Method, system, apparatus, and medium for distributing semiconductor process recipes

Abstract

Embodiments of the present application disclose a method, system, device and medium for distributing a semiconductor process recipe. The method comprises: periodically monitoring a process recipe set by a machine operation to determine a display parameter in a production recipe corresponding to the process recipe according to parameter values of each recipe parameter in the process recipe. The display parameter is a recipe parameter whose parameter value needs to be manually set with a relatively high probability. Therefore, when adjusting the recipe parameters of the production recipe to generate a golden process recipe for machine execution, only the display parameter of the production recipe is displayed in a visual interface to reduce the time for relevant personnel to search for adjustable parameters from a large number of recipe parameters. Furthermore, the above process greatly reduces the response time of the recipe management system for calling recipe parameters to the visual interface for display, thereby improving the distribution efficiency of the golden process recipe.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the technical field of semiconductor manufacturing, and in particular to a method, system, device and medium for distributing semiconductor process recipes. BACKGROUND

[0002] A semiconductor manufacturing process mainly includes processes such as silicon wafer manufacturing, wafer manufacturing, and semiconductor packaging and testing. Before executing the above processes by a machine, the parameter values of a pre-stored production process recipe (Recipe) in a recipe management system (RMS) need to be adjusted and set to generate a golden recipe for execution by a designated machine.

[0003] Currently, the above recipe parameter setting process is performed manually. Specifically, all recipe parameters in a production process recipe are displayed on a visual interface, and then the parameter values of adjustable parameters that need to be adjusted are set manually to generate a corresponding golden recipe.

[0004] The number of recipe parameters in a production process recipe is large, and relevant personnel need to spend a lot of time finding adjustable parameters in the visual interface to set the parameter values of the adjustable parameters to generate a corresponding golden recipe. Moreover, for a recipe with a large number of recipe parameters, the recipe management system needs a long processing time to call the recipe parameters to the visual interface for display. SUMMARY

[0005] Embodiments of the present application provide a method, system, device and medium for distributing semiconductor process recipes, which can reduce the time for manually finding adjustable parameters in the process of generating a golden recipe, and thus improve the distribution efficiency of the golden recipe.

[0006] In a first aspect, embodiments of the present application provide a method for distributing semiconductor process recipes, which comprises:

[0007] monitoring the process recipes set by each machine during at least one preset period;

[0008] for any one process recipe, determining the display parameters of the production recipe corresponding to the process recipe according to the parameter values of each recipe parameter in the process recipe, and generating a display template of the production recipe according to the display parameters;

[0009] in response to an adjustment request for the display parameters, outputting the display template to a visual interface for display, so as to receive an adjustment instruction for the parameter values of each display parameter in the display template through the visual interface;

[0010] generate a golden process recipe corresponding to the production recipe based on the adjusted display parameters, and send the golden process recipe to a machine for executing a process flow corresponding to the golden process recipe.

[0011] The embodiment of the present application periodically monitors the process recipe set by the machine during operation to determine the display parameters in the production recipe corresponding to the process recipe according to the parameter values of the recipe parameters in the process recipe. The display parameters are the recipe parameters that are more likely to require manual setting of their parameter values. Thus, when adjusting the recipe parameters of the production recipe to generate a golden process recipe for the machine to execute, only the display parameters of the production recipe are displayed in the visual interface to reduce the time for relevant personnel to search for adjustable parameters from among the numerous recipe parameters. Moreover, the above process greatly reduces the response time of the recipe management system for calling recipe parameters to the visual interface for display, thereby improving the allocation efficiency of the recipe.

[0012] In some possible embodiments, for any one process recipe, determining the display parameters of the production recipe corresponding to the process recipe according to the parameter values of the recipe parameters in the process recipe comprises:

[0013] If the parameter value of the recipe parameter is set with upper and lower limits within the at least one preset period, the recipe parameter is determined as the display parameter.

[0014] If the parameter value of the recipe parameter changes within the at least one preset period, the recipe parameter is determined as the display parameter.

[0015] If the number of changes of the parameter value of the recipe parameter within the at least one preset period meets a preset threshold, the recipe parameter is determined as the display parameter.

[0016] In some possible embodiments, before determining the display parameters of the production recipe corresponding to the process recipe according to the parameter values of the recipe parameters in the process recipe, the method comprises:

[0017] determining that each recipe parameter is not added with a preset label representing user attention.

[0018] The method further comprises:

[0019] For any one recipe parameter, the recipe parameter added with the preset label is taken as the display parameter.

[0020] In some possible embodiments, generating the display template of the production recipe according to the display parameters comprises:

[0021] determining an association item for each display parameter, wherein the association item at least includes a parameter name, a parameter value and a parameter value range of a corresponding recipe parameter of the display parameter;

[0022] generating the display template according to the association item.

[0023] In some possible embodiments, before the display template is output to the visualization interface for display, the method further includes:

[0024] for each display parameter, determining a reference value and / or a reference range of a corresponding recipe parameter of the display parameter according to a parameter value change of the display parameter in at least one preset period;

[0025] the outputting of the display template to the visualization interface for display includes:

[0026] associating and displaying the reference value of the recipe parameter and the parameter value in the visualization interface, and associating and displaying the reference range of the recipe and the parameter value range in the visualization interface.

