A magnetically controlled automatic leveling device
Through the magnetron automatic leveling device, the adaptive leveling of the tip fixture is achieved using the magnetic pole assembly and the detection and control mechanism, which solves the problems of low leveling accuracy and unstable structure in the prior art, and improves the overall accuracy and reliability.
Patent Information
- Application Number
- CN202210748789.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-06-28
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2042-06-28
AI Technical Summary
In the prior art, the leveling accuracy is not high, and the device structure is unstable due to abnormal power failure after leveling.
Magnetic control automatic leveling device is adopted, including an adaptive leveling mechanism, a detection control mechanism, a driving mechanism and a locking mechanism. Through the relatively arranged first magnetic pole assembly and second magnetic pole assembly, the current direction is controlled to generate repulsion or attraction, and the detection and control mechanism detects pressure in real time and controls the movement of the driving mechanism to realize adaptive leveling and locking of the suction head fixture.
The leveling accuracy of the suction head fixture and mounting plane is improved, ensuring the stability and reliability of the device after power failure.
Smart Images

Figure CN115036242B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of chip mounting fixture correction, and in particular to a magnetically controlled automatic leveling device. Background Art
[0002] In the manufacturing field, it is usually necessary to use a suction head to hold a jig to pick up materials for placement or polishing, especially in the field of high-precision SMT assembly and flip-chip packaging. The parallelism between the end face of the jig held by the suction head and the base surface has a very important impact on the implementation of the process and product quality.
[0003] At present, the industry mostly controls the verticality of the inner hole of the suction head to achieve parallelism between the end face of the suction head and the base surface. However, this design method is a one-time molding. With repeated use, the verticality of the inner hole gradually shifts, resulting in non-parallelism between the end face of the suction head and the base surface. The structural change is irreversible and difficult to repair. In addition, the leveling of the suction head fixture is usually achieved by manual or pneumatic means. During manual leveling, four screws at the four corners of the suction head are usually used to repeatedly adjust manually to make the end face of the suction head parallel to the base surface. However, the manual adjustment accuracy is not high, the process is very slow, and it is greatly affected by human factors. For pneumatic leveling, a certain air pressure is first applied to the gap between the internal mechanism, and then pressed down to contact the base surface. After leveling, vacuum adsorption is used to fix the internal mechanism. This process is likely to produce a certain amount of friction between the internal gaps of the mechanism, causing its mirror finish to gradually deteriorate and leak. The leveling and fixing process is closely related to multiple factors such as air pressure fluctuations and vacuum fluctuations. After the system vacuum is lost or the power is abnormally off, the lower mechanism is prone to fall off. Summary of the invention
[0004] In view of this, an object of the present invention is to provide a magnetically controlled automatic leveling device to solve the problems in the prior art of low leveling accuracy and unstable device structure after abnormal power failure after leveling.
[0005] To achieve the above-mentioned purpose, the present invention provides a magnetically controlled automatic leveling device for leveling the adsorption surface of a suction head fixture, comprising an adaptive leveling mechanism connected to the suction head fixture, a detection control mechanism, a driving mechanism and a locking mechanism; the adaptive leveling mechanism comprises a first magnetic pole component and a second magnetic pole component relatively arranged below the first magnetic pole component and detachably connected to the suction head fixture, wherein a repulsive force is generated between the first magnetic pole component and the second magnetic pole component after the first magnetic pole component and the second magnetic pole component are passed with the same-direction current, the driving mechanism is used to drive the first magnetic pole component to press down the second magnetic pole component and push the suction head fixture to continuously apply a pressure to the mounting plane after contacting the mounting plane, the detection control mechanism is used to detect the pressure, and after the pressure offsets the combined force of the repulsive force and the gravity of the second magnetic pole component, control the current of the first magnetic pole component or the second magnetic pole component to reverse and generate an attractive force between the first magnetic pole component and the second magnetic pole component; the locking mechanism is used to lock the first magnetic pole component and the second magnetic pole component after the first magnetic pole component and the second magnetic pole component are attracted.
[0006] Furthermore, the first magnetic pole component has a spherical pressing surface protruding toward the second magnetic pole component, and the second magnetic pole component has a spherical groove adapted to the spherical pressing surface on one side corresponding to the spherical pressing surface. After reverse current is passed through the first magnetic pole component and the second magnetic pole component, a spherical gap is formed between the spherical pressing surface and the spherical groove. The spherical gap is inversely proportional to the pressure applied to the mounting plane and after the pressure is offset, the spherical pressing surface is pressed in the spherical groove.
[0007] Furthermore, the locking mechanism is a floating locking mechanism that is sleeved on the upper end of the first magnetic pole assembly and detachably connected to the second magnetic pole assembly, one end of the first magnetic pole assembly is floated and penetrates the floating locking mechanism and extends out of the upper surface of the floating locking mechanism and is fixedly connected to the detection and control mechanism, the other end of the first magnetic pole assembly is formed with a first annular pressing surface corresponding to one side of the floating locking mechanism, and the floating locking mechanism is formed with a second annular pressing surface coaxial with the first annular pressing surface on one side of the first annular pressing surface, when the suction head fixture is leveled, the second annular pressing surface is at least partially pressed on the first annular pressing surface, so that the other end of the first magnetic pole assembly is locked between the floating locking mechanism and the second magnetic pole assembly.
