Vacuum gate valve

Abstract

This invention discloses a vacuum gate valve, employing a movable rod as its core moving component. The movable rod moves relative to the base in a single direction. Through the movement of the movable rod, the gate valve through-hole on the movable rod is aligned or misaligned with the base through-hole, thereby opening or closing the vacuum gate valve. Furthermore, the movable rod includes a large-diameter section, a variable-diameter section, and a small-diameter section. A slider fitted onto the movable rod moves relative to it through the movement of the movable rod and the engagement of a locking block. As the slider moves along different positions relative to the movable rod, the spring plate of the slider deforms, causing the sealing part of the slider to disengage from or engage with the sealing element. Thus, the vacuum gate valve achieves opening and closing, as well as sealing after closing, through the movement of the movable rod. The gate valve has few moving parts, a simple structure, good sealing performance, and low manufacturing difficulty.

Description

Technical Field

[0001] This invention relates to the field of valve technology, and in particular to a vacuum gate valve. Background Technology

[0002] Currently, commonly used vacuum gate valve structures include ball-type or spring-type, which achieve the opening and closing of the gate valve and vacuum sealing through a primary or secondary actuation mechanism. However, the structures are generally complex, have high requirements for manufacturing processes, and are prone to damage during use. Summary of the Invention

[0003] This invention provides a vacuum gate valve with a simple structure and good sealing performance.

[0004] The vacuum gate valve provided in this embodiment of the invention includes:

[0005] The base has a base through hole;

[0006] The movable rod is provided with a gate valve through hole. The movable rod is movably disposed on the base along its length direction to move between an open position opposite to the gate valve through hole and a staggered closed position. The movable rod includes a large diameter section, a variable diameter section and a small diameter section connected in sequence along its length direction.

[0007] The slider, locking block, and sealing element are provided. The slider is slidably mounted on the movable rod along the large diameter section, the variable diameter section, and the small diameter section. The slider includes a spring, a sealing part, and a sliding part. The spring causes the sliding part to tend to press against the movable rod. The locking block is provided on the base. The sealing element and the slider are located on the same side of the base and are stationary relative to the base.

[0008] In the open position, the movable rod drives the slider to disengage from the locking block, the sliding part is opposite to the small diameter section, and the sealing part disengages from the sealing element; in the closed position, the movable rod drives the slider to abut against the locking block, the sliding part slides along the variable diameter section to the large diameter section, so that the spring plate deforms and drives the sealing part to abut against the sealing element.

[0009] Optionally, the vacuum gate valve includes a plurality of limiting members, which are spaced apart on the base along the length direction. Each limiting member has a through hole, and the movable rod passes through the through hole of each limiting member and is slidably disposed relative to the through hole in the length direction.

[0010] Optionally, the sliding part includes a connecting plate and a rolling element. The connecting plate is connected to the spring sheet, and the rolling element is fitted between the connecting plate and the movable rod and is rotatably disposed. The sealing part is connected to the side of the connecting plate away from the rolling element.

[0011] Optionally, the connecting plate has a groove on the side near the movable rod, and a portion of the rolling element is rotatably engaged in the groove.

[0012] Optionally, the rolling element is a ball, the groove is a hemispherical groove, and a portion of the ball is rotatably fitted into the groove.

[0013] Optionally, the rolling element is a roller, the axial direction of the roller is perpendicular to the length direction, the groove is a semi-cylindrical groove, and a portion of the roller is rotatably fitted in the groove.

[0014] Optionally, the sliding part includes a first sliding part and a second sliding part opposite to each other in a first direction, the spring includes a first spring and a second spring, the first spring and the second spring are both connected to the first sliding part and the second sliding part to form an annular structure, the movable rod passes through the through hole in the middle of the annular structure, and the sealing part is connected to the first sliding part.

[0015] Optionally, the movable rod is provided with a first groove and a second groove opposite to each other in the first direction, and the large-diameter section, the variable-diameter section and the small-diameter section are constructed in the first groove and the second groove, the first sliding part extends into the first groove and the second sliding part extends into the second groove.

[0016] Optionally, the thickness of the variable diameter segment in the first direction gradually increases from the small diameter segment to the large diameter segment, and the large diameter segment, the variable diameter segment, and the small diameter segment are smoothly connected.

[0017] Optionally, both the base through hole and the gate valve through hole extend along the first direction, and in the open position, the base through hole and the gate valve through hole are opposite to each other in the first direction.

