Induction coil pitch adjustment device, system and method

Abstract

The present application relates to the technical field of semiconductor manufacturing equipment, and specifically provides an induction coil pitch adjustment device, system and method, wherein the device includes: a distance adjustment component having two adjustment arms, wherein the adjustment arms are used to adjust the pitch between each turn of the induction coil; a first horizontal drive component connected to the distance adjustment component, and used to drive the distance adjustment component to move in a direction parallel to the spiral axis of the induction coil; a vertical drive component connected to the first horizontal drive component, and used to drive the first horizontal drive component to move in a radial direction of the induction coil, so that the distance adjustment component is moved toward or away from the spiral axis of the induction coil; the device does not need to adjust the pitch by manual measurement and trial and error, and effectively reduces the labor cost of adjusting the pitch of the induction coil.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, and in particular to an induction coil pitch adjustment device, system, and method. Background Art

[0002] Existing semiconductor manufacturing equipment generally places an induction coil spiral outside the reaction chamber and heats the reaction chamber through induction heating. Since the pitch of the induction coil affects the temperature field distribution inside the reaction chamber, the pitch of the induction coil needs to be adjusted so that the temperature field it generates meets the process requirements. The existing adjustment process generally uses manual measurement and trial and error, which is cumbersome and consumes high labor costs.

[0003] There is currently no effective technical solution to the above problems. Summary of the Invention

[0004] The purpose of the present application is to provide an induction coil pitch adjustment device, system and method, which eliminate the need for manual measurement and trial and error to adjust the pitch and effectively reduce the labor cost of adjusting the pitch of the induction coil.

[0005] In a first aspect, the present application provides an induction coil pitch adjustment device for adjusting the pitch of an induction coil spirally arranged outside a reaction chamber, comprising:

[0006] A distance adjustment assembly having two adjustment arms for adjusting the pitch between each turn of the induction coil;

[0007] a first horizontal driving assembly connected to the distance adjustment assembly and configured to drive the distance adjustment assembly to move in a direction parallel to the spiral axis of the induction coil;

[0008] The vertical driving assembly is connected to the first horizontal driving assembly and is used to drive the first horizontal driving assembly to move in the radial direction of the induction coil, so that the distance adjustment assembly moves toward or away from the spiral axis of the induction coil.

[0009] The present application provides an induction coil pitch adjustment device, which first adjusts the distance adjustment component to any turn of the induction coil through a first horizontal drive component and a vertical drive component, and then adjusts the pitch of the turn of the coil through the adjustment arm of the distance adjustment component, thereby achieving fixed-point adjustment of the pitch of the induction coil, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil.

[0010] Optionally, the induction coil pitch adjustment device further includes a rotating assembly, which is connected to the first horizontal drive assembly and is used to drive the first horizontal drive assembly to rotate.

[0011] In this technical solution, the rotating assembly can drive the first horizontal driving assembly to rotate. The first horizontal driving assembly, the vertical driving assembly and the rotating assembly cooperate to enable the distance adjustment assembly to reach any position of the induction coil, thereby realizing the adjustment of the pitch at any position of the induction coil.

[0012] Optionally, the distance adjustment component includes an opening component or a clamping component.

[0013] Optionally, the induction coil pitch adjustment device further includes a second horizontal drive assembly, the induction coil is arranged on the second horizontal drive assembly, and the second horizontal drive assembly is used to drive the induction coil to move in a direction parallel to the axis of the reaction chamber.

[0014] In this technical solution, the induction coil is arranged on the second horizontal driving assembly, and the second horizontal driving assembly can drive the induction coil to move along the axis of the reaction chamber to change the temperature distribution state in the reaction chamber.

[0015] In a second aspect, the present application further provides an induction coil pitch adjustment system for adjusting the pitch of an induction coil spirally disposed outside a reaction chamber, comprising:

[0016] A distance adjustment assembly having two adjustment arms for adjusting the pitch between each turn of the induction coil;

[0017] a first horizontal driving assembly connected to the distance adjustment assembly and configured to drive the distance adjustment assembly to move in a direction parallel to the spiral axis of the induction coil;

[0018] a vertical drive assembly connected to the first horizontal drive assembly, configured to drive the first horizontal drive assembly to move in a radial direction of the induction coil, so as to move the distance adjustment assembly toward or away from the spiral axis of the induction coil;

[0019] The controller is electrically connected to the distance adjustment component, the first horizontal drive component and the vertical drive component, and is used to control the first horizontal drive component and the vertical drive component to adjust the distance adjustment component to the pitch position to be adjusted of the induction coil, and control the distance adjustment component to adjust the pitch of the pitch position to be adjusted according to preset pitch information.

