A welding tool for semiconductor epitaxial growth furnace support

Abstract

The present application relates to a welding fixture for a semiconductor epitaxial growth furnace support, comprising the following steps: S1: hang a support rod on the fixture; S2: fix and clamp the processed support arm and positioning rod around the axis of the support rod at intervals on the fixture directly below the support rod; S3: check the verticality of the support rod and the coaxiality between the support rod and the three support arms; S4: after checking and determining that the coaxiality is within the tolerance range, weld the support arm to the support rod. The present application has the advantages of connecting the support arm and the support rod by welding, and the support rod and the support arm are convenient to clamp during grinding and processing. Moreover, since the upper end of the support rod is clamped, the welder does not need to lift the welding equipment to weld at a high position of the support rod during welding, which makes the welder more stable during welding, and the quality of the finished support bracket after welding is higher.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a welding tool for a semiconductor epitaxial growth furnace bracket. Background Art

[0002] With the development of integrated circuits, the requirements for semiconductors in integrated circuits are constantly increasing. Traditional silicon wafer semiconductors can no longer meet the requirements of integrated circuits for semiconductors, and silicon epitaxial technology came into being.

[0003] Silicon epitaxial technology is to place a silicon single crystal wafer in an epitaxial growth furnace, flush the silicon single crystal wafer with high-temperature gas containing specific elements, and then crystallize and grow a silicon layer on it using the silicon single crystal wafer as a seed. At the same time, by adjusting the element ratio in the gas, silicon layers with different resistivity can be grown.

[0004] A silicon single crystal wafer needs to be kept horizontal during epitaxial growth in an epitaxial growth furnace. In order to keep the silicon single crystal wafer horizontal, a circular quartz support plate is usually set in the epitaxial furnace. A quartz support rod is coaxially fixed to the bottom wall of the circular support plate. Positioning grooves are circumferentially spaced around the axis of the support plate. The silicon wafer is embedded in the positioning grooves. While positioning the silicon wafer, the silicon layer is allowed to grow along the thickness direction of the silicon wafer during crystal growth.

[0005] Since the silicon wafer needs to be kept horizontal and the pallet is supported by only one support rod, if the position of the positioning slot on the pallet is deviated, the pallet is prone to tilt after a period of use, which requires a high accuracy of the positioning slot on the pallet. In order to reduce the difficulty of pallet processing and reduce production costs, the manufacturer has made the following improvements to the support rod:

[0006] When casting the support rod, several support arms are welded circumferentially on the side wall of one end of the support rod. The support arms extend obliquely away from the support rod. At the same time, a positioning rod is integrally cast on the end of the support arm away from the support rod, and the axis of the positioning rod is parallel to the axis of the support rod.

[0007] After taking out the cast support rod, support arm and positioning rod from the mold, clamp the support rod vertically on the workbench so that the positioning rod is vertically facing upward, and then grind the upper end surface of the positioning rod so that the upper end surfaces of all the positioning rods are horizontal and located in the same plane. At the same time, coaxial positioning holes are opened on the upper end surfaces of the positioning rods, and a number of positioning rods corresponding to the positioning holes are fixedly installed on the bottom wall of the pallet, and the positioning rods are inserted into the positioning holes for positioning. The pallet is supported by the top wall of the positioning rods to keep it horizontal. Compared with the single-point support of the pallet, the multi-point support makes the pallet more stable and less likely to lose balance, thereby reducing the machining accuracy of the positioning grooves on the pallet, thereby reducing the machining difficulty of the pallet.

[0008] However, when processing the positioning rod, in order to adapt to the epitaxial furnace, the support rod is longer and smaller in diameter, and usually the ratio between the length and the diameter reaches at least 30:1, which makes the rigidity of the support rod poor. It is difficult to provide a stable processing environment for the positioning rod by only clamping the support rod during processing. In addition, since the shape of the bracket supporting the support plate composed of the support rod, the support arm and the positioning rod is relatively complex, it is relatively complicated and difficult to clamp the support rod and the support arm when processing the positioning rod, thereby reducing the production efficiency of the overall bracket. Summary of the invention

[0009] In order to solve the problem that the one-piece casting bracket makes it difficult to clamp the positioning rod during subsequent processing, the present application provides a welding tool for a semiconductor epitaxial growth furnace bracket.

[0010] In the first aspect, the present application provides a method for manufacturing a support of a semiconductor epitaxial growth furnace using the following technical solution:

[0011] A method for manufacturing a support of a semiconductor epitaxial growth furnace comprises the following steps:

[0012] S1: Hang the support rod on the tooling;

[0013] S2: The processed support arm and positioning rod are fixedly clamped on the tooling directly below the support rod at intervals around the axis of the support rod;

[0014] S3: Check the verticality of the support rod and the coaxiality between the support rod and the three support arms;

[0015] S4: After checking and confirming that the coaxiality is within the tolerance range, the support arm is welded to the support rod.

