Differential vacuum system control device and differential vacuum system

Abstract

The present invention relates to a differential vacuum system control device and a differential vacuum system, wherein the differential vacuum system control device comprises: a valve body, wherein the valve body is provided with a perforation, wherein the valve body is used to be installed on the outer wall of a cavity, wherein the perforation is connected to a cavity; and a valve assembly, wherein the valve assembly comprises a valve stem, a valve plate, a knob and a valve sleeve, wherein the valve sleeve is connected to the valve body, wherein the valve stem extends into the cavity through the valve sleeve and the perforation, wherein the knob is in transmission cooperation with the valve stem, wherein the valve plate is connected to an end of the valve stem away from the knob, wherein the knob drives the valve stem to move in a height direction, so that the ion source chamber and the mass analyzer chamber are switched to a connected or isolated state. Such an operation mode can effectively shorten the restart time of a mass spectrometer after maintenance, and save manpower, energy and machine loss costs, and has a simple structure, convenient operation and no pollution to the vacuum environment in the cavity.

Description

Technical Field

[0001] The present invention relates to the technical field of precision mass spectrometers, and in particular to a differential vacuum system control device and a differential vacuum system. Background Art

[0002] Atmospheric aerosols have a huge impact on the environment and human health, and are receiving more and more attention. The sources and evolution of atmospheric aerosols are complex, and it is difficult to conduct in-depth research on their source characteristics, physical and chemical properties, and evolution mechanisms. As a new type of aerosol analysis instrument, the single particle aerosol mass spectrometer can measure the size and chemical composition of particles at the level of individual particles, which plays an important role in studying the types, mixing states, evolution processes, and source analysis of atmospheric particulate matter.

[0003] In the precision mass spectrometer industry, both the ion source chamber and the mass analyzer chamber are in a high vacuum environment (10-5pa), and the space difference between the two chambers is large, and the time-of-flight mass analyzer chamber is much larger than the ion source chamber. Due to the ion source ionization aging loss, the smaller ion source chamber needs to be shut down regularly to replace the ion source. However, due to the connection between the two chambers, it often takes more than twelve hours to restart the machine to achieve the required stable high vacuum test environment, resulting in great cost and time loss. Summary of the invention

[0004] Based on this, it is necessary to provide a differential vacuum system control device and a differential vacuum system, which can effectively shorten the instrument startup time, save manpower, energy, and machine loss costs, and improve detection efficiency.

[0005] The technical solution is as follows: a differential vacuum system control device, the differential vacuum system control device comprising: a valve body, the valve body is provided with a through hole, the valve body is used to be installed on the outer wall of the cavity, the through hole is connected to the chamber; a valve assembly, the valve assembly comprises a valve stem, a valve plate, a knob and a valve sleeve, the valve sleeve is connected to the valve body, the valve stem passes through the valve sleeve and the through hole and extends into the chamber, the knob is matched with the valve stem in transmission, the valve plate is connected to one end of the valve stem away from the knob, and the knob drives the valve stem to move in the height direction, so that the ion source chamber and the mass analyzer chamber are switched between a connected or isolated state.

[0006] The above differential vacuum system control device is installed on the cavity. When the ionization source needs to be repaired and replaced, the knob is operated. Due to the transmission cooperation between the knob and the valve stem, the valve stem moves downward in the perforation, driving the valve plate to move downward, thereby physically isolating the ion source chamber and the mass analyzer chamber space, and then the molecular pump of the ion source chamber is stopped and slowly deflated. When the ion source chamber reaches the same pressure as the external atmospheric pressure, the ion source chamber is disassembled separately to replace the ion source. After the ion source is replaced and the ion source chamber is assembled, the high vacuum of the ion source chamber is extracted. After the vacuum gauge is tested to reach the preset vacuum degree, the knob is rotated to raise the valve plate, so that the ion source chamber and the mass analyzer chamber are connected, and normal testing can be carried out. Such an operation method can effectively shorten the restart time of the mass spectrometer after maintenance, and save manpower, energy, and machine loss costs. The structure is simple to process, easy to operate, and has no pollution to the vacuum environment in the cavity. At the same time, the safety factor of the vacuum differential system is improved, and the working reliability is improved.

