Substrate and display panel

By setting a temperature detection unit on the substrate, the substrate temperature is monitored and fed back in real time, which solves the problem of insufficient accuracy and stability in the evaporation process of organic light-emitting materials, and realizes the production of higher quality display panels.

CN115116877BActive Publication Date: 2026-03-03KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-06-27
Publication Date
2026-03-03

AI Technical Summary

Technical Problem

Existing technologies struggle to control the precision and stability of organic light-emitting material evaporation, and insufficient substrate temperature detection leads to poor evaporation results.

Method used

A temperature detection unit is set on the substrate to monitor the substrate temperature in real time through a temperature-sensitive liquid and temperature markers, providing temperature feedback to adjust the vapor deposition process and improve the accuracy of vapor deposition and material stability.

Benefits of technology

By using real-time temperature detection and feedback control, the accuracy and stability of organic light-emitting material evaporation are improved, thereby enhancing the display quality of the display panel.

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Abstract

The substrate and the display panel provided by the embodiments of the present application relate to the technical field of display. The temperature detection unit is arranged on the substrate, so that the temperature of the substrate can be detected during the evaporation of the organic light-emitting material. The evaporation of the organic light-emitting material and the temperature of the substrate during the evaporation process can be analyzed to determine whether the temperature of the substrate during the evaporation process is abnormal. The temperature of the environment in which the substrate is located during the evaporation process is controlled through the above feedback, so that the control precision of the evaporation of the organic light-emitting material is improved, the stability of the organic light-emitting material is ensured, and the display quality of the display panel is improved.
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Description

Technical Field

[0001] This application relates to the field of display technology, and more specifically, to a substrate and a display panel. Background Technology

[0002] In the manufacturing process of display panels (such as AMOLED panels), the accuracy of evaporation of organic light-emitting materials and the chemical stability of organic light-emitting materials are key indicators for measuring the quality of display panels. However, in the current technology, it is difficult to control the accuracy of evaporation of organic light-emitting materials and the stability of organic light-emitting materials. Summary of the Invention

[0003] In order to overcome the technical problems mentioned in the above technical background, this application provides a substrate and a display panel.

[0004] In a first aspect, this application provides a substrate for fabricating a display panel, wherein a temperature detection unit for detecting the ambient temperature of the substrate is disposed on the substrate.

[0005] By setting a temperature detection unit on the substrate, the temperature of the substrate can be detected during the evaporation of organic light-emitting materials. This allows for analysis of the evaporation status of the organic light-emitting materials and the temperature of the substrate during the evaporation process to determine if there are any abnormalities in the temperature of the substrate. This feedback allows for control of the temperature of the substrate environment during the evaporation process, thereby improving the accuracy of the evaporation of organic light-emitting materials and ensuring that the stability of the organic light-emitting materials is not affected, thus improving the display quality of the display panel.

[0006] In one possible embodiment of this application, the substrate has a display area forming area and a non-display area forming area, and the temperature detection unit is disposed in the non-display area forming area;

[0007] Preferably, the substrate is a glass substrate;

[0008] Preferably, the temperature detection unit is located at the four corners of the substrate.

[0009] In one possible embodiment of this application, the temperature detection unit includes a cavity, a temperature-sensing liquid located within the cavity, and a temperature marker disposed on one side of the cavity along the extending direction of the cavity, wherein the volume of the temperature-sensing liquid changes with temperature.

[0010] In one possible embodiment of this application, the cavity includes a first cavity, a second cavity, and a third cavity. The first cavity is connected to the third cavity via the second cavity. In a plane perpendicular to the extending direction of the cavity, the cross-section of the second cavity is smaller than the cross-section of the first cavity and the cross-section of the second cavity. The first cavity is used to store the temperature-sensitive liquid.

[0011] In one possible embodiment of this application, the cavity includes a groove formed on the side of the substrate and a cover plate sealed on the groove. The groove includes a first groove, a second groove and a third groove. The first groove communicates with the third groove via the second groove. The first groove and the cover plate located on the first groove form the first cavity. The second groove and the cover plate located on the second groove form the second cavity. The third groove and the cover plate located on the third groove form the third cavity.

