Belt conveyor system using hangers and support rails to transport wafer storage containers

Abstract

The present invention relates to a belt conveyor system for conveying chip storage containers using hangers and support rails, comprising: a first hanger to an nth hanger, each comprising a pair of vertical frames and a horizontal frame, one end of the pair of vertical frames being fixed to mold bars on the ceiling of an area for conveying chip storage containers in a clean room for performing semiconductor manufacturing processes, and the horizontal frame connecting the pair of vertical frames at the other end area of ​​the pair of vertical frames; a support rail comprising at least a pair of rail frames, at least one rail fixing frame and a plurality of first docking connectors, the rail frame spanning the internal area of ​​the first hanger to the nth hanger, the rail fixing frame connecting the pair of rail frames, and the plurality of first docking connectors being arranged at equal intervals in any one of the pair of rail frames; a first belt conveyor device to an mth belt conveyor device, comprising a plurality of rollers, a controller, at least one conveyor belt and a second docking connector.

Description

Technical Field

[0001] The present invention relates to a wafer transport system used in a semiconductor manufacturing process, and more particularly to a belt conveyor system that uses a hanger and a support rail to provide a belt conveyor for transporting wafer storage containers used in a semiconductor manufacturing process. Background Art

[0002] Safe wafer transport is a critical issue in semiconductor manufacturing. Therefore, conveyors used to transport wafer storage containers containing multiple wafers, such as front-opening unified pods (FOUPs), must be designed to prevent unexpected problems during the loading, unloading, and transport of the wafer storage containers. Furthermore, because various equipment is used simultaneously in semiconductor manufacturing sites, such as cleanrooms, conveyors used to transport wafer storage containers may need to be positioned at a predetermined height within the cleanroom using a hanger to ensure they follow a desired path.

[0003] Figure 1 The present invention is a schematic diagram illustrating a conventional method of using a hanger to place a belt conveyor at a predetermined height in a clean room.

[0004] See also Figure 1 A predetermined mold bar 10 for mounting objects may be provided on the ceiling 1 of the cleanroom. However, since multiple objects may already be mounted on the mold bar, it may be difficult to position each hanger 20-1, 20-2, 20-3 at a desired location on the mold bar. To overcome this problem, an additional structure, namely a raceway 12, may be provided. The raceway 12 may be provided below the objects by raceway fixing structures 11-1, 11-2, 11-3. The raceway fixing structures avoid the objects disposed in the mold bar 10, and each hanger 20-1, 20-2, 20-3 may be mounted on the raceway 12 by arranging the raceway 12 along a desired path.

[0005] However, this method has the disadvantage that, since additional structures such as the raceway 12 need to be provided, the overall structure becomes complicated and the weight increases.

[0006] In addition, if Figure 1As shown, the entire belt conveyor can have a structure in which multiple belt conveying devices 30-1, 30-2, 30-3, and 30-4 are connected in a modular manner. In this case, each connecting portion 21-1, 21-2, and 21-3 connected to each belt conveying device 30-1, 30-2, 30-3, and 30-4 needs to be supported by a hanger to ensure stable connection. Therefore, there are still certain limitations, namely, the installation position of each hanger 20-1, 20-2, and 20-3 is inevitably determined to correspond to the position of each of the connecting portions 21-2, 21-2, and 21-3.

[0007] Therefore, a new belt conveyor system is needed, which can not only set the hanger directly on the ceiling of the clean room, but also the position of the hanger is not necessarily limited to the connection position of each belt conveyor device even if the entire belt conveyor adopts a modular structure. Summary of the Invention

[0008] An object of the present invention is to provide a belt conveyor system, wherein when a belt conveyor is installed at a predetermined height in a clean room using a hanger, the hanger can be directly installed on the ceiling of the clean room.

[0009] In addition, another object of the present invention is to provide a belt conveyor system, wherein, when a hanger is used to set a belt conveyor at a predetermined height in a clean room, when the entire belt conveyor is configured in a modular manner, by using a predetermined support rail, the position of the hanger is not restricted by the position of a connection portion formed by each belt conveyor device as a module.

[0010] In addition, another object of the present invention is to provide a belt conveyor system, wherein, when the belt conveyor is set at a predetermined height in the clean room using a hanger, when the entire belt conveyor is configured in a modular manner, each belt conveyor device and support rail as a module includes a corresponding docking connector, so that each belt conveyor device can be connected or disconnected with a communication line and a power line.

