photoelectric data corresponding to the transmitted object, and input the first target photoelectric data into the corresponding first mathematical model to obtain the standard horizontal coordinate value. The method for determining the standard ordinate value is as follows: acquire the second target photoelectric data corresponding to the transmitted object, and input the second target photoelectric data into the corresponding second mathematical model to obtain the standard ordinate value.

3. The method according to claim 1, characterized in that, After using the horizontal coordinate deviation and the vertical coordinate deviation as the positional deviation of the transported object, the method further includes: Determine the lateral deviation direction corresponding to the lateral coordinate deviation, and control the conveying mechanism to move the absolute value of the lateral coordinate deviation in the opposite direction of the lateral deviation direction in order to correct the lateral coordinate deviation. Determine the longitudinal deviation direction corresponding to the longitudinal coordinate deviation, and control the conveying mechanism to move the absolute value of the longitudinal coordinate deviation in the opposite direction to correct the longitudinal coordinate deviation.

4. A system for determining positional deviation, characterized in that, The system includes: a conveying mechanism, a conveyed object, a first photoelectric sensor, a second photoelectric sensor, and a processor; the first photoelectric sensor and the second photoelectric sensor are installed in the operating chamber corresponding to the conveying mechanism; The conveying mechanism is used to drive the conveyed object to move. The installation range length of the first photoelectric sensor and the second photoelectric sensor and the diameter of the conveyed object are used to limit the uniqueness of the situation where the photoelectric sensor is most blocked. During the process of the conveying mechanism carrying the conveyed object moving along a preset route, the first photoelectric sensor is used to acquire the first photoelectric data corresponding to the conveyed object, and the second photoelectric sensor is used to acquire the second photoelectric data corresponding to the conveyed object. The preset route includes moving only the x-axis or y-axis of the conveying mechanism. The first photoelectric data refers to the output data of the first photoelectric sensor when the conveyed object covers the first photoelectric sensor the most, and the second photoelectric data refers to the output data of the second photoelectric sensor when the conveyed object covers the second photoelectric sensor the most. The photoelectric data collected by the first photoelectric sensor and the second photoelectric sensor correspond to the degree of obstruction. The processor is used to execute the method for determining position deviation as described in any one of 1-3.

5. The system according to claim 4, characterized in that, The first photoelectric sensor is also used to acquire first standard photoelectric data corresponding to the object being transported; the second photoelectric sensor is also used to acquire second standard photoelectric data corresponding to the object being transported.

6. The system according to claim 4, characterized in that, The first photoelectric sensor and the second photoelectric sensor are installed in the operating chamber corresponding to the conveying mechanism, including: The transmitting end and receiving end of the first photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the transmission mechanism; the transmitting end and receiving end of the second photoelectric sensor are vertically spaced apart by a first preset distance and are respectively installed above and below the transmission mechanism.

7. The system according to claim 4, characterized in that, The system further includes an encoder; the encoder is installed on the conveying mechanism, and the encoder is used to obtain the horizontal and vertical coordinates of the conveying mechanism.

8. A device for determining positional deviation, characterized in that, The device includes: The first acquisition module is used to acquire first photoelectric data and second photoelectric data corresponding to the object being transported during the process of the conveying mechanism carrying the object being transported moving along a preset route. The preset route includes moving only the x-axis or y-axis of the conveying mechanism. The first photoelectric data refers to the output data of the first photoelectric sensor when the object being transported covers the first photoelectric sensor the most. The second photoelectric data refers to the output data of the second photoelectric sensor when the object being transported covers the second photoelectric sensor the most. The photoelectric data collected by the first photoelectric sensor and the second photoelectric sensor correspond to the degree of obstruction. The installation range length of the first photoelectric sensor and the second photoelectric sensor and the diameter of the object being transported are used to limit the uniqueness of the situation where the photoelectric sensor is most obstructed. The second acquisition module is used to input the first photoelectric data into the corresponding first mathematical model to obtain the actual horizontal coordinate value, and input the second photoelectric data into the corresponding second mathematical model to obtain the actual vertical coordinate value. The first determining module is used to obtain the horizontal coordinate deviation by subtracting the actual horizontal coordinate value from the standard horizontal coordinate value, and to obtain the vertical coordinate deviation by subtracting the actual vertical coordinate value from the standard vertical coordinate value. The second determining module is used to use the horizontal coordinate deviation and the vertical coordinate deviation as the position deviation of the transported object; The second acquisition module is also used to fix the y-axis position of the conveying mechanism, control the conveying mechanism to move along the x-axis, and obtain a first mathematical model with the horizontal coordinate of the conveying mechanism as the independent variable and the first standard photoelectric data as the dependent variable through data fitting. The second acquisition module is further configured to fix the x-axis position of the transmission mechanism, control the transmission mechanism to move along the y-axis, and obtain a second mathematical model with the ordinate of the transmission mechanism as the independent variable and the second standard photoelectric data as the dependent variable through data fitting.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the method for determining positional deviation as described in any one of claims 1 to 3.

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