Multi-faceted mirror for an illumination optical unit of a projection exposure apparatus

Abstract

A multi-faceted mirror for an illumination optical unit of a projection printing system has a plurality of displaceable individual facets (8 i ) having a facet body (35) and a reflective surface (36) arranged thereon, wherein at least one subgroup of the individual facets (8 i ) has a displacement range such that the subgroup is in contact with an abutment surface (38) in one or more displacement positions.

Description

[0001] This patent application claims priority to German patent application DE 10 2019 214 269.9, the contents of which are incorporated herein by reference. Technical Field

[0002] This invention relates to a faceted mirror for an illumination optics unit in a projection exposure apparatus. It also relates to individual facets of the faceted mirror in the illumination optics unit of a projection exposure apparatus. Furthermore, the invention relates to an illumination optics unit, an illumination system, an optical system, and a projection exposure apparatus having corresponding faceted mirrors. Finally, the invention relates to a method for manufacturing microstructured or nanostructured components, and also to components manufactured according to this method. Background Technology

[0003] Faceted mirrors are known in the prior art for illumination optical units of projection exposure apparatuses having a large number of individually displaceable facets. In this case, the facets are formed such that they do not obstruct each other during controlled displacement. In particular, the facets are formed such that they do not come into contact with each other during displacement.

[0004] A mechanism for protecting the facets of a faceted mirror (especially during transport) from unwanted movement is known in the prior art. However, this mechanism does not protect the facets during normal operation of the faceted mirror. Summary of the Invention

[0005] The purpose of this invention is to improve the faceted reflector of the illumination optical unit used in projection exposure equipment.

[0006] This objective is achieved by the features of claim 1.

[0007] The essence of this invention is to form individual facets of a faceted mirror such that they contact a stop surface at one or more displacement positions. Specifically, individual facets of the faceted mirror can be formed such that they contact the stop surface in reversibly adjustable displacement positions. Such reversibly adjustable displacement positions are also referred to as active or actuable displacement positions. In particular, the individual facets can have one or more discrete active displacement positions. They can also be configured such that they only contact the stop surface in the event of undesirable deflection, particularly in the event of parasitic movement, and especially in the event of transport and / or earthquakes. Such deflection is also referred to as a passive displacement position. In cases of doubt, displacement position includes both active and passive possible displacement positions.

[0008] In this case, the facets contact the stop surface or the stop element arranged on or in the body in each case. In this case, the reflective surfaces of the individual facets preferably remain in contact.

[0009] The stopping surface is particularly defined, and especially predetermined. The stopping surface is particularly used for stopping two adjacent facets abutting each other. The stopping surface is particularly spaced a certain distance from the reflecting surface of the corresponding individual facet. In particular, the stopping surface and the reflecting surface of the individual facet form a non-contact area.

[0010] The stopping surfaces are particularly formed in or on the faceted body. The stopping surfaces may be formed or arranged in or on the faceted body such that, in projections in the direction of the surface normal of the individual faceted reflective surface (particularly in projections in the direction of the surface normal passing through the centroid of the individual faceted reflective surface), it forms the outer boundary of the projection of the faceted body, or protrudes beyond such a boundary in at least one direction perpendicular to the surface normal.

[0011] This projection is particularly parallel projection, and especially orthogonal projection.

[0012] This projection is particularly a projection onto a projection plane that is perpendicular to the surface normal.

[0013] According to the invention, it has been recognized that this can prevent facets from colliding with each other in an uncontrolled manner. Colliding with each other in an uncontrolled manner is understood herein to mean that the facets collide with each other in an uncontrolled, particularly unwanted, area. In particular, it can prevent individual facets of reflective surfaces from colliding with each other. This can prevent damage to reflective surfaces.

[0014] Individual facets can be specifically configured such that they contact the stop surface only in actuable and set movable positions. In particular, undesirable or unforeseen external influences on individual facets are not a prerequisite for contact with the stop surface.

[0015] Individual facets can also be configured such that they come into contact with the stop surface in the event of undesirable or unforeseen external influences, particularly only in the event of undesirable or unforeseen external influences.

[0016] According to one aspect of the invention, at least some individual facets, and in particular all of the individual facets, may have displacement ranges such that adjacent individual facets contact each other in one or more displacement positions. The individual facets may contact each other, particularly in passive displacement positions.

[0017] The individual surfaces are preferably arranged without contact in a basic or neutral position, particularly at a distance from each other. In particular, they can be arranged at a distance from all stop surfaces in at least one active displacement position (especially in all active displacement positions).

[0018] In general, the concept according to the invention relates to an optical module having multiple movable optical elements.

[0019] According to one aspect of the invention, adjacent individual facets are arranged at a distance from each other with gaps in each case in a basic or neutral position. Corresponding gaps may also exist in predetermined switching positions, particularly in any desired switching position. In particular, the reflective surfaces of the individual facets are preferably arranged at a distance from each other in each case in a basic or neutral position.

[0020] In the basic or neutral position, the individual facets are also arranged with gaps at a certain distance from all the stop surfaces.

[0021] The gap is large enough to allow individual facets to displace within the displacement range. On the other hand, the gap is as narrow as possible to allow for dense stacking of individual facets. The width of the gap between adjacent individual facets can be less than 1 mm, and especially less than 0.5 mm. The width of the gap is particularly at most 50%, particularly at most 30%, particularly at most 20%, particularly at most 15%, particularly at most 10%, particularly at most 5%, particularly at most 3%, particularly at most 2%, particularly at most 1% of the range of individual facets, particularly the range of their bodies or their reflective surfaces in the corresponding direction.

[0022] Specifically, the range within which a facet can be actually displaced is referred to as the displacement range of an individual facet. This range is also called the active displacement range. Furthermore, individual facets can be displaced, particularly due to external influences (e.g., vibration) during the transport of the facet mirror. The possible range here is called the passive displacement range. In particular, it may be larger than the active displacement range. Unless otherwise stated, the displacement range of a facet should be understood to mean, in each case, the maximum displacement range, particularly the larger displacement range in both the active and passive displacement ranges.

[0023] According to one aspect of the invention, the total area of ​​the gaps between adjacent individual facets is at most, particularly at most 50%, particularly at most 30%, particularly at most 20%, particularly at most 15%, particularly at most 10%, particularly at most 5%, particularly at most 3%, particularly at most 2%, particularly at most 1% of the total area of ​​the faceted mirror or the sum of the reflective surfaces of all the individual facets of the faceted mirror.

[0024] In particular, individual facets have one, two, or more displacement degrees of freedom. Specifically, they have two tilting degrees of freedom. In particular, they can be tiltable about two tilting axes, which extend perpendicularly to each other. They can also be linearly displaceable in a direction parallel to the surface normal, especially at the center point of the reflecting surface.

[0025] Individual facets (especially their facet bodies) can be formed as a whole in various cases.

[0026] In this case, the component of the individual facet on which the reflective surface is disposed is called the facet body. In particular, the cross-section of the facet body substantially corresponds to the reflective surface. The cross-section of the facet body deviates from the size of the reflective surface of the corresponding facet by at most 30%, at most 20%, and at most 10%.