[0011] In addition, another object of the present invention is to provide a belt conveyor system, wherein, when a belt conveyor is set at a predetermined height in a clean room using a hanger, when multiple unit support rails are connected to form an entire support rail, each unit support rail includes a corresponding joint connector so that each local power line and local communication line included in each unit support rail can be connected or separated.

[0012] In order to achieve the above-mentioned object of the present invention and realize the characteristic effects of the present invention described below, the characteristic structure of the present invention is as follows.

[0013] According to one aspect of the present invention, a belt conveyor system for conveying wafer storage containers using hangers and support rails is provided, comprising: a first hanger to an nth hanger, each comprising a pair of vertical frames and a horizontal frame, wherein one end of each vertical frame of the pair of vertical frames is fixed to respective mold bars on the ceiling of an area for conveying the wafer storage containers in a clean room where the semiconductor manufacturing process is performed, the horizontal frame connecting the pair of vertical frames in an area at the other end thereof, wherein n is an integer greater than 1; a support rail comprising at least a pair of rail frames, at least one rail fixing frame and a plurality of first docking connectors, the rail frame being formed to span an inner area of ​​the first hanger to the nth hanger, The track fixing frame connects the pair of track frames, and the multiple first docking connectors are arranged at equal intervals on any one of the pair of track frames; and the first belt conveyor device to the mth belt conveyor device, which includes a plurality of rollers, a controller, at least one conveyor belt and a second docking connector, and is arranged on the upper part of the support track so that the second docking connector is coupled to each of the first docking connectors, wherein the roller is arranged along the path for conveying the wafer storage container, the controller controls the driving roller as at least one of the multiple rollers, the conveyor belt surrounds the multiple rollers in a state of close contact with at least a portion of the outer circumference of the driving roller, the second docking connector is connected to the controller, and m is an integer greater than 1.

[0014] As an example, a belt conveyor system is provided, characterized in that the first to nth hangers are arranged at equal intervals, or are arranged so that at least one of the intervals formed by the first to nth hangers is different from the other intervals, and at least one of the connection parts connecting the first belt conveyor device to the mth belt conveyor device is formed at a position that does not correspond to the first to nth hangers.

[0015] As an example, a belt conveyor system is provided, characterized in that the support rail is arranged so that its lower portion is in close contact with the upper portion of each of the horizontal frames respectively included in the first to nth hangers.

[0016] As an example, a belt conveyor system is provided, characterized in that a predetermined space is formed inside or outside the support rail along the position of each of the first docking connectors, and a power line and a communication line connected to each of the first docking connectors are arranged in the predetermined space, and when a specific second docking connector included in a specific belt conveyor device from the first belt conveyor device to the mth belt conveyor device is combined with a specific first docking connector among the multiple first docking connectors, power is supplied and communication is provided to a specific controller included in the specific belt conveyor device.

[0017] As an example, a belt conveyor system is provided, wherein the support rail is formed by connecting a first unit support rail to a kth unit support rail having a predetermined unit length, wherein k is an integer greater than or equal to 1.

[0018] As an example, a belt conveyor system is provided, characterized in that the power line and the communication line are respectively divided into the first part power line to the kth part power line and the first part communication line to the kth part communication line, and are respectively included in the first unit support rail to the kth unit support rail, in the p-th unit support rail which is any one of the first unit support rail to the k-th unit support rail, (i) one side thereof is provided with a 1_p joint connector connected to one end of the p-th part power line and the p-th part communication line, (ii) the other side opposite to the one side is provided with a 2_p joint connector connected to the other end of the p-th part power line and the p-th part communication line, wherein p is an integer greater than or equal to 1 and less than or equal to k, and in the p-th unit support rail, (1) when p is greater than or equal to 1 and less than or equal to k-1, the other side of the p-th unit support rail is connected to one side of the (p+1)-th unit support rail correspondingly, and at the same time, the other side of the p-th unit support rail The 2_p joint connector included in the (p+1)th unit support rail is correspondingly combined and connected with the 1_(p+1)th joint connector included in one side of the (p+1)th unit support rail, so that (i) the p-th part power line and the p-th part communication line are connected with (ii) the (p+1)-th part power line and the (p+1)-th part communication line included in the (p+1)-th unit support rail, (2) when p is greater than or equal to 2 and less than or equal to k, one side of the p-th unit support rail is correspondingly connected with the other side of the (p-1)-th unit support rail, and at the same time, the 1_p joint connector included in one side of the p-th unit support rail is correspondingly combined and connected with the 2_(p-1)th joint connector included in the other side of the (p-1)-th unit support rail, so that (i) the p-th part power line and the p-th part communication line are connected with (ii) the (p-1)-th part power line and the (p-1)-th part communication line included in the (p-1)-th unit support rail.

