Active layer structure, array substrate and preparation method thereof

CN115207131BActive Publication Date: 2026-09-11GUANGZHOU CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Patent Information

Application Number
CN202210359566.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-06
Publication Date
2026-09-11
Estimated Expiration
2042-04-06

AI Technical Summary

Technical Problem

但是,现有的机械剥离法主要是基于二硫化钼和衬底之间的范德华力,导致所形成的薄层材料接着性差、产率较低,无法形成易于构建 MoS2-TFT器件的有源层

Benefits of technology

[0023] The active layer structure of this application can effectively reduce sulfur residues on the surface of molybdenum disulfide by attaching a modification layer to the surface of the molybdenum disulfide layer, and at the same time improve the adhesion of the active layer.

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Abstract

The application discloses an active layer structure, an array substrate and a preparation method thereof. The active layer structure comprises a molybdenum disulfide layer and a modification layer on the surface of the molybdenum disulfide layer; and the material of the modification layer comprises a disulfide bond-containing polymer. The active layer structure can effectively reduce the sulfur residues on the surface of the molybdenum disulfide, and further reduce the charge defect of the molybdenum disulfide by connecting the modification layer on the surface of the molybdenum disulfide; and the modification layer can improve the adhesion between the molybdenum disulfide active layer and other layers.
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Description

Technical Field

[0001] This application relates to the field of display technology, specifically to an active layer structure, an array substrate, and a method for fabricating the same. Background Technology

[0002] As a key feature of today's information society, liquid crystal display technology is developing rapidly, and various display technologies are widely used in all aspects of human life, such as mobile phones, tablets, televisions, automotive and wearable devices. A liquid crystal display panel consists of an array substrate, a color filter substrate, and a liquid crystal layer located between the array substrate and the color filter substrate. Thin Film Transistors (TFTs) arranged in an array are crucial components of the array substrate.

[0003] Molybdenum disulfide (MoS2), a transition metal sulfide, is a typical two-dimensional material. Due to its unique single-layer atomic structure and excellent optoelectronic properties, it is considered one of the most promising alternatives to silicon and an ideal material for future applications in high-tech fields such as semiconductors, transistors, and chips. It can also be used as an active layer in TFT devices. However, existing mechanical exfoliation methods are mainly based on van der Waals forces between MoS2 and the substrate, resulting in poor adhesion and low yield of the formed thin layer, making it difficult to form an active layer suitable for constructing MoS2-TFT devices. Furthermore, the edges of pure MoS2 contain abundant S residues, which readily react with oxygen in the air to generate charges, reducing the on / off current ratio of the device and increasing the threshold voltage of the TFT device.

[0004] Therefore, there is an urgent need to provide a novel active layer structure to solve the problems of poor adhesion and electrical incompatibility of the active layer. Summary of the Invention

[0005] The purpose of this application is to provide an active layer structure that, by attaching a modification layer to the surface of molybdenum disulfide, can effectively reduce sulfur residues on the surface of molybdenum disulfide and improve the adhesion of the molybdenum disulfide active layer.

[0006] This application provides an active layer structure, including a molybdenum disulfide (MoS2) layer and a modification layer on the surface of the molybdenum disulfide (MoS2) layer; the material of the modification layer includes a polymer containing disulfide bonds (SS).

[0007] Optionally, in some embodiments of this application, the disulfide-containing polymer is attached to the surface of the molybdenum disulfide layer by an exchange reaction between disulfide bonds (SS) and sulfur residues on the surface of the molybdenum disulfide layer.

[0008] Optionally, in some embodiments of this application, the disulfide bond (SS)-containing polymer may be a thioctic acid polymer. For example, the materials of the thioctic acid polymer include thioctic acid (LA) and polyethyleneimine (PEI).

[0009] Accordingly, embodiments of this application also provide an array substrate, including a glass substrate and an active layer formed on the glass substrate; the active layer includes a molybdenum disulfide (MoS2) layer and a modification layer on the surface of the molybdenum disulfide (MoS2) layer; the material of the modification layer includes a disulfide bond (SS) polymer.

