A device for absorbing trichlorosilane tail gas

Abstract

The present invention discloses a device for absorbing trichlorosilane tail gas, comprising a liquid heating storage box, a third gas supply pipe, and a control box. A serpentine air intake pipe is wound inside the liquid heating storage box, and one end of the serpentine air intake pipe is connected to a first exhaust pipe. A stirring and self-cleaning assembly is fixed to the liquid heating storage box, a gas pressurizing mechanism is fixed to the first exhaust pipe, one end of the third gas supply pipe is connected to a first exhaust treatment assembly, one end of the fourth gas supply pipe is connected to a toxic gas treatment assembly, and the first exhaust treatment assembly is connected to a hydrochloric acid liquid storage tank via a drain pipe. The device for absorbing trichlorosilane tail gas has the advantages of pre-heating trichlorosilane tail gas, stirring the liquid heating storage box, pre-treating trichlorosilane tail gas, collecting and using distilled water generated during pre-treatment, and further treating harmful gases in trichlorosilane tail gas.

Description

Technical Field

[0001] The invention relates to the technical field of trichlorosilane, in particular to a device for absorbing trichlorosilane tail gas. Background Art

[0002] Trichlorosilane is an inorganic substance with the chemical formula HCl₃Si. It is a colorless, highly volatile liquid, soluble in most organic solvents such as benzene and ether, and is stable. It is primarily used in the synthesis of organosilanes and alkyl, aryl, and organofunctional chlorosilanes. It is the most basic monomer in organosilane coupling agents and a raw material for the production of semiconductor silicon and single crystal silicon.

[0003] The existing trichlorosilane tail gas is not subjected to temperature pretreatment during treatment, and the tail gas treatment reaction in the later stage is not obvious, which affects the tail gas treatment absorption quality. In addition, the distilled water generated during the existing tail gas treatment is not collected and recycled, resulting in unnecessary losses. At the same time, the trichlorosilane tail gas is not treated thoroughly and is directly discharged, affecting the environmental quality. Summary of the Invention

[0004] The object of the present invention is to provide a device for absorbing trichlorosilane tail gas to solve the problems raised in the above-mentioned background technology that the existing trichlorosilane tail gas is not subjected to temperature pretreatment during treatment, the tail gas treatment reaction in the later stage is not obvious, which affects the tail gas treatment and absorption quality, and the distilled water generated during the existing tail gas treatment is not collected and recycled, resulting in unnecessary losses. At the same time, the trichlorosilane tail gas is not thoroughly treated and is directly discharged, which affects the environmental quality.

[0005] To achieve the above object, the present invention provides the following technical solution: a device for absorbing trichlorosilane tail gas, comprising a liquid heating storage box, a third gas pipeline and a control box,

[0006] A serpentine air intake pipe is wound inside the liquid heating storage box, and one end of the serpentine air intake pipe is connected to the first exhaust pipe. At the same time, a stirring self-cleaning component is fixed on the liquid heating storage box, and a gas pressurizing mechanism is fixed on the first exhaust pipe. The gas pressurizing mechanism is connected to the first exhaust gas treatment component through the second gas pipe. At the same time, a distilled water recovery component is provided on the first exhaust gas treatment component;

[0007] One end of the third gas pipe is connected to the first exhaust gas treatment component, and the other end of the third gas pipe is connected to the exhaust gas detector. At the same time, a fourth gas pipe passes through one end of the exhaust gas detector. One end of the fourth gas pipe is connected to the toxic gas treatment component, and the second gas pipe passes through the fourth gas pipe. The first exhaust gas treatment component is connected to the hydrochloric acid liquid storage tank through a drain pipe, and an automatic cleaning component is fixed on the hydrochloric acid liquid storage tank.