[0019] The effects according to the present invention are as follows:

[0020] The present invention has the effect that, when a belt conveyor is installed at a predetermined height in a clean room using a hanger, the hanger can be directly installed on the ceiling of the clean room.

[0021] In addition, the present invention has the effect that, when a hanger is used to set a belt conveyor at a predetermined height in a clean room, when the entire belt conveyor is configured in a modular manner, by using a predetermined support rail, the position of the hanger is not restricted by the position of the connection portion formed by each belt conveying device as a module.

[0022] In addition, the effect of the present invention is that when the belt conveyor is set at a predetermined height in the clean room using a hanger, when the entire belt conveyor is configured in a modular manner, each belt conveyor device and support rail as a module includes a corresponding docking connector, so that each belt conveyor device can be connected or separated with a communication line and a power line.

[0023] In addition, the effect of the present invention is that when a belt conveyor is set at a predetermined height in a clean room using a hanger, when multiple unit support rails are connected to form an entire support rail, each unit support rail includes a corresponding joint connector, so that each local power line and local communication line included in each unit support rail can be connected or separated. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram illustrating a method of placing a belt conveyor at a predetermined height in a clean room using a hanger, described as an example of a conventional method;

[0025] Figure 2 A schematic diagram of a belt conveyor system for arranging a belt conveyor at a predetermined height in a clean room using a hanger and a support rail according to an embodiment of the present invention;

[0026] Figure 3 A schematic diagram of a belt conveyor system that can arrange multiple belt conveyors at a predetermined height in a clean room using a hanger and a support rail according to an embodiment of the present invention;

[0027] Figure 4 A schematic diagram of the lower portion and one side of a belt conveyor device as a module when the entire belt conveyor is configured in a modular manner according to an embodiment of the present invention;

[0028] Figure 5 Schematic diagram of the configuration of a unit support rail, a connector, a power line, and a communication line when each unit support rail is connected to form a support rail according to an embodiment of the present invention.

[0029] Description of Reference Numerals

[0030] 1: Clean room ceiling

[0031] 10: Mold rod

[0032] 11-1, 11-2, 11-3: Roller track fixed structure

[0033] 12: Rollerway

[0034] 20-1, 20-2, 20-3: Hangers for existing belt conveyor systems

[0035] 30-1, 30-2, 30-3: Belt conveyor devices of existing belt conveyor systems

[0036] 200-1, 200-2, 200-3: Hanger

[0037] 201-1, 201-2: Vertical frame

[0038] 202: Horizontal frame

[0039] 210-1, 210-2: Horizontal frame fixing part

[0040] 300, 300-1, 300-2, 300-3, 300-4: Belt conveyor

[0041] 310, 310-1, 310-2: Second docking connector

[0042] 320: driving roller

[0043] 330: Drive roller motor

[0044] 400: Support rail

[0045] 401-1, 401-2: Track frame

[0046] 402-1, 402-2: Track fixing frame

[0047] 410-1, 410-2, 410-3, 410-4, 410-5, 410-6: Second docking connector

[0048] 420-1: 1st_p connector

[0049] 420-2: 2nd_p connector

[0050] 430: Power cord

[0051] 440: Communication line DETAILED DESCRIPTION

[0052] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings that illustrate, by way of example, specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention, while distinct, are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein in one embodiment may be implemented in other embodiments without departing from the spirit and scope of the present invention.

[0053] Furthermore, it should be understood that the position or configuration of the components in each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Therefore, the detailed description to be described below is not intended to limit the present invention, and the scope of the present invention should be defined in accordance with all equivalents of the claims and the appended claims, as long as appropriate. Similar reference numerals in the drawings indicate the same or similar functions in various aspects.