[0010] Optionally, in some embodiments of this application, the disulfide-containing polymer is attached to the surface of the molybdenum disulfide layer by an exchange reaction between disulfide bonds (SS) and sulfur residues on the surface of the molybdenum disulfide layer.

[0011] Optionally, in some embodiments of this application, the disulfide bond (SS)-containing polymer is a thioctic acid polymer. The materials of the thioctic acid polymer include thioctic acid (LA) and polyethyleneimine (PEI).

[0012] Furthermore, this application also provides a method for fabricating an array substrate, comprising the following steps:

[0013] A glass substrate is provided, an active layer mixing solution is placed on the glass substrate, heat-treated, and then an active layer is formed on the glass substrate;

[0014] The active layer mixing solution includes molybdenum disulfide modified with a disulfide bond (SS) polymer, wherein the disulfide bond (SS) polymer is attached to the surface of the molybdenum disulfide.

[0015] Optionally, in some embodiments of this application, the preparation of the active layer material includes the following steps:

[0016] A polymer containing disulfide bonds (SS) is mixed with molybdenum disulfide and reacted. The polymer containing disulfide bonds (SS) is connected to the surface of the molybdenum disulfide through disulfide bonds (SS) to obtain an active layer mixed solution.

[0017] Optionally, in some embodiments of this application, the preparation of the disulfide-containing polymer includes the following steps:

[0018] Lipoic acid (LA) and polyethyleneimine (PEI) are mixed and subjected to an amide reaction or esterification reaction to generate a polymer containing disulfide bonds (LA-PEI), resulting in a polymer mixture.

[0019] Optionally, in some embodiments of this application, the solid content of the polymer mixture is 10–30 wt%.

[0020] Optionally, in some embodiments of this application, the solid content in the active layer mixed solution is 30-40 wt%.

[0021] Optionally, in some embodiments of this application, the heat treatment temperature is 110–130°C, and the heat treatment time is 1–3 hours.

[0022] The beneficial effects of this application are as follows:

[0023] The active layer structure of this application can effectively reduce sulfur residues on the surface of molybdenum disulfide by attaching a modification layer to the surface of the molybdenum disulfide layer, and at the same time improve the adhesion of the active layer. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of the array substrate provided in the embodiments of this application;

[0026] Figure 2 This is a schematic diagram of the fabrication process of the array substrate provided in the embodiments of this application;

[0027] Figure 3A This is the 1H NMR spectrum of LA-PEI provided in Example 1 of this application;

[0028] Figure 3B The TGA curve is provided in Test Example 1 of this application;

[0029] Figure 4A This is the high-resolution XPS spectrum of MoS2-LA-PEI provided in Experimental Example 1 of this application;

[0030] Figure 4B This is the high-resolution XPS spectrum of MoS2 provided in Experimental Example 1 of this application.

[0031] Figure 5A This is a TEM image of MoS2-LA-PEI provided in Test Example 1 of this application;

[0032] Figure 5B This is a TEM image of MoS2 provided in Experimental Example 1 of this application. Detailed Implementation

[0033] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. In addition, in the description of this application, the term "comprising" means "including but not limited to". The terms first, second, third, etc. are used only as illustrative purposes and do not impose numerical requirements or establish an order. Various embodiments of this application may exist in the form of a range; it should be understood that the description in the form of a range is only for convenience and conciseness and should not be construed as a hard limitation on the scope of this application; therefore, it should be considered that the range description has specifically disclosed all possible sub-ranges and single values ​​within that range. For example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges, such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., and single numbers within the range, such as 1, 2, 3, 4, 5 and 6, which applies regardless of the range. Additionally, whenever a numerical range is specified in this document, it means that any referenced number (fraction or integer) within the range is included.

[0034] This application provides an active layer structure, an array substrate, and a method for fabricating the same. These are described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments.

[0035] This application provides an active layer structure including a molybdenum disulfide (MoS2) layer, the surface of which has a modification layer.

[0036] In this embodiment, the active layer structure is a novel MoS2 active layer structure, wherein the surface of the molybdenum disulfide layer is modified with the modification layer. Furthermore, the presence of the modification layer increases the adhesion between the active layer structure and the substrate, thereby enhancing the interaction force between the active layer structure and other layers.

