Probe card device and leaf spring probe

Abstract

The present invention discloses a probe card device and a spring-like probe. The spring-like probe is defined with a length direction and a separation plane parallel to the length direction, and includes an adapter end portion and a test end portion. A part of the spring-like probe between the adapter end portion and the test end portion is formed with: two stroke arms which are arranged at intervals and are respectively located on opposite sides of the separation plane. Each of the stroke arms is curved, and two projection areas formed by respectively orthogonally projecting the two stroke arms onto the separation plane have at least one intersection point. In a cross-section of the two stroke arms perpendicular to the length direction, the cross-sectional area of any one of the stroke arms is 95% to 105% of the cross-sectional area of the other stroke arm. Accordingly, through the structural design of the two stroke arms located between the adapter end portion and the test end portion, the spring-like probe can provide a function similar to that of a spring, thereby realizing a brand-new conductive probe architecture.

Description

Technical Field

[0001] The invention relates to a probe card, and in particular to a probe card device and a spring-like probe. Background Art

[0002] Existing probe card devices use multiple conductive probes to transmit signals and currents, but existing conductive probes have been gradually limited by the existing structural design framework, making it difficult to create a completely new structure. For example, existing conductive probes (such as pogo pins) have a spring function through a multi-piece structure.

[0003] Therefore, the inventors believe that the above defects can be improved, and have devoted themselves to research and applied scientific principles, and finally proposed the present invention which has a reasonable design and effectively improves the above defects. Summary of the invention

[0004] The embodiments of the present invention provide a probe card device and a spring-like probe, which can effectively improve the defects that may be produced by the existing conductive probe.

[0005] The embodiment of the present invention discloses a probe card device, which includes a first guide plate unit and a second guide plate unit, which are arranged at intervals from each other; and a plurality of spring-like probes, which are inserted into the first guide plate unit and the second guide plate unit; each spring-like probe is defined with a length direction and a dividing surface parallel to the length direction; wherein each spring-like probe includes: a transfer end, which is located at an outer side of the first guide plate unit away from the second guide plate unit; and a test end, which is located at an outer side of the second guide plate unit away from the first guide plate unit, and the test end is used to detachably press against a test object; wherein each spring-like probe is formed with: two stroke arms, which are arranged at intervals and respectively located on opposite sides of the dividing surface; in each spring-like probe, each stroke arm is curved, and the two projection areas formed by the two stroke arms being respectively projected onto the dividing surface have at least one intersection point; wherein, in the cross section of the two stroke arms of each spring-like probe in the vertical length direction, the cross-sectional area of ​​any one stroke arm is 95% to 105% of the cross-sectional area of ​​the other stroke arm.

[0006] Preferably, each spring-like probe comprises a first section with a transfer end and a second section with a test end; in each spring-like probe, two ends of any travel arm are respectively connected to the first section and the second section.

[0007] Preferably, in each spring-like probe, the two travel arms are located in a space between the first section and the second section.

[0008] Preferably, the first guide plate unit is not offset relative to the second guide plate unit, and any spring-like probe can be compressed along the length direction so that its two travel arms are deformed toward the outside of the space.

[0009] Preferably, each spring-like probe defines a layout plane parallel to the length direction and perpendicular to the partition plane; in each spring-like probe, two ends of any travel arm are respectively located on opposite sides of the layout plane.

[0010] Preferably, each spring-like probe has a needle length in the length direction; in each spring-like probe, any one stroke arm corresponds to a length in the length direction, which is 50% to 90% of the needle length.

[0011] Preferably, the needle length of each spring-like probe is not greater than 4 millimeters (mm), and the number of at least one intersection point of each stroke arm is an odd number.

[0012] Preferably, the outer surface of each spring-like probe includes two wide side surfaces which are parallel to the length direction and located at opposite sides respectively; in each spring-like probe, the separation surface is perpendicular to any one of the wide side surfaces.

[0013] The embodiment of the present invention also discloses a spring-like probe, which is defined with a length direction and a dividing surface parallel to the length direction, and the spring-like probe includes: a transfer end portion, used to abut against a signal transfer board; and a test end portion, used to detachably abut against an object to be tested; wherein, the spring-like probe is formed with: two travel arms arranged at intervals and respectively located on opposite sides of the dividing surface at a position between the transfer end portion and the test end; each travel arm is curved, and the two projection areas formed by the two travel arms being projected onto the dividing surface respectively have at least one intersection point; wherein, in the cross section of the two travel arms of the spring-like probe in the vertical length direction, the cross-sectional area of ​​any one travel arm is 95% to 105% of the cross-sectional area of ​​the other travel arm.