[0008] Furthermore, the floating locking mechanism includes a locking plate and at least two locking members floatingly penetrated on the locking plate, the second annular pressing surface is formed on the lower surface of the locking plate, one end of the first magnetic pole assembly floats through the locking plate and is fixedly connected to the detection control mechanism, and the other end is locked between the locking plate and the second magnetic pole assembly after leveling; one end of the locking member abuts against the upper surface of the locking plate, and the other end passes downward through the locking plate and is detachably connected to the corresponding position of the second magnetic pole assembly.
[0009] Furthermore, the locking plate is formed with a first floating mounting hole coaxially arranged with the first magnetic pole assembly and a second floating mounting hole coaxially arranged with the locking member, the inner diameter of the first floating mounting hole is smaller than the diameter of the corresponding end of the first magnetic pole assembly, and the corresponding end of the first magnetic pole assembly passes through the first floating mounting hole from bottom to top and is fixedly connected to the detection control mechanism; the inner diameter of the second floating mounting hole is smaller than the diameter of the corresponding end of the locking member, and the corresponding end of the locking member passes through the second floating mounting hole from top to bottom and is detachably connected to the second magnetic pole assembly.
[0010] Furthermore, the locking member has a guide portion, a locking portion formed at the upper end of the guide portion, and a connecting portion formed at the lower end of the guide portion, the guide portion is inserted into the second floating mounting hole and the diameter of the guide portion is smaller than the inner diameter of the second floating mounting hole, the diameter of the locking portion is larger than the inner diameter of the second floating mounting hole so that the lower surface of the locking portion forms a first annular locking surface abutting against the locking plate, and the connecting portion is detachably connected to the second magnetic pole assembly.
[0011] Furthermore, the first magnetic pole assembly includes a first magnetic pole floatingly penetrated on the locking plate and fixedly connected to the detection and control mechanism, a first coil arranged on the outside of the first magnetic pole and electrically connected to the detection and control mechanism, and a holding protrusion integrally formed at the bottom of the first magnetic pole; the holding protrusion is a hemispherical structure, the spherical holding surface is formed on the lower surface of the holding protrusion, and the first annular holding surface is formed on the upper surface of the holding protrusion. When the first magnetic pole assembly and the second magnetic pole assembly are locked, the holding protrusion is locked between the locking plate and the second magnetic pole assembly.
[0012] Furthermore, the second magnetic pole assembly includes a second magnetic pole detachably connected to the suction head fixture, a second coil arranged on the outer side of the second magnetic pole and electrically connected to the detection control mechanism, and a holding block integrally formed on the second magnetic pole and arranged opposite to the holding protrusion; the upper surface of the holding block is recessed downward to form the spherical groove, and the diameter of the spherical groove is adapted to the diameter of the holding protrusion; a locking hole adapted to the locking member is formed on the upper surface of the holding block at a position corresponding to the locking member, and the locking member is screwed and fixed in the locking hole.
[0013] Furthermore, the detection control mechanism includes a pressure detection module fixed on the first magnetic pole assembly, a processor and a controller electrically connected to the pressure detection module and the processor, the pressure detection module is used to detect the pressure acting on the mounting plane, the processor is used to comprehensively judge whether the pressure acting on the mounting plane offsets the resultant force of the repulsive force between the first magnetic pole assembly and the second magnetic pole assembly and the gravity of the second magnetic pole assembly based on the pressure acting on the mounting plane and the resultant force of the repulsive force between the first magnetic pole assembly and the second magnetic pole assembly and the gravity of the second magnetic pole assembly, and the first magnetic pole assembly, the second magnetic pole assembly and the driving mechanism are all electrically connected to the controller.
[0014] Furthermore, the driving mechanism includes a stepper motor electrically connected to the controller and a coupling, one end of the coupling is fixedly connected to the output shaft of the stepper motor, and the other end is fixedly connected to the pressure detection module.
[0015] The present invention provides a first magnetic pole component and a second magnetic pole component that are arranged opposite to each other, and controls the direction of the current acting on the first magnetic pole component and the second magnetic pole component, so that a force of mutual repulsion or mutual attraction is generated between the first magnetic pole component and the second magnetic pole component. At the same time, a detection control mechanism is provided to detect the pressure acting on the mounting plane in real time, and the direction of the current flowing through the first magnetic pole component and the second magnetic pole component and the movement direction of the driving mechanism are timely controlled according to the detected pressure, so that the adsorption surface of the suction head fixture and the mounting plane are leveled and locked by the repulsion of the same poles and the attraction of the opposite poles between the first magnetic pole component and the second magnetic pole component. During leveling, due to the repulsion between the first magnetic pole component and the second magnetic pole component, no friction is generated between the spherical holding surface of the first magnetic pole component and the spherical groove of the second magnetic pole component, thereby avoiding damage to the first magnetic pole component and the second magnetic pole component, and ensuring the accuracy of leveling; at the same time, a locking member is used to guide and lock the relative movement of the first magnetic pole component and the second magnetic pole component, thereby avoiding the second magnetic pole component from falling off due to abnormal power failure of the system, so as to ensure the stability and reliability of the overall structure. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1The present invention is a schematic structural diagram of a magnetically controlled automatic leveling device.