[0008] Preferably, the stirring self-cleaning component includes a stirring rod, a connecting rod, a spring shaft and a scraper plate. The stirring rod is fixed with a connecting rod, and the connecting rod is fixed with a spring shaft. At the same time, a scraper plate is fixed at one end of the spring shaft. The stirring self-cleaning component has the same structure as the automatic cleaning component.

[0009] By adopting the above technical solution, a stirring effect is achieved through the setting of the stirring self-cleaning component.

[0010] Preferably, the connecting rod forms a telescopic structure with the scraper plate through a spring shaft.

[0011] By adopting the above technical solution, the arrangement of the spring shaft ensures that the scraper plate fits closely to the inner wall of the liquid heating storage box.

[0012] Preferably, the first exhaust gas treatment assembly includes a first exhaust gas treatment box, a second exhaust gas treatment box, a baffle, a water tank, a first water pipe and a high-pressure nozzle. The first exhaust gas treatment box is connected to the second exhaust gas treatment box, and baffles are fixed on the inner walls of the first exhaust gas treatment box and the second exhaust gas treatment box. At the same time, water tanks are fixed on the upper sides of the first exhaust gas treatment box and the second exhaust gas treatment box, and the water tanks are connected to the high-pressure nozzle through the first water pipe.

[0013] By adopting the above technical solution, the first tail gas treatment component can be set up to pre-treat the tail gas.

[0014] Preferably, the high-pressure nozzles are provided in multiple groups, and the multiple groups of high-pressure nozzles are distributed at equal distances in the first exhaust gas treatment box and the second exhaust gas treatment box.

[0015] By adopting the above technical solution, the quality of pretreatment is ensured by arranging the first tail gas treatment box and the second tail gas treatment box.

[0016] Preferably, the distilled water recovery component includes a water accumulation layer, a water guide trough, a first drain pipe, a first pressure pump and a distilled water storage tank. The water accumulation layer is connected to the water guide trough, and the water guide trough is connected to the first drain pipe. At the same time, one end of the first drain pipe is connected to the distilled water storage tank, and a first pressure pump is fixed on the first drain pipe.

[0017] By adopting the above technical solution, distilled water can be collected through the provision of a distilled water recovery component.

[0018] Preferably, the toxic gas treatment component includes a treatment tank shell, a water tank, a second water pipe, a second pressure pump, a third water pipe, a nozzle, an activated carbon layer, an activated carbon adsorbent layer, a liquid separator, an exhaust pipe, a UV photolysis air purifier and an air outlet. A water tank is provided on the lower side of the treatment tank shell, and the water tank is connected to the third water pipe through the second water pipe. At the same time, a second pressure pump is fixed on the second water pipe. A nozzle is passed through the lower side of the third water pipe, and the nozzle is located on one side of the activated carbon layer. At the same time, the activated carbon layer is located on one side of the activated carbon adsorbent layer. At the same time, liquid separators are provided on the lower sides of the activated carbon layer and the activated carbon adsorbent layer. One end of the exhaust pipe is connected to the UV photolysis air purifier, and the other end of the exhaust pipe is connected to the treatment tank shell. At the same time, an air outlet is passed through the UV photolysis air purifier.

[0019] By adopting the above technical solution and setting up the toxic gas treatment component, the treatment quality of harmful gases in the exhaust gas can be guaranteed.

[0020] Preferably, the control box is fixed on the toxic gas processing assembly.

[0021] Compared with the prior art, the beneficial effects of the present invention are: the device for absorbing trichlorosilane tail gas,

[0022] (1) The present invention can preheat the trichlorosilane tail gas, stir the liquid in the liquid heating storage box, pretreat the trichlorosilane tail gas, collect and use the distilled water generated during the pretreatment, and treat the harmful gas of the trichlorosilane tail gas again. The electric heater in the liquid heating storage box heats the liquid in the liquid heating storage box, so that the trichlorosilane tail gas in the serpentine intake pipe can be preheated, thereby ensuring the quality of the later tail gas treatment. In addition, the liquid in the liquid heating storage box can stir under the auxiliary action of the stirring self-cleaning component, ensuring that the tail gas in the serpentine intake pipe is evenly heated, and avoiding manual cleaning, thereby increasing practicality.

