Non-contact transmission device and non-contact transmission method

Abstract

The present invention relates to the field of semiconductor manufacturing technology, and in particular to a contactless transmission device and a contactless transmission method. The contactless transmission device includes a spatial position adjustment mechanism, a fork and a vertical motion mechanism. The vertical motion mechanism includes a detection component. The fork can be raised and lowered on the output end of the spatial position adjustment mechanism. The detection component is communicatively connected to the spatial position adjustment mechanism and is used to detect whether the workpiece on the fork is in contact with the workpiece table. The spatial position adjustment mechanism can control the output end to move or stop moving according to the detection result of the detection component. The fork can be raised and lowered relative to the output end of the spatial position adjustment mechanism, and then the detection component detects and transmits a signal, which facilitates timely adjustment of the spatial position adjustment mechanism to avoid excessive force between the workpiece and the workpiece table and damage to the workpiece, thereby reducing the handover height and improving the handover accuracy.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a contactless transmission device and a contactless transmission method. Background Art

[0002] During the semiconductor manufacturing process, ion implantation is widely used to modify the conductivity of specific regions of the silicon wafer surface. Since the doped impurity atoms are trapped in defects within the silicon lattice, laser annealing is typically required to eliminate damage to the semiconductor material lattice caused by the doping and effectively activate the doped impurities.

[0003] Because the laser annealing equipment's worktable uses a pinless method to hold the silicon wafer, the non-contact robotic fork needs to hold the wafer from the top surface. When the contact height between the wafer and the worktable is approximately 3mm, the contact error is approximately 100 to 200µm. When the contact height is 2mm, the contact error is within 50µm. When the contact height is 0.5mm, the contact error is within 15µm. Data analysis shows that the lower the contact height of the non-contact fork from the worktable, the higher the contact accuracy.

[0004] However, due to the tolerances in wafer thickness and the potential for warping, the non-contact wafer fork requires a certain amount of time to fully stop during operation. If the handover height is too low, the fork can easily collide with the wafer, causing damage. Therefore, the handover height is typically set at 1.5 to 2 mm. This results in low handover accuracy for non-contact robotic forks, which cannot meet the requirements for high-precision handover.

[0005] Therefore, there is an urgent need for a non-contact transmission device with high handover accuracy to solve the above problems. Summary of the Invention

[0006] An object of the present invention is to provide a non-contact transmission device that reduces the handover height and improves the handover accuracy without damaging the workpiece.

[0007] Another object of the present invention is to provide a non-contact transmission method that can reduce the handover height and improve the handover accuracy without damaging the workpiece.

[0008] To achieve the above objectives, the following technical solutions are provided:

[0009] In one aspect, a non-contact transmission device is provided, comprising a spatial position adjustment mechanism and a blade fork, wherein the spatial position adjustment mechanism is used to adjust the position of the blade fork, and the blade fork is used to absorb a workpiece. The non-contact transmission device also includes a vertical motion mechanism, wherein the blade fork is movably disposed at an output end of the spatial position adjustment mechanism, and the vertical motion mechanism includes:

[0010] The detection component is in communication with the spatial position adjustment mechanism and is used to detect whether the workpiece on the fork is in contact with the workpiece table. The spatial position adjustment mechanism can control the output end to move or stop moving according to the detection result of the detection component.

[0011] As an optional solution of the contactless transmission device, the detection component includes a sensing unit and a triggering member, the triggering member can trigger the sensing unit, and the spatial position adjustment mechanism can control the output movement or stop movement of the sensing unit according to the triggered state or untriggered state.

[0012] As an optional solution of the non-contact transmission device, the sensing unit can be raised and lowered synchronously with the sheet fork and can be raised and lowered relative to the trigger member to detect whether the workpiece on the sheet fork is in contact with the workpiece table.

[0013] As an optional solution of the non-contact transmission device, the trigger member can be raised and lowered synchronously with the fork and can be raised and lowered relative to the sensing unit to detect whether the workpiece on the fork is in contact with the workpiece table.

[0014] As an optional solution for the contactless transmission device, the vertical motion mechanism also includes a switching assembly, which is liftably arranged on the output end of the spatial position adjustment mechanism, the fork is fixed on the switching assembly, one of the sensing unit and the trigger member is fixed on the switching assembly, and the other is fixed on the output end of the spatial position adjustment mechanism.

[0015] As an optional solution for the contactless transmission device, in an initial state, the adapter assembly is located at a position where the sensing unit can be triggered by the trigger member; after the workpiece contacts the workpiece table, the adapter assembly can drive one of the sensing unit and the trigger member to move relative to the other so that the sensing unit is in an untriggered state.

[0016] As an optional solution for the contactless transmission device, the adapter assembly includes a fork adapter and a detection adapter, which are spaced apart and fixedly connected. The fork adapter is used to mount and secure the fork, and the sensing unit or the trigger is fixedly mounted on the detection adapter. As an optional solution for the contactless transmission device, the detection adapter is spaced apart and positioned above the fork adapter.