[0018] The vacuum gate valve provided in this embodiment of the invention adopts a single-stage motion structure, in which the elastic slider and the movable rod cooperate with each other. By moving the movable rod, the gate valve can be opened and vacuum sealed. The gate valve has few moving parts, simple structure, good sealing performance, and low processing difficulty.

[0019] The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments of the invention in conjunction with the accompanying drawings. Attached Figure Description

[0020] The following sections will describe some specific embodiments of the invention in detail by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or portions. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0021] Figure 1 This is a schematic diagram of the structure of the vacuum gate valve provided in an embodiment of the present invention.

[0022] Figure 2 This is a top view of the vacuum gate valve provided in an embodiment of the present invention.

[0023] Figure 3 This is a cross-sectional view of the vacuum gate valve in the open state provided in an embodiment of the present invention (the movable rod is in the open position).

[0024] Figure 4 yes Figure 3 A three-dimensional schematic diagram.

[0025] Figure 5 This is a schematic diagram of the closed state of the vacuum gate valve provided in an embodiment of the present invention (the movable rod is in the closed position).

[0026] Figure 6 yes Figure 5 A three-dimensional schematic diagram.

[0027] Figure label:

[0028] Vacuum gate valve 100

[0029] Base 1, base through hole 11, movable rod 2, first groove 201, second groove 202, gate valve through hole 21, large diameter section 22, variable diameter section 23, small diameter section 24, slider 3, spring 31, first spring 311, second spring 312, sealing part 32, sliding part 33, first sliding part 331, second sliding part 332, connecting plate 333, rolling element 334, locking block 4, sealing element 5, limiting element 6, through hole 61. Detailed Implementation

[0030] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The vacuum gate valve 100 provided by the embodiments of the present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0031] Vacuum gate valve 100 includes a base 1, a movable rod 2, a slider 3, a locking block 4, and a sealing element 5. The base 1 has a base through hole 11, and the movable rod 2 has a gate valve through hole 21. The movable rod 2 extends along its length (e.g., Figure 2 The movable rod 2 (as indicated by the horizontal arrow in the diagram) is movably mounted on the base 1 to move between an open position where the base through hole 11 is opposite to the gate valve through hole 21, and a closed position where the base through hole 11 and the gate valve through hole 21 are offset. In other words, the movable rod 2 moves along its length between the open and closed positions, where the base through hole 11 is opposite to the gate valve through hole 21 and the closed position is offset from the gate valve through hole 21.

[0032] The movable rod 2 includes a large-diameter section 22, a variable-diameter section 23, and a small-diameter section 24 connected sequentially along its length. A slider 3 is slidably fitted onto the movable rod 2 along its length. The slider 3 includes a spring plate 31, a sealing part 32, and a sliding part 33. The spring plate 31 presses against the sliding part 33 to abut against the movable rod 2. Because the slider 3 is slidable, the spring plate 31 presses against the sliding part 33 to allow it to alternately abut against the large-diameter section 22, the variable-diameter section 23, and the small-diameter section 24.

[0033] The locking block 4 is provided on the base 1 to stop the slider 3 and restrict its movement. The sealing member 5 is located on the same side of the base 1 as the slider 3 and is stationary relative to the base 1. The sealing member 5 is used to cooperate with the sealing part 32 on the slider 3 to achieve vacuum sealing.

[0034] Among them, such as Figure 3 and Figure 4 As shown, in the open position, the movable rod 2 drives the slider 3 to disengage from the locking block 4, the sliding part 33 abuts against the small diameter section 24, and the sealing part 32 disengages from the sealing element 5; as Figure 5 and Figure 6 As shown, at the cut-off position, the slider 3 abuts against the locking block 4 in the length direction, the sliding part 33 slides along the variable diameter section 23 to the large diameter section 22 and abuts against the large diameter section 22, and the spring piece 31 deforms to drive the sealing part 32 to abut against the sealing element 5 so that the vacuum gate valve 100 is cut off and sealed.

[0035] The vacuum gate valve provided in this embodiment of the invention uses a movable rod as its core moving component, which moves relative to the base in a single direction. Through the movement of the movable rod, the gate valve through-hole on the movable rod is aligned or misaligned with the base through-hole, thereby opening or closing the vacuum gate valve. Furthermore, the movable rod includes a large-diameter section, a variable-diameter section, and a small-diameter section. A slider fitted onto the movable rod moves relative to it through the movement of the movable rod and the engagement of a locking block. As the slider and movable rod abut at different positions, the spring plate of the slider deforms, causing the sealing part to disengage from or engage with the sealing element. Thus, this embodiment of the invention provides a vacuum gate valve that achieves opening and closing, as well as sealing after closing, through the movement of the movable rod.