[0027] Especially in the case of projection, especially in the case of parallel projection, especially in the case of orthogonal projection, the cross-section of the faceted body in the direction of the surface normal of the reflecting surface (especially in the direction of the surface normal of the reflecting surface of the respective individual facet, in a region of one of the stop surfaces and / or one of the stop elements) deviates from the size of the reflecting surface of the respective facet by at most 30%, especially at most 20%, especially at most 10%. This can be a quadrilateral, especially an elongated cross-section. The cross-section can have straight or curved boundaries. The aspect ratio of this cross-section of the faceted body corresponds to the aspect ratio of the reflecting surface of the respective individual facet, especially within the maximum deviation. In this regard, refer to the following description.

[0028] Individual facets may also have other components, such as elements for actuator devices for shifting the corresponding facet and / or elements for supporting the facet. Corresponding elements whose cross-section deviates significantly (especially at least 50%) from the reflective surface are not considered components of the facet body.

[0029] Individual facets (especially their reflective surfaces) are preferably elongated. Preferably, their aspect ratio (maximum range in the longitudinal direction: maximum range perpendicular to that longitudinal direction (i.e., the lateral direction) is at least 3:1, particularly at least 5:1, particularly at least 8:1, particularly at least 10:1, particularly at least 12:1. The aspect ratio is preferably at most 100:1, particularly at most 50:1, particularly at most 30:1, particularly at most 20:1.

[0030] According to other aspects of the invention, the stop surface that contacts a separate facet at a specific displacement position is formed by another separate facet, particularly its body, particularly a predetermined area of ​​the body, or by separate stop elements.

[0031] A faceted mirror can be specifically configured such that two adjacent individual facets only come into contact when an unactable degree of freedom is activated. For example, this deflection of individual facets may occur during an earthquake or transport load.

[0032] Contact with the separated stop element may also be limited by the excitation of the degree of freedom that cannot be actuated, especially during earthquakes or transport loads.

[0033] According to other aspects of the invention, the faceting bodies of individual facets are formed in various cases such that adjacent individual facets contact each other at certain deflection or displacement positions in a predetermined region of the faceting body.

[0034] Specifically, the regions where individual facets may come into contact with adjacent individual facets can be predetermined based on the expected displacement range of each facet and the geometry of the facet body. This allows these regions to be specifically tailored for potential collisions.

[0035] The area where contact is likely to occur between the faceted surfaces is preferably at a certain distance from the reflective surfaces of the respective individual facets (especially from their edges). This reduces the risk of damage to the reflective surfaces, particularly their edges, due to collisions between adjacent individual facets. This is also particularly applicable to unplanned, especially unforeseen, collisions, such as those that may occur during the transport of faceted mirrors and / or during earthquakes.

[0036] The pre-determined area of ​​the faceted main body, especially the forming of the stop surface.

[0037] According to other aspects of the invention, the faceted bodies are formed such that the distance between two adjacent individual faceted bodies is less than the distance between their reflective surfaces.

[0038] This property is particularly applicable to the basic positions of individual facets. Preferably, it is universally applicable, regardless of the displacement position of the individual facet. The corresponding form of the facet body is described in more detail below.

[0039] According to other aspects of the invention, one or more stop elements are provided on or in the faceted body in various cases.

[0040] Stop elements function as buffers. To some extent, they function as bumpers. They allow for the targeted designation of areas where adjacent individual facets can contact each other; in particular, they allow for the targeted designation of stop surfaces.

[0041] The stop elements can be formed as separate elements and are connected to the faceted body in all cases. In particular, they can be connected to the faceted body in a form-fit manner.

[0042] According to one aspect of the invention, the stop element is connected to the parting body by gluing, soldering, welding, threading, clamping, shrinking, or assembling. In principle, all conceivable connection techniques for connecting the stop element to the parting body are possible.

[0043] In particular, the stop element can be replaceable. The stop element can also be formed as a single piece with the faceted body. This allows for particularly simple and stable manufacturing. The stop element is preferably arranged in predetermined locations, particularly at the top, corners, edges, or other predetermined locations on the faceted body.

[0044] The stop elements can extend over the entire width and / or length of the faceted body. Specifically, they can extend over the entire circumference of the faceted body. Alternatively, multiple stop elements can be provided, each with a smaller range in each case. This allows for weight reduction. This has a positive effect on the mechanical properties of the individual facets.

[0045] In particular, it is conceivable to arrange one or more stop elements at the ends of the faceted body in various cases, especially in the region of its ends along the longitudinal direction. One or more stop elements can also be arranged in the central region of the faceted body, especially in the central region relative to the longitudinal direction. This can be particularly advantageous in the case of curved facets.

[0046] Stopping elements can be specifically positioned in the areas where collisions are most likely to occur, in various situations. In particular, they can be arranged in the areas where the distance between the respective facet body and the adjacent facet body is minimized. This statement can relate to the position of the facet body in a neutral (i.e., undeflected) basic state and / or to the displacement position of their closest adjacent facet body.

[0047] The stop elements can be formed of the same material as the parting body. In particular, they can be formed of copper or copper alloys. They can also be made of or constructed of other materials. Other materials that can be considered for stop elements include, for example, zerodur, urethane, aluminum, ceramics, quartz, and silicon.

[0048] Stopping elements can be equipped with coatings, especially wear-resistant coatings. Therefore, particle wear can be reduced, and in particular prevented.

[0049] According to other aspects of the invention, the stop elements protrude laterally beyond the reflective surface. Specifically, they protrude laterally beyond the reflective surface when viewed from above. They particularly protrude laterally beyond the reflective surface in the lateral direction.

[0050] The extent of the stopping element in the direction parallel to the reflective surface is particularly larger than the extent of the reflective surface in that direction. The extent of the stopping element in the direction parallel to the width of the reflective surface is particularly larger than the width of the reflective surface.

[0051] This effectively and reliably prevents damage to the reflective surface in the event of a collision.

[0052] According to another aspect of the invention, the stop elements protrude beyond the facet body in a direction opposite to the surface normal of the reflective surface. They protrude beyond the facet body, particularly on the side of the facet body opposite to the reflective surface.

[0053] The stop element may also have a range in a direction parallel to the surface normal of the reflective surface, which is smaller than the range of the faceted body in that direction.

[0054] According to other aspects of the invention, all individual facets of the faceted mirror have the same stopping element and / or stopping elements in substantially the same position in each case.

[0055] This simplifies the production of individual facets and the programming of facet contours.

[0056] Alternatively, different individual facets can have different stopping elements and / or stopping elements in different positions. In particular, one or more stopping elements can be provided individually for each individual facet. This allows for greater flexibility in facet planning.

[0057] The similarities and / or differences of the stopping elements may, in various cases, relate to their shape and / or their arrangement on the respective individual facets.

[0058] According to other aspects of the invention, the stop element has a range extending over the entire length of the individual facet. Specifically, the stop element can extend over the entire circumference of the individual facet.

[0059] Therefore, individual facets are protected in a particularly reliable manner.

[0060] According to other aspects of the invention, individual facets (particularly their main bodies) have components and / or forms for weight reduction.

[0061] In particular, holes, voids, recesses, thinning sections, or bevels can be used as components to reduce weight.

[0062] According to other aspects of the invention, a faceted mirror has one or more components for limiting the displacement range of individual facets. The faceted mirror may in particular have one or more components for limiting unwanted deflections, especially for limiting parasitic movements of individual facets.

[0063] In this case, the component used to limit the range of displacement (especially the component used to limit unwanted parasitic motion of individual facets) can form a stop surface.