[0007] In one embodiment, a first matching portion is provided at one end of the valve sleeve, the knob is provided with a first matching groove, the first matching portion is rotationally matched with the first matching groove, the valve stem is provided with a threaded portion, the valve sleeve is provided with a threaded hole, and the threaded portion is engaged with the threaded hole.

[0008] In one of the embodiments, the differential vacuum system control device further includes a sealing assembly, wherein the sealing assembly is sleeved on the valve stem, and the valve stem is sealed with the valve body through the sealing assembly.

[0009] In one embodiment, the sealing member includes a first sealing ring, a second sealing ring, sealing grease and a sealing ring. The first sealing ring and the second sealing ring are respectively arranged on opposite sides of the sealing ring, and the sealing grease is applied between the first sealing ring, the second sealing ring, the sealing ring and the valve stem.

[0010] In one of the embodiments, the differential vacuum system control device further includes a valve seat, and the valve seat is used to be arranged between the valve body and the cavity.

[0011] In one of the embodiments, a second matching portion is provided at one end of the valve stem away from the knob, and a second matching groove is provided on the valve plate, and the second matching portion is rotationally matched with the second matching groove.

[0012] In one embodiment, the differential vacuum system control device also includes a fixed plate, which is used to be set in the ion source chamber. The fixed plate is provided with a through hole, which is used to connect the ion source chamber and the mass analyzer chamber. The valve plate can be connected to the through hole in an openable and closable manner.

[0013] In one embodiment, the differential vacuum system control device also includes an annular pole piece, which is arranged in the mass analyzer chamber, and the annular pole piece and the fixed plate are respectively arranged at opposite ends of the valve plate to form a guide groove, and the valve plate is used to move in the guide groove.

[0014] In one of the embodiments, the fixing plate and / or the annular pole piece is provided with a sealing member, and the valve plate is in sealing cooperation with the sealing member.

[0015] A differential vacuum system comprises a cavity and a differential vacuum system control device as described in any one of the above, wherein the cavity is provided with an ion source chamber and a mass analyzer chamber, and the valve plate can be openably and closably arranged between the ion source chamber and the mass analyzer chamber.

[0016] In the above differential vacuum system, when the ionization source needs to be repaired and replaced, the knob is operated. Due to the transmission cooperation between the knob and the valve stem, the valve stem moves downward in the perforation, driving the valve plate to move downward, thereby physically isolating the ion source chamber and the mass analyzer chamber space, and then the molecular pump of the ion source chamber is stopped and slowly deflated. When the ion source chamber reaches the same pressure as the external atmospheric pressure, the ion source chamber is disassembled separately to replace the ion source. After the ion source is replaced and the ion source chamber is assembled, the high vacuum of the ion source chamber is extracted. After the vacuum gauge is tested to reach the preset vacuum degree, the knob is rotated to raise the valve plate, so that the ion source chamber and the mass analyzer chamber are connected, and normal testing can be carried out. Such an operation method can effectively shorten the restart time of the mass spectrometer after maintenance, and save manpower, energy, and machine loss costs. The structure is simple to process, easy to operate, and has no pollution to the vacuum environment in the chamber. At the same time, the safety factor of the vacuum differential system is improved, and the working reliability is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 is a schematic diagram of the internal structure of a differential vacuum system control device described in one embodiment;

[0020] Figure 2is a top view of a differential vacuum system control device described in one embodiment;

[0021] Figure 3 A schematic diagram of the installation position of a differential vacuum system control device described in one embodiment;

[0022] Figure 4 for Figure 3 A partial enlarged schematic diagram of the center circle A.

[0023] Description of reference numerals:

[0024] 100. differential vacuum system control device; 110. valve body; 111. perforation; 120. valve assembly; 121. valve stem; 1211. second matching part; 122. valve plate; 1221. second matching groove; 123. knob; 1231. first matching groove; 124. valve sleeve; 1241. first matching part; 130. sealing assembly; 131. first sealing ring; 132. second sealing ring; 133. sealing ring; 140. valve seat; 150. fixing plate; 151. through hole; 160. annular pole piece; 170. sealing element; 180. guide groove; 200. differential vacuum system; 210. ion source chamber; 220. mass analyzer chamber; 230. cavity. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0026] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0028] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0030] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0031] See also Figure 1 and Figure 2 , Figure 1 FIG. 1 shows a schematic diagram of the internal structure of a differential vacuum system control device 100 according to an embodiment of the present invention; Figure 2The top view of the differential vacuum system control device 100 described in one embodiment of the present invention is shown. One embodiment of the present invention provides a differential vacuum system control device 100, and the differential vacuum system control device 100 includes: a valve body 110 and a valve assembly 120. The valve body 110 is provided with a through hole 111, and the valve body 110 is used to be installed on the outer wall of the cavity 230, and the through hole 111 is connected to the chamber. The valve assembly 120 includes a valve stem 121, a valve plate 122, a knob 123 and a valve sleeve 124, the valve sleeve 124 is connected to the valve body 110, the valve stem 121 passes through the valve sleeve 124 and the through hole 111 and extends into the chamber, the knob 123 is in transmission cooperation with the valve stem 121, the valve plate 122 is connected to the end of the valve stem 121 away from the knob 123, and the knob 123 drives the valve stem 121 to move in the height direction, so that the ion source chamber 210 and the mass analyzer chamber 220 are switched between the connected or isolated state.

[0032] In order to further understand and illustrate the movement of the valve stem 121 in the height direction, Figure 1 For example, the height direction of the valve stem 121 is Figure 1 The direction indicated by any arrow on the center line S1.

[0033] It should be noted that the knob 123 drives the valve stem 121 to move in the height direction, so that the ion source chamber 210 and the mass analyzer chamber 220 are switched between the connected or isolated state. It should be understood that the knob 123 can be rotated manually or automatically. Since the valve stem 121 and the knob 123 are in transmission cooperation, after the knob 123 is rotated, the valve stem 121 moves in its height direction. In the initial position, the valve ion source chamber 210 and the mass analyzer chamber 220 are in a connected state. After the valve stem 121 moves downward, the through hole 151 between the ion source chamber 210 and the mass analyzer chamber 220 is blocked, so that the ion source chamber 210 and the mass analyzer chamber 220 are isolated from each other without gas circulation.

[0034] The differential vacuum system control device 100 is installed on the chamber 230. When the ionization source needs to be repaired or replaced, the knob 123 is operated. Since the knob 123 and the valve stem 121 are in transmission cooperation, the valve stem 121 moves downward in the perforation 111, driving the valve plate 122 to move downward, thereby physically isolating the ion source chamber 210 from the mass analyzer chamber 220 space. Then, the molecular pump of the ion source chamber 210 is stopped and slowly deflated. When the ion source chamber 210 reaches the same pressure as the external atmospheric pressure, the ion source chamber 210 is disassembled separately to replace the ion source. After the ion source is replaced and the ion source chamber 210 is assembled, the high vacuum extraction of the ion source chamber 210 is performed. After the vacuum gauge test reaches the preset vacuum degree, the knob 123 is rotated to raise the valve plate 122, so that the ion source chamber 210 and the mass analyzer chamber 220 are connected, and normal testing can be performed. This operation method can effectively shorten the restart time of the mass spectrometer after maintenance, and save manpower, energy, and machine loss costs. It has simple structure processing, convenient operation, and no pollution to the vacuum environment in the cavity. At the same time, it improves the safety factor of the vacuum differential system and improves working reliability.

[0035] Optionally, the transmission cooperation mode between the knob 123 and the valve stem 121 can be belt transmission, chain transmission, gear meshing, threaded meshing or other transmission cooperation modes.

[0036] Specifically, see Figure 1 , a first matching portion 1241 is provided at one end of the valve sleeve 124, and a first matching groove 1231 is provided at the knob 123, and the first matching portion 1241 is rotationally matched with the first matching groove 1231. The valve stem 121 is provided with a threaded portion, and the valve sleeve 124 is provided with a threaded hole, and the threaded portion is meshed with the threaded hole. In this way, when the knob 123 rotates, since the first matching portion 1241 is rotationally matched with the first matching groove 1231, the position of the knob 123 remains unchanged, and the valve stem 121 drives the valve plate 122 to move up and down, thereby realizing the switching between the connected state and the isolated state, which is simple to operate, highly reliable, and can also conveniently realize automatic and manual control of opening and closing. This embodiment only provides a transmission matching method between a knob 123 and a valve stem 121, but is not limited to this.