[0027] In some possible embodiments, the visualization interface is provided with a first control for adding each recipe parameter in the production recipe to the display template; before the display template of the production recipe is generated according to the display parameter, the method further includes:

[0028] in response to a trigger indication of the first control, obtaining a recipe parameter to be added;

[0029] the recipe parameter to be added is taken as the display parameter.

[0030] In some possible embodiments, before the gold process recipe is issued to a machine tool for executing a process flow corresponding to the gold process recipe, the method further includes:

[0031] after the gold process recipe is generated, a reference machine tool corresponding to the gold process recipe is displayed in a binding interface, wherein the reference machine tool is a machine tool that is provided with a process recipe corresponding to the gold process recipe when running in the at least one period;

[0032] the issuing of the gold process recipe to the machine tool for executing the process flow corresponding to the gold process recipe includes:

[0033] in response to a selection operation on each reference machine tool in the binding interface, the gold process recipe is issued to each selected reference machine tool.

[0034] In some possible embodiments, the binding interface is provided with a second control for adding a machine model to the binding interface for adapting the machine model to the golden process recipe; before the golden process recipe is issued to the machine model for executing a process flow corresponding to the golden process recipe, the method further includes:

[0035] in response to a trigger indication of the second control, obtaining a machine model to be added;

[0036] adding the machine model to be added as the reference machine model.

[0037] In a second aspect, the embodiments of the present application provide a distribution system of a semiconductor process recipe, the system comprising:

[0038] a monitoring module configured to monitor process recipes set by each machine model during at least one preset period;

[0039] a template generation module configured to determine, for any one process recipe, display parameters of a production recipe corresponding to the process recipe according to parameter values of each recipe parameter in the process recipe, and generate a display template of the production recipe according to the display parameters;

[0040] a template display module configured to output the display template to a visualization interface for display in response to an adjustment request for the display parameters, so as to receive, through the visualization interface, an adjustment indication representing parameter values of each display parameter in the display template;

[0041] a recipe distribution module configured to generate a golden process recipe corresponding to the production recipe based on the adjusted display parameters, and issue the golden process recipe to a machine model for executing a process flow corresponding to the golden process recipe.

[0042] In some possible embodiments, the determination of, for any one process recipe, display parameters of a production recipe corresponding to the process recipe according to parameter values of each recipe parameter in the process recipe is performed by the template generation module configured to:

[0043] if the parameter value of the recipe parameter is set with an upper and lower limit within the at least one preset period, the recipe parameter is determined as the display parameter;

[0044] if the parameter value of the recipe parameter changes within the at least one preset period, the recipe parameter is determined as the display parameter;

[0045] if the number of changes of the parameter value of the recipe parameter within the at least one preset period meets a preset threshold, the recipe parameter is determined as the display parameter.

[0046] In some possible embodiments, before the step of determining the display parameters of the production recipe according to the parameter values of the recipe parameters in the process recipe, the template generation module is further configured to:

[0047] determining that each of the recipe parameters is not added with a preset label representing a user concern;

[0048] The template generation module is further configured to:

[0049] for any one recipe parameter, the recipe parameter added with the preset label is taken as the display parameter.

[0050] In some possible embodiments, before the step of generating the display template of the production recipe according to the display parameters, the template generation module is configured to:

[0051] determining an associated item of each display parameter, wherein the associated item at least includes a parameter name, a parameter value and a parameter value range of the recipe parameter corresponding to the display parameter;

[0052] generating the display template according to the associated item.

[0053] In some possible embodiments, before the step of outputting the display template to the visualization interface for display, the template display module is further configured to:

[0054] for each display parameter, determining a reference value and / or a reference range of the recipe parameter corresponding to the display parameter according to a parameter value change of the display parameter in at least one preset period;

[0055] The template display module is configured to:

[0056] correlatively display the reference value of the recipe parameter and the parameter value in the visualization interface, and correlatively display the reference range of the recipe and the parameter value range in the visualization interface.

[0057] In some possible embodiments, a first control for adding each recipe parameter in the production recipe to the display template is arranged in the visualization interface, and before the step of generating the display template of the production recipe according to the display parameters, the template generation module is further configured to:

[0058] in response to a trigger instruction of the first control, obtaining a recipe parameter to be added;

[0059] taking the recipe parameter to be added as the display parameter.

[0060] In some possible embodiments, before the distributing the golden process recipe to the tool for executing the process flow corresponding to the golden process recipe, the recipe distribution module is further configured to:

[0061] After the golden process recipe is generated, a reference tool corresponding to the golden process recipe is displayed in a binding interface; the reference tool is a tool that is provided with a process recipe corresponding to the golden process recipe when the tool is running in the at least one period;

[0062] The distributing the golden process recipe to the tool for executing the process flow corresponding to the golden process recipe comprises:

[0063] In response to a selection operation on each reference tool in the binding interface, the golden process recipe is distributed to each selected reference tool.

