Crucible anti-vibration structure and crystal growth device

Abstract

The present invention relates to the field of crystal growth technology, and more specifically, to a crucible anti-shake structure and a crystal growth device, which can, to a certain extent, solve the problem of the crucible support structure shaking during the temperature increase process due to the different expansion degrees of the stainless steel water-cooled lifting rod and the crucible support shaft. The crucible anti-shake structure includes: a crucible tray, a crucible support shaft, a hollow locking mechanism and a water-cooled lifting rod; wherein, the crucible tray is arranged at one end of the crucible support shaft; the other end of the crucible support shaft is connected to the locking mechanism, and the crucible support shaft and the locking mechanism have different expansion coefficients; the locking mechanism is sleeved on one end of the water-cooled lifting rod, and the outer contour size of the locking mechanism gradually increases in the height direction, and a gap groove is provided on the circumference of the locking mechanism; one end of the water-cooled lifting rod where the locking mechanism is installed is designed to be a non-planar structure, and the water-cooled lifting rod and the locking mechanism have the same expansion coefficient.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal growth, and in particular to a crucible anti-vibration structure and a crystal growth device. Background Art

[0002] The guided mold method is a valuable crystal growth method. Using the guided mold method as a crystal growth method often requires the use of a crystal growth apparatus. Essential components of a crystal growth apparatus include a crucible support structure.

[0003] Currently, a crucible support structure is provided in the prior art. Figure 1 As shown, the existing crucible support structure includes a crucible tray, a crucible support shaft and a stainless steel water-cooled lifting rod; wherein, the crucible tray is arranged at one end of the crucible support shaft, and the other end of the crucible support shaft is sleeved on one end of the stainless steel water-cooled lifting rod, and a movable gap is provided between the stainless steel water-cooled lifting rod and the crucible support shaft to make it easier for the crucible support shaft to be sleeved on the stainless steel water-cooled lifting rod.

[0004] However, during the heating process, the stainless steel water-cooled lifting rod and the crucible support shaft expand at different rates, resulting in uneven thermal expansion and contraction of the crucible support shaft and its connected components (crucible tray, crucible, etc.). This further increases the clearance between the crucible support shaft and the stainless steel water-cooled lifting rod, and creates a localized bulge on the supporting end surface of the stainless steel water-cooled lifting rod. Driven by thermal convection and triggered by certain minor earthquake sources, the crucible support shaft and its connected components (crucible tray, crucible, etc.) can wobble. This wobble in the crucible support structure prevents normal crystal growth in the crystal growth apparatus. Summary of the Invention

[0005] In order to solve the problem that the existing crucible support structure shakes during the heating process and cannot meet the absolute static environment required for normal crystal growth, the present invention provides a crucible anti-shake structure and a crystal growth device.

[0006] In a first aspect, the embodiments of the present invention are implemented as follows:

[0007] The embodiment of the present invention provides a crucible anti-vibration structure, comprising: a crucible tray, a crucible support shaft, a hollow locking mechanism and a water-cooled lifting rod;

[0008] Wherein, the crucible tray is sleeved on one end of the crucible support shaft;

[0009] The other end of the crucible support shaft is connected to the locking mechanism, and the crucible support shaft and the locking mechanism have different expansion coefficients;

[0010] The locking mechanism is sleeved on one end of the water-cooled lifting rod, the outer contour size of the locking mechanism gradually increases along the height direction, and a clearance groove is opened on the circumference of the locking mechanism;

[0011] One end of the water-cooling lifting rod for mounting the locking mechanism is designed to be a non-planar structure, and the water-cooling lifting rod and the locking mechanism have the same expansion coefficient.

[0012] In some embodiments, one end of the gap groove is configured as a closed structure, and the other end is configured as an open structure.

[0013] In some embodiments, the crucible support shaft includes a first support member and a second support member;

[0014] Wherein, one end of the first supporting component is connected to the crucible tray;

[0015] The outer contour size of the second supporting component gradually increases along the height direction;

[0016] The other end of the first supporting component is connected to the end of the second supporting component with a smaller outer contour size.

[0017] In some embodiments, the outer dimension of the first support component is equal to the minimum outer dimension of the second support component.