[0020] The present application provides an induction coil pitch adjustment system, which first adjusts the distance adjustment component to the pitch position to be adjusted of the induction coil through a first horizontal drive component and a vertical drive component, and then controls the adjustment arm of the distance adjustment component to adjust the pitch of the pitch position to be adjusted according to preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil.

[0021] Optionally, the induction coil pitch adjustment system further includes a rotating assembly, the rotating assembly being connected to the first horizontal drive assembly, the rotating assembly being used to drive the first horizontal drive assembly to rotate, and the process of controlling the first horizontal drive assembly and the vertical drive assembly to adjust the distance adjustment assembly to the pitch position to be adjusted of the induction coil, and controlling the distance adjustment assembly to adjust the pitch of the pitch position to be adjusted according to preset pitch information includes:

[0022] The first horizontal drive assembly, the vertical drive assembly and the rotation assembly are controlled to adjust the distance adjustment assembly to the pitch position to be adjusted of the induction coil, and the distance adjustment assembly is controlled to adjust the pitch of the pitch position to be adjusted according to preset pitch information.

[0023] In this technical solution, the rotating assembly can drive the first horizontal driving assembly to rotate. The first horizontal driving assembly, the vertical driving assembly and the rotating assembly cooperate to move the distance adjustment assembly to any position of the induction coil to adjust the pitch of the induction coil at different positions.

[0024] Optionally, the process of controlling the first horizontal drive assembly, the vertical drive assembly, and the rotation assembly to adjust the distance adjustment assembly to the pitch position to be adjusted of the induction coil, and controlling the distance adjustment assembly to adjust the pitch of the pitch position to be adjusted according to preset pitch information includes:

[0025] The first horizontal drive component and the rotating component are controlled to drive the distance adjustment component to move along a preset path. When the distance adjustment component moves to the pitch position to be adjusted, the vertical drive component is controlled to drive the distance adjustment component to move toward the spiral axis of the induction coil and control the distance adjustment component to adjust the pitch of the pitch position to be adjusted according to the preset pitch information corresponding to the pitch position to be adjusted.

[0026] In this technical solution, the first horizontal drive component and the rotating component are first controlled to drive the distance adjustment component to move along a preset path. When the distance adjustment component moves to the spiral position to be adjusted, the vertical drive component is controlled to drive the distance adjustment component to move toward the spiral axis of the induction coil and control the distance adjustment component to adjust the pitch of the position to be adjusted according to the preset pitch information corresponding to the pitch position to be adjusted, thereby realizing automatic adjustment of the pitch of all pitch positions to be adjusted on the preset path.

[0027] Optionally, the process of controlling the first horizontal drive assembly, the vertical drive assembly, and the rotation assembly to adjust the distance adjustment assembly to the pitch position to be adjusted of the induction coil, and controlling the distance adjustment assembly to adjust the pitch of the pitch position to be adjusted according to preset pitch information includes:

[0028] The vertical drive assembly is controlled to drive the distance adjustment assembly to move toward the spiral axis of the induction coil, and the first horizontal drive assembly and the rotating assembly are controlled to drive the distance adjustment assembly to move along a preset path. When the distance adjustment assembly moves to the pitch position to be adjusted, the distance adjustment assembly is controlled to adjust the pitch of the pitch position to be adjusted according to the preset pitch information corresponding to the pitch position to be adjusted.

[0029] Optionally, the preset path is a spiral path.

[0030] In a third aspect, the present application further provides an induction coil pitch adjustment method for adjusting the pitch of an induction coil spirally arranged outside a reaction chamber, which is applied to an induction coil pitch adjustment system, wherein the induction coil pitch adjustment system includes a distance adjustment component, a first horizontal drive component, and a vertical drive component. The distance adjustment component has two adjustment arms, and the adjustment arms are used to adjust the pitch between each turn of the induction coil. The first horizontal drive component is connected to the distance adjustment component, and the first horizontal drive component is used to drive the distance adjustment component to move in a direction parallel to the spiral axis of the induction coil. The vertical drive component is connected to the first horizontal drive component, and is used to drive the first horizontal drive component to move in a radial direction of the induction coil, so that the distance adjustment component is displaced toward or away from the spiral axis of the induction coil. The induction coil pitch adjustment method includes the following steps:

[0031] Controlling the first horizontal drive assembly and the vertical drive assembly to adjust the distance adjustment assembly to a position where the pitch of the induction coil is to be adjusted;

[0032] The distance adjustment component is controlled to adjust the pitch of the pitch position to be adjusted according to the preset pitch information.

[0033] The present application provides a method for adjusting the pitch of an induction coil. First, a distance adjustment component is adjusted to the pitch position of the induction coil to be adjusted through a first horizontal drive component and a vertical drive component. Then, the adjustment arm of the distance adjustment component is controlled to adjust the pitch of the pitch position to be adjusted according to preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil.

