A substrate transmission method and system

Abstract

The present invention discloses a method and system for transferring a substrate. The transfer method includes the following steps: S101: a robot extends into a substrate storage along the Y-axis direction and reaches a first plate-taking position; S102: acquiring image information of an edge of the substrate parallel to the X-axis, calculating a first offset of the substrate in the Y-axis direction, and a first deflection of the substrate in the rotational direction Rz around the Z-axis; acquiring position information of an edge of the substrate parallel to the Y-axis, and calculating a second offset of the substrate in the X-axis direction; the X-axis, Y-axis, and Z-axis are perpendicular to each other; S103: compensating for the first deflection of the substrate in the Rz direction, the second offset in the X-axis direction, and the first offset in the Y-axis direction; S104: the robot transfers the substrate to a first target position on a workbench. The present invention eliminates the need for a separate pre-alignment station for adjusting the substrate, thereby improving transfer efficiency and making the structure of the transfer system more compact.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate transmission, and in particular to a substrate transmission method and system. Background Art

[0002] In photolithography equipment, a robot is located between the workbench and the substrate magazine, removing glass substrates from the magazine and transferring them to the workbench. Only when the glass substrates accurately reach their target position on the workbench can subsequent production proceed in an orderly manner. Because the robot's transfer path is specific but subject to the uncertainty of its placement in the magazine, the final position of the glass substrate on the workbench may deviate from its target position. This deviation includes both linear offset caused by the glass substrate's horizontal movement and deflection caused by rotation within the horizontal plane.

[0003] The existing technology involves setting up a pre-alignment station between the plate library and the workbench. Before transferring the glass substrate to the workbench, the glass substrate is placed in the pre-alignment station to pre-align and adjust its deviation. However, the installation of the pre-alignment station increases equipment costs and takes up too much space in the lithography equipment. Furthermore, the addition of the pre-alignment step also reduces transfer efficiency.

[0004] Therefore, there is an urgent need to provide a substrate transmission method and system. Summary of the Invention

[0005] The object of the present invention is to provide a substrate transmission method and system, which does not require the setting of a pre-alignment station and can accurately adjust the deviation of the substrate to ensure its accurate placement on the workbench, saving equipment costs and improving transmission efficiency.

[0006] To achieve the above objectives, the following technical solutions are provided:

[0007] A method for transferring a substrate from a substrate storage to a workbench comprises the following steps:

[0008] S101: The robot extends into the board library along the Y-axis direction and reaches the first board-taking position;

[0009] S102: Acquire image information of an edge of the substrate parallel to the X-axis, calculate a first offset of the substrate in the Y-axis direction, and a first deflection of the substrate in the rotation direction Rz around the Z-axis; acquire position information of an edge of the substrate parallel to the Y-axis, and calculate a second offset of the substrate in the X-axis direction; the X-axis, Y-axis, and Z-axis are perpendicular to each other;

[0010] S103: compensating for a first deflection amount of the substrate in the Rz direction, a second offset amount in the X-axis direction, and a first offset amount in the Y-axis direction;

[0011] S104: The robot transfers the substrate to a first target position on the workbench.

[0012] As an optional solution of the above-mentioned transmission method, the transmission method is also used to realize the transmission of the substrate from the workbench to the board library, which specifically includes the following steps:

[0013] S201: The robot reaches the second plate-taking position on the workbench;

[0014] S202: Acquire image information of an edge of the substrate parallel to the X-axis, calculate a third offset of the substrate in the Y-axis direction, and a second deflection in the rotation direction Rz around the Z-axis; acquire position information of an edge of the substrate parallel to the Y-axis, and calculate a fourth offset of the substrate in the X-axis direction;

[0015] S203: Before the robot puts the substrate back into the library, the robot compensates for the second deflection amount of the substrate in the Rz direction and the fourth offset amount in the X-axis direction;

[0016] S204: The robot enters the board library along the Y-axis direction and compensates for the third offset of the substrate in the Y-axis direction;

[0017] S205: The robot transfers the substrate to the second target position of the board library.