[0012] In one possible embodiment of this application, the cavity includes a through hole formed on the side of the substrate, a groove located on the side of the substrate, a cover plate sealing the groove, and an adhesive layer for sealing the opening of the through hole. The groove includes a fourth groove and a fifth groove. The through hole communicates with the fifth groove through the fourth groove. The through hole and the adhesive layer form the first cavity. The fourth groove and the cover plate located on the fourth groove form the second cavity. The fifth groove and the cover plate located on the fifth groove form the third cavity.

[0013] In one possible embodiment of this application, the temperature detection unit is attached to the substrate, and the temperature detection unit is a microfluidic chip made of polydimethylsiloxane material.

[0014] In one possible embodiment of this application, the first cavity is a spherical cavity, and the third cavity is a cylindrical cavity.

[0015] In one possible embodiment of this application, the dimensional parameters of the first cavity and the third cavity satisfy the following relationship:

[0016] L>L0;

[0017] L0 = m * T;

[0018]

[0019] Wherein, L is the length of the third cavity, L0 is the actual length of the temperature-sensing liquid in the third cavity, m is the length of expansion or contraction of the temperature-sensing liquid when the temperature changes by a unit in the third cavity, T is the temperature, a is the expansion coefficient of the temperature-sensing liquid, r is the cylindrical radius of the third cavity, and R is the spherical radius of the first cavity.

[0020] A second aspect of this application provides a display panel, the display panel comprising a substrate as described in any embodiment of the first aspect, and an array driving layer and a pixel device layer sequentially stacked on the substrate.

[0021] The substrate and display panel provided in this application embodiment have a temperature detection unit on the substrate, which can detect the temperature of the substrate during the evaporation of organic light-emitting materials. This allows for analysis of the evaporation status of the organic light-emitting materials and the temperature of the substrate during the evaporation process to determine whether the temperature on the substrate is abnormal. This feedback can be used to control the temperature of the substrate environment during the evaporation process, thereby improving the accuracy of the evaporation of organic light-emitting materials and ensuring that the stability of the organic light-emitting materials is not affected, thus improving the display quality of the display panel. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram illustrating the deposition of organic light-emitting materials on a substrate is shown;

[0024] Figure 2 A schematic diagram of a cross-sectional structure of the substrate provided in this embodiment is illustrated.

[0025] Figure 3 This embodiment illustrates a partitioning diagram of the substrate provided.

[0026] Figure 4 Example Figure 3 A schematic diagram of the cross-sectional structure of the substrate along the BB' direction;

[0027] Figure 5 A cross-sectional schematic diagram of a temperature detection unit in one embodiment of this example is shown;

[0028] Figure 6 A cross-sectional schematic diagram of the temperature detection unit in another embodiment of this invention is shown;

[0029] Figure 7 A diagram illustrating the positional relationship of the temperature detection unit on the substrate in another embodiment of this invention is shown.

[0030] Figure 8 A schematic diagram illustrating the design dimensions of the temperature detection unit provided in this embodiment is shown.

[0031] Figure 9 A schematic diagram illustrating the film layer structure of the display panel provided in this embodiment is shown.

[0032] Icons: 10-Display panel; 100-Substrate; 100A-Display area formation area; 100B-Non-display area formation area; 110-Temperature detection unit; 1101-Cavity; 1101a-First cavity; 1101b-Second cavity; 1101c-Third cavity; 1102-Temperature-sensing liquid; 1103-Temperature mark; 11011-Groove; 11011a-First groove; 11011b-Second groove; 11011c-Third groove; 11011d-Fourth groove; 11011e-Fifth groove; 11012-Cover plate; 11013-Through hole; 11014-Sealing layer; 200-Array driving layer; 300-Pixel device layer; 20-Evaporation source; 30-Evaporation mask. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0037] It should be noted that, where there is no conflict, different features in the embodiments of this application can be combined with each other.

[0038] Please refer to Figure 1When manufacturing a display panel, a substrate 100 (e.g., a glass substrate) needs to be placed in a vapor deposition chamber to vapor deposit organic light-emitting materials. The inventors discovered that in the prior art, only the temperature of the vapor deposition source 20 can be monitored during the vapor deposition process, and the temperature of the substrate 100 cannot be detected. The temperature of the substrate 100 often has a great impact on the vapor deposition accuracy and stability of the organic light-emitting materials. Abnormal temperature of the substrate 100 will lead to a decrease in the accuracy of the vapor deposited organic light-emitting materials and a decrease in the stability of the organic light-emitting materials vapor deposited on the substrate 100.

