Isolation valve and transmission electron microscope

Abstract

The present invention belongs to the technical field of vacuum valves, and discloses an isolation valve and a transmission electron microscope. The isolation valve is used to block an isolation port set in a channel of a transmission electron microscope, and an external dead stop is set in the channel. The isolation valve includes a valve plate, a power system, a sliding rod, and a first elastic member. The valve plate is located in the channel and is provided with a vacuum sealing ring. The output direction of the power system is perpendicular to the center line of the isolation port. A switching component is provided between the sliding rod and the valve plate, and the switching component can lock the valve plate at the opening or closing of the isolation port. The output power direction of the power system is perpendicular to the axial direction of the isolation port. When the power system outputs power, the valve plate opens or closes the isolation port, so that the isolation valve can be used in a narrow channel. The power system will not occupy too much axial space of the isolation port, which is convenient for separate isolation of different vacuum areas in the channel of the transmission electron microscope system, and convenient for repairing or maintaining a local area of ​​the transmission electron microscope system.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, and in particular to an isolation valve. Background Art

[0002] Transmission Electron Microscope (TEM), also known as TEM, can see fine structures smaller than 0.2um that cannot be seen under an optical microscope. These structures are called submicroscopic structures or ultramicrostructures.

[0003] In the transmission electron microscope system, the channel through which the electron beam passes is a vacuum pipe, and different areas have different requirements for vacuum. When repairing or maintaining a local area, if the entire vacuum system is completely destroyed, it will take a long time to evacuate the system. The channel is relatively narrow, and the electron beam needs to move in the narrow channel. The channel is divided into multiple different vacuum areas, and each vacuum area is connected by an isolation port. Therefore, a device is urgently needed to close the isolation port in the narrow channel to isolate different vacuum areas. Summary of the invention

[0004] The object of the present invention is to provide an isolation valve which can seal an isolation port in a channel to isolate different vacuum areas in the channel, thereby facilitating repair or maintenance of a local area of ​​a transmission electron microscope system.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] An isolation valve is used to block an isolation port arranged in a channel of a transmission electron microscope, wherein an external dead stop is arranged in the channel, and the isolation valve comprises:

[0007] A valve plate, the valve plate is located in the channel, the valve plate is provided with a vacuum sealing ring, and the vacuum sealing ring is used to abut against the isolation port;

[0008] A power system, wherein the output power direction of the power system is perpendicular to the center line of the isolation port;

[0009] A slide bar, one end of which is connected to an output end of the power system;

[0010] a first elastic member, one end of which is connected to the slide rod, and the other end of which is connected to the valve plate, the first elastic member being used to provide elastic force to the valve plate, an external dead stop being provided in the channel, the external dead stop being located at a side of the valve plate away from the power system, a top plate being limitedly located outside the valve plate at one end of the slide rod away from the power system, the elastic force being able to drive the valve plate to move in a direction close to the external dead stop, so as to press the valve plate against the top plate and / or the external dead stop;

[0011] The power system has a first driving stage capable of driving the valve plate and the slide rod to synchronously move until the valve plate abuts against the external dead stop limit and a second driving stage capable of driving the slide rod to continue to move relative to the valve plate;

[0012] A switching component is provided between the sliding rod and the valve plate. The switching component can switch the position of the valve plate and the vacuum sealing ring under the drive of the power system, so that the valve plate and the vacuum sealing ring move in a direction perpendicular to the output power of the power system, and switch from an open valve position that opens the isolation port to a closed valve position that closes the isolation port.

[0013] Preferably, the switching component comprises:

[0014] A cam is arranged on a side of the slide bar close to the isolation port, and is used to abut against the valve plate. The cam is provided with a valve opening surface, a switching inclined surface and a valve closing surface which are sequentially connected in a step-like manner along a direction close to the power system. The valve closing surface is located on a side of the valve opening surface close to the isolation port. The highest point of the valve plate has three states of abutting against the valve opening surface, abutting against the switching inclined surface, and abutting against the valve closing surface.

[0015] A second elastic member, one end of the second elastic member is connected to the valve plate, and the other end is connected to the sliding rod. The second elastic member is used to provide an elastic force to the sliding rod, and the direction of the elastic force is perpendicular to the output power direction of the power system, and can drive the cam to move so that the valve plate can switch between the above three states.

