Liquid leakage detection device and semiconductor cleaning equipment

Abstract

The present invention provides a liquid leakage detection device and semiconductor cleaning equipment; wherein the liquid leakage detection device is arranged between an outer tank and an inner tank of the semiconductor cleaning equipment, and comprises: a liquid level sensor, a shell and an air supply component; wherein the liquid level sensor is arranged in the inner cavity of the shell; the shell is provided with gas-liquid channels respectively connected with the inner cavity and the outer tank; the gas-liquid channel is used for supplying the liquid inside the outer tank to flow into the inner cavity when the liquid level inside the outer tank reaches a preset threshold height; the air supply component is connected with the inner cavity and is used for conveying a barrier gas into the inner cavity so that the air pressure inside the inner cavity reaches a preset barrier pressure; wherein the preset barrier pressure is greater than the external environmental air pressure and less than the pressure on the inner cavity when the liquid level in the outer tank reaches the preset threshold height, thereby ensuring timely monitoring of the liquid level while achieving effective sealing of the liquid level sensor, and reducing the occurrence of the problem of the leakage sensor being falsely triggered.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a liquid leakage detection device and semiconductor cleaning equipment. Background Art

[0002] Cleaning technology is an important part of the semiconductor industry. Wet cleaning technology mainly uses cleaning liquid to etch the surface of silicon wafers. Cleaning liquid protection is an important part of equipment safety protection. Semiconductor cleaning equipment usually includes an inner tank for cleaning process and an outer tank arranged outside the inner tank.

[0003] At present, due to the requirements of safe production, the outer tank of the semiconductor cleaning equipment needs to be equipped with a leakage detection device, which is usually set on the side wall of the outer tank and higher than the preset height of the outer tank bottom plate to monitor the liquid level inside the outer tank of the semiconductor cleaning equipment, so as to promptly remind the operator to carry out maintenance when the inner tank is damaged and a large amount of leakage occurs. Moreover, when the liquid inside the outer tank has not accumulated to the preset threshold height, it is usually necessary to avoid the leakage detection device from being triggered to ensure the accuracy of monitoring. However, after a long process, the cleaning liquid vapor volatilized by the cleaning liquid will accumulate on the surface of the sensor and condense, which will cause the sensor to be triggered incorrectly, and it is also easy to cause the failure to detect whether the inner tank is damaged in time. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a liquid leakage detection device and a semiconductor cleaning device, which can achieve effective sealing of a liquid level sensor, thereby reducing the occurrence of the problem of the liquid leakage detection device being falsely triggered.

[0005] In order to achieve the purpose of the present invention, a liquid leakage detection device is provided for semiconductor cleaning equipment, wherein the liquid leakage detection device is arranged between the outer tank and the inner tank of the semiconductor cleaning equipment; the liquid leakage detection device comprises: a liquid level sensor, a housing and an air supply component; wherein,

[0006] The liquid level sensor is arranged in the inner cavity of the housing;

[0007] The outer shell is provided with gas-liquid channels respectively connected with the inner cavity and the outer tank; the gas-liquid channels are used to allow the liquid in the outer tank to flow into the inner cavity when the liquid level in the outer tank reaches a preset threshold height;

[0008] The gas supply assembly is connected to the inner cavity, and is used to transport a barrier gas into the inner cavity so that the internal air pressure of the inner cavity reaches a preset barrier pressure; wherein the preset barrier pressure is greater than the external environmental air pressure and less than the pressure on the inner cavity when the liquid level in the outer tank reaches the preset threshold height.

[0009] Optionally, the preset barrier pressure is 50 kPa to 200 kPa higher than the external ambient pressure.

[0010] Optionally, the housing includes a base and a cover plate; wherein the base is used to carry the liquid level sensor;

[0011] The cover plate is arranged on the base and connected to the base;

[0012] The surface of the cover plate opposite to the base is used to enclose the inner cavity.

[0013] Optionally, at least one first through hole is formed in the base, and the first through hole is used as the gas-liquid passage to connect the inner cavity with the external environment.