[0018] In some embodiments, the water-cooled lifting rod includes a first lifting rod and a second lifting rod connected to each other;

[0019] Wherein, a locking mechanism is sleeved on the first lifting rod, and the outer contour size of the first lifting rod is smaller than the outer contour size of the second lifting rod.

[0020] In some embodiments, the outer dimension of the first lifting rod is smaller than the minimum outer dimension of the second supporting component, and the outer dimension of the second lifting rod is smaller than or equal to the maximum outer dimension of the second supporting component.

[0021] In some embodiments, a height of the second supporting component in the vertical direction is greater than a height of the first lifting rod in the vertical direction.

[0022] In some embodiments, the height of the second support component is less than or equal to 50 mm, and the radial dimension range of the second support component is set to 50 mm-60 mm.

[0023] In the second aspect, the embodiments of the present invention are implemented as follows:

[0024] An embodiment of the present invention provides a crystal growth device, comprising: a thermal field structure body, a sealing cover, a heat insulation structure, a guide tube, a heater, a crucible, and a crucible anti-shake structure;

[0025] Wherein, a sealing cover is provided on the thermal field structure body;

[0026] The thermal insulation structure is arranged inside the thermal field structure body;

[0027] The guide tube is arranged inside the thermal field structure body, and the guide tube is arranged on the thermal insulation structure;

[0028] The heater is arranged on a side of the heat preservation structure away from the heat field structure body;

[0029] The crucible is arranged on a side of the heater away from the heat preservation structure;

[0030] The crucible anti-shake structure is set at the bottom of the crucible. The crucible anti-shake structure includes a crucible tray, a crucible support shaft, a locking mechanism and a water-cooled lifting rod connected in sequence from top to bottom. The crucible support shaft and the locking mechanism have different expansion coefficients, and the water-cooled lifting rod and the locking mechanism have the same expansion coefficient.

[0031] In some embodiments, the insulation structure includes a first insulation layer, a second insulation layer, and a third insulation layer;

[0032] Wherein, the first thermal insulation layer is arranged on both sides of the interior of the thermal field structure body;

[0033] The second thermal insulation layer is arranged on the first thermal insulation layer, and a guide tube is arranged on the second thermal insulation layer;

[0034] The third thermal insulation layer is arranged at the bottom of the thermal field structure body, and the third thermal insulation layer is arranged close to the heater.

[0035] The beneficial effects of the present invention are as follows: by constructing a locking mechanism and arranging a plurality of evenly distributed gap grooves on the circumference of the locking mechanism, the expansion and self-contraction functions of the locking mechanism can be realized, and the active gap between the stainless steel water-cooled lifting rod and the crucible support shaft can be eliminated; further, by constructing a water-cooled lifting rod and a locking mechanism with the same expansion coefficient, and a crucible support shaft and a locking mechanism with different expansion coefficients, it can be achieved that during the temperature rising process, the water-cooled lifting rod and the locking mechanism have the same expansion degree, so that the crucible support shaft and the locking mechanism slide downward by their own weight, completing the adaptive tight fit between the crucible support shaft and the locking mechanism, avoiding the shaking phenomenon of the existing crucible support structure during the temperature rising process due to the different expansion degrees of the water-cooled lifting rod and the crucible support shaft, and ensuring the absolutely static environment required for crystal growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0037] Figure 1 It is a structural schematic diagram of a crucible support structure in the prior art;

[0038] Figure 2 is a schematic diagram of the overall structure of a crucible anti-vibration structure according to one or more embodiments of the present invention;

[0039] Figure 3a A schematic structural diagram of a crucible support shaft in a crucible anti-shake structure according to one or more embodiments of the present invention;

[0040] Figure 3b A schematic structural diagram of a water-cooled lifting rod in a crucible anti-shake structure according to one or more embodiments of the present invention;

[0041] Figure 3c A schematic structural diagram of a partial assembly of a crucible anti-vibration structure according to one or more embodiments of the present invention;

[0042] Figure 3d Schematic diagram of the overall structure of a locking mechanism in a crucible anti-shake structure according to one or more embodiments of the present invention;

[0043] Figure 3e A top view of a locking mechanism in a crucible anti-shake structure according to one or more embodiments of the present invention;

[0044] Figure 3f A front view of a locking mechanism in a crucible anti-shake structure according to one or more embodiments of the present invention;

