Dual drive spicule mechanism

Abstract

The application relates to a wafer prober in the field of semiconductors, in particular to a double-drive wafer prober. The application aims to provide a double-drive wafer prober with simple structure, small volume and simpler construction process, which comprises a first drive assembly, a first connecting rod, a second drive assembly and a second connecting rod. The output end of the first drive assembly is connected with the first end of the first connecting rod, the output end of the second drive assembly is connected with the first end of the second connecting rod, the second end of the first connecting rod is connected with the second end of the second connecting rod, the connecting point of the first connecting rod and the second connecting rod is a third connecting point, the output end of the second drive assembly is adapted to drive the second connecting rod to rotate with the third connecting point as a fulcrum, and the output end of the first drive assembly is adapted to drive the first connecting rod to rotate with the third connecting point as a fulcrum.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of semiconductor field in diamond equipment, in particular to a kind of double drive diamond mechanism. BACKGROUND

[0002] In the field of diamond, diamond head needs to follow the horizontal uniform motion of machine table, and the end needs to realize the reciprocating motion of high frequency and high repeatability in longitudinal direction. In order to ensure that the compound motion of the end of diamond head has no lateral slip or lateral slip is small enough in the working range, displacement compensation needs to be carried out in the same direction as the machine table motion. At the same time, for different products, in order to ensure production efficiency, the speed of base table motion will be different, and the compensation displacement requirement will also be different.

[0003] The existing diamond mechanism often adopts double-shaft drive. In order to ensure the independence of double-shaft drive, the driving direction of double-shaft to the end must be perpendicular to each other, forming a three-dimensional structure. Not only the volume is large, but also the double-shaft drive must be strictly orthogonal, and the process requirement is also high. At the same time, in order to ensure the realization of the mechanism, a part with large width-thickness ratio or length-diameter ratio is introduced as a force or displacement transmission unit. The elastic response caused by the flexural curve and elasticity of such part is difficult to control, which has a great influence on the end displacement accuracy and the independence of double-shaft. SUMMARY

[0004] The technical problem to be solved by the present application is to provide a double drive diamond mechanism with simple structure, small volume and simpler construction process.

[0005] In order to solve the above technical problems, the present application provides the following technical solutions:

[0006] The double drive diamond mechanism of the present application comprises a first drive assembly, a first connecting rod, a second drive assembly and a second connecting rod. The first drive assembly, the first connecting rod, the second drive assembly and the second connecting rod are located in the same plane. The output end of the first drive assembly is connected with the first end of the first connecting rod. The output end of the second drive assembly is connected with the first end of the second connecting rod. The second end of the first connecting rod is connected with the second end of the second connecting rod. The connecting point of the first connecting rod and the second connecting rod is a third connecting point. The output end of the second drive assembly is adapted to drive the second connecting rod to rotate about the third connecting point as a fulcrum. The output end of the first drive assembly is adapted to drive the first connecting rod to rotate about the third connecting point as a fulcrum.

[0007] The double drive crystal pricking mechanism further comprises a frame, the first drive assembly and the second drive assembly are identical in structure, the first drive assembly comprises a swing arm fixing base, a first piezoelectric ceramic, a first mounting plate, a first transmission base and a first swing arm, the first swing arm comprises a first branch arm and a second branch arm connected to each other, one end of the second branch arm away from the first branch arm is an output end of the first drive assembly, the first branch arm and the second branch arm are L-shaped, the connection between the first branch arm and the second branch arm is connected to the swing arm fixing base, the connection point between the first branch arm and the second branch arm and the swing arm fixing base is a fourth connection point, the first mounting plate and the first transmission base are respectively connected to two ends of the first piezoelectric ceramic along the deformation direction, the first mounting plate is used for being hinged to the frame, the first transmission base is connected to the first branch arm, and the first piezoelectric ceramic is stretched and contracted to drive the first transmission base to move back and forth, so as to drive the first swing arm to swing with the fourth connection point as a fulcrum.

[0008] The double drive crystal pricking mechanism, wherein the length of the second branch arm is greater than the length of the first branch arm.

[0009] The double drive crystal pricking mechanism, wherein the first drive assembly further comprises a first reset device, and the first reset device is used for driving the first swing arm to reset when the first piezoelectric ceramic is contracted.

[0010] The double drive crystal pricking mechanism, wherein the first reset device comprises a spring, the spring is a compression spring, one end of the spring is connected to the first branch arm, the other end of the spring is hinged to the frame, and the elastic force direction of the spring is parallel to the deformation direction of the first piezoelectric ceramic.

