Optical fiber arrangement method and device for mixed light source of exposure machine

Abstract

The present invention discloses a method and device for arranging optical fibers of a mixed light source of an exposure machine, the method comprising obtaining the arrangement state of multiple laser heads in a laser head module; marking the required number of laser heads based on the arrangement state of the multiple laser heads, and arranging the marked laser heads evenly; connecting the marked laser heads to the corresponding laser driving modules through optical fibers. The present invention can quickly realize the coupling of lasers of different wavelengths in the laser head module, and make the laser energy finally generated by the laser head module evenly distributed.

Description

Technical Field

[0001] The present invention relates to the field of light processing technology, and in particular to an optical fiber arrangement method of a mixed light source of an exposure machine and an optical fiber arrangement device for implementing the optical fiber arrangement method. Background Art

[0002] When the exposure machine is exposing some special photolithography materials (photoresists) or in order to achieve certain specific photolithography processes, a light source with a specific energy is required to irradiate the photolithography material, such as Figure 1 As shown, a laser driving module b that can generate a certain wavelength is connected to a laser head module a through an optical fiber c. The laser head module can generate light of a specific energy to irradiate the photolithography material. The energy of the laser is related to the wavelength. The common laser driving modules on the market are defined by the wavelength, such as a 375nm wavelength laser driving module, a 405nm wavelength laser driving module, and a 445nm wavelength laser driving module. Different wavelengths correspond to different laser energies. If the energy of the required specific light source is between the two wavelengths, then it is necessary to couple the two wavelengths of laser to form a mixed light source. The mixed light source can generate light spot energy, and the light spot energy is used to make the photolithography material react, such as Figure 2 As shown, the laser energy c is between the laser energies a and b. Therefore, in order to obtain the laser energy c, it is necessary to couple lasers of two wavelengths (such as 375 nm and 405 nm).

[0003] However, the key to coupling two wavelengths of laser light is to introduce the two wavelengths of laser light into the same laser head module. Since the optical fiber can be used to guide the laser light, one end of the optical fiber can be plugged into the laser head and the other end can be plugged into the laser driver module. When introducing the two wavelengths of laser light into the same laser head module, the laser head module is connected to two laser driver modules that can generate laser light of different wavelengths through an optical fiber. Figure 3 As shown, the laser head module a is connected to two laser driving modules b that can generate lasers of different wavelengths through optical fibers c.

[0004] When the laser head module introduces two wavelengths of laser, if the laser distribution finally generated by the laser head module is uneven, it will affect the lithography effect. Therefore, how to couple the two wavelengths of laser in the laser head module and make the energy finally output by the laser head module uniform is an urgent problem to be solved.

[0005] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0006] The purpose of the present invention is to provide a fiber optic arrangement method for a mixed light source of an exposure machine, which can realize the coupling of lasers of different wavelengths in a laser head module and make the laser energy ultimately generated by the laser head module evenly distributed. At the same time, a fiber optic arrangement device for realizing the fiber optic arrangement method is also provided.

[0007] To achieve the above object, an embodiment of the present invention provides a method for arranging optical fibers of a mixed light source of an exposure machine, wherein the mixed light source is used to generate light spot energy, and the light spot energy is used to cause a photolithography material to react. The optical fiber arrangement method includes:

[0008] Obtaining the arrangement status of multiple laser heads in the laser head module;

[0009] Based on the arrangement status of multiple laser heads, a required number of laser heads are marked, and the marked laser heads are evenly arranged;

[0010] The laser head to be marked is connected to the corresponding laser driving module via optical fiber.

[0011] In one or more embodiments of the present invention, obtaining the arrangement status of multiple laser heads in the laser head module includes:

[0012] The arrangement status of the laser heads in the laser head module is obtained through an image recognition device.

[0013] In one or more embodiments of the present invention, the required number of laser heads is calculated by the following steps:

[0014] Obtain the laser energy required to be generated by the laser head module;

[0015] Obtain the wavelength of the laser driver module to which the laser head module is connected;

[0016] The required number of laser heads is calculated based on the laser energy required to be generated by the laser head module and the wavelength of the laser driving module.