[0016] Preferably, the surface of the valve plate abutting against the cam is provided with an abutting surface, and the abutting surface is provided with a first pressing surface, and when the valve plate and the vacuum sealing ring are in the valve closing position, the first pressing surface is used to abut against the valve closing surface;

[0017] The cam is provided with a switching auxiliary inclined surface and a valve closing auxiliary surface, one end of the switching auxiliary inclined surface is connected to the valve closing surface, and the other end is connected to the valve closing auxiliary surface, the valve closing auxiliary surface is located on the side of the switching auxiliary inclined surface close to the isolation port, and a second pressure surface is provided on the abutting surface, and when the valve plate and the vacuum sealing ring are in the valve closing position, the second pressure surface is used to abut against the valve closing auxiliary surface.

[0018] Preferably, a groove is provided in the middle of the cam, and the abutment surface is provided with a protrusion matched with the groove, and the protrusion has a third pressure surface, and when the valve plate and the vacuum sealing ring are in the valve closing position, the third pressure surface is used to abut against the inner wall surface of the groove.

[0019] Preferably, a floating shaft is rotatably connected between one end of the sliding rod and the output end of the power system, and the rotation axis of the floating shaft is respectively perpendicular to the output power direction of the power system and the axial direction of the isolation port, and an external auxiliary dead stop is provided in the channel on the side of the sliding rod away from the isolation port, and the external auxiliary dead stop is used to abut against the side of the sliding rod away from the isolation port.

[0020] Preferably, a pressure plate is provided on a side of the slide bar away from the isolation port, the pressure plate is used to abut against the external auxiliary dead stop, and the pressure plate and the slide bar are detachably connected.

[0021] Preferably, the power system includes a valve body, a cavity is provided in the valve body, a push plate is provided in the cavity, the push plate divides the cavity into an air intake chamber and an air return chamber, the valve body is provided with an air intake port and an air return port, the air intake port is communicated with the air intake chamber, the air return port is communicated with the air return chamber, the push plate is connected with an output shaft, the valve body is provided with an output port, the output shaft extends to the outside of the valve body through the output port and is connected to the sliding rod.

[0022] Preferably, the outer wall of the push plate is provided with a first sealing ring for sealingly abutting against the inner wall of the cavity.

[0023] Preferably, a second sealing ring is provided between the outer wall of the output shaft and the inner wall of the output port, and a third sealing ring for sealingly connecting with the channel is provided on the outer wall of the valve body.

[0024] A transmission electron microscope comprises the above isolation valve.

[0025] Beneficial effects of the present invention:

[0026] The isolation valve of the present invention has a power system that provides a power source for the movement of the valve plate located in the channel. The power system outputs power to push the sliding rod to move in the output power direction of the power system. The first elastic member presses the valve plate against the top plate. While the sliding rod moves, it drives the valve plate to move in the output power direction of the power system until the valve plate moves to abut against the external dead stop in the channel. The power system continues to output power. The valve plate cannot continue to move in the output power direction of the power system due to being blocked by the external dead stop. The external dead stop provides a blocking force. At the same time, the sliding rod can continue to move in the output power direction of the power system without being blocked. The first elastic member generates deformation energy storage. The power system continues to drive the sliding rod to move. The vacuum sealing ring abuts against the isolation port to lock the valve plate and the vacuum sealing ring at the closed isolation port through the switching component. When the isolation port needs to be switched from a closed state to an open state, the power system stops outputting power, and the output shaft of the power system is retracted, driving the sliding rod to be retracted, so as to drive the vacuum sealing ring on the valve plate to leave the isolation port, and the valve plate opens the isolation port. The output power direction of the power system is perpendicular to the axial direction of the isolation port. When the power system outputs power, the valve plate can open or close the isolation port, so that the isolation valve can be used in narrow channels, and the power system will not occupy too much axial space of the isolation port.

[0027] The present invention also provides a transmission electron microscope, which uses the isolation valve to seal the isolation port in the transmission electron microscope channel. The isolation valve is suitable for the narrow channel of the transmission electron microscope, and most of the power system is located outside the channel. The output end of the power system extends into the channel, and then drives the valve plate to move to drive the vacuum sealing ring to seal the isolation port. The isolation valve can isolate different vacuum areas in the channel of the transmission electron microscope system separately, which is convenient for repairing or maintaining the local area of ​​the transmission electron microscope system. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the isolation valve in the present invention;

[0029] Figure 2 is a cross-sectional view of the isolation valve of the present invention;

[0030] Figure 3 yes Figure 2 Schematic diagram of the structure of the middle slide rod and valve plate;

[0031] Figure 4 It is a front view of the slide bar in the present invention;

[0032] Figure 5 It is a structural schematic diagram of the sliding rod in the present invention from another angle;

[0033] Figure 6 It is a schematic diagram for illustrating the slotted structure in the slide bar in the present invention;

[0034] Figure 7 is a bottom view of the slide bar of the present invention;

[0035] Figure 8 is a cross-sectional view of the valve plate of the present invention;

[0036] Fig. 9 It is a structural schematic diagram of the valve plate in the present invention;

[0037] Fig.10 It is a schematic diagram for showing the dovetail groove structure in the valve plate in the present invention;

[0038] Fig.11 is a top view of the valve plate of the present invention;

[0039] Fig.12 It is a partial schematic diagram of the isolation valve in the open state of the present invention;

[0040] Fig.13 It is a partial schematic diagram of the isolation valve in the present invention when switching from an open valve state to a closed valve state;

[0041] Fig.14 It is a partial schematic diagram of the isolation valve in the closed state of the present invention.