[0017] As an optional solution of the contactless transmission device, the mounting member is fixed on the output end of the spatial position adjustment mechanism, and one of the trigger member and the sensing unit is mounted on the mounting member.

[0018] As an optional solution for the contactless transmission device, the mounting member is spaced apart above the detection adapter, a first guide hole is provided on the detection adapter, the trigger member includes a connecting portion and a triggering portion, the connecting portion is slidably inserted into the first guide hole and fixedly connected to the mounting member, and the triggering portion is located below the detection adapter.

[0019] As an optional solution of the contactless transmission device, the triggering member is installed on the mounting member and can trigger the sensing unit.

[0020] As an optional solution of the contactless transmission device, the vertical motion mechanism further includes a limiter, which is fixed on the detection adapter and is used to limit the minimum distance between the sensing unit and the triggering member.

[0021] As an optional solution for the contactless transmission device, the fork adapter is used to install and fix the fork, the sensing unit adapter is spaced above the fork adapter, the sensing unit is fixedly installed on the lower surface of the sensing unit adapter, and the lower surface of the limiting member is slightly lower than the lower surface of the sensing unit and can abut against the upper surface of the trigger part.

[0022] As an optional solution of the contactless transmission device, the vertical motion mechanism further includes a reset component, and the reset component is used to put the sensing unit into a triggered state.

[0023] As an optional solution for the contactless transmission device, the reset assembly includes a reset elastic member that can position the adapter assembly to a position where the sensing unit is triggered. Further preferably, one end of the reset elastic member abuts the detection adapter, and the other end abuts the mounting member. Under the action of an external force, the detection adapter can move upward relative to the mounting member to compress the reset elastic member.

[0024] As an optional solution for the contactless transmission device, the reset assembly includes a linear actuator and a push rod. The linear actuator is fixed to the output end of the spatial position adjustment mechanism and is capable of driving the push rod to move horizontally so that the adapter assembly maintains the position where the sensing unit is triggered. Further preferably, the linear actuator is fixed to the output end of the spatial position adjustment mechanism, the push rod is provided with a first inclined surface, and the detection adapter is provided with a second inclined surface that aligns with the first inclined surface. The linear actuator is capable of driving the push rod to move horizontally so that the detection adapter moves downward relative to the mounting member.

[0025] In another aspect, a contactless transmission method is provided, comprising the following steps:

[0026] The sheet fork is arranged on the output end of the spatial position adjustment mechanism in a liftable manner, and the sheet fork is used to absorb the workpiece;

[0027] Before the workpiece on the slice fork contacts the workpiece table or the slice fork contacts the workpiece on the workpiece table, the spatial position adjustment mechanism adjusts the position of the slice fork according to a preset path, moves the slice fork to a position corresponding to the workpiece table, and drives the slice fork close to the workpiece table;

[0028] When the workpiece on the fork contacts the workpiece table or the fork contacts the workpiece on the workpiece table, the spatial position adjustment mechanism responds to the contact signal and stops driving the fork to move. During the period from responding to the contact signal to stopping movement at the output end of the spatial position adjustment mechanism, the fork can move away from the workbench under the action of the workpiece table.

[0029] As a preferred solution of the non-contact transmission method, the contact signal is a signal indicating that the sensing unit on the spatial position adjustment mechanism is not triggered.

[0030] As a preferred solution of the contactless transmission method, the contactless transmission method comprises the following steps:

[0031] The sheet fork is arranged on the output end of the spatial position adjustment mechanism in a liftable manner, and the sheet fork is used to absorb the workpiece;

[0032] Before the workpiece on the slice fork contacts the workpiece table or the slice fork contacts the workpiece on the workpiece table, the spatial position adjustment mechanism adjusts the position of the slice fork according to a preset path, moves the slice fork above the workpiece table, and drives the slice fork downward to approach the workpiece table;

[0033] When the workpiece on the fork contacts the workpiece table or the fork contacts the workpiece on the workpiece table, the spatial position adjustment mechanism responds to the contact signal and stops driving the fork to move downward. During the period from responding to the contact signal to stopping movement at the output end of the spatial position adjustment mechanism, the fork can move upward under the action of the workpiece table.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] The non-contact transmission device provided by the present invention includes a spatial position adjustment mechanism, a fork, and a vertical motion mechanism. The vertical motion mechanism includes a detection component. The fork is arranged to be raised and lowered on the output end of the spatial position adjustment mechanism. The detection component is communicatively connected to the spatial position adjustment mechanism and is used to detect whether the workpiece on the fork is in contact with the workpiece table. The spatial position adjustment mechanism can control the output end to move or stop moving based on the detection result of the detection component. By enabling the fork to rise and fall relative to the output end of the spatial position adjustment mechanism, and then detecting and transmitting signals through the detection component, the spatial position adjustment mechanism can be adjusted in a timely manner, avoiding excessive force between the workpiece and the workpiece table that may damage the workpiece, thereby reducing the handover height and improving the handover accuracy.

