A single-bar pressure maintaining device and pressure maintaining method for a microchannel laser

Abstract

The present invention relates to a single-bar pressure-maintaining device and method for a microchannel laser, and belongs to the field of semiconductor laser packaging technology. The device includes a base, a fixing frame, a cylinder, a lifting rod, a pressure plate, and a pressure detection device, wherein a fixing frame is provided on one side of the base, a cylinder is provided on the top of the fixing frame, the cylinder is connected to the lifting rod, the lower end of the lifting rod is connected to the pressure plate, a pressure detection device is provided on the base on the lower side of the pressure plate, a microchannel laser is provided in the pressure detection device, and the sealing performance of the microchannel laser under the action of air pressure is detected by the pressure detection device. The present invention has a simple structure and is easy to operate. It can quickly and accurately detect the sealing performance of the laser, screen out lasers with poor sealing and unqualified pressure maintenance, and improve production efficiency.

Description

Technical Field

[0001] The invention relates to a single-bar pressure maintaining device and a pressure maintaining method for a microchannel laser, belonging to the technical field of semiconductor laser packaging. Background Art

[0002] Due to the advantages of semiconductor lasers such as small size, light weight, high electro-optical conversion efficiency, long life and high reliability, they have gradually replaced the use of gas and solid lasers in fields such as communications, medical treatment, display, industrial production and security, and their application scope is also gradually expanding.

[0003] Microchannel semiconductor lasers have built-in cooling liquid channels, which make them more efficient in heat dissipation. Semiconductor lasers packaged with microchannels can operate in CW (continuous wave) and high-duty-cycle QCW (quadrant continuous wave) modes. Microchannel lasers generally have relatively high power and generate a large amount of heat during power-on. Therefore, it is necessary to set up a microchannel with good sealing performance inside the laser. Coolant with a certain flow rate and pressure is passed through the liquid inlet and outlet of the laser to dissipate the heat generated by the microchannel laser in a timely manner to prevent the laser from burning due to excessive temperature.

[0004] Microchannel lasers operate under special conditions and place high demands on sealing. The lasers must withstand a certain amount of pressure during operation. A loose seal can cause coolant leakage, contaminating and damaging the laser chip. Currently, there are no dedicated microchannel laser sealing detection devices. For example, Chinese patent CN106644251A discloses a laser gas pressure detection device. This device adjusts the compressor output voltage by detecting the gas pressure within the laser flow channel cavity to ensure stable laser operation, but it cannot be used to detect laser sealing.

[0005] The main reason affecting the sealing of microchannel lasers is poor sintering. Therefore, the commonly used sealing detection method for microchannel lasers is to observe the appearance of the lasers one by one through a high-power microscope and select the poorly sintered or damaged lasers. The detection efficiency is relatively low and it is very easy to cause misjudgment due to human factors. It is difficult to troubleshoot lasers with slight leaks. In addition, the operator needs to have direct contact with the laser during operation, which is very easy to cause product contamination and damage due to human factors.

[0006] In view of this, it is very necessary to design a device with simple structure, easy operation, and the ability to quickly and accurately detect the sealing performance of the laser. Summary of the Invention

[0007] In response to the shortcomings of the existing technology, the present invention provides a single-bar pressure-maintaining device for a microchannel laser, which has a simple structure and is easy to operate. It can quickly and accurately detect the sealing performance of the laser, screen out lasers with poor sealing and unqualified pressure maintenance, and improve production efficiency.

[0008] The present invention also provides a pressure maintaining method for the above-mentioned microchannel laser single-bar pressure maintaining device.

[0009] The technical solutions of the present invention are as follows:

[0010] A single-bar pressure maintaining device for a microchannel laser comprises a base, a fixing frame, a cylinder, a lifting rod, a pressure plate and a pressure detection device, wherein:

[0011] A fixing frame is provided on one side of the base, a cylinder is provided on the top of the fixing frame, the cylinder is connected to the lifting rod, the lower end of the lifting rod is connected to the pressure plate, a pressure detection device is provided on the base under the pressure plate, a microchannel laser is provided in the pressure detection device, and the sealing of the microchannel laser under the action of air pressure is detected by the pressure detection device.

[0012] Preferably, the pressure detection device includes a fixed seat, a pressure gauge and a hand valve. The fixed seat is a rectangular parallelepiped, a gas channel is arranged inside the fixed seat, a positioning groove is arranged in the middle position of the upper side of the fixed seat, and air hole I and air hole II are arranged in the positioning groove. Air hole I and air hole II are both connected to the gas channel. A pressure gauge is arranged on the side of the fixed seat, and the pressure gauge is connected to the gas channel. A hand valve is arranged on the side of the fixed seat on one side of the pressure gauge, and one end of the hand valve is connected to the gas channel, and the other end is connected to the air pipe.

