Container for a radiation source

Abstract

A container (16) for an EUV radiation source, the container comprising: a first opening (30) for accessing an interior (32) of the container; a first access member (34) configured to allow or prevent access to the interior of the container through the first opening; a second opening (36) for accessing the interior of the container, the second opening being arranged in the first access member; and a second access member (38) arranged on the first access member and configured to allow or prevent access to the interior of the container through the second opening.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority to U.S. Application 62 / 948,911, filed December 17, 2019, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to containers for radiation sources such as extreme ultraviolet (EUV) radiation sources, as well as related devices, systems and methods. Background Technology

[0004] A lithography apparatus is a machine configured to apply a desired pattern onto a substrate. Lithography apparatus can be used, for example, to manufacture integrated circuits (ICs). A lithography apparatus can project a pattern from a patterning apparatus (e.g., a mask) onto a radiation-sensitive material (resist) layer provided on a substrate.

[0005] To project a pattern onto a substrate, a photolithography apparatus can use electromagnetic radiation. The wavelength of this radiation determines the minimum size of the feature that can be formed on the substrate. Compared to a photolithography apparatus using radiation with a wavelength of, for example, 193 nm, a photolithography apparatus using extreme ultraviolet (EUV) radiation with wavelengths in the range of 4 nm to 20 nm (e.g., 6.7 nm or 13.5 nm) can be used to form smaller features on the substrate.

[0006] A lithography apparatus can be part of a lithography system, which may also include a radiation source. Plasma can be used to generate EUV radiation. Plasma can be generated, for example, by directing a laser beam onto fuel in the radiation source. The resulting plasma can emit EUV radiation. A portion of the fuel may become fuel debris, which may accumulate on one or more components of the radiation source.

[0007] Although a radiation source may include a debris mitigation system configured to reduce the deposition of fuel debris on its components, some parts of the radiation source may still require replacement, for example, due to fuel debris deposition. Alternatively, some parts of the radiation source may become defective and therefore may need to be replaced.

[0008] Such components may be located inside the radiation source and are difficult to access. Therefore, their replacement can be very time-consuming, requiring numerous steps and / or specialized tools. The individual steps required to replace these components may carry the risk of damaging one or more components or parts of the radiation source and / or the tools used. Replacing these components may result in lengthy downtime of the lithography equipment and / or high repair or maintenance costs. Summary of the Invention

[0009] According to a first aspect of the invention, a container for a radiation source, such as an EUV radiation source, is provided, the container comprising: a first opening for accessing the interior of the container; a first access member configured to allow or prevent access to the interior of the container through the first opening; a second opening for accessing the interior of the container, the second opening being disposed in the first access member; and a second access member disposed on the first access member and configured to allow or prevent access to the interior of the container through the second opening.

[0010] The arrangement of a second access member on a first access member allows for a compact configuration of the container, such as a first access member and a second access member. Alternatively or alternatively, for example, an arrangement where the second access member is provided separately from the first access member, facilitates access to the interior of the container and / or allows for an increase in the size or dimensions of the first opening.

[0011] The arrangement of the first and second access components allows for unobstructed access to the interior of the container. This improves access to the container's interior. Improved access to the container's interior may reduce the number of steps that might be necessary to replace one or more components of the radiation source. For example, removing components or parts that may be located near or in front of the container may not be necessary. Alternatively, moving the container, for example, to access its interior may not be necessary. This may result in a reduction in the time and / or personnel required to replace one or more components of the radiation source.

[0012] The first opening can be configured to allow access to a first component of the radiation source. The first opening can be configured to allow access to a second component of the radiation source. The first opening can be configured to allow the first component and / or the second component of the radiation source to pass through the first opening.

[0013] The second opening can be configured to allow access to a second component of the radiation source.

[0014] The container is operable between at least two of the following structures: a closed structure, a first open structure, and a second open structure.

[0015] In a closed configuration of the container, a first access member and a second access member can be configured to prevent access to the interior of the container. In a first open configuration of the container, the first access member can be configured to allow access to the interior of the container through a first opening. In a second open configuration of the container, the second access member can be configured to allow access to the interior of the container through a second opening.

[0016] The container may include a mounting portion for mounting one or more measurement modules or inspection devices to the container. The mounting portion may be part of or included within the first access member. Therefore, removing one or more measurement modules or inspection devices, for example, to access a second component of the radiation source, may not be necessary. This may result in a reduction in the time and / or number of steps required to replace the second component of the radiation source. It has been found that a reduction in the number of steps may also result in a lower risk of damage to one or more components of the radiation source, the container, and / or the tools used to replace the second component of the radiation source.

[0017] The mounting section can be configured to mount one or more measurement modules or inspection devices relative to a reference point inside the container.

[0018] The second access component can be arranged separately from the mounting portion. The second access component can be arranged below the mounting portion.

[0019] According to a second aspect of the invention, there is provided a container for a radiation source such as an EUV radiation source, the container comprising: an opening for accessing the interior of the container; and an access member configured to allow or prevent access to the interior of the container through the opening, wherein the access member includes a mounting portion for mounting one or more measurement modules or inspection devices to the container.

[0020] The container can operate between closed and open configurations.

[0021] In a closed construction of a container, access members can be configured to prevent access to the container's interior. In an open construction of a container, access members can be configured to allow access to the container's interior through an opening.

[0022] The container described in the second aspect may include any of the features of the container described in the first aspect.

[0023] According to a third aspect of the invention, a radiation source, such as an EUV radiation source, is provided, the radiation source comprising a container as described in the first and / or second aspects.

[0024] The radiation source may include a debris mitigation system. The debris mitigation system can be constructed in a modular fashion.

[0025] The radiation source may include a first component. The first component of the radiation source may include at least part or all of the debris mitigation system of the radiation source.

[0026] The radiation source may include a second component. The second component of the radiation source may include at least one of the following: a collector reflector for collecting radiation emitted at the plasma formation region of the radiation source; and a fuel collector for collecting fuel debris generated at the plasma formation region of the radiation source.

[0027] According to a fourth aspect of the present invention, a photolithography system is provided, the photolithography system comprising a photolithography apparatus and a radiation source according to a third aspect.

[0028] According to a fifth aspect of the invention, a method is provided for replacing at least a first component of a radiation source, such as an EUV radiation source, the radiation source comprising a container according to a first aspect, the method comprising: operating a first access member to allow access to the interior of the container through a first opening; removing at least the first component to be replaced; installing at least another first component to be used; and operating the first access member to prevent access to the interior of the container through the first opening.

[0029] According to a sixth aspect of the invention, a method is provided for replacing a second component of a radiation source, such as an EUV radiation source, the radiation source comprising a container according to a first aspect, the method comprising: operating a second access member to allow access to the interior of the container through a second opening; removing the second component to be replaced; installing another second component to be used; and operating the second access member to prevent access to the interior of the container through the second opening.