[0036] The non-contact transmission method provided by the present invention can reduce the handover height and improve the handover accuracy without damaging the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0038] Figure 1 A schematic structural diagram of a contactless transmission device provided in Embodiment 1 of the present invention;

[0039] Figure 2 A partial cross-sectional view of the vertical motion structure provided in Example 1 of the present invention;

[0040] Figure 3 A schematic structural diagram of the first state of the vertical motion structure provided in the first embodiment of the present invention;

[0041] Figure 4 A schematic structural diagram of the second state of the vertical motion structure provided in the first embodiment of the present invention;

[0042] Figure 5 A schematic structural diagram of a contactless transmission device provided in Embodiment 2 of the present invention;

[0043] Figure 6 A schematic structural diagram of the first state of the vertical motion structure provided in the second embodiment of the present invention;

[0044] Figure 7 This is a structural diagram of the second state of the vertical motion structure provided by the second embodiment of the present invention.

[0045] Reference numerals:

[0046] 100-workpiece; 200-workpiece table;

[0047] 1- Spatial position adjustment mechanism;

[0048] 2-piece fork;

[0049] 3-vertical motion mechanism; 31-adapter assembly; 311-fork adapter; 312-detection adapter; 3121-first guide hole; 3122-second guide hole; 313-slide rail; 314-slider; 32-detection assembly; 321-sensing unit; 322-trigger; 3221-connecting part; 3222-trigger; 33-reset assembly; 331a-reset elastic part; 332a-guide part; 331b-linear drive; 332b-push rod; 34-mounting part; 341-avoidance hole; 35-limiting part. DETAILED DESCRIPTION

[0050] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0051] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0052] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0053] In the description of this embodiment, the terms "up", "down", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation on the present invention.

[0054] Example 1

[0055] like Figure 1 As shown, this embodiment provides a non-contact transmission device, including a spatial position adjustment mechanism 1, a fork 2 and a vertical motion mechanism 3. The spatial position adjustment mechanism 1 is used to adjust the position of the fork 2, the fork 2 is used to adsorb the workpiece 100, and the vertical motion mechanism 3 is used to improve the accuracy of the non-contact transmission device in handing over the workpiece 100.

[0056] like Figure 2 As shown, the vertical motion mechanism 3 includes a detection component 32, and the fork 2 is arranged on the output end of the spatial position adjustment mechanism 1 in a manner that allows it to be raised and lowered. The detection component 32 is in communication with the spatial position adjustment mechanism 1 and is used to detect whether the workpiece 100 on the fork 2 is in contact with the workpiece table 200. The spatial position adjustment mechanism 1 can control the movement or stop of its output end based on the detection result of the detection component 32. By enabling the fork 2 to be raised and lowered relative to the output end of the spatial position adjustment mechanism 1, and then detecting and transmitting a signal through the detection component 32, the spatial position adjustment mechanism 1 can adjust in a timely manner, thereby avoiding damage to the workpiece 100 due to excessive force between the workpiece 100 and the workpiece table 200, thereby reducing the handover height and improving the handover accuracy.

[0057] Optionally, the vertical motion mechanism 3 also includes a transfer assembly 31, which is arranged on the output end of the spatial position adjustment mechanism 1 in a liftable manner, and the fork 2 is fixed on the transfer assembly 31, thereby realizing the lifting and lowering of the fork 2 relative to the output end of the spatial position adjustment mechanism 1 to reduce the force between the workpiece 100 on the fork 2 and the workpiece table 200 or reduce the force between the fork 2 and the workpiece 100 on the workpiece table 200.

[0058] like Figure 3-Figure 4 As shown, during the process of handing over the workpiece 100, when the detection component 32 detects that the workpiece 100 is in contact with the workpiece table 200, the spatial position adjustment mechanism 1 responds to the detection result of the detection component 32 and controls its output end to stop moving. During the process from the spatial position adjustment mechanism 1 responding to the detection signal to the output end stopping moving, the fork 2 absorbs the workpiece 100 and is able to move upward under the action of the workpiece table 200, thereby avoiding excessive force between the workpiece table 200 and the workpiece 100 and damaging the workpiece 100.

[0059] For example, the spatial position adjustment mechanism 1 can be a multi-axis manipulator. The workpiece 100 can be a silicon wafer or other thin plate-shaped object. The workpiece stage 200 uses a pin-free method to absorb the workpiece 100.

[0060] Alternatively, as Figure 2 As shown, the detection component 32 includes a sensing unit 321 and a trigger 322 . The trigger 322 can trigger the sensing unit 321 . The spatial position adjustment mechanism 1 can control the output end of the sensing unit 321 to move or stop moving according to the trigger state or non-trigger state of the sensing unit 321 .