[0017] Figure 2 for Figure 1 Internal cross-section view of (unlocked).
[0018] Figure 3 for Figure 1 Internal cross-section of (locked)
[0019] Figure 4 for Figure 1 Schematic diagram of the structure of the adaptive mechanism.
[0020] Figure 5 for Figure 1 Schematic diagram of the structure of the floating locking mechanism.
[0021] Figure 6 It is a control block diagram of the electrical control part of the present invention.
[0022] The following are marked in the accompanying drawings:
[0023] Adaptive leveling mechanism 1, first magnetic pole assembly 11, spherical holding surface 11a, first magnetic pole 111, first coil 112, holding protrusion 113, first annular holding surface 113a, second magnetic pole assembly 12, spherical groove 12a, second magnetic pole 121, second coil 122, holding block 123, locking hole 123a, mounting plate 124, screw hole 124a, floating locking mechanism 2, second annular holding surface 2a, locking plate 21, first floating mounting hole 21a, second floating mounting hole 21b, first annular locking surface 21c, locking member 22, second annular locking surface 22a, locking portion 221, guide portion 222, connecting portion 223, detection control mechanism 3, pressure detection module 31, processor 32, controller 33, drive mechanism 4, stepping motor 41, coupling 42, spherical gap 5. DETAILED DESCRIPTION
[0024] The following is further described in detail through specific implementation methods:
[0025] Example
[0026] like Figures 1 to 3The figure shows a schematic diagram of the structure of a magnetically controlled automatic leveling device of the present embodiment. The magnetically controlled automatic leveling device of the present embodiment comprises an adaptive leveling mechanism 1, a locking mechanism, a detection and control mechanism 3 and a driving mechanism 4. The adaptive leveling mechanism 1, the detection and control mechanism 3 and the driving mechanism 4 are arranged on a suction head fixture (not shown) from bottom to top, and the suction head fixture has an adsorption surface facing downward and opposite to the mounting plane (not shown). Specifically, the adaptive leveling mechanism 1 is detachably connected to the suction head fixture, and is used to realize adaptive leveling of the adsorption surface of the suction head fixture to the mounting plane, so as to ensure the parallelism between the adsorption surface and the mounting plane, thereby improving the precision and yield rate of chip processing. The detection control mechanism 3 is fixedly connected to the adaptive leveling mechanism 1, and is used to detect the pressure applied to the mounting plane in real time when the adaptive leveling mechanism 1 drives the suction head fixture to press the mounting plane, so as to timely control the direction of the current acting on the adaptive leveling mechanism 1, and synchronously control the driving mechanism 4 fixed on the detection control mechanism 3 to synchronously drive the detection control mechanism 3 and the adaptive leveling mechanism 1 upward or downward. The locking mechanism 2 is floatingly sleeved on the outside of the adaptive leveling mechanism 1 and detachably connected to the corresponding position of the adaptive leveling mechanism 1, and is used to guide the movement of the adaptive leveling mechanism 1 during the leveling process and lock the adaptive leveling mechanism 1 after leveling.
[0027] The adaptive leveling mechanism 1 includes a first magnetic pole component 11 and a second magnetic pole component 12 arranged relatively below the first magnetic pole component 11, the first magnetic pole component 11 is fixedly connected to the detection and control mechanism 3 arranged above it, and the second magnetic pole component 12 is detachably connected to the suction head fixture arranged below it, and the floating locking mechanism 2 is sleeved on the outer side of the upper end of the first magnetic pole component 11 and detachably connected to the second magnetic pole component 12, and is used to guide the first magnetic pole component 11 and pre-fix the second magnetic pole component 12 during leveling to prevent the second magnetic pole component 12 from falling, and to lock the first magnetic pole component 11 and the second magnetic pole component 12 after leveling. Specifically, one end of the first magnetic pole component 11 floats from bottom to top and penetrates the floating locking mechanism 2 and extends upward from the upper surface of the floating locking mechanism 2 and is fixedly connected to the detection control mechanism 3. The other end of the first magnetic pole component 11 is formed with a first annular pressing surface 113a that is pressed with the floating locking mechanism 2 at a position corresponding to the position below the floating locking mechanism 2, so that the first annular pressing surface 113a can be pressed under the floating locking mechanism 2 when locked, thereby locking the corresponding end of the first magnetic pole component 11 between the floating locking mechanism 2 and the second magnetic pole component 12. At the same time, the first magnetic pole component 11 and the second magnetic pole component 12 are both electrically connected to the detection control mechanism 3. When leveling, the detection control mechanism 3 can pass reverse current or unidirectional current to the first magnetic pole component 11 and the second magnetic pole component 12 in a timely manner, thereby generating a repulsive force or an attractive force between the first magnetic pole component 11 and the second magnetic pole component 12, providing a judgment basis for the detection control mechanism 3 to control the current and the drive mechanism 4.
