Treatment liquid supply device

Abstract

The present application provides a kind of processing liquid supply device, it can simplify the setting structure of filter, valve and flowmeter arranged on pipe conveying processing liquid and pipe and minimize the setting space while effectively supplying filtered processing liquid to use place at the flow set.For this purpose, the present application includes: supply part, processing liquid is pressurized;Filter unit, arranged downstream of supply part, remove foreign matter in processing liquid conveyed from supply part;First pipe unit, connecting supply part and filter unit;Flow regulating unit, arranged downstream of filter unit, supply processing liquid removed of foreign matter from filter unit to use place at the flow set;Second pipe unit, connecting filter unit and flow regulating unit;Drain unit, combined to the lower part of filter unit and supports filter unit, discharges processing liquid existing in the interior of filter unit to the outside, and flow regulating unit includes first valve part and flow measurement part.

Description

TECHNICAL FIELD

[0001] The present application relates to a treatment liquid supply device, and more particularly, to a treatment liquid supply device which can simplify the arrangement structure of a pipe for transferring a treatment liquid and filters, valves, and flow meters provided on the pipe, minimize the arrangement space, and effectively supply the filtered treatment liquid to a use place at a set flow rate. BACKGROUND

[0002] In the field of precision manufacturing such as a semiconductor or a display manufacturing process, a treatment liquid such as pure water (Deionized water (DI) or Ultrapure water (UPW) or various chemical medicines is used.

[0003] Such a treatment liquid must be pressurized by a supply pump and pass through various filters, sensors, or flow meters, etc. to be supplied at a required condition of a use place.

[0004] Here, the treatment liquid can be deteriorated in the process of passing through various filters, sensors, and flow meters or pipes connecting them, and if the deteriorated treatment liquid is directly transferred to a substrate, it can become a main cause of lowering the quality of the substrate.

[0005] For example, the treatment liquid can generate fine particles in the process of passing through a pipe, in the process of passing through the pipe itself, various valves, sensors, and flow meters provided on the pipe.

[0006] In addition, the treatment liquid can not be able to secure a stable flow according to whether a supply device is used or not, due to a gap or various internal structures existing inside the pipe, and in a long time of non-use of the supply device, can be left or stagnated in the gap to cause contamination such as bacteria breeding.

[0007] In addition, in the case where a stable flow cannot be secured due to a gap or various internal structures existing inside the pipe, it becomes a main cause of lowering the reliability of filters, sensors, and flow meters, etc. provided on the pipe.

[0008] PRIOR ART DOCUMENT

[0009] PATENT DOCUMENT

[0010] (Patent Document 1) Korean Registered Patent Gazette No. 0985726 (Published on October 7, 2010) SUMMARY

[0011] PROBLEMS TO BE SOLVED BY THE INVENTION

[0012] An object of the present application for solving the above-described problems is to provide a treatment liquid supply device which can simplify the arrangement structure of a pipe through which a treatment liquid is transferred and a filter, a valve, and a flow meter provided on the pipe, minimize the arrangement space, and effectively supply the filtered treatment liquid at a set flow rate to a use site.

[0013] Means for solving the problems

[0014] The treatment liquid supply device according to the embodiment of the present application for solving the above-described problems is characterized by comprising: a supply portion which pressurizes a treatment liquid; a filter unit which is arranged downstream of the supply portion and removes foreign matter in the treatment liquid transferred from the supply portion; a first pipe unit which connects the supply portion and the filter unit; a flow rate adjustment unit which is arranged downstream of the filter unit and supplies the treatment liquid from which the foreign matter is removed by the filter unit to a use site at a set flow rate; a second pipe unit which connects the filter unit and the flow rate adjustment unit; and a drain unit which is coupled to a lower portion of the filter unit and supports the filter unit, and drains the treatment liquid present inside the filter unit to the outside, the flow rate adjustment unit including: a first valve portion which is connected to the second pipe unit, adjusts the flow rate of the treatment liquid transferred from the second pipe unit; and a flow rate measurement portion which is directly connected to the first valve portion to be integrated, and measures the flow rate of the treatment liquid drained from the first valve portion.