[0064] In some possible embodiments, the binding interface is provided with a second control for adding a tool corresponding to the golden process recipe to the binding interface; before the distributing the golden process recipe to the tool for executing the process flow corresponding to the golden process recipe, the recipe distribution module is further configured to:

[0065] In response to a trigger instruction of the second control, a tool to be added is obtained;

[0066] The tool to be added is taken as the reference tool.

[0067] In a third aspect, an embodiment of the present application provides an electronic device, comprising:

[0068] a memory configured to store program instructions;

[0069] a processor configured to invoke the program instructions stored in the memory, and perform steps included in the method according to any one of the first aspect by using the obtained program instructions.

[0070] In a fourth aspect, an embodiment of the present application provides a computer readable storage medium, the computer readable storage medium stores a computer program, the computer program includes program instructions, and the program instructions, when executed by a computer, cause the computer to execute the method according to any one of the first aspect.

[0071] In a fifth aspect, an embodiment of the present application provides a computer program product, the computer program product includes computer program code, and the computer program code, when executed on a computer, causes the computer to execute the method according to any one of the first aspect. BRIEF DESCRIPTION OF DRAWINGS

[0072] Figure 1A recipe distribution flowchart provided by the embodiment of the present application;

[0073] Figure 2 A flowchart of a semiconductor process recipe distribution method provided by the embodiment of the present application;

[0074] Figure 3 A custom type diagram of configuration parameters provided by the embodiment of the present application;

[0075] Figure 4 A preset flag diagram provided by the embodiment of the present application;

[0076] Figure 5 A display template diagram provided by the embodiment of the present application;

[0077] Figure 6 A first control diagram provided by the embodiment of the present application;

[0078] Figure 7 A custom type diagram of setting display parameters provided by the embodiment of the present application;

[0079] Figure 8 A distribution interface diagram provided by the embodiment of the present application;

[0080] Figure 9 A structure diagram of a distribution system provided by the embodiment of the present application;

[0081] Figure 10 An electronic device diagram provided by the embodiment of the present application. DETAILED DESCRIPTION

[0082] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application. In the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other at will. Moreover, although a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in an order different from that here.

[0083] The terms "first" and "second" in the specification and claims of this application and the above drawings are used to distinguish different objects, not to describe a specific order. In addition, the term "comprising" and any variations thereof are intended to cover non-exclusive protection. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, product or device. "Multiple" in this application can mean at least two, for example, two, three or more, and the embodiments of this application are not limited.

[0084] The RMS system is used to manage the production process recipe in semiconductor production, specifically by checking the recipe and parameters set for each machine to meet the visibility of the recipe content, traceability of the recipe parameters and stability of the production, so as to realize advanced process control to improve the reliability of production. The semiconductor production process, as shown in the figure, includes the following steps: Figure 1

[0085] Step 101: After the product is transported to the designated machine, the machine automation program (EAP) requests the RMS system for the golden process recipe for executing the designated process flow;

[0086] Step 102: The RMS system calls the production process recipe of the designated process flow in the visualization interface (RMS UI);

[0087] Step 103: The adjustable parameters in the production process recipe are set in an artificial manner to generate the corresponding golden process recipe;

[0088] Step 104: The RMS system issues the generated golden process recipe to the designated machine, so that the designated machine executes the corresponding process flow based on the recipe after receiving the issued golden process recipe.

[0089] In the related art, in the process of executing the above step 103, the RMS system displays all the recipe parameters of the production process recipe in the visualization interface, and then generates the corresponding golden process recipe by setting the parameter values of the adjustable parameters that need to be adjusted in an artificial manner. Since the amount of recipe parameters in the production process recipe is large, the relevant personnel need to spend a lot of time in the visualization interface to find out the adjustable parameters. Moreover, for a recipe with a large amount of recipe parameters, the RMS system needs a long processing time to call its recipe parameters into the visualization interface for display. It can be seen that the above problems directly affect the efficiency of golden process recipe distribution.

[0090] ​To solve the above problems, the application concept is: the embodiment of the application determines the display parameters of the production recipe corresponding to the process recipe according to the parameter values of the recipe parameters in the process recipe by periodically monitoring the process recipe set by the machine operation. The display parameter is a recipe parameter that represents a higher probability of manual parameter value setting. Therefore, when adjusting the recipe parameters of the production recipe to generate a golden process recipe for machine execution, only the display parameters of the production recipe are displayed in the visualization interface to reduce the time of relevant personnel searching for adjustable parameters from a large number of recipe parameters. Moreover, the above process greatly reduces the response time of the recipe management system for calling recipe parameters to the visualization interface for display, and improves the allocation efficiency of the recipe.

[0091] To facilitate understanding of the technical solutions of the application, first, a method for allocating a semiconductor process recipe provided by an embodiment of the application is introduced, as shown in Figure 2 , which includes:

[0092] Step 201: Monitor the process recipe set by each machine during at least one preset period;

[0093] In practical applications, the adjustable parameters in a production process recipe are limited and usually account for a small proportion. Based on this, the embodiment of the application periodically monitors the process recipe set by each machine during operation to determine the adjustable parameters in the process recipe according to the changes of the recipe parameters of each process recipe in the period.