[0042] In the figure:

[0043] 1. Valve plate; 11. Vacuum sealing ring; 12. Abutment surface; 121. First pressure surface; 122. Second pressure surface; 13. Dovetail groove; 14. Protrusion; 141. Third pressure surface; 15. Flanging; 2. Power system; 21. Valve body; 211. Air inlet cavity; 212. Air return cavity; 213. Air inlet port; 214. Air return port; 215. Output port; 216. Third sealing ring; 22. Push plate; 221. First sealing ring; 23. Output shaft; 231. Second sealing ring; 3. Isolation port; 4. External dead gear; 41. External auxiliary dead gear; 5. Sliding rod; 51. Floating shaft; 52. Top plate; 53. Pressing plate; 531. Pressing edge; 532. Through hole; 54. Placement groove; 6. First elastic member; 61. Mounting block; 62. top shaft; 63. guide convex strip; 7. cam; 71. valve opening surface; 72. switching inclined surface; 73. valve closing surface; 74. switching auxiliary inclined surface; 75. valve closing auxiliary surface; 76. slot; 8. second elastic member; 81. pin. DETAILED DESCRIPTION

[0044] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0045] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0047] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0048] The following is combined with Figure 1-14 The technical solution of the present invention is further illustrated by specific implementation methods.

[0049] like Figure 1As shown, this embodiment provides an isolation valve for blocking an isolation port 3 communicating between two adjacent vacuum areas in a channel of an isolation transmission electron microscope system. The isolation valve comprises a valve plate 1, a power system 2, a slide rod 5 and a first elastic member 6. The valve plate 1 is located in the channel and on the center line of the isolation port 3. The valve plate 1 is provided with a vacuum seal ring 11, and the vacuum seal ring 11 is used to abut against the isolation port 3. The output power direction of the power system 2 is perpendicular to the center line of the isolation port 3. One end of the slide rod 5 is connected to the output end of the power system 2. One end of the first elastic member 6 is connected to the slide rod 5, and the other end is connected to the valve plate 1. The first elastic member 6 is used to provide elastic force to the valve plate 1. An external dead stop 4 is provided in the channel. The external dead stop 4 is located on the side of the valve plate 1 away from the power system 2. The other end of the slide rod 5 is provided with a top plate 52. The elastic force can drive the valve plate 1 to move in a direction close to the external dead stop 4, so as to press the valve plate 1 against the top plate 52 and / or the external dead stop 4. The power system 2 has a first driving stage that can drive the valve plate 1 and the slide bar 5 to synchronously move until the valve plate 1 and the external dead stop 4 are limitedly abutted, and a second driving stage that drives the slide bar 5 to continue to move relative to the valve plate 1; a switching component is arranged between the slide bar 5 and the valve plate 1, and the switching component can switch the position of the valve plate 1 and the vacuum seal ring 11 under the drive of the power system 2, so that the valve plate 1 and the vacuum seal ring 11 move along the direction perpendicular to the output power of the power system 2, and switch from the open valve position of opening the isolation port 3 to the closed valve position of closing the isolation port 3. The output power direction of the power system 2 is perpendicular to the axial direction of the isolation port 3. When the power system 2 outputs power, it cooperates with the switching component, and the valve plate 1 and the vacuum seal ring 11 can open or close the isolation port 3, so that the isolation valve can be used in a narrow channel, and the power system 2 will not occupy too much space in the axial direction of the isolation port 3, which is convenient for the separate isolation of different vacuum areas in the channel of the transmission electron microscope system, and for the repair or maintenance of the local area of ​​the transmission electron microscope system.