[0037] In one embodiment, see Figure 1 The differential vacuum system control device 100 further includes a sealing component 130, which is sleeved on the valve stem 121, and the valve stem 121 is sealed with the valve body 110 through the sealing component 130. In this way, the sealing performance between the differential vacuum system control device 100 and the cavity 230 can be guaranteed, and the overall quality and working reliability of the differential vacuum system 200 can be improved.

[0038] Optionally, the sealing component 130 may be a sealant, a sealing gasket, a sealing ring, a sealing plate or other sealing structures, or a combination of two or more sealing components.

[0039] In one embodiment, the sealing member 170 includes a first sealing ring 131, a second sealing ring 132, sealing grease and a sealing ring 133. The first sealing ring 131 and the second sealing ring 132 are respectively arranged on opposite sides of the sealing ring 133, and the sealing grease is applied between the first sealing ring 131, the second sealing ring 132, the sealing ring 133 and the valve stem 121. Specifically, the first sealing ring 131 and the second sealing ring 132 are both fluororubber O-type coils. The sealing ring 133 is a sealing copper ring with a lubrication groove. In this way, the combination of the first sealing ring 131, the second sealing ring 132 and the sealing ring 133 is conducive to ensuring the airtightness between the differential vacuum system control device 100 and the vacuum chamber, and the sealing grease can also lubricate the valve stem 121, which can ensure the smoothness of the valve stem 121 during linear motion. This embodiment only provides a specific implementation of a sealing assembly 130, but is not limited thereto.

[0040] In one embodiment, the differential vacuum system control device 100 further includes a valve seat 140, which is used to be disposed between the valve body 110 and the cavity 230. In this way, the installation of the valve plate 122 and the valve stem 121 is facilitated, which is conducive to improving the sealing effect and the movement reliability of the valve stem 121.

[0041] Optionally, the valve seat 140 , the valve stem 121 , the valve body 110 , and the valve plate 122 may be made of glass, plastic, metal, rubber, silicone, or other materials, respectively.

[0042] Specifically, the material of the valve stem 121 is 304 stainless steel (SUS304). The material of the valve body 110 is 304 stainless steel (SUS304). In this way, 304 stainless steel is environmentally friendly and hygienic, and has good wear resistance, low temperature resistance, thermal expansion performance and thermal insulation performance. The valve stem 121 extends into the vacuum chamber 230 without polluting the high vacuum chamber 230, which is conducive to improving the reliability of the experimental results. The material of the valve seat 140 is polytetrafluoroethylene (PTFE for short). In this way, it has strong chemical stability, excellent high and low temperature performance, good electrical insulation, non-adhesion and weather resistance, and good lubricity, which can reduce the friction of the valve stem 121 when it moves on the valve seat 140, thereby reducing the wear of the valve seat 140 and increasing the service life of the valve seat 140. The material of the valve plate 122 is polyetheretherketone (PEEK), which has good high temperature resistance, high mechanical strength, good impact resistance and fatigue resistance, and will not pollute the high vacuum chamber 230, which is conducive to ensuring the structural stability and working reliability of the differential vacuum system control device 100. This embodiment only provides a specific material selection for a valve seat 140, a valve stem 121, a valve body 110, and a valve plate 122, but is not limited thereto.

[0043] In one embodiment, see Figure 1 The end of the valve stem 121 away from the knob 123 is provided with a second matching portion 1211, and the valve plate 122 is provided with a second matching groove 1221, and the second matching portion 1211 is rotationally matched with the second matching groove 1221. In this way, when the valve stem 121 moves up and down, the second matching groove 1221 in the valve plate 122 is rotationally matched with the second matching portion 1211 on the valve stem 121, which can prevent the valve plate 122 from rotating when the valve stem 121 rotates, thereby improving working stability and reliability.

[0044] In other embodiments, the valve stem 121 may also include a first segment and a second segment that are mutually rotatably matched, the first segment is provided with a threaded portion, the knob 123 is threadedly matched with the first segment, the cross-sectional shape of the second segment is square, and the cross-sectional shape of the through hole 111 is also square, and the valve plate 122 is connected to the second segment. In this way, when the first segment rotates, the second segment is driven to move up and down, and the through hole 111 with a square cross-sectional shape can limit the second segment with a square cross-sectional shape, so that the second segment moves up and down and does not rotate with the first segment, ensuring that the valve plate 122 also moves up and down.

