A coupled-drive micro piezoelectric motor

Abstract

The present invention provides a coupled-drive micro piezoelectric motor, which belongs to the technical field of micro piezoelectric motors. The piezoelectric motor consists of a cooperative motion bracket and four micro piezoelectric drive elements. Four identical micro piezoelectric drive elements are symmetrically arranged in a square manner on the same plane. Each micro piezoelectric drive element can achieve bidirectional motion and can be controlled individually. By applying voltage to the piezoelectric body of the micro piezoelectric drive element to stimulate a driving mode, a waveform is formed on the surface of the micro piezoelectric drive element, and the movement direction of the four micro piezoelectric drive elements is cooperatively controlled to achieve rotational, linear or interpolation motion. The present invention can meet the requirements of a narrow longitudinal installation space. When the piezoelectric motor is driven, the four micro piezoelectric drive elements are stimulated to produce a driving mode, which can provide a large thrust; at the same time, the structure is compact and the output is smooth, which significantly improves the driving performance and large stroke stability of the piezoelectric motor.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro piezoelectric motors, and in particular relates to a coupled-drive micro piezoelectric motor. Background Art

[0002] Piezoelectric motors have the advantages of compact structure, high torque, fast response, and good electromagnetic compatibility. They are widely used in aerospace, weapons and equipment, robotics, precision instruments and medical equipment, and other fields.

[0003] With the development of science and technology, the performance requirements of piezoelectric devices in various application fields are constantly increasing. Piezoelectric motors must have miniaturized size, low voltage drive, large torque output, and multi-directional movement functions. For example, the anti-shake movement of mobile phone precision lenses, the multi-degree-of-freedom movement of micro-displacement stages, and the precision movement of micro-flying robots require piezoelectric motors to have functions such as linear motion, rotational motion, and circular interpolation motion at the same time. However, traditional piezoelectric motor vibrators can only achieve pure linear motion or pure rotational motion, and cannot meet the needs of multi-directional motion at the same time. In addition, with the miniaturization of mechanical and electronic equipment, piezoelectric motors are required to have miniaturized size to meet the needs of small spaces. At present, piezoelectric motors are large in size, difficult to achieve miniaturized manufacturing, and cannot meet the requirements of actual use. Summary of the Invention

[0004] To address the aforementioned issues in the prior art, the present invention provides a coupled-drive micro piezoelectric motor. This motor is compact and capable of multiple motion modes, including linear, rotational, and interpolated curves, enabling multi-directional motion. The motor consists of a coordinated motion bracket and four micro piezoelectric drive elements. By applying voltage to the piezoelectric elements of the micro piezoelectric drive elements to generate a drive mode, a single micro piezoelectric drive element can achieve bidirectional linear motion. By collaboratively controlling the motion directions of the four micro piezoelectric drive elements, the piezoelectric motor can achieve rotational, linear, or interpolated motion.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is:

[0006] A coupled-drive micro piezoelectric motor comprises a micro piezoelectric drive element and a coordinated motion bracket 5.

[0007] The cooperative motion bracket 5 is a square thin plate structure.

[0008] There are a total of 4 micro piezoelectric drive elements, and the 4 identical micro piezoelectric drive elements are all connected to the cooperative motion bracket 5 and distributed in a square. At the same time, each micro piezoelectric drive element corresponds to a corner of the cooperative motion bracket 5; the 4 micro piezoelectric drive elements are, in a clockwise direction, the first micro piezoelectric drive element 1, the third micro piezoelectric drive element 3, the fourth micro piezoelectric drive element 4 and the second micro piezoelectric drive element 2.

[0009] The micro piezoelectric drive element includes an elastic body 6, a lower electrode 7, a piezoelectric body 8, and a partitioned upper electrode 9. The upper surface of the elastic body 6 is uniformly distributed with tooth-shaped structures, while the lower surface is a flat structure. The lower surface of the elastic body 6 is provided with a lower electrode 7. The piezoelectric body 8 is formed on the surface of the lower electrode 7 by electrohydrodynamic printing. The partitioned upper electrode 9 is formed on the surface of the piezoelectric body 8.

[0010] By applying different voltages to the piezoelectric bodies 8 of the four micro piezoelectric drive elements, bidirectional motion can be achieved, and the micro piezoelectric drive elements can be controlled individually or in coordination to achieve linear, rotational or interpolation motion. Specifically:

[0011] The first micro piezoelectric driving element 1 and the second micro piezoelectric driving element 2 (the first micro piezoelectric driving element 1 and the third micro piezoelectric driving element 3) adopt a forward driving mode, while the third micro piezoelectric driving element 3 and the fourth micro piezoelectric driving element 4 (the second micro piezoelectric driving element 2 and the fourth micro piezoelectric driving element 4) adopt a reverse driving mode. Under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes linear motion in the X (Y) direction.