[0064] Components used to limit the displacement range of individual facets can be formed as pins, which are also specifically referred to as buffers, forks, recesses, or U-shaped sections.

[0065] The clearance of the corresponding stop surface is preferably smaller than the facet gap relative to the adjacent individual facets.

[0066] According to another aspect of the invention, the free end of the member for limiting the displacement range of the individual facet is arranged in the region of the axis of rotation. Therefore, the clearance of the individual facet around the member for limiting its displacement range can be reduced. In particular, this does not reduce the available clearance of the individual facet due to actuation of the individual facet around the axis of rotation.

[0067] To further reduce clearance, it is conceivable to adjust the components used to limit the displacement range of individual facets.

[0068] In particular, it is conceivable to measure the gap between individual facets and / or determine specific spacers and arrange them on the facets and / or make the stops adjustable or configurable.

[0069] Another object of the present invention is to improve the individual facets of the faceted reflector of the illumination optics unit of the projection exposure apparatus, particularly according to the foregoing description.

[0070] This objective is achieved by having a faceted body and a reflective surface arranged thereon, as well as one or more stop elements provided on or in the faceted body.

[0071] Its advantages are evident from the advantages described above.

[0072] According to one aspect, one or more stop surfaces and / or stop elements are provided on or in the faceted body, the one or more stop surfaces and / or stop elements projecting in the direction of the surface normal of the reflective surface in at least one direction perpendicular to the surface normal.

[0073] Here, the surface normal is specifically the surface normal that passes through the centroid of the reflecting surface.

[0074] According to one aspect, a separate facet has one or more stop surfaces and / or stop elements that, in projection onto the surface normal of the reflective surface in at least one direction perpendicular to the surface normal and in the opposite direction, protrude beyond the reflective surface.

[0075] According to one aspect, a separate facet has one or more stopping surfaces and / or stopping elements that, in projection in the direction of the surface normal of the reflecting surface, protrude beyond the reflecting surface over the entire circumferential region of the reflecting surface.

[0076] The stop element can be a specific form of the faceted body, particularly its thickened portion. The body is preferably at least partially wider than the reflective surface of the individual facets.

[0077] The stop element can also be a separate component connected to the faceted body.

[0078] Individually faceted reflective surfaces can be flat. They may also have positive or negative refractive power. They may also be tortuous surfaces.

[0079] Individually segmented reflective surfaces can be rectangular, trapezoidal, or curved, especially in the form of annular segments.

[0080] According to other aspects of the invention, the faceted body has at least one free end, particularly two free ends, and is formed such that its cross-section decreases toward one or more free ends.

[0081] The cross-section of the faceted body decreases, in particular, at least partially, from the attachment region toward one or more free ends.

[0082] The cross-section can decrease continuously, and particularly monotonically, towards the free end. This allows for a reduction in the moment of inertia. The cross-section of the faceted body can also contribute to increasing the stiffness of the faceted body.

[0083] The cross-section can also be increased again on the outermost side, in the region at the free end. In the region at the free end, the faceted body can in particular have a stop element.

[0084] According to other aspects of the invention, the faceted body has components for reducing its moment of inertia and / or for increasing its stiffness.

[0085] The gaps, holes, or other forms that typically reduce weight of the faceted body can be used as components to reduce the moment of inertia of the faceted body.

[0086] Its profile can be used as a component to increase the stiffness of the faceted body. The faceted body can, in particular, have at least a partial T-shaped, U-shaped, or H-shaped cross-section. The faceted body can also be added on. In particular, it can have a hollow structure. This allows for a particularly effective reduction in the mass moment of inertia of the faceted body.

[0087] Furthermore, other objects of the present invention are to improve the illumination optical unit of the projection exposure device, the illumination system of the projection exposure device, the optical unit of the projection exposure device, and the projection exposure device.

[0088] These objectives are achieved by an illumination optical unit, an illumination system, an optical system, and a projection exposure device having a faceted reflector as described above.

[0089] Embodiments of the invention provide particularly improved protection during transport and in the event of seismic loads, especially for optical surfaces.

[0090] Its advantages stem from the advantages of faceted reflectors.

[0091] Another object of the present invention is to improve the method for producing microstructured or nanostructured components, and the corresponding manufactured components.

[0092] This objective is achieved by providing a projection exposure device as described above.

[0093] These advantages are then derived from the advantages of the faceted mirror being referenced. Attached Figure Description

[0094] Other advantages and details of the invention will become apparent from the description of exemplary embodiments with reference to the accompanying drawings, in which:

[0095] Figure 1 The components and beam path of the projection exposure apparatus are schematically shown.

[0096] Figure 2 An exemplary arrangement of field-splitting surfaces on a field-splitting surface mirror is schematically shown.

[0097] Figure 3 and Figure 4 An actuator device for shifting the field plane around two independent tilting axes is schematically shown.

[0098] Figure 5 Further details are schematically shown to clarify the relative position of the tilt axis of the field splitter with respect to its reflecting surface.

[0099] Figure 6 The example schematically illustrates the collision of two adjacent facets during rotation about an axis parallel to their surface normals.

[0100] Figure 7 An example is shown to illustrate a 3D model with individual facets.

[0101] Figure 8 A cross-section of a stop element used to protect the facet is shown by way of example.

[0102] Figure 9 An example illustrates how, according to Figure 7 A side view of the faceted structure, with two stop elements arranged at the ends.

[0103] Figure 10 It schematically shows the following based on Figure 6 The indication is that the split surface is protected by a stop element.

[0104] Figures 11 to 13 A schematic representation illustrating different inclinations of two adjacent facets is shown.

[0105] Figure 14 and 15 Two different arrangements of the stop elements on the split surface are schematically shown.

[0106] Figure 16 A three-dimensional diagram of the optimized facets is shown as an example.

[0107] Figure 17 A partial perspective view of the facet is schematically shown, the main body of which has components for reducing the moment of inertia of mass and components for increasing stiffness.

[0108] Figure 18 A schematic three-dimensional view of the faceted structure with balancing elements is shown.

[0109] Figure 19 A detailed view of the arrangement of the stop elements on the faceted body is shown by way of example.

[0110] Figures 20 to 22 Different forms of the boundary of the stop element are illustrated through examples.

[0111] Figure 23 A schematic view of the faceted structure with separate stop elements for limiting its displacement range is shown.

[0112] Figure 24 This schematically illustrates the method based on... Figure 23 The cross-section of adjacent facets of the stop element.

[0113] Figure 25 The longitudinal section through the facet is schematically shown to illustrate the diagram according to... Figure 23 The preferred arrangement of the stopping element relative to the inclined axis of the dividing surface, and

[0114] Figure 26 A variation is illustrated schematically by way of example, in which the stop element is formed as a separate lateral stop.

[0115] Figure 27 Other cross-sections of the stop element used to protect the facet are shown by example, and

[0116] Figure 28 A three-dimensional view with three stop elements is shown by way of example. Detailed Implementation

[0117] Below, first refer to Figure 1 Describe the overall structure and beam path of the projection exposure device 1.

[0118] The projection exposure apparatus 1 includes an illumination optics unit 1a for illuminating the object field 2 in the object plane 3 with illumination radiation 4. The projection exposure apparatus 1 also includes a device for... Figure 1The projection optical unit 1b, not shown, is for imaging a mask master. The mask master is arranged in the region of the object plane 3 and has a structure to be imaged on a wafer, which is also not shown. Figure 1 It is positioned in the image plane 31. Details are available from the prior art.