[0045] Figure 3 A schematic diagram showing the installation position of a differential vacuum system control device 100 in one embodiment of the present invention is shown; Figure 4 The present invention is shown Figure 3A partial enlarged schematic diagram at the center circle A, in one embodiment, the differential vacuum system control device 100 also includes a fixed plate 150, the fixed plate 150 is used to be arranged in the ion source chamber 210, the fixed plate 150 is provided with a through hole 151, the through hole 151 is used to connect the ion source chamber 210 and the mass analyzer chamber 220, and the valve plate 122 can be connected to the through hole 151 in an openable and closable manner. Specifically, the fixed plate 150 is a conical fixed plate 150. In this way, the fixed plate 150 can provide support for the valve assembly 120, and can ensure the movement stability of the valve plate 122 and the valve stem 121 under vacuum negative pressure conditions. The through hole 151 of the conical fixed plate 150 enables the ion source chamber 210 and the mass analyzer chamber 220 to form a differential vacuum system 200, which is conducive to ensuring the precise control of ions during the flight process.

[0046] In one embodiment, see Figure 3 and Figure 4 The differential vacuum system control device 100 further includes an annular pole piece 160, which is disposed in the mass analyzer chamber 220, and the annular pole piece 160 and the fixed plate 150 are respectively disposed at opposite ends of the valve plate 122 to form a guide groove 180, and the valve plate 122 is used to move in the guide groove 180. Specifically, the annular pole piece 160 is an analyzer annular pole piece 160. In this way, the annular pole piece 160 and the fixed plate 150 are relatively disposed to form the guide groove 180, which allows the valve plate 122 to move up and down, and plays a limiting and guiding role for the movement of the valve plate 122, thereby facilitating manual and automatic control of the valve assembly 120 and improving the movement reliability of the valve plate 122.

[0047] In one embodiment, see Figure 4 The fixed plate 150 and / or the annular pole piece 160 are provided with a seal 170, and the valve plate 122 is sealed with the seal 170. In this way, the sealing performance between the valve plate 122 and the ion source chamber 210 and the mass analyzer chamber 220 can be improved, and gas leakage between the chambers in the differential vacuum system 200 can be avoided.

[0048] It should be noted that the fixing plate 150 and / or the annular pole piece 160 is provided with a seal 170, which should be understood as there are three ways of setting the seal 170. The first is that the fixing plate 150 is provided with a seal 170; the second is that the annular pole piece 160 is provided with a seal 170; the third is that both the fixing plate 150 and the annular pole piece 160 are provided with a seal 170.

[0049] Optionally, the sealing member 170 may be a sealant, a sealing gasket, a sealing ring, a sealing plate or other sealing components, or a combination of two or more sealing components.

[0050] Specifically, see Figure 4The sealing member 170 is a sealing ring, which is sealed with the outer wall of the valve plate 122. In this way, when the valve plate 122 moves downward, it passes through the sealing ring, and is sealed with the fixing plate 150 and the annular pole piece 160 through the sealing ring, which is conducive to improving the sealing effect. This embodiment only provides a specific implementation of the sealing member 170, but is not limited thereto.

[0051] For further information, see Figure 4 There are more than two sealing members 170, and the more than two sealing members 170 are respectively arranged on opposite sides of the valve plate 122. In this way, when the valve plate 122 moves downward, it is respectively sealed with the two sealing members 170, which is conducive to further improving the sealing effect.

[0052] In one implementation, see Figure 3 and Figure 4 A differential vacuum system 200 includes a cavity 230 and any one of the differential vacuum system control devices 100 described above. The cavity 230 is provided with an ion source chamber 210 and a mass analyzer chamber 220. A valve plate 122 can be opened and closed between the ion source chamber 210 and the mass analyzer chamber 220.