[0014] Optionally, at least one first through hole is formed in the base, and the first through hole is located at the connection between the base and the cover plate;

[0015] A connecting groove is provided on the surface of the cover plate facing the base, and the connecting groove corresponds to the inlet position of the first through hole; the channel formed by the inner surface of the connecting groove and the surface of the base is connected to the first through hole to form the gas-liquid channel together with the first through hole.

[0016] Optionally, the number of the first through holes is 20 to 40, and the diameter of the first through holes ranges from 0.3 mm to 0.6 mm.

[0017] Optionally, the first through hole is arranged around the liquid level sensor, and the distance from the first through hole to the liquid level sensor is greater than 4 mm.

[0018] Optionally, the liquid leakage detection device further includes a mounting assembly;

[0019] The bottom end of the mounting assembly is fixedly connected to the housing; the mounting assembly is detachably connected to the upper end of the inner wall of the outer groove.

[0020] Optionally, the gas supply assembly includes a gas supply pipe and an external gas source;

[0021] The air inlet end of the air supply pipe is communicated with the external air source, and the air outlet end of the air supply pipe is communicated with the shell.

[0022] Optionally, the liquid leakage detection device further includes a wiring for connecting the liquid level sensor and an external signal source; the wiring is arranged in the air supply pipe and led out through a wiring hole opened on the air supply pipe.

[0023] As another technical solution, an embodiment of the present invention also provides a semiconductor cleaning equipment, characterized in that it includes an inner tank, an outer tank and a liquid leakage detection device as described above; wherein the inner tank is arranged inside the outer tank and is not connected to the inner wall of the outer tank; the liquid leakage detection device is arranged on the inner side wall of the outer tank, and the height of the liquid leakage detection device relative to the bottom surface of the outer tank satisfies that the liquid leakage sensor corresponds to the preset threshold height.

[0024] Optionally, the semiconductor cleaning equipment further comprises a plurality of pipelines, one end of each of the plurality of pipelines is connected to the inner tank, and the other end of each of the plurality of pipelines passes through the outer tank and is led out to the outside of the outer tank;

[0025] The liquid leakage detection device is detachably connected to the inner side wall of the outer tank, and the connection between the liquid leakage detection device and the outer tank is higher than the plurality of pipelines.

[0026] The present invention has the following beneficial effects:

[0027] The liquid leakage detection device provided by the present invention comprises a shell and a liquid level sensor arranged in the inner cavity of the shell, wherein a gas-liquid channel is opened on the shell, and the gas-liquid channel can be connected with the inner cavity and the outer tank respectively, and is used for supplying the liquid inside the outer tank to flow into the inner cavity when the liquid level inside the outer tank reaches a preset threshold height, so that the liquid level sensor can timely detect that the liquid level inside the outer tank reaches the preset threshold height, that is, to realize the monitoring of the liquid level height inside the outer tank, so as to timely remind the operator to perform maintenance when the inner tank of the semiconductor cleaning equipment is damaged.

[0028] Moreover, the leakage detection device provided by the present invention also includes an air supply component connected to the inner cavity of the shell, which is used to transport a barrier gas into the inner cavity of the shell to form a barrier gas flow in the gas-liquid channel that flows to the external environment, and the barrier gas flow can block the external gas from flowing into the inner cavity, that is, it can block the cleaning liquid vapor in the external environment from flowing into the inner cavity of the shell, thereby avoiding the accumulation of cleaning liquid vapor on the surface of the liquid level sensor to cause condensation, and reducing the occurrence of false triggering of the liquid level sensor. Moreover, the preset barrier pressure is greater than the external environment air pressure and lower than the pressure on the inner cavity when the liquid level in the outer tank reaches the preset threshold height, so that the barrier gas flow in the gas-liquid channel is sufficient to block the external gas, but cannot block the liquid inside the outer tank from flowing into the inner cavity, thereby blocking the external gas while ensuring that the liquid level sensor can timely detect the situation where the liquid level inside the outer tank reaches the preset threshold height. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A structural diagram of an existing semiconductor cleaning device;

[0030] Figure 2 for Figure 1A partial enlarged view of area A in FIG.

[0031] Figure 3 An exploded view of an existing liquid leakage detection device;

[0032] Figure 4 A top view of an existing semiconductor cleaning device;

[0033] Figure 5 A schematic diagram of the structure of a liquid leakage detection device provided in an embodiment of the present invention;

[0034] Figure 6 for Figure 5 A partial enlarged view of area B in FIG.