[0094] Step 202: For any one process recipe, determine the display parameters of the production recipe corresponding to the process recipe according to the parameter values of the recipe parameters in the process recipe, and generate a display template of the production recipe according to the display parameters;

[0095] In the embodiment of the application, a custom type is set for the recipe parameters to determine the display parameters according to the custom type to which the recipe parameters belong. In implementation, the numerical form of each configuration parameter in the process recipe of each machine can be automatically parsed and stored within the preset period of time. Further, the numerical form of each configuration parameter stored is analyzed by a preset analysis method such as jump frequency, numerical upper and lower limit, etc. to add a label attribute representing the custom type to each recipe parameter in each process recipe. Then, the recipe parameters serving as display parameters are determined according to the custom type of each recipe parameter.

[0096] The specific setting rules of the custom type can be as follows Figure 3As shown, when the upper and lower limits of the parameter value of the recipe parameter in the process recipe within the cycle time exist, the custom type of the recipe parameter is set to T type (Tolerance); when the parameter value of the recipe parameter in the process recipe within the cycle time changes, the custom type of the recipe parameter is set to V type (Variable); when the number of times of change of the parameter value of the recipe parameter in the process recipe within the cycle time meets the preset threshold, the custom type of the recipe parameter is set to F type (Focus); and when the recipe parameter of the process recipe does not meet the above custom type, the custom type of the recipe parameter is set to N type (Non-Focus).

[0097] After the embodiments of the present application monitor the custom types of each recipe parameter in each process recipe within the preset period, the recipe parameters of the above T, V and F types can be set as the display parameters of the production recipe corresponding to the process recipe. It should be noted that the above process recipe is the recipe set for the machine within the period, that is, the golden process recipe generated after the production recipe in the RMS system is manually set. Therefore, the configuration parameters contained in the above process recipe are the same as those in the corresponding production recipe, but the parameter values can be different. The above setting purpose of the present application is to determine the adjustable parameters (i.e. the above display parameters) that the engineers may need to reset when the production recipe corresponding to the process recipe is reset as a new golden process recipe through the change of the parameter value of the recipe parameter in the process recipe within the cycle time.

[0098] To adapt to more application scenarios, the monitoring items in the process recipe can be manually set. Specifically, as shown in Figure 4 For example, as shown in Figure 4 The process recipe contains multiple steps and multiple parameter recipe parameters. A preset label representing user attention can be added to any recipe parameter. In this way, no matter what type the recipe parameter after adding the label is defined in the periodic detection process, it will be displayed as a display parameter. Specifically, before step 202 is executed, it is determined whether the preset label is added to each recipe parameter in the process recipe. If the recipe parameter with the preset label exists, the custom type of the recipe parameter is set to Y type (Manual Focus), and the recipe parameter belonging to Y type is set as the above display parameter.

[0099] In some possible embodiments, an analysis strategy can be set for a periodic monitoring process to feed back the jump frequency amplitude of each recipe parameter in the production recipe according to the changes of the display parameters in the production recipe obtained in different periods, and then the analysis of the jump frequency amplitude can be applied to the early warning of the sudden increase or decrease of the recipe parameter, so as to provide an important basis for process adjustment and research and development improvement yield. For example, for the production recipe 1, there are 18 display parameters in the first period and 100 display parameters in the second period, indicating that the adjustable parameters of the production recipe need to be set to have a sudden increase.

[0100] In the above process, the embodiments of the present application determine the display parameters of the production recipe corresponding to each process recipe by periodically detecting the changes of the recipe parameters in each process recipe. Next, a display template of the corresponding production recipe needs to be generated according to the display parameters.

[0101] The display template is a display template of the production recipe parameters displayed in the RMS system in the visual interface when the production recipe is set as the golden process recipe, so that the engineering personnel can set the parameter values of each display parameter in the display template. Specifically, the embodiments of the present application generate the display template of the production recipe according to the preset association of each display parameter after determining the display parameters corresponding to the production recipe. The association of the display parameter at least includes the parameter name of the display parameter corresponding to the recipe parameter, the parameter value, and the parameter value range, and specifically as shown in Figure 5 The display template at least includes the field Block Name / Item Name representing the display parameter name, the field Value representing the fixed value of the parameter, the field MaxValue representing the upper limit of the parameter value range, and the field MinValue representing the lower limit of the parameter value range.

[0102] The display template generated in this way only includes the display parameters of the production recipe, and the remaining recipe parameters do not need to be displayed, which can greatly reduce the process of finding adjustable parameters by engineering personnel, improve the setting accuracy of the golden process recipe, and reduce the response time of the RMS system for calling the recipe parameters to the visual interface for display.

[0103] Step 203: in response to the adjustment request of the display parameter, output the display template to the visual interface for display, so as to receive the adjustment indication of the parameter value of each display parameter in the display template through the visual interface;

[0104] When the engineering personnel generate the corresponding golden process recipe for the production recipe, the display template of the production recipe needs to be displayed in the visual interface, so that the engineering personnel can set the parameter values of each display parameter in the display template to generate the corresponding golden process recipe.