[0037] In this application, the bandgap of the MoS2 monolayer is approximately 1.8 eV, making it an ideal semiconductor material. Furthermore, the polymer modified on the MoS2 surface increases the adhesion between MoS2 layers, improves the adhesion between MoS2 and the glass substrate, and increases the area and yield of the MoS2 thin film material.

[0038] In this embodiment, the modification layer comprises a polymer containing disulfide bonds. Further, the active layer structure is a molybdenum disulfide layer whose surface is modified with the polymer containing disulfide bonds; that is, the surface of the molybdenum disulfide layer is covered with the polymer containing disulfide bonds. In this embodiment, the polymer containing disulfide bonds has disulfide bonds (SS) in its structure; for example, the polymer containing disulfide bonds can be a thioctic acid polymer. Specifically, the polymer containing disulfide bonds can bond with sulfur residues on the edge or surface of MoS2 using disulfide bonds, thereby connecting the polymer containing disulfide bonds to the surface of the MoS2 layer, further obtaining the active layer structure of this application. In this embodiment, since the modification layer can reduce the sulfur residues on the surface of molybdenum disulfide, the electrical defects caused by sulfur residues can be effectively avoided.

[0039] In some embodiments, the disulfide-containing polymer is connected to the surface of the molybdenum disulfide via disulfide bonds (SS). For example, a lipoic acid polymer can be used to modify the surface of the MoS2 layer by bonding disulfide bonds to sulfur residues on the edge or surface of MoS2. Further, the lipoic acid polymer can be synthesized from lipoic acid (LA) and polyethyleneimine (PEI).

[0040] Accordingly, embodiments of this application also provide an array substrate, including: a glass substrate and an active layer. Please refer to... Figure 1 The array substrate includes a glass substrate and an active layer formed on the glass substrate. It is understood that the active layer in the array substrate of this embodiment adopts the above-described active layer structure.

[0041] Further, the active layer includes a molybdenum disulfide layer and a modification layer on the surface of the molybdenum disulfide layer; the material of the modification layer includes a disulfide-bonded polymer. More specifically, the disulfide-bonded polymer can be a thioctic acid polymer. Specifically, the active layer is a novel molybdenum disulfide active layer modified with a disulfide-bonded polymer. For example, the active layer can be molybdenum disulfide modified with a thioctic acid polymer. It is conceivable that in the thioctic acid polymer-modified molybdenum disulfide, the thioctic acid polymer is attached to the surface of the molybdenum disulfide. More specifically, the thioctic acid polymer is connected to the molybdenum disulfide via disulfide bonds (SS); that is, the thioctic acid polymer covers the surface of the molybdenum disulfide via disulfide bonds (SS). For example, the thioctic acid polymer can be synthesized from thioctic acid (LA) and polyethyleneimine (PEI).

[0042] In this embodiment, the thioctic acid polymer modification layer is applied to the surface of molybdenum disulfide by bonding disulfide bonds with sulfur residues on the edge or surface of MoS2. Therefore, the modification layer on molybdenum disulfide can reduce the number of sulfur residues on the surface of molybdenum disulfide, thereby effectively avoiding electrical defects caused by sulfur residues and improving the performance of the TFT device.

[0043] The array substrate in this application embodiment can be an FFS type array substrate.

[0044] Furthermore, this application also provides a method for fabricating an array substrate, comprising the following steps:

[0045] A glass substrate is provided, and an active layer (MoS2 active layer) is formed on the glass substrate by placing an active layer mixing solution on the glass substrate and heat treating it. The active layer mixing solution includes molybdenum disulfide modified with a disulfide-bonded polymer, wherein the disulfide-bonded polymer is attached to the surface of the molybdenum disulfide.

[0046] In some embodiments of this application, the preparation of the active layer mixed solution includes the following steps:

[0047] A polymer containing disulfide bonds is mixed with molybdenum disulfide and reacted to allow the polymer to be bonded to the surface of the molybdenum disulfide via disulfide bonds (SS), thus obtaining an active layer mixed solution. In this embodiment, the reaction of modifying the bulk MoS2 with a polymer containing disulfide bonds is achieved through an SS exchange reaction. Further, the solvent in the active layer mixed solution can be methylpyrrolidone (NMP).