[0030] According to a seventh aspect of the invention, a method is provided for replacing a first component and / or a second component of a radiation source, such as an EUV radiation source, the radiation source comprising a container according to a second aspect, the method comprising: operating an access member to allow access to the interior of the container through an opening; removing the first component and / or the second component to be replaced; installing another first component and / or the second component to be used; and operating the access member to prevent access to the interior of the container through the opening.

[0031] As will be apparent to those skilled in the art, the various aspects and features of the invention set forth above or below can be combined with various other aspects and features of the invention. Attached Figure Description

[0032] Embodiments of the invention will now be described by way of example only with reference to the accompanying schematic drawings, in which:

[0033] Figure 1 Describes a lithography system including lithography equipment and a radiation source;

[0034] Figure 2 Describe in more detail Figure 1 The radiation source;

[0035] Figures 3A to 3C Describing and Figures 1 to 2 An exemplary container used in conjunction with a radiation source;

[0036] Figure 4 Depicting a cooling device Figures 3A to 3C Container;

[0037] Figure 5A and Figure 5B Describing and Figures 1 to 2 Another exemplary container used in conjunction with a radiation source;

[0038] Figure 6 A flowchart outlining the steps of a method for replacing at least the first component of a radiation source; and

[0039] Figure 7 A flowchart outlining the steps of a method for replacing the second component of a radiation source. Detailed Implementation

[0040] Figure 1 A lithography system including a radiation source SO and a lithography apparatus LA is shown. The radiation source SO is configured to generate an EUV radiation beam B and supply the EUV radiation beam B to the lithography apparatus LA. The lithography apparatus LA includes: an irradiation system IL, a support structure MT configured to support a pattern forming apparatus MA (e.g., a mask), a projection system PS, and a substrate stage WT configured to support a substrate W.

[0041] The irradiation system IL is configured to adjust the EUV radiation beam B before it is incident on the pattern forming apparatus MA. Additionally, the irradiation system IL may include a faceted field mirror assembly 10 and a faceted pupil mirror assembly 11. Together, the faceted field mirror assembly 10 and the faceted pupil mirror assembly 11 provide the EUV radiation beam B with a desired cross-sectional shape and a desired intensity distribution. Besides or in place of the faceted field mirror assembly 10 and the faceted pupil mirror assembly 11, the irradiation system IL may also include other mirrors or devices.

[0042] After such adjustment, the EUV radiation beam B interacts with the patterning apparatus MA. As a result of this interaction, a patterned EUV radiation beam B' is generated. A projection system PS is configured to project the patterned EUV radiation beam B' onto a substrate W. For this purpose, the projection system PS may include a plurality of mirrors 13, 14 configured to project the patterned EUV radiation beam B' onto the substrate W held by the substrate stage WT. The projection system PS can apply a reduction factor to the patterned EUV radiation beam B', thus forming an image with features smaller than the corresponding features on the patterning apparatus MA. For example, a reduction factor equal to 4 or 8 can be applied. Although the projection system PS... Figure 1 The diagram is shown with only two mirrors 13 and 14, but the projection system PS can include a different number of mirrors (e.g., six or eight mirrors).

[0043] The substrate W may include a previously formed pattern. In this case, the photolithography apparatus LA aligns the image formed by the patterned EUV radiation beam B' with the pattern previously formed on the substrate W.

[0044] A relative vacuum, i.e., a small amount of gas (e.g., hydrogen) at a pressure sufficiently below atmospheric pressure, can be provided in the radiation source SO, the irradiation system IL, and / or the projection system PS.

[0045] Figure 1 The radiation source SO shown is, for example, of the type that can be referred to as a laser-generated plasma (LPP) source. A laser system 1, which may include, for example, a CO2 laser, is arranged to deposit energy via a laser beam 2 onto a fuel, such as tin (Sn), supplied from, for example, a fuel emitter 3. Although tin is mentioned in the following description, any suitable fuel can be used. The fuel may be, for example, in liquid form and may be, for example, a metal or alloy. The fuel emitter 3 may include a nozzle configured to guide tin, for example, in droplet form, along a trajectory toward the plasma formation region 4. The laser beam 2 is incident on the tin at the plasma formation region 4. The laser energy deposited into the tin generates tin plasma 7 at the plasma formation region 4. Radiation, including EUV radiation, is emitted from the plasma 7 during the de-excitation and recombination of electrons and ions in the plasma.

[0046] EUV radiation from the plasma is collected and focused by collector 5. Collector 5 includes, for example, a near-normal incident radiation collector 5 (sometimes more commonly referred to as a normal incident radiation collector). Collector 5 may have a multi-layered mirror structure arranged to reflect EUV radiation (e.g., EUV radiation with a desired wavelength such as 13.5 nm). Collector 5 may have an ellipsoidal configuration with two foci. The first of these foci may be located at the plasma formation region 4, and the second of these foci may be located at the intermediate focal point 6, as discussed below.

[0047] Laser system 1 can be spatially separated from radiation source SO. In this case, laser beam 2 can be transmitted from laser system 1 to radiation source SO by means of a beam delivery system (not shown) including, for example, suitable guiding mirrors and / or beam expanders and / or other optical devices. Laser system 1, radiation source SO, and beam delivery system can be considered together as a radiation system.

[0048] The radiation reflected by collector 5 forms an EUV radiation beam B. EUV radiation beam B is focused at intermediate focal point 6 to form an image of the plasma present in plasma formation region 4 at intermediate focal point 6. The image at intermediate focal point 6 serves as a virtual radiation source for illuminating system IL. Radiation source SO is arranged such that intermediate focal point 6 is located at or near opening 8 in the enclosure structure 9 of radiation source SO.

[0049] Figure 2 Show in more detail Figure 1 The radiation source SO may include container 16. Figure 1 The enclosure structure 9 shown may be defined by or included within container 16. The term "container" may be considered to encompass a vacuum container, pressure vessel, vacuum chamber, or pressure chamber, etc. In other words, container 16 may be considered to provide an enclosure for a vacuum or low-pressure environment of the radiation source SO. In other words, the pressure within container 16 may be lower than atmospheric pressure. Container 16 may be configured to enclose one or more components of the radiation source SO, such as, for example, collector 5. It will be understood that the container may be configured as an additional component to enclose the radiation source SO, as described below. Container 16 may include modular containers.

[0050] The radiation source SO may include one or more measurement modules or inspection devices. The measurement modules or inspection devices will be referred to as inspection devices 18 in the following description, one of which is shown in… Figure 2 The inspection device 18 can be mounted on or on a portion of the container 16. The inspection device 18 can be precisely positioned on the container, for example, using one or more motion mounting platforms.

[0051] At least one of the inspection devices 18 may be part of a fuel droplet redirection system 20, which includes a controller 22 and a fuel emitter 3. The inspection device 18 may be configured to determine the position of a fuel droplet D in container 16, for example, relative to plasma formation region 4. The inspection device 18 may communicate with the controller 22. The controller 22 may be configured to control the fuel emitter 3. For example, in response to a determination made by the inspection device 18, the controller 22 may control the fuel emitter 3, for example, to adjust the fuel droplet release time and / or fuel droplet release direction, thereby controlling the trajectory T of the fuel droplet D toward plasma formation region 4.