[0018] As an optional solution to the above-mentioned transmission method, the output end of the manipulator has the freedom of movement along the X-axis, the freedom of lifting and lowering along the Z-axis, the freedom of rotation along the θ direction, and the freedom of movement along the R-axis direction, where the R-axis direction is the radial direction with the center of rotation of the manipulator as the center of the circle; when performing compensation, the deflection compensation of the substrate in the Rz direction is first performed, and then the offset compensation in the X-axis and Y-axis directions is performed.

[0019] As an alternative to the above transmission method, the position information of the edge of the substrate parallel to the Y axis is obtained by:

[0020] Acquire image information of the edge of the substrate parallel to the Y axis; or

[0021] The detection mechanism is used to obtain the distance between the edge of the substrate parallel to the Y axis and the detection mechanism in the X axis direction.

[0022] A transmission system for implementing any of the above-mentioned transmission methods, comprising:

[0023] a robot for engaging with the substrate;

[0024] a first detection mechanism, configured to obtain image information of an edge of the substrate parallel to the X-axis;

[0025] The second detection mechanism is used to obtain position information of an edge of the substrate parallel to the Y axis;

[0026] A control unit, wherein the manipulator, the first detection mechanism and the second detection mechanism are all electrically connected to the control unit, and the control unit is used to control the first detection mechanism and the second detection mechanism to perform detection, and control the action of the manipulator according to the detected information.

[0027] As an optional solution of the above transmission system, the first detection mechanism includes at least two image sensors;

[0028] The second detection mechanism is a distance measuring sensor to detect the distance between the second detection mechanism and the edge of the substrate parallel to the Y axis in the X-axis direction; or, the second detection mechanism is an image sensor to obtain image information of the edge of the substrate parallel to the Y axis.

[0029] As an optional solution of the above-mentioned transmission system, the first detection mechanism is arranged at the output end of the manipulator, and the second detection mechanism is arranged on a workbench or a plate library.

[0030] As an optional solution of the above-mentioned transmission system, the first detection mechanism and the second detection mechanism are both arranged on a workbench.

[0031] As an optional solution of the above-mentioned transmission system, a plate fork is provided at the output end of the robot, and the plate fork is used to engage with the substrate; the first detection mechanism is provided on the plate fork.

[0032] As an optional solution of the above-mentioned transmission system, two plate forks are arranged at intervals; and one image sensor is arranged on each plate fork.

[0033] Compared with the prior art, the present invention has the following beneficial effects:

[0034] 1) The transmission method provided by the present invention does not require a separate pre-alignment process to adjust the offset of the substrate. Instead, a robot is directly used to compensate for the deviation of the substrate, ensuring that the substrate can be placed at the target position on the workbench, which helps to improve transmission efficiency.

[0035] 2) The transmission system provided by the present invention can realize compensation adjustment of substrate offset without setting up a pre-alignment station between the board library and the workbench, so that the substrate can eventually be transmitted to the target position on the workbench; omitting the pre-alignment station can significantly reduce the equipment cost of the transmission system, reduce space occupancy, and make the structure of the entire transmission system more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 Schematic diagram of the structure of a substrate transmission system according to an embodiment of the present invention;

[0037] Figure 2 This is a flow chart of the transfer method in an embodiment of the present invention when used to transfer a substrate to a workbench;

[0038] Figure 3 Schematic diagram of the manipulator in the first plate-taking position according to an embodiment of the present invention;

[0039] Figure 4 This is a schematic diagram of a robot arm transferring a substrate to a workbench in an embodiment of the present invention;

[0040] Figure 5 This is a schematic diagram of a robot arm transferring a substrate to another workbench in an embodiment of the present invention;

[0041] Figure 6 This is a flow chart of the transmission method in an embodiment of the present invention when used to transmit a substrate to a board library;

[0042] Figure 7 Schematic diagram of the robot in the second plate-taking position according to an embodiment of the present invention;

[0043] Figure 8 This is a schematic diagram of a robot removing a substrate from a workbench in an embodiment of the present invention;

[0044] Figure 9 This is a schematic diagram of a robot placing a substrate into a substrate library in an embodiment of the present invention;

[0045] Figure 10 Schematic diagram of the manipulator performing Rz direction compensation in a plate library in an embodiment of the present invention;

[0046] Figure 11 Schematic diagram of the manipulator returning to the first plate-taking position after performing Rz compensation in an embodiment of the present invention;

[0047] Figure 12 Schematic diagram of the first detection mechanism and the second detection mechanism performing detection at a workbench in an embodiment of the present invention.