[0015] In the treatment liquid supply device according to the embodiment of the present application, the first valve portion can include: a flexible pipe portion which has an elastic restoring force, communicates with the second pipe unit, and has an expanded pipe portion having an inner diameter larger than that of the second pipe unit; and a valve body which is compressed and deformed by being pressurized by an external operation force while moving in the direction of the flexible pipe portion, and controls the flow of the treatment liquid through the flexible pipe portion.

[0016] In the treatment liquid supply device according to the embodiment of the present application, a joint unit can be further included, the joint unit being provided at at least one of a connection portion of the first pipe unit and the filter unit, a connection portion of the filter unit and the second pipe unit, and a connection portion of the second pipe unit and the flow rate adjustment unit.

[0017] In the processing liquid supply apparatus according to the embodiment of the present application, the filter unit can have a connection port protruding from an outer surface of a filter housing toward the first pipe unit, and a first threaded portion can be formed at an outer peripheral surface thereof, in which case the coupling unit can include a packing member disposed between the end portion of the first pipe unit and the connection port, a ring member partially inserted into a provided groove formed at an outer peripheral surface of the end portion of the first pipe unit, and a fastening member including a vertical fastening portion surrounding the end portion of the first pipe unit and having a clamping land in close contact with the ring member, and a horizontal fastening portion extending from an edge of the vertical fastening portion toward the connection port and having a second threaded portion formed at an inner peripheral surface thereof in threaded engagement with the first threaded portion.

[0018] In the processing liquid supply apparatus according to the embodiment of the present application, the discharge unit can include a discharge pipe connected to a discharge port formed at a lower portion of a filter housing of the filter unit, and a discharge tank coupled to the lower portion of the filter housing and supporting the filter housing, and having a discharge space in which the discharge pipe and processing liquid discharged or leaked from the discharge pipe are accommodated.

[0019] In the processing liquid supply apparatus according to the embodiment of the present application, the filter unit can include a first filter unit and a second filter unit, in which case the first pipe unit can include a first main pipe portion connected to the supply portion, a first branch pipe portion branched from the first main pipe portion and connected to the first filter unit and the second filter unit, and a second valve portion provided on the first main pipe portion for adjusting an inflow amount of processing liquid flowing into the filter unit.

[0020] In the processing liquid supply apparatus according to the embodiment of the present application, the flow rate adjustment unit can include a first flow rate adjustment unit and a second flow rate adjustment unit, in which case the second pipe unit can include a second main pipe portion for connecting the filter unit and the flow rate adjustment unit, a second branch pipe portion for transferring processing liquid discharged from the first filter unit and the second filter unit to the second main pipe portion, a third branch pipe portion branched from the second main pipe portion and connected to the first flow rate adjustment unit and the second flow rate adjustment unit, and a third valve portion provided on the second main pipe portion for adjusting a discharge amount of processing liquid discharged from the filter unit.

[0021] Effects of the Invention

[0022] According to the present application, by the simple integrated structure improvement of the first piping unit and the second piping unit and the filter unit and the flow regulating unit connected to the first piping unit and the second piping unit, it is possible to minimize the installation space while making the maintenance of the device easy.

[0023] According to the present application, the process liquid passing through the piping unit and the flow regulating unit is not left or stagnated, whereby it is possible to prevent the contamination of the process liquid caused by bacteria, and the flow regulation with reliability can be performed.

[0024] According to the present application, in the case of use in a substrate processing process, it is possible to perform accurate flow control while preventing the deterioration and contamination of the process liquid, and it is possible to improve the quality of the processed substrate. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a whole schematic view of a process liquid supply device according to an embodiment of the present application.

[0026] Figure 2 is a front view schematic view and a rear view schematic view of a process liquid supply device according to an embodiment of the present application.

[0027] Figure 3 is a front view schematic view of a flow regulating unit of a process liquid supply device according to an embodiment of the present application.