[0034] From the above, it can be seen that the present application provides an induction coil pitch adjustment device, system and method, which first adjusts the distance adjustment component to the pitch position to be adjusted of the induction coil through the first horizontal drive component and the vertical drive component, and then controls the adjustment arm of the distance adjustment component to adjust the pitch of the pitch position to be adjusted according to the preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil.

[0035] Other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or understood by practicing the embodiments of the present application. The objectives and other advantages of the present application can be achieved and obtained through the structures particularly pointed out in the written description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 A schematic structural diagram of an induction coil pitch adjustment device provided in an embodiment of the present application.

[0037] Figure 2 Schematic diagram of the connection structure between the rotating assembly and the first horizontal drive assembly in an embodiment of the present application.

[0038] Figure 3 A schematic diagram of the control structure of an induction coil pitch adjustment system provided in an embodiment of the present application.

[0039] Figure 4 A flowchart of a method for adjusting the pitch of an induction coil provided in an embodiment of the present application.

[0040] Figure numerals: 1. distance adjustment assembly; 11. adjustment arm; 2. first horizontal drive assembly; 21. first slide rod; 22. first motor; 3. vertical drive assembly; 4. second horizontal drive assembly; 5. reaction chamber; 6. induction coil; 7. rotation assembly; 71. fourth motor; 72. connecting rod; 8. controller. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work fall within the scope of protection of the present application.

[0042] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and should not be understood as indicating or implying relative importance.

[0043] First, as Figure 1-Figure 2 As shown, the present application provides an induction coil pitch adjustment device for adjusting the pitch of an induction coil 6 spirally arranged outside a reaction chamber 5, which includes:

[0044] The distance adjustment component 1 has two adjustment arms 11, and the adjustment arms 11 are used to adjust the pitch between each turn of the induction coil 6;

[0045] The first horizontal driving component 2 is connected to the distance adjustment component 1 and is used to drive the distance adjustment component 1 to move in a direction parallel to the spiral axis of the induction coil 6;

[0046] The vertical drive assembly 3 is connected to the first horizontal drive assembly 2 and is used to drive the first horizontal drive assembly 2 to move in the radial direction of the induction coil 6 so that the distance adjustment assembly 1 moves toward or away from the spiral axis of the induction coil 6.

[0047] The distance adjustment component 1 has two adjustment arms 11. When the two adjustment arms 11 are in contact with the two turns of the induction coil 6, the distance adjustment component 1 adjusts the pitch between the two turns of the induction coil 6 by adjusting the distance between the two adjustment arms 11. The distance adjustment component 1 can be a clamping component or an opening component. The clamping component adjusts the pitch between each turn of the induction coil 6 by clamping. The clamping component can be an electric clamping claw, a hinge clamping mechanism, etc. The opening component adjusts the pitch between each turn of the induction coil 6 by opening. The opening component can be a dual-arm manipulator, etc. The distance adjustment component 1 is preferably a dual-arm manipulator. The first horizontal drive component 2 is a linear drive mechanism, such as a pneumatic cylinder, an oil cylinder, an electric linear module, and an electric slide rod. The first horizontal drive component 2 is connected to the distance adjustment component 1 and is used to drive the distance adjustment component to move in a direction parallel to the spiral axis of the induction coil 6. The vertical drive component 3 is a linear drive mechanism, such as a pneumatic cylinder, an oil cylinder, an electric linear module and an electric slide rod. The vertical drive component 3 is connected to the first horizontal drive component 2. The vertical drive component 3 is used to drive the first horizontal component to move in the radial direction of the induction coil 6 so that the distance adjustment component 1 moves toward or away from the spiral axis of the induction coil 6.

[0048] The working principle of this embodiment is as follows: the distance adjustment component 1 can be moved to any turn of the induction coil 6 in cooperation with the first horizontal drive component 2 and the vertical drive component 3. After the distance adjustment component 1 moves to the position where the pitch is to be adjusted, the distance adjustment component 1 adjusts the distance between the two adjustment arms 11 to adjust the pitch of the turn of the coil. It should be understood that the induction coil pitch adjustment device can be applied to the debugging stage or the epitaxial growth stage of the epitaxial device. When the induction coil pitch adjustment device is applied to the debugging stage of the epitaxial device, the induction coil pitch adjustment device adjusts the pitch of the induction coil 6 in advance so that the temperature field in the reaction chamber 5 of the epitaxial device meets the process requirements; when the induction coil pitch adjustment device is applied to the epitaxial growth stage of the epitaxial device, the induction coil pitch adjustment device adjusts the pitch of the induction coil 6 in real time to change the temperature field in the reaction chamber 5 in real time.