[0052] It will be understood that the radiation source SO may include at least one other inspection device. Figure 2 (Not shown in the image). Other inspection equipment may be configured to determine the position of the laser beam relative to the plasma formation region. For example, in response to a determination made by other inspection equipment, the position of the laser beam relative to the plasma formation region may be adjusted or controlled, for example, using controller 22 or another controller. Controller 22 or another controller may be configured to communicate with laser system 1 and / or beam delivery system.

[0053] One or more inspection devices 18 may be provided in the form of a droplet detection module (DDM), a line laser module (LLM), a droplet illumination module (DIM), a droplet forming camera (DFC), a coarse droplet steering camera (CDSC), and / or a fine droplet steering camera (FDSC). One or more inspection devices 18 may include a pair of droplet forming cameras. One or more inspection devices 18 may include an illumination module, such as, for example, a backlight laser module (BLM). The backlight laser module may be connected to the pair of droplet forming cameras or to each droplet forming camera.

[0054] The radiation source SO may include a debris mitigation system 24, a portion of which is shown in Figure 2 In the middle. The debris mitigation system 24 can be configured to reduce fuel debris in the radiation source SO. Fuel debris can be emitted from the plasma formation region 4 of the radiation source SO. Fuel debris can include: particulate debris, such as Sn clusters, Sn particles, Sn nanoparticles, etc., when tin is used as fuel; and / or Sn deposits, molecular and / or atomic debris, such as Sn vapor, SnHx vapor, Sn atoms, Sn ions, etc.

[0055] The debris mitigation system 24 may include a contaminant trap 26a. The contaminant trap 26a may be arranged to surround the plasma formation region 4. The contaminant trap 26a may include a plurality of blades 28. The plurality of blades 28 may be configured to trap fuel debris emitted from the plasma formation region 4 of the radiation source SO. Although Figure 2 Only contaminant trap 26a is shown, but it will be understood that debris mitigation system 24 may include one or more other elements, as will be described below.

[0056] The radiation source SO may include a first fuel collector 27. This fuel collector may be configured to collect fuel transported through the plasma formation region 4 without being converted into a portion of the radiative emission plasma. The fuel collector 27 may be arranged in the radiation source SO on the trajectory T of the droplet D. The fuel collector 27 may include a tank, barrel, container, etc. (not shown). The first fuel collector 27 and / or the tank or container may be arranged outside the container 16. The debris mitigation system 24 may be configured to guide multiple airflows in multiple directions within the radiation source SO, for example, to reduce the deposition or accumulation of fuel debris on components (such as, for example, collector 5) within the radiation source SO.

[0057] The radiation source SO may include a fuel debris collection system (not shown). The fuel debris collection system may be part of the debris mitigation system 24. The fuel debris collection system may include a second fuel collector in the form of a tank, barrel, container, etc., for collecting fuel debris generated at the plasma formation region 4 of the radiation source SO.

[0058] The debris mitigation system 24 can be constructed in a modular manner. This facilitates the installation of the debris mitigation system 24 in the radiation source SO, such as replacing one or more components of the debris mitigation system 24, replacing one or more components of the debris mitigation system 24, and / or modifying one or more components of the debris mitigation system 24. The debris mitigation system may include a gas flow device 26f ( Figure 3B As shown, the gas flow device is arranged between the collector 5 and the contaminant trap 26a and is configured to guide the airflow toward the center of the gas flow device.

[0059] Figures 3A to 3C Showing with Figure 1 An exemplary container 16 is used in conjunction with the radiation source shown in Figure 3. Container 16 includes a first opening 32 for accessing the interior of container 16. Figure 3B The first opening 30 is indicated by a dashed line. One or more components of the radiation source SO (such as, for example, collector 5, second fuel collector 29a, and debris mitigation system 24) may be arranged within the interior 32 of the container 16, as described above. The container 16 includes a first access member 34. The first access member 34 is configured to allow or prevent access to the interior 32 of the container 16 through the first opening 30. The first access member 34 may be provided in the form of a hatch, door, cover, etc.

[0060] Container 16 includes a second opening 36 for accessing the interior 32 of container 16. Figure 3C The second opening 36 is indicated by a dashed line. The second opening 36 is disposed within the first access member 34. In other words, the second opening 36 is part of or included within the first access member 34. Container 16 includes a second access member 38. The second access member 38 is disposed on the first access member 34. For example, the second access member 38 may be disposed on surface 34a (e.g., the outer surface) of the first access member 34. The second access member 38 may be part of or included within the first access member 34. The second access member 38 may be provided in the form of a hatch, door, lid, etc. The second access member 38 is configured to allow or prevent access to the interior 32 of container 16 through the second opening 36. The second access member 38 being disposed on and / or as part of the first access member 34 may allow for a compact configuration of container 16, such as the first access member 34 and the second access member 38. Alternatively or alternatively, for example, with respect to the arrangement in which the second access member is provided separately from the first access member, the arrangement of the second access member 38 on the first access member 34 may facilitate access to the interior 32 of the container 16 and / or allow for an increase in the size or dimensions of the first opening 30.

[0061] If it is possible Figures 3A to 3C As seen in the diagram, the size or dimension of the first opening 30 is larger than the size or dimension of the second opening 36. The size or dimension of the first access member 34 is larger than the size or dimension of the second access member 38. This allows access to different components of the radiation source SO. It will be understood that the size or dimension of the first access member 34 may be larger than the size or dimension of the first opening 30. The size or dimension of the second access member 38 may be larger than the size or dimension of the second opening 36. The first opening 30 may be configured to allow access to a first component of the radiation source SO. The first opening 30 may also be configured to allow access to a second component of the radiation source SO. In this embodiment, the first component may include at least a portion or all of the debris mitigation system 24. The second component may include collector 5 and / or a second fuel collector. By arranging the first opening 30 to allow access to a portion or all of the debris mitigation system 24, one or more components or parts of the debris mitigation system 24, such as, for example, contaminant trap 26a, can be replaced without moving or relocating container 16. This can facilitate the replacement of a portion or all of the debris mitigation system 24 and reduce the time and / or number of steps required to replace said portion or all of the debris mitigation system 24.

[0062] The first opening 30 can be configured to allow part or all of the debris mitigation system 24 and / or collector 5 to travel through it. In other words, the size or dimensions of the first opening 30 can be selected to allow part or all of the debris mitigation system 24 and / or collector 5 to travel through it. For example, the first opening 30 may include a height H1 of about 0.85 m and / or a width W1 of about 1 m. The first opening 30 can be arranged on a wall 16a, such as, for example, a lateral wall or sidewall of container 16.