[0013] Further preferably, the shape of the positioning groove is the same as that of the microchannel laser, the positions of pores I and II correspond to the positions of the liquid inlet and outlet holes of the microchannel laser, and the depth of the positioning groove is less than the thickness of the microchannel laser, ensuring the press-fit sealing of the pressure plate to the microchannel laser.

[0014] Preferably, the barometer is a digital pressure gauge with high precision and accurate measurement results. The digital pressure gauge is connected to the PLC control system, and the PLC control system is connected to the alarm. When the barometer pressure drops to a set range, the alarm is activated to prompt the operator that the microchannel laser seal is unqualified.

[0015] Preferably, grooves are provided on the liquid inlet and outlet of the microchannel laser, and sealing rings are provided in the grooves to improve the sealing performance.

[0016] Preferably, the lower end of the lifting rod is fixedly connected to the balance plate, and the two ends of the balance plate are movably connected to the upper end of the fixed frame through fixed rods. The balance plate is set horizontally, and the lower side of the balance plate is connected to the pressure plate through a column. The pressure plate is kept horizontal by the balance plate. The lifting rod will have a slight position offset during the lifting process and cannot be guaranteed to be always vertical up and down. If the lifting rod is directly connected to the pressure plate, the horizontality of the pressure plate will change, affecting the sealing effect of the pressure plate on the microchannel laser.

[0017] Preferably, a support plate is provided on the base, and a fixing frame and a pressure detection device are provided on the support plate. The height of the pressure detection device and the base is increased by the support plate, so as to facilitate the installation and use of the pressure gauge and the hand valve.

[0018] Preferably, two pressure detection devices are provided on the base to improve detection efficiency.

[0019] Preferably, feet are provided at the four corners of the lower end of the base to facilitate fixation.

[0020] The method for using the above-mentioned microchannel laser single-bar pressure maintaining device is as follows:

[0021] (1) Place the microchannel laser with the groove facing upward into the positioning groove of the fixing base, and seal the liquid inlet and outlet with air hole I and air hole II respectively;

[0022] (2) placing a sealing ring on the groove of the liquid inlet and outlet of the microchannel laser respectively;

[0023] (3) Start the cylinder, which pushes the lifting rod downward, causing the pressure plate to slowly press on the sealing ring to seal the microchannel laser;

[0024] (4) Open the manual valve and introduce compressed air or nitrogen into the pressure detection device until the pressure gauge reading reaches the set value;

[0025] (5) Close the manual valve and keep the microchannel laser under pressure in the pressure detection device for 10-30 seconds. If the sealing of the microchannel laser is not good, the gas will leak out. When the pressure value displayed by the pressure gauge drops to the set range, an automatic alarm will be sounded and unqualified products will be rejected.

[0026] (6) After the pressure maintenance is completed, open the manual valve to discharge the gas in the pressure detection device;

[0027] (7) The cylinder is closed, and the cylinder drives the pressure plate to automatically reset. Then the microchannel laser is taken out and placed in the material tray to complete the single-bar pressure maintenance work of the microchannel laser.

[0028] The beneficial effects of the present invention are:

[0029] 1. The present invention has a simple structure and is easy to operate. It can quickly and accurately detect the sealing performance of lasers, screen out lasers with poor sealing and unqualified pressure maintenance, and improve production efficiency.

[0030] 2. The present invention can automatically detect the sealing of the microchannel laser by introducing gas of set pressure into the pressure detection device, avoiding misjudgment of product detection results caused by human factors, and making the accuracy rate of microchannel laser sealing detection reach more than 98%.

[0031] 3. Compared with the previous manual appearance inspection of the sealing of the microchannel laser, the present invention is simpler to operate. During the entire operation process, the operator does not have direct contact with the product, avoiding contamination and damage to the product caused by human factors, thereby effectively improving the yield of the microchannel laser sealing inspection and reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of the present invention;

[0033] Figure 2 It is a schematic diagram of the cylinder structure of the present invention;

[0034] Figure 3 It is a structural schematic diagram of the pressure detection device of the present invention;

[0035] Figure 4 Schematic diagram of the microchannel laser structure of the present invention;

[0036] Figure 5 This is a schematic diagram of the partial structure of the present invention in use;

[0037] Among them: 1. Base; 2. Pressure gauge; 3. Fixed seat; 4. Hand valve; 5. Anchor; 6. Pressure plate; 7. Fixed rod; 8. Lifting rod; 9. Cylinder; 10. Fixed bracket; 11. Quick connector I; 12. Quick connector II; 13. Switch; 14. Quick connector; 15. Positioning groove; 16. Air hole I; 17. Air hole II; 18. Microchannel laser; 19. Groove; 20. Liquid inlet; 21. Liquid outlet; 22. Balance plate; 23. Column; 24. Support plate. DETAILED DESCRIPTION

[0038] The present invention will be further described below with reference to embodiments and accompanying drawings, but is not limited thereto.