[0028] Figure 4 is a cross-sectional view taken along the A-A line of Figure 3 .

[0029] Figure 5 is a cross-sectional view of a connection portion of a first piping unit and a filter unit of a process liquid supply device according to an embodiment of the present application.

[0030] Figure 6 is a side view schematic view of a drain unit of a process liquid supply device according to an embodiment of the present application.

[0031] REFERENCE NUMERALS

[0032] 10: supply portion 20: first piping unit

[0033] 30: filter unit 40: second piping unit

[0034] 50: flow regulating unit 51: first valve portion

[0035] 52: flow measuring portion 60: drain unit DETAILED DESCRIPTION

[0036] Hereinafter, preferred embodiments of the present application which can embody the above-described problems to be solved will be described with reference to the accompanying drawings. In describing the present embodiments, the same names and the same reference numerals can be used for the same structures, and additional description thereof can be omitted.

[0037] Figure 1 is a whole schematic view of a treatment liquid supply apparatus according to an embodiment of the present application, Figure 2 is a front view and a rear view of a treatment liquid supply apparatus according to an embodiment of the present application.

[0038] First, the present application provides a treatment liquid supply apparatus which filters and removes foreign substances existing inside a liquid treatment liquid, and effectively supplies the treatment liquid from which the foreign substances are removed to a use place at a set flow rate. For example, it can be an apparatus which supplies a treatment liquid used in a substrate treatment process in a semiconductor and a display manufacturing process to a substrate or a treatment chamber, and at this time, the treatment liquid can be deionized water.

[0039] Of course, the treatment liquid supply apparatus according to the present embodiment can be used not only in the substrate treatment process but also in various manufacturing processes which require a liquid treatment liquid.

[0040] Referring to Figure 1 and Figure 2 , the treatment liquid supply apparatus according to the present embodiment can include a supply part 10, a first pipe unit 20, a filter unit 30, a second pipe unit 40, a flow rate adjusting unit 50, and a discharge unit 60.

[0041] The supply part 10 can generate a delivery pressure by pressurizing a treatment liquid stored in a storage tank or the like, and a pump can be used as such a supply part 10.

[0042] The filter unit 30 can be disposed downstream of the supply part 10, and can flow the treatment liquid pressurized by the supply part 10 into the inside to remove foreign substances existing inside the treatment liquid.

[0043] The filter unit 30 can include a filter housing 31 having a filter space inside, and a filter part disposed inside the filter housing 31 and separating foreign substances existing inside the treatment liquid.

[0044] The filter housing 31 can have a connection port connected to the first pipe unit 20 and flowing the treatment liquid from the first pipe unit 20, and a connection port connected to the second pipe unit 40 and discharging the filtered treatment liquid to the second pipe unit 40 side.

[0045] Referring to Figure 5According to the connection port 311 of the embodiment, a flow inlet hole that communicates with a flow path of the first pipe unit 20 can be formed to protrude from an outer surface of the filter housing 31 toward the first pipe unit 20. In addition, a first threaded portion 311b can be formed at an outer peripheral surface of the connection port 311. The combination structure of such a connection port 311 and the first pipe unit 20 will be described later.

[0046] The filter portion can use a filter of various types such as a filter type or a chemical catalyst type. In addition, a plurality of filter units 30 can be provided according to a required treatment capacity of the treatment liquid in a use site. The filter unit 30 according to the embodiment can include a first filter unit 30A and a second filter unit 30B.

[0047] The first filter unit 30A and the second filter unit 30B can be arranged in a parallel structure between the first pipe unit 20 and the second pipe unit 40, which will be described later.

[0048] That is, the treatment liquid transferred from the first pipe unit 20 can be branched to the first filter unit 30A and the second filter unit 30B arranged in a parallel structure and independently filtered, and then the independently filtered treatment liquids can be merged through the second pipe unit 40 and supplied to a use site.