[0105] Before the display template is output to the visualization interface for display, the reference value and / or reference range of the display parameter corresponding to the formula parameter can be determined according to the parameter value changes of each display parameter monitored in the preset period of time. Specifically, the upper and lower limits of the numerical value, the frequency of the jump, and the like of each display parameter in the preset period of time can be analyzed to give a reference value and / or reference range with engineering personnel reference from the parameter value changes of each display parameter in the preset period of time.

[0106] For ease of understanding, the display template shown in the above Figure 5 The display template is taken as an example for description, and the display template is provided with three fields of the parameter value of each display parameter, the upper and lower limits of the parameter value range, and the like. The reference value and / or reference range capable of representing the change trend of the display parameter in the preset period of time can be determined according to the historical average value (i.e., the average value of the parameter value of the display parameter in the preset period of time), the linear regression equation, and the like. Then, the reference value is added to the Value field of the display template, and the reference range is added to the MaxValue and MinValue fields. Further, the reference value and / or reference range of the display parameter can also be determined according to the parameter value changes of the display parameter in multiple preset periods of time.

[0107] After the reference value and / or reference range of the display parameter are determined, the reference value needs to be associated with the parameter value for display, and the reference range needs to be associated with the parameter range for display in the visualization interface. For example Figure 5 The display parameter with the parameter name Step1Parameter1 shown in the above

[0108] In some possible embodiments, the visualization interface is provided with a first control for adding each formula parameter in the production formula to the display template. As shown in Figure 6 The first control is used for querying and adding the selected configuration parameter. Specifically, when the configuration parameter to be set by the engineering personnel is not in the display template, the first control can be used to directly query all the formula parameters in the production formula, and all the formula parameters are added to the display template as the display parameter. In addition, the first control can also support a fuzzy search mode such as the parameter name, the first letter of the parameter name, and the like, so that the specified parameter is quickly selected from all the formula parameters in the production formula by searching part of the information of the formula parameter, and the specified parameter is added to the display template as the display parameter.

[0109] In some possible embodiments, the control for displaying the configuration parameters of the specified type is also supported in the above-mentioned visualization interface. Specifically, the engineer can set a custom type for displaying the configuration parameters in the visualization interface through the control. As shown in Figure 7 the control can be clicked to set any one or combination of the custom types of the configuration parameters of T, V, F, N, and Y. For example, when only the configuration parameters of the M type are displayed, only the configuration parameters of the Y type are included in the display template in the visualization interface, and the display parameters of the T, V, and F types that are originally required to be displayed are hidden. If the control is not set, the configuration parameters of the T, V, F, and Y types are selected by default as the display parameters.

[0110] It should be noted that in the embodiments of the present application, not only the display template of the production recipe corresponding to the process recipe can be generated by periodically monitoring the changes of the recipe parameters of each machine process recipe, but also the update period of the display template of each production recipe can be set. For example, the display templates of the production recipes 1-200 can be set to be updated once every period, and the display templates of the remaining production recipes can be set to be updated twice every period.

[0111] Step 204: generating the golden process recipe corresponding to the production recipe based on the adjusted display parameters, and distributing the golden process recipe to the machine for executing the process flow corresponding to the golden process recipe.

[0112] After the engineer sets the parameter values of each display parameter in the display template, the golden process recipe corresponding to the production recipe to which the display template belongs is generated. Further, the golden process recipe is distributed to the machine for executing the process flow corresponding to the golden process recipe, so as to complete the distribution of the golden process recipe.

[0113] In implementation, as shown in Figure 8 the engineer generates the corresponding golden process recipe after setting the display template displayed in the visualization interface. Then, the distribution interface is automatically jumped to, and the reference machines 1-N under multiple machine types corresponding to the golden process recipe are displayed in the distribution interface. The reference machine is a machine that has the process recipe corresponding to the golden process recipe when running in the period of time. Specifically, the process steps supported by machines of different machine types are different, and there are some golden process recipes that cannot be executed on a machine of a certain machine type. Therefore, the distribution interface of the embodiments of the present application displays the machines that have executed the process recipe corresponding to the golden process recipe in the period of time, and filters the machines that are not suitable for the golden process recipe, so as to facilitate the engineer to distribute the golden process recipe.

[0114] In addition, considering that part of the machines do not run the process recipe corresponding to the golden process recipe in the period monitoring process, but the machine type supports running the golden process recipe. In order to adapt to more application scenarios, the distribution interface of the embodiment of the present application is provided with a second control for adding each machine to the distribution interface by matching the machine type with the golden process recipe. The second control is used to query and add all machines. Specifically, when the machine to be distributed by the engineer is not in the distribution interface, the machine to be distributed can be queried by the second control in the form of querying the machine number, the machine type to which the machine belongs, and the like, and then the machine is added to the distribution interface as a reference machine.

[0115] Based on the same inventive concept, the embodiment of the present application provides a distribution system 900 of a semiconductor process recipe, specifically as shown in Figure 9

[0116] The monitoring module 901 is configured to execute the process recipe set by each machine during at least one preset period;

[0117] The template generation module 902 is configured to execute, for any one process recipe, determine the display parameter of the production recipe corresponding to the process recipe according to the parameter value of each recipe parameter in the process recipe, and generate a display template of the production recipe according to the display parameter;

[0118] The template display module 903 is configured to execute the display template in the visual interface in response to the adjustment request of the display parameter, so as to receive the adjustment indication of the parameter value of each display parameter in the display template through the visual interface;

[0119] The recipe distribution module 904 is configured to execute the golden process recipe corresponding to the production recipe based on the adjusted display parameters, and distribute the golden process recipe to the machine for executing the process flow corresponding to the golden process recipe.