[0063] The second opening 36 can be configured to allow access to a second component of the radiation source SO, such as collector 5, gas flow device 26f, and / or second fuel collector. The second opening 36 can be configured to allow collector 5 and / or second fuel collector 29a to travel through it. In other words, the size or dimensions of the second opening 36 can be selected to allow collector 5 and / or second fuel collector to travel through it. For example, the second opening may include a height H2 of approximately 0.25 m and a width W2 of approximately 0.8 m. The location of the second opening 36 in the first access member 34 can be selected based on the position of collector 5 and / or second fuel collector 29a within the radiation source SO.

[0064] Container 16 is operable between at least two of the following structures: a closed structure, a first open structure, and a second open structure. Figure 3A In the closed configuration of the container 16 shown, the first access member 34 and the second access member 38 are configured to prevent access to the interior 32 of the container 16. In other words, the first access member 34 and the second access member 38 are closed and respectively block the first opening 30 and the second opening 36. In the closed configuration of the container 16, the first access member 34 can be fastened to the wall 16a of the container 16, for example, using a fastening device. The fastening device may include a plurality of fasteners 39, such as screws or bolts, four of which are shown in [the diagram]. Figure 3A The fastening device may include a plurality of holes 39a, 39b. Holes 39a, 39b may be arranged in the first access member 34 and the container 16 (e.g., the wall 16a of the container 16) to allow, for example, fastening of the first access member 34 to the wall 16a of the container 16 using fasteners 39. Figure 3B and Figure 3C In the embodiment shown, four holes 39a are arranged on the periphery of the first access member 34 and four corresponding holes 39b are arranged on the periphery of the first opening 30. It will be understood that in other embodiments, the wall of the first access member and / or the container may include more or fewer than four holes. It will also be understood that in other embodiments, more or fewer than four fasteners may be used.

[0065] The fastening device may include a plurality of additional holes 39c, 39d. These additional holes 39c, 39d may be arranged in the second access member 38 and the first access member 34 (e.g., the wall 42 of the first access member 34). It will be understood that the wall 42 of the first access member 34 may include a surface 34a of the first access member 34. The holes 39c, 39d may be arranged in the second access member 38 and the first access member 34 (e.g., the wall 42 of the first access member 34) to allow, for example, the use of additional fasteners 39e to fasten the second access member 38 to the wall 42 of the first access member 34. Figure 4 A to Figure 4 In the embodiment shown in C, two additional holes 39c are arranged on the periphery of the second access member 34 and two corresponding holes 39d are arranged on the periphery of the second opening 36. It will be understood that in other embodiments, the second access member and / or the first access member may include more or fewer than two additional holes.

[0066] Container 16 may be configured such that the interior 32 of container 16 is sealed by a first access member 34 and / or a second access member 38. The first access member 34 may be configured to allow a seal to be formed between the first access member 34 and container 16. For example, container 16 may include one or more sealing elements. A first sealing element 40a may be disposed on the first access member 34, for example, on another surface 34b of the first access member 34 (e.g., the inner surface 34b). The first access member 34 may be configured such that, for example, when container 16 is in a closed configuration, at least a portion of the other surface 34b of the first access member 34 abuts or contacts a portion of the wall 16a of container 16. The first access member 34 may be configured such that surface 34a and the other surface 34b are opposite to each other.

[0067] The second access member 38 may be configured to allow another seal to be formed between the first access member 34 and the second access member 38. In other words, the second access member 38 may be configured to form another seal with the wall 42 of the first access member 34 (e.g., a portion of the first access member 34). A second sealing element 40b may be disposed on the second access member 38, for example, to allow another seal to be formed between the second access member 38 and the first access member 34. The second sealing element may be disposed on the surface 38a (e.g., the inner surface) of the second access member 38. The second access member 38 may be configured such that, for example, when the container 16 is in a closed configuration, at least a portion of the surface 38a of the second access member 38 abuts or contacts the wall 42 and / or a portion of the surface 34a of the first access member 34.

[0068] In the example shown Figure 3BIn the first open configuration of the container 16, the first access member 34 is configured to allow access to the interior 32 of the container 16 through the first opening 30. In other words, the first access member 34 can be open and the first opening 30 can be unobstructed. However, the second access member 38 can be closed and the second opening 36 can be blocked. The container 16 can be operated into the first open configuration by loosening and / or removing the fastener 39 from the holes 39a, 39b of the first access member 34 and the container 16.

[0069] In the example shown Figure 3C In the second open configuration of the container 16, the second access member 38 is configured to allow access to the interior 32 of the container 16 through the second opening 36. In other words, the first access member 34 can be closed, the second access member 38 can be open, and the second opening 36 can be unobstructed. The container 16 can be operated into the second open configuration by loosening and / or removing other fasteners 39e from the other holes 39c, 39d of the second access member 38 and the first access member 34.

[0070] By configuring container 16 to operate between at least two of the closed configuration, the first open configuration, and the second open configuration, access to the interior 32 of container 16 or a portion thereof can be facilitated, for example, to allow replacement of one or more components of radiation source SO, such as collector 5, second fuel collector 29a, and / or part or all of debris mitigation system 24.

[0071] Container 16 may include one or more connecting members, such as, for example, a first connecting member 44a and / or a second connecting member 44b. The first connecting member 44a may be configured to connect a first access member 34 to container 16, such as wall 16a. The second connecting member 44b may be configured to connect a second access member 38 to the first access member 34. The first connecting member 44a and the second connecting member 44b may each be provided in the form of a hinge, pivoting mechanism, engagement mechanism, etc. The first connecting member 44a and / or the second connecting member 44b may be configured to allow operation of container 16 between at least two of the following configurations: a closed configuration, a first open configuration, and a second open configuration.

[0072] The first connecting member 44a can be configured, for example, to allow the first access member 34 to rotate about a first axis A1 when the container 16 is operated from a closed configuration to a first open configuration. The first connecting member 44a can also be configured, for example, to allow the first access member 34 to rotate about a second axis A2 when the container 16 is operated from a closed configuration to a first open configuration. In other words, the first connecting member 44a can be configured such that the first access member 34 can rotate or pivot about the first axis A1 and the second axis A2. Figure 3AThe first axis A1 and the second axis A2 are indicated by dotted lines. The first connecting member 44a can be configured such that the first axis A1 extends in the vertical direction. The vertical direction can be considered as parallel to the axis A2. Figure 3A The coordinate system indicates the direction of the y-direction. The first connecting member 44a can be configured such that the second axis A2 extends in a direction perpendicular to (e.g., substantially perpendicular to) the first axis A1, as... Figure 3A As shown in the diagram. In other words, the second axis A2 can be considered to be parallel to the axis formed by... Figure 3A Extending in the direction indicated by the x-direction of the coordinate system in the diagram. For example, it can be seen from... Figure 2 As can be seen, the radiation source SO can be arranged to extend at an angle relative to the vertical direction. The wall 16a of the container 16, on which the first access member 34 is arranged, or at least a portion of the wall 16a, can extend at this angle relative to the vertical direction. Therefore, the first access member 34 can be considered to be arranged at this angle relative to the vertical direction. The second access member 34 can be considered to extend in the vertical direction.