[0039] Example 1:

[0040] like Figure 1-5 As shown, this embodiment provides a microchannel laser single bar pressure maintaining device, including a base 1, a fixing frame 10, a cylinder 9, a lifting rod 8, a pressure plate 6 and a pressure detection device, wherein:

[0041] A fixed frame 10 is mounted on one side of the base, with a cylinder 9 mounted on top. The cylinder is connected to the air pipe via quick-connect connectors I11 and II12. The cylinder 9 is connected to a lifting rod 8, the lower end of which is connected to a pressure plate 6. A pressure detection device is mounted on the base below the pressure plate 6. A microchannel laser 18 is housed within the pressure detection device, which detects the sealing performance of the microchannel laser 18 under air pressure. The pressure plate is made of a metal material with a smooth lower surface.

[0042] The pressure detection device includes a fixed base 3, a pressure gauge 2, and a hand valve 4. The fixed base 3 is a rectangular parallelepiped, with a gas channel provided inside. A positioning groove 15 is provided in the middle of the upper side of the fixed base 3. Air holes I16 and II17 are provided in the positioning groove 15. Air holes I16 and II17 are both connected to the gas channel. A pressure gauge 2 is provided on the side of the fixed base 3, which is connected to the gas channel. A hand valve 4 is provided on the side of the fixed base next to the pressure gauge 2. One end of the hand valve 4 is connected to the gas channel, and the other end is connected to the air pipe. The hand valve is equipped with a switch 13, and one side of the switch 13 is equipped with a quick connector 14 for connecting to the air pipe.

[0043] The shape of the positioning groove 15 is the same as that of the microchannel laser 18. The positions of the air hole I16 and the air hole II17 correspond to the positions of the liquid inlet hole 20 and the liquid outlet hole 21 of the microchannel laser. The depth of the positioning groove 15 is less than the thickness of the microchannel laser, ensuring the press-fit sealing of the pressure plate to the microchannel laser.

[0044] Barometer 2 uses a digital pressure gauge with high precision and accurate measurement results. The digital pressure gauge is connected to the PLC control system, and the PLC control system is connected to the alarm. When the pressure of the barometer drops to the set range, the alarm is activated to prompt the operator that the microchannel laser seal is unqualified.

[0045] Grooves 19 are provided on the liquid inlet 20 and the liquid outlet 21 of the microchannel laser, and sealing rings are provided in the grooves to improve the sealing performance.

[0046] The method for using the above-mentioned microchannel laser single-bar pressure maintaining device is as follows:

[0047] (1) Place the microchannel laser with the groove facing upward into the positioning groove of the fixing base, and seal the liquid inlet and outlet with air hole I and air hole II respectively;

[0048] (2) placing a sealing ring on the groove of the liquid inlet and outlet of the microchannel laser respectively;

[0049] (3) Start the cylinder, which pushes the lifting rod downward, causing the pressure plate to slowly press on the sealing ring to seal the microchannel laser;

[0050] (4) Open the manual valve and introduce compressed air or nitrogen into the pressure detection device until the pressure gauge reading reaches the set value;

[0051] (5) Close the manual valve and keep the microchannel laser under pressure in the pressure detection device for 10-30 seconds. If the sealing of the microchannel laser is not good, the gas will leak out. When the pressure value displayed by the pressure gauge drops to the set range, an automatic alarm will be sounded and unqualified products will be rejected.

[0052] (6) After the pressure maintenance is completed, open the manual valve to discharge the gas in the pressure detection device;

[0053] (7) The cylinder is closed, and the cylinder drives the pressure plate to automatically reset. Then the microchannel laser is taken out and placed in the material tray to complete the single-bar pressure maintenance work of the microchannel laser.

[0054] Example 2:

[0055] A single-bar pressure-maintaining device for a microchannel laser has a structure as described in Example 1, except that the lower end of a lifting rod 8 is fixedly connected to a balance plate 22, and both ends of the balance plate 22 are movably connected to the upper end of a fixed frame 10 via a fixing rod 7. The balance plate 22 is arranged horizontally, and the lower side of the balance plate 22 is connected to a pressure plate 6 via a column 23. The pressure plate is kept horizontal by the balance plate 22. The lifting rod will undergo slight positional deviation during the lifting process and cannot be guaranteed to always be vertical. Direct connection of the lifting rod to the pressure plate will cause the horizontality of the pressure plate to change, thereby affecting the sealing effect of the pressure plate on the microchannel laser.