[0036] The vacuum gate valve provided in this embodiment of the invention adopts a single-stage motion structure, in which the elastic slider and the movable rod cooperate with each other. By moving the movable rod, the gate valve can be opened and vacuum sealed. The gate valve has few moving parts, simple structure, good sealing performance, and low processing difficulty.

[0037] For ease of description, this embodiment of the invention will be described using the length direction of the movable rod 2 along the left-right direction as an example. The left-right direction is as follows: Figure 2 As shown by the arrow in the image.

[0038] like Figure 1 As shown, the base 1 is a plate-like structure, and the movable rod 2, slider 3, locking block 4, and sealing element 5 are all located on the same side of the base 1. The length direction of the movable rod 2 is parallel to the upper surface of the base 1, and the sealing element 5 is located above the movable rod 2.

[0039] The vacuum gate valve 100 also includes two limiting members 6 spaced apart on the base 1 along the length of the movable rod 2. Each limiting member 6 has a through hole 61, through which the movable rod 2 passes and is slidably disposed relative to the through hole 61 along the length of the movable rod 2. Figure 1 In the embodiment shown, the slider 3 and the locking block 4 are located between the two limiting members 6 in the length direction of the movable rod 2, and the slider 3 is located to the left of the locking block 4. The slider 3 abuts against the left side of the locking block 4 at the cut-off position.

[0040] In other embodiments, the vacuum gate valve 100 may be provided with more than two limiting members 6, which are spaced apart on the base 1 along the length of the movable rod 2.

[0041] Both the base through hole 11 and the gate valve through hole 21 extend along a first direction, and in the open position, the base through hole 11 and the gate valve through hole 21 are opposite each other in the first direction. The first direction is perpendicular to the length direction of the movable rod 2 and perpendicular to the upper surface of the base 1. For ease of description, the embodiment of the present invention is described using the vertical direction as an example. The first direction is as follows: Figure 1 As shown by the arrow in the image.

[0042] like Figure 1 As shown, the sliding part 33 includes a first sliding part 331 and a second sliding part 332 opposite to each other in the first direction, and the spring piece 31 includes a first spring piece 311 and a second spring piece 312. Both the first spring piece 311 and the second spring piece 312 are U-shaped structures. The first spring piece 311 and the second spring piece 312 are connected to the first sliding part 331 and the second sliding part 332 to form a ring structure. That is, in the circumferential direction of the slider 3, the first spring piece 311, the first sliding part 331, the second spring piece 312, and the second sliding part 332 are connected in sequence to form a ring structure. The first sliding part 331 is located above the movable rod 2, that is, on the side of the movable rod 2 away from the base 1, and the second sliding part 332 is located below the movable rod 2, that is, between the movable rod 2 and the base 1. The movable rod 2 passes through the through hole in the middle of the ring structure. The sealing part 32 is connected to the first sliding part 331. In the closed position, the sealing part 32 and the sealing member 5 are opposite to and abut against each other in the first direction.

[0043] like Figure 3 and Figure 5As shown, the thickness of the large-diameter segment 22 in the first direction is greater than the thickness of the small-diameter segment 24 in the first direction, and the thickness of the variable-diameter segment 23 in the first direction gradually increases from the small-diameter segment 24 to the large-diameter segment 22. The thickness of the end of the variable-diameter segment 23 connected to the large-diameter segment 22 in the first direction is greater than the thickness of the end of the variable-diameter segment 23 connected to the small-diameter segment 24 in the first direction. The large-diameter segment 22, the variable-diameter segment 23, and the small-diameter segment 24 are smoothly connected in the length direction of the movable rod 2 so that the first sliding part 331 and the second sliding part 332 can slide smoothly along the large-diameter segment 22, the variable-diameter segment 23, and the small-diameter segment 24. Specifically, the first sliding part 331 slides along the upper surface of the large-diameter segment 22, the variable-diameter segment 23, and the small-diameter segment 24, and the second sliding part 332 slides along the lower surface of the large-diameter segment 22, the variable-diameter segment 23, and the small-diameter segment 24.