[0045] Figure 4 Schematic diagram of the overall structure of a crystal growth device using a guided mold method in the prior art;

[0046] Figure 5a is a schematic diagram of the overall structure of a crystal growth device according to one or more embodiments of the present invention;

[0047] Figure 5b A schematic diagram of a partial structure of a crystal growth device according to one or more embodiments of the present invention;

[0048] Illustration:

[0049] Among them, 1-crucible tray; 2-crucible support shaft, 20-first support component, 21-second support component; 3-locking mechanism, 30-gap groove; 4-water-cooled lifting rod, 40-first lifting rod, 41-second lifting rod; 5-thermal field structure body; 6-sealing cover; 7-insulation structure, 70-first insulation layer, 71-second insulation layer, 72-third insulation layer; 8-guide tube; 9-heater; 10-crucible; 11-crucible support structure; 12-crucible anti-shake structure. DETAILED DESCRIPTION

[0050] In order to make the purpose, implementation mode and advantages of the present invention clearer, the exemplary implementation mode of the present invention will be clearly and completely described below in conjunction with the drawings in the exemplary embodiment of the present invention. Obviously, the described exemplary embodiment is only a part of the embodiment of the present invention, rather than all the embodiments.

[0051] It should be noted that the brief descriptions of terms in the present invention are only for the purpose of facilitating the understanding of the embodiments described below, and are not intended to limit the embodiments of the present invention. Unless otherwise specified, these terms should be understood according to their ordinary and usual meanings.

[0052] In the present specification, claims, and drawings, the terms "first," "second," "third," and the like are used to distinguish similar or similar objects or entities, and are not necessarily intended to define a particular order or precedence, unless otherwise noted. It should be understood that the terms used in this manner are interchangeable under appropriate circumstances.

[0053] The terms "comprise," "comprises," and "having," and any variations thereof, are intended to cover but not exclude inclusion; for example, a product or device comprising a list of components is not necessarily limited to all the components expressly listed but may include other components not expressly listed or inherent to such product or device.

[0054] The terms "disposed," "connected," and "mounted" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; they may refer to direct connections or indirect connections via an intermediary; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention.

[0055] Since sapphire crystal has a melting point of up to 2050°C, the growth technology of sapphire crystal is quite difficult. The main sapphire crystal growth technologies used in LEDs include the kybernethygrometry, heat exchange method, guided mold method, Czochralski method, and drop method.

[0056] Currently, the primary sapphire crystal growth technology utilizes the Kyropoulos method. A single sapphire crystal grown using this method has already weighed up to 400 kg. The resulting large sapphire crystals can be processed into a variety of crystal applications. However, the sapphire crystals grown using the Kyropoulos method are heavy and require a long growth cycle, typically around 30 days. Therefore, the Kyropoulos method requires a continuous and stable supply of water and electricity, especially for large-scale production operations. Sudden power or water outages can result in losses of millions or even tens of millions of yuan, posing significant production risks.

[0057] The guided mold method can grow near-net-size blanks, significantly reducing the amount of processing required. This advantage is particularly evident when the product requires special-shaped parts, such as hollow sapphire tubes, curved mirrors, and fairings. The guided mold method as a method for growing sapphire crystals has the following characteristics: it can grow sapphire crystals of different shapes according to actual needs, and has broad application prospects. For example, it can grow sapphire crystals in the form of sheets, tubes, curved surfaces, and fairing blanks. It can also grow dozens of sapphire wafers simultaneously, with a growth rate of up to 30mm / h (commonly 3mm / h for the Kyropoulos method and heat exchange method), and a short growth cycle of generally 2-3 days. At the same time, due to the special thermal field structure and growth method used in the growth device using the guided mold method, the tolerance for unexpected situations is high.

[0058] Mechanically processing rod-shaped crystals into thin-walled tubular crystals is difficult, resulting in significant material waste and low crystal utilization. Using the guided mold method as a crystal growth method allows high-performance tubular sapphires to be directly drawn from the melt. Furthermore, high-performance tubular sapphires have a regular appearance, a smooth surface, good transparency, and good crystal integrity. Using one-shot forming technology, tubular crystals of varying inner and outer diameters can be directly drawn from the melt, reducing the difficulty of crystal processing and avoiding material waste. Furthermore, when using the guided mold method as a crystal growth method, the crystal growth apparatus requires an absolutely static heating environment, meaning the crucible support structure 11 in the crystal growth apparatus also needs to be absolutely static.