[0011] The double drive crystal pricking mechanism, wherein the first drive assembly and the first connecting rod are connected through a first flexible connecting piece, the second drive assembly and the second connecting rod are connected through a second flexible connecting piece, and the first connecting rod and the second connecting rod are connected through a third flexible connecting piece, the first flexible connecting piece, the second flexible connecting piece and the third flexible connecting piece are all components with elasticity, and the components with elasticity are only bent in the plane where the components are located.

[0012] The double drive crystal pricking mechanism, wherein the connection between the first branch arm and the second branch arm and the swing arm fixing base and the connection between the first transmission base and the first branch arm are respectively connected through a fourth flexible connecting piece and a fifth flexible connecting piece.

[0013] The double drive pricking crystal mechanism further comprises a first connecting block and a second connecting block, the first connecting block is connected to the output end of the first drive assembly, the first drive assembly is connected with the first flexible connecting piece through the first connecting block, and the second connecting block is connected to the output end of the second drive assembly, and the second drive assembly is connected with the second flexible connecting piece through the second connecting block.

[0014] The double drive pricking crystal mechanism further comprises a first connecting block and a second connecting block, the first connecting block is connected to the output end of the first drive assembly, the first drive assembly is connected with the first flexible connecting piece through the first connecting block, and the second connecting block is connected to the output end of the second drive assembly, and the second drive assembly is connected with the second flexible connecting piece through the second connecting block.

[0015] The double drive pricking crystal mechanism further comprises a first connecting block and a second connecting block, the first connecting block is connected to the output end of the first drive assembly, the first drive assembly is connected with the first flexible connecting piece through the first connecting block, and the second connecting block is connected to the output end of the second drive assembly, and the second drive assembly is connected with the second flexible connecting piece through the second connecting block.

[0016] Compared with the prior art, the double drive pricking crystal mechanism has at least the following beneficial effects:

[0017] The double drive pricking crystal mechanism comprises a first drive assembly, a first connecting rod, a second drive assembly and a second connecting rod arranged in the same plane, compared with the prior art three-dimensional mechanism, the mechanism is simpler, smaller in size, avoids the constraint that the double-axis drive is strictly orthogonal in the design of the three-dimensional mechanism, and the manufacturing process is simpler.

[0018] The double drive pricking crystal mechanism will be further described below with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 FIG. 1 is a structural schematic view of the double drive pricking crystal mechanism according to the present application;

[0020] Figure 2 FIG. 2 is a structural schematic view of the first drive assembly in the double drive pricking crystal mechanism according to the present application;

[0021] Figure 3 FIG. 3 is a structural schematic view of the double drive pricking crystal mechanism according to the present application;

[0022] Figure 4 FIG. 4 is a structural schematic view of the double drive pricking crystal mechanism according to the present application;

[0023] Figure 5 FIG. 5 is a structural schematic view of the connection between the first connecting block and the first connecting rod, and the connection between the second connecting block and the second connecting rod in the double drive pricking crystal mechanism according to the present application. DETAILED DESCRIPTION

[0024] Embodiment I

[0025] As Figure 1 , Figure 2As shown, the double-drive crystal piercing mechanism of the present application comprises a first driving assembly 1, a first connecting rod 3, a second driving assembly 2, and a second connecting rod 4. The first driving assembly 1, the first connecting rod 3, the second driving assembly 2, and the second connecting rod 4 are located in the same plane to form a similar spatial five-link structure. The first driving assembly 1 and the first connecting rod 3 are located on the A side, and the second driving assembly 2 and the second connecting rod 4 are located on the B side. The output end of the first driving assembly 1 is connected with the first end of the first connecting rod 3, the output end of the second driving assembly 2 is connected with the first end of the second connecting rod 4, the second end of the first connecting rod 3 is connected with the second end of the second connecting rod 4, the connecting point of the first driving assembly 1 and the first connecting rod 3 is the first connecting point A, the connecting point of the second driving assembly 2 and the second connecting rod 4 is the second connecting point B, and the connecting point of the first connecting rod 3 and the second connecting rod 4 is the third connecting point C. The output end of the second driving assembly 2 forms displacement and is adapted to drive the second connecting rod 4 to rotate with the third connecting point as the fulcrum. The output end of the first driving assembly 1 forms displacement and is adapted to drive the first connecting rod 3 to rotate with the third connecting point as the fulcrum. The mechanism end of the crystal piercing head is located on the first connecting rod 3. When the first driving assembly 1 and the second driving assembly 2 rotate periodically according to a certain rule, displacement is formed at the output end of the first driving assembly 1 and the output end of the second driving assembly 2, i.e. the displacement of points A and B. In the triangle ABC formed by points A, B, and C, points A and B move, and the positions of points A and B are uniquely determined by the first driving assembly 1 and the second driving assembly 2. The distances from point A to point C and from point B to point C are constant, so the displacement of point C can be uniquely determined, and the position of point C is determined by points A and B together rather than by a single point alone. Therefore, the position of point C is determined by the coupling of the positions of points A and B. According to the positions of points A and C and the shape function of the first connecting rod 3, the position of the mechanism end can be uniquely determined. Therefore, the displacement of the output end of the first driving assembly 1 and the displacement of the output end of the second driving assembly 2 are coupled and transmitted to the mechanism end through the first connecting rod 3 and the second connecting rod 4. Through the cooperation and excitation of the first driving assembly 1 and the second driving assembly 2, displacement compensation is performed on the mechanism end of the crystal piercing head in the same direction as the movement of the machine table, so as to ensure that the compound movement of the mechanism end of the crystal piercing head has no or small transverse sliding in the working range, and realize the regular reciprocating movement of the mechanism end located on the first connecting rod 3. The double-drive crystal piercing mechanism of the present application comprises the first driving assembly 1, the first connecting rod 3, the second driving assembly 2, and the second connecting rod 4 located in the same plane. Compared with the existing three-dimensional mechanism, the mechanism of the present application is simpler, smaller in size, avoids the constraint that the double-axis drive in the design of the three-dimensional mechanism must be strictly orthogonal, and has a simpler manufacturing process.