[0048] Reference numerals:

[0049] 101. Robot; 1011. Plate fork; 102. Plate storage; 103. Machine frame; 104. Workbench;

[0050] 201, substrate; 301, first detection mechanism; 302, second detection mechanism. DETAILED DESCRIPTION

[0051] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0052] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0053] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0054] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0055] In the description of the present invention, it should be noted that, unless otherwise specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0056] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0057] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0058] refer to Figure 1 This embodiment provides a substrate transfer system, comprising a manipulator 101, a first detection mechanism 301, a second detection mechanism 302, and a control unit. The manipulator 101 is configured to engage with a substrate 201, thereby driving the substrate 201 to transfer between a workbench 104 and a substrate magazine 102. The first detection mechanism 301 is configured to obtain image information of an edge of the substrate 201 parallel to the X-axis, and the second detection mechanism 302 is configured to obtain position information of an edge of the substrate 201 parallel to the Y-axis. The manipulator 101, the first detection mechanism 301, and the second detection mechanism 302 are all electrically connected to the control unit, which is configured to control the first detection mechanism 301 and the second detection mechanism 302 to perform detection and control the movement of the manipulator 101 based on the detected information. The X-axis and the Y-axis are perpendicular to each other in a horizontal plane.

[0059] refer to Figure 2 This embodiment further provides a method for transferring a substrate, which is used to transfer the substrate 201 from the substrate library 102 to the workbench 104, and specifically includes the following steps:

[0060] S101: The robot 101 extends into the plate storage 102 along the Y-axis direction and reaches the first plate-taking position;

[0061] S102: Acquire image information of an edge of the substrate 201 parallel to the X-axis, and calculate a first offset of the substrate 201 in the Y-axis direction and a first deflection in the rotation direction Rz around the Z-axis; acquire position information of an edge of the substrate 201 parallel to the Y-axis, and calculate a second offset of the substrate 201 in the X-axis direction; the X-axis, Y-axis, and Z-axis are perpendicular to each other;

[0062] S103: compensating the first deflection amount of the substrate 201 in the Rz direction, the second offset amount in the X-axis direction, and the first offset amount in the Y-axis direction;

[0063] S104 : the robot arm 101 transfers the substrate 201 to a first target position on the workbench 104 .

[0064] When substrate 201 is normally transported, the transport path of manipulator 101 is pre-planned, that is, when manipulator 101 enters substrate library 102 to retrieve an item, its first board-retrieval position in substrate library 102 is also calibrated. Ideally, substrate 201 is accurately placed in substrate library 102. After manipulator 101 engages substrate 201, substrate 201 is located at the theoretical position of manipulator 101. Manipulator 101 then drives substrate 201 along the planned transport path to workbench 104. At this time, substrate 201 is released and can be transferred to the first target position of workbench 104, successfully completing processing. However, due to the deviation of substrate 201 when it is placed in substrate library 102, if it is still transported according to the set path, substrate 201 will not be able to accurately reach the first target position of workbench 104, affecting subsequent processing. Therefore, it is necessary to use the transport method provided in this embodiment to use manipulator 101 to adjust during the transport process to compensate for the deviation of substrate 201 when it was originally placed in substrate library 102. At the same time, since the substrate 201 is generally a regular rectangular structure and is stored horizontally in the substrate library 102, when offset and deflection occur, the edges parallel to the X-axis and the edges parallel to the Y-axis will change position, requiring relevant detection to ultimately obtain the deviation in each direction, thereby providing a reference for the robot 101 to compensate during subsequent transmission. Considering that the processing of the substrate 201 has high requirements for the placement accuracy of the substrate 201 on the workbench 104, and the deflection of the substrate 201 is sometimes tiny and may not be perceived by the naked eye, the above-mentioned acquisition of image information or position information of the edge of the substrate 201, rather than taking a picture of the entire substrate 201, is conducive to improving the accuracy of deviation acquisition, which is also conducive to the subsequent accurate transmission of the substrate 201.