[0017] In one or more embodiments of the present invention, marking the required number of laser heads includes:

[0018] Mark the required number of laser heads manually or using a marking algorithm.

[0019] In one or more embodiments of the present invention, before the laser head to be marked is connected to the corresponding laser driving module via an optical fiber, it is necessary to ensure that the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber.

[0020] In one or more embodiments of the present invention, the following steps are used to determine whether the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber:

[0021] Connect one end of an optical fiber to a light source;

[0022] Find the optical fiber with light emitted from the other end, and determine that the optical fiber with light emitted belongs to the same optical fiber.

[0023] In one or more embodiments of the present invention, the following steps are used to determine whether the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber:

[0024] Insert each laser head in the laser head module into the optical fiber, and connect each laser head to the light source respectively;

[0025] Find the optical fiber with light emitted from the other end, and determine that the optical fiber with light emitted belongs to the same optical fiber.

[0026] In one or more embodiments of the present invention, the following steps are used to determine whether the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber:

[0027] Insert each laser head in the laser head module into the optical fiber, and connect the marked laser heads to the light source respectively;

[0028] Find the optical fiber with light emitted from the other end, and determine that the optical fiber with light emitted belongs to the same optical fiber.

[0029] In one or more embodiments of the present invention, the following steps are used to determine whether the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber:

[0030] A certain number of optical fibers are plugged into a laser drive module, which is a module connected to the laser head to be marked;

[0031] The laser driving module is made to generate laser light and search for optical fibers from which light is emitted. The optical fibers from which light is emitted are determined to belong to the same optical fiber.

[0032] The present invention also discloses an optical fiber arrangement device of a mixed light source of an exposure machine, wherein the mixed light source is used to generate light spot energy, and the light spot energy is used to make the photolithography material react. The optical fiber arrangement device comprises:

[0033] An acquisition module, used for acquiring the arrangement status of multiple laser heads in the laser head module;

[0034] A marking module, used for marking a required number of laser heads based on the arrangement status of multiple laser heads, and the marked laser heads are evenly arranged;

[0035] The connection module is used to connect the laser head to be marked with the corresponding laser driving module through an optical fiber.

[0036] Compared with the prior art, the present invention can quickly realize the coupling of lasers with different wavelengths in the laser head module, and make the laser energy finally generated by the laser head module evenly distributed. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a schematic diagram of photolithography using a light source according to an embodiment of the present invention;

[0038] Figure 2 is a graph showing the relationship between wavelength and energy according to an embodiment of the present invention;

[0039] Figure 3 is a schematic diagram of connecting a laser head module and a laser driving module according to an embodiment of the present invention;

[0040] Figure 4 is a flow chart of an optical fiber arrangement method according to an embodiment of the present invention;

[0041] Figure 5 yes Figure 3 The enlarged schematic diagram of part A in the middle;

[0042] Figure 6 yes Figure 5 Schematic diagram of the arrangement of the marked laser heads and the unmarked laser heads;

[0043] Figure 7 4 is a structural block diagram of an optical fiber arrangement device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0044] The specific implementation modes of the present invention are described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0045] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.

[0046] Combination Figure 3 and Figure 5As shown, the laser head module a is a module integrating multiple laser heads M. For a hybrid light source, the laser head module a is connected to at least two laser driving modules c (each laser driving module generates a different wavelength of laser light) through an optical fiber b, that is, the multiple laser heads in the laser head module have at least two parts of laser heads, and each part of the laser heads is connected to a laser driving module through an optical fiber. For example, for a laser head module including 64 laser heads, 16 laser heads are connected to a laser driving module that can generate a 375nm wavelength laser through an optical fiber, and 48 laser heads are connected to a laser driving module that can generate a 405nm wavelength laser through an optical fiber.