[0049] In this way, by configuring the first filter unit 30A and the second filter unit 30B arranged in a parallel structure, even if a filter portion having a small filter capacity is used, a large capacity of treatment liquid can be filtered and supplied to a use site. In addition, a filter load acting on each filter portion can be reduced, so that a filtering efficiency can be improved and a service life can be extended.

[0050] The first pipe unit 20 can connect the supply portion 10 and the filter unit 30.

[0051] In a case where the filter unit 30 according to the embodiment includes the first filter unit 30A and the second filter unit 30B, the first pipe unit 20 according to the embodiment can include a first main pipe portion 21, a first branch pipe portion 22, and a second valve portion 23.

[0052] The first main pipe portion 21 is connected to the supply portion 10 and can supply the treatment liquid pressurized and transferred from the supply portion 10 to the filter unit 30 side.

[0053] The first branch pipe portion 22 can branch from the first main pipe portion 21 and be connected to the first filter unit 30A and the second filter unit 30B, and can branch and supply the treatment liquid transferred from the first main pipe portion 21 to the first filter unit 30A and the second filter unit 30B sides, respectively.

[0054] The second valve portion 23 can be provided on the first main pipe portion 21 and can adjust the flow rate of the treatment liquid flowing through the first main pipe portion 21. That is, the second valve portion 23 can adjust the inflow rate of the treatment liquid flowing to the filter unit 30 side.

[0055] The second valve portion 23 according to the embodiment can be provided at a connection portion of the first main pipe portion 21 and the first branch pipe portion 22. Here, the first main pipe portion 21 and the first branch pipe portion 22 divided by the second valve portion 23 can each be configured by a single pipe or can be configured by an integrated pipe formed by fusion without a separate assembly device. That is, the first main pipe portion 21 and the first branch pipe portion 22 can be manufactured in one body by bending or fusing pipes having the same inner diameter. In this way, by having a single pipe structure without unnecessary assembly devices, a gap space or an internal protruding structure that can obstruct the flow of the treatment liquid can be eliminated, and stable flow of the flowing treatment liquid can be ensured.

[0056] Figure 3 FIG. 1 is a front schematic view illustrating a flow rate adjustment unit of a treatment liquid supply device according to an embodiment of the present application.

[0057] Referring to Figures 1 to 3 , the flow rate adjustment unit 50 can be configured downstream of the filter unit 30 and can supply the treatment liquid filtered by the filter unit 30 to a use place at a set flow rate.

[0058] The flow rate adjustment unit 50 can be connected to the filter unit 30 through the second pipe unit 40.

[0059] The flow rate adjustment unit 50 can include a first valve portion 51 and a flow rate measurement portion 52.

[0060] The first valve portion 51 is connected to the second pipe unit 40 and can adjust the flow rate of the treatment liquid transferred from the second pipe unit 40. That is, the first valve portion 51 can supply the treatment liquid at a set flow rate required at the use place.

[0061] The flow rate measurement portion 52 is connected to the first valve portion 51 and can measure the flow rate of the treatment liquid discharged from the first valve portion 51.

[0062] The flow rate measurement portion 52 can be provided in one body by being directly connected to the first valve portion 51, thereby enabling modularization of the flow rate adjustment unit 50.

[0063] Figure 4 FIG. 2 is a cross-sectional schematic view taken along line A-A of FIG. 1. Figure 3

[0064] Further referring to Figure 4 , as the first valve portion 51 according to the embodiment, a pinch valve can be used. ​

[0065] Basically, the pinch valve does not provide a valve body in the flow path as in the case of a ball valve, but adopts a way of providing a valve body outside the flow path to adjust the flow rate while changing the cross-sectional area of the flow path.

[0066] That is, the first valve portion 51 adopting the pinch valve structure can have a flexible pipe portion 511 communicating with the second pipe unit 40.

[0067] The flexible pipe portion 511 can have an elastic restoring force, and can have an expanded pipe portion having an inner diameter larger than that of the second pipe unit 40.

[0068] In addition, the flexible pipe portion 511 can have a wall thickness thinner than that of the adjacent pipe.