[0026] Optionally, the double drive spicula mechanism further comprises a frame 8, the first drive assembly 1 and the second drive assembly 2 are identical in structure, and the first drive assembly 1 and the second drive assembly 2 are arranged in the same direction, wherein the first drive assembly 1 comprises a swing arm fixing seat 102, a first piezoelectric ceramic 108, a first mounting plate 109, a first transmission seat 107 and a first swing arm 104, the swing arm fixing seat 102 is connected to the frame 8, an angle between the first swing arm 104 and a second swing arm of the second drive assembly 2 is an obtuse angle or an acute angle, the first swing arm 104 comprises a first branch arm 1041 and a second branch arm 1042 connected to each other, a length of the second branch arm 1042 is greater than a length of the first branch arm 1041, an end of the second branch arm 1042 away from the first branch arm 1041 is an output end of the first drive assembly 1, a width of the output end of the second branch arm 1042 is much smaller than a width of an end of the second branch arm 1042 connected to the first branch arm 1041, the first branch arm 1041 and the second branch arm 1042 are in an L shape, the connection between the first branch arm 1041 and the second branch arm 1042 is connected to the swing arm fixing seat 102, and a connection point between the connection between the first branch arm 1041 and the second branch arm 1042 and the swing arm fixing seat 102 is a fourth connection point, the first mounting plate 109 and the first transmission seat 107 are respectively connected to two ends of the first piezoelectric ceramic 108 along a deformation direction, the first mounting plate 109 is used for being hinged to the frame 8, the first transmission seat 107 is connected to the first branch arm 1041, the first piezoelectric ceramic 108 is stretched and contracted to move the first transmission seat 107 reciprocatingly, so as to drive the first swing arm 104 to swing with the fourth connection point as a fulcrum and amplify the displacement of the first transmission seat 107 reciprocatingly. Since the first drive assembly 1 and the second drive assembly 2 are both driven by the piezoelectric ceramic, the movement of the mechanism is based on the deformation of the piezoelectric ceramic material itself, rather than the connection of the traditional mechanism, which avoids the premature failure of the mechanism caused by friction, prolongs the service life, and through the first drive assembly driving the first connecting rod and the second drive assembly driving the second connecting rod to move the end mechanism, only the piezoelectric ceramic part is a deformation mechanism, the deformation area is small, and the situation of out-of-control flexural curve and large elastic response caused by using a part with a large width-thickness ratio or length-diameter ratio as a force or displacement transmission unit is avoided, so that the end response of the mechanism is more controllable, and the precision of repetitive movement is higher. In addition, compared with other mechanisms with an equal ratio of end displacement to driving displacement, the displacement amplification of the double drive spicula mechanism exists in the whole mechanism, which avoids damage caused by excessive deformation of the deformation area at the amplification arm, and prolongs the service life of the mechanism.

[0027] Optionally, the first drive assembly 1 further comprises a first reset device, and the first reset device is used for resetting the first swing arm 104 when the first piezoelectric ceramic 108 is contracted.