[0119] Illumination radiation 4 can be, in particular, EUV radiation, especially illumination radiation with wavelengths of up to 30 nm, particularly 13.5 nm or smaller.

[0120] Illumination radiation 4 is generated by radiation source 5. A plasma source or a free-electron laser (FEL) can be used as radiation source 5, for example. For details, refer again to the prior art.

[0121] The combination of the lighting optical unit 1a and the radiation source 5 is also referred to as the lighting system 1c.

[0122] The light collector 6 collects the illumination radiation 4 emitted by the radiation source 5. The light collector 6 reflects the illumination radiation 4 and guides it to the component behind the illumination optical unit 1a.

[0123] In the beam path following the light collector 6, illumination radiation 4 irradiates a first optical element in the form of a first faceted mirror 7, also referred to as a field faceted mirror. The first faceted mirror 7 is used to generate a secondary light source in the illumination system 1c.

[0124] The entire reflective surface of the first faceted reflector 7, which is subjected to illumination radiation 4, is divided into multiple first facets 8. i It is also known as the field plane. Figure 1 and Figure 2 In the middle, the four first facets 81 to 84 are schematically indicated.

[0125] Sub-beam 12 of illumination radiation 4 i exist Figure 1 Similarly, it is also schematically shown and indicated by example that, in particular, the sub-beams 121 to 124 of the illumination radiation 4 are assigned to the four first facets 81 to 84 shown.

[0126] The first facet is usually elongated. They can be rectangular. They can also be curved, especially in the form of circular segments.

[0127] The first facet can all have the same size. Alternatively, a first facet reflecting mirror 7 with first facets of different sizes can be formed.

[0128] In particular, the aspect ratio of the first facet can be at least 5:1, especially at least 8:1, especially at least 12:1, especially at least 13:1. The aspect ratio of the first facet is especially at most 100:1, especially at most 50:1.

[0129] The shape of the first facet can be specifically adapted to the shape of the object field 2. In particular, it can be geometrically similar to the shape of the object field 2. The shape of the first facet is specifically designed to ensure that the illumination radiation 4 reflected by it illuminates the object field 2 or a predetermined portion thereof as accurately as possible during the operation of the projection exposure device 1.

[0130] Each of the first facets can be shifted, and in particular tilted, to set different lighting settings. Specifically, the first facets can be tilted about two mutually perpendicular axes.

[0131] The positional relationships are described below using a Cartesian (x, y, z) coordinate system. In this coordinate system, the first facet can be inclined about an inclined axis extending along the x-direction and about an inclined axis extending along the y-direction in various cases. The z-axis is specifically parallel to or nearly parallel to the surface normal of the corresponding facet.

[0132] Accordingly, an actuator is provided for moving the first facet, actuator 16 in Figure 1 One of the actuators is represented in the diagram. Actuator 16 is connected to the central control unit 19 via control line 18. The control unit 19 is connected via... Figure 1 The corresponding control lines, not shown, are connected to all other actuators assigned to the first face.

[0133] For further details regarding the first facet, refer to US 2003 / 0086524 A1, specifically its complete reference. Figures 7 to 14 .

[0134] The second optical element, in the form of a second faceted mirror 20, is arranged at the position of the secondary light source generated by the first faceted mirror, that is, in the image plane relative to the radiation source 5. The second faceted mirror 20 is also referred to as a pupil faceted mirror. The pupil faceted mirror is illuminated by the illumination radiation 4 via the first faceted mirror 7.

[0135] The surface of the second faceted mirror 20 that can be illuminated is divided into multiple second facets 21. i Among them, four second subdivisions 211 to 214 are in Figure 1 The example is shown in the figure. The second facet 21 is assigned to one of the first facests 8 to 11 in each case, such that a secondary light source is generated at the position of the second facets 211 to 214 that are respectively irradiated thereon in each case.

[0136] like Figure 1 As schematically indicated, the second facet can also be tilted via an actuator. In this example, the actuator 25 assigned to the second facet 21 is... Figure 1 As shown in the diagram, actuator 25 is signaled to control device 19 via cable 18.

[0137] The transmission optical unit 27, which has other mirrors 28 and 29, is arranged in the beam path after the second faceted mirror 20. In this case, mirror 28 can be illuminated by illumination radiation 4 with a small angle of incidence, for example, less than 30°. Mirror 29 can be illuminated by grazing incidence, for example, with an angle of incidence greater than 60°.

[0138] The above description of the projection exposure device 1 should be considered as an example. Other embodiments of the illumination system 1c are also possible, as known from the prior art.

[0139] Further details of the faceting are described below. Even though the following description and figures refer to the faceting of the first faceted mirror 7, the faceting described is equally possible and advantageous for the faceting of the second faceted mirror 20.

[0140] Figure 2 The diagram shows a plan view of the details from the surface of the first faceted mirror 7.

[0141] like Figure 2 As shown in the example, there are many facets 8 arranged adjacent to each other on the faceted mirror 7. i Here, the adjacent facets are 8. i 8 i+1 They are separated from each other by gap 32 in each case. Figure 2 In the variant shown, gap 32 extends parallel to the x or y direction.

[0142] To minimize reflection loss, gap 32 should be as narrow as possible. The gap width should be at most 1 mm. The gap width should be specifically designed for the 8-facet section. i At most 50% of the range in the corresponding direction, especially at most 30%, especially at most 20%, especially at most 15%, especially at most 10%, especially at most 5%, especially at most 3%, especially at most 2%, especially at most 1%.

[0143] Generally, preferably, at most 50%, particularly at most 30%, particularly at most 20%, particularly at most 15%, particularly at most 10%, particularly at most 5%, particularly at most 3%, particularly at most 2%, particularly at most 1% of the total area of ​​the first faceted reflector 7 is covered by the gap 32. Illumination radiation 4 cannot be reflected at the gap 32. The gap 32 therefore results in transmission loss.

[0144] On the other hand, gap 32 is necessary to allow for facet 8. i The specific actuation range.

[0145] Figure 3 and Figure 4The use of shift facet 8 is illustrated schematically and by example. i Details of actuator 16. Actuation is achieved via lever 33. This can be generated by magnetic force. A magnet is specifically located below lever 33. An energized coil is provided below it, which can deflect lever 33, thereby causing facet 8. i Tilting. Actuator 16 may also have one or more restoring elements, such as in the form of leaf spring 34.

[0146] 8 facets i In each case, there is a faceted body 35 and a reflective surface 36. The reflective surface 36 has edges 40 around its perimeter.

[0147] 8 facets i It can be attached to a common frame or common panel. It can also be attached in groups to modular panels with 8-sided panels. i .

[0148] The reflective surface 36, also commonly referred to as an optical surface, can be flat. However, it can also be curved. In particular, it can be formed as a concave or convex surface. It can also be a tortuous surface or have any other shape.

[0149] like Figure 5 As illustrated by the example, the tilted axis 37 can be located in the region of the reflective surface 36 (in Figure 5 (To the left). The tilted axis 37 can also be located below the reflective surface 36, that is, behind the reflective surface 36 (in the left). Figure 5 (In the middle). The tilted axis 37 can also be located above the reflective surface 36, that is, in front of the reflective surface 36 (in the middle). Figure 5 (Right side of the image). The position of the tilted axis 37 relative to the reflective surface 36 affects the required width of the gap 32 in order to ensure the adjacent facets 8 are aligned. i 8 i+1 No collisions will occur within the specified tilt angle range (tilt range).