[0069] When the flexible pipe portion 511 has a relatively thin wall thickness, it can be easily deformed due to a pressure acting in the radial direction compared to the adjacent pipe having a relatively thick wall thickness, and thus, even with a relatively small pressure, flow rate adjustment can be performed. In addition, even if the wall thickness of the adjacent pipe and the wall thickness of the flexible pipe portion 511 are the same as each other, since the flexible pipe portion 511 has an expanded pipe structure having a relatively large diameter compared to the adjacent pipe, it can be easily deformed due to a pressure acting in the radial direction, and thus, even with a relatively small pressure, flow rate adjustment can be performed.

[0070] Such a flexible pipe portion 511 can be manufactured in one body with the adjacent pipe by molding, and can be manufactured by thermoforming.

[0071] Although not illustrated in detail, the first valve portion 51 can include an adjustment rod threadedly coupled to a valve housing 513 surrounding the flexible pipe portion 511, and a valve body coupled to the adjustment rod to move in the direction of the flexible pipe portion 511 in linkage with the rotation of the adjustment rod.

[0072] Thus, when the adjustment rod is rotated by an external operating force, the valve body can pressurize the flexible pipe portion 511 to compress and deform the flexible pipe portion 511 while moving in the direction of the flexible pipe portion 511 as the adjustment rod and the valve housing 513 are threadedly coupled. As a result, the flow rate of the treatment liquid passing through the flexible pipe portion 511 can be adjusted while the cross-sectional area of the compressed and deformed flexible pipe portion 511 changes.

[0073] In this way, when the pinch valve structure is used as the first valve portion 51, the flow of the treatment liquid passing through the first valve portion 51 can be stabilized.

[0074] For example, when a valve body like a ball valve is provided in the flow path, the treatment liquid can generate a vortex while passing through the ball valve. Such a vortex becomes a major cause of lowering the accuracy of a flow measurement portion disposed downstream.

[0075] Of course, if the setting position of the flow measuring section is sufficiently distanced from the valve and the vortex generated on the upstream is offset to stabilize the flow, the flow is measured using the flow measuring section 52, and thus relatively accurate flow measurement can be performed. However, in this case, sufficient space is required between the valve and the flow measuring section, and the piping work needs to be increased.

[0076] In contrast, when the first valve section 51 of the pinch valve type in which the valve body is provided outside the flow path is used, the generation of the vortex of the treatment liquid passing through the flexible pipe section 511 can be reduced regardless of the operation of the first valve section 51, and the stability of the flow can be ensured. Thus, the accuracy of the flow measuring section 52 disposed on the downstream can be improved.

[0077] Further, since the generation of the vortex of the treatment liquid passing through the flexible pipe section 511 can be minimized while the stability of the flow is ensured regardless of the operation of the first valve section 51, the flow measuring section 52 disposed on the downstream can also be directly connected or integrated with the first valve section 51. Thus, the space of the flow regulating unit 50 can be minimized, and the piping work does not need to be increased.

[0078] Further, referring again to Figure 1 and Figure 2 a plurality of flow regulating units 50 can be provided according to the number of use sites at which the treatment liquid is used. That is, in the case of the substrate processing process, the treatment liquid needs to be supplied to a plurality of processing chamber sides, respectively.

[0079] The flow regulating unit 50 according to the embodiment can include a first flow regulating unit 50A and a second flow regulating unit 50B. Of course, as illustrated, the flow regulating unit 50 can be disposed in a number of three or more.

[0080] The second piping unit 40 according to the embodiment can connect the filter unit 30 and the flow regulating unit 50.

[0081] In the case where the flow regulating unit 50 according to the embodiment includes the first flow regulating unit 50A and the second flow regulating unit 50B, the second piping unit 40 according to the embodiment can include a second main pipe section 41, a second branch pipe section 42, a third branch pipe section 43, and a third valve section 44.