[0028] In this embodiment, a spherical pressing surface 11a protruding downward is formed on the side of the first magnetic pole component 11 facing the second magnetic pole component 12, and a spherical groove 12a adapted to the spherical pressing surface 11a is formed on the side of the second magnetic pole component 12 corresponding to the spherical pressing surface 11a. The spherical pressing surface 11a is placed in the spherical groove 12a, and due to the repulsive force between the first magnetic pole component 11 and the second magnetic pole component 12, a spherical gap 5 with uniform spacing at all locations is formed between the spherical pressing surface 11a and the spherical groove 12a at the initial leveling stage, and when the driving mechanism 4 drives the first magnetic pole component 11 to press the second magnetic pole component 12 downward to generate a pressure on the mounting plane, the driving mechanism 4 continues to drive the first magnetic pole component 11 downward until the spherical gap 5 is eliminated, thereby achieving leveling of the adsorption surface of the suction head fixture with the mounting plane. It is understandable that in some other embodiments, a spherical groove 12a recessed upward may be formed on the first magnetic pole component 11 and a spherical holding surface 11a protruding toward the spherical groove 12a may be formed at a corresponding position of the second magnetic pole component 12 to achieve leveling of the suction head fixture and the mounting plane.
[0029] In the specific implementation of this embodiment, the detection control mechanism 3 passes a reverse current through the first magnetic pole component 11 and the second magnetic pole component 12, so that magnetic poles of the same polarity (both are N poles or both are S poles) are generated between the first magnetic pole component 11 and the second magnetic pole component 12 and repel each other. Since the floating locking mechanism 2 is connected to the second magnetic pole component 12, the second magnetic pole component 12 and the first magnetic pole component 11 always maintain the spherical gap 5 under the action of the repulsive force; the driving mechanism 4 drives the first magnetic pole component 11 downward, so that the second magnetic pole component 12 moves downward synchronously under the combined action of the repulsive force and its gravity, until the suction head fixture connected to the bottom of the second magnetic pole component 12 contacts the mounting plane, and then the driving mechanism 4 continues to drive the first magnetic pole component 11 downward to apply a pressure to the mounting plane; the detection control mechanism 3 detects the pressure applied to the mounting plane in real time. As the first magnetic pole component 11 continues to move downward, the pressure applied to the mounting plane gradually increases, and the spherical gap 5 decreases accordingly until the pressure applied to the mounting plane is reduced. The pressure of the mounting plane offsets the repulsive force between the first magnetic pole component 11 and the second magnetic pole component 12 and the combined force of the gravity of the second magnetic pole component 12, and the spherical gap 5 is eliminated. At this time, the adsorption surface of the suction head fixture is just completely fitted with the mounting plane at all places; the detection control mechanism 3 then controls the current of the first magnetic pole component 11 or the second magnetic pole component 12 to reverse, so that magnetic poles of different polarities are generated between the first magnetic pole component 11 and the second magnetic pole component 12 (the first magnetic pole component 11 is N pole and the second magnetic pole component 12 is S pole or The first magnetic pole assembly 11 is the S pole and the second magnetic pole assembly 12 is the N pole), and they attract each other, and the relative position of the first magnetic pole assembly 11 and the second magnetic pole assembly 12 is fixed; finally, the driving mechanism 4 drives the first magnetic pole assembly 11 to drive the second magnetic pole assembly 12 and the suction head fixture to reset upward as a whole, and uses the floating locking assembly to lock the first magnetic pole assembly 11 and the second magnetic pole assembly 12. After resetting, the adsorption surface of the suction head fixture is parallel to the mounting plane, completing the leveling of the suction head fixture and the mounting plane.
[0030] like Figure 4As shown, the first magnetic pole assembly 11 includes a first magnetic pole 111 floatingly inserted on the floating locking mechanism 2, a first coil 112 set outside the first magnetic pole 111 and electrically connected to the detection control mechanism 3, and a pressing protrusion 113 integrally formed at the bottom of the first magnetic pole 111. The first magnetic pole 111 cooperates with the first coil 112 to form a first electromagnet. When the first coil 112 is energized, the first magnetic pole 111 will be magnetized to generate an N pole or an S pole to cooperate with the second magnetic pole assembly 12 to generate the repulsive force or attractive force between the two. The pressing protrusion 113 is fixed to the bottom of the first magnetic pole 111, and the first annular pressing surface 113a is formed on the upper surface of the pressing protrusion 113, so that after the suction head assembly is leveled and the first magnetic pole assembly 11 and the second magnetic pole assembly 12 are locked, the floating locking mechanism 2 is pressed on the first annular pressing surface 113a, and then the pressing protrusion 113 is locked between the floating locking mechanism 2 and the second magnetic pole assembly 12. .