[0150] The faceted body 35 can preferably have at least partially a cross-section that decreases in the direction perpendicular to the reflective surface 36, such as a trapezoidal cross-section. The side angle b can be as large as the maximum tilt angle to be set. It can also be larger. The dimensions of the faceted body 35, especially its moment of inertia, can be reduced by a larger side angle b of the faceted body 35, especially a larger inclined plane.

[0151] Depending on the attachment method, 8 facets are separated. i It can have a low natural frequency, for example, it can be excited during transportation or when unexpected vibrations occur (such as earthquakes). This may result in adjacent facets 8 i 8 i+1 The collision between them.

[0152] Figure 6 The example illustrates a collision between two adjacent facets during rotation about a z-axis parallel to the surface normal at the center point of the reflective surface 36. This collision results in a notch at the optical edge, that is, in the peripheral region of the reflective surface 36.

[0153] In facet 8 i 8 i+1 When the controller can tilt around the x and y axes, rotation around the z-axis is undesirable during normal operation of the projection exposure device 1. However, in the event of transportation or earthquakes, such rotation around the z-axis can be induced. This may lead to the formation of facet 8. i 8 i+1 Damage to this property should preferably be avoided.

[0154] To avoid, and especially to prevent, adjacent facets 8 i 8 i+1 Different concepts of collisions are known from existing technologies. These concepts are often quite complex. Furthermore, their effectiveness is often found to be insufficient.

[0155] According to the present invention, these problems are solved by allowing optical components, particularly faceted 8 i The controlled collision is used to resolve this. Here, according to the invention, it is envisioned that the faceted body 35 and the reflective surface 36 are formed in each case such that the reflective surface 36 will not be damaged in the event of a collision. This can be achieved, in particular, by providing a defined stop surface for the faceted body 35, which is arranged at a distance of 8 km from the respective facet. i The reflective surface 36 is located at a certain distance from the area where contact may occur. As will be described in more detail below, the separation stop element that the faceted body 35 can impact can also be used as a stop surface.

[0156] The stop surface can be formed specifically by a predetermined area of ​​adjacent facets or by additional mechanical components.

[0157] The distance between the facet body 35 and its associated stop surface is particularly less than the width of the gap 32 in the corresponding direction. The distance between the facet body 35 and its associated stop surface is particularly less than the distance between the reflective surface 36 and the stop surface or reflective surface 36 of the adjacent facet. This ensures that in the event of a collision, the impact is not at the optical edge, i.e., not at the edge of the reflective surface 36, but at the desired stop area.

[0158] Figure 7 The example illustrates facet 8. i A three-dimensional image.

[0159] exist Figure 7In the variant shown, the stop element 38 is fitted at the end of the faceted body 35. (Based on...) Figure 7 The side view of the facets Figure 9 The example is shown below.

[0160] Figure 8 The cross-section of the stop element 38 is shown in detail. The stop element 38 has a stop edge 39 in particular. The stop edge 39 is offset outward relative to the edge 40 of the reflective surface 36 in a direction perpendicular to the inclined axis 37.

[0161] Figure 27 A cross-section of a variant of the stop element 38 is shown. According to... Figure 27 The stop element 38 has shoulders 48 on both sides of the reflective surface 36. The shoulders 48 extend in particular in a direction parallel to the width of the facet. This improves the protection of the reflective surface 36, especially its edge 40.

[0162] According to Figure 27 The form and according to the stop element 38 Figure 8 Intermediate stages between embodiments are similarly possible. The shoulder 48 may, in particular, be oriented at an angle c relative to the vertical direction 49, which is in the range of 90° to 150°, particularly 90° to 135°, and preferably at least 100°. Here, the vertical direction 49 is specifically parallel to the surface normal 50 passing through the center point 51 of the reflective surface 36.

[0163] The stop edge 39 can be rounded or chamfered.

[0164] like Figure 9 As illustrated in the example, the stop element 38 protrudes downward beyond the facet body 35, specifically towards the side of the facet body 35 opposite to the reflective surface 36. The vertical overhang can be based on facet 8. i The desired tilt range is used to determine this. (Facetylene 8) i The tilt range can be as high as 100 mrad, for example.

[0165] The stop element 38 can be plate-shaped. They can also be formed as sleeves so that they can be fitted onto the faceted body 35.

[0166] The stop element 38 can be arranged in the longitudinal direction on the free end of the faceted body 35 in various cases.

[0167] They can also surround the ends of the faceted body 35, which is free in the longitudinal direction, on three sides. The corresponding form is illustrated by example. Figure 10 As shown in the diagram. This type of stop element 38 protects the facet 8. i 8 i+1In particular, their reflective surfaces 36, especially in the case of collisions due to rotation around the z-axis.

[0168] The stop element 38 is preferably formed and / or arranged on the facet body 36, such that on the facet 8 i Any tilt position, especially in any operating switching position, such as any (particularly undesirable) excitation (e.g., excitation also around the z-axis), will at most result in a collision in the area of ​​the stop element 38, rather than in the area of ​​the edge 40 of the reflective surface 36.

[0169] like Figure 28 As shown in the example, the stop element 38 can also be arranged in the central region of the facet body 35. This is particularly true in the curved facet 8. i In certain circumstances, this can be advantageous.

[0170] The stop element 38 is preferably arranged in one or more regions where the distance between the respective facet body 35 and an adjacent facet body 35 or an adjacent stop element 38 is minimized. The stop element 38 is particularly arranged in those regions of the facet body 35 where collision is most likely to occur.

[0171] like Figure 28 As shown by the example, the stop element 38 arranged in the region of the free end of the faceted body 35 does not need to be arranged completely at the end of the faceted body 35.

[0172] like Figure 28 As illustrated by the example, different stop elements 38 can have different geometries. In particular, the stop elements 38 arranged in the central region of the faceted body 35 can be formed in a different manner than the stop elements 38 arranged closer to the ends. Specifically, the stop elements 38 arranged in the central region of the faceted body 35 can be formed such that their extent in the direction perpendicular to the reflective surface 36 is smaller than the extent of the faceted body 35 in that direction.

[0173] In particular, the stop element 38 arranged in the central region of the faceted body 35 can be formed as a thickened part of the faceted body 35.

[0174] The stop element 38 arranged in the central area of ​​the faceted body 35 can be arranged only on one side of the faceted body 35. Alternatively, corresponding stop elements 38 can be arranged on both sides, that is, on opposite sides of the faceted body 35.

[0175] The arrangement of the stop element 38 in the region where the width of the gap 32 is particularly small, especially the smallest region, allows the stop element 38 to be formed to be particularly thin and therefore particularly light.

[0176] The stop element 38 is specially designed to make it suitable for use on the facet 8. iDuring shifting and / or due to facet 8 i Undesired excitation may come into contact with the stopping surface, thus dividing the surface into 8 sections. i The stop surface contacts a predetermined area at a certain distance from the reflective surface 36.

[0177] Figures 11 to 13 This shows that when adjacent facets 81 and 8 i+1 Examples of different settings when tilted.

