Three-dimensional measurement device and method based on spectral dispersion

Abstract

The present invention discloses a three-dimensional measuring device based on spectral dispersion, including: an illumination component for outputting incident light; a dispersion objective lens component for expanding the dispersion of the incident light, so that light of different wavelengths are respectively focused on the corresponding measuring points of the measured object, and receiving the outgoing light of different wavelengths reflected by the measuring points; a filtering component, including: a first pinhole array and a second pinhole array at equidistant conjugate positions on the optical path, the first pinholes and the second pinholes are respectively arranged in a staggered manner, and light of different wavelength sets pass through the corresponding first pinholes and the second pinholes respectively; a spectroscopic imaging component for receiving the outgoing light passing through the pinholes, and respectively focusing on the image plane coordinates corresponding to the pinholes and the measuring points on the imaging plane. It can solve the problem that the existing three-dimensional measuring equipment needs to use a row of holes array to filter out stray light, and the lateral resolution is low due to the limitation of the row of holes period.

Description

Technical Field

[0001] The present invention relates to the technical field of three-dimensional information measurement of objects, and in particular to a three-dimensional measurement device based on spectral dispersion and a three-dimensional measurement method based on spectral dispersion. Background Art

[0002] Imaging techniques for measuring three-dimensional (3D) macrostructures are becoming increasingly mature, especially in the optics, electronics, and semiconductor industries for advanced product development and quality control.

[0003] Generally based on the principle of spectral confocal, a white light source is used to generate wide-band dispersed light after being split by a dispersion element. The dispersed light is then focused on the surface of the workpiece to be measured through a lens, forming a dispersed red band with a special spatial distribution near the measured surface. Light of different spectra is focused within different height ranges. When the sample has a certain 3D morphology, different colors of light are focused at different heights, and light of different wavelengths is reflected back into the optical path. The wavelength of the reflected light is measured by the dispersion and spectrum detection components, and the reflected light component can be known. Since different heights correspond to different colors of reflected light, the height and morphology of 3D samples in one dimension can be detected through the reflection spectrum. Through the scanning device, 3D measurement of the entire surface of the sample can be achieved.

[0004] However, in existing 3D devices for dispersive spectral measurement, in order to avoid the influence of stray light, an array of holes is generally adopted to filter out the influence of background light and surrounding interference light. However, this method is limited by the spacing between each row of holes (hole period). The highest lateral resolution of the measuring equipment is the period of the hole row, resulting in a low lateral resolution, which is difficult to meet the detection scenarios with higher image resolution. Summary of the invention

[0005] In order to overcome the defects of the above-mentioned prior art, an embodiment of the present invention provides a three-dimensional measurement device based on spectral dispersion and a three-dimensional measurement method based on spectral dispersion, which can solve the problem that the existing three-dimensional measurement equipment needs to use a hole array to filter out stray light, and the lateral resolution is low due to the limitation of the hole period.

[0006] Specifically, the present invention provides a three-dimensional measurement device based on spectral dispersion, comprising: a line light source component, a dispersion objective lens component, a filtering component and a spectroscopic imaging component; the line light source component is used to output a line of incident light; the dispersion objective lens component is used to disperse the line of incident light in the axial direction, so that light of different wavelengths is respectively focused on corresponding measurement points at different heights of the measured object, and receives the outgoing light of different wavelengths reflected by the measurement points; the filtering component comprises: a first small hole array, provided with a plurality of first small holes arranged at intervals, respectively contacting a plurality of first small holes at different positions of the measured object in the direction of the line light source The measuring points correspond one to one, so that the outgoing light reflected after focusing on the first measuring point is focused and passes through the corresponding first small hole respectively; the second small hole array is provided with a plurality of second small holes arranged at intervals, which correspond one to one to a plurality of second measuring points at different positions of the measured object in the direction of the linear light source, and are arranged staggered relative to the first small holes, so that the outgoing light reflected after focusing on the second measuring point is focused and passes through the corresponding second small holes respectively; the spectroscopic imaging component is used to receive the outgoing light of different wavelengths passing through the small holes, and focus the outgoing light to the sensor to obtain the corresponding spectral image.