[0082] The second main pipe section 41 can connect the filter unit 30 and the flow regulating unit 50, and can be disposed between the filter unit 30 and the flow regulating unit 50. The illustrated second main pipe section 41 includes a vertical pipe section connected to the second branch pipe section 42 and a horizontal pipe section connected to the third branch pipe section 43, and is configured in a T shape as a whole.

[0083] The second branch pipe portion 42 branches from the second main pipe portion 41 and is connected to the first filter unit 30A and the second filter unit 30B, and can guide the treatment liquid discharged from the first filter unit 30A and the second filter unit 30B to the second main pipe portion 41 side.

[0084] The second branch pipe portion 43 branches from the second main pipe portion 41 and is connected to the first flow regulating unit 50A and the second flow regulating unit 50B, and can guide the treatment liquid discharged from the second main pipe portion 41 to the first flow regulating unit 50A and the second flow regulating unit 50B side.

[0085] The third valve portion 44 can be provided on the second main pipe portion 41, and can regulate the flow rate of the treatment liquid flowing through the second main pipe portion 41. That is, the third valve portion 44 can regulate the discharge flow rate of the treatment liquid discharged from the filter unit 30.

[0086] According to the embodiment, a portion of the second main pipe portion 41 and the second branch pipe portion 42 disposed on one side with the third valve portion 44 as the center can be configured of a single pipe, or can be configured of an integrated pipe formed by fusion without a separate assembly device. That is, the portion of the second main pipe portion 41 and the second branch pipe portion 42 can be manufactured in one body by bending or fusing a pipe having the same inner diameter. In this way, by having a single pipe structure without unnecessary joint devices, a gap space or an internal protruding structure that hinders the flow of the treatment liquid can be eliminated, and stable flow of the flowing treatment liquid can be ensured.

[0087] Likewise, the remaining portion of the second main pipe portion 41 and the third branch pipe portion 43 disposed on the other side with the third valve portion 44 as the center can also be configured of a single pipe, or can be configured of an integrated pipe formed by fusion without a separate assembly device.

[0088] Figure 5 is a cross-sectional view schematically showing a connection portion of a first pipe unit and a filter unit of a treatment liquid supply device according to an embodiment of the present application.

[0089] Referring to Figure 1 , Figure 2 and Figure 5 , the treatment liquid supply device according to the present embodiment can further include a joint unit 70.

[0090] The joint unit 70 can include a packing member 71, a ring member 72, and a fastening member 73.

[0091] The packing member 71 can be disposed between the end portion of the first pipe unit 20 and the connecting port 311 of the filter housing 31. The packing member 71 can maintain the air tightness between the end portion of the first pipe unit 20 and the connecting port 311 while being crimped when the end portion of the first pipe unit 20 and the connecting port 311 are tightly coupled in a state of being inserted into the first installation groove 311a formed at the end portion of the connecting port 311.

[0092] The ring member 72 can be coupled to the end portion outer circumferential surface of the first pipe unit 20, and a portion thereof can be inserted into the second installation groove 221 formed at the end portion outer circumferential surface of the first pipe unit 20.

[0093] The fastening member 73 can be fastened to each other by tightly coupling the end portion of the first pipe unit 20 and the connecting port 311 of the filter housing 31. Such a fastening member 73 can have a vertical fastening portion 731 and a horizontal fastening portion 732.

[0094] The vertical fastening portion 731 surrounds the end portion of the first pipe unit 20, and can have a coupling table 731a that is tightly coupled with the ring member 72.

[0095] The horizontal fastening portion 732 can be formed extending from the edge of the vertical fastening portion 731 toward the connecting port 311, and at the inner circumferential surface, a second screw thread portion 732a that is screw-coupled with the first screw thread portion 311b of the connecting port 311 can be formed.