[0014] Preferably, the spring-like probe includes a first section with a transfer end and a second section with a test end, the two ends of any one travel arm are respectively connected to the first section and the second section, and the two travel arms are located in a space between the first section and the second section; the spring-like probe defines a layout surface parallel to the length direction and perpendicular to the dividing surface, the two ends of any one travel arm are respectively located on opposite sides of the layout surface, and any one travel arm includes a plurality of arc portions connected in sequence, and the plurality of arc portions are respectively and alternately located on opposite sides of the layout surface.

[0015] To summarize, the probe card device and the spring-like probe disclosed in the embodiments of the present invention can provide a spring-like function through the structural design of the two travel arms located between the adapter end and the test end (such as: the two travel arms are arranged at intervals and are respectively located on opposite sides of the dividing surface; the two travel arms are respectively projected onto the dividing surface to form two projection areas, which have at least one intersection point), thereby realizing a new conductive probe architecture.

[0016] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the protection scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 FIG. 1 is a schematic plan view of a probe card device according to a first embodiment of the present invention.

[0018] Figure 2 for Figure 1 A plan view of a plurality of spring-like probes when being compressed along the length direction.

[0019] Figure 3 It is a three-dimensional schematic diagram of a spring-like probe according to the first embodiment of the present invention.

[0020] Figure 4 for Figure 3 Schematic cross-sectional view along section line IV-IV.

[0021] Figure 5 For the corresponding Figure 3 Schematic diagram of a three-dimensional cross-section.

[0022] Figure 6 for Figure 3 Schematic cross-sectional view along section line VI-VI.

[0023] Figure 7 For the corresponding Figure 6 Schematic diagram of a three-dimensional cross-section.

[0024] Figure 8 for Figure 3 Schematic cross-sectional view along section line VIII-VIII.

[0025] Figure 9 For the corresponding Figure 8 Schematic diagram of a three-dimensional cross-section.

[0026] Figure 10 It is a three-dimensional schematic diagram of a spring-like probe according to the second embodiment of the present invention.

[0027] Figure 11 for Figure 10 Schematic diagram of the floor plan.

[0028] Figure 12 For Figure 10 Schematic cross-sectional view along the section line XII-XII.

[0029] Figure 13 Corresponding to Figure 12 Schematic three-dimensional cross-sectional view. Specific implementation manners

[0030] The following are specific embodiments to illustrate the implementation manners of the present invention regarding the "probe card device and spring-like probe" disclosed herein. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. Additionally, the drawings of the present invention are only for simple schematic illustration and are not drawn according to actual dimensions, which is stated in advance. The following implementation manners will further detail the related technical content of the present invention, but the disclosed content is not intended to limit the protection scope of the present invention.

[0031] It should be understood that although terms such as "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another, or one signal from another. Additionally, the term "or" used herein should, depending on the actual situation, possibly include any one or a combination of more of the associated listed items.

[0032] [Embodiment 1]

[0033] Please refer to Figures 1 to 9 as shown, which is Embodiment 1 of the present invention. This embodiment discloses a probe card device 1000, including a probe head 100 and a signal transfer board 200 abutted against one side (such as: Figure 1 the top side of the probe head 100) of the probe head 100, and the other side (such as: Figure 1 the bottom side of the probe head 100) of the probe head 100 is used to abut against and test a device under test (DUT) (not shown in the figure, such as a semiconductor wafer).

[0034] It should be noted first that for the convenience of understanding this embodiment, the drawings only show a partial structure of the probe card device 1000 to clearly present the component structures and connection relationships of the probe card device 1000, but the present invention is not limited by the drawings. The following will separately introduce the component structures and connection relationships of the probe head 100.

[0035] Such asFigure 1 and Figure 2 As shown in Figure 2 , the probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, a spacer plate 3 clamped between the first guide plate unit 1 and the second guide plate unit 2, and a plurality of spring-like probes 4 passing through the first guide plate unit 1 and the second guide plate unit 2.