[0023] (2) The present invention can perform spraying treatment with the assistance of multiple groups of high-pressure nozzles in the first tail gas treatment box and the second tail gas treatment box. The concentrated hydrochloric acid generated after spraying is stored in the hydrochloric acid liquid storage tank, which is convenient for recycling. In addition, the arrangement of the baffles in the first tail gas treatment box and the second tail gas treatment box can ensure better treatment of the tail gas and ensure the quality of the tail gas treatment.

[0024] (3) In the present invention, the water droplets generated when the first exhaust gas treatment component performs exhaust gas treatment are stored in the distilled water storage box through the first drain pipe, which is convenient for later use and increases practicality. In addition, the exhaust gas treated by the first exhaust gas treatment component can be detected with the assistance of the exhaust gas detector. If the exhaust gas treatment value in the pretreatment does not meet the standard, the exhaust gas is returned to the first exhaust gas treatment component through the second gas pipe for further treatment to ensure the quality of exhaust gas treatment.

[0025] (4) The present invention performs further treatment with the assistance of the activated carbon layer and the activated carbon adsorbent layer. The treated waste gas can be sprayed again with the assistance of the nozzle to ensure the quality of the waste gas treatment, and deodorization treatment is performed with the assistance of the UV photolysis air purifier to ensure the quality of waste gas emissions. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the front view structure of the present invention;

[0027] Figure 2 This is a rear view structural diagram of the present invention;

[0028] Figure 3 It is a schematic diagram of the top view of the structure of the present invention;

[0029] Figure 4 This is a schematic structural diagram of the stirring self-cleaning component of the present invention;

[0030] Figure 5 This is a schematic structural diagram of the first tail gas treatment component of the present invention;

[0031] Figure 6 This is a schematic diagram of the distribution structure of the automatic cleaning components of the present invention on the hydrochloric acid liquid storage tank;

[0032] Figure 7 This is a schematic structural diagram of the toxic gas treatment component of the present invention;

[0033] Figure 8 This is a schematic diagram of the three-dimensional structure of the stirring and self-cleaning components distributed on the liquid heating storage box of the present invention.

[0034] Figure: 1, liquid heating storage box; 2, serpentine air inlet pipe; 3, stirring self-cleaning component; 301, stirring rod; 302, connecting rod; 303, spring shaft; 304, scraper; 4, first exhaust pipe; 5, gas boosting mechanism; 6, second air pipe; 7, first exhaust gas treatment component; 701, first exhaust gas treatment box; 702, second exhaust gas treatment box; 703, baffle; 704, water tank; 705, first water pipe; 706, high-pressure nozzle; 8, distilled water recovery component; 801, water layer; 802, water guide trough; 803, first drain pipe; 804, first pressure pump; 805, distilled water recovery component; Distilled water storage tank; 9. Third gas pipe; 10. Exhaust gas detector; 11. Fourth gas pipe; 12. Second gas pipe; 13. Hydrochloric acid liquid storage tank; 14. Automatic cleaning component; 15. Toxic gas treatment component; 1501. Treatment tank shell; 1502. Water tank; 1503. Second water pipe; 1504. Second pressure pump; 1505. Third water pipe; 1506. Nozzle; 1507. Activated carbon layer; 1508. Activated carbon adsorbent layer; 1509. Liquid separator; 1510. Exhaust pipe; 1511. UV photolysis air purifier; 1512. Air outlet; 16. Control box. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] See also Figure 1-8 The present invention provides a technical solution: a device for absorbing trichlorosilane tail gas, such as Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 8As shown, a serpentine air intake pipe 2 is wound in the liquid heating storage box 1, and one end of the serpentine air intake pipe 2 is connected to the first exhaust pipe 4. At the same time, a stirring self-cleaning component 3 is fixed on the liquid heating storage box 1. The stirring self-cleaning component 3 includes a stirring rod 301, a connecting rod 302, a spring shaft 303 and a scraper 304. The stirring rod 301 is fixed with a connecting rod 302, and the connecting rod 302 is fixed with a spring shaft 303. At the same time, a scraper 304 is fixed at one end of the spring shaft 303. The stirring self-cleaning component 3 has the same structure as the automatic cleaning component 14. The connecting rod 302 forms a telescopic structure with the scraper 304 through the spring shaft 303. A protective structure is provided on the outside of the liquid heating storage box 1. Temperature layer, to avoid the temperature in the liquid heating storage box 1 from losing too quickly, the setting of the serpentine intake pipe 2 can extend the time that the exhaust gas in the serpentine intake pipe 2 stays in the liquid heating storage box 1, so that the exhaust gas can be better pre-heated, and with the assistance of the driving motor on the upper side of the stirring rod 301, the connecting rod 302 on the stirring rod 301 can be driven to rotate, so that the liquid in the liquid heating storage box 1 can be stirred, shortening the entire liquid heating time, and with the assistance of the spring shaft 303, the scraper plate 304 on the spring shaft 303 is always in contact with the inner wall of the liquid heating storage box 1, so that the liquid heating storage box 1 can be automatically cleaned without manual processing.