[0049] The present application provides an induction coil pitch adjustment device, which first adjusts the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6 through the first horizontal drive component 2 and the vertical drive component 3, and then adjusts the pitch of the pitch position to be adjusted through the adjustment arm 11 of the distance adjustment component 1, thereby realizing fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0050] In some embodiments, the first horizontal driving assembly 2 includes a first sliding rod 21 and a first motor 22 . The distance adjustment assembly 1 is slidably disposed on the first sliding rod 21 . The first motor 22 is used to drive the distance adjustment assembly 1 to slide on the first sliding rod 21 .

[0051] In some preferred embodiments, the distance adjustment component 1 is a dual-arm manipulator, which includes two manipulator arms (i.e., adjustment arms 11) and a third motor. Both manipulator arms are connected to the third motor, and the third motor adjusts the distance between the two manipulator arms by changing its rotation distance.

[0052] Since the first horizontal drive component 2 and the vertical drive component 3 can only drive the distance adjustment component 1 to move radially or axially along the induction coil 6, the distance adjustment component 1 can only adjust the pitch on one side of the induction coil 6, and the pitch on the other side of the induction coil 6 is passively adjusted, resulting in low adjustment accuracy of the pitch on the other side of the induction coil 6.

[0053] In order to solve this technical problem, in some embodiments, the induction coil pitch adjustment device further includes a rotating assembly 7, which is connected to the first horizontal drive assembly 2, and the rotating assembly 7 is used to drive the first horizontal drive assembly 2 to rotate. The rotating assembly 7 can be an electric rotating gear, an electric rotating rod, etc. The rotating assembly 7 is connected to the first horizontal drive assembly 2, and the rotating assembly 7 is used to drive the first horizontal drive assembly 2 to rotate. Since the rotation axis of the rotating assembly 7 is on the spiral axis of the induction coil 6, the distance adjustment assembly 1 can rotate around the spiral axis of the induction coil 6. In this embodiment, the first horizontal drive assembly 2, the vertical drive assembly 3 and the rotating assembly 7 cooperate to enable the distance adjustment assembly 1 to reach any position of the induction coil, thereby achieving any position of the induction coil, so as to avoid the problem of low adjustment accuracy on one side of the induction coil 6 due to the passive adjustment of the pitch on one side of the induction coil 6.

[0054] In some embodiments, the induction coil pitch adjustment device further includes a second horizontal drive assembly 4, on which the induction coil 6 is disposed. The second horizontal drive assembly 4 is used to drive the induction coil 6 to move in a direction parallel to the axis of the reaction chamber 5. The second horizontal drive assembly 4 is a linear drive mechanism, such as an air cylinder, an oil cylinder, an electric linear module, or an electric slide. Specifically, the second horizontal drive assembly 4 includes a second slide and a second motor. The induction coil 6 is disposed on the second slide, and the second motor is used to drive the induction coil 6 to move in a direction parallel to the axis of the reaction chamber 5 on the second slide. Because the temperature distribution state within the reaction chamber 5 is related to the position and pitch of the induction coil 6, the second horizontal drive assembly 4 of this embodiment can change the temperature distribution state within the reaction chamber 5 by driving the induction coil 6 to move in a direction parallel to the axis of the reaction chamber 5.

[0055] From the above, it can be seen that the present application provides an induction coil pitch adjustment device, which first adjusts the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6 through the first horizontal drive component 2 and the vertical drive component 3, and then adjusts the pitch of the pitch position to be adjusted through the adjustment arm 11 of the distance adjustment component 1, thereby realizing fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0056] Second, as Figure 3 As shown, the present application also provides an induction coil pitch adjustment system for adjusting the pitch of an induction coil 6 spirally arranged outside a reaction chamber 5, which comprises:

[0057] The distance adjustment component 1 has two adjustment arms 11, and the adjustment arms 11 are used to adjust the pitch between each turn of the induction coil 6;

[0058] The first horizontal driving component 2 is connected to the distance adjustment component 1 and is used to drive the distance adjustment component 1 to move in a direction parallel to the spiral axis of the induction coil 6;

[0059] The vertical drive assembly 3 is connected to the first horizontal drive assembly 2 and is used to drive the first horizontal drive assembly 2 to move in the radial direction of the induction coil 6, so as to move the distance adjustment assembly 1 toward or away from the spiral axis of the induction coil 6;

[0060] The controller 8 is electrically connected to the distance adjustment component 1, the first horizontal drive component 2 and the vertical drive component 3, and is used to control the first horizontal drive component 2 and the vertical drive component 3 to adjust the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6, and control the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information.