[0044] The movable rod 2 is provided with a first groove 201 and a second groove 202 opposite to each other in a first direction, so as to construct a large-diameter section 22, a variable-diameter section 23, and a small-diameter section 24. For example... Figure 4 and Figure 6 As shown, a portion of the movable rod 2 is recessed inward to form a first groove 201 and a second groove 202. The opening of the first groove 201 faces upward, and the opening of the second groove 202 faces downward. The bottom surfaces of the first groove 201 and the second groove 202 are opposite each other in a first direction. The distance between the bottom surfaces of the first groove 201 and the second groove 202 in the first direction varies along the length of the movable rod 2. Specifically, the distance between the bottom surfaces of the first groove 201 and the second groove 202 corresponding to the large-diameter section 22 in the first direction is greater than the distance between the bottom surfaces of the first groove 201 and the second groove 202 corresponding to the small-diameter section 24 in the first direction. The distance between the bottom surfaces of the first groove 201 and the second groove 202 corresponding to the variable-diameter section 23 in the first direction gradually changes along the length of the movable rod 2.

[0045] The first sliding part 331 extends into the first groove 201, abuts against the bottom surface of the first groove 201, and slides along the bottom surface of the groove. The second sliding part 332 extends into the second groove 202, abuts against the bottom surface of the second groove 202, and slides along the bottom surface of the groove. During the movement of the movable rod 2, the first groove 201 and the second groove 202 serve as auxiliary positioning grooves, assisting the first sliding part 331 and the second sliding part 332 in sliding relative to the movable rod 2 along the length direction of the movable rod 2.

[0046] Furthermore, in order to make the first sliding part 331 and the second sliding part 332 slide more smoothly along the movable rod 2, such as Figure 3 and Figure 5As shown, both the first sliding part 331 and the second sliding part 332 include a connecting plate 333 and a rolling element 334. The connecting plate 333 of the first sliding part 331 and the second sliding part 332 is connected to the first spring piece 311 and the second spring piece 312. The rolling element 334 is fitted between the corresponding connecting plate 333 and the movable rod 2 and is rotatably disposed. The sealing part 32 is connected to the side of the connecting plate 333 of the first sliding part 331 away from the rolling element 334. Through the rolling of the rolling element 334, the first sliding part 331 and the second sliding part 332 slide relative to each other along the movable rod 2.

[0047] Specifically, in Figure 3 and Figure 5 In the embodiment shown, the connecting plate 333 is provided with a groove on the side near the movable rod 2, and a part of the rolling element 334 is rotatably engaged in the groove.

[0048] Optionally, the rolling element 334 is a ball, and the groove is a hemispherical groove, with a portion of the ball rollingly fitted into the hemispherical groove.

[0049] Optionally, the balls are ceramic balls.

[0050] Alternatively, the rolling element 334 can also be a roller, with the axial direction of the roller perpendicular to the length direction of the movable rod 2, and the groove being a semi-cylindrical groove, in which a part of the roller can be rolled into the groove.

[0051] Preferably, the rolling element 334 is a roller, and the ball can better achieve movement in a single direction. Therefore, making the rolling element 334 a roller can better restrict the movement of the movable rod 2 in the direction perpendicular to its length.

[0052] The following is based on Figures 1-6 The operating principle of the vacuum gate valve 100 is described using the embodiment shown as an example.

[0053] like Figure 3 and Figure 4 As shown, the movable rod 2 is in the open position, and the vacuum gate valve 100 is in the open state. At this time, the base through hole 11 and the gate valve through hole 21 are aligned in the first direction (i.e., the vertical direction), forming a vertical passage. The rolling element 334 of the first sliding part 331 of the slider 3 abuts against the upper surface of the small diameter section 24 of the movable rod 2, and the rolling element 334 of the second sliding part 332 abuts against the lower surface of the small diameter section 24 of the movable rod 2. The first spring 311 and the second spring 312 are both in a relaxed state. The sealing part 32 connected to the upper surface of the first sliding part 331 is in a low position and is offset from the sealing element 5 in the vertical direction. The slider 3 is located to the left of the locking block 4 and there is a gap between them.