[0035] Figure 7 A partial exploded view of a liquid leakage detection device provided by an embodiment of the present invention;

[0036] Figure 8 A partial cross-sectional view of a housing in a liquid leakage detection device provided in an embodiment of the present invention;

[0037] Fig. 9 A simplified structural diagram of a semiconductor cleaning device provided by an embodiment of the present invention;

[0038] Fig.10 A top view of a semiconductor cleaning device provided by an embodiment of the present invention;

[0039] Fig.11 A front view of a liquid leakage detection device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0040] In order to enable those skilled in the art to better understand the technical solution of the present invention, the liquid leakage detection device and semiconductor cleaning equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0041] like Figure 1 As shown, in the semiconductor cleaning process, a liquid leakage detection device is usually required to be installed between the outer tank and the inner tank of the semiconductor cleaning equipment to monitor the liquid level inside the outer tank of the semiconductor cleaning equipment; specifically, the liquid leakage detection device is set at a preset threshold height relative to the bottom surface of the outer tank. The preset threshold height is set according to the amount of cleaning liquid that may flow out after the inner tank is damaged, so as to be triggered after the inner tank is damaged and alarm the operator, thereby ensuring process safety. Figure 2 and Figure 3As shown, a conventional liquid leakage detection device generally includes a sensor 01, a sensor seat 02, a fixed welding block 03 and a cover plate 04. The fixed welding block 03 is fixedly connected to the side wall of the outer tank; the sensor seat 02 is fixedly connected to the fixed welding block 03 by screws, and the sensor 01 is fixed on the sensor seat 02; the cover plate 04 is arranged above the sensor 01 and is fixedly connected to the fixed welding block 03 by screws, so as to shield the sensor 01 from above and prevent the cleaning liquid splashed from the inner tank from contacting the sensor 01; and Figure 2 As shown, a lateral opening is formed between the cover plate 04 and the sensor seat 02 , so that when the liquid level inside the outer tank rises to a preset threshold height, the liquid flows from the opening to the sensor 01 and is detected by the sensor 01 .

[0042] However, if Figure 2 As shown, since the existing cover plate 04 is an L-shaped plate, when the cover plate 04 is set above the sensor seat 02, it cannot block the side of the sensor 01, which causes the flushing agent to easily splash onto the sensor 01 during the post-process flushing maintenance of the semiconductor cleaning equipment, causing the sensor 01 to be falsely triggered. Moreover, during the cleaning process, the cleaning liquid inside the inner tank will often evaporate under the action of heating, and the evaporated cleaning liquid vapor will diffuse into the outer tank. Since a good seal cannot be formed between the cover plate 04 and the sensor seat 02, after a long cleaning process, the cleaning liquid vapor will accumulate and condense on the surface of the sensor 01, which will lead to false triggering of the sensor 01 and fail to detect whether the inner tank is damaged in time. In other words, it causes the sensor 01 to malfunction.

[0043] Please refer to Figure 5In order to solve the above technical problems, the present embodiment provides a liquid leakage detection device, which is used to monitor whether the liquid level inside the outer tank of the semiconductor cleaning equipment reaches a preset threshold height. The device includes: a liquid level sensor 1 and a shell 2. Among them, the liquid level sensor 1 is arranged in the inner cavity of the shell 2. The shell 2 is provided with a gas-liquid channel connected to the inner cavity and the outer tank respectively; the gas-liquid channel is used to supply the liquid inside the outer tank to flow into the inner cavity when the liquid level inside the outer tank reaches the preset threshold height; specifically, the positions of the liquid level sensor 1 and the gas-liquid channel relative to the bottom surface of the outer tank should correspond to the above-mentioned preset threshold height, so that the liquid level sensor 1 can detect when the liquid level inside the outer tank reaches the preset threshold height. In some specific embodiments, the aforementioned liquid level sensor 1 adopts, for example, a photoelectric sensor, which can project light outward, so that when there is no liquid around the liquid level sensor 1, the liquid level sensor 1 can receive a light signal diffusely reflected by the inner cavity wall, and the intensity of the light signal is relatively large; and when there is liquid around the liquid level sensor 1, part of the light projected outward will be reflected by the liquid surface mirror, and then the liquid level sensor 1 can only receive a part of the light signal diffusely reflected by the inner cavity wall, and the intensity of the light signal is relatively small, thereby triggering the liquid level sensor 1 to alarm the operator.