[0178] If the facets are 81 and 8 i+1 Leaning away from each other ( Figure 11 ), the adjacent edge 40 is not threatened or at least less threatened.

[0179] Conversely, if adjacent facets 81 and 8... i+1 Inclined towards each other, they could theoretically collide. However, according to the invention, the stop elements 38 are envisioned to be formed such that the stop edge 39 of one stop element 38 contacts the other stop element 38. In principle, the stop elements 38, especially their stop edges 39, could also impact adjacent facets 8. i Another area of ​​the main body 35.

[0180] However, it should be ensured that facet 8 may occur. i The contact (collision) area is arranged at a distance of 8 from the corresponding dividing surface. i At a certain distance from the reflective surface 36.

[0181] From the geometric conditions, it can be easily derived that the sag e of the stop edge 39 protruding laterally beyond the reflective surface 36, in the form shown for the stop element 38, the ratio of e to the height h of the reflective surface 36 above the plane passing through the stop edge 39 must be equal to or greater than the tangent of three times the side angle b: e:h ≥ tan(3b). When the side angle b is 40 mrad, the following applies particularly: e:h ≥ 120 μm / mm. Using this form of stop element 38, the edge 40 of the reflective surface 36 is at the plane 8. i All possible tilt positions are protected from collisions.

[0182] like Figure 13 As the example illustrates, this also applies to additional actuation around the second tilted axis. In the current case, this primarily results in two facets 8. i 8 i+1 The relative displacement in the z-direction. This could result in another facet 8. i Each is at risk. However, for the form shown for the stop element 38, this is also protected by the stop element, specifically ensuring that the edge 40 of its reflective surface 36 will not collide.

[0183] pass Figure 13 As is evident from the example, the range of the stop element 38 in the z-direction depends on the maximum tilt range around the y-axis. It can be ensured that the stop element 38 provides a stopping surface to protect the edge 40 of the reflective surface 36 from impact, regardless of the tilt position around the y-axis, by ensuring that the range of the stop element 38 in the z-direction is sufficient.

[0184] For the preferred value of the overhang e of the stop edge 39 beyond the reflective surface 36, particularly in the direction parallel to the reflective surface 36 or perpendicular to the corresponding inclined axis, the following factors can preferably be considered:

[0185] The manufacturing tolerances in the production of the faceted body 35 are typically in the range of 10 μm to 50 μm.

[0186] Stop element 35 may be on face 8 i Wear occurs over the service life of the stop edge 39. In the event of a collision, the maximum notch of the stop edge 39 can be in the range of at most a few μm. This depends particularly on the material of the stop element 38 and / or the impact angle in the event of a collision. As will be described in more detail below, it is conceivable to form the stop edge 39 in a circular manner. This can reduce Hertzian pressure in the event of a collision.

[0187] The overhang e depends particularly on the facet 8 i The displacement range (actuation range). Furthermore, the absolute value of the sag e depends on the distance between the stop edge 39 and the edge 40 of the reflective surface 36 to be protected, specifically the height h. The smaller this distance or height h, the smaller the sag e can be selected.

[0188] Overhangs in the range of 20 μm to 100 μm have proven to be particularly useful.

[0189] To keep the distance between adjacent reflective surfaces 36 as small as possible, a smaller overhang e is advantageous. (In facet 8) i 8 i+1 The distance between adjacent facets 35 in the neutral position, especially the closest adjacent facets 8. i 8 i+1 The distance between the stop edges 39 is preferably <100 μm, and particularly at most 50 μm. These statements preferably apply to the distance between two adjacent reflective surfaces 36, especially on facet 8. i 8 i+1 The neutral position, or especially the position where the surface normals extend parallel to each other.

[0190] The following text is for reference only. Figure 14 and 15 Other aspects of the invention are described below.

[0191] This aspect relates to the arrangement of stop elements 38 on the faceted body 35. According to the invention, it has been recognized that contraction, that is, contraction between two adjacent facets 8... i 8 i+1 The points with the minimum distance between them are not always in their free end regions. Furthermore, adjacent facets 8 i 8 i+1 The nominal width of the gap 32 between them can be determined by the parting surface 8. i 8 i+1 The length changes.

[0192] According to the invention, it is therefore conceivable that stop elements 38 be arranged on the faceted body 35 depending on the location of the contraction. In particular, stop elements 38 can be arranged not only at the ends of the faceted body 35. This is in... Figure 14 Examples are shown for facets 81 and 82. However, the stop element 38 can also be centrally arranged on the facet body 35. This is in Figure 14 The example shown is for facets 82 and 83.

[0193] Alternatively, the amount of droop e can be chosen differently. This is in Figure 15 This is illustrated by example. Here, the overhang e of the stop element 38 between facets 82 and 83 is chosen to be greater than the overhang e between facets 81 and 82. This also means that a small gap width in the central region of facets 82 and 83 can be taken into account.

[0194] In other words, the position of the stop element 38 can be flexibly selected as needed. Alternatively, the stop element 38 can be arranged at a predetermined position on the faceted body 35 in various cases. In particular, in this case, the amount of overhang e can be flexibly adapted to the gap width.

[0195] The arrangement of the stop element 38 on the faceted body 35 (for all facets 8) i (They are all the same) Predetermined positions have the advantage of reducing variations in faceted features. This makes programming faceted contours easier.

[0196] According to another variation, imagine a facet of 8 i A stop edge 39 is formed along the entire length of the part. Specifically, the stop edge 39 can be formed over the entire circumferential area of ​​the parting body 35. The stop edge 39 can be formed continuously or interrupted. This allows for weight reduction.

[0197] In particular, for weight reduction, it can be advantageous to arrange the stop element 38 only in critical areas of the facet body 35. Especially in cases with a relatively large tilt range, such as a tilt range exceeding 40 mrad, arranging the stop element 38 only on facet 8 is beneficial. i The free end region can be advantageous.

[0198] The stop elements 38 may be specifically arranged only at discrete locations in the longitudinal direction of the facet body 35. In particular, up to 10, up to 8, up to 6, up to 4, and up to 2 stop elements 38 may be arranged on the facet body 35. The stop elements 38 may, in various cases, range in the longitudinal direction of the facet body 35 for up to 10%, up to 5%, up to 3%, and up to 2% of the length of the facet body 35.

[0199] In summary, the stop element 38 can be formed and arranged on the faceted body 35 such that the moment of inertia of the faceted body 35 is increased by up to 10%, particularly up to 5%, particularly up to 3% through the arrangement of the stop element 38.

[0200] Other aspects of the invention relate to an advantageous configuration of the faceted body 35. It has been recognized that, for dynamic reasons, it is advantageous to have as light a facet as possible. On the one hand, this maintains a low amplitude under excitation, and on the other hand, it reduces collision energy in the event of a collision. Even according to the invention, facet 8 is allowed i Contact with the stop surface, but care must be taken to ensure that such a collision does not have negative consequences, especially for the 8-sided surface. i It can cause damage or lead to particle formation.

[0201] In order to form facet 8 i With the lowest possible weight, and especially with the lowest possible moment of inertia (particularly with respect to the dynamic critical axis (particularly the tilt axis)), the faceted body 35 can be formed in a structurally optimized manner.