[0050] like Figure 2As shown, the power system 2 provides a power source for the isolation valve. The power system 2 in this embodiment includes a valve body 21, a push plate 22 and an output shaft 23. A cavity is provided in the valve body 21, and the push plate 22 is located in the cavity. A first sealing ring 221 is fixedly provided on the outer wall of the push plate 22. The first sealing ring 221 is used to seal and abut with the inner wall of the cavity, and the valve body 21 is divided into an air inlet cavity 211 and an air return cavity 212. The air inlet cavity 211 is provided with an air inlet port 213, and the air return cavity 212 is provided with an air return port 214. After the air inlet cavity 211 is fixedly connected with the push plate 22, the end of the output shaft 23 passes through the push plate 22 and enters the air return cavity 212. The air return cavity 212 of the valve plate 1 is connected with an output port 215, and the other end of the output shaft 23 extends out of the valve body 21 through the output port 215 to reach the outside of the valve body 21, so as to provide a power source for the equipment outside the valve body 21. In order to ensure the sealing performance, a sealing ring is fixedly provided at the connection between the push plate 22 and the output shaft 23, a second sealing ring 231 fixed to the inner wall of the output port 215 is provided at the connection between the output shaft 23 and the output port 215, and a third sealing ring 216 is provided on the outer wall of the valve body 21 near the output port 215. The third sealing ring 216 can improve the sealing performance between the valve body 21 and the channel when the valve body 21 is installed on the outside of the channel side by bolts. When the power system 2 needs to output power, the return air port 214 is closed, that is, the return air chamber 212 is closed, and high-pressure gas is introduced into the air inlet chamber 211 through the air inlet port 213, so that the gas pressure in the air inlet chamber 211 is greater than the gas pressure in the return air chamber 212, forcing the slide bar 5 to move in the direction close to the output port 215. During the movement, the first sealing ring 221 moves with the push plate 22 and maintains a sealed contact with the inner wall of the valve body 21. The push plate 22 drives the output shaft 23 to move, and the end of the output shaft 23 away from the push plate 22 makes a linear motion along its own axis outside the valve body 21. The direction along the axis of the output shaft 23 and away from the air inlet chamber 211 is the output power direction of the power system 2 in this embodiment. The design of the sealing structure such as the first sealing ring 221, the second sealing ring 231 and the third sealing ring 216 makes the power system 2 in the vacuum periphery and the output shaft 23 in the vacuum environment.

[0051] like Figure 2 and Figure 3As shown, one end of the slide bar 5 is connected to the output shaft 23, and the other end extends in a direction away from the power system 2, and is provided with a top plate 52, which is fixed to the end surface of the slide bar 5. Guide ridges 63 are provided on both sides of the outer wall of the slide bar 5, and a guide slider (not shown in the figure) abutting against the guide ridges 63 is provided in the channel, one side of the guide slider is fixedly connected to the isolation plane where the isolation port 3 is provided, and the other side abuts against the side of the guide ridge 63 close to the isolation port 3. The guide slider cooperates with the guide ridge 63, so that the slide bar moves smoothly along the axial direction of the output shaft 23 under the push of the output shaft 23, playing a guiding role. The valve plate 1 is located on the side of the slide bar 5 close to the isolation port 3, and an external dead stop 4 is provided in the channel. The external dead stop 4 is located on the side of the valve plate 1 away from the power system 2. When the power system 2 pushes the valve plate 1 through the slide bar 5, the external dead stop 4 abuts against the valve plate 1, and the abutting surface is parallel to the axial direction of the isolation port 3. During the movement of the output shaft 23, the external dead stop 4 blocks the valve plate 1 from continuing to be pushed together with the slide bar 5. A floating rotating shaft is provided at the connection between the slide bar 5 and the output shaft 23, and the floating rotating shaft realizes the rotation connection between the slide bar 5 and the output shaft 23. The rotation axis of the floating rotating shaft is respectively perpendicular to the axial direction of the output shaft 23 and the axial direction of the isolation port 3. When the isolation valve is in use, part of the structure is inside the channel and part of the structure is outside the channel. The processing accuracy and installation accuracy of each part are very high. Otherwise, it is easy to cause the structure to be stuck or interfered, and it cannot be used normally. The floating rotating shaft here can provide a certain adjustable space, while ensuring the realization of its normal valve closing function, reducing the requirements for processing accuracy and installation accuracy. An external auxiliary dead stop 41 is also provided in the channel, and a pressure plate 53 is fixedly provided on the side of the slide rod 5 away from the isolation port 3. The pressure plate 53 is provided with two pressure edges 531 extending in the direction away from the isolation port 3, and the two pressure edges 531 are used to abut against the external auxiliary dead stop 41. The pressure edge 531 structure is set so that when the isolation valve is closed, the pressure is pressed downward by two surfaces instead of one surface of the original pressure plate 53, and the pressure is more stable, so that the sealing effect of the vacuum sealing ring 11 is better. The pressure plate 53 is made of copper, preferably tin bronze, and has good wear resistance. A through hole 532 is opened on the pressure plate 53, and the through hole 532 passes through the pressure plate 53. When the isolation valve closes the isolation port 3, the through hole 532 coincides with the axis of the isolation port 3. The slide rod 5 is made of stainless steel, which is durable, corrosion-resistant, rust-proof and easy to process. When the isolation valve is in use and the vacuum sealing ring 11 closes the isolation port 3, X-rays will be irradiated from the side of the pressure plate 53 away from the isolation port 3. The setting of the through hole 532 can prevent the X-rays from directly irradiating the pressure plate 53 but irradiating the sliding rod 5 made of stainless steel. The sliding rod 5 made of stainless steel has a certain shielding effect on X-rays.When the pressure plate 53 performs the valve closing action, it plays a great role in ensuring the reliability of the valve closing. The pressure plate 53 will be worn during use. In order to ensure the reliability of the valve closing, it needs to be replaced frequently. The pressure plate 53 and the slide rod 5 are set to be detachably connected. In this embodiment, two bolts are used to detachably connect the pressure plate 53 to the slide rod 5, which is convenient for replacing the pressure plate 53, making the isolation valve easy to maintain, and improving the valve closing reliability and service life of the isolation valve.