[0044] like Figure 5 As shown, the leakage detection device provided in this embodiment also includes an air supply component 3. The air supply component 3 is connected to the inner cavity and is used to transport a barrier gas into the inner cavity so that the air pressure inside the inner cavity reaches a preset barrier pressure, that is, a positive pressure environment relative to the external air pressure is formed around the liquid level sensor 1. Specifically, the preset barrier pressure is greater than the external environmental air pressure, so as to satisfy the formation of a barrier airflow in the gas-liquid channel that can block the external gas from flowing into the inner cavity, so as to block the cleaning liquid vapor in the external environment from flowing into the inner cavity of the shell 2, thereby avoiding the accumulation of the cleaning liquid vapor on the surface of the liquid level sensor 1 and causing condensation, thereby reducing the occurrence of the liquid level sensor 1 being falsely triggered, and ensuring the monitoring accuracy. Moreover, the above-mentioned preset barrier pressure is also less than the pressure of the liquid on the inner cavity when the liquid level in the outer tank reaches the preset threshold height, so that the above-mentioned barrier airflow will not block the liquid inside the outer tank from flowing into the inner cavity, thereby ensuring that the liquid level sensor 1 can detect the situation where the liquid level inside the outer tank reaches the preset threshold height in time.

[0045] Furthermore, in some embodiments, the preset blocking pressure is 50kpa to 200kpa higher than the external environment pressure. Within this pressure range, a blocking airflow sufficient to block the external gas from flowing into the inner cavity can be formed in the gas-liquid channel, and the blocking airflow can be ensured not to block the liquid inside the outer tank from flowing into the inner cavity. Specifically, since the liquid leakage detection device in this embodiment is arranged in the outer tank, and the outer tank is connected to the atmospheric environment, the external environment pressure is the local atmospheric pressure.

[0046] In some embodiments, Figure 6 As shown, the housing 2 includes a base 21 and a cover plate 22. The base 21 is used to carry the liquid level sensor 1; specifically, the liquid level sensor 1 and the base 21 are fixedly connected, for example, by screws. The cover plate 22 is disposed on the base 21 and connected to the base 21; specifically, the cover plate 22 and the base 21 are also fixedly connected, for example, by screws. The surface opposite to the base 21 of the cover plate 22 is used to enclose the inner cavity to protect the liquid level sensor 1, so as to prevent the flushing agent from splashing onto the liquid level sensor 1 when flushing the outer tank during maintenance, and to block the cleaning liquid vapor in the external gas environment together with the barrier airflow during the cleaning process.

[0047] It should be noted that the shape of the cover plate 22 in this embodiment is not limited to Figure 6 The cube shape shown in the figure may also be a hemispherical shape or a flat plate shape; accordingly, the base 21 in this embodiment is not limited to the following shapes. Figure 6 The rectangular flat plate shown may also be in a circular flat plate or a cubic shape; specifically, the shapes of the cover plate 22 and the base 21 can satisfy that the inner cavity formed therebetween can accommodate the liquid level sensor 1, and there is a surplus space around the liquid level sensor 1 for blocking the flow of gas.

[0048] In some embodiments, at least one first through hole 211 is formed in the base 21; the first through hole 211 is used as the gas-liquid passage to connect the inner cavity with the external environment. Specifically, the first through hole 211 can be located on the inner side of the connection between the base 21 and the cover 22.