[0061] Preferably, when the sensing unit 321 is in a triggered state, the output end of the spatial position adjustment mechanism 1 controller moves; when the sensing unit 321 is in an untriggered state, the output end of the spatial position adjustment mechanism 1 controller stops moving. The control principle of the non-contact transmission device is as follows: one of the necessary conditions for the spatial position adjustment mechanism 1 to control the movement of its output end is that the sensing unit 321 is in a triggered state; when the sensing unit 321 is in an untriggered state, the spatial position adjustment mechanism 1 controls the output end to stop moving. Because there is typically a certain reaction time between the spatial position adjustment mechanism 1 receiving the untriggered signal from the sensing unit 321 and the spatial position adjustment mechanism 1 controlling the output end to stop moving, if the fork 2 is fixed to the output end of the spatial position adjustment mechanism 1 after the workpiece 100 contacts the workpiece stage 200, even a small downward movement of the workpiece 100 may cause damage. However, if the fork 2 is floating, excessive force on the workpiece 100 can be avoided, thereby preventing damage. Furthermore, by setting the signal control so that the position of the workpiece 100 continues to be adjusted when there is a signal input (triggered), and stops adjusting the position of the workpiece 100 when there is no signal input (not triggered), most manipulators respond faster to no signal input than to signal input. Furthermore, when the signal input is set to stop adjusting the position of the workpiece 100, external factors such as wiring or the environment may affect the signal input, causing the manipulator to not immediately receive the corresponding signal, thereby increasing the risk of damage to the workpiece 100.

[0062] For example, the sensing unit 321 is a proximity switch, and the triggering member 322 can be any physical object. When the triggering member 322 approaches the sensing unit 321, the sensing unit 321 can be triggered.

[0063] Optionally, the sensing unit 321 can be raised and lowered synchronously with the fork 2 and can be raised and lowered relative to the trigger member 322 to detect whether the workpiece 100 on the fork 2 is in contact with the workpiece table 200. In another embodiment of the present invention, the trigger member 322 can also be raised and lowered synchronously with the fork 2 and can be raised and lowered relative to the sensing unit 321 to detect whether the workpiece 100 on the fork 2 is in contact with the workpiece table 200.

[0064] Optionally, one of the sensing unit 321 and the triggering member 322 is fixed on the adapter assembly 31 , and the other triggering member 322 is fixed on the output end of the spatial position adjustment mechanism 1 .

[0065] Exemplarily, the sensing unit 321 is fixed on the adapter assembly 31, and the trigger member 322 is fixed on the output end of the spatial position adjustment mechanism 1 and is located below the sensing unit 321; in the initial state, the adapter assembly 31 is located at a position where the sensing unit 321 can be triggered by the trigger member 322, and at this time the spatial position adjustment mechanism 1 controls its output end to move according to a preset path; after the workpiece 100 contacts the workpiece table 200, the adapter assembly 31 can drive the sensing unit 321 to move upward relative to the trigger member 322 so that the sensing unit 321 is not triggered. At this time, the output end of the spatial position adjustment mechanism 1 controller stops moving to avoid damaging the workpiece 100. In another embodiment of the present invention, the trigger member 322 can also be fixed on the adapter assembly 31, and the sensing unit 321 can be fixed on the spatial position adjustment mechanism 1. As long as it can be achieved that the workpiece 100 on the fork 2 does not contact the workpiece table 200 or the fork 2 does not contact the workpiece 100 on the workpiece table 200, the sensing unit 321 is in a triggered state; when the fork 2 moves under the action of the workpiece table 200, the sensing unit 321 is in an untriggered state, no examples will be given here one by one.

[0066] In order to facilitate the installation and fixation of the fork 2 and the sensing unit 321, the adapter assembly 31 includes a fork adapter 311 and a detection adapter 312. The fork adapter 311 is used to install and fix the fork 2, and the detection adapter 312 is used to install and fix the sensing unit 321.

[0067] For example, the detection adapter 312 is spaced apart above the fork adapter 311, and the sensing unit 321 is fixedly mounted on the lower surface of the detection adapter 312. Placing the detection adapter 312 above the fork adapter 311 can prevent the sensing unit 321 from colliding with the workpiece table 200 or other external equipment. In another embodiment of the present invention, the sensing unit 321 can also be fixedly mounted at other positions on the detection adapter 312, as long as the sensing unit 321 can be in two states: being triggered by the trigger member 322 and not being triggered. Examples are not given here one by one.

[0068] Optionally, the adapter assembly 31 further includes a slide rail 313 and a slider 314 . The slide rail 313 is fixed on the output end of the spatial position adjustment mechanism 1 . The slider 314 slides with the slide rail 313 . The fork adapter 311 and the detection adapter 312 are both fixed on the slider 314 .