[0052] Since the vacuum seal ring 11 has low rigidity, in order to completely seal the isolation port 3, the vacuum seal ring 11 needs to be pressed against the isolation port 3. Since a floating shaft is provided between the slide bar 5 and the output shaft 23, the slide bar 5 will rotate in a direction away from the isolation port 3 when subjected to force. The external auxiliary dead stop 41 blocks the slide bar 5, so that the slide bar 5 cannot rotate in a direction away from the isolation port 3, and the vacuum seal ring 11 can only be pressed against the isolation port 3. Figure 3 As shown, the first elastic member 6 is an object with an elastic structure, which can generate energy storage when deformed and provide elastic force. The first elastic member 6 can be an elastic structure, a rubber block, etc. In this embodiment, a spring is used, which is easy to deform, has high elasticity, and has a relatively stable elastic force. The first elastic member 6 is arranged between the slide rod 5 and the valve plate 1. A placement groove 54 for placing the first elastic member 6 is provided at the corresponding position of the slide rod 5 and the side wall of the valve plate 1. The two ends of the first elastic member 6 are respectively fixedly connected with mounting blocks 61. One mounting block 61 is fixed in the placement groove 54, and the other end of the mounting block 61 is connected with a top shaft 62. The top shaft 62 abuts against the side wall of the valve plate 1 close to the power system 2. The first elastic member 6 is used to provide elastic force to the valve plate 1. The elastic force drives the valve plate 1 to move in the direction close to the top plate 52, so that the side wall of the valve plate 1 abuts against the top plate 52.

[0053] A dovetail groove 13 is provided at the bottom of the valve plate 1. The dovetail groove 13 is used to install a vacuum seal ring 11. The vacuum seal ring 11 is used to abut against the isolation port 3 to seal the isolation port 3. The dovetail groove 13 facilitates the installation and quick replacement of the vacuum seal ring 11. The vacuum seal ring 11 in this embodiment is a perfluoro rubber O-ring that can be used in ultra-high vacuum systems. It has excellent chemical resistance and heat resistance. The product is homogeneous and has no problems such as penetration, cracking and pinholes on the surface. It can extend the service life of the vacuum seal ring 11, effectively reduce maintenance costs, and improve the isolation reliability of the isolation valve.

[0054] like Figure 1 and Figure 2 As shown, a switching assembly is provided between the slide rod 5 and the valve plate 1 , and the switching assembly can switch the position of the valve plate 1 so that the valve plate 1 is locked at the open or closed isolation port 3 . The switching assembly includes a cam 7 and a second elastic member 8 .

[0055] like Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the cam 7 is arranged at the bottom of the slide bar 5. The cam 7 can be formed separately from the slide bar 5 or integrally. In this embodiment, the cam 7 and the slide bar 5 are integrally formed, which is easy to manufacture. The cam 7 is arranged on the side of the slide bar 5 close to the isolation port 3, and is used to abut against the valve plate 1. The cam 7 is provided with a valve opening surface 71, a switching inclined surface 72, a valve closing surface 73, a switching auxiliary inclined surface 74 and a valve closing auxiliary surface 75 which are sequentially connected in a step-like manner along the direction close to the power system 2. The valve closing surface 73 is located on the side of the valve opening surface 71 close to the isolation port 3, and the valve closing auxiliary surface 75 is located on the side of the switching auxiliary inclined surface 74 close to the isolation port 3, that is, the distance between the valve opening surface 71, the switching inclined surface 72, the valve closing surface 73, the switching auxiliary inclined surface 74 and the valve closing auxiliary surface 75 and the isolation port 3 is getting smaller and smaller, and the highest point of the valve plate 1 has three states of abutting against the valve opening surface 71, abutting against the switching inclined surface 72 and abutting against the valve closing surface 73. The cam 7 is provided with a slot 76 near the power system 2. The slot 76 is arranged on the switching auxiliary inclined surface 74 and the valve closing auxiliary surface 75, and extends to the place connected with the placement groove 54. The slot 76 is just enough for part of the push rod to extend into.