[0054] like Figure 5 and Figure 6As shown, the movable rod 2 is moved to the right to the stop position. During this process, the movable rod 2 drives the slider to move to the right. When the right side of the slider 3 abuts against the left side of the locking block 4, the slider 3 and the locking block 4 are relatively stationary, and the slider 3 no longer moves with the movable rod 2. At this time, the sealing part 32 of the slider 3 is opposite to the sealing element 5 in the vertical direction. The rolling element 334 of the first sliding part 331 rolls to the left along the bottom surface of the first groove 201 until it abuts against the large diameter section 22, that is, the rolling element 334 of the first sliding part 331 rolls from the small diameter section 24 along the variable diameter section 23 to the large diameter section 22. The rolling element 334 of the second sliding part 332 rolls to the left along the bottom surface of the second groove 202 until it abuts against the large diameter section 22, that is, the rolling element 334 of the second sliding part 332 rolls from the small diameter section 24 along the variable diameter section 23 to the large diameter section 22. The first spring 311 and the second spring 312 gradually deform and open. The connecting plate 333 of the first sliding part 331 moves upward, causing the sealing part 32 to move upward and abut against the sealing element 5, thus achieving vacuum surface sealing. At this time, the base through hole 11 and the gate valve through hole 21 are offset in the first direction, forming a vertical circuit break, and the vacuum gate valve 100 is shut off.

[0055] The vacuum gate valve 100 provided in this embodiment of the invention uses a movable rod 2 as the core moving part. A sloped groove is machined on the movable rod 2 as an auxiliary positioning groove. The vacuum gate valve 100 is opened or closed by the cooperation of the slider and the stop block. The gate valve has few moving parts, simple structure, good sealing performance, and low processing difficulty.

[0056] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A vacuum gate valve, characterized in that, include: The base has a base through hole; The movable rod is provided with a gate valve through hole. The movable rod is movably disposed on the base along its length direction to move between an open position opposite to the gate valve through hole and a staggered closed position. The movable rod includes a large diameter section, a variable diameter section and a small diameter section connected in sequence along its length direction. Multiple limiting members are spaced apart on the base along the length direction. Each limiting member has a through hole. The movable rod passes through the through hole of each limiting member and is slidably disposed relative to the through hole in the length direction. The slide block, locking block, and sealing element are provided. The slide block is slidably mounted on the movable rod along the large diameter section, the variable diameter section, and the small diameter section. The slide block includes a spring, a sealing part, and a sliding part. The spring causes the sliding part to tend to press against the movable rod. The locking block is provided on the base. The sealing element and the slide block are located on the same side of the base and are stationary relative to the base. The sliding part includes a connecting plate and a rolling element. The connecting plate is connected to the spring sheet. The rolling element is fitted between the connecting plate and the movable rod and is rotatably disposed. The sealing part is connected to the side of the connecting plate away from the rolling element. The connecting plate has a groove on the side near the movable rod, and a portion of the rolling element is rotatably engaged in the groove; In the open position, the movable rod drives the slider to disengage from the locking block, the sliding part is opposite to the small diameter section, and the sealing part disengages from the sealing element; in the closed position, the movable rod drives the slider to abut against the locking block, the sliding part slides along the variable diameter section to the large diameter section, so that the spring plate deforms and drives the sealing part to abut against the sealing element.

2. The vacuum gate valve according to claim 1, characterized in that, The rolling element is a ball, and the groove is a hemispherical groove, with a portion of the ball rollingly fitting into the groove.

3. The vacuum gate valve according to claim 1, characterized in that, The rolling element is a roller, the axial direction of which is perpendicular to the length direction. The groove is a semi-cylindrical groove, and a portion of the roller is rotatably fitted into the groove.

4. The vacuum gate valve according to any one of claims 1-3, characterized in that, The sliding part includes a first sliding part and a second sliding part that are opposite each other in a first direction. The spring includes a first spring and a second spring. The first spring and the second spring are both connected to the first sliding part and the second sliding part to form an annular structure. The movable rod passes through the through hole in the middle of the annular structure. The sealing part is connected to the first sliding part.

5. The vacuum gate valve according to claim 4, characterized in that, The movable rod is provided with a first groove and a second groove opposite to each other in the first direction. The large-diameter section, the variable-diameter section and the small-diameter section are constructed in the first groove and the second groove. The first sliding part extends into the first groove and the second sliding part extends into the second groove.

6. The vacuum gate valve according to claim 4, characterized in that, The thickness of the variable diameter section gradually increases from the small diameter section to the large diameter section in the first direction, and the large diameter section, the variable diameter section, and the small diameter section are smoothly connected.

7. The vacuum gate valve according to claim 4, characterized in that, Both the base through hole and the gate valve through hole extend along the first direction, and in the open position, the base through hole and the gate valve through hole are opposite each other in the first direction.

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