[0048] In some embodiments of this application, the preparation of the thioctic acid polymer includes the following steps: mixing thioctic acid (LA) and polyethyleneimine (PEI) and reacting them to generate a polymer containing disulfide bonds, thereby obtaining a polymer mixture. Further, the polymer mixture can be synthesized through an amide reaction or an esterification reaction. Even further, the solvent in the polymer mixture can be acetonitrile (ACN).

[0049] Furthermore, the disulfide-containing polymer can be, but is not limited to, a thioctic acid polymer. The thioctic acid polymer can be synthesized from thioctic acid (LA) and polyethyleneimine (PEI). For example, a thioctic acid polymer (LA-PEI) can be synthesized from thioctic acid (LA) and polyethyleneimine (PEI) via an amide coupling reaction, as shown in the following reaction equation:

[0050]

[0051] In some embodiments, the solid content in the polymer mixture is 10 to 30 wt%. For example, the solid content in the polymer mixture may be 10 wt%, 15 wt%, 20 wt%, 25 wt%, or 30 wt%.

[0052] In some embodiments, the solid content in the active layer mixed solution is 30 wt%, 32 wt%, 35 wt%, 38 wt%, or 40 wt%.

[0053] Optionally, in some embodiments of this application, the heat treatment temperature is 110–130°C, and the heat treatment time is 1–3 hours. For example, the heat treatment temperature can be 110°C, 115°C, 120°C, 125°C, or 130°C; and the heat treatment time can be 1 hour, 1.5 hours, 2 hours, 2.5 hours, or 3 hours.

[0054] For example, please see Figure 2 The method for fabricating the array substrate includes the following steps:

[0055] A disulfide-bonded polymer (LA-PEI) was synthesized by amide reaction of lipoic acid (LA) and polyethyleneimine (PEI) in a solvent; molybdenum disulfide was added, and the disulfide-bonded polymer (LA-PEI) was mixed and reacted with molybdenum disulfide. LA-PEI was linked to the surface of the molybdenum disulfide layer through disulfide bonds to obtain an active layer mixed solution.

[0056] The active layer mixture solution is dropped or coated onto a glass substrate, and the glass substrate is then heated and baked to cure it. The heat treatment temperature is 120°C, and the baking time is 2 hours, resulting in a MoS2 composite active layer on the glass substrate. Heat treatment can cure the active layer onto the glass substrate.

[0057] The coating method on the glass substrate can refer to the processes used in the industry, and will not be elaborated here. If the solid content and polymer quality are adjusted, MoS2 can be transferred to the glass substrate by injection or other methods, which are still within the scope of this application.

[0058] The preparation method described in this application produces a large-area MoS2 thin film of active layer with high yield. The auxiliary materials used in the process are all commonly used laboratory solvents with no significant toxicity. Furthermore, the preparation process of this application reduces electrical defects caused by MoS2 residues, thereby improving the performance of TFT devices.

[0059] This application also provides a liquid crystal display panel, including an array substrate and a color filter substrate, such as an FFS array and a color filter structure. Furthermore, the array substrate in the liquid crystal display panel is formed from molybdenum disulfide modified with a disulfide-bonded polymer, as described above.

[0060] This application has undergone multiple experiments, and some of the test results are presented here for reference to further describe the invention in detail. The following is a detailed description in conjunction with specific embodiments.

[0061] Example 1

[0062] This embodiment provides an active layer structure, including a molybdenum disulfide (MoS2) layer, the surface of which has a modification layer. The modification layer is made of a thioctic acid polymer.

[0063] In this embodiment, the active layer structure is a molybdenum disulfide layer modified with thioctic acid polymer.

[0064] The preparation of the active layer structure material in this embodiment includes the following steps:

[0065] A disulfide-bonded polymer (LA-PEI) was synthesized by reacting lipoic acid (LA) with polyethyleneimine (PEI) in a solvent to obtain a polymer mixture;

[0066] The polymer mixture is mixed with molybdenum disulfide and reacted. The polymer containing disulfide bonds is attached to the surface of the molybdenum disulfide through disulfide bonds, resulting in an active layer mixed solution. Specifically, the polymer containing disulfide bonds bonds with sulfur residues on the surface of MoS2 using disulfide bonds, thus attaching the polymer to the surface of MoS2, which can be denoted as (MoS2-LA-PEI).