[0031] In this embodiment, the pressing protrusion 113 is a hemispherical structure, the first annular pressing surface 113a is formed on the plane of the hemispherical structure, and the spherical pressing surface 11a is formed on the lower surface of the pressing protrusion 113 (that is, on the hemispherical surface of the hemispherical structure) to cooperate with the spherical groove 12a for leveling. In specific implementation, the first magnetic pole component 11 applies pressure to the mounting plane. Due to the non-parallelism between the adsorption surface of the suction head fixture and the mounting plane, the spherical holding surface 11a and the spherical groove 12a rotate slightly around their centers under the action of force (since the first magnetic pole component 11 is fixed on the detection and control mechanism 3, the rotation of the spherical holding surface 11a relative to the spherical groove 12a is specifically reflected as the rotation of the second magnetic pole component 12 relative to the holding protrusion 113). At the same time, the axis of the first magnetic pole 111 is slightly offset relative to the axis of the floating locking mechanism 2 (since the floating locking mechanism 2 is detachably fixed on the second magnetic pole component 12, it will move with the rotation of the second magnetic pole component 12, so that the slight offset of the axis at this time is specifically reflected as the slight offset of the axis of the floating locking mechanism 2 relative to its initial position or the axis of the first magnetic pole 111), so that the adsorption surface of the suction head fixture is parallel to the mounting plane.
[0032] The second magnetic pole assembly 12 includes a second magnetic pole 121 detachably connected to the suction head fixture, a second coil 122 arranged on the outside of the second magnetic pole 121 and electrically connected to the detection control mechanism 3, and a holding block 123 integrally formed on the second magnetic pole 121 and arranged opposite to the holding protrusion 113. The second magnetic pole 121 and the second coil 122 cooperate to form a second electromagnet. When the second coil 122 is energized, the second magnetic pole 121 will be magnetized to generate an N-pole or an S-pole to cooperate with the N-pole or S-pole generated by the magnetization of the first magnetic pole 111 to repel or attract. The upper surface of the abutting block 123 is recessed downward to form the spherical groove 12a, and the diameter of the spherical groove 12a is adapted to the diameter of the pressing protrusion 113, so that the pressing protrusion 113 can move downward into the spherical groove 12a and achieve pressure on the suction head fixture and the mounting plane through the cooperation of the spherical pressing surface 11a formed thereon and the spherical groove 12a. In addition, the upper surface of the abutting block 123 is also formed with a locking hole 123a that is detachably connected to the floating locking mechanism 2, so as to facilitate the rapid disassembly and assembly of the floating locking mechanism 2 and the rapid locking of the first magnetic pole assembly 11 and the magnetic pole assembly after the suction head fixture is leveled.
[0033] In this embodiment, a mounting plate 124 is fixed to the bottom of the supporting block 123. A screw hole 124a is provided on the mounting plate 124. The suction head fixture is installed in the screw hole 124a by means of bolts for quick disassembly and assembly when replacing the suction head fixture.
[0034] like Figure 5 As shown, the locking mechanism is a floating locking mechanism 2 which is sleeved on the upper end of the first magnetic pole assembly 11 and detachably connected to the second magnetic pole assembly 12, and a second annular pressing surface 2a which is coaxially arranged with the first annular pressing surface 113a is formed on the floating locking mechanism 2 on the side corresponding to the first annular pressing surface 113a, and the projections of the second annular pressing surface 2a and the first annular pressing surface 113a on the horizontal plane at least partially overlap, so that when the first magnetic pole assembly 11 and the second magnetic pole assembly 12 are locked, the second annular pressing surface 2a is at least partially pressed on the first annular pressing surface 113a to lock the corresponding end of the first magnetic pole assembly 11 (specifically, the end provided with the pressing protrusion 113) between the floating locking mechanism 2 and the second magnetic pole assembly 12 (or the spherical groove 12a).
[0035] The floating locking mechanism 2 includes a locking plate 21 and at least two locking members 22 floatingly penetrating the locking plate 21. A first floating mounting hole 21a coaxially arranged with the first magnetic pole assembly 11 is formed on the locking plate 21 at a position corresponding to the first magnetic pole assembly 11, so that the first magnetic pole 111 can float from bottom to top through the first floating mounting hole 21a and extend to the top of the floating plate to be fixedly connected with the detection control mechanism 3. The second annular pressing surface 2a is formed on the lower surface of the locking plate 21 at a position corresponding to the outside of the first floating mounting hole 21a, so that after the first magnetic pole assembly 11 and the second magnetic pole assembly 12 are locked, the pressing protrusion 113 of the first magnetic pole assembly 11 is locked between the locking plate 21 and the abutting block 123 of the second magnetic pole assembly 12 through the pressing cooperation between the first annular pressing surface 113a and the second annular pressing surface 2a. A second floating mounting hole 21b coaxially arranged with the locking member 22 is also formed on the locking plate 21 at a position corresponding to the locking member 22, so that after the locking member 22 locks the first magnetic pole assembly 11 and the second magnetic pole assembly 12, one end of the locking member 22 located on the upper surface of the locking plate 21 can be pressed on the upper surface of the locking plate 21, and the other end downwardly passes through the second floating mounting hole 21b and extends to the lower surface of the locking plate and is detachably connected to the locking hole 123a on the supporting block 123. Specifically, the locking member 22 is provided with a second annular locking surface 21c which is pressed on the upper surface of the locking plate 21 after locking, and the upper surface of the locking plate 21 is provided with a second annular locking surface 22a which is coaxial with the second annular locking surface 21c at a position outside the second floating mounting hole 21b corresponding to the second annular locking surface 21c, and the projections of the second annular locking surface 22a and the second annular locking surface 21c on the horizontal plane at least partially overlap, so that when the first magnetic pole assembly 11 and the second magnetic pole assembly 12 are locked, the second annular locking surface 21c is at least partially pressed on the second annular locking surface 22a to lock the first magnetic pole assembly 11 and the second magnetic pole assembly 12.