[0056] like Figure 8 , Fig. 9 , Fig.10 and Fig.11 As shown, the surface of the valve plate 1 abutting against the cam 7 is provided with an abutting surface 12, which is adapted and fits with the surface of the cam 7, and a protrusion 14 that can slide into the slot 76 is provided on the abutting surface. Flangings 15 are provided on both sides of the valve plate 1, and the inner wall of the flange 15 abuts against the outer wall of the slide rod 5 so that the valve plate 1 can only move along the axial direction of the slide rod 5, making the structure more stable when moving. A first pressure surface 121 and a second pressure surface 122 are provided on the abutting surface 12, and a third pressure surface 141 is provided on the protrusion 14. When the valve plate 1 and the vacuum sealing ring 11 close the isolation port 3, that is, when the valve plate 1 and the vacuum sealing ring 11 are in the valve closing position, the first pressure surface 121 abuts against the valve closing surface 73, the second pressure surface 122 abuts against the valve closing auxiliary surface 75, and the third pressure surface 141 abuts against the inner wall surface of the groove 76. When the valve plate 1 and the vacuum sealing ring 11 close the isolation port 3, the first pressure surface 121, the second pressure surface 122 and the third pressure surface 141 realize the pressure of three pressure surfaces on the vacuum sealing ring 11, thereby solving the problem that the vacuum sealing ring 11 is partially lifted up due to a single plane pressure point, thereby causing sealing failure.

[0057] Replay Figure 1, the second elastic member 8 is connected between the valve plate 1 and the slide bar 5. The second elastic member 8 is used to provide elastic force to the slide bar 5. The direction of the elastic force is perpendicular to the output power direction of the power system 2, and can drive the cam 7 to move. Specifically, the second elastic member 8 is an object with an elastic structure, which can generate energy storage when deformed and provide elastic force. The second elastic member 8 can be an elastic structure, a rubber block, etc. In this embodiment, a torsion spring is used. A pin 81 for connecting with the torsion spring is provided on the valve plate 1. The ends of the torsion spring are respectively fixed to the pin 81 and the slide bar 5. When relative displacement occurs between the valve plate 1 and the slide bar 5, the torsion spring generates a torque or rotational force to pull them back to the initial position. The second elastic member 8 tightens the valve plate 1 in the direction close to the slide bar 5, so that the abutting surface 12 of the valve plate 1 is tightly abutted against the outer edge of the cam 7, ensuring that the valve plate 1 can change the contact position between the valve plate 1 and the cam 7 with the movement of the slide bar 5, and ensuring the effectiveness of the cam 7 structure.

[0058] The implementation principle of the isolation valve of this embodiment is introduced below: Fig.12 , Fig.13 and Fig.14 As shown, under the elastic force of the first elastic member 6, the valve plate 1 abuts against the top plate 52, and under the elastic force of the second elastic member 8, the abutting surface 12 of the valve plate 1 abuts against the outer edge of the cam 7 of the sliding rod 5, the first pressing surface 121 of the valve plate 1 abuts against the valve opening surface 71 of the cam 7, and the second pressing surface 122 abuts against the valve closing surface 73. When it is necessary to switch to the closed valve state, the air inlet 213 is ventilated, and the output shaft 23 moves in the output power direction in the power direction, driving the slide rod 5 and the valve plate 1 to move in the output power direction until the valve plate 1 abuts against the external dead stop 4. The valve plate 1 cannot move further, and the slide rod 5 drives the cam 7 to continue to move. The contact position between the abutting surface 12 of the valve plate 1 and the cam 7 changes, and the edge of the first pressure surface 121 close to the output shaft 23 switches from abutting against the valve opening surface 71 to abutting against the switching slope 72. Since the switching slope 72 is located at the end of the valve opening surface 71 close to the isolation port 3, the valve plate 1 gradually approaches the isolation port 3 and gradually performs the valve closing action. At the same time, the valve plate 1 has abutted against the external dead stop 4 at this time, and can only move along the surface of the external dead stop 4 in the direction close to the isolation port 3. The power system 2 continues to output power, the output shaft 23 continues to drive the slide rod 5 to move, the contact position between the abutting surface 12 of the valve plate 1 and the cam 7 continues to change, the edge of the first pressure surface 121 close to the output shaft 23 switches from abutting against the switching inclined surface 72 to abutting against the valve closing surface 73, the valve plate 1 moves to the closed isolation port 3, the vacuum sealing ring 11 seals the isolation port 3, and isolates the two adjacent vacuum areas in the channel;