[0012] The first micro piezoelectric driving element 1 and the fourth micro piezoelectric driving element 4 (the second micro piezoelectric driving element 2 and the third micro piezoelectric driving element 3) adopt a forward driving mode, while the second micro piezoelectric driving element 2 and the third micro piezoelectric driving element 3 (the first micro piezoelectric driving element 1 and the fourth micro piezoelectric driving element 4) adopt a reverse driving mode. Under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes clockwise (counterclockwise) rotational motion.

[0013] The four micro piezoelectric drive elements adopt a linear motion driving mode, and the input voltage amplitudes of the four micro piezoelectric drive elements are adjusted at the same time, and the coupled drive micro piezoelectric motors realize interpolation motion.

[0014] The beneficial effects of the present invention are:

[0015] (1) The present invention utilizes the coordination of four micro-piezoelectric drive elements to drive the modes, and simultaneously realizes multiple motions such as rotation, linear or interpolation, which can meet the needs of multi-directional motion in this application field.

[0016] (2) The present invention has a micro-thin plate structure, and the longitudinal dimension of the micro-piezoelectric driving element is less than 1 mm, which can meet the requirements of narrow longitudinal installation space and solve the problem that traditional piezoelectric motors are not applicable due to their large size.

[0017] (3) The four micro piezoelectric driving elements used in the present invention are simultaneously excited to produce a driving mode when driven by the piezoelectric motor, which can provide a large thrust or rotational torque, solving the problem of insufficient driving force of conventional piezoelectric motors.

[0018] (4) The coupled-driven micro piezoelectric motor of the present invention utilizes symmetrically arranged micro piezoelectric driving elements, has a compact structure, and has multi-point contact with the mover. Its output is stable, which significantly improves the driving performance and large-stroke stability of the piezoelectric motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 3D schematic diagram of a coupled-drive micro piezoelectric motor in an embodiment.

[0020] Figure 2 1 is a top view of the coupled-drive micro piezoelectric motor in an embodiment.

[0021] Figure 3 3D schematic diagram of the micro piezoelectric driving element in the embodiment.

[0022] Figure 4 Schematic diagram of the linear motion of the coupled-driven micro piezoelectric motor along the X direction in the embodiment.

[0023] Figure 5 Schematic diagram of the linear motion of the coupled-driven micro piezoelectric motor along the Y direction in the embodiment.

[0024] Figure 6 Schematic diagram of the clockwise rotation of the coupled-driven micro piezoelectric motor in the embodiment.

[0025] Figure 7 Schematic diagram of the counterclockwise rotation of the coupled-driven micro piezoelectric motor in the embodiment.

[0026] Figure 8 Schematic diagram of the interpolation motion of the coupled-drive micro piezoelectric motor in the embodiment.

[0027] In the figure: 1 first micro piezoelectric driving element; 2 second micro piezoelectric driving element; 3 third micro piezoelectric driving element; 4 fourth micro piezoelectric driving element; 5 cooperative motion bracket; 6 elastic body; 7 lower electrode; 8 piezoelectric body; 9 partitioned upper electrode. DETAILED DESCRIPTION

[0028] The present invention is further described below in conjunction with the technical solutions and accompanying drawings.

[0029] like Figure 1-3 As shown, the coupled-drive micro piezoelectric motor of this embodiment includes a micro piezoelectric drive element and a coordinated motion bracket 5. Among them, four micro piezoelectric drive elements are symmetrically arranged in a square on the same plane and fixed to the coordinated motion bracket 5.

[0030] The micro piezoelectric drive element includes an elastic body 6, a lower electrode 7, a piezoelectric body 8, and a partitioned upper electrode 9. The upper surface of the elastic body 6 is uniformly distributed with tooth-shaped structures, while the lower surface is sequentially provided with the lower electrode 7, the piezoelectric body 8, and the partitioned upper electrode 9. Under certain excitation, the piezoelectric body 8 transmits motion to the driven component through the tooth-shaped structures on the elastic body 6.

[0031] like Figure 4-8 As shown, the specific implementation is as follows:

[0032] 1. Implementation of linear motion of coupled-driven micro piezoelectric motor

[0033] By applying voltage to the piezoelectric body 8 of the first micro piezoelectric driving element 1 and the second micro piezoelectric driving element 2 to stimulate the forward driving mode of the micro piezoelectric driving element, and at the same time applying voltage to the piezoelectric body 8 of the third micro piezoelectric driving element 3 and the fourth micro piezoelectric driving element 4 to stimulate the reverse driving mode of the micro piezoelectric driving element, under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes linear motion in the X direction, as shown in 4; by applying voltage to the piezoelectric body 8 of the first micro piezoelectric driving element 1 and the third micro piezoelectric driving element 3 to stimulate the forward driving mode of the micro piezoelectric driving element, and at the same time applying voltage to the piezoelectric body 8 of the second micro piezoelectric driving element 2 and the fourth micro piezoelectric driving element 4 to stimulate the reverse driving mode of the micro piezoelectric driving element, under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes linear motion in the Y direction, as shown in 5.