[0016] By adopting the above technical solution, the support arm and the support rod are manufactured separately, and then the support arm is welded to the support rod, which makes it easier to clamp the support rod and the support arm during grinding and processing. At the same time, since the upper end of the support rod is clamped and the support arm is placed on the tooling under the support rod, it is easier to clamp the support arm. At the same time, since the welder does not need to lift the welding equipment to weld at a high place on the support rod, the welder is more stable during welding, and the quality of the finished bracket after welding is higher.

[0017] In the second aspect, the present application provides a welding tool that adopts the following technical solution:

[0018] A welding tool comprises a mounting frame, wherein the mounting frame is provided with a base, a fixture for clamping a support rod is provided on the mounting frame above the base, a plurality of fixing mechanisms for positioning a support arm and a positioning rod are provided on the base at circumferential intervals around the vertical axis of the fixture, and a calibration mechanism for calibrating the support rod is provided on the base, and all of the above mechanisms are made of graphite.

[0019] By adopting the above technical scheme, the processed support arm is fixed on the base at the specified position through the fixing mechanism, and the upper end of the processed support rod is clamped and fixed on the mounting frame by the clamp. After the coaxiality of the support rod is corrected by the proofreading mechanism, if the coaxiality of the support rod meets the requirements, the support arm is welded to the side wall of the support rod by welding. Moreover, since the mounting frame, base, fixing mechanism, proofreading mechanism and clamp are all made of graphite, the support rod and support arm made of quartz are not easily contaminated during processing, thereby ensuring the purity of the silicon wafers processed in the epitaxial furnace.

[0020] Optionally, the clamp includes a clamping block, a side wall of which is provided with a V-shaped groove, and the two ends of the V-shaped groove in the length direction penetrate the opposite side walls of the clamping block, and a mounting arm is horizontally arranged on the mounting frame, one end of the mounting arm is connected to the mounting frame, and the end surface of the other end of the mounting arm is provided with a vertical V-shaped groove in the same manner, and the clamping block is installed on the mounting arm through a fixing member, and the two V-shaped grooves are spliced ​​together to form a clamping groove for clamping a support rod, and the clamping groove is located directly above the base.

[0021] By adopting the above technical solution, after the support rod is placed between the two V-shaped grooves, the clamping block is fixed to the mounting arm through the fixing piece, thereby clamping the support rod on the mounting arm. Moreover, since the clamping groove is formed by two V-shaped grooves, support rods of different diameters can be clamped more stably, and the application range is wide.

[0022] Optionally, the fixing member includes a plurality of one-to-one corresponding fixing rods and fixing plates, the side wall of the mounting arm is provided with a slot that cooperates with the fixing plate and corresponds one-to-one, the fixing plate is inserted in the slot, and an end surface of the mounting arm provided with a V-shaped groove is provided with a plurality of sliding holes corresponding to the fixing rods, the axis of the sliding holes is parallel to the length direction of the mounting arm, the sliding holes are connected with the slots, one end of the fixing rods slides into the sliding holes one-to-one and is threadedly connected to the fixing plate, the clamp block is provided with a plurality of connecting holes corresponding to the fixing rods, the other end of the fixing rod passes through the connecting hole, and a fixing nut is threadedly installed on the end of the fixing rod passing through the connecting hole, the fixing nut presses against the clamp block, and the clamp block presses against the end surface of the mounting arm.

[0023] By adopting the above technical scheme, when clamping the support rod, the clamp block can be first hung on the mounting arm through the fixing rod, and then the support rod can be inserted between the mounting arm and the clamp block, and the fixing nut can be tightened to clamp and fix the support rod on the mounting arm. It is convenient to clamp and remove the support rod, and because the overall clamp is made of graphite, the thread of the clamp is easy to be damaged. Compared with directly opening a threaded hole on the mounting arm for threaded connection with the fixing rod, when the thread on the fixing plate is damaged, only the fixing plate can be replaced, the maintenance cost is low, and the maintenance is relatively fast.

[0024] Optionally, a mounting arm is horizontally arranged on the mounting frame, and the clamp includes a mounting tube, which is located directly above the base, and the mounting tube is vertically mounted on the mounting arm, and a plurality of horizontal connecting rods are circumferentially arranged on the side walls of the mounting tube, and a vertical clamp is slidably mounted on the connecting rod, and an arc groove for clamping the support rod is provided on all opposite sides of the clamp, the axis of the arc groove is parallel to the axis of the mounting tube, and the two ends of the arc groove respectively pass through the two end surfaces of the clamp in the vertical direction, and a limiting tube is threadedly installed on the mounting tube, and the cross-section of one end of the limiting tube is trapezoidal, and a limiting plate is arranged on the connecting rod, and one end of the limiting plate is located in the trapezoidal end of the limiting tube and slidingly cooperates with the inner wall of the trapezoidal end of the limiting tube.