[0049] Or, in other embodiments, Figure 6 and Figure 7 As shown, at least one first through hole 211 is provided in the base 21, and the first through hole 211 is located at the connection between the base 21 and the cover plate 22; specifically, the upper end of the first through hole 211 is arranged toward the bottom surface of the cover plate 22. A connecting groove 221 is provided on the surface of the cover plate 22 facing the base 21, and the connecting groove 221 corresponds to the inlet position of the first through hole 211; the channel formed by the inner surface of the connecting groove 221 and the surface of the base 21 is connected to the first through hole 211, so as to form a gas-liquid channel together with the first through hole 211. Figure 8 As shown, in this embodiment, the extension direction of the channel surrounded by the connecting groove 221 and the inner surface is parallel to the surface of the base 21, and the extension direction of the first through hole 211 is perpendicular to the surface of the base 21 or inclined at a certain angle to the surface of the base 21. Therefore, there is a bend in the gas-liquid channel formed by the inner surface of the connecting groove 221, the surface of the base 21 and the first through hole 211. In this way, it is more difficult for the gas in the external environment to flow into the inner cavity of the shell 2 through the gas-liquid channel.

[0050] In some embodiments, the number of the communicating grooves 221 is the same as the number of the first through holes 211, and the communicating grooves 221 are arranged in a one-to-one correspondence with the first through holes 211. Figure 7 As shown, the connecting groove 221 can be a rectangular groove body opened on the inner side of the bottom surface of the shell 2; further, the cross-sectional size of the rectangular groove body can range from 0.3mm*0.3mm to 0.6mm*0.6mm. Alternatively, the connecting groove 221 can be a semicircular groove body opened on the inner side of the bottom surface of the shell 2; further, the cross-sectional diameter of the semicircular groove body can range from 0.3mm to 0.6mm. Alternatively, in other embodiments, the connecting groove 221 can also be a continuous annular groove body opened on the inner circumference of the bottom surface of the shell 2.

[0051] In some preferred embodiments, the liquid inlet end of the above-mentioned first through hole 211 can be lower than or flush with the liquid outlet end, that is, the gas-liquid channel is inclined downward or vertically downward, so that the cleaning liquid can flow into the inner cavity in time when it reaches the preset threshold height, so that the liquid level sensor 1 can detect in time that the liquid level inside the outer tank reaches the preset threshold height.

[0052] In some preferred embodiments, the number of the first through holes 211 is 20 to 40, and the diameter of the first through holes 211 is in the range of 0.3 mm to 0.6 mm.

[0053] In some preferred embodiments, the first through hole 211 is arranged around the liquid level sensor 1, and the distance between the first through hole 211 and the liquid level sensor 1 is greater than 4 mm. Specifically, the plurality of first through holes 211 can be evenly distributed around the liquid level sensor 1, so that the barrier gas in the inner cavity can flow out of the inner cavity evenly, thereby making the gas flow field in the inner cavity more uniform.

[0054] As mentioned above, the sensor, sensor seat and cover plate in the conventional liquid leakage detection device need to be fixed on the inner part of the outer tank by a fixed welding block. Figure 1 As shown, the fixed welding block is small in size and is arranged close to the bottom of the outer groove; in addition, the gap between the outer groove and the inner groove is relatively narrow, which makes it difficult for operators to disassemble and assemble the leakage detection device through the gap; and Figure 4 As shown, multiple pipes connected to the inner tank need to pass through the gap between the outer tank and the inner tank, and multiple pipes are usually located at a position higher than the leakage detection device, which will also hinder the operator's disassembly and assembly actions; therefore, the traditional leakage detection device is difficult to remove from the outer tank, and there is a problem of difficult maintenance.

[0055] In order to solve the above technical problems, in some embodiments, Fig. 9As shown, the above-mentioned liquid leakage detection device also includes a mounting assembly 4; the bottom end of the mounting assembly 4 is fixedly connected to the outer shell 2; the mounting assembly 4 is also detachably connected to the upper end of the inner wall of the outer tank, so that the outer shell 2 and the liquid level sensor 1 in the outer shell 2 can be detachably mounted on the bottom of the inner wall of the outer tank; specifically, as Fig.11 As shown, the mounting assembly 4 is connected to the inner wall of the outer tank by screws. In this way, during the repair of the liquid leakage detection device, the mounting assembly 4 can be removed from the inner wall of the outer tank from the upper end of the outer tank, so that the mounting assembly 4 and the housing 2 can be taken out of the outer tank together, thereby repairing the liquid leakage detection device. Fig.10 As shown, the connection between the installation component 4 and the outer tank can be arranged higher than the multiple pipelines to avoid the multiple pipelines from hindering the operator's disassembly and assembly actions.