[0065] Specifically, refer to Figure 3 The control unit receives the image information detected by the first detection mechanism 301 and compares it with the image information when the substrate 201 is connected to the theoretical position of the robot 101, thereby calculating the offset of the substrate 201 in the Y-axis direction and the deflection in the rotation direction Rz around the Z-axis. The position information of the edge of the substrate 201 parallel to the Y-axis is obtained by either of the following two methods: First, refer to Figure 4, the second detection mechanism 302 obtains the distance X2 between the edge of the substrate 201 parallel to the Y axis and the detection mechanism in the X-axis direction, and the control unit compares it with the theoretical distance X1 between the second detection mechanism 302 and the substrate 201 when the substrate 201 is engaged with the theoretical position of the manipulator 101, thereby obtaining the offset of the substrate 201 in the X-axis direction; the second method, referring to Figure 5 The second detection mechanism 302 captures image information of the edge of the substrate 201 parallel to the Y-axis. The control unit compares this information with the image information of the substrate 201 when it is attached to the theoretical position of the manipulator 101, and can also obtain the offset in the X-axis direction. The control unit calculates the compensation amount that the manipulator 101 should make in the corresponding direction and controls the movement of the manipulator 101 to compensate for the various deviations of the substrate 201. Ultimately, the substrate 201 is driven to the target position, and the manipulator 101 releases the substrate 201, and the substrate 201 is delivered at the target position.

[0066] The transfer method provided by the present invention eliminates the need for a separate pre-alignment process to adjust the substrate 201. Instead, the robot 101 is used to directly compensate for deviations in the substrate 201, ensuring that the substrate 201 can be placed at the first target position on the workbench 104, thereby improving transfer efficiency. Furthermore, the transfer system provided by the present invention eliminates the need for a pre-alignment station between the board library 102 and the workbench 104, yet still allows for adjustment of the substrate 201, ultimately enabling the substrate 201 to be transferred to the first target position on the workbench 104. Omitting the pre-alignment station significantly reduces the equipment cost of the transfer system, reduces space usage, and makes the overall transfer system more compact.

[0067] In this embodiment, the workbench 104 is configured as an exposure table, and the substrate 201 is a glass substrate; the workbench 104 is used to carry the glass substrate, and after completing the handover with the robot 101, the glass substrate is moved to the exposure station to complete the exposure. Furthermore, two plate warehouses 102 are arranged side by side, namely a first plate warehouse and a second plate warehouse; wherein the first plate warehouse is used to store glass substrates to be exposed, and the second plate warehouse is used to store glass substrates that have completed exposure; in specific implementation, the robot 101 transfers the glass substrates in the first plate warehouse to the workbench 104, and retrieves the exposed glass substrates and places them in the second plate warehouse. Of course, in specific implementation, the specific number of plate warehouses 102 is not limited, and the exposed glass substrates can also be returned to the original plate warehouse 102. Of course, in specific implementation, the production process corresponding to the workbench 104 and the type of substrate 201 are not specifically limited. This embodiment only provides a specific usage scenario.

[0068] The transmission system provided in this embodiment can also be used to transmit the substrate 201 from the workbench 104 to the board library 102, that is, the robot 101 picks up the substrate 201 from the workbench 104 according to the predetermined transmission path, and then transmits the substrate 201 to the board library 102. However, when the substrate 201 is exposed on the workbench 104, the position may change, that is, it may shift and deflect. If the shift or deflection is large, then when the robot 101 transmits the substrate 201 to the board library 102, the substrate 201 may collide with the side wall of the board library 102, causing the substrate 201 to break. Therefore, Figure 6 The above-mentioned transmission method can also be used to transmit the substrate 201 from the workbench 104 to the board library 102, which specifically includes the following steps:

[0069] S201: The robot 101 arrives at the second plate-taking position at the workbench 104 (refer to Figure 7 );

[0070] S202: Acquire image information of an edge of the substrate 201 parallel to the X-axis, and calculate a third offset of the substrate 201 in the Y-axis direction and a second deflection in the rotation direction Rz about the Z-axis; acquire position information of an edge of the substrate 201 parallel to the Y-axis, and calculate a fourth offset of the substrate 201 in the X-axis direction;