[0037] like Figure 2 、 Figure 3 and Figure 5As shown, a gas boosting mechanism 5 is fixed on the first exhaust pipe 4, and the gas boosting mechanism 5 is connected to the first tail gas treatment component 7 through the second gas pipe 6. At the same time, a distilled water recovery component 8 is provided on the first tail gas treatment component 7. The first tail gas treatment component 7 includes a first tail gas treatment box 701, a second tail gas treatment box 702, a baffle 703, a water tank 704, a first water pipe 705 and a high-pressure nozzle 706. The first tail gas treatment box 701 is connected to the second tail gas treatment box 702, and the baffle 703 is fixed on the inner wall of the first tail gas treatment box 701 and the second tail gas treatment box 702. At the same time, a water tank 704 is fixed on the upper side of the first tail gas treatment box 701 and the second tail gas treatment box 702. The water tank 704 is connected to the high-pressure nozzle 706 through the first water pipe 705. The high-pressure nozzle There are multiple groups of nozzles 706, and the multiple groups of high-pressure nozzles 706 are equidistantly distributed in the first exhaust gas treatment box 701 and the second exhaust gas treatment box 702. There are multiple groups of baffles 703 in the first exhaust gas treatment box 701 and the second exhaust gas treatment box 702. The setting of the multiple groups of baffles 703 can ensure that the upper high-pressure nozzles 706 can better spray the exhaust gas, thereby ensuring the quality of exhaust gas pretreatment. After the exhaust gas is sprayed, a more concentrated hydrochloric acid is produced, and the hydrochloric acid is finally stored in the hydrochloric acid liquid storage tank 13 through the drain pipe. The setting of the automatic cleaning component 14 on the hydrochloric acid liquid storage tank 13 can ensure that the hydrochloric acid liquid can be automatically cleaned after being discharged in the later stage, without the need for manual operation, and the wastewater after cleaning the hydrochloric acid liquid storage tank 13 can be discharged only after being treated by the wastewater processor, thereby ensuring the quality of wastewater discharge.