[0056] In some embodiments, Figure 5 As shown, the air supply assembly 3 includes an air supply pipe 31 and an external air source (not shown in the figure). The air inlet end of the air supply pipe 31 is connected to the external air source, and the air outlet end is connected to the housing 2; specifically, the air outlet end of the air supply pipe 31 is connected to the air inlet at the top of the housing 2 and is sealed therewith. In some preferred embodiments, as shown in FIG. Figure 5 As shown, the air supply pipe 31 is a straight pipe; an air inlet is arranged on the upper side of the straight pipe, and an internal threaded joint is arranged at the air inlet for sealing and fixing an external air source.

[0057] In some embodiments, the liquid leakage detection device also includes a wiring for connecting the liquid level sensor 1 and an external signal source; the wiring is arranged in the air supply pipe 31, and is led out from the wiring hole opened on the air supply pipe 31, so as to protect the wiring from being corroded by the cleaning liquid vapor while providing gas to the outer shell 2. Moreover, when the liquid inside the outer tank rises to a preset threshold height and enters the gas-liquid pipeline, the wiring hole can be used as an outlet of the gas supply pipe 31, that is, when the gas-liquid pipeline is blocked, the gas delivered to the gas supply pipe 31 by the external gas source can be discharged from the wiring hole to ensure that the internal air pressure of the gas supply pipe 31 will not continue to rise due to the inability to exhaust gas, thereby ensuring that the liquid in the outer tank can flow smoothly into the inner cavity, and then ensuring that the liquid level sensor 1 in the inner cavity can promptly detect the situation that the liquid level inside the outer tank reaches the preset threshold height. Specifically, in some preferred embodiments, such as Figure 5 As shown, the top opening of the air supply pipe 31 is used as a wiring hole.

[0058] In some embodiments, the mounting assembly 4 includes an extension rod; one side of the extension rod is arranged to fit the inner wall of the outer groove; the other side of the extension rod is connected and fixed to the air supply pipe 31 arranged parallel to it, and the bottom of the extension rod is connected and fixed to the outer shell 2 to connect the outer shell 2 and the air supply pipe 31 in series thereon.

[0059] As another technical solution, this embodiment also provides a semiconductor cleaning device, which includes an inner tank, an outer tank and the above-mentioned liquid leakage detection device; wherein the inner tank is arranged inside the outer tank and is not connected to the inner wall of the outer tank; the liquid leakage detection device is arranged on the inner side wall of the outer tank. The height of the liquid leakage detection device relative to the bottom surface of the outer tank satisfies the liquid level sensor and the preset threshold height of the liquid level, so that the situation that the liquid level inside the outer tank reaches the preset threshold height can be detected in time.

[0060] In some preferred embodiments, the semiconductor cleaning equipment further includes a plurality of pipelines, one end of each of the plurality of pipelines is connected to the inner tank, and the other end of each of the plurality of pipelines passes through the outer tank and is led out to the outside of the outer tank, that is, the plurality of pipelines are all arranged in the gap between the outer tank and the inner tank. The liquid leakage detection device is detachably connected to the inner side wall of the outer tank, located on one side of the plurality of pipelines, and the connection between the liquid leakage detection device and the outer tank is higher than the plurality of pipelines, so that the operator can disassemble and repair the liquid leakage detection device.

[0061] As described above, the leakage detection device provided in this embodiment includes a shell and a liquid level sensor arranged in the inner cavity of the shell, wherein a gas-liquid channel is provided on the shell, and the gas-liquid channel can be connected with the inner cavity and the outer tank respectively, and is used to supply the liquid in the outer tank to flow into the inner cavity when the liquid level in the outer tank reaches the preset threshold height, so that the liquid level sensor can timely detect that the liquid level in the outer tank reaches the preset threshold height, that is, to realize the monitoring of the liquid level in the outer tank, so as to timely remind the operator to perform maintenance when the inner tank of the semiconductor cleaning equipment is damaged. Moreover, the gas supply component can transport a barrier gas into the inner cavity of the shell to form a barrier gas flow in the gas-liquid channel that can block the external gas from flowing into the inner cavity and will not block the external liquid from flowing into the inner cavity, so as to avoid the accumulation of cleaning liquid vapor on the surface of the liquid level sensor to cause condensation, and ensure that the liquid level sensor can timely detect that the liquid level in the outer tank reaches the preset threshold height.