[0061] The distance adjustment component 1 has two adjustment arms 11. When the two adjustment arms 11 are in contact with the two turns of the induction coil 6, the distance adjustment component 1 adjusts the pitch between the two turns of the induction coil 6 by adjusting the distance between the two adjustment arms 11. The distance adjustment component 1 can be a clamping component or an opening component. The clamping component adjusts the pitch between each turn of the induction coil 6 by clamping. The clamping component can be an electric clamping claw, a hinge clamping mechanism, etc. The opening component adjusts the pitch between each turn of the induction coil 6 by opening. The opening component can be a dual-arm manipulator, etc. The distance adjustment component 1 is preferably a dual-arm manipulator. The first horizontal drive component 2 is a linear drive mechanism, such as a pneumatic cylinder, an oil cylinder, an electric linear module, and an electric slide rod. The first horizontal drive component 2 is connected to the distance adjustment component 1 and is used to drive the distance adjustment component 1 to move in a direction parallel to the spiral axis of the induction coil 6. The vertical drive assembly 3 is a linear drive mechanism, such as a pneumatic cylinder, an oil cylinder, an electric linear module, and an electric slide rod. The vertical drive assembly 3 is connected to the first horizontal drive assembly 2. The vertical drive assembly 3 is used to drive the first horizontal assembly to move in the radial direction of the induction coil 6, so that the distance adjustment assembly 1 moves toward or away from the spiral axis of the induction coil 6. The pitch position to be adjusted is a preset value, and the pitch position to be adjusted indicates the position on the induction coil 6 where the pitch needs to be adjusted. The preset pitch information is a preset value, and the preset pitch information includes the pitch after the pitch position to be adjusted is adjusted. The controller 8 is electrically connected to the distance adjustment assembly 1, the first horizontal drive assembly 2, and the vertical drive assembly 3. The controller 8 can control the distance adjustment assembly 1 to adjust the distance between the two adjustment arms 11. The controller 8 can also control the first horizontal drive assembly 2 to drive the distance adjustment assembly 1 to move in a direction parallel to the spiral axis of the induction coil 6 and control the vertical drive assembly 3 to drive the first horizontal drive assembly 2 to move in the radial direction of the induction coil 6.

[0062] The working principle of the induction coil pitch adjustment system is as follows: the controller 8 controls the first horizontal drive assembly 2 to drive the distance adjustment assembly 1 to move in a direction parallel to the spiral axis of the induction coil 6 according to the pitch position to be adjusted, so that the distance adjustment assembly 1 moves above the pitch position to be adjusted, and then the controller 8 controls the vertical drive assembly 3 to drive the first horizontal drive assembly 2 to move in the radial direction of the induction coil 6, so that the distance adjustment assembly 1 moves toward the spiral axis of the induction coil 6, and the controller 8 controls the distance adjustment assembly 1 to adjust the distance between the two adjustment arms 11 according to the preset pitch information to adjust the pitch of the pitch position to be adjusted. The induction coil pitch adjustment system provided in the present application first adjusts the distance adjustment assembly 1 to the pitch position to be adjusted of the induction coil 6 by the first horizontal drive assembly 2 and the vertical drive assembly 3, and then controls the adjustment arm 11 of the distance adjustment assembly 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch by manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0063] In some embodiments, the induction coil pitch adjustment system further includes a rotating assembly 7, which is connected to the first horizontal drive assembly 2. The rotating assembly 7 is used to drive the first horizontal drive assembly 2 to rotate, control the first horizontal drive assembly 2 and the vertical drive assembly 3 to adjust the distance adjustment assembly 1 to the pitch position to be adjusted of the induction coil 6, and control the distance adjustment assembly 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information. The process includes:

[0064] The first horizontal drive component 2, the vertical drive component 3 and the rotating component 7 are controlled to adjust the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6, and the distance adjustment component 1 is controlled to adjust the pitch of the pitch position to be adjusted according to the preset pitch information.

[0065] Among them, the rotating assembly 7 can be an electric rotating gear, an electric rotating rod, etc. The rotating assembly 7 is connected to the first horizontal drive assembly 2, and the rotating assembly 7 is used to drive the first horizontal drive assembly 2 to rotate so that the distance adjustment assembly 1 can rotate around the spiral axis of the induction coil 6. Preferably, the rotating assembly 7 includes a fourth motor 71 and a connecting rod 72, and the two ends of the connecting rod 72 are respectively connected to the output end of the fourth motor 71 and the first horizontal drive assembly 2. In this embodiment, the rotating assembly 7 is electrically connected to the controller 8. The controller 8 controls the first horizontal drive assembly 2, the vertical drive assembly 3 and the rotating assembly 7 to drive the distance adjustment assembly 1 to move according to the pitch position to be adjusted, so that the distance adjustment assembly 1 moves to the pitch position to be adjusted of the induction coil 6. Since the first horizontal drive assembly 2, the vertical drive assembly 3 and the rotating assembly 7 can move the distance adjustment assembly 1 to any position of the induction coil 6, the distance adjustment assembly 1 of this embodiment can adjust the pitch of the induction coil 6 at different positions.