[0025] By adopting the above technical solution, after the support rod is passed through the mounting tube, the limiting tube is rotated, and the limiting tube pushes the clamping plate to slide on the connecting rod through the limiting plate to clamp and fix the support rod. The clamping and fixing of the support rod can be operated with one hand, and the other hand can support the support rod, making the clamping of the support rod more convenient.

[0026] Optionally, the lower end of the mounting tube is connected to the top wall of the mounting arm, a feed hole is opened through the mounting arm, the feed hole is coaxial with the mounting tube, the inner diameter of the mounting tube is not less than the diameter of the support rod, the diameter of the feed hole is not less than the inner diameter of the mounting tube, and the upper end cross-section of the limiting tube is trapezoidal.

[0027] By adopting the above technical solution, since the mounting tube is located above the mounting arm, when the support rod is clamped, the clamping point between the clamping plate and the support rod can be observed more directly, so that the support rod supported by quartz and the clamping plate made of graphite are not prone to collision damage, while further improving the convenience of clamping.

[0028] Optionally, the proofreading mechanism includes a cylindrical positioning block arranged on the base, the positioning block is coaxial with the mounting tube, a proofreading tube is threadedly mounted on the positioning block, an annular plate is coaxially arranged on the upper end surface of the proofreading tube, a plurality of indicator plates are circumferentially arranged on the annular plate around the axis of the annular plate, all the indicator plates are assembled with each other, a push plate is arranged on one end of the indicator plate facing the axial direction of the annular plate, the push plate is arranged in the axial direction of the annular plate and is inclined toward the base, the radial length of the indicator plate along the annular plate is greater than the radial length of the push plate along the annular plate, the push plates are assembled with each other on one side away from the indicator plate to form a circle, the virtual circle formed by the push plate is coaxial with the annular plate and the diameter of the virtual circle is equal to the diameter of the cylinder formed by the maximum straightness deviation at the upper and lower ends of the support rod.

[0029] By adopting the above technical scheme, since the bracket has certain requirements for the straightness of the support rod, when the support rod is clamped on the fixture and the lower end of the support rod is in contact with the top wall of the positioning block, the proofreading tube is rotated and moves vertically upward. When the cylindrical diameter formed by the straightness deviation between the lower end and the upper end of the support rod is greater than the specified diameter, the side wall of the support rod is pressed against the push plate, thereby pushing the push plate to drive the indicator plate to rotate upward. Since the length of the indicator plate is greater than the length of the push plate, the operator can more intuitively observe that the straightness of the support rod exceeds the specified range. Compared with the traditional method of comparing straightness by naked eye observation, the above technology is more convenient and quicker for judging straightness, thereby improving production efficiency.

[0030] Optionally, a retaining ring is coaxially arranged on the outer edge of the top wall of the annular plate, and the end face of the indicator plate which is away from the axis of the annular plate is in the shape of an arc. This arc surface is defined as a limiting surface, and the limiting surface is in contact with the inner wall of the retaining ring. The limiting surface is used to guide one end of the indicator plate where the limiting surface is set to move along an arc, and the height of the retaining ring is greater than the thickness of the indicator plate.

[0031] By adopting the above technical solution, the retaining ring is used to limit the indicating plate, so that the indicating plate is not easy to fall off from the annular plate when moving.

[0032] Optionally, the fixing mechanism includes a fixing block, the base is provided with a plurality of fixing holes that slidably cooperate with the positioning rods and correspond one to one, the bottoms of the fixing holes are located in the same plane, the axes of the fixing holes are parallel to the axes of the clamp, the fixing block is provided with an insert plate, the base is provided with a fixing groove that slidably cooperates with the insert plate, the plurality of fixing grooves correspond one to one with the fixing holes, the insert plates are slidably installed in the fixing grooves, one end of the fixing block faces the fixing hole, and an end surface of the fixing block facing the fixing hole is a concave arc surface, which is defined as a limiting surface, and when the positioning rod is inserted into the fixing hole and the support rod extends in a specified direction, the limiting surface fits tightly against the side wall of the support arm.