[0062] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A liquid leakage detection device for semiconductor cleaning equipment, wherein the liquid leakage detection device is arranged between an outer tank and an inner tank of the semiconductor cleaning equipment; characterized in that: The liquid leakage detection device comprises: a liquid level sensor, a housing and an air supply assembly; wherein, The liquid level sensor is arranged in the inner cavity of the housing; The outer shell is provided with gas-liquid channels respectively connected with the inner cavity and the outer tank; the gas-liquid channels are used to allow the liquid in the outer tank to flow into the inner cavity when the liquid level in the outer tank reaches a preset threshold height; The gas supply assembly is connected to the inner cavity, and is used to transport a barrier gas into the inner cavity so that the internal air pressure of the inner cavity reaches a preset barrier pressure; wherein the preset barrier pressure is greater than the external environmental air pressure and less than the pressure on the inner cavity when the liquid level in the outer tank reaches the preset threshold height.

2. The liquid leakage detection device according to claim 1, characterized in that: The preset barrier pressure is 50 kPa to 200 kPa higher than the external environment pressure.

3. The liquid leakage detection device according to claim 1, characterized in that: The housing includes a base and a cover plate; wherein the base is used to carry the liquid level sensor; The cover plate is arranged on the base and connected to the base; The surface of the cover plate opposite to the base is used to enclose the inner cavity.

4. The liquid leakage detection device according to claim 3, characterized in that: At least one first through hole is formed in the base, and the first through hole is used as the gas-liquid passage to connect the inner cavity with the external environment.

5. The liquid leakage detection device according to claim 3, characterized in that: At least one first through hole is formed in the base, and the first through hole is located at the connection between the base and the cover plate; A connecting groove is provided on the surface of the cover plate facing the base, and the connecting groove corresponds to the inlet position of the first through hole; the channel formed by the inner surface of the connecting groove and the surface of the base is connected to the first through hole to form the gas-liquid channel together with the first through hole.

6. The liquid leakage detection device according to claim 4 or 5, characterized in that: The number of the first through holes is 20 to 40, and the diameter of the first through holes is in the range of 0.3 mm to 0.6 mm.

7. The liquid leakage detection device according to claim 4 or 5, characterized in that: The first through hole is arranged around the liquid level sensor, and the distance from the first through hole to the liquid level sensor is greater than 4 mm.

8. The liquid leakage detection device according to claim 1, characterized in that: The liquid leakage detection device also includes a mounting assembly; The bottom end of the mounting assembly is fixedly connected to the housing; the mounting assembly is detachably connected to the upper end of the inner wall of the outer groove.

9. The liquid leakage detection device according to claim 1, characterized in that: The air supply assembly includes an air supply pipe and an external air source; The air inlet end of the air supply pipe is communicated with the external air source, and the air outlet end of the air supply pipe is communicated with the shell.

10. The liquid leakage detection device according to claim 9, characterized in that: The liquid leakage detection device also includes a wiring for connecting the liquid level sensor and an external signal source; the wiring is arranged in the air supply pipe and is led out from a wiring hole opened on the air supply pipe.

11. A semiconductor cleaning device, characterized in that: It comprises an inner groove, an outer groove and a liquid leakage detection device as described in any one of claims 1 to 10; wherein the inner groove is arranged inside the outer groove and is not connected to the inner wall of the outer groove; the liquid leakage detection device is arranged on the inner side wall of the outer groove, and the height of the liquid leakage detection device relative to the bottom surface of the outer groove satisfies that the liquid leakage sensor corresponds to a preset threshold height.

12. The semiconductor cleaning equipment according to claim 11, characterized in that: Also included are a plurality of pipelines, one end of each of the pipelines is connected to the inner tank, and the other end of each of the pipelines passes through the outer tank and is led out to the outside of the outer tank; The liquid leakage detection device is detachably connected to the inner side wall of the outer tank, and the connection between the liquid leakage detection device and the outer tank is higher than the plurality of pipelines.

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