[0202] The faceted body 35 may particularly have components for weight reduction, especially for reducing its moment of inertia. As components for reducing the weight of the faceted body 35 and for reducing its moment of inertia, it is conceivable, for example, that the faceted body 35 has a cross-section that decreases towards the free end. In particular, the height of the faceted body 35 may decrease towards the ends of the facets. Corresponding forms are illustrated by example in... Figure 16As shown in the figure, the set angle w between the lower side and the front side of the facet body 35 is particularly in the range of 2° to 10°, and particularly in the range of 4° to 6°. Due to the thinner form of the facet body 35 at its ends, its moment of inertia can be reduced by about 10% compared to the structurally unoptimized form. At the same time, the stiffness of the facet body 35 can be increased. In particular, the stiffness of the facet body 35 can be increased by increasing the cross-sectional area toward the support points of the facet. The total mass of the facet body 35 increases, but the moment of inertia decreases because the cross-section decreases toward the free end. Therefore, the moment of inertia decreases overall over the entire length of the facet body 35 and the stiffness increases. For example, by reducing the cross-sectional area of ​​the facet body 35 toward its ends, the sagging due to the self-weight of the facet body 35 can be improved by more than two times, particularly more than three times. These statements are illustrated by a facet with a length of 120 mm, a width of 6.6 mm, and an average height of 14 mm.

[0203] In addition, the necessary stiffness can be shifted toward the actuator axis.

[0204] exist Figure 17 The illustration shows another component for reducing the weight of the faceted body 35, particularly for reducing the moment of inertia of the faceted body 35. According to this variation, holes are provided in the faceted body 35. These holes also contribute to weight reduction. Alternatively or additionally, recesses may be provided, particularly from the underside of the faceted body 35 or from its side surfaces. Furthermore, the gradual reduction in cross-section can also be achieved in other ways, such as by bevels on the side surfaces.

[0205] Figure 18 Other components of the optimized faceted body 35 are shown. According to this variant, the faceted body 35 is mounted in a highly asymmetrical manner. A balancing element 41 is here fitted in the region of the shorter free end.

[0206] The moment of inertia of the faceted main body 35 (particularly around Rx) can be reduced by up to 30% through the aforementioned components.

[0207] The stop element 38 preferably has a small range in the x-direction (i.e., in the longitudinal direction of the facet body 35). Specifically, the range of the stop element 38 in the x-direction can be from 1 mm to 3 mm. For example, facet 8 described above by way of example. i The total moment of inertia I (especially together with the other moving masses of the manipulator) yy Approximately 180,000 g·mm 2 The additional total moment of inertia I caused by the stop element 38 yy Less than 5000m·mm 2 That is, less than the total moment of inertia I yy 3%.

[0208] According to other variations, the weight, and therefore the moment of inertia resulting from the stop element 38, can be further reduced through gaps, such as holes or recesses. This weight reduction can be introduced into the stop element 38, particularly on the end face in the x-direction. Therefore, the mass moment of inertia of the stop element 38 is reduced on the parting line 8. i Total moment of inertia I yy The relative proportion can be reduced to below 2%.

[0209] The stop element 38 is specifically designed to protect the split surface 8 in the event of undesirable excitation and / or vibration. i In particular, they are used to protect their reflective surfaces 36. They also specifically protect the facets from seismic loading conditions, where the amplitude of the excited vibration can be a multiple of the width of the provided gap 32.

[0210] Other facets of the invention are described below.

[0211] The stop elements 38 can be formed as separate parts. In particular, they can be placed on the faceted body 35. They are typically attached to the faceted body 35. Basically all conceivable connection techniques are possible here. The stop elements 38 can be glued, soldered, welded, screwed, clamped, or retracted or assembled to the faceted body 35.

[0212] The advantage of the stop element 38 as a separating component is that it can be made of a different material than the facet body 35. Alternatively, it can be made of the same material. In particular, it can be made of copper or a copper alloy. This is especially advantageous for preventing particle formation. Furthermore, using copper or a copper alloy to manufacture the stop element 38 has the following advantages: due to the relatively low hardness of copper, a slight dent occurs at the point of non-damage upon impact, significantly preventing particle formation.

[0213] Alternatively, the stop elements can be integrally integrated into the faceted body 35. In particular, they can be integrally formed with the faceted body 35. In this case, the stop elements 38 can be formed specifically by geometric details, particularly the shape of the faceted body 35. This allows for particularly simple and robust manufacturing.

[0214] like Figures 20 to 22 As shown by the example, the form of the stop element 38 (especially its stop edge 39) can be a sharp edge. Figure 20 ), non-sharp edges, especially those that gradually decrease in size on a flat surface ( Figure 21 ) or rounded ( Figure 22 A rounded, preferably chamfered, form can reduce Hertzian pressure. This represents a preferred embodiment.

[0215] Collision tests have shown that after hundreds of impacts with typical impact energy, there is only very little wear, especially at most 2 μm notches on the contact area.

[0216] According to other variations, the height h of the offset of the reflective surface 36 relative to the plane of the stop edge 39 passing through the stop element 38 in the direction of its surface normal can also be close to zero. This corresponds to facet 8. i The optical surfaces used do not extend to their geometric perimeter, particularly not to the perimeter of the faceted body 35. This configuration also has the effect of preventing the reflective surface 36 from colliding in the event of a collision. However, in this case, the reflective surface 36 is surrounded by a peripheral region that is not used to reflect the illumination radiation 4. Therefore, the fill degree of the faceted mirror 7 and thus the efficiency of transmission are reduced.

[0217] The following is for reference. Figures 23 to 25 Other exemplary embodiments are described below. For general details, refer to the previous embodiments.

[0218] In this exemplary embodiment, the stop surface is composed of a surface used to limit the facet 8. i The displacement range is formed by the component. According to the variant shown in the figure, a pin 42, also known as a buffer, is used as such a component. The pin 42 enters the recess 43 on the underside of the faceted body 35. The depth of entry is large enough to cover the entire tilt range. In principle, the pin 42 can also tilt together with the faceted body 35.

[0219] Only Figure 23 The facet 8 shown in the figure i Pin 42 and mounting component 46 are arranged on common base plate 47.

[0220] The precise positioning of pin 42, especially the precise positioning of its free end entering recess 43, can advantageously be adjustable.

[0221] The clearance between pin 42 and the stop side 44 inside the recess 43 is less than that between two adjacent facets 8. i 8 i+1 The distance between them, especially less than 8 between two adjacent facets i 8 i+1 The width of the gap 32 between them. The clearance between the pin 42 and the stop side 44 is particularly smaller than the portion of the gap 32 available for T0 tolerance. This ensures that the edge 40 of the reflective surface 36 is also protected in this variant.

[0222] To reduce clearance around pin 42, pin 42 is advantageously formed and / or arranged such that its free end extends in the region of inclined axis 37 (x-axis in the case shown).

[0223] To further reduce clearance, pin 42 can be adjusted. In particular, pin 42 can be made adjustable.

[0224] Pin 42 can be configured in a spherical shape at its free end. This avoids obstructing the tilt of the facet.

[0225] In the embodiment shown by way of example, the buffer is shown as pin 42. It is also conceivable that the buffer be formed as a fork-shaped member, i.e., having multiple free ends surrounding the facets.

[0226] according to Figure 25 In other variations shown in the examples, a lateral stop 45 is provided instead of pin 42.