[0007] In one embodiment of the present invention, the filtering assembly further includes: a first semi-transparent and semi-reflective mirror, which is arranged along the optical path between the line light source assembly and the dispersive objective lens assembly, transmitting the incident light and reflecting the outgoing light; a second semi-transparent and semi-reflective mirror, which is arranged along the optical path between the first semi-transparent and semi-reflective mirror and the first pinhole array, transmitting part of the outgoing light reflected by the first semi-transparent and semi-reflective mirror to the first pinhole array, and reflecting part of the outgoing light to the second pinhole array.

[0008] In one embodiment of the present invention, the spectroscopic imaging component includes: a first spectroscopic imaging component and a second spectroscopic imaging component; the first spectroscopic imaging component includes at least a first focusing component and a first sensor, which are used to receive light passing through the first pinhole array and focus the light passing through the first pinhole array onto the first sensor; the first spectroscopic imaging component includes at least a second focusing component and a second sensor, which are used to receive light passing through the second pinhole array and focus the light passing through the second pinhole array onto the second sensor.

[0009] In one embodiment of the present invention, the first small holes and the second small holes are evenly spaced at an equal spacing distance, and the staggered distance between the first small holes and the second small holes is half of the spacing distance.

[0010] In one embodiment of the present invention, the filtering component further includes: a plurality of third small hole arrays, provided with a plurality of third small holes evenly spaced at the spacing distance, corresponding one-to-one to a plurality of third measuring points of the object to be measured at different positions in the direction of the linear light source, so that the outgoing light reflected after focusing on the third measuring point passes through the corresponding third small holes respectively, and the third small holes of each third small hole array and the third small holes and the first small holes and the second small holes are relatively staggered at equal staggered distances, wherein the sum of each staggered distance is equal to the spacing distance.

[0011] In one embodiment of the present invention, the filtering component also includes: a plurality of third semi-transparent and semi-reflective mirrors arranged corresponding to the plurality of third pinhole arrays, and the plurality of third semi-transparent and semi-reflective mirrors again split the light transmitted or reflected by the second semi-transparent and semi-reflective mirrors so that the split light is transmitted or reflected to the corresponding third pinhole arrays.

[0012] In addition, an embodiment of the present invention proposes a three-dimensional measurement method based on spectral dispersion, including: a line light source component outputs a line of incident light; the dispersion objective lens component disperses the line incident light in the axial direction, so that light of different wavelengths is respectively focused on corresponding measurement points at different heights of the object to be measured, and receives outgoing light of different wavelengths reflected by the measurement points; outgoing light reflected after being focused on a plurality of first measurement points at different positions in the direction of the line light source of the object to be measured is respectively focused and passes through corresponding first small holes on a first small hole array, and outgoing light reflected after being focused on a plurality of second measurement points at different positions in the direction of the line light source of the object to be measured is respectively focused and passes through corresponding second small holes on a second small hole array that are arranged staggered relative to the first small holes; the spectroscopic imaging component focuses the outgoing light of different wavelengths passing through the small holes onto a sensor to obtain a corresponding spectral image.

[0013] In one embodiment of the present invention, the incident light is transmitted by a first semi-transparent and semi-reflective mirror and reaches the dispersive objective lens assembly, the outgoing light passes through the dispersive objective lens assembly and is reflected by the first semi-transparent and semi-reflective mirror, and passes through the first pinhole array after being transmitted by a second semi-transparent and semi-reflective mirror, and passes through the second pinhole array after being reflected by the second semi-transparent and semi-reflective mirror.

[0014] In one embodiment of the present invention, a spectroscopic imaging component focuses the outgoing light of different wavelengths passing through the pinhole onto a sensor to obtain a corresponding spectral image, including: a first spectroscopic imaging component focuses the outgoing light passing through the first pinhole onto a first sensor to obtain first image information; a second spectroscopic imaging component focuses the outgoing light passing through the second pinhole onto a second sensor to obtain second image information; and a detection image is obtained by combining the first image information and the second image information.

[0015] In one embodiment of the present invention, the first small holes and the second small holes are evenly spaced at an equal spacing distance, and the staggered distance between the first small holes and the second small holes is half of the spacing distance.

[0016] In one embodiment of the present invention, the three-dimensional measurement method based on spectral dispersion also includes: focusing the outgoing light reflected after focusing on a plurality of third measurement points at different positions in the direction of the linear light source of the object to be measured and passing through the third small holes corresponding to a plurality of third small hole arrays; the third small hole array is provided with a plurality of third small holes evenly spaced at the spacing distance, and the third small holes of each third small hole array and the third small holes and the first small holes and the second small holes are relatively staggered at equal staggered distances, wherein the sum of the staggered distances is equal to the spacing distance.