[0036] In this embodiment, the inner diameter of the first floating mounting hole 21a is larger than the diameter of the first magnetic pole 111 of the first magnetic pole assembly 11, so that when the first magnetic pole 111 is inserted into the first floating mounting hole 21a, there is a small gap between the first magnetic pole 111 and the first floating mounting hole 21a, so that when leveling, a relative offset can occur between the first magnetic pole assembly 11 and the floating locking mechanism 2; the relative position of the first magnetic pole assembly 11 and the floating locking mechanism 2 is fine-tuned to achieve the leveling of the suction head fixture. At the same time, the inner diameter of the second floating mounting hole 21b is larger than the diameter of the corresponding end of the locking member 22 (specifically, the end inserted in the second floating mounting hole 21b), so that when the locking member 22 is inserted in the second floating mounting hole 21b, there is a small gap between the locking member 22 and the second floating mounting hole 21b, so that when the first magnetic pole 111 is relatively deflected relative to the first floating mounting hole 21a, the locking plate 21 will not interfere with the displacement of the first magnetic pole 111, thereby ensuring that the first magnetic pole assembly 11 and the second magnetic pole assembly 12 can rotate relative to each other according to the parallelism between the adsorption surface of the suction head fixture and the mounting plane after being subjected to force. In the specific implementation of this embodiment, since this embodiment is mainly used for leveling the suction head fixture on the mounting instrument of precision instruments such as chips, the gap between the first magnetic pole 111 and the first floating mounting hole 21a and between the locking member 22 and the second floating mounting hole 21b is not easy to be too large, thereby ensuring the accuracy of the suction head fixture after leveling.
[0037] The locking member 22 has a guide portion 222, a locking portion 221 formed at the upper end of the guide portion 222, and a connecting portion 223 formed at the lower end of the guide portion 222. The diameters of the guide portion 222 and the connecting portion 223 are both smaller than the inner diameter of the second floating mounting hole 21b, while the diameter of the locking portion 221 is larger than the inner diameter of the second floating mounting hole 21b and the diameter of the guide portion 222, so that the guide portion 222 and the connecting portion 223 can pass through the second floating mounting hole 21b, and the connecting portion 223 can be detachably connected to the locking hole 123a of the supporting block 123, and after locking, the second annular locking surface 21c formed on the lower surface of the locking portion 221 can be pressed on the locking plate 21, thereby realizing the locking of the first magnetic pole assembly 11 and the second magnetic pole assembly 12. In a specific implementation, an external thread is formed on the outer side of the connecting portion 223, and an internal thread that cooperates with the external thread is formed in the locking hole 123a. The connecting portion 223 can be detachably connected to the locking hole 123a through the cooperation of the external thread and the internal thread in the locking hole 123a, so as to facilitate quick disassembly and quick locking of the first magnetic pole assembly 11 and the second magnetic pole assembly 12.
[0038] like Figure 6As shown, the detection control mechanism 3 includes a pressure detection module 31 fixed on the first magnetic pole component 11, a processor 32, and a controller 33 electrically connected to the pressure detection module 31 and the processor 32. The pressure detection module 31 is used to detect the pressure acting on the mounting plane in real time during the leveling process of the suction head fixture. In this embodiment, the pressure detection module 31 is implemented by a pressure sensor. The processor 32 is used to comprehensively judge whether the pressure acting on the mounting plane offsets the resultant force of the repulsive force and the gravity of the second magnetic pole component 12 based on the pressure acting on the mounting plane detected by the pressure detection module 31 and the resultant force of the repulsive force between the first magnetic pole component 11 and the second magnetic pole component 12 and the gravity of the second magnetic pole component 12, and generate a control signal when the pressure acting on the mounting plane can just offset the resultant force of the repulsive force and the gravity of the second magnetic pole component 12. At this time, the suction surface of the suction head fixture and the force at various places on the mounting plane are uniform, and the two are just completely fitted. The first coil 112 of the first magnetic pole assembly 11 and the second coil 122 of the second magnetic pole assembly 12 are both electrically connected to the controller 33. The controller 33 is used to pass reverse current to the first coil 112 and the second coil 122 at the initial stage of leveling, so that the first magnetic pole 111 and the second magnetic pole 121 are magnetized to produce the same magnetic poles and repel each other, thereby generating a repulsive force between the pressing protrusion 113 and the abutting block 123, and controlling the driving mechanism 4 to drive the first magnetic pole assembly 11 downward to push the second magnetic pole assembly 12 and the suction head fixture downward. The mounting plane is pressurized; and the driving mechanism 4 is controlled to stop driving according to the control signal generated by the processor 32, and the current passed into the first coil 112 or the second coil 122 is controlled to be reversed. At this time, the currents flowing through the first coil 112 and the second coil 122 are in the same direction, so that the first magnetic pole 111 and the second magnetic pole 121 generate opposite magnetic poles and attract each other, and then the driving mechanism 4 is controlled to drive the first magnetic pole assembly 11 to drive the second magnetic pole assembly 12 and the suction head fixture adsorbed thereon to move upward as a whole. At this time, the adsorption surface of the suction head fixture is parallel to the mounting plane.