[0039] To address the aforementioned technical problems, the inventors have innovatively designed the following technical solutions, which will be described in detail below with reference to the accompanying drawings. It should be noted that the deficiencies in the existing solutions are the result of the inventors' practical experience and careful research. Therefore, the discovery process of the aforementioned technical problems and the solutions proposed in this embodiment below are contributions made by the inventors to this application during the invention process, and should not be construed as technical content known to those skilled in the art.

[0040] Please refer to Figure 2 , Figure 2 A cross-sectional structural diagram of the substrate provided in this embodiment is illustrated. In this embodiment, a temperature detection unit 110 may be disposed on the substrate 100, wherein the temperature detection unit 110 can be used to detect the temperature of the environment in which the substrate 100 is located. Multiple temperature detection units 110 may be disposed on the substrate 100, and the placement position of the temperature detection units 110 can be flexibly selected according to requirements. For example, in order to avoid the influence of the temperature detection unit 110 on other functional film layers (e.g., array driving layer) fabricated on the substrate 100, the temperature detection unit 110 may be disposed on the side of the substrate 100 away from other functional film layers or in an area where other functional film layers are not distributed.

[0041] Further, please refer to Figure 3 , Figure 3A schematic diagram illustrating a partitioned substrate is provided. The substrate 100 may have a display area forming area 100A and a non-display area forming area 100B. The display area forming area 100A is used to form a display panel after fabricating film layers such as an array driving layer and a pixel device layer. The non-display area forming area 100B may surround the display area forming area 100A. The substrate 100 may be a glass substrate. In this embodiment, a temperature detection unit 110 may be disposed in the non-display area forming area 100B. As a preferred embodiment, multiple temperature detection units 110 may be disposed, and these units may be evenly distributed at different locations on the substrate 100 to detect the temperature at different locations on the substrate 100. For example, four temperature detection units 110 may be disposed at the four corners of the substrate 100, with the corners located in the non-display area forming area 100B.

[0042] In this embodiment, please refer to Figure 4 , Figure 4 Example Figure 3 A cross-sectional view of the substrate along the BB' direction shows that the temperature detection unit 110 may include a cavity 1101, a temperature-sensing liquid 1102, and a temperature marker 1103. The temperature-sensing liquid 1102 can be contained within the cavity 1101, and its volume can change with temperature. The temperature marker 1103 is disposed on one side of the cavity 1101 along its extension direction. A corresponding temperature reading can be obtained from the temperature marker 1103 at the location of the temperature-sensing liquid 1102 within the cavity 1101. The temperature marker 1103 can be manufactured using laser marking.

[0043] Furthermore, please refer to again Figure 4In this embodiment, the cavity 1101 may include a first cavity 1101a, a second cavity 1101b, and a third cavity 1101c. The first cavity 1101a, the second cavity 1101b, and the third cavity 1101c are connected in sequence. In the direction perpendicular to the extension of the cavity 1101 (i.e., the direction in which the first cavity 1101a, the second cavity 1101b, and the third cavity 1101c are connected), the cross-section of the second cavity 1101b is smaller than the cross-section of the first cavity 1101a and the cross-section of the third cavity 1101c. The first cavity 1101a can be used to store the temperature-sensitive liquid 1102. The volume of the first cavity 1101a and the volume of the third cavity 1101c are much larger than the volume of the second cavity 1101b. The volume of the second cavity 1101b can be ignored. With this design, when the temperature of the environment where the temperature detection unit 110 is located rises, the molecular motion of the temperature-sensing liquid 1102 in the first cavity 1101a becomes more intense after being heated, and the temperature-sensing liquid 1102 enters the third cavity 1101c through the second cavity 1101b. When the temperature of the environment where the temperature detection unit 110 is located decreases, the molecular motion of the liquid molecules in the temperature-sensing liquid 1102 slows down. Since the cavity channel of the second cavity 1101b is very small, the temperature-sensing liquid 1102 cannot flow back to the first cavity 1101a through the second cavity 1101b. This ensures that the length of the temperature-sensing liquid 1102 in the third cavity 1101c remains unchanged, which facilitates reading the temperature reading in the temperature detection unit 110 after the subsequent vapor deposition is completed.