[0017] It can be seen from the above that the above embodiments of the present invention can have one or more of the following beneficial effects:

[0018] (1) By providing multiple pinhole arrays as filtering components, light of different wavelengths reflected from each measuring point on the object to be measured is filtered respectively. The pinholes on each pinhole array are arranged in a staggered manner, so that the outgoing light reflected by different pinhole arrays after passing through and focusing on different measuring points is focused on the corresponding image plane coordinates on the imaging surface. Compared with the method of using a single pinhole array to filter stray light, the lateral resolution can be significantly improved, meeting the detection scene with high image resolution requirements;

[0019] (2) By setting a spectroscopic imaging component corresponding to each pinhole array, each spectroscopic imaging component focuses the light passing through the corresponding pinhole array onto the corresponding imaging surface to obtain corresponding image information, and can perform comparative analysis through multi-channel image data, effectively improving the signal-to-noise ratio of the measurement system and the reliability of the measurement data;

[0020] (3) The sum of the staggered distances between the small holes on each small hole array is set to be equal to the spacing distance between the small holes. By customizing the number of small hole arrays, the resolution of the three-dimensional measurement device can be adjusted, thereby improving the adaptability of the system to different application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0022] Figure 1 A schematic structural diagram of a three-dimensional measurement device based on spectral dispersion provided by an embodiment of the present invention;

[0023] Figure 2 A schematic diagram of the structure of a small hole array provided by an embodiment of the present invention;

[0024] Figure 3 A schematic diagram of the structure of another small hole array provided in an embodiment of the present invention;

[0025] Figure 4 A flow chart of a three-dimensional measurement method based on spectral dispersion provided in an embodiment of the present invention.

[0026] Description of Reference Numerals

[0027] 11: lighting assembly; 12: dispersion objective lens assembly; 13: filtering assembly; 131: first pinhole array; 132: second pinhole array; 133: first semi-transparent and semi-reflective mirror; 134: second semi-transparent and semi-reflective mirror; 135: third pinhole array; 14: spectroscopic imaging assembly;

[0028] S11 to S14: Steps of a three-dimensional measurement method based on spectral dispersion. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described below with reference to the accompanying drawings and in combination with the embodiments.

[0030] In order to enable ordinary technicians in the field to better understand the technical solution of the present invention, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments, and all should belong to the protection scope of the present invention.

[0031] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are applicable to distinguishing similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition. The terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or are proprietary to these processes, methods, products or devices.

[0032] It should also be noted that the division of multiple embodiments in the present invention is only for the convenience of description and should not constitute a special limitation. The features in various embodiments can be combined and referenced to each other without contradiction.

[0033] [First embodiment]

[0034] like Figure 1 As shown, the first embodiment of the present invention provides a three-dimensional measurement device based on spectral dispersion, for example, including: a line light source component 11, a dispersion objective lens component 12, a filtering component 13, and a spectroscopic imaging component 14.

[0035] Among them, the line light source component 11, for example, includes a slit light source, which outputs high-brightness linear incident light. Furthermore, the linear incident light reaches the filter component 13 after passing through a lens combination, and the lens combination includes one or more lenses for modulating the optical path of the incident light to improve the collimation and brightness of the light.

[0036] The dispersion objective lens assembly 12 is used to axially disperse the incident linear light. After dispersion, the light of different wavelengths is focused on the corresponding measuring points at different heights of the measured object and distributed along a scanning line in the scanning direction of the measured object. The dispersion objective lens assembly 12 also receives the outgoing light of the target wavelength formed by the reflection of the measuring point. For example, Figure 1 As shown in , the dispersive objective lens assembly 12 includes a plurality of lens combinations. By controlling parameters such as the thickness of each lens and the distance between the lenses, the incident light of different wavelengths can be expanded in the axial direction to obtain light of target wavelengths λ1, λ2 and λ3, which are respectively focused on the height h1, height h2 and height h3 of the measured ball, and on the measuring points of the scanning positions x1, x2 and x3, and are reflected by the measured ball to form outgoing light of the target wavelength and return to the dispersive objective lens assembly 12.