[0067] The 1H NMR spectrum of the disulfide-bonded polymer (LA-PEI) in this embodiment can be found in [link to example]. Figure 3A As shown.

[0068] Example 2

[0069] This embodiment provides an array substrate, including a glass substrate and an active layer formed on the glass substrate; wherein the active layer adopts the active layer structure in Embodiment 1.

[0070] The method for fabricating the array substrate includes the following steps:

[0071] Provide a glass substrate;

[0072] A disulfide-bonded polymer was synthesized by amide reaction of lipoic acid and polyethyleneimine in a solvent, resulting in a polymer mixture. The polymer mixture was then mixed with molybdenum disulfide and reacted, allowing the disulfide-bonded polymer to be bonded to the surface of the molybdenum disulfide via disulfide bonds, thus obtaining an active layer mixed solution. The solid content of the active layer mixed solution was 35 wt%.

[0073] The active layer mixture solution is dropped onto a glass substrate and heat-treated at 120°C for 2 hours to solidify and form an active layer on the glass substrate.

[0074] Example 3

[0075] This embodiment provides an array substrate, including a glass substrate and an active layer formed on the glass substrate; wherein the active layer adopts the active layer structure in Embodiment 1.

[0076] The method for fabricating the array substrate includes the following steps:

[0077] Provide a glass substrate;

[0078] A disulfide-bonded polymer was synthesized by amide reaction of lipoic acid and polyethyleneimine in a solvent, resulting in a polymer mixture. The polymer mixture was then mixed with molybdenum disulfide and reacted, allowing the disulfide-bonded polymer to be bonded to the surface of the molybdenum disulfide via disulfide bonds, thus obtaining an active layer mixed solution. The solid content of the active layer mixed solution was 30 wt%.

[0079] The active layer mixture solution is dropped onto a glass substrate and heat-treated at 110°C for 3 hours to solidify and form an active layer on the glass substrate.

[0080] Example 4

[0081] This embodiment provides an array substrate, including a glass substrate and an active layer formed on the glass substrate; wherein the active layer adopts the active layer structure in Embodiment 1.

[0082] The method for fabricating the array substrate includes the following steps:

[0083] Provide a glass substrate;

[0084] A disulfide-bonded polymer was synthesized by amide reaction of lipoic acid and polyethyleneimine in a solvent, resulting in a polymer mixture. The polymer mixture was then mixed with molybdenum disulfide and reacted, allowing the disulfide-bonded polymer to be bonded to the surface of the molybdenum disulfide via disulfide bonds, thus obtaining an active layer mixed solution. The solid content of the active layer mixed solution was 40 wt%.

[0085] The active layer mixture solution is dropped onto a glass substrate and heat-treated at 130°C for 1 hour to solidify and form an active layer on the glass substrate.

[0086] Comparative Example 1

[0087] This comparative example provides an array substrate, including a glass substrate and an active layer formed on the glass substrate, wherein the active layer is a MoS2 layer. The active layer in Comparative Example 1 differs from the active layer in Example 1 in that the active layer in Comparative Example 1 is a single MoS2 layer, and the surface of the MoS2 layer does not have a polymer modification layer.

[0088] The method for fabricating the array substrate includes the following steps:

[0089] Provide a glass substrate;

[0090] MoS2 material was coated onto a glass substrate and cured at 120°C for 2 hours to form an active layer on the glass substrate.

[0091] Experimental Example 1

[0092] This experiment performed thermogravimetric analysis (TGA) on the MoS2-LA-PEI from Example 1, with a blank control group of MoS2 without polymer modification. The TGA curves are as follows: Figure 3B As shown.

[0093] according to Figure 3B It can be seen that the active layer (MoS2-LA-PEI) in this embodiment reduces its weight to 76.9% of its original weight at a temperature of approximately 500°C; while the active layer (MoS2) in the comparative example also reduces its weight to 97.6% of its original weight as the temperature increases. This demonstrates that the weight of the active layer in this application changes significantly with increasing temperature.