[0047] When preparing a hybrid light source, for the laser head module described above, a certain number of laser heads in it need to be connected to the corresponding laser driving module through optical fibers. And these certain number of laser heads need to be evenly distributed so that the laser energy ultimately generated by the laser head module can be evenly distributed. As mentioned above, 16 laser heads connected to the laser driving module that can generate 375nm wavelength lasers need to be evenly arranged. At the same time, 48 laser heads connected to the laser driving module that can generate 405nm wavelength lasers need to be evenly arranged. The optical fiber arrangement method in the hybrid light source described in the present invention can connect a certain number of laser heads in the laser head module to the corresponding laser driving module through optical fibers, and can evenly distribute the energy ultimately generated by the laser head module.

[0048] like Figure 4 As shown, a method for arranging optical fibers of a mixed light source of an exposure machine disclosed in the present invention includes the following steps:

[0049] First, the arrangement status of multiple laser heads in the laser head module is obtained;

[0050] Specifically, it can be seen from the above that the laser head module includes multiple laser heads. When preparing a mixed light source, if a certain number of laser heads are connected to the corresponding laser driving module through optical fibers, and these certain number of laser heads are unevenly distributed, the energy ultimately generated by the laser head module will be uneven, thereby affecting the final lithography effect. In order to evenly distribute the energy ultimately generated by the laser head module, the arrangement state of the multiple laser heads in the laser head module is first obtained, so that a certain number of evenly distributed laser heads can be selected according to the arrangement state of the laser heads, and the selected laser heads are connected to the corresponding laser driving module through optical fibers.

[0051] Furthermore, when obtaining the arrangement state of the multiple laser heads in the laser head module, the arrangement state of the multiple laser heads in the laser head module can be obtained by an image recognition device. The multiple laser heads in the laser head module finally obtained by the image recognition device are arranged in an array. Figure 5The schematic diagram of the arrangement of the laser heads in the laser head module is shown. During implementation, the image recognition device can take a picture of the laser head module to obtain a laser head image. The laser head image is further subjected to feature extraction and other operations to obtain the arrangement state of the multiple laser heads. Of course, the arrangement state of the multiple laser heads in the laser head module can also be obtained by a two-dimensional measuring instrument.

[0052] Secondly, based on the arrangement status of multiple laser heads, the required number of laser heads are marked, and the marked laser heads are evenly arranged.

[0053] Specifically, Figure 6 As shown in the figure, after the arrangement state of the laser heads is obtained, the laser heads can be marked to mark the required number of laser heads, and the marked laser heads need to be evenly distributed. By making the marked laser heads evenly distributed, the laser energy ultimately generated by the laser head module can be evenly distributed. Figure 6 Where N is the marked laser head and M is the unmarked laser head.

[0054] Furthermore, before marking the laser heads, it is necessary to determine the number of laser heads to be marked, so as to mark the required number of laser heads. The required number of laser heads is calculated based on the energy required to be generated by the laser head module and the wavelength generated by the laser driving module connected to the laser head module. Figure 3 , Figure 5-6 As shown, the laser head module needs to generate laser energy C, and the laser head module needs to be connected to a laser driving module that can generate a laser with a wavelength of 375nm and a laser driving module that can generate a laser with a wavelength of 405nm. After calculation, when the laser energy generated by the laser head module is C, 16 laser heads are required and each of the 16 laser heads is connected to a laser driving module that can generate a laser with a wavelength of 405nm through an optical fiber. At the same time, 48 laser heads are required and each of the 48 laser heads is connected to a laser driving module that can generate a laser with a wavelength of 375nm through an optical fiber.

[0055] Furthermore, after the required number of laser heads is determined, the laser heads can be marked manually or using a corresponding marking algorithm to mark the required number of laser heads. Figure 6 As shown, manual marking is taken as an example. When marking the laser heads, a required number of laser heads are selected from a plurality of laser heads arranged in an array and corresponding markings are made, such as color markings, etc., and the marked laser heads need to be evenly distributed.

[0056] Finally, the marked laser head is connected to the corresponding laser driving module via optical fiber.