[0054] In order to enable those skilled in the art to easily implement the present invention, preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0055] Figure 2 FIG. 1 is a schematic diagram of a belt conveyor system for arranging a belt conveyor at a predetermined height in a clean room using a hanger and a support rail according to an embodiment of the present invention.

[0056] See also Figure 2 The belt conveyor system according to the present invention may include hangers 200-1, 200-2, and 200-3, which are directly fixed to each mold bar 10 provided on the ceiling 1 of an area for conveying wafer storage containers in a clean room where a semiconductor manufacturing process is performed. In this case, the hangers 200-1, 200-2, and 200-3 may be composed of n hangers (first hanger to nth hanger) depending on the scale of the entire belt conveyor system. Figure 2 Some of the hangers are shown. The belt conveyor system according to the present invention is not limited to the number of hangers shown in the figure, and of course a different number can be configured according to the implementation conditions of the present invention.

[0057] Next, the belt conveyor system according to the present invention may include a support rail 400 that spans the inner area of ​​each hanger 200-1, 200-2, and 200-3. The entire belt conveyor adopts a modular configuration, so that each belt conveyor device 300-1, 300-2, 300-3, and 300-4 as a module can be installed on the upper part of the support rail 400. In this case, depending on the scale of the entire belt conveyor system, the belt conveyor devices 300-1, 300-2, 300-3, and 300-4 can be composed of (the first belt conveyor device to the mth belt conveyor device), Figure 2 Some examples of these are shown.

[0058] Thus, by constructing a belt conveyor system using the support rail 400, it is not necessary to use a hanger to support each connection portion 301-1, 301-2, 301-3 to which each belt conveyor device 300-1, 300-2, 300-3, 300-4 is connected. Thus, the position of each hanger 200-1, 200-2, 200-3 is not limited to the position of the connection portion 301-1, 301-2, 301-3. That is, each interval 220-1, 220-2 formed by each hanger 200-1, 200-2, 200-3 can be evenly spaced, but at least one interval can be different from the other intervals. In addition, at least one of the connection parts 301-1, 301-2, 301-3 connected to each belt conveyor 300-1, 300-2, 300-3, 300-4 provided on the upper portion of the support rail 400 may be formed at a position not corresponding to each hanger 200-1, 200-2, 200-3.

[0059] In addition, the support rail 400 may include a plurality of predetermined first docking connectors 410-1 and 410-2 arranged at equal intervals. Each first docking connector 410-1 and 410-2 can be detached from each second docking connector 310-1 and 310-2 included in each belt conveyor 300-1, 300-2, 300-3, and 300-4. Each second docking connector 310-1 and 310-2 can be positioned at a predetermined detachable position corresponding to each first docking connector 410-1 and 410-2 when each belt conveyor 300-1, 300-2, 300-3, and 300-4 is positioned on the support rail 400. Each of the first and second docking connectors described above will be described again below in conjunction with separate figures. Prior to this, the structures of the hangers 200-1, 200-2, and 200-3 and the support rail 400 will be described in more detail.

[0060] Figure 3 FIG. 1 is a schematic diagram of a belt conveyor system according to an embodiment of the present invention, in which a plurality of belt conveyors can be arranged at a predetermined height in a clean room using a hanger and a support rail.

[0061] See also Figure 3Each of the hangers 200-1, 200-2, and 200-3 may include a pair of vertical frames 201-1 and 201-2, respectively, and a horizontal frame 202 connecting the pair of vertical frames. In this case, one end of each of the pair of vertical frames 201-1 and 201-2 may be formed with a mold bar fixing portion 210-1 and 210-2, which is a structure for fixing to each mold bar installed on the clean room ceiling 1. The horizontal frame 202 may be installed in the other end region of each of the pair of vertical frames 201-1 and 201-2.

[0062] In addition, the support rail 400 can be arranged to span the inner area between the pair of vertical frames 201-1, 201-2 and the upper portion of the horizontal frame. In this case, the support rail 400 can include at least one pair of rail frames 401-1, 401-2, at least one rail fixing frame 402-1, 402-2, and a plurality of first docking connectors 410-1, 410-2, wherein the rail fixing frames 402-1, 402-2 connect the pair of rail frames 401-1, 401-2, and the plurality of first docking connectors 410-1, 410-2 are arranged at equal intervals in any one of the pair of rail frames 401-1, 401-2. In addition, Figure 2 As shown, each belt conveyor 300-1, 300-2, 300-3, and 300-4 is disposed above a pair of track frames 401-1 and 401-2. The support track 400 may include multiple pairs of track frames 401-1 and 401-2. Specific implementation conditions, such as the number of pairs of track frames included in the support track 400, may vary depending on the implementation conditions of the present invention. However, the support track 400 should, of course, include at least one pair of track frames.