[0033] By adopting the above technical solution, when welding, the positioning rod is inserted into the fixing hole and the support arm is rotated to be close to the side wall of the support rod, and then the insert plate is inserted into the fixing groove. After the limiting surface of the fixing block is close to the side wall of the support arm, the support arm and the positioning rod can be positioned and fixed by cooperating with the fixing hole, and the positioning is more convenient.

[0034] In summary, the present application includes at least one of the following beneficial technical effects:

[0035] 1. After the support arm and the support rod are made separately, the support arm is welded to the support rod by welding, which makes it easier to clamp the support rod and the support arm during grinding and processing. At the same time, since the upper end of the support rod is clamped and the support arm is placed on the tooling under the support rod, the clamping of the support arm is easier. At the same time, since the welder does not need to lift the welding equipment to weld at a high position of the support rod during welding, the welder is more stable during welding, and the quality of the finished bracket after welding is higher;

[0036] 2. The processed support arm is fixed on the base at the specified position through the fixing mechanism, and the upper end of the processed support rod is fixed on the mounting frame by clamping through the clamp. After the coaxiality of the support rod is corrected by the correction mechanism, if the coaxiality of the support rod meets the requirements, the support arm is welded to the side wall of the support rod by welding. Since the mounting frame, base, fixing mechanism, correction mechanism and clamp are all made of graphite, the support rod and support arm made of quartz are not easily contaminated during processing, thereby ensuring the purity of the silicon wafer processed in the epitaxial furnace;

[0037] 3. Since the mounting tube is located above the mounting arm, when the support rod is clamped, the clamping point between the clamping plate and the support rod can be observed more directly, so that collision damage is not easy to occur between the quartz-supported support rod and the graphite clamping plate, and the convenience of clamping is further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic diagram of the three-dimensional structure of a bracket in the prior art.

[0039] Figure 2 It is a three-dimensional structural schematic diagram of a tooling using the first type of clamp in this application.

[0040] Figure 3 It is a cross-sectional schematic diagram of the present application, in which the vertical portion of the mounting frame is omitted.

[0041] Figure 4 It is a three-dimensional structural schematic diagram of a tooling using the second type of clamp in this application.

[0042] Figure 5 It is an exploded schematic diagram of the second clamp of the present application, in which the mounting arm is cut away.

[0043] Reference numerals: 1, mounting frame; 11, base; 111, fixing hole; 112, fixing slot; 12, mounting arm; 121, slot; 122, sliding hole; 123, feeding hole; 2, clamp; 21, clamp block; 211, V-shaped groove; 212, connecting hole; 22, fixing piece; 221, fixing rod; 222, fixing plate; 223, fixing nut; 23, mounting tube; 24, connecting rod; 25, clamping plate; 251. arc groove; 26. limit tube; 27. limit plate; 3. fixing mechanism; 31. fixing block; 311. limit surface; 32. plug plate; 4. proofreading mechanism; 41. positioning block; 42. proofreading tube; 43. annular plate; 44. indicator plate; 45. push plate; 46. retaining ring; 5. clamping groove; 6. virtual circle; 7. bracket; 71. support rod; 72. support arm; 73. positioning rod; 731. positioning hole. DETAILED DESCRIPTION

[0044] The following is combined with Figure 1-5 This application is described in further detail.

[0045] Reference Figure 1 The bracket 7 in the prior art includes a support rod 71 and three support arms 72 welded circumferentially and spaced apart on the side wall of one end of the support rod 71. The three support arms 72 are all inclined and extend in a direction away from one end of the support rod 71. A positioning rod 73 is integrally provided on one end of each of the three support arms 72. The positioning rod 73 is parallel to the support rod 71. A positioning hole 731 for connecting a support plate is coaxially formed on the positioning rod 73. The end faces of the three positioning rods 73 are located in the same plane.

[0046] In a first aspect, an embodiment of the present application discloses a method for manufacturing a bracket of a semiconductor epitaxial growth furnace, comprising the following steps:

[0047] S1: Hang the support rod 71 on the tooling;

[0048] S2: The processed support arm 72 and positioning rod 73 are fixedly clamped on the tooling directly below the support rod 71 at intervals in the circumferential direction around the axis of the support rod 71;

[0049] S3: Check the verticality of the support rod 71 and the coaxiality between the support rod 71 and the three positioning rods 73;

[0050] S4: After checking and confirming that the coaxiality is within the tolerance range, the support arm 72 is welded to the support rod 71.