[0036] It should be noted that the spring-like probes 4 are described in this embodiment in combination with the first guide plate unit 1, the second guide plate unit 2, and the spacer plate 3, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the spring-like probes 4 can also be independently applied (such as: sold) or used in combination with other components. Furthermore, the probe head 100 can be designed with the structure of the spring-like probes 4 so that the first guide plate unit 1 can be misaligned relative to the second guide plate unit 2, but the present invention is not limited thereto.

[0037] In this embodiment, the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments not shown in the present invention, the first guide plate unit 1 can include a plurality of first guide plates (and spacer sheets clamped between two adjacent first guide plates), and the second guide plate unit 2 can also include a plurality of second guide plates (and spacer sheets clamped between two adjacent second guide plates). The plurality of first guide plates can be misaligned with each other, and the plurality of second guide plates can also be misaligned with each other.

[0038] Furthermore, the spacer plate 3 can be an annular structure, and the spacer plate 3 is clamped at the corresponding peripheral parts of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the spacer plate 3 of the probe card device 1000 can also be omitted or replaced by other components.

[0039] It should be noted first that the plurality of spring-like probes 4 have substantially the same structure in this embodiment. Therefore, for the convenience of description, a single spring-like probe 4 will be introduced first below, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the structures of the plurality of spring-like probes 4 included in the probe head 100 can also be slightly different.

[0040] Such as Figure 1 and Figure 3As shown, the spring-like probe 4 in this embodiment is a one-piece structure formed integrally, and the spring-like probe 4 is generally linear and defines a length direction L. Among them, the spring-like probe 4 has a needle length L4 in the length direction L, and the needle length L4 is described as less than 4 millimeters (mm) in this embodiment.

[0041] The outer surface of the spring-like probe 4 includes two wide sides 4a and two narrow sides 4b. The two wide sides 4a and the two narrow sides 4b are all parallel to the length direction L, and the two wide sides 4a are respectively located on opposite sides of the spring-like probe 4, while the two narrow sides 4b are respectively located on the other two opposite sides of the spring-like probe 4.

[0042] Furthermore, as Figure 1 、 Figure 3 and Figure 4 shown, for the convenience of explaining the specific structure of the spring-like probe 4 in this embodiment, the spring-like probe 4 can be further defined with a partition surface P1 parallel to the length direction L and a layout surface P2 parallel to the length direction L and perpendicular to the partition surface P1. In this embodiment, the partition surface P1 is perpendicular to any one of the wide sides 4a, and the partition surface P1 can be the perpendicular bisecting plane of any one of the wide sides 4a; the layout surface P2 is perpendicular to any one of the narrow sides 4b, and the layout surface P2 can be the perpendicular bisecting plane of any one of the narrow sides 4b, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the partition surface P1 can be perpendicular to any one of the narrow sides 4b, and the layout surface P2 is perpendicular to any one of the wide sides 4a.

[0043] Viewed from another angle, the spring-like probe 4 includes a first section 41, a second section 42 spaced from the first section 41 along the length direction L, and two travel arms 43 connecting the first section 41 and the second section 42 (for example, the two ends 431 of any one of the travel arms 43 are respectively connected to the first section 41 and the second section 42).

[0044] Among them, the first section 41 has a connection end portion 411 and a first extension portion 412 connected to the connection end portion 411, and the connection end portion 411 includes two limit bumps 4111 located on its opposite sides; the second section 42 has a test end portion 421 and a second extension portion 422 connected to the test end portion 421, and the first extension portion 412 and the second extension portion 422 are arranged adjacent to each other.

[0045] Furthermore, any one of the stroke arms 43 corresponds to a length L43 in the length direction L, which is 50% to 90% of the needle length L4, and the two ends 431 of any one of the stroke arms 43 are respectively connected to the end surfaces 413 and 423 of the first extension portion 412 and the second extension portion 422 facing each other; in this embodiment, the two stroke arms 43 are located in a space S between the first section 41 and the second section 42, and the spring-like probe 4 can be compressed along the length direction L to deform the two stroke arms 43 toward the outside of the space S, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, any one of the stroke arms 43 of the spring-like probe 4 can also be partially located outside the space S in the initial state when it is not compressed.

[0046] In more detail, a portion of the first extension portion 412 is located in the first guide plate unit 1, and the remaining portion of the first extension portion 412 is disposed between the first guide plate unit 1 and the second guide plate unit 2, and the transition end portion 411 is located at an outer side of the first guide plate unit 1 away from the second guide plate unit 2 (e.g., Figure 1 The two limiting protrusions 4111 of the transition end 411 are used to abut against the outer surface of the first guide plate unit 1, and the (end) of the transition end 411 is used to abut against the signal transition board 200.