[0053] When the differential vacuum system 200 needs to be repaired or replaced with an ion source, the knob 123 is operated. Due to the transmission cooperation between the knob 123 and the valve stem 121, the valve stem 121 moves downward in the perforation 111, driving the valve plate 122 to move downward, thereby physically isolating the space between the ion source chamber 210 and the mass analyzer chamber 220. Then, the molecular pump of the ion source chamber 210 is stopped and the air is slowly released. When the ion source chamber 210 reaches the same pressure as the external atmospheric pressure, the ion source chamber 210 is disassembled separately to replace the ion source. After the ion source is replaced and the ion source chamber 210 is assembled, the high vacuum of the ion source chamber 210 is extracted. After the vacuum gauge is tested to reach a preset vacuum degree, the knob 123 is rotated to raise the valve plate 122, so that the ion source chamber 210 and the mass analyzer chamber 220 are connected, and normal testing can be performed. This operation method can effectively shorten the restart time of the mass spectrometer after maintenance, and save manpower, energy, and machine loss costs. It has simple structure processing, convenient operation, and no pollution to the vacuum environment in the cavity. At the same time, it improves the safety factor of the vacuum differential system and improves working reliability.

[0054] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A differential vacuum system control device, characterized in that: The differential vacuum system control device comprises: A valve body, wherein the valve body is provided with a through hole, the valve body is used to be installed on the outer wall of the cavity, and the through hole is communicated with the cavity; A valve assembly, the valve assembly comprising a valve stem, a valve plate, a knob and a valve sleeve, the valve sleeve being connected to the valve body, the valve stem passing through the valve sleeve and the through hole and extending into the chamber, the knob being in transmission cooperation with the valve stem, the valve plate being connected to an end of the valve stem away from the knob, the knob driving the valve stem to move in a height direction, so that the ion source chamber and the mass analyzer chamber are switched between a connected state or an isolated state; The valve stem includes a first section and a second section that are rotatably matched with each other. The first section is provided with a threaded portion, and the knob is threadedly matched with the first section. The cross-sectional shape of the second section is square, and the cross-sectional shape of the perforation is also square. The valve plate is connected to the second section.

2. The differential vacuum system control device according to claim 1, characterized in that: A first matching portion is provided at one end of the valve sleeve, and the knob is provided with a first matching groove, the first matching portion is rotationally matched with the first matching groove, the valve stem is provided with a threaded portion, and the valve sleeve is provided with a threaded hole, and the threaded portion is meshed with the threaded hole.

3. The differential vacuum system control device according to claim 1, characterized in that: The differential vacuum system control device further comprises a sealing assembly, wherein the sealing assembly is sleeved on the valve stem, and the valve stem is sealed and matched with the valve body through the sealing assembly.

4. The differential vacuum system control device according to claim 3, characterized in that: The sealing assembly includes a first sealing ring, a second sealing ring, sealing grease and a sealing ring. The first sealing ring and the second sealing ring are respectively arranged on opposite sides of the sealing ring, and the sealing grease is coated between the first sealing ring, the second sealing ring, the sealing ring and the valve stem.

5. The differential vacuum system control device according to claim 1, characterized in that: The differential vacuum system control device further includes a valve seat, which is used to be arranged between the valve body and the cavity.

6. The differential vacuum system control device according to claim 1, characterized in that: A second matching portion is provided at one end of the valve stem away from the knob, and a second matching groove is provided on the valve plate. The second matching portion is rotationally matched with the second matching groove.

7. The differential vacuum system control device according to claim 1, characterized in that: The differential vacuum system control device also includes a fixed plate, which is used to be set in the ion source chamber. The fixed plate is provided with a through hole, which is used to connect the ion source chamber and the mass analyzer chamber. The valve plate can be connected to the through hole in an openable and closable manner.

8. The differential vacuum system control device according to claim 7, characterized in that: The differential vacuum system control device also includes an annular pole piece, which is arranged in the mass analyzer chamber, and the annular pole piece and the fixed plate are respectively arranged at opposite ends of the valve plate to form a guide groove, and the valve plate is used to move in the guide groove.

9. The differential vacuum system control device according to claim 8, characterized in that: The fixing plate and / or the annular pole piece are provided with a sealing member, and the valve plate is in sealing cooperation with the sealing member.

10. A differential vacuum system, characterized in that: The differential vacuum system includes a cavity and a differential vacuum system control device as described in any one of claims 1 to 9, wherein the cavity is provided with an ion source chamber and a mass analyzer chamber, and the valve plate can be openably and closably arranged between the ion source chamber and the mass analyzer chamber.

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