[0051] Reference Figure 2 and Figure 3 In the second aspect, the embodiment of the present application discloses a welding fixture for a bracket of an epitaxial growth furnace, a welding fixture, comprising a mounting frame 1, a base 11 in the shape of a horizontal disc is fixedly mounted on the bottom of the mounting frame 1 by bolts, three fixing mechanisms 3 are arranged on the base 11 at intervals around the axis of the base 11 in the circumferential direction, the fixing mechanism 3 comprises a fixing block 31, one end face of the fixing block 31 is in an arc-shaped concave shape, and this face is defined as a limiting face 311. Three fixing grooves 112 are provided on the top wall of the base 11, and an insert plate 32 that slidably cooperates with the fixing groove 112 is integrally arranged on the fixing block 31, the insert plate 32 is inserted into the fixing groove 112, and the fixing block 31 is installed on the base 11 through the insert plate 32.

[0052] Reference Figure 2 and Figure 3 A fixing hole 111 is vertically opened on the top wall of the base 11 below the fixing block 31, and the fixing hole 111 is slidably matched with the positioning rod 73. The bottoms of the three fixing holes 111 are located in the same horizontal plane, and the positioning rod 73 is inserted into the fixing holes 111. The support arm 72 is installed on the base 11 through the cooperation between the fixing rod 221 and the fixing hole 111. After the support arm 72 is rotated to a specified position, the limiting surface 311 of the fixing block 31 is in contact with the side wall of the support arm 72, and the support arm 72 is circumferentially fixed by the fixing block 31.

[0053] Reference Figure 2 and Figure 3 A horizontal mounting arm 12 is fixedly installed on the mounting frame 1 above the base 11 by bolts, and a clamp 2 is arranged on one end of the mounting arm 12 , and the clamp 2 is located directly above the base 11 .

[0054] Reference Figure 2 and Figure 3The first clamp 2 in the present application includes a rectangular clamp block 21, and a vertical V-shaped groove 211 is formed on the side wall of the clamp block 21. The two ends of the V-shaped groove 211 in the vertical direction respectively penetrate the top wall and the bottom wall of the clamp block 21. A V-shaped groove 211 is also formed on the end surface of the end where the mounting arm 12 is connected to the clamp block 21 in the same manner. The two V-shaped grooves 211 are combined to form a clamping groove 5, and the upper end of the support rod 71 is clamped and fixed in the clamping groove 5.

[0055] Reference Figure 2 and Figure 3 A fixing member 22 is provided on the clamping block 21 for fixing the clamping block 21 on the mounting arm 12. The fixing member 22 includes two fixing rods 221 and two fixing plates 222. A slot 121 for slidingly cooperating with the fixing plate 222 is respectively provided on the vertical side walls in the length direction of the mounting arm 12. The two fixing plates 222 are respectively slidably installed in the slot 121. Two sliding holes 122 are provided on one end surface of the mounting arm 12 where the V-shaped groove 211 is provided. The two sliding holes 122 are respectively located on both sides of the V-shaped groove 211. The two fixing rods 221 are respectively slidably installed in the sliding holes 122.

[0056] Reference Figure 2 and Figure 3 The two sliding holes 122 are respectively connected with the two slots 121, and one end of the fixing rod 221 is inserted into the slot 121 and is threadedly connected with the fixing plate 222. Two connecting holes 212 corresponding to the fixing rods 221 are formed on the clamping block 21, and the two fixing rods 221 pass through the two connecting holes 212 respectively, and fixing nuts 223 are threadedly installed on one end of the two fixing rods 221 passing through the connecting holes 212, and the fixing nuts 223 are pressed against the side wall of the clamping block 21, and the V-shaped groove 211 of the clamping block 21 and the V-shaped groove 211 of the mounting arm 12 clamp and fix the support rod 71.

[0057] Reference Figure 4 and Figure 5The second clamp 2 of the present application includes a mounting tube 23 with a diameter larger than that of the support rod 71, a feed hole 123 is formed through the top wall of one end of the mounting arm 12, the lower end of the mounting tube 23 is threadedly installed in the feed hole 123, and three connecting rods 24 are fixedly installed at intervals on the upper end side wall of the mounting tube 23. The connecting rod 24 is horizontal and a vertical clamping plate 25 is slidably installed on the connecting rod 24, and an arc groove 251 is provided on the side of the clamping plate 25 facing the axis of the mounting tube 23 for clamping the support rod 71. A limiting tube 26 is threadedly installed at the lower end of the mounting tube 23. The internal cross-section of the upper end of the limiting tube 26 is trapezoidal. A limiting plate 27 is integrally provided at the lower end of the connecting rod 24. The lower end of the limiting plate 27 extends into the limiting tube 26 and fits with the inner wall of the upper end of the limiting tube 26. After one end of the support rod 71 passes through the mounting tube 23 and the feed hole 123, the limiting tube 26 is rotated to push the clamping plate 25 to fit tightly against the side wall of the support rod 71, so that the support rod 71 can be clamped and fixed.