[0047] Furthermore, part of the second extension portion 422 is located in the second guide plate unit 2, and the rest of the second extension portion 422 is disposed between the first guide plate unit 1 and the second guide plate unit 2, and the test end portion 421 is located at an outer side of the second guide plate unit 2 away from the first guide plate unit 1 (e.g., Figure 1 The testing end 421 (the end thereof) is used to detachably abut against the object to be tested.

[0048] In addition, the two travel arms 43 are located between the first guide plate unit 1 and the second guide plate unit 2 in this embodiment. It should be additionally explained that the two travel arms 43 must be located at the spring probe 4 portion between the transfer end 411 and the test end 421, but the specific structures of the first section 41 and the second section 42 can be adjusted and changed according to design requirements and are not limited to the present embodiment. For example, in other embodiments not shown in the present invention, the first section 41 can omit the first extension portion 412, and the second section 42 can also omit the second extension portion 422.

[0049] To enable the spring-like probe 4 to have a function similar to that of a spring, the two stroke arms 43 preferably include at least a part of the following technical features. As Figures 3 to 9 shown, each of the stroke arms 43 is curved, and the two stroke arms 43 are spaced apart and located on opposite sides of the partition surface P1 respectively (such as: Figure 4 , Figure 6 and Figure 8 ), and the two ends 431 of any one of the stroke arms 43 are located on opposite sides of the layout surface P2 respectively (such as: Figure 4 and Figure 6 ).

[0050] In other words, the end face 413 of the first extension part 412 and the end face 423 of the second extension part 422 can each be regarded as being divided into four quadrants by the partition surface P1 and the layout surface P2, and the four quadrants of the first extension part 412 respectively correspond to the four quadrants of the second extension part 422 along the length direction L.

[0051] Among them, the end face 413 of the first extension part 412 is connected to the two stroke arms 43 respectively by two diagonally opposite quadrants, and the end face 423 of the second extension part 422 is connected to the two stroke arms 43 respectively by two diagonally opposite quadrants. Furthermore, the two quadrants of the first extension part 412 connected to the two stroke arms 43 do not correspond to the two quadrants of the second extension part 422 connected to the two stroke arms 43 along the length direction L.

[0052] More specifically, the two projection areas formed by respectively orthogonally projecting the two stroke arms 43 onto the partition surface P1 have an intersection point C, and each of the stroke arms 43 has an inflection point corresponding to the intersection point C in position. That is to say, any one of the stroke arms 43 includes two arc-shaped parts 432 connected in sequence, the connection part of the two arc-shaped parts 432 is the inflection point, and the two arc-shaped parts 432 are respectively located on opposite sides of the layout surface P2, but the present invention is not limited thereto. For example, the number of the intersection points C of the two projection areas and the number of the inflection points of each of the stroke arms 43 can each be at least one.

[0053] In addition, in the cross-section of the two stroke arms 43 of the spring-like probe 4 perpendicular to the length direction L, the cross-sectional area of any one of the stroke arms 43 is 95% - 105% of the cross-sectional area of the other stroke arm 43 (such as: the cross-sectional areas of the two stroke arms 43 are equal), so that the two stroke arms 43 have similar electrical conduction characteristics (such as: resistance value).

[0054] [Example 2]

[0055] See also Figures 10 to 13 As shown, this is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be described in detail, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows:

[0056] In this embodiment, the two projection areas formed by the two travel arms 43 being orthogonally projected onto the partition plane P1 have a plurality of intersection points C; and each of the travel arms 43 has a plurality of inflection points whose positions correspond to the plurality of intersection points C. The number of the plurality of intersection points C of each of the travel arms 43 is an odd number in this embodiment, and any one of the travel arms 43 includes a plurality of arc-shaped portions 432 connected in sequence, and the plurality of arc-shaped portions 432 are alternately located on opposite sides of the layout plane P2.

[0057] [Technical Effects of Embodiments of the Invention]

[0058] To summarize, the probe card device and the spring-like probe disclosed in the embodiments of the present invention can provide a spring-like function through the structural design of the two travel arms located between the adapter end and the test end (such as: the two travel arms are arranged at intervals and are respectively located on opposite sides of the dividing surface; the two travel arms are respectively projected onto the dividing surface to form two projection areas, which have at least one intersection point), thereby realizing a new conductive probe architecture.