[0057] Specifically, optical fiber is used for light transmission. After the required number of laser heads are marked, the marked laser heads are further connected to the corresponding laser driving modules through optical fibers. As described above, when 16 laser heads are marked and each of the 16 laser heads needs to be connected to a laser driving module that can generate a laser with a wavelength of 405nm, at this time, each laser head is connected to the laser driving module that can generate a laser with a wavelength of 405nm through an optical fiber. During implementation, one end of the optical fiber is plugged into a laser head, and the other end is plugged into a laser driving module that can generate a laser with a wavelength of 405nm.

[0058] like Figure 3 As shown, since the optical fiber is usually armored, it is not easy to disassemble and straighten it. Therefore, when connecting the laser head and the laser driving module, it is necessary to determine that the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module belong to the same optical fiber. During implementation, the following method can be used to determine that the optical fiber connected to the laser head and the optical fiber connected to the laser driving module belong to the same optical fiber:

[0059] One way is to connect one end of an optical fiber to a light source and further search for an optical fiber with light emitted from the other end. If light is emitted from the other end, it belongs to the same optical fiber. At this time, one end of the optical fiber can be plugged into the marked laser head and the other end can be plugged into the corresponding laser driver module.

[0060] Another way is to insert each laser head in the laser head module into the optical fiber, and connect each laser head to the light source respectively. Further search for the optical fiber with light emitted from the other end. If light is emitted from the other end, it belongs to the same optical fiber. At this time, the other end of the optical fiber can be plugged into the corresponding connected laser driving module. As mentioned above, all 64 laser heads in the laser head module are inserted into the optical fiber, and each laser head is connected to the light source. For the optical fiber with light emitted from the other end, it is determined that it belongs to the same optical fiber, and the optical fiber is plugged into the corresponding connected laser driving module. Of course, after each laser head is plugged into the optical fiber, only the marked laser head can be connected to the light source, the other end of the optical fiber connected to the laser head is determined, and it is plugged into the corresponding laser driving module. As mentioned above, only the 16 marked laser heads are connected to the light source to determine the other end of the optical fiber plugged into these laser heads, and the other end is further plugged into the laser driving module that can generate a laser with a wavelength of 405nm.

[0061] Of course, in other embodiments, it can also be determined that the optical fiber connected to the laser head and the optical fiber connected to the laser driving module belong to the same optical fiber by the following method:

[0062] A certain number of optical fibers are plugged into a laser driving module, which is a module connected to the marked laser head; the laser driving module is further made to generate laser light and search for optical fibers with light emitted; the optical fibers with light emitted are further plugged into the marked laser head. For example, 16 optical fibers are plugged into a laser driving module that can generate laser light with a wavelength of 405nm. After the laser driving module is working, the other end of the optical fiber with light emitted is plugged into the marked laser head.

[0063] like Figure 7 As shown, an optical fiber arrangement device for a mixed light source of an exposure machine disclosed in the present invention includes an acquisition module, a marking module and a connection module. The acquisition module is used to acquire the arrangement status of multiple laser heads in the laser head module; the marking module is used to mark the required number of laser heads based on the arrangement status of the multiple laser heads, and the marked laser heads are evenly arranged; the connection module is used to connect the marked laser head with the corresponding laser driving module through an optical fiber.

[0064] Specifically, when preparing a mixed light source using a laser head module, the arrangement status of multiple laser heads in the laser head module is first obtained through the acquisition module. The details of how the acquisition module obtains the arrangement status of multiple laser heads are described above and will not be repeated here.

[0065] After obtaining the arrangement status of multiple laser heads, the marking module marks the required number of laser heads according to the arrangement status of the laser heads, and the marked laser heads need to be evenly arranged so that the laser energy ultimately generated by the laser head module can be evenly distributed. How the marking module marks the required number of laser heads is described above in detail and will not be described here one by one.

[0066] After the required number of laser heads are marked, the connection module connects the marked laser heads to the corresponding laser driving modules through optical fibers. The details are as described above and will not be repeated here.