[0028] Optionally, the first reset device comprises a spring 105, the spring 105 is a compression spring, one end of the spring 105 is connected with the first arm 1041, the other end of the spring 105 is hinged to the frame 8, the elastic force direction of the spring 105 is parallel to the deformation direction of the first piezoelectric ceramic 108. When the first piezoelectric ceramic 108 is stretched, the spring 105 is compressed, when the first piezoelectric ceramic 108 is contracted, the spring 105 pushes the first drive assembly 1 to reset.

[0029] Optionally, the first drive assembly 1 and the first connecting rod 3 are connected through the first flexible connecting piece 5, the second drive assembly 2 and the second connecting rod 4 are connected through the second flexible connecting piece 6, the first connecting rod 3 and the second connecting rod 4 are connected through the third flexible connecting piece 7, the connection between the first arm 1041 and the second arm 1042 and the swing arm fixing seat 102, and the connection between the first transmission seat 107 and the first arm 1041 are connected through the fourth flexible connecting piece 103 and the fifth flexible connecting piece 106 respectively. Each flexible connecting piece is a part or mechanism with a certain elasticity, and each flexible connecting piece can only bend and deform in the plane where the mechanism is located, and the bending axis is defined as the equivalent axis of each flexible connecting piece. The deformation amount of the first swing arm 104, the second swing arm, the first connecting rod 3 and the second connecting rod 4 during movement is much larger than the deformation amount of each flexible connecting piece. For example, when the first piezoelectric ceramic 108 of the first drive assembly 1 is stretched and contracted to drive the first transmission seat 107 to reciprocate, the first transmission seat 107 transmits force or displacement to the first swing arm 104 through the fifth flexible connecting piece 106. The first swing arm 104 is limited by the swing arm fixing seat 102 and the fourth flexible connecting piece 103, and is deformed elastically by the fourth flexible connecting piece 103, so that the first swing arm 104 rotates around the bending axis of the fourth flexible connecting piece 103. Specifically, each flexible connecting piece can be a metal sheet, or a thin rod structure with relatively small rigidity compared to the connecting rod and the swing arm.

[0030] Specifically, the first swing arm 104, the second swing arm, the first connecting rod 3 and the second connecting rod 4 can be rectangular section bars, I-shaped section bars, or variable-diameter flexible rods with larger middle diameters than both ends.

[0031] Embodiment two

[0032] As shown in Figure 3 , the difference between embodiment one and embodiment two is that the second drive assembly 2' is symmetrically arranged with the first drive assembly 1.

[0033] Embodiment three

[0034] As shown in Figure 4 , Figure 5The difference between the embodiment and the embodiment two is that the double drive piercing mechanism of the application further comprises a first connecting block 31 and a second connecting block 41 in the embodiment. The first connecting block 31 is connected to the output end of the first swing arm 104 of the first drive assembly 1. The first drive assembly 1 is connected to the first flexible connecting piece 5 through the first connecting block 31. The second connecting block 41 is connected to the output end of the second swing arm of the second drive assembly 2. The second drive assembly 2 is connected to the second flexible connecting piece 6 through the second connecting block 41. When the first flexible connecting piece 5, the second flexible connecting piece 6, the third flexible connecting piece 7, the first connecting rod 3 or the second connecting rod 4 is affected by the wear and tear, it is convenient to replace.

[0035] The above-described embodiments are only used to describe the preferred embodiments of the application, and are not used to limit the scope of the application. Without departing from the design spirit of the application, various modifications and improvements of the technical solutions of the application made by those skilled in the art shall fall within the protection scope of the claims of the application.

Claims

1. A dual drive lancet mechanism, comprising: The device comprises a first driving assembly (1), a first connecting rod (3), a second driving assembly (2), and a second connecting rod (4). The first driving assembly (1), the first connecting rod (3), the second driving assembly (2), and the second connecting rod (4) are located in the same plane. The output end of the first driving assembly (1) is connected with the first end of the first connecting rod (3), the output end of the second driving assembly (2) is connected with the first end of the second connecting rod (4), the second end of the first connecting rod (3) is connected with the second end of the second connecting rod (4), the connecting point of the first driving assembly (1) and the first connecting rod (3) is the first connecting point, the connecting point of the second driving assembly (2) and the second connecting rod (4) is the second connecting point, and the connecting point of the first connecting rod (3) and the second connecting rod (4) is the third connecting point. The output end of the second driving assembly (2) is adapted to drive the second connecting rod (4) to rotate with the third connecting point as the fulcrum, and the output end of the first driving assembly (1) is adapted to drive the first connecting rod (3) to rotate with the third connecting point as the fulcrum. The mechanism end of the crystal piercing head is located on the first connecting rod (3). When the first driving assembly (1) and the second driving assembly (2) rotate periodically according to a certain rule, displacement is formed at the output end of the first driving assembly (1) and the output end of the second driving assembly (2), i.e. the displacement of the first connecting point and the second connecting point. In the triangle formed by the first connecting point, the second connecting point, and the third connecting point, the first connecting point and the second connecting point move, and the positions of the first connecting point and the second connecting point are uniquely determined by the first driving assembly (1) and the second driving assembly (2). The distances from the first connecting point to the third connecting point and from the second connecting point to the third connecting point are both constant, the displacement of the third connecting point is uniquely determined, and the position of the third connecting point is determined by the first connecting point and the second connecting point. According to the positions of the first connecting point and the third connecting point and the shape function of the first connecting rod (3), the position of the mechanism end is uniquely determined, so that displacement compensation is performed on the mechanism end of the crystal piercing head in the same direction as the movement of the machine.