[0044] Further, please refer to Figure 5 In one embodiment of this invention, the cavity 1101 may include a groove 11011 formed on the side of the substrate 100 and a cover plate 11012 sealed on the groove 11011. The groove 11011 may include a first groove 11011a, a second groove 11011b, and a third groove 11011c. The first groove 11011a communicates with the third groove 11011c via the second groove 11011b. The first groove 11011a and the cover plate 11012 on the first groove 11011a form a first cavity, the second groove 11011b and the cover plate 11012 on the second groove 11011b form a second cavity, and the third groove 11011c and the cover plate 11012 on the third groove 11011c form a third cavity. In this embodiment, the temperature-sensitive liquid 1102 can be injected into the first groove 11011a before the encapsulation cover plate 11012. The side of the cover plate 11012 facing the groove 11011 can be a plane or a curved surface corresponding to the groove 11011. Therefore, in the plane perpendicular to the extension direction of the cavity 1101, the cross-section of the cavity 1101 can be different shapes such as circle or square.

[0045] Further, please refer to Figure 6In another embodiment of this invention, the cavity 1101 may include a through hole 11013 formed on the side of the substrate 100, a groove 11011 located on the side of the substrate 100, a cover plate 11012 sealing the groove 11011, and a sealing layer 11014 for sealing one end opening of the through hole 11013. The groove 11011 may include a fourth groove 11011d and a fifth groove 11011e, wherein the through hole 11013 communicates with the fifth groove 11011e via the fourth groove 11011d. The through hole 11013 may be formed by laser drilling. The through hole 11013 and the sealing layer 11014 form a first cavity, the fourth groove 11011d and the cover plate 11012 located on the fourth groove 11011d form a second cavity, and the fifth groove 11011e and the cover plate 11012 located on the fifth groove 11011e form a third cavity. In this embodiment, the temperature-sensitive liquid 1102 can be injected into the through hole 11013 before the sealing layer 11014 seals the through hole 11013. Similar to the previous embodiment, the side of the cover plate 11012 facing the groove 11011 can be a plane or a curved surface corresponding to the groove 11011. In the plane perpendicular to the extension direction of the cavity 1101, the cross-sectional shape of the first cavity 1101a can be circular or square, etc., and the cross-sectional shapes of the second cavity 1101b and the third cavity 1101c can also be circular or square, etc.

[0046] Further, please refer to Figure 7 In another embodiment of this invention, the temperature detection unit 110 can be a device independent of the substrate 100. For example, the temperature detection unit 110 can be attached to the substrate 100. In this embodiment, the temperature detection unit 110 can have the same structure as the two embodiments described above, and the independent temperature detection unit 110 can be a microfluidic chip made of polydimethylsiloxane (PDMS) material. Compared to the previous two embodiments, the temperature detection unit 110 in this embodiment can have its position changed on the substrate 100, eliminating the need for slotting, sealing, or other processes on the substrate 100, thus simplifying the manufacturing process.

[0047] In this embodiment, for example, the first cavity 1101a can be a spherical cavity, and the third cavity 1101c can be a cylindrical cavity. Since the volume of the second cavity 1101b is negligible, please refer to... Figure 8 In this example, the dimensional parameters of the first cavity 1101a and the third cavity 1101c can satisfy the following relationship:

[0048] L>L0;

[0049] L0 = m * T;

[0050]

[0051] Where L is the length of the third cavity 1101c, L0 is the actual length of the temperature-sensing liquid in the third cavity 1101c, m is the length of expansion or contraction of the temperature-sensing liquid when the temperature changes by a unit in the third cavity 1101c, T is the temperature, a is the coefficient of expansion of the temperature-sensing liquid, r is the cylindrical radius of the third cavity 1101c, and R is the spherical radius of the first cavity 1101a. Taking mercury as the temperature-sensing liquid as an example, the value of a can be 0.00018 / ℃, and the value of m can be 1 μm / ℃.