[0120] In some possible embodiments, the template generation module 902 is configured to execute the determination of the display parameter of the production recipe corresponding to the process recipe according to the parameter value of each recipe parameter in the process recipe for any one process recipe:

[0121] If the parameter value of the recipe parameter is set with an upper and lower limit within the at least one preset period, the recipe parameter is determined as the display parameter;

[0122] If the parameter value of the recipe parameter changes within the at least one preset period, the recipe parameter is determined as the display parameter;

[0123] ​If the number of changes of the parameter value of the recipe parameter within the at least one preset period meets a preset threshold, the recipe parameter is determined as the display parameter.

[0124] In some possible embodiments, before the determining the display parameters of the production recipe according to the parameter values of the recipe parameters in the process recipe, the template generation module 902 is further configured to:

[0125] determine that each recipe parameter is not added with the preset label representing the user's attention;

[0126] The template generation module 902 is further configured to:

[0127] for any recipe parameter, the recipe parameter added with the preset label is taken as the display parameter.

[0128] In some possible embodiments, before the generating the display template of the production recipe according to the display parameters, the template generation module 902 is configured to:

[0129] determine an associated item of each display parameter, wherein the associated item at least includes a parameter name, a parameter value and a parameter value range of the recipe parameter corresponding to the display parameter;

[0130] generate the display template according to the associated item.

[0131] In some possible embodiments, before the outputting the display template to the visualization interface for display, the template display module 903 is further configured to:

[0132] for each display parameter, determine a reference value and / or a reference range of the recipe parameter corresponding to the display parameter according to the change of the parameter value of the display parameter within at least one preset period;

[0133] The template display module 903 is configured to:

[0134] associate and display the reference value of the recipe parameter and the parameter value in the visualization interface, and associate and display the reference range of the recipe and the parameter value range in the visualization interface.

[0135] In some possible embodiments, a first control for adding each recipe parameter in the production recipe to the display template is arranged in the visualization interface, and before the generating the display template of the production recipe according to the display parameters, the template generation module 902 is further configured to:

[0136] in response to a trigger instruction of the first control, acquire a recipe parameter to be added.

[0137] The to-be-added recipe parameter is taken as the display parameter.

[0138] In some possible embodiments, before the gold recipe is issued to the machine tool for executing the process flow corresponding to the gold recipe, the recipe distribution module 904 is further configured to:

[0139] After the gold recipe is generated, a reference machine tool corresponding to the gold recipe is displayed in the distribution interface; the reference machine tool is a machine tool that is provided with a process recipe corresponding to the gold recipe when running in the at least one period;

[0140] The gold recipe is issued to the machine tool for executing the process flow corresponding to the gold recipe, including:

[0141] In response to a selection operation on each reference machine tool in the distribution interface, the gold recipe is issued to each selected reference machine tool.

[0142] In some possible embodiments, the distribution interface is provided with a second control for adding each machine tool that is adapted to the gold recipe to the distribution interface; before the gold recipe is issued to the machine tool for executing the process flow corresponding to the gold recipe, the recipe distribution module 904 is further configured to:

[0143] In response to a trigger indication of the second control, a to-be-added machine tool is acquired;

[0144] The to-be-added machine tool is taken as the reference machine tool.

[0145] The electronic device 130 according to this embodiment of the present application is described below with reference to Figure 10 The electronic device 130 is only an example and should not impose any limitation on the functions and use range of the embodiments of the present application. Figure 10 The electronic device 130 is only an example and should not impose any limitation on the functions and use range of the embodiments of the present application.

[0146] As Figure 10 shown, the electronic device 130 is in the form of a general electronic device. The components of the electronic device 130 can include but are not limited to the at least one processor 131, the at least one memory 132, and the bus 133 connecting different system components including the memory 132 and the processor 131.

[0147] The bus 133 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, a processor or a local bus using any of a variety of bus structures.

[0148] The memory 132 can include a readable medium in the form of volatile memory, such as random access memory (RAM) 1321 and / or cache memory 1322, and can further include read only memory (ROM) 1323.

[0149] The memory 132 can also include a program / utility 1325 having a set of programs / modules 1324, including an operating system, one or more application programs, other program modules, and program data, each of which or a combination thereof, can include implementation of a network environment, as in each of the examples or some combination thereof.

[0150] The electronic device 130 can also communicate with one or more external devices 134 such as a keyboard or a pointing device, by way of I / O interface 135. Additionally, the electronic device 130 can communicate with one or more devices that enable user interaction with the electronic device 130, and / or one or more devices that enable communication of the electronic device 130 with one or more other electronic devices. This communication can be via an I / O interface 135. The electronic device 130 can also communicate with one or more networks, such as a local area network (LAN), a wide area network (WAN), and / or the Internet, through a network adapter 136. As depicted, the network adapter 136 is in communication with the other components of the electronic device 130 through bus 133. It should be appreciated that other hardware and / or software modules can be used in conjunction with the electronic device 130, including but not limited to microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data archival storage systems, etc.