[0073] The first connecting member 44a can be configured such that, for example, when the container 16 is operated between a closed configuration and a first open configuration, the first access member 34 rotates sequentially about a first axis A1 and a second axis A2, or vice versa. When the container 16 is in the first open configuration, the first access member 34 can extend in the vertical direction. This configuration of the first connecting member 44a can, for example, prevent access to the interior 32 of the container 16 from being blocked or restricted by the first access member 34 when the container 16 is in the first open configuration.

[0074] The first connecting member 44a can be configured to compensate (e.g., at least partially compensate) for the gravity acting on the first access member 34, for example, when the container is operated from the first open configuration to the closed configuration. In other words, the first connecting member 44a can be configured to counteract (e.g., at least partially counteract) the gravity acting on the first access member 34. This gravity may be due to the radiation source SO and / or the first access member 34 being arranged at an angle relative to the vertical direction. By arranging the first connecting member 44a to compensate for gravity, the impact force acting on the container 16, for example, when the container is operated from the first open configuration to the closed configuration, can be reduced or prevented. This, in turn, can prevent or reduce changes in the alignment of the inspection device 18. The first connecting member 44a may include one or more tensioning elements (not shown). Tensioning elements may be provided in the form of one or more springs or elastic elements. Tensioning elements can be configured to compensate (e.g., at least partially compensate) for the gravity acting on the first access member 34, for example, when the container is operated from the first open configuration to the closed configuration. For example, the tensioning elements may be pre-tensioned. It will be understood that the first connecting member is not limited to the configuration disclosed herein, and may be constructed in different ways in other embodiments. For example, the first connecting member may be configured such that the first access member can rotate or pivot about, for example, a single axis or more than two axes extending in the vertical direction.

[0075] The second connecting member 44b can be configured, for example, to allow the second access member 38 to rotate about another axis B when the container 16 is operated from the closed configuration to the second open configuration. In other words, the second connecting member 44b can be configured to allow the second access member 38 to rotate or pivot about another axis B. Figure 3A The dotted line indicates another axis B. The second connecting member 44b can be configured such that the other axis B extends in the vertical direction. It will be understood that the second connecting member is not limited to the configuration disclosed herein, and the second connecting member can be configured in different ways in other embodiments. For example, the second connecting member can be configured in the same way as the first connecting member.

[0076] Container 16 may include a mounting portion 46 for mounting inspection equipment 18 to container 16. Although Figure 3BThree inspection devices 18 are shown mounted to container 16; however, it will be understood that in other embodiments, more or fewer than three inspection devices may be mounted to the container. Mounting portion 46 may be part of or included within the first access member 34. By providing mounting portion 46 as part of the first access member 34, removal of the inspection devices may not be necessary before operating container 16 between the closed configuration and the first or second open configuration. This avoids or reduces the need to align the inspection devices. This, in turn, may result in a reduction in the time and / or number of steps required to replace one or more components of the radiation source SO (such as, for example, part or all of collector 5 and / or debris mitigation system 24).

[0077] Mounting portion 46 can be configured to mount inspection device 18 relative to a reference point within the interior 32 of container 16. For example, mounting portion 46 can be configured to mount inspection device relative to the plasma formation region 4 of radiation source SO.

[0078] Mounting portion 46 can be configured, for example, to maintain the position of inspection device 18 relative to plasma formation zone 4 after operation of container 16 between closed configuration and first open configuration or second open configuration. In other words, alignment of inspection device 18 relative to plasma formation zone 4 can be maintained during operation of container 16. This can avoid or reduce the need to align inspection device 18 relative to plasma formation zone 4.

[0079] The mounting portion 46 may include one or more recesses or openings 46a, wherein, in Figure 3B Three recesses or openings 46a are shown. Each recess or opening 46a can be configured to receive at least a portion of the corresponding inspection device 18. In other words, at least a portion of each inspection device 18 can be received in each corresponding recess or opening 46a so as to extend at least partially into the interior 32 of the container 16.

[0080] The second access component 38 can be arranged or provided separately from the mounting portion 46, such as Figure 3A and Figure 3CAs shown in the diagram. In this embodiment, the second access member 38 is arranged below the mounting portion 46. This allows direct access to the collector 5 and / or the second fuel collector 29a while maintaining the alignment of the inspection device 18 relative to the plasma formation region 4. In other words, the collector 5 and / or the second fuel collector 29a can be replaced without removing the inspection device 18 before accessing the collector 5. This, in turn, reduces the time and / or number of steps required to replace the collector 5 and / or the second fuel collector 29a. It will be understood that the second access member is not limited to being arranged below the mounting portion. For example, in other embodiments, the second access member may be provided in a different position relative to the mounting portion.

[0081] Container 16 may include a plurality of connection elements 48. The plurality of connection elements 48 may be configured to provide connections to one or more components of the radiation source SO, including a coolant source, a gas supply, and / or power. Connection elements 48 may be configured to transmit or transfer coolant, gas, and / or power to one or more components of the radiation source. Each connection element may be or include a feedthrough element. At least some of the connection elements 48 may be part of a first access member 34. At least some of the connection elements 48 may be part of a second access member 38. Although... Figures 3A to 3C Four connecting elements are shown as part of the first access member; however, it will be understood that in other embodiments, the first access member may include more or fewer than four connecting elements. Similarly, the second access member may include more or fewer than two connecting elements. Additionally or alternatively, it will be understood that in some embodiments, only the first access member or only the second access member may include one or more connecting elements.

[0082] In this embodiment, the connecting element 48 may be configured to connect to a coolant source (not shown). The coolant may be provided in the form of a fluid. For example, the coolant may be provided in the form of water. However, it will be understood that in other embodiments, it is another coolant fluid, such as, for example, another coolant liquid or coolant gas. The connecting element 48 may be configured to allow connection of the coolant source to the debris mitigation system 24, such as the contaminant trap 26a and / or the collector 5. For example, the connecting element 48, as part of the first access member 34, may be configured to allow connection of the coolant source to the debris mitigation system 24, such as the contaminant trap 26a. The connecting element 48, as part of the second access member 38, may be configured to allow connection of the coolant source to the collector 5.

[0083] Container 16 may be made of a metallic material. The metallic material can be selected to provide sufficient rigidity and / or thermal stability to container 16, for example, to maintain the alignment of inspection equipment 18. In this embodiment, the metallic material may include aluminum. This may allow for improved or desired rigidity and / or thermal stability of container 16. Alternatively or additionally, the use of aluminum may facilitate the manufacture of container 16 or parts thereof.

[0084] Figure 4 Show Figures 3A to 3C Another schematic diagram of container 16 is shown. For clarity, Figure 4 The text has been omitted from the translation. Figures 3A to 3C Several features. However, it will become clear that, Figure 4 The container 16 shown may include the contents of the above description. Figures 3A to 3C Any of the features of the container described. Container 16 may include a cooling device 50. The cooling device 50 may include a plurality of coolant channels 50a. The coolant channels 50a may be configured to guide the flow of coolant therein. Figure 4 The arrows indicate exemplary flow of coolant in the coolant channels. As described above, the coolant can be provided in the form of a fluid. For example, the coolant can be provided in the form of water. However, it will be understood that in other embodiments, another coolant fluid, such as, for example, another coolant liquid or coolant gas, is used.