[0063] In addition, the lower part of the support rail 400 can be in close contact with the upper part of each horizontal frame 202 included in each hanger 200-1, 200-2, and 200-3, and the specific details such as the method of fixing in a close contact state or the position of close contact may vary according to the implementation conditions of the present invention.

[0064] Next, the structure of each of the belt conveyor devices 300 - 1 , 300 - 2 , 300 - 3 , and 300 - 4 as a module constituting the entire belt conveyor will be described in more detail.

[0065] Figure 4 Schematic diagram of the lower part and one side of a belt conveyor device as a module when the entire belt conveyor is configured in a modular manner according to one embodiment of the present invention. For ease of description, any one of the m belt conveyors is defined as a specific belt conveyor device 300. Figure 4The belt conveyor shown in .

[0066] See also Figure 4 The specific belt conveyor device 300, which is any one of the belt conveyor devices 300-1, 300-2, 300-3, and 300-4, may include a plurality of rollers, a controller, at least one conveyor belt, and a second docking connector 310. The rollers are arranged along the path for conveying the wafer storage container. The controller controls a drive roller, which is at least one of the plurality of rollers. The conveyor belt surrounds the plurality of rollers in a state of close contact with at least a portion of the outer circumference of the drive roller. The second docking connector 310 is connected to the controller. In this case, a drive roller motor 320 for driving the drive roller may be separately provided. Figure 4 The region where the driving roller motor 320 is provided is shown, but the driving roller may include a motor inside, which may vary according to the implementation conditions of the present invention.

[0067] In addition, the specific belt conveyor 300 may include a controller for controlling the driving roller, and the controller needs to be connected to a power line for power supply and a communication line for communication. Figure 4 As shown, instead of directly connecting the power and communication lines to the controller, a predetermined docking connector (specifically, a second docking connector) 310 is included. This allows each belt conveyor device as a module to be installed or removed without the additional process of connecting or removing the power and communication lines to the controller. This specific second docking connector 310 can be connected to the controller. Furthermore, this specific second docking connector 310 can be detached in correspondence with the specific first docking connector of each of the first docking connectors 410-1 and 410-2, thereby enabling power supply and communication with the controller. The first docking connector is included in the support rail 400 to which the power and communication lines are pre-connected. In this case, the first docking connector and the second docking connector can each have a corresponding detachable shape, and can be, but not limited to, conventional female / male connectors. Various types and forms of connectors can be employed.

[0068] The power supply line and communication line described above can be pre-installed in a predetermined space formed inside or outside the support rail 400 along the position of each first docking connector 410-1, 410-2 included in the support rail 400 while being connected to each first docking connector 410-1, 410-2. In addition, when the specific second docking connector 310 included in the specific belt conveyor device 300 is combined with a specific first docking connector of the plurality of first docking connectors 410-1, 410-2 included in the support rail 400, power supply and communication can be provided to the specific controller included in the specific belt conveyor device 300.

[0069] Next, as another example of the present invention, the support rail 400 may be formed by connecting unit support rails each having a predetermined unit length. In this case, according to the implementation conditions of the present invention, the unit support rail may be composed of k unit support rails (the first unit support rail to the kth unit support rail).

[0070] Figure 5 Schematic diagram of the configuration of a unit support rail and a connector as well as a power line and a communication line when each unit support rail is connected to form a support rail according to an embodiment of the present invention. Figure 5 One unit supporting rail shown in is determined as the p-th unit supporting rail for description, wherein the p-th unit supporting rail is any one of the k unit supporting rails.