[0066] In some embodiments, the process of controlling the first horizontal drive assembly 2, the vertical drive assembly 3, and the rotation assembly 7 to adjust the distance adjustment assembly 1 to the position of the induction coil 6 to be adjusted in pitch, and controlling the distance adjustment assembly 1 to adjust the pitch of the position to be adjusted in pitch according to preset pitch information includes:

[0067] The first horizontal drive component 2 and the rotating component 7 are controlled to drive the distance adjustment component 1 to move along a preset path. When the distance adjustment component 1 moves to the pitch position to be adjusted, the vertical drive component 3 is controlled to drive the distance adjustment component 1 to move toward the spiral axis of the induction coil 6 and control the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information corresponding to the pitch position to be adjusted.

[0068] Among them, the preset path is a preset value, and the preset path can be a path passing through the entire induction coil 6, or a path passing through a partial induction coil 6, and at least one pitch position to be adjusted is set on the preset path. The working principle of this embodiment is: the controller 8 controls the first horizontal drive component 2 and the rotating component 7 to drive the distance adjustment component 1 to move along the preset path, at this time, the rotation axis of the rotating component 7 is on the spiral axis of the induction coil 6, and each time the distance adjustment component 1 moves to the pitch position to be adjusted, the controller 8 controls the first horizontal drive component 2 and the rotating component 7 to stop driving and controls the vertical drive component 3 to drive the first horizontal drive component 2 to move in the radial direction of the induction coil 6, so that the distance adjustment component 1 moves toward the spiral axis of the induction coil 6, and the controller 8 controls the distance adjustment component 1 to adjust the distance between the two adjustment arms 11 according to the preset pitch information corresponding to the pitch position to be adjusted, so as to adjust the pitch of the pitch position to be adjusted. This embodiment first controls the first horizontal drive assembly 2 and the rotation assembly 7 to drive the distance adjustment assembly 1 to move along a preset path. When the distance adjustment assembly 1 moves to the spiral position to be adjusted, the vertical drive assembly 3 is controlled to drive the distance adjustment assembly 1 to move toward the spiral axis of the induction coil 6 and controls the distance adjustment assembly 1 to adjust the pitch of the position to be adjusted according to the preset pitch information corresponding to the position to be adjusted, thereby automatically adjusting the pitch of all positions to be adjusted on the preset path. It should be understood that in this embodiment, after each adjustment of the pitch of the position to be adjusted is completed, the controller 8 controls the vertical drive assembly 3 to drive the first horizontal drive assembly 2 to move in the radial direction of the induction coil 6, so that the distance adjustment assembly 1 is reset away from the spiral axis of the induction coil 6.

[0069] In some embodiments, the process of controlling the first horizontal drive assembly 2, the vertical drive assembly 3, and the rotation assembly 7 to adjust the distance adjustment assembly 1 to the position of the induction coil 6 to be adjusted in pitch, and controlling the distance adjustment assembly 1 to adjust the pitch of the position to be adjusted in pitch according to preset pitch information includes:

[0070] The vertical drive component 3 is controlled to drive the distance adjustment component 1 to move toward the spiral axis of the induction coil 6, and the first horizontal drive component 2 and the rotation component 7 are controlled to drive the distance adjustment component 1 to move along a preset path. When the distance adjustment component 1 moves to the pitch position to be adjusted, the distance adjustment component 1 is controlled to adjust the pitch of the pitch position to be adjusted according to the preset pitch information corresponding to the pitch position to be adjusted.

[0071] Among them, the working principle of this embodiment is: the controller 8 controls the vertical drive component 3 to drive the first horizontal drive component 2 to displace in the radial direction of the induction coil 6, so that the distance adjustment component 1 is displaced toward the spiral axis of the induction coil 6. At this time, the rotation axis of the rotating component 7 is on the spiral axis of the induction coil 6. The controller 8 controls the first horizontal drive component 2 and the rotating component 7 to drive the distance adjustment component 1 to move along the preset path. When the distance adjustment component 1 moves to the pitch position to be adjusted, the controller 8 controls the first horizontal drive component 2 and the rotating component 7 to stop driving and controls the distance adjustment component 1 to adjust the distance between the two adjustment arms 11 according to the preset pitch information corresponding to the pitch position to be adjusted, so as to adjust the pitch of the pitch position to be adjusted. In this embodiment, after completing the adjustment of the pitch of the pitch position to be adjusted each time, the controller 8 will not control the vertical drive component 3 to drive the first horizontal drive component 2 to displace in the radial direction of the induction coil 6, thereby further simplifying the process of adjusting the pitch of the pitch position to be adjusted. It should be understood that in order to avoid the situation where the distance adjustment component 1 adjusts the pitch other than the pitch position to be adjusted due to contact between the distance adjustment component 1 and the induction coil 6 when the first horizontal drive component 2 and the rotating component 7 drive the distance adjustment component 1 to move along the preset path, the adjustment arm 11 of the distance adjustment component 1 of this embodiment moves closer when the first horizontal drive component 2 and the rotating component 7 drive the distance adjustment component 1 to move along the preset path.