[0071] S203: Before the robot 101 puts the substrate 201 back into the board library 102, the robot 101 compensates the second deflection amount of the substrate 201 in the Rz direction and the fourth offset amount in the X-axis direction (reference Figure 8 );

[0072] S204: The robot 101 enters the board library 102 along the Y-axis direction and compensates the third offset of the substrate 201 in the Y-axis direction (reference Figure 9 );

[0073] S205 : The robot arm 101 transfers the substrate 201 to a second target position in the board library 102 .

[0074] In the above-mentioned transmission method, after obtaining the offset or deflection of the substrate 201 in various directions, compensation must be performed in the Rz direction and the X-axis direction to ensure that the substrate 201 does not have any offset in the Rz direction and the X-axis direction when entering the board library 102, so that it will not collide with the side wall of the board library 102 and can enter the board library 102 smoothly; since the manipulator 101 enters the board library 102 along the Y-axis direction, the compensation in the Y-axis direction can be performed when entering the board library 102.

[0075] refer to Figure 1The transmission system also includes a whole machine frame 103, and the manipulator 101 is located on the whole machine frame 103; the workbench 104 and the board library 102 are respectively located on both sides of the whole machine frame 103 along the Y-axis direction, which facilitates the manipulator 101 to perform transmission operations. Optionally, the manipulator 101 located on the whole machine frame 103 has the freedom of movement along the X-axis direction as a whole, so that the manipulator 101 can move between different plate magazines 102, and between the plate magazine 102 and the workbench 104; further, the output end of the manipulator 101 has the freedom of lifting and lowering along the Z-axis direction, so that the manipulator 101 can perform lifting and lowering movements in the vertical direction to engage with substrates 201 at different heights, and deliver the compensated and adjusted substrates 201 to the workbench 104 or the plate magazine 102; the output end of the manipulator 101 also has the freedom of rotation along the θ direction and the freedom of movement along the R-axis direction. The R-axis direction is a radial direction with the rotation center of the manipulator 101 as the center of the circle. If the manipulator 101 is transmitted according to the predetermined transmission path, then at the first plate picking position and the second plate picking position, the R-axis direction of the manipulator 101 coincides with the Y-axis direction. The output end of the manipulator 101 can achieve offset compensation in the X-axis direction by moving the manipulator 101 in the X-axis direction of the entire machine frame 103; offset compensation in the Y-axis direction is achieved by extending and contracting in the R-axis direction; and deflection compensation in the Rz direction is achieved through movement along the X-axis and R-axis directions and rotation about the θ direction. Because deflection compensation in the Rz direction requires coordinated adjustment of the manipulator 101 in the X-axis and R-axis directions, each compensation adjustment is performed first in the Rz direction. That is, after the substrate 201 is first aligned, offset compensation in the X-axis and Y-axis directions is then performed.

[0076] Furthermore, the first detection mechanism 301 is an image sensor; the image sensor can obtain image information of the edge of the substrate 201 parallel to the X axis, and then obtain the offset of the substrate 201 in the Y axis direction and the Rz direction; in this embodiment, reference Figure 1 Two image sensors are provided at intervals. Since the edge of substrate 201 is essentially a straight line, and since two points define a straight line, the two image sensors can capture images of the straight line at two different locations, thereby accurately determining the position of the straight line edge and ensuring accurate detection of the offset. Of course, in specific implementations, three or more image sensors can be provided based on detection needs, as long as the offset of substrate 201 can be accurately determined.