[0059] When it is necessary to switch the isolation valve from the closed state to the open state, the return air port 214 is ventilated and the output shaft 23 is retracted. At the moment of startup, the valve plate 1 is quickly separated from the contact surface of the isolation port 3 under the action of the first elastic member 6 and the second elastic member 8, thereby avoiding friction between the vacuum sealing ring 11 and the isolation port 3 and the isolation plane. Specifically, the first elastic member 6 pushes the valve plate 1 to always abut against the external dead stop 4, and the second elastic member 8 pulls the valve plate 1 to always abut against the cam 7. When the output shaft 23 retracts, the cam 7 is driven to move, and the first pressure surface 121 of the valve plate 1 switches from abutting against the valve closing surface 73 to abutting against the switching inclined surface 72. The valve plate 1 is no longer blocked by the valve closing surface 73, and moves in the direction away from the isolation port 3 under the pull of the elastic force of the second spring. At the same time, due to the obstruction of the external dead stop 4, the valve plate 1 can only move along the axial direction of the isolation port 3 when moving in the direction away from the isolation port 3. In summary, when the isolation port 3 is opened, the valve plate 1 can make a pure movement along the axis of the isolation port 3 at the isolation port 3, and the vacuum sealing ring 11 will not generate planar friction with the isolation port 3 and the isolation plane, which greatly extends the service life of the sealing ring and fundamentally eliminates the problem of dust falling from the vacuum sealing ring 11 during friction. The output shaft 23 continues to retract until the output shaft 23 drives the top plate 52 of the slide bar 5 to abut against the valve plate 1. At this time, the abutting surface 12 of the valve plate 1 is also completely in contact with the surface of the cam 7, and the valve plate 1 is located away from the isolation port 3. The output shaft 23 continues to retract, and the slide bar 5 drives the valve plate 1 to leave the axial position of the isolation port 3. The adjacent vacuum areas in the channel are connected, and the transmission electron microscope system is used normally.

[0060] The output power direction of the power system 2 is perpendicular to the axial direction of the isolation port 3. When the power system 2 outputs power, the valve plate 1 can open or close the isolation port 3, so that the isolation valve can be used in narrow channels, and the power system 2 will not occupy too much axial space of the isolation port 3.

[0061] This embodiment also provides a transmission electron microscope, including the above-mentioned isolation valve. The present invention also provides a transmission electron microscope, through which the isolation valve is used to close the isolation port 3 in the transmission electron microscope channel. The isolation valve is suitable for the narrow channel of the transmission electron microscope. Most of the power system 2 is located outside the channel, and the output end of the power system 2 extends into the channel, and then the valve plate 1 is driven to move to drive the vacuum sealing ring 11 to close the isolation port 3. The isolation valve can isolate different vacuum areas in the channel of the transmission electron microscope system separately, which is convenient for repairing or maintaining the local area of ​​the transmission electron microscope system.