[0085] Container 16 may include a plurality of walls 16a, such as a plurality of sidewalls or lateral walls, two of which are shown in Figure 4 The coolant passage 50a can be arranged in the wall 16a of the container 16. For example, the coolant passage 50a can be provided in the wall 16a of the container 16 in the form of a plurality of other holes (e.g., through holes and / or blind holes). The coolant passage 50a can be formed directly in the wall 16a of the container 16. For example, a drilling or cutting process can be used to form the coolant passage 50a in the wall 16a of the container 16. This allows for good thermal contact between the coolant flowing in the coolant passage 50a and the material of the container 16 (e.g., the wall 16a of the container 16). Although Figure 4 The coolant passages are shown as being arranged in the side walls or lateral walls of the container; however, it will be understood that the container disclosed herein is not limited to this arrangement of coolant passages. For example, one or more other coolant passages may be arranged in the top and / or bottom walls of the container.

[0086] Coolant channels 50a may be arranged to extend at least a portion along each of the walls 16a of container 16. It will be understood that the arrangement or configuration of coolant channels 50a in container 16 may be selected based on the thermal load acting on container 16, for example, during operation of the radiation source SO, such as due to heat emitted from plasma formation region 4. It will be understood that, additionally or alternatively, other components or parts of the radiation source SO may emit heat and thereby contribute to the thermal load acting on container 16.

[0087] Some coolant passages 50a may be part of the first access member 34. For example, such as Figure 4 As shown, some coolant channels 50a may be arranged to extend along at least a portion of the mounting portion 46. This allows for improved thermal stability of the mounting portion 46. In other words, by arranging some coolant channels 50a to extend along at least a portion of the mounting portion 46, the temperature of the mounting portion 46 can be kept constant (e.g., substantially constant) during operation of the radiation source SO, for example. This can prevent or reduce changes in the alignment of the inspection device 18, for example, that might occur due to heat loads acting on the container 16 (e.g., the mounting portion 46). It will be understood that in other embodiments, additionally or alternatively, at least some of the coolant channels may be part of a second access member.

[0088] Cooling device 50 may include an inlet 50b. Cooling device 50 may include an outlet 50c. Cooling device 50 may include the coolant source described above. Inlet 50b may be connected to the coolant source to supply coolant having a first temperature to coolant passage 50a. Outlet 50c may be connected to the coolant source to receive coolant having a second temperature from coolant passage 50a. The second temperature may be higher than or greater than the first temperature. It will be understood that in other embodiments, the cooling device may include another coolant source. It will be understood that cooling device 50 may include one or more elements for connecting two or more coolant passages 50a together, such as, for example, one or more flanges, etc. Additionally or alternatively, cooling device may include one or more other elements for covering or closing a portion of one or more coolant passages 50a, such as, for example, one or more blind flanges, blind plugs, blind caps, etc. For example, said other elements may be configured to cover or close the end portions of one or more cooling passages 50a. For clarity, not shown Figure 4 The elements and other components are shown in the diagram. It will be understood that the containers disclosed herein are not limited to those having, for example... Figure 4 The cooling device is shown in the figure. For example, in other embodiments, the coolant channels may be arranged in different ways and / or the number of coolant channels may be different.

[0089] The first access member 34 and the second access member 38 can be arranged on the container 16 to provide unobstructed access to the interior 32 of the container 16. This can facilitate and / or improve access to the interior 32 of the container 16. Improved access to the interior 32 of the container 16 can also result in a reduction in the number of steps required to replace one or more components of the radiation source SO. For example, removing the beam delivery system and / or moving the container, for example, to access the contaminant trap 26a of the debris mitigation system 24 and / or other components of the debris mitigation system 24 may not be necessary. This, in turn, can result in a reduction in the time and / or personnel required to replace one or more components of the radiation source SO. For example, the time required to replace the contaminant trap 26a of the debris mitigation system 24 can be reduced by about four times or more. In other words, the time required to replace the contaminant trap 26a can be reduced from about 110 hours to less than 24 hours.

[0090] Alternatively or concurrently, the first access member 34 and the second access member 38 may allow replacement of one or more components of the radiation source SO with alternative or new components, such as at least a portion of the debris mitigation system 24. In other words, the first access member 34 and the second access member 38 may allow easy modification or replacement of one or more components of the radiation source.

[0091] Alternatively, since the first access component 34 may include the mounting portion 46 as described above, removing one or more inspection devices, such as to access the collector 5, may not be necessary. Similarly, this could result in a reduction in the time and / or number of steps required to replace the collector 5 of the radiation source SO. For example, the time required to replace the collector 5 could be reduced by approximately five times or more. In other words, the time required to replace the collector 5 could be reduced from 40 hours to approximately 8 hours. It has been found that the reduction in steps can also lead to a lower risk of damage to components, containers, and / or tools used for replacement of the radiation source SO.

[0092] Figure 5A and Figure 5B Showing with Figure 1 Another exemplary container 116 used in conjunction with the radiation source SO shown in Figure 3. Figure 5A and Figure 5B The container 116 shown above is related to the above. Figures 3A to 3C and Figure 4 The containers described are similar. Therefore, any characteristics described regarding these containers can also be applied to... Figure 5A and Figure 5B The container shown in the image. Figure 5A and Figure 5B In the figures, similar features are indicated by similar reference numerals that increase by 100.

[0093] If possible Figure 5Aand Figure 5B As seen in this embodiment, container 16 includes an opening 130 for accessing the interior 132 of container 116. Container 116 includes an access member 134. The access member 134 may be provided in the form of a hatch, door, lid, etc. The access member 134 may be configured to allow or prevent access to the interior 132 of container 116 through opening 130. Container 116, opening 130, and / or access member 134 may include any of the features of container 16, first opening 30, and / or first access member 34 described above.

[0094] Container 116 is capable of operating between closed and open configurations. Figure 6 In the closed configuration of container 116 shown in Figure A, access member 134 is configured to prevent access to the interior 132 of container 116. In other words, access member 134 closes and blocks opening 130. In the closed configuration of container 116, access member 134 can be fastened to the wall 116a of container 116, for example, using fastening devices. Fastening devices can include one or more fasteners 139, such as screws or bolts. Fastening devices can include multiple holes 139a, 139b. Holes 139a, 139b can be arranged in access member 134 and container 116 (e.g., wall 116a of container 116) to allow access member 134 to be fastened to the wall 116a of container 116, for example, using fasteners 139. Figure 5A In the embodiment shown, four holes 139a are arranged on the periphery of the access member 134, and four corresponding holes 139b are arranged on the periphery of the opening 130. It will be understood that in other embodiments, the walls of the access member and / or container may include more or fewer than four holes.