[0058] Reference Figure 2 and Figure 3 A calibration mechanism 4 for calibrating the straightness of the support rod 71 is provided on the base 11. The calibration mechanism 4 includes a positioning block 41 coaxially and integrally provided on the base 11, and the positioning block 41 is cylindrical. A calibration tube 42 is threadedly mounted on the positioning block 41, and a ring plate 43 is coaxially and integrally provided on the calibration tube 42. A retaining ring 46 is integrally provided on the outer edge of the top wall of the ring plate 43, and a fillet is provided at the connection between the inner wall of the retaining ring 46 and the ring plate 43. A plurality of indicator plates 44 are circumferentially assembled and placed on the top wall of the ring plate 43 around its axis. The thickness of the indicator plate 44 is less than the height of the retaining ring 46. One end of the indicator plate 44 fits with the fillet of the inner wall of the retaining ring 46 and the connection between the retaining ring 46 and the ring plate 43, and the other end of the indicator plate 44 is flush with the inner wall of the ring plate 43.

[0059] Reference Figure 2 and Figure 3 A push plate 45 is integrally provided on one end of the indicator plate 44 facing the axial direction of the annular plate 43. The push plate 45 extends in the axial direction of the annular plate 43 and is inclined toward the base 11. The ends of the push plates 45 facing the axial direction of the annular plate 43 are joined together to form a circle. The diameter of the virtual circle 6 formed by the inner sides of the push plates 45 being joined together is the diameter of the cross section of the virtual circle 6 formed by the specified range of the straightness of the support rod 71.

[0060] Reference Figure 2 and Figure 3The length of the push plate 45 is less than the length of the indicator plate 44. When the lower end of the support rod 71 is pressed against the top wall of the positioning block 41, the proofreading tube 42 is rotated. When the straightness of the support rod 71 does not meet the requirements, the side wall of the support rod 71 will press against the push plate 45, and then the push plate 45 will push the indicator plate 44 to rotate at the connection between the indicator plate 44 and the push plate 45, that is, the indicator plate 44 is tilted. Since the length of the indicator plate 44 is greater than the push plate 45, the rotation path of the end of the indicator plate 44 away from the push plate 45 is larger, so that the rotation of the indicator plate 44 is more obvious, so that the operator can more conveniently and intuitively understand whether the straightness of the support rod 71 meets the requirements.

[0061] All mechanisms in the above schemes are made of graphite.

[0062] The implementation principle of a welding tool in the embodiment of the present application is:

[0063] When using the first clamp 2, first pass the support rod 71 through the clamping groove 5, tighten the fixing nut 223 to clamp and fix the support rod 71, then rotate the calibration tube 42, and judge whether the straightness of the support rod 71 meets the requirements by judging whether the indicator plate 44 is rotated. If it meets the requirements, insert the three positioning rods 73 on the three support arms 72 into the three fixing holes 111 respectively, rotate the support arm 72 to press against the side wall of the support rod 71, insert the plug plate 32 of the fixing block 31 into the fixing groove 112, and after the limiting surface 311 of the fixing block 31 is fitted with the support arm 72, the fixation of the support arm 72 is completed.

[0064] When the second clamp 2 is used, after the support rod 71 passes through the mounting tube 23 , the limiting tube 26 is rotated to push the clamping plate 25 against the side wall of the support rod 71 , and the support rod 71 can be clamped and fixed.