[0056] Example 3:

[0057] A single-bar pressure-maintaining device for a microchannel laser has a structure as described in Example 1, except that a support plate 24 is provided on the base 1, and a fixing frame and a pressure detection device are provided on the support plate 24. The support plate increases the height of the pressure detection device and the base, facilitating the installation and use of the pressure gauge and the hand valve.

[0058] Example 4:

[0059] A single-bar pressure maintaining device for a microchannel laser has a structure as described in Example 1, except that two pressure detection devices are provided on the base 1 to improve detection efficiency, and feet 5 are provided at the four corners of the lower end of the base 1 for easy fixation.

Claims

1. A single-bar pressure maintaining device for a microchannel laser, characterized in that: It includes a base, a fixing frame, a cylinder, a lifting rod, a pressure plate and a pressure detection device, wherein: A fixing frame is provided on one side of the base, a cylinder is provided on the top of the fixing frame, the cylinder is connected to a lifting rod, the lower end of the lifting rod is connected to a pressure plate, a pressure detection device is provided on the base under the pressure plate, a microchannel laser is provided in the pressure detection device, and the sealing performance of the microchannel laser under the action of air pressure is detected by the pressure detection device; The pressure detection device includes a fixing seat, a pressure gauge and a hand valve. The fixing seat is a rectangular parallelepiped, and a gas channel is provided inside the fixing seat. A positioning groove is provided in the middle position of the upper side of the fixing seat. Air holes I and air holes II are provided in the positioning groove. Air holes I and air holes II are both connected to the gas channel. A pressure gauge is provided on the side of the fixing seat, and the pressure gauge is connected to the gas channel. A hand valve is provided on the side of the fixing seat on one side of the pressure gauge, and one end of the hand valve is connected to the gas channel and the other end is connected to the air pipe. The lower end of the lifting rod is fixedly connected to the balance plate, and both ends of the balance plate are movably connected to the upper end of the fixed frame through fixed rods. The balance plate is set horizontally, and the lower side of the balance plate is connected to the pressure plate through a column; A supporting plate is arranged on the base, and a fixing frame and a pressure detection device are arranged on the supporting plate.

2. The microchannel laser single-bar pressure maintaining device according to claim 1, characterized in that: The shape of the positioning groove is the same as that of the microchannel laser. The positions of the air hole I and the air hole II correspond to the positions of the liquid inlet and outlet holes of the microchannel laser. The depth of the positioning groove is less than the thickness of the microchannel laser.

3. The microchannel laser single-bar pressure maintaining device according to claim 2, characterized in that: The air pressure gauge is a digital pressure gauge, which is connected to the PLC control system, and the PLC control system is connected to the alarm.

4. The microchannel laser single-bar pressure maintaining device according to claim 3, characterized in that: Grooves are arranged on the liquid inlet and outlet of the microchannel laser.

5. The microchannel laser single-bar pressure maintaining device according to claim 1, characterized in that: Two pressure detection devices are set on the base.

6. The microchannel laser single-bar pressure maintaining device according to claim 1, characterized in that: Footings are provided at the four corners of the lower end of the base.

7. A method for using the microchannel laser single-bar pressure maintaining device according to claim 4, characterized in that: The steps are as follows: (1) Place the microchannel laser with the groove facing upward into the positioning groove of the fixing base, and seal the liquid inlet and outlet with air hole I and air hole II respectively; (2) placing a sealing ring on the groove of the liquid inlet and outlet of the microchannel laser respectively; (3) Start the cylinder, which pushes the lifting rod downward, causing the pressure plate to slowly press on the sealing ring to seal the microchannel laser; (4) Open the manual valve and introduce compressed air or nitrogen into the pressure detection device until the pressure gauge reading reaches the set value; (5) Close the manual valve and keep the microchannel laser under pressure in the pressure detection device for 10-30 seconds. If the sealing of the microchannel laser is not good, the gas will leak out. When the pressure value displayed by the pressure gauge drops to the set range, an automatic alarm will be sounded and unqualified products will be rejected. (6) After the pressure maintenance is completed, open the manual valve to discharge the gas in the pressure detection device; (7) The cylinder is closed, and the cylinder drives the pressure plate to automatically reset. Then the microchannel laser is taken out and placed in the material tray to complete the single-bar pressure maintenance work of the microchannel laser.

Images