[0096] The connection process of such a coupling unit 70 will be briefly explained. The fastening member 73 is previously inserted into the end portion of the first pipe unit 20, the packing member 71 is installed at the first installation groove 311a of the connecting port 311, and the ring member 72 is installed at the second installation groove 221 of the first pipe unit 20. Thereafter, by screw-coupling the fastening member 73 to the connecting port 311 in a state of tightly coupling the first pipe unit 20 with the connecting port 311, the coupling operation of the first pipe unit 20 and the connecting port 311 can be completed. At this time, the packing member 71 is crimped between the first pipe unit 20 and the connecting port 311, thereby maintaining the air tightness between the first pipe unit 20 and the connecting port 311.

[0097] Since such a coupling unit 70 can exclude the cutting, press-in, and adhesive processes required in the assembly process of the existing pipe, it can prevent the generation of a large amount of foreign matter or a gap when the pipe is connected, and can block the generation of a pollution source of the flowing treatment liquid.

[0098] The example of the joint unit 70 according to the above-described embodiment provided at the connection portion of the first pipe unit 20 and the filter unit 30 is described, however, the joint unit 70 according to the present embodiment can be provided not only at the connection portion of the first pipe unit 20 and the filter unit 30, but also at the connection portion of the filter unit 30 and the second pipe unit 40, and the connection portion of the second pipe unit 40 and the flow regulating unit 50.

[0099] Figure 6 is a side view schematic diagram showing a drain unit of a treatment liquid supply device according to an embodiment of the present application.

[0100] Referring to Figure 1 , Figure 2 and Figure 6 , the drain unit 60 can drain the treatment liquid existing inside the filter housing 31 to the outside at the time of maintenance requiring cleaning or replacement of the filter portion or the like of the filter unit 30.

[0101] Further, the drain unit 60 can also be incorporated into the lower portion of the filter unit 30 to support the filter unit 30 from the bottom. That is, the drain unit 60 can perform the function of a support structure of the filter unit 30.

[0102] The drain unit 60 according to the embodiment can include a drain pipe 61 and a drain tank 62.

[0103] The drain pipe 61 is connected with a drain port 312 formed at the lower portion of the filter housing 31, and can drain the treatment liquid existing inside the filter housing 31.

[0104] Further, an on-off valve 611 can be provided at the drain pipe 61, and the on-off valve 611 can be opened as necessary at the time of maintenance or the like to easily drain the treatment liquid existing inside the filter housing 31 to the outside.

[0105] The drain tank 62 can be incorporated into the lower portion of the filter housing 31. In this way, the drain tank 62 incorporated into the lower portion of the filter housing 31 can support the filter unit 30 from the bottom.

[0106] Further, the drain tank 62 can have a drain space inside. At this time, the drain pipe 61 can be disposed inside the drain space in a state in which the on-off valve 611 used only for operation is exposed. Thereby, the treatment liquid drained from the drain pipe 61 can be filled into the drain space, and the treatment liquid filled into the drain space can be drained to the outside drain device to be post-processed.

[0107] To this end, a discharge line in the form of a passage can be provided at the bottom of the discharge tank 62, and a discharge outlet connected to the external discharge device can be provided at one side of the bottom. Of course, the treated liquid discharged from the discharge pipe 61 can also be directly discharged to the external discharge device without the discharge tank 62. In this case, the discharge pipe 61 can pass through the discharge tank 62 and be directly connected to the external discharge device.

[0108] The discharge tank 62 can be integrally combined to the filter housing 31, and the discharge tank 62 and the filter housing 31 can also be integrally combined after being separately manufactured using separate fastening members.

[0109] The discharge unit 60 including such a discharge tank 62 can improve the surrounding environment by not exposing the discharge pipe 61 combined to the lower portion of the filter housing 31 to the outside, and can effectively treat the treated liquid leaked or discharged from the discharge pipe 61 without contaminating the surrounding environment. In addition, since the discharge tank 62 can perform a support function of the filter housing 31, the stability of the installation, the modularity, and the mobility of the treated liquid supply device including the filter unit 30 can be improved.

[0110] As described above, the preferred embodiments of the present application have been described with reference to the accompanying drawings, however, those skilled in the art can make various modifications or changes to the present application without departing from the scope and spirit of the inventive concept and field recited in the claims.