[0095] In the example shown Figure 5B In the open configuration of container 116, access member 134 is configured to allow access to the interior 132 of container 116 through opening 130. In other words, access member 134 can be opened and opening 130 can be unobstructed. Container 116 can be operated to the open position by loosening and / or removing fasteners 139 from holes 139a, 139b in access member 134 and container 116.

[0096] Access component 134 includes a mounting portion 146 for mounting one or more measurement modules or inspection devices 118 to container 116. Mounting portion 146 may include the features described above. Figures 3A to 3C and Figure 4Any of the features of the described mounting portion 46. By providing mounting portion 146 as part of access member 134, removing inspection device 118 may not be necessary before operating container 116 between closed and open configurations. This can avoid or reduce the need for alignment inspection device. As described above, this may consequently lead to the replacement of one or more components of radiation source SO (such as, for example, collector 105, second fuel collector, etc.). Figure 5A and Figure 5B The time and / or number of steps required for the debris mitigation system 124 (not shown in the diagram) are reduced (or part or all of the debris mitigation system 124 is reduced).

[0097] Figure 6 A flowchart illustrating the steps of a method for replacing at least a first component of an EUV radiation source is shown. The radiation source may include the radiation source SO described above. The radiation source may include, regarding... Figures 3A to 3C and Figure 4 The described container 16. In this embodiment, the first component may include the contaminant trap 26a of the debris mitigation system 24. However, it will be understood that the method is not limited to replacing the contaminant trap of the debris mitigation system. In other embodiments, the first component may include another part or component of the debris mitigation system, such as, for example, another component of a fuel debris removal device or a radiation source.

[0098] The method includes manipulating the first access member 34 to allow access to the interior 32 of the container 16 through the first opening 30 (step 705). The step (705) of manipulating the first access member 34 may include removing the container 16 from a closed structure (such as...). Figure 3A (As shown) Operation to the first open structure (as shown) Figure 3B (As shown). Step (705) of operating the first access member 34 may include loosening and / or removing fasteners 39 from holes 39a, 39b. The method may include, for example, cooling the container 16 and / or radiation source SO (e.g., a portion thereof) prior to step (705) of operating the first access member 34. The method may include, for example, restoring the interior 32 of the container 16 to atmospheric pressure prior to operating the first access member 34. The method may include, for example, disconnecting multiple connecting elements 48, which may be components of the first access member 34 and / or the second access member 38, from a coolant source prior to step (705) of operating the first access member 34.

[0099] In step 710, the method includes removing the contaminant trap 26a to be replaced. The step (710) of removing the contaminant trap 26a to be replaced may include disconnecting at least another portion of the debris mitigation system 24 and the gas flow device 26f from the contaminant trap 26a. The step (710) of removing the contaminant trap 26a to be replaced may include moving the contaminant trap 26a to be replaced through the first opening 30.

[0100] In step 715, the method includes installing a contaminant trap to be used. The contaminant trap to be used may be fresh, clean, repaired, or new.

[0101] In step 720, the method includes operating the first access member 34 to prevent access to the interior 32 of the container 16 through the first opening 30. The step (720) of operating the first access member 34 to prevent access may include removing the container 16 from the first open structure (e.g., Figure 3B (As shown) Operation to a closed structure (such as) Figure 3A (As shown). The step (720) of operating the first access member 34 to prevent access may include inserting the fastener 39 into the holes 39a, 39b and / or tightening the fastener 39. The method may include, for example, heating the container 16 and / or the radiation source SO (e.g., components of the container 16 and / or the radiation source SO) after the step (720) of operating the first access member 34 to prevent access. The method may include, for example, reducing the pressure in the interior 32 of the container 16 to sufficiently below atmospheric pressure after the step (720) of operating the first access member 34 to prevent access. The method may include, for example, connecting a coolant source to a plurality of connecting elements 48, which may be components of the first access member and / or the second access member, after the step (720) of operating the first access member to prevent access.

[0102] Figure 7 A flowchart illustrating the steps of a method for replacing a second component of an EUV radiation source is shown. The radiation source may include the radiation source SO described above. The radiation source SO may include information regarding... Figures 3A to 3C and Figure 4 The described container 16. In this embodiment, the second component may include collector 5 and / or a second fuel collector. However, it will be understood that the method is not limited to replacing collector 5 and / or the second fuel collector. In other embodiments, the second component may include another component of the radiation source SO.

[0103] In step 805, the method includes manipulating the second access member 38 to allow access to the interior 32 of the container 16 through the second opening 36. The step (805) of manipulating the second access member 38 may include removing the container 16 from a closed structure (such as...). Figure 3A (As shown) Operation to the second open structure (as shown) Figure 3C(As shown). Step (805) of operating the second access member 38 may include loosening and / or removing other fasteners 39e from other holes 39d, 39c. The method may include, for example, cooling the container 16 and / or the radiation source SO (e.g., components of the container 16 and / or the radiation source SO) prior to step (805) of operating the second access member. The method may include, for example, restoring the interior 32 of the container 16 to atmospheric pressure prior to operating the second access member. The method may include, for example, disconnecting multiple connecting elements 48, which may be components of the second access member, from a coolant source prior to step (805) of operating the second access member 38.

[0104] In step 810, the method includes removing the collector to be replaced. Removing the collector 5 to be replaced may include disconnecting the debris mitigation system 24 from the collector 5. Removing the collector 5 may include allowing the collector 5 to be replaced to proceed through the second opening 36. The method may include, for example, removing the second fuel collector to be replaced after the step of removing the collector 5. The method may include allowing the second fuel collector to be replaced to proceed through the second opening 36.

[0105] In step 815, the method includes installing a collector to be used. The collector to be used may be a fresh, clean, repaired, or new collector. The method may include, for example, installing a second fuel collector to be used prior to installing the first collector. The second fuel collector to be used may be a fresh, clean, repaired, or new second fuel collector.

[0106] In step 820, the method includes operating the second access member 38 to prevent access to the interior of the container through the second opening. The step of operating the second access member to prevent access may include removing the container 16 from the second open structure (such as...). Figure 3C (As shown) Operation to a closed structure (such as) Figure 3A (As shown). The step (820) of operating the second access member 38 to prevent access may include inserting other fasteners 39e into other holes 39c, 39d and / or tightening the fasteners 39e. The method may include, for example, heating the container 16 and / or the radiation source SO (e.g., components of the container 16 and / or the radiation source SO) after the step (820) of operating the second access member 38 to prevent access. The method may include, for example, reducing the pressure in the interior 32 of the container 16 to sufficiently below atmospheric pressure after the step (820) of operating the second access member 38 to prevent access. The method may include, for example, connecting a coolant source to a plurality of connecting elements 48, which may be components of the second access member, after the step (820) of operating the second access member 38 to prevent access.

[0107] What will become clear is that, regarding Figure 6 and Figure 6Any of the described method steps can be used in combination with each other or independently of each other.