[0034] 2. Realization of Rotational Motion of Coupling-Driven Micro Piezoelectric Motor

[0035] By applying voltage to the piezoelectric bodies 8 of the first micro piezoelectric driving element 1 and the fourth micro piezoelectric driving element 4 to stimulate the forward driving mode of the micro piezoelectric driving element, and applying voltage to the piezoelectric bodies 8 of the second micro piezoelectric driving element 2 and the third micro piezoelectric driving element 3 to stimulate the reverse driving mode of the micro piezoelectric driving element, under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes clockwise rotation motion, as shown in FIG. Figure 6As shown; by applying voltage to the piezoelectric body 8 of the first micro piezoelectric driving element 1 and the fourth micro piezoelectric driving element 4 to stimulate the reverse driving mode of the micro piezoelectric driving element, and at the same time applying voltage to the piezoelectric body 8 of the second micro piezoelectric driving element 2 and the third micro piezoelectric driving element 3 to stimulate the forward driving mode of the micro piezoelectric driving element, under the joint action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes counterclockwise rotation motion, as shown Figure 7 shown.

[0036] 3. Implementation of interpolation motion of coupled-driven micro piezoelectric motor

[0037] By applying voltage to the piezoelectric bodies 8 of the first micro piezoelectric driving element 1 and the second micro piezoelectric driving element 2 to stimulate the reverse driving mode of the micro piezoelectric driving element, and applying voltage to the piezoelectric bodies 8 of the third micro piezoelectric driving element 3 and the fourth micro piezoelectric driving element 4 to stimulate the forward driving mode of the micro piezoelectric driving element, respectively adjusting the voltage amplitude between the first micro piezoelectric driving element 1 and the second micro piezoelectric driving element 2, and the third micro piezoelectric driving element 3 and the fourth micro piezoelectric driving element 4, under the coordinated action of the four micro piezoelectric driving elements, the coupled-driven micro piezoelectric motor realizes interpolation motion, such as Figure 8 shown.

Claims

1. A coupled-drive micro piezoelectric motor, characterized in that: The piezoelectric motor comprises a micro piezoelectric drive element and a cooperative motion bracket (5); There are four micro-piezoelectric drive elements, namely a first micro-piezoelectric drive element (1), a second micro-piezoelectric drive element (2), a third micro-piezoelectric drive element (3) and a fourth micro-piezoelectric drive element (4); the four micro-piezoelectric drive elements are all connected to a coordinated motion bracket (5) and are distributed in a square shape; the coordinated motion bracket (5) is a square thin plate structure, and each micro-piezoelectric drive element corresponds to a corner of the coordinated motion bracket (5); The micro piezoelectric drive element comprises an elastic body (6), a lower electrode (7), a piezoelectric body (8) and a partitioned upper electrode (9); wherein the upper surface of the elastic body (6) is uniformly distributed with tooth-shaped structures, and the lower surface is a flat structure; the lower surface of the elastic body (6) is sequentially provided with a lower electrode (7), a piezoelectric body (8) and a partitioned upper electrode (9); Bidirectional motion is achieved by applying different voltages to the piezoelectric bodies of four micro piezoelectric drive elements. The micro piezoelectric drive elements can be controlled individually or collaboratively to achieve linear, rotational or interpolation motion. The four micro piezoelectric drive elements are, in clockwise order, a first micro piezoelectric drive element (1), a third micro piezoelectric drive element (3), a fourth micro piezoelectric drive element (4), and a second micro piezoelectric drive element (2); The first micro piezoelectric drive element (1) and the second micro piezoelectric drive element (2) adopt a forward drive mode, while the third micro piezoelectric drive element (3) and the fourth micro piezoelectric drive element (4) adopt a reverse drive mode, and under the joint action of the four micro piezoelectric drive elements, the coupled-driven micro piezoelectric motor realizes linear motion in the X direction; or, the first micro piezoelectric drive element (1) and the third micro piezoelectric drive element (3) adopt a forward drive mode, while the second micro piezoelectric drive element (2) and the fourth micro piezoelectric drive element (4) adopt a reverse drive mode, and under the joint action of the four micro piezoelectric drive elements, the coupled-driven micro piezoelectric motor realizes linear motion in the Y direction; The first micro piezoelectric drive element (1) and the fourth micro piezoelectric drive element (4) adopt a forward drive mode, while the second micro piezoelectric drive element (2) and the third micro piezoelectric drive element (3) adopt a reverse drive mode. Under the joint action of the four micro piezoelectric drive elements, the coupled-driven micro piezoelectric motor realizes clockwise rotational motion; or, the second micro piezoelectric drive element (2) and the third micro piezoelectric drive element (3) adopt a forward drive mode, while the first micro piezoelectric drive element (1) and the fourth micro piezoelectric drive element (4) adopt a reverse drive mode. Under the joint action of the four micro piezoelectric drive elements, the coupled-driven micro piezoelectric motor realizes counterclockwise rotational motion.

2. The coupled-drive micro piezoelectric motor according to claim 1, characterized in that: The four micro piezoelectric drive elements adopt a linear motion driving mode, and the input voltage amplitudes of the four micro piezoelectric drive elements are adjusted at the same time, and the coupled drive micro piezoelectric motors realize interpolation motion.

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