[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. An isolation valve, characterized in that: The invention is used for blocking an isolation port (3) arranged in a channel of a transmission electron microscope, wherein an external dead stop (4) is arranged in the channel, and the isolation valve comprises: A valve plate (1), the valve plate (1) being located in the channel, the valve plate (1) being provided with a vacuum sealing ring (11), the vacuum sealing ring (11) being used to abut against the isolation port (3); A power system (2), wherein the output power direction of the power system (2) is perpendicular to the center line of the isolation port (3); A sliding rod (5), one end of which is connected to an output end of the power system (2); a first elastic member (6), one end of the first elastic member (6) being connected to the slide bar (5) and the other end being connected to the valve plate (1), the first elastic member (6) being used to provide elastic force to the valve plate (1), the external dead stop (4) being located on a side of the valve plate (1) away from the power system (2), and a top plate (52) being limitedly located outside the valve plate (1) being provided at one end of the slide bar (5) away from the power system (2), the elastic force being able to drive the valve plate (1) to move in a direction close to the external dead stop (4) so ​​as to press the valve plate (1) against the top plate (52) and / or the external dead stop (4); The power system (2) has a first driving stage capable of driving the valve plate (1) and the slide rod (5) to move synchronously until the valve plate (1) is in limited contact with the external dead stop (4), and a second driving stage capable of driving the slide rod (5) to continue to move relative to the valve plate (1); A switching component is provided between the slide rod (5) and the valve plate (1). In the second driving stage of the power system (2), the switching component can switch the positions of the valve plate (1) and the vacuum sealing ring (11) under the drive of the power system (2), so that the valve plate (1) and the vacuum sealing ring (11) move in a direction perpendicular to the output power of the power system (2) and switch from an open valve position for opening the isolation port (3) to a closed valve position for closing the isolation port (3); The switching component comprises: A cam (7) is arranged on a side of the slide bar (5) close to the isolation port (3) and is used to abut against the valve plate (1). The cam (7) is provided with a valve opening surface (71), a switching inclined surface (72) and a valve closing surface (73) which are sequentially connected in a step-like manner along a direction close to the power system (2). The valve closing surface (73) is located on a side of the valve opening surface (71) close to the isolation port (3). The highest point of the valve plate (1) has three states of abutting against the valve opening surface (71), abutting against the switching inclined surface (72) and abutting against the valve closing surface (73). A second elastic member (8), one end of the second elastic member (8) is connected to the valve plate (1), and the other end is connected to the slide rod (5), the second elastic member (8) is used to provide an elastic force to the slide rod (5), the direction of the elastic force is perpendicular to the output power direction of the power system (2), and can drive the cam (7) to move, so that the valve plate (1) switches between the above three states.

2. The isolation valve according to claim 1, characterized in that The surface of the valve plate (1) abutting against the cam (7) is provided with an abutting surface (12), and the abutting surface (12) is provided with a first pressing surface (121), and when the valve plate (1) and the vacuum sealing ring (11) are located in the valve closing position, the first pressing surface (121) is used to abut against the valve closing surface (73); The cam (7) is provided with a switching auxiliary inclined surface (74) and a valve closing auxiliary surface (75); one end of the switching auxiliary inclined surface (74) is connected to the valve closing surface (73), and the other end is connected to the valve closing auxiliary surface (75); the valve closing auxiliary surface (75) is located on the side of the switching auxiliary inclined surface (74) close to the isolation port (3); a second pressure surface (122) is provided on the abutting surface (12); when the valve plate (1) and the vacuum sealing ring (11) are in the valve closing position, the second pressure surface (122) is used to abut against the valve closing auxiliary surface (75).

3. The isolation valve according to claim 2, characterized in that The cam (7) is provided with a slot (76) in the middle, the abutting surface (12) is provided with a protrusion (14) matched with the slot (76), and the protrusion (14) has a third pressure surface (141). When the valve plate (1) and the vacuum sealing ring (11) are in the valve closing position, the third pressure surface (141) is used to abut against the inner wall surface of the slot (76).

4. The isolation valve according to claim 1, characterized in that A floating shaft is rotatably connected between one end of the slide bar (5) and the output end of the power system (2), and the rotation axis of the floating shaft is respectively perpendicular to the output power direction of the power system (2) and the axial direction of the isolation port (3). An external auxiliary dead stop (41) is provided in the channel and is located on the side of the slide bar (5) away from the isolation port (3). The external auxiliary dead stop (41) is used to abut against the side of the slide bar (5) away from the isolation port (3).

5. The isolation valve according to claim 4, characterized in that A pressure plate (53) is provided on the side of the slide bar (5) away from the isolation opening (3), and the pressure plate (53) is used to abut against the external auxiliary dead stop (41). The pressure plate (53) and the slide bar (5) are detachably connected.

6. The isolation valve according to claim 1, characterized in that The power system (2) comprises a valve body (21), a cavity is arranged in the valve body (21), a push plate (22) is arranged in the cavity, the push plate (22) divides the cavity into an air intake cavity (211) and an air return cavity (212), the valve body (21) is provided with an air intake port (213) and an air return port (214), the air intake port (213) is communicated with the air intake cavity (211), the air return port (214) is communicated with the air return cavity (212), the push plate (22) is connected with an output shaft (23), the valve body (21) is provided with an output port (215), the output shaft (23) extends to the outside of the valve body (21) through the output port (215), and is connected to the slide rod (5).

7. The isolation valve according to claim 6, characterized in that The outer wall of the push plate (22) is provided with a first sealing ring (221) for sealingly contacting the inner wall of the cavity.

8. The isolation valve according to claim 6, characterized in that A second sealing ring (231) is provided between the outer wall of the output shaft (23) and the inner wall of the output port (215); And / or, the outer wall of the valve body (21) is provided with a third sealing ring (216) for sealingly connecting with the channel.

9. A transmission electron microscope, characterized in that: The isolation valve comprises any one of claims 1-8.

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