[0059] In addition, if Figure 1 In the crucible support structure 11 shown, the connecting surfaces of the stainless steel water-cooled lifting rods 4 and the crucible support shaft 2 cannot be machined to be perfectly flat. Furthermore, the stainless steel water-cooled lifting rods 4 and the crucible support shaft 2 are made of different materials (the crucible support shaft 2 is typically made of tungsten or molybdenum). Consequently, the expansion coefficients of the stainless steel water-cooled lifting rods 4 and the crucible support shaft 2 differ during heating. These factors all contribute to the wobble of the existing crucible support structure 11.

[0060] Figure 2 The schematic structural diagram of a crucible anti-vibration structure according to an embodiment of the present invention is exemplarily shown.

[0061] like Figure 2 and Figure 3d As shown, a crucible anti-shake structure of the present invention comprises: a crucible tray 1, a crucible support shaft 2, a hollow locking mechanism 3 and a water-cooled lifting rod 4;

[0062] Wherein, the crucible tray 1 is arranged at one end of the crucible support shaft 2;

[0063] The other end of the crucible support shaft 2 is connected to the locking mechanism 3, and the crucible support shaft 2 and the locking mechanism 3 have different expansion coefficients;

[0064] The locking mechanism 3 is sleeved on one end of the water-cooled lifting rod 4. The outer contour of the locking mechanism 3 gradually increases in the height direction, and at least four evenly distributed gap grooves 30 are opened on the circumference of the locking mechanism 3.

[0065] One end of the water-cooled lifting rod 4 where the locking mechanism 3 is mounted is designed to be a non-planar structure, and the water-cooled lifting rod 4 and the locking mechanism 3 have the same expansion coefficient.

[0066] It should be noted that the multiple gap grooves 30 provided on the locking mechanism 3 can ensure that the locking mechanism 3 has the properties of expansion and self-contraction, eliminating the active gap between the existing stainless steel water-cooled lifting rod 4 and the crucible support shaft 2 made of tungsten material; and, the water-cooled lifting rod 4 and the locking mechanism 3 have the same expansion coefficient. Therefore, when the temperature rises, the water-cooled lifting rod 4 and the locking mechanism 3 have the same degree of expansion, thereby relying on the locking mechanism 3 and the crucible support shaft 2, the crucible tray 1 and the crucible 10 to slide downward, realizing the adaptive tight fit of the crucible support shaft 2 and the locking mechanism 3, that is, the self-locking function, to avoid shaking caused by different degrees of expansion.

[0067] In addition, the water-cooled lifting rod 4 and the locking mechanism 3 can be made of the same material with the same expansion coefficient. For example, the water-cooled lifting rod 4 and the locking mechanism 3 can be made of stainless steel material, or molybdenum material can be used to make the water-cooled lifting rod 4 and the locking mechanism 3; the water-cooled lifting rod 4 and the locking mechanism 3 can also be made of different materials with the same expansion coefficient. The specific manufacturing materials can be determined by technical personnel in this field according to actual conditions, and the present invention does not impose specific restrictions on them.

[0068] Figure 3a The figure shows a schematic structural diagram of a crucible support shaft in a crucible anti-shake structure according to an embodiment of the present invention.

[0069] In some embodiments, as Figure 3a As shown, the crucible support shaft 2 includes a first support component 20 and a second support component 21. One end of the first support component 20 is connected to the crucible tray 1, and the outer contour size of the second support component 21 gradually increases along the height direction. The other end of the first support component 20 is connected to the end of the second support component 21 with a smaller outer contour size.

[0070] In some embodiments, as Figure 3a As shown, the outer contour size of the first support component 20 is equal to the minimum outer contour size of the second support component 21; the outer contour size of the first support component 20 remains consistent in the vertical direction.

[0071] Figure 3bThe figure shows a schematic structural diagram of a water-cooled lifting rod in a crucible anti-shake structure according to an embodiment of the present invention.