[0071] See also Figure 5 The p-th unit support rail as any one of the k unit support rails may include each partial rail frame 411-1, 411-2 as part of a pair of rail frames included in the entire support rail 400. In addition, at least one of the rail fixing frames 402-1, 402-2 may be included. Figure 5 412-1 and 412-2 are examples of two specific rail fixing frames. Figure 5 As shown, each partial track frame 411-1, 411-2 and each specific track fixing frame 412-1, 412-2 are connected into a rectangle, and the shape of the p-th unit support track is not limited to this. Since the position of each of the specific track fixing frames 412-1, 412-2 can be changed according to the implementation conditions of the present invention, its shape can also be changed.

[0072] In addition, the power cord 430 and the communication cord 440 used in the belt conveyor system of the present invention can be divided into the 1st part power cord to the kth part power cord and the 1st part communication cord to the kth part communication cord, respectively, and are respectively included in the 1st unit support rail to the kth unit support rail. In the pth unit support rail which is any one of the 1st unit support rail to the kth unit support rail, the predetermined space formed along each 1st docking connector 410-3, 410-4, 410-5, 410-6 included therein can include the pth part power cord and the pth part communication cord.

[0073] Next, in the p-th unit support rail, (i) one side thereof may be provided with a 1st-p connector 420-1 connected to one end of each of the p-th section power lines and the p-th section communication lines, and (ii) the other side opposite the first side may be provided with a 2nd-p connector 420-2 connected to the other end of each of the p-th section power lines and the p-th section communication lines. In this case, the 1st-p connector and the 2nd-p connector may each have a corresponding detachable shape and may be, but not limited to, conventional female / male connectors, and various types and forms of connectors may be employed.

[0074] In addition, in the p-th unit support rail, when the p is greater than or equal to 1 and less than or equal to k-1, the other side of the p-th unit support rail is correspondingly connected to one side of the (p+1)-th unit support rail, and at the same time, the 2-p-th joint connector included in the other side of the p-th unit support rail is correspondingly combined and connected with the 1-(p+1)-th joint connector included in one side of the (p+1)-th unit support rail, so that (i) the p-th part power line and the p-th part communication line can be connected to (ii) the (p+1)-th part power line and the (p+1)-th part communication line included in the (p+1)-th unit support rail. In addition, when p is greater than or equal to 2 and less than or equal to k, one side of the pth unit support rail is correspondingly connected to the other side of the (p-1)th unit support rail, and at the same time, the 1_pth joint connector included in one side of the pth unit support rail is correspondingly combined and connected with the 2_(p-1)th joint connector included in the other side of the (p-1)th unit support rail, so that (i) the pth part power line and the pth part communication line can be connected to (ii) the (p-1)th part power line and the (p-1)th part communication line included in the (p-1)th unit support rail.

[0075] The present invention has been described above with reference to specific matters such as specific components and limited embodiments and drawings, but this only helps to provide a more comprehensive understanding of the present invention. The present invention is not limited to the above embodiments, and ordinary technicians in the field to which the present invention belongs can design various modifications and changes based on these descriptions.

[0076] Therefore, the spirit of the present invention should not be limited to the above embodiments. In addition to the appended claims, all modifications equivalent or equivalent to these claims should be included in the spirit of the present invention.

Claims

1. A belt conveyor system that uses a hanger and support rails to transport wafer storage containers used in semiconductor manufacturing processes, comprising: The first to nth hangers each include a pair of vertical frames and a horizontal frame, wherein one end of each of the pair of vertical frames is fixed to each mold bar provided on the ceiling of an area in which the wafer storage container is transported in a clean room where the semiconductor manufacturing process is performed, and the horizontal frame connects the pair of vertical frames in areas of the other ends thereof, wherein n is an integer greater than or equal to 1; A support rail comprising at least one pair of rail frames, at least one rail fixing frame, and a plurality of first docking connectors, wherein the rail frames are formed to span the inner region from the first hanger to the nth hanger, the rail fixing frame connects the pair of rail frames, and the plurality of first docking connectors are arranged at equal intervals on any one of the pair of rail frames; as well as The first to mth belt conveyors include a plurality of rollers, a controller, at least one conveyor belt, and a second docking connector, and the first to mth belt conveyors are arranged on the upper portion of the support rail so that the second docking connector is coupled to each of the first docking connectors, wherein the rollers are arranged along a path for conveying the wafer storage container, the controller controls a driving roller as at least one of the plurality of rollers, the conveyor belt surrounds the plurality of rollers in a state of close contact with at least a portion of an outer circumferential surface of the driving roller, the second docking connector is connected to the controller, and m is an integer greater than 1. wherein the first to nth hangers are respectively arranged at equal intervals, and at least one of the connecting portions connecting the first belt conveyor device to the mth belt conveyor device is formed at a position not corresponding to the first to nth hangers; Or, it is arranged that at least one of the intervals formed by the first hanger to the nth hanger is different from the other intervals, and at least one of the connecting parts connecting the first belt conveyor device to the mth belt conveyor device is formed at a position not corresponding to the first hanger to the nth hanger.