[0039] The driving mechanism 4 includes a stepper motor 41 electrically connected to the controller 33 and a coupling 42, one end of the coupling 42 is fixedly connected to the output shaft of the stepper motor 41, and the other end is connected to the pressure detection module 31, and is used to transmit the movement on the output shaft of the stepper motor 41 to the first magnetic pole assembly 11, so that the stepper motor 41 can drive the first magnetic pole assembly 11 upward and downward in a timely manner under the control of the controller 33.
[0040] When the present embodiment is working, first, each locking member 22 is loosened, and the loosening is limited to the first magnetic pole assembly 11 and the locking plate 21 being able to deviate relative to each other and the second magnetic pole assembly 12 not falling off; then, a reverse current is passed through the first coil 112 and the second coil 122, at which time the first magnetic pole 111 and the second magnetic pole 121 are magnetized to produce the same pole S pole or the same pole N pole, and a spherical gap 5 is formed between the spherical holding surface 11a of the holding protrusion 113 and the spherical groove 12a of the holding block 123; then, the stepper motor 41 is started to drive the first magnetic pole assembly 11 downward, and the second magnetic pole assembly 12 drives the suction head fixture to move downward synchronously under the action of the repulsive force and its own gravity until the suction surface of the suction head fixture contacts the mounting plane, and then the stepper motor 41 is continuously controlled to drive the first magnetic pole assembly 11 downward and make the suction head fixture press the mounting plane downward. At this time, the pressure detection module 31 starts to detect the pressure acting on the mounting plane, and the processor 32 synchronously collects the pressure detected by the pressure detection module 31. When the pressure just offsets the repulsive force between the holding protrusion 113 and the abutting block 123 and the combined force of the overall gravity of the second magnetic pole assembly 12, a control signal is generated; finally, the controller 33 controls the stepper motor 41 to stop action and controls the current of the first coil 112 or the second coil 122 to reverse according to the control signal. At this time, the first magnetic pole 111 and the second magnetic pole 121 produce opposite magnetic poles (one is the S pole and the other is the N pole), so that the holding protrusion 113 and the abutting block 123 are tightly adsorbed together, and then the locking parts 22 are tightened, and the stepper motor 41 is started to drive the first magnetic pole assembly 11, the second magnetic pole assembly 12 and the suction head fixture to reset, thereby completing the leveling of the suction head fixture and the mounting plane.
[0041] The magnetically controlled automatic leveling device of the present embodiment is provided with a first magnetic pole 111 and a first coil 112 and a second magnetic pole 121 and a second coil 122 which can constitute an electromagnet. By passing reverse or unidirectional current through the first coil 112 and the second coil 122, the first magnetic pole 111 and the second magnetic pole 121 are magnetized to repel or attract each other, and the movement direction of the stepper motor 41 is timely controlled by the detection control module to achieve the leveling of the suction head fixture. During the whole process, due to the existence of the repulsive force between the pressing protrusion 113 and the abutting block 123, no friction will be generated even if relative displacement occurs, and no wear will be caused on the spherical pressing surface 11a and the spherical groove 12a, thereby ensuring the accuracy of leveling. In addition, since the locking member 22 pre-connects the first magnetic pole assembly 11 and the second magnetic pole assembly 12 during leveling and locks them after leveling, even if the device loses power abnormally, the second magnetic pole assembly 12 will not fall off, and the overall structure is stable and reliable.
Claims
1. A magnetically controlled automatic leveling device, used for leveling the adsorption surface of a suction head fixture, characterized in that: The invention comprises an adaptive leveling mechanism connected with the suction head fixture, a detection control mechanism, a driving mechanism and a locking mechanism; the adaptive leveling mechanism comprises a first magnetic pole component and a second magnetic pole component which is relatively arranged below the first magnetic pole component and detachably connected with the suction head fixture; a repulsive force is generated between the first magnetic pole component and the second magnetic pole component after the first magnetic pole component and the second magnetic pole component are passed with the same-direction current; the driving mechanism is used to drive the first magnetic pole component to press down the second magnetic pole component and push the suction head fixture to continuously apply a pressure to the mounting plane after contacting the mounting plane; the detection control mechanism is used to detect the pressure and control the current of the first magnetic pole component or the second magnetic pole component to reverse and generate an attractive force between the first magnetic pole component and the second magnetic pole component after the pressure offsets the combined force of the repulsive force and the gravity of the second magnetic pole component; the locking mechanism is used to lock the first magnetic pole component and the second magnetic pole component after the first magnetic pole component and the second magnetic pole component are attracted.
2. The magnetically controlled automatic leveling device according to claim 1, characterized in that: The first magnetic pole component has a spherical pressing surface protruding toward the second magnetic pole component, and the second magnetic pole component has a spherical groove adapted to the spherical pressing surface on one side corresponding to the spherical pressing surface. After reverse current is passed through the first magnetic pole component and the second magnetic pole component, a spherical gap is formed between the spherical pressing surface and the spherical groove. The spherical gap is inversely proportional to the pressure applied to the mounting plane and after the pressure is offset, the spherical pressing surface is pressed in the spherical groove.