[0037] The filter assembly 13 includes, for example, a first pinhole array 131 and a second pinhole array 132, each of which is provided with a plurality of first pinholes and a second pinhole arranged at intervals. The second pinhole array 132 and the first pinhole array 131 are at equidistant conjugate positions on the optical path, that is, both are at the focal plane of the outgoing light reflected from the object under test, and the first pinholes and the second pinholes are arranged in a staggered manner relative to each other, so that the outgoing light reflected from a plurality of first measuring points is focused on the corresponding first pinholes, and the outgoing light reflected from a plurality of second measuring points different from the first measuring point is focused on the corresponding second pinholes. .

[0038] Further, the filter assembly 13 is provided with a first semi-transparent mirror 133 and a second semi-transparent mirror 134, which are arranged obliquely relative to the outgoing light. The first semi-transparent mirror 133 is arranged between the line light source assembly 11 and the dispersion objective lens assembly 12 along the optical path, and the incident light reaches the dispersion objective lens assembly 12 after passing through the first semi-transparent mirror 133, and the outgoing light returns to the dispersion objective lens assembly 12 and is reflected by the first semi-transparent mirror 133. The second semi-transparent mirror 134 is arranged between the first semi-transparent mirror 133 and the first pinhole array 131 along the optical path, and part of the outgoing light reflected by the first semi-transparent mirror 133 passes through the second semi-transparent mirror 134 and is focused on the first pinhole array 131, and part of the outgoing light is reflected by the second semi-transparent mirror 134 and is focused on the second pinhole array 132.

[0039] As mentioned above, the position information of the object to be measured carried by the outgoing light with wavelengths of λ1, λ2 and λ3 is recorded as (x1, h1), (x2, h2) and (x3, h3) respectively, and the outgoing light passes through the dispersion objective lens assembly 12 and is focused to the plane where the first pinhole array 131 and the second pinhole array 132 are located. In particular, the outgoing light of different wavelengths can only be converged to a sufficiently small size in the corresponding pinholes on the pinhole array. For example, the outgoing light of wavelength λ1 is focused on the pinhole x1`, and the outgoing light of wavelengths λ2 and λ3 is focused on the pinholes x2` and x3` ​​respectively. For different pinholes, the light of non-target wavelengths will diverge more and more as the wavelength deviates from the target wavelength, and therefore will be blocked and filtered out by the pinhole mask array plate 132.

[0040] It is worth mentioning that the shapes of the small holes on the small hole array include but are not limited to: circle, triangle and parallelogram, and the arrangement can be regular uniform spacing, or irregular arrangement, such as gradually increasing or decreasing spacing. By controlling the spacing, diameter and other parameters between the small holes, it can be used to filter the target wavelength of light reflected by the target object point, and the present invention is not limited to this.

[0041] The spectroscopic imaging component 14 is used to receive the outgoing light passing through the first pinhole array 131 and the second pinhole array 132, and focus the outgoing light of different wavelengths onto the imaging surface of the sensor to obtain a corresponding spectral image. The sensor mentioned is, for example, a camera photosensitive element. For example, the position information of the object to be measured carried by the outgoing light with a wavelength of λ1 is (x1, h1), and the image plane coordinate point focused on the imaging plane after passing through the pinhole x1` on the first pinhole array 131 is (x1``, y1). The position information of the object to be measured carried by the outgoing light with a wavelength of λ2 is (x2, h2), and the image plane coordinate point focused on the imaging plane after passing through the pinhole x2` on the first pinhole array 131 is (x2``, y2). Similarly, for example, if n points are sampled on a scanning line of the object to be measured, the position information of the object to be measured carried by the outgoing light with a wavelength of λn is (xn, hn), and the image plane coordinate point focused on the imaging plane after passing through the pinhole xn` on the first pinhole array 131 is (xn``, yn). Similarly, the second pinhole array 132 passes another group of outgoing light with a wavelength to obtain another group of corresponding phase plane coordinates.

[0042] In this way, by providing multiple pinhole arrays as filtering components, the light of different wavelengths reflected from each measuring point on the object to be measured is filtered respectively, and the pinholes on each pinhole array are arranged in a staggered manner, so that the outgoing light reflected after passing through different pinhole arrays and focusing on different measuring points is focused on the corresponding image plane coordinates on the imaging surface respectively. Compared with the method of using a single pinhole array to filter out stray light, the lateral resolution can be significantly improved to meet the detection scenarios with high image resolution requirements.