[0108] It will be understood that any step of the method described above can also be applied to, including, Figure 5A and Figure 5B The radiation source SO of container 116 is shown in the diagram. The method may then include manipulating access member 134 to allow access to the interior 132 of container 116 through opening 130. The steps of manipulating access member 134 may include removing container 116 from a closed structure (such as...). Figure 5A (As shown) Operation to open construction (such as) Figure 5B (As shown). The steps of operating the access member 134 may include loosening and / or removing fasteners 139 from holes 139a, 139b. The method may include, for example, cooling the container 116 and / or the radiation source SO (e.g., components of the container 116 and / or the radiation source SO) before operating the access member. The method may include, for example, restoring the interior 132 of the container 116 to atmospheric pressure before operating the access member 134. The method may include, for example, disconnecting multiple connecting elements 148, which may be components of the access member 134, from a coolant source before operating the access member 134.

[0109] The method may include removing the contaminant trap 126a to be replaced. The step of removing the contaminant trap 126a to be replaced may include disconnecting at least another portion of the debris mitigation system 124 and the gas flow device 126f from the contaminant trap 126a. The step of removing the contaminant trap 126a may include allowing the contaminant trap 126a to be replaced to travel through the first opening 130.

[0110] Alternatively or concurrently, the method may include removing the collector to be replaced. The step of removing the collector 105 to be replaced may include disconnecting the debris mitigation system 124 from the collector 105. The step of removing the collector 105 may include allowing the collector 105 to be replaced to travel through the opening 130. The method may include, for example, removing a second fuel collector to be replaced after the step of removing the collector 105. The method may include allowing the second fuel collector to be replaced to travel through the opening 130.

[0111] The method may include installing a contaminant trap and / or collector to be used. The contaminant trap to be used may be fresh, clean, repaired, or new. The collector to be used may be fresh, clean, repaired, or new. The method may include, for example, installing a second fuel collector to be used prior to installing the collector and / or contaminant trap to be used. The second fuel collector to be used may be fresh, clean, repaired, or new.

[0112] The method may include manipulating access member 134 to prevent access to the interior 132 of container 116 through opening 130. The step of manipulating access member 134 to prevent access may include removing container 116 from an open structure (such as...). Figure 5B (As shown) Operation to a closed structure (such as) Figure 5A (As shown). The step of operating the access member 134 to prevent access may include inserting a fastener 139 into holes 139a, 139b and / or tightening the fastener 139. The method may include, for example, heating the container 116 and / or the radiation source SO (e.g., a portion of the container 116 and / or the radiation source SO) after the step of operating the access member 134 to prevent access. The method may include, for example, reducing the pressure inside the container 116 to sufficiently below atmospheric pressure after the step of operating the access member 134 to prevent access. The method may include, for example, connecting a coolant source to a plurality of connecting elements 148, which may be a component of the access member 134, after the step of operating the access member 134 to prevent access.

[0113] It will be understood that the terms “EUV radiation source” and “radiation source” are used interchangeably.

[0114] It will be understood that references to multiple features can be used interchangeably with references to those features in singular forms such as, for example, "at least one" and / or "each". The singular forms of features, such as, "at least one" or "each", can be used interchangeably.

[0115] The term “EUV radiation” can be considered to encompass electromagnetic radiation with wavelengths in the range of 4 nm to 20 nm (e.g., in the range of 13 nm to 14 nm). EUV radiation can also have wavelengths less than 10 nm, for example, wavelengths in the range of 4 nm to 10 nm, such as 6.7 nm or 6.8 nm.

[0116] While references may be specifically made herein to the use of lithography equipment in IC manufacturing, it will be understood that the lithography equipment described herein may have other applications. Possible other applications include fabricating integrated optical systems, guiding and detecting patterns for magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin-film magnetic heads, etc.

[0117] Although specific reference has been made to the use of embodiments of the invention in the context of optical lithography, it will be understood that the invention is not limited to optical lithography and may be used in other applications (e.g., imprint lithography) where the context permits.

[0118] While specific embodiments of the invention have been described above, it will be understood that the invention may be practiced in other ways than those described. The above description is intended to be illustrative and not restrictive. Therefore, it will be apparent to those skilled in the art that modifications can be made to the described invention without departing from the scope of the claims set forth below.

Claims

1. A container for an EUV radiation source, the container comprising: A first opening, the first opening being used to access the interior of the container; A first access member, the first access member being configured to allow or prevent access to the interior of the container through the first opening; A second opening for accessing the interior of the container is disposed in the first access member; and A second access member is disposed on the first access member and configured to allow or prevent access to the interior of the container through the second opening, wherein the first opening is configured to allow access to a first component and a second component of the radiation source and to allow the first component and / or the second component of the radiation source to travel through the first opening, wherein the second opening is configured to allow access to the second component of the radiation source and to allow the second component of the radiation source to travel through the second opening.

2. The container as claimed in claim 1, wherein, The container is operable between at least two of the following configurations: a closed configuration, a first open configuration, and a second open configuration.

3. The container as claimed in claim 2, wherein, In the closed structure of the container, the first access member and the second access member are configured to prevent access to the interior of the container. In the first open configuration of the container, the first access member is configured to allow access to the interior of the container through the first opening, and / or In the second open configuration of the container, the second access member is configured to allow access to the interior of the container through the second opening.

4. The container as described in any of the preceding claims, wherein, The container includes a mounting portion for mounting one or more measurement modules or inspection devices to the container, the mounting portion being part of or included in the first access member.

5. The container as claimed in claim 4, wherein, The mounting portion is configured to mount the one or more measurement modules or inspection devices relative to a reference point inside the container.

6. The container as claimed in claim 4, wherein, The second access member is arranged separately from the mounting portion, and / or the second access member is arranged below the mounting portion.

7. An EUV radiation source comprising a container as described in any of the preceding claims.

8. The radiation source as described in claim 7, wherein, The radiation source includes a debris mitigation system, which is constructed in a modular manner.

9. The radiation source as claimed in claim 8, wherein, The first component of the radiation source includes at least a portion or all of the debris mitigation system of the radiation source.

10. The radiation source according to any one of claims 7 to 9, wherein, The second component of the radiation source includes at least one of the following: Collector reflectors, the collector reflectors being used to collect radiation emitted at the plasma formation region of the radiation source; and A fuel collector for collecting fuel debris generated at the plasma formation region of the radiation source.

11. A lithography system comprising a lithography apparatus and a radiation source as described in any one of claims 7 to 9.

12. A method for replacing at least a first component of an EUV radiation source, said radiation source comprising a container according to any one of claims 1 to 6, the method comprising: Operate the first access member to allow access to the interior of the container through the first opening; Remove at least the first component to be replaced; Install at least one other first component to be used; as well as Operate the first access member to prevent access to the interior of the container through the first opening.

13. A method for replacing a second component of an EUV radiation source, the radiation source comprising a container according to any one of claims 1 to 6, the method comprising: Operate the second access member to allow access to the interior of the container through the second opening; Remove the second component to be replaced; Install another second component to be used; as well as Operate the second access member to prevent access to the interior of the container through the second opening.

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