[0067] The present invention can quickly realize the coupling of lasers with different wavelengths in a laser head module, and make the laser energy finally generated by the laser head module evenly distributed.

[0068] The foregoing description of specific exemplary embodiments of the present invention is for the purpose of illustration and demonstration. These descriptions are not intended to limit the present invention to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the present invention and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the present invention and various different selections and changes. The scope of the present invention is intended to be limited by the claims and their equivalents.

Claims

1. A method for arranging optical fibers of a mixed light source of an exposure machine, wherein the mixed light source is used to generate light spot energy, and the light spot energy is used to cause a photolithography material to react, characterized in that: The optical fiber arrangement method comprises: Obtaining the arrangement status of multiple laser heads in the laser head module; The required number of laser heads is calculated based on the laser energy required to be generated by the laser module and the wavelengths generated by the multiple laser driving modules connected to the laser head module, and the required number of laser heads is marked based on the arrangement state of the multiple laser heads, and the marked laser heads are evenly arranged, wherein the wavelength of the laser generated by each laser driving module is different; The laser head to be marked is connected to the corresponding laser driving module via optical fiber.

2. The optical fiber arrangement method according to claim 1, characterized in that: The obtaining of the arrangement status of the plurality of laser heads in the laser head module comprises: The arrangement status of the laser heads in the laser head module is obtained through an image recognition device.

3. The optical fiber arrangement method according to claim 1, characterized in that: The laser heads for marking the required number include: Mark the required number of laser heads manually or using a marking algorithm.

4. The optical fiber arrangement method according to claim 1, characterized in that: Before the laser head to be marked is connected to the corresponding laser driving module via an optical fiber, it is necessary to ensure that the optical fiber connected to the laser head module and the optical fiber connected to the laser driving module are the same optical fiber.

5. The optical fiber arrangement method according to claim 4, characterized in that: Use the following steps to confirm that the optical fiber connected to the laser head module and the optical fiber connected to the laser driver module are the same optical fiber: Connect one end of an optical fiber to a light source; Find the optical fiber with light emitted from the other end, and determine that the optical fiber with light emitted belongs to the same optical fiber.

6. The optical fiber arrangement method according to claim 4, characterized in that: Use the following steps to confirm that the optical fiber connected to the laser head module and the optical fiber connected to the laser driver module are the same optical fiber: Each laser head in the laser head module is inserted into the optical fiber, and each laser head is connected to the light source respectively.

7. The optical fiber arrangement method according to claim 4, characterized in that: Use the following steps to confirm that the optical fiber connected to the laser head module and the optical fiber connected to the laser driver module are the same optical fiber: Each laser head in the laser head module is inserted into the optical fiber, and the marked laser heads are connected to the light source respectively.

8. The optical fiber arrangement method according to claim 4, characterized in that: Use the following steps to confirm that the optical fiber connected to the laser head module and the optical fiber connected to the laser driver module are the same optical fiber: A certain number of optical fibers are plugged into a laser drive module, which is a module connected to the laser head to be marked; The laser driving module is made to generate laser light and search for optical fibers from which light is emitted. The optical fibers from which light is emitted are determined to belong to the same optical fiber.

9. An optical fiber arrangement device for a mixed light source of an exposure machine, wherein the mixed light source is used to generate light spot energy, and the light spot energy is used to make a photolithographic material react, characterized in that: The optical fiber arrangement device comprises: An acquisition module, used for acquiring the arrangement status of multiple laser heads in the laser head module; A marking module, used to calculate the required number of laser heads based on the laser energy required to be generated by the laser module and the wavelengths generated by the multiple laser driving modules connected to the laser head module, and to mark the required number of laser heads based on the arrangement of the multiple laser heads, and the marked laser heads are evenly arranged, wherein the wavelength of the laser generated by each laser driving module is different; The connection module is used to connect the laser head to be marked with the corresponding laser driving module through an optical fiber.

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