[0072] In some embodiments, as Figure 3b As shown, the water-cooled lifting rod 4 includes a first lifting rod 40 and a second lifting rod 41 connected to each other. The first lifting rod 40 is sleeved with a locking mechanism 3, and the outer contour size of the first lifting rod 40 is smaller than that of the second lifting rod 41.

[0073] Figure 3c The following is a schematic structural diagram of a partial assembly of a crucible anti-vibration structure according to an embodiment of the present invention.

[0074] In some embodiments, as Figure 3c As shown, the outer contour size of the first lifting rod 40 is smaller than the outer contour size of the first supporting component 20 , and the outer contour size of the first lifting rod 40 is smaller than the minimum outer contour size of the second supporting component 21 .

[0075] In some embodiments, as Figure 3c As shown, the outer contour dimension of the second lifting rod 41 is not greater than, that is, smaller than or equal to, the maximum outer contour dimension of the second supporting component 21 .

[0076] In some embodiments, as Figure 3a and Figure 3b As shown, the height of the second supporting component 21 in the vertical direction is greater than the height of the first lifting rod 40 in the vertical direction, that is, H1>H2, where H1 represents the height of the second supporting component 21 and H2 represents the height of the first lifting rod 40.

[0077] In some embodiments, the height of the second support component 21 does not exceed 50 mm, and the radial dimension range of the second support component 21 can be set to 50 mm-60 mm, that is, the minimum outer contour dimension and the maximum outer contour dimension of the second support component 21 are both in the range of 50 mm-60 mm, and the minimum outer contour dimension is smaller than the maximum outer contour dimension.

[0078] In some embodiments, the height of the first lifting rod 40 does not exceed, that is, is less than or equal to, 50 mm, and the radial dimension of the first lifting rod 40 ranges from 50 mm to 60 mm.

[0079] It should be noted that the above ranges are merely optimal for this embodiment, and the specific values ​​may be reset based on actual circumstances. While the height and radial dimension ranges of the second support member 21 and the first lifting rod 40 are identical, the aforementioned condition, for example, that the height of the second support member 21 is greater than the height of the first lifting rod 40, must be met within both ranges to achieve the self-locking function of the present invention.

[0080] Figure 3d The figure shows an overall structural diagram of a locking mechanism in a crucible anti-shake structure according to an embodiment of the present invention.

[0081] Figure 3e The figure exemplarily shows a top view of a locking mechanism in a crucible anti-shake structure according to an embodiment of the present invention.

[0082] Figure 3f The figure exemplarily shows a front view of a locking mechanism in a crucible anti-shake structure according to an embodiment of the present invention.

[0083] In some embodiments, as Figure 3d 、 Figure 3e and Figure 3f As shown, 4-10 evenly distributed gap grooves 30 may be provided on the circumference of the locking mechanism 3 , and one end of the gap groove 30 is set as a closed structure, and the other end is set as an open structure.

[0084] It should be noted that the provision of multiple clearance grooves 30 allows the locking mechanism 3 to have expansion and contraction properties, achieving a self-locking function. The open and closed ends of the clearance grooves 30, as well as the number of clearance grooves 30 provided, can be determined based on practical application. Furthermore, in addition to stainless steel and molybdenum, the locking mechanism 3 can also be made of tungsten, tungsten-molybdenum alloys, tantalum, and other metal materials. Those skilled in the art can select the material based on practical needs, and this invention does not impose any specific limitations thereon.

[0085] Figure 4 The overall structural diagram of a crystal growth device using a guided mold method in the prior art is exemplified.

[0086] like Figure 4 As shown, an existing crystal growth device using a guided mold method includes: a thermal field structure body 5, a sealing cover 6, a heat insulation structure 7, a guide tube 8, a heater 9, a crucible 10 and a crucible support structure 11;

[0087] Wherein, a sealing cover 6 is provided on the thermal field structure body 5;

[0088] The heat preservation structure 7 is arranged inside the thermal field structure body 5;

[0089] The guide tube 8 is arranged inside the thermal field structure body 5, and the guide tube 8 is arranged on the thermal insulation structure 7;

[0090] The heater 9 is arranged on a side of the heat preservation structure 7 away from the heat field structure body 5;

[0091] The crucible 10 is arranged on a side of the heater 9 away from the heat insulation structure 7;

[0092] The crucible support structure 11 is provided at the bottom of the crucible 10 .