[0151] In an example embodiment, a computer readable storage medium is also provided, including a memory 132 including instructions, which can be executed by the processor 131 of the system 900 to complete the above method. Alternatively, the computer readable storage medium can be a ROM, a random access memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, and an optical data storage device, etc.

[0152] In an example embodiment, a computer program product is also provided, including computer programs / instructions, which are executed by the processor 131 to implement a method for distributing a semiconductor process recipe as provided in the present application.

[0153] In an exemplary embodiment, various aspects of the semiconductor process recipe dispensing method provided in this application can also be implemented in the form of a program product, which includes program code. When the program product is run on a computer device, the program code is used to cause the computer device to perform the steps in the semiconductor process recipe dispensing method according to various exemplary embodiments of this application described above.

[0154] The program product may employ any combination of one or more readable media. A readable medium may be a readable signal medium or a readable storage medium. A readable storage medium may be, for example—but not limited to—an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples (a non-exhaustive list) of readable storage media include: electrical connections having one or more wires, portable disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0155] The program product for dispensing semiconductor process recipes according to embodiments of this application can be a portable compact disc read-only memory (CD-ROM) and include program code, and can run on an electronic device. However, the program product of this application is not limited thereto. In this document, the readable storage medium can be any tangible medium that contains or stores a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.

[0156] A readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying readable program code. This propagated data signal may take many forms, including—but not limited to—electromagnetic signals, optical signals, or any suitable combination thereof. A readable signal medium may also be any readable medium other than a readable storage medium, capable of sending, propagating, or transmitting a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0157] The program code contained on the readable medium may be transmitted using any suitable medium, including—but not limited to—wireless, wired, fiber optic, RF, etc., or any suitable combination thereof.

[0158] The program code may, through the use of program components, be implemented in any of various ways, including procedure-based execution, object-oriented execution, and / or virtual machine-based execution. A program component or other component may, for example, be implemented in hardware or software in combination with off-the-shelf components, or custom components. Additionally or alternatively, the program code may be implemented in transitory or non-transitory forms.

[0159] It should be noted that, although the above detailed description refers to several units or sub-units of the apparatus, such a division is merely illustrative and not mandatory. Indeed, according to an embodiment of the application, features and functions of two or more units described above can be embodied in one unit. Conversely, features and functions of one unit described above can be split into several units.

[0160] Moreover, while operations of the methods of the present application are described in a particular order in the figures, this is not required or implied in any particular order for performing the operations to achieve the desired results. Additionally or alternatively, certain steps can be omitted, combined into fewer steps, and / or split into multiple steps.

[0161] Those skilled in the art will appreciate that embodiments of the present application can be devised for a method, a system, or a computer program product. Accordingly, the present application can take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application can take the form of a computer program product on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROMs, optical storage devices, and the like) embodying computer readable program code.

[0162] The computer program instructions can also be loaded onto a computer or other programmable image processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flow or blocks Figure 1 means for functionally implementing the steps listed in the flowchart block or blocks.

[0163] These computer program instructions can also be stored in a computer-readable memory that can direct a computer or other programmable image processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instructions which implement the function specified in the flowchart block or blocks. Figure 1 one or more flow or blocks Figure 1 means for functionally implementing the steps listed in the flowchart block or blocks.

[0164] The computer program instructions can also be loaded onto a computer or other programmable image processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flow or blocks Figure 1 means for functionally implementing the steps listed in the flowchart block or blocks.

[0165] While the preferred embodiments of the application have been described, additional variations and modifications can be made to the embodiments described and shown herein. It is therefore intended that the appended claims cover all such variations and modifications that come within the scope of the application. 1

[0166] It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the scope or spirit of the application. Thus, it is intended that the present application cover the modifications and variations of this application provided they come within the scope of the appended claims and their equivalents.

Claims

1. A method for distributing a semiconductor process recipe, the method comprising: receiving a request for a recipe; determining a recipe type for the recipe; determining a recipe source for the recipe; and retrieving the recipe from the recipe source. The method comprises: monitoring the process recipe set by each machine during at least one preset period; for any one process recipe, determining the display parameters of the corresponding production recipe; generating a display template of the production recipe according to the display parameters, wherein the display template only contains the associated items of the display parameters, and the associated items of the display parameters at least include the parameter name, parameter value and parameter value range of the corresponding recipe parameter of the display parameters; in response to an adjustment request for the display parameters, outputting the display template to the visualization interface for display, so as to receive an adjustment indication of the parameter value of each display parameter in the display template through the visualization interface; generating a golden process recipe corresponding to the production recipe based on the adjusted display parameters, and issuing the golden process recipe to the machine for executing the process flow corresponding to the golden process recipe; wherein determining the display parameters of the production recipe corresponding to the process recipe comprises: if the parameter value of each recipe parameter in the process recipe is set with upper and lower limits within the at least one preset period, the recipe parameter is determined as the display parameter; if the parameter value of each recipe parameter in the process recipe changes within the at least one preset period, the recipe parameter is determined as the display parameter; if the number of changes of the parameter value of each recipe parameter in the process recipe within the at least one preset period meets a preset threshold, the recipe parameter is determined as the display parameter.