Claims

1. A processing liquid supply device characterized by comprising: The processing liquid supply device includes: a supply section that pressurizes a processing liquid; a filter unit that is disposed downstream of the supply section and removes foreign matter from the processing liquid delivered from the supply section; a first pipe unit that connects the supply section and the filter unit; a flow rate adjustment unit that is disposed downstream of the filter unit and supplies the processing liquid from which foreign matter has been removed by the filter unit to a use site at a set flow rate; a second pipe unit that connects the filter unit and the flow rate adjustment unit; and a drain unit that is coupled to a lower portion of the filter unit and supports the filter unit, and drains the processing liquid present inside the filter unit to the outside, the flow rate adjustment unit includes: a first valve section that is connected to the second pipe unit and adjusts the flow rate of the processing liquid delivered from the second pipe unit; and a flow rate measurement section that is directly connected to the first valve section and integrated, and measures the flow rate of the processing liquid discharged from the first valve section, the first valve section includes: a flexible pipe section that has an elastic restoring force, is in communication with the second pipe unit, has an expanded pipe portion with an inner diameter that is larger than the inner diameter of the second pipe unit, and has a wall thickness that is thinner than the wall thickness of an adjacent pipe; and a valve body that is disposed outside a flow path, is moved in the direction of the flexible pipe section while being pressurized in a clamping manner to the flexible pipe section to cause compression deformation thereof by an external operation force, and controls the flow of the processing liquid through the flexible pipe section, the flexible pipe section is integrally manufactured with the adjacent pipe by molding. Further, a coupling unit is provided at at least one of a connection portion of the first pipe unit and the filter unit, a connection portion of the filter unit and the second pipe unit, and a connection portion of the second pipe unit and the flow rate adjustment unit.

2. The processing liquid supply apparatus according to claim 1, characterized by 3. The processing liquid supply device according to claim 2, wherein the filter unit has a connection port that is formed so as to protrude from an outer surface of a filter housing toward the first pipe unit, and a first threaded portion is formed at an outer peripheral surface thereof, the coupling unit includes: a packing member that is disposed between an end portion of the first pipe unit and the connection port; a ring member that is partially inserted into a provided groove formed at an outer peripheral surface of the end portion of the first pipe unit; and a fastening member that includes a vertical fastening portion that surrounds the end portion of the first pipe unit and has a clamping land that is tightly coupled to the ring member, and a horizontal fastening portion that extends from an edge of the vertical fastening portion toward the connection port and has a second threaded portion that is threadedly coupled to the first threaded portion at an inner peripheral surface thereof. the drain unit includes:

4. The processing liquid supply apparatus according to claim 1, wherein a drain pipe that is connected to a drain port formed at a lower portion of a filter housing of the filter unit; and a drain tank that is coupled to the lower portion of the filter housing and supports the filter housing, and has a drain space that accommodates the drain pipe and the processing liquid discharged or leaked from the drain pipe.

5. The processing liquid supply device according to claim 1, wherein ​ The filter unit includes a first filter unit and a second filter unit, The first piping unit includes: a first main pipe portion connected to the supply portion; a first branch pipe portion branched from the first main pipe portion and connected to the first filter unit and the second filter unit; and a second valve portion provided on the first main pipe portion for adjusting an inflow rate of the treatment liquid flowing into the filter unit.

6. The treatment liquid supply apparatus according to claim 5, wherein The flow rate adjustment unit includes a first flow rate adjustment unit and a second flow rate adjustment unit, The second piping unit includes: a second main pipe portion connecting the filter unit and the flow rate adjustment unit; a second branch pipe portion for transferring the treatment liquid discharged from the first filter unit and the second filter unit to the second main pipe portion; a third branch pipe portion branched from the second main pipe portion and connected to the first flow rate adjustment unit and the second flow rate adjustment unit; and a third valve portion provided on the second main pipe portion for adjusting a discharge rate of the treatment liquid discharged from the filter unit.

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