3. The magnetically controlled automatic leveling device according to claim 2 is characterized in that: The locking mechanism is a floating locking mechanism that is sleeved on the upper end of the first magnetic pole assembly and detachably connected to the second magnetic pole assembly. One end of the first magnetic pole assembly floats and penetrates the floating locking mechanism and extends out of the upper surface of the floating locking mechanism and is fixedly connected to the detection and control mechanism. A first annular pressing surface is formed on the other end of the first magnetic pole assembly corresponding to one side of the floating locking mechanism. A second annular pressing surface coaxial with the first annular pressing surface is formed on the side of the floating locking mechanism corresponding to the first annular pressing surface. When the suction head fixture is leveled, the second annular pressing surface is at least partially pressed on the first annular pressing surface, so that the other end of the first magnetic pole assembly is locked between the floating locking mechanism and the second magnetic pole assembly.
4. The magnetically controlled automatic leveling device according to claim 3, characterized in that: The floating locking mechanism includes a locking plate and at least two locking members floatingly penetrated on the locking plate, the second annular pressing surface is formed on the lower surface of the locking plate, one end of the first magnetic pole assembly floats through the locking plate and is fixedly connected to the detection control mechanism, and the other end is locked between the locking plate and the second magnetic pole assembly after leveling; one end of the locking member abuts against the upper surface of the locking plate, and the other end passes downward through the locking plate and is detachably connected to the corresponding position of the second magnetic pole assembly.
5. The magnetically controlled automatic leveling device according to claim 4, characterized in that: The locking plate is formed with a first floating mounting hole coaxially arranged with the first magnetic pole assembly and a second floating mounting hole coaxially arranged with the locking member. The inner diameter of the first floating mounting hole is smaller than the diameter of the corresponding end of the first magnetic pole assembly, and the corresponding end of the first magnetic pole assembly passes through the first floating mounting hole from bottom to top and is fixedly connected to the detection control mechanism; the inner diameter of the second floating mounting hole is smaller than the diameter of the corresponding end of the locking member, and the corresponding end of the locking member passes through the second floating mounting hole from top to bottom and is detachably connected to the second magnetic pole assembly.
6. The magnetically controlled automatic leveling device according to claim 5, characterized in that: The locking member has a guide portion, a locking portion formed at the upper end of the guide portion, and a connecting portion formed at the lower end of the guide portion. The guide portion is inserted into the second floating mounting hole and the diameter of the guide portion is smaller than the inner diameter of the second floating mounting hole. The diameter of the locking portion is larger than the inner diameter of the second floating mounting hole so that the lower surface of the locking portion forms a first annular locking surface abutting against the locking plate, and the connecting portion is detachably connected to the second magnetic pole assembly.
7. The magnetically controlled automatic leveling device according to claim 4, characterized in that: The first magnetic pole assembly includes a first magnetic pole floatingly penetrated on the locking plate and fixedly connected to the detection and control mechanism, a first coil arranged on the outside of the first magnetic pole and electrically connected to the detection and control mechanism, and a holding protrusion integrally formed at the bottom of the first magnetic pole; the holding protrusion is a hemispherical structure, the spherical holding surface is formed on the lower surface of the holding protrusion, and the first annular holding surface is formed on the upper surface of the holding protrusion. When the first magnetic pole assembly and the second magnetic pole assembly are locked, the holding protrusion is locked between the locking plate and the second magnetic pole assembly.
8. The magnetically controlled automatic leveling device according to claim 7, characterized in that: The second magnetic pole assembly includes a second magnetic pole detachably connected to the suction head fixture, a second coil arranged on the outer side of the second magnetic pole and electrically connected to the detection control mechanism, and a holding block integrally formed on the second magnetic pole and arranged opposite to the holding protrusion; the upper surface of the holding block is recessed downward to form the spherical groove, and the diameter of the spherical groove is adapted to the diameter of the holding protrusion; a locking hole adapted to the locking member is formed on the upper surface of the holding block at a position corresponding to the locking member, and the locking member is screwed and fixed in the locking hole.
9. The magnetically controlled automatic leveling device according to claim 1, characterized in that: The detection control mechanism includes a pressure detection module fixed on the first magnetic pole assembly, a processor and a controller electrically connected to the pressure detection module and the processor. The pressure detection module is used to detect the pressure acting on the mounting plane. The processor is used to comprehensively judge whether the pressure acting on the mounting plane offsets the resultant force of the repulsive force between the first magnetic pole assembly and the second magnetic pole assembly and the gravity of the second magnetic pole assembly based on the pressure acting on the mounting plane and the resultant force of the repulsive force between the first magnetic pole assembly and the second magnetic pole assembly and the gravity of the second magnetic pole assembly. The first magnetic pole assembly, the second magnetic pole assembly and the driving mechanism are all electrically connected to the controller.
10. The magnetically controlled automatic leveling device according to claim 9, characterized in that: The driving mechanism includes a stepper motor electrically connected to the controller and a coupling, one end of the coupling is fixedly connected to the output shaft of the stepper motor, and the other end of the coupling is fixedly connected to the pressure detection module.
Citation Information
Patent Citations
Substrate aligning device, substrate and substrate aligning method
CN108519693A
Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same
US6304320B1