2. The method of claim 1, wherein before determining the display parameters of the production recipe corresponding to the process recipe according to the parameter values of each recipe parameter in the process recipe, the method comprises: determining that each recipe parameter is not added with a preset label representing user attention; the method further comprises: for any one recipe parameter, the recipe parameter added with the preset label is taken as the display parameter.

3. The method of claim 1, wherein before outputting the display template to the visualization interface for display, the method further comprises: for each display parameter, determining the reference value and / or reference range of the corresponding recipe parameter of the display parameter according to the parameter value change of the display parameter within at least one preset period; the display template output to the visualization interface for display comprises: associating and displaying the reference value of the recipe parameter and the parameter value in the visualization interface, and associating and displaying the reference range of the recipe and the parameter value range in the visualization interface.

4. The method of claim 1, wherein a first control for adding each recipe parameter in the production recipe to the display template is provided in the visualization interface; before generating the display template of the production recipe according to the display parameters, the method further comprises: in response to a trigger indication of the first control, obtaining the recipe parameter to be added; taking the recipe parameter to be added as the display parameter.

5. The method of any one of claims 1-4, wherein ​ ​ ​ Before the golden process recipe is distributed to the machine tool for executing the process flow corresponding to the golden process recipe, the method further comprises: After the golden process recipe is generated, a reference machine tool corresponding to the golden process recipe is displayed in a binding interface; wherein the reference machine tool is a machine tool that is provided with a process recipe corresponding to the golden process recipe when running in the at least one period; The distribution of the golden process recipe to the machine tool for executing the process flow corresponding to the golden process recipe comprises: In response to a selection operation on each reference machine tool in the binding interface, the golden process recipe is distributed to each selected reference machine tool.

6. The method of claim 5, wherein: A second control for adding each machine tool that is suitable for the golden process recipe to the binding interface is provided in the binding interface; Before the golden process recipe is distributed to the machine tool for executing the process flow corresponding to the golden process recipe, the method further comprises: In response to a trigger indication of the second control, a machine tool to be added is obtained; The machine tool to be added is taken as the reference machine tool.

7. A semiconductor manufacturing process formulation dispensing system, characterized in that, The system comprises: A monitoring module configured to monitor process recipes provided by each machine tool when running in at least one preset period; A template generation module configured to, for any one process recipe, determine display parameters of a production recipe corresponding to the process recipe according to parameter values of each recipe parameter in the process recipe, and generate a display template of the production recipe according to the display parameters, wherein the display template only includes associated items of the display parameters, and the associated items of the display parameters at least include parameter names, parameter values and parameter value ranges of the corresponding recipe parameters of the display parameters; A template display module configured to, in response to an adjustment request for the display parameters, output the display template to a visualization interface for display, so as to receive an adjustment indication for the parameter values of each display parameter in the display template through the visualization interface; A recipe distribution module configured to generate a golden process recipe corresponding to the production recipe based on the adjusted display parameters, and distribute the golden process recipe to a machine tool for executing a process flow corresponding to the golden process recipe; Wherein, in the process of determining the display parameters of the production recipe corresponding to the process recipe according to the parameter values of each recipe parameter in the process recipe, the template generation module is configured to: If the parameter value of the recipe parameter is set with upper and lower limits in the at least one preset period, the recipe parameter is determined as the display parameter; If the parameter value of the recipe parameter changes in the at least one preset period, the recipe parameter is determined as the display parameter; If the number of changes of the parameter value of the recipe parameter in the at least one preset period meets a preset threshold, the recipe parameter is determined as the display parameter.

8. The system of claim 7, wherein: Before the display parameter corresponding to the production recipe is determined according to the parameter value of each recipe parameter in the process recipe, the template generation module is further configured to: determine that each recipe parameter is not added with a preset label representing user concern; The template generation module is further configured to: For any one recipe parameter, the recipe parameter added with the preset label is taken as the display parameter.

9. The system of claim 7, wherein, Before the display template is output to the visualization interface for display, the template display module is further configured to: For each display parameter, determine the reference value and / or the reference range of the recipe parameter corresponding to the display parameter according to the parameter value change of the display parameter within at least one preset period; Before the display template is output to the visualization interface for display, the template display module is further configured to: correlatively display the reference value of the recipe parameter and the parameter value in the visualization interface, and correlatively display the reference range of the recipe and the parameter value range in the visualization interface.

10. The system of claim 7, wherein, The visualization interface is provided with a first control for adding each recipe parameter in the production recipe to the display template; before the display template of the production recipe is generated according to the display parameter, the template generation module is further configured to: in response to the triggering instruction of the first control, obtain the recipe parameter to be added; take the recipe parameter to be added as the display parameter.

11. An electronic device, comprising: comprise: a memory for storing program instructions; a processor for calling the program instructions stored in the memory, and executing the steps included in the method of any one of claims 1-6 according to the obtained program instructions.

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