[0065] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A welding tool for a semiconductor epitaxial growth furnace support, the semiconductor epitaxial growth furnace support comprising a support rod (71) and three support arms (72) welded circumferentially and spaced apart on a side wall at one end of the support rod (71), the three support arms (72) are all inclined and extend in a direction away from one end of the support rod (71), one end of each of the three support arms (72) is integrally provided with a positioning rod (73), the positioning rod (73) is parallel to the support rod (71), a positioning hole (731) for connecting a support plate is coaxially formed on the positioning rod (73), and end surfaces of the three positioning rods (73) are located in the same plane, characterized in that: The invention comprises a mounting frame (1), wherein the mounting frame (1) is provided with a base (11), wherein a fixture (2) for clamping a support rod (71) is provided on the mounting frame (1) above the base (11), wherein a plurality of fixing mechanisms (3) for positioning a support arm (72) and a positioning rod (73) are provided on the base (11) at intervals in the circumferential direction around the vertical axis of the fixture (2), and wherein a calibration mechanism (4) for calibrating the support rod (71) is provided on the base (11), wherein all the above mechanisms are made of graphite; The clamp (2) comprises a clamp block (21), a V-shaped groove (211) is provided on one side wall of the clamp block (21), and the two ends of the V-shaped groove (211) in the length direction penetrate the opposite side walls of the clamp block (21), a mounting arm (12) is horizontally arranged on the mounting frame (1), one end of the mounting arm (12) is connected to the mounting frame (1), and a vertical V-shaped groove (211) is provided on the end surface of the other end of the mounting arm (12) in the same manner, the clamp block (21) is mounted on the mounting arm (12) via a fixing member (22), and the two V-shaped grooves (211) are assembled to form a clamping groove (5) for clamping the support rod (71), and the clamping groove (5) is located directly above the base (11); The fixing member (22) comprises a plurality of one-to-one corresponding fixing rods (221) and fixing plates (222); a slot (121) cooperating with and corresponding to the fixing plate (222) is provided on a side wall of the mounting arm (12); the fixing plate (222) is inserted into the slot (121); a plurality of sliding holes (122) corresponding to the fixing rods (221) are provided on an end surface of the mounting arm (12) provided with a V-shaped groove (211); the axis of the sliding hole (122) is parallel to the length direction of the mounting arm (12); the sliding hole (122) and the slot (121) are aligned with each other. ), one end of the fixing rod (221) slides into the sliding hole (122) in a one-to-one correspondence and is threadedly connected to the fixing plate (222), a plurality of connection holes (212) corresponding to the fixing rod (221) are formed through the clamping block (21), the other end of the fixing rod (221) passes through the connection hole (212), a fixing nut (223) is threadedly installed on one end of the fixing rod (221) passing through the connection hole (212), the fixing nut (223) is pressed against the clamping block (21), and the clamping block (21) is pressed against the end surface of the mounting arm (12); The calibration mechanism (4) comprises a cylindrical positioning block (41) arranged on the base (11), the positioning block (41) being coaxial with the clamp (2), a limiting tube (26) being threadedly mounted on the positioning block (41), an annular plate (43) being coaxially arranged on the upper end surface of the limiting tube (26), a plurality of indicating plates (44) being arranged on the annular plate (43) in a circumferential direction around the axis of the annular plate (43), all indicating plates (44) being assembled with each other, a push plate (45) being arranged on one end of the indicating plate (44) facing the axis direction of the annular plate (43), the push plate (45) is arranged in the axial direction of the annular plate (43) and the push plate (45) is inclined in the direction of the base (11), the radial length of the indicating plate (44) along the annular plate (43) is greater than the radial length of the push plate (45) along the annular plate (43), the push plate (45) is assembled with each other on a side away from the indicating plate (44) to form a circle, the virtual circle (6) formed by the push plate (45) is coaxial with the annular plate (43) and the diameter of the virtual circle (6) is equal to the diameter of the cylinder formed by the maximum straightness deviation of the upper and lower ends of the support rod (71); A retaining ring (46) is coaxially arranged on the outer edge of the top wall of the annular plate (43); an end surface of the indicating plate (44) that is away from the axis of the annular plate (43) is in the shape of an arc surface, and the arc surface is defined as a limiting surface (311); the limiting surface (311) is in contact with the inner wall of the retaining ring (46); the limiting surface (311) is used to guide the end of the indicating plate (44) provided with the limiting surface (311) to move along an arc; the height of the retaining ring (46) is greater than the thickness of the indicating plate (44); The fixing mechanism (3) comprises a fixing block (31), the base (11) is provided with a plurality of fixing holes (111) which are slidably matched with the positioning rods (73) and correspond one to one, the bottoms of the fixing holes (111) are located in the same plane, the axes of the fixing holes (111) are parallel to the axes of the clamps (2), the fixing block (31) is provided with an insert plate (32), the base (11) is provided with fixing grooves (112) which are slidably matched with the insert plate (32), and the plurality of fixing grooves (112) are connected to the fixing grooves (112). The fixing holes (111) correspond one to one, the plug plate (32) is slidably installed in the fixing groove (112), one end of the fixing block (31) faces the fixing hole (111), and one end surface of the fixing block (31) facing the fixing hole (111) is in the shape of a concave arc surface, which is defined as a limiting surface (311). When the positioning rod (73) is inserted in the fixing hole (111) and the support rod (71) extends in a specified direction, the limiting surface (311) fits tightly against the side wall of the support arm (72).