[0059] Furthermore, the probe card device and the spring-like probe disclosed in the embodiment of the present invention have similar cross-sectional areas of the two travel arms, so that the two travel arms have similar electrical conduction characteristics (such as resistance values).

[0060] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. A probe card device, characterized in that, the probe card device includes: a first guide plate unit and a second guide plate unit, which are arranged at intervals from each other; and a plurality of spring-like probes, which are inserted through the first guide plate unit and the second guide plate unit; each of the spring-like probes defines a length direction and a separation plane parallel to the length direction; wherein, each of the spring-like probes includes: a transition end portion, located on an outer side of the first guide plate unit away from the second guide plate unit; and a test end portion, located on an outer side of the second guide plate unit away from the first guide plate unit, and the test end portion is used to detachably abut against a device under test; wherein, each of the spring-like probes forms, at a portion between the transition end portion and the test end portion: two stroke arms arranged at intervals and located on opposite sides of the separation plane respectively; in each of the spring-like probes, each of the stroke arms is bent, and two projection areas formed by respectively projecting the two stroke arms onto the separation plane have at least one intersection point; wherein, in a cross section of the two stroke arms of each of the spring-like probes perpendicular to the length direction, the cross-sectional area of any one of the stroke arms is 95% - 105% of the cross-sectional area of the other stroke arm.

2. The probe card device according to claim 1, characterized in that, each of the spring-like probes includes a first section having the transition end portion and a second section having the test end portion; in each of the spring-like probes, two ends of any one of the stroke arms are respectively connected to the first section and the second section.

3. The probe card device according to claim 2, characterized in that, in each of the spring-like probes, the two stroke arms are located in a space between the first section and the second section.

4. The probe card device according to claim 3, characterized in that, the first guide plate unit is not misaligned with respect to the second guide plate unit, and any one of the spring-like probes can be compressed along the length direction to cause the two stroke arms thereof to deform towards the outside of the space.

5. The probe card device according to claim 1, characterized in that, each of the spring-like probes defines a layout plane parallel to the length direction and perpendicular to the separation plane; in each of the spring-like probes, two ends of any one of the stroke arms are respectively located on opposite sides of the layout plane.

6. The probe card device according to claim 1, characterized in that, each of the spring-like probes has a needle length in the length direction; in each of the spring-like probes, the length of any one of the stroke arms corresponding to the length direction is 50% - 90% of the needle length.

7. The probe card device according to claim 6, characterized in that, the needle length of each of the spring-like probes is not greater than 4 mm, and the number of at least one intersection point of each of the stroke arms is an odd number.

8. The probe card device according to claim 1, characterized in that, The outer surface of each of the spring-like probes includes two wide side surfaces that are parallel to the length direction and are located on opposite sides respectively; in each of the spring-like probes, the partition surface is perpendicular to any one of the wide side surfaces.

9. A spring-like probe, characterized in that the spring-like probe defines a length direction and a partition surface parallel to the length direction, and the spring-like probe includes: a transition end portion for abutting against a signal transfer board; and a test end portion for detachably abutting against a device under test; wherein, between the transition end portion and the test end portion of the spring-like probe, there are formed: two stroke arms that are spaced apart and are located on opposite sides of the partition surface respectively; each of the stroke arms is curved, and two projection areas formed by respectively orthogonally projecting the two stroke arms onto the partition surface have at least one intersection point; wherein, in the cross-sections of the two stroke arms of the spring-like probe perpendicular to the length direction, the cross-sectional area of any one of the stroke arms is 95% to 105% of the cross-sectional area of the other stroke arm.

10. The spring-like probe according to claim 9, characterized in that the spring-like probe includes a first section having the transition end portion and a second section having the test end portion, and both ends of any one of the stroke arms are respectively connected to the first section and the second section, and the two stroke arms are located in a space between the first section and the second section; the spring-like probe defines a layout surface parallel to the length direction and perpendicular to the partition surface, and the two ends of any one of the stroke arms are respectively located on opposite sides of the layout surface, and any one of the stroke arms includes a plurality of arc portions connected in sequence, and the plurality of arc portions are respectively staggered on opposite sides of the layout surface.

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