[0038] like Figure 1 and Figure 2 As shown, the distilled water recovery component 8 includes a water accumulation layer 801, a water guide trough 802, a first drain pipe 803, a first pressure pump 804 and a distilled water storage tank 805. The water accumulation layer 801 is connected to the water guide trough 802, and the water guide trough 802 is connected to the first drain pipe 803. At the same time, one end of the first drain pipe 803 is connected to the distilled water storage tank 805. The first pressure pump 804 is fixed on the first drain pipe 803. When the first tail gas treatment component 7 pre-treats the tail gas, the water droplets generated are removed. It falls into the water guide trough 802 and is finally stored in the distilled water storage tank 805 through the first drain pipe 803 with the assistance of the first pressure pump 804, so as to be convenient for later use and increase practicality. The exhaust gas treated by the first exhaust gas treatment component 7 enters the exhaust gas detector 10 and is detected with the assistance of the exhaust gas detector 10. If the exhaust gas treatment does not meet the standards, the exhaust gas enters the first exhaust gas treatment component 7 again through the second air pipe 12 for treatment, thereby ensuring the quality of exhaust gas treatment.

[0039] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 6 and Figure 7 As shown, one end of the third air pipe 9 is connected to the first tail gas treatment component 7, and the other end of the third air pipe 9 is connected to the tail gas detector 10, and at the same time, one end of the tail gas detector 10 is penetrated by the fourth air pipe 11, and one end of the fourth air pipe 11 is connected to the toxic gas treatment component 15, and the fourth air pipe 11 is penetrated by the second air pipe 12, the first tail gas treatment component 7 is connected to the hydrochloric acid liquid storage tank 13 through the drain pipe, and the hydrochloric acid liquid storage tank 13 is fixed with an automatic cleaning component 14, the toxic gas treatment component 15 includes a treatment tank shell 1501, a water tank 1502, a second water pipe 1503, a second pressure pump 1504, a first Three water pipes 1505, nozzles 1506, activated carbon layer 1507, activated carbon adsorbent layer 1508, liquid separator 1509, exhaust pipe 1510, UV photolysis air purifier 1511 and air outlet 1512, a water tank 1502 is provided on the lower side of the treatment tank shell 1501, and the water tank 1502 is connected to the third water pipe 1505 through the second water pipe 1503, and a second pressure pump 1504 is fixed on the second water pipe 1503, and a nozzle 1506 is passed through the lower side of the third water pipe 1505, and the nozzle 1506 is located on one side of the activated carbon layer 1507, and the activated carbon layer 1507 is located on the activated carbon adsorbent layer. On one side of the layer 1508, a liquid separator 1509 is provided on the lower side of the activated carbon layer 1507 and the activated carbon adsorbent layer 1508, one end of the exhaust pipe 1510 is connected to the UV photolysis air purifier 1511, and the other end of the exhaust pipe 1510 is connected to the treatment tank shell 1501, and the UV photolysis air purifier 1511 is penetrated with an air outlet 1512, the control box 16 is fixed on the toxic gas treatment component 15, the first tail gas treatment component 7 pre-treats the tail gas before entering the treatment tank shell 1501, and the harmful gases in the tail gas are again treated with the assistance of the activated carbon adsorbent layer 1508 and the activated carbon layer 1507. To ensure the quality of later emissions, after being treated by the activated carbon adsorbent layer 1508 and the activated carbon layer 1507, it is sprayed again with the assistance of multiple groups of nozzles 1506 on the third water pipe 1505, and can also be treated again. The treated exhaust gas enters the UV photolysis air purifier 1511, and is deodorized with the assistance of the UV photolysis air purifier 1511, so as to ensure the quality of other emissions and avoid harmful gases from entering the human body after discharge, affecting people's health. A dehumidifier is provided in the exhaust pipe 1510 to ensure that the exhaust gas entering the UV photolysis air purifier 1511 is dry, thereby ensuring the quality of exhaust gas treatment.