[0069] To facilitate installation of the trigger member 322 , the vertical motion mechanism 3 further includes a mounting member 34 . The mounting member 34 is fixed to the output end of the spatial position adjustment mechanism 1 . The trigger member 322 is mounted on the mounting member 34 and can trigger the sensing unit 321 .

[0070] Optionally, the mounting member 34 is spaced apart and positioned above the detection adapter 312. The detection adapter 312 defines a first guide hole 3121. The trigger member 322 includes a connecting portion 3221 and a trigger portion 3222. The connecting portion 3221 is slidably disposed in the first guide hole 3121 and fixedly connected to the mounting member 34. The trigger portion 3222 is positioned below the detection adapter 312. This arrangement ensures the proper coordination between the sensing unit 321 and the trigger member 322 while preventing the mounting position of the trigger member 322 from interfering with the movement of the adapter assembly 31.

[0071] In order to prevent the sensing unit 321 from being damaged by excessive force between the sensing unit 321 and the trigger member 322 during the downward movement of the adapter assembly 31, the vertical motion mechanism 3 also includes a limiter 35, which is used to limit the minimum distance between the sensing unit 321 and the trigger member 322.

[0072] Exemplarily, the position limiter 35 is fixed to the detection adapter 312, and the lower surface of the position limiter 35 is slightly lower than the lower surface of the sensing unit 321 and is capable of abutting against the upper surface of the trigger portion 3222. The position limiter 35 can limit the lowest position of the adapter assembly 31 while ensuring a certain gap between the sensing unit 321 and the trigger portion 3222. In another embodiment of the present invention, the position limiter 35 can also be fixedly installed in other positions, as long as it can avoid the situation where the sensing unit 321 is damaged due to excessive contact between the sensing unit 321 and the trigger portion 322. Examples are not given here.

[0073] Optionally, the stopper 35 is a stop screw, the lower end of which passes through the detection adapter 312 and contacts the trigger portion 3222. To prevent the upper end of the stop screw from interfering with the mounting member 34 during movement of the adapter assembly 31, a clearance hole 341 is provided in the mounting member 34. When the adapter assembly 31 moves upward to a certain position, the upper end of the stop screw can pass through the clearance hole 341. Preferably, a rolling ball is provided at the lower end of the stop screw to reduce friction between the lower end of the stop screw and the trigger portion 3222.

[0074] Preferably, the vertical motion mechanism 3 further includes a reset assembly 33, which activates the sensing unit 321. After the workpiece 100 is transferred, the sensing unit 321 is activated by the reset assembly 33, thereby enabling the spatial position adjustment mechanism 1 to drive the fork 2 to move along the specified path.

[0075] Optionally, the reset assembly 33 includes a reset elastic member 331a, one end of which abuts the detection adapter 312 and the other end of which abuts the mounting member 34. Under the action of an external force, the detection adapter 312 can move upward relative to the mounting member 34 to compress the reset elastic member 331a. When the external force is released, the reset elastic member 331a can position the sensing unit 321 on the detection adapter 312 so that it can be triggered by the trigger member 322.

[0076] In order to prevent the reset elastic member 331a from being dislocated and shaking, the reset assembly 33 also includes a guide member 332a, which is fixed on the mounting member 34. A second guide hole 3122 is opened at the corresponding position of the detection adapter 312. The reset elastic member 331a is sleeved on the guide member 332a. When the adapter assembly 31 moves upward, the guide member 332a can pass through the second guide hole 3122.

[0077] In addition, the reset elastic member 331a can also play the role of buffering the adapter assembly 31 to prevent the fork 2 from shaking up and down. The distance that the adapter assembly 31 can move upward is greater than the maximum compression amount of the reset elastic member 331a.

[0078] This embodiment also provides a contactless transmission method, comprising the following steps:

[0079] The fork 2 is arranged on the output end of the spatial position adjustment mechanism 1 in a liftable manner, and the workpiece 100 is adsorbed by the fork 2;

[0080] Before the workpiece 100 on the fork 2 contacts the workpiece table 200 or the fork 2 contacts the workpiece 100 on the workpiece table 200, the spatial position adjustment mechanism 1 adjusts the position of the fork 2 according to a preset path, moves the fork 2 above the workpiece table 200, and drives the fork 2 downward to approach the workpiece table 200;

[0081] When the workpiece 100 on the fork 2 contacts the workpiece table 200 or the fork 2 contacts the workpiece 100 on the workpiece table 200, the spatial position adjustment mechanism 1 responds to the contact signal and stops driving the fork 2 to move downward. During the period from responding to the contact signal to stopping movement at the output end of the spatial position adjustment mechanism 1, the fork 2 can move upward under the action of the workpiece table 200.