[0072] In some embodiments, the predetermined path is a spiral path.

[0073] From the above, it can be seen that the present application provides an induction coil pitch adjustment system, which first adjusts the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6 through the first horizontal drive component 2 and the vertical drive component 3, and then controls the adjustment arm 11 of the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0074] Thirdly, as Figure 4As shown, the present application also provides an induction coil pitch adjustment method for adjusting the pitch of an induction coil 6 spirally arranged outside a reaction chamber 5, which is applied to an induction coil pitch adjustment system. The induction coil pitch adjustment system includes a distance adjustment component 1, a first horizontal drive component 2, and a vertical drive component 3. The distance adjustment component 1 has two adjustment arms 11, and the adjustment arms 11 are used to adjust the pitch between each turn of the induction coil 6. The first horizontal drive component 2 is connected to the distance adjustment component 1, and the first horizontal drive component 2 is used to drive the distance adjustment component 1 to move parallel to the axial direction of the induction coil 6. The vertical drive component 3 is connected to the first horizontal drive component 2, and is used to drive the radial displacement of the induction coil 6 of the first horizontal drive component 2, so that the distance adjustment component 1 moves toward or away from the spiral axis of the induction coil 6. The induction coil pitch adjustment method includes the following steps:

[0075] S1, controlling the first horizontal drive assembly 2 and the vertical drive assembly 3 to adjust the distance adjustment assembly 1 to the position of the pitch to be adjusted of the induction coil 6;

[0076] S2. Control the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information.

[0077] Among them, the working principle of an induction coil pitch adjustment method provided in an embodiment of the present application is the same as the working principle of an induction coil pitch adjustment system provided in the second aspect above, and will not be discussed in detail here. An induction coil pitch adjustment method provided in the present application first adjusts the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6 through the first horizontal drive component 2 and the vertical drive component 3, and then controls the adjustment arm 11 of the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch by manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0078] From the above, it can be seen that the present application provides an induction coil pitch adjustment device, system and method, which first adjusts the distance adjustment component 1 to the pitch position to be adjusted of the induction coil 6 through the first horizontal drive component 2 and the vertical drive component 3, and then controls the adjustment arm 11 of the distance adjustment component 1 to adjust the pitch of the pitch position to be adjusted according to the preset pitch information, thereby realizing automatic fixed-point adjustment of the pitch of the induction coil 6, eliminating the need to adjust the pitch through manual measurement and trial and error, and effectively reducing the labor cost of adjusting the pitch of the induction coil 6.

[0079] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any actual relationship or order between these entities or operations.

[0080] The above description is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, various modifications and variations of the present application are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. An induction coil pitch adjustment device for adjusting the pitch of an induction coil (6) spirally arranged outside a reaction chamber (5), characterized in that: The induction coil pitch adjustment device comprises: A distance adjustment component (1) having two adjustment arms (11), wherein the adjustment arms (11) are used to adjust the pitch between each turn of the induction coil (6); A first horizontal driving component (2) is connected to the distance adjustment component (1) and is used to drive the distance adjustment component (1) to move in a direction parallel to the spiral axis of the induction coil (6); A vertical drive assembly (3) connected to the first horizontal drive assembly (2) is used to drive the first horizontal drive assembly (2) to move in a radial direction of the induction coil (6) so as to move the distance adjustment assembly (1) toward or away from the spiral axis of the induction coil (6); The induction coil pitch adjustment device further comprises a rotating assembly (7), wherein the rotating assembly (7) is connected to the first horizontal drive assembly (2), and the rotating assembly (7) is used to drive the first horizontal drive assembly (2) to rotate, and the rotation axis of the rotating assembly (7) is on the spiral axis line of the induction coil (6).

2. The induction coil pitch adjustment device according to claim 1, characterized in that: The distance adjustment component (1) comprises an opening component or a clamping component.

3. The induction coil pitch adjustment device according to claim 1, characterized in that: The induction coil pitch adjustment device further comprises a second horizontal drive assembly (4), the induction coil (6) being arranged on the second horizontal drive assembly (4), and the second horizontal drive assembly (4) being used to drive the induction coil (6) to move in a direction parallel to the axis of the reaction chamber (5).