[0093] It should be noted that the above only describes the main structure and position connection relationship of a crystal growth device using the guided mold method. However, when a crystal growth device using the guided mold method is in use, the thermal field structure body 5 also includes other component structures for use in conjunction with it, and they are all necessary component structures in a crystal growth device using the guided mold method that are well known to those skilled in the art, and will not be repeated here.

[0094] Figure 5a The figure shows an overall structural diagram of a crystal growth device according to another embodiment of the present invention.

[0095] Figure 5b A partial structural diagram of a crystal growth device according to another embodiment of the present invention is exemplified.

[0096] like Figure 5a and Figure 5b As shown, a crystal growth device of the present invention includes: a thermal field structure body 5, a sealing cover 6, a heat preservation structure 7, a guide tube 8, a heater 9, a crucible 10 and a crucible anti-shake structure 12;

[0097] Wherein, a sealing cover 6 is provided on the thermal field structure body 5;

[0098] The heat preservation structure 7 is arranged inside the thermal field structure body 5;

[0099] The guide tube 8 is arranged inside the thermal field structure body 5, and the guide tube 8 is arranged on the thermal insulation structure 7;

[0100] The heater 9 is arranged on a side of the heat preservation structure 7 away from the heat field structure body 5;

[0101] The crucible 10 is arranged on a side of the heater 9 away from the heat insulation structure 7;

[0102] The crucible anti-shake structure 12 is arranged at the bottom of the crucible 10. The crucible anti-shake structure 12 includes a crucible tray 1, a crucible support shaft 2, a locking mechanism 3 and a water-cooled lifting rod 4 connected in sequence from top to bottom. The crucible support shaft 2 and the locking mechanism 3 have different expansion coefficients, and the water-cooled lifting rod 4 and the locking mechanism 3 have the same expansion coefficient.

[0103] It should be noted that the specific connection method of the components of the crucible anti-shake structure 12 can be found above, and their positional relationship can be combined with Figure 2 By improving the existing crucible support structure 11 into a crucible anti-shake structure 12, it is possible to ensure that the crucible 10 and other components will not shake, thereby meeting the absolute static environment required for crystal growth.

[0104] In some embodiments, as Figure 5aAs shown, the thermal insulation structure 7 includes a first thermal insulation layer 70, a second thermal insulation layer 71 and a third thermal insulation layer 72;

[0105] The first thermal insulation layer 70 is provided on both sides of the interior of the thermal field structure body 5;

[0106] The second thermal insulation layer 71 is provided on the first thermal insulation layer 70 , and a guide tube 8 is provided on the second thermal insulation layer 71 ;

[0107] The third thermal insulation layer 72 is disposed at the bottom of the thermal field structure body 5 , and the third thermal insulation layer 72 is disposed close to the heater 9 .

[0108] In some embodiments, the shape of the heater 9 can be designed to be a birdcage type.

[0109] It should be noted that the heater 9 can be made of tungsten material, or other materials known to those skilled in the art for making the heater 9 , and the present invention does not impose any specific limitation thereto.

[0110] The beneficial effects of the present invention are as follows: by constructing a locking mechanism 3 and arranging a plurality of evenly distributed gap grooves 30 on the circumference of the locking mechanism 3, the expansion and self-contraction functions of the locking mechanism 3 can be realized, and the movable gap between the water-cooled lifting rod 4 made of stainless steel and the crucible support shaft 2 is eliminated; further, by constructing a water-cooled lifting rod 4 and a locking mechanism 3 with the same expansion coefficient, and a crucible support shaft 2 and a locking mechanism 3 with different expansion coefficients, it can be achieved that during the temperature increase process, the water-cooled lifting rod 4 and the locking mechanism 3 have the same expansion degree, so that the crucible support shaft 2 and the locking mechanism 3 slide downward by their own weight, completing the adaptive tight fit between the crucible support shaft 2 and the locking mechanism 3, avoiding the shaking phenomenon of the existing crucible support structure 11 during the temperature increase process due to the different expansion degrees of the water-cooled lifting rod 4 and the crucible support shaft 2, and ensuring the absolutely static environment required for crystal growth.