[0082] Optionally, the contactless transmission method includes a loading method, and the loading method includes the following steps:

[0083] S1, the spatial position adjustment mechanism 1 first moves the workpiece 100 to a position 2-3 mm above the workpiece table 200;

[0084] S2. The spatial position adjustment mechanism 1 drives the workpiece 100 to slowly move downward until the lower surface of the workpiece 100 contacts the upper surface of the workpiece table 200;

[0085] S3. The output end of the spatial position adjustment mechanism 1 continues to move slowly downward, the adapter component 31 moves upward under the action of the workpiece table 200, the sensing unit 321 moves away from the triggering member 322, and the sensing unit 321 changes from the triggered state to the untriggered state. The spatial position adjustment mechanism 1 stops moving immediately. During the response process, the downward movement distance of the output end of the spatial position adjustment mechanism 1 is controlled at 1-2 mm.

[0086] S4, the suction cup of the workpiece table 200 starts vacuum adsorption of the workpiece 100, the fork 2 closes the positive pressure to release the workpiece 100, and the workpiece 100 is transferred to the workpiece table 200 by the fork 2;

[0087] S5: The output end of the spatial position adjustment mechanism 1 moves upward, and the adapter assembly 31 moves downward under the action of the reset assembly 33. The sensing unit 321 changes from an untriggered state to a triggered state, and inputs a triggering signal to the spatial position adjustment mechanism 1. Furthermore, under the action of the reset assembly 33, the upward movement of the adapter assembly 31 is restricted. As long as the adapter assembly 31 is not subjected to an upward force, the sensing unit 321 remains in the triggered state.

[0088] Optionally, the contactless transmission method provided in this embodiment further includes a film unloading method, and the film unloading method includes the following steps:

[0089] S1. The spatial position adjustment mechanism 1 drives the fork 2 to move to the high intersection position of the workpiece table 200. At this time, the lower surface of the fork 2 is 2-3 mm away from the upper surface of the workpiece 100 on the workpiece table 200.

[0090] S2, the output end of the spatial position adjustment mechanism 1 moves slowly downward vertically, and at this time the lower surface of the fork 2 just contacts the upper surface of the workpiece 100 on the workpiece table 200.

[0091] S3: The output end of the spatial position adjustment mechanism 1 continues to move slowly downward, the adapter assembly 31 in the vertical motion mechanism 3 moves upward, and the sensing unit 321 changes from the triggered state to the untriggered state. The spatial position adjustment mechanism 1 detects that there is no signal input from the sensing unit 321, and the vertical movement of the output end of the spatial position adjustment mechanism 1 immediately stops. During this process, the downward movement distance of the output end of the spatial position adjustment mechanism 1 is controlled to be 1-2 mm.

[0092] S4, the fork 2 first turns on the positive pressure to suck the workpiece 100, and then the suction cup of the workpiece table 200 turns off the vacuum, and the workpiece 100 is transferred from the workpiece table 200 to the fork 2;

[0093] S5: The output end of the spatial position adjustment mechanism 1 moves upward, and the adapter assembly 31 moves downward under the action of the reset assembly 33. The sensing unit 321 changes from an untriggered state to a triggered state, and inputs a triggering signal to the spatial position adjustment mechanism 1. Furthermore, under the action of the reset assembly 33, the upward movement of the adapter assembly 31 is restricted. As long as the adapter assembly 31 is not subjected to an upward force, the sensing unit 321 remains in the triggered state.

[0094] The non-contact transmission method provided in this embodiment has at least the following advantages: (1) when the fork 2 and the workpiece table 200 hand over the workpiece 100, the fork 2 and the workpiece 100 are in contact first, and this method has a high handover accuracy; (2) before the fork 2 contacts the workpiece 100, the fork 2 moves at a relatively slow speed, which can effectively avoid the impact on the workpiece 100 and causing damage to the workpiece 100; (3) this handover method can adapt to workpieces 100 of different thicknesses and workpieces 100 of different warping, without the need to set up multiple handover positions.

[0095] Example 2

[0096] The difference between this embodiment and the first embodiment is mainly in the structure of the reset component 33. Figure 5-Figure 7As shown, the reset assembly 33 in this embodiment includes a linear driver 331b and a push rod 332b. The linear driver 331b is fixed on the output end of the spatial position adjustment mechanism 1. The push rod 332b is provided with a first inclined surface. The detection adapter 312 is provided with a second inclined surface that fits the first inclined surface. The linear driver 331b can drive the push rod 332b to move in the horizontal direction to maintain the detection adapter 312 so that the sensing unit 321 thereon is in a triggered position.

[0097] Alternatively, the linear actuator 331b may be a cylinder.

[0098] During the process of handing over the workpiece 100, the reset elastic member 331a in the first embodiment will apply a downward force to the fork 2 during the compression process, and this force will act on the workpiece 100. For a relatively thin workpiece 100, there is still a risk of causing damage. In this embodiment, during the process of handing over the workpiece 100, the linear driver 331b drives the push rod 332b to be in a retracted state, the vertical freedom of the fork 2 is not restricted, the fork 2 falls on the workpiece 100, and no other additional force acts on the workpiece 100, which can better protect the workpiece 100. After the workpiece is handed over, the linear driver 331b drives the push rod 332b to be in an extended state to lock the detection adapter 312 on the sensing unit 321 in a triggered position, thereby preventing the detection adapter 312 from floating up and down and affecting the drive control of the spatial position adjustment mechanism 1.