[0077] Still refer to Figure 1, a plate fork 1011 is provided at the output end of the manipulator 101. As a part of the manipulator 101, the plate fork 1011 can not only follow the manipulator 101 to complete the spatial position conversion, but also conveniently extend into the plate library 102 to engage with the sheet substrate 201. Specifically, the plate fork 1011 is a strip structure, which is inserted above or below the substrate 201 to complete the engagement with the substrate 201 so as not to hinder the detection mechanism from detecting the edge of the substrate 201. Optionally, refer to Figure 3 The first detection mechanism 301 is mounted on the substrate fork 1011. Since the first substrate removal position of the substrate fork 1011 is fixed, once the substrate fork 1011 is inserted, it can obtain real-time image information of the substrate 201 in the substrate magazine 102 using the image sensor on it. This also facilitates comparison with the theoretical position of the substrate 201 engaged with the robot 101. Furthermore, two substrate forks 1011 are provided at intervals, and both forks 1011 engage the substrate 201 simultaneously, ensuring stable transfer of the substrate 201. Furthermore, for a first detection mechanism 301 equipped with two image sensors, the two image sensors can be located on each of the two forks 1011.

[0078] Optionally, the first detection mechanism 301 is provided on the plate fork 1011 and the second detection mechanism 302 is provided on the workbench 104. Then, after step S101, there are two transmission situations:

[0079] The first method: The robot 101 first engages with the substrate 201 and transfers it to the workbench 104 along a predetermined transfer path. During the transfer process, the first inspection mechanism 301 can perform inspections at any time, either upon reaching the first board-removing position, after engaging with the substrate 201, or during the transfer process and after transfer to the workbench 104. After the robot 101 transfers the substrate 201 to the workbench 104, the second inspection mechanism 302 performs inspections. Compensation in the Rz and Y-axis directions can be performed before the robot 101 reaches the workbench 104 or after the second inspection mechanism 302 completes inspections.

[0080] The second type: reference Figure 10 After the manipulator 101 enters the board library 102, the manipulator 101 does not engage with the substrate 201 first, but the first detection mechanism 301 performs detection and, based on the detection result, the manipulator 101 performs Rz direction compensation alone, which can ensure that after engaging the substrate 201, the substrate 201 does not deflect in the Rz direction relative to the board fork 1011; Figure 11, and then the substrate 201 is joined, the manipulator 101 drives the substrate 201 back to the first plate-taking position, and transfers the substrate 201 according to the predetermined transfer path, and performs compensation adjustment in the X-axis and Y-axis directions during the subsequent transfer process; or, after the manipulator 101 performs Rz-axis compensation alone, it performs compensation in the Y-axis direction alone, and then joins with the substrate 201, the manipulator 101 returns to the first plate-taking position, and transfers the substrate 201 according to the predetermined transfer path, so that only compensation adjustment in the X-axis direction is required subsequently.

[0081] Of course, in some other embodiments, reference Figure 12 The first detection mechanism 301 can also be set at the workbench 104. This is similar to the first case mentioned above, but only when the robot 101 transfers the substrate 201 to the workbench 104 according to the predetermined transmission path, can the first detection mechanism 301 at the workbench 104 be used to complete the acquisition of all offset states of the substrate 201, and the compensation of the substrate 201 is carried out together with the plate fork 1011 at the workbench 104.

[0082] refer to Figure 4 In this embodiment, the second detection mechanism 302 is a distance measuring sensor. For the second detection mechanism 302, optionally, the second detection mechanism 302 is provided on the plate library 102, and in this case, the first detection mechanism 301 must be provided on the plate fork 1011, that is, the acquisition of all deviations of the substrate 201 is completed at the plate library 102; in this embodiment, the second detection mechanism 302 is provided at the workbench 104, that is, the offset of the substrate 201 in the X-axis direction is obtained at the workbench 104, and the plate fork 1011 carries the substrate 201 together for compensation adjustment in the X-axis direction; in this embodiment, only one distance measuring sensor is required to be provided at the workbench 104, while the case where the second detection mechanism 302 is provided at the plate library 102 requires a distance measuring sensor to be provided on each layer of the plate library 102, which is more expensive; at the same time, since the manipulator 101 has a movement error in the X-axis direction when transferring the substrate 201 along a fixed path, setting the distance measuring sensor on the workbench 104 can effectively reduce this error during compensation. Further, referring to Figure 5 The second detection mechanism 302 may also use an image sensor to obtain image information of the edge of the substrate 201 parallel to the Y axis, and compare it with the image information when the substrate 201 is joined to the theoretical position of the robot 101, so as to obtain the offset in the X axis direction.