[0043] Specifically, the spectroscopic imaging component 14 includes, for example: a first spectroscopic imaging component 141 and a second spectroscopic imaging component 142. The first spectroscopic imaging component 141 includes a first focusing component and a first sensor, and focuses the light passing through the first pinhole array onto the first sensor to obtain first image information; the second spectroscopic imaging component 142 includes a second focusing component and a second sensor, and focuses the light passing through the second pinhole array onto the second sensor to obtain second image information. In this way, the obtained multi-channel image data can be compared and analyzed to effectively improve the signal-to-noise ratio of the measurement system and the reliability of the measurement data.

[0044] In one embodiment, in combination Figure 2As shown, the first small holes on the first small hole array 131 and the second small holes on the second small hole array 132 are evenly spaced at equal intervals, and the staggered distance between the first small holes and the second small holes is half of the small hole spacing distance. That is, the small hole spacing distance is d, and the maximum resolution in the horizontal scanning direction is the spacing distance d, and the staggered distance between the second small holes and the first small holes is d / 2. At this time, the maximum resolution obtained by filtering by combining the first small hole array 131 and the second small hole array 132 is d / 2.

[0045] In one embodiment, in combination Figure 3 As shown, the filter component 13 also includes: a plurality of third pinhole arrays 135, all of which are at equidistant conjugate positions with the first pinhole array 131 on the optical path, and a plurality of third pinholes are evenly spaced at the spacing distance, so that the outgoing light of different wavelengths is focused on each third pinhole array 135, and the third pinholes of each third pinhole array 135 and the third pinholes and the first pinholes and the second pinholes are relatively staggered at equal staggered distances, wherein the sum of the staggered distances is equal to the spacing distance.

[0046] For example, a third pinhole array 135, i.e., a three-way pinhole array, is set for filtering, and the interleaving distance (maximum lateral resolution) is d / 3 at this time; two third pinhole arrays 135, i.e., a four-way pinhole array, are set for filtering, and the interleaving distance (maximum lateral resolution) is d / 4 at this time. In this way, the sum of the interleaving distances between the pinholes on each pinhole array is set to be equal to the spacing distance between the pinholes. By customizing the number of pinhole arrays, the resolution of the three-dimensional measurement device can be adjusted, thereby improving the adaptability of the system to different application scenarios. For the implementation method of setting a three-way pinhole array, it is necessary to perform light splitting twice, for example, a third semi-transparent and semi-reflective mirror is added between the second semi-transparent and semi-reflective mirror 134 and the first light splitting imaging component 141 or between the second light splitting imaging component 142, so as to obtain another light splitting, so that the light splitting enters the third pinhole array 135, and the light passing through the third pinhole array 135 is then imaged by the corresponding light splitting imaging component. Similarly, by adding a corresponding number of third semi-transparent and semi-reflective mirrors according to the number of the third pinhole arrays 135, it is possible to achieve spectroscopic imaging of the light passing through each pinhole array.

[0047] In summary, a three-dimensional measuring device based on spectral dispersion proposed in an embodiment of the present invention is provided with a plurality of pinhole arrays as filtering components to filter the light of different wavelengths reflected by each measuring point on the measured object respectively. The pinholes on each pinhole array are arranged in a staggered manner so that the outgoing light reflected by different pinhole arrays after being focused on different measuring points is respectively focused on the corresponding image plane coordinates on the imaging plane. Compared with the method of filtering stray light by a single pinhole array, the lateral resolution can be significantly improved to meet the detection scene with high image resolution requirements. By providing a spectroscopic imaging component corresponding to each pinhole array, each spectroscopic imaging component respectively focuses the light passing through the corresponding pinhole array onto the corresponding imaging plane to obtain corresponding image information, which can be compared and analyzed through multi-channel image data, effectively improving the signal-to-noise ratio of the measuring system and the reliability of the measuring data. The sum of the staggered distances between the pinholes on each pinhole array is set to be equal to the spacing distance of the pinholes. By customizing the number of pinhole arrays, the resolution of the three-dimensional measuring device can be adjusted, thereby improving the adaptability of the system to different application scenarios.