[0099] Based on the non-contact transmission device in this embodiment, the non-contact transmission method provided in this embodiment includes the following steps:

[0100] S1, the spatial position adjustment mechanism 1 first moves the workpiece 100 to a position 2-3 mm above the workpiece table 200;

[0101] S2. The linear actuator 331b drives the push rod 332b to retract, and the spatial position adjustment mechanism 1 drives the workpiece 100 to slowly move downward until the lower surface of the workpiece 100 contacts the upper surface of the workpiece table 200.

[0102] S3. The output end of the spatial position adjustment mechanism 1 continues to move slowly downward, the adapter component 31 moves upward under the action of the workpiece table 200, the sensing unit 321 moves away from the triggering member 322, and the sensing unit 321 changes from the triggered state to the untriggered state. The spatial position adjustment mechanism 1 stops moving immediately. During the response process, the downward movement distance of the output end of the spatial position adjustment mechanism 1 is controlled at 1-2 mm.

[0103] S4, the suction cup of the workpiece table 200 starts vacuum adsorption of the workpiece 100, the fork 2 closes the positive pressure to release the workpiece 100, and the workpiece 100 is transferred to the workpiece table 200 by the fork 2;

[0104] S5. The output end of the spatial position adjustment mechanism 1 moves upward, causing the sensing unit 321 to change from an untriggered state to a triggered state, and inputting a trigger signal to the spatial position adjustment mechanism 1. The linear actuator 331b then extends the push rod 332b to lock the adapter assembly 31, thereby placing the sensing unit 321 in the triggered state. This ensures that the vertical freedom of the adapter assembly 31 is restricted during the movement of the spatial position adjustment mechanism 1, preventing the adapter assembly 31 from moving upward due to external forces, thereby placing the sensing unit 321 in the untriggered state.

[0105] Optionally, the contactless transmission method provided in this embodiment further includes a film unloading method, and the film unloading method includes the following steps:

[0106] S1. The spatial position adjustment mechanism 1 drives the fork 2 to move to the high intersection position of the workpiece table 200. At this time, the lower surface of the fork 2 is 2-3 mm away from the upper surface of the workpiece 100 on the workpiece table 200.

[0107] S2, the linear driver 331b drives the push rod 332b to retract, and the output end of the spatial position adjustment mechanism 1 moves slowly downward vertically. At this time, the lower surface of the fork 2 just contacts the upper surface of the workpiece 100 on the workpiece table 200.

[0108] S3: The output end of the spatial position adjustment mechanism 1 continues to move slowly downward, the adapter assembly 31 in the vertical motion mechanism 3 moves upward, and the sensing unit 321 changes from the triggered state to the untriggered state. The spatial position adjustment mechanism 1 detects that there is no signal input from the sensing unit 321, and the vertical movement of the output end of the spatial position adjustment mechanism 1 immediately stops. During this process, the downward movement distance of the output end of the spatial position adjustment mechanism 1 is controlled to be 1-2 mm.

[0109] S4, the fork 2 first turns on the positive pressure to suck the workpiece 100, and then the suction cup of the workpiece table 200 turns off the vacuum, and the workpiece 100 is transferred from the workpiece table 200 to the fork 2;

[0110] S5. The output end of the spatial position adjustment mechanism 1 moves upward, and the adapter component 31 moves downward under the action of its own gravity, thereby changing the sensing unit 321 from an untriggered state to a triggered state, and inputting a triggered signal to the spatial position adjustment mechanism 1; then the linear driver 331b pushes the push rod 332b to extend to lock the adapter component 31, so as to ensure that during the movement of the spatial position adjustment mechanism 1, the freedom of the adapter component 31 in the vertical direction is restricted, thereby preventing the adapter component 31 from moving upward due to external force and causing the sensing unit 321 to be in an untriggered state.