2. The belt conveyor system according to claim 1, characterized in that: The support rail is configured so that its lower portion is in close contact with the upper portion of each of the horizontal frames respectively included in the first to nth hangers.

3. A belt conveyor system for conveying wafer storage containers used in a semiconductor manufacturing process using a hanger and support rails, comprising: The first to nth hangers each include a pair of vertical frames and a horizontal frame, wherein one end of each of the pair of vertical frames is fixed to each mold bar provided on the ceiling of an area in which the wafer storage container is transported in a clean room where the semiconductor manufacturing process is performed, and the horizontal frame connects the pair of vertical frames in areas of the other ends thereof, wherein n is an integer greater than or equal to 1; A support rail comprising at least one pair of rail frames, at least one rail fixing frame, and a plurality of first docking connectors, wherein the rail frames are formed to span the inner region from the first hanger to the nth hanger, the rail fixing frame connects the pair of rail frames, and the plurality of first docking connectors are arranged at equal intervals on any one of the pair of rail frames; as well as The first to mth belt conveyors include a plurality of rollers, a controller, at least one conveyor belt, and a second docking connector, and the first to mth belt conveyors are arranged on the upper portion of the support rail so that the second docking connector is coupled to each of the first docking connectors, wherein the rollers are arranged along a path for conveying the wafer storage container, the controller controls a driving roller as at least one of the plurality of rollers, the conveyor belt surrounds the plurality of rollers in a state of close contact with at least a portion of an outer circumferential surface of the driving roller, the second docking connector is connected to the controller, and m is an integer greater than 1. A predetermined space is formed inside or outside the support rail along the position of each of the first docking connectors, and a power line and a communication line connected to each of the first docking connectors are arranged in the predetermined space. When a specific second docking connector included in a specific belt conveyor among the first to mth belt conveyors is coupled with a specific first docking connector among the plurality of first docking connectors, power is supplied to and communication is provided to a specific controller included in the specific belt conveyor.

4. The belt conveyor system according to claim 3, characterized in that: The support rail is formed by connecting a first unit support rail to a kth unit support rail having a predetermined unit length, wherein k is an integer greater than or equal to 1.

5. The belt conveyor system according to claim 4, characterized in that: The power line and the communication line are respectively divided into the first part of the power line to the kth part of the power line and the first part of the communication line to the kth part of the communication line, and are respectively included in the first unit support rail to the kth unit support rail. In the p-th unit support rail, which is any one of the first to k-th unit support rails, (i) a first-p connector is provided on one side thereof to be connected to one end of the p-th section power line and the p-th section communication line, and (ii) a second-p connector is provided on the other side opposite to the first side to be connected to the other end of the p-th section power line and the p-th section communication line, wherein p is an integer greater than or equal to 1 and less than or equal to k. In the p-th unit support rail, (1) when p is greater than or equal to 1 and less than or equal to k-1, the other side of the p-th unit support rail is connected to the one side of the p+1-th unit support rail, and at the same time, the 2-p-th joint connector included in the other side of the p-th unit support rail is connected to the 1-p+1-th joint connector included in the one side of the p+1-th unit support rail, thereby (i) the p-th part power line and the p-th part communication line are connected to (ii) the p+1-th part power line and the p+1-th part communication line included in the p+1-th unit support rail. The p-th unit support rail is connected to the p-th unit support rail, and (2) when p is greater than or equal to 2 and less than or equal to k, one side of the p-th unit support rail is connected to the other side of the p-1-th unit support rail, and at the same time, the 1-p joint connector included in one side of the p-th unit support rail is correspondingly combined and connected to the 2-p-1 joint connector included in the other side of the p-1-th unit support rail, so that (i) the p-th part power line and the p-th part communication line are connected to (ii) the p-1-th part power line and the p-1-th part communication line included in the p-1-th unit support rail.

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