[0083] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A substrate transmission method for transmitting a substrate (201) from a substrate library (102) to a workbench (104), characterized in that: The transmission method comprises the following steps: S101: The manipulator (101) extends into the plate storage (102) along the Y-axis direction and reaches the first plate-taking position; S102: acquiring image information of an edge of the substrate (201) parallel to the X-axis, and calculating a first offset of the substrate (201) in the Y-axis direction and a first deflection in the rotation direction Rz around the Z-axis; Obtaining position information of an edge of the substrate (201) parallel to the Y axis, and calculating a second offset of the substrate (201) in the X axis direction; the X axis, the Y axis, and the Z axis are perpendicular to each other; S103: compensating the first deflection amount of the substrate (201) in the Rz direction, the second offset amount in the X-axis direction, and the first offset amount in the Y-axis direction; S104: The robot (101) transfers the substrate (201) to a first target position on the workbench (104); The transmission method is also used to realize the transmission of the substrate (201) from the workbench (104) to the substrate library (102), specifically comprising the following steps: S201: the manipulator (101) arrives at the second plate-taking position on the workbench (104); S202: acquiring image information of an edge of the substrate (201) parallel to the X-axis, and calculating a third offset of the substrate (201) in the Y-axis direction, and a second deflection in the rotation direction Rz around the Z-axis; acquiring position information of an edge of the substrate (201) parallel to the Y-axis, and calculating a fourth offset of the substrate (201) in the X-axis direction; S203: before the robot (101) places the substrate (201) back into the board library (102), the robot (101) compensates for the second deflection amount of the substrate (201) in the Rz direction and the fourth offset amount in the X-axis direction; S204: the robot (101) enters the board library (102) along the Y-axis direction and compensates for a third offset of the substrate (201) in the Y-axis direction; S205: The robot (101) transfers the substrate (201) to a second target position of the substrate library (102); The position information of the edge of the substrate (201) parallel to the Y axis is obtained in the following manner: Acquiring image information of an edge of the substrate (201) parallel to the Y axis; or The detection mechanism is used to obtain the distance between the edge of the substrate (201) parallel to the Y axis and the detection mechanism in the X axis direction.

2. The transmission method according to claim 1, wherein: The output end of the manipulator (101) has the freedom of movement along the X-axis direction, the freedom of lifting along the Z-axis direction, the freedom of rotation along the θ direction, and the freedom of movement along the R-axis direction, wherein the R-axis direction is a radial direction with the rotation center of the manipulator (101) as the center of the circle; when compensation is performed, the deflection compensation of the substrate (201) in the Rz direction is first performed, and then the offset compensation in the X-axis direction and the Y-axis direction is performed.

3. A transmission system for implementing the transmission method according to any one of claims 1 to 2, characterized in that: include: A robot (101) for engaging with a substrate (201); A first detection mechanism (301) is used to obtain image information of an edge of the substrate (201) parallel to the X-axis; A second detection mechanism (302) is used to obtain position information of an edge of the substrate (201) parallel to the Y axis; a control unit, the manipulator (101), the first detection mechanism (301), and the second detection mechanism (302) are all electrically connected to the control unit, the control unit being used to control the first detection mechanism (301) and the second detection mechanism (302) to perform detection, and to control the movement of the manipulator (101) based on the detected information; The first detection mechanism (301) is provided at the output end of the manipulator (101), and the second detection mechanism (302) is provided on the workbench (104).

4. The transmission system according to claim 3, characterized in that The first detection mechanism (301) includes at least two image sensors; The second detection mechanism (302) is a distance sensor for detecting the distance between the second detection mechanism (302) and an edge of the substrate (201) parallel to the Y axis in the X-axis direction; or the second detection mechanism (302) is an image sensor for acquiring image information of the edge of the substrate (201) parallel to the Y axis.

5. The transmission system according to claim 4, characterized in that A plate fork (1011) is provided at the output end of the manipulator (101), and the plate fork (1011) is used to engage with the substrate (201); the first detection mechanism (301) is provided on the plate fork (1011).

6. The transmission system according to claim 5, characterized in that Two plate forks (1011) are arranged at intervals; one image sensor is arranged on each plate fork (1011).

Images