[0111] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A non-contact transmission device, comprising a spatial position adjustment mechanism (1) and a fork (2), wherein the spatial position adjustment mechanism (1) is used to adjust the position of the fork (2), and the fork (2) is used to adsorb a workpiece (100), characterized in that: The non-contact transmission device further comprises a vertical motion mechanism (3), the blade fork (2) is arranged at the output end of the spatial position adjustment mechanism (1) in a liftable manner, and the vertical motion mechanism (3) comprises: a detection component (32) in communication with the spatial position adjustment mechanism (1) and configured to detect whether the workpiece (100) on the fork (2) is in contact with the workpiece table (200); the spatial position adjustment mechanism (1) can control the output end thereof to move or stop moving according to the detection result of the detection component (32); The detection component (32) comprises a sensing unit (321) and a triggering member (322), wherein the triggering member (322) is capable of triggering the sensing unit (321), and the spatial position adjustment mechanism (1) is capable of controlling the output end thereof to move or stop moving according to the triggered state or the untriggered state of the sensing unit (321); The sensing unit (321) can be raised and lowered synchronously with the fork (2) and can be raised and lowered relative to the trigger member (322) to detect whether the workpiece (100) on the fork (2) is in contact with the workpiece table (200); or, the trigger member (322) can be raised and lowered synchronously with the fork (2) and can be raised and lowered relative to the sensing unit (321) to detect whether the workpiece (100) on the fork (2) is in contact with the workpiece table (200); The vertical motion mechanism (3) further comprises a transfer assembly (31), wherein the transfer assembly (31) is arranged on the output end of the spatial position adjustment mechanism (1) in a liftable manner, the blade fork (2) is fixed on the transfer assembly (31), and one of the sensing unit (321) and the trigger member (322) is fixed on the transfer assembly (31), and the other is fixed on the output end of the spatial position adjustment mechanism (1).

2. The contactless transmission device according to claim 1, wherein: In an initial state, the adapter assembly (31) is located at a position where the sensing unit (321) can be triggered by the trigger member (322); after the workpiece (100) contacts the workpiece table (200), the adapter assembly (31) can drive one of the sensing unit (321) and the trigger member (322) to move relative to the other so that the sensing unit (321) is in an untriggered state.

3. The contactless transmission device according to claim 1, wherein: The adapter assembly (31) comprises a fork adapter (311) and a detection adapter (312) that are spaced apart and fixedly connected. The fork adapter (311) is used to mount and fix the fork (2). The sensing unit (321) or the trigger (322) is fixedly mounted on the detection adapter (312).

4. The contactless transmission device according to claim 3, wherein: The detection adapter (312) is spaced apart and arranged above the fork adapter (311).

5. The contactless transmission device according to claim 3, wherein: The vertical motion mechanism (3) further includes a mounting member (34), wherein the mounting member (34) is fixed to the output end of the spatial position adjustment mechanism (1), and one of the trigger member (322) and the sensing unit (321) is mounted on the mounting member (34).

6. The contactless transmission device according to claim 5, characterized in that: The mounting member (34) is spaced apart above the detection adapter (312); a first guide hole (3121) is provided on the detection adapter (312); the trigger member (322) comprises a connecting portion (3221) and a trigger portion (3222); the connecting portion (3221) is slidably inserted into the first guide hole (3121) and fixedly connected to the mounting member (34); and the trigger portion (3222) is located below the detection adapter (312).

7. The contactless transmission device according to claim 3, characterized in that: The vertical motion mechanism (3) further includes a limiting member (35), wherein the limiting member (35) is fixed on the detection adapter (312), and the limiting member (35) is used to limit the minimum distance between the sensing unit (321) and the trigger member (322).

8. The contactless transmission device according to claim 1, wherein: The vertical motion mechanism (3) further comprises a reset component (33), and the reset component (33) is used to put the sensing unit (321) into a triggered state.

9. The contactless transmission device according to claim 8, characterized in that: The reset component (33) comprises a reset elastic member (331a), and the reset elastic member (331a) can place the adapter component (31) in a position where the sensing unit (321) is triggered.

10. The contactless transmission device according to claim 8, characterized in that: The reset component (33) comprises a linear driver (331b) and a push rod (332b), wherein the linear driver (331b) is fixed to the output end of the spatial position adjustment mechanism (1) and is capable of driving the push rod (332b) to move in a horizontal direction so that the adapter component (31) is maintained at a position where the sensing unit (321) is triggered.

11. A non-contact transmission method, applied to the non-contact transmission device according to any one of claims 1 to 10, characterized in that: The steps include: The fork (2) is arranged on the output end of the spatial position adjustment mechanism (1) in a liftable manner, and the workpiece (100) is adsorbed by the fork (2); Before the workpiece (100) on the fork (2) contacts the workpiece table (200) or the fork (2) contacts the workpiece (100) on the workpiece table (200), the spatial position adjustment mechanism (1) adjusts the position of the fork (2) according to a preset path, moves the fork (2) to a position corresponding to the workpiece table (200), and drives the fork (2) close to the workpiece table (200); When the workpiece (100) on the fork (2) contacts the workpiece table (200) or the fork (2) contacts the workpiece (100) on the workpiece table (200), the spatial position adjustment mechanism (1) responds to the contact signal and stops driving the fork (2) to move. During the period from responding to the contact signal to stopping the movement at the output end of the spatial position adjustment mechanism (1), the fork (2) can move in a direction away from the workpiece table (200) under the action of the workpiece table (200).

12. The contactless transmission method according to claim 11, characterized in that: The contact signal is a signal indicating that the sensing unit (321) on the spatial position adjustment mechanism (1) is not triggered.

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