2. The dual drive spicule mechanism of claim 1, wherein, Further comprising a rack (8), the first driving assembly (1) and the second driving assembly (2) are of the same structure, wherein the first driving assembly (1) comprises a swing arm fixing seat (102), a first piezoelectric ceramic (108), a first mounting plate (109), a first transmission seat (107), a first swing arm (104), the first swing arm (104) comprises a first branch arm (1041) and a second branch arm (1042) connected with each other, one end of the second branch arm (1042) away from the first branch arm (1041) is an output end of the first driving assembly (1), the first branch arm (1041) and the second branch arm (1042) are L-shaped, the connection between the first branch arm (1041) and the second branch arm (1042) is connected with the swing arm fixing seat (102), the connection point between the first branch arm (1041) and the second branch arm (1042) and the swing arm fixing seat (102) is a fourth connection point, the first mounting plate (109) and the first transmission seat (107) are connected to two ends of the first piezoelectric ceramic (108) along the deformation direction respectively, the first mounting plate (109) is used for being hinged to the rack (8), the first transmission seat (107) is connected with the first branch arm (1041), the first piezoelectric ceramic (108) is stretched and contracted to make the first transmission seat (107) reciprocate, thereby driving the first swing arm (104) to swing with the fourth connection point as a fulcrum.

3. The dual drive spicule mechanism of claim 2, wherein, The length of the second branch arm (1042) is greater than the length of the first branch arm (1041).

4. The dual drive spicule mechanism of claim 3, wherein, The first driving assembly (1) further comprises a first reset device, the first reset device is used for driving the first swing arm (104) to reset when the first piezoelectric ceramic (108) is contracted.

5. The dual drive spicule mechanism of claim 4, wherein, The first reset device comprises a spring (105), the spring (105) is a compression spring, one end of the spring (105) is connected with the first branch arm (1041), the other end of the spring (105) is hinged to the rack (8), the elastic force direction of the spring (105) is parallel to the deformation direction of the first piezoelectric ceramic (108).

6. The dual drive spicule mechanism of claim 5, wherein, The first driving assembly (1) and the first connecting rod (3) are connected through a first flexible connecting piece (5), the second driving assembly (2) and the second connecting rod (4) are connected through a second flexible connecting piece (6), the first connecting rod (3) and the second connecting rod (4) are connected through a third flexible connecting piece (7), the first flexible connecting piece (5), the second flexible connecting piece (6) and the third flexible connecting piece (7) are all components with certain elasticity, the component with certain elasticity only bends in the plane where the component is located.

7. The dual drive spicule mechanism of claim 6, wherein, The connection between the first branch arm (1041) and the second branch arm (1042) and the swing arm fixing seat (102) and the connection between the first transmission seat (107) and the first branch arm (1041) are connected by a fourth flexible connecting piece (103) and a fifth flexible connecting piece (106) respectively.

8. The dual drive spicule mechanism of claim 7, wherein, Further comprising a first connecting block (31) and a second connecting block (41), the first connecting block (31) is connected to the output end of the first driving assembly (1), the first driving assembly (1) is connected with the first flexible connecting piece (5) through the first connecting block (31), the second connecting block (41) is connected to the output end of the second driving assembly (2), the second driving assembly (2) is connected with the second flexible connecting piece (6) through the second connecting block (41).

9. The dual drive spicule mechanism of claim 8, wherein, The first driving assembly (1) and the second driving assembly (2) are symmetrically arranged.

10. The dual drive spicule mechanism of claim 9, wherein, The first swing arm (104), the second swing arm, the first connecting rod (3) and the second connecting rod (4) can adopt rectangular section rod, I-shaped section rod or variable diameter rod.

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