[0040] Working principle: When using the device for absorbing trichlorosilane tail gas, the external power supply is turned on. With the assistance of the driving motor, the stirring rod 301 can be driven to rotate, and the rotation of the stirring rod 301 drives the connecting rod 302 to rotate, thereby driving the scraper plate 304 on the spring shaft 303 to rotate. The stirring self-cleaning component 3 can also perform automatic cleaning while stirring. The trichlorosilane tail gas enters the serpentine air intake pipe 2 and can be pre-heated with the assistance of the high-temperature liquid in the liquid heating storage box 1 to ensure the quality of the pre-heating. After pre-heating, the trichlorosilane tail gas enters the gas boosting mechanism 5 through the first exhaust pipe 4. With the assistance of the gas boosting mechanism 5, the trichlorosilane tail gas enters the first tail gas treatment box 70 through the second gas pipe 6. 1, with the assistance of the baffle 703, it can play an auxiliary shielding role, and the pressurized spray water in the water tank 704 enters the inside of the high-pressure nozzle 706 through the first water pipe 705. With the assistance of the high-pressure nozzle 706, it can be sprayed. The hydrochloric acid liquid generated after spraying is stored in the hydrochloric acid liquid storage tank 13 through the drain pipe. The exhaust gas treated in the first tail gas treatment component 7 enters the second tail gas treatment box 702. Similarly, the tail gas can be treated again to ensure the quality of tail gas treatment. The water droplets generated when the first tail gas treatment component 7 is working flow through the water layer 801 to the water guide trough 802, and enter the first drain pipe 803 with the assistance of the water guide trough 802. The first pressure pump 802 is on the first drain pipe 803. 04, distilled water is stored in the distilled water storage tank 805 through the first drain pipe 803, which is convenient for later use. The treated exhaust gas enters the exhaust gas detector 10 through the third air pipe 9, and is detected with the assistance of the exhaust gas detector 10. If the exhaust gas pretreatment is unqualified, the exhaust gas enters the gas boosting mechanism 5 through the second air pipe 12, which is convenient for further treatment later. The qualified exhaust gas enters the inside of the treatment tank shell 1501 through the fourth air pipe 11, and the exhaust gas is adsorbed again through the activated carbon adsorbent layer 1508 and the activated carbon layer 1507, and with the assistance of the second pressure pump 1504 on the second water pipe 1503, the spray water in the water tank 1502 can be driven to enter the lower side of the third water pipe 1505 The nozzle 1506 can spray the waste gas again. The setting of the liquid separator 1509 on the activated carbon layer 1507 and the activated carbon adsorbent layer 1508 can prevent impurities from falling into the water tank 1502 and finally clogging the second water pipe 1503 or the nozzle 1506, causing unnecessary losses. The waste gas after spraying by the nozzle 1506 enters the UV photolysis air purifier 1511 through the exhaust pipe 1510. With the assistance of the UV photolysis air purifier 1511, it is deodorized and finally discharged through the air outlet 1512. After the hydrochloric acid in the hydrochloric acid liquid storage tank 13 is discharged, the automatic cleaning component 14 can play an automatic cleaning role when cleaning the hydrochloric acid liquid storage tank 13, thereby increasing practicality.The contents not described in detail in this specification belong to the prior art known to professionals in this field.

[0041] The directions or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the protection content of the present invention.

[0042] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for absorbing trichlorosilane tail gas, comprising a liquid heating storage box (1), a third gas pipeline (9) and a control box (16), characterized in that: A serpentine air intake pipe (2) is wound inside the liquid heating storage box (1), and one end of the serpentine air intake pipe (2) is connected to the first exhaust pipe (4). A stirring self-cleaning component (3) is fixed on the liquid heating storage box (1). A gas pressurizing mechanism (5) is fixed on the first exhaust pipe (4). The gas pressurizing mechanism (5) is connected to the first exhaust gas treatment component (7) through a second gas transmission pipe (6). A distilled water recovery component (8) is provided on the first exhaust gas treatment component (7). One end of the third gas pipe (9) is connected to the first tail gas treatment component (7), and the other end of the third gas pipe (9) is connected to the tail gas detector (10). At the same time, a fourth gas pipe (11) runs through one end of the tail gas detector (10). One end of the fourth gas pipe (11) is connected to the toxic gas treatment component (15), and the fourth gas pipe (11) runs through the second gas pipe (12). The first tail gas treatment component (7) is connected to the hydrochloric acid liquid storage tank (13) through a drain pipe, and an automatic cleaning component (14) is fixed on the hydrochloric acid liquid storage tank (13).