[0048] [Second embodiment]

[0049] like Figure 4 As shown, the second embodiment of the present invention proposes a three-dimensional measurement method based on spectral dispersion, for example, including steps S11 to S14. In step S11, a line of incident light is output by a line light source component; in step S12, the dispersion objective lens component disperses the line of incident light in the axial direction, so that light of different wavelengths is focused on corresponding measurement points at different heights of the measured object, and receives the outgoing light of different wavelengths reflected by the measurement points; in step S13, the outgoing light reflected after focusing on a plurality of first measurement points at different positions in the direction of the line light source of the measured object is focused and passes through the first small holes corresponding to the first small hole array, and the outgoing light reflected after focusing on a plurality of second measurement points at different positions in the direction of the line light source of the measured object is focused and passes through the second small holes corresponding to the second small hole array and arranged staggered relative to the first small holes; in step S14, the spectroscopic imaging component focuses the outgoing light of different wavelengths passing through the small holes onto the sensor to obtain the corresponding spectral image.

[0050] Furthermore, the incident light is transmitted by the first semi-transparent and semi-reflective mirror and reaches the dispersive objective lens assembly, the outgoing light passes through the dispersive objective lens assembly and is reflected by the first semi-transparent and semi-reflective mirror, and passes through the first pinhole array after being transmitted by the second semi-transparent and semi-reflective mirror, and passes through the second pinhole array after being reflected by the second semi-transparent and semi-reflective mirror.

[0051] Furthermore, the spectroscopic imaging component focuses the outgoing light of different wavelengths passing through the pinhole onto a sensor to obtain a corresponding spectral image, including: a first spectroscopic imaging component focuses the outgoing light passing through the first pinhole onto a first sensor to obtain first image information; a second spectroscopic imaging component focuses the outgoing light passing through the second pinhole onto a second sensor to obtain second image information; and a detection image is obtained by combining the first image information and the second image information.

[0052] Furthermore, the first small holes and the second small holes are evenly spaced at an equal spacing distance, and the staggered distance between the first small holes and the second small holes is half of the spacing distance.

[0053] Furthermore, the three-dimensional measurement method based on spectral dispersion also includes: focusing the outgoing light reflected after focusing on a number of third measurement points at different positions in the direction of the linear light source of the object to be measured and passing through the third small holes corresponding to a number of third small hole arrays; the third small hole array is provided with a number of third small holes evenly spaced at the spacing distance, and the third small holes of each third small hole array and the third small holes and the first small holes and the second small holes are relatively staggered at equal staggered distances, wherein the sum of each staggered distance is equal to the spacing distance.

[0054] It is worth mentioning that the three-dimensional measurement method based on spectral dispersion proposed in the second embodiment of the present invention is applicable to the three-dimensional measurement device based on spectral dispersion proposed in the aforementioned first embodiment. The specific three-dimensional measurement device based on spectral dispersion can refer to the system described in the first embodiment, and will not be described here for the sake of brevity. The beneficial effects of the three-dimensional measurement device based on spectral dispersion provided in this embodiment are the same as the beneficial effects of the three-dimensional measurement method based on spectral dispersion provided in the first embodiment.

[0055] In addition, it can be understood that the aforementioned embodiments are only exemplary descriptions of the present invention. Under the premise that the technical features do not conflict, the structures do not contradict, and the purpose of the present invention is not violated, the technical solutions of the various embodiments can be arbitrarily combined and used in combination.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A three-dimensional measurement device based on spectral dispersion, characterized in that: It comprises a line light source component (11), a dispersion objective lens component (12), a filtering component (13) and a spectroscopic imaging component (14); The line light source assembly (11) is used to output a line of incident light; The dispersion objective lens assembly (12) is used to disperse the incident linear light in the axial direction, so that light of different wavelengths is focused on corresponding measuring points at different heights of the measured object, and to receive outgoing light of different wavelengths reflected by the measuring points; The filtering component (13) comprises: A first small hole array (131) is provided with a plurality of first small holes arranged at intervals, which correspond one-to-one to a plurality of first measurement points of the object to be measured at different positions in the direction of the linear light source, so that the outgoing light reflected after being focused on the first measurement points is focused and passes through the corresponding first small holes; A second small hole array (132) is provided with a plurality of second small holes arranged at intervals, which correspond one-to-one to a plurality of second measurement points at different positions of the object to be measured in the direction of the linear light source, and are arranged in a staggered manner relative to the first small holes, so that the outgoing light reflected after focusing on the second measurement points is respectively focused and passes through the corresponding second small holes; The spectroscopic imaging component (14) is used to receive the outgoing light rays of different wavelengths passing through the small hole, and to focus the outgoing light rays onto a sensor to obtain a corresponding spectral image.