[0052] This embodiment also provides a display panel, please refer to... Figure 9 The display panel 10 may include the substrate 100 described above, as well as the array driving layer 200 and the pixel device layer 300 fabricated on the substrate 100. In the display panel 10, the temperature fed back by the temperature detection unit 110 in the substrate 100 can determine whether there is a potential risk of poor vapor deposition caused by excessively high ambient temperature of the substrate 100 during the manufacturing process of the display panel 10. This facilitates the adjustment of the temperature in the vapor deposition chamber during the vapor deposition process of the organic light-emitting material by the above-mentioned temperature feedback, thereby improving the accuracy control of the vapor deposition of the organic light-emitting material layer and ensuring that the stability of the organic light-emitting material is not affected, thus improving the display quality of the display panel.

[0053] The substrate and display panel provided in this application embodiment have a temperature detection unit on the substrate, which can detect the temperature of the substrate during the evaporation of organic light-emitting materials. This allows for analysis of the evaporation status of the organic light-emitting materials and the temperature of the substrate during the evaporation process to determine whether the temperature on the substrate is abnormal. This feedback can be used to control the temperature of the substrate environment during the evaporation process, thereby improving the accuracy of the evaporation of organic light-emitting materials and ensuring that the stability of the organic light-emitting materials is not affected, thus improving the display quality of the display panel.

[0054] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A substrate, characterized in that, The substrate is used to manufacture a display panel, and a temperature detection unit is provided on the substrate for detecting the ambient temperature of the substrate. The temperature detection unit includes a cavity, a temperature-sensing liquid located inside the cavity, and a temperature mark disposed on one side of the cavity along the extending direction of the cavity. The volume of the temperature-sensing liquid changes with temperature. The cavity includes a first cavity, a second cavity, and a third cavity. The first cavity is connected to the third cavity via the second cavity. In a plane perpendicular to the extension direction of the cavity, the cross-section of the second cavity is smaller than the cross-section of the first cavity and the cross-section of the third cavity. The first cavity is used to store the temperature-sensitive liquid. The cavity includes a groove formed on the side of the substrate and a cover plate sealed on the groove. The groove includes a first groove, a second groove and a third groove. The first groove communicates with the third groove via the second groove. The first groove and the cover plate located on the first groove form the first cavity. The second groove and the cover plate located on the second groove form the second cavity. The third groove and the cover plate located on the third groove form the third cavity.

2. The substrate as described in claim 1, characterized in that, The substrate has a display area forming area and a non-display area forming area, and the temperature detection unit is disposed in the non-display area forming area.

3. The substrate as described in claim 1, characterized in that, The substrate is a glass substrate.

4. The substrate as claimed in claim 1, characterized in that, The temperature detection unit is located at the four corners of the substrate.

5. The substrate as claimed in claim 1, characterized in that, The cavity includes a through hole formed on the side of the substrate, a groove located on the side of the substrate, a cover plate sealing the groove, and an adhesive layer for sealing the opening of the through hole. The groove includes a fourth groove and a fifth groove. The through hole communicates with the fifth groove through the fourth groove. The through hole and the adhesive layer form the first cavity. The fourth groove and the cover plate located on the fourth groove form the second cavity. The fifth groove and the cover plate located on the fifth groove form the third cavity.

6. The substrate as claimed in claim 1, characterized in that, The temperature detection unit is attached to the substrate, and the temperature detection unit is a microfluidic chip made of polydimethylsiloxane material.

7. The substrate as claimed in claim 1, characterized in that, The first cavity is a spherical cavity, and the third cavity is a cylindrical cavity.

8. The substrate as claimed in claim 7, characterized in that, The dimensional parameters of the first cavity and the third cavity satisfy the following relationship: ; ; , in, The length of the third cavity, The actual length of the temperature-sensing liquid within the third cavity. The length by which the temperature-sensitive liquid expands or contracts when the temperature changes by a unit amount in the third cavity. For temperature, The coefficient of thermal expansion of the temperature-sensitive liquid is given. The radius of the cylinder of the third cavity is given. Let be the radius of the sphere in the first cavity.

9. A display panel, characterized in that, The display panel includes a substrate as described in any one of claims 1-8, and an array driving layer and a pixel device layer sequentially stacked on the substrate.

Citation Information

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