2. The device for absorbing trichlorosilane tail gas according to claim 1 is characterized in that: The stirring self-cleaning assembly (3) comprises a stirring rod (301), a connecting rod (302), a spring shaft (303) and a scraper (304); the stirring rod (301) is fixed with the connecting rod (302), the connecting rod (302) is fixed with the spring shaft (303), and one end of the spring shaft (303) is fixed with the scraper (304); the stirring self-cleaning assembly (3) has the same structure as the automatic cleaning assembly (14).

3. The device for absorbing trichlorosilane tail gas according to claim 2 is characterized in that: The connecting rod (302) forms a telescopic structure with the scraper plate (304) via the spring shaft (303).

4. The device for absorbing trichlorosilane tail gas according to claim 1 is characterized in that: The first tail gas treatment assembly (7) comprises a first tail gas treatment box (701), a second tail gas treatment box (702), a baffle (703), a water tank (704), a first water pipe (705) and a high-pressure nozzle (706); the first tail gas treatment box (701) is connected to the second tail gas treatment box (702), and the baffle (703) is fixed on the inner wall of the first tail gas treatment box (701) and the second tail gas treatment box (702); at the same time, a water tank (704) is fixed on the upper side of the first tail gas treatment box (701) and the second tail gas treatment box (702); the water tank (704) is connected to the high-pressure nozzle (706) through the first water pipe (705).

5. The device for absorbing trichlorosilane tail gas according to claim 4 is characterized in that: The high-pressure nozzles (706) are provided in multiple groups, and the multiple groups of high-pressure nozzles (706) are distributed at equal distances in the first tail gas treatment box (701) and the second tail gas treatment box (702).

6. The device for absorbing trichlorosilane tail gas according to claim 1 is characterized in that: The distilled water recovery assembly (8) comprises a water accumulation layer (801), a water guide trough (802), a first drainage pipe (803), a first pressure pump (804) and a distilled water storage tank (805); the water accumulation layer (801) is connected to the water guide trough (802), and the water guide trough (802) is connected to the first drainage pipe (803); one end of the first drainage pipe (803) is connected to the distilled water storage tank (805); and the first pressure pump (804) is fixed on the first drainage pipe (803).

7. The device for absorbing trichlorosilane tail gas according to claim 1 is characterized in that: The toxic gas treatment assembly (15) includes a treatment tank shell (1501), a water tank (1502), a second water pipe (1503), a second pressure pump (1504), a third water pipe (1505), a nozzle (1506), an activated carbon layer (1507), an activated carbon adsorbent layer (1508), a liquid separator (1509), an exhaust pipe (1510), a UV photolysis air purifier (1511) and an air outlet (1512). The water tank (1502) is provided on the lower side of the treatment tank shell (1501), and the water tank (1502) is connected to the third water pipe (1505) through the second water pipe (1503). At the same time, the second water pipe (1503) A second pressure pump (1504) is fixed on it, a nozzle (1506) is passed through the lower side of the third water pipe (1505), and the nozzle (1506) is located on one side of the activated carbon layer (1507), and the activated carbon layer (1507) is located on one side of the activated carbon adsorbent layer (1508), and liquid separators (1509) are provided on the lower sides of the activated carbon layer (1507) and the activated carbon adsorbent layer (1508), one end of the exhaust pipe (1510) is connected to the UV photolysis air purifier (1511), and the other end of the exhaust pipe (1510) is connected to the treatment tank shell (1501), and an air outlet (1512) is passed through the UV photolysis air purifier (1511).

8. The device for absorbing trichlorosilane tail gas according to claim 1 is characterized in that: The control box (16) is fixed on the toxic gas processing component (15).

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