4. An induction coil pitch adjustment system for adjusting the pitch of an induction coil (6) spirally arranged outside a reaction chamber (5), characterized in that: The induction coil pitch adjustment system comprises: A distance adjustment component (1) having two adjustment arms (11), wherein the adjustment arms (11) are used to adjust the pitch between each turn of the induction coil (6); A first horizontal driving component (2) is connected to the distance adjustment component (1) and is used to drive the distance adjustment component (1) to move in a direction parallel to the spiral axis of the induction coil (6); A vertical drive assembly (3) connected to the first horizontal drive assembly (2) is used to drive the first horizontal drive assembly (2) to move in a radial direction of the induction coil (6) so as to move the distance adjustment assembly (1) toward or away from the spiral axis of the induction coil (6); A rotating assembly (7), the rotating assembly (7) being connected to the first horizontal drive assembly (2), the rotating assembly (7) being used to drive the first horizontal drive assembly (2) to rotate, the rotation axis of the rotating assembly (7) being on the spiral axis of the induction coil (6); A controller (8) is electrically connected to the distance adjustment component (1), the first horizontal drive component (2) and the vertical drive component (3), and is used to control the first horizontal drive component (2), the vertical drive component (3) and the rotation component (7) to adjust the distance adjustment component (1) to the pitch position to be adjusted of the induction coil (6), and to control the distance adjustment component (1) to adjust the pitch of the pitch position to be adjusted according to preset pitch information.

5. The induction coil pitch adjustment system according to claim 4, characterized in that: The process of controlling the first horizontal drive component (2), the vertical drive component (3) and the rotating component (7) to adjust the distance adjustment component (1) to the pitch position to be adjusted of the induction coil (6), and controlling the distance adjustment component (1) to adjust the pitch of the pitch position to be adjusted according to preset pitch information comprises: The first horizontal drive component (2) and the rotating component (7) are controlled to drive the distance adjustment component (1) to move along a preset path. When the distance adjustment component (1) moves to a position where the pitch is to be adjusted, the vertical drive component (3) is controlled to drive the distance adjustment component (1) to move toward the spiral axis of the induction coil (6) and to control the distance adjustment component (1) to adjust the pitch of the position where the pitch is to be adjusted according to preset pitch information corresponding to the position where the pitch is to be adjusted.

6. The induction coil pitch adjustment system according to claim 4, characterized in that: The process of controlling the first horizontal drive component (2), the vertical drive component (3) and the rotating component (7) to adjust the distance adjustment component (1) to the pitch position to be adjusted of the induction coil (6), and controlling the distance adjustment component (1) to adjust the pitch of the pitch position to be adjusted according to preset pitch information comprises: The vertical drive component (3) is controlled to drive the distance adjustment component (1) to move toward the spiral axis of the induction coil (6), and the first horizontal drive component (2) and the rotation component (7) are controlled to drive the distance adjustment component (1) to move along a preset path. When the distance adjustment component (1) moves to the position where the pitch is to be adjusted, the distance adjustment component (1) is controlled to adjust the pitch of the position where the pitch is to be adjusted according to the preset pitch information corresponding to the position where the pitch is to be adjusted.

7. The induction coil pitch adjustment system according to claim 5 or 6, characterized in that: The preset path is a spiral path.

8. A method for adjusting the pitch of an induction coil, for adjusting the pitch of an induction coil (6) spirally arranged outside a reaction chamber (5), characterized in that: The invention is applied to the induction coil pitch adjustment system as claimed in any one of claims 4 to 7, wherein the induction coil pitch adjustment system comprises a distance adjustment component (1), a first horizontal drive component (2) and a vertical drive component (3), wherein the distance adjustment component (1) has two adjustment arms (11), and the adjustment arms (11) are used to adjust the pitch between each turn of the induction coil (6); the first horizontal drive component (2) is connected to the distance adjustment component (1), and the first horizontal drive component (2) is used to drive the distance adjustment component (1) to move in a direction parallel to the spiral axis of the induction coil (6); the vertical drive component (3) is connected to the first horizontal drive component (2), and is used to drive the first horizontal drive component (2) to move in a radial direction of the induction coil (6), so that the distance adjustment component (1) moves toward or away from the spiral axis of the induction coil (6); and the induction coil pitch adjustment method comprises the following steps: Controlling the first horizontal drive component (2) and the vertical drive component (3) to adjust the distance adjustment component (1) to a pitch position of the induction coil (6) to be adjusted; The distance adjustment component (1) is controlled to adjust the pitch of the pitch position to be adjusted according to preset pitch information.

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