[0111] For ease of explanation, the above description has been made in conjunction with specific embodiments. However, the above discussion of some embodiments is not intended to be exhaustive or to limit the embodiments to the specific forms disclosed above. Based on the above teachings, various modifications and variations can be obtained. The selection and description of the above embodiments are intended to better explain the principles and practical applications, so that those skilled in the art can better use the embodiments and various different variations of the embodiments suitable for specific use considerations.

Claims

1. A crucible anti-vibration structure, characterized in that: Used for guided mold method crystal growth, comprising: a crucible tray, a crucible support shaft, a hollow locking mechanism and a water-cooled lifting rod; Wherein, the crucible tray is arranged at one end of the crucible support shaft; The other end of the crucible support shaft is connected to the locking mechanism, and the crucible support shaft and the locking mechanism have different expansion coefficients; The locking mechanism is sleeved on one end of the water-cooled lifting rod, the outer contour size of the locking mechanism gradually increases along the height direction, and a clearance groove is opened on the circumference of the locking mechanism; One end of the water-cooled lifting rod where the locking mechanism is mounted is designed to be a non-planar structure, and the water-cooled lifting rod and the locking mechanism have the same expansion coefficient.

2. The crucible anti-vibration structure according to claim 1, characterized in that: One end of the gap groove is set as a closed structure, and the other end is set as an open structure.

3. The crucible anti-vibration structure according to claim 1, characterized in that: The crucible support shaft includes a first support member and a second support member; Wherein, one end of the first supporting member is connected to the crucible tray; The outer contour size of the second supporting component gradually increases along the height direction; The other end of the first supporting component is connected to the end of the second supporting component with a smaller outer contour size.

4. The crucible anti-vibration structure according to claim 3, characterized in that: The outer contour dimension of the first supporting component is equal to the minimum outer contour dimension of the second supporting component.

5. The crucible anti-vibration structure according to claim 4, characterized in that: The water-cooled lifting rod comprises a first lifting rod and a second lifting rod connected to each other; Wherein, the locking mechanism is sleeved on the first lifting rod, and the outer contour size of the first lifting rod is smaller than the outer contour size of the second lifting rod.

6. The crucible anti-vibration structure according to claim 5, characterized in that: The outer contour size of the first lifting rod is smaller than the minimum outer contour size of the second supporting component, and the outer contour size of the second lifting rod is smaller than or equal to the maximum outer contour size of the second supporting component.

7. The crucible anti-vibration structure according to claim 6, characterized in that: A height of the second supporting component in the vertical direction is greater than a height of the first lifting rod in the vertical direction.

8. The crucible anti-vibration structure according to claim 7, characterized in that: The height of the second supporting component is less than or equal to 50 mm, and the radial dimension range of the second supporting component is set to 50 mm-60 mm.

9. A crystal growth device, using the crucible anti-shake structure according to any one of claims 1 to 8, characterized in that: include: Thermal field structure body, sealing cover, thermal insulation structure, guide tube, heater, crucible and crucible anti-shake structure; Wherein, the sealing cover is provided on the thermal field structure body; The thermal insulation structure is arranged inside the thermal field structure body; The guide tube is arranged inside the thermal field structure body, and the guide tube is arranged on the thermal insulation structure; The heater is arranged on a side of the heat preservation structure away from the thermal field structure body; The crucible is arranged on a side of the heater away from the heat insulation structure; The crucible anti-shake structure is arranged at the bottom of the crucible, and the crucible anti-shake structure includes a crucible tray, a crucible support shaft, a locking mechanism and a water-cooled lifting rod connected in sequence from top to bottom. The crucible support shaft and the locking mechanism have different expansion coefficients, and the water-cooled lifting rod and the locking mechanism have the same expansion coefficient.

10. The crystal growth device according to claim 9, characterized in that: The thermal insulation structure comprises a first thermal insulation layer, a second thermal insulation layer and a third thermal insulation layer; Wherein, the first thermal insulation layer is arranged on both sides of the interior of the thermal field structure body; The second thermal insulation layer is provided on the first thermal insulation layer, and the guide tube is provided on the second thermal insulation layer; The third thermal insulation layer is arranged at the bottom of the thermal field structure body, and the third thermal insulation layer is arranged close to the heater.

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