2. A welding tool for a semiconductor epitaxial growth furnace support, the semiconductor epitaxial growth furnace support comprising a support rod (71) and three support arms (72) welded circumferentially and spaced apart on a side wall at one end of the support rod (71), the three support arms (72) are all inclined and extend in a direction away from one end of the support rod (71), one end of each of the three support arms (72) is integrally provided with a positioning rod (73), the positioning rod (73) is parallel to the support rod (71), a positioning hole (731) for connecting a support plate is coaxially formed on the positioning rod (73), and end surfaces of the three positioning rods (73) are located in the same plane, characterized in that: The invention comprises a mounting frame (1), wherein the mounting frame (1) is provided with a base (11), wherein a fixture (2) for clamping a support rod (71) is provided on the mounting frame (1) above the base (11), wherein a plurality of fixing mechanisms (3) for positioning a support arm (72) and a positioning rod (73) are provided on the base (11) at intervals in the circumferential direction around the vertical axis of the fixture (2), and wherein a calibration mechanism (4) for calibrating the support rod (71) is provided on the base (11), wherein all the above mechanisms are made of graphite; The mounting frame (1) is horizontally provided with a mounting arm (12), the clamp (2) comprising a mounting tube (23), the mounting tube (23) being located directly above the base (11), the mounting tube (23) being vertically mounted on the mounting arm (12), a plurality of horizontal connecting rods (24) being circumferentially arranged at intervals on the side wall of the mounting tube (23), a vertical clamping plate (25) being slidably mounted on the connecting rod (24), and arc-shaped grooves (25) for clamping the support rod (71) being provided on opposite sides of all the clamping plates (25). 251), the axis of the arc groove (251) is parallel to the axis of the mounting tube (23), the two ends of the arc groove (251) respectively penetrate the two end surfaces of the clamping plate (25) in the vertical direction, a limit tube (26) is threadedly mounted on the mounting tube (23), one end of the limit tube (26) has a trapezoidal cross-section, a limit plate (27) is provided on the connecting rod (24), one end of the limit plate (27) is located inside the trapezoidal end of the limit tube (26) and is slidably matched with the inner wall of the trapezoidal end of the limit tube (26); The lower end of the mounting tube (23) is connected to the top wall of the mounting arm (12); a feed hole (123) is formed through the mounting arm (12); the feed hole (123) is coaxial with the mounting tube (23); the inner diameter of the mounting tube (23) is not less than the diameter of the support rod (71); the diameter of the feed hole (123) is not less than the inner diameter of the mounting tube (23); and the upper end section of the limiting tube (26) is trapezoidal; The calibration mechanism (4) comprises a cylindrical positioning block (41) arranged on the base (11), the positioning block (41) being coaxial with the clamp (2), a limiting tube (26) being threadedly mounted on the positioning block (41), an annular plate (43) being coaxially arranged on the upper end surface of the limiting tube (26), a plurality of indicating plates (44) being arranged on the annular plate (43) in a circumferential direction around the axis of the annular plate (43), all indicating plates (44) being assembled with each other, a push plate (45) being arranged on one end of the indicating plate (44) facing the axis direction of the annular plate (43), the push plate (45) is arranged in the axial direction of the annular plate (43) and the push plate (45) is inclined in the direction of the base (11), the radial length of the indicating plate (44) along the annular plate (43) is greater than the radial length of the push plate (45) along the annular plate (43), the push plate (45) is assembled with each other on a side away from the indicating plate (44) to form a circle, the virtual circle (6) formed by the push plate (45) is coaxial with the annular plate (43) and the diameter of the virtual circle (6) is equal to the diameter of the cylinder formed by the maximum straightness deviation of the upper and lower ends of the support rod (71); A retaining ring (46) is coaxially arranged on the outer edge of the top wall of the annular plate (43); an end surface of the indicating plate (44) that is away from the axis of the annular plate (43) is in the shape of an arc surface, and the arc surface is defined as a limiting surface (311); the limiting surface (311) is in contact with the inner wall of the retaining ring (46); the limiting surface (311) is used to guide the end of the indicating plate (44) provided with the limiting surface (311) to move along an arc; the height of the retaining ring (46) is greater than the thickness of the indicating plate (44); The fixing mechanism (3) comprises a fixing block (31), the base (11) is provided with a plurality of fixing holes (111) which are slidably matched with the positioning rods (73) and correspond one to one, the bottoms of the fixing holes (111) are located in the same plane, the axes of the fixing holes (111) are parallel to the axes of the clamps (2), the fixing block (31) is provided with an insert plate (32), the base (11) is provided with fixing grooves (112) which are slidably matched with the insert plate (32), and the plurality of fixing grooves (112) are connected to the fixing grooves (112). The fixing holes (111) correspond one to one, the plug plate (32) is slidably installed in the fixing groove (112), one end of the fixing block (31) faces the fixing hole (111), and one end surface of the fixing block (31) facing the fixing hole (111) is in the shape of a concave arc surface, which is defined as a limiting surface (311). When the positioning rod (73) is inserted in the fixing hole (111) and the support rod (71) extends in a specified direction, the limiting surface (311) fits tightly against the side wall of the support arm (72).

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