[0094] Experimental Example 2

[0095] ① In this experiment, high-resolution deconvolution XPS spectra were used to detect the active layer (MoS2-LA-PEI) obtained in Example 2 and the active layer (MoS2) in Comparative Example 1. For details, please refer to [link to relevant documentation]. Figure 4A and Figure 4B As shown. Figure 4A High-resolution XPS spectrum of MoS2-LA-PEI; Figure 4B This is a high-resolution XPS spectrum of MoS2.

[0096] ② In this experimental example, the active layer (MoS2-LA-PEI) obtained in Example 2 and the active layer (MoS2) in Comparative Example 1 were examined by electron microscopy. For details, please refer to [link to relevant documentation]. Figure 5A and Figure 5B As shown. Figure 5A TEM image of MoS2-LA-PEI; Figure 5B This is a TEM image of MoS2.

[0097] according to Figure 5A and Figure 5B It can be seen that the layer area of ​​MoS2-LA-PEI in the embodiments of this application is greater than that of MoS2 in Comparative Example 1.

[0098] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0099] In summary, the molybdenum disulfide of this application is surface-bonded with a polymer containing disulfide bonds, and then cured onto a glass substrate by heat treatment. The novel MoS2 active layer in this application improves the adhesion between MoS2 and the substrate by modifying MoS2, thereby mitigating the weakness of interlayer forces in two-dimensional layered materials.

[0100] The above provides a detailed description of an active layer structure, array substrate, and its fabrication method provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the methods and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. An active layer structure, characterized in that, The invention comprises a molybdenum disulfide layer and a modification layer on the surface of the molybdenum disulfide layer; the modification layer is made of a disulfide-bonded polymer; the disulfide-bonded polymer is bonded to the surface of the molybdenum disulfide layer by an exchange reaction with sulfur residues on the surface of the molybdenum disulfide layer through disulfide bonds, thereby reducing the number of sulfur residues on the surface of the molybdenum disulfide layer; the disulfide-bonded polymer includes a lipoic acid polymer, which is synthesized from lipoic acid and polyethyleneimine; The thioctic acid and polyethyleneimine are mixed to obtain a polymer mixture; the solid content of the polymer mixture is 10-30 wt%.

2. An array substrate, characterized in that, The invention includes a glass substrate and an active layer formed on the glass substrate; the active layer includes a molybdenum disulfide layer and a modification layer on the surface of the molybdenum disulfide layer; the modification layer is made of a disulfide-bonded polymer; the disulfide-bonded polymer is bonded to the surface of the molybdenum disulfide layer by an exchange reaction with sulfur residues on the surface of the molybdenum disulfide layer through disulfide bonds, thereby reducing the sulfur residues on the surface of the molybdenum disulfide layer; the disulfide-bonded polymer includes a thioctic acid polymer, which is synthesized from thioctic acid and polyethyleneimine; The thioctic acid and polyethyleneimine are mixed to obtain a polymer mixture; the solid content of the polymer mixture is 10-30 wt%.

3. A method for fabricating an array substrate, characterized in that, Includes the following steps: A glass substrate is provided, an active layer mixing solution is placed on the glass substrate, heat-treated, and then an active layer is formed on the glass substrate; The active layer mixing solution includes molybdenum disulfide modified with a disulfide-bonded polymer, wherein the disulfide-bonded polymer is attached to the surface of the molybdenum disulfide. The preparation of the active layer mixed solution includes the following steps: A polymer containing disulfide bonds is mixed with molybdenum disulfide and reacted. The polymer containing disulfide bonds is connected to the surface of the molybdenum disulfide through disulfide bonds to obtain an active layer mixed solution. The preparation of the disulfide-containing polymer includes the following steps: Lipoic acid and polyethyleneimine are mixed and reacted to generate a polymer containing disulfide bonds, resulting in a polymer mixture. The solid content of the polymer mixture is 10~30wt%.

4. The method for fabricating an array substrate according to claim 3, characterized in that, The solid content in the active layer mixed solution is 30~40wt%.

5. The method for fabricating an array substrate according to claim 4, characterized in that, The heat treatment temperature is 110~130℃, and the heat treatment time is 1~3 hours.

Citation Information

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