2. The three-dimensional measurement device based on spectral dispersion according to claim 1, characterized in that: The filtering component (13) further comprises: A first semi-transparent and semi-reflective mirror (133) is arranged along the optical path between the line light source assembly (11) and the dispersion objective lens assembly (12), transmitting the incident light and reflecting the outgoing light; A second semi-transparent and semi-reflective mirror (134) is arranged between the first semi-transparent and semi-reflective mirror (133) and the first pinhole array (131) along the optical path, and transmits part of the outgoing light reflected by the first semi-transparent and semi-reflective mirror (133) to the first pinhole array (131), and reflects part of the outgoing light to the second pinhole array (132).

3. The three-dimensional measurement device based on spectral dispersion according to claim 1, characterized in that: The spectroscopic imaging component (14) comprises: A first spectroscopic imaging component (141) and a second spectroscopic imaging component (142); The first spectroscopic imaging component (141) comprises at least a first focusing component and a first sensor, and is used to receive light passing through the first pinhole array and focus the light passing through the first pinhole array onto the first sensor; The second spectroscopic imaging component (142) comprises at least a second focusing component and a second sensor, and is used to receive light passing through the second pinhole array and focus the light passing through the second pinhole array onto the second sensor.

4. The three-dimensional measurement device based on spectral dispersion according to claim 2, characterized in that: The first small holes and the second small holes are evenly spaced at an equal spacing distance, and the staggered distance between the first small holes and the second small holes is half of the spacing distance.

5. The three-dimensional measurement device based on spectral dispersion according to claim 4, characterized in that: The filtering component (13) further comprises: A plurality of third small hole arrays (135) are provided with a plurality of third small holes evenly spaced at the spacing distance, and correspond one-to-one to a plurality of third measurement points at different positions of the object to be measured in the direction of the linear light source, so that the outgoing light reflected after being focused on the third measurement points is respectively focused and passes through the corresponding third small holes, and the third small holes of each third small hole array (135) and the third small holes and the first small holes and the second small holes are relatively staggered at equal staggered distances, wherein the sum of the staggered distances is equal to the spacing distance.

6. The three-dimensional measurement device based on spectral dispersion according to claim 5, characterized in that: The filtering component (13) further comprises: A plurality of third semi-transparent and semi-reflective mirrors are arranged corresponding to the plurality of third pinhole arrays (135), and the plurality of third semi-transparent and semi-reflective mirrors again split the light transmitted or reflected by the second semi-transparent and semi-reflective mirrors (134), so that the split light is transmitted or reflected to the corresponding third pinhole arrays (135).

7. A method for applying the three-dimensional measurement device based on spectral dispersion as claimed in any one of claims 1 to 6, characterized in that: include: A line of incident light is outputted by the line light source component; The dispersive objective lens assembly disperses the incident linear light in the axial direction, so that light of different wavelengths is focused on corresponding measuring points at different heights of the measured object, and receives outgoing light of different wavelengths reflected from the measuring points; The outgoing light rays reflected after being focused on a plurality of first measuring points at different positions in the direction of the linear light source of the object to be measured pass through the first small holes corresponding to the first small holes on the first small hole array respectively, and the outgoing light rays reflected after being focused on a plurality of second measuring points at different positions in the direction of the linear light source of the object to be measured are focused and pass through the second small holes corresponding to the second small holes on the second small hole array and arranged staggered relative to the first small holes respectively; The outgoing light of different wavelengths passing through the small hole is focused onto the sensor by the spectroscopic imaging component to obtain a corresponding spectral image.

8. The three-dimensional measurement method based on spectral dispersion according to claim 7, characterized in that: The spectroscopic imaging component focuses the outgoing light rays of different wavelengths passing through the pinhole onto a sensor to obtain a corresponding spectral image, including: The first light splitting imaging component focuses the outgoing light passing through the first small hole onto the first sensor to obtain first image information; The second light splitting imaging component focuses the outgoing light passing through the second small hole onto the second sensor to obtain second image information; The first image information and the second image information are combined to obtain a detection image.

Images