[0227] Generally speaking, it should be noted that there are 8 facets. i (In particular, their facets 35) have a range of displacement, causing them to contact the stop surface at certain displacement locations. These displacement locations can be reversibly actuated. They can also be undesirable deflection locations that may occur during transport or during an earthquake, particularly only during transport or an earthquake and not during controlled paving.

[0228] Here, the stop surface can be formed from the surface of other optical elements, particularly other faceted bodies 35 or stop elements 38 arranged thereon. It can also be formed from separate mechanical parts, such as pins 42 or lateral stop members 45.

[0229] All stop surfaces are preferably made of wear-resistant materials. They may also have a wear-resistant coating. This prevents the formation of particles upon impact. However, any particles generated can be collected in a collection container or in recesses formed by adjacent parts.

Claims

1. A faceted reflector (7, 20) for an illumination optical unit (1a) of a projection exposure apparatus (1), having 1.

1. Numerous displaceable individual facets (8 i ,twenty one i ), which has 1.1.

1. The main body of the faceted structure (35), and 1.1.

2. A reflective surface (36) arranged thereon, 1.

2. Characterized by, The individual facet (8) i ,twenty one i ) is formed such that adjacent individual facets (8 i ,twenty one i They are in contact with each other, but only in the area of ​​the stop surface formed in or on the faceted body (35) and / or in the area of ​​the stop element (38) arranged or formed in or on the faceted body (35).

2. A faceted reflector (7, 20) for an illumination optical unit (1a) of a projection exposure apparatus (1), having 2.

1. Numerous displaceable individual facets (8 i ,twenty one i ), which has 2.1.

1. The main body of the facet (35) and 2.1.

2. A reflective surface (36) arranged thereon, 2.

2. Among them, The individual facet (8) i ,twenty one i At least some of them have a displacement range such that they contact the stop surface at one or more displacement locations. 2.

3. Wherein, the stop surface is formed by additional mechanical parts.

3. The faceted reflector (7, 20) according to claim 1 or 2, characterized in that, All individual facets (8) i ,twenty one i They are arranged at a distance from all stop surfaces in their respective original positions and / or in active displacement positions.

4. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, The individual facet (8) i ,twenty one i Some of them have displacement ranges, such that adjacent individual facets (8) i 8 i+1 20 i 20 i+1 Contact at one or more displacement positions.

5. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, The individual facet (8) i ,twenty one i At least some of them are formed such that adjacent individual facets (8) i 8 i+1 20 i 20 i+1 It can make contact in the area of ​​a predetermined stop surface.

6. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, The stop surface is on a separate facet (8) i ,twenty one i It is formed on or in the faceted main body (35) or through separate stop elements (38).

7. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, The faceted body (35) is formed such that two adjacent individual facets (8) i 8 i+1 20 i 20 i+1 The distance between the faceted main bodies (35) is less than the distance between their reflective surfaces (36).

8. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, One or more stop elements (38) are provided on or in the faceted body (35) in various cases.

9. The faceted reflector (7, 20) according to claim 7 or 8, characterized in that, The stop element (38) extends beyond the reflective surface (36) in a direction parallel to the reflective surface (36) to a greater extent than the reflective surface (36) in that direction and / or protrudes beyond the faceted body (35) to the side away from the reflective surface (36).

10. The faceted reflector (7, 20) according to any one of claims 7 to 9, characterized in that, The stop elements (38) are arranged in pairs on the faceted body (35) such that their outer envelope protrudes beyond the reflective surface (36) in at least one direction during vertical projection of a portion of the reflective area (36) surrounded by the envelope.

11. The faceted reflector (7, 20) according to any one of the preceding claims, characterized in that, One or more for limiting the individual facets (8) i ,twenty one i ) Components with displacement range.

12. A separate facet (8, 21) of a faceted reflector (7, 20) for a projection exposure device (1), having 12.

1. The main body of the faceted structure (35), and 12.

2. A reflective surface (36) arranged thereon, 12.

3. Characterized by, One or more stop surfaces and / or stop elements (38) are provided on or in the faceted body (35), the one or more stop surfaces and / or stop elements (38) protruding beyond the reflective surface (36) in at least one direction perpendicular to the surface normal in the direction of projection of the reflective surface.

13. The individual facets (8, 21) according to claim 12, characterized in that, The individual facet has one or more stop surfaces and / or stop elements (38) that, in projection in the direction of the surface normal of the reflective surface, protrude beyond the reflective surface (36) in at least one direction perpendicular to the surface normal and in the opposite direction.

14. The individual facets (8, 21) according to claim 12 or 13, characterized in that, The individual facet has one or more stop surfaces and / or stop elements (38) that, in projection in the direction of the surface normal of the reflective surface, protrude beyond the reflective surface (36) over the entire circumferential region of the reflective surface (36).

15. The individual facet (8, 21) according to any one of claims 12 to 14, characterized in that, The projection is a parallel projection.

16. The individual facet (8, 21) according to any one of claims 12 to 15, characterized in that, The projection is an orthogonal projection.

17. The individual facet (8, 21) according to any one of claims 12 to 16, characterized in that, At least some of the faceted body (35) and / or the stop element (38) have a greater extent in a direction parallel to the reflective surface (36) than the reflective surface (36) has in that direction.

18. The individual facet (8, 21) according to any one of claims 12 to 17, characterized in that, At least some of the stop elements (38) protrude beyond the faceted body (35) in at least one direction on the side opposite to the reflective surface (36).

19. The individual facet (8, 21) according to any one of claims 12 to 18, characterized in that, At least some of the stop elements (38) are arranged in pairs on the faceted body (35) such that their outer envelope protrudes beyond the reflective surface (36) in at least one direction during vertical projection of a portion of the reflective area (36) surrounded by the envelope.

20. The individual facet (8, 21) according to any one of claims 12 to 19, characterized in that, The faceted body (35) has at least one free end, and the cross-section of the faceted body (35) decreases toward the free end.

21. The individual facet (8, 21) according to any one of claims 12 to 20, characterized in that, The faceted body (35) has components for reducing the mass moment of inertia (I) and / or components for increasing stiffness.

22. A separate facet (8, 21) of a faceted reflector (7, 20) for a projection exposure device (1), having 22.

1. The main body of the faceted structure (35), and 22.

2. A reflective surface (36) arranged thereon, 22.

3. Characterized by the fact that the faceted body (35) has a component for reducing the moment of inertia (I).

23. An illumination optical unit (1a) having at least one faceted reflector (7, 20) according to any one of claims 1 to 11.

24. A lighting system (1c) having 24.

1. The illumination optical unit (1a) according to claim 23, and 24.

2. Radiation source (5) used to generate lighting radiation (4).

25. An optical system having 25.

1. The illumination optical unit (1a) according to claim 23, and 25.

2. Projection optical unit (1b) for projecting the object field (2) into the image field.

26. A projection exposure device (1), having 26.

1. Radiation source (5) used to generate lighting radiation (4), 26.

2. The illumination optical unit (1a) according to claim 23, and 26.

3. Projection optical unit (1b) for projecting the object field (2) into the image field.

27. A method for manufacturing microstructured or nanostructured components, comprising the following steps: - Provide a projection exposure apparatus according to claim 26, - Provides a mask master with the structure to be imaged; -Provide wafers with radiation-sensitive coatings, - The structure to be imaged from the mask master is imaged onto the wafer using the projection exposure device (1).

28. A component manufactured by the method according to claim 27.

Images